CN108514404A - Optical coherence tomography system - Google Patents

Optical coherence tomography system Download PDF

Info

Publication number
CN108514404A
CN108514404A CN201810264524.XA CN201810264524A CN108514404A CN 108514404 A CN108514404 A CN 108514404A CN 201810264524 A CN201810264524 A CN 201810264524A CN 108514404 A CN108514404 A CN 108514404A
Authority
CN
China
Prior art keywords
light
sample
interference
fiber coupler
spectrum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810264524.XA
Other languages
Chinese (zh)
Other versions
CN108514404B (en
Inventor
杨旻蔚
丁庆
沈耀春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Institute of Terahertz Technology and Innovation
Original Assignee
Shenzhen Institute of Terahertz Technology and Innovation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Institute of Terahertz Technology and Innovation filed Critical Shenzhen Institute of Terahertz Technology and Innovation
Priority to CN201810264524.XA priority Critical patent/CN108514404B/en
Publication of CN108514404A publication Critical patent/CN108514404A/en
Application granted granted Critical
Publication of CN108514404B publication Critical patent/CN108514404B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0062Arrangements for scanning
    • A61B5/0066Optical coherence imaging
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0073Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by tomography, i.e. reconstruction of 3D images from 2D projections
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/0059Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
    • A61B5/0075Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by spectroscopy, i.e. measuring spectra, e.g. Raman spectroscopy, infrared absorption spectroscopy

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Veterinary Medicine (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Public Health (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention relates to a kind of optical coherence tomography systems.The system includes light source, fiber coupler, reference arm, sample arm, signal acquisition module and signal processing module.Light source provides initial light;Initial light is divided into reference light and sample light by fiber coupler;The reflected light of reference light is transmitted back to fiber coupler by reference arm;Sample arm utilizes sample light detection sample to be tested, sample light to generate rear orientation light in sample to be tested and be transmitted back to fiber coupler;Rear orientation light interferes to form interference light with reflected light in fiber coupler;Interference light is divided into multipath interference spectrum by fiber coupler;Signal acquisition module acquires each interference spectrum respectively;Signal processing module generates the detection image of the sample to be tested according to the spectral line signal of each road interference spectrum.Above system can eliminate virtual image interference and optical signal noise interference, so that the imaging effect of above system is preferable.

Description

Optical coherence tomography system
Technical field
The present invention relates to technical field of optical detection, more particularly to a kind of optical coherence tomography system.
Background technology
Means of optical coherence tomography (Optical CoherenceTomography, abbreviation OCT) is 90 years last century The lossless optical detective technology that generation grows up.Optical signal delay and phase of the OCT based on optics low coherence interferometer become Change measuring system, the back scattering and reflection signal for sample interior different depth are measured indirectly.OCT is according in sample The different refractive index in portion (optical diffusion characteristic inside representative sample) generates the signal of different contrast, to realize to sample Internal cross section is imaged.Since OCT image technology has non-radiative, non-contact, axial direction resolution ratio to test sample Height, it is lossless, it is easy to interior and peeps integrated and moderate characteristic, thus be a kind of optical imaging tools of great future.Currently, OCT technology has been widely used for the medical diagnostic fields such as ophthalmology, skin histology, intravascular sight glass, orthopaedics.OCT technology is in work Industry application field is also gradually applied, such as drug coating, material thickness measure, the spraying of vehicle paint.
OCT technology is divided into time domain OCT according to the difference that it is delayed with phase measurement indirectly for sample scattering light, how general Strangle OCT, frequency sweep OCT, spectrum OCT etc..Wherein, it is swept without using mechanical scanning component progress axial depth since spectrum OCT has It retouches, the information by different level of sample axial direction can be directly obtained by the Fourier transform of spectrum, it is thus possible to greatly improve system Image taking speed, and the noise for avoiding mechanical movement Scan Architecture from introducing.Meanwhile the hydrone of wavelength that spectrum OCT is used absorbs It is minimum, thus in ophthalmic medical and diagnostic field, achieve great success.
However, traditional spectrum OCT still is based on the Michelson interferometers of two-beam interference, (interferometer two-arm has Fixed π phase differences).Spectrum OCT can introduce the empty signal of zero optical path difference position both sides when handling interference spectrum, this Sample has virtual image interference in spectrum OCT image.In addition, the interference of scattering light, reference light, DC terms etc., will also result in interference The noise of spectral line signal is larger.Therefore, the interference of traditional spectrum OCT is larger, causes effect in imaging results bad.
Invention content
Based on this, it is necessary to which the interference for traditional spectrum OCT is larger, leads in imaging results that effect is bad to ask Topic, provides a kind of optical coherence tomography system.
A kind of optical coherence tomography system, including:
Light source provides initial light;
Fiber coupler, the fiber coupler receives the initial light, and the initial light is divided into multiple-channel output light, The multiple-channel output light includes reference light and all the way sample light all the way;
Reference arm is transmitted back to the fiber coupler for receiving the reference light, and by the reflected light of the reference light;
Sample arm, for receiving the sample light;The sample arm utilizes the sample light detection sample to be tested, the sample Product light scatters at the sample to be tested, generates rear orientation light, and the rear orientation light is transmitted back to the fiber coupling Device;The rear orientation light is interfered with the reflected light in the fiber coupler, forms interference light;The interference light Multipath interference spectrum is divided by the fiber coupler, often exporting respectively all the way in the multipath interference spectrum;
Signal acquisition module acquires each interference spectrum respectively;
Signal processing module generates the detection figure of the sample to be tested according to the spectral line signal of interference spectrum described in each road Picture, the imaging to eliminate the sample to be tested are interfered.
Above-mentioned optical coherence tomography system, first, reference light form reflected light by reference to arm and return to fiber coupling Device.Sample light forms rear orientation light by sample arm and is back to fiber coupler.Secondly, fiber coupler receives back scattering Light and reflected light.Rear orientation light and reflected light interfere in fiber coupler, form interference light.Also, fiber coupling Interference light is divided into multipath interference spectrum by device.Then, signal acquisition module acquires each road interference spectrum, the interference of the roads Bing Jiangge respectively The spectral line signal transmission of spectrum is to signal processing module.The spectral line signal of each road interference spectrum is handled by signal processing module, and Obtain the image information of sample to be tested Depth Stratification time.Since interference light has been divided into multipath interference spectrum, institute by fiber coupler Image procossing is carried out according to each road interference spectrum with signal processing module, virtual image interference can be eliminated and optical signal noise is dry It disturbs, so that the imaging effect of above system is preferable.
The interference light is divided into three road interference spectrums by the fiber coupler in one of the embodiments,;Wherein, institute The light intensity stated in three road interference spectrums between arbitrary two-way interference spectrum is equal, and the phase between the interference spectrum of three road is in Equiphase difference arranges.
The system also includes optical fiber circulators in one of the embodiments,;The optical fiber circulator has first end Mouth, second port and third port;
There are three input terminals for the fiber coupler tool;Three input terminals are respectively first input end, the second input End, third input terminal;
Wherein, the first port is connect with the light source, for receiving the initial light;The second port with it is described First input end connects, and the second port is used to the initial light that the optical fiber circulator is received being transmitted to the light Fine coupler;Interference spectrum is passed by first input end transmission, the second port and the third port successively all the way Transport to the signal acquisition module;Interference spectrum described in another way is transmitted to the signal acquisition mould by second input terminal Block;Also the interference spectrum is transmitted to the signal acquisition module by the third input terminal all the way.
In one of the embodiments, the system also includes light path selecting module, the light path selecting module selection exists Different moments receive interference spectrum described in each road, and interference spectrum is transmitted separately to the signal acquisition module described in the roads Bing Jiangge.
The light path selecting module is electric control optical switch in one of the embodiments,.
The reference arm includes the first collimation lens and speculum, the speculum and institute in one of the embodiments, The optical axis for stating the first collimation lens is vertical;The reference light is changed into directional light by first collimation lens;The directional light It is incident to the speculum, and incidence angle is 0 °;The directional light is reflected to form the reflected light by the speculum.
The speculum is adjustable relative to the distance of first collimation lens in one of the embodiments,.
The sample arm includes the second collimation lens and detection object lens, second collimation in one of the embodiments, Lens and the detection object lens constitute confocal optical path;The sample light is changed into directional light by second collimation lens;This is flat Row light forms detection light via the detection object lens and converges on the sample to be tested, and the detection light is on the sample to be tested The rear orientation light that scattering is formed is transmitted back to the fiber coupler by the confocal optical path.
The optical axis of second collimation lens and the detection object lens is vertical in one of the embodiments,;
The sample arm further includes scanning galvanometer;The scanning galvanometer is set to second collimation lens and described simultaneously On the optical axis for detecting object lens;The directional light of the second collimation lens outgoing reflexes to the detection object by the scanning galvanometer Mirror;The directional light of second collimation lens is adjustable relative to the incidence angle of the scanning galvanometer.
The light source is ultra broadband light source in one of the embodiments, and the initial light is low-coherent light;The signal Acquisition module is spectrometer.
Description of the drawings
Fig. 1 is the structural schematic diagram of the optical coherence tomography system of an embodiment;
Fig. 2 is the operation block diagram of the signal processing module of an embodiment.
Specific implementation mode
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings to the present invention Specific implementation mode be described in detail.
Fig. 1 is the structural schematic diagram of the optical coherence tomography system 100 of an embodiment.The optical coherence tomography System 100 includes at light source 110, fiber coupler 120, reference arm 130, sample arm 140, signal acquisition module 150 and signal Manage module 160.In the present embodiment, the propagation of the optical signal between each device in optical coherence tomography system 100 is all Pass through spread fiber.
Light source 110 is for providing initial light.
Fiber coupler 120 includes several input terminals and several output ends.The fiber coupler 120 is described defeated by one Enter end and receives the initial light.The initial light is divided into the multichannel exported from the corresponding output end by fiber coupler 120 Output light.Wherein have all the way output light be reference light, also all the way output light be sample light.
Reference arm 130 receives the reference light, and the reflected light of the reference light is passed along the corresponding output end It is back to the fiber coupler 120.As shown in Figure 1, reference arm 130 includes the first collimation lens 131 and speculum 132.It is described Speculum 132 is vertical with the optical axis of first collimation lens 131.First collimation lens 131 changes the reference light For directional light.The directional light is incident to the speculum 132, and incidence angle is 0 °.The speculum 132 is by the directional light Reflect to form the reflected light.Therefore, reflected light is back to fiber coupler 120 along the light path of reference light.
Sample arm 140 receives the sample light.The sample arm 140 utilizes the sample light detection sample to be tested 200.Institute It states sample light and back scattering occurs at the sample to be tested 200, generate rear orientation light.The rear orientation light along with institute The output end for stating sample photophase is transmitted back to the fiber coupler 120.Wherein, rear orientation light refers to from the direction of sample light The scattered wave of (i.e. the direction of incident light) observation.As shown in Figure 1, sample arm 140 includes the second collimation lens 141 and detection object lens 142, second collimation lens 141 and the detection object lens 142 constitute confocal optical path.Wherein, confocal optical path refers to light path Light path between two collimation lenses 141 and detection object lens 142 is reversible.The application of confocal optical path can to avoid the interference of stray light, Ensure the return of the second collimation lens 141 is the back scattering optical signal of sample.Second collimation lens 141 is by the sample Light is changed into directional light.The directional light forms detection light via the detection object lens 142.Detection light converges to the sample to be tested On 200.The detection light scatters on the sample to be tested 200 and forms rear orientation light.Rear orientation light is by described confocal Light path is transmitted back to the fiber coupler 120.
First collimation lens 131 and the second collimation lens 141 are all fiber collimating lenses.Fiber collimating lenses are with light The non-spherical lens of fine pigtail coupling.It is parallel that the broadband diverging light that optical fiber inputs can be collimated into free space by fiber collimating lenses Light output.The operating wavelength range of fiber collimating lenses should match the centre wavelength and spectrum width of aforementioned wideband light source 110.Further Ground, aberration and aberration of the fiber collimating lenses in entire operating wavelength range are answered as small as possible.It in this way can be to ensure not The output light component of co-wavelength can become same collimated light beam.It simultaneously also can not sharing the same light the reflected in parallel light received point Amount is back to same coupling efficiency in optical fiber.In addition, fiber collimating lenses and detection object lens 142 can be convex lenses.
After rear orientation light is back to reflected light in fiber coupler 120, their hairs in the fiber coupler 120 Raw interference, forms interference light.The interference light is divided by the fiber coupler 120 for multipath interference spectrum, every interference light all the way Spectrum is exported by corresponding input terminal.
Signal acquisition module 150 acquires each interference spectrum respectively.Signal acquisition module 150 obtains each road interference spectrum Spectral line signal.
Signal processing module 160 generates the inspection of the sample to be tested 200 according to the spectral line signal of interference spectrum described in each road Altimetric image is eliminated the imaging to the sample to be tested 200 with interference spectrum described in each road and is interfered.
Above-mentioned optical coherence tomography system 100, first, reference light form reflected light return light by reference to arm 130 Fine coupler 120.Sample light forms rear orientation light by sample arm 140 and is back to fiber coupler 120.Secondly, optical fiber coupling Clutch 120 receives rear orientation light and reflected light.Rear orientation light and reflected light interfere in fiber coupler 120, shape At interference light.Also, interference light is divided into multipath interference spectrum by fiber coupler 120.Then, signal acquisition module 150 is distinguished Each road interference spectrum is acquired, the spectral line signal transmission of the roads Bing Jiangge interference spectrum is to signal processing module 160.By signal processing mould Block 160 handles the spectral line signal of each road interference spectrum, and obtains the image information of sample to be tested 200 Depth Stratification time.Due to light Interference light has been divided into multipath interference spectrum by fine coupler 120, so signal processing module 160 is carried out according to each road interference spectrum Image procossing can eliminate virtual image interference and optical signal noise interference, so that the imaging effect of above system is preferable.
In the present embodiment, light source 110 is ultra broadband light source 110.The initial light is low-coherent light.The ultra-wideband-light Source 110 refers to the light source 110 based on semiconductor laser or light emitting diode.According to the difference of detection sample, 110 light of light source The centre wavelength of spectrum can be selected in 850nm, 1310nm, the different locations such as 1550nm.But the centre wavelength of 110 spectrum of light source is not It is confined to this, different centre wavelength can be selected according to sample to be tested 200.For example, the wave band of initial light can be near-infrared Wave band.Since near infrared band transmissivity is higher, so system is higher to the imaging effect to sample to be tested 200, can reach The lossless three-dimensional imaging of high-resolution.Ultra broadband light source 110 is characterized in:Spectrum spectrum width it is larger (full width at half maximum FWHM >=50nm, Middle FWHM is the abbreviation of full width at half maximum), total Output optical power is up to 20mW (continuous light) or more.Light The spectrum spectrum width in source 110 is wider, and the axial resolution of the scattered information of the sample different depth position of system detection is finer.And Luminous power is bigger, then the scattering light of sample arm 140 is stronger, and the signal received by signal acquisition module 150 is stronger, imaging effect Better.Further, the light intensity of light source 110 has smaller fluctuation in entire spectrum width range planted agent.For example, light source 110 can be with It is integrated with optical fiber collimator.In this way, light source 110 is by the free space optical coupled into optical fibres of transmitting, to facilitate follow-up connection.
In the present embodiment, there are three input terminal and three output ends for the tool of fiber coupler 120.The reference light and the sample The light intensity of product light is equal.The interference light is divided into three road interference spectrums, arbitrary two-way interference spectrum by the fiber coupler 120 Light intensity it is equal, and the phase of three road interference spectrum in equiphase difference arrange.In the present system, sample light to three export The splitting ratio at end is 1:1:1.The splitting ratio of interference light to three input terminals is also 1:1:1.It may insure three tunnel interference lights in this way The phase of spectrum is arranged in equiphase difference.That is the tolerance of the phase of three road interference spectrums isThe spy of 3 × 3 fiber couplers 120 Property may insure that the fixed skew of generated 3 interference spectrums is respectively:0,
In the present embodiment, fiber coupler 120 is 3 × 3 fiber couplers 120.In this way, it is dry to can effectively improve any road The signal-to-noise ratio of spectrum is related to, so that the signal amplitude for the sample depth information that signal processing module 160 recovers is most strong.3×3 Fiber coupler 120 is a kind of optical fibre device of six ports.Each port is attached by optical fiber pigtail and external circuits.Light Fine coupler 120 has first input end c1, the second input terminal c2, third input terminal c3, the first output end c4, second output terminal C5 and third output end c6.As shown in Figure 1, six ports of 3 × 3 couplers are divided into two groups of left and right, the three of one group of the left side on Fig. 1 A port is all input terminal (being respectively first input end c1, the second input terminal c2, third input terminal c3).The three of the right on Fig. 2 A port is all output end (being respectively the first output end c4, second output terminal c5, third output end c6).Any one input terminal It can be used as light input port.The light inputted from input terminal can be exported by any one output end.The two groups of ports in left and right have Reciprocity.The operating wavelength range of coupler should match the centre wavelength and spectrum width of aforementioned wideband light source 110.Input terminal extremely exports The excess loss at end is as small as possible.The splitting ratio of fiber coupler 120 is consistent as far as possible in entire operating wavelength range.
As shown in Figure 1, optical coherence tomography system 100 further includes optical fiber circulator 170.The optical fiber circulator 170 have first port p1, second port p2 and third port p3.Second port is connect with first input end optical fiber.Described Single port receives the initial light.Initial light is transmitted to second port by first port.The initial light passes through the second end An input terminal of the fiber coupler 120 is transported in oral instructions.In the present embodiment, it is defeated that initial light by second port p2 is transmitted to first Enter to hold c1.In three road interference spectrums, the interference spectrum is transmitted to by the first input end c1 by second port p2 all the way The signal acquisition module 150.Interference spectrum described in another way is transmitted to the signal acquisition mould by the second input terminal c2 Block 150.Also the interference spectrum is transmitted to the signal acquisition module 150 by the third input terminal c3 all the way.
In optical fiber circulator 170, initial light is inputted by first port p1, is exported by second port p2.Second port p2 The light (interference spectrum) of input is exported by third port p3.And the light of third port p2 input is isolated without being back to the Single port p1.Initial light can be not only introduced in fiber coupler 120 in this way, but also can be by certain interference spectrum signal taking-up all the way And light source 110 is protected not interfered by interference spectrum.
It should be noted that the second output terminal c5 of fiber coupler 120 is not used, can be prevented by modes such as knottings The end face light reflection back into optical fibers coupler 120 of second output terminal c5 introduces interference.
In the present embodiment, in reference arm 130, speculum 132 is adjustable relative to the distance of first collimation lens 131 Section.Specifically, speculum 132 is a kind of plane mirror, is mounted on optical regulation lens frame, by adjusting the pitching of speculum 132 And deflection angle, reference light is reflected back the first collimation lens 131 and again coupled back into optical fibers.Further, in order to avoid anti- Penetrate light intensity power it is excessive cause signal acquisition module 150 receive occur saturation even damage, can by the pitching of speculum 132 and partially Corner is transferred from best angle of reflection.Also diaphragm (operation wavelength matches the centre wavelength and spectrum width of light source 110) may be selected as anti- Penetrate mirror 132.Reflected light is formed using the mirror-reflection between air and diaphragm.Preferably, speculum 132 and pH effect mirror Frame can be fixed on an one-dimensional linear mobile platform, by adjusting mobile platform, change speculum 132 and the first collimation lens The distance between 131, to change the light path of 130 light path of reference arm.Therefore, speculum 132 is for adjusting the anti-of reference arm 130 Penetrate the optical path difference of light and the scattering light of sample arm 140, it is ensured that its optical path difference is located in interference distance.
As shown in Figure 1, in sample arm 140, second collimation lens 141 is vertical with the detection optical axis of object lens 142. The sample arm 140 further includes scanning galvanometer 143.The scanning galvanometer 143 is set to 141 He of the second collimation lens simultaneously On the optical axis of the detection object lens 142.The directional light that second collimation lens 141 is emitted is reflected by the scanning galvanometer 143 To the detection object lens 142.The directional light of second collimation lens 141 can relative to the incidence angle of the scanning galvanometer 143 It adjusts.Specifically, scanning galvanometer 143 is that a kind of metal-coated membrane plane that can quickly change deflection angle by electric current driving is anti- Penetrate mirror 132.Plane mirror 132 has zero color difference and aberration.In systems, scanning galvanometer 143 is mounted on 140 light path of sample arm In.The reflecting surface normal and 141 optical axis of the second collimation lens of the original state of scanning galvanometer 143 are at 45 degree of angles.By quickly changing The angle for becoming normal and 141 optical axis of the second collimation lens plays the role of light beam scanning, different horizontal to obtain sample to be tested 200 To the axial depth optical information at position.The scan frequency of scanning galvanometer 143 is within 100Hz.Refer to laterally herein waiting for test sample Product 200 are perpendicular to the direction of detection 142 optical axis of object lens.It refer to axially the side that sample to be tested 200 is parallel to detection 142 optical axis of object lens To.
Detect object lens 142 be the collimated light beam that will be emitted by the second collimation lens 141 and scanning galvanometer 143, converge to by Detect sample surfaces.Since the wave-length coverage of input light is larger, achromatic lens group need to be selected to constitute.Detect object lens 142 Operating wavelength range should match the centre wavelength and spectrum width of light source 110.The focal length of detection object lens 142 is answered smaller, and bore is then The scattering light for detecting sample can should be received as much as possible more so.Meanwhile larger bore is it is also possible that converge The spot size of accumulation reduces, and is advantageously implemented the detection of 200 lateral resolution of high sample to be tested.In this system, because second Collimation lens 141 and detection object lens 142 constitute confocal optical path, need to will detect stringent place of sample and be put down with the coke of detection object lens 142 Face position, so that detection is accurate.
Optical coherence tomography system 100 further includes light path selecting module 180.The light path selecting module 180 selects Interference spectrum described in each road is received in different moments, interference spectrum is transmitted separately to the signal acquisition module described in the roads Bing Jiangge 150.Light path selecting module 180 plays the work of gate intervention spectrum between fiber coupler 120 and signal acquisition module 150 With.It in this way can be to avoid the interference of each road interference spectrum.
Light path selecting module 180 is electric control optical switch.Electric control optical switch is a kind of light path using electric signal triggering control Break-make selecting module.The operating wavelength range of electric control optical switch should match the centre wavelength and spectrum width of aforementioned wideband light source 110.Electricity 1ns can be less than by controlling the break-make handoff response time of photoswitch, and operating wavelength range can reach 100nm or more.Therefore electricity Photoswitch is controlled to be suitble to carry out the channel signal switching of high speed in the present system.In this way can when component selections receive by way of The quantity of signal acquisition module 150 is saved, it is cost-effective.Specifically, electric control optical switch carries optical fiber pigtail connector, to share the same light Fine coupler 120 is connected with fiber optical circulator.
Signal acquisition module 150 is spectrometer.Further, rapid spectrometer can be used in spectrometer.Rapid spectrometer is A kind of equipment of the relative power strength of the different wave length component of detection input optical signal.Its wave-length coverage that can be responded is answered Centre wavelength with light source 110 and spectrum width.Specifically, spectrometer can be based on high speed alignment CMOS (Complementary Metal Oxide Semiconductor) camera framework.I.e. by collimation lens, (partial picture need to increase to be expanded input light Mirror) it is changed into free space parallel light emergence.Free space parallel light emergence has certain spot size.Directional light, which is incident to, to spread out Penetrate grating (can be reflection-type or transmission-type grating).Directional light is by grating according to Bragg diffraction by the light of different wave length component Signal is detached by the different angles of diffraction.The maximum incident angle of incidence angle selection diffraction efficiency of grating of directional light.Go out The diffraction light penetrated is converged to by achromatism condenser lens on the receiving plane of alignment CMOS cameras.Each of CMOS cameras connects Reproduced image member (according to operation wavelength, pixel can be the photosensitive materials such as Si, AlGaAs or InGaAs) enters corresponding to rapid spectrometer Penetrate a certain wavelength component of light.According to the photosensitive intensity of each pixel, you can obtain the spectral information of incident light.Specifically, Rapid spectrometer carries fiber coupling interface.The spectra collection rate of rapid spectrometer can reach 100k spectral lines/second.Spectrometer has There are the data of high speed to read interface and large capacity cache, to be provided in a large amount of spectral line datas of high speed acquisition at signal in real time It manages module 160 and carries out data processing.Using rapid spectrometer, the spectral line data per interference spectrum all the way can be accurately obtained.
Rapid spectrometer obtains three road interference spectrums by electric control optical switch.This three roads interference spectrum luminous intensity is denoted as respectively I1(k), I2(k), I3(k) (first input end c1, the second input terminal c2 and the third input of fiber coupler 120 are corresponded respectively to Hold c3).From the characteristic of 3 × 3 fiber couplers 120, it is assumed that I1(k) proper phase isI2(k) proper phase It is 0, I3(k) proper phase is
Fig. 2 is the operation block diagram of the signal processing module 160 of an embodiment.It is quick that signal processing module 160 receives three tunnels Spectrometer spectral line.Signal processing module 160 with etc. three phase algorithms recover image.The virtual image is eliminated first, then passes through coefficient DC terms and interference noise item are eliminated in operation, to obtain comprising the scattered signal range value a at sample interior different depth (z).Every treated that spectral line corresponds to the axial information at a certain position, i.e., so-called A-Scan spectral lines.Again by and scanning Galvanometer 143 synchronizes, and forms the axial depth hum pattern of tested article difference lateral position.Sample to be tested is just constituted in this way 200 cross section scattering amplitude image, i.e., it is so-called to obtain B-Scan images.Equal three phase algorithms of system are as follows:
First, according to the data processing method of traditional SD-OCT systems, 3 interference spectrums that rapid spectrometer is obtained Spectral line Si(λ) is converted into wave-number domain S from wavelength domaini(k).Mapping mode is:(i=1,2,3 are every spectral lines to k=2 π/λ Mark;Si(k) a pair of with the first input end c1 of 3 × 3 fiber couplers 120, the second input terminal c2 and third input terminal c3 mono- It answers).By Si(k) spline interpolation for carrying out wave-number domain, obtains the spectral line signal I of wave-number domain uniform samplingi(k), according to SD-OCT Matter has:
In formula (1), ERIt is reference light light intensity, the back scattering information of 200 inside points level of a (z) samples to be tested, k is wave Number independent variable, n is sample refractive index,The corresponding phase component of as three spectral lines (is followed successively by0,), i is void Number unit.
Secondly, as shown in Fig. 2, for Ii(k) such as inferior three-phase position algorithm operation is executed:
Hi(z)=FT [Ii(k)], (i=1,2,3) (2)
In formula (2), FT indicates Fourier transform.
By the operation of formula (3) and formula (4), the virtual image of sample to be tested 200 can be eliminated.
DC terms interference and the noise jamming of three road interference spectrums can be eliminated by formula (5).
An elimination DC terms, the virtual image and the optimization of noise jamming spectrum can be obtained from three interference spectrums from above-mentioned operation Line H (z).Back scattering information a (z) is proportional to H (z), i.e. A-Scan spectral lines to sample interior by different level.Pass through scanning galvanometer 143 Move back and forth, the A-Scan spectral lines at the laterally different position of sample surfaces can be obtained, finally, by all A-Scan spectral line groups It closes, you can obtain the cross section B-Scan images of sample.
Each technical characteristic of embodiment described above can be combined arbitrarily, to keep description succinct, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, it is all considered to be the range of this specification record.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.

Claims (10)

1. a kind of optical coherence tomography system, which is characterized in that including:
Light source provides initial light;
Fiber coupler, the fiber coupler receives the initial light, and the initial light is divided into multiple-channel output light, described Multiple-channel output light includes reference light and all the way sample light all the way;
Reference arm is transmitted back to the fiber coupler for receiving the reference light, and by the reflected light of the reference light;
Sample arm, for receiving the sample light;The sample arm utilizes the sample light detection sample to be tested, the sample light It is scattered at the sample to be tested, generates rear orientation light, the rear orientation light is transmitted back to the fiber coupler;Institute It states rear orientation light to interfere in the fiber coupler with the reflected light, forms interference light;The interference light is by institute It states fiber coupler and is divided into multipath interference spectrum, often exporting respectively all the way in the multipath interference spectrum;
Signal acquisition module acquires each interference spectrum respectively;
Signal processing module generates the detection image of the sample to be tested according to the spectral line signal of interference spectrum described in each road, with Eliminate the imaging interference of the sample to be tested.
2. system according to claim 1, which is characterized in that the interference light is divided into three tunnels by the fiber coupler to be done Relate to spectrum;Wherein, the light intensity in the interference spectrum of three road between arbitrary two-way interference spectrum is equal, and three tunnel interference light Phase between spectrum is arranged in equiphase difference.
3. system according to claim 2, which is characterized in that the system also includes optical fiber circulators;The fiber optic loop Shape utensil has first port, second port and third port;
There are three input terminals for the fiber coupler tool;Three input terminals are respectively first input end, the second input terminal, Three input terminals;
Wherein, the first port is connect with the light source, for receiving the initial light;The second port and described first Input terminal connects, and the second port is used to the initial light that the optical fiber circulator is received being transmitted to the optical fiber coupling Clutch;Interference spectrum is transmitted to by first input end transmission, the second port and the third port successively all the way The signal acquisition module;Interference spectrum described in another way is transmitted to the signal acquisition module by second input terminal;Also Have all the way the interference spectrum signal acquisition module is transmitted to by the third input terminal.
4. system according to claim 1, which is characterized in that further include light path selecting module, the light path selecting module Selection receives interference spectrum described in each road in different moments, and interference spectrum is transmitted separately to the signal acquisition described in the roads Bing Jiangge Module.
5. system according to claim 4, which is characterized in that the light path selecting module is electric control optical switch.
6. system according to claim 1, which is characterized in that the reference arm includes the first collimation lens and speculum, The speculum is vertical with the optical axis of the first collimation lens;The reference light is changed into parallel by first collimation lens Light;The directional light is incident to the speculum, and incidence angle is 0 °;The speculum reflects to form the directional light described Reflected light.
7. system according to claim 6, which is characterized in that the speculum relative to first collimation lens away from From adjustable.
8. system according to claim 1, which is characterized in that the sample arm includes the second collimation lens and detection object Mirror, second collimation lens and the detection object lens constitute confocal optical path;Second collimation lens turns the sample light Become directional light;The directional light forms detection light via the detection object lens and converges on the sample to be tested, the detection light The rear orientation light that formation is scattered on the sample to be tested is transmitted back to the fiber coupler by the confocal optical path.
9. system according to claim 8, which is characterized in that the optical axis of second collimation lens and the detection object lens Vertically;
The sample arm further includes scanning galvanometer;The scanning galvanometer is set to second collimation lens and the detection simultaneously On the optical axis of object lens;The directional light of the second collimation lens outgoing reflexes to the detection object lens by the scanning galvanometer;Institute The directional light for stating the second collimation lens is adjustable relative to the incidence angle of the scanning galvanometer.
10. system according to claim 1, which is characterized in that the light source is ultra broadband light source, and the initial light is low Coherent light;The signal acquisition module is spectrometer.
CN201810264524.XA 2018-03-28 2018-03-28 Optical coherence tomography system Active CN108514404B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810264524.XA CN108514404B (en) 2018-03-28 2018-03-28 Optical coherence tomography system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810264524.XA CN108514404B (en) 2018-03-28 2018-03-28 Optical coherence tomography system

Publications (2)

Publication Number Publication Date
CN108514404A true CN108514404A (en) 2018-09-11
CN108514404B CN108514404B (en) 2021-08-10

Family

ID=63434464

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810264524.XA Active CN108514404B (en) 2018-03-28 2018-03-28 Optical coherence tomography system

Country Status (1)

Country Link
CN (1) CN108514404B (en)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109115723A (en) * 2018-09-30 2019-01-01 深圳市太赫兹科技创新研究院 Optical coherence tomography and imaging method based on digital micromirror device
WO2019183838A1 (en) * 2018-03-28 2019-10-03 深圳市太赫兹科技创新研究院 Optical coherence tomography system
CN110385539A (en) * 2019-07-16 2019-10-29 广州德擎光学科技有限公司 Penetrating detection equipment and its detection method based on low coherence interferometry
CN110426373A (en) * 2019-07-16 2019-11-08 南昌航空大学 A kind of method of Brillouin scattering and optical coherence elastogram in situ detection
CN110706435A (en) * 2019-09-12 2020-01-17 北京航天易联科技发展有限公司 Optical fiber perimeter intrusion alarm system based on 3 x 3 coupler
CN110793918A (en) * 2019-11-13 2020-02-14 深圳市斯尔顿科技有限公司 Industrial OCT detection device and method based on spatial free distribution light path
CN110836852A (en) * 2019-11-13 2020-02-25 深圳市斯尔顿科技有限公司 Industrial OCT detection device and method
CN110967154A (en) * 2019-12-20 2020-04-07 深圳市太赫兹科技创新研究院 Optical coherence tomography system-based sealing detection method and terminal
CN111156920A (en) * 2019-12-31 2020-05-15 深圳市太赫兹科技创新研究院 High-depth scanning imaging system
CN111179261A (en) * 2019-12-31 2020-05-19 深圳市太赫兹科技创新研究院 Defect detection method, system, terminal device and storage medium
CN113916881A (en) * 2020-07-08 2022-01-11 株式会社湖碧驰 Three-dimensional tomography inspection apparatus and image acquisition method
CN114414530A (en) * 2022-01-28 2022-04-29 福州大学 Biomolecule self-reference detection method and device
CN114486917A (en) * 2022-01-27 2022-05-13 中国农业银行股份有限公司 Detection system and detection equipment
CN115989990A (en) * 2023-03-24 2023-04-21 之江实验室 Optical coherence tomography endoscopic imaging system based on planar optical waveguide technology
CN110793918B (en) * 2019-11-13 2024-05-10 深圳市斯尔顿科技有限公司 Industrial OCT detection device and method based on spatial free distribution light path

Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1915164A (en) * 2006-09-08 2007-02-21 浙江大学 Method and system for expanding dynamic range in tomography of optical coherent
CN1915163A (en) * 2006-09-08 2007-02-21 浙江大学 Method and system for realizing axial super resolution in tomography of optical coherent
WO2007051292A1 (en) * 2005-11-02 2007-05-10 Oti Ophthalmic Technologies Inc. En-face oct with parallel detector array
CN101513366A (en) * 2009-03-18 2009-08-26 天津大学 PS-OCT-based three dimension visual nonnasality decayed tooth checking device and checking method thereof
CN101608930A (en) * 2009-07-09 2009-12-23 复旦大学 A kind of implementation method of pi/2 phase bias of optical fiber interferometer
CN101617935A (en) * 2009-08-06 2010-01-06 浙江大学 Method and system for wide-spectrum and high-resolution detection based on space-time light splitting in OCT
WO2010063416A1 (en) * 2008-12-02 2010-06-10 Optopol Technology S.A. Method and apparatus for eye movement tracking in spectral optical coherence tomography. (sd-oct)
WO2010131531A1 (en) * 2009-05-11 2010-11-18 Canon Kabushiki Kaisha Information processing apparatus in oct system
US20110130652A1 (en) * 2009-11-18 2011-06-02 The Board Of Trustees Of The University Of Illinois Apparatus for biomedical imaging
CN102104363A (en) * 2011-03-01 2011-06-22 北京大学 Tera-hertz silica-based quadrupler and frequency multiplier
CN102151121A (en) * 2011-01-28 2011-08-17 浙江大学 Method and system for calibrating spectrum based on interference spectrum phase information
CN102264279A (en) * 2008-12-26 2011-11-30 佳能株式会社 Optical tomographic imaging apparatus
US20120002214A1 (en) * 2009-04-13 2012-01-05 Canon Labushiki Kaisha Optical tomographic imaging apparatus and control method therefor
CN102333477A (en) * 2009-01-23 2012-01-25 佳能株式会社 Optical tomographic imaging method and optical tomographic imaging apparatus
CN102438501A (en) * 2009-05-22 2012-05-02 佳能株式会社 Imaging device and imaging method
CN102499648A (en) * 2011-11-16 2012-06-20 清华大学 Spectral-domain optical coherence tomography imaging system based on Fresnel spectrometer
CN102670172A (en) * 2012-05-07 2012-09-19 浙江大学 AS-OCT-SD (Anterior Segment-Optical Coherence Tomography-Spectrum Domain) imaging system and AS-OCT-SD imaging method based on visibility function regulation
CN103090808A (en) * 2013-01-22 2013-05-08 浙江大学 High-precision wide-range gap measuring method and system based on spectrum phase
CN103784120A (en) * 2014-02-26 2014-05-14 中国科学院光电技术研究所 Tumor boundary intraoperative detection instrument based on sweep frequency OCT technology
CN103900798A (en) * 2014-03-28 2014-07-02 哈尔滨工程大学 Optical coherence domain polarization measurement device with optical distance scanning on-line correction function
CN104434037A (en) * 2014-12-12 2015-03-25 中国计量学院 Modified SD - OCT system based on multi-channel spectrometer
CN104545772A (en) * 2014-12-19 2015-04-29 佛山市南海区欧谱曼迪科技有限责任公司 Composite narrowband imaging endoscope imaging system
CN104655032A (en) * 2015-02-06 2015-05-27 浙江大学 High-precision distance measurement system and method based on orthogonal chromatic dispersion spectral domain interferometer
US9204800B2 (en) * 2011-03-07 2015-12-08 St. Jude Medical, Inc. Low cost high efficiency signal interrogation for multi-channel optical coherence tomography
CN105147241A (en) * 2015-07-03 2015-12-16 南京航空航天大学 Method and system based on double-space carrier frequency technology for increasing OCT (optical coherence tomography) imaging depth
CN105342558A (en) * 2015-09-30 2016-02-24 苏州大学 Swept-source-based correction method of phase errors in optical coherence tomography
US20160120401A1 (en) * 2014-10-30 2016-05-05 Tomey Corporation Optical Tomographic Imaging Apparatus
CN106308744A (en) * 2015-06-15 2017-01-11 南京理工大学 Handheld human body any surface position skin frequency sweeping optical coherence tomography imaging apparatus
CN106383087A (en) * 2016-10-09 2017-02-08 福建师范大学 Polarization optical coherence tomography/polarization multiphoton microscopy bimodal imaging system
WO2017035328A1 (en) * 2015-08-26 2017-03-02 University Of Houston System Evaluation of dermal filler injections by optical coherence tomography and optical coherence elastography
CN106725285A (en) * 2017-01-06 2017-05-31 东北大学秦皇岛分校 Optical coherence human eye measurement apparatus and human eye measuring method
WO2017134536A1 (en) * 2016-02-05 2017-08-10 Synaptive Medical (Barbados) Inc. System and method for providing surgical guidance based on polarization-sensitive optical coherence tomography
WO2018000036A1 (en) * 2016-07-01 2018-01-04 Cylite Pty Ltd Apparatus and method for confocal microscopy using dispersed structured illumination
US20180035894A1 (en) * 2016-08-05 2018-02-08 Tomey Corporation Optical coherence tomographic device

Patent Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007051292A1 (en) * 2005-11-02 2007-05-10 Oti Ophthalmic Technologies Inc. En-face oct with parallel detector array
CN1915163A (en) * 2006-09-08 2007-02-21 浙江大学 Method and system for realizing axial super resolution in tomography of optical coherent
CN1915164A (en) * 2006-09-08 2007-02-21 浙江大学 Method and system for expanding dynamic range in tomography of optical coherent
WO2010063416A1 (en) * 2008-12-02 2010-06-10 Optopol Technology S.A. Method and apparatus for eye movement tracking in spectral optical coherence tomography. (sd-oct)
CN102264279A (en) * 2008-12-26 2011-11-30 佳能株式会社 Optical tomographic imaging apparatus
CN102333477A (en) * 2009-01-23 2012-01-25 佳能株式会社 Optical tomographic imaging method and optical tomographic imaging apparatus
CN101513366A (en) * 2009-03-18 2009-08-26 天津大学 PS-OCT-based three dimension visual nonnasality decayed tooth checking device and checking method thereof
US20120002214A1 (en) * 2009-04-13 2012-01-05 Canon Labushiki Kaisha Optical tomographic imaging apparatus and control method therefor
WO2010131531A1 (en) * 2009-05-11 2010-11-18 Canon Kabushiki Kaisha Information processing apparatus in oct system
CN102438501A (en) * 2009-05-22 2012-05-02 佳能株式会社 Imaging device and imaging method
CN101608930A (en) * 2009-07-09 2009-12-23 复旦大学 A kind of implementation method of pi/2 phase bias of optical fiber interferometer
CN101617935A (en) * 2009-08-06 2010-01-06 浙江大学 Method and system for wide-spectrum and high-resolution detection based on space-time light splitting in OCT
US20110130652A1 (en) * 2009-11-18 2011-06-02 The Board Of Trustees Of The University Of Illinois Apparatus for biomedical imaging
CN102151121A (en) * 2011-01-28 2011-08-17 浙江大学 Method and system for calibrating spectrum based on interference spectrum phase information
CN102104363A (en) * 2011-03-01 2011-06-22 北京大学 Tera-hertz silica-based quadrupler and frequency multiplier
US9204800B2 (en) * 2011-03-07 2015-12-08 St. Jude Medical, Inc. Low cost high efficiency signal interrogation for multi-channel optical coherence tomography
CN102499648A (en) * 2011-11-16 2012-06-20 清华大学 Spectral-domain optical coherence tomography imaging system based on Fresnel spectrometer
CN102670172A (en) * 2012-05-07 2012-09-19 浙江大学 AS-OCT-SD (Anterior Segment-Optical Coherence Tomography-Spectrum Domain) imaging system and AS-OCT-SD imaging method based on visibility function regulation
CN103090808A (en) * 2013-01-22 2013-05-08 浙江大学 High-precision wide-range gap measuring method and system based on spectrum phase
CN103784120A (en) * 2014-02-26 2014-05-14 中国科学院光电技术研究所 Tumor boundary intraoperative detection instrument based on sweep frequency OCT technology
CN103900798A (en) * 2014-03-28 2014-07-02 哈尔滨工程大学 Optical coherence domain polarization measurement device with optical distance scanning on-line correction function
US20160120401A1 (en) * 2014-10-30 2016-05-05 Tomey Corporation Optical Tomographic Imaging Apparatus
CN104434037A (en) * 2014-12-12 2015-03-25 中国计量学院 Modified SD - OCT system based on multi-channel spectrometer
CN104545772A (en) * 2014-12-19 2015-04-29 佛山市南海区欧谱曼迪科技有限责任公司 Composite narrowband imaging endoscope imaging system
CN104655032A (en) * 2015-02-06 2015-05-27 浙江大学 High-precision distance measurement system and method based on orthogonal chromatic dispersion spectral domain interferometer
CN106308744A (en) * 2015-06-15 2017-01-11 南京理工大学 Handheld human body any surface position skin frequency sweeping optical coherence tomography imaging apparatus
CN105147241A (en) * 2015-07-03 2015-12-16 南京航空航天大学 Method and system based on double-space carrier frequency technology for increasing OCT (optical coherence tomography) imaging depth
WO2017035328A1 (en) * 2015-08-26 2017-03-02 University Of Houston System Evaluation of dermal filler injections by optical coherence tomography and optical coherence elastography
CN105342558A (en) * 2015-09-30 2016-02-24 苏州大学 Swept-source-based correction method of phase errors in optical coherence tomography
WO2017134536A1 (en) * 2016-02-05 2017-08-10 Synaptive Medical (Barbados) Inc. System and method for providing surgical guidance based on polarization-sensitive optical coherence tomography
WO2018000036A1 (en) * 2016-07-01 2018-01-04 Cylite Pty Ltd Apparatus and method for confocal microscopy using dispersed structured illumination
US20180035894A1 (en) * 2016-08-05 2018-02-08 Tomey Corporation Optical coherence tomographic device
CN106383087A (en) * 2016-10-09 2017-02-08 福建师范大学 Polarization optical coherence tomography/polarization multiphoton microscopy bimodal imaging system
CN106725285A (en) * 2017-01-06 2017-05-31 东北大学秦皇岛分校 Optical coherence human eye measurement apparatus and human eye measuring method

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019183838A1 (en) * 2018-03-28 2019-10-03 深圳市太赫兹科技创新研究院 Optical coherence tomography system
WO2020062406A1 (en) * 2018-09-30 2020-04-02 深圳市太赫兹科技创新研究院 Optical coherence tomography imaging apparatus and method based on digital micro-mirror device
CN109115723A (en) * 2018-09-30 2019-01-01 深圳市太赫兹科技创新研究院 Optical coherence tomography and imaging method based on digital micromirror device
CN110385539A (en) * 2019-07-16 2019-10-29 广州德擎光学科技有限公司 Penetrating detection equipment and its detection method based on low coherence interferometry
CN110426373A (en) * 2019-07-16 2019-11-08 南昌航空大学 A kind of method of Brillouin scattering and optical coherence elastogram in situ detection
CN110426373B (en) * 2019-07-16 2021-11-26 南昌航空大学 In-situ detection method for Brillouin scattering and optical coherence elastography
CN110706435A (en) * 2019-09-12 2020-01-17 北京航天易联科技发展有限公司 Optical fiber perimeter intrusion alarm system based on 3 x 3 coupler
CN110836852A (en) * 2019-11-13 2020-02-25 深圳市斯尔顿科技有限公司 Industrial OCT detection device and method
CN110793918B (en) * 2019-11-13 2024-05-10 深圳市斯尔顿科技有限公司 Industrial OCT detection device and method based on spatial free distribution light path
CN110836852B (en) * 2019-11-13 2024-03-26 深圳市斯尔顿科技有限公司 Industrial OCT detection device and method
CN110793918A (en) * 2019-11-13 2020-02-14 深圳市斯尔顿科技有限公司 Industrial OCT detection device and method based on spatial free distribution light path
CN110967154A (en) * 2019-12-20 2020-04-07 深圳市太赫兹科技创新研究院 Optical coherence tomography system-based sealing detection method and terminal
CN110967154B (en) * 2019-12-20 2021-10-12 深圳市太赫兹科技创新研究院 Optical coherence tomography system-based sealing detection method and terminal
CN111179261A (en) * 2019-12-31 2020-05-19 深圳市太赫兹科技创新研究院 Defect detection method, system, terminal device and storage medium
CN111156920B (en) * 2019-12-31 2024-03-26 深圳市华讯方舟光电技术有限公司 High-depth scanning imaging system
CN111156920A (en) * 2019-12-31 2020-05-15 深圳市太赫兹科技创新研究院 High-depth scanning imaging system
CN113916881A (en) * 2020-07-08 2022-01-11 株式会社湖碧驰 Three-dimensional tomography inspection apparatus and image acquisition method
CN114486917A (en) * 2022-01-27 2022-05-13 中国农业银行股份有限公司 Detection system and detection equipment
CN114414530A (en) * 2022-01-28 2022-04-29 福州大学 Biomolecule self-reference detection method and device
CN114414530B (en) * 2022-01-28 2023-07-28 福州大学 Biomolecule self-reference detection method and device
CN115989990A (en) * 2023-03-24 2023-04-21 之江实验室 Optical coherence tomography endoscopic imaging system based on planar optical waveguide technology

Also Published As

Publication number Publication date
CN108514404B (en) 2021-08-10

Similar Documents

Publication Publication Date Title
CN108514404A (en) Optical coherence tomography system
WO2019183838A1 (en) Optical coherence tomography system
US11067381B2 (en) Common-path integrated low coherence interferometry system and method therefor
AU2002212105B2 (en) Optical amplification in coherent optical frequency modulated continuous wave reflectometry
CN105842257B (en) A kind of the glass subsurface defect detection device and method of sub-micrometer scale
CN108572161B (en) Optical coherence tomography device based on sub-wavefront interferometer
JP5214883B2 (en) Method and apparatus for three-dimensional spectrally encoded imaging
US7929148B2 (en) Optical coherence tomography implementation apparatus and method of use
CN101617935B (en) Method and system for wide-spectrum and high-resolution detection based on space-time light splitting in OCT
US7508523B2 (en) Interferometric system for complex image extraction
CN101427911B (en) Method and system for detecting ultra-broadband optical spectrum of ultrahigh-resolution spectrum field OCT
CN109115804A (en) A kind of device and method of quantitative detection glass subsurface defect
EP1432960A2 (en) Optical amplification in coherence reflectometry
AU2001285718A1 (en) Optical amplification in coherence reflectometry
CN104224117B (en) It is a kind of optical spectrum encoded confocal imaging method and system to be cooperateed with optical coherence tomography
CN113791036A (en) High-speed spectral domain optical coherence tomography system based on Michelson interferometer
CN206063128U (en) A kind of compound speckle noise reduction system of angle of full tunnel modulating-coding
CN109363638B (en) Common-path type optical coherence tomography device with long working distance
CN201481402U (en) Time/space beam split-based broad-spectrum high-resolution probe system in OCT system
JP2020024222A (en) Optical coherence tomography device-purpose optical interference unit
CN108872234A (en) Single fiber OCT system based on LPG
US20230341222A1 (en) Systems, methods, and media for multiple beam optical coherence tomography
Liu et al. Interferometer-in-spectrometer for high-resolution optical coherence tomography
US20240133674A1 (en) High-resolution handheld oct imaging system
US20060114472A1 (en) Fizeau interferometer designs for optical coherence tomography

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant