CN104104267A - Piezoelectric actuator in d15 shearing mode and precision micropositioner - Google Patents
Piezoelectric actuator in d15 shearing mode and precision micropositioner Download PDFInfo
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- CN104104267A CN104104267A CN201410363266.2A CN201410363266A CN104104267A CN 104104267 A CN104104267 A CN 104104267A CN 201410363266 A CN201410363266 A CN 201410363266A CN 104104267 A CN104104267 A CN 104104267A
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Abstract
The invention discloses a piezoelectric actuator in a d15 shearing mode and a precision micropositioner comprising the piezoelectric actuator and belongs to the technical field of precision driving. The piezoelectric actuator in the d15 shearing mode comprises a piezoelectric ceramic main body, and the piezoelectric ceramic main body comprises a substrate, a first piezoelectric ceramic cantilever beam and a second piezoelectric ceramic cantilever beam, wherein the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are located on the substrate and can generate d15 shearing mode deformation. The first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are vertically arranged and are positioned in the length direction of the substrate, the top end of the first piezoelectric ceramic cantilever beam and the top end of the second piezoelectric ceramic cantilever beam are connected with a first flexible inversely V-shaped frame for being connected with an active cell, and the first flexible inversely V-shaped frame converts d15 shearing mode deformation of the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam into an elliptic motion track. The piezoelectric actuator in the d15 shearing mode has the advantages of being small in size, large in deformation and high in output force.
Description
Technical field
The present invention relates to accurate Driving technique field, refer to especially a kind of d of employing
15the piezoelectric actuator of shear mode and comprise the precise jiggle platform of this piezoelectric actuator.
Background technology
1998, the people such as Japan Kurosawa have proposed a kind of high speed, high thrust V-arrangement linear ultrasonic motor, as shown in Figure 1, its piezoelectric actuator comprises the Langevin-type transducer 6 of two symmetrical configuration, when two Langevin-type transducers 6 do stretching motion in the same way simultaneously, form symmetrical mode, now, on the drive end of piezoelectric actuator, form the vibration of vertical direction, as shown in Figure 2; When two Langevin-type transducers 6 do reverse each other stretching motion, form antisymmetry mode simultaneously, now, on the drive end of piezoelectric actuator, form the rectilinear motion of horizontal direction, as shown in Figure 3.It is spatially the phase difference of pi/2 that the upper effect due to these two kinds of vibrations of end face motion of piezoelectric actuator forms, as long as inspire phase difference time response with pi/2 of these two kinds of mode of oscillations on end face, just can form elliptical trajectory on the drive end of piezoelectric actuator.If apply suitable precompression between piezoelectric actuator and mover (as draw runner), the drive end of mover and piezoelectric actuator is contacted, by frictional force effect, the drive end of piezoelectric actuator just can drive mover to do rectilinear motion.
As shown in Figure 4, the column construction of four square sectionals is connected by a square tapering part in termination another kind of piezoelectric actuator, is pasted with piezoelectric ceramic piece 7, for encouraging the flexural vibrations of square column part on each square column two faces outwardly.Four square columns are connected by a thin plate 8, for supporting piezoelectric actuator.Piezoelectric actuator has identical physical dimension in x direction with y direction, has in theory identical dynamic characteristic.Piezoelectric actuator cylindrical section can produce shape symmetric curvature mode of oscillation as shown in Figure 5 under piezoelectric ceramic piece effect, and antisymmetry flexural vibration mode as shown in Figure 6.Under these two mode, the vibration difference of the drive end 9 of piezoelectric actuator: in the time vibrating with symmetric curvature mode of oscillation, the drive end 9 of piezoelectric actuator only produces the vibration of z direction; In the time vibrating with antisymmetry flexural vibration mode, the drive end 9 of piezoelectric actuator produces the vibration of x direction.If the vibration of symmetric curvature mode of oscillation and antisymmetry flexural vibration mode is carried out simultaneously, and it is poor to have pi/2 phase, the drive end 9 of piezoelectric actuator just can form an elliptic motion, this elliptic motion can promote to press mover thereon to move along x axle, if phase difference is-pi/2 that mover is along the counter motion of x axle.Because piezoelectric actuator has the structure identical with xz plane in yz plane, can same energisation mode realize mover and move along the positive and negative direction of y axle.Therefore the piezoelectric actuator that, has this version can drive mover to realize the rectilinear motion of two degrees of freedom.
All there is following shortcoming in above-mentioned two schemes: (1) piezoelectric actuator obtains track ellipse by utilizing the resonance of two kinds of mode of oscillations to amplify amplitude, the mode of resonance can make the size of piezoelectric actuator become large, and size slightly hour, the frequency of vibration is very large, realizes more difficult; (2) the first piezoelectric actuator adopts d
31pattern distortion, the second piezoelectric actuator adopts d
33pattern distortion, the deflection of two kinds of pattern distortion is little, and piezoelectric actuator power output is low.
Summary of the invention
The invention provides a kind of d of employing
15the piezoelectric actuator of shear mode and comprise the precise jiggle platform of this piezoelectric actuator, it is little that this piezoelectric actuator has size; Deflection is large, the advantage that power output is high.
For solving the problems of the technologies described above, the invention provides technical scheme as follows:
A kind of d that adopts
15the piezoelectric actuator of shear mode, comprises piezoelectric ceramic main body, and described piezoelectric ceramic main body comprises substrate and is positioned on described substrate and can produces d
15the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam of shear mode distortion, described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are vertical to be arranged and arranges along described substrate length direction; Described the first piezoelectric ceramic cantilever beam is connected with the first flexible inverted V-shaped frame for being connected with mover with the top of the second piezoelectric ceramic cantilever beam, and described the first flexible inverted V-shaped frame is by the d of described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam
15shear mode distortion converts elliptical trajectory to.
Further, the shape of described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam is cylindricality cuboid, and its polarised direction is identical, is vertical direction or horizontal direction; The mode that powers up of described the first piezoelectric ceramic cantilever beam is: in two sides vertical with the length direction of described substrate, a side is connected with the first driving signal, another side ground connection; The mode that powers up of described the second piezoelectric ceramic cantilever beam is: correspondingly on two sides identical with described the first piezoelectric ceramic cantilever beam be connected with respectively two driving signal and ground connection.
