CN105277118B - A kind of optical maser wavelength modification method using optical maser wavelength amendment type corner reflector laser interferometer - Google Patents
A kind of optical maser wavelength modification method using optical maser wavelength amendment type corner reflector laser interferometer Download PDFInfo
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- CN105277118B CN105277118B CN201510852540.7A CN201510852540A CN105277118B CN 105277118 B CN105277118 B CN 105277118B CN 201510852540 A CN201510852540 A CN 201510852540A CN 105277118 B CN105277118 B CN 105277118B
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Abstract
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of optical maser wavelength amendment type corner reflector laser interferometer, the optical maser wavelength amendment type corner reflector laser interferometer, including lasing light emitter, fixed corner reflector, photodetector, measurement angle reflector apparatus and spectroscope, the measurement angle reflector apparatus includes measurement corner reflector and accurate displacement device, and the accurate displacement device provides and testee displacement displacement in the same direction or reverse for the measurement corner reflector.In the application, the fractional part △ L for exceeding half of optical maser wavelength in testee actual displacement are also measured and added in displacement detecting result, and then so that the displacement result obtained measured by the laser interferometer of the application is more accurate, simultaneously in optical maser wavelength makeover process, accurate displacement device carries out some integer wavelength precise displacements, by the measurement accuracy for accurately apart from reverse environment equivalent laser wavelength, further improving laser interferometer of the present invention.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, more particularly to a kind of optical maser wavelength amendment type corner reflection
Mirror laser interferometer and wavelength modification method.
Background technology
The appearance of laser, developed rapidly ancient interference technique, laser has brightness height, good directionality, list
Color and the features such as good coherence, laser interferometry techniques comparative maturity.Laser interferometry system application is very wide
It is general：The detection measured such as linear scale, grating, gauge block, precision lead screw of accurate length, angle；Detection and localization in precision instrument
Control, the correction of system such as precision optical machinery；Position detecting system in large scale integrated circuit special equipment and detecting instrument；It is micro-
Measurement of small size etc..At present, in most of laser interference length-measuring systems, Michelson's interferometer or similar is all employed
Light channel structure, such as, currently used single frequency laser interferometer.
Single frequency laser interferometer is the light beam sent from laser, is divided into two-way by spectroscope after beam-expanding collimation, and divide
Congregation is not reflected from stationary mirror and moving reflector produce interference fringe on spectroscope.When moving reflector moves
When dynamic, the light intensity of interference fringe changes is converted to electric impulse signal by the photo-electric conversion element in receiver and electronic circuit etc.,
Input forward-backward counter calculates overall pulse number N after shaped, amplification, then presses calculating formula L=N × λ/2, formula by electronic computer
Middle λ is optical maser wavelength, calculates the displacement L of moving reflector.
In actual use, inventors herein have recognized that, current single frequency laser interferometer is only to laser interference ripple
Integer part is counted, i.e. can only most it is capable and experienced relate to when, i.e., most strong constructive interference when counted, and for laser interference
During, then it is difficult to count during non-most strong constructive interference, so that, its measurement accuracy is limited to the wavelength of laser, its precision
The integral multiple of half of optical maser wavelength is only, but in actually measuring, shift value caused by testee is generally all random
, it is impossible to just it is the integral multiple of half of optical maser wavelength, i.e. the fractional part beyond half of optical maser wavelength is also there are, should
Partial distance can not be reflected by above-mentioned receiver, so can not also calculate.Simultaneously because atmospheric environment
Change, such as the change of temperature, humidity and air pressure, optical maser wavelength changes in the environment, and this directly contributes laser interference
The precision of ranging reduces.
Although in conventional arts, the half wavelength of laser has high precision, with science skill
The progress of art, in Technology of Precision Measurement field, the required precision more and more higher of accurate measurement, the essence of this half of optical maser wavelength
Degree, can not increasingly meet the requirement of people again.
So based on above-mentioned deficiency, a kind of laser interferometer that more high measurement accuracy can be provided is needed badly at present.
The content of the invention
It is an object of the invention to be limited to optical maser wavelength for current laser interferometer precision, and measuring environment is to laser
A kind of deficiency that wavelength has a direct impact, there is provided laser interferometer with more high measurement accuracy.
