CN102435136A - Spatial phase-shifting unit, interferometry system applying same and phase-correcting unit - Google Patents
Spatial phase-shifting unit, interferometry system applying same and phase-correcting unit Download PDFInfo
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Abstract
The invention provides an interferometry system, which comprises a unit, a phase modulation type spatial light modulator, an interferometer and a light detector; the unit is used for generating mutually orthogonal linearly polarized lights in the polarized state, and the mutually orthogonal linearly polarized lights are respectively called reference light and testing light; the phase modulation type spatial light modulator is arranged in the light path of the reference light or the testing light, and is used for changing spatial phase distribution before light waves; the spatial light modulator is provided with a plurality of pixels, each of which has specific phase distribution; the light, the phase of which is modulated by the spatial light modulator, is called modulated light, and the light which is not modulated is called unmodulated light; the interferometer is based on the modulated light and the unmodulated light to carry out interferometry; the coherent light generated by the interferometer is detected by the light detector; and moreover, the pixels of the spatial light modulator are corresponding to the pixels of the light detector. The system provided by the invention not only can carry out measurement during the phase shift distribution of a plurality of spatial carriers, but also can carry out high-precision dynamic measurement. The invention also provides a spatial phase-shifting unit and a liquid crystal spatial light modulator phase-correcting unit.
Description
Technical field
The present invention relates to the optical detective technology field, be specifically related to a kind of spatial phase shift device.The present invention also provides a kind of phase correction unit simultaneously, uses the interferometric measuring means of this spatial phase shift device.
Background technology
Interferometer has important use to be worth in the optical component surface shape context of detection.With regard to interferometric method, can be divided into time domain phase-shift method, Fourier analysis method and spatial carrier phase-shift method.Time domain phase-shift method measuring accuracy is high, in optical detection, be widely used, but it needs three width of cloth interferograms at least, receives influence of ambient vibration big, so be not suitable for measuring under the dynamic environment.Fourier analysis method only needs a width of cloth spatial carrier interferogram, thus be fit to measure under the dynamic environment, but the Fourier analysis method measuring accuracy is relatively low and can not judge the positive and negative of tested phase place.The spatial carrier phase-shift method has combined the advantage of time domain phase-shift method and Fourier analysis method; Through handling the approximate precision that reaches the time domain phase-shift method of single width spatial carrier interferogram, so the spatial carrier phase-shift method is having important application prospects aspect the dynamic high precision interferometry.
The method of implementation space carrier phase mainly contains two kinds at present: a kind of is to introduce a suitable space carrier frequency amount through the tilt reference mirror; Making the phasic difference between neighbor pixel is pi/2, makes the space carrier frequency strictness equal theoretical value but be difficult to the adjustment reference mirror during actual measurement.Another kind is to utilize polarized light splitting device on same CCD, to obtain the interferogram of four width of cloth phase shift pi/2s; This device is promptly disclosed in publication number is the Chinese patent document of CN101111739A; In this patent documentation, the reference mirror and the test mirrors of Feisuo interferometer is set, makes them have different slopes; Thereby discrete testing light T and reference light R; Make test light and the different polarization optical element of reference light process then, between test light and reference light, introduce the spatial carrier phase shift, realized on same CCD, obtaining the interferogram of four width of cloth phase shift pi/2s at last.The device of above-mentioned introduction can be realized dynamic interferometry, but because the angle of reference light and test light is bigger, and they belong to non-omnibus system, introduces bigger systematic error easily.For this reason; In the patent No. is in the US7230717B2 U.S.; Disclose a kind of dynamic interferometer system of light path altogether, the angle of reference light and test light is close to zero in this United States Patent (USP), but both polarization states are quadratures; Through before CCD, adding a polarization phase mask plate, the pixel distribution of polarization phase mask plate is consistent with the pixel distribution of CCD.The polarization phase mask plate makes reference light and test light on CCD, introduce a specific phase differential in each pixel, distributes thereby obtained the spatial carrier phase shift.
Though above-mentioned polarization phase mask plate can be introduced the spatial carrier phase shift; But its processing is difficulty relatively; Be easy to generate mismachining tolerance; And be difficult for proofreading and correct mismachining tolerance, and mismachining tolerance will directly influence the precision of interferometry, the precision of the polarization phase mask plate that therefore above-mentioned U.S. Pat 7230717B2 introduces remains further to be improved; In addition, a polarization phase mask plate that processes can only produce specific spatial carrier phase shift and distribute, and can not carry out artificial modification, uses to be restricted unavoidably.
