WO2024087005A1 - Dispositif à semi-conducteur à base de nitrure et procédé de fabrication associé - Google Patents

Dispositif à semi-conducteur à base de nitrure et procédé de fabrication associé Download PDF

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Publication number
WO2024087005A1
WO2024087005A1 PCT/CN2022/127221 CN2022127221W WO2024087005A1 WO 2024087005 A1 WO2024087005 A1 WO 2024087005A1 CN 2022127221 W CN2022127221 W CN 2022127221W WO 2024087005 A1 WO2024087005 A1 WO 2024087005A1
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Prior art keywords
nitride
pads
based semiconductor
semiconductor device
conductive layer
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PCT/CN2022/127221
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English (en)
Inventor
Xiaoyan Zhang
Jiawei WEN
King Yuen Wong
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Innoscience (suzhou) Semiconductor Co., Ltd.
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Priority to PCT/CN2022/127221 priority Critical patent/WO2024087005A1/fr
Publication of WO2024087005A1 publication Critical patent/WO2024087005A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates

Definitions

  • the present disclosure generally relates to a nitride-based semiconductor device. More specifically, the present disclosure relates to a nitride-based semiconductor device having gate lines in grid distribution.
  • III-nitride-based HEMTs utilize a heterojunction interface between two materials with different bandgaps to form a quantum well-like structure, which accommodates a two-dimensional electron gas (2DEG) region, satisfying demands of high power/frequency devices.
  • devices having heterostructures further include heterojunction bipolar transistors (HBT) , heterojunction field effect transistor (HFET) , and modulation-doped FETs (MODFET) .
  • a nitride-based semiconductor device includes at least one nitride-based transistor, a first conductive layer, a plurality of first pads, a second conductive layer, a plurality of second pads, and a patterned conductive layer.
  • the nitride-based transistor includes a source electrode and a drain electrode.
  • the first conductive layer is connected to the source electrode.
  • the first pads are connected to the first conductive layer, in which the first pads are arranged along a first direction.
  • the second conductive layer is connected to the drain electrode.
  • the second pads are connected to the second conductive layer, in which the second pads are arranged along the first direction.
  • the patterned conductive layer includes a plurality of gate lines which extend along a second direction, in which the first direction is different than the second direction so as to pass through a first spacing between the two adjacent first pads and a second spacing between the two adjacent second pads.
  • a method for manufacturing a nitride-based semiconductor device has steps as follows: forming at least one nitride-based transistor comprising a source electrode and a drain electrode; forming a first conductive layer connected to the source electrode and a second conductive layer connected to the drain electrode; forming a conductive layer cover the first and second conductive layers; patterning the conductive layer such that a plurality of first pads connected to the first conductive layer and a plurality of second pads connected to the second conductive layer are formed; and forming a patterned conductive layer comprising a plurality of gate lines which extend along a second direction, wherein the first direction is different than the second direction so as to pass through a first spacing between the two adjacent first pads and a second spacing between the two adjacent second pads.
  • a nitride-based semiconductor device includes at least one nitride-based transistor, a first conductive layer, a plurality of first pads, a second conductive layer, a plurality of second pads, and a patterned conductive layer.
  • the nitride-based transistor includes a source electrode and a drain electrode.
  • the first conductive layer is connected to the source electrode;
  • the first pads are connected to the first conductive layer, in which the first pads are arranged along a first direction.
  • the second conductive layer is connected to the drain electrode.
  • the second pads are connected to the second conductive layer, in which the second pads are arranged along the first direction.
  • the patterned conductive layer includes a plurality of gate lines which collectively form a plurality of first grids enclosing the first pads.
  • the distribution of the gate lines can be expanded as much as possible, so as to reduce gate resistance issue.
  • This configuration is advantageous to high voltage requirement, such as 1200V.
  • FIG. 1 is a vertical cross-sectional view of a nitride-based semiconductor device according to some embodiments of the present disclosure
  • FIG. 2A is a top view of a nitride-based semiconductor device according to some embodiments of the present disclosure
  • FIG. 2B depicts an enlarged drawing of a region in FIG. 2A.
  • FIG. 3 is a block diagram showing a flowchart of a method for manufacturing the semiconductor device according to some embodiments of the present disclosure.
  • FIG. 1 is a vertical cross-sectional view of a nitride-based semiconductor device 1A according to some embodiments of the present disclosure.
  • the nitride-based semiconductor device 1A includes a substrate 10, nitride-based semiconductor layers 12, 14, electrodes 20 and 22, a doped nitride-based semiconductor layer 30, a gate electrode 32, passivation layers 40 and 42, and contact vias 50.
  • the substrate 10 may be a semiconductor substrate.
  • the exemplary materials of the substrate 10 can include, for example but are not limited to, Si, SiGe, SiC, gallium arsenide, p-doped Si, n-doped Si, sapphire, semiconductor on insulator, such as silicon on insulator (SOI) , or other suitable substrate materials.
  • the substrate 10 can include, for example, but is not limited to, group III elements, group IV elements, group V elements, or combinations thereof (e.g., III-V compounds) .
  • the substrate 10 can include, for example but is not limited to, one or more other features, such as a doped region, a buried layer, an epitaxial (epi) layer, or combinations thereof.
  • the semiconductor device 1A may further include a buffer layer (not shown) .
  • the buffer layer is disposed between the substrate 10 and the nitride-based semiconductor layer 12.
  • the buffer layer can be configured to reduce lattice and thermal mismatches between the substrate 10 and the nitride-based semiconductor layer 12, thereby curing defects due to the mismatches/difference.
  • the buffer layer may include a III-V compound.
  • the III-V compound can include, for example but are not limited to, aluminum, gallium, indium, nitrogen, or combinations thereof.
  • the exemplary materials of the buffer layer can further include, for example but are not limited to, GaN, AlN, AlGaN, InAlGaN, or combinations thereof.
  • the semiconductor device 1A may further include a nucleation layer (not shown) .
  • the nucleation layer may be formed between the substrate 10 and a buffer layer.
  • the nucleation layer can be configured to provide a transition to accommodate a mismatch/difference between the substrate 10 and a III-nitride layer of the buffer layer.
  • the exemplary material of the nucleation layer can include, for example but is not limited to AlN or any of its alloys.
  • the nitride-based semiconductor layer 12 can be disposed on/over/above the buffer layer 12.
  • the nitride-based semiconductor layer 14 can be disposed on/over/above the nitride-based semiconductor layer 12.
  • the exemplary materials of the nitride-based semiconductor layer 12 can include, for example but are not limited to, nitrides or group III-V compounds, such as GaN, AlN, InN, In x Al y Ga (1–x–y) N where x+y ⁇ 1, Al x Ga (1–x) N where x ⁇ 1.
  • the exemplary materials of the nitride-based semiconductor layer 14 can include, for example but are not limited to, nitrides or group III-V compounds, such as GaN, AlN, InN, In x Al y Ga (1–x–y) N where x+y ⁇ 1, Al y Ga (1–y) N where y ⁇ 1.
  • the exemplary materials of the nitride-based semiconductor layers 12 and 14 are selected such that the nitride-based semiconductor layer 14 has a bandgap (i.e., forbidden band width) greater/higher than a bandgap of the nitride-based semiconductor layer 12, which causes electron affinities thereof different from each other and forms a heterojunction therebetween.
  • the nitride-based semiconductor layer 12 is an undoped GaN layer having a bandgap of approximately 3.4 eV
  • the nitride-based semiconductor layer 14 can be selected as an AlGaN layer having bandgap of approximately 4.0 eV.
  • the nitride-based semiconductor layers 12 and 14 can serve as a channel layer and a barrier layer, respectively.
  • a triangular well potential is generated at a bonded interface between the channel and barrier layers, so that electrons accumulate in the triangular well, thereby generating a two-dimensional electron gas (2DEG) region adjacent to the heterojunction.
  • the semiconductor device 1A is available to include at least one GaN-based high-electron-mobility transistor (HEMT) .
  • HEMT high-electron-mobility transistor
  • the electrodes 20 and 22 are disposed on the nitride-based semiconductor layer 14.
  • the electrode 20 can make contact with the nitride-based semiconductor layer 14.
  • the electrode 22 can make contact with the nitride-based semiconductor layer 14.
  • Each of the electrodes 20 and 22 can serve as a source electrode or a drain electrode.
  • the electrodes 20 and 22 can include, for example but are not limited to, metals, alloys, doped semiconductor materials (such as doped crystalline silicon) , compounds such as silicides and nitrides, other conductor materials, or combinations thereof.
  • the exemplary materials of the electrodes 20 and 22 can include, for example but are not limited to, Ti, AlSi, TiN, or combinations thereof.
  • the electrodes 20 and 22 may be a single layer, or plural layers of the same or different composition.
  • the electrodes 20 and 22 form ohmic contact with the nitride-based semiconductor layer 14. The ohmic contact can be achieved by applying Ti, Al, or other suitable materials to the electrodes 20 and 22.
  • each of the electrodes 20 and 22 is formed by at least one conformal layer and a conductive filling.
  • the conformal layer can wrap the conductive filling.
  • the exemplary materials of the conformal layer for example but are not limited to, Ti, Ta, TiN, Al, Au, AlSi, Ni, Pt, or combinations thereof.
  • the exemplary materials of the conductive filling can include, for example but are not limited to, AlSi, AlCu, or combinations thereof.
  • the doped nitride-based semiconductor layer 30 is disposed over the nitride-based semiconductor layer 30.
  • the doped nitride-based semiconductor layer 30 is located between the electrodes 20 and 22.
  • the doped nitride-based semiconductor layer 30 may be p-type.
  • the doped nitride-based semiconductor layer 30 is configured to bring the device into enhancement mode.
  • the doped nitride-based semiconductor layer 30 can be a p-type doped III-V semiconductor layer. In some embodiments, the doped nitride-based semiconductor layer 30 can be omitted so the device is operated in depletion mode.
  • the exemplary materials of the doped nitride-based semiconductor layer 30 can include, for example but are not limited to, p-doped group III-V nitride semiconductor materials, such as p-type GaN, p-type AlGaN, p-type InN, p-type AlInN, p-type InGaN, p-type AlInGaN, or combinations thereof.
  • the p-doped materials are achieved by using a p-type impurity, such as Be, Mg, Zn, Cd, and Mg.
  • the gate electrode 32 is disposed on the doped nitride-based semiconductor layer 30.
  • the gate electrode 32 is located between the electrodes 20 and 22.
  • the exemplary materials of the electrode 32 may include metals or metal compounds.
  • the electrode 32 may be formed as a single layer, or plural layers of the same or different compositions.
  • the exemplary materials of the metals or metal compounds can include, for example but are not limited to, W, Au, Pd, Ti, Ta, Co, Ni, Pt, Mo, TiN, TaN, metal alloys or compounds thereof, or other metallic compounds.
  • the electrodes 20 and 22 and the gate electrode 32 can collectively constitute a nitride-based transistor using the 2DEG region.
  • the passivation layer 40 is disposed on the nitride-based semiconductor layer 14.
  • the passivation layer 40 covers the doped nitride-based semiconductor layer 30 and the gate electrode 36.
  • the electrodes 20 and 22 can penetrate the passivation layer 40 to make contact with the nitride-based semiconductor layer 14.
  • the material of the passivation layer 40 can include, for example but are not limited to, dielectric materials.
  • the passivation layer 40 can include SiN x , SiO x , SiON, SiC, SiBN, SiCBN, oxides, nitrides, plasma enhanced oxide (PEOX) , or combinations thereof.
  • the passivation layer 42 is disposed on the passivation layer 42.
  • the passivation layer 42 covers the electrodes 20 and 22.
  • the passivation layer 42 can serve as a planarization layer which has a level top surface to support other layers/elements.
  • the passivation layer 42 can be formed as a thicker layer, and a planarization process, such as chemical mechanical polish (CMP) process, is performed on the passivation layer 42 to remove the excess portions, thereby forming a level top surface.
  • CMP chemical mechanical polish
  • the material of the passivation layer 42 can include, for example but are not limited to, dielectric materials.
  • the passivation layer 42 can include SiN x , SiO x , SiON, SiC, SiBN, SiCBN, oxides, nitrides, PEOX, or combinations thereof.
  • the contact vias 50 are disposed within the passivation layer 42.
  • the contact vias 50 can penetrate the passivation layer 42.
  • the contact vias 50 can extend longitudinally to connect to the electrodes 20 and 22 and the gate electrode 32.
  • the exemplary materials of the contact vias 50 can include, for example but are not limited to, conductive materials, such as metals or alloys.
  • the nitride-based transistor can be electrically coupled with at least one conductive source through the contact vias 50.
  • the electrodes 20 and 22 can be electrically coupled with a source pad or a drain pad through the contact vias 50; the gate electrode 32 can be electrically coupled with a gate pad through the contact vias 50.
  • FIG. 2A is a top view of a nitride-based semiconductor device 2A according to some embodiments of the present disclosure.
  • FIG. 2B depicts an enlarged drawing of a region in FIG. 2A.
  • directions D1 and D2 are labeled in FIG. 2A and FIG. 2B, which are different than each other.
  • the direction D1 is a horizontal direction of FIG. 2A; and the direction D2 is a vertical direction of FIG. 2A which is perpendicular to the direction D1.
  • the nitride-based semiconductor device 2A includes at least one nitride-based transistor, conductive layers 60 and 62, pads 64, 66, 68, a patterned conductive layer 70, conductive straps 80, an electrostatic discharge (ESD) protection pad 82, a seal ring 84.
  • ESD electrostatic discharge
  • the nitride-based transistor can include a structure as afore-mentioned.
  • the nitride-based transistor can include a source electrode and a drain electrode.
  • the one or more nitride-based transistors are not illustrated in FIG. 2A but embedded in elements illustrated in FIG. 2A.
  • the exemplary illustration of FIG. 2A is to show a layout of the nitride-based semiconductor device 2A above the one or more nitride-based transistors.
  • the conductive layers 60 and 62 are alternately arranged along the direction D1.
  • the conductive layers 60 and 62 are arranged along the direction D1.
  • the conductive layers 60 and 62 may have opposite shapes.
  • the conductive layers 60 are in inverted trapezoid and the conductive layers 60 are in trapezoid.
  • the conductive straps 80 are partially covered by the conductive layers 60 and 62.
  • the conductive straps 80 can extend along the direction D1.
  • the conductive straps 80 can be arranged along the direction D2.
  • the conductive layers 60 can be indirectly connected to the one or more source electrodes of the nitride-based transistors via the conductive straps 80.
  • the conductive layers 62 can be indirectly connected to the one or more drain electrodes of the nitride-based transistors via the conductive straps 80.
  • the pads 64 are disposed over the conductive layers 60.
  • the pads 64 can be connected to conductive layers 60.
  • the pads 64 are arranged along the direction D2.
  • the pads 64 arranged along the direction D2 are arranged by the same spacing.
  • each of the pads 64 has a width and a length greater than the width.
  • all of the pads 64 have the same area. Such the design for the pads 64 is made to successfully build the layout.
  • the pads 66 are disposed over the conductive layers 62.
  • the pads 66 can be connected to conductive layers 62.
  • the pads 66 are arranged along the direction D2.
  • the pads 66 arranged along the direction D2 are arranged by the same spacing.
  • each of the pads 66 has a width and a length greater than the width.
  • all of the pads 66 have the same area. Such the design for the pads 66 is made to successfully build the layout.
  • the pads 64 and 66 may have the same area. A distance between the pads 64 to the pads 66 is greater than a distance between the pads 66.
  • An external voltage source can be electrically coupled with the one or more source electrodes/drain electrodes of the nitride-based transistors via the pads 64 and the pads 66, so as to operate the nitride-based transistors.
  • the pads 64 can serve as source pads
  • the pads 66 can serve as drain pads.
  • the pad 68 can serve as a gate pad.
  • the pads 64 and the pads 66 can form an array, in which the pad 68 is out of the range of the array.
  • the patterned conductive layer 70 includes gate lines 72.
  • the gate lines 72 are connected to the pad 68.
  • the gate lines 72 can extend from the pad 68 to make electrical couple with one or more gate electrodes of the nitride-based transistors.
  • the gate lines 72 can extend along the directions D1 and D2.
  • the gate lines 72 extending along the direction D1 can pass through the spacing between the two adjacent pads 64 and the spacing between the two adjacent pads 66.
  • the gate lines 72 can extend between the pads 64, between the pads 66, and between the pads 64 and 66. Accordingly, the gate lines 72 collectively form grids enclosing the pads 64 and 66.
  • the grids enclosing the pads 64 are smaller than the grids enclosing the pads 66.
  • the gate lines 72 can form an electrical route extending along the directions D1 and D2.
  • the electrical route is in grid distribution so the transmission of electrical signals can get more uniform.
  • such the configuration is to expand the distribution of the gate lines 72 as much as possible, so as to reduce gate resistance issue. That is, resistance between the pad 68 and one or more gate electrodes of the nitride-based transistors can decrease.
  • This configuration is advantageous to high voltage requirement, such as 1200V.
  • distance from the gate lines 72 to the pad 66 serves as an important factor for device reliability.
  • the average distance from the gate lines 72 to the pad 66 is less than the average distance from the gate lines 72 to the pad 64. The reason is that high voltage will be applied to the pad 66 so there is a parasitic capacitance issue once distance between gate lines and drain pads is too close.
  • the ESD protection pad 82 is adjacent to the pad 68.
  • the ESD protection pad 82 is out of the range of the array of pads 64 and 66.
  • the seal ring 84 surrounds/encloses elements of the semiconductor device 1A.
  • FIG. 3 is a block diagram showing a flowchart of a method for manufacturing the semiconductor device 1A according to some embodiments of the present disclosure.
  • the process includes steps S10-S50, in which S10 is forming at least one nitride-based transistor; S20 is forming conductive layers; S30 is forming a blanket conductive layer; S40 is patterning the blanket conductive layer; and S50 is forming gate lines.
  • At least one nitride-based transistor including a source electrode, a drain electrode, and a gate electrode is formed.
  • two nitride-based semiconductor layers are formed as well.
  • One nitride-based semiconductor layer is stacked on another nitride- based semiconductor layer, in which the upper one has a bandgap greater than a bandgap of the bottom one.
  • conductive layers are formed, in which these conductive layers are correspondingly indirectly connected to the source electrodes and the drain electrodes of one or more nitride-based transistors, so as to electrically couple with them.
  • a blanket conductive layer is formed to cover the conductive layers.
  • the blanket conductive layer is patterned such that pads are formed. These pads are correspondingly connected to the conductive layers, so as to electrically couple with them.
  • the pads may include a gate pad, source pads, and drain pads.
  • gate lines are formed for connection between the gate electrode and the gate pad.
  • the gate lines can be formed by patterning a blanket conductive layer.
  • connection in the present disclosure may include “indirect connection” , “direct connection” , or combinations thereof.
  • the terms “substantially, “ “substantial, “ “approximately” and “about” are used to describe and account for small variations. When used in conjunction with an event or circumstance, the terms can encompass instances in which the event or circumstance occurs precisely as well as instances in which the event or circumstance occurs to a close approximation.
  • the terms when used in conjunction with a numerical value, can encompass a range of variation of less than or equal to ⁇ 10%of that numerical value, such as less than or equal to ⁇ 5%, less than or equal to ⁇ 4%, less than or equal to ⁇ 3%, less than or equal to ⁇ 2%, less than or equal to ⁇ 1%, less than or equal to ⁇ 0.5%, less than or equal to ⁇ 0.1%, or less than or equal to ⁇ 0.05%.
  • substantially coplanar can refer to two surfaces within micrometers of lying along a same plane, such as within 40 ⁇ m, within 30 ⁇ m, within 20 ⁇ m, within 10 ⁇ m, or within 1 ⁇ m of lying along the same plane.
  • a component provided “on” or “over” another component can encompass cases where the former component is directly on (e.g., in physical contact with) the latter component, as well as cases where one or more intervening components are located between the former component and the latter component.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
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Abstract

Un dispositif à semi-conducteur à base de nitrure comprend un transistor à base de nitrure, une première couche conductrice, des premiers plots, une seconde couche conductrice, des seconds plots et une couche conductrice à motifs. Le transistor à base de nitrure comprend une électrode de source et une électrode de drain. La première couche conductrice est connectée à l'électrode de source. Les premiers plots sont connectés à la première couche conductrice, les premiers plots étant agencés le long d'une première direction. La seconde couche conductrice est connectée à l'électrode de drain. Les seconds plots sont connectés à la seconde couche conductrice, les seconds plots étant agencés le long de la première direction. La couche conductrice à motifs comprend des lignes de grille qui s'étendent le long d'une seconde direction, la première direction étant différente de la seconde direction de façon à passer à travers un premier espacement entre les deux premiers plots adjacents et un second espacement entre les deux seconds plots adjacents.
PCT/CN2022/127221 2022-10-25 2022-10-25 Dispositif à semi-conducteur à base de nitrure et procédé de fabrication associé WO2024087005A1 (fr)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160020207A1 (en) * 2014-07-15 2016-01-21 Renesas Electronics Corporation Semiconductor device
US20180138134A1 (en) * 2016-11-15 2018-05-17 Rohm Co., Ltd. Semiconductor device
US20200152572A1 (en) * 2018-11-09 2020-05-14 Stmicroelectronics S.R.L. Gan-based, lateral-conduction, electronic device with improved metallic layers layout

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160020207A1 (en) * 2014-07-15 2016-01-21 Renesas Electronics Corporation Semiconductor device
US20180138134A1 (en) * 2016-11-15 2018-05-17 Rohm Co., Ltd. Semiconductor device
US20200152572A1 (en) * 2018-11-09 2020-05-14 Stmicroelectronics S.R.L. Gan-based, lateral-conduction, electronic device with improved metallic layers layout

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