CN115469389B - Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device - Google Patents
Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device Download PDFInfo
- Publication number
- CN115469389B CN115469389B CN202211410461.7A CN202211410461A CN115469389B CN 115469389 B CN115469389 B CN 115469389B CN 202211410461 A CN202211410461 A CN 202211410461A CN 115469389 B CN115469389 B CN 115469389B
- Authority
- CN
- China
- Prior art keywords
- grating
- dimensional
- primitives
- bottom point
- coupling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
- G02B27/0172—Head mounted characterised by optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/005—Means for improving the coupling-out of light from the light guide provided by one optical element, or plurality thereof, placed on the light output side of the light guide
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and near-to-eye display equipment, which relate to the technical field of diffraction optics, wherein the two-dimensional coupling-out grating comprises a plurality of first primitives and a plurality of second primitives which are arranged at intervals in an array manner, and the second primitives are determined after the first primitives are integrally scaled; the first primitive is a parallelogram structure; any primitive comprises a plurality of quadrangular pyramid-shaped subunits, and each subunit is formed by intersecting two one-dimensional blazed gratings at a preset angle. The two-dimensional coupling-out grating is composed of primitives with parallelogram structures with different sizes, and each primitive comprises a subunit with a quadrangular pyramid shape formed by crossing two one-dimensional blazed gratings; due to the quadrangular pyramid-shaped structure, side light leakage in light source transmission can be reduced, and the energy utilization rate is improved; and the coupling efficiency can be adjusted through the size proportion of the two primitives, so that the energy utilization rate is further improved, and the efficient two-dimensional pupil expansion diffraction is realized.
Description
Technical Field
The invention relates to the technical field of diffraction optics, in particular to a two-dimensional coupling-out grating, a super-surface optical waveguide and near-eye display equipment.
Background
In recent years, with rapid development of computer science, human-computer interaction technologies such as Virtual Reality (VR) and augmented Reality (Augmented Reality, AR) based on near-eye display devices are becoming application hot spots. According to different interaction modes, the VR near-to-eye display device generates a virtual environment through a computer, and an observer can observe, touch and interact with things in the virtual environment; the virtual environment generated by the AR near-to-eye display equipment is superimposed into the real world, and an observer can interact with the real world while seeing the virtual environment, so that the purpose of augmented reality is realized, and therefore, the AR has stronger interaction capability relative to the VR, and has a development trend with potential in the aspects of education, medical treatment, military and the like.
The display system adopted by the AR glasses in the market at present is a combination of various micro display screens and optical elements such as prisms, free curved surfaces, birdBath, optical waveguides and the like, wherein the difference of optical combiners is a key part for distinguishing the AR display system. In combination, the optical waveguide solution has the best development potential from the perspective of optical effects, appearance and mass production prospects, and may be an alternative to letting AR glasses go to consumer level.
The main stream in optical waveguides, the nature of diffractive optical waveguides, is a technology that uses diffraction grating lenses to achieve near-to-eye display of images, the creation and popularity of which benefits from the technological advancement of optical elements from millimeter scale to micro-nanometer scale, from "stereoscopic" to "planar". However, the conventional surface relief grating has the problems of low diffraction efficiency, narrow field angle, large volume and the like.
In addition, the diffractive optical waveguide technology is further divided into one-dimensional expansion and two-dimensional expansion. For example, the HoloLens first and second generation, magicLeap One, etc. devices of Microsoft all employ One-dimensional diffractive optical waveguides. The two-dimensional diffraction optical waveguide can realize two-dimensional expansion of the exit pupil through reasonably designing the grating structure, the two-dimensional grating is adopted in the two-dimensional diffraction optical waveguide to carry out two-way pupil expansion, and the effective area of the optical waveguide can be fully utilized, but the development of the related technology of the current general two-dimensional diffraction optical waveguide needs to break through the bottleneck in terms of materials so as to improve the optical parameters, and the front and back coupling out efficiency of the common two-dimensional grating in the market is basically consistent, so that the light leakage problem exists.
Disclosure of Invention
The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and near-eye display equipment, which are used for improving the coupling-out efficiency of the grating and reducing light leakage at the outer side.
