CN102494615B - Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof - Google Patents
Step distance measuring device based on femtosecond optical-frequency comb and measuring method thereof Download PDFInfo
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- CN102494615B CN102494615B CN 201110361124 CN201110361124A CN102494615B CN 102494615 B CN102494615 B CN 102494615B CN 201110361124 CN201110361124 CN 201110361124 CN 201110361124 A CN201110361124 A CN 201110361124A CN 102494615 B CN102494615 B CN 102494615B
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Abstract
Disclosed are a step surface topography measuring device based on a femtosecond optical-frequency comb and a measuring method thereof. The measuring method includes steps of utilizing the femtosecond optical-frequency comb with repetition frequency and offset frequency which are locked to reach the microwave frequency reference as a light source; interfering measuring light with reference light, which is delayed by a certain light path, of split light beam; scanning repetition frequency of the femtosecond optical-frequency comb and acquiring positions of coherent peak value of light strength received by corresponding pixels of each step surface; and working out the absolute distance of steps according to the corresponding repletion frequency and light path delay of the coherent peak value. The measuring method overcomes the defects that light path is difficult to be regulated and precision is limited by motion precision of piezoelectric ceramic machinery when in use of the conventional measuring method, and has the advantages of high longitudinal resolution ratio and wide measuring range. Besides, the repetition frequency and offset frequency of the femtosecond optical-frequency comb are locked to reach the microwave frequency reference so that measuring results are traceable.
Description
Technical field
The present invention relates to a kind of stepped ramp type surface figure measuring device and method, particularly a kind of step distance measurement mechanism and method based on the femtosecond frequency comb.
Background technology
In the delicate metering field, usually need step distance is carried out very high-precision measurement.Simultaneously, the precision measurement of stepped ramp type absolute distance also has important demand in modern industry, as in the semiconductor technology to the measurement demand of micro-nano bench height.
Traditional contactless step height measurement method is normally based on the principle of white light interferometer.When interfering as light source with white light, owing to comprise very wide spectral range in the white light, it just can obtain contrast interference fringe preferably when zero optical path difference.Utilize this characteristic of white light interference, structure Mirau interferometer or Twyman-Green interferometer, white light source is divided into two-way, enter reference path respectively and measure light path, by regulating the light path approximately equal that light path makes reference path and measures light path, survey two-way reflection of light luminous energy with CCD and access contrast interference fringe preferably.Do scanning motion by piezoelectric ceramic actuator driving measuring head (in the Mirau interferometer) or reference mirror (in the Twyman-Green interferometer) along optical path direction again.At this moment, can observe the interference light intensity collection of illustrative plates that each step surface respective pixel changes with the piezoelectric ceramics scanning distance at CCD.Have only when each step surface is in strict aplanatism position, just can obtain the maximal value of light intensity on the respective pixel.Utilize phase shift algorithm and vertical scanning interferometric method to calculate the peak value of interference light intensity collection of illustrative plates, obtain the scanning distance of the corresponding piezoelectric ceramics of the zero optical path difference point of each step surface, and then the precision measurement of realization step distance.
Utilizing above white light interference method to carry out step distance accurately measures, has following limitation: 1) because the temporal coherence of white light is little, only near aplanatism, just can obtain interference fringe in the very little scope, so light path is regulated relatively difficulty, two-way light need be transferred to aplanatic position.2) interference illustration is done mechanical scanning campaign acquisition by piezoelectric ceramics, and the hysteresis characteristic of piezoelectric ceramics etc. can influence Measurement Resolution and precision, and the range of movement of piezoelectric ceramics has also limited the measurement range of bench height.3) this method measurement result can't contact with existing mete-wand, does not satisfy the requirement that in the metrology measurement result is had traceability.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, the object of the present invention is to provide a kind of step distance measuring method and device based on the femtosecond frequency comb, longitudinal frame height, range are big, measurement result can be traced to the source.
