CN112924388B - Orthogonal double-channel acoustic resonance device - Google Patents

Orthogonal double-channel acoustic resonance device Download PDF

Info

Publication number
CN112924388B
CN112924388B CN202110087822.8A CN202110087822A CN112924388B CN 112924388 B CN112924388 B CN 112924388B CN 202110087822 A CN202110087822 A CN 202110087822A CN 112924388 B CN112924388 B CN 112924388B
Authority
CN
China
Prior art keywords
resonant cavity
buffer chamber
acoustic
cavity
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110087822.8A
Other languages
Chinese (zh)
Other versions
CN112924388A (en
Inventor
朱文越
陈杰
刘强
钱仙妹
李学彬
郑健捷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Institutes of Physical Science of CAS
Original Assignee
Hefei Institutes of Physical Science of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hefei Institutes of Physical Science of CAS filed Critical Hefei Institutes of Physical Science of CAS
Priority to CN202110087822.8A priority Critical patent/CN112924388B/en
Publication of CN112924388A publication Critical patent/CN112924388A/en
Application granted granted Critical
Publication of CN112924388B publication Critical patent/CN112924388B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • G01N2021/1704Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/391Intracavity sample

Landscapes

  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The utility model provides an orthogonal binary channels acoustic resonance device, resonance device includes the square, and first side and second side are the adjacent side of square, be provided with the first chamber unit that passes first side and its opposite face on the square, pass the second chamber unit of second side and its opposite face, first chamber unit includes first resonant cavity and symmetrical coaxial first buffer chamber and the second buffer chamber that set up at first resonant cavity both ends, the second chamber unit includes second resonant cavity and symmetrical coaxial third buffer chamber and the fourth buffer chamber that set up at resonant cavity both ends, the intersection zone that first resonant cavity and second resonant cavity center formed is provided with the acoustic pipe of perpendicular to two resonant cavity constitution planes, be provided with acoustic sensor on the other end of acoustic pipe. The invention realizes the double-channel synchronous measurement, simultaneously provides multiplied detection sensitivity, and increases the sampling flow of the measurement system, thereby greatly expanding the applicable range.

