WO2024176839A1 - 光接続部品の製造方法 - Google Patents

光接続部品の製造方法 Download PDF

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Publication number
WO2024176839A1
WO2024176839A1 PCT/JP2024/004199 JP2024004199W WO2024176839A1 WO 2024176839 A1 WO2024176839 A1 WO 2024176839A1 JP 2024004199 W JP2024004199 W JP 2024004199W WO 2024176839 A1 WO2024176839 A1 WO 2024176839A1
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Prior art keywords
beams
branched
glass member
manufacturing
less
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PCT/JP2024/004199
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English (en)
French (fr)
Japanese (ja)
Inventor
重博 長能
学 塩▲崎▼
哲也 中西
芳夫 早崎
智士 長谷川
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Utsunomiya University
Sumitomo Electric Industries Ltd
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Utsunomiya University
Sumitomo Electric Industries Ltd
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Priority to JP2025502261A priority Critical patent/JPWO2024176839A1/ja
Priority to CN202480012700.4A priority patent/CN120693551A/zh
Publication of WO2024176839A1 publication Critical patent/WO2024176839A1/ja
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method

Definitions

  • the present disclosure relates to a method for manufacturing an optical connecting component.
  • Non-Patent Documents 1 to 5 disclose a technique for forming an optical waveguide by a drawing method using a femtosecond laser light source.
  • Non-Patent Document 1 discloses a technique for forming a core that becomes a waveguide by single-scan drawing with femtosecond laser light.
  • Non-Patent Document 2 discloses a technique for forming a core having a square cross-sectional shape by multi-scan drawing with femtosecond laser light.
  • Non-Patent Document 3 introduces a mechanism for increasing the refractive index by irradiation with femtosecond laser light (compression)
  • Non-Patent Document 4 introduces a mechanism for increasing the refractive index by irradiation with femtosecond laser light (rearrangement of composition)
  • Non-Patent Document 5 introduces a mechanism for forming a nano-grating periodic structure by irradiation with femtosecond laser light.
  • the manufacturing method of the optical connection component disclosed herein includes a preparation step, a laser irradiation step, and a focal point moving step.
  • a silica-based glass member is prepared.
  • the laser irradiation step the laser light is branched and irradiated.
  • femtosecond laser light with a pulse width of 500 fs or less is used, which has an energy amount that causes a photoinduced refractive index change in the glass member.
  • a beam shaping element having a diffraction grating is used to generate a plurality of branched beams.
  • the plurality of branched beams are condensed and irradiated into the inside of the glass member via a condensing lens.
  • the focal point positions of the plurality of branched beams are moved relative to the glass member.
  • the mode field diameter (hereinafter referred to as "MFD") of the beam spot at the focal point position of each of the plurality of branched beams is set such that the ratio MFD/L of the MFD of the beam spot to the diffraction grating period L of the beam shaping element is 0.6 or more and 0.9 or less.
  • FIG. 1 is a flow chart for explaining an example of a manufacturing method for an optical connecting component according to the present disclosure.
  • FIG. 2 is a diagram showing an example of the configuration of a manufacturing apparatus for carrying out the manufacturing method of the optical connecting component of the present disclosure, and is also a diagram for explaining laser light scanning.
  • FIG. 3 is a diagram for explaining various beam shaping optical systems and beam spot shapes.
  • FIG. 4 is a diagram for explaining a structure 1 of beam spots arranged one-dimensionally.
  • FIG. 5 is a diagram showing the light intensity distribution of the input beam of the first modified example based on the light intensity distribution of the input beam in FIG. 4 and the light intensity distribution of the diffracted light converted from the input beam.
  • FIG. 6 is a diagram showing the light intensity distribution of an input beam of a second modified example based on the light intensity distribution of the input beam in FIG. 4 and the light intensity distribution of diffracted light converted from the input beam.
  • Non-Patent Document 1 succeeds in forming an optical waveguide by single-scan drawing with femtosecond laser light, but the width of the optical waveguide is not controlled. That is, the shape of the obtained optical waveguide is long with respect to the laser irradiation axis, while the lateral direction of the optical waveguide is narrow, about 2 ⁇ m or less. This results in a large coupling loss of light propagating through the optical waveguide.
