CN101782378B - Micro-ultrasonic wave sensor - Google Patents

Micro-ultrasonic wave sensor Download PDF

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Publication number
CN101782378B
CN101782378B CN2010101097792A CN201010109779A CN101782378B CN 101782378 B CN101782378 B CN 101782378B CN 2010101097792 A CN2010101097792 A CN 2010101097792A CN 201010109779 A CN201010109779 A CN 201010109779A CN 101782378 B CN101782378 B CN 101782378B
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ultrasonic
conical surface
piezoelectric chip
circular conical
micro
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CN101782378A (en
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张秀彬
管洪法
应俊豪
钱斐斐
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Zhejiang Jinli Electronics Co Ltd
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Zhejiang Jinli Electronics Co Ltd
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Abstract

The invention discloses a micro-ultrasonic wave sensor, which comprises a piezoelectric wafer, electrode lead wires, an ultrasonic reflection cone surface, a fork-type support, a shell and electrode pins. The piezoelectric wafer is aslant arranged in the middle of the ultrasonic reflection cone surface; four supporting points of the fork-type support are fixed on the circumference and the cone surface of a horn mouth on the top of the ultrasonic reflection cone surface respectively; the bottom conical tip of the ultrasonic reflection cone surface is fixedly connected with the bottom of the shell; two electrode pins are fixed after passing through the bottom of the shell, and are welded with the electrode lead wires after passing through two end heads of the ultrasonic reflection cone surface, and two end points exposing the bottom of the shell are used for connecting an external circuit; and one end of each of two electrode lead wires is welded with one welded point on one side of the piezoelectric wafer and the other ends of the two electrode lead wires are welded with the two end points of the electrode pins passing through the ultrasonic reflection cone surface. The micro-ultrasonic wave sensor has the technical applications such as non-contact thickness measurement, flaw detection and micro-circulation fluid velocity measurement.

Description

Micro-ultrasonic wave sensor
Technical field
What the present invention relates to is a kind of ultrasound wave sensing technology, and specifically, what relate to is a kind of micro-ultrasonic wave sensor.
Background technology
As everyone knows, in the technical field of non-contact detection object thickness, ultrasonic thickness test has the unique technique advantage, this is that non contact thickness gaging technology such as microwave and ray are incomparable, because ultrasonic signal can not produce pollution to surrounding environment, and control ultrasonic emitting power when safe range, ultrasound wave can not produce any harm to human body.Along with social progress and development in science and technology, the range of application of ultrasonic technology more and more widely, yet, existing ultrasonic sensor volume is bigger, but can't adapt to the specific demand in the miniature precision instrument, therefore just need to invent a kind of micro-ultrasonic wave sensor that volume is little, operating power reaches that detection requires, can be fit to be installed on the inner finite space of miniature instrument that has.Particularly to invent a micro-ultrasonic wave sensor that can satisfy paper currency sorter at detection banknote thickness Technology Need, this is because the kind and the quantity of the sensor that paper currency sorter need dispose are various, installing space is very limited, also will consider the sensor non-interfering cause of signal each other.
Find by prior art documents, application number is 200920135475.6 Chinese utility model patent, patent name is: a kind of piezoelectric supersonic wave launcher, this patent provides a kind of piezoelectric supersonic wave launcher, belong to and to send ultrasound wave, can be used for a kind of device of expelling mosquito, mouse.This utility model involving vibrations system, coupling termination, ultrasound wave produce system, foam, housing and cable column, vibrational system links together through coupling termination and ultrasound wave generation system, vibrational system and housing are assembled together, ultrasound wave produces system and foam is assemblied in the housing, the foam design produces between system and the housing at ultrasound wave, and cable column designs on housing; Vibrational system can be a taper cone; Ultrasound wave produces system by the round ceramic bimorph with metal substrate is bonding forms, and draws both positive and negative polarity lead stube cable post from round ceramic bimorph and metal substrate.The weak point of this patented technology is: the first, produce ultrasound wave by " ultrasound wave generation system " by " coupling termination " drive " vibrational system " and send, mechanical mechanism is too loaded down with trivial details, and functional reliability is relatively poor; The second, " vibrational system " is actually one " taper cone ", can't miniaturization except volume, waveform parameter (comprising amplitude and frequency) is also extremely unstable; Three, " vibrational system " in this patent is exactly in fact the distortion of common piezoelectric loudspeaker, therefore at all can not be as the ultrasonic signal source in the ultrasonic detection technology field.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of micro-ultrasonic wave sensor is provided, make it can be installed on multiclass miniature precision instrument and be used for non contact thickness gaging, flaw detection, microcirculation fluid technological use such as test the speed.
The present invention is achieved by the following technical solutions, the present invention includes: piezoelectric chip, electrode cable, ultrasonic reflections circular conical surface, V shape support, housing, electrode pin.Described piezoelectric chip claims the film piezo-electric pottery again, is inclined in the middle of the ultrasonic reflections circular conical surface, and base two angle points of piezoelectric chip are fixed on the ultrasonic reflections circular conical surface, and top margin two angle points of piezoelectric chip are fixed on 2 points of V shape support; Last two fulcrums in four fulcrums of V shape support are fixed on the circumference at ultrasonic reflections circular conical surface top " hydraucone ", and following two fulcrums are fixed on the conical surface of ultrasonic reflections circular conical surface; Fixedly connected with the bottom of housing in the bottom of ultrasonic reflections circular conical surface " awl point ", the circumference at ultrasonic reflections circular conical surface top " hydraucone " is fixedlyed connected with the top of housing; Two electrode pins pass housing bottom and fix, and two terminations that are in enclosure interior penetrate exposed its metal surface of the ultrasonic reflections circular conical surface conical surface and electrode cable welding; Two end points that two electrode pins expose housing bottom must keep certain-length so that be connected with external ultrasound electrical signal of the frequency generation circuit or received signal amplifying circuit, promptly play a part the input/output signal interface plug; Totally two of electrode cables, one respectively with the two sides solder joint welding of piezoelectric chip, the other end penetrates two end points welding of ultrasonic reflections circular conical surface respectively with electrode pin.
Described piezoelectric chip is a kind of crystal with piezoelectric effect, is made into plates by cutting technique, so be referred to as piezoelectric chip.The piezoelectric effect of piezoelectric chip is divided two kinds of direct piezo electric effect and reversed piezoelcetric effects.Direct piezo electric effect is meant: when crystal is subjected to time spent of doing of certain fixed-direction external force, inside just produces the electric polarization phenomenon, produces the electric charge of opposite in sign simultaneously on two surface; After external force removed, crystal returned to uncharged state again; When outer forced direction changed, the polarity of electric charge also changed thereupon; The stressed quantity of electric charge that produces of crystal is directly proportional with the size of external force.Inverse piezoelectric effect is meant: crystal is applied the phenomenon that alternating electric field causes the crystal mechanically deform, claim electrostrictive effect again, two surfaces at piezoelectric chip are passed under the situation of voltage signal, can produce the mechanical deformation effect, specifically, when the two sides of this piezoelectric chip is in respectively under positive and negative two kinds of current potentials, the surface that is under the positive potential effect can be stretched, and the surface that is under the negative potential effect can be compressed; Take turns to act on two of piezoelectric chip when surperficial when positive and negative two kinds of current potentials, two surfaces of this piezoelectric chip will take place to stretch and pinch effect by turns, have therefore caused the continuous shaking of piezoelectric chip on its surface normal direction; The continuous shaking of piezoelectric chip has driven the vibration of surrounding air, forms a kind of vibration wave and propagates to periphery.When the electric signal that is added in two surfaces of piezoelectric chip is alternating signal, as long as the natural vibration frequency of the frequency of this alternating signal and piezoelectric chip is consistent or near the time, will make piezoelectric chip generation resonance effect, the power that this moment, piezoelectric chip was outwards launched acoustic signals reaches maximal value.The thickness of general piezoelectric chip is controlled in below the 0.2mm, as long as control the length and width of piezoelectric chip, thick size well on manufacture craft, just can arbitrarily produce the needed piezoelectric chip natural vibration frequency of people characteristic, such as 40kHz.
Described ultrasonic reflections circular conical surface is used to change the ultrasonic emitting direction, has cavity effect simultaneously.Because piezoelectric chip is inclined in the middle of the ultrasonic reflections circular conical surface, when piezoelectric chip under the effect of alternating voltage signal and when producing yo-yo effect, formed hyperacoustic original transmitted direction be through ultrasonic reflections circular conical surface reflection back to extraneous spatial transmission, the included angle that suitably designs piezoelectric chip just can guarantee that ultrasonic beam after the ultrasonic reflections circular conical surface is launched is all the time along outwards propagating with the direction of parallel axes wherein.Parallel in order to reach outside ultrasonic waves transmitted bundle with the circular conical surface axis, must guarantee the 1/2nd surplus mutually of the included angle of piezoelectric chip and ultrasonic reflections circular conical surface drift angle, guarantee that promptly 1/2nd of the included angle of piezoelectric chip and ultrasonic reflections circular conical surface drift angle add up to 90 °.The included angle of described piezoelectric chip, it is exactly the crossing acute angle of piezoelectric chip plane and ultrasonic reflections circular conical surface, the so-called acute angle that intersects is promptly bored line and plane, place, axis and piezoelectric chip plane and ultrasonic reflections circular conical surface two acute angles that straight line constituted after crossing respectively, and the size of this acute angle angle just is called as the included angle of piezoelectric chip.
The included angle of described piezoelectric chip, because of there is mutual surplus relation in 1/2nd of itself and ultrasonic reflections circular conical surface drift angle, when the present invention uses as the miniature ultrasonic wave launcher, manifest two kinds of energy effects: first, the positive vibration wave that produces of piezoelectric chip obtains polymerization and forms the direction of propagation longitudinal wave parallel with the axis with regard to making positive surface launching ultrasonic energy after the primary event of ultrasonic reflections circular conical surface; The second, the vibration wave that the piezoelectric chip back side produces just makes back side emission ultrasonic energy be absorbed by the circular conical surface surface gradually after the ultrasonic reflections circular conical surface repeatedly reflects, and when arriving " hydraucone " approach exhaustion; Under comprehensive above-mentioned two kinds of energy effect effects, finally make the present invention as the miniature ultrasonic wave launcher when strengthening piezoelectric chip front vibration wave polymerization, the piezoelectric chip of also having guaranteed 180 ° of phase phasic differences in the original vibration wave just, back side vibration wave do not produce and interfere and the energy dissipating effect, therefore reaches the effect that ultrasonic energy strengthens.According to same mechanism, when the present invention is used as the use of miniature ultrasonic receiver, can obtains same ultrasound wave and strengthen reception.The energy converging effect of above-mentioned emission or receiving course generation is called the ultrasound wave cavity effect.
Described V shape support, when in the ultrasonic reflections circular conical surface, settling, last two fulcrums in four fulcrums are fixed on the circumference at ultrasonic reflections circular conical surface top " hydraucone ", following two fulcrums are fixed on the conical surface of ultrasonic reflections circular conical surface, because the specific (special) requirements of installation site makes it present cross-modality with respect to piezoelectric chip in the ultrasonic reflections circular conical surface, so be referred to as the V shape support.This cross-modality is outwards launched by ultrasound wave or the energy loss of inside incident process reaches minimum.
