CN101270975B - Combined interference device for aspheric surface measurement - Google Patents
Combined interference device for aspheric surface measurement Download PDFInfo
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- CN101270975B CN101270975B CN2008100313208A CN200810031320A CN101270975B CN 101270975 B CN101270975 B CN 101270975B CN 2008100313208 A CN2008100313208 A CN 2008100313208A CN 200810031320 A CN200810031320 A CN 200810031320A CN 101270975 B CN101270975 B CN 101270975B
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Abstract
A combined interference device for measurement of aspheric surface includes a laser, a spatial filter, two beam expanding systems, a beam shrinking system, a spectroscope, a convertible lens, three polarizers, two optical plates, four circular optical wedges with small wedge angle, a beam-dividing grating, a 1/4 wave plate, a polarizer group and a CCD. In the device, real-time measurement is realized through simultaneous phase-shifting method, and frequency conversion function is realized through rotating two pairs of double optical wedges. The experimental device adopts common optical elements, so the cost is low, and the device can measure aspheric surfaces of different diameters and is suitable for the plane and the sphere. The real-time high precision measurement in conventional environment can be realized, and the invention has frequency conversion function, which is very effective for treating the mirror surface with discontinuous regions.
Description
Technical field
The present invention be a kind ofly collect radial shear, fast frequency conversion and phase shift synchronously are the combined interferometer of one, are mainly used in the three-dimensional measurement of aspheric surface.
Background technology
Adopt aspheric optical system, can eliminate spherical aberration, coma, astigmatism, the curvature of field, reduce optical energy loss, thereby obtain high-quality image effect and high-quality optical characteristics, can be widely used in various modern optical electronic products, Flame Image Process product such as digital camera, VCD, DVD, computer, CCD pick-up lens, large-screen television projector and industries such as military affairs, astronomy and medical treatment.In the processing of aspherical optical element and experiment, be vital to the accurate measurement of its surperficial face shape; In a sense, high-precision detecting method and the instrument that adapts with machining precision not, aspheric precision and ultraprecise processing just are difficult to realize.In the last few years, people have proposed many non-spherical measuring technology and device, but these technology and device all exist or realization condition harshness or speed are slow or precision is low or versatility is poor or cost is crossed high shortcoming, therefore press for the new simple and practical and easy to operate technique device of exploitation and overcome above-described deficiency.
Formerly one of technology is (referring to " Stylus profiling instrument for measuring statisticalproperties of smooth optical surfaces is used for the probe profile measurer that smooth optical surface statistical attribute detects ", J.M.Bennett, J.H.Dancy, Appl.Opt., 20 (10), 1785-1802,1981 and " Stylus profiling at high resolution and low force high resolving power; the probe profilometry of low contact pressure ", J.F.Song and T.V.Vorburger, Appl.Opt., 30,42-50,1991) adopt contact type probe to measure the D coordinates value of non-spherical surface each point, though this measuring method principle is simple, but efficiency of measurement is low, can't realize kinetic measurement, and the aspherical lens that probe can softer to surface measurements (as plastics) causes damage.
Formerly two of technology (referring to " application of Application of Moire topography measurement methodsin industry More's contour measuring method in industry ", Suzuki M, Kanaya M.Opt﹠amp; Laser Eng, 8 (3): 171-188,1988 and Deep aspheric testing base on phase-shiftelectronic Moire patterns detect based on the degree of depth aspheric surface of phase shifting electronic Moire fringe, the optical precision engineering, 11 (3): 250-255,2003) adopt the outline projection method to carry out non-spherical measuring, it is low to environmental requirement, but this method generally is applicable to the occasion that accuracy requirement is not high, as microscopical condenser etc., when tested aspheric surface accuracy requirement was higher, this method was powerless, and its measuring speed is slow, can't realize kinetic measurement.