In order to realize foregoing invention purpose, the invention provides following technical scheme：
A kind of optical maser wavelength amendment type corner reflector laser interferometer, including lasing light emitter, fixed corner reflector, photodetection
Device, measurement angle reflector apparatus and spectroscope, the measurement angle reflector apparatus include measurement corner reflector and filled with accurate displacement
Put, the laser beam that the lasing light emitter projects is divided into first laser beam and second laser beam, first laser beam after the spectroscope
Corner reflector is fixed described in directive, the spectroscope described in directive, then after spectroscope again after the fixed corner reflector reflection
Photodetector described in directive, second laser beam are measured after corner reflector reflects again to the measurement corner reflector through described
Spectroscope described in secondary directive, the photodetector described in directive after spectroscope, first laser beam is with second laser beam in directive institute
Interfered when stating photodetector, the measurement corner reflector is arranged on the accurate displacement device, the accurate displacement
Device is arranged on testee, and the accurate displacement device provides in the same direction with testee displacement for the measurement corner reflector
Or reverse displacement.
In the such scheme of the application, due to measurement corner reflector is arranged on accurate displacement device, and accurate displacement
Device is arranged on testee, and when testee is subjected to displacement, testee drives accurate displacement device, and then drives and survey
Angulation speculum, in this way, when testee is subjected to displacement, in displacement process, due to second laser Shu Guangcheng change, make
, the interference state of first laser beam and second laser beam also changes therewith, starts before measuring work, starts accurate displacement dress
Put, measurement corner reflector is produced displacement, the direction of displacement of the measurement corner reflector and the direction of displacement of testee are same
On one straight line, when photodetector detects most strong constructive interference, stop accurate displacement device, and photodetector is counted
Reset, then start to measure the displacement of testee again, in first laser beam and second laser beam interferometer state change process,
The times N of the most strong constructive interference of photodetectors register, when testee mobile end, when remaining static, photodetection
Device stops counting；Now, measurement corner reflector is moved on the direction of displacement of testee by accurate displacement device, and see
Light-metering electric explorer, when photodetector detects most strong constructive interference, stop accurate displacement device, and read accurate displacement
The shift value △ L that device provides for measurement corner reflector.
If displacement △ L are identical with the direction of displacement of testee, shift value L=N × λ caused by testee reality/
2+ (λ/2- △ L), wherein △ L ＜ λ/2, λ is optical maser wavelength in formula；
If the direction of displacement of displacement △ L and testee on the contrary, if, shift value L=N × λ caused by testee reality/
2+ △ L, wherein △ L ＜ λ/2, λ is optical maser wavelength in formula.
In this way, by said structure, the fractional part △ L of half of optical maser wavelength will be exceeded in testee actual displacement
Measure and add in displacement detecting result, and then cause the displacement result obtained measured by the laser interferometer of the application
More accurate, its accuracy is higher than half of optical maser wavelength, is specifically dependent upon the displacement accuracy that accurate displacement device can be provided.
As the preferred scheme of the application, the accurate displacement device includes support platform and is arranged on the support platform
On drive device, the support platform is engaged with the testee, and the drive device is the measurement corner reflector
Displacement on testee direction of displacement is in the same direction or reverse is provided.
As the preferred scheme of the application, the drive device is Piezoelectric drive device.
In this programme, the function ceramics that mechanical energy and electric energy can be changed mutually using Piezoelectric drive device
Material, the micro-displacement of its caused deformation quantity very little under electric field action, no more than thousand a ten thousandths of size itself,
With good repetitive distortion recovery capability, stability is good, precision is high, further increases the essence of the application accurate displacement device
True property and reliability.
As the preferred scheme of the application, the accurate displacement device also includes first be arranged in the support platform
Displacement piece and the second displacement part being arranged in first displacement piece, the drive device match with first displacement piece
Close, provide the displacement along the support platform for first displacement piece, first displacement piece has one relative to its displacement
The inclined inclined-plane in direction, the second displacement part are slidably arranged on the inclined-plane of first displacement piece, make the second displacement
Part can slide along the inclined-plane of first displacement piece, snug fit between first displacement piece and second displacement part, the survey
Angulation speculum is arranged on the second displacement part, and restraint device, the restraint device are additionally provided with the support platform
The second displacement part is limited along the motion on the first displacement piece direction of displacement so that when the first displacement piece is by the driving
Device is driven when producing displacement, and the second displacement part is driven by first displacement piece and produces displacement, also, described the
The direction of displacement of two displacement pieces and the direction of displacement of first displacement piece are perpendicular, inclined-plane and its position of first displacement piece
The angle for moving direction is A degree, 0<A<45.
