BG49771A1 - Electric- bow evaparator - Google Patents

Electric- bow evaparator

Info

Publication number
BG49771A1
BG49771A1 BG8917789A BG8917789A BG49771A1 BG 49771 A1 BG49771 A1 BG 49771A1 BG 8917789 A BG8917789 A BG 8917789A BG 8917789 A BG8917789 A BG 8917789A BG 49771 A1 BG49771 A1 BG 49771A1
Authority
BG
Bulgaria
Prior art keywords
evaparator
bow
electric
bow evaparator
Prior art date
Application number
BG8917789A
Inventor
Papken Khovsepjan
Daniel N Dzhumalijski
Original Assignee
T I Vakuumni Sistemi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by T I Vakuumni Sistemi filed Critical T I Vakuumni Sistemi
Priority to BG8917789A priority Critical patent/BG49771A1/en
Priority to DE19904022308 priority patent/DE4022308A1/en
Priority to GB9015513A priority patent/GB2234265A/en
Priority to JP18440090A priority patent/JPH03260064A/en
Publication of BG49771A1 publication Critical patent/BG49771A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
BG8917789A 1989-07-13 1989-07-13 Electric- bow evaparator BG49771A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
BG8917789A BG49771A1 (en) 1989-07-13 1989-07-13 Electric- bow evaparator
DE19904022308 DE4022308A1 (en) 1989-07-13 1990-07-13 DEVICE FOR ARC EVAPORATING THE MATERIAL OF A WATER-COOLED CATODE
GB9015513A GB2234265A (en) 1989-07-13 1990-07-13 Electroarcing vapour deposition apparatus
JP18440090A JPH03260064A (en) 1989-07-13 1990-07-13 Electric arc evaporator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG8917789A BG49771A1 (en) 1989-07-13 1989-07-13 Electric- bow evaparator

Publications (1)

Publication Number Publication Date
BG49771A1 true BG49771A1 (en) 1992-02-14

Family

ID=3922103

Family Applications (1)

Application Number Title Priority Date Filing Date
BG8917789A BG49771A1 (en) 1989-07-13 1989-07-13 Electric- bow evaparator

Country Status (4)

Country Link
JP (1) JPH03260064A (en)
BG (1) BG49771A1 (en)
DE (1) DE4022308A1 (en)
GB (1) GB2234265A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9207046U1 (en) * 1992-05-25 1992-07-23 Vtd-Vakuumtechnik Dresden Gmbh, O-8017 Dresden, De
DE4223592C2 (en) * 1992-06-24 2001-05-17 Leybold Ag Arc vaporization device
JP3287163B2 (en) * 1995-01-23 2002-05-27 日新電機株式会社 Arc evaporation source
TWI242049B (en) * 1999-01-14 2005-10-21 Kobe Steel Ltd Vacuum arc evaporation source and vacuum arc vapor deposition apparatus
JP5063457B2 (en) * 2008-04-11 2012-10-31 株式会社倉元製作所 Sputtering equipment

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2727936A (en) * 1954-11-23 1955-12-20 Westinghouse Electric Corp Titanium furnace
US3783231A (en) * 1972-03-22 1974-01-01 V Gorbunov Apparatus for vacuum-evaporation of metals under the action of an electric arc
US4512867A (en) * 1981-11-24 1985-04-23 Andreev Anatoly A Method and apparatus for controlling plasma generation in vapor deposition
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning
US4559125A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Apparatus for evaporation arc stabilization during the initial clean-up of an arc target
US4724058A (en) * 1984-08-13 1988-02-09 Vac-Tec Systems, Inc. Method and apparatus for arc evaporating large area targets
DE8703520U1 (en) * 1987-02-03 1987-10-01 Balzers Hochvakuum Gmbh, 6200 Wiesbaden, De

Also Published As

Publication number Publication date
JPH03260064A (en) 1991-11-20
GB2234265A (en) 1991-01-30
DE4022308A1 (en) 1991-01-31
GB9015513D0 (en) 1990-08-29

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