YU6182A - Process for thermo-oxydation of silicon - Google Patents

Process for thermo-oxydation of silicon

Info

Publication number
YU6182A
YU6182A YU6182A YU6182A YU6182A YU 6182 A YU6182 A YU 6182A YU 6182 A YU6182 A YU 6182A YU 6182 A YU6182 A YU 6182A YU 6182 A YU6182 A YU 6182A
Authority
YU
Yugoslavia
Prior art keywords
oxydation
thermo
silicon
Prior art date
Application number
YU6182A
Inventor
Mladenovic Lj
Lj Mladenovic
M D Petkovic
Original Assignee
Elektr Industr Ro Tv Elektr Oo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektr Industr Ro Tv Elektr Oo filed Critical Elektr Industr Ro Tv Elektr Oo
Priority to YU6182A priority Critical patent/YU6182A/en
Publication of YU6182A publication Critical patent/YU6182A/en

Links

YU6182A 1982-01-12 1982-01-12 Process for thermo-oxydation of silicon YU6182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
YU6182A YU6182A (en) 1982-01-12 1982-01-12 Process for thermo-oxydation of silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
YU6182A YU6182A (en) 1982-01-12 1982-01-12 Process for thermo-oxydation of silicon

Publications (1)

Publication Number Publication Date
YU6182A true YU6182A (en) 1985-06-30

Family

ID=25548162

Family Applications (1)

Application Number Title Priority Date Filing Date
YU6182A YU6182A (en) 1982-01-12 1982-01-12 Process for thermo-oxydation of silicon

Country Status (1)

Country Link
YU (1) YU6182A (en)

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