WO2024090139A1 - Processing system and cage for processing - Google Patents

Processing system and cage for processing Download PDF

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Publication number
WO2024090139A1
WO2024090139A1 PCT/JP2023/035630 JP2023035630W WO2024090139A1 WO 2024090139 A1 WO2024090139 A1 WO 2024090139A1 JP 2023035630 W JP2023035630 W JP 2023035630W WO 2024090139 A1 WO2024090139 A1 WO 2024090139A1
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WO
WIPO (PCT)
Prior art keywords
processing
cage
tank
cage body
objects
Prior art date
Application number
PCT/JP2023/035630
Other languages
French (fr)
Japanese (ja)
Inventor
悠樹 中村
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ヒューグル開発株式会社
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Publication of WO2024090139A1 publication Critical patent/WO2024090139A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

Definitions

  • the present invention relates to a processing system that uses a robot to process multiple objects, and a processing cage for subjecting multiple objects to processing such as cleaning.
  • a case cleaning device described in Patent Document 1 is known in the art.
  • This case cleaning device cleans FOUPs (Front Opening Unified Pods) defined by the SEMI (Semiconductor Equipment and Materials International) standard as case bodies (containers) that house multiple semiconductor wafers.
  • a robot grasps the gripping part (OHT head) provided on the top surface of the FOUP, transports the FOUP, and sets it in a cleaning tank. The FOUP set in the cleaning layer is then cleaned in the cleaning layer.
  • OHT head gripping part
  • the present invention was made in consideration of these circumstances, and relates to a processing system that can efficiently process multiple objects using a robot.
  • the present invention also provides a processing cage that allows the robot to efficiently transport the material to the processing tank.
  • the processing system comprises a processing cage having a cage body that contains multiple objects to be processed with gaps therebetween and a gripping portion provided on the cage body, a processing tank capable of containing the processing cage and processing the multiple objects to be processed contained in the processing cage, and a robot that grips the gripping portion, transports the processing cage set in a predetermined position to the processing tank, and sets it in the processing tank.
  • the robot that holds the gripping part transports the processing cage (cage body) containing multiple objects to be processed with gaps between them from a predetermined position to the processing tank, and sets it in the processing tank.
  • the processing tank In the processing tank, the multiple objects to be processed contained in the processing cage are processed.
  • the cage body in the processing cage can be configured to have a holding structure that holds multiple non-thick objects, each of which has a large surface area relative to its thickness, arranged at a predetermined interval.
  • the robot that holds the gripping part transports the cage body (processing cage) in which multiple non-thick objects are held at a predetermined interval by the holding structure to the processing tank and sets it in the processing tank. Then, in the processing tank, the multiple non-thick objects held by the holding structure in the cage body are processed.
  • the holding structure in the cage body can be configured to include a support structure that supports the outer periphery of each of the non-thick objects.
  • the cage body has a three-dimensional shape surrounded by a top and a bottom arranged to face each other, two side parts arranged to face each other, and a front part and a rear part arranged to face each other, the gripping part is provided on the top part, and the support structure can be configured to include portions formed on the two side parts so as to support the outer periphery of each of the plurality of non-thick objects arranged at a predetermined interval between the top part and the bottom part.
  • the three-dimensional cage body holds a number of non-thick objects arranged at a predetermined interval between the top and bottom, with the outer edges of each object supported by portions formed on the two sides of the support structure. Then, the cage body (processing cage) holding the non-thick objects as described above is transported to a processing tank by a robot that grasps the gripping portion provided at the top. Then, in the processing tank, the non-thick objects arranged at a predetermined interval between the top and bottom of the cage body are processed.
  • each of the two sides of the cage body includes a side panel
  • the portions of the support structure formed on the two sides include multiple shelves formed on the inner surface of the side panels at a predetermined interval in the vertical direction, and each shelf in the side panel corresponding to one of the two sides faces directly against one of the shelves in the side panel corresponding to the other of the two sides.
  • the cage body holds a number of non-thick objects arranged at a predetermined interval between the top and bottom, with the outer edge of one of the non-thick objects being supported by each step of the shelf formed on the inside of each of the side panels of the two sides.
  • the non-thick objects held in this state within the cage body (processing cage) are then processed in the processing tank.
  • the rear part of the cage body can be configured to include multiple shelves formed on its inner surface at a predetermined interval in the vertical direction, and each shelf is located at the same height as one of the shelves formed on the side panels corresponding to each of the two sides.
  • the cage body holds a number of non-thick objects arranged at a predetermined interval between the top and bottom, with the outer edges of each of the non-thick objects supported by the steps of the shelf portion formed on the inside of each of the side panels of the two sides and the steps of the same height as the steps of the shelf portion of the side panel of the shelf portion formed on the inside of the rear.
  • the non-thick objects held in this state within the cage body (processing cage) are then processed in the processing tank.
  • the front part of the cage body can be configured to include a holding member as the holding structure that can move between a holding position that holds down the edges of each of the non-thick objects arranged at a predetermined interval between the top and bottom parts and a position that releases the holding down of the edges of each of the non-thick objects.
  • the outer edges of multiple non-thick objects arranged at a specified interval between the top and bottom are supported by the steps of the shelves formed on the inside of each of the side panels of the two sides and the steps of the shelves formed on the inside of the rear, and the multiple non-thick objects are held with the edges of each non-thick object pressed down by the pressing member (front part) in the pressing position.
  • the multiple non-thick objects held in the cage body (processing cage) are processed in the processing tank.
  • each non-thick object can be stored in and removed from the cage body before and after processing.
  • the side panel of the cage body may be configured to have a plurality of through holes penetrating the side panel.
  • the processing liquid can be supplied to the cage body in the processing tank through the through holes that penetrate the side panels. This allows the processing liquid to be supplied to multiple non-thick objects that are arranged at a predetermined interval between the top and bottom of the cage body.
  • each of the plurality of through holes may be arranged between two adjacent steps of the shelf portion.
  • This configuration ensures that the treatment liquid can be reliably applied through the through holes to each of the multiple non-thick objects whose peripheral edges are supported on each step of the shelf section of each of the side panels on the two sides of the cage body within the treatment tank.
  • the non-thick object can be a hollow ring-shaped frame body, and the bottom of the cage body can have a hollow ring-shaped frame structure.
  • the treatment liquid can be supplied from inside the multiple non-thick objects arranged at a predetermined interval between the top and bottom through the hollow portion of the bottom of the cage body having a hollow ring-shaped frame structure and the hollow portions of the multiple non-thick objects, each of which is a hollow ring-shaped frame body, in the treatment tank.
  • the processing tank can be configured to include a table on which the processing cage is set with the bottom facing downwards, a rotation drive unit that rotates the table around an axis perpendicular to the surface of the table, and a processing liquid ejection unit that is arranged around the processing cage set on the table and ejects processing liquid.
  • the robot holding the gripping part sets the cage body (processing cage) with its bottom facing down on the table in the processing tank, and the table on which the cage body (processing cage) is set is rotated by the rotation drive part.
  • Multiple non-thick objects held within the cage body, which rotates with the rotation of the table, are processed by processing liquid sprayed from processing liquid spray parts provided around the processing cage.
  • the processing tank can be configured to include a table on which the processing cage is set with the bottom facing down, a rotation drive unit that rotates the table around an axis perpendicular to the surface of the table, and a peripheral processing liquid ejection unit that is disposed opposite the side panel of the cage body of the processing cage set on the table and ejects processing liquid.
  • the robot holding the gripping part sets the cage body (processing cage) with its bottom facing down on the table in the processing tank, and the table on which the cage body (processing cage) is set is rotated by the rotation drive part.
  • Processing liquid ejected from the side processing liquid ejection part is sprayed onto the processing cage (cage body) which rotates with the table, and some of the processing liquid is given to each of the multiple non-thick objects through the through holes located between each adjacent step of the shelf part of each of the two side panels of the case body. In this way, the multiple non-thick objects stored in the processing cage are processed with the processing liquid.
  • the processing tank can be configured to include a table on which the processing cage is set with the bottom facing downwards, a rotation drive unit that rotates the table around an axis perpendicular to the surface of the table, and an inner processing liquid ejection unit that is disposed within the cage body through the bottom of the cage body having the hollow annular frame structure of the processing cage set on the table and ejects processing liquid.
  • the robot holding the gripper sets the cage body (processing cage) with its bottom facing down on the table in the processing tank.
  • the inner processing liquid jetting part is placed inside the cage body through the hollow part of the bottom of the cage body, which has a hollow ring-shaped frame structure, and the hollow parts of the multiple non-thick objects, each of which is a hollow ring-shaped frame body.
  • the table on which the cage body (processing cage) is set is rotated by the rotation drive part.
  • the processing liquid jetted from the inner processing liquid jetting part which is placed inside the cage body (processing cage) that rotates with the table, is sprayed from the inside of the multiple non-thick objects that are placed at a predetermined interval between the top and bottom inside the cage body. In this way, the multiple non-thick objects contained in the processing cage are processed with the processing liquid.
  • the gripping portion of the processing cage can be configured to have a shape that allows it to be grasped by a robot that grasps a gripping portion provided on a FOUP (Front Opening Unified Pod) defined by the SEMI (Semiconductor Equipment and Materials International) standard and transports the FOUP to a FOUP processing tank.
  • FOUP Front Opening Unified Pod
  • SEMI semiconductor Equipment and Materials International
  • a robot that grasps the gripper provided on the cage body and transports the processing cage can be used as a robot that grasps the gripper provided on a FOUP and transports the FOUP to a FOUP processing tank.
  • the processing cage can be configured to have an external shape that allows it to be set in a FOUP cleaning tank for processing FOUPs as defined by SEMI standards.
  • the FOUP processing tank for processing FOUPs can be used as a processing tank for processing multiple objects to be processed housed in the processing cage (cage body).
  • the processing cage according to the present invention has a cage body that houses multiple objects to be processed with gaps between them, and a gripping part that is provided on the cage body and can be gripped by a robot, and is transported to a processing tank by the robot gripping the gripping part, and the multiple objects to be processed are subjected to processing in the processing tank.
  • the robot holding the gripping portion can transport the cage body (processing cage) containing multiple objects to be processed with gaps between them to a processing tank. Then, in the processing tank, the multiple objects to be processed contained in the processing cage (cage body) are subjected to processing.
  • the cage body can be configured to have a holding structure that holds multiple non-thick objects, each of which has a large surface area relative to its thickness, arranged at a predetermined interval.
  • the robot that grasps the gripping portion can transport the cage body (processing cage) in which multiple non-thick objects are held at a predetermined interval by the holding structure to a processing tank.
  • the processing tank the multiple non-thick objects held by the holding structure in the cage body are subjected to processing.
  • processing cage according to the present invention can have various configurations of the processing cage used in the processing system described above.
  • the cage body (the processing cage) in which multiple objects to be processed are housed with gaps between them is transported to the processing tank by a robot that holds the gripping part, so that the multiple objects to be processed can be efficiently transported to the processing tank. Then, the objects to be processed can be efficiently processed in the processing tank.
  • the cage body (the processing cage) in which multiple objects to be processed are housed with gaps between them can be transported to the processing tank all at once by a robot that grasps the gripping portion, so that multiple objects to be processed can be transported to the processing tank efficiently.
  • FIG. 1 is a perspective view showing a FOUP.
  • FIG. 2 is a diagram (part 1) showing a case cleaning device for cleaning a FOUP.
  • FIG. 3 is a diagram (part 2) showing a case cleaning device for cleaning a FOUP.
  • FIG. 4 is a diagram (part 3) showing a case cleaning device for cleaning a FOUP.
  • FIG. 5 is a perspective view (part 1) showing a processing cage used in the processing system according to the first embodiment of the present invention.
  • FIG. 6 is a perspective view (part 2) showing the processing cage used in the processing system according to the first embodiment of the present invention.
  • FIG. 7 is a perspective view (part 3) showing the processing cage used in the processing system according to the first embodiment of the present invention.
  • FIG. 8 is a perspective view (part 4) showing the processing cage used in the processing system according to the first embodiment of the present invention.
  • FIG. 9 is a perspective view (part 5) showing the processing cage used in the processing system according to the first embodiment of the present invention.
  • FIG. 10 is a diagram showing a robot and a cleaning tank in a cleaning system which is a processing system according to the first embodiment of the present invention.
  • FIG. 11 is a front view showing the movement of the robot in the cleaning system.
  • FIG. 12 is a plan view showing the movement of the robot in the cleaning system.
  • FIG. 13 is a front view showing the internal structure of the cleaning tank in the cleaning system.
  • FIG. 14 is a plan view showing the structure of the cleaning tank in the cleaning system.
  • FIG. 15 is a front view showing a state in which a plurality of support frames housed in a processing cage in a cleaning tank are cleaned.
  • FIG. 16 is a perspective view (part 1) showing a processing cage used in a processing system according to a second embodiment of the present invention.
  • FIG. 17 is a perspective view (part 2) showing the processing cage used in the processing system according to the second embodiment of the present invention.
  • FIG. 18 is a perspective view (part 3) showing a processing cage used in a processing system according to a second embodiment of the present invention.
  • FIG. 19 is a perspective view (part 4) showing a processing cage used in a processing system according to a second embodiment of the present invention.
  • FIG. 16 is a perspective view (part 1) showing a processing cage used in a processing system according to a second embodiment of the present invention.
  • FIG. 17 is a perspective view (part 2) showing the processing cage used in the processing system according to the second embodiment of the present invention.
  • FIG. 18 is a perspective view (part
  • FIG. 20 is a perspective view (part 5) showing a processing cage used in a processing system according to a second embodiment of the present invention.
  • FIG. 21 is a perspective view showing a wire tray on which cup-shaped containers are set.
  • FIG. 22 is a perspective view showing four beakers (cup-shaped containers) set on a wire tray.
  • FIG. 23 is a perspective view (part 1) showing another example of use of the processing cage used in the processing system according to the second embodiment of the present invention.
  • FIG. 24 is a perspective view (part 2) showing another example of use of the processing cage used in the processing system according to the second embodiment of the present invention.
  • FIG. 25 is an exploded perspective view showing a processing cage according to another embodiment.
  • FIG. 26 is a perspective view showing members constituting the processing cage shown in FIG. 25 and the object to be processed housed in the processing cage.
  • FIG. 27 is a perspective view showing a processing cage according to another embodiment.
  • a FOUP 200 includes a container body 210 with an opening formed on the front, and a door portion 220 that is detachably attached to the opening of the container body 210.
  • a gripper 211 is provided on the top surface of the container body 210.
  • Multiple semiconductor wafers W e.g., 300 mm wafers
  • the FOUP 200 accommodating multiple semiconductor wafers W is transported by an overhead conveyor installed to travel around each processing step in a factory, with the gripper 211 (OHT head) hooked and supported on the overhead conveyor.
  • this case cleaning device includes a robot 300 and a cleaning tank 500 (FOUP processing tank).
  • the robot 300 grasps the gripper 211 (see Figure 2) and transports the FOUP 200 to the cleaning tank 500.
  • the door part 220 separated from the container body 210 is attached to the mounting part 540 provided on the inside of the lid part 520 of the cleaning tank 500 (see Figure 3).
  • the robot 300 sets the container body 210, with the opening facing downward, on the holding part 530 provided on the bottom of the tank body 510 in the cleaning tank 500 (see Figure 4).
  • the tank body 510 of the cleaning tank 500 is provided with various mechanisms necessary for cleaning and drying the FOUP 200, such as a mechanism for spraying a cleaning liquid (processing liquid) and a mechanism for spraying dry air.
  • the lid part 520 is in a closed state, and the container body 210 held in the tank body 510 and the door part 220 attached to the inner surface of the lid part 520 are cleaned and dried.
  • FIG. 5 is a perspective view of the processing cage 100 with the front pressure bar in the release position
  • Figure 6 is a perspective view of the processing cage 100 with the front pressure bar in the pressure position
  • Figure 7 is a perspective view of the processing cage 100 as viewed diagonally from below (part 1)
  • Figure 8 is a perspective view of the processing cage 100 as viewed diagonally from another diagonal downward position (part 2)
  • Figure 9 is a perspective view of the processing cage 100 as viewed diagonally from above and behind.
  • a front-to-rear direction FRD, a left-to-right direction LRD, and a top-to-bottom direction VD are defined for the processing cage 100.
  • the processing cage 100 has a cage body 10 that houses multiple objects to be processed F at a predetermined interval.
  • the cage body 10 has a three-dimensional shape surrounded by an upper frame 11 (upper part) and a lower frame 12 (bottom part) that are arranged to face each other in the vertical direction VD, two side panels 13a, 13b (two sides) that are arranged to face each other in the left-right direction LRD, and a front pressure bar 14 (front part) and two rear vertical guard bars 15a, 15b (rear part) that are arranged to face each other in the front-rear direction FRD.
  • the cage body 10 (processing cage 100) having such a three-dimensional shape can be set in a processing tank 500 (see Figures 2 to 4, Figures 10 to 15) that cleans a FOUP 200 (see Figure 1), as will be described in detail later.
  • the upper frame 11 (upper part) has a frame structure with multiple gaps that spread symmetrically around the center, and a gripper 20 is provided in the center.
  • This gripper 20 has the same shape as the gripper 211 provided on the container body 210 of the FOUP 200 (see Figure 1) described above, and can be gripped by the robot 300 of the cleaning system described above (see Figures 2 to 4).
  • the upper frame 11 also has handles 21a, 21b arranged to sandwich the gripper 20 in the left-right direction LRD. By holding these handles 21a, 21b, an operator can carry the processing cage 100.
  • the lower frame 12 (bottom) has a rectangular hollow ring-shaped frame structure.
  • multiple shelves 131a are formed, arranged at a predetermined interval in the vertical direction VD.
  • multiple shelves 131b are formed, arranged so that each shelf faces a shelf of the same height on the one side panel 13a.
  • one side panel 13a has multiple through holes 132a extending in the front-rear direction FRD so as to be positioned between adjacent shelves 131a.
  • the other side panel 13b also has multiple through holes 132b extending in the front-rear direction FRD so as to be positioned between adjacent shelves 131b.
  • the two side panels 13a, 13b are fixed to the upper frame 11 and the lower frame 12. Specifically, one front corner of the upper frame 11 is fixed to the front upper part of the one side panel 13a, and the other front corner of the upper frame 11 is fixed to the front upper part of the other side panel 13b. Also, one rear corner of the upper frame 11 is fixed to the rear upper part of the one side panel 13a, and the other rear corner of the upper frame 11 is fixed to the rear upper part of the other side panel 13b.
  • a lower edge extending in the front-rear direction FRD of one side panel 13a is fixed to one side portion extending in the front-rear direction FRD of the lower frame 12, and a lower edge extending in the front-rear direction FRD of the other side panel 13b is fixed to the other side portion extending in the front-rear direction FRD of the lower frame 12.
  • a retaining bar 16a is provided on the front side of the cage body 10 to hold one side panel 13a between the upper frame 11 and the lower frame 12, and a retaining bar 16b is provided to hold the other side panel 13b between the upper frame 11 and the lower frame 12.
  • the front pressure bar 14 is disposed approximately in the center of the front of the cage body 10 in the left-right direction LRD.
  • a hinge 141 is provided at the lower end of the front pressure bar 14, and this hinge 141 is fixed to the center of the front edge of the lower frame 12.
  • a connecting part 111 is provided at the center of the front edge of the upper frame 11, and a fixing device 142 that can be detachably connected to the connecting part 111 is provided at the upper end of the front pressure bar 14.
  • the front pressure bar 14, which can swing around the hinge 141 can be placed in a state in which the front of the cage body 10 is opened (released position: see Figure 5) by releasing the connection between the fixing device 142 and the connecting part 111.
  • the front pressure bar 14 can be placed in a state in which it vertically crosses the front of the cage body 10 (pressing position: see Figure 6) by connecting the fixing device 142 and the connecting part 111.
  • each of the two rear vertical guard bars 15a, 15b On the inner surface of each of the two rear vertical guard bars 15a, 15b, multiple shelves 151a, 151b are formed, arranged at a predetermined interval in the vertical direction DV. Each shelf 151a, 151b is located at the same height as one of the shelves 131a, 131b of the side panels 13a, 13b.
  • the cage body 10 (processing cage 100) of the above-described structure can accommodate non-thick objects F to be processed, such as plate-like objects or frame bodies that have a large surface area relative to their thickness, and more specifically, non-thick objects such as support frames (support bodies) that are hollow, annular frame bodies known as cell rings, rings, cells, etc., for supporting and accommodating the peripheral portions of semiconductor wafers of a given size, as described in JP 2022-43645 A.
  • support frames as non-thick objects will be described as non-processing objects F.
  • the multiple support frames F are accommodated in the cage body 10 with their respective outer peripheral edges supported by the corresponding steps of the shelves 131a, 131b of the side panels 13a, 13b and the shelves 151a, 151b (support structure: holding structure) of the rear vertical guard bars 15a, 15b (see FIG. 6). Then, by erecting the swingable front pressure bar 14 with the hinge 141 and connecting the fixture 142 to the connecting portion 111, the front pressure bar 14 (pressing member: holding structure) presses the edges of the multiple support frames F arranged at intervals between adjacent steps of the shelves 131a, 131b, 151a, 151b toward the rear vertical guard bars 15a, 15 (shelf portions 151a, 151b) (pressing position: see Figure 6). As a result, the multiple support frames F are held in a state arranged at a predetermined interval in the vertical direction VD within the cage body 10.
  • a processing system using a processing cage 100 with the structure described above has a robot and a cleaning tank arranged as shown in Figures 10 to 12.
  • Figure 10 is a diagram showing a robot and a cleaning tank in a cleaning system as a processing system according to an embodiment of the present invention
  • Figure 11 is a front view showing the movement of the robot in the cleaning system
  • Figure 12 is a plan view showing the movement of the robot in the cleaning system.
  • this cleaning system has a processing chamber 600 and three load ports 610(1), 610(2), 610(3) adjacent to the processing chamber 600 (note that reference number 610 is used to represent one load port that represents the three load ports).
  • three set tables 400(1), 400(2), 400(3) (note that reference number 400 is used to represent one set table that represents the three set tables), a robot 300, and two cleaning tanks 500(1), 500(2) (note that reference number 500 is used to represent one cleaning tank that represents the two cleaning tanks) are installed with a predetermined positional relationship.
  • the robot 300 has a structure in which multiple arms are connected, and a hand 310 is provided at the tip of the distal arm.
  • the robot 300 transports the processing cage 100 set on the setting table 400 with the hand 310 gripping the gripping portion 20 of the processing cage 100, and sets the processing cage 100 in the cleaning tank 500 as described below.
  • the robot 300 then grips the gripping portion 20 of the cleaning processing cage 100 with the hand 310, removes the processing cage 100 from the cleaning tank 500, and transports it to the setting table 400 (see Figures 11 and 12).