Formerly three of technology (referring to " design of Compensator of aspheric surface interferometer null check ", Wu Fan, applied optics, 18 (2), 10-13.1997) adopt zero-bit detection method (Null Compensation) that aspheric surface is measured, the zero-bit detection method is designed offset lens according to tested aspheric surface, make the plane wave or the spherical wave that incide on the offset lens be transformed into and the identical waveform of the theoretical shape of tested aspheric surface, and interfere with tested aspheric actual corrugated and to form interference fringe, realize measuring, wherein the design of compensator is measured extremely important for the compensating interferometer method, in measurement, often design different compensators and the corresponding optical system of measuring according to actual conditions, versatility is very poor, and corresponding cost is also very high, and measuring process is affected by environment big, (need not special vibration isolation at conventional environment, every the noise measure) be difficult to down realize accurately measuring the prospect of no kinetic measurement.
Formerly four of technology (referring to the interference detection of Interferometric Testing of Asphcric Surfaces non-spherical surface, SPIE, 816, J.C.Wyant, 1987; Design of a novel hologram for fullmeasurement of large and deep convex aspheric surfaces is used for the holographic interferometry that large-scale degree of depth convex aspheric surface is measured, Hua Liu, Zhenwu Lu, Fengyou Li, and Qiang Sun, OpticsExpress, 15 (6), 3120-3126,2007; The design and the demarcation of the novel calculation holographic zero-bit method that the aspheric surface that is used for New design techniques and calibration methodsfor CGH null testing of aspheric surfaces detects, Reichelt S, Prub C, Tizian Ih J.Proc SPIE, 4778:158～168,2002 and Testing large convex aspherical surface with computer generated holography adopt the technology holographic technique to realize the detection of large-scale convex aspheric surface curved surface, Chang J, L I F Y, Weng Zh Ch et al.Acta Op tica Sinica, 23 (10): 1266～1268,2003) introduced calculation holographic (CGH) method and measured aspheric method, it is to adopt the computed hologram of aspherical lens to replace the compensator in the zero-bit detection method to realize the zero-bit interferometry.Adopt the calculation holographic method to measure aspheric precision and generally can reach λ/10, but the same existence shortcoming the same with the compensating interferometer method, versatility is poor, need to design and produce different holograms according to different measuring objects, cost is very high, and measuring process is affected by environment big, needs special vibration isolation during measurement, every the noise measure.
Formerly five of technology (adopt shearing interferometer to realize the measurement of non-spherical surface in conjunction with the strip-scanning technology referring to Aspherical surface testing with shearing interferometerusing fringe scanning detection method, T.Yatagai, SPIE, 429,1983, " application of shear interference technology in non-spherical measuring ", Gao Hong, Huang Kaixiang, high cloud, Xin Qiming, cloud optical tech, 2,1-5,1993 and " with polarization phase-shifting altogether the road shearing interferometer measure optical aspherical surface ", Dong Wenyong, Wang Ping, Beijing Technology and Business University's journal, 21 (3), 2003) introduced lateral shear strip-scanning interference technique and realized aspheric measurement, it is the lateral shearing interference technology and the combining of phase-shifting technique.Shearing interference method need can directly not obtain tested aspheric interference fringe and realize measuring by reference mirror or other compensators, is not subjected to the restriction of tested surface shape type, highly versatile, and phase-shifting technique can make measuring accuracy reach λ/100.But original corrugated does not cover whole pupil face with the interference region of shearing the corrugated in lateral shearing interference, can't carry out complete measurement to tested aspheric surface, and needing the lateral shearing interference measurement result of two orthogonal directionss could recover original corrugated, Flame Image Process bothers very much.Simultaneously, in this technology, phase shift is to adopt piezoelectric ceramics (PZT) to drive, and measuring process needs strict vibration isolation, therefore can't realize the measurement under the conventional environment, also is difficult to realize real time dynamic measurement simultaneously.