  • Non-Patent Document 2 has succeeded in forming an optical waveguide by multi-scan drawing with femtosecond laser light.
  • multi-scan drawing the femtosecond laser light irradiated along the beam irradiation axis is scanned 20 times while being shifted in a direction perpendicular to the beam irradiation axis, thereby controlling the width of the optical waveguide.
  • the time required to form one optical waveguide is 20 times longer than that of single-scan drawing, which poses the problem of a significant decrease in the productivity of optical connection parts including optical waveguides.
  • the present disclosure provides a method for manufacturing optical connection components that makes it easy to control the shape of the optical waveguide provided in the optical connection components and allows for a significant increase in the productivity of optical connection components.
  • the method for producing an optical connection component includes: (1) The method includes a preparation step, a laser irradiation step, and a focal point moving step.
  • a silica-based glass member is prepared.
  • the laser irradiation step the laser light is branched and irradiated.
  • femtosecond laser light having a pulse width of 500 fs or less is used, which has an energy amount that causes a change in the refractive index of the glass member due to photo-induced induction.
  • a plurality of branched beams are generated from this femtosecond laser light by using a beam shaping element having a diffraction grating.
  • the plurality of branched beams are condensed and irradiated inside the glass member through a condenser lens.
  • the focal point moving step the focal point positions of the plurality of branched beams are moved relative to the glass member.
  • the MFD of the beam spot at the focal point position of each of the plurality of branched beams is set such that the ratio MFD/L of the MFD of the beam spot to the diffraction grating period L of the beam shaping element is set to 0.6 or more and 0.9 or less.
  • This configuration makes it easier to control the shape of the optical waveguide provided within the glass member and can significantly increase the productivity of optical connection components.
  • the beam shaping element may be a DOE (Diffractive Optical Element).
  • DOEs include LCoS (Liquid Crystal on Silicon).
  • a type with non-variable refractive index modulation is referred to as a bulk type DOE or glass type DOE, and a type with variable refractive index modulation is referred to as LCoS.
  • the phase difference between adjacent diffracted lights among the diffracted lights constituting one branched beam may be within the range of -95° to +95°, i.e., the lower limit is set to a value of -5° to +5° with -90° as the reference and the upper limit is set to a value of -5° to +5° with +90° as the reference.
  • the lower limit is set to a value of -5° to +5° with -90° as the reference
  • the upper limit is set to a value of -5° to +5° with +90° as the reference.
  • one of the multiple branch beams is composed of multiple diffracted beams.
  • a reference branch beam designed so that the phase difference between adjacent diffracted beams among the multiple diffracted beams falls within the range of -95° to +95° that is, the range in which the lower limit is set to a value of -5° to +5° based on -90° and the upper limit is set to a value of -5° to +5° based on +90°
  • the center position X0/L of the multiple branch beams may be -0.2 to +0.2. This is because if the center position X0/L of the multiple branch beams is out of the range of -0.2 to +0.2, a complex light intensity distribution is formed.
  • the number of the multiple branch beams may be 2 or more and 100 or less. In this case, it becomes possible to configure any beam arrangement pattern according to the width of the optical waveguide to be formed in the glass member.
  • the MFD of the beam spot of each of the multiple branched beams may be 0.5 ⁇ m or more and 6.0 ⁇ m or less. In this case, too, it becomes possible to configure any beam arrangement pattern according to the width of the optical waveguide to be formed in the glass member.
  • FIG. 1 is a flow chart for explaining an example of a manufacturing method for the optical connection part 100 of the present disclosure.
  • FIG. 2 is a diagram for explaining laser light scanning, showing an example of the configuration of a manufacturing apparatus for carrying out the manufacturing method for the optical connection part 100 of the present disclosure (indicated as "manufacturing apparatus" in FIG. 2).
  • the upper part of FIG. 2 (indicated as “configuration” in FIG. 2) shows an example of the configuration of the manufacturing apparatus.