Further, described first drive signal and two driving signal is sinusoidal signal and phase difference is pi/2.
Further, described piezoelectric ceramic main body also comprises and described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam material, identical the 3rd piezoelectric ceramic cantilever beam of structure and polarised direction and the 4th piezoelectric ceramic cantilever beam, described the first piezoelectric ceramic cantilever beam, the second piezoelectric ceramic cantilever beam, the 3rd piezoelectric ceramic cantilever beam and the 4th piezoelectric ceramic cantilever beam is rectangular arranges, the top of described the 3rd piezoelectric ceramic cantilever beam and the 4th piezoelectric ceramic cantilever beam is connected with the second flexible inverted V-shaped frame, described the second flexible inverted V-shaped frame is identical with structure with the material of described the first flexible inverted V-shaped frame.
Further, described the 3rd piezoelectric ceramic cantilever beam, the 4th piezoelectric ceramic cantilever beam and described the first piezoelectric ceramic cantilever beam, the second piezoelectric ceramic cantilever beam to power up mode contrary.
Further, the upper end of described the first flexible inverted V-shaped frame and the second flexible inverted V-shaped frame links together into a single integrated structure;
The mode that powers up of described the first piezoelectric ceramic cantilever beam is: in two sides vertical with the length direction of described substrate, a side is connected with the first driving signal, in two sides vertical with the Width of described substrate, a side is connected with the moving signal of 4 wheel driven, other side ground connection;
The mode that powers up of described the second piezoelectric ceramic cantilever beam is: the identical side of side surface direction that is connected with the first driving signal with described the first piezoelectric ceramic cantilever beam is connected with two driving signal, be connected with described the first piezoelectric ceramic cantilever beam the side that the side surface direction of the moving signal of 4 wheel driven is identical and be connected with the moving signal of 4 wheel driven, other side ground connection;
The mode that powers up of described the 3rd piezoelectric ceramic cantilever beam is: the identical side of side surface direction that is connected with the first driving signal with described the first piezoelectric ceramic cantilever beam is connected with the first driving signal, being connected with described the first piezoelectric ceramic cantilever beam side that the side surface direction of the moving signal of 4 wheel driven is identical is connected with the 3rd and drives signal, other side ground connection;
The mode that powers up of described the 4th piezoelectric ceramic cantilever beam is: the identical side of side surface direction that is connected with the first driving signal with described the first piezoelectric ceramic cantilever beam is connected with two driving signal, being connected with described the first piezoelectric ceramic cantilever beam side that the side surface direction of the moving signal of 4 wheel driven is identical is connected with the 3rd and drives signal, other side ground connection.
Further, described first drive signal and two driving signal is sinusoidal signal and phase difference is pi/2; The described the 3rd drives the moving signal of signal and 4 wheel driven to be sinusoidal signal and phase difference is pi/2; Described in can only conducting at one time, first drives signal and two driving signal or the described the 3rd to drive signal and the moving signal of 4 wheel driven.
Further, described the first flexible inverted V-shaped frame comprises the first feet, the second feet and is connected the Driving plane of described the first feet and the second feet, the bottom of described the first feet is connected with the top of described the first piezoelectric ceramic cantilever beam, the bottom of described the second feet is connected with the top of described the second piezoelectric ceramic cantilever beam, is provided with the contact for being connected with mover on described Driving plane.
Further, the quantity of described contact is 1, is positioned at the top of described Driving plane, and it is shaped as hemisphere or strip; Or the quantity of described contact is 2, described Driving plane top is provided with groove, and two contacts lay respectively at the both sides of described groove, described contact be shaped as hemisphere or strip.
Further, described piezoelectric ceramic main body is by making cutting after the polarization of monoblock piezoelectric ceramics block, the material of described contact is structural ceramics, the material of described the first flexible inverted V-shaped frame is metal material, described the first piezoelectric ceramic cantilever beam is connected with described the first flexible inverted V-shaped frame by epoxy glue with the second piezoelectric ceramic cantilever beam, and described the 3rd piezoelectric ceramic cantilever beam is connected with described the second flexible inverted V-shaped frame by epoxy glue with the 4th piezoelectric ceramic cantilever beam.
A kind of precise jiggle platform, comprises above-mentioned employing d
15the piezoelectric actuator of shear mode and the mover being connected with this piezoelectric actuator.
The present invention has following beneficial effect:
Compared with prior art, employing d of the present invention
15the piezoelectric actuator of shear mode utilizes the first flexible inverted V-shaped frame by the d of the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam
15the distortion that shear mode distortion converts two orthogonal directions to obtains track ellipse, does not need resonance can obtain very large ellipse, and piezoelectric actuator size is little; Piezoelectric actuator of the present invention adopts d
15shear mode, due to piezoelectric constant d
15normally d
33twice, be d
31four times, so comparatively speaking, situation lower piezoelectric pottery of the same race has larger distortion, piezoelectric actuator has higher power output; Therefore employing d of the present invention
15it is little that the piezoelectric actuator of shear mode has size; Deflection is large, the advantage that power output is high.
Meanwhile, applicant finds that the present invention also has the following advantages:
(1) piezoelectric actuator of the present invention does not need resonance can obtain track ellipse, can be within the scope of certain frequency arbitrary frequency point work and operating frequency adjustable, near avoided piezoelectric actuator to work resonance frequency limitation, has eliminated the impact that resonance frequency temperature drifts about on Piezo-actuator;
(2) piezoelectric ceramic main body of the present invention comprises substrate and is positioned at the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam on substrate, when work, only have the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam vibration deformation, substrate is indeformable, and the vibration deformation of the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam is not subject to the impact of substrate, therefore can directly fix this piezoelectric actuator by fixing base, fixing means is various and simple, accommodates fixed form and can not exert an influence to the performance of piezoelectric actuator;
(3) piezoelectric actuator of the present invention is simple in structure, processing technology is easy, the material of the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam is all piezoelectric ceramic, need not additionally paste piezoelectric ceramic piece, can accomplish in full accord with better simply technique, and the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam be deformed into detrusion, deformation stability is good;
Therefore employing d of the present invention
15it is wide that the piezoelectric actuator of shear mode also has operating frequency range, and resonance frequency temperature drift can not exert an influence to the performance of piezoelectric actuator; Accommodate and fix simply, accommodate fixed form and can not exert an influence to the performance of piezoelectric actuator; Simple in structure, simple process, the advantage that stability is high.