Summary of the invention
The present invention provides a kind of interferometric measuring means, the measurement when interferometric measuring means of the present invention can realize not only that a plurality of spatial carrier phase shifts distribute, but also can realize error correction, improve measuring accuracy.The present invention also provides a kind of spatial phase shift device and LCD space light modulator phase correction unit simultaneously.
A kind of interferometric measuring means provided by the invention comprises,
In order to produce the device of the mutually orthogonal linearly polarized light of polarization state, this mutually orthogonal linearly polarized light is called reference light and test light respectively;
Phase modulation (PM) formula spatial light modulator is arranged in the light path of reference light or test light, distributes in order to the space phase before the change light wave; This spatial light modulator has a plurality of pixels, and each pixel possesses specific PHASE DISTRIBUTION; Wherein, the light after said spatial light modulator phase modulation (PM) is called light modulated, and the light of non-modulated is called unmodulated light;
Interferometer based on said light modulated and unmodulated light realization interferometry;
To the light detection device that the coherent light of interferometer generation is surveyed, this light detection device possesses the pixel distribution identical with said spatial light modulator; And the two pixel is corresponding.
Optional, said spatial light modulator is the reflection type liquid crystal spatial light modulator.
Optional, the device of the mutually orthogonal linearly polarized light of said generation polarization state comprises the linearly polarized light polarizer and the polarization splitting prism of coaxial setting.
Optional, the device of the mutually orthogonal linearly polarized light of said generation polarization state comprises further that also the orhtogonal linear polarizaiton light that makes behind the polarization spectroscope produces the structure of phase delay.
Optional, LCD space light modulator comprises one group of 2 * 2 pixel cell that distributes at least, and each pixel has different phase in the said pixel cell.
Optional, in said each pixel cell PHASE DISTRIBUTION be respectively 0, pi/2, π and 3 pi/2s.
Optional, said interferometer is the Feisuo interferometer.
Optional, also comprise coherent source.
The present invention also provides a kind of spatial phase shift device, comprising: polarizer and LCD space light modulator along the collimated light beam direction of illumination sets gradually also comprise the control device that is used for said LCD space light modulator phase modulation (PM).
The present invention also provides a kind of LCD space light modulator phase correction unit, comprises the interferometer, reference mirror, polaroid and the LCD space light modulator that set gradually along optical axis.
Compared with prior art; Provided by the invention based on the LCD space light modulator interferometric measuring means; The angle of reference light and test light is close to zero, so the error of the reference light that causes of interferometer system aberration and the optical path difference between the test light is less, and promptly systematic error is less; Present embodiment adopts LCD space light modulator implementation space carrier phase simultaneously; Through control input signals corresponding gray scale of each pixel on LCD space light modulator; The spatial carrier phase shift that can obtain design distributes, and it can also design the distribution of the gray scale modification spatial carrier phase shift of input signal artificially simultaneously; The present invention can realize gathering a frame spatial carrier phase shift interference striped, therefrom can extract the sub-interferogram that the multiframe frame has specific phase shift; And interferometric measuring means provided by the invention can obtain spatial carrier phase shift arbitrarily through computer control and distribute, thereby have using value widely;
Interferometric measuring means of the present invention can also be realized error correction, therefore can realize the Dynamic High-accuracy measurement.
Description of drawings
Fig. 1 is the synoptic diagram of the embodiment of interferometric measuring means of the present invention;
Fig. 2 is the synoptic diagram that is applied to the periodic signal intensity profile of LCD space light modulator;
Fig. 3 for LCD space light modulator introduce the spatial carrier phase shift distribute;
Fig. 4 is the interferogram that the embodiment of interferometric measuring means of the present invention produces;
Fig. 5 has the sub-interferogram of specific phase shift for four frames that from Fig. 4, extract;
Fig. 6 is the synoptic diagram of the embodiment of spatial phase shift device of the present invention;
Fig. 7 is the synoptic diagram of the embodiment of LCD space light modulator phase correction unit of the present invention.
Embodiment
A lot of details have been set forth in the following description so that make much of the present invention.But the present invention can implement much to be different from alternate manner described here, and those skilled in the art can do similar popularization under the situation of intension of the present invention, so the present invention does not receive the restriction of following disclosed practical implementation.
Fig. 1 is the synoptic diagram of the embodiment of interferometric measuring means of the present invention.Please, in the present embodiment, comprise cross polarization light source, phase modulation (PM) formula spatial light modulator, interferometer and light detection device in the interferometric measuring means referring to Fig. 1.Wherein,
Said cross polarization light source is used to produce the mutually orthogonal linearly polarized light of polarization state; This mutually orthogonal linearly polarized light is called reference light and test light respectively, and this cross polarization light source comprises short coherent source, the linearly polarized light polarizer and linearly polarized light beam splitter in the present embodiment.
Spatial light modulator is arranged in the light path of above-mentioned reference light or test light, to realize the phase modulation (PM) to reference light or test light, changes the preceding space phase of light wave and distributes.This spatial light modulator has a plurality of pixels, and each pixel possesses specific PHASE DISTRIBUTION; Wherein, the light after said spatial light modulator phase modulation (PM) is called light modulated, and the light of non-modulated is called unmodulated light;
Interferometer in the present embodiment is dynamic Suo Fei interferometer, and wherein, said light modulated and unmodulated light constitute the test light and the reference light of Suo Fei interferometer, and the Suo Fei interferometer is realized interferometry based on said light modulated and unmodulated light.Certainly, said interferometer can also be other dynamic interferometer.
Said light detection device is arranged at the interferogram image planes position of Suo Fei interferometer, is used for interferogram is surveyed.Wherein, this light detection device possesses the pixel distribution identical with said spatial light modulator; And the two pixel is corresponding.In the present embodiment, light detection device is CCD 17.
Describe in detail below.
As shown in Figure 1; The light beam of short coherent source 1 output is through obtaining linearly polarized light after the polaroid 2 as the polarizer; Linearly polarized light beam is divided into P light and S light through behind the polarization splitting prism 3, and wherein, P light polarized light incident direction along the line is gone out by 3 transmissions of polarization spectro Amici prism; S light is through the reflection of polarization splitting prism beam-splitting surface, and the edge is perpendicular to the downward outgoing of linearly polarized light incident direction.
Right lateral side and downside at said polarization splitting prism 3 are provided with first wave plate 5 and second wave plate 4 respectively.Wherein, two wave plates are quarter-wave plate.P light is through being placed on this first wave plate 5,7 reflections of first reference mirror afterwards after said first wave plate 5; And once more through behind first wave plate 5; The P light polarization direction is revolved and is turn 90 degrees back entering polarization splitting prism 3; By the outgoing above the polarization splitting prism 3, this light beam is defined as the S2 light beam after the beam-splitting surface reflection, and the phase place of S2 light beam is a plane.
On the other hand; S light through second wave plate 4 and the first polaroid 22a after; Be set at the spatial light modulator 23 phase modulation (PM) back reflections of the first polaroid 22a downside; And once more through the first polaroid 22a and second wave plate 4, the polarization direction is revolved and is turn 90 degrees the back through polarization splitting prism 3, and this light beam is defined as P2.
In the present embodiment, spatial light modulator 23 is the reflection type liquid crystal spatial light modulator, and this LCD space light modulator 23 possesses a plurality of pixels.Described LCD space light modulator 23 is connected with computing machine 24; Under phase modulation pattern; Computing machine 24 can make the pixel of LCD space light modulator produce certain phase change through the certain grey scale signal of driving circuit input of LCD space light modulator.Know according to the phase modulation (PM) of LCD space light modulator is specific; The gray scale of input signal is directly proportional with the size of phase modulation (PM); To the different grey scale signal of pixels with different input; Can make pixels with different produce different phase and change, thus can be through the PHASE DISTRIBUTION of computer control LCD space light modulator.