  • the three load ports 610(1), 610(2), and 610(3) installed outside the processing chamber 600 and the three set tables 400(1), 400(2), and 400(3) installed inside the processing chamber 600 are arranged opposite each other with an inlet (not shown) formed in the wall of the processing chamber 600 in between.
  • a moving mechanism (not shown) is provided between the load ports 610 and the set tables 400 to move the processing cage 100 through the inlet.
  • An intermediate table 410 is provided at a predetermined position inside the processing chamber 600 (see FIG. 12).
  • the robot 300 and processing tank 500 used in this cleaning system are the same as the robot 300 and cleaning tank 500 (FOUP cleaning tank) in the case cleaning device described above ( Figures 2 to 4).
  • the operating program of the robot 300 differs from that used in the case cleaning device that cleans the FOUP 200, and is suitable for setting the processing cage 100 (see Figures 5 to 9) in the cleaning tank 500 and removing the processing cage 100 from the cleaning tank 500.
  • the specific structure of the cleaning tank 500 is as shown in Figures 13 and 14.
  • the cleaning tank 500 has a cylindrical tank body 510 with a bottom and an opening at the top, and a lid 520 provided on the tank body 510 so that the opening at the top can be opened and closed.
  • the cleaning tank 500 has the same structure as the cleaning tank (FOUP cleaning tank: see Figures 2 to 4) used in the case cleaning device described above, and has an attachment part 540 on the inside of the lid 520 to which the door part 220 of the FOUP 200 can be attached. Note that the attachment part 540 to which the door part 220 of the FOUP 200 can be attached is not used to clean the multiple support frames F (workpieces to be processed) housed in the processing cage 100 described later.
  • the bottom of the tank body 510 is provided with a holding part 530 for setting the FOUP 200.
  • the holding part 530 includes a cross-plate-shaped table 531.
  • the four tip portions of the cross-shaped table are set as the portions on which the processing cage 100 is to be placed.
  • the holding portion 530 (table 531) is supported and fixed by a rotation support mechanism 532 provided at the bottom of the tank body 510.
  • the rotation support mechanism 532 to which the holding portion 530 (table 531) is supported and fixed can rotate around an axis perpendicular to the surface of the table 531 by a drive unit (not shown) composed of a motor, a gear mechanism, etc.
  • the rotation support mechanism 532 and its drive unit form a rotation drive unit, and when the rotation support mechanism 532 rotates, the holding portion 530 (table 531) supported by the rotation support mechanism 532 rotates around an axis perpendicular to the surface of the table 531.
  • each of the peripheral processing units 511a to 511f includes a cleaning liquid supply pipe and a high-pressure air supply pipe that extend in the vertical direction.
  • the cleaning liquid supply pipe is provided with multiple nozzles (processing liquid ejection section: side peripheral processing liquid ejection section) for spraying the cleaning liquid passing through the cleaning liquid supply pipe toward the inside of the tank body 510
  • the high-pressure air supply pipe is provided with multiple nozzles for spraying the high-pressure air passing through the high-pressure air supply pipe toward the inside of the tank body 510.
  • first central processing units 512a, 512b and two second central processing units 513a, 513b are provided on a support block that is coaxial with the holding unit 530 (table 531) and the rotating support mechanism 532 in the tank body 510.
  • Each of the first central processing units 512a, 512b includes a cleaning liquid supply pipe and a high-pressure air supply pipe that extend in the vertical direction.
  • the cleaning liquid supply pipe is provided with a plurality of nozzles (processing liquid ejection section: inner processing liquid ejection section) for ejecting the cleaning liquid passing through the cleaning liquid supply pipe toward the inner wall of the tank body 510
  • the high-pressure air supply pipe is provided with a plurality of nozzles for ejecting the high-pressure air passing through the high-pressure air supply pipe toward the inner wall of the tank body 510.
  • Each of the second central processing units 513a, 513b includes a cleaning liquid supply pipe and a high-pressure air supply pipe that each have a portion that extends in the vertical direction and a portion that extends in the horizontal direction.
  • the horizontally extending portion of the cleaning liquid supply pipe is provided with multiple nozzles (treatment liquid ejection section: inner treatment liquid ejection section) for ejecting the cleaning liquid passing through the cleaning liquid supply pipe in an upward direction
  • the horizontally extending portion of the high-pressure air supply pipe is provided with nozzles for ejecting the high-pressure air passing through the high-pressure air supply pipe in an upward direction.
  • each of the upper processing units 521, 522 includes a cleaning liquid supply pipe and a high-pressure air supply pipe.
  • the cleaning liquid supply pipe is provided with a plurality of nozzles (processing liquid ejection section) for ejecting the cleaning liquid passing through the cleaning liquid supply pipe toward the inside (downward) of the tank body 510
  • the high-pressure air supply pipe is provided with a plurality of nozzles for ejecting the high-pressure air passing through the high-pressure air supply pipe toward the inside (downward) of the tank body 510.
  • the cleaning liquid supply pipe is provided with multiple nozzles that spray the cleaning liquid passing through the cleaning liquid supply pipe toward the mounting part 540 to which the door part 220 of the FOUP 200 is attached, and the high-pressure air supply pipe is provided with multiple nozzles that spray the high-pressure air passing through the high-pressure air supply pipe toward the mounting part 540.
  • multiple support frames F (workpieces) housed in the processing cage 100 are processed (cleaned and dried) as follows.
  • the processing cage 100 (see Figures 5 to 9), which contains multiple support frames F at a predetermined interval, is placed on the load port 610 with the gripper 20 facing up.
  • the processing cage 100 is moved in this position by the moving mechanism from the load port 610 through the inlet to the set table 400 of the processing chamber 600.
  • the robot 300 grips the gripper 20 of the processing cage 100 placed on the set table 400 with the hand 310, and transports the processing cage 100 to the tank body 510 (cleaning tank 500) with the lid 510 released.
  • the robot 300 then sets the processing cage 100 on the table 531 (holding part 530) of the tank body 510 with the gripper 20 facing up and the lower frame 12 abutting against the table 531, and after separating the hand 310 from the gripper 20, retreats from the tank body 510 (cleaning tank 500).
  • the processing cage 100 is set on the table 531 as shown in FIG. 15 so that the two first central processing units 512a, 512b and the two second central processing units 513a, 513b pass through the hollow parts of the lower frame 12 having a rectangular hollow ring-shaped frame structure in the processing cage 100 (cage body 10) and the multiple support frames F, each of which is a hollow ring-shaped frame body.
  • the lid 520 closes the opening of the tank body 510 (see FIG. 15).
  • the six peripheral processing units 511a-511f and the upper processing unit 521 are arranged around the processing cage 100 (cage body 10).
  • the six peripheral processing units 511a-511f are arranged to face the side panels 13a, 13b of the processing cage 100 (cage body 10)
  • the upper processing unit 521 is arranged to face the upper part (upper frame 11) of the processing cage 100 (cage body 10).
  • the processing cage 100 when the processing cage 100 is set on the table 531 of the tank body 510, the two first central processing units 512a, 512b and the two second central processing units 513a, 513b are arranged in the cage body 10 through the lower frame 12 of the cage body 10, which has the hollow ring-shaped frame structure in the processing cage 100 (cage body 10) set on the table 531.
  • the cleaning liquid ejected from the six peripheral processing units 511a to 511f is sprayed onto each of the multiple support frames F housed in the processing cage 100 through multiple through holes 132a, 132b (see Figures 5 to 9) formed in each of the two side panels 13a of the processing cage 100.
  • the processing liquid ejected from the two first central processing units 512a, 512b is sprayed from the inside onto each of the multiple hollow annular support frames F housed in the processing cage 100.
  • the cleaning liquid ejected from the upper processing unit 521, together with the cleaning liquid ejected upward from the two second central processing units 513a, 513b flows down the surfaces of each of the multiple support frames F through multiple gaps in the upper frame 11 of the processing cage 100.
  • the cleaning liquid sprayed upward from the upper processing unit 522 returns directly and flows down the surfaces of each of the multiple support frames F through the multiple gaps in the upper frame 11 of the processing cage 100.
  • the rotation of the table 531 is stopped.
  • the rotation of the table 531 then rotates the processing cage 100.
  • high-pressure air is sprayed from each nozzle provided on the high-pressure supply pipe of the six circumferential processing units 511a to 511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the upper processing unit 521. This causes the high-pressure air to be sprayed onto the rotating processing cage 100.
  • the high-pressure air sprayed onto the rotating processing cage 100 blows away and vaporizes the cleaning liquid adhering to each surface of the multiple support frames F that are housed in the processing cage 100 and have been subjected to the cleaning process as described above, and the liquid (cleaning liquid) on the surfaces of the multiple support frames F is removed.
  • the lid 520 of the cleaning tank 500 is released.
  • the robot 300 which has been retreated from the cleaning tank 500, advances the hand 310 into the tank body 510 and uses the hand 310 to grasp the gripping part 20 of the processing cage 100 set on the table 531 (holding part 530) of the tank body 510.
  • the robot 300 then transports the processing cage 100 from inside the tank body 510 to the set table 400.
  • the robot 300 separates the hand 310 from the gripping part 20 at the set table 400, places the processing cage 100 on the set table 400, and retreats from the set table 400.
  • the processing cage 100 which contains the multiple support frames F that have been subjected to the cleaning and drying processes placed on the set table 400, is moved from the set table 400 to the load port 610 installed outside the processing chamber 600 by the moving mechanism.
  • the processing cage 100 housing the multiple support frames F that have been cleaned and dried is transported to a process that uses the support frames F. For example, it is transported to a semiconductor manufacturing process, where each support frame F is used to store semiconductor wafers of a predetermined size one by one.
  • the cage body 10 (processing cage 100) in which multiple support frames F are housed with gaps between them is transported to the cleaning tank 500 by the robot 30 that grasps the gripping portion 20, so that the multiple support frames F can be efficiently transported to the cleaning tank 500. Then, the support frames F can be efficiently cleaned (processed) in the cleaning tank 500.
  • a robot that grasps the gripper 220 provided on the FOUP 200 and transports the FOUP to the FOUP processing tank 500 can be used as a robot that grasps the gripper 20 provided on the cage body 10 and transports the processing cage 100, so there is no need to design a new robot from scratch, and the cleaning system can be realized relatively easily.
  • the FOUP cleaning tank for processing the FOUP 200 can be used as the cleaning tank 500 for cleaning (processing) the multiple support frames F (processing objects) housed in the processing cage 100 (cage body 10), so there is no need to design a new cleaning tank from scratch, and the cleaning system can be realized relatively easily.
  • a common robot 300 and cleaning tank 500 can be used for both cleaning the FOUP 200 and cleaning the multiple support frames F (workpieces), which simplifies factory equipment.
  • the gripper 20 provided on the processing cage 100 can have a shape that can be gripped by the robot 300 that grips the gripper 211 of the FOUP 200, this is not limiting.
  • the gripper 20 may have a shape that can be gripped by a robot that grips a gripper provided on another object, such as another container that contains semiconductor wafers (e.g., FOSB: Front Opening Shipping Box), other than the FOUP 20, and transports the object to an object processing tank where the object is processed.
  • another container that contains semiconductor wafers e.g., FOSB: Front Opening Shipping Box
  • a robot that grips a gripper provided on the object other than the FOUP 200 and transports the object to an object processing tank can be used as a robot that grips the gripper 20 provided on the processing cage 100 (cage body 10) and transports the processing cage 100.
  • the gripper 20 may be dedicated to the processing cage 100. In this case, a robot dedicated to the cleaning system is used.
  • the processing cage 100 can have an external shape that can be accommodated in the FOUP processing tank 500 (tank body 510) that cleans (processes) the FOUP 200, but this is not limited to the above.
  • the processing cage 100 (cage body 10) may have an external shape that can be accommodated in a cleaning tank other than the FOUP processing tank 500.
  • a cleaning tank for processing objects other than the FOPU 200 can be used as a cleaning tank for cleaning the multiple support frames F housed in the processing cage 100 (cage body 10).
  • the cleaning tank may be dedicated to the cleaning system.
  • the shelf portions 131a, 131b, 151a, 151b consisting of multiple steps are formed on the two side panels 13a, 13b (two side portions) and the rear vertical guard bars 15a, 15b (rear portion) of the processing cage 100 (cage body 10), but this is not limited to this. It is sufficient that the shelf portions 131a, 131b are formed on at least two side panels 13a, 13b.
  • the processing cage 100 has two rear vertical guard bars 15a, 15b at the rear of the cage body 10, but three or more rear vertical guard bars may be provided.
  • the processing cage 100 with the above-mentioned structure can accommodate objects other than non-thick objects such as plate-like objects or frame bodies that have a large surface area relative to their thickness.
  • each of the processing liquid ejection parts that eject the cleaning liquid and the high-pressure air ejection parts provided in the cleaning tank 500 can be appropriately determined according to the shape, quantity, arrangement, etc. of the workpieces to be cleaned.
  • the object to be treated is cleaned, but the object may be subjected to a process other than cleaning.
  • the processing system according to the second embodiment uses the processing cage 100 shown in Figures 16 to 20.
  • Figure 16 is a perspective view of the processing cage 100 with the front pressure bar in the release position
  • Figure 17 is a perspective view of the processing cage 100 with the front pressure bar in the pressure position
  • Figure 18 is a perspective view of the processing cage 100 as viewed diagonally from below (part 1)
  • Figure 19 is a perspective view of the processing cage 100 as viewed diagonally from another diagonal downward position (part 2)
  • Figure 20 is a perspective view of the processing cage 100 as viewed diagonally from above and behind.
  • a front-to-rear direction FRD, a left-to-right direction LRD, and a top-to-bottom direction VD are defined for the processing cage 100.
  • the processing cage 100 used in the processing system according to the second embodiment of the present invention has a three-dimensional shape surrounded by a top and bottom arranged to correspond to each other, two side parts arranged to correspond to each other, and a front and rear part arranged to face each other, similar to that of the first embodiment (see Figures 5 to 9).
  • the top part unlike that of the first embodiment (see Figures 5 to 9) which is composed of a single upper frame 11, has a top plate 17 fixed to the lower surface of the upper frame 11 in addition to the upper frame 11. As a result, the gaps formed in the upper frame 11, which forms a frame structure, are mostly blocked by the top plate 17.
  • the rear part is composed of a rear guard frame 15 having two vertical frames 15c, 15d corresponding to the rear vertical guard bars 15a, 15b, and an X-shaped reinforcing frame 15e which connects and reinforces the two vertical frames 15c, 15d.
  • Each of the side panels 13a, 13b that make up the two sides has the same configuration as in the first embodiment, and on their inner surfaces are formed shelves 131a with multiple tiers arranged at a predetermined interval in the vertical direction VD.
  • tiers of shelves 151c, 151d are formed with a predetermined interval in the vertical direction DV.
  • Each tier of these shelves 151c, 151d is located at the same height as one of the tiers of the shelves 131a, 131b of the side panels 13a, 13b.
  • the cage body 10 (Figs. 16 to 20) used in the processing system according to the second embodiment has the same configuration as the cage body 10 (Figs. 5 to 9) used in the processing system according to the first embodiment, except for the configuration of the upper part and the rear part as described above.
  • the cage body 10 (processing cage 100) with the above-described structure can accommodate multiple frame bodies F (hollow annular) at predetermined intervals, as in the first embodiment.
  • the multiple support frames F are accommodated in the cage body 10 with their respective outer peripheral edges supported on corresponding steps of the shelf portions 131a, 131b of the side panels 13a, 13b and the shelf portions 151c, 151d (support structure: holding structure) of the rear frames 15c, 15d in the rear guard frame 15 (see Figure 17).
  • the front pressure bar 14 presses the edges of the multiple support frames F arranged at intervals between adjacent steps of the shelves 131a, 131b, 151c, and 151d toward the vertical frames 15c and 15d (shelf portions 151c and 15d) of the rear guard frame 15 (pressing position: see FIG. 6).
  • the multiple support frames F are held in a state arranged at a predetermined interval in the vertical direction VD within the cage body 10.
  • the processing system according to the second embodiment is configured as a cleaning system similar to that of the first embodiment (see Figures 10 to 15), and includes a robot 300 and a cleaning tank 500.
  • the processing cage (cage body 10) containing multiple support frames F at a predetermined interval is moved from the load port 610 through the inlet to the set table 400 of the processing chamber 600 and placed on the set table 400.
  • the robot 300 grasps the gripping part 20 of the processing cage 100 with the hand 310 and transports it to the tank body 510 (cleaning tank 500).
  • the robot 300 sets the processing cage 100 on the table 531 (holding part 530) of the tank body 510 with the gripping part 20 facing up and the lower frame 12 abutting against the table 531, separates the hand 310 from the gripping part 20, and then retreats from the tank body 510 (cleaning tank 500).
  • the processing cage 100 is set on the table 531 as shown in FIG. 15, so that the two first central processing units 512a, 512b and the two second central processing units 513a, 513b pass through the lower frame 12 having a rectangular hollow ring-shaped frame structure in the processing cage 100 (cage body 10) and the hollow parts of the multiple support frames F, each of which is a hollow ring-shaped frame body.
  • the six circumferential processing units 511a to 511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the nozzles provided on the cleaning liquid supply pipes of the upper processing unit 521 spray the cleaning liquid onto the processing cage 100 (cage body 10) which rotates with the rotation of the table 531. This causes the cleaning liquid to be sprayed onto the rotating processing cage 100 (cleaning process).
  • the cleaning liquid is sprayed from the six peripheral processing units 511a-511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the upper processing unit 521.
  • the cleaning liquid cleans (processes) the hollow ring-shaped support frames housed in the processing cage 100 (cage body 10).
  • the cleaning liquid sprayed upward from the two second central processing units 513a, 513b is prevented from scattering outside the cage 100 (cage body 10) by the top plate 17 of the processing cage 100 (cage body 10).
  • the cleaning liquid processing liquid sprayed from the two second central processing units 513a, 513b can be kept inside the processing cage 100 (cage body 10).
  • the cleaning liquid adhering to the surface of each of the multiple support frames F housed in the processing cage 100 is removed (dried) by high-pressure air ejected from each nozzle provided on the high-pressure supply pipe of the six circumferential processing units 511a-511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the upper processing unit 521.
  • the robot 300 which had retreated from the cleaning tank 500, advances the hand 310 into the tank body 510, and the hand 310 grasps the gripping part 20 of the processing cage 100 set on the table 531 (holding part 530) of the tank body 510.
  • the robot 300 then transports the processing cage 100 from inside the tank body 510 to the set table 400.
  • the robot 300 separates the hand 310 from the gripping part 20 at the set table 400, places the processing cage 100 on the set table 400, and then retreats from the set table 400.
  • the processing cage 100 which contains multiple support frames F that have been subjected to the cleaning and drying processes and placed on the set table 400, is moved by a moving mechanism from the set table 400 to a load port 610 installed outside the processing chamber 600.
  • the cage body 10 in which the multiple support frames F are housed with gaps is transported to the cleaning tank 500 by the robot 30 that grasps the gripping portion 20, so that the multiple support frames F can be efficiently transported to the cleaning tank 500. Then, the support frames F can be efficiently cleaned (processed) in the cleaning tank 500.
  • the upper part of the cage body 10 in the processing cage 100 includes a top plate 17 that closes the gap in the upper frame 11, so that during the cleaning process in the cleaning tank 500 (tank body 510), the cleaning liquid processing liquid sprayed upward from the two second central processing units 513a, 513b can be retained within the processing cage 100 (cage body 10), thereby improving the cleaning effect on the multiple support frames F housed within the processing cage 100 (cage body 10).
  • the rear guard frame 15 is used at the rear of the cage body 10, which has vertical frames 15c, 15d and an X-shaped reinforcing frame 15e that connects and reinforces the two vertical frames 15c, 15d, so the rigidity of the cage body 10 can be increased compared to the first embodiment (rear vertical guard bars 15a, 15b).
  • the processing cage 100 described above can accommodate objects other than non-thick objects such as plate-like objects that have a large surface area relative to their thickness, such as the support frame F.
  • the wire tray 40 is formed from a metal wire of a predetermined thickness and has an outer frame portion 400 that is a rectangular parallelepiped of a predetermined height. Flange portions 401a, 4011b that protrude outward are formed on each of the two opposing lower sides of the outer frame portion 400.
  • the metal wire is bent so that four protrusions 402a, 402b, 402c, 402d are formed at predetermined intervals on the inside of the outer frame portion 400.
  • wire tray 40 In such a wire tray 40, as shown in Figure 22, beaker 30a is placed on protrusion 402a, beaker 30b on protrusion 402b, beaker 30c on protrusion 402c, and beaker 30d on protrusion 402d.
  • the wire tray 40 with the four beakers 30a, 30b, 30c, and 30d set in this manner is housed within the cage body 10 (of the second embodiment) so that flange 401a is supported on a certain step of shelf 131a of one side panel 13a, and flange 401b is supported on the corresponding step of shelf 131b of the other side panel 13b, as shown in Figure 23. Then, as shown in FIG.
  • the front pressure bar 14 which can swing using the hinge 141, is erected and the fixture 142 is connected to the connecting portion 111, so that the front pressure bar 14 holds down the front wire of the wire tray 40 supported by the shelves 131a and 131b.
  • the processing cage 100 (see FIG. 12) containing the four beakers 30a, 30b, 30c, and 30d is transported to a cleaning tank (processing tank) by a robot that grasps the gripping portion 20.
  • a cleaning tank processing tank
  • the four beakers 30a, 30b, 30c, and 30d contained in the processing cage 100 (cage body 10) are subjected to cleaning (processing).
  • the processing cage 100 as described above allows multiple non-thick objects F to be efficiently transported to the processing tank as described above, and by using the wire tray 40, four beakers 30a-30d (cup-shaped containers) can be transported to the processing tank at once, and the four beakers 30a-30d can be subjected to processing in the processing tank. Furthermore, in addition to the non-thick objects and beakers described above, if there are multiple objects that can be stored in the cage body 10, the multiple objects can be transported to the processing tank by a robot that grasps the gripping portion 20, and the multiple objects can be subjected to processing in the processing tank.
  • various objects to be processed F that can be accommodated in the cage body 10 can be transported to a processing tank by a robot, and the objects to be processed F can be subjected to processing in the processing tank, which contributes to relatively easy construction of processing equipment (processing systems) for various objects to be processed.
  • a treatment cage according to another embodiment includes: It is configured as shown in Figures 25 to 27.
  • Figure 25 is an exploded perspective view showing a processing cage according to another embodiment
  • Figure 26 is a perspective view showing members constituting the processing cage shown in Figure 25 and objects to be processed housed in the processing cage
  • Figure 27 is a perspective view showing a processing cage according to another embodiment.
  • a front-rear direction FRD, a left-right direction LRD, and a top-bottom direction VD are defined for the processing cage 100.