The invention provides a two-dimensional coupling-out grating, which comprises a plurality of first primitives and a plurality of second primitives which are arranged at intervals in an array manner, wherein the second primitives are determined after the first primitives are integrally scaled; the first primitive is a parallelogram structure; any primitive comprises a plurality of quadrangular pyramid-shaped subunits, and each subunit is formed by intersecting two one-dimensional blazed gratings at a preset angle.
According to the two-dimensional coupling-out grating provided by the invention, the subunits are of a convex structure or a groove structure.
According to the two-dimensional coupled grating provided by the invention, the two one-dimensional blazed gratings comprise the first blazed grating and the second blazed grating, the included angle between the first blazed grating and the vertical axis is a first included angle, the included angle between the second blazed grating and the vertical axis is a second included angle, and the sum of the first included angle and the second included angle is zero.
According to the two-dimensional coupling-out grating provided by the invention, any subunit comprises a vertex and four bottom points, wherein the four bottom points are positioned in the same plane, and the vertex is not positioned in a plane formed by the four bottom points.
According to the two-dimensional coupling-out grating provided by the invention, the four bottom points comprise a first bottom point, a second bottom point, a third bottom point and a fourth bottom point, wherein the distances between the top point and each bottom point are equal;
the distance between the first bottom point and the second bottom point is equal to the distance between the third bottom point and the fourth bottom point; the distance between the second bottom point and the third bottom point is equal to the distance between the fourth bottom point and the first bottom point.
According to the two-dimensional coupling-out grating provided by the invention, the distance between the first bottom point and the second bottom point is equal to the distance between the second bottom point and the third bottom point.
According to the two-dimensional coupling-out grating provided by the invention, the first primitive comprises a first edge, a second edge, a third edge and a fourth edge which are sequentially connected, wherein the first edge, the third edge and the first blazed grating are parallel; the second side, fourth side and second blazed grating are parallel.
According to the two-dimensional coupling-out grating provided by the invention, the material of the two-dimensional coupling-out grating comprises one of silicon oxide, silicon nitride, gallium nitride or titanium dioxide.
The invention also provides a super-surface optical waveguide, which comprises a waveguide substrate, a one-dimensional coupling-in grating and the two-dimensional coupling-out grating, wherein the one-dimensional coupling-in grating and the two-dimensional coupling-out grating are arranged on the surface of the waveguide substrate; the one-dimensional coupling grating is used for coupling incident light carrying image information into the waveguide substrate; the two-dimensional coupling-out grating is used for diffractively expanding the diffracted light which comes from the one-dimensional coupling-in grating and is conducted in a waveguide substrate in a total reflection mode along two directions so as to be coupled out to human eyes for imaging.
The invention also provides near-eye display equipment, which comprises a micro display and the super-surface optical waveguide; the microdisplay outputs incident light carrying image information.
The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and near-to-eye display equipment, which relate to the technical field of light source propagation, wherein the two-dimensional coupling-out grating comprises a plurality of first primitives and a plurality of second primitives which are arranged at intervals in an array manner, and the second primitives are determined after the first primitives are integrally scaled; the first primitive is a parallelogram structure; any primitive comprises a plurality of quadrangular pyramid-shaped subunits, and each subunit is formed by intersecting two one-dimensional blazed gratings at a preset angle. The two-dimensional coupling-out grating is composed of primitives with parallelogram structures with different sizes, and each primitive comprises a subunit with a quadrangular pyramid shape formed by crossing two one-dimensional blazed gratings; due to the quadrangular pyramid-shaped structure, side light leakage in light source transmission can be reduced, and the energy utilization rate is improved; and the coupling efficiency can be adjusted through the size proportion of the two primitives, so that the energy utilization rate is further improved, and the efficient two-dimensional pupil expansion diffraction is realized.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a two-dimensional outcoupling grating according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of one embodiment of two blazed gratings in a two-dimensional outcoupling grating according to the present invention;
FIG. 3 is a schematic cross-sectional view of one embodiment of a blazed grating of the present invention;
FIG. 4 is a schematic diagram of a two-dimensional outcoupling grating neutron unit according to an embodiment of the present invention;
FIG. 5 is a schematic top view of one embodiment of a super surface optical waveguide of the present invention;
FIG. 6 is a schematic side view of one embodiment of a super surface optical waveguide of the present invention;
FIG. 7 is a graph showing coupling-out efficiency versus visible wavelength for a subsurface optical waveguide according to an embodiment of the invention;
FIG. 8 is a graph showing coupling efficiency versus angle of incidence for a subsurface optical waveguide according to an embodiment of the invention;
FIG. 9 is a graph of angle of view versus refractive index for a subsurface optical waveguide according to an embodiment of the invention.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of an embodiment of a two-dimensional coupling-out grating according to the present invention. In this embodiment, the two-dimensional outcoupling grating may include first cells 10 and second cells 20 arranged in an array at intervals.