In the such scheme of the application, drive device is engaged with the first displacement piece, is provided for the first displacement piece along branch
The displacement of platform is supportted, the first displacement piece has one to be slidably arranged in relative to the inclined inclined-plane of its direction of displacement, second displacement part
On the inclined-plane of first displacement piece, second displacement part is set to be slided along the inclined-plane of the first displacement piece, when accurate displacement device works,
Drive device provides certain displacement and promotes the first displacement piece, now, because restraint device limits second displacement part along first
Motion on displacement piece direction of displacement, make the direction of displacement of second displacement part and the direction of displacement of the first displacement piece perpendicular, such as
This, the displacement of second displacement part and drive device are that the displacement that the first displacement piece provides is related, also with the first displacement piece
Inclined-plane is related to the angle of its direction of displacement.
That is, if the inclined-plane of the first displacement piece and the angle of its direction of displacement are A degree, when the displacement that drive device provides is
During X, second displacement part in the drive device direction of motion caused displacement be Y=Xtan (A), in this way, when folder
When angle A is less than 45 degree, a displacement for being less than X values will be obtained, when further reducing included angle A, displacement Y also subtracts therewith
It is small, so so that in the scheme of the application, accurate displacement device directly enhances this in a manner of changing precision by stroke
Apply for the precision of accurate displacement device, also just further improve the measurement accuracy of the application laser interferometer.
As the preferred scheme of the application, it is additionally provided between first displacement piece and the support platform with magnetic
Magnetic part, the second displacement part has magnetic, and the second displacement part and the magnetic part are there is a natural attraction between the sexes state.So that
First displacement piece can keep being brought into close contact with second displacement part when being promoted, and ensure the essence of the application accurate displacement device
Degree, and then ensure the measurement accuracy of the application laser interferometer.
As the preferred scheme of the application, flexible member is additionally provided with the second displacement part.So that the first displacement piece
It when being promoted, can keep being in contact condition with second displacement part, ensure the precision of the application accurate displacement device, and then
Ensure the measurement accuracy of the application laser interferometer.
As the preferred scheme of the application, the second displacement part is integral type structure with the measurement corner reflector.
In such scheme, second displacement part is integral type structure with measurement corner reflector, that is to say, that directly second
One reflecting surface is set in displacement piece, makes itself to form measurement corner reflector, in this way, simplifying the knot of the application laser interferometer
Structure, convenient debugging and use.
In actual measuring environment, the measurement accuracy of laser interferometer is also influenceed by actual measuring environment, due in reality
It in the measuring environment of border, the change of the temperature of air, humidity and air pressure, can all cause the change of air dielectric, and then to swash
The wavelength of light can also change so that final result of calculation has error；
Although at present, there is also the device of measurement air refraction, to the atmospheric temperature, humidity and air pressure of single locus
Measure, optical maser wavelength is modified by wavelength compensation formula, but it is merely able to detect local air, and
In the displacement measurement field of the application, because its displacement is carried out in a region, the air of each position in the region
All be present situations such as variant, to be especially in the presence of larger thermograde, moist gradient and barometric gradient in each parameter, joined with single-point
There will be larger error for number amendment optical maser wavelength.
So for these reasons, in this application, inventor provide a kind of optical maser wavelength amendment of laser interferometer
Method, detect under current measuring environment, the environment effective wavelength λ ' of laser, and the λ ' values are the equivalent ripple of current measuring environment
It is long, so the problem of directly avoiding different zones air refraction difference and bringing, in this way, reducing the mistake that environmental factor is brought
Difference, and then the further measurement accuracy for improving the application laser interferometer.
Disclosed herein as well is a kind of optical maser wavelength modification method using above-mentioned laser interferometer, comprise the steps：
Step A：In needing to carry out the environment of displacement measurement using laser interferometer, corner reflector of the present invention is installed
Laser interferometer；
Step B：Measurement angle reflector apparatus is arranged on testee；
Step C：Corner reflector laser interferometer of the present invention is debugged, makes to form satisfactory light path, also, makes
One laser beam is in interference state with second laser beam；
Step D:Start accurate displacement device, move measurement corner reflector, when photodetector detects most strong phase length
During interference, stop accurate displacement device, and photodetector is counted and reset；
Step E：Accurate displacement device is again started up, traverse measurement corner reflector, makes photodetectors register most strong mutually long
The number M (M is positive integer) of interference, and read measurement angle mirror displacements value Z corresponding to most strong M times constructive interference；
Step F：According to Z=M × λ '/2, draw under current measuring environment, effective wavelength λ '=2Z/M of laser.