To achieve these goals, the technical solution used in the present invention is:
A kind of step distance measurement mechanism based on the femtosecond frequency comb, comprise: ccd detector 10 and the computing machine 11 of femtosecond frequency comb 1, rubidium clock 2, the first single-mode fiber 3-1, the second single-mode fiber 3-2, the 3rd single-mode fiber 3-3, single-mode optical-fibre coupler 4, the first optical fiber collimator 5-1, the second optical fiber collimator 5-2, the first beam expanding lens 6-1, the second beam expanding lens 6-2, optical path delay device 7, spectroscope 8, stepped ramp type to be measured surface 9, band imaging len system, its position is closed and is:
The output of femtosecond frequency comb 1 enters single-mode optical-fibre coupler 4 by the first single-mode fiber 3-1, and single-mode optical-fibre coupler 4 is divided into two bundles according to 2: 1 splitting ratio with femtosecond laser and enters the second single-mode fiber 3-2 and the 3rd single-mode fiber 3-3 respectively;
The exit end of the second single-mode fiber 3-2 connects the first optical fiber collimator 5-1, femtosecond pulse is collimated into spatial light, by the first beam expanding lens 6-1 and spectroscope 8 in the gage beam, be incident on the stepped ramp type to be measured surface 9 successively, its reflected light is reflexed on the ccd detector 10 by spectroscope 8 again;
The exit end of the 3rd single-mode fiber 3-3 connects the second optical fiber collimator 5-2, femtosecond pulse is collimated into spatial light, enter the optical path delay device 7 in the reference arm, collimate the hot spot of the spatial light that forms and the hot spot coupling that optical path delay device 7 requires by the second optical fiber collimator 5-2, the spatial light of collimation is after 7 outputs of optical path delay device, pass through the second beam expanding lens 6-2 and spectroscope 8 successively, with the reflection actinic light of measuring light, and by ccd detector 10 receptions;
The light intensity value of the pixel of each step surface correspondence that ccd detector 10 will receive is converted into electric signal, pass to computing machine 11,1 work of simultaneous computer 11 control femtosecond frequency comb, scan its repetition frequency, and the output signal by ccd detector 10 obtains the interference light intensity collection of illustrative plates that each step surface respective pixel light intensity changes with the repetition frequency value, calculate the repetition frequency value of the relevant peak value correspondence of each step surface, thereby calculate the absolute distance of step.
Wherein, reference light and measure total optical path difference that the photosynthetic light time partly produces by optical path delay device 7 and spatial light be N pulse apart from the interval, N is a very big positive integer.
Described single-mode optical-fibre coupler 4 is divided into two bundles according to 2: 1 splitting ratio with femtosecond laser with incident light and enters the second single-mode fiber 3-2 and the 3rd single-mode fiber 3-3 respectively, and the splitting ratio of spectroscope 8 reflected light and transmitted light is 1: 1.Make and reference pulse that last ccd detector 10 detects and measure the light intensity approximately equal of pulse improve the contrast of the interference fringe that obtains.
Described optical path delay device 7 adopts Corning ULE 7972 materials to make, and the reflectivity of catoptron is very high, have constant optical path delay, and light intensity loss is very little.
The described first beam expanding lens 6-1 is used for expanding measuring light, and the second beam expanding lens 6-2 is used for expanding reference light, makes to expand back two spot sizes coupling.
The present invention also provides a kind of measuring method based on described measurement mechanism, may further comprise the steps:
A. adopt the femtosecond frequency comb 1 that repetition frequency and offset frequency are locked to the microwave frequency benchmark as measurement light source, its emergent light is divided into reference light and measuring light, wherein reference light expands through behind certain optical path delay, is incident to ccd detector 10; Directly into being incident upon stepped ramp type to be measured surface 9, its reflected light is incident to ccd detector 10 to measuring light after expanding;
B. the repetition frequency of tuning femtosecond frequency comb, make on the stepped ramp type to be measured surface 9 one of them step plane namely on the ccd detector 10 of No. 1 step surface 9-1 correspondence pixel obtain relevant peak value, the repetition frequency of record this moment is f
r
C. this moment, pixel can't obtain relevant peak value on its corresponding ccd detector 10 for No. 2 step surface 9-2 on the stepped ramp type surface 9;
D. the repetition frequency of tuning femtosecond frequency comb again makes that pixel obtains relevant peak value on the ccd detector 10 of No. 2 step surface 9-2 correspondences, and the repetition frequency of record this moment is f '
r
E. according to the optical path delay amount of reference light, and each the self-corresponding repetition frequency f of two step surfaces that records
rAnd f '
r, calculate the absolute distance of step.
