CN101526483A - Method for nondestructive examination by photoacoustic interference imaging - Google Patents
Method for nondestructive examination by photoacoustic interference imaging Download PDFInfo
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- CN101526483A CN101526483A CN200910058915A CN200910058915A CN101526483A CN 101526483 A CN101526483 A CN 101526483A CN 200910058915 A CN200910058915 A CN 200910058915A CN 200910058915 A CN200910058915 A CN 200910058915A CN 101526483 A CN101526483 A CN 101526483A
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Abstract
The invention discloses a method for nondestructive examination by photoacoustic interference imaging. Devices used in the method comprise a pump laser 1, a lens 2, a detection laser 4, a spectroscope 5, a first totally reflecting mirror 6, a first beam reshaper 7, a white screen 8, a second beam reshaper 9 and a second totally reflecting mirror 10. An image imaged by the method without scanning not only can reflect the defect on the material surface and evenness, but also can reflect the photoinduced sound wave, and the method is a new technology of nondestructive examination and photoinduced sound wave research for material surface.
Description
Technical field
The present invention relates to the photoacoustic interference imaging technical field, be specifically related to a kind of photoacoustic interference imaging that utilizes and carry out lossless detection method.
Background technology
Dynamic Non-Destruction Measurement all has a wide range of applications in the various aspects of modern industry, is to improve the quality of products, the indispensable means of promoting technological progress.So-called Non-Destructive Testing is meant under the situation of not damaging and destroy material, product, structure, a kind of detection method that their character, mechanical property and inner structure are estimated.Its general principle is: the certain physical energy is added on the analyte, use specific pick-up unit to detect the penetrating of this physical energy, absorption, scattering, reflection, leakage, the isoparametric variation of infiltration then, detect the anomalous property of analyte.Traditional Non-Destructive Testing can be divided into ray detection (RT), magnetic detects (MT), EDDY CURRENT (ET), permeates and detect five kinds of (PT), Ultrasonic Detection (UT).Various technology all have its special advantage and weak point, and its range of application respectively has certain limitation.Along with laser, infrared, microwave technology progressively incorporate the Non-Destructive Testing field, Dynamic Non-Destruction Measurement has obtained further development and application, original conventional Dynamic Non-Destruction Measurement is being endowed new technical connotation, numerous Non-Destructive Testing new method, new technologies such as laser holographic interferometry, laser speckle, laser-ultrasound, infrared, laser profile measurement, microwave also have good developing state, and just progressively enter the commercial Application stage.
Wherein, the various imaging techniques of utilization new method are the Non-Destructive Testing new technologies that fault in material and homogeneity detect, and the interferometer imaging technique, laser hologram imaging technique, Infrared Thermography Technology, ultrasonic imaging technique, photoacoustic imaging technology, optoacoustic thermal wave imagine technique, ultrasonic Infrared Thermography Technology of pure optics etc. are arranged.Its reliability, resolution, sensitivity, detection speeds etc. have nothing in common with each other.Wherein, a lot of imaging techniques all are scanning imageries, and detection speed is low.
Summary of the invention
Problem to be solved by this invention is: how to provide a kind of photoacoustic interference imaging that utilizes to carry out lossless detection method, imaging need not scan, imaging can reflect the defective and the homogeneity of material surface, the photic sound wave that can reflect material surface again is a kind of new technology of material surface Non-Destructive Testing and photic sound wave research.
Technical matters proposed by the invention is to solve like this: a kind of method of utilizing photoacoustic interference imaging to carry out Non-Destructive Testing is provided, used device comprises pump laser 1, lens 2, detection laser 4, spectroscope 5, first total reflective mirror 6, first beam shaping 7, shields 8, second beam shaping 9 and second total reflective mirror 10 in vain, it is characterized in that, pump laser 1 emission pumping laser is radiated on the detected material 3 after lens 2 focus on, surface excitation at detected material 3 goes out sound wave, and sound wave is that propagate to the edge in the form of a ring at the center with the point of irradiation of pumping laser; Detection laser 4 is sent laser and is divided into two-way light through spectroscope 5, wherein one road light is for detecting light after 6 reflections of first total reflective mirror, behind beam shaping 7, become collimated light and the oblique surface that is mapped to detected material 3 of expanding bundle again, its reflected light is radiated on the white screen 8, catoptrical cophasal surface will not be original plane, but identical with the shape of sound wave; Detection laser 4 is sent laser another Lu Guangwei reference light behind spectroscope 5, becomes the collimated light that expands bundle behind beam shaping 9, again through being radiated at behind second total reflective mirror 10 on the white screen 8; There is optical path difference between reference light and the detection reflection of light light, on white screen 8, forms and interfere also imaging.If material surface defectiveness or heterogeneous material, to produce photic sound wave heterogeneous so, consequent photoacoustic interference striped also can be different, detect the photic sound wave that the photoacoustic interference striped that is become just can reflect defective, homogeneity and the material surface on the surface of detected material 3.