Micro-ultrasonic wave sensor of the present invention both can be used as ultrasonic transmitter and had used, and also can be used as ultrasonic receiver and used; When using, be referred to as the miniature ultrasonic wave launcher as transmitter; When using, be referred to as the miniature ultrasonic receiver as receiver.When using, two kinds of receive modes are arranged as ultrasonic transmitter: first kind of mode, outwards launch the ultrasonic signal thing that is blocked and reflex to ultrasonic transmitter, at this moment, micro-ultrasonic wave sensor has the function that transmits and receives ultrasonic signal concurrently; The second way, adopt two micro-ultrasonic wave sensor monomer pairings to use, promptly outwards launch ultrasound wave as ultrasonic transmitter for one, another receives ultrasound wave from ultrasonic transmitter sent as ultrasonic receiver, certainly, be to take " one to one " to install in opposite directions this moment on mounting process, promptly two monomer micro-ultrasonic wave sensors are in the both side surface of testee respectively, by the positive surface launching ultrasound wave of a micro-ultrasonic wave sensor monomer to testee, and receive the ultrasonic signal that penetrates this object from the back side of testee by another micro-ultrasonic wave sensor, at this moment, each micro-ultrasonic wave sensor monomer is adopted has single function, promptly has the simple function of emission ultrasound wave or received ultrasonic signal.
When micro-ultrasonic wave sensor of the present invention uses as ultrasonic transmitter, electrode pin is connected with alternation electric signal from the outside and receives the input of alternation electric signal, the alternation electric signal by electrode pin and electrode cable just the voltage of alternation electric signal is added in piezoelectric chip just, on two solder joints in the back side; Piezoelectric chip is under the piezoelectric effect effect of alternating voltage, and along the normal direction generation mechanical vibration up and down on its plane, and then drive ambient air formation vibration wave is outwards propagated; When the natural vibration frequency of the frequency of the alternation electric signal of outside input and piezoelectric chip was consistent, piezoelectric chip just produced a kind of amplitude maximum of formation that resonates, that is the vibration wave of output power maximum is outwards propagated; As: the natural vibration frequency of micro-ultrasonic wave sensor is 40kHz, and when the frequency of the alternation electric signal of outside input also was 40kHz, just piezoelectric chip produces resonance, the vibration wave that therefore forms a kind of amplitude maximum was outwards propagated; The vibration wave of piezoelectric chip just forms through the cavity effect of ultrasonic reflections circular conical surface a branch ofly has the ultrasonic beam of enough power to external radiation.
When micro-ultrasonic wave sensor of the present invention uses as ultrasonic receiver, received ultrasound wave is injected into the ultrasonic reflections circular conical surface from the space, arrive at the front of piezoelectric chip through the effect of reflection cavity effect, the ultrasonic energy that is reflected to the piezoelectric chip back side ties up to repeatedly reflection on the ultrasonic reflections circular conical surface at the piezoelectric chip back side because of the pass of piezoelectric chip included angle, quilt attenuation to the utmost falls, therefore can be to not arriving at positive ultrasound wave produce power negative function; When the natural vibration frequency of the ultrasonic frequency that receives and piezoelectric chip was consistent, resonance effect can take place in piezoelectric chip equally, promptly reaches maximal value by the induced voltage that piezoelectric effect generated; The induced voltage signal that generates is by electrode cable and the electrode pin output voltage signal that is connected with the input interface of the ac amplifier circuit of outside; The size of ultrasonic receiver output voltage signal just corresponding the strong and weak information of the ultrasonic signal that is received.