Wherein, the optical path delay in the described reference path is N pulse apart from interval, and the value of N is positive integer, such as the optical path difference Δ L=NL of 100, No. 1 step surface 9-1 correspondences
0=Nc/f
r, the optical path difference Δ L '=NL of No. 2 step surface 9-2 correspondences
0=Nc/f '
r, the absolute distance of the step that is constituted by No. 1 step surface 9-1 and No. 2 step surface 9-2
Wherein c is the light velocity in the vacuum, L
0Be the distance interval between adjacent two light pulses in the time domain, L
0=ct
r=c/f
r, the resolution of bench height
Wherein δ f is the resolution of repetition frequency scanning.
Among the present invention, step surface refers to the lip-deep plane one by one of tested stepped ramp type, and the difference in height between two adjacent step surfaces is exactly step distance.As: No. 1 step surface 9-1 and No. 2 step surface 9-2, difference in height between the two is the step absolute distance of surveying.
The present invention's advantage compared with prior art is:
1) adopt the method acquisition reference light of scanning frequency comb repetition frequency and the relevant peak value of measuring light, the mechanical motion of having avoided piezoelectric ceramics scanning to cause has been eliminated because the measuring error of the bench height that the mechanical motion error is brought.
2) by in reference path, introducing certain optical path delay, increased bench height and measured range.In addition, repetition frequency resolution makes this measuring system have the Measurement Resolution of nanometer scale in the mHz magnitude.
3) repetition frequency of femtosecond frequency comb and offset frequency all are locked to the rubidium clock frequency reference, but measurement result has traceability.
Description of drawings
Fig. 1 is the schematic diagram of measuring method of the present invention.
Fig. 2 is the structural representation of measurement mechanism of the present invention.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further details.
The present invention adopts the femtosecond frequency comb that repetition frequency and offset frequency are locked to the microwave frequency benchmark as measurement light source, and its emergent light is divided into reference light and measuring light, and wherein reference light expands through behind certain optical path delay, is incident to ccd detector; Directly into being incident upon tested stepped ramp type surface, its reflected light is incident to ccd detector to measuring light after expanding.
The femtosecond frequency comb is the femtosecond pulse of constant duration as light source in time domain, is equifrequent laser frequency comb at interval in frequency field, by change repetition frequency f in frequency field
rCan change the repetition time t of the light pulse in the time domain
r, pass between the two is
Distance in the time domain between adjacent two light pulses is spaced apart
L
0＝c·t
r＝c/f
r (2)
Wherein c is the light velocity in the vacuum, and any two femtosecond pulses all can produce interference fringe when overlapping.Because the width of pulse is the femtosecond magnitude, have only optical path difference when two light paths in adjacent two pulses apart from interval L
0Integral multiple near the time could obtain interference fringe, and the peak correspondence of interference fringe the state that measurement pulse that step surface returns and reference pulse overlap fully.By in frequency field, changing the repetition frequency of femtosecond frequency comb, can obtain the interference light intensity collection of illustrative plates that each step surface respective pixel receiving light power changes with the repetition frequency value, calculate the peak value of light intensity collection of illustrative plates, obtain the reference pulse of each step surface and measure the value of the repetition frequency of pulse when overlapping fully.Utilize the repetition frequency of the relevant peak value correspondence that records and the absolute distance that the optical path delay amount calculates step at last.
Because the repetition frequency range of adjustment of femtosecond frequency comb is limited, for guaranteeing that regulating repetition frequency one makes reference light pulse and measuring light pulse overlap fully surely, needing increases an optical path delay device in reference path, make an optical path delay N pulse in the reference path apart from the interval.N is more big, make reference pulse and measure pulse to reach the state that overlaps fully, and the maximum magnitude that repetition frequency need be regulated is more little.Simultaneously, optical path delay more many are also more big for the measurement range of step.
Below by schematic diagram, above-mentioned step distance measuring method based on the femtosecond frequency comb is described further.
As shown in Figure 1, the hypothetical reference light path has produced the phase delay of N=100 by after optical path delay device, when then arriving ccd detector, 1 in the reference path feel the pulse dash will with measure 101 in the light path and feel the pulse and dash the nearest position that is separated by.Realize the measurement of step absolute distance by following steps.