In the present embodiment; LCD space light modulator 23 has 1024 * 768 pixels; Through applying identical with said LCD space light modulator 23 pixel distribution on computers and being periodic intensity profile signal; (shown in Fig. 2 is the signal intensity profile of wherein 16 pixels) as shown in Figure 2 can produce periodic PHASE DISTRIBUTION on LCD space light modulator 23.In the present embodiment, be one-period with adjacent 2 * 2 pixels, be called pixel cell.In one-period, the PHASE DISTRIBUTION of pixel is respectively 0, pi/2, π and 3 pi/2s.When light beam after LCD space light modulator 23 reflection, again through the first polaroid 22a, the PHASE DISTRIBUTION after its light beam is modulated is with as shown in Figure 3, it also is a period profile.Certainly, can also obtain other PHASE DISTRIBUTION through changing the intensity profile of Computer signal, for example, can be so that the PHASE DISTRIBUTION of adjacent 2 * 2 pixels be respectively 0, pi/2,3 pi/2s and π, perhaps 0, π/3,2 π/3, and π.
It is thus clear that to LCD space light modulator 23 inputs periodic signal as shown in Figure 2, the phase place that then obtains light beam P2 is as shown in Figure 3 through computing machine 24.Light beam S2 and P2 are through condenser lens 9; By Amici prism 10 reflections; Then through collimating mirror 11 collimations; Light beam after second reference mirror 12 that light beam S2 is provided with in the Suo Fei interferometer and the reflection of second test mirrors 13 is defined as SR and ST respectively, and the light beam after light beam P2 is reflected by second reference mirror 12 and second test mirrors 13 is defined as PR and PT respectively.
In the present embodiment, the optical path difference between second reference mirror 12 and second test mirrors, 13 reflected light is 2 Δ L; Through the position of one dimension translation stage 8 adjustings first reference mirror 7, the optical path difference that makes P2 and S2 also is 2 Δ L, and then the optical path difference of SR and ST is 2 Δ L; The optical path difference of PR and PT is 2 Δ L, and the optical path difference of SR and PR is 2 Δ L, and the optical path difference of ST and PT is 2 Δ L; The optical path difference of PT and SR is 0, and the optical path difference of having only ST and PR is 4 Δ L, because light source is the short-phase dry length light source; Therefore its coherent length has only light beam PT and light beam SR just might interfere much smaller than 2 Δ L.
Light beam PT and light beam SR see through Amici prism 10, and again through the imaging len 15 and the second polaroid 22b, (CCD 17 has pixel count and the distribution identical with LCD space light modulator 23, and when being arranged at interferometric measuring means, the two pixel is corresponding at CCD 17 at last.) and on obtain spatial carrier phase shift interference striped, as shown in Figure 4, comprise the face shape error of the measured optical unit-second test mirrors 13 in this interferogram, it also comprises the spatial carrier phase shift distributed intelligence that LCD space light modulator 23 is introduced simultaneously.Because it is to design in advance and have computer-controlledly that the spatial carrier phase shift distributes, and is known so the spatial carrier phase shift distributes, as shown in Figure 3.In spatial carrier phase shift interference striped; Is the spatial carrier phase-shift value that 0 all corresponding pixels are formed the first width of cloth interferogram; To be the spatial carrier phase-shift value pi/2; All pixels that π and 3 pi/2s are corresponding are formed second, third and the 4th sub-interferogram respectively, and are as shown in Figure 5, utilize four traditional step phase shift algorithm just can from this four width of cloth interferogram, extract the error profile of the measured optical unit (second test mirrors 13).
Embodiments of the invention provide based on the LCD space light modulator interferometric measuring means, the angle of reference light and test light is close to zero, so the error of the reference light that causes of interferometer system aberration and the optical path difference between the test light is less, promptly systematic error is less; Present embodiment adopts LCD space light modulator implementation space carrier phase simultaneously; Gray scale through control input signals each pixel on LCD space light modulator; The spatial carrier phase shift that can obtain design distributes, and it can also design the distribution of the gray scale modification spatial carrier phase shift of input signal artificially simultaneously; Therefore, present embodiment can realize that CCD gathers a frame spatial carrier phase shift interference striped, and we therefrom can extract the sub-interferogram of four frame phase shift pi/2s, so the interferometer that present embodiment provides also can be measured under dynamic environment.And interferometric measuring means provided by the invention can obtain spatial carrier phase shift arbitrarily through computer control and distribute, thereby have using value widely.
In addition; The present invention also provides a kind of spatial phase shift device; As shown in Figure 6, this phase changer comprises the polarizer 22 and LCD space light modulator 23 that sets gradually along the collimated light beam direction of illumination, also comprises the control device 24 that is used for said LCD space light modulator phase modulation (PM).In the present embodiment, said control device 24 is computing machine and LCD space light modulator control circuit.Said in addition LCD space light modulator 23 is reflective.
Through the gray scale of control input signals each pixel on LCD space light modulator 23, the spatial carrier phase shift that can obtain design distributes.Wherein, the number of pixels of input signal, LCD space light modulator and CCD wants consistent.
The present invention also provides a kind of LCD space light modulator phase correction unit, and is as shown in Figure 7, comprises the interferometer 25, reference mirror 26, polaroid 22 and the LCD space light modulator 23 that set gradually along optical axis.LCD space light modulator 23 is connected with control device 24.
Face shape error through this device recoverable LCD space light modulator 23 and polaroid 22.Its step is following, and the gray scale of the input signal of all pixels is set to zero on the LCD space light modulator 23 earlier, uses the face shape error sum of interferometer measurement LCD space light modulator 23 and polaroid 22 then.The characteristic that is directly proportional with the size of phase modulation (PM) according to the gray scale of input signal; The intensity profile of the desired input signal of face shape error sum of calculation correction LCD space light modulator 23 and polaroid 22; This intensity profile is saved in the computing machine, is used for the correction of LCD space light modulator.When using LCD space light modulator 23 at every turn; Intensity profile of proofreading and correct usefulness and the intensity profile that design obtains are worked together on the LCD space light modulator 23; So just can suppress the influence of face shape error effectively, distribute thereby obtain high-precision spatial carrier phase shift.
It is thus clear that the interferometric measuring means of the above embodiment of the present invention can also be used LCD space light modulator phase correction unit shown in Figure 7 and realize error correction, therefore can realize the Dynamic High-accuracy measurement.
Though the present invention with preferred embodiment openly as above; But it is not to be used for limiting the present invention; Any those skilled in the art are not breaking away from the spirit and scope of the present invention; Can make possible change and modification, so protection scope of the present invention should be as the criterion with the scope that claim of the present invention was defined.
Claims (10)
1. an interferometric measuring means is characterized in that comprising,
In order to produce the device of the mutually orthogonal linearly polarized light of polarization state, this mutually orthogonal linearly polarized light is called reference light and test light respectively;
Phase modulation (PM) formula spatial light modulator is arranged in the light path of reference light or test light, distributes in order to the space phase before the change light wave; This spatial light modulator has a plurality of pixels, and each pixel possesses specific PHASE DISTRIBUTION; Wherein, the light after said spatial light modulator phase modulation (PM) is called light modulated, and the light of non-modulated is called unmodulated light;
Interferometer based on said light modulated and unmodulated light realization interferometry;
To the light detection device that the coherent light of interferometer generation is surveyed, this light detection device possesses the pixel distribution identical with said spatial light modulator; And the two pixel is corresponding.
2. interferometric measuring means according to claim 1 is characterized in that, said spatial light modulator is the reflection type liquid crystal spatial light modulator.
3. interferometric measuring means according to claim 1 is characterized in that, the device of the mutually orthogonal linearly polarized light of said generation polarization state comprises the linearly polarized light polarizer and the polarization splitting prism of coaxial setting.
4. interferometric measuring means according to claim 3 is characterized in that, the device of the mutually orthogonal linearly polarized light of said generation polarization state comprises further that also the orhtogonal linear polarizaiton light that makes behind the polarization spectroscope produces the structure of phase delay.
5. interferometric measuring means according to claim 3 is characterized in that, LCD space light modulator comprises one group of 2 * 2 pixel cell that distributes at least, and each pixel has different phase in the said pixel cell.
6. interferometric measuring means according to claim 5 is characterized in that, in said each pixel cell PHASE DISTRIBUTION be respectively 0, pi/2, π and 3 pi/2s.
7. interferometric measuring means according to claim 1 is characterized in that, said interferometer is the Feisuo interferometer.
8. interferometric measuring means according to claim 7, its characteristic are being, also comprise coherent source.
9. spatial phase shift device, it is characterized in that comprising: polarizer and LCD space light modulator along the collimated light beam direction of illumination sets gradually also comprise the control device that is used for said LCD space light modulator phase modulation (PM).
10. a LCD space light modulator phase correction unit is characterized in that comprising interferometer, reference mirror, polaroid and the LCD space light modulator that sets gradually along optical axis.
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