As the preferred scheme of the application, in the step D and E, the most strong constructive interference can also be most weak cancellation
Interference.In this programme, in optical maser wavelength makeover process, photodetector is to record first laser beam and second laser beam most
The number of weak destructive interference, the amendment for the optical maser wavelength that so can still realize.
Compared with prior art, beneficial effects of the present invention：
1st, it will also be measured beyond half of optical maser wavelength fractional part △ L in testee actual displacement and add to displacement
In testing result, and then so that the displacement result obtained measured by the laser interferometer of the application is more accurate, its precision is higher than
Half of optical maser wavelength, it is specifically dependent upon the displacement accuracy that accurate displacement device can be provided；
2nd, the effective wavelength λ ' of laser in measuring environment is detected, optical maser wavelength is modified, in this way, reducing environmental factor
The error brought, and then the further measurement accuracy for improving the application laser interferometer.
Brief description of the drawings：
Fig. 1 is the light path schematic diagram of laser interferometer structure of the present invention；
Fig. 2 is measurement corner reflector and the schematic diagram that second displacement part is integral type structure in the present invention；
Marked in figure：
1- lasing light emitters, 2- fix corner reflector, 3- photodetectors, 4- measurement angle reflector apparatus, 5- spectroscopes, 6- surveys
Angulation speculum, 7- accurate displacement devices, 8- first laser beams, 9- second laser beams, 10- testees, 11- support platforms,
12- drive devices, the displacement pieces of 13- first, 14- second displacement parts, 15- inclined-planes, 16- restraint devices, 17- magnetic parts, 18- elasticity
Element.
Embodiment
With reference to test example and embodiment, the present invention is described in further detail.But this should not be understood
Following embodiment is only limitted to for the scope of the above-mentioned theme of the present invention, it is all that this is belonged to based on the technology that present invention is realized
The scope of invention.
Embodiment 1
As shown in Figure 1, 2, a kind of optical maser wavelength amendment type corner reflector laser interferometer, including lasing light emitter 1, fixed angles are anti-
Mirror 2, photodetector 3, measurement angle reflector apparatus 4 and spectroscope 5 are penetrated, the measurement angle reflector apparatus 4 includes measurement angle
Speculum 6 and accurate displacement device 7, the laser beam that the lasing light emitter 1 projects are divided into first laser beam 8 after the spectroscope 5
With second laser beam 9, corner reflector 2 is fixed described in the directive of first laser beam 8, after the fixed corner reflector 2 reflects again
Spectroscope 5 described in directive, then the photodetector 3 described in directive after spectroscope 5, measurement angle described in the directive of second laser beam 9 are anti-
Mirror 6 is penetrated, the spectroscope 5 described in directive again after the measurement corner reflector 6 reflects, photoelectricity described in directive is visited after spectroscope 5
Device 3 is surveyed, first laser beam 8 interferes with second laser beam 9 in photodetector 3 described in directive, the measurement corner reflection
Mirror 6 is arranged on the accurate displacement device 7, and the accurate displacement device 7 is arranged on testee 10, the accurate displacement
Device 7 provides and the displacement of testee 10 displacement in the same direction or reverse for the measurement corner reflector 6.
In the present embodiment, due to measurement corner reflector 6 is arranged on accurate displacement device 7, and accurate displacement device 7 is set
Put on testee 10, when testee 10 is subjected to displacement, testee 10 drives accurate displacement device 7, and then drives
Corner reflector 6 is measured, in this way, when testee 10 is subjected to displacement, in displacement process, due to the light path of second laser beam 9
Change so that the interference state of first laser beam 8 and second laser beam 9 also changes therewith, starts before measuring work, starts accurate
Gearshift 7, measurement corner reflector 6 is set to produce displacement, the position of the direction of displacement and testee 10 of the measurement corner reflector 6
Move direction on the same line, when photodetector 3 detects most strong constructive interference, stop accurate displacement device 7, and by light
Electric explorer 3, which counts, to reset, and then starts to measure the displacement of testee 10 again, dry in first laser beam 8 and second laser beam 9
Relate in state change process, photodetector 3 records the times N of most strong constructive interference, when the mobile end of testee 10, is in
During inactive state, photodetector 3 stops counting；Now, measurement corner reflector 6 is made in measured object by accurate displacement device 7
Moved on the direction of displacement of body 10, and observe photodetector 3, when photodetector 3 detects most strong constructive interference, stopped
Accurate displacement device 7, and read the shift value △ L that accurate displacement device 7 provides for measurement corner reflector 6.