Step 1: the repetition frequency of tuning femtosecond frequency comb, make that pixel obtains relevant peak value on the ccd detector of one of them the step plane No. 1 step surface 9-1 correspondence on the step surface 9 to be measured, the repetition frequency of record this moment is f
r, then satisfy
ΔL＝NL
0＝Nc/f
r (3)
Wherein, Δ L is the optical path difference of No. 1 step surface correspondence, N=100.If because two light path optical path differences exist than large deviation, original state is that 1 of reference pulse is felt the pulse to dash to be in and measured the 100th of pulse and feel the pulse and dash and the 101st feel the pulse towards the middle (or the 101st feel the pulse dash and the 102nd feel the pulse towards the middle), will make this moment two pulses reach the state that overlaps fully, repetition frequency needs maximum tuning range.Original state is
ΔL＝(N-0.5)c/f
r0 (4)
The time, the tuning range that is obtained maximum repetition frequency by (3) formula and (4) formula is
Optical path delay more many, the maximum tuning range that repetition frequency needs is more little.Therefore, when N gets bigger numerical value, measure light path and reference path optical path difference if coarse adjustment to the integral multiple pulse apart near the scope bigger interval, just can just can find relevant peak by regulating repetition frequency, reduced the difficulty of light path adjusting thus.
Step 2: the CCD pixel of No. 1 step surface 9-1 correspondence on stepped ramp type surface 9 reaches when being concerned with the peak, for No. 2 step surface 9-2 on the highly different stepped ramp type surfaces 9, can't obtain relevant peak on its corresponding pixel.
Step 3: retune repetition frequency to f '
r, make on No. 2 step surface 9-2 respective pixel and obtain relevant peak value, then satisfy
ΔL′＝NL
0＝Nc/f
r′ (6)
The height that can be got this step that is made of No. 1 and No. 2 step surfaces by (3) formula and (6) formula is
Can be got by following formula, optical path delay more more is that N is more big, more big to the range of bench height.
And the resolution that can be obtained bench height of the present invention by (7) formula is
Wherein δ f is the resolution of repetition frequency scanning.
As shown in Figure 2, the present invention also provides the device of realizing this measuring method, and wherein circuit connects and represents that with fine line spatial light dots.Comprising: ccd detector 10 and the computing machine 11 of femtosecond frequency comb 1, rubidium clock 2, the first single-mode fiber 3-1, the second single-mode fiber 3-2, the 3rd single-mode fiber 3-3, single-mode optical-fibre coupler 4, the first optical fiber collimator 5-1, the second optical fiber collimator 5-2, the first beam expanding lens 6-1, the second beam expanding lens 6-2, optical path delay device 7, spectroscope 8, stepped ramp type to be measured surface 9, band imaging len system, its position is closed and is:
The output of femtosecond frequency comb 1 enters single-mode optical-fibre coupler 4 by the first single-mode fiber 3-1, and single-mode optical-fibre coupler 4 is divided into two bundles according to 2: 1 splitting ratio with femtosecond laser and enters the second single-mode fiber 3-2 and the 3rd single-mode fiber 3-3 respectively;
The exit end of the second single-mode fiber 3-2 connects the first optical fiber collimator 5-1, femtosecond pulse is collimated into spatial light, by the first beam expanding lens 6-1 and spectroscope 8 in the gage beam, be incident on the stepped ramp type to be measured surface 9 successively, its reflected light is reflexed on the ccd detector 10 by spectroscope 8 again;
The exit end of the 3rd single-mode fiber 3-3 connects the second optical fiber collimator 5-2, femtosecond pulse is collimated into spatial light, enter the optical path delay device 7 in the reference arm, collimate the hot spot of the spatial light that forms and the hot spot coupling that optical path delay device 7 requires by the second optical fiber collimator 5-2, the spatial light of collimation is after 7 outputs of optical path delay device, pass through the second beam expanding lens 6-2 and spectroscope 8 successively, with the reflection actinic light of measuring light, and by ccd detector 10 receptions; Wherein, by regulating light path, the total optical path difference that makes last reference light and photosynthetic light time of measurement partly be produced by optical path delay device 7 and spatial light is that N pulse is apart from interval (N is a very big positive integer).
The light intensity value of the pixel of each step surface correspondence that ccd detector 10 will receive is converted into electric signal, pass to computing machine 11,1 work of simultaneous computer 11 control femtosecond frequency comb, scan its repetition frequency, and the output signal by ccd detector 10 obtains the interference light intensity collection of illustrative plates that each step surface respective pixel light intensity changes with the repetition frequency value, calculate the repetition frequency value of the relevant peak value correspondence of each step surface, thereby calculate the absolute distance of step.
The centre wavelength of the femtosecond frequency comb that present embodiment adopts is 1560nm, offset frequency f
0Be 20MHz.Repetition frequency f
rBe 250MHz, the humorous scope of maximum adjustable is 3MHz, and tuning resolution is 0.01Hz.The distance that can be got the adjacent light pulse by (2) formula is spaced apart 1.2m.The retardation of 7 pairs of light paths of optical path delay device is 120m.By regulating light path, make final reference light and photosynthetic light time of measurement that the optical path difference of two-way light also is about 120m, even N=100.Can transferring to two pulses by (3) formula, to overlap the maximum tuning range that needs fully be 1.26MHz, is within the tunable range of repetition frequency.Because the distance of adjacent two pulses is spaced apart 1.2m, the N strictness equals 100 in the time of making acquisition be concerned with the peak, as long as the optical path difference of two-way light just can achieve the goal with interior at 0.6m after two beam expanding lenss, this method by the light modulation road is easy to accomplish.By (8) Shi Kede, the longitudinal frame of in this device step distance being measured is 2.4nm.As repetition frequency f
rAccurate when tuning in tunable range 3MHz, corresponding step distance range is 720mm.
The present invention adopts the femtosecond frequency comb that repetition frequency and offset frequency are locked to the microwave frequency benchmark as light source, after the light splitting reference light is wherein interfered with measuring light through behind certain optical path delay.The repetition frequency of scanning femtosecond frequency comb also obtains the relevant peak of the light intensity that each step surface respective pixel receives, the repetition frequency of the relevant peak value correspondence of recycling and the absolute distance that the optical path delay amount calculates step.Owing to adopt the method acquisition reference light of scanning frequency comb repetition frequency and the relevant peak value of measuring light, avoided the measuring error of the bench height that piezoelectric ceramics scanning motion error is brought in the classic method.By in reference path, introducing certain optical path delay, increased bench height and measured range.Repetition frequency resolution makes this measuring system have the Measurement Resolution of nanometer scale in the mHz magnitude.The repetition frequency of femtosecond frequency comb and offset frequency all are locked to the rubidium clock frequency reference in addition, but measurement result has traceability.
Claims (10)
1. step distance measurement mechanism based on the femtosecond frequency comb, it is characterized in that, comprise: femtosecond frequency comb (1), rubidium clock (2), first single-mode fiber (3-1), second single-mode fiber (3-2), the 3rd single-mode fiber (3-3), single-mode optical-fibre coupler (4), first optical fiber collimator (5-1), second optical fiber collimator (5-2), first beam expanding lens (6-1), second beam expanding lens (6-2), optical path delay device (7), spectroscope (8), stepped ramp type to be measured surface (9), ccd detector (10) and the computing machine (11) of band imaging len system, its position is closed and is:
Rubidium clock (2) is electrically connected to femtosecond frequency comb (1), for it provides the frequency reference signal, and with locking repetition frequency and offset frequency, thereby but make The ultimate results have traceability;
The output of femtosecond frequency comb (1) enters single-mode optical-fibre coupler (4) by first single-mode fiber (3-1), and single-mode optical-fibre coupler (4) is divided into two bundles according to the splitting ratio of 2:1 with femtosecond laser and enters second single-mode fiber (3-2) and the 3rd single-mode fiber (3-3) respectively;
The exit end of second single-mode fiber (3-2) connects first optical fiber collimator (5-1), femtosecond pulse is collimated into spatial light, successively by first beam expanding lens (6-1) and spectroscope (8) in the gage beam, be incident on the stepped ramp type to be measured surface (9), its reflected light is reflexed on the ccd detector (10) by spectroscope (8) again;
The exit end of the 3rd single-mode fiber (3-3) connects second optical fiber collimator (5-2), femtosecond pulse is collimated into spatial light, enter the optical path delay device (7) in the reference arm, collimate the hot spot of the spatial light that forms and the hot spot coupling that optical path delay device (7) requires by second optical fiber collimator (5-2), the spatial light of collimation is after optical path delay device (7) output, successively by second beam expanding lens (6-2) and spectroscope (8), with the reflection actinic light of measuring light, and received by ccd detector (10);
The light intensity value of the pixel of each step surface correspondence that ccd detector (10) will receive is converted into electric signal, pass to computing machine (11), simultaneous computer (11) control femtosecond frequency comb (1) work, scan its repetition frequency, and the output signal by ccd detector (10) obtains the interference light intensity collection of illustrative plates that each step surface respective pixel light intensity changes with the repetition frequency value, calculate the repetition frequency value of the relevant peak value correspondence of each step surface, thereby calculate the absolute distance of step.
2. the step distance measurement mechanism based on the femtosecond frequency comb according to claim 1 is characterized in that, total optical path difference that reference light and photosynthetic light time of measurement are partly produced by optical path delay device (7) and spatial light is that N pulse is apart from the interval.
3. the step distance measurement mechanism based on the femtosecond frequency comb according to claim 1 is characterized in that, the centre wavelength of described femtosecond frequency comb (1) is 1560nm, offset frequency f
0Be 20MHz, repetition frequency f
rBe 250MHz, tunable maximum magnitude is 3MHz, and tuning resolution is 0.01Hz, and its repetition frequency and offset frequency all are locked to the frequency reference of rubidium clock (2).
4. the step distance measurement mechanism based on the femtosecond frequency comb according to claim 1, it is characterized in that, described single-mode optical-fibre coupler (4) is divided into two bundles according to the splitting ratio of 2:1 with femtosecond laser with incident light and enters second single-mode fiber (3-2) and the 3rd single-mode fiber (3-3) respectively, and the splitting ratio of spectroscope (8) reflected light and transmitted light is 1:1, make and reference pulse that last ccd detector (10) detects and measure the light intensity approximately equal of pulse improve the contrast of the interference fringe that obtains.
5. the step distance measurement mechanism based on the femtosecond frequency comb according to claim 1 is characterized in that, described optical path delay device (7) adopts Corning ULE 7972 materials to make.
6. the step distance measurement mechanism based on the femtosecond frequency comb according to claim 1 is characterized in that, described first beam expanding lens (6-1) is used for expanding measuring light, and second beam expanding lens (6-2) is used for expanding reference light, makes to expand back two spot sizes coupling.
7. the measuring method based on the described measurement mechanism of claim 1 is characterized in that, may further comprise the steps:
A. adopt and repetition frequency and offset frequency are locked to the femtosecond frequency comb (1) of microwave frequency benchmark as measurement light source, its emergent light is divided into reference light and measuring light, wherein reference light expands through behind certain optical path delay, is incident to ccd detector (10); Directly into being incident upon stepped ramp type to be measured surface (9), its reflected light is incident to ccd detector (10) to measuring light after expanding;
B. the repetition frequency of tuning femtosecond frequency comb (1) makes that the corresponding ccd detector (10) of No. 1 step surface (9-1) on the stepped ramp type surface (9) is gone up the relevant peak value of pixel acquisition, and the repetition frequency that records this moment is f
r
C. this moment, its corresponding ccd detector (10) is gone up pixel can't obtain relevant peak value for No. 2 step surfaces (9-2) on stepped ramp type surface (9);
D. the repetition frequency of tuning femtosecond frequency comb (1) again makes the corresponding ccd detector (10) of No. 2 step surfaces (9-2) go up pixel and obtains relevant peak value, and the repetition frequency of record this moment is f
r';
E. according to the optical path delay amount of reference light, and each the self-corresponding repetition frequency f of two step surfaces that records
rAnd f
r', calculate the absolute distance by the step of No. 1 step surface (9-1) and No. 2 step surfaces (9-2) formation.
8. measuring method according to claim 7 is characterized in that, the optical path delay in the described reference path is N pulse apart from interval, then the corresponding optical path difference of No. 1 step surface (9-1)
DL=NL
0=Ncf
r, the optical path difference DL'=NL that No. 2 step surfaces (9-2) are corresponding
0=Ncf
r', the absolute distance of the step that is constituted by No. 1 step surface (9-1) and No. 2 step surfaces (9-2)
Wherein c is the light velocity in the vacuum, L
0Be the distance interval between adjacent two light pulses in the time domain, L
0=ct
r=cf
r
9. measuring method according to claim 8 is characterized in that, N gets 100.
10. measuring method according to claim 8 is characterized in that, the resolution of bench height
Wherein δ f is the resolution of repetition frequency scanning.
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