WO2024108829A1 - Meta-structured and topological optical waveguide and augmented reality display device - Google Patents

Meta-structured and topological optical waveguide and augmented reality display device Download PDF

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Publication number
WO2024108829A1
WO2024108829A1 PCT/CN2023/082791 CN2023082791W WO2024108829A1 WO 2024108829 A1 WO2024108829 A1 WO 2024108829A1 CN 2023082791 W CN2023082791 W CN 2023082791W WO 2024108829 A1 WO2024108829 A1 WO 2024108829A1
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coupling
grating
topological
region
optical waveguide
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PCT/CN2023/082791
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French (fr)
Chinese (zh)
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罗明辉
乔文
朱平
杨明
杨博文
陈林森
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苏州苏大维格科技集团股份有限公司
苏州大学
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Publication of WO2024108829A1 publication Critical patent/WO2024108829A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings

Definitions

  • the present invention relates to the field of augmented reality display technology, and in particular to a metamorphic topological optical waveguide and an augmented reality display device.
  • Augmented Reality (AR) technology is a new technology that "seamlessly" integrates real-world information and virtual-world information. It not only displays real-world information, but also displays virtual information at the same time. The two types of information complement and overlap each other. In visual augmented reality, users use helmet displays to overlap the real world with computer graphics, so they can see the real world around them.
  • Optical waveguides have a wide range of applications in the field of augmented reality due to their total reflection optical properties, ultra-thin, and surface-machinable structures.
  • Augmented reality display based on optical waveguides has become the mainstream display technology in the industry.
  • HoloLens developed by Microsoft has a large field of view augmented reality display based on a butterfly-shaped pupil dilation conduction display window; the augmented reality glasses developed by Magic Leap in the United States are based on a secondary unidirectional conduction optical waveguide design, and a combination of multiple pieces achieves color display.
  • augmented reality display based on optical waveguide can also be used in vehicle-mounted head-up display.
  • the mainstream head-up display is based on the principle of geometric optical space reflection, and has disadvantages such as large front-mounted volume, short virtual image viewing distance, and narrow eye movement range.
  • Augmented reality head-up display based on optical waveguide can achieve advantages such as small front-mounted volume, long virtual image viewing distance, large eye movement range, and large field of view by increasing the surface area of the optical waveguide. It is a key display technology for intelligent driving and human-vehicle interaction.
  • the object of the present invention is to provide a super-structured topological optical waveguide which can improve the overall light energy utilization rate, improve the light transmission efficiency and the outcoupling efficiency, and has high outcoupling uniformity.
  • the present invention provides a metastructure topological optical waveguide, comprising a waveguide substrate, on which a metastructure in-coupling region and a topological out-coupling region are provided; the metastructure in-coupling region is provided with an in-coupling grating located on the surface of the waveguide substrate and a metamaterial layer covering the in-coupling grating; the topological out-coupling region is provided with an out-coupling grating, and the out-coupling grating includes a plurality of rows of grating units having a coupling effect, and the grating units in each row have different morphologies.
  • the metamaterial layer is a metal film layer.
  • the refractive index of the metamaterial layer is greater than 1.5.
  • the thickness of the metamaterial layer is greater than or equal to 100 nanometers.
  • the incident angle range of the light in the coupling-in region of the metastructure is -20 degrees to 20 degrees.
  • the coupling-in grating and the coupling-out grating are located on the same side surface of the waveguide substrate; and the coupling-in region of the metastructure couples light by means of transmission coupling or reflection coupling.
  • the grating unit is a nano dot matrix structure
  • each row of the grating unit includes a plurality of nano grating dots
  • the nano grating dots in the same row have the same structure
  • the nano grating dots in different rows have different structures.
  • the grating unit is a nano dot matrix structure, each row of the grating unit includes a plurality of nano grating dots, and the structure of each of the nano grating dots is different.
  • each row of the grating units extends along the x-direction of the waveguide substrate; a plurality of rows of the grating units form a two-dimensional array grating, the nano-grating points of the plurality of rows of the grating units are periodically arranged, and have a first grating orientation M and a second grating orientation N that are cross-arranged, and the angle between the first grating orientation M and the second grating orientation N is 20o to 160o.
  • metastructure coupling-in region and the topological coupling-out region are both rectangular and their width and length directions are consistent with those of the waveguide substrate, and the center lines of the metastructure coupling-in region and the topological coupling-out region coincide with each other in the y direction.
  • the morphology of the grating unit includes the shape, width, and height of each of the nano-grating points in each row of the grating units; the out-coupling conduction efficiency of the nano-grating points in the y direction increases with distance from the superstructure coupling-in region to the direction away from the superstructure coupling-in region.
  • the present invention also provides an augmented reality display device, comprising the above-mentioned metamorphic topological optical waveguide.
  • the meta-morphological topological optical waveguide provided by the present invention utilizes coupling gratings and metamaterial layers to improve the overall light energy utilization rate, produce high coupling conduction efficiency, and then greatly improve the whole-surface coupling efficiency; cooperate with the grating units with different shapes in the topological coupling area to control the whole-surface coupling uniformity point by point, effectively improve the uneven light output phenomenon, and have high coupling uniformity.
  • FIG1 is a schematic diagram of the structure of a superstructure topological optical waveguide according to a preferred embodiment of the present invention.
  • FIG2 is a schematic diagram of the structure of the superstructure coupling region of a preferred embodiment of the present invention.
  • FIG3 is a schematic diagram of a combination of image light source incident on a meta-morphological topological optical waveguide and human eye observation in a preferred embodiment of the present invention
  • FIG4 is a schematic diagram of positive and negative first-order diffraction efficiencies when no metamaterial layer is provided in the coupling-in region of the metastructure;
  • FIG5 is a simulation efficiency diagram of the superstructure coupling region shown in FIG3;
  • FIG6 is a schematic diagram showing the effect of the thickness of a metamaterial layer on diffraction efficiency
  • FIG7 is a schematic diagram showing the effect of the incident angle of light on the diffraction efficiency in the coupling-in region of the metastructure
  • FIG8 is a schematic diagram showing the effect of the incident azimuth angle of light on the diffraction efficiency in the coupling-in region of the metastructure
  • FIG9 is a schematic diagram of another combination of image light source incident on a meta-morphological topological optical waveguide and human eye observation in a preferred embodiment of the present invention.
  • FIG10 a is a simulation efficiency diagram when no metamaterial layer is provided in the coupling-in region of the metastructure shown in FIG9 ;
  • FIG10 b is a simulation efficiency diagram of the superstructure coupling region shown in FIG9 ;
  • FIG11 is a schematic structural diagram of a topological outcoupling region of a metamorphic topological optical waveguide according to a preferred embodiment of the present invention.
  • FIG12 is a schematic diagram of the conduction process of light in the topological outcoupling region of the metamorphic topological optical waveguide in a preferred embodiment of the present invention.
  • FIG13 is a schematic structural diagram of a topological outcoupling region of a metamorphic topological optical waveguide according to a preferred embodiment of the present invention.
  • FIG14 is a schematic diagram of light transmission of a superstructure topological optical waveguide according to a preferred embodiment of the present invention.
  • FIG15 is a schematic diagram of light transmission of a conventional optical waveguide
  • FIG16 is a schematic diagram of structural points within the outcoupling range of a superstructure topological optical waveguide according to a preferred embodiment of the present invention.
  • FIG17 is a trend diagram showing the variation of the out-coupling efficiency with depth and duty cycle within the out-coupling range of the meta-morphological topological optical waveguide in a preferred embodiment of the present invention.
  • FIG 1 is a schematic diagram of the structure of a metastructure topological optical waveguide according to a preferred embodiment of the present invention. Please refer to Figure 1.
  • the metastructure topological optical waveguide according to a preferred embodiment of the present invention includes a waveguide substrate 10, and a metastructure coupling-in region 20 and a topological coupling-out region 30 are provided on the waveguide substrate 10.
  • the waveguide substrate 10 has high transmittance in the visible light wavelength range and can be made of materials such as glass and resin.
  • the metastructure coupling region 20 is provided with a coupling grating 21 located on the surface of the waveguide substrate 10 and a metamaterial layer 22 covering the coupling grating 21.
  • the coupling grating 21 and the metamaterial layer 22 are used to couple light and at the same time efficiently improve the light transmitted in the waveguide substrate 10.
  • the coupling-in grating 21 is preferably a nanowire structure.
  • the nanowire structure is a linear structure, which can be a regular rectangle or an irregular shape, and is arranged in a periodic manner.
  • the x direction is defined as the width direction of the waveguide substrate 10 in the figure
  • the y direction is defined as the length direction of the waveguide substrate 10 in the figure
  • the z direction is defined as the thickness direction of the waveguide substrate 10.
