CN104104267B - Piezoelectric actuator in d15 shearing mode and precision micropositioner - Google Patents
Piezoelectric actuator in d15 shearing mode and precision micropositioner Download PDFInfo
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- CN104104267B CN104104267B CN201410363266.2A CN201410363266A CN104104267B CN 104104267 B CN104104267 B CN 104104267B CN 201410363266 A CN201410363266 A CN 201410363266A CN 104104267 B CN104104267 B CN 104104267B
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Abstract
The invention discloses a piezoelectric actuator in a d15 shearing mode and a precision micropositioner comprising the piezoelectric actuator and belongs to the technical field of precision driving. The piezoelectric actuator in the d15 shearing mode comprises a piezoelectric ceramic main body, and the piezoelectric ceramic main body comprises a substrate, a first piezoelectric ceramic cantilever beam and a second piezoelectric ceramic cantilever beam, wherein the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are located on the substrate and can generate d15 shearing mode deformation. The first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam are vertically arranged and are positioned in the length direction of the substrate, the top end of the first piezoelectric ceramic cantilever beam and the top end of the second piezoelectric ceramic cantilever beam are connected with a first flexible inversely V-shaped frame for being connected with an active cell, and the first flexible inversely V-shaped frame converts d15 shearing mode deformation of the first piezoelectric ceramic cantilever beam and the second piezoelectric ceramic cantilever beam into an elliptic motion track. The piezoelectric actuator in the d15 shearing mode has the advantages of being small in size, large in deformation and high in output force.
Description
Technical field
The present invention relates to precision actuation technical field, particularly relates to one kind and adopts d15The piezoelectric actuator and bag of shear mode
Include the precise jiggle platform of the piezoelectric actuator.
Background technology
1998, Japanese Kurosawa et al. proposed a kind of high speed, high thrust V-arrangement linear ultrasonic motor, such as Fig. 1 institutes
Show, its piezoelectric actuator includes the Langevin-type transducer 6 of two symmetrical configurations, two Langevin-type transducers 6 do in the same direction stretching simultaneously
During motion, symmetrical mode is formed, now, the vibration of vertical direction is formed on the drive end of piezoelectric actuator, as shown in Figure 2；
When two Langevin-type transducers 6 do stretching motion reverse each other simultaneously, antisymmetry mode is formed, now, in piezoelectric actuator
The linear motion of horizontal direction is formed on drive end, as shown in Figure 3.Due to both vibrations in the end face motion of piezoelectric actuator
Effect formed spatially for pi/2 phase contrast, as long as inspire both mode of oscillations on end face time response tool
There is the phase contrast of pi/2, it is possible to form elliptical trajectory on the drive end of piezoelectric actuator.If in piezoelectric actuator and
Apply appropriate precompression between mover (such as draw runner), make the driving end in contact of mover and piezoelectric actuator, by the masterpiece that rubs
With the drive end of piezoelectric actuator can just drive mover to move along a straight line.
Another kind of piezoelectric actuator as shown in figure 4, four square sectionals column construction in termination by a square taper
Part connects, and each square column is pasted with piezoelectric ceramic piece 7 on two faces outwardly, for encouraging the bending vibration of square column part.
Four square columns are connected by a thin plate 8, for supporting piezoelectric actuator.Piezoelectric actuator has identical in x directions and y directions
Physical dimension, in theory with identical dynamic characteristic.Piezoelectric actuator cylindrical section can be produced under piezoelectric ceramic piece effect
Raw shape symmetric curvature mode of oscillation as shown in Figure 5, and antisymmetry flexural vibration mode as shown in Figure 6.In the two mode
Under, the vibration of the drive end 9 of piezoelectric actuator is different：When being vibrated with symmetric curvature mode of oscillation, the driving of piezoelectric actuator
End 9 only produces the vibration in z directions；When being vibrated with antisymmetry flexural vibration mode, the drive end 9 of piezoelectric actuator produces x side
To vibration.If the vibration of symmetric curvature mode of oscillation and antisymmetry flexural vibration mode is carried out simultaneously, and with pi/2 phase
Difference, the drive end 9 of piezoelectric actuator can just form an elliptic motion, and this elliptic motion can promote the mover edge being pressed in thereon
X-axis is moved, if phase contrast is-pi/2, mover is along x-axis adverse movement.Because piezoelectric actuator has and xz planes in yz planes
Identical structure, can same energisation mode realize that mover is moved along the positive and negative direction of y-axis.Therefore, with this structure shape
The piezoelectric actuator of formula can drive mover to realize the linear motion of two degree of freedom.
Above two scheme is all suffered from the drawback that：(1) piezoelectric actuator comes by using the resonance of two kinds of mode of oscillations
Amplify amplitude and obtain that track is oval, the mode of resonance can cause becoming large-sized for piezoelectric actuator, and size it is slightly smaller when, vibration
Frequency it is very big, realize relatively difficult；(2) the first piezoelectric actuator adopts d31Mode deformation, second piezoelectric actuator
Using d33Mode deformation, the deflection of both of which deformation is little, and piezoelectric actuator power output is low.
The content of the invention
The present invention provides one kind and adopts d15The piezoelectric actuator of shear mode and the precise jiggle including the piezoelectric actuator
Platform, the piezoelectric actuator has size little；Deflection is big, the high advantage of power output.
To solve above-mentioned technical problem, it is as follows that the present invention provides technical scheme：
One kind adopts d15The piezoelectric actuator of shear mode, including piezoelectric ceramics main body, the piezoelectric ceramics main body includes
Substrate and on the substrate and can produce d15The first piezoelectric ceramics cantilever beam and the second piezoelectricity pottery of shear mode deformation
Porcelain cantilever beam, the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam it is vertically arranged and along the zig side
To arrangement；The top of the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam is connected with for being connected with mover
First flexible inverted V-shaped frame, the described first flexible inverted V-shaped frame is by the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever
The d of beam15Shear mode deformation is converted into elliptical trajectory.
Further, to be cylindricality rectangular for the shape of the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam
Body, its polarised direction is identical, is vertical direction or horizontal direction；The first piezoelectric ceramics cantilever beam plus be electrically：
In two sides vertical with the length direction of the substrate, a side is connected with the first drive signal, another side
Ground connection；The second piezoelectric ceramics cantilever beam plus be electrically：With the first piezoelectric ceramics cantilever beam identical two
Correspondence is connected to the second drive signal and ground connection on side.
Further, first drive signal and the second drive signal are sinusoidal signal and phase contrast is pi/2.
Further, the piezoelectric ceramics main body also includes and the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics
The identical 3rd piezoelectric ceramics cantilever beam of cantilever beam material, structure and polarised direction and the 4th piezoelectric ceramics cantilever beam, institute
State the first piezoelectric ceramics cantilever beam, the second piezoelectric ceramics cantilever beam, the 3rd piezoelectric ceramics cantilever beam and the 4th piezoelectric ceramics cantilever
The top of the rectangular arrangement of beam, the 3rd piezoelectric ceramics cantilever beam and the 4th piezoelectric ceramics cantilever beam is connected with the second flexibility and falls
Wishbone, the described second flexible inverted V-shaped frame is identical with the material and structure of the described first flexible inverted V-shaped frame.
Further, the 3rd piezoelectric ceramics cantilever beam, the 4th piezoelectric ceramics cantilever beam and first piezoelectric ceramics
Cantilever beam, the second piezoelectric ceramics cantilever beam plus it is electrically contrary.
Further, the upper end of the described first flexible inverted V-shaped frame and the second flexible inverted V-shaped frame links together integral knot
Structure；
The first piezoelectric ceramics cantilever beam plus be electrically：In two sides vertical with the length direction of the substrate
In face, a side is connected with the first drive signal, in two sides vertical with the width of the substrate, a side
Face is connected with fourth drive signal, other side grounds；
The second piezoelectric ceramics cantilever beam plus be electrically：First is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of drive signal is connected with the second drive signal, is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of fourth drive signal is connected with fourth drive signal, other side grounds；
The 3rd piezoelectric ceramics cantilever beam plus be electrically：First is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of drive signal is connected with the first drive signal, is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of fourth drive signal is connected with the 3rd drive signal, other side grounds；
The 4th piezoelectric ceramics cantilever beam plus be electrically：First is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of drive signal is connected with the second drive signal, is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of fourth drive signal is connected with the 3rd drive signal, other side grounds.
Further, first drive signal and the second drive signal are sinusoidal signal and phase contrast is pi/2；It is described
3rd drive signal and fourth drive signal are sinusoidal signal and phase contrast is pi/2；Can only turn within the same time described
First drive signal and the second drive signal or the 3rd drive signal and fourth drive signal.
Further, the described first flexible inverted V-shaped frame includes the first support feet, the second support feet and connects described first
The Driving plane of spike and the second support feet, the top of the bottom of first support feet and the first piezoelectric ceramics cantilever beam
Connection, the bottom of second support feet is connected with the top of the second piezoelectric ceramics cantilever beam, sets on the Driving plane
It is equipped with the contact for being connected with mover.
Further, the quantity of the contact be 1, positioned at the top of the Driving plane, its be shaped as hemispherical or
Strip；Or, the quantity of the contact is 2, and the Driving plane top arranges fluted, and two contacts are located at respectively institute
State the both sides of groove, the contact is shaped as hemispherical or strip.
Further, piezoelectric ceramics main body cutting after monolithic piezoelectric ceramic block is polarized is obtained, the contact
Material be structural ceramicss, the material of the first flexible inverted V-shaped frame is metal material, the first piezoelectric ceramics cantilever beam and
Second piezoelectric ceramics cantilever beam is connected by epoxy glue with the described first flexible inverted V-shaped frame, the 3rd piezoelectric ceramics cantilever beam
It is connected with the described second flexible inverted V-shaped frame by epoxy glue with the 4th piezoelectric ceramics cantilever beam.
A kind of precise jiggle platform, including above-mentioned employing d15The piezoelectric actuator of shear mode and connect with the piezoelectric actuator
The mover for connecing.
The invention has the advantages that：
Compared with prior art, employing d of the invention15The piezoelectric actuator of shear mode is using the first flexible inverted V-shaped frame
By the first piezoelectric ceramics cantilever beam and the d of the second piezoelectric ceramics cantilever beam15Shear mode deformation is converted into two orthogonal directions
Deformation is oval to obtain track, it is not necessary to which resonance can obtain very big ellipse, and piezoelectric actuator size is little；The piezoelectricity of the present invention
Driver adopts d15Shear mode, due to piezoelectric constant d15Typically d33Twice, be d31Four times, so comparatively, together
Piezoelectric ceramics has bigger deformation in the case of kind, and piezoelectric actuator has higher power output；Therefore the employing d of the present invention15Cut
The piezoelectric actuator for cutting pattern has size little；Deflection is big, the high advantage of power output.
Meanwhile, it is found by the applicant that the present invention has further the advantage that：
(1) track is obtained by piezoelectric actuator of the invention need not resonate oval, can be appointed in the range of certain frequency
Meaning Frequency point work and operating frequency is adjustable, it is to avoid the limitation that piezoelectric actuator can only work near resonant frequency, disappears
Except impact of the resonance frequency temperature drift to Piezo-actuator；
(2) piezoelectric ceramics main body of the invention includes substrate and the first piezoelectric ceramics cantilever beam and second on substrate
Piezoelectric ceramics cantilever beam, during work, only the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam vibration deformation, substrate
It is indeformable, and the vibration deformation of the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam do not affected by substrate, because
This directly can fix the piezoelectric actuator by fixed substrate, and fixing meanss are various and simple, accommodate fixed form not
Impact can be produced on the performance of piezoelectric actuator；
(3) piezoelectric actuator simple structure of the invention, processing technique is easy, and the first piezoelectric ceramics cantilever beam and second is pressed
The all piezoelectric ceramics of material of electroceramics cantilever beam, without extra piezoelectric ceramic piece is pasted, and can be done with better simply technique
To completely the same, and the deformation of the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam is detrusion, and deformation is steady
It is qualitative good；
Therefore the employing d of the present invention15The piezoelectric actuator of shear mode also has operating frequency range width, resonance frequency temperature
Drift will not produce impact to the performance of piezoelectric actuator；Accommodate and fix simple, accommodating fixed form will not be to piezoelectric actuator
Performance produce impact；Simple structure, simple process, the high advantage of stability.
Description of the drawings
Fig. 1 is the structural representation of the first piezoelectric actuator of the prior art；
Fig. 2 is the symmetrical mode schematic diagram of the first piezoelectric actuator of the prior art；
Fig. 3 is the antisymmetry mode schematic diagram of the first piezoelectric actuator of the prior art；
Fig. 4 is the structural representation of second piezoelectric actuator of the prior art；
Fig. 5 is the symmetric curvature mode of oscillation schematic diagram of second piezoelectric actuator of the prior art；
Fig. 6 is the antisymmetry flexural vibration mode schematic diagram of second piezoelectric actuator of the prior art；
Fig. 7 is the employing d of the present invention15The structural representation of the piezoelectric actuator of shear mode；
Fig. 8 is the structural representation of the piezoelectric ceramics main body in the present invention；
Fig. 9 is the first structural representation of the first flexible inverted V-shaped frame in the present invention；
Figure 10 is second structural representation of the first flexible inverted V-shaped frame in the present invention；
Figure 11 is the employing d of the present invention15The working state schematic representation of the piezoelectric actuator of shear mode；
Figure 12 is the employing d of the present invention15The working condition decomposing schematic representation of the piezoelectric actuator of shear mode；
Figure 13 is the oscillogram of the first drive signal in the present invention and the second drive signal；
Figure 14 is the employing d of the present invention15The first polarization mode of the piezoelectric actuator of shear mode is electrically shown with adding
It is intended to；
Figure 15 is the employing d of the present invention15Second polarization mode of the piezoelectric actuator of shear mode is electrically shown with adding
It is intended to；
Figure 16 is the employing d of the present invention15The deformation schematic diagram of the piezoelectric actuator of shear mode；
Figure 17 is the simplification figure of the first structure of the first flexible inverted V-shaped frame in the present invention；
Figure 18 is the simplification figure of second structure of the first flexible inverted V-shaped frame in the present invention；
Figure 19 is the first improved employing d of the present invention15The structural representation of the piezoelectric actuator of shear mode；
Figure 20 is the structural representation of the first improved piezoelectric ceramics main body of the present invention；
Figure 21 is the first improved employing d of the present invention15The working condition of the piezoelectric actuator of shear mode is decomposed and is shown
It is intended to；
Figure 22 is second improved employing d of the present invention15The structural representation of the piezoelectric actuator of shear mode；
Figure 23 is the structural representation of second improved piezoelectric ceramics main body of the present invention；
Figure 24 is second improved employing d of the present invention15The power-up schematic diagram of the piezoelectric actuator of shear mode；
Figure 25 is the oscillogram of the 3rd drive signal in the present invention and fourth drive signal；
Figure 26 is second improved employing d of the present invention15The first working condition of the piezoelectric actuator of shear mode
Schematic diagram；
Figure 27 is second improved employing d of the present invention15Second working condition of the piezoelectric actuator of shear mode
Schematic diagram.
Specific embodiment
Technical problem, technical scheme and advantage to be solved embodiments of the invention is clearer, below in conjunction with
Drawings and the specific embodiments are described in detail.
On the one hand, the present invention provides one kind and adopts d15The piezoelectric actuator of shear mode, as shown in Fig. 7 to Figure 15, including
Piezoelectric ceramics main body 1, piezoelectric ceramics main body 1 includes substrate 11 and on substrate 11 and can produce d15Shear mode deformation
First piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13, the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics
Cantilever beam 13 is vertically arranged and arranges along the length direction of substrate 11；First piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever
The top of beam 13 is connected with the first flexible inverted V-shaped frame 2 for being connected with mover 4, and the first flexible inverted V-shaped frame 2 is by the first piezoelectricity
The d of the piezoelectric ceramics cantilever beam 13 of ceramic cantilever beam 12 and second15Shear mode deformation is converted into elliptical trajectory.
In the course of work, the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 are polarized and powered up, can
So that the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 produce in the horizontal direction micron order vibration and become
Shape, the first flexible inverted V-shaped frame 2 in the horizontal direction produces the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13
Raw vibration is converted into elliptical orbit motion.When causing piezoelectric actuator and mover to one pretightning force upwards of piezoelectric actuator
4 come in contact, and the frictional force that the elliptic motion of the first flexible inverted V-shaped frame 2 is formed promotes mover 4 to move.
Compared with prior art, employing d of the invention15The piezoelectric actuator of shear mode is using the first flexible inverted V-shaped frame 2
By the first piezoelectric ceramics cantilever beam 12 and the d of the second piezoelectric ceramics cantilever beam 1315Shear mode deformation is converted into two orthogonal sides
To deformation it is oval to obtain track, it is not necessary to resonance can obtain very big ellipse, and piezoelectric actuator size is little；The present invention's
Piezoelectric actuator adopts d15Shear mode, due to piezoelectric constant d15Typically d33Twice, be d31Four times, so it is relative and
Speech, it is of the same race in the case of piezoelectric ceramics have bigger deformation, piezoelectric actuator have higher power output；Therefore the employing of the present invention
d15The piezoelectric actuator of shear mode has size little；Deflection is big, the high advantage of power output.
Meanwhile, it is found by the applicant that the present invention has further the advantage that：
(1) track is obtained by piezoelectric actuator of the invention need not resonate oval, can be appointed in the range of certain frequency
Meaning Frequency point work and operating frequency is adjustable, it is to avoid the limitation that piezoelectric actuator can only work near resonant frequency, disappears
Except impact of the resonance frequency temperature drift to Piezo-actuator；
(2) piezoelectric ceramics main body 1 of the invention includes substrate 11 and the first piezoelectric ceramics cantilever beam on substrate 11
12 and the second piezoelectric ceramics cantilever beam 13, during work, only the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam
13 vibration deformations, substrate 11 is indeformable, and the vibration of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13
Deformation is not affected by substrate 11, therefore directly can fix the piezoelectric actuator by fixed substrate 11, and fixing meanss are more
Sample and simple, accommodating fixed form will not produce impact to the performance of piezoelectric actuator；
(3) piezoelectric actuator simple structure of the invention, processing technique is easy, the first piezoelectric ceramics cantilever beam 12 and second
The all piezoelectric ceramics of material of piezoelectric ceramics cantilever beam 13, without extra piezoelectric ceramic piece is pasted, can be with better simply work
Skill accomplishes completely the same, and the deformation of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 becomes for shearing
Shape, deformation stability is good；
Therefore the employing d of the present invention15The piezoelectric actuator of shear mode also has operating frequency range width, resonance frequency temperature
Drift will not produce impact to the performance of piezoelectric actuator；Accommodate and fix simple, accommodating fixed form will not be to piezoelectric actuator
Performance produce impact；Simple structure, simple process, the high advantage of stability.
The first piezoelectric ceramics cantilever beam 12 of the present invention and the d of the second piezoelectric ceramics cantilever beam 1315Shear mode deform with
The shape of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13, polarization mode and add it is electrically relevant, can be with
From d can be produced15The variously-shaped, polarization mode of shear mode deformation and add combination electrically, it is preferred that such as Figure 14 and
Shown in Figure 15, the shape of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 is cylindricality cuboid, its pole
Change direction identical, be vertical direction or horizontal direction (direction of arrow in figure)；The power-up side of the first piezoelectric ceramics cantilever beam 12
Formula is：In two sides vertical with the length direction of substrate 11, a side is connected with the first drive signal and (is in figure
A1(t)), another side ground；Second piezoelectric ceramics cantilever beam 13 plus be electrically：With the first piezoelectric ceramics cantilever beam
It (is B in figure that correspondence is connected to the second drive signal on 12 sides of identical two1(t)) and ground connection；It is above-mentioned to be connected with driving
Electrode is provided with the side of signal and ground connection, it is preferred that electrode is coated on side, is hereinafter connected with drive signal
Electrode is also equipped with the side of ground connection.
The shape of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 is cylindricality cuboid, its polarization
Direction is vertical direction or horizontal direction, and such electroceramics cantilever beam structure is simple, easy to process；Vertical direction polarizes
When, as shown in figure 14, E1=0, E2≠0,E3=0 S4=d15·E2, arrow show polarised direction in figure, in work after power-up
Sizable track is obtained in plane (i.e. elliptical orbit plane) oval, but affect larger in inoperative plane；Comparatively,
When horizontal direction polarizes, E1≠0,E2=0, E3=0 S5=d15·E1, S4=d15·E2, arrow show polarised direction in figure,
Acquisition track ellipse is slightly smaller in working face after power-up, but the impact in inoperative plane is very little, can be according to need
Select any one polarization mode therein.
It is corresponding with the shape and polarization mode of above-mentioned first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13
, the first drive signal and the second drive signal can be sinusoidal signal and phase contrast is pi/2, track is specifically described below ellipse
Round generation process, as shown in Figure 12 and Figure 13：
Take the Q points on the first flexible inverted V-shaped frame to analyze it is how to produce elliptic motion, the first of piezoelectric actuator
In two sides vertical with the length direction of substrate 11, a side (being left surface in figure) is even for piezoelectric ceramics cantilever beam 12
It (is A in figure to be connected to the first drive signal1(t)), another side (being right flank in figure) ground connection, the second piezoelectric ceramics cantilever beam
13 are connected to the second drive signal and ground connection (figure corresponding with 12 identical of the first piezoelectric ceramics cantilever beam, two sides
In for left surface connect B1(t), right flank ground connection), wherein, drive signal A1(t)And B1(t)As shown in figure 13；
According to the inverse piezoelectric effect of piezoelectric, as drive signal A1(t)And B1(t)In Figure 13 1. when, A1(t)With
B1(t)All for just, the shearing that now the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 all occur to the left becomes
Shape, piezoelectric actuator deforms to the left, and now Q points are in oval high order end, in such as Figure 12 1.；
As drive signal A1(t)And B1(t)In Figure 13 2. when, A1(t)It is negative, B1(t)For just, now the first piezoelectricity is made pottery
There is detrusion to the right in porcelain cantilever beam 12, the second piezoelectric ceramics cantilever beam 13 occurs detrusion to the left, Piezoelectric Driving
The first flexible inverted V-shaped frame 2 in device is subject to the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 to centre
Extruding and it is upwardly-deformed, now Q points in oval the top such as Figure 12 2.；
As drive signal A1(t)And B1(t)In Figure 13 3. when, A1(t)And B1(t)All it is negative, now the first piezoelectric ceramics
All there is detrusion to the right in the piezoelectric ceramics cantilever beam 13 of cantilever beam 12 and second, piezoelectric actuator deforms to the right, now Q
Put in oval low order end, in such as Figure 12 3.；
As drive signal A1(t)And B1(t)In Figure 13 4. when, A1(t)For just, B1(t)It is negative, now the first piezoelectricity is made pottery
There is detrusion to the left in porcelain cantilever beam 12, the second piezoelectric ceramics cantilever beam 13 occurs detrusion to the right, Piezoelectric Driving
The first flexible inverted V-shaped frame 2 in device is subject to the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 to both sides
Stretching and deform downwards, now Q points are in oval bottom, in such as Figure 12 4.；
As drive signal A1(t)And B1(t)With in Figure 13 1. 2. 3. 4. mode periodically continued change when, Q points will produce Figure 12
In continuous modification 1. 2. 3. 4., so as to form the elliptical trajectory of Q points, when to piezoelectric actuator apply one it is appropriate pre-
When clamp force causes the first flexible inverted V-shaped frame 2 to contact generation frictional force all the time with mover 4, the piezoelectric actuator can the company of output
Continuous displacement.
Used as a modification of the present invention, as illustrated in figures 19 and 20, piezoelectric ceramics main body 1 also includes being made pottery with the first piezoelectricity
The material of 12 and second piezoelectric ceramics cantilever beam of porcelain cantilever beam 13, structure and the identical 3rd piezoelectric ceramics cantilever of polarised direction
The piezoelectric ceramics cantilever beam 15 of beam 14 and the 4th, the first piezoelectric ceramics cantilever beam 12, the second piezoelectric ceramics cantilever beam 13, the 3rd piezoelectricity
The rectangular arrangement of 14 and the 4th piezoelectric ceramics cantilever beam of ceramic cantilever beam 15, the 3rd piezoelectric ceramics cantilever beam 14 and the 4th piezoelectricity are made pottery
The top of porcelain cantilever beam 15 is connected with the second flexible inverted V-shaped frame 3, the material of the flexible inverted V-shaped frame 2 of the second flexible inverted V-shaped frame 3 and first
Matter is identical with structure.Increased the second flexible inverted V-shaped frame 3, contact and the first flexible inverted V-shaped of the second flexible inverted V-shaped frame 3
The contact of frame 2 cooperates, and can increase the power output of piezoelectric actuator；And two groups of contact symmetric motions drive can piezoelectricity
Dynamic device exports the displacement movement of continuously smooth.
Corresponding, as shown in figure 21, the 3rd piezoelectric ceramics cantilever beam 14, the 4th piezoelectric ceramics cantilever beam 15 and the first pressure
Electroceramics cantilever beam 12, the second piezoelectric ceramics cantilever beam 13 plus it is electrically contrary.
Specifically, the first piezoelectric ceramics cantilever beam 12 is in two sides vertical with the length direction of substrate 11, one
It (is A in figure that side (being left surface in figure) is connected with the first drive signal1(t)), another side (being right flank in figure) connects
Ground, the second piezoelectric ceramics cantilever beam 13 is connected to corresponding with 12 identical of the first piezoelectric ceramics cantilever beam, two sides
Second drive signal and ground connection (connect B in figure for left surface1(t), right flank ground connection), the 3rd piezoelectric ceramics cantilever beam the 14, the 4th
Piezoelectric ceramics cantilever beam 15 and the first piezoelectric ceramics cantilever beam 12, the second piezoelectric ceramics cantilever beam 13 plus electrically contrary (scheme
In the 3rd piezoelectric ceramics cantilever beam 14 left surface ground connection, right flank connection A1(t), the left side of the 4th piezoelectric ceramics cantilever beam 15
Face is grounded, right flank connection B1(t)), wherein, drive signal A1(t)And B1(t)As shown in figure 13；
The oval generation process in track is specifically described below, in order to clearly demonstrate operation principle, Figure 19 is drawn as to launch
Diagram form, as shown in figure 21：
Take the Q on the contact of the first flexible inverted V-shaped frame1Point, the Q on the contact of the second flexible inverted V-shaped frame2Put to analyze it
Be how to produce elliptic motion, according to the inverse piezoelectric effect of piezoelectric, as drive signal A1(t)With B1(t)In Figure 13
1. when, drive signal A1(t)With B1(t)All for just, the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 are all sent out
Raw detrusion to the left, Q1Point to left movement, now Q1Point is located at oval high order end, the He of the 3rd piezoelectric ceramics cantilever beam 14
All there is detrusion to the right, Q in the 4th piezoelectric ceramics cantilever beam 152Point is moved right, now Q2Point is located at the most right of ellipse
End, in such as Figure 21 1.；
As drive signal A1(t)With B1(t)In Figure 13 2. when, A1(t)It is negative, B1(t)For just, now the first piezoelectricity is made pottery
There is detrusion to the right in porcelain cantilever beam 12, the second piezoelectric ceramics cantilever beam 13 occurs detrusion to the left, Q1Point is upwards
Deform, now Q1Point is located at oval the top, and the 3rd piezoelectric ceramics cantilever beam 14 occurs detrusion to the left, the 4th piezoelectricity
There is detrusion to the right, Q in ceramic cantilever beam 152Point is upwardly-deformed, now Q2Point is located at oval the top, in such as Figure 21
2.；
As drive signal A1(t)With B1(t)In Figure 13 3. when, drive signal A1(t)With B1(t)All be it is negative, now first
All there is detrusion to the right, Q in the piezoelectric ceramics cantilever beam 13 of piezoelectric ceramics cantilever beam 12 and second1Point is moved right, now Q1
Point is located at oval low order end, and the 3rd piezoelectric ceramics cantilever beam 14 and the 4th piezoelectric ceramics cantilever beam 15 all occur cutting to the left
Shear deformation, Q2Point to left movement, now Q2Point is located at oval high order end, in such as Figure 21 3.；
As drive signal A1(t)With B1(t)In Figure 13 4. when, A1(t)For just, B1(t)It is negative, now the first piezoelectricity is made pottery
There is detrusion to the left in porcelain cantilever beam 12, the second piezoelectric ceramics cantilever beam 13 occurs detrusion to the right, Q1Point is downward
Deform, now Q1Point is located at oval bottom, and the 3rd piezoelectric ceramics cantilever beam 14 occurs detrusion to the right, the 4th piezoelectricity
There is detrusion to the left, Q in ceramic cantilever beam 152Point deforms downwards, now Q2Point is located at oval bottom, in such as Figure 21
4.；
As drive signal A1(t)With B1(t)With in Figure 13 1. 2. 3. 4. mode periodically continued change when, Q1Point and Q2Point will
Continuous modification 1. 2. 3. 4. in Figure 21 is produced, so as to form the elliptical trajectory of two groups of contacts, because two groups of contacts are formed
Ellipse be symmetrical ellipse, when to piezoelectric actuator apply an appropriate pretightning force contact is contacted all the time with mover 4
When producing frictional force, the piezoelectric actuator can export continuous displacement.
As another kind of improvement of the invention, as shown in Figure 22 to Figure 27, the flexible V of the first flexible inverted V-shaped frame 2 and second
The Driving plane of shape frame 3 links together into a single integrated structure；
First piezoelectric ceramics cantilever beam 12 plus be electrically：In two sides vertical with the length direction of substrate 11
In, it (is A in figure that a side (being left surface in figure) is connected with the first drive signal1(t)), in the width with substrate 11
In two vertical sides, it (is B in figure that a side (being trailing flank in figure) is connected with fourth drive signal2(t)), other sides
Face is grounded；
Second piezoelectric ceramics cantilever beam 13 plus be electrically：The first drive is being connected with the first piezoelectric ceramics cantilever beam 12
It (is B in figure that the side surface direction identical side (being left surface in figure) of dynamic signal is connected with the second drive signal1(t)), with
One piezoelectric ceramics cantilever beam 12 is connected with the side surface direction identical side (being trailing flank in figure) of fourth drive signal and is connected with
Fourth drive signal (is B in figure2(t)), other side grounds；
3rd piezoelectric ceramics cantilever beam 14 plus be electrically：The first drive is being connected with the first piezoelectric ceramics cantilever beam 12
It (is A in figure that the side surface direction identical side (being left surface in figure) of dynamic signal is connected with the first drive signal1(t)), with
One piezoelectric ceramics cantilever beam 12 is connected with side (being trailing flank in figure) the direction identical side of fourth drive signal and is connected with
3rd drive signal (is B in figure1(t)), other side grounds；
4th piezoelectric ceramics cantilever beam 15 plus be electrically：The first drive is being connected with the first piezoelectric ceramics cantilever beam 12
It (is B in figure that the side surface direction identical side (being left surface in figure) of dynamic signal is connected with the second drive signal1(t)), with
One piezoelectric ceramics cantilever beam 12 is connected with side (being trailing flank in figure) the direction identical side of fourth drive signal and is connected with
3rd drive signal (is B in figure1(t)), other side grounds；
In above-mentioned piezoelectric actuator, substrate 11 can be rectangle or square, and when being square, an optional direction is worked as
Do length direction.
Above-mentioned piezoelectric actuator is a two degrees of freedom piezoelectric actuator, and contact can exist in YZ move in plane, contact
YZ move in plane is divided into two states, and one kind is that contact is moved in YZ planes along Y-axis, and corresponding is exactly the shape shown in Figure 27
State, another kind is that contact is moved in YZ planes along Z axis, and corresponding is exactly the state shown in Figure 26, when contact is moved every time only
A kind of state in Figure 26 or Figure 27 can be selected, another state is in halted state, want to make contact from YZ planes
Any moves to another point, can be realized by switching Figure 26 and Figure 27 two states, and drive signal is leaned in the switching of state
A1(t), B1(t)And A2(t), B2(t)Break-make realizing；The advantage of the piezoelectric actuator is only can with a piezoelectric actuator
To realize the motion of a two dimension, full symmetric structure avoids shadow of the extraneous factors such as temperature to Piezo-actuator
Ring, and four piezoelectric ceramics cantilever beams work and can increase the power output of piezoelectric actuator simultaneously.
Corresponding, as shown in Figure 13 and Figure 25, the first drive signal and the second drive signal are sinusoidal signal and phase place
Difference is pi/2；3rd drive signal and fourth drive signal are sinusoidal signal and phase contrast is pi/2；Can only within the same time
First drive signal and the second drive signal or the 3rd drive signal and fourth drive signal are turned on, track is oval
Generation process with the present invention the first improvement it is consistent, repeat no more.
First flexible inverted V-shaped frame 2 is by the first piezoelectric ceramics cantilever beam 12 and the d of the second piezoelectric ceramics cantilever beam 1315Shearing
Mode deformation is converted into elliptical trajectory, and its structure has various, it is preferred that as shown in Figure 9 and Figure 10, including the first support feet
21st, the Driving plane 23 of the second support feet 22 and the first support feet 21 of connection and the second support feet 22, the bottom of the first support feet 21
End is connected with the top of the first piezoelectric ceramics cantilever beam 12, the bottom of the second support feet 22 and the second piezoelectric ceramics cantilever beam 13
Top connection, the contact 24 for being connected with mover 4 is provided with Driving plane 23.The flexible inverted V-shaped of the first of this structure
The simple structure of frame 2, it is easy to process.
The structure and quantity of contact 24 has multiple combination mode, and such as quantity of contact 24 is 1, and the contact 241 is located at
The top of Driving plane 23, it is shaped as hemispherical or strip, as shown in Figure 10；Or, the quantity of contact 24 is 2, is driven
The top of moved end face 23 arranges fluted 25, and respectively positioned at the both sides of groove 25, contact 24 is shaped as two contacts 242 and 243
Hemispherical or strip, as shown in Figure 9.When the quantity of contact 24 is 1, High power output, when the quantity of contact 24 is 2, work
Make efficiency high, therefore can arbitrarily select the one kind in two schemes according to actual needs, specifically derived below：
Due to the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 vertically and horizontally
Polarization mode is similar with the analysis method for electrically producing elliptic motion is added, and the polarization mode of vertical direction, i.e. S are taken here4=
d15·E2, and the first drive signal and the second drive signal are as shown in figure 13；
When the quantity of contact 24 is 2, as shown in FIG. 16 and 17, the P on the contact 242 on the first flexible inverted V-shaped frame 2 is taken
Put with the Q points on contact 243 to analyze it is how to produce elliptic motion：
Wherein make
Then there is y1(t)=Asin ω t；
Y can be obtained in the same manner2(t)=Acos ω t；
Based on d15Piezoelectric actuator in piezoelectric ceramics when there is detrusion, can make the first flexible inverted V-shaped frame 2 that bullet occurs
Property deformation, following for easy analysis, it is assumed that two bars in the first flexible inverted V-shaped frame 2 are connected by mechanical hinge, when
When first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 occur detrusion, on the first flexible inverted V-shaped frame 2
Simply there is the change of position in two connecting rods, do not deform, due to simply will be to the structure chi of the first flexible inverted V-shaped frame 2
The very little impact oval to contact track carries out qualitative analyses, so assumes not affecting result, the flexible inverted V-shaped of first after simplifying
Frame 2 is as shown in figure 17, wherein, PA=QC=a, AC=b, MA=MC, PQ=c；
Analysis can obtain the trajectory coordinates of P points：
The track of P points:
The track of Q points in the same manner：
Due to the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 size, power-up and polarization condition all
It is constant, so the shearing strain quantity of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 is certain, cause P
The displacement of point and Q point X-directions is constant, i.e. the oval major axis of P points and the Q locus of points is constant；Analysis it is recognised that work as b,
C is constant, and when a increases, the oval short axle of P points and the Q locus of points reduces；Work as a, c is constant, when b increases, P points and the Q locus of points are oval
Short axle increases；Work as a, b is constant, when c increases, the oval short axle of P points and the Q locus of points diminishes；Therefore, isosceles trapezoidal bottom side in Figure 17
Corresponding drift angle is bigger, and the distance between P points and Q points are less, and the oval short axle of P points and the Q locus of points is bigger；Therefore the piezoelectricity
The oval major axis of driver P point and the Q locus of points only with the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13
Detrusion is relevant, and short axle is only relevant with the size of the first flexible inverted V-shaped frame 2, therefore easily can be set by structure
Meter obtains preferable motor power output and output speed.
When the quantity of contact 24 is 1, as shown in figs. 16 and 18, the P on the contact 241 on the first flexible inverted V-shaped frame 2 is taken
Put to analyze it is how to produce elliptic motion：
Wherein make
Then there is y1(t)=Asin ω t；
Y can be obtained in the same manner2(t)=Acos ω t；
Based on d15Piezoelectric actuator in piezoelectric ceramics when there is detrusion, can make the first flexible inverted V-shaped frame 2 that bullet occurs
Property deformation, following for easy analysis, it is assumed that two bars in the first flexible inverted V-shaped frame 2 are connected by mechanical hinge, when
When piezoelectric ceramics occurs detrusion, simply there is the change of position in two connecting rods on the first flexible inverted V-shaped frame 2, do not send out
Change shape, because the physical dimension just for the first flexible inverted V-shaped frame 2 carries out qualitative analyses to the oval impact of the P locus of points,
So assume not affecting result, the flexible inverted V-shaped frame 2 of first after simplifying is as shown in figure 18, wherein, PA=PC=a, AC=b, BA
=BC；
Analysis can obtain the trajectory coordinates of P points：
The track of P points:
Due to the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 size, power-up and polarization condition all
It is constant, so the shearing strain quantity of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 is certain, cause P
The displacement of point X-direction is constant, i.e. the oval major axis of the P locus of points is constant；Analysis is it is recognised that when b is constant with a's
Increase ellipse short shaft to diminish；The constant short axles oval with the increase of b of a becomes big, will the first flexible inverted V-shaped frame regard an isosceles as
Triangle, then the drift angle on isosceles triangle base is bigger, and the oval short axle of the P locus of points is bigger；Therefore the piezoelectric actuator contact
The oval major axis in track is only relevant with the detrusion of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13, short
Axle is only relevant with the size of the first flexible inverted V-shaped frame 2, therefore easily can obtain preferable motor by structure design
Power output and output speed.
By software emulation analysis it can be found that single contact drives relative double-contact to drive has bigger power output, but
Single-contact efficiency is lower than double-contact, therefore can arbitrarily select the one kind in two schemes according to actual needs.
In above-mentioned piezoelectric ceramic actuator, the material of contact 24 can be the structures such as wear-resisting aluminium oxide or zirconium oxide pottery
Porcelain, the material of the first flexible inverted V-shaped frame 2 can be the metal materials such as copper, rustless steel, titanium alloy, the first piezoelectric ceramics cantilever beam
12 and second piezoelectric ceramics cantilever beam 13 be connected with the first flexibility inverted V-shaped frame 2 by epoxy glue, the 3rd piezoelectric ceramics cantilever beam 14
It is connected with the second flexible inverted V-shaped frame 3 by epoxy glue with the 4th piezoelectric ceramics cantilever beam 15.
On the other hand, the present invention provides a kind of precise jiggle platform, including above-mentioned employing d15The piezoelectric actuator of shear mode
And the mover being connected with the piezoelectric actuator.
Compared with prior art, the employing d in precise jiggle platform of the invention15The piezoelectric actuator of shear mode utilizes
One flexible inverted V-shaped frame 2 is by the first piezoelectric ceramics cantilever beam 12 and the d of the second piezoelectric ceramics cantilever beam 1315Shear mode deformation turns
Change track into oval, it is not necessary to which resonance can obtain very big ellipse, piezoelectric actuator size is little, causes the chi of precise jiggle platform
It is very little little；The piezoelectric actuator of the present invention adopts d15Shear mode, due to piezoelectric constant d15Typically d33Twice, be d31Four
Times, so comparatively, it is of the same race in the case of piezoelectric ceramics there is bigger deformation, piezoelectric actuator has higher power output,
Cause precise jiggle platform that there is higher power output；Therefore the precise jiggle platform of the present invention has size little；Deflection is big, power output
High advantage.
Meanwhile, it is found by the applicant that the present invention has further the advantage that：(1) piezoelectric actuator of the invention need not resonate i.e.
Track can be obtained oval, can the arbitrary frequency point work and operating frequency is adjustable in the range of certain frequency, it is to avoid Piezoelectric Driving
The limitation that device can only work near resonant frequency, eliminates shadow of the resonance frequency temperature drift to Piezo-actuator
Ring；(2) piezoelectric ceramics main body 1 of the invention includes substrate 11 and the first piezoelectric ceramics cantilever beam 12 on substrate 11 and the
Two piezoelectric ceramics cantilever beams 13, during work, only the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 vibrate
Deformation, substrate 11 is indeformable, and the vibration deformation of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13 is not
Affected by substrate 11, therefore the piezoelectric actuator directly can be fixed by fixed substrate 11, fixing meanss it is various and
Simply, accommodating fixed form will not produce impact to the performance of piezoelectric actuator；(3) piezoelectric actuator structure of the invention letter
Single, processing technique is easy, all piezoelectricity potteries of material of the first piezoelectric ceramics cantilever beam 12 and the second piezoelectric ceramics cantilever beam 13
Porcelain, without extra piezoelectric ceramic piece is pasted, and can accomplish completely the same with better simply technique, and the first piezoelectric ceramics cantilever
The deformation of the piezoelectric ceramics cantilever beam 13 of beam 12 and second is detrusion, and deformation stability is good；Therefore the precise jiggle platform of the present invention
Also there is operating frequency range width, resonance frequency temperature drift will not produce impact to the performance of piezoelectric actuator；Accommodate and fix
Simply, accommodating fixed form will not produce impact to the performance of piezoelectric actuator；Simple structure, simple process, stability is high
Advantage.
The above is the preferred embodiment of the present invention, it is noted that for those skilled in the art
For, on the premise of without departing from principle of the present invention, some improvements and modifications can also be made, these improvements and modifications
Should be regarded as protection scope of the present invention.
Claims (9)
1. one kind adopts d15The piezoelectric actuator of shear mode, it is characterised in that including piezoelectric ceramics main body, the piezoelectric ceramics
Main body includes substrate and on the substrate and can produce d15The first piezoelectric ceramics cantilever beam and the of shear mode deformation
Two piezoelectric ceramics cantilever beams, the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam it is vertically arranged and along the base
Plate length direction is arranged；The top of the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam be connected with for it is dynamic
First flexible inverted V-shaped frame of son connection, the described first flexible inverted V-shaped frame is by the first piezoelectric ceramics cantilever beam and the second piezoelectricity
The d of ceramic cantilever beam15Shear mode deformation is converted into elliptical trajectory；
The shape of the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam is cylindricality cuboid, its polarised direction
It is identical, it is vertical direction or horizontal direction；The first piezoelectric ceramics cantilever beam plus be electrically：With the substrate
In two vertical sides of length direction, a side is connected with the first drive signal, another side ground；Second pressure
Electroceramics cantilever beam plus be electrically：Connect respectively corresponding with described first piezoelectric ceramics cantilever beam identical, two sides
It is connected to the second drive signal and ground connection；
First drive signal and the second drive signal are sinusoidal signal and phase contrast is pi/2.
2. employing d according to claim 115The piezoelectric actuator of shear mode, it is characterised in that the piezoelectric ceramics master
Body also includes and the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam material, structure and the complete phase of polarised direction
The 3rd piezoelectric ceramics cantilever beam together and the 4th piezoelectric ceramics cantilever beam, the first piezoelectric ceramics cantilever beam, the second piezoelectricity pottery
Porcelain cantilever beam, the 3rd piezoelectric ceramics cantilever beam and the rectangular arrangement of the 4th piezoelectric ceramics cantilever beam, the 3rd piezoelectric ceramics hangs
The top of arm beam and the 4th piezoelectric ceramics cantilever beam is connected with the second flexible inverted V-shaped frame, the described second flexible inverted V-shaped frame with it is described
The material of the first flexible inverted V-shaped frame is identical with structure.
3. employing d according to claim 215The piezoelectric actuator of shear mode, it is characterised in that the 3rd piezoelectricity pottery
Porcelain cantilever beam, the 4th piezoelectric ceramics cantilever beam and the first piezoelectric ceramics cantilever beam, the power-up of the second piezoelectric ceramics cantilever beam
Mode is contrary.
4. employing d according to claim 215The piezoelectric actuator of shear mode, it is characterised in that first flexibility is fallen
The upper end of wishbone and the second flexible inverted V-shaped frame links together into a single integrated structure；
The first piezoelectric ceramics cantilever beam plus be electrically：In two sides vertical with the length direction of the substrate
In, a side is connected with the first drive signal, in two sides vertical with the width of the substrate, a side
Fourth drive signal is connected with, other side grounds；
The second piezoelectric ceramics cantilever beam plus be electrically：The first driving is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of signal is connected with the second drive signal, and with the first piezoelectric ceramics cantilever beam the 4th is connected with
The side surface direction identical side of drive signal is connected with fourth drive signal, other side grounds；
The 3rd piezoelectric ceramics cantilever beam plus be electrically：The first driving is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of signal is connected with the first drive signal, and with the first piezoelectric ceramics cantilever beam the 4th is connected with
The side surface direction identical side of drive signal is connected with the 3rd drive signal, other side grounds；
The 4th piezoelectric ceramics cantilever beam plus be electrically：The first driving is connected with the first piezoelectric ceramics cantilever beam
The side surface direction identical side of signal is connected with the second drive signal, and with the first piezoelectric ceramics cantilever beam the 4th is connected with
The side surface direction identical side of drive signal is connected with the 3rd drive signal, other side grounds.
5. employing d according to claim 415The piezoelectric actuator of shear mode, it is characterised in that described first drives letter
Number and the second drive signal to be sinusoidal signal and phase contrast be pi/2；3rd drive signal and fourth drive signal are
Sinusoidal signal and phase contrast are pi/2；Can only turn within the same time first drive signal and the second drive signal or
3rd drive signal and fourth drive signal.
6. the employing d according to any claim in claim 2-515The piezoelectric actuator of shear mode, its feature exists
In the described first flexible inverted V-shaped frame includes the first support feet, the second support feet and connects first support feet and the second support
The Driving plane of foot, the bottom of first support feet is connected with the top of the first piezoelectric ceramics cantilever beam, and described second
The bottom of support feet is connected with the top of the second piezoelectric ceramics cantilever beam, be provided with the Driving plane for mover
The contact of connection.
7. employing d according to claim 615The piezoelectric actuator of shear mode, it is characterised in that the quantity of the contact
For 1, positioned at the top of the Driving plane, it is shaped as hemispherical or strip；Or, the quantity of the contact is 2,
The Driving plane top arranges fluted, and respectively positioned at the both sides of the groove, the contact is shaped as half for two contacts
Spherical or strip.
8. employing d according to claim 715The piezoelectric actuator of shear mode, it is characterised in that the piezoelectric ceramics master
Body cutting after monolithic piezoelectric ceramic block is polarized is obtained, and the material of the contact is structural ceramicss, described first it is flexible fall V
The material of shape frame is metal material, and the first piezoelectric ceramics cantilever beam and the second piezoelectric ceramics cantilever beam are by epoxy glue and institute
State the first flexible inverted V-shaped frame connection, the 3rd piezoelectric ceramics cantilever beam and the 4th piezoelectric ceramics cantilever beam by epoxy glue with
Described second flexible inverted V-shaped frame connection.
9. a kind of precise jiggle platform, it is characterised in that including arbitrary described employing d in claim 1-815The pressure of shear mode
Electric drive and the mover being connected with the piezoelectric actuator.
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| CN104362888B (en) * | 2014-10-16 | 2016-07-06 | 中国科学院上海技术物理研究所 | The eight of a kind of Piezoelectric Driving twist coaxial micro displacement magnifying mechanism |
| CN106253742B (en) * | 2015-06-12 | 2019-07-12 | 精工爱普生株式会社 | Motor Piexoelectric actuator, motor, robot and pump |
| CN105634326A (en) * | 2016-03-18 | 2016-06-01 | 河南师范大学 | Piezoelectric bimorph type inertial piezoelectric motor |
| CN106452166A (en) * | 2016-09-07 | 2017-02-22 | 四川源鑫瑞科微执行器有限公司 | Toggle mechanism and toggle type piezoelectric actuator using same |
| CN106817046B (en) * | 2017-04-01 | 2019-04-02 | 吉林大学 | A kind of rotating driver based on piezoelectric fabric |
| CN106877736B (en) * | 2017-04-01 | 2018-07-31 | 吉林大学 | A kind of stick-slip inertial rotation driver based on piezoelectric fabric |
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| US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
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