CN114414493A - Enhanced photoacoustic spectroscopy multi-component gas sensor device - Google Patents

Enhanced photoacoustic spectroscopy multi-component gas sensor device Download PDF

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Publication number
CN114414493A
CN114414493A CN202210097762.2A CN202210097762A CN114414493A CN 114414493 A CN114414493 A CN 114414493A CN 202210097762 A CN202210097762 A CN 202210097762A CN 114414493 A CN114414493 A CN 114414493A
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CN
China
Prior art keywords
photoacoustic
buffer cavity
cavity
resonant cavity
gas sensor
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Pending
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CN202210097762.2A
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Chinese (zh)
Inventor
张彦兵
赵志伟
安国庆
杜振斌
熊海军
张彦华
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Hebei Weixun Electric Power Automation Equipment Co ltd
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Hebei Weixun Electric Power Automation Equipment Co ltd
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Priority to CN202210097762.2A priority Critical patent/CN114414493A/en
Publication of CN114414493A publication Critical patent/CN114414493A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases

Abstract

The invention discloses an enhanced photoacoustic spectroscopy multi-component gas sensor device which comprises a photoacoustic cell, a pulse laser, a detector, an amplifier, a demodulator, an oscilloscope and a computer, wherein the photoacoustic cell is communicated with the pulse laser through an optical fiber circuit, the optical fiber circuit is provided with a spectroscope and an energy meter, the photoacoustic cell is cylindrical and comprises a first buffer cavity and a second buffer cavity, a resonant cavity is arranged between the first buffer cavity and the second buffer cavity, the two ends of the resonant cavity are cup-shaped with gradually increased diameters, the middle part of the resonant cavity is provided with a microphone, and an entrance of the resonant cavity is provided with a photoacoustic filter. The enhanced photoacoustic spectroscopy multi-component gas sensor device adopting the structure performs qualitative and quantitative analysis on various gas components through the photoacoustic cell structure with higher amplification coefficient.

