CN109187502A - Postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device - Google Patents
Postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device Download PDFInfo
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- CN109187502A CN109187502A CN201811342680.XA CN201811342680A CN109187502A CN 109187502 A CN109187502 A CN 109187502A CN 201811342680 A CN201811342680 A CN 201811342680A CN 109187502 A CN109187502 A CN 109187502A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Abstract
Postposition light splitting pupil confocal laser LIBS spectrum micro imaging method and device disclosed by the invention, belong to confocal microscopic imaging and light spectrum image-forming field of measuring technique.The present invention is by postposition light splitting pupil confocal laser micro-imaging technique in conjunction with laser induced breakdown spectroscopy Detection Techniques, the imaging of high-space resolution form is carried out to sample using the small focal beam spot of the postposition light splitting pupil confocal microscope handled through super resolution technology, microscopic spectrum detection is carried out to focal beam spot excitation laser induced breakdown spectroscopy using spectrum investigating system, utilizes the high-space resolution and highly sensitive imaging and detection of LIBS spectrographic detection and the complete component information of postposition light splitting pupil confocal detection structure fusion realization sample microcell and morphological parameters.The present invention can provide a completely new effective technical way for the fields material composition such as biomedicine, material science and form imaging detection.
Description
Technical field
The invention belongs to confocal microscopic imaging technologies and spectral imaging technology technical field, and postposition is divided pupil confocal laser
Micro-imaging technique is combined with laser induced breakdown spectroscopy imaging technique, is related to a kind of postposition light splitting pupil confocal laser LIBS light
Micro imaging method and device are composed, is had widely in fields such as biomedicine, material science, physical chemistry, mineral products, minute manufacturings
Application prospect.
Background technique
The intense pulse laser of laser induced breakdown spectroscopy, which focuses on sample surfaces, can make sample ionization, sample can be excited to produce
Raw plasma can obtain the atom and small molecule element group of sample by the spectrum that detection energy of plasma decline gives off
It is a kind of strong sample component Detection Techniques means at information.
But there are problems following prominent for existing spectrographic detection technology:
1) due to being focused using simple laser come desorption ionization sample, thus its that there are still laser focal beam spots is big, visits
Survey the problems such as spatial resolution is not high；
2) long the time required to Raman spectrum imaging, with respect to sample drifting problem often occurs for focal beam spot axial position；
And science is ground in the accurate acquisition of mineral products, " microcell " pattern of space substance and biological sample and component information
Study carefully and produce detection and is all extremely important.In fact, how to detect micro-area composition information with sensitivity is current mine
Produce the important technological problems that the fields such as analysis, biochemistry detection are urgently studied.
Postposition is divided pupil confocal laser technology and is detected using illumination and the non-line structure altogether of detection optical path, is not only significantly mentioned
The high azimuthal resolution and Focus accuracy of optical path, realizes the high-resolution imaging detection of sample topography, and can effectively inhibit
Backscattering interference, improves spectrographic detection signal-to-noise ratio.
Based on this, the present invention proposes that a kind of postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device,
Innovation is: for the first time will be with the postposition of high-space resolution ability light splitting pupil confocal laser microtechnic and laser-induced breakdown light
Spectrum (LIBS) technology blends imaging and detection, it can be achieved that sample microcell high-space resolution and highly sensitive pattern, component.
A kind of postposition light splitting pupil confocal laser LIBS spectrum micro imaging method of the present invention and device can be biomedical, material
Expect that the pattern in the fields such as science, physical chemistry, mineral products, minute manufacturing, component imaging detection provide a completely new effective technology
Approach.
Summary of the invention
The purpose of the invention is to improve the spatial resolving power of light spectrum image-forming, inhibit focal beam spot phase in imaging process
Drift to sample proposes that a kind of postposition is divided pupil confocal laser LIBS spectrum micro imaging method and device, to obtain simultaneously
Obtain measurand micro-raman spectra information and component information.The purpose of the present invention is what is be achieved through the following technical solutions.