Brief description of the drawings
Fig. 1 is the structural representation of the first piezoelectric actuator of the prior art;
Fig. 2 is the symmetrical mode schematic diagram of the first piezoelectric actuator of the prior art;
Fig. 3 is the antisymmetry mode schematic diagram of the first piezoelectric actuator of the prior art;
Fig. 4 is the structural representation of the second piezoelectric actuator of the prior art;
Fig. 5 is the symmetric curvature mode of oscillation schematic diagram of the second piezoelectric actuator of the prior art;
Fig. 6 is the antisymmetry flexural vibration mode schematic diagram of the second piezoelectric actuator of the prior art;
Fig. 7 is employing d of the present invention
15the structural representation of the piezoelectric actuator of shear mode;
Fig. 8 is the structural representation of the piezoelectric ceramic main body in the present invention;
Fig. 9 is the first structural representation of the first flexible inverted V-shaped frame in the present invention;
Figure 10 is the second structural representation of the first flexible inverted V-shaped frame in the present invention;
Figure 11 is employing d of the present invention
15the working state schematic representation of the piezoelectric actuator of shear mode;
Figure 12 is employing d of the present invention
15the operating state decomposing schematic representation of the piezoelectric actuator of shear mode;
Figure 13 is the oscillogram that first in the present invention drives signal and two driving signal;
Figure 14 is employing d of the present invention
15the first polarization mode of the piezoelectric actuator of shear mode and power up mode schematic diagram;
Figure 15 is employing d of the present invention
15the second polarization mode of the piezoelectric actuator of shear mode and power up mode schematic diagram;
Figure 16 is employing d of the present invention
15the distortion schematic diagram of the piezoelectric actuator of shear mode;
Figure 17 is the reduced graph of the first structure of the first flexible inverted V-shaped frame in the present invention;
Figure 18 is the reduced graph of the second structure of the first flexible inverted V-shaped frame in the present invention;
Figure 19 is the improved employing of the first of the present invention d
15the structural representation of the piezoelectric actuator of shear mode;
Figure 20 is the structural representation of the improved piezoelectric ceramic main body of the first of the present invention;
Figure 21 is the improved employing of the first of the present invention d
15the operating state decomposing schematic representation of the piezoelectric actuator of shear mode;
Figure 22 is the improved employing of the second of the present invention d
15the structural representation of the piezoelectric actuator of shear mode;
Figure 23 is the structural representation of the improved piezoelectric ceramic main body of the second of the present invention;
Figure 24 is the improved employing of the second of the present invention d
15the mode that the powers up schematic diagram of the piezoelectric actuator of shear mode;
Figure 25 is the oscillogram that the 3rd in the present invention drives signal and the moving signal of 4 wheel driven;
Figure 26 is the improved employing of the second of the present invention d
15the first working state schematic representation of the piezoelectric actuator of shear mode;
Figure 27 is the improved employing of the second of the present invention d
15the second working state schematic representation of the piezoelectric actuator of shear mode.
Embodiment
For technical problem, technical scheme and advantage that embodiments of the invention will be solved are clearer, be described in detail below in conjunction with the accompanying drawings and the specific embodiments.
On the one hand, the invention provides a kind of d of employing
15the piezoelectric actuator of shear mode, as shown in Fig. 7 to Figure 15, comprises piezoelectric ceramic main body 1, and piezoelectric ceramic main body 1 comprises substrate 11 and is positioned on substrate 11 and can produces d
15the first piezoelectric ceramic cantilever beam 12 of shear mode distortion and the second piezoelectric ceramic cantilever beam 13, the first piezoelectric ceramic cantilever beams 12 and the vertical setting of the second piezoelectric ceramic cantilever beam 13 are also arranged along substrate 11 length directions; The first piezoelectric ceramic cantilever beam 12 and the top of the second piezoelectric ceramic cantilever beam 13 are connected with the flexible inverted V-shaped frame 2 of the first flexible inverted V-shaped frame 2, the first for being connected with mover 4 by the d of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13
15shear mode distortion converts elliptical trajectory to.
In the course of work, the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 are polarized and powered up, can make the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 produce in the horizontal direction micron order vibration deformation, the vibration that the first flexible inverted V-shaped frame 2 produces the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 in the horizontal direction converts elliptical orbit motion to.When piezoelectric actuator and mover 4 being come in contact to one of piezoelectric actuator pretightning force upwards, the frictional force promotion mover 4 that the elliptic motion of the first flexible inverted V-shaped frame 2 forms moves.
Compared with prior art, employing d of the present invention
15the piezoelectric actuator of shear mode utilizes the first flexible inverted V-shaped frame 2 by the d of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13
15the distortion that shear mode distortion converts two orthogonal directions to obtains track ellipse, does not need resonance can obtain very large ellipse, and piezoelectric actuator size is little; Piezoelectric actuator of the present invention adopts d
15shear mode, due to piezoelectric constant d
15normally d
33twice, be d
31four times, so comparatively speaking, situation lower piezoelectric pottery of the same race has larger distortion, piezoelectric actuator has higher power output; Therefore employing d of the present invention
15it is little that the piezoelectric actuator of shear mode has size; Deflection is large, the advantage that power output is high.