Formerly six of technology (referring to P.Hariharan et al., Measurement of aspheric surfaceusing a micro-computer-control led radial-shear interferometer adopts the radial-shear interferometer of Controlled by Microcomputer to realize the non-spherical surface measurement, OpticaActa.31 (9), 1984) adopt the radial shear interference technology to realize aspheric surface measurement in conjunction with phase-shifting technique, its phase shift equally also is to adopt piezoelectric ceramics (PZT) to realize, measuring process needs strict vibration isolation, therefore can't realize the measurement under the conventional environment, also be difficult to realize real time dynamic measurement simultaneously, and be difficult to changing the striped frequency in the measuring process adapting to different tested surface shapes, the measurement of the aspheric surface (as the splicing aspheric surface) that has discontinuity zone is had does not have concrete counte-rplan.
Summary of the invention
The technical problem to be solved in the present invention is, for overcoming the shortcoming of above-mentioned prior art, a kind of combined interference device that is used for aspheric surface measurement is proposed, it can need not special vibration isolation, carrying out the measurement of aspheric surface nano-precision under the conventional environment of noise device, and can select to carry out real time dynamic measurement after the suitable striped frequency; And for the aspheric mirror that has discontinuity zone (as heavy caliber splicing aspheric mirror), can gather the phase shift stripeds of many group different frequencies by the speed of must seeking quickness, with time phase method obtain the three-dimensional appearance of this type of aspheric mirror; This device adopts the synchronous phase-shift structure of aplanatism, anti-vibration, noise ability are strong, have characteristics with low cost, easy and simple to handle, and the measurement of various the shapes (comprising aspheric surface, sphere and plane etc.) of suitable different bores, be a kind of multifunction combined interferometric measuring means.
Technical solution of the present invention is, the radial shear interference device of described measurement aspheric surface has laser instrument, its design feature is along the lasing horizontal working direction of laser instrument spatial filter, beam-expanding system, spectroscope, convertible lens, tested aspheric mirror to be set in regular turn; Described laser forms first vertical optical path through spectroscope reflection back once more, successively place the 45 ° of polaroids and first optical flat at this vertical optical path, laser is by forming two horizontal optical path behind first optical flat, in the more small-bore below light path along the laser working direction vertical polarization sheet is set in regular turn, the beam system that contracts, first wedge, second wedge; Successively place horizontal polarization sheet, beam-expanding system, the 3rd wedge, the 4th wedge along the laser working direction in the larger caliber light path in the above, after second wedge and the 4th wedge, place second optical flat; Two-way light in regular turn is provided with beam-splitting optical grating, quarter wave plate, polarizer group and CCD at this second vertical optical path along the laser working direction by forming second vertical optical path behind second optical flat.
Below the present invention made further specify.
Referring to Fig. 1, the radial shear combined interference device of measurement aspheric surface of the present invention has laser instrument 1, its design feature is along laser instrument 1 lasing horizontal working direction spatial filter 2, beam-expanding system 3, spectroscope 4, convertible lens 5, tested aspheric mirror 21 to be set in regular turn; Described laser forms first vertical optical path through spectroscope 4 reflection backs once more, successively place the 45 ° of polaroids 6 and first optical flat 7 at this vertical optical path, laser forms two horizontal optical path by first optical flat 7 back, in the more small-bore below light path along the laser working direction vertical polarization sheet 8 is set in regular turn, beam system 10, first wedge 12, second wedge 13 contract; Successively place horizontal polarization sheet 9, beam-expanding system 11, the 3rd wedge 14, the 4th wedge 15 along the laser working direction in the larger caliber light path in the above, after second wedge 13 and the 4th wedge 15, place second optical flat 16; Two-way light forms second vertical optical path by second optical flat, 16 backs, along the laser working direction beam-splitting optical grating 17, quarter wave plate 18, polarizer group 19 and CCD 20 is set in regular turn at this second vertical optical path.
Described laser instrument 1 can adopt different wavelength, and it is long that promptly it can select random wave for use.
Described convertible lens 5 is a condenser lens, and it can be a combination of lenses, and its placement location is that focus overlaps with the focus of tested aspheric surface summit curved surface.This convertible lens 5 can be at the tested aspheric mirror of different bores and is changed.