Description

Enhanced photoacoustic spectroscopy multi-component gas sensor device
Technical Field
The invention relates to the technical field of photoacoustic spectroscopy trace, in particular to an enhanced photoacoustic spectroscopy multi-component gas sensor device.
Background
The photoacoustic spectroscopy technology is a gas detection technology based on the principle that gas has selective absorption of infrared light of different wavelengths. According to the technology, the gas is mainly utilized to absorb the light and then generate thermal expansion, and further the input light is periodically modulated, so that the gas expansion is periodic to initiate sound waves, and a microphone is used for detecting the sound waves to realize gas sensing. However, the photoacoustic spectroscopy is very difficult to detect photoacoustic signals because the photoacoustic effect is very weak, and the application cost of the photoacoustic spectroscopy is high, so that the application of the photoacoustic spectroscopy is limited. The photoacoustic air chamber with the resonance type structure can generate resonance by enabling the photoacoustic signals to form standing waves, so that the photoacoustic signals are amplified, the photoacoustic air chamber is mainly applied to a cylindrical structure at present, the photoacoustic air chamber has a first-order longitudinal resonance effect, and is simple in structure and low in processing and manufacturing cost. However, the cylindrical photoacoustic cell still has a certain upper limit on the amplification of acoustic signals, so a photoacoustic spectroscopy gas detection structure for further amplifying acoustic signals is needed, and an efficient photoacoustic spectroscopy detection apparatus capable of detecting a plurality of gases is also urgently needed.
Disclosure of Invention
The invention aims to provide an enhanced photoacoustic spectroscopy multi-component gas sensor device which can be used for qualitatively and quantitatively analyzing a plurality of gas components through a photoacoustic cell structure with a higher amplification factor.
In order to achieve the above object, the present invention provides an enhanced photoacoustic spectroscopy multi-component gas sensor device, which comprises a photoacoustic cell, a pulse laser, a detector, an amplifier, a demodulator, an oscilloscope, and a computer, wherein the photoacoustic cell is communicated with the pulse laser through an optical fiber line, the optical fiber line is provided with the spectrometer and an energy meter, the photoacoustic cell is cylindrical, the photoacoustic cell comprises a first buffer chamber and a second buffer chamber, a resonant cavity is arranged between the first buffer chamber and the second buffer chamber, two ends of the resonant cavity are cup-shaped with gradually increasing diameters, the middle of the resonant cavity is provided with a microphone, an acousto-optic filter is arranged at an inlet of the resonant cavity, the side surface of the first buffer chamber is provided with an entrance window, the side surface of the second buffer chamber is provided with an exit window, and the top end of the first buffer chamber is provided with an air inlet, still be provided with pressure sensor on the inner wall of first cushion chamber, the top of second cushion chamber is provided with the gas outlet, still be provided with temperature sensor on the inner wall of second cushion chamber.
Preferably, the entrance window and the exit window are infrared-transmitting window pieces, and the infrared-transmitting window pieces are arranged at the Brewster angle.
Preferably, the detector is arranged on one side of the photoacoustic cell and faces the exit window, the detector is connected with the oscilloscope, the microphone, the demodulator and the oscilloscope are sequentially connected, and the oscilloscope, the pulse laser, the temperature sensor and the pressure sensor are all connected with a computer.
Therefore, the enhanced photoacoustic spectroscopy multi-component gas sensor device adopting the structure transmits pulse laser with certain frequency through the pulse laser, gas to be detected is filled into the photoacoustic cell and flows slowly in the resonant cavity, the resonant cavity adopts a cup-shaped structure with diameters gradually increased at two ends, the resonant performance is enhanced, and the temperature sensor and the pressure sensor are used for monitoring the environmental conditions in the buffer cavity to complete quantitative and qualitative analysis of various gas components.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
FIG. 1 is a schematic diagram of an embodiment of an enhanced photoacoustic spectroscopy multi-component gas sensor apparatus according to the present invention;
fig. 2 is a schematic diagram of the internal structure of the photoacoustic cell according to the embodiment of the present invention.
Reference numerals
1. A photoacoustic cell; 11. a first buffer chamber; 12. a second buffer chamber; 13. an air inlet; 14. an air outlet; 15. a resonant cavity; 16. a microphone; 17. an entrance window; 18. an exit window; 19. an acousto-optic filter; 2. a pressure sensor; 3. a temperature sensor.
Detailed Description
The technical solution of the present invention is further illustrated by the accompanying drawings and examples.
Examples
As shown in the figure, the enhanced photoacoustic spectroscopy multi-component gas sensor device comprises a photoacoustic cell 1, a pulse laser, a detector, an amplifier, a demodulator, an oscilloscope and a computer, wherein the photoacoustic cell 1 is communicated with the pulse laser through an optical fiber line, the optical fiber line is provided with an optical splitter and an energy meter, the pulsed laser emitted by the pulse laser can be split and the energy of the pulsed laser can be monitored, and the specific gas component can be analyzed by controlling the pulsed laser.
The photoacoustic cell 1 is cylindrical, and the photoacoustic cell 1 includes first buffer chamber 11 and second buffer chamber 12, and the side of first buffer chamber 11 is provided with incident window 17, and the side of second buffer chamber 12 is provided with exit window 18, and incident window 17 and exit window 18 are infrared window piece that passes through, and infrared window piece that passes through is the setting of brewster's angle. The detector is arranged at one side of the photoacoustic cell 1 and towards the exit window 18. Pulse laser from a pulse laser enters from an entrance window 17 and then penetrates out from an exit window 18, a detector is connected with an oscilloscope, the detector receives 10% of energy of the pulse laser and feeds back through the oscilloscope to form a negative feedback closed loop, so that the light output power of the pulse laser is kept stable, and the influence of laser scattering and reflection on the photoacoustic effect of gas is avoided.
The photoacoustic cell 1 is also made of aluminum alloy material with relatively high thermal diffusivity so as to reduce possible interference signals. The photoacoustic cell 1 has a housing of sufficient thickness, about 10mm, to provide good acoustic shielding and insulation. The inner surface of the cell 1 is smooth and is achieved by a polishing process to avoid excessive attenuation of the acoustic signal before transmission to the microphone 16.
The top end of the first buffer cavity 11 is provided with an air inlet 13, the top end of the second buffer cavity 12 is provided with an air outlet 14, the inner wall of the first buffer cavity 11 is further provided with a pressure sensor 2, and the inner wall of the second buffer cavity 12 is further provided with a temperature sensor 3. The infrared absorption characteristic of gas is the theoretical basis for analyzing gas by using infrared optical technology, and the photoacoustic spectrum is mainly used for qualitatively and quantitatively analyzing gas according to the shape, position and intensity of gas molecular absorption spectral lines. The main influencing factors for the gas during the measurement are the pressure and the temperature. In order to avoid gas leakage caused by poor air tightness of the photoacoustic cell 1, the gas slowly flows through the photoacoustic cell 1 by adopting a flowing gas method, the pressure in the resonant cavity 15 is stabilized at 0.1MPa, the temperature is controlled at 26 ℃, and the absorption coefficient of the gas is kept to be maximum.
A resonant cavity 15 is arranged between the first buffer chamber and the second buffer chamber, a microphone 16 is arranged in the middle of the resonant cavity 15, two ends of the resonant cavity 15 are cup-shaped with gradually increasing diameters, and an acousto-optic filter 19 is arranged at the inlet of the resonant cavity 15. The existing resonant cavity 15 is generally in a cylindrical shape with uniform diameter, the amplification factor of sound waves is limited, the resonant cavity 15 with cup-shaped two ends is adopted, and the length of the resonant cavity 15 is enlarged, so that the sound waves can be amplified better. The acousto-optic filter 19 is capable of filtering a specified noise or a certain type of sound wave so that the microphone 16 receives only sound waves of a certain wavelength, thereby realizing a differential analysis of gas components. After entering from the gas inlet 13, the gas to be measured slowly flows into the first buffer cavity 11, the resonant cavity 15 and the second buffer cavity 12, and flows out from the gas outlet 14. When the gas passes through the resonant cavity 15, the gas absorbs energy under the action of the pulse laser and generates sound waves, the sound wave signals are received by the microphone 16, the demodulator and the oscilloscope are sequentially connected, the microphone 16 converts the sound wave signals into voltage signals, and the demodulator smoothes the sound wave voltage signals and displays the voltage signals by the oscilloscope. The oscilloscope, the pulse laser, the temperature sensor 3 and the pressure sensor 2 are all connected with a computer, and control, data recording and analysis are completed through the computer.
Therefore, the enhanced photoacoustic spectroscopy multi-component gas sensor device adopting the structure transmits pulse laser with a certain frequency through the pulse laser, gas to be detected is filled into the photoacoustic cell 1 and flows slowly in the resonant cavity 15, the resonant cavity 15 adopts a cup-shaped structure with diameters gradually increased at two ends, resonance performance is enhanced, and the environmental conditions in the buffer cavity are monitored through the temperature sensor 3 and the pressure sensor 2, so that quantitative and qualitative analysis of various gas components is completed.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the invention without departing from the spirit and scope of the invention.

Claims (3)

1. An enhanced photoacoustic spectroscopy multi-component gas sensor apparatus, comprising: the photoacoustic cell is communicated with the pulse laser through an optical fiber circuit, a beam splitter and an energy meter are arranged on the optical fiber circuit, the photoacoustic cell is cylindrical and comprises a first buffer cavity and a second buffer cavity, a resonant cavity is arranged between the first buffer cavity and the second buffer cavity, the two ends of the resonant cavity are cup-shaped with gradually increasing diameters, a microphone is arranged in the middle of the resonant cavity, an acousto-optic filter is arranged at the inlet of the resonant cavity, an incident window is arranged on the side surface of the first buffer cavity, an exit window is arranged on the side surface of the second buffer cavity, an air inlet is arranged at the top end of the first buffer cavity, a pressure sensor is further arranged on the inner wall of the first buffer cavity, and an air outlet is arranged at the top end of the second buffer cavity, and a temperature sensor is also arranged on the inner wall of the second buffer cavity.
2. An enhanced photoacoustic spectroscopy multi-component gas sensor apparatus according to claim 1, wherein: the entrance window and the exit window are infrared-transmitting window sheets which are arranged at Brewster angles.
3. An enhanced photoacoustic spectroscopy multi-component gas sensor apparatus according to claim 1, wherein: the detector is arranged on one side of the photoacoustic cell and faces the exit window, the detector is connected with the oscilloscope, the microphone, the demodulator and the oscilloscope are sequentially connected, and the oscilloscope, the pulse laser, the temperature sensor and the pressure sensor are all connected with a computer.
CN202210097762.2A 2022-01-27 2022-01-27 Enhanced photoacoustic spectroscopy multi-component gas sensor device Pending CN114414493A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115586151A (en) * 2022-09-28 2023-01-10 国网湖北省电力有限公司电力科学研究院 SF6 decomposition product on-line monitoring device based on laser photoacoustic spectroscopy technology
CN115656039A (en) * 2022-10-11 2023-01-31 国网湖北省电力有限公司电力科学研究院 Anti-interference SF6 gas decomposition product detection device

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CN101949821A (en) * 2010-08-12 2011-01-19 重庆大学 Longitudinal resonant photoacoustic pool for photoacoustic spectrometry monitoring of gases
CN110095413A (en) * 2019-05-21 2019-08-06 安徽理工大学 A kind of modular construction photoacoustic cell suitable for Laser Photoacoustic Spectroscopy detection
CN114689517A (en) * 2022-05-05 2022-07-01 中国南方电网有限责任公司超高压输电公司检修试验中心 Horn-shaped photoacoustic cell for gas photoacoustic spectrum detection

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Publication number Priority date Publication date Assignee Title
CN101813621A (en) * 2009-02-19 2010-08-25 中国科学院安徽光学精密机械研究所 Quartz tuning fork strengthened photoacoustic spectroscopy gas sensor based on acoustic resonator
CN101949821A (en) * 2010-08-12 2011-01-19 重庆大学 Longitudinal resonant photoacoustic pool for photoacoustic spectrometry monitoring of gases
CN110095413A (en) * 2019-05-21 2019-08-06 安徽理工大学 A kind of modular construction photoacoustic cell suitable for Laser Photoacoustic Spectroscopy detection
CN114689517A (en) * 2022-05-05 2022-07-01 中国南方电网有限责任公司超高压输电公司检修试验中心 Horn-shaped photoacoustic cell for gas photoacoustic spectrum detection

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115586151A (en) * 2022-09-28 2023-01-10 国网湖北省电力有限公司电力科学研究院 SF6 decomposition product on-line monitoring device based on laser photoacoustic spectroscopy technology
CN115656039A (en) * 2022-10-11 2023-01-31 国网湖北省电力有限公司电力科学研究院 Anti-interference SF6 gas decomposition product detection device

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Application publication date: 20220429