Meanwhile, applicant finds that the present invention also has the following advantages:
(1) piezoelectric actuator of the present invention does not need resonance can obtain track ellipse, can be within the scope of certain frequency arbitrary frequency point work and operating frequency adjustable, near avoided piezoelectric actuator to work resonance frequency limitation, has eliminated the impact that resonance frequency temperature drifts about on Piezo-actuator;
(2) piezoelectric ceramic main body 1 of the present invention comprises substrate 11 and is positioned at the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 on substrate 11, when work, only have the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 vibration deformations, substrate 11 is indeformable, and the vibration deformation of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is not subject to the impact of substrate 11, therefore can directly fix this piezoelectric actuator by fixing base 11, fixing means is various and simple, accommodating fixed form can not exert an influence to the performance of piezoelectric actuator,
(3) piezoelectric actuator of the present invention is simple in structure, processing technology is easy, the material of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is all piezoelectric ceramic, need not additionally paste piezoelectric ceramic piece, can accomplish in full accord with better simply technique, and the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 be deformed into detrusion, deformation stability is good;
Therefore employing d of the present invention
15it is wide that the piezoelectric actuator of shear mode also has operating frequency range, and resonance frequency temperature drift can not exert an influence to the performance of piezoelectric actuator; Accommodate and fix simply, accommodate fixed form and can not exert an influence to the performance of piezoelectric actuator; Simple in structure, simple process, the advantage that stability is high.
The d of the first piezoelectric ceramic cantilever beam 12 of the present invention and the second piezoelectric ceramic cantilever beam 13
15shape, the polarization mode of shear mode distortion and the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 and to power up mode relevant, can select and can produce d
15various shapes, the polarization mode of shear mode distortion and power up the combination of mode, preferably, as shown in Figure 14 and Figure 15, the shape of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is cylindricality cuboid, its polarised direction is identical, is vertical direction or horizontal direction (direction of arrow in figure); The mode that powers up of the first piezoelectric ceramic cantilever beam 12 is: in two sides vertical with the length direction of substrate 11, it (is A in figure that a side is connected with the first driving signal
1 (t)), another side ground connection; The mode that powers up of the second piezoelectric ceramic cantilever beam 13 is: on two sides identical with the first piezoelectric ceramic cantilever beam 12, the corresponding two driving signal that is connected with respectively (is B in figure
1 (t)) and ground connection; Above-mentioned being connected with on the side that drives signal and ground connection is provided with electrode, and preferred, electrode is coated on side, is hereinafter connected with on the side that drives signal and ground connection and is also provided with electrode.
The shape of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is cylindricality cuboid, and its polarised direction is vertical direction or horizontal direction, and such electroceramics cantilever beam structure is simple, easy to process; When vertical direction polarization, as shown in figure 14, E
1=0, E
2≠ 0, E
3=0 S
4=d
15e
2, in figure, arrow is depicted as polarised direction, obtain sizable track ellipse, but impact is larger in inoperative plane after powering up in working face (being elliptical orbit plane); Comparatively speaking, when horizontal direction polarization, E
1≠ 0, E
2=0, E
3=0 S
5=d
15e
1, S
4=d
15e
2, in figure, arrow is depicted as polarised direction, obtains track ellipse slightly little after powering up in working face, but the impact in inoperative plane is very little, can select as required any one polarization mode wherein.
Corresponding with shape and the polarization mode of above-mentioned the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13, first drives signal and two driving signal can be sinusoidal signal and phase difference is pi/2, illustrate the production process of track ellipse below, as shown in Figure 12 and Figure 13:
Getting Q point on the first flexible inverted V-shaped frame, to analyze it be how to produce elliptic motion, the first piezoelectric ceramic cantilever beam 12 of piezoelectric actuator is in two sides vertical with the length direction of substrate 11, and it (is A in figure that a side (being left surface in figure) is connected with the first driving signal
1 (t)), another side (being right flank in figure) ground connection, the second piezoelectric ceramic cantilever beam 13 on two sides identical with the first piezoelectric ceramic cantilever beam 12 corresponding be connected with respectively two driving signal and ground connection (in figure be left surface connect B
1 (t), right flank ground connection), wherein, drive signal A
1 (t)and B
1 (t)as shown in figure 13;
According to the inverse piezoelectric effect of piezoelectric, when driving signal A
1 (t)and B
1 (t)in Figure 13 1. time, A
1 (t)and B
1 (t)all for just, all there is detrusion left in the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 now, and piezoelectric actuator deforms left, and now Q point is at oval high order end, as in Figure 12 1.;
When driving signal A
1 (t)and B
1 (t)in Figure 13 2. time, A
1 (t)for negative, B
1 (t)for just, there is detrusion to the right in the first piezoelectric ceramic cantilever beam 12 now, there is detrusion left in the second piezoelectric ceramic cantilever beam 13, the first flexible inverted V-shaped frame 2 in piezoelectric actuator is subject to the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 to middle extruding and upwards distortion, now Q point oval the top as Figure 12 in 2.;
When driving signal A
1 (t)and B
1 (t)in Figure 13 3. time, A
1 (t)and B
1 (t)be all negative, all there is detrusion to the right in the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 now, and piezoelectric actuator is out of shape to the right, and now Q point is at oval low order end, as in Figure 12 3.;
When driving signal A
1 (t)and B
1 (t)in Figure 13 4. time, A
1 (t)for just, B
1 (t)for negative, there is detrusion left in the first piezoelectric ceramic cantilever beam 12 now, there is detrusion to the right in the second piezoelectric ceramic cantilever beam 13, the first flexible inverted V-shaped frame 2 in piezoelectric actuator is subject to the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 to the stretching of both sides and distortion downwards, now Q point at ellipse bottom, as in Figure 12 4.;
When driving signal A
1 (t)and B
1 (t)while variation so that in Figure 13,1. 2. 3. 4. mode periodicity is continuous, Q names a person for a particular job and produces in Figure 12 1. 2. 3. continuous modification 4., thereby form the elliptical trajectory that Q is ordered, the first flexible inverted V-shaped frame 2 and mover 4 are contacted all the time produce when frictional force when apply a suitable pretightning force to piezoelectric actuator, this piezoelectric actuator can be exported continuous displacement.