The polarization direction of described polaroid 6, vertical polarization sheet 8 and horizontal polarization sheet 9 is respectively 45 °, 90 ° and 180 °.
The described beam system 10 that contracts can adopt identical combination of lenses with beam-expanding system 11, is the location swap of big lenslet.
Carry out spatial filtering by laser instrument 1 emitting laser by wave filter 2, amplify through beam-expanding system 3 then, arrive tested aspheric surface 21 by spectroscope 4 and convertible lens 5, and this tested aspheric surface 21 of quilt reflects, the information that the light beam of this moment carries aspheric surface, it incides on the spectroscope 4 by convertible lens 5 once more, and by 4 reflections, through 45 ° of polaroids 6, become the polarization direction and be 45 ° polarized light, this polarized light incides the front surface of first optical flat 7, and be divided into two bundles, a branch of by front surface reflection and by vertical polarization sheet 8, the beam system 10 and first wedge 12 contract, second wedge 13 incides the front surface of second optical flat 16, reflects-reflect second optical flat 16 through refraction-rear surface, and this Shu Guang becomes more small-bore light beam; Refraction-the rear surface of another Shu Guangjing first optical flat 7 is reflected-is reflected, by horizontal polarization sheet 9, beam-expanding system 11 and the 3rd wedge 14, the 4th wedge 15, incide the front surface of second optical flat 16 and be reflected out, this Shu Guang becomes the larger caliber light beam.More small-bore light beam and larger caliber light beam meet when second optical flat 16 comes out, but because polarization state is vertical mutually, can not produce interference this moment, and thereby two-beam bore difference forms radial shears, the difference of bore is the shearing displacement size, after this two-beam is by beam-splitting optical grating 17, be divided into four bundles, every Shu Guang comprises the light beam with orthogonal polarisation state that two bores do not wait, this four bundles light all becomes circularly polarized light after by quarter wave plate, interfere by polarizer group 19 each self-forming of back again, and produce four width of cloth interference fringes, this four width of cloth interference fringe has the phase differential of pi/2 successively, form four step phase shift shear interference stripeds, on CCD 20, note at last, further be input in the computing machine and handle.
If need change fringe period for different tested surface shape, two wedges in can adjusted in concert two-way light to (promptly the wedge formed of first wedge 12 and first wedge 13 to and the wedge of the 3rd wedge 14 and the 4th wedge 15 compositions to), if change the striped tilt quantity, the wedge that can rotate separately in one road light wherein is right.
Described first optical flat 7 and first optical flat, 16 equal and opposite in directions, material is identical, what be parallel to each other is placed on the same surface level, and the distance between two flat boards is 4～6 times of slab-thickness, and the best angle that light incides first optical flat 7 is the front surface normal angle at 45 with flat board.45 ° of polarized lights incide the front surface process reflection of first optical flat 7, and by vertical polarization sheet 8, form more small-bore light path through the beam system 10 that contracts again; 45 ° of polarized lights also reflect the inside that enters first optical flat 7 simultaneously, again through the reflection of the rear surface of this first optical flat 7, reflect front surface, and by horizontal polarization sheet 9, form the larger caliber light path through beam-expanding system 11 again, two light path centre distance Δ D are relevant with first optical flat, 7 front surface normal angle θ with the thickness d and the incident ray of first optical flat 7, promptly
45 ° of the general values of angle theta, n is dull and stereotyped refractive index.
