CN101750597A - Effectiveness calibrating method used for automatic testing equipment - Google Patents
Effectiveness calibrating method used for automatic testing equipment Download PDFInfo
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- CN101750597A CN101750597A CN200810239569A CN200810239569A CN101750597A CN 101750597 A CN101750597 A CN 101750597A CN 200810239569 A CN200810239569 A CN 200810239569A CN 200810239569 A CN200810239569 A CN 200810239569A CN 101750597 A CN101750597 A CN 101750597A
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Abstract
The invention discloses an effectiveness calibrating method used for automatic testing equipment, which includes the following steps: (1) starting the automatic testing equipment and executing the automatic detecting procedure; (2) using an external measuring equipment to connect the measuring points of an adapter plate used for testing to start the calibrating work after the automatic detecting is finished; (3) executing measurement on channel characteristic parameters; (4) executing measurement on pin parameter measuring unit; (5) executing measurement on plate parameter measuring unit; and (6) executing measurement on apparatus powers. The effectiveness calibrating method can realize the automatic entire home position calibration of the automatic testing equipment, thereby ensuring the testing quality and effective use of the automatic testing equipment, and guaranteeing of tracing all the calibrating indicators and parameters to national standards.
Description
Technical field
The present invention relates to a kind of effectiveness calibrating method, relate in particular to a kind of effectiveness calibrating method that is used for the ATE (automatic test equipment) (Automatic Test Equipment is abbreviated as ATE) of integrated circuit test system, belong to the ic test technique field.
Background technology
In integrated circuit testing, generally to use automatic test equipment (ATE), i.e. the integrated circuit automatic testing machine.The effect of integrated circuit automatic testing machine is that detected set becomes product quality, evaluation properties of product and the checking product function of circuit chip, with the quality of guaranteeing that integrated circuit is manufactured.
Obviously, the automatic test equipment (ATE) measurement has the accuracy of related parameter, reliability will directly influence the outgoing of integrated circuit (IC) chip, and measurement and calibration is the important means that guarantees automatic test equipment (ATE) work accuracy and validity.Measurement and calibration be meant use than by the high measurement instrument of school measurement instrument precision (being called the standard utensil) with compared by the school measurement instrument, to determine by the error of indication of school measurement instrument.
In application number was 200610003236.6 Chinese patent application, a kind of generation and using method of calibration data for automated test equipment disclosed.In one embodiment, receive carrying out the request of ATE (automatic test equipment) calibration process.This request is associated with one or more test setting.After receiving this request, sign is based on some calibration filling points of test setting.Then at test setting and the two generation calibration data of calibration filling point.In another embodiment, reception is carried out the request of one or more test processs through calibrating to using ATE (automatic test equipment), and in conjunction with at least one in the test process of calibration of execution, from existing calibration data derivation calibration data.
In addition, application number be 200480007062.X Chinese patent application in, a kind of ATE calibration steps and system are disclosed.In test macro, choose a function contact pin as the reference contact pin, and choose a function contact pin in addition as accurate measuring unit (PMU).External test facility and be used to the AC and the DC characteristic of witness mark contact pin with reference to PMU.All functions contact pin in the test macro can use with reference to PMU to be measured with respect to reference pin.Obtain equilibrium in order to ensure the dislocation between all contact pins, with the mid point of choice of location in as far as possible close function contact pin scope of reference pin.
At present, high-end automatic test equipment (ATE) ubiquity complex structure, precision height, the measurement and calibration method is externally maintained secrecy, special-purpose calibration plate problem such as cost an arm and a leg.If all entrust every year manufacturer to do measurement and calibration one time, not only expense is higher, and can not be guaranteed on the time.Therefore, be necessary to study ATE equipment validity calibration solution easy to operate, with low cost.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of effectiveness calibrating method that is used for automatic test equipment (ATE).Utilize this effectiveness calibrating method can guarantee the normal use of instrument and equipment, make measurement data and testing result have good traceability, accuracy and reliability.
For realizing above-mentioned purpose, the present invention adopts following technical scheme:
A kind of effectiveness calibrating method that is used for ATE (automatic test equipment) is characterized in that comprising the steps:
(1) starts ATE (automatic test equipment), carry out self-check program;
(2) after self check finishes, connect the measurement point of test, the beginning calibration operation with adaptation board by external measurement devices;
(3) carry out the channel characteristic parameter measurement;
(4) carrying out the pin parameter measurement unit measures;
(5) carrying out the board parameter measuring unit measures;
(6) carry out power measurement.
Wherein, described external measurement devices is digital voltmeter or digital multimeter, and its limits of error is by 1/3～1/10 of the limits of error of the ATE (automatic test equipment) in school.
In the described step (3), described channel characteristic parameter is drive level VIH and VIL.
In the described step (4), the measurement of described pin parameter measurement unit comprises that voltage is provided with accuracy measurement, current measurement accuracy measurement, electric current accuracy measurement and voltage measurement accuracy measurement are set.
In the described step (5), the measurement of described board parameter measuring unit comprises that voltage is provided with accuracy measurement, electric current is provided with accuracy measurement, voltage measurement accuracy measurement, current measurement accuracy measurement and high-pressure channel the voltage accuracy measurement is set.
In the described step (6), the device power source passage is connected with digital multimeter with calibration resistor, compares by the digital multimeter measuring voltage and with the voltage that is provided with of device power source.
ATE provided by the present invention measures the whole original position calibration of robotization that effectiveness calibrating method can be realized automatic test equipment (ATE), thereby guarantee the test mass of automatic test equipment (ATE) and effectively use, and guarantee the index of all calibrations and parameter can be traceable to national standard.
Description of drawings
The present invention is further illustrated below in conjunction with the drawings and specific embodiments.
Fig. 1 is used to implement the hardware platform exemplary plot that this ATE measures effectiveness calibrating method;
Fig. 2 measures the concrete implementation step synoptic diagram of effectiveness calibrating method for this ATE.
Embodiment
The automatic test equipment (ATE) that is used for integrated circuit testing is as a kind of Computerized intelligent comprehensive parameters instrument system, there is advantage aspect dirigibility of testing and the data-handling capacity, and do not have too big difference with single machine test in a certain parameter testing at a time, therefore, can be broken down into each individual event parameter tester and carry out the validity calibration.
Based on above-mentioned thinking, the present invention adopts hardware platform as shown in Figure 1 to carry out the validity calibration tasks.In Fig. 1, the test adaptation board is installed on the integrated circuit automatic testing equipment (ATE).This test achieves a butt joint with a plurality of Slot (slot) on adaptation board and the ATE, a plurality of measuring unit.As "-" end of the digital voltmeter of external measurement devices connect test with adaptation board " ", "+" end connects the relevant passage terminals of test with adaptation board according to the test assignment needs.Between holding with "-", "+" of digital voltmeter end is connected with calibration resistor.Above-mentioned test with adaptation board according to the kind of automatic test equipment (ATE) and model and different.Concrete selection is the common practise of persons skilled in the art, has not just given unnecessary details in detail at this.
Need to prove that the digital voltmeter among Fig. 1 just is used to realize an example of the external measurement devices of validity calibration.According to the difference of institute's calibration parameter, employed external measurement devices is also different.For example can consider to calibrate with program control test receiver or digital voltmeter or other corresponding standard testing apparatus to the calibration of excitation system, can calibrate by electric impedance analyzer or network analyzer switch matrix, measuring system available standards signal source is demarcated it.
Below in conjunction with Fig. 2, the specific implementation process of ATE effectiveness calibrating method of the present invention is described in detail.
Before carrying out the validity calibration, the basic demand that should satisfy is:
1. carry out at the scene that is aligned in, and environmental baseline is as the criterion can satisfy the on-the-spot condition of using of instrument;
2. external measurement devices is as the reference instrument of calibration usefulness, and its limits of error should be by 1/3～1/10 of the ATE limits of error in school.
After satisfying above-mentioned basic demand,, carry out the validity calibration tasks according to following steps at the design feature of ATE system:
(1) starts ATE, carry out self-check program;
(2) after self check finishes, connect the relevant measurement point of test, the beginning calibration operation with adaptation board by external measurement devices;
(3) carry out the channel characteristic parameter measurement;
This channel characteristic parameter measurement specifically is meant measures drive level (VIH, VIL).
(4) carrying out PPMU (pin parameter measurement unit) measures;
This measurement comprises the following aspects:
1. voltage is provided with accuracy measurement: all channel voltages are set are respectively different measurement points, external digital multimeter measuring voltage;
2. current measurement accuracy measurement: 5 ranges are set: 2mA shelves, 200 μ A shelves, 20 μ A shelves, 2 μ A shelves, 200nA shelves, measure by digital multimeter respectively;
3. the electric current accuracy measurement is set: compare with the electric current of ATE system setting;
4. voltage measurement accuracy measurement: adopt the stream pressure measurement mode that adds, compare with the measuring voltage value of ATE system.
(5) carrying out BPMU (board parameter measuring unit) measures;
In this measuring process, a passage among the Slot X (X is a natural number) of selection ATE is measured.The concrete content of measuring comprises following several aspects:
1. voltage is provided with accuracy measurement: Slot0～Slot3 voltage is set is applied for 2V, 5V, 10V, 24V respectively, choose suitable measuring resistance, and external digital multimeter measuring voltage, and with system voltage is set and compares;
2. electric current is provided with accuracy measurement: Slot0～Slot3 electric current is set applies suitable measuring resistance respectively, external digital multimeter measuring voltage is calculated electric current, and with system electric current is set and compares;
3. voltage measurement accuracy measurement: choose suitable measuring resistance, external digital multimeter measuring voltage compares with the systematic survey magnitude of voltage;
4. current measurement accuracy measurement: choose suitable measuring resistance, external digital multimeter measuring voltage calculates electric current, and the current value of measuring with test macro compares:
5. high-pressure channel is provided with the voltage accuracy measurement: for a plurality of passages among each Slot, and difference external voltage table, whether measuring voltage meets the requirements.
(6) carrying out power supply (DPS) measures.
In this step, the power supply among the ATE that is calibrated (DPS) passage is connected with digital multimeter with calibration resistor, compares by the digital multimeter measuring voltage and with the voltage that is provided with of DPS.
In above-mentioned measuring process, the magnitude of voltage that measurement result and DPS are provided with compares, and any deviation is all represented the measuring error of unit under test.After measuring process is finished, test data is handled, and judge according to the data after handling whether the measurement validity of ATE meets the scope of test macro measuring accuracy permission, and the data after the processing can be preserved specially, reference when proceeding Equipment Alignment after being provided with.
ATE provided by the present invention measures effectiveness calibrating method and can automatically perform by the measurement and calibration software of special establishment.This measurement and calibration software adopts hierarchical setting, makes full use of modularity design technology, guarantees the independence of each Development of Module and the maintainability of system.Particularly, measurement and calibration software can be divided into 4 levels in realization.
1. physical interface layer: be responsible for providing between observing and controlling computing machine and the ATE physical connection with communicate by letter.Physical interface layer is the software and hardware binding layer, and wherein hardware is the control of PCI-GPIB interface, is used to provide bus control interfaces such as GPIB, and software is the driver of interface control card, is used to provide the I/O operation of docking port control card.
2. test resource layer: mainly form, be used to realize to the control of instrumental function and reading of data by the drive software of testing tool (being ATE).
3. user management layer: be used to user application layer that the gauging instrument format function of the independent fully name of one cover is provided.
4. user application layer: be used to realize the measurement and calibration function and man machine operation interface is provided, and resource and verification result are managed concentratedly.
The measurement and calibration function that user application layer is realized is realized by the measurement and calibration program.The measurement and calibration program is worked out all kinds of calibration procedures according to dissimilar signal measuring parameters such as voltage, electric current, electronic signals, produce pumping signal and collection and treatment facility output signal that system calibration needs, the output data of various pattern field signals and collection is compared and the result is shown.The continuous data supervisory routine is in charge of test data, calibration result, and the duty of ATE is assessed, and provides Calibration Report.
For ATE being made the as a whole measurement and calibration that carries out, the measurement and calibration programming uses unified trial function, application person needn't understand the method for operating of concrete instrument and the configuring condition of ATE like this, and the metrology and measurement process that only need be absorbed in research ATE gets final product.For example calibrate with 3458A digital multi multimeter, the regulator need not to understand the GPIB instruction, only it correctly need be connected in the hardware platform shown in Figure 1 to get final product.
Working out above-mentioned measurement and calibration program and continuous data supervisory routine etc. all is the routine work that the metering field those skilled in the art can be competent at, and does not just describe in detail at this.
Above the effectiveness calibrating method that is used for ATE (automatic test equipment) of the present invention is had been described in detail, but obvious specific implementation form of the present invention is not limited thereto.For the those skilled in the art in present technique field, the various conspicuous change of under the situation that does not deviate from claim scope of the present invention it being carried out is all within protection scope of the present invention.
Claims (7)
1. an effectiveness calibrating method that is used for ATE (automatic test equipment) is characterized in that comprising the steps:
(1) starts ATE (automatic test equipment), carry out self-check program;
(2) after self check finishes, connect the measurement point of test, the beginning calibration operation with adaptation board by external measurement devices;
(3) carry out the channel characteristic parameter measurement;
(4) carrying out the pin parameter measurement unit measures;
(5) carrying out the board parameter measuring unit measures;
(6) carry out power measurement.
2. effectiveness calibrating method as claimed in claim 1 is characterized in that:
The limits of error of described external measurement devices is by 1/3～1/10 of the limits of error of the ATE (automatic test equipment) in school.
3. effectiveness calibrating method as claimed in claim 2 is characterized in that:
Described external measurement devices is digital voltmeter or digital multimeter.
4. effectiveness calibrating method as claimed in claim 1 is characterized in that:
In the described step (3), described channel characteristic parameter is drive level VIH and VIL.
5. effectiveness calibrating method as claimed in claim 1 is characterized in that:
In the described step (4), the measurement of described pin parameter measurement unit comprises that voltage is provided with accuracy measurement, current measurement accuracy measurement, electric current accuracy measurement and voltage measurement accuracy measurement are set.
6. effectiveness calibrating method as claimed in claim 1 is characterized in that:
In the described step (5), the measurement of described board parameter measuring unit comprises that voltage is provided with accuracy measurement, electric current is provided with accuracy measurement, voltage measurement accuracy measurement, current measurement accuracy measurement and high-pressure channel the voltage accuracy measurement is set.
7. as claim 1 or 3 described effectiveness calibrating methods, it is characterized in that:
In the described step (6), the device power source passage is connected with digital multimeter with calibration resistor, compares by the digital multimeter measuring voltage and with the voltage that is provided with of device power source.
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101915902A (en) * | 2010-09-06 | 2010-12-15 | 株洲南车时代电气股份有限公司 | Calibration method and calibration system for field test equipment |
| CN104422801A (en) * | 2013-08-28 | 2015-03-18 | 华润赛美科微电子(深圳)有限公司 | Load board, automated test equipment and IC test method |
| CN104569594A (en) * | 2013-10-23 | 2015-04-29 | 上海机电工程研究所 | Automatic missile resistance testing system |
| CN104656008A (en) * | 2015-03-04 | 2015-05-27 | 上海华岭集成电路技术股份有限公司 | Real-time signal compensation method |
| CN105074477A (en) * | 2013-04-05 | 2015-11-18 | 伊莎贝尔努特·霍伊斯勒两合公司 | Measuring resistor and corresponding measuring method |
| CN105589450A (en) * | 2014-11-03 | 2016-05-18 | 中国航空工业集团公司西安飞机设计研究所 | Calibration method of airplane flow control box test system |
| CN106154201A (en) * | 2016-06-23 | 2016-11-23 | 上海华岭集成电路技术股份有限公司 | Impedance calibration compensation method in ATE measurement circuitry |
| CN108051767A (en) * | 2018-01-04 | 2018-05-18 | 南京国睿安泰信科技股份有限公司 | A kind of auto-check system for integrated circuit tester |
| CN108106718A (en) * | 2017-12-15 | 2018-06-01 | 北京安达维尔航空设备有限公司 | A kind of machine-carried type helicopter vibration monitors system |
| CN110687373A (en) * | 2019-09-30 | 2020-01-14 | 上海御渡半导体科技有限公司 | Detection structure and method of ATE system |
| CN114264996A (en) * | 2021-11-30 | 2022-04-01 | 上海御渡半导体科技有限公司 | Method for detecting DC calibration effectiveness of ATE equipment |
| WO2022213877A1 (en) * | 2021-04-08 | 2022-10-13 | 爱德万测试股份有限公司 | Loop iteration calibration method and test device using same |
| CN116299125A (en) * | 2023-03-31 | 2023-06-23 | 深圳市辰卓科技有限公司 | Parameter calibration method, device and system of ATE equipment |
-
2008
- 2008-12-12 CN CN200810239569A patent/CN101750597A/en active Pending
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101915902B (en) * | 2010-09-06 | 2013-04-24 | 株洲南车时代电气股份有限公司 | Calibration method and calibration system for field test equipment |
| CN101915902A (en) * | 2010-09-06 | 2010-12-15 | 株洲南车时代电气股份有限公司 | Calibration method and calibration system for field test equipment |
| CN105074477B (en) * | 2013-04-05 | 2019-05-14 | 伊莎贝尔努特·霍伊斯勒两合公司 | Measuring resistor and corresponding measurement method |
| CN105074477A (en) * | 2013-04-05 | 2015-11-18 | 伊莎贝尔努特·霍伊斯勒两合公司 | Measuring resistor and corresponding measuring method |
| CN104422801A (en) * | 2013-08-28 | 2015-03-18 | 华润赛美科微电子(深圳)有限公司 | Load board, automated test equipment and IC test method |
| CN104569594A (en) * | 2013-10-23 | 2015-04-29 | 上海机电工程研究所 | Automatic missile resistance testing system |
| CN105589450A (en) * | 2014-11-03 | 2016-05-18 | 中国航空工业集团公司西安飞机设计研究所 | Calibration method of airplane flow control box test system |
| CN104656008A (en) * | 2015-03-04 | 2015-05-27 | 上海华岭集成电路技术股份有限公司 | Real-time signal compensation method |
| CN106154201A (en) * | 2016-06-23 | 2016-11-23 | 上海华岭集成电路技术股份有限公司 | Impedance calibration compensation method in ATE measurement circuitry |
| CN108106718A (en) * | 2017-12-15 | 2018-06-01 | 北京安达维尔航空设备有限公司 | A kind of machine-carried type helicopter vibration monitors system |
| CN108051767A (en) * | 2018-01-04 | 2018-05-18 | 南京国睿安泰信科技股份有限公司 | A kind of auto-check system for integrated circuit tester |
| CN108051767B (en) * | 2018-01-04 | 2019-07-19 | 南京国睿安泰信科技股份有限公司 | A kind of automatic diagnosis method for integrated circuit tester |
| CN110687373A (en) * | 2019-09-30 | 2020-01-14 | 上海御渡半导体科技有限公司 | Detection structure and method of ATE system |
| WO2022213877A1 (en) * | 2021-04-08 | 2022-10-13 | 爱德万测试股份有限公司 | Loop iteration calibration method and test device using same |
| CN114264996A (en) * | 2021-11-30 | 2022-04-01 | 上海御渡半导体科技有限公司 | Method for detecting DC calibration effectiveness of ATE equipment |
| CN114264996B (en) * | 2021-11-30 | 2024-05-03 | 上海御渡半导体科技有限公司 | ATE equipment DC calibration effectiveness detection method |
| CN116299125A (en) * | 2023-03-31 | 2023-06-23 | 深圳市辰卓科技有限公司 | Parameter calibration method, device and system of ATE equipment |
| CN116299125B (en) * | 2023-03-31 | 2024-04-05 | 深圳市辰卓科技有限公司 | Parameter calibration method, device and system of ATE equipment |
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Application publication date: 20100623 |