As a modification of the present invention, as shown in Figure 19 and Figure 20, piezoelectric ceramic main body 1 also comprises and the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 materials, identical the 3rd piezoelectric ceramic cantilever beam 14 of structure and polarised direction and the 4th piezoelectric ceramic cantilever beam 15, the first piezoelectric ceramic cantilever beam 12, the second piezoelectric ceramic cantilever beam 13, the 3rd piezoelectric ceramic cantilever beam 14 and the 4th piezoelectric ceramic cantilever beam 15 is rectangular arranges, the top of the 3rd piezoelectric ceramic cantilever beam 14 and the 4th piezoelectric ceramic cantilever beam 15 is connected with the second flexible inverted V-shaped frame 3, the second flexible inverted V-shaped frame 3 is identical with structure with the material of the first flexible inverted V-shaped frame 2.Increase the contact of the flexible inverted V-shaped frame 3 of the second flexible inverted V-shaped frame 3, the second and the contact of the first flexible inverted V-shaped frame 2 and cooperatively interacted, can increase the power output of piezoelectric actuator; And two groups of contact symmetric motions can make the displacement movement of piezoelectric actuator output continuously smooth.
Corresponding, as shown in figure 21, the 3rd piezoelectric ceramic cantilever beam 14, the 4th piezoelectric ceramic cantilever beam 15 and the first piezoelectric ceramic cantilever beam 12, the second piezoelectric ceramic cantilever beam 13 to power up mode contrary.
Concrete, the first piezoelectric ceramic cantilever beam 12 is in two sides vertical with the length direction of substrate 11, and it (is A in figure that a side (being left surface in figure) is connected with the first driving signal
1 (t)), another side (being right flank in figure) ground connection, the second piezoelectric ceramic cantilever beam 13 on two sides identical with the first piezoelectric ceramic cantilever beam 12 corresponding be connected with respectively two driving signal and ground connection (in figure be left surface connect B
1 (t)right flank ground connection), the 3rd piezoelectric ceramic cantilever beam 14, the 4th piezoelectric ceramic cantilever beam 15 (in the figure left surface ground connection of three piezoelectric ceramic cantilever beam 14, right flank connection A contrary to the mode that powers up of the first piezoelectric ceramic cantilever beam 12, the second piezoelectric ceramic cantilever beam 13
1 (t), the left surface ground connection of the 4th piezoelectric ceramic cantilever beam 15, right flank connects B
1 (t)), wherein, drive signal A
1 (t)and B
1 (t)as shown in figure 13;
Illustrate the production process of track ellipse below, for operation principle is clearly described, Figure 19 is drawn as to expanded view form, as shown in figure 21:
Get the Q on the contact of the first flexible inverted V-shaped frame
1point, the Q on the contact of the second flexible inverted V-shaped frame
2it is how to produce elliptic motion that point is analyzed them, according to the inverse piezoelectric effect of piezoelectric, when driving signal A
1 (t)with B
1 (t)in Figure 13 1. time, drive signal A
1 (t)with B
1 (t)all for just, all there is detrusion left, Q in the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13
1put to left movement now Q
1point is positioned at oval high order end, and detrusion to the right all occurs for the 3rd piezoelectric ceramic cantilever beam 14 and the 4th piezoelectric ceramic cantilever beam 15, Q
2point moves right, now Q
2point is positioned at oval low order end, as in Figure 21 1.;
When driving signal A
1 (t)with B
1 (t)in Figure 13 2. time, A
1 (t)for negative, B
1 (t)for just, there is detrusion to the right in the first piezoelectric ceramic cantilever beam 12 now, and detrusion left, Q occur the second piezoelectric ceramic cantilever beam 13
1point is distortion upwards, now Q
1point is positioned at oval the top, and detrusion left occurs the 3rd piezoelectric ceramic cantilever beam 14, and detrusion to the right occurs the 4th piezoelectric ceramic cantilever beam 15, Q
2point is distortion upwards, now Q
2point is positioned at oval the top, as in Figure 21 2.;
When driving signal A
1 (t)with B
1 (t)in Figure 13 3. time, drive signal A
1 (t)with B
1 (t)be all negative, all there is detrusion to the right, Q in the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 now
1point moves right, now Q
1point is positioned at oval low order end, and detrusion left all occurs for the 3rd piezoelectric ceramic cantilever beam 14 and the 4th piezoelectric ceramic cantilever beam 15, Q
2put to left movement now Q
2point is positioned at oval high order end, as in Figure 21 3.;
When driving signal A
1 (t)with B
1 (t)in Figure 13 4. time, A
1 (t)for just, B
1 (t)for negative, there is detrusion left in the first piezoelectric ceramic cantilever beam 12 now, and detrusion to the right, Q occur the second piezoelectric ceramic cantilever beam 13
1point is distortion downwards, now Q
1point is positioned at ellipse bottom, and detrusion to the right occurs the 3rd piezoelectric ceramic cantilever beam 14, and detrusion left occurs the 4th piezoelectric ceramic cantilever beam 15, Q
2point is distortion downwards, now Q
2point be positioned at oval bottom, as in Figure 21 4.;
When driving signal A
1 (t)with B
1 (t)while variation so that in Figure 13,1. 2. 3. 4. mode periodicity is continuous, Q
1point and Q
2name a person for a particular job and produce in Figure 21 1. 2. 3. continuous modification 4., thereby form the elliptical trajectory of two groups of contacts, the ellipse forming due to two groups of contacts is symmetrical ellipse, contact and mover 4 are contacted all the time produce when frictional force when apply a suitable pretightning force to piezoelectric actuator, this piezoelectric actuator can be exported continuous displacement.