If displacement △ L are identical with the direction of displacement of testee 10, shift value L=N caused by the reality of testee 10
× λ/2+ (λ/2- △ L), wherein △ L ＜ λ/2, λ is optical maser wavelength in formula；
And if displacement △ L and testee 10 direction of displacement on the contrary, if, shift value L caused by the reality of testee 10
=N × λ/2+ △ L, wherein △ L ＜ λ/2, λ is optical maser wavelength in formula.
In this way, by said structure, the fractional part △ L of half of optical maser wavelength will be exceeded in the actual displacement of testee 10
Also measure and add in displacement detecting result, and then cause the displacement knot obtained measured by the laser interferometer of the application
Fruit is more accurate, and its precision is higher than half of optical maser wavelength, is specifically dependent upon the displacement accuracy that accurate displacement device 7 can be provided.
Embodiment 2
As shown in Figure 1, 2, laser interferometer as described in Example 1, the accurate displacement device 7 include support platform 11
With the drive device 12 being arranged in the support platform 11, the support platform 11 is engaged with the testee 10, institute
State drive device 12 and provide the displacement on the direction of displacement of testee 10, the drive device for the measurement corner reflector 6
12 be Piezoelectric drive device.
In the present embodiment, the Piezoelectric drive device 12 used can change mechanical energy and electric energy mutually
Ceramic material, its caused deformation quantity very little under electric field action, it is no more than thousand a ten thousandths of size itself
Micro-displacement, there is good repetitive distortion recovery capability, stability is good, precision is high, further increases smart in the present embodiment
The precision of mil moving device 7.
Embodiment 3
As shown in Figure 1, 2, laser interferometer as described in Example 2, the accurate displacement device 7 also include being arranged on institute
State the first displacement piece 13 and the second displacement part 14 being arranged in first displacement piece 13 in support platform 11, the driving
Device 12 is engaged with first displacement piece 13, and the displacement along the support platform 11 is provided for first displacement piece 13,
First displacement piece 13 has one to be slidably arranged in relative to the inclined inclined-plane 15 of its direction of displacement, the second displacement part 14
On the inclined-plane 15 of first displacement piece 13, the second displacement part 14 is set to be slided along the inclined-plane 15 of first displacement piece 13
Dynamic, snug fit between first displacement piece 13 and second displacement part 14, the measurement corner reflector 6 is arranged on described second
In displacement piece 14, restraint device 16 is additionally provided with the support platform 11, the restraint device 16 limits the second displacement
Part 14 is along the motion on the direction of displacement of the first displacement piece 13 so that when the first displacement piece 13 is driven by the drive device 12
And when producing displacement, the second displacement part 14 is driven by first displacement piece 13 and produces displacement, also, the second
It is perpendicular to move direction of displacement and the direction of displacement of first displacement piece 13 of part 14, the inclined-plane 15 of first displacement piece 13 and
The angle of its direction of displacement is A degree, preferably 0<A<45.
In embodiment, drive device 12 is engaged with the first displacement piece 13, is provided for the first displacement piece 13 flat along support
The displacement of platform 11, the first displacement piece 13 have one to slide and set relative to the inclined inclined-plane 15 of its direction of displacement, second displacement part 14
Put on the inclined-plane 15 of the first displacement piece 13, second displacement part 14 is slided along the inclined-plane 15 of the first displacement piece 13, in precision
When gearshift 7 works, drive device 12 provides certain displacement and promotes the first displacement piece 13, now, due to restraint device
16 limitation second displacement parts 14 make the direction of displacement and the of second displacement part 14 along the motion on the direction of displacement of the first displacement piece 13
The direction of displacement of one displacement piece 13 is perpendicular, in this way, the displacement of second displacement part 14 and drive device 12 are the first displacement piece
13 displacements provided are related, also related with the angle of its direction of displacement to the inclined-plane 15 of the first displacement piece 13.