  • the coupling grating 21 has a grating orientation (i.e., the channel direction of the grating).
  • the grating orientation of the coupling grating 21 is consistent with the x direction, i.e., consistent with the width direction of the waveguide substrate 10.
  • the metamaterial layer 22 is, for example, a metal film layer, such as aluminum, titanium dioxide, etc.
  • the metamaterial layer 22 is meanderingly covered on the surface of the coupling-in grating 21.
  • the refractive index of the metamaterial layer 22 is greater than 1.5.
  • the diffracted light includes zero-order diffraction light, negative first-order diffraction light, and positive first-order diffraction light.
  • FIG2 after the light passes through the metamaterial layer 22, the diffraction efficiency of the positive and negative first-order diffraction light is greatly improved, and has basically reached the diffraction efficiency of the zero-order diffraction light.
  • the metamaterial layer 22 can improve the diffraction efficiency of the positive and negative first-order diffraction light, thereby greatly improving the conduction efficiency.
  • FIG3 is a schematic diagram of a combination of incident image light source and human eye observation of a meta-structure topological optical waveguide in a preferred embodiment of the present invention.
  • the coupling-in grating 21 and the coupling-out grating are located on the same side surface of the waveguide substrate 10, but the invention is not limited thereto.
  • the image light source 40 can be incident from the structural surface of the meta-structure topological optical waveguide (the surface with the coupling-in grating 21 and the coupling-out grating), and the meta-structure coupling-in region 20 adopts a transmission coupling method for light coupling, and the human eye 50 also observes from the structural surface.
  • FIG4 is a schematic diagram of the positive and negative first-order diffraction efficiencies when the metamaterial layer is not provided in the metastructure coupling region. As shown in FIG4 , if the metastructure coupling region 20 is only provided with a coupling grating 21 (without the metamaterial layer 22), the diffraction efficiency of the positive and negative first-order diffraction light is very low at a specific wavelength due to the diffraction efficiency limited by the physical essential characteristics.
  • FIG5 is a simulation efficiency diagram of the metastructure coupling region shown in FIG3 . It can be seen from FIG5 that after the light is coupled into the metastructure coupling region 20 having the metamaterial layer 22 , the transmission efficiency of the positive and negative first-order diffraction light is greater than 30%.
  • FIG6 is a schematic diagram of the effect of the thickness of the metamaterial layer on the diffraction efficiency.
  • the thickness of the metamaterial layer 22 has a sudden change above 100 nanometers (nm), and the diffraction efficiency of the metastructure coupling region 22 is directly increased from a very low value to between 20% and 30%, and then with the increase of depth, its diffraction efficiency is stabilized in this range.
  • the thickness of the metamaterial layer 22 is preferably greater than or equal to 100 nanometers.
  • FIG7 is a schematic diagram showing the effect of the incident angle of light in the meta-structure coupling region on the diffraction efficiency.
  • the incident angle range of the light i.e., the light emitted by the image light source 40
  • the incident angle range of the light in the meta-structure coupling region 20 is preferably -20 degrees to 20 degrees.
  • Figure 8 is a schematic diagram of the effect of the incident azimuth angle of light in the metastructure coupling region on the diffraction efficiency. As shown in Figure 8, as the azimuth angle changes from 0 degrees to 360 degrees, it can be seen that the change in efficiency is consistently between 20% and 40%. That is to say, no matter from which azimuth angle the image light source 40 is incident, the effect on the diffraction efficiency of the metastructure coupling region 20 is not very large, and the metastructure coupling region 20 has a wide azimuth angle tolerance.
  • FIG9 is a schematic diagram of another combination of the image light source incident on the metastructure topological optical waveguide and the human eye observation of a preferred embodiment of the present invention, as shown in FIG9 , wherein the coupling grating 21 and the coupling out grating are located on the same side surface of the waveguide substrate 10, when the image light source 40 is incident on the metastructure coupling region 20 from the non-structure surface (the side without the coupling grating 21) of the metastructure topological optical waveguide, the light is reflectively diffracted by the metastructure coupling region 20, that is, the metastructure coupling region 20 couples the light by reflective coupling, generates the conducted light, and the human eye 50 can observe from the structure surface.
  • FIG10a is a simulation efficiency diagram when no metamaterial layer is set in the metastructure coupling region shown in FIG9
  • FIG10b is a simulation efficiency diagram of the metastructure coupling region shown in FIG9 .
  • Light is coupled in the metastructure coupling region 20 in the reflective coupling manner shown in FIG9 .
  • the coupling grating 21 is a pure nanostructure, with a period of 433 nm, a duty cycle of 0.7, and a depth of 230 nm.
  • the metamaterial layer 22 is not set in FIG10a , the reflective first-order diffraction efficiency is low.
  • the reflective first-order diffraction efficiency can be increased to 30% compared with FIG10a , which can be nearly 3 times higher than when the metamaterial layer 22 is not set.
  • the topological outcoupling region 30 is used to outcouple light.
  • the topological outcoupling region 30 is provided with an outcoupling grating, which includes multiple rows of grating units 31 with coupling effect, and each row of grating units 31 has different shapes, specifically different structural parameters such as shape, width, height, etc.
  • the grating unit 31 may be a nanowire structure or a nano dot lattice structure.
  • the nanowire structure is a linear structure, which may be a regular rectangle or an irregular shape, arranged periodically.
  • a single unit of the nano dot lattice structure may be any regular or irregular shape such as a cylinder, a square column, a trapezoidal column, etc., and may also be arranged periodically. It may be prepared by holographic interference technology, photolithography technology or nanoimprint technology.
  • the grating unit 31 is preferably a nano dot lattice structure.
  • Fig. 11 is a schematic diagram of the topological outcoupling region of the metamorphic topological optical waveguide of a preferred embodiment of the present invention, in which each row of grating units 31 is a nano dot matrix structure.
  • Each row of grating units 31 includes a plurality of nano grating dots 311, and the structures of the nano grating dots 311 in the same row are the same. Since the structures of the grating units 31 in each row are different, the structures of the nano grating dots 311 in different rows are different.
  • each nano-grating dot 311 in the topological outcoupling region 30 is different, that is, not only the structures of the nano-grating dots 311 in different rows are different, but also the structures of the nano-grating dots 311 in the same row are different. It can also be understood that there are as many types of outcoupling gratings as there are nano-grating dots 311.
  • each row of grating units 31 extends along the x direction (i.e., the width direction) of the waveguide substrate 10.
  • the multiple rows of grating units 31 form a two-dimensional array grating, and the nano-grating points 311 of the multiple rows of grating units 31 are arranged in a periodic arrangement and have a first grating orientation M and a second grating orientation N that are arranged crosswise.
  • the angle between the first grating orientation M and the second grating orientation N is 20° to 160°.
  • the x direction of the first grating orientation M forms an angle of 120°
  • the second grating orientation N forms an angle of 60° with the x direction.
  • the shape of the metastructure coupling-in region 20 and the topological coupling-out region 30 can be circular, rectangular, conical or other shapes adapted to the waveguide substrate 10.
  • the metastructure coupling-in region 20 and the topological coupling-out region 30 are both rectangular and the width and length directions are consistent with those of the waveguide substrate 10, and the center lines of the metastructure coupling-in region 20 and the topological coupling-out region 30 in the y direction coincide.
  • FIG12 is a schematic diagram of the conduction process of light in the topological out-coupling area of the meta-structure topological optical waveguide of a preferred embodiment of the present invention. Please refer to FIG11 and FIG12 together.
  • the light propagates in the topological out-coupling area 30 from the direction close to the meta-structure coupling-in area 20 to the direction away from the meta-structure coupling-in area 20.
  • the out-coupling grating of the topological out-coupling area 30 is a nano dot matrix structure.
  • the light transmitted through the coupling is obliquely entered into each row of grating units 31 at a certain angle.
  • Each nano-grating point 31 in each row of grating units 31 has multi-directional diffusion of light in the optical waveguide, including coupling to the left, coupling to the right and coupling in the center.
  • the light and the nano-grating point 311 are similar to the "topological" structure. The light continuously diffuses in multiple directions in the set direction, realizing the function of conducting while expanding the pupil.
  • the structures of the nano-grating dots 311 in each row of grating units 31 are different, by adjusting the structures of the nano-grating dots 311 in each row of grating units 31, the total energy of the outcoupled light from each row of nano-grating dots 311 can be adjusted to ensure the uniformity of light output in the entire outcoupled range.
  • Fig. 13 is a schematic diagram of the topological out-coupling region of the meta-structure topological optical waveguide of the preferred embodiment of the present invention.
  • the morphology of each row of grating units 31 is optimized and regulated, specifically including the morphology of each nano-grating point 311 in each row of grating units 31, including parameters such as shape, width, and height, so that the structure of the nano-grating points 311 in each row of grating units 31 is different, and finally the out-coupling conduction efficiency of the nano-grating points 311 in the direction from the meta-structure coupling-in region 20 to the direction away from the meta-structure coupling-in region 20 in the y direction increases with the distance, that is, the farther the nano-grating points 311 are from the meta-structure coupling-in region 20, the higher the out-coupling conduction efficiency is, and the closer the nano-grating
  • Fig. 14 is a schematic diagram of light transmission of a metamorphic topological optical waveguide according to a preferred embodiment of the present invention. It can be seen that, assuming that the topological structures at abc are designed differently, and the out-coupling transmission efficiency at c is greater than that at b, and the out-coupling transmission efficiency at b is greater than that at a. When the light passes through abc, its out-coupling efficiency can be controlled point by point, thereby achieving uniform out-coupling of the light in the z direction.
  • FIG15 is a schematic diagram of light conduction in an existing optical waveguide.
  • the structure of each row of grating units in the out-coupling region 30' is the same, it can be seen that the light is coupled in through the coupling-in region 20', regardless of whether the coupling-in region 20' is provided with a metamaterial layer 22, and is conducted in the waveguide.
  • part of the light is coupled out, and part of the light continues to be conducted in the waveguide.
  • Fig. 16 is a schematic diagram of the structure points within the outcoupling range of the metamorphic topological optical waveguide of the preferred embodiment of the present invention.
  • abcd is the morphological parameters of the nano-grating point 311 (such as the short side and long side of the rectangular grating structure, when the nano-grating point 311 is other structures, the morphological parameters have different definitions))
  • point-by-point precise efficiency modulation can be achieved, thereby achieving uniformity of outcoupling efficiency.
  • FIG17 is a trend diagram of the coupling efficiency of the meta-morphology topological optical waveguide in the coupling range of the preferred embodiment of the present invention as the depth and duty cycle change.
  • the period is set to 433nm
  • the incident wave is from 520nm
  • the long side duty cycle varies from 0.4 to 1.4
  • the short side is set to 0.6 times the long side size
  • the depth varies from 10 to 800nm. It can be seen from the simulation diagram that by modulating the long side duty cycle or depth (i.e., the height of the nano-grating point 311), a large range of coupling efficiency changes can be achieved, thereby providing a method for accurately controlling uniformity.
  • the present invention also relates to an augmented reality display device, comprising the above-mentioned metamorphic topological optical waveguide.
  • an augmented reality display device comprising the above-mentioned metamorphic topological optical waveguide.
  • Other structures of the augmented reality display device are well known to those skilled in the art and will not be described in detail here.
  • the metastructure topological optical waveguide of the present invention is provided with a metastructure coupling-in region and a topological coupling-out region on the waveguide substrate; wherein the metastructure coupling-in region is provided with a coupling-in grating located on the surface of the waveguide substrate and a metamaterial layer covering the coupling-in grating; the topological coupling-out region is provided with a coupling-out grating, and the coupling-out grating includes multiple rows of grating units with coupling effects, and the grating units in each row have different shapes.
  • the present invention utilizes the coupling-in grating and the metamaterial layer to improve the overall light energy utilization rate, generate high coupling-in conduction efficiency, and then greatly improve the whole-surface coupling-out efficiency; cooperate with the grating units with different shapes in the topological coupling-out region, control the whole-surface coupling-out uniformity point by point, effectively improve the light output unevenness phenomenon, and achieve high coupling-out uniformity.
  • the terms “installed”, “connected”, and “connected” should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components.
  • installed should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components.

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Abstract

A meta-structured and topological optical waveguide, comprising a waveguide substrate (10). The waveguide substrate (10) is provided with a meta-structured coupling-in area (20) and a topological coupling-out area (30); the meta-structured coupling-in area (20) is provided with a coupling-in grating (21) located on the surface of the waveguide substrate (10) and a metamaterial layer (22) covering the coupling-in grating (21); and the topological coupling-out area (30) is provided with a coupling-out grating, the coupling-out grating comprises a plurality of rows of grating units (31) having a coupling effect, and the forms of the grating units (31) in the respective rows are different. By means of the structure, the meta-structured and topological optical waveguide can improve the overall light energy utilization rate, can improve the light conduction efficiency and the coupling-out efficiency, and has high coupling uniformity. Also provided is an augmented reality display device comprising the meta-structured and topological optical waveguide.

Description

超构形态拓扑光波导及增强现实显示设备Super-structured topological optical waveguide and augmented reality display device 技术领域Technical Field
本发明涉及增强现实显示技术领域,特别是涉及一种超构形态拓扑光波导及增强现实显示设备。The present invention relates to the field of augmented reality display technology, and in particular to a metamorphic topological optical waveguide and an augmented reality display device.
背景技术Background technique
增强现实(Augmented Reality,AR)技术,是一种将真实世界信息和虚拟世界信息“无缝”集成的新技术,不仅展现了真实世界的信息,而且将虚拟的信息同时显示出来,两种信息相互补充、叠加。在视觉化的增强现实中,用户利用头盔显示器,把真实世界与电脑图形重合成在一起,便可以看到真实的世界围绕着它。Augmented Reality (AR) technology is a new technology that "seamlessly" integrates real-world information and virtual-world information. It not only displays real-world information, but also displays virtual information at the same time. The two types of information complement and overlap each other. In visual augmented reality, users use helmet displays to overlap the real world with computer graphics, so they can see the real world around them.
光学波导(也可简称为“光波导”)因其全反射光学特性、超薄、表面可加工结构,在增强现实领域具备广泛的应用。基于光学波导的增强现实显示已成为目前行业的主流显示技术。例如,微软开发的HoloLens,基于蝴蝶型扩瞳传导组成显示窗口,具备大视场的增强现实显示;美国Magic Leap公司开发的增强现实眼镜,基于二次单向传导光学波导设计,多片组合实现彩色显示。Optical waveguides (also referred to as "light waveguides") have a wide range of applications in the field of augmented reality due to their total reflection optical properties, ultra-thin, and surface-machinable structures. Augmented reality display based on optical waveguides has become the mainstream display technology in the industry. For example, HoloLens developed by Microsoft has a large field of view augmented reality display based on a butterfly-shaped pupil dilation conduction display window; the augmented reality glasses developed by Magic Leap in the United States are based on a secondary unidirectional conduction optical waveguide design, and a combination of multiple pieces achieves color display.
基于光学波导的增强现实显示除了应用在近眼显示领域以外,还可以应用在车载抬头显示。目前,主流的抬头显示基于几何光学空间反射的原理,具有大的前装体积、虚像视距短、眼动范围窄等缺点。基于光学波导的增强现实抬头显示,通过增大光学波导的表面积,从而可以实现小前装体积、远虚像视距、眼动范围大、视场角大等优点,是智能驾驶、人车交互的关键显示技术。In addition to being used in the field of near-eye display, augmented reality display based on optical waveguide can also be used in vehicle-mounted head-up display. At present, the mainstream head-up display is based on the principle of geometric optical space reflection, and has disadvantages such as large front-mounted volume, short virtual image viewing distance, and narrow eye movement range. Augmented reality head-up display based on optical waveguide can achieve advantages such as small front-mounted volume, long virtual image viewing distance, large eye movement range, and large field of view by increasing the surface area of the optical waveguide. It is a key display technology for intelligent driving and human-vehicle interaction.
技术问题technical problem
目前的大部分基于光学波导的增强现实显示技术,采用纳米结构衍射的传导理念,光线传导过程中浪费较多,导致整体耦出效率偏低,且耦出范围均匀性低。Most of the current augmented reality display technologies based on optical waveguides use the transmission concept of nanostructure diffraction, which results in a lot of waste in the process of light transmission, resulting in low overall coupling efficiency and low uniformity in the coupling range.
技术解决方案Technical Solutions
本发明的目的在于提供一种能提高整体光能利用率,提高光线传导效率和耦出效率,且耦出均匀性高的超构形态拓扑光波导。The object of the present invention is to provide a super-structured topological optical waveguide which can improve the overall light energy utilization rate, improve the light transmission efficiency and the outcoupling efficiency, and has high outcoupling uniformity.
本发明提供一种超构形态拓扑光波导,包括波导基底,所述波导基底上设有超构体耦入区域和拓扑形态耦出区域;所述超构体耦入区域设有位于所述波导基底表面的耦入光栅和覆盖在所述耦入光栅上的超材料层;所述拓扑形态耦出区域设有耦出光栅,所述耦出光栅包括多行存在耦合效应的光栅单元,每行所述光栅单元的形态均不相同。The present invention provides a metastructure topological optical waveguide, comprising a waveguide substrate, on which a metastructure in-coupling region and a topological out-coupling region are provided; the metastructure in-coupling region is provided with an in-coupling grating located on the surface of the waveguide substrate and a metamaterial layer covering the in-coupling grating; the topological out-coupling region is provided with an out-coupling grating, and the out-coupling grating includes a plurality of rows of grating units having a coupling effect, and the grating units in each row have different morphologies.
进一步地,所述超材料层是金属膜层。Furthermore, the metamaterial layer is a metal film layer.
进一步地,所述超材料层的折射率大于1.5。Furthermore, the refractive index of the metamaterial layer is greater than 1.5.
进一步地,所述超材料层的厚度大于或等于100纳米。Furthermore, the thickness of the metamaterial layer is greater than or equal to 100 nanometers.
进一步地,光线在所述超构体耦入区域的入射角范围为-20度至20度。Furthermore, the incident angle range of the light in the coupling-in region of the metastructure is -20 degrees to 20 degrees.
进一步地,所述耦入光栅、所述耦出光栅位于所述波导基底的同一侧表面;所述超构体耦入区域采取透射式耦入或反射式耦入的方式进行光线耦合。Furthermore, the coupling-in grating and the coupling-out grating are located on the same side surface of the waveguide substrate; and the coupling-in region of the metastructure couples light by means of transmission coupling or reflection coupling.
进一步地,所述光栅单元为纳米点阵结构,每行所述光栅单元包括多个纳米光栅点,且同一行内的所述纳米光栅点的结构相同,不同行的所述纳米光栅点的结构不相同。Furthermore, the grating unit is a nano dot matrix structure, each row of the grating unit includes a plurality of nano grating dots, and the nano grating dots in the same row have the same structure, while the nano grating dots in different rows have different structures.
进一步地,所述光栅单元为纳米点阵结构,每行所述光栅单元包括多个纳米光栅点,且每个所述纳米光栅点的结构不相同。Furthermore, the grating unit is a nano dot matrix structure, each row of the grating unit includes a plurality of nano grating dots, and the structure of each of the nano grating dots is different.
进一步地,每行所述光栅单元沿所述波导基底的x方向延伸;多行所述光栅单元形成二维阵列光栅,多行所述光栅单元的所述纳米光栅点呈周期排布设置,并具有交叉设置的第一光栅取向M和第二光栅取向N,所述第一光栅取向M与所述第二光栅取向N之间的夹角为20º至160º。Furthermore, each row of the grating units extends along the x-direction of the waveguide substrate; a plurality of rows of the grating units form a two-dimensional array grating, the nano-grating points of the plurality of rows of the grating units are periodically arranged, and have a first grating orientation M and a second grating orientation N that are cross-arranged, and the angle between the first grating orientation M and the second grating orientation N is 20º to 160º.
进一步地,所述超构体耦入区域、所述拓扑形态耦出区域均为矩形且宽度方向和长度方向与所述波导基底的一致,所述超构体耦入区域与所述拓扑形态耦出区域在y方向的中心线重合。Furthermore, the metastructure coupling-in region and the topological coupling-out region are both rectangular and their width and length directions are consistent with those of the waveguide substrate, and the center lines of the metastructure coupling-in region and the topological coupling-out region coincide with each other in the y direction.
进一步地,所述光栅单元的形态包括每行所述光栅单元内每个所述纳米光栅点的形状、宽度、高度;在y方向上从靠近超构体耦入区域向远离超构体耦入区域方向上的所述纳米光栅点的耦出传导效率依距离递增。Furthermore, the morphology of the grating unit includes the shape, width, and height of each of the nano-grating points in each row of the grating units; the out-coupling conduction efficiency of the nano-grating points in the y direction increases with distance from the superstructure coupling-in region to the direction away from the superstructure coupling-in region.
本发明还提供一种增强现实显示设备,包括上述的超构形态拓扑光波导。The present invention also provides an augmented reality display device, comprising the above-mentioned metamorphic topological optical waveguide.
有益效果Beneficial Effects
本发明提供的超构形态拓扑光波导,利用耦入光栅和超材料层提高整体光能利用率,产生高耦入传导效率,继而大幅度提高整面耦出效率;配合拓扑形态耦出区域中形态均不相同的光栅单元,逐点控制整面耦出均匀度,有效改善出光不均现象,耦出均匀性高。The meta-morphological topological optical waveguide provided by the present invention utilizes coupling gratings and metamaterial layers to improve the overall light energy utilization rate, produce high coupling conduction efficiency, and then greatly improve the whole-surface coupling efficiency; cooperate with the grating units with different shapes in the topological coupling area to control the whole-surface coupling uniformity point by point, effectively improve the uneven light output phenomenon, and have high coupling uniformity.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本发明较佳实施例的超构形态拓扑光波导的结构示意图;FIG1 is a schematic diagram of the structure of a superstructure topological optical waveguide according to a preferred embodiment of the present invention;
图2是本发明较佳实施例的超构体耦入区域的结构示意图;FIG2 is a schematic diagram of the structure of the superstructure coupling region of a preferred embodiment of the present invention;
图3是本发明较佳实施例的超构形态拓扑光波导的图像光源入射与人眼观察的一种组合方式示意图;FIG3 is a schematic diagram of a combination of image light source incident on a meta-morphological topological optical waveguide and human eye observation in a preferred embodiment of the present invention;
图4是当超构体耦入区域未设置超材料层时的正负一级衍射效率示意图;FIG4 is a schematic diagram of positive and negative first-order diffraction efficiencies when no metamaterial layer is provided in the coupling-in region of the metastructure;
图5是图3所示的超构体耦入区域的仿真效率图;FIG5 is a simulation efficiency diagram of the superstructure coupling region shown in FIG3;
图6是超材料层的厚度对于衍射效率的影响的示意图;FIG6 is a schematic diagram showing the effect of the thickness of a metamaterial layer on diffraction efficiency;
图7是光线在超构体耦入区域的入射角对于衍射效率的影响的示意图;FIG7 is a schematic diagram showing the effect of the incident angle of light on the diffraction efficiency in the coupling-in region of the metastructure;
图8是光线在超构体耦入区域的入射方位角对于衍射效率的影响的示意图;FIG8 is a schematic diagram showing the effect of the incident azimuth angle of light on the diffraction efficiency in the coupling-in region of the metastructure;
图9是本发明较佳实施例的超构形态拓扑光波导的图像光源入射与人眼观察的另一种组合方式示意图;FIG9 is a schematic diagram of another combination of image light source incident on a meta-morphological topological optical waveguide and human eye observation in a preferred embodiment of the present invention;
图10a是图9所示的超构体耦入区域未设置超材料层时的仿真效率图;FIG10 a is a simulation efficiency diagram when no metamaterial layer is provided in the coupling-in region of the metastructure shown in FIG9 ;
图10b是图9所示的超构体耦入区域的仿真效率图;FIG10 b is a simulation efficiency diagram of the superstructure coupling region shown in FIG9 ;
图11是本发明较佳实施例的超构形态拓扑光波导的拓扑形态耦出区域的一种结构示意图;FIG11 is a schematic structural diagram of a topological outcoupling region of a metamorphic topological optical waveguide according to a preferred embodiment of the present invention;
图12是本发明较佳实施例的超构形态拓扑光波导中光线在拓扑形态耦出区域的传导过程示意图;FIG12 is a schematic diagram of the conduction process of light in the topological outcoupling region of the metamorphic topological optical waveguide in a preferred embodiment of the present invention;
图13是本发明较佳实施例的超构形态拓扑光波导的拓扑形态耦出区域的一种结构示意图;FIG13 is a schematic structural diagram of a topological outcoupling region of a metamorphic topological optical waveguide according to a preferred embodiment of the present invention;
图14是本发明较佳实施例的超构形态拓扑光波导的光线传导示意图;FIG14 is a schematic diagram of light transmission of a superstructure topological optical waveguide according to a preferred embodiment of the present invention;
图15现有的一种光波导的光线传导示意图;FIG15 is a schematic diagram of light transmission of a conventional optical waveguide;
图16是本发明较佳实施例的超构形态拓扑光波导的耦出范围内结构点的示意图;FIG16 is a schematic diagram of structural points within the outcoupling range of a superstructure topological optical waveguide according to a preferred embodiment of the present invention;
图17是本发明较佳实施例的超构形态拓扑光波导的耦出范围内耦出效率随深度和占空比变化的趋势图。FIG17 is a trend diagram showing the variation of the out-coupling efficiency with depth and duty cycle within the out-coupling range of the meta-morphological topological optical waveguide in a preferred embodiment of the present invention.
本发明的实施方式Embodiments of the present invention
下面结合附图和实施例,对本发明的具体实施方式作进一步详细描述。以下实施例用于说明本发明,但不用来限制本发明的范围。The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
图1是本发明较佳实施例的超构形态拓扑光波导的结构示意图,请参阅图1,本发明较佳实施例的超构形态拓扑光波导包括波导基底10、波导基底10上设有超构体耦入区域20和拓扑形态耦出区域30。Figure 1 is a schematic diagram of the structure of a metastructure topological optical waveguide according to a preferred embodiment of the present invention. Please refer to Figure 1. The metastructure topological optical waveguide according to a preferred embodiment of the present invention includes a waveguide substrate 10, and a metastructure coupling-in region 20 and a topological coupling-out region 30 are provided on the waveguide substrate 10.
波导基底10具备在可见光波长范围内高的透过率,可以是玻璃、树脂等材料。The waveguide substrate 10 has high transmittance in the visible light wavelength range and can be made of materials such as glass and resin.
图2是本发明较佳实施例的超构体耦入区域的结构示意图,超构体耦入区域20设有位于波导基底10表面的耦入光栅21和覆盖在耦入光栅21上的超材料层22,耦入光栅21和超材料层22用于耦入光线,同时高效率地提高在波导基底10内传导的光线。2 is a schematic diagram of the structure of a metastructure coupling region of a preferred embodiment of the present invention. The metastructure coupling region 20 is provided with a coupling grating 21 located on the surface of the waveguide substrate 10 and a metamaterial layer 22 covering the coupling grating 21. The coupling grating 21 and the metamaterial layer 22 are used to couple light and at the same time efficiently improve the light transmitted in the waveguide substrate 10.
耦入光栅21优选为纳米线结构。纳米线结构为线条状结构,可以为规则的矩形,也可为不规则的形状,呈周期排布。The coupling-in grating 21 is preferably a nanowire structure. The nanowire structure is a linear structure, which can be a regular rectangle or an irregular shape, and is arranged in a periodic manner.
定义x方向为图中波导基底10的宽度方向,定义y方向为图中波导基底10的长度方向,定义z方向为波导基底10的厚度方向。本实施例中,耦入光栅21具有一个光栅取向(即光栅的沟道方向),本实施例中,耦入光栅21的光栅取向与x方向一致,即与波导基底10的宽度方向一致。The x direction is defined as the width direction of the waveguide substrate 10 in the figure, the y direction is defined as the length direction of the waveguide substrate 10 in the figure, and the z direction is defined as the thickness direction of the waveguide substrate 10. In this embodiment, the coupling grating 21 has a grating orientation (i.e., the channel direction of the grating). In this embodiment, the grating orientation of the coupling grating 21 is consistent with the x direction, i.e., consistent with the width direction of the waveguide substrate 10.
超材料层22例如是金属膜层,例如铝、二氧化钛等。超材料层22在耦入光栅21 的表面蜿蜒覆盖。本实施例中,超材料层22的折射率大于1.5。当入射光入射至超构体耦入区域20并发生衍射,衍射光线包括零级衍射光、负一级衍射光和正一级衍射光,如图2所示,光线在经过超材料层22后,正负一级衍射光的衍射效率得到了极大的提高,基本已达到零级衍射光的衍射效率,超材料层22可以提高正负一级衍射光的衍射效率,从而极大提高传导效率。The metamaterial layer 22 is, for example, a metal film layer, such as aluminum, titanium dioxide, etc. The metamaterial layer 22 is meanderingly covered on the surface of the coupling-in grating 21. In this embodiment, the refractive index of the metamaterial layer 22 is greater than 1.5. When the incident light is incident on the metastructure coupling-in region 20 and diffracted, the diffracted light includes zero-order diffraction light, negative first-order diffraction light, and positive first-order diffraction light. As shown in FIG2 , after the light passes through the metamaterial layer 22, the diffraction efficiency of the positive and negative first-order diffraction light is greatly improved, and has basically reached the diffraction efficiency of the zero-order diffraction light. The metamaterial layer 22 can improve the diffraction efficiency of the positive and negative first-order diffraction light, thereby greatly improving the conduction efficiency.
图3是本发明较佳实施例的超构形态拓扑光波导的图像光源入射与人眼观察的一种组合方式示意图,请参阅图3,在本发明实施例中,耦入光栅21、耦出光栅位于波导基底10的同一侧表面,但并不以此为限。图像光源40可以从超构形态拓扑光波导的结构面(设有耦入光栅21和耦出光栅的一面)入射,超构体耦入区域20采取透射式耦入的方式进行光线耦合,人眼50也是由结构面观察。FIG3 is a schematic diagram of a combination of incident image light source and human eye observation of a meta-structure topological optical waveguide in a preferred embodiment of the present invention. Please refer to FIG3. In the embodiment of the present invention, the coupling-in grating 21 and the coupling-out grating are located on the same side surface of the waveguide substrate 10, but the invention is not limited thereto. The image light source 40 can be incident from the structural surface of the meta-structure topological optical waveguide (the surface with the coupling-in grating 21 and the coupling-out grating), and the meta-structure coupling-in region 20 adopts a transmission coupling method for light coupling, and the human eye 50 also observes from the structural surface.
图4是当超构体耦入区域未设置超材料层时的正负一级衍射效率示意图,如图4所示,若超构体耦入区域20仅设有耦入光栅21(未设置超材料层22),限于物理本质特征的衍射效率,在特定波长处,其正负一级衍射光的衍射效率则非常低。FIG4 is a schematic diagram of the positive and negative first-order diffraction efficiencies when the metamaterial layer is not provided in the metastructure coupling region. As shown in FIG4 , if the metastructure coupling region 20 is only provided with a coupling grating 21 (without the metamaterial layer 22), the diffraction efficiency of the positive and negative first-order diffraction light is very low at a specific wavelength due to the diffraction efficiency limited by the physical essential characteristics.
图5是图3所示的超构体耦入区域的仿真效率图,通过图5可以看出,在光线经过具有超材料层22的超构体耦入区域20耦入后,正负一级衍射光的传导效率大于30%。FIG5 is a simulation efficiency diagram of the metastructure coupling region shown in FIG3 . It can be seen from FIG5 that after the light is coupled into the metastructure coupling region 20 having the metamaterial layer 22 , the transmission efficiency of the positive and negative first-order diffraction light is greater than 30%.
图6是超材料层的厚度对于衍射效率的影响的示意图,如图6所示,可以看出,超材料层22的厚度在100纳米(nm)之上有个突变,超构体耦入区域22的衍射效率直接从很低提升到20%-30%之间,之后随着深度的增加,其衍射效率稳定在该区间内。也即是说,超材料层22的厚度优选为大于或等于100纳米。FIG6 is a schematic diagram of the effect of the thickness of the metamaterial layer on the diffraction efficiency. As shown in FIG6 , it can be seen that the thickness of the metamaterial layer 22 has a sudden change above 100 nanometers (nm), and the diffraction efficiency of the metastructure coupling region 22 is directly increased from a very low value to between 20% and 30%, and then with the increase of depth, its diffraction efficiency is stabilized in this range. In other words, the thickness of the metamaterial layer 22 is preferably greater than or equal to 100 nanometers.
图7是光线在超构体耦入区域的入射角对于衍射效率的影响的示意图,如图7所示,在入射角度正负20度范围内,超构体耦入区域22的衍射效率较为均衡,表面其具备较好的角度宽容性,支持该范围内视场显示。也即是说,光线(即是图像光源40发出的光线)在超构体耦入区域20的入射角范围优选为-20度至20度。FIG7 is a schematic diagram showing the effect of the incident angle of light in the meta-structure coupling region on the diffraction efficiency. As shown in FIG7 , within the range of incident angle of plus or minus 20 degrees, the diffraction efficiency of the meta-structure coupling region 22 is relatively balanced, indicating that it has good angle tolerance and supports field display within this range. In other words, the incident angle range of the light (i.e., the light emitted by the image light source 40) in the meta-structure coupling region 20 is preferably -20 degrees to 20 degrees.
图8是光线在超构体耦入区域的入射方位角对于衍射效率的影响的示意图,如图8所示,随着方位角度0度-360度变化,可以看出效率的变化一致在20%-40%之间,也即是说,图像光源40不管从哪个方位角入射,对超构体耦入区域20的衍射效率的影响并不是很大,超构体耦入区域20具备宽广的方位角度宽容性。Figure 8 is a schematic diagram of the effect of the incident azimuth angle of light in the metastructure coupling region on the diffraction efficiency. As shown in Figure 8, as the azimuth angle changes from 0 degrees to 360 degrees, it can be seen that the change in efficiency is consistently between 20% and 40%. That is to say, no matter from which azimuth angle the image light source 40 is incident, the effect on the diffraction efficiency of the metastructure coupling region 20 is not very large, and the metastructure coupling region 20 has a wide azimuth angle tolerance.
在本发明的另一实施例中,入射光线也可以和观察方向不在同一侧。具体地,图9是本发明较佳实施例的超构形态拓扑光波导的图像光源入射与人眼观察的另一种组合方式示意图,如图9所示,其中,耦入光栅21、耦出光栅位于波导基底10的同一侧表面,当图像光源40从超构形态拓扑光波导的非结构面(未设置耦入光栅21的一面)入射至超构体耦入区域20,光线经超构体耦入区域20反射式衍射,即超构体耦入区域20采取反射式耦入的方式进行光线耦合,产生传导光,人眼50可由结构面观察。In another embodiment of the present invention, the incident light may also be on a different side from the observation direction. Specifically, FIG9 is a schematic diagram of another combination of the image light source incident on the metastructure topological optical waveguide and the human eye observation of a preferred embodiment of the present invention, as shown in FIG9 , wherein the coupling grating 21 and the coupling out grating are located on the same side surface of the waveguide substrate 10, when the image light source 40 is incident on the metastructure coupling region 20 from the non-structure surface (the side without the coupling grating 21) of the metastructure topological optical waveguide, the light is reflectively diffracted by the metastructure coupling region 20, that is, the metastructure coupling region 20 couples the light by reflective coupling, generates the conducted light, and the human eye 50 can observe from the structure surface.
图10a是图9所示的超构体耦入区域未设置超材料层时的仿真效率图,图10b是图9所示的超构体耦入区域的仿真效率图,是请一并参阅图10a和图10b,光线在超构体耦入区域20为图9所示反射式耦入的方式进行光线耦合,在入射波长520nm下,耦入光栅21为纯纳米结构、周期为433nm、占空比为0.7、深度为230nm时,图10a中未设置超材料层22时反射式一级衍射效率较低;图10b中设置有超材料层22(如厚度40nm)情况下,反射式一级衍射效率相较图10a可以提升到30%,相比于未设置超材料层22时,可以提升接近3倍的效率。FIG10a is a simulation efficiency diagram when no metamaterial layer is set in the metastructure coupling region shown in FIG9 , and FIG10b is a simulation efficiency diagram of the metastructure coupling region shown in FIG9 . Please refer to FIG10a and FIG10b together. Light is coupled in the metastructure coupling region 20 in the reflective coupling manner shown in FIG9 . At an incident wavelength of 520 nm, the coupling grating 21 is a pure nanostructure, with a period of 433 nm, a duty cycle of 0.7, and a depth of 230 nm. When the metamaterial layer 22 is not set in FIG10a , the reflective first-order diffraction efficiency is low. When the metamaterial layer 22 (such as a thickness of 40 nm) is set in FIG10b , the reflective first-order diffraction efficiency can be increased to 30% compared with FIG10a , which can be nearly 3 times higher than when the metamaterial layer 22 is not set.
拓扑形态耦出区域30用于耦出光线。 拓扑形态耦出区域30设有耦出光栅,耦出光栅包括多行存在耦合效应的光栅单元31,且每行光栅单元31的形态均不相同,具体在于形状、宽度、高度等结构参数不同。The topological outcoupling region 30 is used to outcouple light. The topological outcoupling region 30 is provided with an outcoupling grating, which includes multiple rows of grating units 31 with coupling effect, and each row of grating units 31 has different shapes, specifically different structural parameters such as shape, width, height, etc.
光栅单元31可以为纳米线结构或纳米点阵结构。纳米线结构为线条状结构,可以为规则的矩形,也可为不规则的形状,呈周期排布。纳米点阵结构的单个单元可以为圆柱、方柱、梯形柱等任何规则或不规则形状,同样呈周期排布。可以采用全息干涉技术、光刻技术或纳米压印技术制备而成。光栅单元31优选为纳米点阵结构。The grating unit 31 may be a nanowire structure or a nano dot lattice structure. The nanowire structure is a linear structure, which may be a regular rectangle or an irregular shape, arranged periodically. A single unit of the nano dot lattice structure may be any regular or irregular shape such as a cylinder, a square column, a trapezoidal column, etc., and may also be arranged periodically. It may be prepared by holographic interference technology, photolithography technology or nanoimprint technology. The grating unit 31 is preferably a nano dot lattice structure.
图11是本发明较佳实施例的超构形态拓扑光波导的拓扑形态耦出区域的一种结构示意图,图中每行光栅单元31均为纳米点阵结构。其中,每行光栅单元31包括多个纳米光栅点311,且同一行内的纳米光栅点311的结构相同,由于每行光栅单元31的结构均不相同,因此,不同行的纳米光栅点311的结构不相同。Fig. 11 is a schematic diagram of the topological outcoupling region of the metamorphic topological optical waveguide of a preferred embodiment of the present invention, in which each row of grating units 31 is a nano dot matrix structure. Each row of grating units 31 includes a plurality of nano grating dots 311, and the structures of the nano grating dots 311 in the same row are the same. Since the structures of the grating units 31 in each row are different, the structures of the nano grating dots 311 in different rows are different.
在本发明的另一实施例中,拓扑形态耦出区域30内的每个纳米光栅点311的结构均不相同,也即是说,不仅不同行的纳米光栅点311的结构不相同,且同一行内的纳米光栅点311的结构也不相同。也可以理解成,耦出光栅有多少个纳米光栅点311就有多少种形态。In another embodiment of the present invention, the structure of each nano-grating dot 311 in the topological outcoupling region 30 is different, that is, not only the structures of the nano-grating dots 311 in different rows are different, but also the structures of the nano-grating dots 311 in the same row are different. It can also be understood that there are as many types of outcoupling gratings as there are nano-grating dots 311.
进一步地,每行光栅单元31沿波导基底10的x方向(即宽度方向)延伸。多行光栅单元31形成二维阵列光栅,多行光栅单元31的纳米光栅点311呈周期排布设置,并具有交叉设置的第一光栅取向M和第二光栅取向N。Furthermore, each row of grating units 31 extends along the x direction (i.e., the width direction) of the waveguide substrate 10. The multiple rows of grating units 31 form a two-dimensional array grating, and the nano-grating points 311 of the multiple rows of grating units 31 are arranged in a periodic arrangement and have a first grating orientation M and a second grating orientation N that are arranged crosswise.
进一步地,第一光栅取向M与第二光栅取向N之间的夹角为20º至160º。具体例如,第一光栅取向M的x方向呈120º夹角,第二光栅取向N与x方向呈60º夹角。Further, the angle between the first grating orientation M and the second grating orientation N is 20° to 160°. For example, the x direction of the first grating orientation M forms an angle of 120°, and the second grating orientation N forms an angle of 60° with the x direction.
超构体耦入区域20、拓扑形态耦出区域30的形状可以为圆形、矩形、锥形或其它适应波导基底10的形状。本实施例中,超构体耦入区域20、拓扑形态耦出区域30均为矩形且宽度方向和长度方向与波导基底10的一致,并且超构体耦入区域20与拓扑形态耦出区域30在y方向的中心线重合。The shape of the metastructure coupling-in region 20 and the topological coupling-out region 30 can be circular, rectangular, conical or other shapes adapted to the waveguide substrate 10. In this embodiment, the metastructure coupling-in region 20 and the topological coupling-out region 30 are both rectangular and the width and length directions are consistent with those of the waveguide substrate 10, and the center lines of the metastructure coupling-in region 20 and the topological coupling-out region 30 in the y direction coincide.
图12是本发明较佳实施例的超构形态拓扑光波导中光线在拓扑形态耦出区域的传导过程示意图,请一并参阅图11和图12,图像光线经超构体耦入区域20耦入后朝拓扑形态耦出区域30传导,光线在拓扑形态耦出区域30内依次从靠近超构体耦入区域20向远离超构体耦入区域20方向传播,拓扑形态耦出区域30的耦出光栅为纳米点阵结构,经耦入传导的光以一定角度斜入每行光栅单元31,每行光栅单元31内的每个纳米光栅点31具备在光学波导内多向扩散的光线,包括往左边的耦出、右边的耦出和居中的耦出,光线在每个纳米光栅点31的耦出传导过程中,光线与纳米光栅点311之间形似“拓扑”结构,光线不停的在设定方向上多向扩散,实现边扩瞳边传导的功能。FIG12 is a schematic diagram of the conduction process of light in the topological out-coupling area of the meta-structure topological optical waveguide of a preferred embodiment of the present invention. Please refer to FIG11 and FIG12 together. After the image light is coupled into the meta-structure coupling-in area 20, it is conducted toward the topological out-coupling area 30. The light propagates in the topological out-coupling area 30 from the direction close to the meta-structure coupling-in area 20 to the direction away from the meta-structure coupling-in area 20. The out-coupling grating of the topological out-coupling area 30 is a nano dot matrix structure. The light transmitted through the coupling is obliquely entered into each row of grating units 31 at a certain angle. Each nano-grating point 31 in each row of grating units 31 has multi-directional diffusion of light in the optical waveguide, including coupling to the left, coupling to the right and coupling in the center. During the out-coupling conduction process of each nano-grating point 31, the light and the nano-grating point 311 are similar to the "topological" structure. The light continuously diffuses in multiple directions in the set direction, realizing the function of conducting while expanding the pupil.
由于每行光栅单元31内的纳米光栅点311的结构不相同。通过调整每行光栅单元31内的纳米光栅点311的结构,可调整每行纳米光栅点311耦出光的总能量,保证在整个耦出范围内光线输出的均匀性。Since the structures of the nano-grating dots 311 in each row of grating units 31 are different, by adjusting the structures of the nano-grating dots 311 in each row of grating units 31, the total energy of the outcoupled light from each row of nano-grating dots 311 can be adjusted to ensure the uniformity of light output in the entire outcoupled range.
具体地,图13是本发明较佳实施例的超构形态拓扑光波导的拓扑形态耦出区域的一种结构示意图。请参阅图13,在整个拓扑形态耦出区域30的范围内,为满足逐点效率控制的目的,优化调控每行光栅单元31的形态,具体包括每行光栅单元31内每个纳米光栅点311的形态,包括形状、宽度、高度等参数,使得每行光栅单元31内的纳米光栅点311的结构均不相同,最终使得在y方向上从靠近超构体耦入区域20向远离超构体耦入区域20方向上的纳米光栅点311的耦出传导效率依距离递增,即距离超构体耦入区域20越远的纳米光栅点311耦出传导效率越高、距离超构体耦入区域20越近的纳米光栅点311耦出传导效率越低,该递增变化可以是均匀的也可是是不均匀的。Specifically, Fig. 13 is a schematic diagram of the topological out-coupling region of the meta-structure topological optical waveguide of the preferred embodiment of the present invention. Please refer to Fig. 13. In the entire topological out-coupling region 30, in order to meet the purpose of point-by-point efficiency control, the morphology of each row of grating units 31 is optimized and regulated, specifically including the morphology of each nano-grating point 311 in each row of grating units 31, including parameters such as shape, width, and height, so that the structure of the nano-grating points 311 in each row of grating units 31 is different, and finally the out-coupling conduction efficiency of the nano-grating points 311 in the direction from the meta-structure coupling-in region 20 to the direction away from the meta-structure coupling-in region 20 in the y direction increases with the distance, that is, the farther the nano-grating points 311 are from the meta-structure coupling-in region 20, the higher the out-coupling conduction efficiency is, and the closer the nano-grating points 311 are to the meta-structure coupling-in region 20, the lower the out-coupling conduction efficiency is, and the incremental change can be uniform or non-uniform.
图14是本发明较佳实施例的超构形态拓扑光波导的光线传导示意图。可以看出,假设在abc三处的拓扑结构设计不一样,且c处的耦出传导效率大于b处,b处的耦出传导效率大于a处。则光线在经过abc三处的时候,可以逐点控制其耦出效率,从而达到光线在z方向上耦出均匀性。Fig. 14 is a schematic diagram of light transmission of a metamorphic topological optical waveguide according to a preferred embodiment of the present invention. It can be seen that, assuming that the topological structures at abc are designed differently, and the out-coupling transmission efficiency at c is greater than that at b, and the out-coupling transmission efficiency at b is greater than that at a. When the light passes through abc, its out-coupling efficiency can be controlled point by point, thereby achieving uniform out-coupling of the light in the z direction.
图15现有的一种光波导的光线传导示意图。当耦出区域30’内的每行光栅单元的结构相同时,可以看出,光线经由耦入区域20’耦入耦合,不管耦入区域20’是否设置有超材料层22,在波导内传导,经过耦出区域30’时,部分光线耦出,部分光线继续波导内传导。但可以知晓,若耦出结构非逐点控制的情况,则每次在z方向耦出光的总能量是依距离降低的,即会带来耦出区域效率不均的现象(靠近耦入区域20’的传导效率高,远离耦入区域20’的传导效率低)。FIG15 is a schematic diagram of light conduction in an existing optical waveguide. When the structure of each row of grating units in the out-coupling region 30' is the same, it can be seen that the light is coupled in through the coupling-in region 20', regardless of whether the coupling-in region 20' is provided with a metamaterial layer 22, and is conducted in the waveguide. When passing through the out-coupling region 30', part of the light is coupled out, and part of the light continues to be conducted in the waveguide. However, it can be known that if the out-coupling structure is not point-by-point controlled, the total energy of the light coupled out in the z direction each time is reduced according to the distance, which will lead to the phenomenon of uneven efficiency of the out-coupling region (the conduction efficiency close to the coupling-in region 20' is high, and the conduction efficiency far from the coupling-in region 20' is low).
图16是本发明较佳实施例的超构形态拓扑光波导的耦出范围内结构点的示意图。实际上,通过控制图中abcd四处参数(a为光栅周期、b为相邻两个纳米光栅点311的间距、cd为纳米光栅点311的形态参数(如矩形光栅结构的短边和长边,当纳米光栅点311为其它结构时,形态参数具有不同的定义)),即可实现逐点精确效率调制,从而实现耦出效率的均匀性。Fig. 16 is a schematic diagram of the structure points within the outcoupling range of the metamorphic topological optical waveguide of the preferred embodiment of the present invention. In fact, by controlling the parameters abcd in the figure (a is the grating period, b is the spacing between two adjacent nano-grating points 311, cd is the morphological parameters of the nano-grating point 311 (such as the short side and long side of the rectangular grating structure, when the nano-grating point 311 is other structures, the morphological parameters have different definitions)), point-by-point precise efficiency modulation can be achieved, thereby achieving uniformity of outcoupling efficiency.
图17是本发明较佳实施例的超构形态拓扑光波导的耦出范围内耦出效率随深度和占空比变化的趋势图。其中,设置周期为433nm,入射波从520nm,长边占空比0.4-1.4范围变化,短边设为0.6倍的长边尺寸,深度10-800nm范围变化。从仿真图可以看出,通过调制长边占空比或深度(即纳米光栅点311的高度),可以实现耦出效率较大范围的变动,从而为精确调控均匀度提供了方法。FIG17 is a trend diagram of the coupling efficiency of the meta-morphology topological optical waveguide in the coupling range of the preferred embodiment of the present invention as the depth and duty cycle change. Among them, the period is set to 433nm, the incident wave is from 520nm, the long side duty cycle varies from 0.4 to 1.4, the short side is set to 0.6 times the long side size, and the depth varies from 10 to 800nm. It can be seen from the simulation diagram that by modulating the long side duty cycle or depth (i.e., the height of the nano-grating point 311), a large range of coupling efficiency changes can be achieved, thereby providing a method for accurately controlling uniformity.
本发明还涉及一种增强现实显示设备,包括上述的超构形态拓扑光波导。 增强现实显示设备的其它结构为本领域技术人员所熟知,在此不再赘述。The present invention also relates to an augmented reality display device, comprising the above-mentioned metamorphic topological optical waveguide. Other structures of the augmented reality display device are well known to those skilled in the art and will not be described in detail here.
有益效果:本发明的超构形态拓扑光波导通过在波导基底上设置超构体耦入区域和拓扑形态耦出区域;其中超构体耦入区域设有位于波导基底表面的耦入光栅和覆盖在耦入光栅上的超材料层;拓扑形态耦出区域设有耦出光栅,耦出光栅包括多行存在耦合效应的光栅单元,每行光栅单元的形态均不相同。本发明利用耦入光栅和超材料层提高整体光能利用率,产生高耦入传导效率,继而大幅度提高整面耦出效率;配合拓扑形态耦出区域中形态均不相同的光栅单元,逐点控制整面耦出均匀度,有效改善出光不均现象,耦出均匀性高。Beneficial effects: The metastructure topological optical waveguide of the present invention is provided with a metastructure coupling-in region and a topological coupling-out region on the waveguide substrate; wherein the metastructure coupling-in region is provided with a coupling-in grating located on the surface of the waveguide substrate and a metamaterial layer covering the coupling-in grating; the topological coupling-out region is provided with a coupling-out grating, and the coupling-out grating includes multiple rows of grating units with coupling effects, and the grating units in each row have different shapes. The present invention utilizes the coupling-in grating and the metamaterial layer to improve the overall light energy utilization rate, generate high coupling-in conduction efficiency, and then greatly improve the whole-surface coupling-out efficiency; cooperate with the grating units with different shapes in the topological coupling-out region, control the whole-surface coupling-out uniformity point by point, effectively improve the light output unevenness phenomenon, and achieve high coupling-out uniformity.
在附图中,为了清晰起见,会夸大层和区域的尺寸和相对尺寸。应当理解的是,当元件例如层、区域或基板被称作“形成在”、“设置在”或“位于”另一元件上时,该元件可以直接设置在所述另一元件上,或者也可以存在中间元件。相反,当元件被称作“直接形成在”或“直接设置在”另一元件上时,不存在中间元件。In the drawings, the sizes and relative sizes of layers and regions are exaggerated for clarity. It should be understood that when an element, such as a layer, region, or substrate, is referred to as being "formed on," "disposed on," or "located on" another element, the element may be disposed directly on the other element, or there may be intervening elements. Conversely, when an element is referred to as being "formed directly on" or "disposed directly on" another element, there are no intervening elements.
在本文中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语的具体含义。In this document, unless otherwise specified or limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.
在本文中,术语“上”、“下”、“前”、“后”、“左”、“右”、“顶”、“底”、“内”、“外”、“竖直”、“水平”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了表达技术方案的清楚及描述方便,因此不能理解为对本发明的限制。In this document, the directions or positional relationships indicated by terms such as "up", "down", "front", "back", "left", "right", "top", "bottom", "inside", "outside", "vertical", and "horizontal" are based on the directions or positional relationships shown in the accompanying drawings and are only for the clarity of expressing the technical solutions and the convenience of description, and therefore should not be understood as limitations of the present invention.
在本文中,用于描述元件的序列形容词“第一”、“第二”等仅仅是为了区别属性类似的元件,并不意味着这样描述的元件必须依照给定的顺序,或者时间、空间、等级或其它的限制。In this document, the ordinal adjectives “first”, “second”, etc. used to describe elements are only used to distinguish elements with similar attributes, and do not mean that the elements described in this way must follow a given order, or time, space, level or other limitations.
在本文中,除非另有说明,“多个”、“若干”的含义是两个或两个以上。As used herein, unless otherwise specified, “plurality” or “several” means two or more.
在本文中,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,除了包含所列的那些要素,而且还可包含没有明确列出的其他要素。In this document, the terms "comprises," "comprising," or any other variations thereof, are intended to cover a non-exclusive inclusion of elements other than those listed and may also include additional elements not expressly listed.
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以所述权利要求的保护范围为准。The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims (12)

  1. 一种超构形态拓扑光波导,包括波导基底(10),其特征在于,所述波导基底(10)上设有超构体耦入区域(20)和拓扑形态耦出区域(30);所述超构体耦入区域(20)设有位于所述波导基底(10)表面的耦入光栅(21)和覆盖在所述耦入光栅(21)上的超材料层(22);所述拓扑形态耦出区域(30)设有耦出光栅,所述耦出光栅包括多行存在耦合效应的光栅单元(31),每行所述光栅单元(31)的形态均不相同。A metastructure topological optical waveguide comprises a waveguide substrate (10), characterized in that a metastructure in-coupling region (20) and a topological out-coupling region (30) are provided on the waveguide substrate (10); the metastructure in-coupling region (20) is provided with an in-coupling grating (21) located on the surface of the waveguide substrate (10) and a metamaterial layer (22) covering the in-coupling grating (21); the topological out-coupling region (30) is provided with an out-coupling grating, the out-coupling grating comprising a plurality of rows of grating units (31) having a coupling effect, the grating units (31) in each row having a different morphology.
  2. 如权利要求1所述的超构形态拓扑光波导,其特征在于,所述超材料层(22)是金属膜层。The metamorphic topological optical waveguide according to claim 1, characterized in that the metamaterial layer (22) is a metal film layer.
  3. 如权利要求1所述的超构形态拓扑光波导,其特征在于,所述超材料层(22)的折射率大于1.5。The metamorphic topological optical waveguide according to claim 1, characterized in that the refractive index of the metamaterial layer (22) is greater than 1.5.
  4. 如权利要求1所述的超构形态拓扑光波导,其特征在于,所述超材料层(22)的厚度大于或等于100纳米。The metamorphic topological optical waveguide according to claim 1, characterized in that the thickness of the metamaterial layer (22) is greater than or equal to 100 nanometers.
  5. 如权利要求1所述的超构形态拓扑光波导,其特征在于,光线在所述超构体耦入区域(20)的入射角范围为-20度至20度。The metamorphic topological optical waveguide as claimed in claim 1 is characterized in that the incident angle range of the light in the metamorphic coupling-in region (20) is -20 degrees to 20 degrees.
  6. 如权利要求1所述的超构形态拓扑光波导,其特征在于,所述耦入光栅(21)、所述耦出光栅位于所述波导基底(10)的同一侧表面;所述超构体耦入区域(20)采取透射式耦入或反射式耦入的方式进行光线耦合。The metastructure topological optical waveguide according to claim 1 is characterized in that the coupling-in grating (21) and the coupling-out grating are located on the same side surface of the waveguide substrate (10); and the metastructure coupling-in region (20) couples light by means of transmission coupling or reflection coupling.
  7. 如权利要求1所述的超构形态拓扑光波导,其特征在于,所述光栅单元(31)为纳米点阵结构,每行所述光栅单元(31)包括多个纳米光栅点(311),且同一行内的所述纳米光栅点(311)的结构相同,不同行的所述纳米光栅点(311)的结构不相同。The metamorphic topological optical waveguide according to claim 1, characterized in that the grating unit (31) is a nano dot matrix structure, each row of the grating units (31) comprises a plurality of nano grating dots (311), and the structures of the nano grating dots (311) in the same row are the same, while the structures of the nano grating dots (311) in different rows are different.
  8. 如权利要求1所述的超构形态拓扑光波导,其特征在于,所述光栅单元(31)为纳米点阵结构,每行所述光栅单元(31)包括多个纳米光栅点(311),且每个所述纳米光栅点(311)的结构不相同。The metamorphic topological optical waveguide according to claim 1, characterized in that the grating unit (31) is a nano-dot matrix structure, each row of the grating units (31) includes a plurality of nano-grating dots (311), and the structure of each of the nano-grating dots (311) is different.
  9. 如权利要求7或8所述的超构形态拓扑光波导,其特征在于,每行所述光栅单元(31)沿所述波导基底(10)的x方向延伸;多行所述光栅单元(31)形成二维阵列光栅,多行所述光栅单元(31)的所述纳米光栅点(311)呈周期排布设置,并具有交叉设置的第一光栅取向M和第二光栅取向N,所述第一光栅取向M与所述第二光栅取向N之间的夹角为20º至160º。The metamorphic topological optical waveguide according to claim 7 or 8, characterized in that each row of the grating units (31) extends along the x-direction of the waveguide substrate (10); a plurality of rows of the grating units (31) form a two-dimensional array grating, the nano-grating points (311) of the plurality of rows of the grating units (31) are arranged in a periodic arrangement, and have a first grating orientation M and a second grating orientation N that are arranged in a cross-arrangement, and the angle between the first grating orientation M and the second grating orientation N is 20° to 160°.
  10. 如权利要求7或8所述的超构形态拓扑光波导,其特征在于,所述超构体耦入区域(20)、所述拓扑形态耦出区域(30)均为矩形且宽度方向和长度方向与所述波导基底(10)的一致,所述超构体耦入区域(20)与所述拓扑形态耦出区域(30)在y方向的中心线重合。The metastructure topological optical waveguide according to claim 7 or 8, characterized in that the metastructure coupling-in region (20) and the topological coupling-out region (30) are both rectangular and the width and length directions are consistent with those of the waveguide substrate (10), and the center lines of the metastructure coupling-in region (20) and the topological coupling-out region (30) in the y direction coincide with each other.
  11. 如权利要求7或8所述的超构形态拓扑光波导,其特征在于,所述光栅单元(31)的形态包括每行所述光栅单元(31)内每个所述纳米光栅点(311)的形状、宽度、高度;在y方向上从靠近超构体耦入区域(20)向远离超构体耦入区域(20)方向上的所述纳米光栅点(311)的耦出传导效率依距离递增。The metastructure topological optical waveguide according to claim 7 or 8, characterized in that the shape of the grating unit (31) includes the shape, width and height of each of the nano-grating points (311) in each row of the grating units (31); and the out-coupling conduction efficiency of the nano-grating points (311) in the y direction from the direction close to the metastructure coupling-in region (20) to the direction away from the metastructure coupling-in region (20) increases with the distance.
  12. 一种增强现实显示设备,其特征在于,包括如权利要求1至11任一项所述的超构形态拓扑光波导。An augmented reality display device, characterized in that it comprises a metamorphic topological optical waveguide as described in any one of claims 1 to 11.
PCT/CN2023/082791 2022-11-22 2023-03-21 Meta-structured and topological optical waveguide and augmented reality display device WO2024108829A1 (en)

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