As another kind of improvement of the present invention, as shown in Figure 22 to Figure 27, the Driving plane of the first flexible inverted V-shaped frame 2 and the second flexible inverted V-shaped frame 3 links together into a single integrated structure;
The mode that powers up of the first piezoelectric ceramic cantilever beam 12 is: in two sides vertical with the length direction of substrate 11, it (is A in figure that a side (being left surface in figure) is connected with the first driving signal
1 (t)), in two sides vertical with the Width of substrate 11, it (is B in figure that a side (being trailing flank in figure) is connected with the moving signal of 4 wheel driven
2 (t)), other side ground connection;
The mode that powers up of the second piezoelectric ceramic cantilever beam 13 is: being connected with the side that the side surface direction of the first driving signal is identical (being left surface in figure) with the first piezoelectric ceramic cantilever beam 12, to be connected with two driving signal (be B in figure
1 (t)), being connected with the first piezoelectric ceramic cantilever beam 12 side (being trailing flank in figure) that the side surface direction of the moving signal of 4 wheel driven is identical, to be connected with the moving signal of 4 wheel driven (be B in figure
2 (t)), other side ground connection;
The mode that powers up of the 3rd piezoelectric ceramic cantilever beam 14 is: being connected with the side that the side surface direction of the first driving signal is identical (being left surface in figure) with the first piezoelectric ceramic cantilever beam 12, to be connected with the first driving signal (be A in figure
1 (t)), be connected with the 3rd to drive signal (be B in figure in the side that direction is identical, side (being trailing flank in figure) that is connected with the moving signal of 4 wheel driven with the first piezoelectric ceramic cantilever beam 12
1 (t)), other side ground connection;
The mode that powers up of the 4th piezoelectric ceramic cantilever beam 15 is: being connected with the side that the side surface direction of the first driving signal is identical (being left surface in figure) with the first piezoelectric ceramic cantilever beam 12, to be connected with two driving signal (be B in figure
1 (t)), be connected with the 3rd to drive signal (be B in figure in the side that direction is identical, side (being trailing flank in figure) that is connected with the moving signal of 4 wheel driven with the first piezoelectric ceramic cantilever beam 12
1 (t)), other side ground connection;
In above-mentioned piezoelectric actuator, substrate 11 can be rectangle or square, and during for square, an optional direction is as length direction.
Above-mentioned piezoelectric actuator is a two degrees of freedom piezoelectric actuator, contact can be at the flat in-plane moving of YZ, contact is divided into two states at the flat in-plane moving of YZ, one is to move along Y-axis in contact in YZ plane, corresponding is exactly the state shown in Figure 27, another kind is to move along Z axis in contact in YZ plane, corresponding is exactly the state shown in Figure 26, when moving at every turn, contact can only select a kind of state in Figure 26 or Figure 27, another state is in halted state, want to make contact from a bit moving to another point in YZ plane, can realize by switching Figure 26 and Figure 27 two states, the switching of state is by driving signal A
1 (t), B
1 (t)and A
2 (t), B
2 (t)break-make realize, the advantage of this piezoelectric actuator is only just can realize a two-dimentional motion with a piezoelectric actuator, the structure of full symmetric has been avoided the impact of the extraneous factors such as temperature on Piezo-actuator, and four piezoelectric ceramic cantilever beams are worked simultaneously and can be increased the power output of piezoelectric actuator.
Corresponding, as shown in Figure 13 and Figure 25, first drives signal and two driving signal is sinusoidal signal and phase difference is pi/2; The moving signal of the 3rd driving signal and 4 wheel driven is sinusoidal signal and phase difference is pi/2; Described in can only conducting at one time, first drives signal and two driving signal or the described the 3rd to drive signal and the moving signal of 4 wheel driven, and the production process of track ellipse is consistent with the first improvement of the present invention, repeats no more.
The first flexible inverted V-shaped frame 2 is by the d of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13
15shear mode distortion converts elliptical trajectory to, its structure has multiple, preferably, as shown in Figure 9 and Figure 10, comprise the first feet 21, the second feet 22 and the Driving plane 23 that is connected the first feet 21 and the second feet 22, the bottom of the first feet 21 is connected with the top of the first piezoelectric ceramic cantilever beam 12, and the bottom of the second feet 22 is connected with the top of the second piezoelectric ceramic cantilever beam 13, is provided with the contact 24 for being connected with mover 4 on Driving plane 23.The first flexible inverted V-shaped frame 2 of this structure is simple in structure, easy to process.
The structure of contact 24 and quantity have multiple combination mode, and for example quantity of contact 24 is 1, and this contact 241 is positioned at the top of Driving plane 23, and it is shaped as hemisphere or strip, as shown in figure 10; Or the quantity of contact 24 is 2, Driving plane 23 tops are provided with 25, two contacts of groove 242 and 243 and lay respectively at the both sides of groove 25, contact 24 be shaped as hemisphere or strip, as shown in Figure 9.When the quantity of contact 24 is 1, High power output, when the quantity of contact 24 is 2, operating efficiency is high, therefore can select arbitrarily according to actual needs the one in two schemes, specifically derives below:
The analytical method that produces elliptic motion due to the first piezoelectric ceramic cantilever beam 12 and second vertical direction of piezoelectric ceramic cantilever beam 13 and the polarization mode of horizontal direction and the mode that powers up is similar, the polarization mode of getting vertical direction here, i.e. S
4=d
15e
2, and first drive signal and two driving signal as shown in figure 13;
When the quantity of contact 24 is 2, as shown in FIG. 16 and 17, getting Q point on P point and the contact 243 on the contact 242 on the first flexible inverted V-shaped frame 2, to analyze it be how to produce elliptic motion:
Wherein order
There is y
1(t)=Asin ω t;
In like manner can obtain y
2(t)=Acos ω t;
Based on d
15piezoelectric actuator in when piezoelectric ceramic generation detrusion, can make the first flexible inverted V-shaped frame 2 that strain occurs, below for easy analysis, suppose that two bars in the first flexible inverted V-shaped frame 2 connect by mechanical hinge, in the time there is detrusion in the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13, two variations that connecting rod is occurrence positions on the first flexible inverted V-shaped frame 2, do not deform, owing to just will the physical dimension of the first flexible inverted V-shaped frame 2 being carried out to qualitative analysis to the impact of contact track ellipse, hypothesis does not affect result like this, the first flexible inverted V-shaped frame 2 after simplification as shown in figure 17, wherein, PA=QC=a, AC=b, MA=MC, PQ=c,
Analysis can obtain the trajectory coordinates that P is ordered:
The track that P is ordered:
The track that in like manner Q is ordered:
Due to the size of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13, power up with polarization condition all constant, so the shearing strain quantity of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is certain, it is constant causing the displacement of P point and Q point X-direction, and the major axis of P point and Q locus of points ellipse is constant; Analysis can know, work as b, c is constant, and when a increases, the minor axis of P point and Q locus of points ellipse reduces; Work as a, c is constant, and when b increases, the minor axis of P point and Q locus of points ellipse increases; Work as a, b is constant, and when c increases, the minor axis of P point and Q locus of points ellipse diminishes; Therefore, in Figure 17, drift angle corresponding to isosceles trapezoidal bottom limit is larger, and distance between P point and Q point is less, and the minor axis of P point and Q locus of points ellipse is larger; Therefore the major axis of this piezoelectric actuator P point and Q locus of points ellipse is only relevant with the detrusion of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13, minor axis is only relevant with the size of the first flexible inverted V-shaped frame 2, therefore can obtain desirable motor power output and output speed by structural design easily.
When the quantity of contact 24 is 1, as shown in Figure 16 and 18, getting P point on the contact 241 on the first flexible inverted V-shaped frame 2, to analyze it be how to produce elliptic motion:
Wherein order
There is y
1(t)=Asin ω t;
In like manner can obtain y
2(t)=Acos ω t;
Based on d
15piezoelectric actuator in when piezoelectric ceramic generation detrusion, can make the first flexible inverted V-shaped frame 2 that strain occurs, below for easy analysis, suppose that two bars in the first flexible inverted V-shaped frame 2 connect by mechanical hinge, in the time of piezoelectric ceramic generation detrusion, two variations that connecting rod is occurrence positions on the first flexible inverted V-shaped frame 2, do not deform, owing to just for the physical dimension of the first flexible inverted V-shaped frame 2, the impact of P locus of points ellipse being carried out to qualitative analysis, hypothesis does not affect result like this, the first flexible inverted V-shaped frame 2 after simplification as shown in figure 18, wherein, PA=PC=a, AC=b, BA=BC,
Analysis can obtain the trajectory coordinates that P is ordered:
The track that P is ordered:
Due to the size of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13, power up with polarization condition all constant, so the shearing strain quantity of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is certain, it is constant causing the displacement of P point X-direction, and the major axis of P locus of points ellipse is constant; Analysis can be known, when the constant increase ellipse short shaft along with a of b diminishes; It is large that the minor axis of the constant increase ellipse with b of a becomes, and is about to the first flexible inverted V-shaped frame and regards an isosceles triangle as, and the drift angle on isosceles triangle base is larger, and the minor axis of P locus of points ellipse is larger; Therefore the major axis of this piezoelectric actuator contact track ellipse is only relevant with the detrusion of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13, minor axis is only relevant with the size of the first flexible inverted V-shaped frame 2, therefore can obtain desirable motor power output and output speed by structural design easily.
Can find that by software emulation analysis single contact drives relative double-contact to drive and has larger power output, but single-contact efficiency is lower than double-contact, therefore can select arbitrarily according to actual needs the one in two schemes.
In above-mentioned piezoelectric ceramic actuator, the material of contact 24 can be the wear-resisting structural ceramics such as aluminium oxide or zirconia, the material of the first flexible inverted V-shaped frame 2 can be the metal materials such as copper, stainless steel, titanium alloy, the first piezoelectric ceramic cantilever beam 12 is connected with the first flexible inverted V-shaped frame 2 by epoxy glue with the second piezoelectric ceramic cantilever beam 13, and the 3rd piezoelectric ceramic cantilever beam 14 is connected with the second flexible inverted V-shaped frame 3 by epoxy glue with the 4th piezoelectric ceramic cantilever beam 15.
On the other hand, the invention provides a kind of precise jiggle platform, comprise above-mentioned employing d
15the piezoelectric actuator of shear mode and the mover being connected with this piezoelectric actuator.
Compared with prior art, the employing d in precise jiggle platform of the present invention
15the piezoelectric actuator of shear mode utilizes the first flexible inverted V-shaped frame 2 by the d of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13
15shear mode distortion converts track ellipse to, does not need resonance can obtain very large ellipse, and piezoelectric actuator size is little, causes the size of precise jiggle platform little; Piezoelectric actuator of the present invention adopts d
15shear mode, due to piezoelectric constant d
15normally d
33twice, be d
31four times, so comparatively speaking, situation lower piezoelectric pottery of the same race has larger distortion, piezoelectric actuator has higher power output, causes precise jiggle platform to have higher power output; Therefore it is little that precise jiggle platform of the present invention has size; Deflection is large, the advantage that power output is high.
Simultaneously, applicant finds that the present invention also has the following advantages: (1) piezoelectric actuator of the present invention does not need resonance can obtain track ellipse, can be within the scope of certain frequency arbitrary frequency point work and operating frequency adjustable, near avoided piezoelectric actuator to work resonance frequency limitation, has eliminated the impact that resonance frequency temperature drifts about on Piezo-actuator, (2) piezoelectric ceramic main body 1 of the present invention comprises substrate 11 and is positioned at the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 on substrate 11, when work, only have the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 vibration deformations, substrate 11 is indeformable, and the vibration deformation of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is not subject to the impact of substrate 11, therefore can directly fix this piezoelectric actuator by fixing base 11, fixing means is various and simple, accommodating fixed form can not exert an influence to the performance of piezoelectric actuator, (3) piezoelectric actuator of the present invention is simple in structure, processing technology is easy, the material of the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 is all piezoelectric ceramic, need not additionally paste piezoelectric ceramic piece, can accomplish in full accord with better simply technique, and the first piezoelectric ceramic cantilever beam 12 and the second piezoelectric ceramic cantilever beam 13 be deformed into detrusion, deformation stability is good, therefore it is wide that precise jiggle platform of the present invention also has operating frequency range, resonance frequency temperature drift can not exert an influence to the performance of piezoelectric actuator, accommodate and fix simply, accommodate fixed form and can not exert an influence to the performance of piezoelectric actuator, simple in structure, simple process, the advantage that stability is high.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, do not departing under the prerequisite of principle of the present invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (11)
1. one kind adopts d
15the piezoelectric actuator of shear mode, is characterized in that, comprises piezoelectric ceramic main body, and described piezoelectric ceramic main body comprises substrate and is positioned on described substrate and can produces d
15the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam of shear mode distortion, described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are vertical to be arranged and arranges along described substrate length direction; Described the first piezoelectric ceramic cantilever beam is connected with the first flexible inverted V-shaped frame for being connected with mover with the top of the second piezoelectric ceramic cantilever beam, and described the first flexible inverted V-shaped frame is by the d of described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam
15shear mode distortion converts elliptical trajectory to.