Wherein the second primitive 20 is determined after overall scaling of the first primitive 10; the first primitive 10 is a parallelogram structure; any primitive comprises a plurality of quadrangular pyramid-shaped subunits, and each subunit is formed by intersecting two one-dimensional blazed gratings at a preset angle.
The parallelogram primitive structure has the advantage of simple manufacturing process, and because the shape of the parallelogram primitive structure is simple, the manufacturing robustness is improved, the small deviation of the dimension of the parallelogram primitive structure in the manufacturing process does not greatly influence the performance reduction, the manufacturing process selectivity is increased, and modes such as photoetching, masking and the like can be adopted, so that details are omitted.
The second primitive 20 is the same as the first primitive 10 in shape and different in size. In the same direction, the distances between the adjacent second cells 20 are equal, the distances between the adjacent first cells 10 are equal, and the distances between the adjacent first cells 10 and second cells 20 are also equal.
Alternatively, the graphic centers of the plurality of second cells 20 and the plurality of first cells 10 may be connected in a straight line in the same direction, and it is to be noted that the directions in this embodiment may include a horizontal direction, a vertical direction, a first blazed grating direction, and a second blazed grating direction.
The two one-dimensional blazed gratings forming the subunit comprise a first blazed grating B1 and a second blazed grating B2, wherein the included angle between the first blazed grating B1 and the vertical axis is a first included angle a, the included angle between the second blazed grating and the vertical axis is a second included angle B, and the sum of the first included angle a and the second included angle B is zero.
In this embodiment, the angle value has a negative number, wherein a positive angle is an angle obtained clockwise from the vertical axis to the horizontal axis, and a negative angle is an angle obtained counterclockwise from the vertical axis to the horizontal axis. Thus, it can be understood that the first included angle a is a negative angle and the second included angle b is a positive angle; the first included angle a and the second included angle b have the same numerical value and different signs, so that the sum of the first included angle a and the second included angle b is zero.
Optionally, the first included angle a ranges from-10 ° to-75 °, and the second included angle b ranges from 10 ° to 75 °. Preferably, the first included angle a ranges from-30 ° to-60 °; the second included angle b ranges from 30 deg. to 60 deg..
When the grating is scored into a zigzag line groove cross section, the light energy of the grating is concentrated in a predetermined direction, i.e. at a certain spectral level. When detected from this direction, the intensity of the spectrum is maximized, a phenomenon known as blaze, and a grating known as blazed grating.
In a blazed grating thus engraved, the diffracting groove surface is a smooth plane, which makes an angle with the surface of the grating, called blaze angle. The wavelength corresponding to the maximum light intensity is called blaze wavelength (blaze wavelength). By the design of the blaze angle, the grating can be applied to a certain level spectrum of a specific wave band.
Blazed gratings are a specific reflective or projection diffraction grating structure designed to produce maximum diffraction efficiency at a specific diffraction order. The optical power is mostly at the designed diffraction order, while the loss of optical power at other levels (especially zero order) is minimal. In this embodiment two one-dimensional blazed gratings are used to cross at a preset angle to form a subunit. The preset angle is understood to be the sum of the absolute value of the first angle a and the absolute value of the second angle b.
In addition, the blazed grating in the present embodiment may be a super-surface grating, and referring to fig. 2, fig. 2 is a schematic diagram of one embodiment of two blazed gratings in the two-dimensional coupling-out grating of the present invention.
Each blazed grating comprises two strip-shaped units with different widths, each strip-shaped unit can be a micro-nano structure with a triangular cross section, and the two strip-shaped units with different widths can have the same height.
Referring to fig. 3, fig. 3 is a schematic cross-sectional structure of a blazed grating according to an embodiment of the present invention.
Alternatively, the width d2 of the small sawtooth structures in the blazed grating is between 10nm and 500nm, and the width d1 of the large sawtooth structures in the blazed grating is between 80nm and 1000 nm. The height of the small sawtooth structures is approximately the same as the height h of the large sawtooth structures, which is between 10nm and 500 nm. With continued reference to fig. 2, the coupling between two strip-shaped units of smaller width may form the second primitive 20, the coupling between two strip-shaped units of larger width may form the first primitive 10, and the coupling between two strip-shaped units of different widths may be negligible.
Any primitive includes a plurality of quadrangular pyramid shaped sub-units, and in some embodiments, any sub-unit may include a vertex and four bottoms, please refer to fig. 4, fig. 4 is a schematic structural diagram of an embodiment of a two-dimensional coupled-out grating sub-unit according to the present invention.
Since the one-dimensional blazed grating has a zigzag structure, a sub-unit formed by intersecting two one-dimensional blazed gratings has a quadrangular pyramid shape.
Optionally, the subunit is a raised structure or a recessed structure. The two-dimensional coupling-out grating can be arranged on the surface of the substrate, wherein when the subunits are of a convex structure, four bottom points are arranged on the surface of the substrate; when the subunit is in a groove structure, the vertex is arranged on the surface of the substrate.
Wherein, the convex structure can be a tiny ridge and a microscopic protrusion; the groove structure may be a minute groove or a microscopic depression.
Specifically, the quadrangular pyramid structure of the subunit may include a vertex P, a first bottom point a, a second bottom point B, a third bottom point C, and a fourth bottom point D. Wherein the four bottom points are located in the same plane ABCD, and the vertex P is not located in the plane ABCD formed by the four bottom points.
Optionally, the distance between the vertex P and each bottom point is equal, i.e. ap=bp=cp=dp.
Optionally, the distance between the first bottom point and the second bottom point is equal to the distance between the third bottom point and the fourth bottom point; the distance between the second bottom point and the third bottom point and the distance between the fourth bottom point and the first bottom point are equal, namely ab=cd, bc=ad, and the four bottom points form a parallelogram.
Optionally, the distance between the first bottom point and the second bottom point and the distance between the second bottom point and the third bottom point are equal, i.e. ab=bc, where the four bottom points form a diamond.
Optionally, the first primitive comprises a first edge, a second edge, a third edge and a fourth edge connected in sequence, wherein the first edge, the third edge and the first blazed grating are parallel; the second side, fourth side and second blazed grating are parallel. The two-dimensional outcoupling grating may be made of a material having high transmittance in the visible light band, for example, silicon oxide, silicon nitride, gallium nitride, titanium oxide, etc. having a refractive index of more than 1.5.
The present invention further provides a super-surface optical waveguide, referring to fig. 5-6, fig. 5 is a schematic top view of an embodiment of the super-surface optical waveguide of the present invention, and fig. 6 is a schematic side view of an embodiment of the super-surface optical waveguide of the present invention. In an embodiment, the super surface optical waveguide includes a waveguide substrate 30, and a one-dimensional in-grating 40 and the two-dimensional out-grating 50 disposed on the surface of the waveguide substrate.
The one-dimensional coupling-in grating 40 is used for coupling incident light carrying image information into the waveguide substrate 30, and the two-dimensional coupling-out grating 50 is used for diffractively expanding diffracted light which comes from the one-dimensional coupling-in grating 40 and is conducted in a total reflection mode in the waveguide substrate 30 along two directions so as to be coupled out to human eyes for imaging.