  • the processing cage 100 has a cage body 10 and a gripping portion 20 provided on the cage body 10.
  • the cage body 10 has an upper frame 11, a top plate 17 fixed to the lower surface of the upper frame 11, a lower frame 12, a rear guard frame 15 (vertical frames 15c, 15d, reinforcing frame 15e), and retaining bars 16a, 16b, and the upper frame 11 and the lower frame 12 are connected by two vertical frames 15c, 15d of the rear guard frame 15 and two retaining bars 16a, 16b.
  • the cage body 10 further has two side panels 18a, 18b (side portions). These two side panels 18a, 18b have a different shape from those in the first embodiment (side panels 13a, 13b).
  • the cage body 10 further has three rear horizontal guard bars 19a, 19b, 19c (rear). These three rear horizontal guard bars 19a, 19b, 19c are fixed to the rear edges of the two side panels 18a, 18b so that they are spaced apart at a predetermined interval in the up-down direction VD.
  • three support protrusions 181a, 181b, 181c are formed on the inner front surface of one side panel 18a so as to be spaced apart at the same intervals as the rear horizontal guard bars 19a, 19b, 19c described above in the vertical direction VD.
  • three support protrusions 182a, 182b, 182c are formed on the inner front surface of the other side panel 18b so as to be spaced apart at the same intervals as the rear horizontal guard bars 19a, 19b, 19c described above in the vertical direction VD.
  • Support protrusions 191a, 191b, 191c are formed at approximately the center of the inside of the three rear horizontal guard bars 19a, 19b, 19c.
  • the cage body 10 with this structure can house three triangular frames 31 (non-thick objects) as objects to be housed.
  • the triangular frame 31 has a structure in which a round frame is placed inside a triangular frame body, and the round frame is connected to each side of the frame body by a straight frame. Furthermore, legs 311a, 311b, and 311c protrude perpendicularly from the frame surface at the three corners of the triangular frame 31.
  • the three triangular frames 31 are housed in the cage body 10 with their legs 311a, 311b, 311c supported by the support protrusions 181a, 182a (181b, 182b) (181c, 182c) of the side panels 18a, 18b and the support protrusions 191a (191b) (191c) of the rear horizontal guard bars 19a (19b) (19c) (see FIG. 27).
  • the front pressure bar 14 which can swing by the hinge 141, is erected and the fixture 142 is connected to the connecting part 111, so that the front pressure bar 14 presses down the edges of the three triangular frames 31 arranged at a predetermined interval in the vertical direction VD.
  • the three triangular frames 31 are held in the cage body 10 arranged at a predetermined interval in the vertical direction DV.
  • the processing cage 100 housing the three triangular frames 31 as described above is transported to a cleaning tank (processing tank: the internal structure differs from that shown in Figures 13 to 15) by a robot that grasps the gripping portion 20. Then, in the cleaning tank (processing tank), the three triangular frames 31 housed in the processing cage 100 (cage body 10) are subjected to cleaning (processing).
  • a cleaning tank processing tank: the internal structure differs from that shown in Figures 13 to 15
  • the cage body 10 in which the three triangular frames 31 are housed with gaps between them can be transported to the cleaning tank by a robot that grasps the gripping portion 20, so that the three triangular frames 31 can be efficiently transported to the cleaning tank.
  • the triangular frames 31 can be efficiently cleaned (processed) in the cleaning tank.
  • the processing system according to the present invention has the effect of being able to efficiently process multiple objects to be processed using a robot, and is useful as a processing system that processes multiple objects to be processed using a robot.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
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Abstract

[Problem] To provide a processing system which can efficiently process a plurality of objects to be processed by using a robot. [Solution] The present invention is configured to have: a cage 100 for processing which has a cage body 10 for accommodating a plurality of objects to be processed with gaps therebetween, and a grip part 20 provided to the cage body 10; a processing tank 500 which can accommodate the cage 100 for processing and process the plurality of objects to be processed accommodated in the cage 100 for processing; and a robot 300 which grips the grip part 20, conveys the cage 100 for processing set in a predetermined position up to the processing tank 500, and sets the cage 100 inside the processing tank 500.

Description

処理システム及び処理用ケージTreatment system and treatment cage
　本発明は、ロボットを用いて複数の被処理物を処理する処理システム、及び複数の被処理物を洗浄等の処理に供するための処理用ケージに関する。 The present invention relates to a processing system that uses a robot to process multiple objects, and a processing cage for subjecting multiple objects to processing such as cleaning.
　従来、特許文献１に記載されるケース洗浄装置が知られている。このケース洗浄装置は、複数の半導体ウェーハを収容するケース体（容器）としてのＳＥＭＩ（Semiconductor Equipment and Materials International）規格で定められたＦＯＵＰ（Front Opening Unified Pod）を洗浄する。このケース洗浄装置では、ロボットがＦＯＵＰの上面に設けられた把持部（ＯＨＴヘッド）を把持して当該ＦＯＵＰを搬送して、洗浄槽内にセットする。そして、洗浄層内にセットされたＦＯＵＰが当該洗浄層内において洗浄される。 A case cleaning device described in Patent Document 1 is known in the art. This case cleaning device cleans FOUPs (Front Opening Unified Pods) defined by the SEMI (Semiconductor Equipment and Materials International) standard as case bodies (containers) that house multiple semiconductor wafers. In this case cleaning device, a robot grasps the gripping part (OHT head) provided on the top surface of the FOUP, transports the FOUP, and sets it in a cleaning tank. The FOUP set in the cleaning layer is then cleaned in the cleaning layer.
特許第６７７９４４０号公報Patent No. 6779440
　ところで、ある場所に載置された被処理物をロボットが把持して処理槽（洗浄槽）まで搬送する流れに従って当該被処理物を処理（洗浄）する場合、板状の物、薄型のフレーム状の物、比較的小さい塊状の物等の被処理物を１つ１つロボットが直接把持して洗浄槽まで搬送することが非効率的な場合がある。 Incidentally, when a robot processes (cleans) objects placed in a certain location by gripping the objects and transporting them to a processing tank (cleaning tank), it can be inefficient for the robot to directly grip each object, such as a plate-shaped object, a thin frame-shaped object, or a relatively small block-shaped object, and transport it to the cleaning tank.
　本発明は、このような事情に鑑みてなされたもので、ロボットを用いて複数の被処理物を効率的に処理することのできる処理システムに関する。 The present invention was made in consideration of these circumstances, and relates to a processing system that can efficiently process multiple objects using a robot.
　また、本発明は、ロボットにより被処理物を処理槽まで効率的に搬送可能な処理用ケージを提供するものである。 The present invention also provides a processing cage that allows the robot to efficiently transport the material to the processing tank.
　本発明に係る処理システムは、複数の被処理物を隙間をもって収容するケージ本体と、前記ケージ本体に設けられた把持部とを有する処理用ケージと、前記処理用ケージを収容可能であって、前記処理用ケージに収容された前記複数の被処理物を処理する処理槽と、前記把持部を把持して、所定位置にセットされた前記処理用ケージを前記処理槽まで搬送し、当該処理槽内にセットするロボットと、を有する構成となる。 The processing system according to the present invention comprises a processing cage having a cage body that contains multiple objects to be processed with gaps therebetween and a gripping portion provided on the cage body, a processing tank capable of containing the processing cage and processing the multiple objects to be processed contained in the processing cage, and a robot that grips the gripping portion, transports the processing cage set in a predetermined position to the processing tank, and sets it in the processing tank.
　このような構成により、把持部を把持するロボットが、複数の被処理物が隙間をもって収容された処理用ケージ（ケージ本体）を所定位置から処理槽まで搬送し、当該処理槽内にセットする。そして、処理槽では、処理用ケージ内に収容された複数の被処理物が処理される。 With this configuration, the robot that holds the gripping part transports the processing cage (cage body) containing multiple objects to be processed with gaps between them from a predetermined position to the processing tank, and sets it in the processing tank. In the processing tank, the multiple objects to be processed contained in the processing cage are processed.
　本発明に係る処理システムにおいて、前記処理用ケージにおける前記ケージ本体は、それぞれ厚さに対して面的な広がりが大きい複数の非厚状物を所定の間隔をもって配列した状態で保持する保持構造を備える、構成とすることができる。 In the processing system according to the present invention, the cage body in the processing cage can be configured to have a holding structure that holds multiple non-thick objects, each of which has a large surface area relative to its thickness, arranged at a predetermined interval.
　このような構成により、把持部を把持するロボットが、保持構造によって複数の非厚状物が所定の間隔をもって保持された状態のケージ本体（処理用ケージ）を処理槽まで搬送し、当該処理槽内にセットする。そして、その処理槽では、前記ケージ本体において前記保持構造によって保持された状態の前記複数の非厚状物が処理される。 With this configuration, the robot that holds the gripping part transports the cage body (processing cage) in which multiple non-thick objects are held at a predetermined interval by the holding structure to the processing tank and sets it in the processing tank. Then, in the processing tank, the multiple non-thick objects held by the holding structure in the cage body are processed.
　本発明に係る処理システムにおいて、前記ケージ本体における前記保持構造は、前記複数の非厚物状それぞれの外周縁を支持する支持構造を含む、構成とすることができる。 In the processing system according to the present invention, the holding structure in the cage body can be configured to include a support structure that supports the outer periphery of each of the non-thick objects.
　このような構成により、それぞれの外周縁が支持構造によって支持された状態でケージ本体（処理用ケージ）内に保持された複数の非厚状物が処理槽内において処理される。 With this configuration, multiple non-thick objects are held within the cage body (processing cage) with their outer peripheries supported by the support structure, and are processed in the processing tank.
　本発明に係る処理システムにおいて、前記ケージ本体は、相互に対向するように配置される上部と底部、相互に対向するように配置される２つの側部、及び互いに対向するように配置される前部と後部によって囲まれた立体形状を有し、前記把持部は、前記上部に設けられ、前記支持構造は、前記上部と前記底部との間に所定間隔をもって配列される前記複数の非厚状物のそれぞれの外周縁を支持するように、前記２つの側部に形成された部分を含む、構成とすることができる。 In the processing system according to the present invention, the cage body has a three-dimensional shape surrounded by a top and a bottom arranged to face each other, two side parts arranged to face each other, and a front part and a rear part arranged to face each other, the gripping part is provided on the top part, and the support structure can be configured to include portions formed on the two side parts so as to support the outer periphery of each of the plurality of non-thick objects arranged at a predetermined interval between the top part and the bottom part.
　このような構成により、立体形状のケージ本体において、支持構造の２つの側部に形成された部分によって上部と底部との間に所定間隔をもって配列される複数の非厚状物のそれぞれの外周縁が支持された状態で、当該複数の非厚状物が保持される。そして、上部に設けられた把持部を把持するロボットによって、上述したように複数の非厚状物が保持されたケージ本体（処理用ケージ）が処理槽に搬送される。そして、処理槽内において、ケージ本体に上部と底部との間に所定間隔をもって配列された状態の複数の非厚状物が処理される。 With this configuration, the three-dimensional cage body holds a number of non-thick objects arranged at a predetermined interval between the top and bottom, with the outer edges of each object supported by portions formed on the two sides of the support structure. Then, the cage body (processing cage) holding the non-thick objects as described above is transported to a processing tank by a robot that grasps the gripping portion provided at the top. Then, in the processing tank, the non-thick objects arranged at a predetermined interval between the top and bottom of the cage body are processed.
　本発明に係る処理システムにおいて、前記ケージ本体における前記２つの側部のそれぞれは、側パネルを含み、前記支持構造の前記２つの側部に形成された部分は、前記側パネルの内面側に上下方向に所定の間隔をもって形成された複数段の棚部を含み、前記２つの側部の一方に対応する前記側パネルにおける前記棚部の各段は、前記２つの側部の他方に対応する前記側パネルにおける前記棚部のいずれかに正対する、構成とすることができる。 In the treatment system according to the present invention, each of the two sides of the cage body includes a side panel, and the portions of the support structure formed on the two sides include multiple shelves formed on the inner surface of the side panels at a predetermined interval in the vertical direction, and each shelf in the side panel corresponding to one of the two sides faces directly against one of the shelves in the side panel corresponding to the other of the two sides.
　このような構成により、ケージ本体において、２つの側部のそれぞれの側パネルの内側に形成された棚部の各段によって上部と底部との間に所定間隔をもって配列される複数の非厚状物のいずれかの外周縁が支持された状態で、当該複数の非厚状物が保持される。そして、このような状態でケージ本体（処理用ケージ）内に保持された複数の非厚状物が、処理槽内において処理される。 With this configuration, the cage body holds a number of non-thick objects arranged at a predetermined interval between the top and bottom, with the outer edge of one of the non-thick objects being supported by each step of the shelf formed on the inside of each of the side panels of the two sides.The non-thick objects held in this state within the cage body (processing cage) are then processed in the processing tank.
　本発明に係る処理システムにおいて、前記ケージ本体における前記後部は、その内面側に上下方向に所定の間隔をもって形成された複数段の棚部を含み、前記棚部の各段は、前記２つの側部のそれぞれに対応する前記側パネルに形成された前記棚部のいずれかの段と同じ高さに位置する、構成とすることができる。 In the processing system according to the present invention, the rear part of the cage body can be configured to include multiple shelves formed on its inner surface at a predetermined interval in the vertical direction, and each shelf is located at the same height as one of the shelves formed on the side panels corresponding to each of the two sides.
　このような構成により、ケージ本体において、２つの側部のそれぞれの側パネルの内側に形成された棚部の各段と、後部の内側に形成された棚部の前記側パネルの前記棚部の前記各段と同じ高さの段とによって上部と底部との間に所定間隔をもって配列される複数の非厚状物のそれぞれの外周縁が支持された状態で、当該複数の非厚状物が保持される。そして、このような状態でケージ本体（処理用ケージ）内に保持された複数の非厚状物が、処理槽内において処理される。 With this configuration, the cage body holds a number of non-thick objects arranged at a predetermined interval between the top and bottom, with the outer edges of each of the non-thick objects supported by the steps of the shelf portion formed on the inside of each of the side panels of the two sides and the steps of the same height as the steps of the shelf portion of the side panel of the shelf portion formed on the inside of the rear.The non-thick objects held in this state within the cage body (processing cage) are then processed in the processing tank.
　本発明に係る処理システムにおいて、前記ケージ本体における前記前部は、前記上部と前記底部との間に所定間隔をもって配列される前記複数の非厚状物それぞれの縁を押える押え位置と前記複数の非厚状物それぞれの縁の押えを解除する位置との間で移動可能な、前記保持構造としての押え部材を含む、構成とすることができる。 In the processing system according to the present invention, the front part of the cage body can be configured to include a holding member as the holding structure that can move between a holding position that holds down the edges of each of the non-thick objects arranged at a predetermined interval between the top and bottom parts and a position that releases the holding down of the edges of each of the non-thick objects.
　このような構成により、立体形状のケージ本体において、２つの側部のそれぞれの側パネルの内側に形成された棚部の各段と、後部の内側に形成された棚部の各段とによって上部と底部との間に所定間隔をもって配列された複数の非厚状物のそれぞれの外周縁が支持されるとともに、押え位置にある押え部材（前部）によって各非厚状物の縁が押さえられた状態で、当該複数の非厚状物が保持される。このような状態でケージ本体（処理用ケージ）内に保持された複数の非厚状物が、処理槽内において処理される。 With this configuration, in the three-dimensional cage body, the outer edges of multiple non-thick objects arranged at a specified interval between the top and bottom are supported by the steps of the shelves formed on the inside of each of the side panels of the two sides and the steps of the shelves formed on the inside of the rear, and the multiple non-thick objects are held with the edges of each non-thick object pressed down by the pressing member (front part) in the pressing position. In this state, the multiple non-thick objects held in the cage body (processing cage) are processed in the processing tank.
　また、ケージ本体において、押え部材（前部）を解除位置に移動させると、ケージ本体における各非厚状物の縁に対する前記押え部材による押えが解除される。この状態で、処理前後における、各非厚状物のケージ本体内への収容及び取り出しが可能となる。 In addition, when the pressing member (front part) of the cage body is moved to the release position, the pressing member releases the pressing of the edges of each non-thick object in the cage body. In this state, each non-thick object can be stored in and removed from the cage body before and after processing.
　本発明に係る処理システムにおいて、前記ケージ本体の前記側パネルには、当該側パネルを貫通する複数の通孔が形成されている、構成とすることができる。 In the treatment system according to the present invention, the side panel of the cage body may be configured to have a plurality of through holes penetrating the side panel.
　このような構成により、処理槽内において、側パネルを貫通する通孔を通して処理液をケージ本体内に供することができる。これにより、ケージ本体内に上部と底部との間に所定の間隔をもって配列される複数の非厚状物に処理液を与えることができる。 With this configuration, the processing liquid can be supplied to the cage body in the processing tank through the through holes that penetrate the side panels. This allows the processing liquid to be supplied to multiple non-thick objects that are arranged at a predetermined interval between the top and bottom of the cage body.
　本発明に係る処理システムにおいて、前記複数の通孔のそれぞれは、前記棚部の各隣接する２つの段の間に配置されている、構成とすることができる。 In the processing system according to the present invention, each of the plurality of through holes may be arranged between two adjacent steps of the shelf portion.
　このような構成により、処理槽内において、ケージ本体の２つの側部のそれぞれの側パネルの棚部の各段にその周縁部が支持される複数の非厚状物のそれぞれに通孔を通して処理液を確実に与えることができる。 This configuration ensures that the treatment liquid can be reliably applied through the through holes to each of the multiple non-thick objects whose peripheral edges are supported on each step of the shelf section of each of the side panels on the two sides of the cage body within the treatment tank.
　本発明に係る処理システムにおいて、前記非厚状物は中空環状のフレーム体であって、前記ケージ本体における前記底部は、中空環状のフレーム構造を有する、構成とすることができる。 In the processing system according to the present invention, the non-thick object can be a hollow ring-shaped frame body, and the bottom of the cage body can have a hollow ring-shaped frame structure.
　このような構成により、処理槽内において、中空環状のフレーム構造を有するケージ本体の底部の当該中空部分及びそれぞれ中空環状のフレーム体である複数の非厚状物の中空部分を通して、上部と底部との間に所定間隔をもって配置される当該複数の非厚状物の内側から処理液を与えることができる。 With this configuration, the treatment liquid can be supplied from inside the multiple non-thick objects arranged at a predetermined interval between the top and bottom through the hollow portion of the bottom of the cage body having a hollow ring-shaped frame structure and the hollow portions of the multiple non-thick objects, each of which is a hollow ring-shaped frame body, in the treatment tank.
　本発明に係る処理システムにおいて、前記処理槽は、前記処理用ケージが前記底部を下方にしてセットされるテーブルと、前記テーブルを当該テーブルの面に垂直な軸を中心に回転させる回転駆動部と、前記テーブルにセットされた前記処理用ケージの周囲に配置されるように設けられ、処理液を噴出する処理液噴出部と、を有する構成とすることができる。 In the processing system according to the present invention, the processing tank can be configured to include a table on which the processing cage is set with the bottom facing downwards, a rotation drive unit that rotates the table around an axis perpendicular to the surface of the table, and a processing liquid ejection unit that is arranged around the processing cage set on the table and ejects processing liquid.
　このような構成により、把持部を把持したロボットによりケージ本体（処理用ケージ）が、処理槽におけるテーブルに底部を下方にしてセットされ、そのようにケージ本体（処理用ケージ）がセットされたテーブルが回転駆動部により回転される。テーブルの回転とともに回転するケージ本体内に保持された複数の非厚状物が、処理用ケージの周囲に設けられた処理液噴出部から噴出する処理液により処理される。 With this configuration, the robot holding the gripping part sets the cage body (processing cage) with its bottom facing down on the table in the processing tank, and the table on which the cage body (processing cage) is set is rotated by the rotation drive part. Multiple non-thick objects held within the cage body, which rotates with the rotation of the table, are processed by processing liquid sprayed from processing liquid spray parts provided around the processing cage.
　本発明に係る処理システムにおいて、前記処理槽は、前記処理用ケージが前記底部を下方にしてセットされるテーブルと、前記テーブルを当該テーブルの面に垂直な軸を中心に回転させる回転駆動部と、前記テーブルにセットされた前記処理用ケージの前記ケージ本体の側パネルに対向して配置されるように設けられ、処理液を噴出する側周処理液噴出部と、を有する構成とすることができる。 In the processing system according to the present invention, the processing tank can be configured to include a table on which the processing cage is set with the bottom facing down, a rotation drive unit that rotates the table around an axis perpendicular to the surface of the table, and a peripheral processing liquid ejection unit that is disposed opposite the side panel of the cage body of the processing cage set on the table and ejects processing liquid.
　このような構成により、把持部を把持したロボットによりケージ本体（処理用ケージ）が、処理槽におけるテーブルに底部を下方にしてセットされ、そのようにケージ本体（処理用ケージ）がセットされたテーブルが回転駆動部により回転される。テーブルとともに回転する処理用ケージ（ケージ本体）に対して、側周処理液噴出部から噴出する処理液が吹き掛けられ、その処理液の一部は、ケース本体における２つの側面パネルそれぞれの棚部の各隣接する段の間に配置された通孔を通して複数の非厚状物のそれぞれに与えられる。これにより、処理用ケージに収容された複数の非厚状物が処理液により処理される。 With this configuration, the robot holding the gripping part sets the cage body (processing cage) with its bottom facing down on the table in the processing tank, and the table on which the cage body (processing cage) is set is rotated by the rotation drive part. Processing liquid ejected from the side processing liquid ejection part is sprayed onto the processing cage (cage body) which rotates with the table, and some of the processing liquid is given to each of the multiple non-thick objects through the through holes located between each adjacent step of the shelf part of each of the two side panels of the case body. In this way, the multiple non-thick objects stored in the processing cage are processed with the processing liquid.
　本発明に係る処理システムにおいて、前記処理槽は、前記処理用ケージが前記底部を下方にしてセットされるテーブルと、前記テーブルを当該テーブルの面に垂直な軸を中心に回転させる回転駆動部と、前記テーブルにセットされた前記処理用ケージにおける前記中空環状の前記フレーム構造を有する前記ケージ本体の底部を通して前記ケージ本体内に配置されるように設けられ、処理液を噴出する内側処理液噴出部と、を有する構成とすることができる。 In the processing system according to the present invention, the processing tank can be configured to include a table on which the processing cage is set with the bottom facing downwards, a rotation drive unit that rotates the table around an axis perpendicular to the surface of the table, and an inner processing liquid ejection unit that is disposed within the cage body through the bottom of the cage body having the hollow annular frame structure of the processing cage set on the table and ejects processing liquid.