2. employing d according to claim 1
15the piezoelectric actuator of shear mode, is characterized in that, the shape of described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam is cylindricality cuboid, and its polarised direction is identical, is vertical direction or horizontal direction; The mode that powers up of described the first piezoelectric ceramic cantilever beam is: in two sides vertical with the length direction of described substrate, a side is connected with the first driving signal, another side ground connection; The mode that powers up of described the second piezoelectric ceramic cantilever beam is: correspondingly on two sides identical with described the first piezoelectric ceramic cantilever beam be connected with respectively two driving signal and ground connection.
3. employing d according to claim 2
15the piezoelectric actuator of shear mode, is characterized in that, described first drives signal and two driving signal is sinusoidal signal and phase difference is pi/2.
4. employing d according to claim 2
15the piezoelectric actuator of shear mode, it is characterized in that, described piezoelectric ceramic main body also comprises and described the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam material, identical the 3rd piezoelectric ceramic cantilever beam of structure and polarised direction and the 4th piezoelectric ceramic cantilever beam, described the first piezoelectric ceramic cantilever beam, the second piezoelectric ceramic cantilever beam, the 3rd piezoelectric ceramic cantilever beam and the 4th piezoelectric ceramic cantilever beam is rectangular arranges, the top of described the 3rd piezoelectric ceramic cantilever beam and the 4th piezoelectric ceramic cantilever beam is connected with the second flexible inverted V-shaped frame, described the second flexible inverted V-shaped frame is identical with structure with the material of described the first flexible inverted V-shaped frame.
5. employing d according to claim 4
15the piezoelectric actuator of shear mode, is characterized in that, described the 3rd piezoelectric ceramic cantilever beam, the 4th piezoelectric ceramic cantilever beam and described the first piezoelectric ceramic cantilever beam, the second piezoelectric ceramic cantilever beam to power up mode contrary.
6. employing d according to claim 4
15the piezoelectric actuator of shear mode, is characterized in that, the upper end of described the first flexible inverted V-shaped frame and the second flexible inverted V-shaped frame links together into a single integrated structure;
The mode that powers up of described the first piezoelectric ceramic cantilever beam is: in two sides vertical with the length direction of described substrate, a side is connected with the first driving signal, in two sides vertical with the Width of described substrate, a side is connected with the moving signal of 4 wheel driven, other side ground connection;
The mode that powers up of described the second piezoelectric ceramic cantilever beam is: the identical side of side surface direction that is connected with the first driving signal with described the first piezoelectric ceramic cantilever beam is connected with two driving signal, be connected with described the first piezoelectric ceramic cantilever beam the side that the side surface direction of the moving signal of 4 wheel driven is identical and be connected with the moving signal of 4 wheel driven, other side ground connection;
The mode that powers up of described the 3rd piezoelectric ceramic cantilever beam is: the identical side of side surface direction that is connected with the first driving signal with described the first piezoelectric ceramic cantilever beam is connected with the first driving signal, being connected with described the first piezoelectric ceramic cantilever beam side that the side surface direction of the moving signal of 4 wheel driven is identical is connected with the 3rd and drives signal, other side ground connection;
The mode that powers up of described the 4th piezoelectric ceramic cantilever beam is: the identical side of side surface direction that is connected with the first driving signal with described the first piezoelectric ceramic cantilever beam is connected with two driving signal, being connected with described the first piezoelectric ceramic cantilever beam side that the side surface direction of the moving signal of 4 wheel driven is identical is connected with the 3rd and drives signal, other side ground connection.
7. employing d according to claim 6
15the piezoelectric actuator of shear mode, is characterized in that, described first drives signal and two driving signal is sinusoidal signal and phase difference is pi/2; The described the 3rd drives the moving signal of signal and 4 wheel driven to be sinusoidal signal and phase difference is pi/2; Described in can only conducting at one time, first drives signal and two driving signal or the described the 3rd to drive signal and the moving signal of 4 wheel driven.
8. according to the employing d described in arbitrary claim in claim 1-7
15the piezoelectric actuator of shear mode, it is characterized in that, described the first flexible inverted V-shaped frame comprises the first feet, the second feet and is connected the Driving plane of described the first feet and the second feet, the bottom of described the first feet is connected with the top of described the first piezoelectric ceramic cantilever beam, the bottom of described the second feet is connected with the top of described the second piezoelectric ceramic cantilever beam, is provided with the contact for being connected with mover on described Driving plane.
9. employing d according to claim 8
15the piezoelectric actuator of shear mode, is characterized in that, the quantity of described contact is 1, is positioned at the top of described Driving plane, and it is shaped as hemisphere or strip; Or the quantity of described contact is 2, described Driving plane top is provided with groove, and two contacts lay respectively at the both sides of described groove, described contact be shaped as hemisphere or strip.
10. employing d according to claim 9
15the piezoelectric actuator of shear mode, it is characterized in that, described piezoelectric ceramic main body is by making cutting after the polarization of monoblock piezoelectric ceramics block, the material of described contact is structural ceramics, the material of described the first flexible inverted V-shaped frame is metal material, described the first piezoelectric ceramic cantilever beam is connected with described the first flexible inverted V-shaped frame by epoxy glue with the second piezoelectric ceramic cantilever beam, and described the 3rd piezoelectric ceramic cantilever beam is connected with described the second flexible inverted V-shaped frame by epoxy glue with the 4th piezoelectric ceramic cantilever beam.
11. 1 kinds of precise jiggle platforms, is characterized in that, comprise arbitrary described employing d in claim 1-10
15the piezoelectric actuator of shear mode and the mover being connected with this piezoelectric actuator.
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| CN105634326A (en) * | 2016-03-18 | 2016-06-01 | 河南师范大学 | Piezoelectric bimorph type inertial piezoelectric motor |
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| CN106817046A (en) * | 2017-04-01 | 2017-06-09 | 吉林大学 | A kind of rotating driver based on piezoelectric fabric |
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