Postposition of the invention is divided pupil confocal laser LIBS spectrum micro imaging method, utilizes high-space resolution confocal microscopy
The focal beam spot of system carries out axial fixed-focus and imaging to sample, is divided using laser induced breakdown spectroscopy detection system to postposition
Pupil confocal laser microscopic system focal beam spot desorption ionization sample and the plasma emission spectroscopy generated is detected, then again
Sample microcell high-space resolution and highly sensitive pattern, group are then realized with analysis is compared by the fusion of detection data information
The imaging and detection divided, comprising the following steps:
Step 1: light-source system is collimated light beam by collimation lens collimation, collimated light beam passes through compression focal beam spot system
System is reflected through Amici prism transmission, dichroscope A and is focused on sample by measurement object lens；
Step 2: computer control precise three-dimensional working platform is made to drive sample along measuring surface normal direction in measurement object
Mirror foci nearby moves up and down, and reflects to form Returning beam by dichroscope A through sample reflection light, Returning beam passes through
After crossing light splitting prismatic reflection, through collection pupil, detection object lens, the relaying amplifying lens in postposition pupil, convergence is through after pin hole
It is received by light intensity detector, obtains postposition light splitting pupil confocal laser axial strength curve by light intensity signal processor:
Step 3: can be accurately positioned sample point axial direction using postposition light splitting pupil confocal laser axial strength curve
Elevation information；
Step 4: computer is accurate according to " extreme point " position control of postposition light splitting pupil confocal laser axial strength curve
Three-dimensional working platform drives sample to move along measuring surface normal direction, and the focal beam spot for measuring object lens is made to focus on sample
On；
Step 5: changing collimated light beam light illumination mode, the microcell desorption ionization of sample is excited to generate plasma plume；
Step 6: using the LIBS spectral detector of LIBS spectrum investigating system to being transmitted through dichroscope A and LIBS coupling
It closes the laser induced breakdown spectroscopy signal beams that lens are collected to be detected, measures the sample element group in corresponding focal beam spot region
At information；
Step 7: the laser focal beam spot position that computer measures postposition light splitting pupil light splitting pupil confocal laser detection system
The LIBS spectral information that the laser that height of specimen information, LIBS spectrum investigating system detect focuses microcell carries out fusion treatment, after
And obtain the height and spectral information of focal beam spot microcell；
Step 8: computer control precise three-dimensional working platform makes to measure the next to be measured of object focal point alignment sample
Then region is operated by step 2~step 7, obtain the height and spectral information of next focal zone to be measured；
Measured Step 9: repeating step 8 until all tested points on sample, then using computer into
Row processing obtains sample topographical information and complete component information.
Postposition of the invention is divided pupil confocal laser LIBS spectrum micro imaging method, makes collimated light beam described in step 1
It is shaped as annular beam, which focuses on detected sample through Amici prism transmission, dichroscope A reflection, measurement object lens again
Desorption ionization generates plasma plume on product.
Postposition of the invention is divided pupil confocal laser LIBS spectrum micro imaging method, and the pupil is D type postposition pupil
Or round postposition pupil；Collecting pupil is that D type collects pupil or circular collection pupil；It is total that D type postposition pupil and D type collect pupil
With use；Round postposition pupil and circular collection pupil are used in conjunction with.
Postposition of the invention is divided pupil confocal laser LIBS spectrum micro imaging method, and compression focal beam spot system generates
The vector optical generator and iris filter of vector beam substitute.
Postposition of the invention is divided pupil confocal laser LIBS spectrum microscopic imaging device, the light source including generating excitation beam
System, Amici prism, the dichroscope A being sequentially placed along light source exit direction, survey identical with dichroscope A reflection direction
Object lens, precision three-dimensional workbench are measured, the LIBS spectral measurement system with dichroscope A reflection opposite direction, Amici prism reflection
The postposition light splitting pupil confocal laser measuring system and computer processing system in direction.
