CN102998646A - Quick calibrating device of semiconductor direct current parameter measurement module group - Google Patents
Quick calibrating device of semiconductor direct current parameter measurement module group Download PDFInfo
- Publication number
- CN102998646A CN102998646A CN2012105297852A CN201210529785A CN102998646A CN 102998646 A CN102998646 A CN 102998646A CN 2012105297852 A CN2012105297852 A CN 2012105297852A CN 201210529785 A CN201210529785 A CN 201210529785A CN 102998646 A CN102998646 A CN 102998646A
- Authority
- CN
- China
- Prior art keywords
- direct current
- current parameter
- module group
- semiconductor direct
- parameter measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
The invention discloses a quick calibrating device of a semiconductor direct current parameter measurement module group. The quick calibrating device is based on a semiconductor direct current parameter channel parameter measurement unit module and a power supply module. Contacts of a measuring board are connected with spring pins of the module group in abutting mode and are connected with an external measurement device digital multimeter and a standard adjustable resistor through a multi-way switch selected from multiple choice. The quick calibrating device is controlled by software to automatically conduct measurement, data storage, judgment and result report providing. The quick calibrating device saves calibrating time and improves efficiency.
Description
Technical field
The present invention relates to semiconductor direct current parameter measurement module group fast calibration device, guarantee that semiconductor direct current parameter measurement module measured value is accurate, belong to the semiconductor test technical field.
Background technology
ISO9001 quality management system and measuring management ISO/IEC17025 (testing and calibration laboratories General Requirement) have proposed requirement to the calibration of measuring equipment: think by correct calibration so that measure and can be traceable to International System of Units or generally acknowledged international standard is the basis of measurement result credibility.Semiconductor direct current parameter measurement module is used for detecting the semiconductor product parameter, and evaluation semiconductor product Performance and quality, the accuracy that semiconductor direct current parameter measurement module is measured, the quality that reliability directly affects semiconductor product, and calibration is the important means that guarantees semiconductor direct current parameter measurement module correctness and validity, semiconductor direct current parameter measurement module precision is high, complex structure, traditional calibration steps is loaded down with trivial details, and the time is long; Therefore the specialty calibration plate is expensive, if all will do primary calibration every year, expense is higher, designs and develops semiconductor direct current parameter measurement module fast calibration device, can realize quickly calibratedly, saves cost.
Summary of the invention
Purpose of the present invention is exactly solve semiconductor direct current parameter measurement module group quickly calibrated, saves the calibration cost, raises the efficiency.
The technical solution adopted in the present invention is based on semiconductor direct current parameter channel parameter measurement unit module, power measurement module;
Semiconductor direct current parameter measurement module fast calibration device of the present invention is assembled on the device with a plurality of slots, module group top is equipped with the measurement plate, dock with the spring needle of module group the contact of measuring plate, measuring plate draws all passages of module group, multi-way switch, fast-acting relay by multiselect one are connected with "+" end of external measurement devices digital multimeter, the ground of measuring plate is connected with "-" end of digital multimeter, connects simultaneously the standard adjustable resistor of calibration usefulness;
4 pilot holes are arranged on the fast calibration device test board;
There is the contact at the fast calibration device test board back side;
The fast calibration device test board draws the multiple power source of semiconductor direct current parameter measurement module to multi-way switch, relay power supply;
Fast calibration device is measured automatically by software control, and report the test is preserved, judged, provides to data;
It is that all passages of semiconductor direct current parameter module group are set that channel parameters measuring unit module group fast calibration device of the present invention is measured feature, and channel voltage arranges respectively different measurement points, uses simultaneously external digital multimeter to carry out voltage measurement;
It is current measurement accuracy measurement totally 5 ranges that channel parameters measuring unit module is measured feature: 2mA shelves, 200 μ A shelves, 20 μ A shelves, 2 μ A shelves, 200nA shelves; The electric current accuracy measurement is set, current ratio is set with module;
It is the voltage measurement accuracy measurement that channel parameters measuring unit module group fast calibration device is measured feature: adopt to add stream pressure measurement mode, compare with module measuring voltage value;
It is that voltage arranges accuracy measurement that power module fast calibration device of the present invention is measured feature: the device power source passage of tested module is connected with digital multimeter with calibration resistor, and digital multimeter measuring voltage and power measurement module arrange voltage ratio.
Thereby semiconductor direct current parameter measurement module fast calibration device provided by the present invention can be realized auto-calibration and save the alignment time, raises the efficiency.
Explanation of nouns:
Slot: slot, each slot have a module, and slot0～slot3 representation module 0 is to module 3, and each parameter measurement module has 128 in passage.
Description of drawings
Be described further below in conjunction with accompanying drawing and specific embodiments:
Fig. 1 is semiconductor direct current parameter measurement module group fast calibration device exemplary plot;
Fig. 2 measures backboard face contact point
Fig. 3 measures printed line road schematic diagram Fig. 3 and measures printed line road schematic diagram
Fig. 4 is semiconductor direct current parameter measurement module group fast calibration device implementation step schematic diagram
Embodiment
Below by example in detail device of the present invention and applying step:
Channel parameters measuring unit module of the present invention is measured the present invention and is adopted hardware platform as shown in Figure 1 to carry out quickly calibrated task, in Fig. 1, semiconductor direct current parameter measurement module assembled is on the device with a plurality of slots, module group top is equipped with the measurement plate, module group top is equipped with the measurement plate, dock with the spring needle of module group the contact of measuring plate, as shown in Figure 2; Measuring plate draws all passages of module group, multi-way switch, fast-acting relay by multiselect one are connected with "+" end of external measurement devices digital multimeter, the ground of measuring plate is connected with "-" end of digital multimeter, connects simultaneously the standard adjustable resistor of calibration usefulness; As shown in Figure 3;
4 pilot holes are arranged on the fast calibration device test board, see Fig. 3;
The fast calibration device test board draws the multiple power source of semiconductor direct current parameter measurement module to multi-way switch, relay power supply;
Fig. 4 is semiconductor direct current parameter measurement module group fast calibration device implementation step schematic diagram, at square frame (1)-startup semiconductor direct current parameter measurement module self-check program; Pass through in square frame (2)-self check, carry out next step, do not pass through otherwise termination; At square frame (3)-connect to be measured the relevant measurement point of plate by external measurement devices, the beginning calibration operation is carried out the channel characteristic parameter measurement; At square frame (4)-preservation measured value; At square frame (5)-judgement measured value;
At first carry out this passage dc parameter and measure driving high level, low level or current measurement
Next is carried out channel parameters measuring unit module and automatically measures; This measurement comprises the following aspects:
Voltage arranges accuracy measurement: all channel voltages are set are respectively different measurement points, external digital multimeter measuring voltage;
Current measurement accuracy measurement: 5 ranges are set: 2mA shelves, 200 μ A shelves, 20 μ A shelves, 2 μ A shelves, 200nA shelves; Measure by digital multimeter respectively;
The electric current accuracy measurement is set: compare with the current value of semiconductor direct current parameter measurement module setting;
Voltage measurement accuracy measurement: adopt the stream pressure measurement mode that adds, compare with the measuring voltage value of semiconductor direct current parameter measurement module;
The 3rd carries out power module measures: automatically measure identical with channel parameters measuring unit module;
In square frame (6)-judge whether to finish measurement; At square frame (7)-by the report of traditional form generated data;
Obvious specific implementation form of the present invention is not limited to this, for the those skilled in the art of the art, in the situation that do not deviate from various apparent change that claim scope of the present invention carries out it all in protection scope of the present invention.
Claims (3)
1. semiconductor direct current parameter measurement module group fast calibration device is characterized in that comprising as follows:
Semiconductor direct current parameter channel parameter measurement unit module, power measurement module;
Semiconductor direct current parameter channel parameter measurement unit module, power measurement module assembled are on the device with a plurality of slots, module group top is equipped with the measurement plate, dock with the spring needle of module group the contact of measuring plate, measuring plate draws all passages of module group, multi-way switch, fast-acting relay by multiselect one are connected with "+" end of external measurement devices digital multimeter, the ground of measuring plate is connected with "-" end of digital multimeter, connects simultaneously the standard adjustable resistor of calibration usefulness;
4 pilot holes are arranged on the fast calibration device test board, and there is the contact at the back side.
2. semiconductor direct current parameter measurement module group fast calibration device according to claim 1 is characterized in that: test board draws the multiple power source of semiconductor direct current parameter measurement module to multi-way switch, relay power supply.
3. semiconductor direct current parameter measurement module group fast calibration device according to claim 2 is characterized in that: fast calibration device is measured automatically by software control, and report the test is preserved, judged, provides to data.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105297852A CN102998646A (en) | 2012-12-11 | 2012-12-11 | Quick calibrating device of semiconductor direct current parameter measurement module group |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105297852A CN102998646A (en) | 2012-12-11 | 2012-12-11 | Quick calibrating device of semiconductor direct current parameter measurement module group |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102998646A true CN102998646A (en) | 2013-03-27 |
Family
ID=47927455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105297852A Pending CN102998646A (en) | 2012-12-11 | 2012-12-11 | Quick calibrating device of semiconductor direct current parameter measurement module group |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102998646A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107300681A (en) * | 2017-04-28 | 2017-10-27 | 中国人民解放军91550部队 | A kind of multi-channel measurement circuit design |
| CN107315152A (en) * | 2017-04-28 | 2017-11-03 | 中国人民解放军91550部队 | A kind of many Measurement channel built-in self-test circuit designs |
| TWI731448B (en) * | 2019-10-23 | 2021-06-21 | 吳茂祥 | Self-testing system for test device and test method using the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040186675A1 (en) * | 2003-03-21 | 2004-09-23 | Advantest Corporation | Calibration method for system performance validation of automatic test equipment |
| CN102156271A (en) * | 2011-03-15 | 2011-08-17 | 上海宏力半导体制造有限公司 | Method for detecting semiconductor parameter measuring system |
-
2012
- 2012-12-11 CN CN2012105297852A patent/CN102998646A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040186675A1 (en) * | 2003-03-21 | 2004-09-23 | Advantest Corporation | Calibration method for system performance validation of automatic test equipment |
| CN102156271A (en) * | 2011-03-15 | 2011-08-17 | 上海宏力半导体制造有限公司 | Method for detecting semiconductor parameter measuring system |
Non-Patent Citations (1)
| Title |
|---|
| 杨新涛 等: "自动测试设备直流参数的校准及检定", 《第一届中国微电子计量与测试技术研讨会论文集》, 1 October 2008 (2008-10-01), pages 80 - 82 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107300681A (en) * | 2017-04-28 | 2017-10-27 | 中国人民解放军91550部队 | A kind of multi-channel measurement circuit design |
| CN107315152A (en) * | 2017-04-28 | 2017-11-03 | 中国人民解放军91550部队 | A kind of many Measurement channel built-in self-test circuit designs |
| TWI731448B (en) * | 2019-10-23 | 2021-06-21 | 吳茂祥 | Self-testing system for test device and test method using the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2933646B1 (en) | Precision measurement of voltage drop across a semiconductor switching element | |
| CN101750597A (en) | Effectiveness calibrating method used for automatic testing equipment | |
| US9140734B2 (en) | Measuring apparatus and measuring method | |
| CN103675459A (en) | Method for measuring conductor resistance in integrated circuit | |
| CN104076194A (en) | Testing integrated circuit packaging for output short circuit current | |
| CN108564984B (en) | Flash memory chip testing method and system | |
| CN102998646A (en) | Quick calibrating device of semiconductor direct current parameter measurement module group | |
| CN202994857U (en) | Probe card capable of testing high voltage chip by low voltage test channel | |
| US10317456B2 (en) | Spike safe floating current and voltage source | |
| CN104422801A (en) | Load board, automated test equipment and IC test method | |
| CN101430849A (en) | Test device for display driving circuit | |
| CN201014993Y (en) | Testing circuit improvement for PCB tester | |
| CN103052889A (en) | Systems and methods for high-sensitivity detection of input bias current | |
| CN104698283A (en) | Resistor test method | |
| CN102928801A (en) | Calibration method for four-probe tester | |
| KR101048074B1 (en) | System for testing accelerated lifetime of electric device | |
| CN102879646B (en) | Base plate inspection device and base plate inspection method | |
| CN115856750A (en) | Device and method for quickly calibrating SOC (System on chip) test system | |
| US10488437B2 (en) | Electronics tester with output circuits operable in voltage compensated power mode, driver mode or current compensated power mode | |
| CN102590630A (en) | Resistance test method for test probe of semiconductor parameter tester | |
| US9581676B2 (en) | Method of calibrating and debugging testing system | |
| CN104614643A (en) | Device and method for detecting short circuit location in line | |
| CN113126014B (en) | Calibration system for realizing array parallelism of digital oscilloscope | |
| CN102889962B (en) | Detection device for pressure sensor | |
| CN213715359U (en) | Coil plate test alignment module |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130327 |