Beneficial effect of the present invention: combine optical coherence imaging technique and photoacoustic imaging technology, a kind of novel photoacoustic interference imaging technology has been proposed, imaging can overcome photoacoustic imaging technology to analyze caused detection time of long shortcoming, imaging need not scan, the energy fast imaging, good reliability, resolution height, highly sensitive, detection speed is fast.Imaging can reflect the defective and the homogeneity of material surface, can reflect the photic sound wave of material surface again, is a kind of new technology of material surface Non-Destructive Testing and photic sound wave research.
Description of drawings
Fig. 1 is a work synoptic diagram of the present invention.
Wherein, 1, pump laser, 2, lens, 3, detected material, 4, detection laser, 5, spectroscope, 6, first total reflective mirror, 7, first beam shaping, 8, white screen, 9, second beam shaping, 10, second total reflective mirror.
Embodiment
Below in conjunction with accompanying drawing the present invention is further described:
As shown in Figure 1, pump laser 1 emission pumping laser is radiated on the detected material 3 after lens 2 focus on, and goes out sound wave at the surface excitation of detected material 3, and sound wave is that propagate to the edge in the form of a ring at the center with the point of irradiation of pumping laser; Detection laser 4 is sent laser and is divided into two-way light through spectroscope 5, wherein one road light is for detecting light after 6 reflections of first total reflective mirror, behind beam shaping 7, become collimated light and the oblique surface that is mapped to detected material 3 of expanding bundle again, its reflected light is radiated on the white screen 8; Detection laser 4 is sent laser another Lu Guangwei reference light behind spectroscope 5, becomes the collimated light that expands bundle behind beam shaping 9, again through being radiated at behind second total reflective mirror 10 on the white screen 8; Because the surperficial flexible ripple of detected material 3 is propagated, this catoptrical cophasal surface will not be original plane, but it is identical with the shape of sound wave, therefore there is optical path difference between reflected light and the reference light, reference light forms on white screen 8 with detection reflection of light light interferes also imaging, detects the photic sound wave that the photoacoustic interference striped that is become just can reflect defective, homogeneity and the material surface on the surface of detected material 3.
Ultimate principle: a branch of pumping pointolite irradiation detected materials surface because optoacoustic effect produces photic sound wave at material surface, is that propagate to the edge in the form of a ring at the center with the point of irradiation of pointolite.A branch of detection light is expanded bundle retread and incide material surface, because the flexible ripple of material surface is propagated, catoptrical cophasal surface will not be original plane, but identical with the shape of sound wave, so have optical path difference between reflected light and the reference light, produce and interfere.Place a big CCD detection array or with white screen accept striped imaging in light interference place this moment, just can obtain and the corresponding photoacoustic interference striped of constant phase front picture.If material surface defectiveness or heterogeneous material will produce photic sound wave heterogeneous so, consequent photoacoustic interference striped also can be different, can come test material surface imperfection and homogeneity by this principle.
Claims (1)
1, a kind of method of utilizing photoacoustic interference imaging to carry out Non-Destructive Testing, used device comprises pump laser (1), lens (2), detection laser (4), spectroscope (5), first total reflective mirror (6), first beam shaping (7), white screen (8), second beam shaping (9) and second total reflective mirror (10), it is characterized in that, pump laser (1) emission pumping laser is radiated on the detected material (3) after lens (2) focus on, surface excitation at detected material (3) goes out sound wave, and sound wave is that propagate to the edge in the form of a ring at the center with the point of irradiation of pumping laser; Detection laser (4) is sent laser and is divided into two-way light through spectroscope (5), wherein one road light is for detecting light after first total reflective mirror (6) reflection, behind beam shaping (7), become collimated light and the oblique surface that is mapped to detected material (3) of expanding bundle again, its reflected light is radiated on the white screen (8), catoptrical cophasal surface will not be original plane, but identical with the shape of sound wave; Detection laser (4) is sent laser another Lu Guangwei reference light behind spectroscope (5), becomes the collimated light that expands bundle behind beam shaping (9), again through being radiated at behind second total reflective mirror (10) on the white screen (8); There is optical path difference between reference light and the detection reflection of light light, goes up at white screen (8) and form interference and imaging; If material surface defectiveness or heterogeneous material, to produce photic sound wave heterogeneous so, consequent photoacoustic interference striped also can be different, detect the photic sound wave of defective, homogeneity and material surface that the photoacoustic interference striped that is become just can reflect the surface of detected material (3).