Compared with prior art, the present invention has following beneficial effect: the first, can make ultrasonic sensor very little, little only be 6mm to its xsect maximum gauge; The second, can utilize the reflection cumulative action of circular conical surface the original ultrasonic energy of dispersing to be converted to of the axis parallel direction emission of the ultrasonic beam of concentration of energy along ultrasonic transmitter; Three, can utilize the reflex of circular conical surface that the ultrasonic beam that receives is converted to equally distributed ultrasonic energy field, piezoelectric chip surface, simultaneously the ultrasound wave receiving directivity also obtained enhancing.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention, wherein, (a) is elevation cross-sectional view, and (b) left pseudosection (c) is vertical view, (d) is upward view;
Fig. 2 is piezoelectric chip included angle and ultrasonic reflections circular conical surface geometric relationship synoptic diagram among the present invention;
Fig. 3 is a ultrasonic emitting direction synoptic diagram of the present invention;
Fig. 4 is a ultrasound wave receive direction synoptic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated.Present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, present embodiment comprises: piezoelectric chip 1, electrode cable 2, ultrasonic reflections circular conical surface 3, V shape support 4, housing 5, electrode pin 6.Piezoelectric chip 1 is inclined in the middle of the ultrasonic reflections circular conical surface 3, and base two angle points of piezoelectric chip 1 are fixed on the ultrasonic reflections circular conical surface 3, and top margin two angle points of piezoelectric chip 1 are fixed on 2 points of V shape support 4; Last two fulcrums in 4 four fulcrums of V shape support are fixed on the circumference at ultrasonic reflections circular conical surface 3 tops " hydraucone ", and following two fulcrums are fixed on the conical surface of ultrasonic reflections circular conical surface 3; Fixedly connected with the bottom of housing 5 in the bottom of ultrasonic reflections circular conical surface 3 " awl point ", the circumference at ultrasonic reflections circular conical surface 3 tops " hydraucone " is fixedlyed connected with the top of housing 5; Two electrode pins 6 pass housing 5 bottoms and fix, and two terminations that are in housing 5 inside penetrate exposed its metal surface of ultrasonic reflections circular conical surface 3 conical surfaces and electrode cable 2 welding; Two end points that two electrode pins 6 expose housing 5 bottoms must keep certain-length so that be connected with the ultrasonic frequency electric signal or patch, and promptly play a part the input/output signal interface plug; Totally two of electrode cables 2, one respectively with the two sides solder joint welding of piezoelectric chip 1, the other end penetrates two end points welding of ultrasonic reflections circular conical surface 3 respectively with electrode pin 6.
Embodiment:
Described piezoelectric chip 1, adopt long * wide * thick be the film piezo-electric pottery of 6mm * 3mm * 0.2mm, and the natural vibration frequency of piezoelectric chip is 40kHz.
Described ultrasonic reflections circular conical surface 3, as shown in Figure 2, the hydraucone circle diameter is 6mm, 7=30 ° of circular conical surface drift angle ∠; Piezoelectric chip 1 is inclined in the middle of the ultrasonic reflections circular conical surface 3, parallel in order to reach outside ultrasonic waves transmitted bundle with the circular conical surface axis, the included angle of pressure electricity wafer 1 and ultrasonic reflections circular conical surface 3 drift angles 1/2nd surplus mutually, it is ∠ 10=75 °, this original ultrasound wave incident angle, reflection angle when 3 radiation of ultrasonic reflections circular conical surface that just shows that piezoelectric chip 1 generates is all 75 °, so ∠ 8=∠ has guaranteed that ultrasound wave is parallel with the axis of ultrasonic reflections circular conical surface 3 to extraradial ultrasonic beam after cavity effect for 9=15 °.
As shown in Figure 3, the included angle of described piezoelectric chip 1, because of there is mutual surplus relation in 1/2nd of itself and ultrasonic reflections circular conical surface 3 drift angles, when the present invention uses as the miniature ultrasonic wave launcher, manifest two kinds of energy effects: first, the piezoelectric chip 1 positive vibration wave that produces obtains polymerization and forms the direction of propagation longitudinal wave parallel with the axis with regard to making positive surface launching ultrasonic energy after 3 primary events of ultrasonic reflections circular conical surface; The second, the vibration wave that piezoelectric chip 1 back side produces just makes back side emission ultrasonic energy be absorbed by the circular conical surface surface gradually after more than 3 reflection of ultrasonic reflections circular conical surface, and when arriving " hydraucone " approach exhaustion; Under above-mentioned two kinds of energy effect effects, finally make the present invention as the miniature ultrasonic wave launcher when strengthening piezoelectric chip 1 front vibration wave polymerization, the piezoelectric chip 1 of also having guaranteed 180 ° of phase phasic differences in the original vibration wave just, back side vibration wave do not produce and interfere and the energy dissipating effect, therefore reaches the effect that ultrasonic energy strengthens.
As shown in Figure 4, when the present invention is used as the use of miniature ultrasonic receiver, manifest two kinds of energy effects equally: first, ultrasound wave that is received or direct radiation are to piezoelectric chip 1 front, after 3 primary events of ultrasonic reflections circular conical surface, arrive at piezoelectric chip 1 front, the ultrasonic signal that piezoelectric chip 1 positive acquisition is assembled, its power obviously strengthens; Second, even have the part ultrasound wave by piezoelectric chip 1 back side gap radiation to ultrasonic reflections circular conical surface 3, because this ultrasound wave is under the effect of 75 ° of incident angles, at least secondary reflection just can arrive at film piezo-electric pottery 1 back side, therefore arrives at the ultrasonic energy at piezoelectric chip 1 back side by significantly weak; Under above-mentioned two kinds of energy effect effects, make that finally the present invention can be when piezoelectric chip 1 front receives the ultrasonic signal with enough power levels as the miniature ultrasonic receiver, also avoided from piezoelectric chip 1 back side, have the hyperacoustic energy dissipating effect of opposite phase with piezoelectric chip 1 front ultrasound wave and take place, therefore reach the ultrasonic energy that is received equally and strengthen effect.
Described V shape support, when in ultrasonic reflections circular conical surface 3, settling, last two fulcrums in four fulcrums are fixed on the circumference at ultrasonic reflections circular conical surface 3 tops " hydraucone ", following two fulcrums are fixed on the conical surface of ultrasonic reflections circular conical surface 3, because the specific (special) requirements of installation site makes it present cross-modality with respect to piezoelectric chip 1 in ultrasonic reflections circular conical surface 3, and prong has been for providing a kind of unlimited radiation space through the ultrasound wave parallel with axial plane in the ultrasonic reflections circular conical surface 3 that forms after 3 reflections of ultrasonic reflections circular conical surface or the incident, therefore this cross-modality can make ultrasound wave outwards emission or inwardly the energy loss of incident process reach minimum.
When micro-ultrasonic wave sensor of the present invention uses as ultrasonic transmitter, electrode pin 6 is connected with alternation electric signal from the outside and receives the input of alternation electric signal, the alternation electric signal by electrode pin 6 and electrode cable 2 just the voltage of alternation electric signal is added in piezoelectric chip 1 just, on two solder joints in the back side; Piezoelectric chip 1 is under the piezoelectric effect effect of alternating voltage, and along the normal direction generation mechanical vibration up and down on its plane, and then drive ambient air formation vibration wave is outwards propagated; When the natural vibration frequency of the frequency of the alternation electric signal of outside input and piezoelectric chip 1 is consistent, piezoelectric chip 1 just produces resonance and forms a kind of amplitude maximum, that is the vibration wave of output power maximum is outwards propagated, when the natural vibration frequency of piezoelectric chip 1 is 40kHz, when the alternation electric signal frequency of outside input also was 40kHz, the frequency that just forms a kind of amplitude maximum was that the ultrasound wave of 40kHz is outwards launched; Ultrasound wave just forms through the cavity effect of ultrasonic reflections circular conical surface 3 more a branch ofly has the ultrasonic beam of enough power to external radiation.