Postposition of the invention is divided pupil confocal laser LIBS spectrum microscopic imaging device, and wherein postposition is divided pupil confocal laser
Detecting module, optional following two mode are realized:
Mode one: postposition light splitting pupil confocal laser detecting module is made of relaying amplifying lens, pin hole and light intensity detector,
Wherein pin hole is located in the image planes of relaying amplifying lens.
Mode two: postposition light splitting pupil confocal laser detecting module is made of relaying amplifying lens and ccd detector, wherein visiting
Survey the image plane center that region is located at ccd detector.
Postposition of the invention is divided pupil confocal laser LIBS spectrum microscopic imaging device, light-source system by pulse laser,
Collector lens, collector lens focal point Optic transmission fiber substitution simultaneously, in laser focusing system introduce outgoing beam attenuator,
Detection beam attenuator is introduced in postposition light splitting pupil confocal laser detection system.It is declined by outgoing beam attenuator and detection light beam
Subtract device and constitute Light intensity regulating system, for the spot intensity of decay focal beam spot and light intensity detector detection, to adapt to sample table
Light intensity demand when face positions.
The utility model has the advantages that
1) " extreme point " of pupil confocal laser axial strength curve and the focus of high-acruracy survey object lens are divided by postposition
This characteristic is accurately corresponded to, accurate fixed-focus is realized to sample, is able to suppress existing spectrometer because in long-time light spectrum image-forming
Drifting problem of the focal beam spot with respect to sample；
2) detection for combining laser induced breakdown spectroscopy, realizes laser induced breakdown spectroscopy component imaging detection and postposition point
The mutual supplement with each other's advantages and structure function fusion of the pattern detection of pupil confocal technology, can obtain micro-raman spectra component information simultaneously；
3) the preparatory fixed-focus of sample is carried out using " extreme point " of postposition light splitting pupil confocal laser axial strength curve, makes minimum
Focal beam spot focuses on sample surfaces, can be realized sample microcell high-space resolution spectrographic detection and microcell micro-imaging, effectively
Ground plays the potential differentiated between postposition light splitting pupil confocal laser system altitude；
4) using compression focal beam spot technology, it can be improved the spatial resolving power of laser spectrum analyser；
5) signal is obtained due to the method using division focal spot, focal plane can be detected in image detection system by changing
The parameter of set tiny area is gone up to match the reflectivity of different samples, so as to extend its application field；It can also
It is enough that the matching that the object lens of the measurement to different NA values can be realized only is handled by computer system software, without again to system
Any hardware adjustment is carried out, the versatility of instrument is advantageously implemented.
Detailed description of the invention
Fig. 1 is that postposition of the present invention is divided pupil confocal laser LIBS spectrum micro imaging method schematic diagram；
Fig. 2 is that the postposition light splitting pupil confocal laser LIBS spectrum micro imaging method of the embodiment of the present invention 2 shows with device
It is intended to；
Fig. 3 is that the postposition light splitting pupil confocal laser LIBS spectrum micro imaging method of the embodiment of the present invention 3 shows with device
It is intended to；
Fig. 4 is that postposition is divided pupil confocal laser axial strength curve；
Wherein: 1- light-source system, 2- collimation lens, 3- collimated light beam, 4- compression focal beam spot system, 5- Amici prism,
6- dichroscope A, 7- measure object lens, 8- sample, 9- plasma plume, 10- precision three-dimensional workbench, 11-D type postposition pupil,
12-D type collects pupil, 13- detection object lens, 14- postposition light splitting pupil confocal laser detection system, 15- and relays amplifying lens, 16-
Pin hole, 17- light intensity detector, 18- amplification Airy, 19- search coverage, 20- postposition light splitting pupil confocal laser axial strength are bent
Line, 21-LIBS spectral signal light beam, 22- decaying light beam, 23- Returning beam, 24- postposition are divided pupil measuring beam, 25-LIBS