The one-dimensional incoupling grating 40 may be any high-efficiency grating, and the waveguide substrate 30 is a light-transmitting substrate, for example, glass. The higher refractive index of the glass material is beneficial to realizing total reflection of internal light, thereby being beneficial to carrying light entering from the one-dimensional coupling-in grating 40 to the two-dimensional coupling-out grating 50.
Alternatively, the one-dimensional in-grating 40 and the two-dimensional out-grating 50 may be considered as photolithographic patterning of thin films of high refractive index material deposited on the waveguide substrate 30.
The two-dimensional out-coupling grating 50 comprises a plurality of first primitives and a plurality of second primitives which are arranged at intervals in an array manner, wherein the second primitives are determined after the first primitives are integrally scaled, so that the out-coupling efficiency of the two-dimensional out-coupling grating can be adjusted by changing the sizes and the proportions of the first primitives and the second primitives; in addition, any primitive comprises a plurality of quadrangular pyramid-shaped subunits, and the subunits can be regarded as being formed by intersecting two one-dimensional blazed gratings at a preset angle; due to the characteristics of the blazed grating, the light energy of the grating can be concentrated in a preset direction, so that the side light leakage in the light source transmission process can be reduced by adjusting the structure of the subunit, the energy utilization rate is improved, and the privacy is also improved.
In some embodiments, the incident light coupled into the super surface optical waveguide has a wavelength in the range of 450nm to 650nm.
In some embodiments, the incident angle of the incident light coupled into the super surface optical waveguide is 40 ° to 70 °.
As shown in fig. 6, T1 is the image source light coupled into the human eye, R1 is the outside leakage light, R is the light that continues to undergo total reflection, and is relatively uniform.
For simulation of the super-surface optical waveguide of the present embodiment, please refer to fig. 7 to 9, fig. 7 is a schematic diagram of the relationship between the coupling-out efficiency and the visible light wavelength of the super-surface optical waveguide of the present embodiment, fig. 8 is a schematic diagram of the relationship between the coupling-out efficiency and the incident angle of the super-surface optical waveguide of the present embodiment, and fig. 9 is a schematic diagram of the relationship between the field angle and the refractive index of the super-surface optical waveguide of the present embodiment.
As shown in fig. 7, T1 is much larger than R1 between 450nm and 650nm in visible light, and even leakage light is an order of magnitude smaller than the image source light in the red and blue bands.
As shown in fig. 8, in the range of 40 ° to 70 ° of the coupling-in light, it is apparent that R1 is smaller and the leakage light is reduced.
As shown in fig. 9, the angle of view of the super surface optical waveguide of the present embodiment gradually increases with an increase in refractive index.
The invention also provides near-eye display equipment, which comprises a micro display and the super-surface optical waveguide; the microdisplay outputs incident light carrying image information. The details of the foregoing embodiments are not repeated herein.
The near-eye display device may include a head-mounted device, such as one of augmented reality glasses and an augmented reality helmet.
The invention provides a two-dimensional coupling-out grating, a super-surface optical waveguide and near-to-eye display equipment, which relate to the technical field of light source propagation, wherein the two-dimensional coupling-out grating comprises first primitives and second primitives which are arranged at intervals in an array manner, and the second primitives are determined after the first primitives are integrally scaled; the first primitive is a parallelogram structure; any primitive comprises a plurality of quadrangular pyramid-shaped subunits, and each subunit is formed by intersecting two one-dimensional blazed gratings at a preset angle. The two-dimensional coupling-out grating is composed of primitives with parallelogram structures with different sizes, and each primitive comprises a subunit with a quadrangular pyramid shape formed by crossing two one-dimensional blazed gratings; due to the quadrangular pyramid-shaped structure, side light leakage in light source transmission can be reduced, and the energy utilization rate is improved; the coupling efficiency can be adjusted through the size proportion of the two primitives, the energy utilization rate is further improved, the light leakage at the outer side can be reduced, the problem of image leakage is solved, and the privacy safety is protected; the two-way pupil expansion is realized, and the blank area of the lens is fully utilized; compared with the traditional diffraction optical waveguide, the two-dimensional coupling grating has more parameters, is easier to regulate and control, and improves consistency; in addition, the two-dimensional diffraction grating, the super-surface optical waveguide and the near-eye display device are compatible with a semiconductor manufacturing process, and can realize mass production.
The apparatus embodiments described above are merely illustrative, wherein the elements illustrated as separate elements may or may not be physically separate, and the elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. Those of ordinary skill in the art will understand and implement the present invention without undue burden.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (8)
1. The two-dimensional coupled grating is characterized by comprising a plurality of first primitives and a plurality of second primitives which are arranged at intervals in an array manner, wherein the second primitives are determined after the first primitives are integrally scaled; the first primitive is in a parallelogram structure;
any primitive comprises a plurality of quadrangular pyramid-shaped subunits, wherein the subunits are formed by intersecting two one-dimensional blazed gratings at a preset angle;
the blazed grating comprises a small sawtooth structure and a large sawtooth structure, wherein the heights of the small sawtooth structure and the large sawtooth structure are the same, and the height of the small sawtooth structure and the large sawtooth structure is in a range of 10nm to 500 nm; the width of the small sawtooth structure is in the range of 10nm to 500 nm; the width of the large sawtooth structure is in the range of 80nm to 1000 nm;
the two one-dimensional blazed gratings comprise a first blazed grating and a second blazed grating, wherein the included angle between the first blazed grating and a vertical axis is a first included angle, the included angle between the second blazed grating and the vertical axis is a second included angle, and the sum of the first included angle and the second included angle is zero; the first included angle ranges from-30 degrees to-60 degrees, and the second included angle ranges from 30 degrees to 60 degrees;
in the same direction, the distances between the adjacent second primitives are equal, the distances between the adjacent first primitives are equal, and the distances between the adjacent first primitives and the adjacent second primitives are also equal; in the same direction, the graphic centers of the second primitives and the first primitives are connected into a straight line; the directions comprise a horizontal direction, a vertical direction, a direction along the first blazed grating and a direction along the second blazed grating;
the first primitive comprises a first edge, a second edge, a third edge and a fourth edge which are sequentially connected, wherein the first edge, the third edge and the first blazed grating are parallel; the second side, the fourth side and the second blazed grating are parallel.
2. The two-dimensional outcoupling grating of claim 1, wherein said subunits are of a convex structure or a concave structure.
3. The two-dimensional outcoupling grating of claim 1, wherein,
any subunit comprises a vertex and four bottom points, wherein the four bottom points are positioned in the same plane, and the vertex is not positioned in a plane formed by the four bottom points.
4. The two-dimensional outcoupling grating of claim 3, wherein,
the four bottom points comprise a first bottom point, a second bottom point, a third bottom point and a fourth bottom point, wherein the distance between the top point and each bottom point is equal;
the distance between the first bottom point and the second bottom point is equal to the distance between the third bottom point and the fourth bottom point; the distance between the second bottom point and the third bottom point is equal to the distance between the fourth bottom point and the first bottom point.
5. The two-dimensional outcoupling grating of claim 4, wherein,
the distance between the first bottom point and the second bottom point is equal to the distance between the second bottom point and the third bottom point.
6. The two-dimensional outcoupling grating of claim 1, wherein,
the two-dimensional coupling-out grating material comprises one of silicon oxide, silicon nitride, gallium nitride and titanium dioxide.
7. A super-surface optical waveguide, comprising: a waveguide substrate, and a one-dimensional coupling-in grating and a two-dimensional coupling-out grating as claimed in any one of claims 1 to 6 arranged on a surface of the waveguide substrate;
the one-dimensional coupling grating is used for coupling incident light carrying image information into the waveguide substrate; the two-dimensional coupling-out grating is used for diffractively expanding the diffracted light which is from the one-dimensional coupling-in grating and is conducted in the waveguide substrate in a total reflection mode along two directions so as to be coupled out to human eye imaging.
8. A near-eye display device comprising a microdisplay and the super-surface optical waveguide of claim 7; the microdisplay outputs incident light carrying image information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211410461.7A CN115469389B (en) | 2022-11-11 | 2022-11-11 | Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211410461.7A CN115469389B (en) | 2022-11-11 | 2022-11-11 | Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115469389A CN115469389A (en) | 2022-12-13 |
| CN115469389B true CN115469389B (en) | 2023-04-25 |
Family
ID=84338139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211410461.7A Active CN115469389B (en) | 2022-11-11 | 2022-11-11 | Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115469389B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116299815B (en) * | 2023-05-22 | 2023-09-05 | 北京亮亮视野科技有限公司 | Two-dimensional diamond grating, optical waveguide and near-eye display device for inhibiting high-order light |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022078072A1 (en) * | 2020-10-13 | 2022-04-21 | Oppo广东移动通信有限公司 | Diffraction grating structure, imaging device, and wearable device |
| CN114355613A (en) * | 2022-01-06 | 2022-04-15 | 西湖大学 | Optical device for diffraction waveguide type augmented reality glasses and application |
| CN114415288A (en) * | 2022-01-11 | 2022-04-29 | 北京耐德佳显示技术有限公司 | Waveguide optical module and near-to-eye display equipment |
| CN114185174B (en) * | 2022-02-16 | 2022-07-26 | 北京亮亮视野科技有限公司 | Augmented reality display device and head-mounted equipment |
| CN115166884B (en) * | 2022-09-08 | 2022-11-29 | 北京亮亮视野科技有限公司 | Two-dimensional super-surface grating, two-dimensional diffraction optical waveguide and near-to-eye display device |
-
2022
- 2022-11-11 CN CN202211410461.7A patent/CN115469389B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN115469389A (en) | 2022-12-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN115166884B (en) | Two-dimensional super-surface grating, two-dimensional diffraction optical waveguide and near-to-eye display device | |
| CN115201955B (en) | Two-dimensional coupling-out super-surface grating, two-dimensional diffraction optical waveguide and near-to-eye display device | |
| CN217639770U (en) | Image combiner and AR near-to-eye display optical system | |
| CN113359300B (en) | Thin film type near-to-eye display system and glasses with built-in display system | |
| CN114637067B (en) | Diffractive optical waveguide and display device | |
| WO2021169405A1 (en) | Optical waveguide lens capable of multi-directional diffraction expansion, and augmented reality display device | |
| CN114859555A (en) | Grating, optical waveguide for near-eye display and near-eye display equipment | |
| CN115542446A (en) | Super surface grating, two-dimensional diffraction optical waveguide, and near-to-eye display device | |
| CN114994819A (en) | Two-dimensional super surface grating, optical waveguide and head-mounted device based on multiple elements | |
| US11867912B2 (en) | Metasurface waveguide couplers | |
| CN115469389B (en) | Two-dimensional coupling-out grating, super-surface optical waveguide and near-to-eye display device | |
| CN115079323A (en) | Two-dimensional coupling-out grating, two-dimensional diffraction optical waveguide, and near-to-eye display device | |
| CN115453676B (en) | Fork-shaped two-dimensional grating, two-dimensional diffraction optical waveguide and near-eye display device | |
| CN114355613A (en) | Optical device for diffraction waveguide type augmented reality glasses and application | |
| US20240210612A1 (en) | Waveguide display system with wide field of view | |
| CN116719169B (en) | Diffraction grating waveguide and augmented reality display device | |
| CN115808732B (en) | Two-dimensional diffraction grating, two-dimensional diffraction optical waveguide, and near-eye display device | |
| CN216083281U (en) | Holographic waveguide sheet and augmented reality head-up display device | |
| US20230400618A1 (en) | Single mode full color waveguide combiner using asymmetric transmissive and reflective diffraction gratings | |
| CN115453755A (en) | Near-eye display optical waveguide and near-eye display device | |
| CN116299816B (en) | Fork-shaped super-surface grating, optical waveguide and near-eye display device for inhibiting high-grade light | |
| CN116299815B (en) | Two-dimensional diamond grating, optical waveguide and near-eye display device for inhibiting high-order light | |
| CN115128720B (en) | Two-dimensional super-surface grating, optical waveguide, display device and head-mounted equipment | |
| CN216979438U (en) | Optical waveguide and near-to-eye display device | |
| CN114200571B (en) | Optical waveguide and head-mounted device with two super-surface gratings |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |