CN102914259A - Interference detection device based on light-splitting synchronous phase shifting and detection method - Google Patents
Interference detection device based on light-splitting synchronous phase shifting and detection method Download PDFInfo
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Abstract
The invention discloses an interference detection device based on light-splitting synchronous phase shifting and a detection method. The interference detection device belongs to the field of optical interference detection. The invention aims to solve problems of difficulty and complexity in operation and low measurement precision of the conventional optical phase shifting interference detection method. The invention has the scheme that a light beam emitted from a light source is carried out collimation light expansion by a polarizing film and a collimation light expansion system to form a linearly polarized light; the linearly polarized light is divided into an object light beam and a reference light beam after passing through a first polarization light splitting prism; the object light beam and the reference light beam gathered on a second polarization light splitting prism pass through a lambda/4 wave plate, a rectangular window, a first Fourier lens, a one-dimensional period grating, a second Fourier lens, a depolarization light splitting prism and a four-quadrant polarizing film group in sequence; an interference pattern is generated on a plane of an image sensor; the interference pattern obtained by collection is processed by a computer; and phase distribution of an object to be detected is obtained.
Description
Technical field
The present invention relates to interference checking device and detection method based on the light splitting simultaneous phase-shifting, belong to the optical interference detection field.
Background technology
The optics phase-shifting interference measuring is a kind of noncontact, high-precision measurement of full field method, be widely used in the fields of measurement such as optical surface, deformation and thickness, but traditional phase shift technology is not suitable for measuring moving object or dynamic process owing to need to gather several phase-shift interferences at different time.Synchronously phase shift can obtain several phase shifting interferences at one time, has overcome the shortcoming of traditional time-phase displacement interference technique, can realize the real-time measurement of moving object or dynamic process, is subject in recent years the extensive concern of Chinese scholars.
The propositions such as Mexico scholar G.Rodriguez-Zurita utilize one-dimensional grating and Polarization Modulation method to combine and realize synchronous phase shift (G.Rodriguez-Zurita, C.Meneses-Fabian, N.I.Toto-Arellano, J.F.V á zquez-Castillo, C.Robledo-S á nchez.One-shot phase-shifting phase-grating interferometry with modulation of polarization:case of four interferograms.Opt.Express, 2008,16 (11): 7806-7817).The method utilize that grating produces 0, ± 1 and ± 2 diffraction lights, obtain four width of cloth phase shifting interferences in conjunction with Polarization Modulation by single exposure.The method is easy to adjust, cost is low, and can realize real-time measurement, but interfere because utilize multi-level diffraction light to arrive CCD, cause CCD useful area utilization factor low, because of the difference of the order of diffraction time light intensity, make to obtain four width of cloth interferogram contrasts difference simultaneously, and then increase the complicacy of data processing and affect measuring accuracy.
The Xi'an ray machine the propositions such as Yao Baoli utilize Amici prism and Polarization Modulation method to combine to realize synchronous phase shift (P.Gao, B.L.Yao, J.W.Min, R.L.Guo, J.J.Zheng, T.Ye.Parallel two-step phase-shifting microscopic interferometry based on a cube beamsplitter.Optics Communications.2011,284:4136-4140).The method utilizes Amici prism with thing light and the reference light beam splitting of cross polarization, obtains two width of cloth phase shifting interferences in conjunction with Polarization Modulation by single exposure.The method is simple in structure, the efficiency of light energy utilization is high, but the method single exposure can only obtain two width of cloth interference patterns, simultaneously because the thing light of cross polarization and reference light in the middle of Amici prism during reflective layer reflects, one of them can occur half-wave loss in thing light or reference light, and transmitted light is different from intensity of reflected light, and then introduces additional phase error in two width of cloth interferograms, and make two width of cloth interference pattern contrasts different, and then increase the complicacy of data processing and affect measuring accuracy.
Summary of the invention
The present invention seeks to provides a kind of interference checking device based on the light splitting simultaneous phase-shifting and detection method in order to solve the problem that existing optical phase shift interference detection method complicated operation is difficult, measuring accuracy is low.