Spectrographic detection module, 26-LIBS coupled lens, 27-LIBS spectral detector, 28- optical fiber incidence end, 29- fiber exit end,
30- computer, 31- vector optical generator, 32- iris filter, 33- circle postposition pupil, 34- circular collection pupil, 35-
Ccd detector, 36- pulse laser, 37- collector lens, 38- Optic transmission fiber, 39- outgoing beam attenuator, 40- detect light beam
Attenuator.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
Embodiment 1
As shown in Figure 1, placing D type postposition on detection 13 pupil plane of object lens collects pupil 11, light-source system 1 selects point light
Source, point light source outgoing excitation beam by collimation lens 2, compression focal beam spot system 4, Amici prism 5, dichroscope A6 with
It after measuring object lens 7, is focused on sample 8, computer 30 controls precision three-dimensional workbench 10 and sample 8 is driven to measure
7 near focal point of object lens moves up and down, and the light through sample reflection passes through D type by dichroscope A6 reflection, the reflection of Amici prism 5
D type in postposition pupil 11 is collected pupil, detection object lens 13 and relaying amplifying lens 14, convergence and is visited after penetrating pin hole 16 by light intensity
It surveys device 17 to receive, obtains postposition light splitting pupil confocal laser axial strength curve 20 by light intensity signal processor；
It can be accurately positioned the axial height of sample 8 using postposition light splitting pupil confocal laser axial strength curve 20
Information；
Change point light source operating mode, improve illumination intensity, the microcell desorption ionization of excitation sample 8 generates plasma
Body feathers 9；
It is transmitted through dichroscope A6 using 27 Duis of LIBS spectral detector of LIBS spectrum investigating system 25 and LIBS is coupled
The laser induced breakdown spectroscopy signal beams 21 that lens 26 are collected are detected, and 8 yuan of sample of corresponding focal beam spot region are measured
Element composition information；
The laser that postposition light splitting pupil confocal laser detection system measures is focused micro-raman spectra information, LIBS light by computer 30
The laser induced breakdown spectroscopy information progress fusion treatment that 25 exploring laser light of detection system focuses microcell is composed, it is micro- to obtain focal beam spot
The height and spectral information in area；
Computer 30, which controls precision three-dimensional workbench 10, to be made to measure next region to be measured that object lens 7 are directed at sample 8,
Then the height and spectral information of next focal zone to be measured are obtained；
Until all tested points on sample 8 are measured, then computer 30 is utilized to carry out data fusion and figure
As reconstruction processing, sample topographical information and complete component information can be obtained.
Embodiment 2
As shown in Fig. 2, compressing focal beam spot system 4 in postposition light splitting pupil confocal laser LIBS spectrum microscopic imaging device
It is substituted by vector beam generating system 31, iris filter 32, the D type in D type postposition pupil 11 collects pupil 12 can be by circle
Circular collection pupil 34 in postposition pupil 33 substitutes, and the pin hole 16 and light intensity that postposition is divided in pupil confocal laser detecting module are visited
Surveying device 17 can be replaced by ccd detector 35, and wherein search coverage is located at the image plane center of ccd detector 35.
Remaining imaging method and process are same as Example 1.
Embodiment 2
As shown in figure 3, point light source is by pulse laser in postposition light splitting pupil confocal laser LIBS spectrum microscopic imaging device
36, the substitution of Optic transmission fiber 38 of collector lens 37,37 focal point of collector lens, the light beam that laser 36 is emitted pass through collector lens
37 assemble, and the optical fiber incidence end 28 by being located at 37 focal point of collector lens receives, and are gone out after the transmission of Optic transmission fiber 38 by optical fiber
It penetrates 29 sending of end and forms point light source；Meanwhile outgoing beam attenuator 39 is introduced in laser focusing system, swash in postposition light splitting pupil
Detection beam attenuator 40 is introduced in light confocal detection system.It is made of outgoing beam attenuator 39 and detection beam attenuator 40
Light intensity regulating system, for the spot intensity that decay focal beam spot and light intensity detector 17 detect, to adapt to the positioning of 8 surface of sample
When light intensity demand.