Described first wedge 12, second wedge 13, the 3rd wedge 14 and the 4th wedge 15 can adopt the identical circular wedge of diameter, thickness, size and the angle of wedge, the angle of wedge is α (as α＜＜1 °), the first wedge wedge 12, second wedge, 13 coaxial being placed in the more small-bore light path, no angle of wedge face is close together, leave very little slit, can adopt mechanical hook-up make their synchronous backwards around axle o
1-o
2Rotate corner
Counterclockwise for just, is negative along the light ray propagation direction clockwise; With the same manner the 3rd wedge 14, the 4th wedge 15 are placed in the larger caliber light path, synchronous backward is around axle o during operation
3-o
4Rotate; It is right that first wedge 12 and second wedge 13 form a wedge, and it is right that the 3rd wedge 14 and the 4th wedge 15 also form a wedge, these two wedges can be docked to same high resolving power step motor, and two wedges are to can synchronous or asynchronous rotation.These two pairs of wedges of rotation can change the period T of interference fringe synchronously, promptly
Φ
1For two wedges in a pair of wedge relatively rotate angle, its value is
Be the angle that first wedge 12 rotates counterclockwise,
Be the angle that second wedge 13 clockwise rotates, in like manner, Φ
2For another relatively rotates angle to two wedges in the wedge, its value is
Be the angle that the 3rd wedge 14 rotates counterclockwise,
Be the angle that the 4th wedge 15 clockwise rotates, when rotating synchronously
Φ
1=Φ
2=Φ.N is the wedge refractive index, and λ is a Wavelength of Laser.
When asynchronous, when rotating the wedge in the light path separately, the vergence direction of striped also changed thereupon when the striped density degree changed, as rotated in the small-bore light path wedge at 12,13 o'clock, the striped angle of inclination γ and the anglec of rotation
The pass be:
Described beam-splitting optical grating 17 can adopt 2 * 2 rectangular rasters, and polarized light is not had influence, and also replaceable is holographic beam splitting unit.
Described polarizer group 19 can be stitched together by a light transmission glass plate and three polaroids, glass plate does not change polarization state, and the direction of shaking thoroughly can regard 0 as, and the direction of shaking thoroughly of polaroid is respectively 45 °, 90 ° and 135 °, (x y) can be expressed as light intensity I by the interference light behind the polaroid
I wherein
0(x y) is the bias light light intensity of interference fringe, V (x y) is fringe contrast,
For containing the phase place of tested aspheric surface information, δ is the angle of shaking thoroughly of polaroid, is respectively 0 concerning four light beams, pi/2, and π and 3 pi/2s, having formed four width of cloth phase-shift phases like this is the interferogram of pi/2.
Described ccd detector receives four width of cloth phase shifting interferences simultaneously, and links to each other with computer processing system.
In this device, the real-time of measurement is to realize by the simultaneous phase-shifting method; And frequency conversion function is to realize by rotating two pairs of two wedges.This experimental provision adopts the ordinary optical element, cost is low, not only can measure the aspheric surface of multiple bore, suitable equally to plane and sphere, can realize the real-time high-precision measurement under the conventional environment, and have frequency conversion function, exist the minute surface (as the splicing aspheric surface) of discontinuity zone very effective to processing.
As known from the above, the present invention is a kind of radial shear interference device of measuring aspheric surface, have the function of striped frequency conversion concurrently, select the relative position of wedge according to the cycle of required striped, can be at moment synchronous acquisition four width of cloth phase shifting interferences, realize kinetic measurement, environment be there is no harsh requirement (need not special vibration isolation, every noise equipment), and be fit to the non-spherical measuring of different bores; When adopting stepper motor synchro control two-way wedge, conversion striped frequency, can gather the phase shift striped of many group (every group four width of cloth figure) different frequencies, utilize the time phase method to realize aspheric high-acruracy survey, and very easily realize the accurate measurement of splicing aspheric mirror.This device adopts the aplanatism structure, selects suitable striped frequency and fixing, owing to be radial shear, bar graph is a regular circular, and its post-processed is very convenient.
Description of drawings
Fig. 1 is the structural representation of device of the present invention.In the drawings:
The 1-laser instrument, the 2-wave filter, the 3-beam-expanding system,
The 4-spectroscope, the 5-convertible lens, 6-45 ° of polaroid,
7-first optical flat, 8-vertical polarization sheet, 9-horizontal polarization sheet,
The 10-beam system that contracts, the 11-beam-expanding system, 12-first wedge,
13-second wedge, 14-the 3rd wedge, 15-the 4th wedge,
16-second optical flat, the 17-beam-splitting optical grating, the 18-1/4 wave plate,
The 19-polarizer group, 20-CCD, the tested aspheric mirror of 21-.