  • the lower part of FIG. 2 shows laser light scanning in the laser light irradiation process.
  • the manufacturing apparatus shown in the upper part of Figure 2 includes a femtosecond laser 20, a laser driver 25 for driving the femtosecond laser 20, a beam shaping optical system 30 for shaping the beam spot of the femtosecond laser light into an arbitrary shape, an XYZ stage 40, a stage driver 45 for driving the XYZ stage 40, and a controller 50 for controlling the operation of each of these components.
  • the laser driver 25 controls the power and repetition frequency of the pulsed laser light (hereinafter, referred to as "femtosecond laser light”) output from the femtosecond laser 20 according to instructions from the controller 50.
  • femtosecond laser light the pulsed laser light
  • the femtosecond laser 20 output femtosecond laser light having a pulse width of several hundred femtoseconds or less.
  • femtosecond laser light with a pulse width set to several hundred femtoseconds or less is effective because its peak power can be made 10 5 W/cm 2 or more.
  • the repetition frequency of the output femtosecond laser light may be 10 kHz or more in order to smooth the refractive index and structure of the optical waveguide formed inside the glass material.
  • a glass member 10 to be the main body of the optical component is placed on the device mounting surface of the XYZ stage 40.
  • the glass member 10 is glass, for example, silica-based glass, that can generate a pressure-induced refractive index change ⁇ np or both ⁇ np and a structure-induced refractive index change ⁇ nd by laser light irradiation.
  • Silica-based glass is a glass mainly composed of silicon dioxide (SiO 2 ) and contains 50% or more of SiO 2. It may be glass without impurities, germanium (Ge)-doped glass, co-doped glass of Ge and boron (B), or the like.
  • These glasses may be silica-based glass, phosphate-based glass, halide glass, and sulfide glass.
  • the femtosecond laser light output from the femtosecond laser 20 is focused by the beam shaping optical system 30 on the inside of the glass member 10 placed on the XYZ stage 40, that is, on the focusing point 35 located on the YZ plane.
  • a refractive index change region 15 is formed as an optical waveguide inside the glass member 10, and an optical connection part 100 is obtained.
  • the stage driver 45 drives the XYZ stage 40 in accordance with instructions from the controller 50 so that the device mounting surface of the XYZ stage 40 moves along the X-axis, Y-axis, and Z-axis directions.
  • This configuration enables laser scanning as shown in the lower part of FIG. 2, and the position of the focal point 35 of the femtosecond laser light moves relative to the glass member 10.
  • the controller 50 controls the operations of the laser driver 25 and the stage driver 45 as described above, thereby creating an arbitrary pattern of refractive index change region 15 inside the glass member 10.
  • the arbitrary pattern corresponds to the shape of the optical waveguide projected onto the YZ plane taking into account the depth direction information of the X-axis.
  • an optical connection part 100 provided with an optical waveguide is manufactured using a manufacturing apparatus having the above-described structure.
  • a manufacturing method for the optical connection part 100 of the present disclosure will be described with reference to the flowchart in FIG. 1.
  • a manufacturing method for the optical connection part 100 a case where a three-dimensional optical waveguide device having an optical waveguide (refractive index changing region 15) of an arbitrary pattern is manufactured will be described.
  • the manufacturing method of the optical connection part 100 disclosed herein is composed of a preparation process and an optical waveguide manufacturing process.
  • a glass member 10 e.g., parallel plate glass
  • step ST10 a glass member 10 that will become the optical connection part 100.
  • a refractive index change region 15 of an arbitrary pattern that will become an optical waveguide is fabricated inside the prepared glass member 10.
  • the prepared glass member 10 is immediately placed on the device mounting surface of the XYZ stage 40 after completion of step ST10, and is irradiated with femtosecond laser light (step ST20).
  • the control unit 50 controls the laser driving unit 25 so that femtosecond laser light having an energy amount that causes a photoinduced refractive index change inside the glass member 10 and a repetition frequency of 10 kHz or more is output from the femtosecond laser 20.
  • the femtosecond laser light output from the femtosecond laser 20 is focused inside the glass member 10 by the beam shaping optical system 30.
  • the beam shaping optical system 30 shapes the beam spot of the input femtosecond laser light into a predetermined shape.
  • a photoinduced refractive index change is formed in the beam irradiation region at the focusing point 35 of this femtosecond laser light.
  • the installation position of the glass member 10, the position of the focal point 35 of the femtosecond laser light, or both the installation position and the focal point position are continuously or intermittently changed, thereby moving the position of the focal point 35 of the femtosecond laser light inside the glass member 10.
  • step ST20 and the focal point movement process in step ST30 are repeated while changing the irradiation conditions or under the same conditions, returning to the point indicated by point C in FIG. 1, until the pre-designed optical waveguide pattern is formed inside the glass member 10 (step ST40).
  • step ST40 Once the formation of the refractive index change region 15 in the glass member 10 is completed (step ST40), the glass member 10 is annealed for aging treatment or the like so that the refractive index does not change for a long period of time (step ST50).
  • FIG. 3 is a diagram for explaining various beam shaping optical systems and beam spot shapes (in FIG. 3, these are labeled "beam shaping optical system” and “beam spot shape,” respectively).
  • the beam shaping optical system 30 is composed of a beam shaping element and a condenser lens. Examples of beam shaping elements include a DOE and a hologram optical element using LCoS.
  • the upper part of FIG. 3 (labeled “DOE” in FIG. 3) shows the configuration of an optical system that includes a DOE 131 as a beam shaping element.
  • the lower part of FIG. 3 shows the configuration of an optical system that includes an LCoS 141 as a beam shaping element.
  • a femtosecond laser beam is combined with a beam shaping element such as a hologram optical element to generate multiple branched beams, each of which is composed of diffracted light, from the femtosecond laser beam.
  • the multiple branched beams are focused inside the glass member 10 via a focusing lens, and a refractive index change region 15 that serves as an optical waveguide is formed inside the glass member 10 by moving the XYZ stage 40.
  • the laser beam wavelength is in the range of -10 nm to +10 nm based on 1030 nm, in the range of -10 nm to +10 nm based on 1060 nm, or second harmonic generation (SHG) or third harmonic generation (THG) in each wavelength range.
  • the pulse width is 500 fs or less.
  • the repetition frequency is 100 kHz to 5 MHz.
  • the femtosecond laser beam is split by a DOE 131 or an LCoS 141, etc.
  • the "DOE" optical system shown in the upper part of FIG. 3 includes a DOE 131, which is a beam shaping element, and a condenser lens 132.
  • the DOE 131 receives the femtosecond laser light from the femtosecond laser 20, and outputs a group of branched beams having various beam arrangement patterns.
  • the condenser lens 132 focuses the multiple branched beams output from the DOE 131 inside the glass member 10 while maintaining the beam arrangement pattern.
  • the focusing point 35 is set at the position of the beam waist BW.
  • the "hologram optical element” optical system shown in the lower part of FIG. 3 includes an LCoS 141, which is a beam shaping element, and a condenser lens 142.
  • the LCoS 141 receives the femtosecond laser light from the femtosecond laser 20, and outputs a group of branched beams having various beam arrangement patterns.
  • the condenser lens 142 focuses the multiple branched beams output from the LCoS 141 inside the glass member 10 while maintaining the beam arrangement pattern.
  • the focal point 35 is also set at the position of the beam waist BW, and the shape of the beam irradiation area 350 can be set to an area with a maximum width Zd along the Z-axis direction and a maximum width Yd ( ⁇ Zd) along the Y-axis direction.
  • each branched beam is composed of a plurality of diffracted lights, and the beam spots #1 to #5 of these branched beams may be spatially separated so that the spot centers are arranged along the Y-axis direction as shown in FIG. 3 (pattern A shown in FIG. 3).
  • pattern A the beam spots #1 to #5 of the branched beams overlapping each other correspond to the beam irradiation area 350 on the beam waist BW.
  • Yd is the beam diameter in the Y-axis direction of the light intensity distribution in a state in which the branched beams having a beam diameter of 1/e 2 are arranged in the Y-axis direction so that adjacent beam spots partially overlap each other.
  • Zd is the beam diameter in the Z-axis direction in this case.
  • the beam spots #1 to #5 of the branch beams may be spatially separated to form an M-shaped beam arrangement pattern along both the Y-axis and the Z-axis as shown in FIG. 3 (pattern B shown in FIG. 3).
  • each of the spatially separated branch beams is shifted by a fluctuation amount ⁇ Y along the Y-axis direction, or by a fluctuation amount ⁇ Z along the Z-axis direction, or by a fluctuation amount ⁇ Y and a fluctuation amount ⁇ Z along both the Y-axis direction and the Z-axis direction, so that the optical waveguide has a predetermined width, are applicable.
  • ⁇ Y is the closest beam center distance in the Y-axis direction.
  • ⁇ Z is the closest beam center distance in the Z-axis direction.
  • the combined light intensity distribution at the beam spots #1 to #5 of the branch beams of pattern A has a flat-top shape.
  • the beam irradiation area 350 corresponds to a correction beam spot obtained by rearranging the beam spots of the branched beams so that the center-to-center distance between the beam spots of the branched beams along the Z axis becomes zero.
  • the light intensity distribution of such a correction beam spot (total light intensity distribution obtained by superimposing the partial light intensity distributions of the branched beams) also has a flat-top shape.
  • the beam spots #1 to #5 of the branched beams move on the YZ plane while maintaining the M-shaped beam arrangement pattern.
  • pattern B is a beam arrangement pattern that is spatially separated along the Y axis and time-separated along the Z axis.
  • FIG. 4 is a diagram for explaining structure 1 (spatial separation) of beam spots arranged one-dimensionally.
  • FIG. 5 is a diagram showing the light intensity distribution of the input beam of a first modified example based on the light intensity distribution of the input beam of FIG. 4 and the light intensity distribution of the diffracted light converted from the input beam (in FIG. 5, this is labeled "light intensity distribution of input beam (modification 1)").
  • FIG. 6 is a diagram showing the light intensity distribution of the input beam of a second modified example based on the light intensity distribution of the input beam of FIG. 4 and the light intensity distribution of the diffracted light converted from the input beam (in FIG. 5, this is labeled "light intensity distribution of input beam (modification 2)").
  • Fig. 4 shows an example of a beam arrangement pattern composed of beam spots #1 to #5 of multiple branch beams output from DOE131.
  • the middle part of Fig. 4 shows the correspondence between the light intensity distribution of the femtosecond laser light input to DOE131 and the phase pattern formed on DOE131, with the position X/L of the branch beam relative to the diffraction grating period L as a common axis with the center position X0/L as the origin.
  • the lower part of Fig. 4 (labeled "Light intensity distribution of diffracted light” in Fig.
  • FIG. 5 shows the light intensity distribution (flat-top light intensity distribution) of the diffracted light constituting the branch beam having beam spots #1 to #5 of the branch beam output from DOE131.
  • the upper part of FIG. 5 shows the correspondence between the light intensity distribution of the femtosecond laser light input to the DOE 131 and the phase pattern formed on the DOE 131.
  • the lower part of FIG. 5 shows the light intensity distribution of the diffracted light constituting the branched beam having beam spots #1 to #5 output from the DOE 131.
  • FIG. 6 shows the light intensity distribution of the diffracted light constituting the branched beam having beam spots #1 to #5 output from the DOE 131.
  • FIG. 6 shows the correspondence between the light intensity distribution of the femtosecond laser light input to the DOE 131 and the phase pattern formed on the DOE 131.
  • the lower part of FIG. 6 (indicated as "diffracted light intensity distribution" in FIG. 6) shows the light intensity distribution of the diffracted light constituting the branched beam having beam spots #1 to #5 output from the DOE 131.
  • the beam spots #1 to #5 of the five branched beams form a beam arrangement pattern in which they are arranged so as to overlap partially along the Y-axis direction perpendicular to the scanning direction (i.e., the Z-axis direction).