That is, if the inclined-plane 15 of the first displacement piece 13 and the angle of its direction of displacement are A degree, when the position that drive device 12 provides
When shifting amount is X, second displacement part 14 in the direction of motion of drive device 12 caused displacement be Y=Xtan (A).
Preferably, when included angle A is less than 45 degree, a displacement for being less than X values will be obtained, when further reducing included angle A, position
Shifting amount Y also reduces therewith, so so that in the present embodiment, accurate displacement device 7 by stroke in a manner of changing precision, directly
The precision for improving the present embodiment accurate displacement device 7 is connect, also just further improves the survey of the present embodiment laser interferometer
Accuracy of measurement.
Embodiment 4
As shown in Fig. 2 laser interferometer as described in Example 3, first displacement piece 13 and the support platform 11
Between be additionally provided with the magnetic magnetic part 17 of tool, the second displacement part 14 has magnetic, the second displacement part 14 and institute
Magnetic part 17 is stated as there is a natural attraction between the sexes state, the second displacement part 14 is integral type structure with the measurement corner reflector 6.So that
When being promoted, measurement corner reflector 6 can keep being brought into close contact with second displacement part 14 first displacement piece 13, ensure the application
The precision of accurate displacement device 7, and then ensure the measurement accuracy of the application laser interferometer, second displacement part 14 and measurement angle are anti-
It is integral type structure to penetrate mirror 6, that is to say, that a reflecting surface is directly set on second displacement part 14, makes itself to form measurement
Corner reflector 6, in this way, the structure of the present embodiment laser interferometer is simplified, convenient debugging and use.
Embodiment 5
As shown in Figure 1, 2, laser interferometer as described in Example 3, the second displacement part 14 are additionally provided with bullet
Property element 18 so that the first displacement piece 13 can keep being in contact condition with second displacement part 14 when being promoted, and ensure this
Apply for the precision of accurate displacement device, and then ensure the measurement accuracy of the application laser interferometer.
Embodiment 6
As shown in Figure 1-2, a kind of optical maser wavelength modification method using embodiment 1-5 any one laser interferometer, bag
Include following step：
Step A：In needing to carry out the environment of displacement measurement using laser interferometer, corner reflector of the present invention is installed
Laser interferometer；
Step B：Measurement angle reflector apparatus 4 is arranged on testee 10；
Step C：Corner reflector laser interferometer of the present invention is debugged, makes to form satisfactory light path, also, makes
One laser beam 8 is in interference state with second laser beam 9；
Step D:Start accurate displacement device 7, move measurement corner reflector 6, when photodetector 3 detects most strong phase
During long interference, stop accurate displacement device 7, and photodetector 3 is counted into clearing；
Step E：Accurate displacement device 7 is again started up, traverse measurement corner reflector 6, photodetector 3 is recorded most strong phase
The number M (M is positive integer) of long interference, and read measurement corner reflector 6 shift value Z corresponding to most strong M times constructive interference；
Step F：According to Z=M × λ '/2, draw under current measuring environment, effective wavelength λ '=2Z/M of laser.
In actual measuring environment, the measurement accuracy of laser interferometer is also influenceed by actual measuring environment, due in reality
It in the measuring environment of border, the change of the temperature of air, humidity and air pressure, can all cause the change of air dielectric, and then to swash
The wavelength of light can also change so that final result of calculation has error；
Although at present, there is also the device of measurement air refraction, to the atmospheric temperature, humidity and air pressure of single locus
Measure, optical maser wavelength is modified by wavelength compensation formula, but it is merely able to detect local air, and
In the displacement measurement field of the application, because its displacement is carried out in a region, the air of each position in the region
All there is situations such as variant, to be especially in the presence of larger thermograde, moist gradient and barometric gradient in each parameter, then with single-point
There will be larger error for parameters revision optical maser wavelength.
So for these reasons, in the present embodiment, inventor provide a kind of optical maser wavelength of laser interferometer and repair
Correction method, detect under current measuring environment, the environment effective wavelength λ ' of laser, and the λ ' values are the equivalent ripple of current measuring environment
It is long, so the problem of directly avoiding different zones air refraction difference and bringing, in this way, reducing the mistake that environmental factor is brought
Difference, and then the further measurement accuracy for improving the application laser interferometer.
Embodiment 7
As shown in Figure 1-2, optical maser wavelength modification method as described in Example 6, the step D into step E, it is described most
Strong constructive interference is most weak destructive interference.
Above example only not limits technical scheme described in the invention to illustrate the present invention, although this explanation
Book is with reference to above-mentioned each embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned specific implementation
Mode, therefore any the present invention is modified or equivalent substitution；And the technical side of all spirit and scope for not departing from invention
Case and its improvement, it all should cover among scope of the presently claimed invention.
Claims (2)
- A kind of 1. optical maser wavelength modification method using optical maser wavelength amendment type corner reflector laser interferometer, it is characterised in that Comprise the steps：Step A：In needing to carry out the environment of displacement measurement using laser interferometer, the corner reflector laser interference is installed Instrument；Step B：Measurement angle reflector apparatus is arranged on testee；Step C：The corner reflector laser interferometer is debugged, makes to form satisfactory light path, also, makes first laser beam Interference state is in second laser beam；Step D:Start accurate displacement device, move measurement corner reflector, when photodetector detects that most strong phase length is dry When relating to, stop accurate displacement device, and photodetector is counted and reset；Step E：Accurate displacement device is again started up, traverse measurement corner reflector, makes photodetectors register most strong mutually long dry The number M, M related to is positive integer, and reads measurement angle mirror displacements value Z corresponding to most strong M times constructive interference；Step F：According to Z=M × λ '/2, draw under current measuring environment, effective wavelength λ '=2Z/M of laser；It is described to swash Optical wavelength amendment type corner reflector laser interferometer, including lasing light emitter, fixed corner reflector, photodetector, surveyAngulation reflector apparatus and spectroscope, the measurement angle reflector apparatus include measurement corner reflector and filled with accurate displacement Put, the laser beam that the lasing light emitter projects is divided into first laser beam and second laser beam, first laser beam after the spectroscope Corner reflector is fixed described in directive, the spectroscope described in directive, then after spectroscope again after the fixed corner reflector reflection Photodetector described in directive, second laser beam are measured after corner reflector reflects again to the measurement corner reflector through described Spectroscope described in secondary directive, the photodetector described in directive after spectroscope, first laser beam is with second laser beam in directive institute Interfered when stating photodetector, the measurement corner reflector is arranged on the accurate displacement device, the accurate displacement Device is arranged on testee, and the accurate displacement device provides in the same direction with testee displacement for the measurement corner reflector Or reverse displacement, the accurate displacement device include support platform and the drive device being arranged in the support platform, institute State support platform to be engaged with the testee, the drive device is provided in measured object position for the measurement corner reflector The displacement moved on direction, the drive device is Piezoelectric drive device, in addition to is arranged in the support platform First displacement piece and the second displacement part being arranged in first displacement piece, the drive device and the first displacement piece phase Coordinate, provide the displacement along the support platform for first displacement piece, first displacement piece has one relative to its position The inclined inclined-plane in direction is moved, the second displacement part is slidably arranged on the inclined-plane of first displacement piece, makes the second Moving part can slide along the inclined-plane of first displacement piece, and snug fit between first displacement piece and second displacement part is described Measurement corner reflector is arranged on the second displacement part, and restraint device is additionally provided with the support platform, described about to get one's things ready The limitation second displacement part is put along the motion on the first displacement piece direction of displacement so that when the first displacement piece is by the drive When dynamic device drives and produces displacement, the second displacement part is driven by first displacement piece and produces displacement, also, described The direction of displacement of second displacement part and the direction of displacement of first displacement piece are perpendicular, the inclined-plane of first displacement piece and its The angle of direction of displacement is A degree, 0<A<45, set on the second displacement part and have elastic component so that second displacement part with First displacement piece keeps contact condition；The magnetic magnetic of tool is additionally provided between first displacement piece and the support platform Part, the second displacement part have magnetic, and the second displacement part and the magnetic part are there is a natural attraction between the sexes state；The second It is integral type structure that part, which is moved, with the measurement corner reflector.
- 2. optical maser wavelength modification method as claimed in claim 1, it is characterised in that the step D is into step E, institute It can also be most weak destructive interference to state most strong constructive interference.
Priority Applications (1)
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