Embodiment
As shown in Figure 1, the combined interference device of measurement aspheric surface of the present invention has laser instrument 1, along laser instrument 1 lasing horizontal working direction spatial filter 2, beam-expanding system 3, spectroscope 4, convertible lens 5, tested aspheric mirror 21 is set in regular turn; Laser arrives tested aspheric surface 21 and is reflected by this tested aspheric surface 21 and incide on the spectroscope 4 by convertible lens 5 once more and reflected by spectroscope 4, form first vertical optical path by described spectroscope 4 reflection backs, successively place the 45 ° of polaroids 6 and first optical flat 7 at this vertical optical path, laser forms two horizontal optical path by first optical flat 7 back, in the more small-bore below light path along the laser working direction vertical polarization sheet 8 is set in regular turn, beam system 10, first wedge 12, second wedge 13 contract; Successively place horizontal polarization sheet 9, beam-expanding system 11, the 3rd wedge 14, the 4th wedge 15 along the laser working direction in the larger caliber light path in the above, after wedge the 2 13 and the 4 15, place second optical flat 16; Two-way light forms second vertical optical path by second optical flat, 16 backs, along the laser working direction beam-splitting optical grating 17, quarter wave plate 18, polarizer group 19 and CCD 20 is set in regular turn at this second vertical optical path.
Described convertible lens 5 is a condenser lens, and the position that it is placed is that its focus overlaps with the focus of tested aspheric surface summit curved surface.
The polarization direction of described polaroid 6, vertical polarization sheet 8 and horizontal polarization sheet 9 is respectively 45 °, 90 ° and 180 °.
The described beam system 10 that contracts can adopt identical combination of lenses with beam-expanding system 11, is the location swap of big lenslet.
Described first optical flat 7 and first optical flat 16 are equal-sized rectangular parallelepiped, and material is identical, and long limit is parallel to each other and is placed on the same surface level, and two dull and stereotyped centers are on same horizontal line, long limit all with horizontal line angle at 45, two centre distances are 4～6 times of slab-thickness; The best angle that light incides first optical flat 7 is the front surface normal angle at 45 with flat board.
The described beam system 10 that contracts is formed by the identical lens of small one and large one two correspondences with beam-expanding system 11, and only the placement location of big lenslet is just in time opposite.
Described first wedge 12, second wedge 13, the 3rd wedge 14 and the 4th wedge 15 can adopt the identical circular wedge of diameter, thickness, size and the angle of wedge, locking angle is α＜＜1 °, the first wedge wedge 12, second wedge, 13 coaxial being placed in the more small-bore light path, no angle of wedge face is close together, the slit of leaving, can adopt mechanical hook-up make their synchronous backwards around axle o
1-o
2Rotate corner
Counterclockwise for just, is negative along the light ray propagation direction clockwise; With the same manner the 3rd wedge 14, the 4th wedge 15 are placed in the larger caliber light path, synchronous backward is around axle o during operation
3-o
4Rotate; It is right that first wedge 12 and second wedge 13 form a wedge, and it is right that the 3rd wedge 14 and the 4th wedge 15 also form a wedge, and these two wedges are docked to same high resolving power step motor, and two wedges are to can synchronous or asynchronous rotation.
Described beam-splitting optical grating 17 is the high-level efficiency diffraction grating of 2 * 2 (minutes four), and polarizer group 19 is sticked together to place at grade by a light transmission glass plate and three polaroids (polarization direction is respectively 45 °, 90 ° and 135 °) and forms.
Described polarizer group 19 is stitched together by a light transmission glass plate and three polaroids, and glass plate does not change polarization state, and the direction of shaking thoroughly can regard 0 as, and the direction of shaking thoroughly of polaroid is respectively 45 °, 90 ° and 135 °.
The described vertical polarization sheet 8 and the beam system 10 that contracts are placed on the front of wedge 12,13, and the position of the vertical polarization sheet 8 and the beam system 10 that contracts is interchangeable; Horizontal polarization sheet 9 and beam-expanding system 11 are placed on the front of wedge 14,15, and 9 and 11 position is interchangeable.
Described laser beam is the aplanatism radial shear interference, and four width of cloth phase shifting interferences are synchronous acquisition, and the effect of wedge is striped frequency and the striped angle of inclination of regulating interferogram.Described CCD 20 is replaceable to be the cmos image acquisition system, and is connected with high-performance computer.
Claims (7)
1. combined interference device that is used for aspheric surface measurement, laser instrument (1) is arranged, it is characterized in that, spatial filter (2), beam-expanding system (3), spectroscope (4), convertible lens (5), tested aspheric mirror (21) are set in regular turn along the lasing horizontal working direction of laser instrument (1); Described laser passes through spectroscope (4) reflection back once more and forms first vertical optical path, successively place 45 ° of polaroids (6) and first optical flat (7) at this vertical optical path, laser forms two horizontal optical path by first optical flat (7) back, along the laser working direction vertical polarization sheet (8), the beam system that contracts (10), first wedge (12), second wedge (13) is set in regular turn in the more small-bore below light path; Successively place horizontal polarization sheet (9), beam-expanding system (11), the 3rd wedge (14), the 4th wedge (15) along the laser working direction in the larger caliber light path in the above, place second optical flat (16) afterwards at second wedge (13) and the 4th wedge (15); Two-way light forms second vertical optical path by second optical flat (16) back, along the laser working direction beam-splitting optical grating (17), quarter wave plate (18), polarizer group (19) and CCD (20) is set in regular turn at this second vertical optical path.
2. according to the described combined interference device that is used for aspheric surface measurement of claim 1, it is characterized in that the polarization direction of described vertical polarization sheet (8) and horizontal polarization sheet (9) is respectively 90 ° and 180 °.
3. according to the described combined interference device that is used for aspheric surface measurement of claim 1, it is characterized in that, described first optical flat (7) and second optical flat (16) are equal-sized rectangular parallelepiped, and material is identical, long limit is parallel to each other and is placed on the same surface level, and two dull and stereotyped centers are on same horizontal line, long limit all with horizontal line angle at 45, two centre distances are 4～6 times of slab-thickness.
4. according to the described combined interference device that is used for aspheric surface measurement of claim 1, it is characterized in that, the described beam system that contracts (10) is formed by the identical lens of small one and large one two correspondences with beam-expanding system (11), and only the placement location of big lenslet is just in time opposite.
5. according to the described combined interference device that is used for aspheric surface measurement of claim 1, it is characterized in that, described first wedge (12), second wedge (13), the 3rd wedge (14) and the 4th wedge (15) are the identical circular wedge of diameter, thickness, size and the angle of wedge, first wedge (12), second wedge (13) is coaxial is placed in the more small-bore light path, no angle of wedge face is close together and leaves the slit, adopt mechanical hook-up make their synchronous backwards around axle O
1-O
2Rotate; With the same manner the 3rd wedge (14), the 4th wedge (15) are placed in the larger caliber light path, synchronous backward is around axle O during operation
3-O
4Rotate; It is right that first wedge (12) and second wedge (13) form a wedge, and it is right that the 3rd wedge (14) and the 4th wedge (15) also form a wedge, and these two wedges are docked to same high resolving power step motor, and two wedges are to can synchronous or asynchronous rotation.
6. according to the described combined interference device that is used for aspheric surface measurement of claim 1, it is characterized in that, described beam-splitting optical grating (17) is 2 * 2 high-level efficiency diffraction grating, described polarizer group (19) is sticked together to place by a light transmission glass plate and three polaroids and forms at grade, and the polarization direction of described three polaroids is respectively 45 °, 90 ° and 135 °.
7. according to the described combined interference device that is used for aspheric surface measurement of claim 1, it is characterized in that the location swap of vertical polarization sheet (8) and the beam system that contracts (10), the location swap of horizontal polarization sheet (9) and beam-expanding system (11).
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