Description

Orthogonal double-channel acoustic resonance device
Technical Field
The invention relates to the technical field of atmospheric environmental pollutant monitoring, in particular to an orthogonal double-channel acoustic resonance device.
Background
Photoacoustic spectroscopy is a spectroscopic technique based on the photoacoustic effect, the basic principle being that sample particles absorb periodic light energy to generate weak pressure waves, i.e. acoustic waves. In photoacoustic spectroscopy, weak acoustic signals of the acoustic resonant cavity are usually utilized for amplification, so that the detection sensitivity and detection limit can be effectively improved through good structural design of the acoustic resonant cavity. Such as a three-channel acoustic resonant cavity photoacoustic spectrum sensing device announced in 2017, 6 and 12 of Chinese patent No. 104697933B. The invention adopts three mutually parallel acoustic resonant cavities as absorption channels of three different light absorption components, three light sources generate acoustic signals through the acoustic resonant cavities, and the acoustic signals are transmitted to a microphone for detection through three acoustic guide pipes connected to the middle points of the acoustic resonant cavities. Although the three resonant cavities can realize multi-wavelength multi-component trace gas absorption detection, the detection sensitivity of a single component and a single wavelength is not improved. With the development of the field of atmospheric detection, in particular the detection of weakly absorbing components.
Disclosure of Invention
In order to further improve the detection sensitivity and the detection limit, the invention provides an orthogonal two-channel acoustic resonance device, which comprises the following specific scheme:
the orthogonal double-channel acoustic resonance device comprises a square block, wherein a first side surface and a second side surface are adjacent side surfaces of the square block, a first cavity unit penetrating through the first side surface and the opposite side surface of the square block, a second cavity unit penetrating through the second side surface and the opposite side surface of the square block are arranged on the square block, the first cavity unit comprises a first resonant cavity and a first buffer chamber and a second buffer chamber which are symmetrically and coaxially arranged at two ends of the first resonant cavity, the second cavity unit comprises a second resonant cavity and a third buffer chamber and a fourth buffer chamber which are symmetrically and coaxially arranged at two ends of the resonant cavity, an intersection area formed by the centers of the first resonant cavity and the second resonant cavity is provided with an acoustic conduit which is perpendicular to a plane formed by the two resonant cavities, and the other end of the acoustic conduit is provided with an acoustic sensor.
Preferably, the acoustic sensor is a microphone or a tuning fork.
Preferably, four holes which are respectively communicated with the buffer chambers are formed in the upper surface of the square, the holes in the first buffer chamber and the third buffer chamber are used as sample injection holes, the holes in the second buffer chamber and the fourth buffer chamber are sample discharge holes, the outer end parts of the first buffer chamber and the third buffer chamber are used as incident windows, and the outer end parts of the second buffer chamber and the fourth buffer chamber are used as emergent windows.
Preferably, the sample inlet hole can be used for inputting gas or aerosol particles.
Preferably, the incident window and the emergent window are respectively provided with a window piece.
Preferably, the diameter range of the first resonant cavity and the second resonant cavity is 2-4 times of the diameter of the laser beam.
Preferably, the length L1 of the first resonant cavity is equal to the length L2 of the second resonant cavity, the first resonant cavity, the second resonant cavity and Lmin are equal to each other, wherein l1=l2=l, lmin < L < Lmax, l=c/2f, C is the sound velocity, fmin=1000 Hz, fmax=20000 Hz, and the length h=l/2 of the four buffer chambers is 2-4 times the diameter of the resonant cavities.
Preferably, the method further comprises the steps of,
a laser assembly for generating a beam of light that is transmitted toward the entrance window;
the beam splitting component is used for splitting the light beam emitted by the laser component into two beams and respectively transmitting the two beams to the two incident windows;
and the phase-locked amplifier is connected with the output end of the acoustic sensor and the output end of the control signal source and is used for receiving the reference signal provided by the control signal source and demodulating the photoacoustic spectrum signal in the corresponding resonant cavity perceived by the acoustic sensor.
Preferably, the laser assembly comprises a control signal source, a laser controller and a laser which are sequentially arranged according to the light path.
Preferably, the beam splitting assembly comprises a half-transparent mirror, a first plane mirror and a second plane mirror, wherein the beam of the laser is divided into a first beam and a second beam through the center of the half-transparent mirror, the first beam coincides with the central axis of the first cavity unit, and the second beam sequentially enters the second cavity unit after being reflected by the first plane mirror and the second plane mirror and coincides with the central axis of the second cavity unit.
The invention has the beneficial effects that: the invention adds a second channel acoustic resonance device on the basis of a single channel acoustic resonance device, and each acoustic resonance device independently realizes resonance amplification of an acoustic signal and reaches a maximum sound pressure at the center of a cavity. The two acoustic modules are placed in an orthogonalization mode, and the time of light passing through acoustic resonance of the two channels is far smaller than the thermal relaxation time of gas molecules or aerosol particles, so that acoustic signals respectively generated by the two acoustic resonance devices can be approximately considered to be generated at the same moment, superposition of the acoustic signals after two resonance amplification can be realized at the intersection point, the doubled detection sensitivity is provided, the sampling flow of a measuring system is increased, and the application range of the measuring system is greatly expanded.
Drawings
Fig. 1 is a schematic structural diagram of a spectrum sensing device including an orthogonal dual channel acoustic resonator device according to the present invention.
Fig. 2 is a cross-sectional view of a resonant device.
Fig. 3 is a perspective view of the first and second chamber units.
Fig. 4 is a graph showing the eigenfrequency distribution of a dual cavity in a resonant device.
Fig. 5 is a graph of pressure profile of a dual cavity in a resonant device at 1742Hz resonance frequency.
