ZA879111B - Capacitance sensor arrangement - Google Patents

Capacitance sensor arrangement

Info

Publication number
ZA879111B
ZA879111B ZA879111A ZA879111A ZA879111B ZA 879111 B ZA879111 B ZA 879111B ZA 879111 A ZA879111 A ZA 879111A ZA 879111 A ZA879111 A ZA 879111A ZA 879111 B ZA879111 B ZA 879111B
Authority
ZA
South Africa
Prior art keywords
sensor arrangement
capacitance sensor
capacitance
arrangement
sensor
Prior art date
Application number
ZA879111A
Other languages
English (en)
Inventor
Baranski Jan
Original Assignee
The University Of Western Australia
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The University Of Western Australia filed Critical The University Of Western Australia
Publication of ZA879111B publication Critical patent/ZA879111B/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
ZA879111A 1986-12-05 1987-12-04 Capacitance sensor arrangement ZA879111B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPH936386 1986-12-05

Publications (1)

Publication Number Publication Date
ZA879111B true ZA879111B (en) 1988-06-01

Family

ID=3771936

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA879111A ZA879111B (en) 1986-12-05 1987-12-04 Capacitance sensor arrangement

Country Status (5)

Country Link
US (1) US5012196A (ja)
EP (1) EP0277421A1 (ja)
JP (1) JPS63289415A (ja)
NZ (1) NZ222795A (ja)
ZA (1) ZA879111B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2690244B1 (fr) * 1992-01-10 1997-03-21 Leteurtre Jean Procede et/ou dispositif de mise en óoeuvre du procede de mesure capacitive susceptible d'effectuer des mesures dimensionnelles sans contact et de tres haute precision en milieu industriel.
US5272443A (en) * 1992-04-22 1993-12-21 Aluminum Company Of America Chatter and profile measuring using capacitor sensors
US5815864A (en) * 1996-04-02 1998-10-06 Sytron Corporation Microprocessor controller and method of initializing and controlling low air loss floatation mattress
US6307385B1 (en) 1997-12-30 2001-10-23 Vibrosystm, Inc. Capacitance measuring circuit for a capacitive sensor
US6105440A (en) * 1999-03-16 2000-08-22 Research Triangle Institute Portable air sampling systems including non-intrusive activity monitor and methods of using same
US6552667B1 (en) * 2000-11-16 2003-04-22 Hydro-Quebec Non-contact measuring method and apparatus for producing a signal representative of a distance between facing surfaces
US7256588B2 (en) * 2004-04-16 2007-08-14 General Electric Company Capacitive sensor and method for non-contacting gap and dielectric medium measurement
US6989679B2 (en) * 2004-06-03 2006-01-24 General Electric Company Non-contact capacitive sensor and cable with dual layer active shield
CN103363888A (zh) * 2013-06-18 2013-10-23 浙江工业大学 基于电容传感器的上研磨盘浮离距离在线测量装置

Family Cites Families (32)

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Publication number Priority date Publication date Assignee Title
US2887651A (en) * 1956-02-17 1959-05-19 Boonton Radio Corp Induced current testing apparatus
US3234461A (en) * 1960-12-05 1966-02-08 Texas Instruments Inc Resistivity-measuring device including solid inductive sensor
US3255405A (en) * 1961-04-07 1966-06-07 Trw Inc Apparatus for measuring the electrical conductivity of a sample
US3217204A (en) * 1963-05-10 1965-11-09 Herschel M Nance Automatic spacing control system
GB1092362A (en) * 1963-05-23 1967-11-22 David Theodore Nelson Williams Improvements in detectors for electrically conductive or magnetic particles
NL132754C (ja) * 1965-04-29
US3407352A (en) * 1965-06-07 1968-10-22 Western Electric Co Method of and apparatus for monitoring the thickness of a non-conductive coating on a conductive base
US3624541A (en) * 1969-11-03 1971-11-30 Moisture Register Co Oscillator circuit
DE2049976B2 (de) * 1970-10-12 1972-09-21 Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever KG, 5000 Köln Verfahren zur messung der dicke von schichten im bauwesen und vorrichtung zur durchfuehrung des verfahren
US3967064A (en) * 1972-11-16 1976-06-29 Systron Donner Corporation Low noise electronic circuit, transducer using the same, and method
US3824497A (en) * 1973-07-20 1974-07-16 Us Navy High-purity, frequency-stable, adjustable, wien-bridge, oscillator
US4160204A (en) * 1974-11-11 1979-07-03 Kaman Sciences Corporation Non-contact distance measurement system
DE2460057B2 (de) * 1974-12-19 1977-02-10 Robert Bosch Gmbh, 7000 Stuttgart Schaltanordnung mit einem streufeldkondensator
US4001718A (en) * 1975-05-12 1977-01-04 Electro Corporation Linear oscillator for proximity sensor
US4042876A (en) * 1976-04-29 1977-08-16 The United States Of America As Represented By The United States Energy Research And Development Administration Eddy current gauge for monitoring displacement using printed circuit coil
DE2726648A1 (de) * 1977-06-14 1979-02-15 Precitec Gmbh Schaltungsanordnung zur messung des werkzeug/werkstueckabstands
US4190797A (en) * 1978-03-31 1980-02-26 Gould Inc. Capacitive gauging system utilizing a low internal capacitance, high impedance amplifier means
US4243946A (en) * 1978-05-19 1981-01-06 Wang Chien S Class-B current source amplifier
US4345167A (en) * 1978-07-14 1982-08-17 Calvin Noel M Capacitance proximity sensor
JPS5927488B2 (ja) * 1978-11-16 1984-07-06 ヤマハ株式会社 電力増幅器におけるバイアス回路
US4219740A (en) * 1979-01-12 1980-08-26 Eldec Corporation Proximity sensing system and inductance measuring technique
FR2454083A1 (fr) * 1979-04-09 1980-11-07 Facom Dispositif de mesure de la position relative de deux objets
US4389646A (en) * 1980-04-30 1983-06-21 Fuji Electric Co. Ltd. Displacement converting circuit arrangement
DE3134322A1 (de) * 1981-08-31 1983-03-10 Ingenieure Block + Seichter, 3000 Hannover Elektronischer kapazitiver messkopf
GB2128750B (en) * 1982-10-15 1986-03-05 Lucas Ind Plc Displacement transducer system
US4633249A (en) * 1983-05-18 1986-12-30 Mitutoyo Mfg. Co., Ltd. Displacement detector utilizing change of capacitance
US4686531A (en) * 1983-10-28 1987-08-11 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
AU583483B2 (en) * 1983-11-09 1989-05-04 University Of Western Australia, The Resistance sensing
US4706020A (en) * 1983-12-12 1987-11-10 General Electric Company High frequency eddy current probe with planar, spiral-like coil on flexible substrate for detecting flaws in semi-conductive material
CA1191261A (fr) * 1983-12-14 1985-07-30 Francois Lalonde Appareil de mesure dynamique et sans contact de faibles distances
US4636714A (en) * 1984-01-18 1987-01-13 Wystron, Inc. Capacitive transducer and method
JPS6180086A (ja) * 1984-09-28 1986-04-23 Tech Res & Dev Inst Of Japan Def Agency 金属体検知方法

Also Published As

Publication number Publication date
JPS63289415A (ja) 1988-11-25
NZ222795A (en) 1990-03-27
US5012196A (en) 1991-04-30
EP0277421A1 (en) 1988-08-10

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