DE9207046U1 - - Google Patents

Info

Publication number
DE9207046U1
DE9207046U1 DE9207046U DE9207046U DE9207046U1 DE 9207046 U1 DE9207046 U1 DE 9207046U1 DE 9207046 U DE9207046 U DE 9207046U DE 9207046 U DE9207046 U DE 9207046U DE 9207046 U1 DE9207046 U1 DE 9207046U1
Authority
DE
Germany
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE9207046U
Other languages
German (de)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VTD Vakuumtechnik Dresden GmbH
Original Assignee
VTD Vakuumtechnik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VTD Vakuumtechnik Dresden GmbH filed Critical VTD Vakuumtechnik Dresden GmbH
Priority to DE9207046U priority Critical patent/DE9207046U1/de
Publication of DE9207046U1 publication Critical patent/DE9207046U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/50—Generating plasma using an arc and using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
DE9207046U 1992-05-25 1992-05-25 Expired - Lifetime DE9207046U1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE9207046U DE9207046U1 (en) 1992-05-25 1992-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE9207046U DE9207046U1 (en) 1992-05-25 1992-05-25

Publications (1)

Publication Number Publication Date
DE9207046U1 true DE9207046U1 (en) 1992-07-23

Family

ID=6879848

Family Applications (1)

Application Number Title Priority Date Filing Date
DE9207046U Expired - Lifetime DE9207046U1 (en) 1992-05-25 1992-05-25

Country Status (1)

Country Link
DE (1) DE9207046U1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29505888U1 (en) * 1995-04-05 1995-05-24 Ardenne Anlagentech Gmbh Device for igniting a vacuum arc
DE19618073C1 (en) * 1996-05-06 1997-09-18 Inovap Vakuum Und Plasmatechni Ignition unit for a vacuum arc discharge evaporator
CN107881478A (en) * 2017-11-30 2018-04-06 嘉兴岱源真空科技有限公司 A kind of striking igniter and nano material making apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1322670A (en) * 1971-07-19 1973-07-11 Sablev L P Apparatus for metal evaporation coating
DE4022308A1 (en) * 1989-07-13 1991-01-31 Technologicen Inst Vakuumni Si DEVICE FOR ARC EVAPORATING THE MATERIAL OF A WATER-COOLED CATODE

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1322670A (en) * 1971-07-19 1973-07-11 Sablev L P Apparatus for metal evaporation coating
DE4022308A1 (en) * 1989-07-13 1991-01-31 Technologicen Inst Vakuumni Si DEVICE FOR ARC EVAPORATING THE MATERIAL OF A WATER-COOLED CATODE

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29505888U1 (en) * 1995-04-05 1995-05-24 Ardenne Anlagentech Gmbh Device for igniting a vacuum arc
DE19618073C1 (en) * 1996-05-06 1997-09-18 Inovap Vakuum Und Plasmatechni Ignition unit for a vacuum arc discharge evaporator
CN107881478A (en) * 2017-11-30 2018-04-06 嘉兴岱源真空科技有限公司 A kind of striking igniter and nano material making apparatus
CN107881478B (en) * 2017-11-30 2024-02-27 嘉兴岱源真空科技有限公司 Arc ignition device and nano material manufacturing equipment

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