Remaining imaging method and process are same as Example 1.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention.Protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (8)
1. postposition is divided pupil confocal laser LIBS spectrum micro imaging method, it is characterised in that: confocal aobvious using high-space resolution
The focal beam spot of micro-system carries out axial fixed-focus and imaging to sample (8), utilizes laser induced breakdown spectroscopy detection system
The plasma emissioning light that postposition light splitting pupil confocal laser microscopic system focal beam spot desorption ionization sample (8) is generated
Spectrum is detected, and then then realizes sample (8) microcell high-altitude with analysis is compared by the fusion of detection data information again
Between differentiate and highly sensitive pattern, component imaging and detection, comprising the following steps:
Step 1: light-source system (1) is collimated light beam (3) by collimation lens (2) collimation, collimated light beam (3) is poly- by compression
Burnt spot system (4) reflects through Amici prism transmission (5), dichroscope A (6) and focuses on sample by measurement object lens (7)
(8) on；
Step 2: computer (30) control precision three-dimensional workbench (10) is made to drive sample (8) along measuring surface normal direction
It is moved up and down in measurement object lens (7) near focal point, reflects to form and return by dichroscope A (6) through sample (8) reflection light
Light echo beam (23), Returning beam (23) are after Amici prism (5) are reflected, through collection pupil, the detection object lens in postposition pupil
(13), amplifying lens (15) are relayed, convergence is received through after pin hole (16) by light intensity detector (17), is handled by light intensity signal
Device obtains postposition light splitting pupil confocal laser axial strength curve (20):
Step 3: can be accurately positioned sample (8) point using postposition light splitting pupil confocal laser axial strength curve (20)
Axial height information；
Step 4: " extreme point " position control of computer (30) according to postposition light splitting pupil confocal laser axial strength curve (20)
Precision three-dimensional workbench (10) drives sample (8) to move along measuring surface normal direction, makes the focal beam spot for measuring object lens (7)
It focuses on sample (8)；
Step 5: changing collimated light beam (3) light illumination mode, the microcell desorption ionization of excitation sample (8) generates plasma
Plumage (9)；
Step 6: using LIBS spectrum investigating system (25) LIBS spectral detector (27) to through dichroscope A (6) transmission and
The laser induced breakdown spectroscopy signal beams (21) that LIBS coupled lens (26) are collected are detected, and corresponding focal beam spot area is measured
Sample (8) element in domain forms information；
Step 7: the laser focal beam spot that computer (30) measures postposition light splitting pupil light splitting pupil confocal laser detection system (14)
The LIBS spectral information that the laser that position height of specimen information, LIBS spectrum investigating system (25) detect focuses microcell is merged
Processing, then obtains the height and spectral information of focal beam spot microcell；
Step 8: computer (30) control precision three-dimensional workbench (10) makes to measure object lens (7) focus alignment sample (8)
Next region to be measured, is then operated by step 2~step 7, and the height and light of next focal zone to be measured are obtained
Spectrum information；
Step 9: repetition step 8 is measured until all tested points on sample (8), then computer (30) are utilized
It is handled and obtains sample (8) topographical information and complete component information.
2. postposition according to claim 1 is divided pupil confocal laser LIBS spectrum micro imaging method, it is characterised in that: make
The collimated light beam (3) is shaped as annular beam, and the annular beam is anti-through Amici prism (5) transmission, dichroscope A (6) again
It penetrates, measure object lens (7) and focus on sample (8) desorption ionization and generate plasma plume (9).
3. postposition according to claim 1 is divided pupil confocal laser LIBS spectrum micro imaging method, it is characterised in that: institute
Stating postposition pupil is D type postposition pupil (11) or round postposition pupil (33)；Collecting pupil is that D type collects pupil (12) or round
It collects pupil (34)；D type postposition pupil (11) and D type are collected pupil (12) and are used in conjunction with；Round postposition pupil (33) and circle
Pupil (34) are collected to be used in conjunction with.
4. postposition according to claim 1 is divided pupil confocal laser LIBS spectrum micro imaging method, it is characterised in that: pressure
Polycondensation coke spot system (4) vector optical generator (31) and iris filter (32) substitution for generating vector beam.
5. postposition is divided pupil confocal laser LIBS spectrum microscopic imaging device, it is characterised in that: the light including generating excitation beam
Source system (1), Amici prism (5), the dichroscope A (6) being sequentially placed along light source exit direction, it is anti-with dichroscope A (6)
The identical measurement object lens (7) in direction, precision three-dimensional workbench (10) are penetrated, the LIBS light with dichroscope A (6) reflection opposite direction
Spectral measurement system (25), postposition light splitting pupil confocal laser measuring system (14) of Amici prism (5) reflection direction and computer
(30) processing system.
6. postposition according to claim 5 is divided pupil confocal laser LIBS spectrum microscopic imaging device, it is characterised in that: after
Light splitting pupil confocal laser detecting module (14) is set to be made of relaying amplifying lens (15), pin hole (16) and light intensity detector (17),
Wherein pin hole (16) is located in the image planes of relaying amplifying lens (15).
7. postposition according to claim 5 is divided pupil confocal laser LIBS spectrum microscopic imaging device, it is characterised in that: after
It sets light splitting pupil confocal laser detection system (14) to be made of relaying amplifying lens (15) and ccd detector (35), wherein detecting area
Domain is located at the image plane center of ccd detector (35).
8. postposition according to claim 5 is divided pupil confocal laser LIBS spectrum microscopic imaging device, it is characterised in that: light
Source system (1) is substituted same by the Optic transmission fiber (38) of pulse laser (36), collector lens (37), collector lens (37) focal point
When, outgoing beam attenuator (39) are introduced in laser focusing system, are introduced in postposition light splitting pupil confocal laser detection system
It detects beam attenuator (40)；Light intensity regulating system is constituted by outgoing beam attenuator (39) and detection beam attenuator (40),
For the spot intensity of decay focal beam spot and light intensity detector (17) detection, to adapt to the light intensity when positioning of sample (8) surface
Strength demand.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110940659A (en) * | 2019-12-09 | 2020-03-31 | 北京理工大学 | Femtosecond laser induced breakdown spectrum generation and collection system based on space-time shaping |
| CN114235696A (en) * | 2021-12-17 | 2022-03-25 | 清华大学 | Material micro-area optical property measuring device |
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| CN104677830A (en) * | 2015-03-03 | 2015-06-03 | 北京理工大学 | Spectrophotometric pupil confocal-photoacoustic microimaging device and method |
| CN105067569A (en) * | 2015-07-17 | 2015-11-18 | 北京理工大学 | Spectrophotometric pupil laser confocal LIBS (laser-induced breakdown spectroscopy), Raman spectrum and mass spectrum imaging method and device |
| CN106092891A (en) * | 2016-08-11 | 2016-11-09 | 广东工业大学 | A kind of confocal three-dimensional spectrum micro imaging method and device |
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| JPH05224127A (en) * | 1991-03-27 | 1993-09-03 | Fuji Photo Film Co Ltd | Confocal scanning type differential interfere microscope |
| CN103439254A (en) * | 2013-09-06 | 2013-12-11 | 北京理工大学 | Spectroscopic pupil laser confocal Raman spectrum testing method and device |
| CN104677830A (en) * | 2015-03-03 | 2015-06-03 | 北京理工大学 | Spectrophotometric pupil confocal-photoacoustic microimaging device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110940659A (en) * | 2019-12-09 | 2020-03-31 | 北京理工大学 | Femtosecond laser induced breakdown spectrum generation and collection system based on space-time shaping |
| CN114235696A (en) * | 2021-12-17 | 2022-03-25 | 清华大学 | Material micro-area optical property measuring device |
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Application publication date: 20190111 |