　このような構成により、把持部を把持したロボットによりケージ本体（処理用ケージ）が、処理槽におけるテーブルに底部を下方にしてセットされる。この状態で、内側処理液噴出部が、中空環状のフレーム構造を有するケージ本体の底部の当該中空部分及びそれぞれ中空環状のフレーム体である複数の非厚状物の中空部分を通して、ケージ本体内に配置される。そして、前記ケージ本体（処理用ケージ）がセットされたテーブルが回転駆動部により回転される。テーブルとともに回転するケージ本体（処理用ケージ）の内側に配置された内側処理液噴出部から噴出する処理液が、そのケージ本体内において上部と底部との間に所定間隔をもって配置される複数の非厚状物の内側から吹き掛けられる。これにより、処理用ケージに収容された複数の非厚状物が処理液により処理される。 With this configuration, the robot holding the gripper sets the cage body (processing cage) with its bottom facing down on the table in the processing tank. In this state, the inner processing liquid jetting part is placed inside the cage body through the hollow part of the bottom of the cage body, which has a hollow ring-shaped frame structure, and the hollow parts of the multiple non-thick objects, each of which is a hollow ring-shaped frame body. Then, the table on which the cage body (processing cage) is set is rotated by the rotation drive part. The processing liquid jetted from the inner processing liquid jetting part, which is placed inside the cage body (processing cage) that rotates with the table, is sprayed from the inside of the multiple non-thick objects that are placed at a predetermined interval between the top and bottom inside the cage body. In this way, the multiple non-thick objects contained in the processing cage are processed with the processing liquid.
　本発明に係る処理システムにおいて、前記処理用ケージにおける前記把持部は、ＳＥＭＩ（Semiconductor Equipment and Materials International）規格で定められたＦＯＵＰ（Front Opening Unified Pod）に設けられた把持部を把持してＦＯＵＰ処理槽に当該ＦＯＵＰを搬送するロボットにより把持可能な形状である、構成とすることができる。 In the processing system according to the present invention, the gripping portion of the processing cage can be configured to have a shape that allows it to be grasped by a robot that grasps a gripping portion provided on a FOUP (Front Opening Unified Pod) defined by the SEMI (Semiconductor Equipment and Materials International) standard and transports the FOUP to a FOUP processing tank.
　このような構成により、ケージ本体に設けられた把持部を把持して当該処理用ケージを搬送するロボットとして、ＦＯＵＰに設けられた把持部を把持してＦＯＵＰ処理槽に前記ＦＯＵＰを搬送するロボットを利用することができる。 With this configuration, a robot that grasps the gripper provided on the cage body and transports the processing cage can be used as a robot that grasps the gripper provided on a FOUP and transports the FOUP to a FOUP processing tank.
　本発明に係る処理システムにおいて、前記処理用ケージは、ＳＥＭＩ規格で定められたＦＯＵＰを処理するためのＦＯＵＰ洗浄槽内にセット可能な外形形状を有する、構成とすることができる。 In the processing system according to the present invention, the processing cage can be configured to have an external shape that allows it to be set in a FOUP cleaning tank for processing FOUPs as defined by SEMI standards.
　このような構成により、ＦＯＵＰを処理すべきＦＯＵＰ処理槽を、当該処理用ケージ（ケージ本体）に収容された複数の被処理物を処理すべき処理槽として利用することができる。 With this configuration, the FOUP processing tank for processing FOUPs can be used as a processing tank for processing multiple objects to be processed housed in the processing cage (cage body).
　また、本発明に係る処理用ケージは、複数の被処理物を隙間をもって収容するケージ本体と、前記ケージ本体に設けられ、ロボットにより把持可能な把持部と、を有し、前記把持部を把持する前記ロボットにより処理槽に搬送され、前記複数の被処理物を前記処理槽での処理に供する、構成となる。 The processing cage according to the present invention has a cage body that houses multiple objects to be processed with gaps between them, and a gripping part that is provided on the cage body and can be gripped by a robot, and is transported to a processing tank by the robot gripping the gripping part, and the multiple objects to be processed are subjected to processing in the processing tank.
　このような構成により、上述したように、把持部を把持するロボットによって、複数の被処理物が隙間をもって収容されたケージ本体（処理用ケージ）が処理槽に搬送され得る。そして、その処理槽において、処理用ケージ（ケージ本体）に収容された複数の被処理物が処理に供される。 With this configuration, as described above, the robot holding the gripping portion can transport the cage body (processing cage) containing multiple objects to be processed with gaps between them to a processing tank. Then, in the processing tank, the multiple objects to be processed contained in the processing cage (cage body) are subjected to processing.
　本発明に係る処理用ケージにおいて、前記ケージ本体は、それぞれ厚さに対して面的な広がりが大きい複数の非厚状物を所定の間隔をもって配列した状態で保持する保持構造を備える、構成とすることができる。 In the processing cage according to the present invention, the cage body can be configured to have a holding structure that holds multiple non-thick objects, each of which has a large surface area relative to its thickness, arranged at a predetermined interval.
　このような構成により、把持部を把持するロボットによって、保持構造によって複数の非厚状物が所定の間隔をもって保持された状態のケージ本体（処理用ケージ）が処理槽に搬送され得る。そして、その処理槽では、前記ケージ本体において前記保持構造によって保持された状態の前記複数の非厚状物が処理に供される。 With this configuration, the robot that grasps the gripping portion can transport the cage body (processing cage) in which multiple non-thick objects are held at a predetermined interval by the holding structure to a processing tank. In the processing tank, the multiple non-thick objects held by the holding structure in the cage body are subjected to processing.
　また、本発明に係る処理用ケージは、前述した処理システムに用いられる処理用ケージの種々の構成をとり得る。 In addition, the processing cage according to the present invention can have various configurations of the processing cage used in the processing system described above.
　本発明に係る処理システムによれば、複数の被処理物が隙間をもって収容されるケージ本体（当該処理用ケージ）が把持部を把持するロボットにより処理槽まで搬送されるので、複数の被処理物を処理槽まで効率的に搬送することができる。そして、前記処理槽にて被処理物を効率的に処理することができる。 In the processing system according to the present invention, the cage body (the processing cage) in which multiple objects to be processed are housed with gaps between them is transported to the processing tank by a robot that holds the gripping part, so that the multiple objects to be processed can be efficiently transported to the processing tank. Then, the objects to be processed can be efficiently processed in the processing tank.
　また、本発明に係る処理用ケージによれば、複数の被処理物が隙間をもって収容されるケージ本体（当該処理用ケージ）が把持部を把持するロボットにより一括的に処理槽まで搬送され得るので、複数の被処理物を処理槽まで効率的に搬送することができる。 In addition, with the processing cage according to the present invention, the cage body (the processing cage) in which multiple objects to be processed are housed with gaps between them can be transported to the processing tank all at once by a robot that grasps the gripping portion, so that multiple objects to be processed can be transported to the processing tank efficiently.
図１は、ＦＯＵＰを示す斜視図である。FIG. 1 is a perspective view showing a FOUP. 図２は、ＦＯＵＰを洗浄するケース洗浄装置を示す図（その１）である。FIG. 2 is a diagram (part 1) showing a case cleaning device for cleaning a FOUP. 図３は、ＦＯＵＰを洗浄するケース洗浄装置を示す図（その２）である。FIG. 3 is a diagram (part 2) showing a case cleaning device for cleaning a FOUP. 図４は、ＦＯＵＰを洗浄するケース洗浄装置を示す図（その３）である。FIG. 4 is a diagram (part 3) showing a case cleaning device for cleaning a FOUP. 図５は、本発明の第１の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その１）である。FIG. 5 is a perspective view (part 1) showing a processing cage used in the processing system according to the first embodiment of the present invention. 図６は、本発明の第１の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その２）である。FIG. 6 is a perspective view (part 2) showing the processing cage used in the processing system according to the first embodiment of the present invention. 図７は、本発明の第１の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その３）である。FIG. 7 is a perspective view (part 3) showing the processing cage used in the processing system according to the first embodiment of the present invention. 図８は、本発明の第１の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その４）である。FIG. 8 is a perspective view (part 4) showing the processing cage used in the processing system according to the first embodiment of the present invention. 図９は、本発明の第１の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その５）である。FIG. 9 is a perspective view (part 5) showing the processing cage used in the processing system according to the first embodiment of the present invention. 図１０は、本発明の第１の実施の形態に係る処理システムである洗浄システムにおけるロボット及び洗浄槽を示す図である。FIG. 10 is a diagram showing a robot and a cleaning tank in a cleaning system which is a processing system according to the first embodiment of the present invention. 図１１は、洗浄システムにおけるロボットの動きを示す正面図である。FIG. 11 is a front view showing the movement of the robot in the cleaning system. 図１２は、洗浄システムにおけるロボットの動きを示す平面図である。FIG. 12 is a plan view showing the movement of the robot in the cleaning system. 図１３は、洗浄システムにおける洗浄槽内の構造を示す正面図である。FIG. 13 is a front view showing the internal structure of the cleaning tank in the cleaning system. 図１４は、洗浄システムにおける洗浄槽の構造を示す平面図である。FIG. 14 is a plan view showing the structure of the cleaning tank in the cleaning system. 図１５は、洗浄槽内において処理用ケージに収容された複数の支持フレームが洗浄される状態を示す正面図である。FIG. 15 is a front view showing a state in which a plurality of support frames housed in a processing cage in a cleaning tank are cleaned. 図１６は、本発明の第２の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その１）である。FIG. 16 is a perspective view (part 1) showing a processing cage used in a processing system according to a second embodiment of the present invention. 図１７は、本発明の第２の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その２）である。FIG. 17 is a perspective view (part 2) showing the processing cage used in the processing system according to the second embodiment of the present invention. 図１８は、本発明の第２の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その３）である。FIG. 18 is a perspective view (part 3) showing a processing cage used in a processing system according to a second embodiment of the present invention. 図１９は、本発明の第２の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その４）である。FIG. 19 is a perspective view (part 4) showing a processing cage used in a processing system according to a second embodiment of the present invention. 図２０は、本発明の第２の実施の形態に係る処理システムに用いられる処理用ケージを示す斜視図（その５）である。FIG. 20 is a perspective view (part 5) showing a processing cage used in a processing system according to a second embodiment of the present invention. 図２１は、カップ状の容器がセットされるワイヤートレイを示す斜視図である。FIG. 21 is a perspective view showing a wire tray on which cup-shaped containers are set. 図２２は、ワイヤートレイにセットされた４つのビーカー（カップ状の容器）を示す斜視図である。FIG. 22 is a perspective view showing four beakers (cup-shaped containers) set on a wire tray. 図２３は、本発明の第２の実施の形態に係る処理システムに用いられた処理用ケージの他の使用例を示す斜視図（その１）である。FIG. 23 is a perspective view (part 1) showing another example of use of the processing cage used in the processing system according to the second embodiment of the present invention. 図２４は、本発明の第２の実施の形態に係る処理システムに用いられた処理用ケージの他の使用例を示す斜視図（その２）である。FIG. 24 is a perspective view (part 2) showing another example of use of the processing cage used in the processing system according to the second embodiment of the present invention. 図２５は、他の実施の形態に係る処理用ケージを示す分解斜視図である。FIG. 25 is an exploded perspective view showing a processing cage according to another embodiment. 図２６は、図２５に示す処理用ケージを構成する部材と、当該処理用ケージに収容される被処理物を示す斜視図である。FIG. 26 is a perspective view showing members constituting the processing cage shown in FIG. 25 and the object to be processed housed in the processing cage. 図２７は、他の実施の形態に係る処理用ケージを示す斜視図である。FIG. 27 is a perspective view showing a processing cage according to another embodiment.
　本発明の実施の形態に係る処理システムを説明する前に、容器を洗浄する（処理する）既に知られている洗浄装置について説明する。 Before describing the processing system according to the embodiment of the present invention, we will explain a known cleaning device for cleaning (processing) containers.
　複数の半導体ウェーハを収容する容器として、ＳＥＭＩ（Semiconductor Equipment and Materials International）規格で定められたＦＯＵＰ（Front Opening Unified Pod）が知られている。このＦＯＵＰの一例が図１に示される。図１において、ＦＯＵＰ２００は、前面に開口が形成された容器本体２１０と、容器本体２１０の開口に着脱自在に装着されるドア部２２０とを備えている。そして、容器本体２１０の上面に把持部２１１（ＯＨＴヘッド）が設けられている。容器本体２１０内には複数の半導体ウェーハＷ（例えば、３００ｍｍウェーハ）が収容される。複数の半導体ウェーハＷを収容するＦＯＵＰ２００は、例えば、工場内において各処理工程を巡るように敷設されたオーバーヘッドコンベアに把持部２１１（ＯＨＴヘッド）が引っ掛け支持された状態で、そのオーバーヘッドコンベアによって搬送される。 FOUPs (Front Opening Unified Pods) defined by the SEMI (Semiconductor Equipment and Materials International) standard are known as containers for accommodating multiple semiconductor wafers. An example of such a FOUP is shown in FIG. 1. In FIG. 1, a FOUP 200 includes a container body 210 with an opening formed on the front, and a door portion 220 that is detachably attached to the opening of the container body 210. A gripper 211 (OHT head) is provided on the top surface of the container body 210. Multiple semiconductor wafers W (e.g., 300 mm wafers) are accommodated in the container body 210. The FOUP 200 accommodating multiple semiconductor wafers W is transported by an overhead conveyor installed to travel around each processing step in a factory, with the gripper 211 (OHT head) hooked and supported on the overhead conveyor.
　このようなＦＯＵＰ２００を洗浄（処理）するケース洗浄装置が既に提案されている（特許文献１参照）。このケース洗浄装置は、図２～図４に示すように、ロボット３００と洗浄槽５００（ＦＯＵＰ処理槽）とを備えている。ロボット３００は、把持部２１１を把持して（図２参照）ＦＯＵＰ２００を洗浄槽５００に搬送する。ロボット３００が把持部２１１を把持した状態で、容器本体２１０から分離されたドア部２２０が洗浄槽５００の蓋部５２０の内側に設けられた取付部５４０に装着される（図３参照）。そして、ロボット３００は、容器本体２１０を、開口を下方に向けて、洗浄槽５００における槽本体５１０の底部に設けられた保持部５３０にセットする（図４参照）。槽本体５１０内の保持部５３０に容器本体２１０（ＦＯＵＰ２００）が保持された状態で、ロボット３００は、把持部２１１を離して洗浄槽５００から退避する。洗浄槽５００の槽本体５１０には、洗浄液（処理液）を噴出させる機構、乾燥エアを噴出させる機構等、ＦＯＵＰ２００の洗浄、乾燥に必要な種々の機構が設けられている。洗浄槽５００では、蓋部５２０が閉じた状態になって、槽本体５１０内に保持された容器本体２１０と蓋部５２０の内面に装着されたドア部２２０の洗浄及び乾燥が行われる。 A case cleaning device for cleaning (processing) such FOUPs 200 has already been proposed (see Patent Document 1). As shown in Figures 2 to 4, this case cleaning device includes a robot 300 and a cleaning tank 500 (FOUP processing tank). The robot 300 grasps the gripper 211 (see Figure 2) and transports the FOUP 200 to the cleaning tank 500. With the robot 300 grasping the gripper 211, the door part 220 separated from the container body 210 is attached to the mounting part 540 provided on the inside of the lid part 520 of the cleaning tank 500 (see Figure 3). Then, the robot 300 sets the container body 210, with the opening facing downward, on the holding part 530 provided on the bottom of the tank body 510 in the cleaning tank 500 (see Figure 4). With the container body 210 (FOUP 200) held by the holding part 530 in the tank body 510, the robot 300 releases the gripping part 211 and retreats from the cleaning tank 500. The tank body 510 of the cleaning tank 500 is provided with various mechanisms necessary for cleaning and drying the FOUP 200, such as a mechanism for spraying a cleaning liquid (processing liquid) and a mechanism for spraying dry air. In the cleaning tank 500, the lid part 520 is in a closed state, and the container body 210 held in the tank body 510 and the door part 220 attached to the inner surface of the lid part 520 are cleaned and dried.
　次に、本発明の第１の実施の形態に係る処理システムとしての洗浄システムについて説明する。この洗浄システムでは、上述したロボット３００及び洗浄槽５００が用いられる。 Next, a cleaning system as a processing system according to a first embodiment of the present invention will be described. In this cleaning system, the robot 300 and cleaning tank 500 described above are used.
　本発明の第１の実施の形態に係る処理システムとしての洗浄システムは、図５～図９に示す処理用ケース１００を用いる。なお、図５は、前押えバーが解除位置にある状態の処理用ケージ１００を示す斜視図であり、図６は、前押えバーが押え位置にある状態の処理用ケージ１００を示す斜視図であり、図７は、処理用ケージ１００を斜め下方（その１）から見た状態を示す斜視図であり、図８は、処理用ケージ１００を他の斜め下方（その２）からみた状態を示す斜視図であり、図９は、処理用ケージ１００を後方の斜め上方からみた状態を示す斜視図である。なお、図５～図９のそれぞれにおいて、処理用ケージ１００に対して、前後方向ＦＲＤ、左右方向ＬＲＤ及び上下方向ＶＤが定義される。 The cleaning system as the processing system according to the first embodiment of the present invention uses the processing case 100 shown in Figures 5 to 9. Note that Figure 5 is a perspective view of the processing cage 100 with the front pressure bar in the release position, Figure 6 is a perspective view of the processing cage 100 with the front pressure bar in the pressure position, Figure 7 is a perspective view of the processing cage 100 as viewed diagonally from below (part 1), Figure 8 is a perspective view of the processing cage 100 as viewed diagonally from another diagonal downward position (part 2), and Figure 9 is a perspective view of the processing cage 100 as viewed diagonally from above and behind. Note that in each of Figures 5 to 9, a front-to-rear direction FRD, a left-to-right direction LRD, and a top-to-bottom direction VD are defined for the processing cage 100.
　図５～図９において、処理用ケージ１００は、複数の被処理物Ｆを所定の間隔をもって収容するケージ本体１０を有する。ケージ本体１０は、上下方向ＶＤにおいて相互に対向するように配置される上フレーム１１（上部）と下フレーム１２（底部）、左右方向ＬＲＤにおいて相互に対向するように配置される２つの側パネル１３ａ、１３ｂ（２つの側部）、及び前後方向ＦＲＤにおいて相互に対向するように配置される前押えバー１４（前部）と２つの後縦ガードバー１５ａ、１５ｂ（後部）によって囲まれた立体形状を有している。このような立体形状を有するケージ本体１０（処理用ケージ１００）は、後に詳述するように、ＦＯＵＰ２００（図１参照）を洗浄する処理槽５００（図２～図４、図１０～図１５参照）内にセット可能となっている。 In Figures 5 to 9, the processing cage 100 has a cage body 10 that houses multiple objects to be processed F at a predetermined interval. The cage body 10 has a three-dimensional shape surrounded by an upper frame 11 (upper part) and a lower frame 12 (bottom part) that are arranged to face each other in the vertical direction VD, two side panels 13a, 13b (two sides) that are arranged to face each other in the left-right direction LRD, and a front pressure bar 14 (front part) and two rear vertical guard bars 15a, 15b (rear part) that are arranged to face each other in the front-rear direction FRD. The cage body 10 (processing cage 100) having such a three-dimensional shape can be set in a processing tank 500 (see Figures 2 to 4, Figures 10 to 15) that cleans a FOUP 200 (see Figure 1), as will be described in detail later.
　上フレーム１１（上部）は、中心に対して対称的に広がって複数の隙間が形成されたフレーム構造となり、その中央部に把持部２０が設けられている。この把持部２０は、前述したＦＯＵＰ２００（図１参照）の容器本体２１０に設けられた把持部２１１と同形のものであって、前述した洗浄システム（図２～図４参照）のロボット３００によって把持することが可能である。また、上フレーム１１には、把持部２０を左右方向ＬＲＤにおいて挟むように配置された把手２１ａ、２１ｂが設けられている。これら把手２１ａ、２１ｂを持つことにより、作業者が処理用ケージ１００を持ち運ぶことが可能である。 The upper frame 11 (upper part) has a frame structure with multiple gaps that spread symmetrically around the center, and a gripper 20 is provided in the center. This gripper 20 has the same shape as the gripper 211 provided on the container body 210 of the FOUP 200 (see Figure 1) described above, and can be gripped by the robot 300 of the cleaning system described above (see Figures 2 to 4). The upper frame 11 also has handles 21a, 21b arranged to sandwich the gripper 20 in the left-right direction LRD. By holding these handles 21a, 21b, an operator can carry the processing cage 100.
　下フレーム１２（底部）は、矩形中空環状のフレーム構造となっている。一方の側パネル１３ａの内面側には所定の間隔をもって上下方向ＶＤに配列された複数段の棚部１３１ａが形成されている。他方の側パネル１３ｂの内面側には各段が前記一方の側パネル１３ａの同じ高さの段に正対するように配列された複数段の棚部１３１ｂが形成されている。また、一方の側パネル１３ａには、棚部１３１ａの隣接する段の間に配置されるように、前後方向ＦＲＤに延びる複数の通孔１３２ａが形成されている。他方の側パネル１３ｂにも、棚部１３１ｂの隣接する段の間に配置されるように、前後方向ＦＲＤに延びる複数の通孔１３２ｂが形成されている。２つの側パネル１３ａ、１３ｂは、上フレーム１１と下フレーム１２とに固定されている。具体的には、上フレーム１１の前側の一方の隅部が前記一方の側パネル１３ａの前方上部に固定され、上フレーム１１の前側の他方の隅部が前記他方の側パネル１３ｂの前方上部に固定されている。また、上フレーム１１の後側の一方の隅部が前記一方の側パネル１３ａの後方上部に固定され、上フレーム１１の後側の他方の隅部が前記他方の側パネル１３ｂの後方上部に固定されている。そして、一方の側パネル１３ａの前後方向ＦＲＤに延びる下縁部が下フレーム１２の前後方向ＦＲＤに延びる一方の辺部に固定され、他方の側パネル１３ｂの前後方向ＦＲＤに延びる下縁部が下フレーム１２の前後方向ＦＲＤに延びる他方の辺部に固定されている。 The lower frame 12 (bottom) has a rectangular hollow ring-shaped frame structure. On the inner surface of one side panel 13a, multiple shelves 131a are formed, arranged at a predetermined interval in the vertical direction VD. On the inner surface of the other side panel 13b, multiple shelves 131b are formed, arranged so that each shelf faces a shelf of the same height on the one side panel 13a. In addition, one side panel 13a has multiple through holes 132a extending in the front-rear direction FRD so as to be positioned between adjacent shelves 131a. The other side panel 13b also has multiple through holes 132b extending in the front-rear direction FRD so as to be positioned between adjacent shelves 131b. The two side panels 13a, 13b are fixed to the upper frame 11 and the lower frame 12. Specifically, one front corner of the upper frame 11 is fixed to the front upper part of the one side panel 13a, and the other front corner of the upper frame 11 is fixed to the front upper part of the other side panel 13b. Also, one rear corner of the upper frame 11 is fixed to the rear upper part of the one side panel 13a, and the other rear corner of the upper frame 11 is fixed to the rear upper part of the other side panel 13b. Then, a lower edge extending in the front-rear direction FRD of one side panel 13a is fixed to one side portion extending in the front-rear direction FRD of the lower frame 12, and a lower edge extending in the front-rear direction FRD of the other side panel 13b is fixed to the other side portion extending in the front-rear direction FRD of the lower frame 12.
　また、ケージ本体１０の前方側には、一方の側パネル１３ａを上フレーム１１と下フレーム１２との間に保持させる保持バー１６ａが設けられるとともに、他方の側パネル１３ｂを上フレーム１１と下フレーム１２との間に保持させる保持バー１６ｂが設けられている。 Furthermore, a retaining bar 16a is provided on the front side of the cage body 10 to hold one side panel 13a between the upper frame 11 and the lower frame 12, and a retaining bar 16b is provided to hold the other side panel 13b between the upper frame 11 and the lower frame 12.
　前押えバー１４は、ケージ本体１０の前面の左右方向ＬＲＤにおける略中央に配置される。前押えバー１４の下端部はヒンジ１４１が設けられ、このヒンジ１４１が下フレーム１２の前側の辺部の中央部に固定されている。上フレーム１１の前側縁部分の中央部には連結部１１１が設けられており、前押えバー１４の上端部には連結部１１１に着脱自在に結合可能な固定具１４２が設けられている。ヒンジ１４１を中心に揺動可能な前押えバー１４は、固定具１４２と連結部１１１との結合を解除することにより、ケージ本体１０の前面を開放する状態（解除位置：図５参照）になり得る。また、前押えバー１４は、固定具１４２と連結部１１１とを結合させることにより、ケージ本体１０の前面を縦方向に横切る状態（押え位置：図６参照）になり得る。 The front pressure bar 14 is disposed approximately in the center of the front of the cage body 10 in the left-right direction LRD. A hinge 141 is provided at the lower end of the front pressure bar 14, and this hinge 141 is fixed to the center of the front edge of the lower frame 12. A connecting part 111 is provided at the center of the front edge of the upper frame 11, and a fixing device 142 that can be detachably connected to the connecting part 111 is provided at the upper end of the front pressure bar 14. The front pressure bar 14, which can swing around the hinge 141, can be placed in a state in which the front of the cage body 10 is opened (released position: see Figure 5) by releasing the connection between the fixing device 142 and the connecting part 111. In addition, the front pressure bar 14 can be placed in a state in which it vertically crosses the front of the cage body 10 (pressing position: see Figure 6) by connecting the fixing device 142 and the connecting part 111.
　２つの後縦ガードバー１５ａ、１５ｂのそれぞれの内面側には、所定の間隔をもって上下方向ＤＶに配列された複数段の棚部１５１ａ、１５１ｂが形成されている。これら棚部１５１ａ、１５１ｂにおける各段は、側パネル１３ａ、１３ｂそれぞれの棚部１３１ａ、１３１ｂにおけるいずれかの段と同じ高さに位置する。 On the inner surface of each of the two rear vertical guard bars 15a, 15b, multiple shelves 151a, 151b are formed, arranged at a predetermined interval in the vertical direction DV. Each shelf 151a, 151b is located at the same height as one of the shelves 131a, 131b of the side panels 13a, 13b.
　上述した構造のケージ本体１０（処理用ケージ１００）は、厚さに対して面的な広がりの大きい板状物やフレーム体、更に具体的には、特開２０２２－４３６４５号公報に記載される、所定サイズの半導体ウェーハの周縁部を支持して収容するための、セルリング、リング、セルなどと称される、中空環状のフレーム体である支持フレーム（支持体）等の非厚状物を被処理物Ｆとして収容することができる。以下、非厚状物としての支持フレームを非処理物Ｆとして説明する。複数の支持フレームＦは、それぞれの外周縁が、側パネル１３ａ、１３ｂの棚部１３１ａ、１３１ｂ及び後縦ガードバー１５ａ、１５ｂの棚部１５１ａ、１５１ｂ（支持構造：保持構造）の対応する段に支持された状態でケージ本体１０に収容される（図６参照）。そして、ヒンジ１４１により揺動可能な前押えバー１４を立てて固定具１４２を連結部１１１に結合することで、前押えバー１４（押え部材：保持構造）が棚部１３１ａ、１３１ｂ、１５１ａ、１５１ｂの隣接する段の間隔をもって配列される複数の支持フレームＦそれぞれの縁を後縦ガードバー１５ａ、１５（棚部１５１ａ、１５１ｂ）に向けて押えた状態になる（押え位置：図６参照）。これにより、複数の支持フレームＦがケージ本体１０内において上下方向ＶＤに所定の間隔をもって配列された状態で保持される。 The cage body 10 (processing cage 100) of the above-described structure can accommodate non-thick objects F to be processed, such as plate-like objects or frame bodies that have a large surface area relative to their thickness, and more specifically, non-thick objects such as support frames (support bodies) that are hollow, annular frame bodies known as cell rings, rings, cells, etc., for supporting and accommodating the peripheral portions of semiconductor wafers of a given size, as described in JP 2022-43645 A. Hereinafter, support frames as non-thick objects will be described as non-processing objects F. The multiple support frames F are accommodated in the cage body 10 with their respective outer peripheral edges supported by the corresponding steps of the shelves 131a, 131b of the side panels 13a, 13b and the shelves 151a, 151b (support structure: holding structure) of the rear vertical guard bars 15a, 15b (see FIG. 6). Then, by erecting the swingable front pressure bar 14 with the hinge 141 and connecting the fixture 142 to the connecting portion 111, the front pressure bar 14 (pressing member: holding structure) presses the edges of the multiple support frames F arranged at intervals between adjacent steps of the shelves 131a, 131b, 151a, 151b toward the rear vertical guard bars 15a, 15 ( shelf portions 151a, 151b) (pressing position: see Figure 6). As a result, the multiple support frames F are held in a state arranged at a predetermined interval in the vertical direction VD within the cage body 10.
　前述したような構造の処理用ケージ１００を用いる処理システムは、図１０～図１２に示すように配置されるロボット及び洗浄槽を有している。図１０は、本発明の実施の形態に係る処理システムとしての洗浄システムにおけるロボット及び洗浄槽を示す図であり、図１１は、洗浄システムにおけるロボットの動きを示す正面図であり、図１２は、洗浄システムにおけるロボットの動きを示す平面図である。 A processing system using a processing cage 100 with the structure described above has a robot and a cleaning tank arranged as shown in Figures 10 to 12. Figure 10 is a diagram showing a robot and a cleaning tank in a cleaning system as a processing system according to an embodiment of the present invention, Figure 11 is a front view showing the movement of the robot in the cleaning system, and Figure 12 is a plan view showing the movement of the robot in the cleaning system.
　図１０～図１２において、この洗浄システムは、処理室６００及び処理室６００に隣接して設けられた３つのロードポート６１０（１）、６１０（２）、６１０（３）を有している（なお、３つのロードポートを代表する１つのロードポートを表す場合、参照番号６１０を用いる）。処理室６００内には、３つのセット台４００（１）、４００（２）、４００（３）（なお、３つのセット台を代表する１つのセット台として表す場合、参照番号４００を用いる）、ロボット３００、及び２つの洗浄槽５００（１）、５００（２）（なお、２つの洗浄槽を代表する１つの洗浄槽として表す場合、参照番号５００を用いる）が所定の位置関係をもって設置されている。ロボット３００は、複数の腕部が連結した構造となっており、先端の腕部の先端にハンド３１０が設けられている。ロボット３００は、所定の動作プログラムに従って、セット台４００にセットされた処理用ケージ１００の把持部２０をハンド３１０が把持した状態で、その処理用ケージ１００を搬送して後述するように洗浄槽５００内にセットする。そして、ロボット３００は、洗浄後の処理用ケージ１００の把持部２０をハンド３１０によって把持し、その処理用ケージ１００を洗浄槽５００から取り出してセット台４００まで搬送する（図１１、図１２参照）。 10 to 12, this cleaning system has a processing chamber 600 and three load ports 610(1), 610(2), 610(3) adjacent to the processing chamber 600 (note that reference number 610 is used to represent one load port that represents the three load ports). In the processing chamber 600, three set tables 400(1), 400(2), 400(3) (note that reference number 400 is used to represent one set table that represents the three set tables), a robot 300, and two cleaning tanks 500(1), 500(2) (note that reference number 500 is used to represent one cleaning tank that represents the two cleaning tanks) are installed with a predetermined positional relationship. The robot 300 has a structure in which multiple arms are connected, and a hand 310 is provided at the tip of the distal arm. According to a predetermined operating program, the robot 300 transports the processing cage 100 set on the setting table 400 with the hand 310 gripping the gripping portion 20 of the processing cage 100, and sets the processing cage 100 in the cleaning tank 500 as described below. The robot 300 then grips the gripping portion 20 of the cleaning processing cage 100 with the hand 310, removes the processing cage 100 from the cleaning tank 500, and transports it to the setting table 400 (see Figures 11 and 12).
　処理室６００外に設置された３つのロードポート６１０（１）、６１０（２）、６１０（３）と、処理室６００内に設置された３つのセット台４００（１）、４００（２）、４００（３）とは、それぞれ処理室６００の壁部に形成された導入口（図示略）を挟んで対向配置されている。そして、ロードポート６１０とセット台４００との間で導入口を通して処理用ケージ１００を移動させる移動機構（図示略）が設けられている。なお、処理室６００内の所定位置には中間台４１０が設けられている（図１２参照）。 The three load ports 610(1), 610(2), and 610(3) installed outside the processing chamber 600 and the three set tables 400(1), 400(2), and 400(3) installed inside the processing chamber 600 are arranged opposite each other with an inlet (not shown) formed in the wall of the processing chamber 600 in between. A moving mechanism (not shown) is provided between the load ports 610 and the set tables 400 to move the processing cage 100 through the inlet. An intermediate table 410 is provided at a predetermined position inside the processing chamber 600 (see FIG. 12).
　この洗浄システムに用いられるロボット３００及び処理槽５００は、前述したケース洗浄装置（図２～図４）におけるロボット３００及び洗浄槽５００（ＦＯＵＰ洗浄槽）と同じものである。ただし、ロボット３００の動作プログラムは、ＦＯＵＰ２００を洗浄する前記ケース洗浄装置に用いられるものと異なり、処理用ケージ１００（図５～図９参照）の洗浄槽５００へのセット、及びその処理用ケージ１００の洗浄槽５００からの取り出しに適したものとなっている。 The robot 300 and processing tank 500 used in this cleaning system are the same as the robot 300 and cleaning tank 500 (FOUP cleaning tank) in the case cleaning device described above (Figures 2 to 4). However, the operating program of the robot 300 differs from that used in the case cleaning device that cleans the FOUP 200, and is suitable for setting the processing cage 100 (see Figures 5 to 9) in the cleaning tank 500 and removing the processing cage 100 from the cleaning tank 500.
　洗浄槽５００の具体的な構造は、図１３及び図１４に示すようになっている。 The specific structure of the cleaning tank 500 is as shown in Figures 13 and 14.
　図１３において、洗浄槽５００は、上部が開口する有底円筒状の槽本体５１０と、槽本体５１０にその上部開口を開閉可能に設けられた蓋部５２０とを有している。前述したケース洗浄装置に用いられる洗浄槽（ＦＯＵＰ洗浄槽：図２～図４参照）と同じ構造となるこの洗浄槽５００は、蓋部５２０の内側にＦＯＵＰ２００のドア部２２０の装着が可能な取付部５４０が設けられている。なお、ＦＯＵＰ２００のドア部２２０の装着が可能な取付部５４０は、後述する処理用ケージ１００に収容された複数の支持フレームＦ（被処理物）の洗浄では利用されない。槽本体５１０の底部には、ＦＯＵＰ２００をセットするための保持部５３０が設けられている。図１３とともに図１４に示すように、保持部５３０は十字板状のテーブル５３１を含む。十字板状のテーブルの４つの先端部分（図１３及び図１４における点線丸印参照）は、処理用ケージ１００が載置されるべき部分として設定されている。保持部５３０（テーブル５３１）は、槽本体５１０の底部に設けられた回転支持機構５３２によって支持固定されている。保持部５３０（テーブル５３１）が支持固定された回転支持機構５３２は、モータやギア機構等によって構成される駆動部（図示略）によって、テーブル５３１の面に垂直な軸を中心に回転可能となっている。回転支持機構５３２及びその駆動部（モータ、ギア列等）によって回転駆動部が構成され、この回転支持機構５３２が回転することにより、回転支持機構５３２によって支持される保持部５３０（テーブル５３１）が、テーブル５３１の面に垂直な軸を中心に回転するようになる。 13, the cleaning tank 500 has a cylindrical tank body 510 with a bottom and an opening at the top, and a lid 520 provided on the tank body 510 so that the opening at the top can be opened and closed. The cleaning tank 500 has the same structure as the cleaning tank (FOUP cleaning tank: see Figures 2 to 4) used in the case cleaning device described above, and has an attachment part 540 on the inside of the lid 520 to which the door part 220 of the FOUP 200 can be attached. Note that the attachment part 540 to which the door part 220 of the FOUP 200 can be attached is not used to clean the multiple support frames F (workpieces to be processed) housed in the processing cage 100 described later. The bottom of the tank body 510 is provided with a holding part 530 for setting the FOUP 200. As shown in Figures 13 and 14, the holding part 530 includes a cross-plate-shaped table 531. The four tip portions of the cross-shaped table (see dotted circle marks in Figures 13 and 14) are set as the portions on which the processing cage 100 is to be placed. The holding portion 530 (table 531) is supported and fixed by a rotation support mechanism 532 provided at the bottom of the tank body 510. The rotation support mechanism 532 to which the holding portion 530 (table 531) is supported and fixed can rotate around an axis perpendicular to the surface of the table 531 by a drive unit (not shown) composed of a motor, a gear mechanism, etc. The rotation support mechanism 532 and its drive unit (motor, gear train, etc.) form a rotation drive unit, and when the rotation support mechanism 532 rotates, the holding portion 530 (table 531) supported by the rotation support mechanism 532 rotates around an axis perpendicular to the surface of the table 531.
　図１３及び図１４を参照するに、槽本体５１０内には、その内周面に沿うように、６つ（複数）の周囲処理ユニット５１１ａ、５１１ｂ、５１１ｃ、５１１ｄ、５１１ｅ、５１１ｆが設けられている。各周囲処理ユニット５１１ａ～５１１ｆは、それぞれ上下方向に延びる洗浄液供給管と高圧エア供給管とを含む。洗浄液供給管には当該洗浄液供給管を通る洗浄液を槽本体５１０の内方に向けて噴出するための複数のノズル（処理液噴出部：側周処理液噴出部）が設けられ、高圧エア供給管には当該高圧エア供給管を通る高圧エアを槽本体５１０の内方に向けて噴出するための複数のノズルが設けられている。 Referring to Figures 13 and 14, six (multiple) peripheral processing units 511a, 511b, 511c, 511d, 511e, 511f are provided within the tank body 510 along its inner circumferential surface. Each of the peripheral processing units 511a to 511f includes a cleaning liquid supply pipe and a high-pressure air supply pipe that extend in the vertical direction. The cleaning liquid supply pipe is provided with multiple nozzles (processing liquid ejection section: side peripheral processing liquid ejection section) for spraying the cleaning liquid passing through the cleaning liquid supply pipe toward the inside of the tank body 510, and the high-pressure air supply pipe is provided with multiple nozzles for spraying the high-pressure air passing through the high-pressure air supply pipe toward the inside of the tank body 510.
　また、槽本体５１０内には、保持部５３０（テーブル５３１）及び回転支持機構５３２と同軸的に設けられた支持ブロック上に２つの第１中央処理ユニット５１２ａ、５１２ｂと２つの第２中央処理ユニット５１３ａ、５１３ｂとが設けられている。各第１中央処理ユニット５１２ａ、５１２ｂは、それぞれ上下方向に延びる洗浄液供給管と高圧エア供給管とを含む。洗浄液供給管には当該洗浄液供給管を通る洗浄液を槽本体５１０の内周壁に向けて噴出するための複数のノズル（処理液噴出部：内側処理液噴出部）が設けられ、高圧エア供給管には当該高圧エア供給管を通る高圧エアを槽本体５１０の内周壁に向けて噴出するための複数のノズルが設けられている。また、各第２中央処理ユニット５１３ａ、５１３ｂは、それぞれ上下方向に延びる部分及び水平方向に延びる部分を有する洗浄液供給管と高圧エア供給管とを含む。洗浄液供給管の水平方向に延びる部分には当該洗浄液供給管を通る洗浄液を上方に向けて噴出するための複数のノズル（処理液噴出部：内側処理液噴出部）が設けられ、高圧エア供給管の水平方向に延びる部分には当該高圧エア供給管を通る高圧エアを上方に向けて噴出するためのノズルが設けられている。 In addition, two first central processing units 512a, 512b and two second central processing units 513a, 513b are provided on a support block that is coaxial with the holding unit 530 (table 531) and the rotating support mechanism 532 in the tank body 510. Each of the first central processing units 512a, 512b includes a cleaning liquid supply pipe and a high-pressure air supply pipe that extend in the vertical direction. The cleaning liquid supply pipe is provided with a plurality of nozzles (processing liquid ejection section: inner processing liquid ejection section) for ejecting the cleaning liquid passing through the cleaning liquid supply pipe toward the inner wall of the tank body 510, and the high-pressure air supply pipe is provided with a plurality of nozzles for ejecting the high-pressure air passing through the high-pressure air supply pipe toward the inner wall of the tank body 510. Each of the second central processing units 513a, 513b includes a cleaning liquid supply pipe and a high-pressure air supply pipe that each have a portion that extends in the vertical direction and a portion that extends in the horizontal direction. The horizontally extending portion of the cleaning liquid supply pipe is provided with multiple nozzles (treatment liquid ejection section: inner treatment liquid ejection section) for ejecting the cleaning liquid passing through the cleaning liquid supply pipe in an upward direction, and the horizontally extending portion of the high-pressure air supply pipe is provided with nozzles for ejecting the high-pressure air passing through the high-pressure air supply pipe in an upward direction.
　更に、洗浄槽５００の蓋部５２０の内側には、当該蓋部５２０が槽本体５１０の開口を塞いだ状態で槽本体５１０の内方を臨むように２つの上部処理ユニット５２１、５２２が設けられている。各上部処理ユニット５２１、５２２は、それぞれ洗浄液供給管と高圧エア供給管とを含む。一方の上部処理ユニット５２１では、洗浄液供給管に当該洗浄液供給管を通る洗浄液を槽本体５１０の内方（下方）に向けて噴出するための複数のノズル（処理液噴出部）が設けられ、高圧エア供給管に当該高圧エア供給管を通る高圧エアを槽本体５１０の内方（下方）に向けて噴出するための複数のノズルが設けられている。他方の上部処理ユニット５２２では、洗浄液供給管に当該洗浄液供給管を通る洗浄液をＦＯＵＰ２００のドア部２２０が装着される取付部５４０に向けて噴出する複数のノズルが設けられ、高圧エア供給管に当該高圧エア供給管を通る高圧エアを取付部５４０に向けて噴出する複数のノズルが設けられている。 Furthermore, two upper processing units 521, 522 are provided inside the lid 520 of the cleaning tank 500 so as to face the inside of the tank body 510 with the lid 520 covering the opening of the tank body 510. Each of the upper processing units 521, 522 includes a cleaning liquid supply pipe and a high-pressure air supply pipe. In one of the upper processing units 521, the cleaning liquid supply pipe is provided with a plurality of nozzles (processing liquid ejection section) for ejecting the cleaning liquid passing through the cleaning liquid supply pipe toward the inside (downward) of the tank body 510, and the high-pressure air supply pipe is provided with a plurality of nozzles for ejecting the high-pressure air passing through the high-pressure air supply pipe toward the inside (downward) of the tank body 510. In the other upper processing unit 522, the cleaning liquid supply pipe is provided with multiple nozzles that spray the cleaning liquid passing through the cleaning liquid supply pipe toward the mounting part 540 to which the door part 220 of the FOUP 200 is attached, and the high-pressure air supply pipe is provided with multiple nozzles that spray the high-pressure air passing through the high-pressure air supply pipe toward the mounting part 540.
　上述したような洗浄システムでは、処理用ケージ１００に収容された複数の支持フレームＦ（被処理物）が次のようにして処理（洗浄・乾燥）される。 In the cleaning system described above, multiple support frames F (workpieces) housed in the processing cage 100 are processed (cleaned and dried) as follows.
　複数の支持フレームＦが所定の間隔をもって収容された処理用ケージ１００（図５～図９参照）が、把持部２０を上にしてロードポート６１０に載置されている。処理用ケージ１００は、そのままの姿勢にて、移動機構によりロードポート６１０から導入口を通して処理室６００のセット台４００に移動される。この状態で、ロボット３００は、ハンド３１０によってセット台４００に載置された処理用ケージ１００の把持部２０を把持し、処理用ケージ１００を蓋部５１０の解放された槽本体５１０（洗浄槽５００）に搬送する。そして、ロボット３００は、槽本体５１０のテーブル５３１（保持部５３０）に処理用ケージ１００を、把持部２０を上側にして下フレーム１２がテーブル５３１に当接するようにセットし、ハンド３１０を把持部２０から分離させた後、槽本体５１０（洗浄槽５００）から退避する。 The processing cage 100 (see Figures 5 to 9), which contains multiple support frames F at a predetermined interval, is placed on the load port 610 with the gripper 20 facing up. The processing cage 100 is moved in this position by the moving mechanism from the load port 610 through the inlet to the set table 400 of the processing chamber 600. In this state, the robot 300 grips the gripper 20 of the processing cage 100 placed on the set table 400 with the hand 310, and transports the processing cage 100 to the tank body 510 (cleaning tank 500) with the lid 510 released. The robot 300 then sets the processing cage 100 on the table 531 (holding part 530) of the tank body 510 with the gripper 20 facing up and the lower frame 12 abutting against the table 531, and after separating the hand 310 from the gripper 20, retreats from the tank body 510 (cleaning tank 500).
　洗浄槽５００（槽本体５１０）において、処理用ケージ１００は、２つの第１中央処理ユニット５１２ａ、５１２ｂ及び２つの第２中央処理ユニット５１３ａ、５１３ｂが処理用ケージ１００（ケージ本体１０）における矩形中空環状のフレーム構造を有する下フレーム１２及びそれぞれ中空環状のフレーム体である複数の支持フレームＦの中空部分を通るようにして、図１５に示すように、テーブル５３１上にセットされる。その後、蓋部５２０が槽本体５１０の開口を閉ざす（図１５参照）。 In the cleaning tank 500 (tank body 510), the processing cage 100 is set on the table 531 as shown in FIG. 15 so that the two first central processing units 512a, 512b and the two second central processing units 513a, 513b pass through the hollow parts of the lower frame 12 having a rectangular hollow ring-shaped frame structure in the processing cage 100 (cage body 10) and the multiple support frames F, each of which is a hollow ring-shaped frame body. After that, the lid 520 closes the opening of the tank body 510 (see FIG. 15).
　図１５に示すように、テーブル５３１に処理用ケージ１００がセットされた状態で、６つの周囲処理ユニット５１１ａ～５１１ｆ及び上部処理ユニット５２１は、処理用ケージ１００（ケージ本体１０）の周囲に配置されることになる。特に、６つの周囲処理ユニット５１１ａ～５１１ｆは、処理用ケージ１００（ケージ本体１０）の側面パネル１３ａ、１３ｂに対向するように配置されることになり、上部処理ユニット５２１は、処理用ケージ１００（ケージ本体１０）の上部（上フレーム１１）に対向するように配置されることになる。 As shown in FIG. 15, when the processing cage 100 is set on the table 531, the six peripheral processing units 511a-511f and the upper processing unit 521 are arranged around the processing cage 100 (cage body 10). In particular, the six peripheral processing units 511a-511f are arranged to face the side panels 13a, 13b of the processing cage 100 (cage body 10), and the upper processing unit 521 is arranged to face the upper part (upper frame 11) of the processing cage 100 (cage body 10).
　また、槽本体５１０のテーブル５３１に処理用ケージ１００がセットされた状態で、２つの第１中央処理ユニット５１２ａ、５１２ｂ及び２つの第２中央処理ユニット５１３ａ、５１３ｂは、テーブル５３１にセットされた処理用ケージ１００（ケージ本体１０）における中空環状の前記フレーム構造を有する前記ケージ本体１０の下フレーム１２を通してケージ本体１０内に配置されることになる。 In addition, when the processing cage 100 is set on the table 531 of the tank body 510, the two first central processing units 512a, 512b and the two second central processing units 513a, 513b are arranged in the cage body 10 through the lower frame 12 of the cage body 10, which has the hollow ring-shaped frame structure in the processing cage 100 (cage body 10) set on the table 531.
　このようにして複数の支持フレームＦ（被処理物）が収容された処理用ケージ１００が洗浄槽５００内のテーブル５３１にセットされると、回転支持機構５３２によって支持されたテーブル５３１が回転する。それに伴って、処理用ケージ１００がそのテーブル５３１に垂直な軸を中心に回転する。このように処理用ケージ１００が回転する状態で、６つの周処理ユニット５１１ａ～５１１ｆ、２つの第１中央処理ユニット５１２ａ、５１２ｂ、２つの第２中央処理ユニット５１３ａ、５１３ｂ及び上部処理ユニット５２１の洗浄液供給管に設けられた各ノズルから洗浄液が噴出する。これにより、回転する処理用ケージ１００に対して洗浄液が吹き付けられる（洗浄処理）。 When the processing cage 100 housing multiple support frames F (processing objects) is set on the table 531 in the cleaning tank 500 in this manner, the table 531 supported by the rotary support mechanism 532 rotates. Accordingly, the processing cage 100 rotates about an axis perpendicular to the table 531. With the processing cage 100 rotating in this manner, cleaning liquid is sprayed from each nozzle provided on the cleaning liquid supply pipes of the six circumferential processing units 511a-511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the upper processing unit 521. As a result, the cleaning liquid is sprayed onto the rotating processing cage 100 (cleaning process).
　６つの周処理ユニット５１１ａ～５１１ｆから噴出する洗浄液は、処理用ケージ１００の２つの側パネル１３ａのそれぞれに形成された複数の通孔１３２ａ、１３２ｂ（図５～図９参照）を通して処理用ケージ１００内に収容された複数の支持フレームＦのそれぞれに吹き付けられる。また、２つの第１中央処理ユニット５１２ａ、５１２ｂから噴出する処理液は、処理用ケージ１００に収容されたそれぞれ中空環状の複数の支持フレームＦのそれぞれに内側から吹き付けられる。更に、上部処理ユニット５２１から噴出する洗浄液は、２つの第２中央処理ユニット５１３ａ、５１３ｂから上方に向かって噴出して返る洗浄液とともに、処理用ケージ１００の上フレーム１１の複数の隙間を通して複数の支持フレームＦのそれぞれの表面を流れ落ちる。 The cleaning liquid ejected from the six peripheral processing units 511a to 511f is sprayed onto each of the multiple support frames F housed in the processing cage 100 through multiple through holes 132a, 132b (see Figures 5 to 9) formed in each of the two side panels 13a of the processing cage 100. The processing liquid ejected from the two first central processing units 512a, 512b is sprayed from the inside onto each of the multiple hollow annular support frames F housed in the processing cage 100. Furthermore, the cleaning liquid ejected from the upper processing unit 521, together with the cleaning liquid ejected upward from the two second central processing units 513a, 513b, flows down the surfaces of each of the multiple support frames F through multiple gaps in the upper frame 11 of the processing cage 100.
　なお、蓋部５２０の取付部５４０にＦＯＵＰ２００のドア部２２０が装着されていないので、上部処理ユニット５２２から上方に向けて噴出する洗浄液は、そのまま返して、処理用ケージ１００の上フレーム１１の複数の隙間を通って複数の支持フレームＦのそれぞれの表面を流れ落ちる。 In addition, since the door portion 220 of the FOUP 200 is not attached to the mounting portion 540 of the lid portion 520, the cleaning liquid sprayed upward from the upper processing unit 522 returns directly and flows down the surfaces of each of the multiple support frames F through the multiple gaps in the upper frame 11 of the processing cage 100.
　上述したようにして洗浄液が回転する処理用ケージ１００に所定時間吹き掛けられた後、テーブル５３１の回転が停止される。その後、テーブル５３１の回転により処理用ケージ１００が回転する。この状態で、６つの周処理ユニット５１１ａ～５１１ｆ、２つの第１中央処理ユニット５１２ａ、５１２ｂ、２つの第２中央処理ユニット５１３ａ、５１３ｂ及び上部処理ユニット５２１の高圧供給管に設けられた各ノズルから高圧エアが噴出する。これにより、回転する処理用ケージ１００に対して高圧エアが吹き付けられる。回転する処理用ケージ１００に対して吹き付けられる高圧エアによって、処理用ケージ１００に収容されて前述したように洗浄処理がなされた複数の支持フレームＦのそれぞれの表面に付着した洗浄液が飛ばされ、また、気化され、複数の支持フレームＦ表面の液分（洗浄液）が除去される。 After the cleaning liquid is sprayed onto the rotating processing cage 100 for a predetermined time as described above, the rotation of the table 531 is stopped. The rotation of the table 531 then rotates the processing cage 100. In this state, high-pressure air is sprayed from each nozzle provided on the high-pressure supply pipe of the six circumferential processing units 511a to 511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the upper processing unit 521. This causes the high-pressure air to be sprayed onto the rotating processing cage 100. The high-pressure air sprayed onto the rotating processing cage 100 blows away and vaporizes the cleaning liquid adhering to each surface of the multiple support frames F that are housed in the processing cage 100 and have been subjected to the cleaning process as described above, and the liquid (cleaning liquid) on the surfaces of the multiple support frames F is removed.
　上述した乾燥処理が終了すると、洗浄槽５００の蓋部５２０が解放される。洗浄槽５００から退避していたロボット３００は、ハンド３１０を槽本体５１０内に進入させ、ハンド３１０によって槽本体５１０のテーブル５３１（保持部５３０）にセットされた状態の処理用ケージ１００の把持部２０を把持する。そして、ロボット３００は、処理用ケージ１００を槽本体５１０内からセット台４００に搬送する。ロボット３００は、セット台４００において、ハンド３１０を把持部２０から分離させて処理用ケージ１００をセット台４００に置いた後、セット台４００から退避する。セット台４００に置かれた洗浄及び乾燥の各処理の済んだ複数の支持フレームＦを収容した処理用ケージ１００は、移動機構により、そのセット台４００から処理室６００の外に設置されたロードポート６１０に移動される。 When the above-mentioned drying process is completed, the lid 520 of the cleaning tank 500 is released. The robot 300, which has been retreated from the cleaning tank 500, advances the hand 310 into the tank body 510 and uses the hand 310 to grasp the gripping part 20 of the processing cage 100 set on the table 531 (holding part 530) of the tank body 510. The robot 300 then transports the processing cage 100 from inside the tank body 510 to the set table 400. The robot 300 separates the hand 310 from the gripping part 20 at the set table 400, places the processing cage 100 on the set table 400, and retreats from the set table 400. The processing cage 100, which contains the multiple support frames F that have been subjected to the cleaning and drying processes placed on the set table 400, is moved from the set table 400 to the load port 610 installed outside the processing chamber 600 by the moving mechanism.
　その後、洗浄及び乾燥の各処理の済んだ複数の支持フレームＦを収容した処理用ケージ１００は、支持フレームＦを利用する工程に運ばれる。例えば、半導体製造工程に運ばれて、各支持フレームＦは所定サイズの半導体ウェーハを一枚ずつ収納するために利用される。 Then, the processing cage 100 housing the multiple support frames F that have been cleaned and dried is transported to a process that uses the support frames F. For example, it is transported to a semiconductor manufacturing process, where each support frame F is used to store semiconductor wafers of a predetermined size one by one.
　上述したような洗浄システム（処理システム）によれば、複数の支持フレームＦが隙間をもって収容されるケージ本体１０（処理用ケージ１００）が把持部２０を把持するロボット３０により洗浄槽５００まで搬送されるので、複数の支持フレームＦを洗浄槽５００まで効率的に搬送することができる。そして、洗浄槽５００にてその支持フレームＦを効率的に洗浄（処理）することができる。 According to the cleaning system (processing system) as described above, the cage body 10 (processing cage 100) in which multiple support frames F are housed with gaps between them is transported to the cleaning tank 500 by the robot 30 that grasps the gripping portion 20, so that the multiple support frames F can be efficiently transported to the cleaning tank 500. Then, the support frames F can be efficiently cleaned (processed) in the cleaning tank 500.
　また、ケージ本体１０に設けられた把持部２０を把持して処理用ケージ１００を搬送するロボットとして、ＦＯＵＰ２００に設けられた把持部２２０を把持してＦＯＵＰ処理槽５００に前記ＦＯＵＰを搬送するロボットを利用することができるため、新たなロボットを最初から設計する必要がなく、洗浄システムを比較的容易に実現することができる。 In addition, a robot that grasps the gripper 220 provided on the FOUP 200 and transports the FOUP to the FOUP processing tank 500 can be used as a robot that grasps the gripper 20 provided on the cage body 10 and transports the processing cage 100, so there is no need to design a new robot from scratch, and the cleaning system can be realized relatively easily.
　ＦＯＵＰ２００を処理すべきＦＯＵＰ洗浄槽を、処理用ケージ１００（ケージ本体１０）に収容された複数の支持フレームＦ（被処理物）を洗浄（処理）すべき洗浄槽５００として利用することができるので、新たな洗浄槽を最初から設計する必要がなく、洗浄システムを比較的容易に実現することができる。 The FOUP cleaning tank for processing the FOUP 200 can be used as the cleaning tank 500 for cleaning (processing) the multiple support frames F (processing objects) housed in the processing cage 100 (cage body 10), so there is no need to design a new cleaning tank from scratch, and the cleaning system can be realized relatively easily.
　また、ＦＯＵＰ２００の洗浄と複数の支持フレームＦ（被処理物）の洗浄との双方に、共通のロボット３００及び洗浄槽５００を利用することができるので、工場設備の簡素化を図ることができる。 Furthermore, a common robot 300 and cleaning tank 500 can be used for both cleaning the FOUP 200 and cleaning the multiple support frames F (workpieces), which simplifies factory equipment.
　なお、処理用ケージ１００（ケージ本体１０）に設けられる把持部２０は、ＦＯＵＰ２００の把持部２１１を把持するロボット３００によって把持可能な形状とすることができるとしたが、これに限定されない。この把持部２０は、ＦＯＵＰ２０以外の、半導体ウェーハを収容する他の容器（例えば、ＦＯＳＢ：Front Opening Shipping Box）等の他の物体に設けられた把持部を把持して当該物体を処理する物体処理槽に前記物体を搬送するロボットにより把持可能な形状であってもよい。この場合、処理用ケージ１００（ケージ本体１０）に設けられた把持部２０を把持して処理用ケージ１００を搬送するロボットとして、ＦＯＵＰ２００以外の前記物体に設けられた把持部を把持して物体処理槽に前記物体を搬送するロボットを利用することができる。また、把持部２０は、処理用ケージ１００専用のものであってもよい。この場合、当該洗浄システム専用のロボットが用いられる。 Note that although the gripper 20 provided on the processing cage 100 (cage body 10) can have a shape that can be gripped by the robot 300 that grips the gripper 211 of the FOUP 200, this is not limiting. The gripper 20 may have a shape that can be gripped by a robot that grips a gripper provided on another object, such as another container that contains semiconductor wafers (e.g., FOSB: Front Opening Shipping Box), other than the FOUP 20, and transports the object to an object processing tank where the object is processed. In this case, a robot that grips a gripper provided on the object other than the FOUP 200 and transports the object to an object processing tank can be used as a robot that grips the gripper 20 provided on the processing cage 100 (cage body 10) and transports the processing cage 100. The gripper 20 may be dedicated to the processing cage 100. In this case, a robot dedicated to the cleaning system is used.
　また、前述した実施の形態では、処理用ケージ１００（ケージ本体１０）は、ＦＯＵＰ２００を洗浄（処理）するＦＯＵＰ処理槽５００（槽本体５１０）に収容可能な外形形状を有することができるとしたが、これに限定されない。処理用ケージ１００（ケージ本体１０）は、ＦＯＵＰ処理槽５００以外の洗浄槽に収容可能な外形形状を有するものであってもよい。この場合、ＦＯＰＵ２００以外の物体を処理すべき洗浄槽を、処理用ケージ１００（ケージ本体１０）に収容された複数の支持フレームＦを洗浄すべき洗浄槽として利用することができる。また、その洗浄槽は、当該洗浄システム専用のものであってもよい。 In addition, in the above-described embodiment, the processing cage 100 (cage body 10) can have an external shape that can be accommodated in the FOUP processing tank 500 (tank body 510) that cleans (processes) the FOUP 200, but this is not limited to the above. The processing cage 100 (cage body 10) may have an external shape that can be accommodated in a cleaning tank other than the FOUP processing tank 500. In this case, a cleaning tank for processing objects other than the FOPU 200 can be used as a cleaning tank for cleaning the multiple support frames F housed in the processing cage 100 (cage body 10). Furthermore, the cleaning tank may be dedicated to the cleaning system.
　また、前述した実施の形態では、処理用ケージ１００（ケージ本体１０）における２つの側パネル１３ａ、１３ｂ（２つの側部）及び後縦ガードバー１５ａ、１５ｂ（後部）に複数の段にて構成される棚部１３１ａ、１３１ｂ、１５１ａ、１５１ｂが形成されていたが、これに限定されない。少なくとも２つの側パネル１３ａ、１３ｂに棚部１３１ａ、１３１ｂが形成されていればよい。 In addition, in the above-described embodiment, the shelf portions 131a, 131b, 151a, 151b consisting of multiple steps are formed on the two side panels 13a, 13b (two side portions) and the rear vertical guard bars 15a, 15b (rear portion) of the processing cage 100 (cage body 10), but this is not limited to this. It is sufficient that the shelf portions 131a, 131b are formed on at least two side panels 13a, 13b.
　更に、前述した実施の形態では、処理用ケージ１００において、ケージ本体１０の後部として２つの後縦ガードバー１５ａ、１５ｂが設けられていたが、３以上の後縦ガードバーが設けられるようにしてもよい。 Furthermore, in the embodiment described above, the processing cage 100 has two rear vertical guard bars 15a, 15b at the rear of the cage body 10, but three or more rear vertical guard bars may be provided.
　前述した構造の処理用ケージ１００には、厚さに対して面的な広がりの大きい板状物やフレーム体等の非厚状物以外の物を収容することができる。 The processing cage 100 with the above-mentioned structure can accommodate objects other than non-thick objects such as plate-like objects or frame bodies that have a large surface area relative to their thickness.
　更に、洗浄槽５００に設けられる洗浄液を噴出する処理液噴出部や高圧エアの噴出部それぞれの位置、数、サイズ等は、洗浄の対象となる被処理物の形状、数量、配置関係等に応じて適宜決めることができる。 Furthermore, the position, number, size, etc. of each of the processing liquid ejection parts that eject the cleaning liquid and the high-pressure air ejection parts provided in the cleaning tank 500 can be appropriately determined according to the shape, quantity, arrangement, etc. of the workpieces to be cleaned.
　前述した実施の形態では、被処理物を洗浄するものであったが、被処理物に対して洗浄以外の他の処理を施すものであってもよい。 In the above-described embodiment, the object to be treated is cleaned, but the object may be subjected to a process other than cleaning.
　次に、本発明の第２の実施の形態に係る処理システム（洗浄ステム）について説明する。 Next, we will explain the processing system (cleaning system) according to the second embodiment of the present invention.
　第２の実施の形態に係る処理システムは、図１６～図２０に示す処理用ケージ１００を用いる。なお、図１６は、前押えバーが解除位置にある状態の処理用ケージ１００を示す斜視図であり、図１７は、前押えバーが押え位置にある状態の処理用ケージ１００を示す斜視図であり、図１８は、処理用ケージ１００を斜め下方（その１）から見た状態を示す斜視図であり、図１９は、処理用ケージ１００を他の斜め下方（その２）からみた状態を示す斜視図であり、図２０は、処理用ケージ１００を後方の斜め上方からみた状態を示す斜視図である。なお、図１６～図２０のそれぞれにおいて、処理用ケージ１００に対して、前後方向ＦＲＤ、左右方向ＬＲＤ及び上下方向ＶＤが定義される。 The processing system according to the second embodiment uses the processing cage 100 shown in Figures 16 to 20. Note that Figure 16 is a perspective view of the processing cage 100 with the front pressure bar in the release position, Figure 17 is a perspective view of the processing cage 100 with the front pressure bar in the pressure position, Figure 18 is a perspective view of the processing cage 100 as viewed diagonally from below (part 1), Figure 19 is a perspective view of the processing cage 100 as viewed diagonally from another diagonal downward position (part 2), and Figure 20 is a perspective view of the processing cage 100 as viewed diagonally from above and behind. Note that in each of Figures 16 to 20, a front-to-rear direction FRD, a left-to-right direction LRD, and a top-to-bottom direction VD are defined for the processing cage 100.
　本発明の第２の実施の形態に係る処理システムに用いられる処理用ケージ１００は、第１の実施の形態のもの（図５～図９参照）と同様に、相互に対応するように配置された上部と底部、相互に対応するように配置される２つの側部、及び互いに対向するように配置される前部と後部とによって囲まれる立体形状を有している。上部は、上フレーム１１単体で構成された第１の実施の形態のもの（図５～図９参照）と異なり、その上フレーム１１の他、上フレーム１１の下側の面に固定された天板１７を有する。これにより、フレーム構造となる上フレーム１１に形成された隙間が天板１７によって概ね塞がれた状態になっている。また、後部は、２つの後縦ガードバー１５ａ、１５ｂで構成された第１の実施の形態のもの（特に図９参照）と異なり、後縦ガードバー１５ａ、１５ｂに相当する２つの縦フレーム１５ｃ、１５ｄと、それら２つの縦フレーム１５ｃ、１５ｄを連結させて補強するＸ状の補強フレーム１５ｅとを有する後ガードフレーム１５によって構成される。２つの側部を構成する側パネル１３ａ、１３ｂのそれぞれは、第１の実施の形態の場合と同様の構成となり、それらの内面側には、所定の間隔をもって上下方向ＶＤに配列された複数段の棚部１３１ａが形成されている。そして、後ガードフレーム１５の２つの縦フレーム１５ｃ、１５ｂのそれぞれの内面側には、所定の間隔をもって上下方向ＤＶに配列された複数段の棚部１５１ｃ、１５１ｄが形成されている。これら棚部１５１ｃ、１５１ｄにおける各段は、側パネル１３ａ、１３ｂそれぞれの棚部１３１ａ、１３１ｂにおけるいずれかの段と同じ高さに位置する。 The processing cage 100 used in the processing system according to the second embodiment of the present invention has a three-dimensional shape surrounded by a top and bottom arranged to correspond to each other, two side parts arranged to correspond to each other, and a front and rear part arranged to face each other, similar to that of the first embodiment (see Figures 5 to 9). The top part, unlike that of the first embodiment (see Figures 5 to 9) which is composed of a single upper frame 11, has a top plate 17 fixed to the lower surface of the upper frame 11 in addition to the upper frame 11. As a result, the gaps formed in the upper frame 11, which forms a frame structure, are mostly blocked by the top plate 17. Furthermore, unlike that of the first embodiment (see Figure 9 in particular) which is composed of two rear vertical guard bars 15a, 15b, the rear part is composed of a rear guard frame 15 having two vertical frames 15c, 15d corresponding to the rear vertical guard bars 15a, 15b, and an X-shaped reinforcing frame 15e which connects and reinforces the two vertical frames 15c, 15d. Each of the side panels 13a, 13b that make up the two sides has the same configuration as in the first embodiment, and on their inner surfaces are formed shelves 131a with multiple tiers arranged at a predetermined interval in the vertical direction VD. And on the inner surfaces of the two vertical frames 15c, 15b of the rear guard frame 15, multiple tiers of shelves 151c, 151d are formed with a predetermined interval in the vertical direction DV. Each tier of these shelves 151c, 151d is located at the same height as one of the tiers of the shelves 131a, 131b of the side panels 13a, 13b.
　第２の実施の形態に係る処理システム用いられるケージ本体１０（図１６～図２０）は、前述したような上部の構成及び後部の構成以外については、第１の実施の形態に係る処理システムに用いられるケージ本体１０（図５～図９）と同様の構成である。 The cage body 10 (Figs. 16 to 20) used in the processing system according to the second embodiment has the same configuration as the cage body 10 (Figs. 5 to 9) used in the processing system according to the first embodiment, except for the configuration of the upper part and the rear part as described above.
　上述した構造のケージ本体１０（処理用ケージ１００）は、第１の実施の形態と同様に、複数のフレーム体Ｆ（中空環状）を所定の間隔をもって収容することができる。複数の支持フレームＦは、それぞれの外周縁が、側パネル１３ａ、１３ｂの棚部１３１ａ、１３１ｂ及び後ガードフレーム１５における後フレーム１５ｃ、１５ｄの棚部１５１ｃ、１５１ｄ（支持構造：保持構造）の対応する段に支持された状態でケージ本体１０に収容される（図１７参照）。そして、ヒンジ１４１により揺動可能な前押えバー１４を立てて固定具１４２を連結部１１１に結合することで、前押えバー１４（押え部材：保持構造）が棚部１３１ａ、１３１ｂ、１５１ｃ、１５１ｄの隣接する段の間隔をもって配列される複数の支持フレームＦそれぞれの縁を後ガードフレーム１５の縦フレーム１５ｃ、１５ｄ（棚部１５１ｃ、１５ｄ）に向けて押えた状態になる（押え位置：図６参照）。これにより、複数の支持フレームＦがケージ本体１０内において上下方向ＶＤに所定の間隔をもって配列された状態で保持される。 The cage body 10 (processing cage 100) with the above-described structure can accommodate multiple frame bodies F (hollow annular) at predetermined intervals, as in the first embodiment. The multiple support frames F are accommodated in the cage body 10 with their respective outer peripheral edges supported on corresponding steps of the shelf portions 131a, 131b of the side panels 13a, 13b and the shelf portions 151c, 151d (support structure: holding structure) of the rear frames 15c, 15d in the rear guard frame 15 (see Figure 17). Then, by erecting the swingable front pressure bar 14 with the hinge 141 and connecting the fixture 142 to the connecting portion 111, the front pressure bar 14 (pressing member: holding structure) presses the edges of the multiple support frames F arranged at intervals between adjacent steps of the shelves 131a, 131b, 151c, and 151d toward the vertical frames 15c and 15d ( shelf portions 151c and 15d) of the rear guard frame 15 (pressing position: see FIG. 6). As a result, the multiple support frames F are held in a state arranged at a predetermined interval in the vertical direction VD within the cage body 10.
　第２の実施の形態に係る処理システムは、第１の実施の形態（図１０～図１５参照）と同様の洗浄システムとして構成され、ロボット３００及び洗浄槽５００を有している。 The processing system according to the second embodiment is configured as a cleaning system similar to that of the first embodiment (see Figures 10 to 15), and includes a robot 300 and a cleaning tank 500.
　この洗浄システムでは、第１の実施の形態と同様に、複数の支持フレームＦが所定の間隔をもって収容された処理用ケージ（ケージ本体１０）が、ロードポート６１０から導入口を通して処理室６００のセット台４００に移動し、そのセット台４００に載置される。この状態で、ロボット３００は、ハンド３１０によって処理用ケージ１００の把持部２０を把持して槽本体５１０（洗浄槽５００）まで搬送する。そして、ロボット３００は、槽本体５１０のテーブル５３１（保持部５３０）に処理用ケージ１００を、把持部２０を上側にして下フレーム１２がテーブル５３１に当接するようにセットし、ハンド３１０を把持部２０から分離させた後、槽本体５１０（洗浄槽５００）から退避する。 In this cleaning system, as in the first embodiment, the processing cage (cage body 10) containing multiple support frames F at a predetermined interval is moved from the load port 610 through the inlet to the set table 400 of the processing chamber 600 and placed on the set table 400. In this state, the robot 300 grasps the gripping part 20 of the processing cage 100 with the hand 310 and transports it to the tank body 510 (cleaning tank 500). The robot 300 then sets the processing cage 100 on the table 531 (holding part 530) of the tank body 510 with the gripping part 20 facing up and the lower frame 12 abutting against the table 531, separates the hand 310 from the gripping part 20, and then retreats from the tank body 510 (cleaning tank 500).
　洗浄槽５００（槽本体５１０）において、処理用ケージ１００は、２つの第１中央処理ユニット５１２ａ、５１２ｂ及び２つの第２中央処理ユニット５１３ａ、５１３ｂが処理用ケージ１００（ケージ本体１０）における矩形中空環状のフレーム構造を有する下フレーム１２及びそれぞれ中空環状のフレーム体である複数の支持フレームＦの中空部分を通るようにして、図１５に示すように、テーブル５３１上にセットされる。このように、処理用ケージ１００が洗浄槽５００（槽本体５１０）にセットされると、第１の実施の形態と同様に、テーブル５３１の回転とともに回転する処理用ケージ１００（ケージ本体１０）に対して、６つの周処理ユニット５１１ａ～５１１ｆ、２つの第１中央処理ユニット５１２ａ、５１２ｂ、２つの第２中央処理ユニット５１３ａ、５１３ｂ及び上部処理ユニット５２１の洗浄液供給管に設けられた各ノズルから洗浄液が噴出する。これにより、回転する処理用ケージ１００に対して洗浄液が吹き付けられる（洗浄処理）。 In the cleaning tank 500 (tank body 510), the processing cage 100 is set on the table 531 as shown in FIG. 15, so that the two first central processing units 512a, 512b and the two second central processing units 513a, 513b pass through the lower frame 12 having a rectangular hollow ring-shaped frame structure in the processing cage 100 (cage body 10) and the hollow parts of the multiple support frames F, each of which is a hollow ring-shaped frame body. When the processing cage 100 is set in the cleaning tank 500 (tank body 510) in this way, as in the first embodiment, the six circumferential processing units 511a to 511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the nozzles provided on the cleaning liquid supply pipes of the upper processing unit 521 spray the cleaning liquid onto the processing cage 100 (cage body 10) which rotates with the rotation of the table 531. This causes the cleaning liquid to be sprayed onto the rotating processing cage 100 (cleaning process).
　このように、６つの周処理ユニット５１１ａ～５１１ｆ、２つの第１中央処理ユニット５１２ａ、５１２ｂ、２つの第２中央処理ユニット５１３ａ、５１３ｂ及び上部処理ユニット５２１から噴出する。これにより、第１の実施の形態とどうように、洗浄液によって処理用ケージ１００（ケージ本体１０）に収容されたそれぞれ中空環状の複数の支持フレームが洗浄（処理）される。この洗浄の過程において、２つの第２中央処理ユニット５１３ａ、５１３ｂから上方に向けて噴出する洗浄液は、処理用ケージ１００（ケージ本体１０）の天板１７によって、ケージ用ケージ１００の外部に飛散することが防止される。これにより、２つの第２中央処理ユニット５１３ａ、５１３ｂから噴出する洗浄液処理液を処理用ケージ１００内（ケージ本体１０）内に留めておくことができる。 In this way, the cleaning liquid is sprayed from the six peripheral processing units 511a-511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the upper processing unit 521. As a result, similar to the first embodiment, the cleaning liquid cleans (processes) the hollow ring-shaped support frames housed in the processing cage 100 (cage body 10). During this cleaning process, the cleaning liquid sprayed upward from the two second central processing units 513a, 513b is prevented from scattering outside the cage 100 (cage body 10) by the top plate 17 of the processing cage 100 (cage body 10). As a result, the cleaning liquid processing liquid sprayed from the two second central processing units 513a, 513b can be kept inside the processing cage 100 (cage body 10).
　上述したようにして洗浄液が終了すると、第１の実施の形態と同様に、６つの周処理ユニット５１１ａ～５１１ｆ、２つの第１中央処理ユニット５１２ａ、５１２ｂ、２つの第２中央処理ユニット５１３ａ、５１３ｂ及び上部処理ユニット５２１の高圧供給管に設けられた各ノズルから噴出する高圧エアによって、処理用ケージ１００に収容された複数の支持フレームＦそれぞれの表面に付着した洗浄液が除去される（乾燥）。その後、洗浄槽５００から退避していたロボット３００は、ハンド３１０を槽本体５１０内に進入させ、ハンド３１０によって槽本体５１０のテーブル５３１（保持部５３０）にセットされた状態の処理用ケージ１００の把持部２０を把持する。そして、ロボット３００は、処理用ケージ１００を槽本体５１０内からセット台４００に搬送する。ロボット３００は、セット台４００において、ハンド３１０を把持部２０から分離させて処理用ケージ１００をセット台４００に置いた後、セット台４００から退避する。セット台４００に置かれた洗浄及び乾燥の各処理の済んだ複数の支持フレームＦを収容した処理用ケージ１００は、移動機構により、そのセット台４００から処理室６００の外に設置されたロードポート６１０に移動される。 When the cleaning liquid is finished as described above, as in the first embodiment, the cleaning liquid adhering to the surface of each of the multiple support frames F housed in the processing cage 100 is removed (dried) by high-pressure air ejected from each nozzle provided on the high-pressure supply pipe of the six circumferential processing units 511a-511f, the two first central processing units 512a, 512b, the two second central processing units 513a, 513b, and the upper processing unit 521. After that, the robot 300, which had retreated from the cleaning tank 500, advances the hand 310 into the tank body 510, and the hand 310 grasps the gripping part 20 of the processing cage 100 set on the table 531 (holding part 530) of the tank body 510. The robot 300 then transports the processing cage 100 from inside the tank body 510 to the set table 400. The robot 300 separates the hand 310 from the gripping part 20 at the set table 400, places the processing cage 100 on the set table 400, and then retreats from the set table 400. The processing cage 100, which contains multiple support frames F that have been subjected to the cleaning and drying processes and placed on the set table 400, is moved by a moving mechanism from the set table 400 to a load port 610 installed outside the processing chamber 600.
　第１の実施の形態に係る処理システムによれば、第１の実施の形態と同様に、複数の支持フレームＦが隙間をもって収容されるケージ本体１０（処理用ケージ１００）が把持部２０を把持するロボット３０により洗浄槽５００まで搬送されるので、複数の支持フレームＦを洗浄槽５００まで効率的に搬送することができる。そして、洗浄槽５００にてその支持フレームＦを効率的に洗浄（処理）することができる。 In the processing system according to the first embodiment, as in the first embodiment, the cage body 10 (processing cage 100) in which the multiple support frames F are housed with gaps is transported to the cleaning tank 500 by the robot 30 that grasps the gripping portion 20, so that the multiple support frames F can be efficiently transported to the cleaning tank 500. Then, the support frames F can be efficiently cleaned (processed) in the cleaning tank 500.
　また、処理用ケージ１００におけるケージ本体１０の上部には、上フレーム１１の隙間を塞ぐ天板１７が含まれているので、洗浄槽５００（槽本体５１０）での洗浄の過程において、２つの第２中央処理ユニット５１３ａ、５１３ｂから上方に向けて噴出する洗浄液処理液を処理用ケージ１００内（ケージ本体１０）内に留めておくことができるので、処理用ケージ１００内（ケージ本体１０）に収容された複数の支持フレームＦに対する洗浄効果を上げることができる。 In addition, the upper part of the cage body 10 in the processing cage 100 includes a top plate 17 that closes the gap in the upper frame 11, so that during the cleaning process in the cleaning tank 500 (tank body 510), the cleaning liquid processing liquid sprayed upward from the two second central processing units 513a, 513b can be retained within the processing cage 100 (cage body 10), thereby improving the cleaning effect on the multiple support frames F housed within the processing cage 100 (cage body 10).
　更に、ケージ本体１０の後部として、縦フレーム１５ｃ、１５ｄと、それら２つの縦フレーム１５ｃ、１５ｄを連結させて補強するＸ状の補強フレーム１５ｅと、を有する後ガードフレーム１５を用いたので、第１の実施の形態のもの（後縦ガードバー１５ａ、１５ｂ）に比べて、ケージ本体１０の剛性を上げることができる。 Furthermore, the rear guard frame 15 is used at the rear of the cage body 10, which has vertical frames 15c, 15d and an X-shaped reinforcing frame 15e that connects and reinforces the two vertical frames 15c, 15d, so the rigidity of the cage body 10 can be increased compared to the first embodiment (rear vertical guard bars 15a, 15b).
　前述した処理用ケージ１００（第１の実施の形態及び第２の実施の形態の双方）は、支持フレームＦのような厚さに対して面的な広がりの大きい板状物等の非厚状物以外の物を収容することができる。 The processing cage 100 described above (both the first and second embodiments) can accommodate objects other than non-thick objects such as plate-like objects that have a large surface area relative to their thickness, such as the support frame F.
　例えば、図２１に示すようなワイヤートレイ４０を用いることにより、４つのビーカー（カップ状の容器）を処理用ゲージ１００のケージ本体１０内に隙間をもって収容することができる。図２１において、ワイヤートレイ４０は、所定太さの金属製ワイヤーによって形成され、所定高さの直方体形状となる外枠部４００を有する。外枠部４００の対向する２つの下辺のそれぞれに外方に張り出すフランジ部４０１ａ、４０１１ｂが形成されている。外枠部４００の内側には所定の間隔をもって４つの突出部４０２ａ、４０２ｂ、４０２ｃ、４０２ｄが形成されるように金属製ワイヤーが折り曲げ加工されている。 For example, by using a wire tray 40 as shown in FIG. 21, four beakers (cup-shaped containers) can be accommodated with gaps within the cage body 10 of the processing gauge 100. In FIG. 21, the wire tray 40 is formed from a metal wire of a predetermined thickness and has an outer frame portion 400 that is a rectangular parallelepiped of a predetermined height. Flange portions 401a, 4011b that protrude outward are formed on each of the two opposing lower sides of the outer frame portion 400. The metal wire is bent so that four protrusions 402a, 402b, 402c, 402d are formed at predetermined intervals on the inside of the outer frame portion 400.
　このようなワイヤートレイ４０では、図２２に示すように、突出部４０２ａにビーカー３０ａが、突出部４０２ｂにビーカー３０ｂが、突出部４０２ｃにビーカー３０ｃが、突出部４０２ｄにビーカー３０ｄがそれぞれ被せられてセットされる。このように４つのビーカー３０ａ、３０ｂ、３０ｃ、３０ｄがセットされたワイヤートレイ４０は、図２３に示すように、フランジ４０１ａが一方の側パネル１３ａの棚部１３１ａのある段に支持されるとともに、フランジ４０１ｂが他方の側パネル１３ｂの棚部１３１ｂの対応する段に支持されるように、ケージ本体１０（第２の実施の形態のもの）内に収容される。そして、図２４に示すように、ヒンジ１４１により揺動可能な前押えバー１４を立てて固定具１４２を連結部１１１に結合することで、前押えバー１４が棚部１３１ａ、１３１ｂに支持されるワイヤートレイ４０の前方側のワイヤーを押えた状態になる。これにより、処理用ケージ１００（ケージ本体１０）内に、４つのビーカー３０ａ、３０ｂ、３０ｃ、３０ｄが隙間をもって収容される。 In such a wire tray 40, as shown in Figure 22, beaker 30a is placed on protrusion 402a, beaker 30b on protrusion 402b, beaker 30c on protrusion 402c, and beaker 30d on protrusion 402d. The wire tray 40 with the four beakers 30a, 30b, 30c, and 30d set in this manner is housed within the cage body 10 (of the second embodiment) so that flange 401a is supported on a certain step of shelf 131a of one side panel 13a, and flange 401b is supported on the corresponding step of shelf 131b of the other side panel 13b, as shown in Figure 23. Then, as shown in FIG. 24, the front pressure bar 14, which can swing using the hinge 141, is erected and the fixture 142 is connected to the connecting portion 111, so that the front pressure bar 14 holds down the front wire of the wire tray 40 supported by the shelves 131a and 131b. This allows the four beakers 30a, 30b, 30c, and 30d to be accommodated with gaps in between within the processing cage 100 (cage body 10).
　上述したように４つのビーカー３０ａ、３０ｂ、３０ｃ、３０ｄが収容された処理用ケージ１００（図１２参照）は、把持部２０を把持するロボットによって、洗浄槽（処理槽）に搬送される。そして、その洗浄槽（処理槽）において、処理用ケージ１００（ケージ本体１０）に収容された状態の４つのビーカー３０ａ、３０ｂ、３０ｃ、３０ｄが洗浄（処理）に供される。 As described above, the processing cage 100 (see FIG. 12) containing the four beakers 30a, 30b, 30c, and 30d is transported to a cleaning tank (processing tank) by a robot that grasps the gripping portion 20. In the cleaning tank (processing tank), the four beakers 30a, 30b, 30c, and 30d contained in the processing cage 100 (cage body 10) are subjected to cleaning (processing).
　上述したような処理用ケージ１００によれば、前述したように複数の非厚状物Ｆを処理槽まで効率的に搬送することができるほか、ワイヤートレイ４０を用いることにより４つのビーカー３０ａ－３０ｄ（カップ状の容器）を一度に処理槽まで搬送することができ、その処理槽において４つのビーカー３０ａ－３０ｄを処理に供することができる。更に、前述した非厚状物やビーカーのほか、ケージ本体１０に複数収容することができる物であれば、その複数の物を、把持部２０を把持するロボットによって処理槽まで搬送することができ、その処理槽においてその複数の物を処理に供することができる。 The processing cage 100 as described above allows multiple non-thick objects F to be efficiently transported to the processing tank as described above, and by using the wire tray 40, four beakers 30a-30d (cup-shaped containers) can be transported to the processing tank at once, and the four beakers 30a-30d can be subjected to processing in the processing tank. Furthermore, in addition to the non-thick objects and beakers described above, if there are multiple objects that can be stored in the cage body 10, the multiple objects can be transported to the processing tank by a robot that grasps the gripping portion 20, and the multiple objects can be subjected to processing in the processing tank.
　このような処理用ケージ１００によれば、ケージ本体１０に収容可能な様々な被処理物Ｆをロボットによって処理槽まで搬送することができ、その被処理物Ｆを処理槽において処理に供することができるので、様々な被処理物のための処理装置（処理システム）を比較的容易に構築することに貢献することができる。 With such a processing cage 100, various objects to be processed F that can be accommodated in the cage body 10 can be transported to a processing tank by a robot, and the objects to be processed F can be subjected to processing in the processing tank, which contributes to relatively easy construction of processing equipment (processing systems) for various objects to be processed.
　他の実施の形態に係る処理用ケージについて説明する。
　他の一実施の形態に係る処理用ケージは、
図２５～図２７に示すように構成される。図２５は、他の実施の形態に係る処理用ケージを示す分解斜視図であり、図２６は、図２５に示す処理用ケージを構成する部材と、当該処理用ケージに収容される被処理物を示す斜視図であり、図２７は、他の実施の形態に係る処理用ケージを示す斜視図である。なお、図２５及び図２７のそれぞれにおいて、処理用ケージ１００に対して、前後方向ＦＲＤ、左右方向ＬＲＤ及び上下方向ＶＤが定義される。 A treatment cage according to another embodiment will now be described.
A processing cage according to another embodiment includes:
It is configured as shown in Figures 25 to 27. Figure 25 is an exploded perspective view showing a processing cage according to another embodiment, Figure 26 is a perspective view showing members constituting the processing cage shown in Figure 25 and objects to be processed housed in the processing cage, and Figure 27 is a perspective view showing a processing cage according to another embodiment. In each of Figures 25 and 27, a front-rear direction FRD, a left-right direction LRD, and a top-bottom direction VD are defined for the processing cage 100.
　図２５及び図２７において、この処理用ケージ１００は、ケージ本体１０と、ケージ本体１０に設けられた把持部２０を有している。ケージ本体１０は、第１の実施の形態の場合と同様に、上フレーム１１、上フレーム１１の下側の面に固定された天板１７、下フレーム１２、後ガードフレーム１５（縦フレーム１５ｃ、１５ｄ、補強フレーム１５ｅ）、保持バー１６ａ、１６ｂを有し、上フレーム１１と下フレーム１２とが後ガードフレーム１５の２つの縦フレーム１５ｃ、１５ｄと２つの保持バー１６ａ、１６ｂによって結合されている。ケージ本体１０は、更に２つの側パネル１８ａ、１８ｂ（側部）を有している。これら２つの側パネル１８ａ、１８ｂは、第１の実施の形態のもの（側パネル１３ａ、１３ｂ）と異なる形状を有している。一方の側パネル１８ａは、保持バー１６ａに保持された状態で、上フレーム１１と下フレーム１２の左右方向ＬＲＤにおける一方側に固定され、他方側のパネル１８ｂは、保持バー１６ｂに保持された状態で、上フレーム１１と下フレーム１２の左右方向ＬＲＤにおける他方側に固定される。ケージ本体１０は、更に、３つの後横ガードバー１９ａ、１９ｂ、１９ｃ（後部）を有している。これら３つの後横ガードバー１９ａ、１９ｂ、１９ｃは、上下方向ＶＤにおいて所定の間隔をもって配置されるように、２つの側パネル１８ａ、１８ｂの後端縁に固定される。 25 and 27, the processing cage 100 has a cage body 10 and a gripping portion 20 provided on the cage body 10. As in the first embodiment, the cage body 10 has an upper frame 11, a top plate 17 fixed to the lower surface of the upper frame 11, a lower frame 12, a rear guard frame 15 ( vertical frames 15c, 15d, reinforcing frame 15e), and retaining bars 16a, 16b, and the upper frame 11 and the lower frame 12 are connected by two vertical frames 15c, 15d of the rear guard frame 15 and two retaining bars 16a, 16b. The cage body 10 further has two side panels 18a, 18b (side portions). These two side panels 18a, 18b have a different shape from those in the first embodiment ( side panels 13a, 13b). One side panel 18a is fixed to one side of the upper frame 11 and the lower frame 12 in the left-right direction LRD while being held by the holding bar 16a, and the other panel 18b is fixed to the other side of the upper frame 11 and the lower frame 12 in the left-right direction LRD while being held by the holding bar 16b. The cage body 10 further has three rear horizontal guard bars 19a, 19b, 19c (rear). These three rear horizontal guard bars 19a, 19b, 19c are fixed to the rear edges of the two side panels 18a, 18b so that they are spaced apart at a predetermined interval in the up-down direction VD.
　図２５及び図２７とともに図２６に示すように、一方の側パネル１８ａの前方側内面には、上下方向ＶＤにおいて、前述した後横ガードバー１９ａ、１９ｂ、１９ｃと同じ間隔をもって配列されるように３つの支持突起部１８１ａ、１８１ｂ、１８１ｃが形成されている。また、他方の側パネル１８ｂの前方側内面には、上下方向ＶＤにおいて、前述した後横ガードバー１９ａ、１９ｂ、１９ｃと同じ間隔をもって配列されるように３つの支持突起部１８２ａ、１８２ｂ、１８２ｃが形成されている。３つの後横ガードバー１９ａ、１９ｂ、１９ｃの内側略中央位置には、支持突起部１９１ａ、１９１ｂ、１９１ｃが形成されている。 As shown in Figure 26 along with Figures 25 and 27, three support protrusions 181a, 181b, 181c are formed on the inner front surface of one side panel 18a so as to be spaced apart at the same intervals as the rear horizontal guard bars 19a, 19b, 19c described above in the vertical direction VD. Also, three support protrusions 182a, 182b, 182c are formed on the inner front surface of the other side panel 18b so as to be spaced apart at the same intervals as the rear horizontal guard bars 19a, 19b, 19c described above in the vertical direction VD. Support protrusions 191a, 191b, 191c are formed at approximately the center of the inside of the three rear horizontal guard bars 19a, 19b, 19c.
　このような構造のケージ本体１０は、３つの三角フレーム３１（非厚状物）を被収容物として収容することができる。三角フレーム３１は、三角状の枠体の内側に丸フレームが配置され、その丸フレームが枠体の各辺に直状フレームにて接続された構造である。そして、三角フレーム３１の３つの角部には、脚部３１１ａ、３１１ｂ、３１１ｃがフレーム面に対して垂直に突出している。 The cage body 10 with this structure can house three triangular frames 31 (non-thick objects) as objects to be housed. The triangular frame 31 has a structure in which a round frame is placed inside a triangular frame body, and the round frame is connected to each side of the frame body by a straight frame. Furthermore, legs 311a, 311b, and 311c protrude perpendicularly from the frame surface at the three corners of the triangular frame 31.
　上述したような構造の処理用ケージ１００では、３つの三角フレーム３１（非厚状物）のそれぞれの脚部３１１ａ、３１１ｂ、３１１ｃが、両側パネル１８ａ、１８ｂの支持突起１８１ａ、１８２ａ（１８１ｂ、１８２ｂ）（１８１ｃ、１８２ｃ）、及び後横ガードバー１９ａ（１９ｂ）（１９ｃ）の支持突起１９１ａ（１９１ｂ）（１９１ｃ）に支持された状態で、当該３つの三角フレーム３１がケージ本体１０に収容される（図２７参照）。そして、ヒンジ１４１により揺動可能な前押えバー１４を立てて固定具１４２を連結部１１１に結合することで、前押えバー１４が所定の間隔をもって上下方向ＶＤに配列される３つの三角フレーム３１の縁を押えた状態になる。これにより、３つの三角フレーム３１がケージ本体１０において上下方向ＤＶに所定の間隔をもって配列された状態で保持される。 In the processing cage 100 having the above-mentioned structure, the three triangular frames 31 (non-thick objects) are housed in the cage body 10 with their legs 311a, 311b, 311c supported by the support protrusions 181a, 182a (181b, 182b) (181c, 182c) of the side panels 18a, 18b and the support protrusions 191a (191b) (191c) of the rear horizontal guard bars 19a (19b) (19c) (see FIG. 27). Then, the front pressure bar 14, which can swing by the hinge 141, is erected and the fixture 142 is connected to the connecting part 111, so that the front pressure bar 14 presses down the edges of the three triangular frames 31 arranged at a predetermined interval in the vertical direction VD. As a result, the three triangular frames 31 are held in the cage body 10 arranged at a predetermined interval in the vertical direction DV.
　上述したように３つの三角フレーム３１が収容された処理用ケージ１００は、把持部２０を把持するロボットによって、洗浄槽（処理槽：内部の構造は、図１３～図１５に示すものと異なる）に搬送される。そして、その洗浄槽（処理槽）において、処理用ケージ１００（ケージ本体１０）に収容された状態の３つの三角フレーム３１が洗浄（処理）に供される。 The processing cage 100 housing the three triangular frames 31 as described above is transported to a cleaning tank (processing tank: the internal structure differs from that shown in Figures 13 to 15) by a robot that grasps the gripping portion 20. Then, in the cleaning tank (processing tank), the three triangular frames 31 housed in the processing cage 100 (cage body 10) are subjected to cleaning (processing).
　上述したような他の実施の形態に係る処理用ケージ１００によれば、３つの三角フレーム３１が隙間をもって収容されるケージ本体１０（処理用ケージ１００）が把持部２０を把持するロボットにより洗浄槽まで搬送できるので、３つの三角フレーム３１を洗浄槽まで効率的に搬送することができる。その結果、その洗浄槽において三角フレーム３１を効率的に洗浄（処理）することができる。 According to the processing cage 100 according to the other embodiment described above, the cage body 10 (processing cage 100) in which the three triangular frames 31 are housed with gaps between them can be transported to the cleaning tank by a robot that grasps the gripping portion 20, so that the three triangular frames 31 can be efficiently transported to the cleaning tank. As a result, the triangular frames 31 can be efficiently cleaned (processed) in the cleaning tank.
　以上、本発明の実施の形態を説明したが、この実施の形態は、一例として提示したものであり、発明の範囲を限定することは意図していない。上述したこれら新規な実施の形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。これら実施の形態は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明に含まれる。 The above describes an embodiment of the present invention, but this embodiment is presented as an example and is not intended to limit the scope of the invention. These novel embodiments described above can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the gist of the invention. These embodiments are included in the scope and gist of the invention, and are included in the invention described in the claims.
　本発明に係る処理システムは、ロボットを用いて複数の被処理物を効率的に処理することのできるという効果を有し、ロボットを用いて複数の被処理物を処理する処理システムとして有用である。 The processing system according to the present invention has the effect of being able to efficiently process multiple objects to be processed using a robot, and is useful as a processing system that processes multiple objects to be processed using a robot.
　１０　ケージ本体
　１１　上フレーム
　１２　下フレーム
　１３ａ、１３ｂ　側パネル
　１３１ａ、１３１ｂ　棚部
　１３２ａ、１３２ｂ　通孔
　１４　前押えバー
　１５　後ガードフレーム
　１５ａ、１５ｂ　後縦ガードバー
　１５ｃ、１５ｄ　縦フレーム
　１５ｅ　補強フレーム
　１５１ｃ、１５１ｄ　棚部
　１６ａ、１６ｂ　保持バー
　１７　天板
　２０　把持部
　２１ａ、２１ｂ　把手
　１００　処理用ケージ
　３００　ロボット
　４００　セット台
　５００　洗浄槽
　５１０　槽本体
　５１１ａ、５１１ｂ、５１１ｃ、５１１ｄ、５１１ｅ、５１１ｆ　周囲処理ユニット
　５１２ａ、５１２ｂ　第１中央処理ユニット
　５１３ａ、５１３ｂ　第２中央処理ユニット
　５２０　蓋部
　５２１、５２２　上部処理ユニット REFERENCE SIGNS LIST 10 cage body 11 upper frame 12 lower frame 13a, 13b side panel 131a, 131b shelf portion 132a, 132b through hole 14 front press bar 15 rear guard frame 15a, 15b rear vertical guard bar 15c, 15d vertical frame 15e reinforcement frame 151c, 151d shelf portion 16a, 16b holding bar 17 top plate 20 gripping portion 21a, 21b handle 100 processing cage 300 robot 400 set table 500 cleaning tank 510 tank body 511a, 511b, 511c, 511d, 511e, 511f peripheral processing unit 512a, 512b first central processing unit 513a, 513b second central processing unit 520 Lid 521, 522 Upper processing unit

Claims (30)

  1. 　複数の被処理物を隙間をもって収容するケージ本体と、前記ケージ本体に設けられた把持部とを有する処理用ケージと、
    　前記処理用ケージを収容可能であって、前記処理用ケージに収容された前記複数の被処理物を処理する処理槽と、
    　前記把持部を把持して、所定位置にセットされた前記処理用ケージを前記処理槽まで搬送し、当該処理槽内にセットするロボットと、を有する処理システム。     A processing cage having a cage body that accommodates a plurality of objects to be processed with gaps therebetween and a gripping portion provided on the cage body;
    a treatment tank capable of accommodating the treatment cage and treating the plurality of objects to be treated accommodated in the treatment cage;
    a robot that grasps the grasping portion, transports the processing cage set at a predetermined position to the processing tank, and sets the processing cage in the processing tank.
  2. 　前記処理用ケージにおける前記ケージ本体は、それぞれ厚さに対して面的な広がりが大きい複数の非厚状物を所定の間隔をもって配列した状態で保持する保持構造を備える、請求項１記載の処理システム。 The processing system according to claim 1, wherein the cage body in the processing cage is provided with a holding structure that holds multiple non-thick objects, each of which has a large surface area relative to its thickness, arranged at a predetermined interval.
  3. 　前記ケージ本体における前記保持構造は、前記複数の非厚物状それぞれの外周縁を支持する支持構造を含む、請求項２記載の処理システム。 The processing system of claim 2, wherein the holding structure in the cage body includes a support structure that supports the outer periphery of each of the non-thick objects.
  4. 　前記ケージ本体は、相互に対向するように配置される上部と底部、相互に対向するように配置される２つの側部、及び互いに対向するように配置される前部と後部によって囲まれた立体形状を有し、
    　前記把持部は、前記上部に設けられ、
    　前記支持構造は、前記上部と前記底部との間に所定間隔をもって配列される前記複数の非厚状物のそれぞれの外周縁を支持するように、前記２つの側部に形成された部分を含む、請求項３記載の処理システム。     The cage body has a three-dimensional shape surrounded by a top and a bottom portion arranged to face each other, two side portions arranged to face each other, and a front portion and a rear portion arranged to face each other,
    The grip portion is provided on the upper portion,
    4. The treatment system of claim 3, wherein the support structure includes portions formed on the two sides to support the outer periphery of each of the plurality of non-thick objects arranged at a predetermined interval between the top and bottom.
  5. 　前記ケージ本体における前記２つの側部のそれぞれは、側パネルを含み、
    　前記支持構造の前記２つの側部に形成された部分は、前記側パネルの内面側に上下方向に所定の間隔をもって形成された複数段の棚部を含み、
    　前記２つの側部の一方に対応する前記側パネルにおける前記棚部の各段は、前記２つの側部の他方に対応する前記側パネルにおける前記棚部のいずれかに正対する、請求項４記載の処理システム。     each of the two sides of the cage body includes a side panel;
    The portions formed on the two sides of the support structure include a plurality of shelves formed on the inner surface of the side panel at predetermined intervals in the vertical direction,
    5. The treatment system according to claim 4, wherein each step of the shelves in the side panel corresponding to one of the two sides directly faces one of the shelves in the side panel corresponding to the other of the two sides.
  6. 　前記ケージ本体における前記後部は、その内面側に上下方向に所定の間隔をもって形成された複数段の棚部を含み、
    　前記棚部の各段は、前記２つの側部のそれぞれに対応する前記側パネルに形成された前記棚部のいずれかの段と同じ高さに位置する、請求項５記載の処理システム。     the rear portion of the cage body includes a plurality of shelves formed at predetermined intervals in the up-down direction on an inner surface thereof,
    The treatment system according to claim 5 , wherein each step of the shelf is positioned at the same height as one of the steps of the shelf formed in the side panel corresponding to each of the two sides.
  7. 　前記ケージ本体における前記前部は、前記上部と前記底部との間に所定間隔をもって配列される前記複数の非厚状物それぞれの縁を押える押え位置と前記複数の非厚状物それぞれの縁の押えを解除する位置との間で移動可能な、前記保持構造としての押え部材を含む、請求項６記載の処理システム。 The processing system of claim 6, wherein the front part of the cage body includes a holding member as the holding structure that can move between a holding position that holds down the edges of each of the non-thick objects arranged at a predetermined interval between the top and bottom parts and a position that releases the holding down of the edges of each of the non-thick objects.
  8. 　前記ケージ本体の前記側パネルには、当該側パネルを貫通する複数の通孔が形成されている、請求項５記載の処理システム。 The treatment system of claim 5, wherein the side panel of the cage body has a plurality of through holes formed therethrough.
  9. 　前記複数の通孔のそれぞれは、前記棚部の各隣接する２つの段の間に配置されている、請求項８記載の処理システム。 The processing system of claim 8, wherein each of the plurality of through holes is disposed between each of two adjacent steps of the shelf portion.
  10. 　前記非厚状物は中空環状のフレーム体であって、
    　前記ケージ本体における前記底部は、中空環状のフレーム構造を有する、請求項４記載の処理システム。     The non-thick object is a hollow annular frame body,
    The treatment system of claim 4 , wherein the bottom of the cage body has a hollow annular frame structure.
  11. 　前記処理槽は、
    　前記処理用ケージが前記底部を下方にしてセットされるテーブルと、
    　前記テーブルを当該テーブルの面に垂直な軸を中心に回転させる回転駆動部と、
    　前記テーブルにセットされた前記処理用ケージの周囲に配置されるように設けられ、処理液を噴出する処理液噴出部と、を有する請求項４記載の処理システム。     The treatment tank comprises:
    a table on which the processing cage is placed with the bottom portion facing downward;
    a rotation drive unit that rotates the table around an axis perpendicular to a surface of the table;
    5. The processing system according to claim 4, further comprising a processing liquid jetting unit disposed around the processing cage set on the table, the processing liquid jetting unit jetting a processing liquid.
  12. 　前記処理槽は、
    　前記処理用ケージが前記底部を下方にしてセットされるテーブルと、
    　前記テーブルを当該テーブルの面に垂直な軸を中心に回転させる回転駆動部と、
    　前記テーブルにセットされた前記処理用ケージの前記ケージ本体の側パネルに対向して配置されるように設けられ、処理液を噴出する側周処理液噴出部と、を有する請求項８または９記載の処理システム。     The treatment tank comprises:
    a table on which the processing cage is placed with the bottom portion facing downward;
    a rotation drive unit that rotates the table around an axis perpendicular to a surface of the table;
    10. The processing system according to claim 8, further comprising: a side peripheral processing liquid jetting section that is disposed opposite to a side panel of the cage body of the processing cage set on the table and jets out a processing liquid.
  13. 　前記処理槽は、
    　　前記処理用ケージが前記底部を下方にしてセットされるテーブルと、
    　前記テーブルを当該テーブルの面に垂直な軸を中心に回転させる回転駆動部と、
    　前記テーブルにセットされた前記処理用ケージにおける前記中空環状の前記フレーム構造を有する前記ケージ本体の底部を通して前記ケージ本体内に配置されるように設けられ、処理液を噴出する内側処理液噴出部と、を有する請求項１０記載の処理システム。     The treatment tank comprises:
    a table on which the processing cage is placed with the bottom portion facing downward;
    a rotation drive unit that rotates the table around an axis perpendicular to a surface of the table;
    The processing system according to claim 10, further comprising: an inner processing liquid ejection portion that is arranged to be positioned within the cage body through a bottom of the cage body having the hollow annular frame structure in the processing cage set on the table, and that ejects processing liquid.
  14. 　前記処理用ケージにおける前記把持部は、ＳＥＭＩ規格で定められたＦＯＵＰに設けられた把持部を把持してＦＯＵＰ処理槽に当該ＦＯＵＰを搬送するロボットにより把持可能な形状である、請求項１記載の処理システム。 The processing system according to claim 1, wherein the gripping portion of the processing cage is shaped so that it can be gripped by a robot that grips a gripping portion provided on a FOUP defined by SEMI standards and transports the FOUP to a FOUP processing tank.
  15. 　前記処理用ケージは、ＳＥＭＩ規格で定められたＦＯＵＰを処理するためのＦＯＵＰ洗浄槽内にセット可能な外形形状を有する、請求項１４記載の処理システム。 The processing system according to claim 14, wherein the processing cage has an external shape that allows it to be set in a FOUP cleaning tank for processing FOUPs as defined by SEMI standards.
  16. 　複数の被処理物を隙間をもって収容するケージ本体と、
    　前記ケージ本体に設けられ、ロボットにより把持可能な把持部と、を有し、
    　前記把持部を把持する前記ロボットにより処理槽に搬送され、前記複数の被処理物を前記処理槽での処理に供する、処理用ケージ。     A cage body that accommodates a plurality of objects to be treated with gaps therebetween;
    a gripping portion provided on the cage body and capable of being gripped by a robot;
    A processing cage that is transported to a processing tank by the robot that grasps the grasping portion, and subjects the plurality of objects to processing to processing in the processing tank.
  17. 　前記ケージ本体は、それぞれ厚さに対して面的な広がりが大きい複数の非厚状物を所定の間隔をもって配列した状態で保持する保持構造を備える、請求項１６記載の処理用ケージ。 The processing cage of claim 16, wherein the cage body is provided with a holding structure that holds multiple non-thick objects, each of which has a large surface area relative to its thickness, arranged at a predetermined interval.
  18. 　前記保持構造は、前記複数の非厚状物のそれぞれの外周縁を支持する支持構造を含む、請求項１７記載の処理用ケージ。 The processing cage of claim 17, wherein the holding structure includes a support structure that supports the outer periphery of each of the non-thick objects.
  19. 　前記ケージ本体は、相互に対向するように配置される上部と底部、相互に対向するように配置される２つの側部、及び相互に対向するように配置される前部と後部によって囲まれた立体形状を有し、
    　前記把持部は、前記上部に設けられ、
    　前記支持構造は、前記上部と前記底部との間に所定間隔をもって配列される前記複数の非厚状物のそれぞれの外周縁を支持するように、前記２つの側部に形成された部分を含む、請求項１８記載の処理用ケージ。     The cage body has a three-dimensional shape surrounded by a top and a bottom portion arranged to face each other, two side portions arranged to face each other, and a front portion and a rear portion arranged to face each other,
    The grip portion is provided on the upper portion,
    20. The processing cage of claim 18, wherein the support structure includes portions formed on the two sides to support an outer periphery of each of the plurality of non-thick objects arranged at a predetermined interval between the top and bottom.
  20. 　前記２つの側部のそれぞれは、側パネルを含み、
    　前記支持構造の前記２つの側部に形成された部分は、前記側パネルの内面側に上下方向に所定の間隔をもって形成された複数段の棚部を含み、
    　前記２つの側部の一方に対応する前記側パネルにおける前記棚部の各段は、前記２つの側部の他方に対応する前記側パネルにおける前記棚部のいずれかの段に正対する、請求項１９記載の処理用ケージ。     Each of the two sides includes a side panel;
    The portions formed on the two sides of the support structure include a plurality of shelves formed on the inner surface of the side panel at predetermined intervals in the vertical direction,
    20. The processing cage of claim 19, wherein each step of the shelves in the side panel corresponding to one of the two sides directly faces one step of the shelves in the side panel corresponding to the other of the two sides.
  21. 　前記後部は、その内面側に上下方向に所定の間隔をもって形成された複数段の棚部を含み、
    　前記棚部の各段は、前記２つの側部のそれぞれに対応する前記側パネルに形成された前記棚部のいずれかの段と同じ高さに位置する、請求項２０記載の処理用ケージ。     The rear portion includes a plurality of shelves formed on an inner surface thereof at predetermined intervals in the vertical direction,
    21. The processing cage of claim 20, wherein each step of the shelves is at the same height as one of the steps of the shelves formed in the side panels corresponding to each of the two sides.
  22. 　前記前部は、前記上部と前記底部との間に所定間隔をもって配列される前記複数の非厚状物それぞれの縁を押える押え位置と前記複数の非厚状物それぞれの縁の押えを解除する解除位置との間で移動可能な、前記保持構造としての押え部材を含む、請求項２１記載の処理用ケージ。 The processing cage of claim 21, wherein the front portion includes a holding member as the holding structure that is movable between a holding position that holds down the edges of each of the non-thick objects arranged at a predetermined interval between the top and bottom portions and a release position that releases the pressure on the edges of each of the non-thick objects.
  23. 　前記側パネルには、当該側パネルを貫通する複数の通孔が形成されている、請求項２０記載の処理用ケージ。 The processing cage of claim 20, wherein the side panel has a plurality of through holes formed therethrough.
  24. 　前記複数の通孔のそれぞれは、前記棚部の各隣接する２つの段の間に配置されている、請求項２３記載の処理用ケージ。 The processing cage of claim 23, wherein each of the plurality of through holes is disposed between each two adjacent steps of the shelf portion.
  25. 　前記非厚状物は中空環状のフレーム体であって、
    　前記ケージ本体における前記底部は、中空環状のフレーム構造を有する、請求項１９記載の処理用ケージ。     The non-thick object is a hollow annular frame body,
    20. The processing cage of claim 19, wherein the bottom of the cage body comprises a hollow annular frame structure.
  26. 　前記フレーム体は、所定サイズの半導体ウェーハの周縁部を支持して収容するための支持フレームである、請求項２５記載の処理用ケージ。 The processing cage of claim 25, wherein the frame body is a support frame for supporting and housing the peripheral portion of a semiconductor wafer of a predetermined size.
  27. 　前記把持部は、所定の物体に設けられた把持部を把持して当該物体を処理する物体処理槽に前記物体を搬送するロボットにより把持可能な形状である、請求項１６記載の処理用ケージ。 The processing cage according to claim 16, wherein the gripping portion is shaped so as to be gripped by a robot that grips a gripping portion provided on a specific object and transports the object to an object processing tank in which the object is processed.
  28. 　前記物体処理槽に収容可能な外形形状を有する請求項２７記載の処理用ケージ。 The processing cage according to claim 27, having an external shape that can be accommodated in the object processing tank.
  29. 　前記把持部は、ＳＥＭＩ規格で定められたＦＯＵＰに設けられた把持部を把持してＦＯＵＰ処理槽に当該ＦＯＵＰを搬送するロボットにより把持可能な形状である、請求項１６記載の処理用ケージ。 The processing cage according to claim 16, wherein the gripping portion is shaped so as to be gripped by a robot that grips a gripping portion provided on a FOUP defined by SEMI standards and transports the FOUP to a FOUP processing tank.
  30. 　前記ＦＯＵＰ処理槽に収容可能な外形形状を有する請求項１６記載の処理用ケージ。 The processing cage according to claim 16, having an external shape that can be accommodated in the FOUP processing tank.
PCT/JP2023/035630 2022-10-25 2023-09-29 Processing system and cage for processing WO2024090139A1 (en)

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JPH05211229A (en) * 1991-09-12 1993-08-20 Fluoroware Inc Wafer carrier
JP2014110377A (en) * 2012-12-04 2014-06-12 Shin Etsu Polymer Co Ltd Cassette for wafer frame
JP2014135349A (en) * 2013-01-09 2014-07-24 Shin Etsu Polymer Co Ltd Frame for semiconductor wafer
JP2018107233A (en) * 2016-12-26 2018-07-05 ヒューグル開発株式会社 Case cleaning device and case cleaning method
JP2019004009A (en) * 2017-06-14 2019-01-10 ヒューグル開発株式会社 Substrate case cleaning device and substrate case cleaning method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05211229A (en) * 1991-09-12 1993-08-20 Fluoroware Inc Wafer carrier
JP2014110377A (en) * 2012-12-04 2014-06-12 Shin Etsu Polymer Co Ltd Cassette for wafer frame
JP2014135349A (en) * 2013-01-09 2014-07-24 Shin Etsu Polymer Co Ltd Frame for semiconductor wafer
JP2018107233A (en) * 2016-12-26 2018-07-05 ヒューグル開発株式会社 Case cleaning device and case cleaning method
JP2019004009A (en) * 2017-06-14 2019-01-10 ヒューグル開発株式会社 Substrate case cleaning device and substrate case cleaning method

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