ZA844315B - A method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus - Google Patents

A method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus

Info

Publication number
ZA844315B
ZA844315B ZA844315A ZA844315A ZA844315B ZA 844315 B ZA844315 B ZA 844315B ZA 844315 A ZA844315 A ZA 844315A ZA 844315 A ZA844315 A ZA 844315A ZA 844315 B ZA844315 B ZA 844315B
Authority
ZA
South Africa
Prior art keywords
microwave
controlling
surface treatment
treatment apparatus
oxygen plasma
Prior art date
Application number
ZA844315A
Other languages
English (en)
Inventor
Kenji Fukuta
Takaoki Kaneko
Yoshinobu Takahashi
Original Assignee
Toyota Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Co Ltd filed Critical Toyota Motor Co Ltd
Publication of ZA844315B publication Critical patent/ZA844315B/xx

Links

ZA844315A 1983-06-14 1984-06-07 A method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus ZA844315B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58104904A JPS59230033A (ja) 1983-06-14 1983-06-14 プラズマ処理方法

Publications (1)

Publication Number Publication Date
ZA844315B true ZA844315B (en) 1985-02-27

Family

ID=14393114

Family Applications (1)

Application Number Title Priority Date Filing Date
ZA844315A ZA844315B (en) 1983-06-14 1984-06-07 A method for controlling the operation of a microwave-excited oxygen plasma surface treatment apparatus

Country Status (2)

Country Link
JP (1) JPS59230033A (OSRAM)
ZA (1) ZA844315B (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230034A (ja) * 1983-06-14 1984-12-24 Toyota Motor Corp プラズマ処理方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59230034A (ja) * 1983-06-14 1984-12-24 Toyota Motor Corp プラズマ処理方法

Also Published As

Publication number Publication date
JPH0254373B2 (OSRAM) 1990-11-21
JPS59230033A (ja) 1984-12-24

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