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| CN200910058915A CN101526483A (en) | 2009-04-13 | 2009-04-13 | Method for nondestructive examination by photoacoustic interference imaging |
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| CN102579080A (en) * | 2012-03-07 | 2012-07-18 | 华南师范大学 | Integrated portable confocal opto-acoustic microscopy imaging device and method |
| CN102944521A (en) * | 2012-11-29 | 2013-02-27 | 华南师范大学 | Non-contact photoacoustic and optical coherence tomography dual-imaging device and detection method thereof |
| CN103048271A (en) * | 2012-12-21 | 2013-04-17 | 江西科技师范大学 | Portable type bi-modal imaging method employing combined photoacoustic imaging and optical coherence tomography and system of method |
| CN103336013A (en) * | 2013-06-21 | 2013-10-02 | 南京理工大学 | Photoacoustic detection device for bonding strength of photosensitive chip in sealing environment |
| CN105334262A (en) * | 2015-12-04 | 2016-02-17 | 东北大学 | Non-contact photoacoustic detecting method and device based on optical interferometry |
| CN105606638A (en) * | 2015-12-14 | 2016-05-25 | 中国地质大学（北京） | Instrument for testing burst temperature of fluid inclusion |
| CN106618589A (en) * | 2016-11-16 | 2017-05-10 | 南昌洋深电子科技有限公司 | Vascular network-based photoacoustic imaging identity recognition method |
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| CN107462581A (en) * | 2016-06-02 | 2017-12-12 | 株式会社岛津制作所 | Defect inspection method and defect detecting device |
| US10117583B2 (en) | 2014-10-22 | 2018-11-06 | illumiSonics, Inc. | Photoacoustic remote sensing (PARS) |
| CN109363639A (en) * | 2018-11-13 | 2019-02-22 | 东北大学秦皇岛分校 | A kind of high speed Noncontact optoacoustic imaging system based on optical path modulation combination sensitivity compensation |
| US10327646B2 (en) | 2016-02-02 | 2019-06-25 | Illumisonics Inc. | Non-interferometric photoacoustic remote sensing (NI-PARS) |
| CN111896228A (en) * | 2020-07-10 | 2020-11-06 | 浙江大学 | Lens reliability front and back nondestructive testing method and device based on optical coherent imaging |
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2009
- 2009-04-13 CN CN200910058915A patent/CN101526483A/en active Pending
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| CN102579080B (en) * | 2012-03-07 | 2014-04-02 | 华南师范大学 | Integrated portable confocal opto-acoustic microscopy imaging device and method |
| CN102579080A (en) * | 2012-03-07 | 2012-07-18 | 华南师范大学 | Integrated portable confocal opto-acoustic microscopy imaging device and method |
| CN102944521A (en) * | 2012-11-29 | 2013-02-27 | 华南师范大学 | Non-contact photoacoustic and optical coherence tomography dual-imaging device and detection method thereof |
| CN102944521B (en) * | 2012-11-29 | 2015-01-21 | 华南师范大学 | Non-contact photoacoustic and optical coherence tomography dual-imaging device and detection method thereof |
| CN103048271A (en) * | 2012-12-21 | 2013-04-17 | 江西科技师范大学 | Portable type bi-modal imaging method employing combined photoacoustic imaging and optical coherence tomography and system of method |
| CN103336013A (en) * | 2013-06-21 | 2013-10-02 | 南京理工大学 | Photoacoustic detection device for bonding strength of photosensitive chip in sealing environment |
| US10117583B2 (en) | 2014-10-22 | 2018-11-06 | illumiSonics, Inc. | Photoacoustic remote sensing (PARS) |
| US11298027B2 (en) | 2014-10-22 | 2022-04-12 | Illumisonics Inc. | Photoacoustic remote sensing (PARS) |
| US10682061B2 (en) | 2014-10-22 | 2020-06-16 | Illumisonics Inc. | Photoacoustic remote sensing (PARS) |
| CN105334262A (en) * | 2015-12-04 | 2016-02-17 | 东北大学 | Non-contact photoacoustic detecting method and device based on optical interferometry |
| CN105334262B (en) * | 2015-12-04 | 2017-12-19 | 东北大学 | Noncontact optoacoustic detection method and device based on Through Optical Interference Spectra |
| CN105606638A (en) * | 2015-12-14 | 2016-05-25 | 中国地质大学（北京） | Instrument for testing burst temperature of fluid inclusion |
| US10327646B2 (en) | 2016-02-02 | 2019-06-25 | Illumisonics Inc. | Non-interferometric photoacoustic remote sensing (NI-PARS) |
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| CN112469526B (en) * | 2018-07-19 | 2024-01-09 | Ipg光子公司 | Systems and methods for monitoring and/or controlling wobble processing using in-line coherent imaging (ICI) |
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| US11564578B2 (en) | 2019-03-15 | 2023-01-31 | Illumisonics Inc. | Single source photoacoustic remote sensing (SS-PARS) |
| US11950882B2 (en) | 2019-03-15 | 2024-04-09 | Illumisonics Inc. | Single source photoacoustic remote sensing (SS-PARS) |
| US11841315B2 (en) | 2019-12-19 | 2023-12-12 | Illumisonics Inc. | Photoacoustic remote sensing (PARS), and related methods of use |
| US11122978B1 (en) | 2020-06-18 | 2021-09-21 | Illumisonics Inc. | PARS imaging methods |
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