Interference checking device based on the light splitting simultaneous phase-shifting of the present invention, it comprises light source, it also comprises polaroid, collimating and beam expanding system, the first polarization splitting prism, object under test, the first catoptron, the second catoptron, the second polarization splitting prism, λ/4 wave plates, rectangular window, the first fourier lense, the One Dimension Periodic grating, the second fourier lense, the depolarization Amici prism, the four-quadrant polarizer group, imageing sensor and computing machine, wherein λ is the optical wavelength of source emissioning light bundle
The light beam of light source emission is incident to the light receiving surface of collimating and beam expanding system through polaroid, outgoing beam behind this collimating and beam expanding system collimator and extender is incident to the first polarization splitting prism, the folded light beam of the first polarization splitting prism is incident to the first catoptron behind object under test, the folded light beam of the first catoptron is incident to the second polarization splitting prism as object beam; The transmitted light beam of the first polarization splitting prism is incident to the second polarization splitting prism as the reference light beam after the second mirror reflects;
Meet at the object beam of the second polarization splitting prism and reference beam and be incident to the first fourier lense after through λ/4 wave plates and rectangular window, outgoing beam after the first fourier lense converges is incident to the second fourier lense after by the One Dimension Periodic grating, transmission generation 0 and ± 1 order diffraction light, outgoing beam after this diffraction light process depolarization Amici prism and the four-quadrant polarizer group is received by the light receiving surface of imageing sensor, and the image signal output end of imageing sensor connects the picture signal input end of computing machine;
Set up the xyz three-dimensional cartesian coordinate system take the direction of the first fourier lense optical axis as the z direction of principal axis, described rectangular window is along the direction setting perpendicular to optical axis, and is divided into two wickets along the x direction of principal axis;
The focal length of the first fourier lense and the second fourier lense is f;
Rectangular window is positioned on the front focal plane of the first fourier lense; The One Dimension Periodic grating is positioned on the back focal plane of the first fourier lense and is positioned on the front focal plane of the second fourier lense;
Imageing sensor is positioned on the back focal plane of the second fourier lense;
The cycle d of One Dimension Periodic grating and rectangular window are along satisfying relation between the axial length D of x: d=2 λ f/D.
The depolarization Amici prism is placed according to the parallel plane mode that its light splitting surface and x axle and z axle consist of, incident light from 45 ° with its light splitting surface or-the inclined-plane incident of 45° angle.
The One Dimension Periodic grating is two-value One Dimension Periodic grating or sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
The four-quadrant polarizer group is 2 * 2 arrays that the polarization direction is rotated counterclockwise four polaroids compositions of 45° angle successively, and these four polaroids are arranged in the counterclockwise direction.
Based on the interference detection method of described interference checking device based on the light splitting simultaneous phase-shifting, its implementation procedure is as follows:
Open light source, make the light beam of light source emission form linearly polarized light behind the collimator and extender of polaroid and collimating and beam expanding system, this linearly polarized light is divided into object beam and reference beam after by the first polarization splitting prism; Meet at the object beam of the second polarization splitting prism and reference beam by λ/4 wave plates and rectangular window after, again successively through the first fourier lense, the One Dimension Periodic grating, the second fourier lense, after depolarization Amici prism and the four-quadrant polarizer group, produce interference pattern in image sensor plane, computing machine will gather the interference pattern that obtains and cut apart four width of cloth interference patterns that obtain object under test according to the size of the wicket of rectangular window, this four width of cloth interference pattern is take upper right corner image as the first width of cloth interference pattern, and be first to fourth width of cloth interference pattern according to counterclockwise arranging, after the 3rd width of cloth interference pattern and the 4th width of cloth interference pattern carried out mirror image switch, the sequenced intensity distributions of four width of cloth interference patterns was I in turn
1, I
2, I
3And I
4, calculate the PHASE DISTRIBUTION that obtains object under test according to the intensity distributions of four width of cloth interference patterns
Advantage of the present invention:
Interference with common path detection method based on the synchronous phase shift of light splitting has following characteristics and beneficial effect:
1. grating beam splitting technology, Amici prism light splitting technology and polarization Modulation are combined, the interferogram that just can obtain four width of cloth by the single exposure collection reaches the purpose of object phase bit recovery, on the basis of improving measuring accuracy, method is simple, and can improve imageing sensor useful area utilization factor, this is one of innovative point that is different from prior art;
2. four width of cloth interferogram contrasts are identical, and mapping relations are simple, can greatly improve Phase Retrieve Algorithm efficient, can eliminate simultaneously phase displacement error and the random noise introduced because of the multilevel diffraction, improve measuring accuracy, and then be more suitable for real time dynamic measurement, this be different from prior art innovative point two;
Apparatus of the present invention have following distinguishing feature:
1. apparatus of the present invention are simple in structure, and cost is low;
2. apparatus of the present invention do not need to change light path in operation, do not need mobile any experiment apparatus yet, and flexible to operation, stability is high.
Description of drawings
Fig. 1 is the structural representation of the interference checking device based on the light splitting simultaneous phase-shifting of the present invention, and the coordinate among the figure is three-dimensional rectangular coordinate system;
Fig. 2 is depolarization Amici prism configuration schematic diagram;
Fig. 3 is four-quadrant polarizer group configuration structure schematic diagram;
Fig. 4 is four width of cloth interference patterns of cutting apart the object under test of acquisition for the interference pattern that computer acquisition is obtained, four one by one corresponding acquisitions of polaroid among this four width of cloth interference pattern and Fig. 3;
Fig. 5 is the PHASE DISTRIBUTION according to object under test
Recover the PHASE DISTRIBUTION of the object under test of acquisition.
Embodiment
Embodiment one: present embodiment is described below in conjunction with Fig. 1 to Fig. 4, the described interference checking device based on the light splitting simultaneous phase-shifting of present embodiment, it comprises light source 1, it also comprises polaroid 2, collimating and beam expanding system 3, the first polarization splitting prism 4, object under test 5, the first catoptron 6, the second catoptron 7, the second polarization splitting prism 8, λ/4 wave plates 9, rectangular window 10, the first fourier lense 11, One Dimension Periodic grating 12, the second fourier lense 13, depolarization Amici prism 14, four-quadrant polarizer group 15, imageing sensor 16 and computing machine 17, wherein λ is the optical wavelength of light source 1 emission light beam
The light beam of light source 1 emission is incident to the light receiving surface of collimating and beam expanding system 3 through polaroid 2, outgoing beam behind these collimating and beam expanding system 3 collimator and extenders is incident to the first polarization splitting prism 4, the folded light beam of the first polarization splitting prism 4 is incident to the first catoptron 6, the first catoptrons 6 behind object under test 5 folded light beam is incident to the second polarization splitting prism 8 as object beam; The transmitted light beam of the first polarization splitting prism 4 is incident to the second polarization splitting prism 8 as the reference light beam after 7 reflections of the second catoptron;
Meet at the object beam of the second polarization splitting prism 8 and reference beam and be incident to the first fourier lense 11 after through λ/4 wave plates 9 and rectangular window 10, outgoing beam after the first fourier lense 11 converges is incident to the second fourier lense 13 after by One Dimension Periodic grating 12, transmission generation 0 and ± 1 order diffraction light, outgoing beam after this diffraction light process depolarization Amici prism 14 and the four-quadrant polarizer group 15 is received by the light receiving surface of imageing sensor 16, and the image signal output end of imageing sensor 16 connects the picture signal input end of computing machine 17;
Set up the xyz three-dimensional cartesian coordinate system take the direction of the first fourier lense 11 optical axises as the z direction of principal axis, described rectangular window 10 is along the direction setting perpendicular to optical axis, and is divided into two wickets along the x direction of principal axis;
The focal length of the first fourier lense 11 and the second fourier lense 13 is f;
Imageing sensor 16 is positioned on the back focal plane of the second fourier lense 13;
The cycle d of One Dimension Periodic grating 12 and rectangular window 10 are along satisfying relation between the axial length D of x: d=2 λ f/D.
In the present embodiment, the linear polarization directional light behind the collimator and extender is by being divided into the orthogonal object beam in polarization direction and reference beam behind the first polarization splitting prism 4.Object under test 5 and the first catoptron 6 are placed on the reflection direction of the first polarization splitting prism 4, and the second catoptron 7 is placed on the transmission direction of the first polarization splitting prism 4.
It is the He-Ne laser instrument of 632.8nm that light source 1 can adopt wavelength.The first fourier lense 11 and the second fourier lense 14 focal distance f all can be 250mm.
Embodiment two: present embodiment is described below in conjunction with Fig. 2, present embodiment is described further embodiment one, depolarization Amici prism 14 is placed according to the parallel plane mode that its light splitting surface and x axle and z axle consist of, incident light from 45 ° with its light splitting surface or-the inclined-plane incident of 45° angle.
Embodiment three: present embodiment is described further embodiment one or two, and One Dimension Periodic grating 12 is two-value One Dimension Periodic grating or sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
In the present embodiment, One Dimension Periodic grating 12 adopts the Ronchi grating of cycle d=50 μ m.
Embodiment four: present embodiment is described below in conjunction with Fig. 3, present embodiment is described further embodiment one or two, four-quadrant polarizer group 15 is rotated counterclockwise 2 * 2 arrays of four polaroids compositions of 45° angle successively for the polarization direction, these four polaroids are arranged in the counterclockwise direction.
The polarization direction of four polaroids is different, four polarization directions as shown in Figure 3, the polarization direction of upper right corner polaroid and optical axis included angle are 0, other three polaroids are arranged in the counterclockwise direction take upper right corner polaroid as benchmark, and the polarization direction of these three polaroids is rotated counterclockwise 45° angle with respect to previous polaroid successively take upper right corner polaroid as benchmark.
Embodiment five: present embodiment is described further embodiment one or two, and the light transmission shaft of polaroid 2 and x axle are 45° angle.
Embodiment six: present embodiment is described further embodiment one or two, and place with the direction that the x axle is 45° angle on described λ/4 wave plates, 9 fast axles edges.
Embodiment seven: present embodiment is described further embodiment one or two, and described rectangular window 10 is the window of D * (D/2)=6.33mm * 3.16mm.
The size of rectangular window 10 can be adjusted as required in the present embodiment.This window is divided into two parts, the size of every part and a width of cloth interference pattern measure-alike.
Embodiment eight: below in conjunction with Fig. 1 to Fig. 5 present embodiment is described, based on the interference detection method of the arbitrary described interference checking device based on the light splitting simultaneous phase-shifting of embodiment one to seven, its implementation procedure is as follows:
Recover PHASE DISTRIBUTION figure as shown in Figure 5.
In the present embodiment, before the pick-up unit operation, need adjust as required whole optical system.Do not need mobile optical device in measuring process, this embodiment is simple in structure, because adopt the synchronous phase-shifting technique of light splitting, has avoided device to move the interference of introducing simultaneously, and system stability is good.Four required interference patterns of phase bit recovery generate in an interferogram, and recovery algorithms is simple, has reduced the complexity of system.The present embodiment method namely collects four width of cloth interference patterns of object under test 5 by single exposure, on the basis that guarantees the measurement real-time, greatly improved measuring accuracy.
Principle of work:
This light path is based on typical optics 4f system, and the pass between input face, frequency plane and the output face is: the optical field distribution of frequency plane is the Fourier transform of input face optical field distribution, and the optical field distribution of output face is the inverse Fourier transform of frequency plane optical field distribution; Two lens play respectively Fourier transform and inverse Fourier transform.
This light path is by using Amici prism and catoptron respectively formation light and reference light, the light path of separation so that object under test can freely place.On the input face, rectangular aperture is divided into two windows, respectively by thing light and reference light; On frequency plane, just obtain the frequency spectrum of input plane optical field distribution, by using One Dimension Periodic grating 12 to carry out filtering at frequency plane, just frequency spectrum has been diffracted into a plurality of levels inferior; After carrying out inverse Fourier transform through the second fourier lense 13 like this, in output face, just obtained a plurality of level time with the similar light field of input optical field distribution (be that each order of diffraction is the structure of Dual-window, one side window is reference light, and the opposite side window is PHASE DISTRIBUTION); In native system, only use 0 grade ,+1 grade and-1 order diffraction light, concern along satisfying between the axial width D of x by cycle d and the rectangular window 10 of adjusting One Dimension Periodic grating 12: d=2 λ f/D, just can make a side window of 0 grade of light and a side window of-1 grade of light overlap (namely two windows overlap), thereby produce an interference pattern, a side window of 0 grade of light overlaps (two windows overlap) and produces another interference pattern with a side window of+1 grade of light simultaneously, so just can obtain two width of cloth interferograms.
In order to obtain four width of cloth interferograms, we had used a depolarization Amici prism 14 before light enters imageing sensor 11.The effect of depolarization Amici prism 14 is exactly that incident light is divided into reflection and transmission two-beam in the ratio of intensity one to one, can not affect the PHASE DISTRIBUTION of light field, and since the reflection effect so that the reflected light of outgoing is the mirror image switch of incident light, and transmitted light can not overturn, so two interference patterns that reflection need to be obtained when processing interferogram carry out mirror image switch.
Use 15 pairs of interference patterns of polarizer group to carry out polarization filtering, each interference pattern of four interference patterns passes through respectively a polaroid of polarizer group 15, because the polarization direction of each polaroid is different from the angle of optical axis, thereby in four interference patterns, introduce different phase shifts, four polarization directions as shown in Figure 3, thereby obtain the interference pattern of the different phase shifts of four width of cloth, four interference patterns shown in Figure 4 are corresponding from different phase shifts shown in Figure 3.Just can calculate the PHASE DISTRIBUTION of object under test with the intensity distributions of the interference pattern of these four different phase shifts.
The interference pattern that we mention all refers to the intensity distributions of light field.
When the thickness distribution utilized from the photo measure transparent substance of transparent substance transmission, the relation between PHASE DISTRIBUTION and the thickness distribution:
When object under test 5 is the uniform transparent substance of index distribution, the thickness w (x, y) of object under test 5 and the PHASE DISTRIBUTION of object under test 5
The pass be:
Wherein, n is the refractive index of transparent substance.
Claims (8)
1. interference checking device based on the light splitting simultaneous phase-shifting, it comprises light source (1), it is characterized in that: it also comprises polaroid (2), collimating and beam expanding system (3), the first polarization splitting prism (4), object under test (5), the first catoptron (6), the second catoptron (7), the second polarization splitting prism (8), λ/4 wave plates (9), rectangular window (10), the first fourier lense (11), One Dimension Periodic grating (12), the second fourier lense (13), depolarization Amici prism (14), four-quadrant polarizer group (15), imageing sensor (16) and computing machine (17), wherein λ is the optical wavelength of light source (1) emission light beam
The light beam of light source (1) emission is incident to the light receiving surface of collimating and beam expanding system (3) through polaroid (2), outgoing beam behind this collimating and beam expanding system (3) collimator and extender is incident to the first polarization splitting prism (4), the folded light beam of the first polarization splitting prism (4) is incident to the first catoptron (6) behind object under test (5), the folded light beam of the first catoptron (6) is incident to the second polarization splitting prism (8) as object beam; The transmitted light beam of the first polarization splitting prism (4) is incident to the second polarization splitting prism (8) as the reference light beam after the second catoptron (7) reflection;
Meet at the object beam of the second polarization splitting prism (8) and reference beam and be incident to the first fourier lense (11) after through λ/4 wave plates (9) and rectangular window (10), outgoing beam after the first fourier lense (11) converges is incident to the second fourier lense (13) after by One Dimension Periodic grating (12), transmission generation 0 and ± 1 order diffraction light, outgoing beam after this diffraction light process depolarization Amici prism (14) and the four-quadrant polarizer group (15) is received by the light receiving surface of imageing sensor (16), and the image signal output end of imageing sensor (16) connects the picture signal input end of computing machine (17);
Set up the xyz three-dimensional cartesian coordinate system take the direction of the first fourier lense (11) optical axis as the z direction of principal axis, described rectangular window (10) is along the direction setting perpendicular to optical axis, and is divided into two wickets along the x direction of principal axis;
The focal length of the first fourier lense (11) and the second fourier lense (13) is f;
Rectangular window (10) is positioned on the front focal plane of the first fourier lense (11); One Dimension Periodic grating (12) is positioned on the back focal plane of the first fourier lense (11) and is positioned on the front focal plane of the second fourier lense (13);
Imageing sensor (16) is positioned on the back focal plane of the second fourier lense (13);
The cycle d of One Dimension Periodic grating (12) and rectangular window (10) are along satisfying relation between the axial length D of x: d=2 λ f/D.
2. the interference checking device based on the light splitting simultaneous phase-shifting according to claim 1, it is characterized in that: depolarization Amici prism (14) is placed according to the parallel plane mode that its light splitting surface and x axle and z axle consist of, incident light from 45 ° with its light splitting surface or-the inclined-plane incident of 45° angle.
3. the interference checking device based on the light splitting simultaneous phase-shifting according to claim 1 and 2, it is characterized in that: One Dimension Periodic grating (12) is two-value One Dimension Periodic grating or sinusoidal One Dimension Periodic grating or cosine One Dimension Periodic grating.
4. the interference checking device based on the light splitting simultaneous phase-shifting according to claim 1 and 2, it is characterized in that: four-quadrant polarizer group (15) is rotated counterclockwise 2 * 2 arrays of four polaroids compositions of 45° angle successively for the polarization direction, these four polaroids are arranged in the counterclockwise direction.
5. the interference checking device based on the light splitting simultaneous phase-shifting according to claim 1 and 2, it is characterized in that: light transmission shaft and the x axle of polaroid (2) are 45° angle.
6. the interference checking device based on the light splitting simultaneous phase-shifting according to claim 1 and 2 is characterized in that: the fast axle of described λ/4 wave plates (9) is placed along the direction that is 45° angle with the x axle.
7. the interference checking device based on the light splitting simultaneous phase-shifting according to claim 1 and 2 is characterized in that: described rectangular window (10) is the window of D * (D/2)=6.33mm * 3.16mm.
8. interference detection method based on the described interference checking device based on the light splitting simultaneous phase-shifting of claim 1, it is characterized in that: its implementation procedure is as follows:
Open light source (1), make the light beam of light source (1) emission form linearly polarized light behind the collimator and extender of polaroid (2) and collimating and beam expanding system (3), this linearly polarized light is divided into object beam and reference beam after by the first polarization splitting prism (4); Meet at the object beam of the second polarization splitting prism (8) and reference beam by λ/4 wave plates (9) and rectangular window (10) after, again successively through the first fourier lense (11), One Dimension Periodic grating (12), the second fourier lense (13), after depolarization Amici prism (14) and the four-quadrant polarizer group (15), produce interference pattern on imageing sensor (16) plane, computing machine (17) will gather the interference pattern that obtains and cut apart four width of cloth interference patterns that obtain object under test (5) according to the size of the wicket of rectangular window (10), this four width of cloth interference pattern is take upper right corner image as the first width of cloth interference pattern, and be first to fourth width of cloth interference pattern according to counterclockwise arranging, after the 3rd width of cloth interference pattern and the 4th width of cloth interference pattern carried out mirror image switch, the sequenced intensity distributions of four width of cloth interference patterns is I1 in turn, I2, I3 and I4 calculate the PHASE DISTRIBUTION that obtains object under test (5) according to the intensity distributions of four width of cloth interference patterns
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