Fig. 6 is a frequency response diagram of a resonant device.
The description of the components in the drawings is as follows:
11. a function signal generator; 12. a laser controller, 13, a laser; 21. a half-mirror; 22. a first planar mirror; 23. a second planar mirror; 31. a square block; 321. a first resonant cavity; 322. a first buffer chamber; 323. a second buffer chamber; 331. a second resonant cavity; 332. a third buffer chamber; 333. a fourth buffer chamber; 34. a sample inlet; 35. a sample outlet hole; 36. a window pane; 37. an acoustic duct; 4. an acoustic sensor; 5. a phase-locked amplifier; 61. a first detector; 62. a second detector; 7. and (3) a PC.
Detailed Description
Example 1
As shown in fig. 1-4, an orthogonal two-channel acoustic resonator device includes a square block 31, where a first cavity unit passing through a second side and an opposite side of the square block 31 and a second cavity unit passing through a first side and an opposite side of the square block 31 are disposed on the square block 31, and the first side and the second side are adjacent sides of the square block 31. The first cavity unit comprises a first resonant cavity 321, a first buffer chamber 322 and a second buffer chamber 323 which are symmetrically and coaxially arranged at two ends of the first resonant cavity 321, the second cavity unit comprises a second resonant cavity 331, a third buffer chamber 332 and a fourth buffer chamber 333 which are symmetrically and coaxially arranged at two ends of the second resonant cavity 331, an intersection area formed by the centers of the first resonant cavity 321 and the second resonant cavity 331 is provided with a sound guide pipe 37 which is perpendicular to a plane formed by the two resonant cavities, and the other end of the sound guide pipe 37 is provided with an acoustic sensor 4. The acoustic sensor 4 is a microphone or a tuning fork.
Four holes which are respectively communicated with the buffer chambers are formed in the upper surface of the square block 31, the holes in the first buffer chamber 322 and the third buffer chamber 332 are used as sample injection holes 34, the holes in the second buffer chamber 323 and the fourth buffer chamber 333 are sample discharge holes 35, the outer end parts of the first buffer chamber 322 and the third buffer chamber 332 are used as incident windows, and the outer end parts of the second buffer chamber 323 and the fourth buffer chamber 333 are used as emergent windows.
Optimally, the gas molecules or aerosol particles can be input into the sample inlet 34, and in this embodiment, a concentration sensor is arranged at the sample inlet 34 and/or the sample outlet 35, so as to detect the concentration of the material entering and exiting the sample inlet 34 and/or the sample outlet 35. In this embodiment, the sample inlet 34 and the sample outlet 35 are provided with concentration sensors.
The entrance window and the exit window are both provided with window sheets 36, so as to form a closed environment, and reduce the interference of external environment noise on measurement.
The length L1 of the first resonant cavity 321 is equal to the length L2 of the second resonant cavity 331. The first resonant cavity 321, the second resonant cavity 331, and the buffer chamber are as follows: l1=l2=l, lmin < L < Lmax, l=c/2f, C is the speed of sound, fmin=1000 Hz, fmax=20000 Hz, four buffer chamber lengths h=l/2, buffer chamber diameters being 2-4 times the resonator diameter. In this embodiment, the first resonator 321 and the second resonator 331 are each l=c/2000 Hz long and have a diameter that is 2 times the diameter of the laser spot.
The first resonator 321 and the second resonator 331 each have a diameter in the range of 2-4 laser spot diameters, and in this embodiment, the first resonator 321 and the second resonator 331 each have a diameter that is 2 laser spot diameters.
Example 2
The difference from embodiment 1 is that the length of the first resonant cavity 321 and the second resonant cavity 331 in this embodiment is l=c/4000 Hz, and the diameter is 4 times the diameter of the laser spot. The buffer chamber diameter is 4 times the resonator diameter.
Example 3
The difference from embodiment 1 is that the length of the first resonant cavity 321 and the second resonant cavity 331 in this embodiment is l=c/3000 Hz, the diameter is 3 times of the diameter of the laser spot, and the diameter of the buffer chamber is 3 times of the diameter of the resonant cavity.
Example 4
As shown in fig. 4, a spectrum sensing device including the orthogonal two-channel acoustic resonance device in any one of embodiments 1, 2, and 3 further includes
A laser assembly for transmitting a light beam to an entrance window; the laser assembly comprises a control signal source, a laser controller 12, a laser 13, which in this embodiment is a function signal generator 11, arranged in the light path in that order. The light output by the laser 13 is pulsed light or modulated (mechanically chopped or modulated by an electrical signal) continuous light.
The beam splitting component is used for splitting the light beam emitted by the laser component into two beams and respectively transmitting the two beams to the two incident windows; the beam splitting assembly comprises a half mirror 21, a first plane mirror 22 and a second plane mirror 23, wherein the beam of the laser 13 is divided into a first beam and a second beam through the center of the half mirror 21, the first beam coincides with the central axis of the first cavity unit, and the second beam sequentially enters the second cavity unit after being reflected by the first plane mirror 22 and the second plane mirror 23 and coincides with the central axis of the second cavity unit.
And the phase-locked amplifier 5 is connected with the output end of the acoustic sensor 4 and the output end of the control signal source and is used for receiving the reference signal provided by the control signal source and demodulating the photoacoustic spectrum signal in the corresponding resonant cavity perceived by the acoustic sensor 4.
The device further comprises a first detector 61 and a second detector 62, said first detector 61 and second detector 62 respectively corresponding to receiving the light beam corresponding to the exit window.
The output ends of the first detector 61, the second detector 62 and the lock-in amplifier 5 are connected with the PC7, and data are uploaded to the PC7 for analysis.
The resonant frequencies at which both acoustic resonator devices exist are shown in fig. 4, and it can be seen from fig. 4 that only at 1742Hz resonant frequency, the same sound pressure distribution as shown in fig. 5 occurs for both acoustic resonator devices. When two acoustic resonators resonate at 1742Hz at the same time, the two identical sound pressure distributions cause the sound pressures to be superimposed at the intersection of the two resonators. By scanning the cavity frequency, it can be seen that optimal acoustic signal amplification is achieved only at 1742Hz as shown in fig. 6.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.