  • This beam arrangement pattern corresponds to a beam irradiation area 350 having a maximum width Zd along the Z-axis direction and a maximum width Yd ( ⁇ Zd) along the Y-axis direction.
  • the beam spots #1 to #5 of the five branched beams are moved together along the Z-axis direction to form a refractive index change region 15 serving as an optical waveguide in the glass member 10.
  • the total diffraction efficiency from the above-mentioned ⁇ 2nd order diffraction to +2nd order diffraction is 92.1%, and the diffraction efficiency of each branched light is 18.4%, and it was confirmed by calculation that the light is branched with the same diffraction efficiency.
  • phase difference between adjacent diffracted lights falls within a range in which the lower limit is set to ⁇ 95° or more and ⁇ 85° or less, and the upper limit is set to 85° or more and +95° or less. Therefore, a sudden change in light intensity due to interference between diffracted lights that overlap each other is reduced. If the phase difference between adjacent diffracted lights is 180°, the light intensity in the overlapping region will suddenly drop to 0 due to interference. Generally, this is not effective in forming an optical waveguide because a flat-top light intensity distribution is not formed. When the phase difference between adjacent diffracted lights is 0°, the effect is not as large as when it is 180°, but it makes it difficult to design the flatness of the light intensity distribution.
  • the diffracted light constituting each branch beam forms a complex light intensity distribution, as shown in the bottom of Figure 5.
  • the bottom of Figure 5 shows the light intensity distribution of the diffracted light constituting each branch beam shown in the bottom of Figure 4 with a dashed line.
  • the example in the upper part of Figure 6 shows the calculation results for an input laser with an expanded MFD/L ratio of 1.27 compared to the input laser with an MFD/L ratio of 0.78 shown in the upper part of Figure 4.
  • the diffracted light constituting each branch beam forms a flat-top shape, but large valleys appear between the diffracted light, and the ratio of the MFD of the beam spot of the input laser to the diffraction grating period L must also be incorporated into the design.
  • the light intensity distribution of the diffracted light constituting each branch beam shown in the lower part of Figure 4 is also shown in the lower part of Figure 6 by a dashed line.
  • the ratio MFD/L is 0.6 to 0.9. Furthermore, for the reference branch beam shown in the middle row of Figure 4, the central position X0/L is -0.20 to +0.20.
  • the beam spot diameter of each branch beam, defined by the beam waist BW, is 0.5 ⁇ m to 6.0 ⁇ m. Note that Non-Patent Documents 6 and 7 do not include any description of the ratios MFD/L and X0/L related to the beam spot diameter, or the phase of adjacent diffracted light.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
PCT/JP2024/004199 2023-02-22 2024-02-07 光接続部品の製造方法 Ceased WO2024176839A1 (ja)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030035640A1 (en) * 2001-08-16 2003-02-20 Mark Dugan Method of index trimming a waveguide and apparatus formed of the same
JP2020510538A (ja) * 2017-03-07 2020-04-09 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ レーザ加工用の放射を成形するための方法及び装置
WO2021182643A1 (ja) * 2020-03-13 2021-09-16 古河電気工業株式会社 溶接方法、レーザ溶接システム、金属部材、電気部品、および電子機器
WO2022255261A1 (ja) * 2021-05-31 2022-12-08 住友電気工業株式会社 光導波路の作製方法、及び光導波路

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030035640A1 (en) * 2001-08-16 2003-02-20 Mark Dugan Method of index trimming a waveguide and apparatus formed of the same
JP2020510538A (ja) * 2017-03-07 2020-04-09 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ レーザ加工用の放射を成形するための方法及び装置
WO2021182643A1 (ja) * 2020-03-13 2021-09-16 古河電気工業株式会社 溶接方法、レーザ溶接システム、金属部材、電気部品、および電子機器
WO2022255261A1 (ja) * 2021-05-31 2022-12-08 住友電気工業株式会社 光導波路の作製方法、及び光導波路

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