When micro-ultrasonic wave sensor of the present invention uses as ultrasonic receiver, received ultrasound wave is injected into ultrasonic reflections circular conical surface 3 from the space, arrive at the front of piezoelectric chip 1 through the effect of reflection cavity effect, the ultrasonic energy that is reflected to piezoelectric chip 1 back side is fallen by attenuation to the utmost, therefore can be to not arriving at positive ultrasound wave produce power negative function; When receive ultrasonic frequency when consistent with the natural vibration frequency 40kHz of piezoelectric chip 1, resonance effect can take place in piezoelectric chip 1 equally, promptly reaches maximal value by the induced voltage that piezoelectric effect generated; The induced voltage signal that generates is by electrode cable 2 and electrode pin 3 output voltage signal that is connected with the input interface of the ac amplifier circuit of outside; The size of ultrasonic receiver output voltage signal just corresponding the strong and weak information of the ultrasonic signal that is received.
As can be seen from the above embodiments, the present invention has following beneficial effect: the first, can make ultrasonic sensor very little, little only be 6mm to its xsect maximum gauge; The second, can utilize the reflection cumulative action of circular conical surface the original ultrasonic energy of dispersing to be converted to of the axis parallel direction emission of the ultrasonic beam of concentration of energy along ultrasonic transmitter; Three, can utilize the reflex of circular conical surface that the ultrasonic beam that receives is converted to equally distributed ultrasonic energy field, piezoelectric chip surface, simultaneously the ultrasound wave receiving directivity also obtained enhancing.

Claims (7)

1. a micro-ultrasonic wave sensor is characterized in that, comprising: piezoelectric chip, electrode cable, ultrasonic reflections circular conical surface, V shape support, housing and electrode pin; Wherein: piezoelectric chip is inclined in the middle of the ultrasonic reflections circular conical surface, and base two angle points of piezoelectric chip are fixed on the ultrasonic reflections circular conical surface, and top margin two angle points of piezoelectric chip are fixed on 2 points of V shape support; Last two fulcrums in four fulcrums of V shape support are fixed on the circumference at ultrasonic reflections circular conical surface top " hydraucone ", and following two fulcrums are fixed on the conical surface of ultrasonic reflections circular conical surface; Fixedly connected with the bottom of housing in the bottom of ultrasonic reflections circular conical surface " awl point ", the circumference at ultrasonic reflections circular conical surface top " hydraucone " is fixedlyed connected with the top of housing; Two electrode pins pass housing bottom and fix, and two terminations that are in enclosure interior penetrate exposed its metal surface of ultrasonic reflections circular conical surface and electrode cable welding; Totally two of electrode cables, one respectively with the two sides solder joint welding of film piezo-electric pottery, the other end penetrates two end points welding of ultrasonic reflections circular conical surface respectively with electrode pin.
2. micro-ultrasonic wave sensor according to claim 1, it is characterized in that described piezoelectric chip is a kind of crystal with piezoelectric effect, is made into plates by cutting technique, this material possesses positive and negative two kinds of piezoelectric effects, and the thickness of piezoelectric chip is below 0.2mm.
3. micro-ultrasonic wave sensor according to claim 1, it is characterized in that, the included angle of described piezoelectric chip and ultrasonic reflections circular conical surface drift angle 1/2nd surplus mutually is to guarantee the outwards emission the or inwardly ultrasonic beam of incident is parallel with the circular conical surface axis of ultrasonic reflections circular conical surface.
4. micro-ultrasonic wave sensor according to claim 3, it is characterized in that, the included angle of described piezoelectric chip is meant the crossing acute angle of piezoelectric chip plane and ultrasonic reflections circular conical surface, the so-called acute angle that intersects is promptly bored line and plane, place, axis and piezoelectric chip plane and ultrasonic reflections circular conical surface two acute angles that straight line constituted after crossing respectively, and the size of this acute angle angle just is called as the included angle of piezoelectric chip.
5. micro-ultrasonic wave sensor according to claim 1 is characterized in that, two end points that described two electrode pins expose housing bottom are connected with the ultrasonic frequency electric signal or patch, and promptly play a part the input/output signal interface plug.
6. micro-ultrasonic wave sensor according to claim 1, it is characterized in that, when described micro-ultrasonic wave sensor uses as ultrasonic transmitter, electrode pin is connected with alternation electric signal from the outside and receives the input of alternation electric signal, the alternation electric signal by electrode pin and electrode cable just the voltage of alternation electric signal is added in piezoelectric chip just, on two solder joints in the back side; Piezoelectric chip is under the piezoelectric effect effect of alternating voltage, and along the normal direction generation mechanical vibration up and down on its plane, and then drive ambient air formation vibration wave is outwards propagated; When the natural vibration frequency of the frequency of the alternation electric signal of outside input and piezoelectric chip is consistent, piezoelectric chip produces the vibration wave of output power maximum and outwards propagates, and the vibration wave of piezoelectric chip forms a branch of ultrasonic beam to external radiation through the cavity effect of ultrasonic reflections circular conical surface.
7. micro-ultrasonic wave sensor according to claim 1, it is characterized in that, when described micro-ultrasonic wave sensor uses as ultrasonic receiver, received ultrasound wave is injected into the ultrasonic reflections circular conical surface from the space, arrive at the front of piezoelectric chip through the effect of reflection cavity effect, be reflected to ultrasonic energy repeatedly reflection on the ultrasonic reflections circular conical surface at the piezoelectric chip back side at the piezoelectric chip back side, quilt attenuation to the utmost falls, and can not offset arriving at positive ultrasound wave produce power; When the natural vibration frequency of the ultrasonic frequency that receives and piezoelectric chip is consistent, resonance effect can take place in piezoelectric chip equally, promptly reach maximal value by the induced voltage that piezoelectric effect generated, the induced voltage signal of generation is by electrode cable and the electrode pin output voltage signal that is connected with the input interface of outside ac amplifier circuit; The size of ultrasonic receiver output voltage signal just corresponding the strong and weak information of the ultrasonic signal that is received.
CN2010101097792A 2010-02-11 2010-02-11 Micro-ultrasonic wave sensor Expired - Fee Related CN101782378B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103674134A (en) * 2013-11-30 2014-03-26 国家电网公司 Ultrasonic transducer device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9654880B2 (en) * 2013-09-13 2017-05-16 Kyocera Corporation Sound generator and electronic device using the same
DE102013022063A1 (en) * 2013-12-23 2015-06-25 Valeo Schalter Und Sensoren Gmbh Method for producing an ultrasonic sensor for a motor vehicle
CN105004930B (en) * 2014-04-23 2018-06-29 华南师范大学 A kind of novel microwave sounding method and device and application
CN110873873A (en) 2018-08-29 2020-03-10 华硕电脑股份有限公司 Ultrasonic sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1879976A (en) * 2005-06-14 2006-12-20 深圳市普罗伊学科技发展有限公司 Spherical cap type concave spherical surface ultrasonic transducer
CN201177617Y (en) * 2008-03-12 2009-01-07 河北省电力研究院 Ultrasonic probe

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08331695A (en) * 1995-06-01 1996-12-13 Murata Mfg Co Ltd Manufacture of ultrasonic sensor and ultrasonic sensor
JP2006287673A (en) * 2005-04-01 2006-10-19 Nippon Telegr & Teleph Corp <Ntt> Sound wave sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1879976A (en) * 2005-06-14 2006-12-20 深圳市普罗伊学科技发展有限公司 Spherical cap type concave spherical surface ultrasonic transducer
CN201177617Y (en) * 2008-03-12 2009-01-07 河北省电力研究院 Ultrasonic probe

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开2006-287673A 2006.10.19
JP特开平8-331695A 1996.12.13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103674134A (en) * 2013-11-30 2014-03-26 国家电网公司 Ultrasonic transducer device
CN103674134B (en) * 2013-11-30 2016-06-22 国家电网公司 A kind of ultrasound transducer apparatus

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