Claims (6)

1. The orthogonal double-channel acoustic resonance device is characterized by comprising a square block (31), wherein a first side surface and a second side surface are adjacent side surfaces of the square block (31), a first cavity unit penetrating through the first side surface and the opposite side surface of the square block (31) and a second cavity unit penetrating through the second side surface and the opposite side surface of the square block are arranged on the square block (31), the first cavity unit comprises a first resonant cavity (321) and a first buffer chamber (322) and a second buffer chamber (323) which are symmetrically and coaxially arranged at two ends of the first resonant cavity (321), the second cavity unit comprises a second resonant cavity (331) and a third buffer chamber (332) and a fourth buffer chamber (333) which are symmetrically and coaxially arranged at two ends of the resonant cavity, an intersection area formed by the centers of the first resonant cavity (321) and the second resonant cavity (331) is provided with an acoustic guide pipe (37) which is perpendicular to the two resonant cavities to form a plane, and the other end of the acoustic guide pipe (37) is provided with an acoustic sensor (4); the acoustic sensor (4) is a microphone;
the length L1 of the first resonant cavity (321) is equal to the length L2 of the second resonant cavity (331), the first resonant cavity (321) and the second resonant cavity (331) are equal, wherein L1=L2=L, lmin < L < Lmax, L=C/2 f, C is sound velocity, fmin=1000 Hz, fmax=20000 Hz, the length H=L/2 of four buffer chambers is 2-4 times the diameter of the resonant cavities;
further comprises: a laser assembly for generating a beam of light that is transmitted toward the entrance window;
the beam splitting component is used for splitting the light beam emitted by the laser component into two beams and respectively transmitting the two beams to the two incident windows;
and the phase-locked amplifier (5) is connected with the output end of the acoustic sensor (4) and the output end of the control signal source and is used for receiving the reference signal provided by the control signal source and demodulating the photoacoustic signal in the corresponding resonant cavity perceived by the acoustic sensor (4).
2. The orthogonal dual-channel acoustic resonance device according to claim 1, wherein four holes which are respectively communicated with the buffer chambers are formed in the upper surface of the square block (31), the holes in the first buffer chamber (322) and the third buffer chamber (332) are used as sample injection holes (34), the holes in the second buffer chamber (323) and the fourth buffer chamber (333) are used as sample outlet holes (35), the outer end parts of the first buffer chamber (322) and the third buffer chamber (332) are used as incident windows, and the outer end parts of the second buffer chamber (323) and the fourth buffer chamber (333) are used as emergent windows.
3. The orthogonal two-channel acoustic resonator device according to claim 2, characterized in that a louver (36) is provided on both the entrance window and the exit window.
4. The orthogonal dual channel acoustic resonator device of claim 1, wherein the first resonator (321) and the second resonator (331) have diameters that are 2-4 times the laser beam diameter.
5. The orthogonal dual channel acoustic resonator device of claim 1, wherein the laser assembly comprises a control signal source, a laser controller (12), and a laser (13) arranged in order in the optical path.
6. The orthogonal dual-channel acoustic resonance device according to claim 5, wherein the beam splitting assembly comprises a half mirror (21), a first plane mirror (22) and a second plane mirror (23), the beam of the laser (13) is split into a first beam and a second beam through the center of the half mirror (21), the first beam coincides with the central axis of the first cavity unit, and the second beam sequentially enters the second cavity unit after being reflected by the first plane mirror (22) and the second plane mirror (23) and coincides with the central axis of the second cavity unit.
CN202110087822.8A 2021-01-22 2021-01-22 Orthogonal double-channel acoustic resonance device Active CN112924388B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110087822.8A CN112924388B (en) 2021-01-22 2021-01-22 Orthogonal double-channel acoustic resonance device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110087822.8A CN112924388B (en) 2021-01-22 2021-01-22 Orthogonal double-channel acoustic resonance device

Publications (2)

Publication Number Publication Date
CN112924388A CN112924388A (en) 2021-06-08
CN112924388B true CN112924388B (en) 2023-08-25

Family

ID=76164727

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110087822.8A Active CN112924388B (en) 2021-01-22 2021-01-22 Orthogonal double-channel acoustic resonance device

Country Status (1)

Country Link
CN (1) CN112924388B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113109268B (en) * 2021-05-25 2022-07-01 武汉理工大学 Photoacoustic spectroscopy enhancement apparatus and method for gas detection using the same
CN116773455B (en) * 2023-08-18 2023-11-21 之江实验室 Dual resonant sensor device and method
CN116879179B (en) * 2023-09-07 2023-11-14 武汉格蓝若智能技术股份有限公司 Differential photoacoustic cell for multi-component gas measurement

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103604752A (en) * 2013-10-21 2014-02-26 浙江省计量科学研究院 Photoacoustic spectrometry based detection device for optical absorption coefficient of aerosol
CN103837226A (en) * 2014-03-17 2014-06-04 山西大学 Double-resonant-cavity photoacoustic spectrophone and gas detection device using spectrophone
CN103983544A (en) * 2014-05-28 2014-08-13 南京大学 Multichannel aerosol scattering-absorbing measuring instrument
CN203849167U (en) * 2014-03-24 2014-09-24 国家电网公司 SF6 gas decomposition product detection device based on photoacoustic spectrometry technology
CN104697933A (en) * 2015-03-04 2015-06-10 中国科学院合肥物质科学研究院 Photoacoustic spectrometry sensing device for three-channel acoustics resonance cavity
CN105651374A (en) * 2016-01-27 2016-06-08 山西大学 Single-tube and coaxial photo-acoustic spectrum sound detector and gas detection device adopting sound detector
CN209784173U (en) * 2019-03-14 2019-12-13 聊城大学 three-resonance tube photoacoustic enhancement device applying optical fiber gas detection
CN209894680U (en) * 2019-04-22 2020-01-03 安徽理工大学 Enhanced photoacoustic cell for photoacoustic spectrum detection
CN110927066A (en) * 2019-12-12 2020-03-27 哈尔滨工业大学 Device and method for improving performance of photoacoustic spectrum sensor based on H-shaped resonance tube
CN211602897U (en) * 2019-12-26 2020-09-29 湖北鑫英泰系统技术股份有限公司 Photoacoustic cell structure in photoacoustic spectrum oil gas detection device
CN112098351A (en) * 2020-09-07 2020-12-18 中国科学院合肥物质科学研究院 Photoacoustic spectrometer suitable for aerosol absorption and extinction coefficient synchronous measurement
CN112147076A (en) * 2020-08-21 2020-12-29 西安电子科技大学 Absorption optical path enhanced double-resonance photoacoustic spectrum trace gas detection system

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2461328A1 (en) * 2004-03-24 2005-09-24 Robert Anthony Crane A multiplexed type of spectrophone
DE102007014517B3 (en) * 2007-03-27 2008-08-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photo-acoustic detection device i.e. cylindrical photo-acoustic multipass detector, has resonator in which excitation light is guided perpendicular to cylinder axis such that azimuthal resonance of cylinder vibration is excitable
EP3254088B1 (en) * 2015-02-02 2022-09-14 Paj Sensor A/S Photoacoustic sensor system and methodology for detecting target molecules
FR3037145B1 (en) * 2015-06-08 2020-03-13 Commissariat A L'energie Atomique Et Aux Energies Alternatives MODULAR PHOTOACOUSTIC DETECTION DEVICE
GB201516524D0 (en) * 2015-09-17 2015-11-04 Fraunhofer Uk Res Ltd Detector
CN107064012B (en) * 2017-04-11 2019-06-25 山西大学 Quartz enhanced photoacoustic spectroscopy gas-detecting device and method based on beat effect

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103604752A (en) * 2013-10-21 2014-02-26 浙江省计量科学研究院 Photoacoustic spectrometry based detection device for optical absorption coefficient of aerosol
CN103837226A (en) * 2014-03-17 2014-06-04 山西大学 Double-resonant-cavity photoacoustic spectrophone and gas detection device using spectrophone
CN203849167U (en) * 2014-03-24 2014-09-24 国家电网公司 SF6 gas decomposition product detection device based on photoacoustic spectrometry technology
CN103983544A (en) * 2014-05-28 2014-08-13 南京大学 Multichannel aerosol scattering-absorbing measuring instrument
CN104697933A (en) * 2015-03-04 2015-06-10 中国科学院合肥物质科学研究院 Photoacoustic spectrometry sensing device for three-channel acoustics resonance cavity
CN105651374A (en) * 2016-01-27 2016-06-08 山西大学 Single-tube and coaxial photo-acoustic spectrum sound detector and gas detection device adopting sound detector
CN209784173U (en) * 2019-03-14 2019-12-13 聊城大学 three-resonance tube photoacoustic enhancement device applying optical fiber gas detection
CN209894680U (en) * 2019-04-22 2020-01-03 安徽理工大学 Enhanced photoacoustic cell for photoacoustic spectrum detection
CN110927066A (en) * 2019-12-12 2020-03-27 哈尔滨工业大学 Device and method for improving performance of photoacoustic spectrum sensor based on H-shaped resonance tube
CN211602897U (en) * 2019-12-26 2020-09-29 湖北鑫英泰系统技术股份有限公司 Photoacoustic cell structure in photoacoustic spectrum oil gas detection device
CN112147076A (en) * 2020-08-21 2020-12-29 西安电子科技大学 Absorption optical path enhanced double-resonance photoacoustic spectrum trace gas detection system
CN112098351A (en) * 2020-09-07 2020-12-18 中国科学院合肥物质科学研究院 Photoacoustic spectrometer suitable for aerosol absorption and extinction coefficient synchronous measurement

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
高灵敏度谐振式红外光声气体传感器研究;方兴;李嘉;纪新明;包宗明;黄宜平;;传感器与微系统(第10期);全文 *

Also Published As

Publication number Publication date
CN112924388A (en) 2021-06-08

Similar Documents

Publication Publication Date Title
CN112924388B (en) Orthogonal double-channel acoustic resonance device
JP5022363B2 (en) Photoacoustic detector and photoacoustic detection method
US11300499B2 (en) Multi-cavity semi-open resonant photoacoustic cell and multi-gas simultaneous measurement system
US6662627B2 (en) Photoacoustic instrument for measuring particles in a gas
CN101213438B (en) Photo-acoustic spectrometer apparatus
US20210404949A1 (en) Multi-cavity superimposed non-resonant photoacoustic cell and gas detection system
US20010022657A1 (en) Photoacoustic spectroscopy apparatus and method
CN102713565A (en) Gas sensor based on photoacoustic detection
Bernegger et al. Longitudinal resonant spectrophone for CO-laser photoacoustic spectroscopy
Guo et al. Miniaturized anti-interference cantilever-enhanced fiber-optic photoacoustic methane sensor
CN112161931B (en) High-sensitivity optical fiber photoacoustic gas detection system and method
CN109115688A (en) A kind of fiber optic remote formula multifunctional gas leakage measuring instrument by sonic device and method
US10876958B2 (en) Gas-detecting device with very high sensitivity based on a Helmholtz resonator
KR20080077905A (en) Gas sensor
Petzold et al. Novel design of a resonant photoacoustic spectrophone for elemental carbon mass monitoring
CN112161932A (en) Gas decomposition component detection device based on double-cantilever-beam enhanced photoacoustic spectroscopy
CN113109268B (en) Photoacoustic spectroscopy enhancement apparatus and method for gas detection using the same
CN114813574A (en) Differential photoacoustic spectrum gas concentration detection device based on dual-channel T-shaped photoacoustic cell
CN113295620B (en) Optical fiber coupled all-solid-state enhanced photoacoustic spectroscopy gas photoacoustic detection module and method
CN114414493A (en) Enhanced photoacoustic spectroscopy multi-component gas sensor device
Xiong et al. Photoacoustic Spectroscopy Gas Detection Technology Research Progress
CN113552212A (en) Radial cavity quartz enhanced photoacoustic spectrum sound detector and gas detection device thereof
CN112098351A (en) Photoacoustic spectrometer suitable for aerosol absorption and extinction coefficient synchronous measurement
CN112630165A (en) Gas detection device in transformer oil
Shang et al. Theoretical analysis and experimental optimization of an elliptical acoustic resonator in quartz-enhanced photoacoustic spectroscopy

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant