WO2024082995A1 - Metasurface phase coefficient optimization method and apparatus, and electronic device - Google Patents

Metasurface phase coefficient optimization method and apparatus, and electronic device Download PDF

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Publication number
WO2024082995A1
WO2024082995A1 PCT/CN2023/123691 CN2023123691W WO2024082995A1 WO 2024082995 A1 WO2024082995 A1 WO 2024082995A1 CN 2023123691 W CN2023123691 W CN 2023123691W WO 2024082995 A1 WO2024082995 A1 WO 2024082995A1
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current
structural parameters
refractive index
equivalent refractive
image quality
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PCT/CN2023/123691
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French (fr)
Chinese (zh)
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赵小波
郝成龙
谭凤泽
朱健
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深圳迈塔兰斯科技有限公司
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Publication of WO2024082995A1 publication Critical patent/WO2024082995A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012Optical design, e.g. procedures, algorithms, optimisation routines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101Nanooptics

Definitions

  • the present invention relates to the field of optical technology, and in particular to a metasurface phase coefficient optimization method, device, electronic device and computer-readable storage medium.
  • the phase coefficient of the metasurface can take any value; but in reality, the phase distribution of the metasurface obtained based on the phase coefficient of the unconstrained metasurface shows that the phase corresponding to the nanostructure changes frequently within an extremely short radius, that is, the arrangement of the nanostructure within an extremely short radius must be adjusted multiple times accordingly, and does not satisfy the periodic arrangement. In practical applications, it is reflected in the need to place nanostructures of different phases one by one, which will greatly increase the difficulty of the metasurface manufacturing process and cannot be achieved in mass production.
  • the embodiments of the present invention provide a metasurface phase coefficient optimization method, device, electronic device and computer-readable storage medium.
  • an embodiment of the present invention provides a method for optimizing a metasurface phase coefficient, comprising: determining initial structural parameters, the structural parameters are used to define structural features of the metasurface, and the structural parameters at least include: phase coefficients of various orders; using the initial structural parameters as initial values of current structural parameters, optimizing the current structural parameters in a manner of optimizing an equivalent refractive index difference corresponding to the current structural parameters, and determining an optimized target phase coefficient;
  • the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
  • the current structural parameters are optimized in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, including: cyclically performing parameter optimization operations on the current structural parameters until the equivalent refractive index difference corresponding to the optimized current structural parameters is less than the reasonable constant; the parameter optimization operation includes: determining the equivalent refractive index difference corresponding to the current structural parameters; judging whether the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant; if the current structural parameters meet the requirements, using the current structural parameters as the target structural parameters; if the current structural parameters do not meet the requirements, updating the current structural parameters; wherein, the current structural parameters meeting the requirements includes that the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant.
  • the parameter optimization operation also includes: determining the current performance parameters of the metasurface corresponding to the current structural parameters, and determining a current image quality evaluation factor; the current image quality evaluation factor includes the difference between the current performance parameters and the expected performance parameters and the difference between the equivalent refractive index difference corresponding to the current structural parameters and the reasonable constant; judging whether the current image quality evaluation factor is greater than a first limit value; wherein, the current structural parameters meeting the requirements also includes: the current image quality evaluation factor is less than or equal to the first limit value; the current structural parameters not meeting the requirements include: the equivalent refractive index difference corresponding to the current structural parameters is not less than the reasonable constant, and/or the current image quality evaluation factor is greater than the first limit value.
  • determining a current image quality assessment factor comprises: determining the current image quality assessment factor based on a current image quality assessment function, wherein the current image quality assessment function comprises weighted processing of a first item and a second item, wherein the first item is used to represent the difference between the current performance parameter and the expected performance parameter, and the second item is used to represent the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
  • the current image quality evaluation function satisfies:
  • M represents the current image quality evaluation factor
  • Vi represents the i-th current performance parameter
  • Ti represents the i-th expected performance parameter
  • w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter
  • F x represents the equivalent refractive index difference corresponding to the current structural parameter
  • C represents the reasonable constant
  • p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
  • the current image quality evaluation function also includes a third item, which is used to represent a return value that can be adjusted;
  • the parameter optimization operation also includes: after determining the current image quality evaluation factor, updating the current image quality evaluation function by updating the return value; wherein, updating the return value includes: when the equivalent refractive index difference is greater than the reasonable constant, updating the return value to a first value; when the equivalent refractive index difference is equal to the reasonable constant, updating the return value to a second value; the first value is greater than the second value.
  • updating the current image quality evaluation function in a manner of updating the return value includes: when the current image quality evaluation factor is less than or equal to a first limit value, updating the current image quality evaluation function in a manner of updating the return value.
  • the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant is smaller than the weight corresponding to the return value.
  • the current image quality evaluation function satisfies:
  • M represents the current image quality evaluation factor
  • Vi represents the i-th current performance parameter
  • Ti represents the i-th expected performance parameter
  • w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter
  • F x represents the equivalent refractive index difference corresponding to the current structural parameter
  • C represents the reasonable constant
  • p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant
  • K represents the return value
  • q represents the weight corresponding to the return value.
  • the performance parameters include: effective focal length, F number, image height, diffuse spot size, visual At least one of field angle, relative aperture, and overall system length.
  • determining the equivalent refractive index difference corresponding to the current structural parameters includes: determining the phase of the metasurface corresponding to the current structural parameters at multiple positions, and determining the equivalent refractive index at the corresponding position based on the phase, and there is a positive correlation between the equivalent refractive index and the phase; determining the maximum and minimum values of the multiple equivalent refractive indices, and taking the difference between the maximum and the minimum value as the equivalent refractive index difference corresponding to the current structural parameters.
  • determining the equivalent refractive index difference corresponding to the current structural parameters also includes: determining the maximum radius of the supersurface corresponding to the current structural parameters, taking a as the step size and selecting multiple radius values from zero to the maximum radius, different radius values representing different positions.
  • F represents the equivalent refractive index
  • k represents the wave number
  • represents the wavelength
  • Hd represents the height of the nanostructure at position r.
  • determining the initial structural parameters includes: determining original structural parameters; determining original performance parameters of the metasurface corresponding to the original structural parameters, and determining original image quality evaluation factors; the original image quality evaluation factors include the difference between the original performance parameters and the expected performance parameters; when the original image quality evaluation factors are less than or equal to a second limit value, using the original structural parameters as the initial structural parameters.
  • the original image quality evaluation factor satisfies:
  • N represents the original image quality evaluation factor
  • Vm represents the mth original performance parameter
  • Tm represents the mth expected performance parameter
  • wm represents the weight corresponding to the difference between the mth original performance parameter and the expected performance parameter.
  • phase of the metasurface corresponding to the current structural parameters at multiple positions satisfies one of the following formulas:
  • r represents the distance from the position to the center; (x, y) represents the coordinates of the position; f represents the focal length; a i , b i , a ij and b ij all represent the phase coefficients of the respective orders.
  • the structural parameters further include: the maximum radius and the height of the nanostructure.
  • an embodiment of the present invention further provides a metasurface phase coefficient optimization device, comprising: a determination module and an optimization module.
  • the determination module is used to determine initial structural parameters, and the structural parameters are used to define the structural characteristics of the metasurface, and the structural parameters at least include: phase coefficients of each order.
  • the optimization module is used to use the initial structural parameters as the initial values of the current structural parameters, optimize the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, and determine the optimized target structural parameters;
  • the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
  • an embodiment of the present invention provides an electronic device, comprising a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the transceiver, the memory, and the processor are connected via the bus, and the computer program, when executed by the processor, implements the steps in any one of the above-described methods for optimizing the metasurface phase coefficient.
  • an embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the steps in any one of the above-mentioned methods for optimizing the metasurface phase coefficient are implemented.
  • the metasurface phase coefficient optimization method, device, electronic device and computer-readable storage medium provided in the embodiments of the present invention can obtain the target structural parameters that meet the process requirements (less than a reasonable constant) after optimization by optimizing the equivalent refractive index difference of the current structural parameters.
  • the target structural parameters can make the nanostructure on its corresponding metasurface meet the periodic arrangement.
  • the embodiments of the present invention innovatively optimize the structural parameters of the metasurface in the optical system (such as the phase coefficients of each order), thereby reducing the difficulty of the manufacturing process of the optical system at the beginning of the design to achieve mass production.
  • FIG1 shows a flow chart of a metasurface phase coefficient optimization method provided by an embodiment of the present invention
  • FIG2 shows a schematic diagram of the phase distribution of a metasurface corresponding to an unconstrained phase coefficient in a metasurface phase coefficient optimization method provided by an embodiment of the present invention
  • FIG3 shows a schematic diagram of the phase distribution of a metasurface corresponding to target structural parameters in a metasurface phase coefficient optimization method provided in an embodiment of the present invention
  • FIG4 shows a flow chart of a specific metasurface phase coefficient optimization method provided by an embodiment of the present invention
  • FIG5 is a schematic diagram showing a simulation result obtained based on the method for optimizing the phase coefficient of a metasurface provided by an embodiment of the present invention
  • FIG6 shows an optical modulation transfer function diagram generated by a metasurface corresponding to an unconstrained phase coefficient in a specific metasurface phase coefficient optimization method provided by an embodiment of the present invention
  • FIG. 7 shows a specific metasurface phase coefficient optimization method provided by an embodiment of the present invention.
  • the generated optical modulation transfer function diagram of the metasurface corresponding to the constrained phase coefficient
  • FIG8 shows a schematic structural diagram of a metasurface phase coefficient optimization device provided by an embodiment of the present invention.
  • FIG9 shows a schematic diagram of the structure of an electronic device for executing a metasurface phase coefficient optimization method provided by an embodiment of the present invention.
  • Fig. 1 shows a flow chart of a metasurface phase coefficient optimization method provided by an embodiment of the present invention. As shown in Fig. 1, the method includes the following steps 101-102.
  • Step 101 Determine initial structural parameters, where the structural parameters are used to define the structural features of the metasurface, and the structural parameters at least include: phase coefficients of each order.
  • a metasurface is a sub-wavelength artificial nanostructure film that can control the phase, amplitude, polarization and other characteristics of incident light according to the nanostructure on it.
  • the structural parameters of the metasurface can characterize the structural characteristics of the metasurface (such as the nanostructure on the metasurface).
  • the structural parameters can be phase coefficients of various orders used to represent the phase distribution of the metasurface.
  • the phase coefficients of various orders can determine the phase distribution of the nanostructure on the metasurface (such as the phase corresponding to the nanostructure at different positions); further, the structural characteristics of the nanostructure, such as the height and period of the nanostructure, can be determined based on the phase of the nanostructure.
  • FIG. 2 shows a schematic diagram of the phase distribution of the metasurface corresponding to the unconstrained phase coefficient, wherein the horizontal axis represents the radial distance of the nanostructure (the distance from the nanostructure to the center of the metasurface), and the vertical axis represents the phase (unit: rad); According to FIG. 2 , FIG. 2 shows a schematic diagram of the phase distribution of the metasurface corresponding to the unconstrained phase coefficient, wherein the horizontal axis represents the radial distance of the nanostructure (the distance from the nanostructure to the center of the metasurface), and the vertical axis represents the phase (unit: rad); According to FIG.
  • the phase corresponding to the nanostructure needs to change multiple times within an extremely short distance, that is, it is necessary to arrange a variety of nanostructures with different phases within an extremely short distance of the metasurface (for example, it can be understood that the nanostructures are not arranged periodically, but that the nanostructures need to be placed one by one; or, the phase change of the metasurface (such as a mutation from 0 to ⁇ ) will cause irregular lack of nanostructures in some positions, which is still However, it is necessary to design the nanostructures in each period separately), which is obviously not achievable at the current technological level. Therefore, the embodiment of the present invention can impose a series of constraints on structural parameters such as the phase coefficient of each order to make the phase distribution of the nanostructure on the metasurface more in line with the technological requirements.
  • the embodiment of the present invention can first determine a set of initial structural parameters.
  • the structural parameters to be optimized for the first time can be determined by optical design software (such as Zemax).
  • the structural parameters include phase coefficients of various orders, and the structural parameters correspond to the structural characteristics of a certain metasurface.
  • Step 102 Taking the initial structural parameters as the initial values of the current structural parameters, optimizing the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, and determining the optimized target structural parameters; the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
  • the initial structural parameters determined in the above step 101 are used as the initial values of the current structural parameters, that is, the current structural parameters optimized for the first time, and the current structural parameters optimized for the first time are optimized.
  • the optimization method adopted in the embodiment of the present invention may be: determining the equivalent refractive index difference corresponding to the current structural parameters, for example, the equivalent refractive index difference may be expressed as the difference between the maximum value and the minimum value of the equivalent refractive index of the metasurface corresponding to the current structural parameters, optimizing the equivalent refractive index difference so that the equivalent refractive index difference is less than a reasonable constant; when the equivalent refractive index difference is less than a reasonable constant, determining the current structural parameters as the optimized target structural parameters; wherein the reasonable constant is a constant that meets the process requirements, for example, it may be any constant between 0.2 and 2.
  • the maximum value F max and the minimum value F min of the equivalent refractive index of the metasurface corresponding to the current structural parameter can be calculated for the current structural parameter to obtain the equivalent refractive index difference Fx.
  • the equivalent refractive index difference Fx is less than a reasonable constant C
  • the current structural parameter can be determined as the target structural parameter, that is, the metasurface corresponding to the target structural parameter can meet the process requirements.
  • the phase distribution diagram of the metasurface corresponding to the target structural parameter can be shown in FIG3 . As can be seen from FIG3 , the nanostructure on the metasurface changes periodically. Within an extremely short radius distance, the phase change corresponding to the nanostructure is no longer frequent, which meets the process requirements.
  • the embodiment of the present invention can obtain the target structural parameters that meet the process requirements (less than a reasonable constant) after optimization by optimizing the equivalent refractive index difference of the current structural parameters.
  • the target structural parameters can make the nanostructure on its corresponding metasurface satisfy the periodic arrangement.
  • the embodiment of the present invention innovatively optimizes the structural parameters of the metasurface in the optical system (such as the phase coefficients of each order), thereby reducing the difficulty of the manufacturing process of the optical system at the beginning of the design to achieve mass production.
  • optimizing the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters may include the following step A.
  • Step A cyclically perform parameter optimization operations on the current structural parameters until the equivalent refractive index difference corresponding to the optimized current structural parameters is less than a reasonable constant.
  • the current structural parameters can be optimized by cyclically executing parameter optimization operations. For example, after performing parameter optimization operations on the current structural parameters, if the equivalent refractive index difference corresponding to the current structural parameters is not less than a reasonable constant, the parameter optimization operation can be cyclically executed until a current structural parameter having an equivalent refractive index difference less than a reasonable constant is obtained, and the current structural parameter is used as the target structural parameter.
  • the parameter optimization operation includes the following steps A1-A3.
  • Step A1 Determine the equivalent refractive index difference corresponding to the current structural parameters.
  • the maximum and minimum values of the equivalent refractive index of the metasurface corresponding to the current structural parameters are calculated.
  • the interval from the minimum value to the maximum value of the equivalent refractive index is the equivalent refractive index range, and the difference Fx between the maximum value and the minimum value can be used to concretely represent the equivalent refractive index difference.
  • Step A2 Determine whether the equivalent refractive index difference corresponding to the current structural parameters is less than a reasonable constant.
  • the equivalent refractive index difference corresponding to the current structural parameter is compared with a reasonable constant that meets the process requirements to determine whether the equivalent refractive index difference (such as the difference Fx) is smaller than the reasonable constant.
  • Step A3 When the current structural parameters meet the requirements, the current structural parameters are used as target structural parameters; when the current structural parameters do not meet the requirements, the current structural parameters are updated; wherein the current structural parameters meet the requirements including that the equivalent refractive index difference corresponding to the current structural parameters is less than a reasonable constant.
  • the equivalent refractive index difference corresponding to the current structural parameter is less than a reasonable constant, which is a necessary condition for the current structural parameter to meet the requirements, that is, only when the equivalent refractive index difference corresponding to the current structural parameter is less than a reasonable constant, can the current structural parameter be further determined to meet the requirements.
  • the current structural parameter meets the requirements, it can be determined that the equivalent refractive index difference corresponding to the current structural parameter must be less than a reasonable constant, and the current structural parameter is a target structural parameter that meets the process requirements; if the current structural parameter does not meet the requirements, the current structural parameter that does not meet the requirements is updated, and the updating method can adopt a gradient descent method, etc., which is not limited in this embodiment.
  • the current structural parameter does not meet the requirements, for example, when the equivalent refractive index difference corresponding to the current structural parameter is not less than a reasonable constant, that is, the equivalent refractive index difference Fx is greater than or equal to a reasonable constant C, it is determined that the current structural parameter is a structural parameter that does not meet the process requirements, and the current structural parameter does not meet the requirements; or, it can also be determined that the current structural parameter does not meet the requirements by other judgment methods, and the embodiment of the present invention does not limit the judgment method that the current structural parameter does not meet the requirements.
  • the equivalent refractive index difference Fx corresponding to the current structural parameter is calculated, it is determined whether the equivalent refractive index difference Fx is less than a reasonable constant C. If Fx ⁇ C, it can be considered that the current structural parameter meets the requirements, and it can be determined that the current structural parameter meets the process requirements, and it is the target structural parameter; if Fx ⁇ C , it can be determined that the current structural parameter does not meet the process requirements, and the current structural parameter does not meet the requirements, and the current structural parameter that does not meet the requirements is updated.
  • the embodiment of the present invention adopts a method of cyclically executing parameter optimization operations to iteratively optimize the equivalent refractive index of the current structural parameters.
  • the current structural parameters can be updated and iterated cyclically until the current structural parameters that meet the requirements are obtained, thereby determining the target structural parameters that meet the process requirements.
  • the parameter optimization operation may include the following steps A4-A5 in addition to the steps A1-A3 mentioned above.
  • Step A4 Determine the current performance parameters of the metasurface corresponding to the current structural parameters, and determine the current image quality evaluation factor; the current image quality evaluation factor includes the difference between the current performance parameters and the expected performance parameters and the difference between the equivalent refractive index corresponding to the current structural parameters and the reasonable The difference between the constants.
  • the current structural parameters correspond to the corresponding metasurface
  • the metasurface or the optical system having the metasurface usually has a variety of performance parameters, which are used to characterize some imaging effects that the metasurface or the optical system can bring (such as the imaging requirements corresponding to the optical system).
  • the performance parameters include: effective focal length, F number, image height, diffuse spot size, field angle, relative aperture and at least one of the total length of the system.
  • one or more of the above performance parameters can be selected according to actual needs to determine the expected performance parameters that meet the system requirements in the metasurface or optical system to be constructed, that is, the target value expected to be achieved by the selected performance parameters; and determine the actual value of the above performance parameters corresponding to the metasurface corresponding to the current structural parameters, that is, the current performance parameters.
  • the image quality evaluation factor corresponding to the metasurface can be determined, that is, the current image quality evaluation factor, and the current image quality evaluation factor is used as another condition for judging whether the current structural parameters meet the requirements (another condition other than whether the equivalent refractive index difference is less than a reasonable constant).
  • the current image quality evaluation factor represents the difference between the current performance parameter and the expected performance parameter, and the difference between the equivalent refractive index difference of the current structural parameter and a reasonable constant; for example, the absolute value of the difference between the current performance parameter and the expected performance parameter can be used as the difference between the two, and the absolute value of the difference between the equivalent refractive index difference of the current structural parameter and a reasonable constant can be used as the difference between the two.
  • Step A5 Determine whether the current image quality evaluation factor is greater than the first limit value; wherein, the current structural parameters meet the requirements and also include: the current image quality evaluation factor is less than or equal to the first limit value; the current structural parameters do not meet the requirements and include: the equivalent refractive index difference corresponding to the current structural parameters is not less than a reasonable constant, and/or the current image quality evaluation factor is greater than the first limit value.
  • the first limit value represents the image quality evaluation factor corresponding to the optical system with the metasurface under the minimum imaging requirement.
  • the embodiment of the present invention can further determine whether the current structural parameters meet the requirements by judging whether the current image quality evaluation factor is greater than the first limit value. When the current image quality evaluation factor is less than or equal to the first limit value and the equivalent refractive index difference of the current structural parameters is less than a reasonable constant, it is determined that the current structural parameters meet the requirements.
  • the embodiment of the present invention introduces the current image quality evaluation factor to limit additional conditions on whether the current structural parameter meets the requirements, and makes the current structural parameter corresponding to the metasurface with an equivalent refractive index difference less than a reasonable constant and a current image quality evaluation factor less than or equal to the first limit value as the structural parameter that meets the requirements, so that the metasurface designed by the embodiment of the present invention not only meets the process requirements, but also meets the required imaging effect (such as imaging requirements).
  • determining the current image quality assessment factor may include the following steps A41.
  • Step A41 Determine the current image quality evaluation factor based on the current image quality evaluation function, the current image quality evaluation function includes weighted processing of the first item and the second item, the first item is used to represent the difference between the current performance parameter and the expected performance parameter, and the second item is used to represent the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant.
  • the current image quality evaluation function is a mathematical relationship for determining the current image quality evaluation factor
  • the current image quality evaluation function includes: weighting the difference between the current performance parameter and the expected performance parameter, and the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant.
  • the difference between the current performance parameter and the expected performance parameter can be used as the first item of the current image quality evaluation function
  • the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant can be used as the second item of the current image quality evaluation function.
  • the embodiment of the present invention utilizes the current image quality evaluation function to conveniently calculate the current image quality evaluation factor.
  • the current image quality evaluation function satisfies:
  • M represents the current image quality evaluation factor
  • Vi represents the i-th current performance parameter
  • Ti represents the i-th expected performance parameter
  • w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter
  • F x represents the equivalent refractive index difference corresponding to the current structural parameter value
  • C represents a reasonable constant
  • p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameters and the reasonable constant.
  • the current image quality evaluation function can be expressed as the above mathematical relationship, where the first term It is used to represent the weight of the sum of the differences between multiple current performance parameters and the expected performance parameters on the current image quality evaluation factor.
  • the first item has the greatest impact on the current image quality evaluation factor, which can make the performance of the metasurface corresponding to the current structural parameters more in line with the desired ideal situation.
  • the effective focal length, F number, image height and diffuse spot size of the optical system to be designed correspond to Ti in the first item, that is, the expected performance parameters.
  • the above performance parameters of the optical system formed by the metasurface corresponding to the current structural parameters correspond to Vi in the first item, that is, the current performance parameters.
  • the weight of the first item on the current image quality evaluation factor can be determined.
  • the second item Used to represent the influence ratio of the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant on the current image quality assessment factor.
  • the influence of the second item on the current image quality assessment factor is less than that of the first item.
  • the second item can make the equivalent refractive index difference Fx corresponding to the current structural parameter closer to the reasonable constant C.
  • the influence ratio of the second item on the current image quality assessment factor can be determined. After obtaining the first item and the second item, the current image quality assessment factor M can be determined.
  • the embodiment of the present invention calculates the current image quality evaluation factor based on the current image quality evaluation function, and by assigning different weights to the first item and the second item, the subsequent update of the current structural parameters can gradually approach a more optimal direction.
  • the current image quality evaluation function further includes a third item, which is used to represent a return value that can be adjusted; wherein the third item is an item that can be added when the current structural parameters are updated, and is the same as the first item and the second item of the current image quality evaluation function, and both are adjusted by a
  • the mathematical formula obtained by the given weighted processing, that is, the current image quality evaluation function includes weighted processing of the first term, the second term and the third term.
  • the parameter optimization operation may further include the following step A6.
  • Step A6 After determining the current image quality evaluation factor, update the current image quality evaluation function by updating the return value.
  • updating the return value includes step A61:
  • Step A61 When the equivalent refractive index difference is greater than a reasonable constant, the return value is updated to a first value; when the equivalent refractive index difference is equal to a reasonable constant, the return value is updated to a second value; the first value is greater than the second value.
  • the third term is used to further constrain the second term in the current image quality evaluation function, for example, to make the equivalent refractive index difference corresponding to the current structural parameters not only approach a reasonable constant, but also approach to be less than a reasonable constant.
  • the return value can be adjusted once to change the third term and update the current image quality evaluation function.
  • the corresponding return values are different in different situations, and the third term of the current image quality evaluation function can be updated according to the corresponding return values.
  • updating the current image quality evaluation function in a manner of updating the return value includes: when the current image quality evaluation factor is less than or equal to the first limit value, updating the current image quality evaluation function in a manner of updating the return value.
  • the above step A6 "updating the current image quality evaluation function by updating the return value" can be performed only when the current image quality evaluation factor is less than or equal to the first limit value; that is, if the current image quality evaluation factor is greater than the first limit value, the return value may not be updated at this time, that is, the current image quality evaluation function is not updated, and the next round of "parameter optimization operation" is directly performed.
  • the size relationship between the equivalent refractive index difference Fx and the reasonable constant C is determined, and the return value is updated based on the above step A61; on the contrary, if the current image quality evaluation factor is greater than the first limit value, the size relationship between the equivalent refractive index difference Fx and the reasonable constant C may not be determined, and the next round of parameter optimization operation is directly performed.
  • the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant is smaller than the weight corresponding to the returned value.
  • the weight of the third item (the item with a return value) corresponding to the current image quality evaluation function is greater than the weight of the second item (the item corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameters and a reasonable constant) corresponding to the current image quality evaluation function.
  • the purpose of this is to reduce the proportion of the second item (the equivalent refractive index difference Fx corresponding to the current structural parameters is closer to a reasonable constant C) in the current image quality evaluation function, so that the equivalent refractive index difference Fx is closer to being less than a reasonable constant C.
  • the current image quality evaluation function satisfies:
  • M represents the current image quality evaluation factor
  • Vi represents the i-th current performance parameter
  • Ti represents the i-th expected performance parameter
  • w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter
  • F x represents the equivalent refractive index difference corresponding to the current structural parameter
  • C represents a reasonable constant
  • p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant
  • K represents the return value
  • q represents the weight corresponding to the return value.
  • the current image quality evaluation function can be expressed as the above mathematical relationship with three terms, where the first term is and the second The meaning is consistent with that when the current image quality evaluation function includes two items, and will not be repeated here. It is used to represent the influence ratio of the return value on the current image quality evaluation factor when the equivalent refractive index difference corresponding to the current structural parameter is not less than a reasonable constant.
  • the influence of the third item on the current image quality evaluation factor is greater than that of the second item.
  • the third item can make the equivalent refractive index difference Fx corresponding to the current structural parameter closer to less than a reasonable constant C.
  • the influence ratio of the third item on the current image quality evaluation factor can be determined. After determining the first item, the second item and the third item, the current image quality evaluation factor M is obtained.
  • the embodiment of the present invention calculates the current image quality evaluation factor based on the current image quality evaluation function including three items. By assigning different weights to the first item, the second item and the third item, the current structural parameters can gradually approach a better direction during the updating process (i.e., the above-mentioned parameter optimization operation).
  • determining the equivalent refractive index difference corresponding to the current structural parameters includes the following steps A11-A12.
  • Step A11 Determine the phase of the metasurface corresponding to the current structural parameters at multiple positions, and determine the equivalent refractive index at the corresponding position according to the phase, and there is a positive correlation between the equivalent refractive index and the phase.
  • the equivalent refractive index can be determined by calculating the phase.
  • multiple positions can be selected from the metasurface corresponding to the current structural parameters, the phase corresponding to each selected position can be calculated, and the equivalent refractive index at each position can be calculated based on the positive correlation between the phase and the equivalent refractive index.
  • Step A12 Determine the maximum value and the minimum value among the multiple equivalent refractive indices, and use the difference between the maximum value and the minimum value as the equivalent refractive index difference corresponding to the current structural parameters.
  • the maximum and minimum values can be selected from the multiple equivalent refractive indices, and the difference between the two is used as the equivalent refractive index difference corresponding to the current structural parameters.
  • determining the equivalent refractive index difference corresponding to the current structural parameters also includes: determining the maximum radius of the supersurface corresponding to the current structural parameters, taking a as the step size and selecting multiple radius values from zero to the maximum radius, different radius values representing different positions.
  • the maximum radius of the hypersurface corresponding to the current structural parameter is r max , and from 0 to r max , the maximum radius r max is divided into multiple radius values with a step length a, and each radius value corresponds to a position.
  • F represents the equivalent refractive index
  • k represents the wave number
  • represents the wavelength
  • Hd represents the height of the nanostructure at position r.
  • r represents a radius value, for example, any radius value divided according to the maximum radius of the metasurface corresponding to the current structural parameters, and the position corresponding to the radius value r can be directly represented by r.
  • the equivalent refractive index F at the position r and the phase at the position r are The positive correlation between Indicates that the wave number k is a known quantity; and the height Hd of the nanostructure is also a physical quantity that can be determined. Therefore, based on the phase at position r and the known wave number k and the height Hd of the nanostructure, the equivalent refractive index at the radius r position in the metasurface corresponding to the current structural parameters can be calculated.
  • the structural parameters that need to be optimized may also include: the maximum radius and the height of the nanostructure; that is, in addition to the phase coefficients of each order, the structural parameters may also include the maximum half When determining the current structural parameters, the maximum radius of the corresponding supersurface and the height of the nanostructure can also be determined at the same time.
  • determining initial structural parameters includes the following steps B1-B3.
  • Step B1 Determine the original structural parameters.
  • a set of structural parameters may be randomly generated as original structural parameters, for example, a set of structural parameters may be randomly generated as original structural parameters by using optical design software (such as Zemax).
  • optical design software such as Zemax
  • Step B2 Determine the original performance parameters of the metasurface corresponding to the original structural parameters, and determine the original image quality evaluation factor; the original image quality evaluation factor includes the difference between the original performance parameters and the expected performance parameters.
  • the performance parameters of the metasurface corresponding to the original structural parameters are determined, and the performance parameters may include multiple types, such as F number, effective focal length and diffuse spot size, etc.; the determined performance parameters are set as the original performance parameters, and the original image quality evaluation factor can be obtained by determining the difference between the original performance parameters and the expected performance parameters (the target value or expected value corresponding to the performance parameters). For example, the difference between each original performance parameter and the corresponding expected performance parameter can be determined respectively, and the sum of the differences between all the original performance parameters and the corresponding expected performance parameters is used as the original image quality evaluation factor.
  • Step B3 When the original image quality evaluation factor is less than or equal to the second limit value, the original structural parameters are used as initial structural parameters.
  • the second limit value may represent the image quality evaluation factor corresponding to the optical system having the metasurface corresponding to the original structural parameter under the minimum imaging requirement.
  • the second limit value may be the same as the first limit value mentioned above. If the original image quality evaluation factor is less than or equal to the second limit value, the original structural parameter corresponding to the metasurface corresponding to the original image quality evaluation factor may be used as the initial structural parameter.
  • the original performance parameters of the metasurface corresponding to the original structural parameters can be determined, and the original image quality evaluation factor can be determined based on the original performance parameters; by judging whether the original image quality evaluation factor is less than or equal to the image quality evaluation factor corresponding to the minimum imaging requirement (such as the second limit value), the image quality evaluation factor that meets the minimum imaging requirement can be obtained.
  • the original structural parameters that meet the minimum imaging requirements are used as the initial structural parameters. This method can ensure that the determined initial structural parameters will not exceed the second limit value, that is, the determined initial structural parameters meet the minimum imaging requirements.
  • the original image quality evaluation factor satisfies:
  • N represents the original image quality evaluation factor
  • Vm represents the mth original performance parameter
  • Tm represents the mth expected performance parameter
  • wm represents the weight corresponding to the difference between the mth original performance parameter and the expected performance parameter.
  • the original image quality evaluation factor can be specifically expressed as the above mathematical relationship with one term, wherein the term It is used to represent the sum of the differences between multiple original performance parameters and the expected performance parameters; for example, the four performance parameters of effective focal length, F number, image height and diffuse spot size can be selected; the effective focal length, F number, image height and diffuse spot size of the optical system to be designed correspond to T m in the above items, that is, the expected performance parameters; and the above performance parameters of the optical system constructed by the metasurface corresponding to the original structural parameters correspond to V m in the above items, that is, the original performance parameters.
  • phase of the metasurface corresponding to the current structural parameters at multiple positions satisfies one of the following formulas:
  • r represents the distance from the position to the center; (x, y) represents the coordinates of the position; f represents the focal length; a i , b i , a ij and b ij all represent phase coefficients of each order.
  • any one of the above six formulas can be selected to calculate the phase of the metasurface at multiple positions corresponding to the current structural parameters.
  • the above six formulas can be used to calculate the phase of the metasurface at multiple positions (at the radius value r) corresponding to the current structural parameters.
  • optical design software such as Zemax
  • the system will select formula The phases of the hypersurface corresponding to the current structural parameters at multiple positions (at the radius value r) are calculated, and the embodiment of the present invention does not impose any limitation on which calculation formula is selected.
  • the working band of the optical system with the metasurface is the near-infrared band
  • the central wavelength is 940nm
  • the maximum half field of view angle is 39°
  • the effective focal length is 2.46mm
  • the Fno the inverse of the relative aperture
  • the TTL total length of the system
  • the method includes the following steps 401-412, and the flowchart of the method can be seen in FIG4 .
  • Step 401 Randomly generate original structural parameters.
  • Step 402 Determine the original performance parameters of the metasurface corresponding to the original structural parameters.
  • Step 403 Determine the original image quality assessment factor.
  • the original image quality evaluation factor may be determined based on the above step B2, which will not be described in detail here.
  • Step 404 determine whether the original image quality evaluation factor is less than or equal to the second limit value, if so, execute step 405; if not, execute step 406;
  • the second limit value is the same as the first limit value.
  • Step 405 Use the original structural parameters as the initial structural parameters, use the initial structural parameters as the initial values of the current structural parameters, and continue to execute step 407.
  • Step 406 Update the original structural parameters based on the gradient descent method and repeat step 402.
  • Step 407 Determine the equivalent refractive index difference corresponding to the current structural parameters.
  • Step 408 Determine whether the equivalent refractive index difference corresponding to the current structural parameters is less than a reasonable constant. If so, execute step 409; if not, execute step 410.
  • Step 409 Determine the current structural parameter as the target structural parameter.
  • the target structure parameters meet the process requirements and conform to the imaging needs.
  • Step 410 Determine whether the equivalent refractive index difference corresponding to the current structural parameters is greater than a reasonable constant. If so, execute step 411; if not, execute step 412.
  • k 1 is greater than k 0 .
  • Step 413 Based on the current image quality evaluation function, determine the current image quality evaluation factor, and judge whether the current image quality evaluation factor is less than or equal to the first limit value. If so, execute the above step 407; if not, execute step 414.
  • Step 414 Update the current structural parameters based on the gradient descent method and execute the above step 413.
  • Figure 5 shows a schematic diagram of the simulation results obtained based on the present method
  • Figures 2 and 6 respectively show a schematic diagram of the phase distribution of the metasurface corresponding to the unconstrained phase coefficient, and a diagram of the optical modulation transfer function generated by the metasurface corresponding to the unconstrained phase coefficient
  • Figures 3 and 7 respectively show a schematic diagram of the phase distribution of the metasurface corresponding to the constrained phase coefficient, and a diagram of the optical modulation transfer function generated by the metasurface corresponding to the constrained phase coefficient;
  • the above describes in detail the metasurface phase coefficient optimization method provided by an embodiment of the present invention.
  • the method can also be implemented by a corresponding device.
  • the following describes in detail the metasurface phase coefficient optimization device provided by an embodiment of the present invention.
  • Fig. 8 shows a schematic diagram of the structure of a metasurface phase coefficient optimization device provided by an embodiment of the present invention.
  • the metasurface phase coefficient optimization device includes: a determination module 81 and an optimization module 82 .
  • the determination module 81 is used to determine initial structural parameters, where the structural parameters are used to define the structural features of the metasurface, and the structural parameters at least include: phase coefficients of each order.
  • the optimization module 82 is used to use the initial structural parameters as the initial values of the current structural parameters, optimize the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, and determine the optimized target structural parameters;
  • the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
  • the optimization module 82 includes: a circulation unit.
  • the circulation unit is used to cyclically perform parameter optimization operations on the current structural parameters until the equivalent refractive index difference corresponding to the optimized current structural parameters is less than the reasonable constant;
  • the circulation unit includes: an equivalent refractive index difference determination unit and an equivalent refractive index difference judgment unit.
  • the equivalent refractive index difference determination unit is used to determine the equivalent refractive index difference corresponding to the current structural parameters.
  • the equivalent refractive index difference judgment unit is used to judge whether the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant; if the current structural parameters meet the requirements, the current structural parameters are used as the target structural parameters; if the current structural parameters do not meet the requirements, the current structural parameters are updated; wherein, the current structural parameters meet the requirements including that the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant.
  • the circulation unit further comprises: a current image quality evaluation factor determination unit and a current image Quality assessment factor judgment unit.
  • the current image quality evaluation factor determination unit is used to determine the current performance parameters of the metasurface corresponding to the current structural parameters, and to determine the current image quality evaluation factor; the current image quality evaluation factor includes the difference between the current performance parameters and the expected performance parameters and the difference between the equivalent refractive index difference corresponding to the current structural parameters and the reasonable constant.
  • the current image quality assessment factor judgment unit is used to judge whether the current image quality assessment factor is greater than a first limit value; wherein, the current structural parameters satisfying the requirements also include: the current image quality assessment factor is less than or equal to the first limit value; the current structural parameters not satisfying the requirements include: the equivalent refractive index difference corresponding to the current structural parameters is not less than the reasonable constant, and/or the current image quality assessment factor is greater than the first limit value.
  • the current image quality assessment factor determination unit includes: a weighted processing unit.
  • the weighted processing unit is used to determine the current image quality evaluation factor based on the current image quality evaluation function, and the current image quality evaluation function includes weighted processing of a first item and a second item, the first item is used to represent the difference between the current performance parameter and the expected performance parameter, and the second item is used to represent the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
  • the current image quality evaluation function satisfies:
  • M represents the current image quality evaluation factor
  • Vi represents the i-th current performance parameter
  • Ti represents the i-th expected performance parameter
  • w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter
  • F x represents the equivalent refractive index difference corresponding to the current structural parameter
  • C represents the reasonable constant
  • p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
  • the current image quality evaluation function further includes a third item, and the third item is used to represent a return value that can be adjusted.
  • the cycle unit also includes: an update unit.
  • the updating unit is used to update the current image quality evaluation function by updating the return value after the current image quality evaluation factor is determined.
  • the updating unit includes: a subunit for determining a return value.
  • the return value determination subunit is used to update the return value to a first value when the equivalent refractive index difference is greater than the reasonable constant; and to update the return value to a second value when the equivalent refractive index difference is equal to the reasonable constant; the first value is greater than the second value.
  • the update unit includes: an update subunit.
  • the updating subunit is used for updating the current image quality evaluation function by updating the return value when the current image quality evaluation factor is less than or equal to the first limit value.
  • the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant is smaller than the weight corresponding to the return value.
  • the current image quality evaluation function satisfies:
  • M represents the current image quality evaluation factor
  • Vi represents the i-th current performance parameter
  • Ti represents the i-th expected performance parameter
  • w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter
  • F x represents the equivalent refractive index difference corresponding to the current structural parameter
  • C represents the reasonable constant
  • p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant
  • K represents the return value
  • q represents the weight corresponding to the return value.
  • the performance parameters include: at least one of effective focal length, F number, image height, diffuse spot size, field of view angle, relative aperture and total system length.
  • the equivalent refractive index difference determining unit includes: a phase determining subunit and an equivalent refractive index difference determining subunit.
  • the phase determination subunit is used to determine the phase of the metasurface corresponding to the current structural parameters at multiple positions, and determine the equivalent refractive index at the corresponding position according to the phase, and there is a positive correlation between the equivalent refractive index and the phase.
  • the equivalent refractive index difference determination subunit is used to determine the maximum value and the minimum value among the multiple equivalent refractive indices, and take the difference between the maximum value and the minimum value as the equivalent refractive index difference corresponding to the current structural parameter.
  • the equivalent refractive index difference determining unit further includes: a radius value determining subunit.
  • the radius value determination subunit is used to determine the maximum radius of the hypersurface corresponding to the current structural parameters, with a as the step size and multiple radius values selected from zero to the maximum radius, and different radius values represent different positions.
  • F represents the equivalent refractive index
  • k represents the wave number
  • represents the wavelength
  • Hd represents the height of the nanostructure at position r.
  • the determination module 81 includes: an original structural parameter determination unit, an original image quality assessment factor determination unit and an original image quality assessment factor judgment unit.
  • the original structure parameter determination unit is used to determine the original structure parameters.
  • the original image quality evaluation factor determination unit is used to determine the original performance parameters of the metasurface corresponding to the original structural parameters, and determine the original image quality evaluation factor; the original image quality evaluation factor includes the difference between the original performance parameters and the expected performance parameters.
  • the original image quality evaluation factor judgment unit is used to use the original structure parameter as the initial structure parameter when the original image quality evaluation factor is less than or equal to a second limit value.
  • the original image quality evaluation factor satisfies:
  • N represents the original image quality evaluation factor
  • Vm represents the mth original performance parameter
  • Tm represents the mth expected performance parameter
  • wm represents the weight corresponding to the difference between the mth original performance parameter and the expected performance parameter.
  • phase of the metasurface corresponding to the current structural parameters at multiple positions satisfies one of the following formulas:
  • r represents the distance from the position to the center; (x, y) represents the coordinates of the position; f represents the focal length; a i , b i , a ij and b ij all represent the phase coefficients of the respective orders.
  • the structural parameters further include: the maximum radius and the height of the nanostructure.
  • the device provided by the embodiment of the present invention can obtain the target structural parameters that meet the process requirements (less than a reasonable constant) after optimization by optimizing the equivalent refractive index difference of the current structural parameters.
  • the target structural parameters can make the nanostructure on its corresponding metasurface meet the periodic arrangement.
  • the embodiment of the present invention innovatively optimizes the structural parameters of the metasurface in the optical system (such as the phase coefficients of each order), thereby reducing the difficulty of the manufacturing process of the optical system at the beginning of the design to achieve mass production.
  • an embodiment of the present invention further provides an electronic device, including a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor.
  • the transceiver, the memory, and the processor are respectively connected via a bus.
  • the computer program is executed by the processor, each process of the above-mentioned metasurface phase coefficient optimization method embodiment is implemented, and the same technical effect can be achieved. To avoid repetition, it will not be described here.
  • an embodiment of the present invention further provides an electronic device, which includes a bus 1110 , a processor 1120 , a transceiver 1130 , a bus interface 1140 , a memory 1150 , and a user interface 1160 .
  • the electronic device also includes: a computer program stored in the memory 1150 and executable on the processor 1120, and when the computer program is executed by the processor 1120, each process of the above-mentioned metasurface phase coefficient optimization method embodiment is implemented.
  • the transceiver 1130 is configured to receive and send data under the control of the processor 1120 .
  • bus architecture (represented by bus 1110) may be Bus 1110 connects various circuits including one or more processors represented by processor 1120 and memory represented by memory 1150 , including any number of interconnecting buses and bridges.
  • Bus 1110 represents one or more of any of several types of bus structures, including a memory bus and memory controller, a peripheral bus, an Accelerate Graphical Port (AGP), a processor, or a local bus using any of a variety of bus architectures.
  • bus architectures include: Industry Standard Architecture (ISA) bus, Micro Channel Architecture (MCA) bus, Enhanced ISA (EISA) bus, Video Electronics Standards Association (VESA), Peripheral Component Interconnect (PCI) bus.
  • the processor 1120 may be an integrated circuit chip having signal processing capabilities. In the implementation process, each step of the above method embodiment may be completed by an integrated logic circuit of hardware in the processor or an instruction in the form of software.
  • the above processors include: a general processor, a central processing unit (CPU), a network processor (NP), a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a complex programmable logic device (CPLD), a programmable logic array (PLA), a microcontroller unit (MCU) or other programmable logic devices, discrete gates, transistor logic devices, discrete hardware components.
  • the methods, steps and logic block diagrams disclosed in the embodiments of the present invention may be implemented or executed.
  • the processor may be a single-core processor or a multi-core processor, and the processor may be integrated into a single chip or located on multiple different chips.
  • the processor 1120 may be a microprocessor or any conventional processor.
  • the method steps disclosed in the embodiments of the present invention may be directly executed by a hardware decoding processor, or by a combination of hardware and software modules in the decoding processor.
  • the software module may be located in a random access memory (RAM), a flash memory, Read-Only Memory (ROM), Programmable ROM (PROM), Erasable Programmable ROM (EPROM), registers and other readable storage media known in the art.
  • the readable storage medium is located in the memory, and the processor reads the information in the memory and completes the steps of the above method in combination with its hardware.
  • the bus 1110 may also connect various other circuits such as peripheral devices, voltage regulators or power management circuits, and the bus interface 1140 provides an interface between the bus 1110 and the transceiver 1130, which are well known in the art. Therefore, the embodiment of the present invention will not be further described.
  • the transceiver 1130 may be one element or multiple elements, such as multiple receivers and transmitters, providing a unit for communicating with various other devices on a transmission medium. For example, the transceiver 1130 receives external data from other devices, and the transceiver 1130 is used to send data processed by the processor 1120 to other devices.
  • a user interface 1160 may also be provided, such as a touch screen, a physical keyboard, a display, a mouse, a speaker, a microphone, a trackball, a joystick, and a stylus.
  • the memory 1150 may further include a memory remotely arranged relative to the processor 1120, and these remotely arranged memories may be connected to the server through a network.
  • One or more parts of the above-mentioned network may be an ad hoc network, an intranet, an extranet, a virtual private network (VPN), a local area network (LAN), a wireless local area network (WLAN), a wide area network (WAN), a wireless wide area network (WWAN), a metropolitan area network (MAN), the Internet, a public switched telephone network (PSTN), a plain old telephone service network (POTS), a cellular telephone network, a wireless network, a wireless fidelity (Wi-Fi) network, and a combination of two or more of the above-mentioned networks.
  • VPN virtual private network
  • LAN local area network
  • WLAN wireless local area network
  • WAN wide area network
  • WWAN wireless wide area network
  • MAN metropolitan area network
  • PSTN public switched telephone network
  • POTS plain old telephone service network
  • the cellular telephone network and the wireless network may be a Global System for Mobile Communications (GSM) system, a Code Division Multiple Access (CDMA) system, a Worldwide Interoperability for Microwave Access (WiMAX) system, a General Packet Radio Service (GPRS) system, a Wideband Code Division Multiple Access (WCDMA) system, a Long Term Evolution (LTE) system, a LTE Frequency Division Duplex (FDD) system, a LTE Time Division Duplex (TDD) system, an Advanced Long Term Evolution (LTE-A) system, a Universal Mobile Telecommunications (UMTS) system, an Enhanced Mobile Broadband (eMBB) system, a Massive Machine Type of Communications (MTC) system, and a LTE-A system.
  • GSM Global System for Mobile Communications
  • CDMA Code Division Multiple Access
  • WiMAX Worldwide Interoperability for Microwave Access
  • GPRS General Packet Radio Service
  • WCDMA Wideband Code Division Multiple Access
  • LTE Long Term Evolution
  • FDD
  • the memory 1150 in the embodiment of the present invention may be a volatile memory or a non-volatile memory, or may include both a volatile memory and a non-volatile memory.
  • the non-volatile memory includes: a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory.
  • Volatile memory includes: Random Access Memory (RAM), which is used as an external cache.
  • RAM Random Access Memory
  • DRAM Dynamic RAM
  • SDRAM Synchronous DRAM
  • DDRSDRAM Double Data Rate SDRAM
  • ESDRAM Enhanced SDRAM
  • SLDRAM Synchronous DRAM
  • DRRAM Direct Rambus RAM
  • the memory 1150 of the electronic device described in the embodiment of the present invention includes but is not limited to the above and any other suitable types of memory.
  • the memory 1150 stores the following elements of the operating system 1151 and the application program 1152: executable modules, data structures, or subsets thereof, or extended sets thereof.
  • the operating system 1151 includes various system programs, such as a framework layer, a core library layer, a driver layer, etc., which are used to implement various basic services and process hardware-based tasks.
  • the application 1152 includes various application programs, such as a media player (Media Player) and a browser (Browser), which are used to implement various application services.
  • the program that implements the method of the embodiment of the present invention may be included in the application 1152.
  • the application 1152 includes applets, objects, components, logic, data structures, and other computer system executable instructions that perform specific tasks or implement specific abstract data types.
  • an embodiment of the present invention further provides a computer-readable storage medium on which is stored A computer program is stored, and when the computer program is executed by a processor, each process of the above-mentioned metasurface phase coefficient optimization method embodiment is implemented, and the same technical effect can be achieved. To avoid repetition, it will not be repeated here.
  • Computer readable storage media include: permanent and non-permanent, removable and non-removable media, which are tangible devices that can retain and store instructions for use by instruction execution devices.
  • Computer readable storage media include: electronic storage devices, magnetic storage devices, optical storage devices, electromagnetic storage devices, semiconductor storage devices, and any suitable combination of the above.
  • Computer readable storage media include: phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), non-volatile random access memory (NVRAM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassette storage, magnetic tape disk storage or other magnetic storage devices, memory sticks, mechanical encoding devices (such as punched cards or raised structures in grooves with instructions recorded thereon) or any other non-transmission medium that can be used to store information that can be accessed by a computing device.
  • PRAM phase change memory
  • SRAM static random access memory
  • DRAM dynamic random access memory
  • RAM random access memory
  • ROM read-only memory
  • NVRAM non-volatile random access memory
  • EEPROM electrically erasable programmable read-only memory
  • flash memory or other memory technology
  • CD-ROM compact disk
  • computer-readable storage media do not include temporary signals themselves, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating through waveguides or other transmission media (such as light pulses passing through fiber optic cables), or electrical signals transmitted through wires.
  • the disclosed devices, electronic devices and methods can be implemented in other ways.
  • the device embodiments described above are only schematic.
  • the division of the modules or units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed.
  • the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, or it can be an electrical, mechanical or other form of connection.
  • the units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, and may be located in one location or distributed across multiple network units. Some or all of the units are selected to solve the problem to be solved by the embodiment of the present invention.
  • each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.
  • the above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.
  • the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium.
  • the technical solution of the embodiment of the present invention is essentially or part of the contribution to the prior art, or all or part of the technical solution can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for a computer device (including: a personal computer, a server, a data center or other network device) to perform all or part of the steps of the method described in each embodiment of the present invention.
  • the above-mentioned storage medium includes various media that can store program codes as listed above.
  • the embodiments of the present invention can be implemented as methods, devices, electronic devices and computer-readable storage media. Therefore, the embodiments of the present invention can be specifically implemented in the following forms: complete hardware, complete software (including firmware, resident software, microcode, etc.), a combination of hardware and software.
  • the embodiments of the present invention can also be implemented in the form of a computer program product in one or more computer-readable storage media, and the computer-readable storage medium contains computer program code.
  • Computer-readable storage medium may adopt any combination of one or more computer-readable storage media.
  • Computer-readable storage media include: electrical, magnetic, optical, electromagnetic, infrared or semiconductor systems, devices or devices, or any combination of the above. More specific examples of computer-readable storage media include: portable computer disks, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROM), flash memories (Flash Memory), optical fibers, compact disk read-only memories (CD-ROM), optical storage devices, magnetic storage devices or any combination of the above.
  • a computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, device, or device.
  • the computer program code contained in the above-mentioned computer-readable storage medium can be transmitted using any appropriate medium, including: wireless, wire, optical cable, radio frequency (Radio Frequency, RF) or any suitable combination of the above.
  • any appropriate medium including: wireless, wire, optical cable, radio frequency (Radio Frequency, RF) or any suitable combination of the above.
  • the computer program code for performing the operation of the embodiments of the present invention can be written in assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-related instructions, microcode, firmware instructions, state setting data, integrated circuit configuration data, or in one or more programming languages or a combination thereof, wherein the programming language includes an object-oriented programming language, such as Java, Smalltalk, C++, and also includes a conventional procedural programming language, such as C language or a similar programming language.
  • the computer program code can be executed completely on the user's computer, partially on the user's computer, as an independent software package, partially on the user's computer, partially on a remote computer, and completely on a remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer or to an external computer through any type of network, including a local area network (LAN) or a wide area network (WAN).
  • LAN local area network
  • WAN wide area network
  • the embodiments of the present invention describe the provided methods, devices, and electronic devices through flowcharts and/or block diagrams.
  • each box in the flowchart and/or block diagram and the combination of boxes in the flowchart and/or block diagram can be implemented by computer-readable program instructions.
  • These computer-readable program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer or other programmable data processing device to produce a machine, and these computer-readable program instructions are executed by a computer or other programmable data processing device to produce a device that implements the functions/operations specified by the boxes in the flowchart and/or block diagram.
  • These computer-readable program instructions may also be stored in a computer-readable storage medium that enables a computer or other programmable data processing device to work in a specific manner. In this way, the instructions stored in the computer-readable storage medium produce an instruction device product including functions/operations specified in the blocks in the flowchart and/or block diagram.
  • the computer readable program instructions may also be loaded onto a computer, other programmable data processing apparatus or other device, so that a series of operation steps are executed on the computer, other programmable data processing apparatus or other device to produce a computer-implemented process, thereby causing
  • the instructions executed on a computer or other programmable data processing apparatus can provide a process for implementing the functions/operations specified in the blocks in the flowcharts and/or block diagrams.

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Abstract

A metasurface phase coefficient optimization method and apparatus, and an electronic device. The method comprises: determining initial structural parameters, wherein the structural parameters comprise at least phase coefficients of each order; using the initial structure parameters as an initial value of current structural parameters, optimizing the current structural parameters in a mode of optimizing an equivalent refractive index difference corresponding to the current structural parameters, and determining optimized target structural parameters. According to the metasurface phase coefficient optimization method and apparatus, and the electronic device, the equivalent refractive index difference of the current structural parameters is optimized, and then the optimized target structural parameters meeting the process requirements can be obtained, and the target structural parameters can enable nanostructures on a metasurface corresponding to the target structural parameters to meet the periodic arrangement; the phase coefficients of each order of the metasurface in an optical system are optimized, and the manufacturing process difficulty of the optical system is reduced at the beginning of the design, so that batch production is achieved.

Description

一种超表面相位系数优化方法、装置及电子设备A metasurface phase coefficient optimization method, device and electronic equipment 技术领域Technical Field
本发明涉及光学技术领域,具体而言,涉及一种超表面相位系数优化方法、装置、电子设备及计算机可读存储介质。The present invention relates to the field of optical technology, and in particular to a metasurface phase coefficient optimization method, device, electronic device and computer-readable storage medium.
背景技术Background technique
理论上,超表面的相位系数取任何值都是可以的;但实际上,基于不受约束的超表面的相位系数所得到的超表面,其相位分布显示在极短半径距离内,纳米结构对应的相位变化十分频繁,即极短的半径距离内纳米结构的排列方式要对应地做多次调整,不满足周期性排布。在实际应用中则体现在需要一颗一颗地放置不同相位的纳米结构,这将大大增加超表面的制作工艺难度,无法实现批量生产。In theory, the phase coefficient of the metasurface can take any value; but in reality, the phase distribution of the metasurface obtained based on the phase coefficient of the unconstrained metasurface shows that the phase corresponding to the nanostructure changes frequently within an extremely short radius, that is, the arrangement of the nanostructure within an extremely short radius must be adjusted multiple times accordingly, and does not satisfy the periodic arrangement. In practical applications, it is reflected in the need to place nanostructures of different phases one by one, which will greatly increase the difficulty of the metasurface manufacturing process and cannot be achieved in mass production.
目前,尚未有文献或专利对超透镜光学系统,或者超透镜与传统的折射透镜相结合的光学系统(也被称为折-超混合系统)中超表面相位系数取值范围进行约束。Currently, there is no literature or patent that constrains the range of metasurface phase coefficients in a metalens optical system, or an optical system that combines a metalens with a traditional refractive lens (also known as a refractive-metahybrid system).
发明内容Summary of the invention
为解决现有存在的技术问题,本发明实施例提供一种超表面相位系数优化方法、装置、电子设备及计算机可读存储介质。In order to solve the existing technical problems, the embodiments of the present invention provide a metasurface phase coefficient optimization method, device, electronic device and computer-readable storage medium.
第一方面,本发明实施例提供了一种超表面相位系数优化方法,包括:确定初始的结构参数,所述结构参数用于限定超表面的结构特征,且所述结构参数至少包括:各阶的相位系数;将所述初始的结构参数作为当前结构参数的初始值,以优化所述当前结构参数对应的等效折射率差值的方式对所述当前结构参数进行优化,确定优化后的目 标结构参数;所述等效折射率差值为与相应结构参数所对应的超表面中等效折射率的最大值与最小值之间的差值,且所述目标结构参数对应的所述等效折射率差值小于满足工艺要求的合理常数。In a first aspect, an embodiment of the present invention provides a method for optimizing a metasurface phase coefficient, comprising: determining initial structural parameters, the structural parameters are used to define structural features of the metasurface, and the structural parameters at least include: phase coefficients of various orders; using the initial structural parameters as initial values of current structural parameters, optimizing the current structural parameters in a manner of optimizing an equivalent refractive index difference corresponding to the current structural parameters, and determining an optimized target phase coefficient; The equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
可选地,以优化所述当前结构参数对应的等效折射率差值的方式对所述当前结构参数进行优化,包括:对所述当前结构参数循环执行参数优化操作,直至优化后的当前结构参数对应的所述等效折射率差值小于所述合理常数;所述参数优化操作,包括:确定所述当前结构参数对应的等效折射率差值;判断所述当前结构参数对应的等效折射率差值是否小于所述合理常数;在所述当前结构参数满足要求的情况下,将所述当前结构参数作为所述目标结构参数;在所述当前结构参数不满足要求的情况下,更新所述当前结构参数;其中,所述当前结构参数满足要求包括所述当前结构参数对应的等效折射率差值小于所述合理常数。Optionally, the current structural parameters are optimized in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, including: cyclically performing parameter optimization operations on the current structural parameters until the equivalent refractive index difference corresponding to the optimized current structural parameters is less than the reasonable constant; the parameter optimization operation includes: determining the equivalent refractive index difference corresponding to the current structural parameters; judging whether the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant; if the current structural parameters meet the requirements, using the current structural parameters as the target structural parameters; if the current structural parameters do not meet the requirements, updating the current structural parameters; wherein, the current structural parameters meeting the requirements includes that the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant.
可选地,参数优化操作,还包括:确定所述当前结构参数所对应的超表面的当前性能参数,并确定当前像质评估因子;所述当前像质评估因子包括所述当前性能参数与期望性能参数之间的差异以及所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异;判断所述当前像质评估因子是否大于第一限制值;其中,所述当前结构参数满足要求还包括:所述当前像质评估因子小于或等于第一限制值;所述当前结构参数不满足要求包括:所述当前结构参数对应的等效折射率差值不小于所述合理常数,和/或,所述当前像质评估因子大于第一限制值。Optionally, the parameter optimization operation also includes: determining the current performance parameters of the metasurface corresponding to the current structural parameters, and determining a current image quality evaluation factor; the current image quality evaluation factor includes the difference between the current performance parameters and the expected performance parameters and the difference between the equivalent refractive index difference corresponding to the current structural parameters and the reasonable constant; judging whether the current image quality evaluation factor is greater than a first limit value; wherein, the current structural parameters meeting the requirements also includes: the current image quality evaluation factor is less than or equal to the first limit value; the current structural parameters not meeting the requirements include: the equivalent refractive index difference corresponding to the current structural parameters is not less than the reasonable constant, and/or the current image quality evaluation factor is greater than the first limit value.
可选地,确定当前像质评估因子,包括:基于当前像质评估函数确定所述当前像质评估因子,所述当前像质评估函数包括对第一项和第二项进行加权处理,所述第一项用于表示所述当前性能参数与所述期望性能参数之间的差异,所述第二项用于表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异。Optionally, determining a current image quality assessment factor comprises: determining the current image quality assessment factor based on a current image quality assessment function, wherein the current image quality assessment function comprises weighted processing of a first item and a second item, wherein the first item is used to represent the difference between the current performance parameter and the expected performance parameter, and the second item is used to represent the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
可选地,当前像质评估函数满足:
Optionally, the current image quality evaluation function satisfies:
其中,M表示所述当前像质评估因子;Vi表示第i种所述当前性能参数;Ti表示第i种所述期望性能参数;wi表示第i种所述当前性能参数与所述期望性能参数之间的差异对应的权重;Fx表示所述当前结构参数对应的等效折射率差值;C表示所述合理常数;p表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重。Among them, M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter; C represents the reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
可选地,当前像质评估函数还包括第三项,所述第三项用于表示能够被调整的返回值;所述参数优化操作,还包括:在所述确定当前像质评估因子之后,以更新所述返回值的方式更新所述当前像质评估函数;其中,所述更新所述返回值,包括:在所述等效折射率差值大于所述合理常数的情况下,将所述返回值更新为第一数值;在所述等效折射率差值等于所述合理常数的情况下,将所述返回值更新为第二数值;所述第一数值大于所述第二数值。Optionally, the current image quality evaluation function also includes a third item, which is used to represent a return value that can be adjusted; the parameter optimization operation also includes: after determining the current image quality evaluation factor, updating the current image quality evaluation function by updating the return value; wherein, updating the return value includes: when the equivalent refractive index difference is greater than the reasonable constant, updating the return value to a first value; when the equivalent refractive index difference is equal to the reasonable constant, updating the return value to a second value; the first value is greater than the second value.
可选地,以更新所述返回值的方式更新所述当前像质评估函数,包括:在所述当前像质评估因子小于或等于第一限制值的情况下,以更新所述返回值的方式更新所述当前像质评估函数。Optionally, updating the current image quality evaluation function in a manner of updating the return value includes: when the current image quality evaluation factor is less than or equal to a first limit value, updating the current image quality evaluation function in a manner of updating the return value.
可选地,当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重小于所述返回值对应的权重。Optionally, the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant is smaller than the weight corresponding to the return value.
可选地,当前像质评估函数满足:
Optionally, the current image quality evaluation function satisfies:
其中,M表示所述当前像质评估因子;Vi表示第i种所述当前性能参数;Ti表示第i种所述期望性能参数;wi表示第i种所述当前性能参数与所述期望性能参数之间的差异对应的权重;Fx表示所述当前结构参数对应的等效折射率差值;C表示所述合理常数;p表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重;K表示所述返回值;q表示所述返回值对应的权重。Among them, M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter; C represents the reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant; K represents the return value; q represents the weight corresponding to the return value.
可选地,性能参数包括:有效焦距、F数、像高、弥散斑大小、视 场角、相对孔径和系统总长中的至少一种。Optionally, the performance parameters include: effective focal length, F number, image height, diffuse spot size, visual At least one of field angle, relative aperture, and overall system length.
可选地,确定所述当前结构参数对应的等效折射率差值,包括:确定所述当前结构参数所对应的超表面在多个位置处的相位,并根据所述相位确定相应位置处的等效折射率,所述等效折射率与所述相位之间为正相关关系;确定多个所述等效折射率中的最大值和最小值,将所述最大值与所述最小值之间的差值作为所述当前结构参数对应的等效折射率差值。Optionally, determining the equivalent refractive index difference corresponding to the current structural parameters includes: determining the phase of the metasurface corresponding to the current structural parameters at multiple positions, and determining the equivalent refractive index at the corresponding position based on the phase, and there is a positive correlation between the equivalent refractive index and the phase; determining the maximum and minimum values of the multiple equivalent refractive indices, and taking the difference between the maximum and the minimum value as the equivalent refractive index difference corresponding to the current structural parameters.
可选地,确定所述当前结构参数对应的等效折射率差值,还包括:确定所述当前结构参数所对应的超表面的最大半径,以a作为步长、从零至所述最大半径中选取多个半径值,不同的半径值表示不同位置。Optionally, determining the equivalent refractive index difference corresponding to the current structural parameters also includes: determining the maximum radius of the supersurface corresponding to the current structural parameters, taking a as the step size and selecting multiple radius values from zero to the maximum radius, different radius values representing different positions.
可选地,等效折射率与所述相位之间的关系满足:
Optionally, the relationship between the equivalent refractive index and the phase satisfies:
其中,F表示所述等效折射率;表示r位置处的相位;k表示波数,且λ表示波长;Hd表示r位置处的纳米结构的高度。Wherein, F represents the equivalent refractive index; represents the phase at position r; k represents the wave number, and λ represents the wavelength; Hd represents the height of the nanostructure at position r.
可选地,确定初始的结构参数,包括:确定原始结构参数;确定所述原始结构参数所对应的超表面的原始性能参数,并确定原始像质评估因子;所述原始像质评估因子包括所述原始性能参数与期望性能参数之间的差异;在所述原始像质评估因子小于或等于第二限制值的情况下,将所述原始结构参数作为所述初始的结构参数。Optionally, determining the initial structural parameters includes: determining original structural parameters; determining original performance parameters of the metasurface corresponding to the original structural parameters, and determining original image quality evaluation factors; the original image quality evaluation factors include the difference between the original performance parameters and the expected performance parameters; when the original image quality evaluation factors are less than or equal to a second limit value, using the original structural parameters as the initial structural parameters.
可选地,原始像质评估因子满足:
Optionally, the original image quality evaluation factor satisfies:
其中,N表示所述原始像质评估因子;Vm表示第m种所述原始性能参数;Tm表示第m种所述期望性能参数;wm表示第m种所述原始性能参数与所述期望性能参数之间的差异对应的权重。Among them, N represents the original image quality evaluation factor; Vm represents the mth original performance parameter; Tm represents the mth expected performance parameter; wm represents the weight corresponding to the difference between the mth original performance parameter and the expected performance parameter.
可选地,当前结构参数所对应的超表面在多个位置处的相位满足以下公式之一:





Optionally, the phase of the metasurface corresponding to the current structural parameters at multiple positions satisfies one of the following formulas:





其中,r表示所述位置到中心的距离;(x,y)表示所述位置的坐标;f表示焦距;ai、bi、aij和bij均表示所述各阶的相位系数。Wherein, r represents the distance from the position to the center; (x, y) represents the coordinates of the position; f represents the focal length; a i , b i , a ij and b ij all represent the phase coefficients of the respective orders.
可选地,结构参数还包括:所述最大半径和所述纳米结构的高度。Optionally, the structural parameters further include: the maximum radius and the height of the nanostructure.
第二方面,本发明实施例还提供了一种超表面相位系数优化装置,包括:确定模块和优化模块。In a second aspect, an embodiment of the present invention further provides a metasurface phase coefficient optimization device, comprising: a determination module and an optimization module.
确定模块用于确定初始的结构参数,所述结构参数用于限定超表面的结构特征,且所述结构参数至少包括:各阶的相位系数。The determination module is used to determine initial structural parameters, and the structural parameters are used to define the structural characteristics of the metasurface, and the structural parameters at least include: phase coefficients of each order.
优化模块用于将所述初始的结构参数作为当前结构参数的初始值,以优化所述当前结构参数对应的等效折射率差值的方式对所述当前结构参数进行优化,确定优化后的目标结构参数;所述等效折射率差值为与相应结构参数所对应的超表面中等效折射率的最大值与最小值之间的差值,且所述目标结构参数对应的所述等效折射率差值小于满足工艺要求的合理常数。The optimization module is used to use the initial structural parameters as the initial values of the current structural parameters, optimize the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, and determine the optimized target structural parameters; the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
第三方面,本发明实施例提供了一种电子设备,包括总线、收发器、存储器、处理器及存储在所述存储器上并可在所述处理器上运行的计算机程序,所述收发器、所述存储器和所述处理器通过所述总线相连,所述计算机程序被所述处理器执行时实现上述任意一项所述的超表面相位系数优化方法中的步骤。 In the third aspect, an embodiment of the present invention provides an electronic device, comprising a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the transceiver, the memory, and the processor are connected via the bus, and the computer program, when executed by the processor, implements the steps in any one of the above-described methods for optimizing the metasurface phase coefficient.
第四方面,本发明实施例还提供了一种计算机可读存储介质,其上存储有计算机程序,所述计算机程序被处理器执行时实现上述任意一项所述的超表面相位系数优化方法中的步骤。In a fourth aspect, an embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, and when the computer program is executed by a processor, the steps in any one of the above-mentioned methods for optimizing the metasurface phase coefficient are implemented.
本发明实施例提供的超表面相位系数优化方法、装置、电子设备及计算机可读存储介质,通过优化当前结构参数的等效折射率差值,可以得到优化后满足工艺要求(小于合理常数)的目标结构参数,该目标结构参数能够使其对应的超表面上的纳米结构满足周期性排布;本发明实施例开创性地对光学系统中超表面的结构参数(如各阶的相位系数)进行优化,在设计之初即降低了光学系统的制造工艺难度,以实现批量化生产。The metasurface phase coefficient optimization method, device, electronic device and computer-readable storage medium provided in the embodiments of the present invention can obtain the target structural parameters that meet the process requirements (less than a reasonable constant) after optimization by optimizing the equivalent refractive index difference of the current structural parameters. The target structural parameters can make the nanostructure on its corresponding metasurface meet the periodic arrangement. The embodiments of the present invention innovatively optimize the structural parameters of the metasurface in the optical system (such as the phase coefficients of each order), thereby reducing the difficulty of the manufacturing process of the optical system at the beginning of the design to achieve mass production.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本发明实施例或背景技术中的技术方案,下面将对本发明实施例或背景技术中所需要使用的附图进行说明。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the background technology, the drawings required for use in the embodiments of the present invention or the background technology will be described below.
图1示出了本发明实施例所提供的一种超表面相位系数优化方法的流程图;FIG1 shows a flow chart of a metasurface phase coefficient optimization method provided by an embodiment of the present invention;
图2示出了本发明实施例所提供的超表面相位系数优化方法中,不受约束的相位系数对应的超表面的相位分布示意图;FIG2 shows a schematic diagram of the phase distribution of a metasurface corresponding to an unconstrained phase coefficient in a metasurface phase coefficient optimization method provided by an embodiment of the present invention;
图3示出了本发明实施例所提供的超表面相位系数优化方法中,目标结构参数所对应的超表面的相位分布示意图;FIG3 shows a schematic diagram of the phase distribution of a metasurface corresponding to target structural parameters in a metasurface phase coefficient optimization method provided in an embodiment of the present invention;
图4示出了本发明实施例所提供的一种具体的超表面相位系数优化方法的流程图;FIG4 shows a flow chart of a specific metasurface phase coefficient optimization method provided by an embodiment of the present invention;
图5示出了本发明实施例所提供的超表面相位系数优化方法中,基于本方法得到的仿真结果示意图;FIG5 is a schematic diagram showing a simulation result obtained based on the method for optimizing the phase coefficient of a metasurface provided by an embodiment of the present invention;
图6示出了本发明实施例所提供的一种具体的超表面相位系数优化方法中,不受约束的相位系数对应的超表面的所生成的光学调制传递函数图;FIG6 shows an optical modulation transfer function diagram generated by a metasurface corresponding to an unconstrained phase coefficient in a specific metasurface phase coefficient optimization method provided by an embodiment of the present invention;
图7示出了本发明实施例所提供的一种具体的超表面相位系数优 化方法中,受约束的相位系数对应的超表面的所生成的光学调制传递函数图;FIG. 7 shows a specific metasurface phase coefficient optimization method provided by an embodiment of the present invention. In the optimization method, the generated optical modulation transfer function diagram of the metasurface corresponding to the constrained phase coefficient;
图8示出了本发明实施例所提供的一种超表面相位系数优化装置的结构示意图;FIG8 shows a schematic structural diagram of a metasurface phase coefficient optimization device provided by an embodiment of the present invention;
图9示出了本发明实施例所提供的一种用于执行超表面相位系数优化方法的电子设备的结构示意图。FIG9 shows a schematic diagram of the structure of an electronic device for executing a metasurface phase coefficient optimization method provided by an embodiment of the present invention.
具体实施方式Detailed ways
下面结合本发明实施例中的附图对本发明实施例进行描述。The embodiments of the present invention are described below in conjunction with the accompanying drawings in the embodiments of the present invention.
图1示出了本发明实施例所提供的一种超表面相位系数优化方法的流程图。如图1所示,该方法包括以下步骤101-102。Fig. 1 shows a flow chart of a metasurface phase coefficient optimization method provided by an embodiment of the present invention. As shown in Fig. 1, the method includes the following steps 101-102.
步骤101:确定初始的结构参数,结构参数用于限定超表面的结构特征,且结构参数至少包括:各阶的相位系数。Step 101: Determine initial structural parameters, where the structural parameters are used to define the structural features of the metasurface, and the structural parameters at least include: phase coefficients of each order.
超表面是一层亚波长的人工纳米结构膜,可根据其上的纳米结构调控入射光的相位、幅度和偏振等特性。其中,超表面所具有的结构参数可以表征该超表面(如超表面上的纳米结构)所具有的结构特征,例如,该结构参数可以是用于表示超表面相位分布的各阶的相位系数,各阶的相位系数能够决定超表面上纳米结构的相位分布情况(如不同位置的纳米结构所对应的相位);进而,基于纳米结构的相位可以确定该纳米结构的结构特征,例如纳米结构的高度、周期等。A metasurface is a sub-wavelength artificial nanostructure film that can control the phase, amplitude, polarization and other characteristics of incident light according to the nanostructure on it. Among them, the structural parameters of the metasurface can characterize the structural characteristics of the metasurface (such as the nanostructure on the metasurface). For example, the structural parameters can be phase coefficients of various orders used to represent the phase distribution of the metasurface. The phase coefficients of various orders can determine the phase distribution of the nanostructure on the metasurface (such as the phase corresponding to the nanostructure at different positions); further, the structural characteristics of the nanostructure, such as the height and period of the nanostructure, can be determined based on the phase of the nanostructure.
如图2所示,图2示出了不受约束的相位系数对应的超表面的相位分布示意图,其横坐标表示纳米结构的径向距离(纳米结构到超表面中心的距离),纵坐标表示相位(单位:rad);根据图2可知,基于不受约束的相位系数所得到的超表面,其纳米结构对应的相位需要在极短距离内多次变化,即需要在超表面的极短距离内设置有多种不同相位的纳米结构,(例如,可以理解为不是按周期性排布纳米结构,而是需要一颗一颗地放置纳米结构;或者,超表面的相位变化(如从0到π的突变)会导致有些位置出现不规律地缺少纳米结构的情况,仍 然需要对每个周期内的纳米结构进行单独设计),以目前的工艺水准来看,这显然不能实现。因此,本发明实施例可以对各阶的相位系数等结构参数进行一系列约束,以实现令超表面上纳米结构的相位分布更符合工艺要求。As shown in FIG. 2 , FIG. 2 shows a schematic diagram of the phase distribution of the metasurface corresponding to the unconstrained phase coefficient, wherein the horizontal axis represents the radial distance of the nanostructure (the distance from the nanostructure to the center of the metasurface), and the vertical axis represents the phase (unit: rad); According to FIG. 2 , for the metasurface obtained based on the unconstrained phase coefficient, the phase corresponding to the nanostructure needs to change multiple times within an extremely short distance, that is, it is necessary to arrange a variety of nanostructures with different phases within an extremely short distance of the metasurface (for example, it can be understood that the nanostructures are not arranged periodically, but that the nanostructures need to be placed one by one; or, the phase change of the metasurface (such as a mutation from 0 to π) will cause irregular lack of nanostructures in some positions, which is still However, it is necessary to design the nanostructures in each period separately), which is obviously not achievable at the current technological level. Therefore, the embodiment of the present invention can impose a series of constraints on structural parameters such as the phase coefficient of each order to make the phase distribution of the nanostructure on the metasurface more in line with the technological requirements.
本发明实施例首先可以确定一组初始的结构参数,例如,可以通过光学设计软件(如Zemax)确定即将进行第一次优化的结构参数,该结构参数包括各阶的相位系数,且该结构参数对应某超表面所具有的结构特征。The embodiment of the present invention can first determine a set of initial structural parameters. For example, the structural parameters to be optimized for the first time can be determined by optical design software (such as Zemax). The structural parameters include phase coefficients of various orders, and the structural parameters correspond to the structural characteristics of a certain metasurface.
步骤102:将初始的结构参数作为当前结构参数的初始值,以优化当前结构参数对应的等效折射率差值的方式对当前结构参数进行优化,确定优化后的目标结构参数;等效折射率差值为与相应结构参数所对应的超表面中等效折射率的最大值与最小值之间的差值,且目标结构参数对应的等效折射率差值小于满足工艺要求的合理常数。Step 102: Taking the initial structural parameters as the initial values of the current structural parameters, optimizing the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, and determining the optimized target structural parameters; the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
本发明实施例中,将上述步骤101所确定的初始的结构参数作为当前结构参数的初始值,即第一次进行优化的当前结构参数,对该第一次进行优化的当前结构参数进行优化,本发明实施例所采用的优化方式可以是:确定该当前结构参数所对应的等效折射率差值,例如,该等效折射率差值可以表示为该当前结构参数所对应的超表面的等效折射率的最大值与最小值之间的差值,优化该等效折射率差值,使该等效折射率差值小于合理常数;在该等效折射率差值小于合理常数的情况下,确定该当前结构参数为优化后的目标结构参数;其中,该合理常数是满足工艺要求的常数,例如,其可以是0.2~2中的任意常数。In an embodiment of the present invention, the initial structural parameters determined in the above step 101 are used as the initial values of the current structural parameters, that is, the current structural parameters optimized for the first time, and the current structural parameters optimized for the first time are optimized. The optimization method adopted in the embodiment of the present invention may be: determining the equivalent refractive index difference corresponding to the current structural parameters, for example, the equivalent refractive index difference may be expressed as the difference between the maximum value and the minimum value of the equivalent refractive index of the metasurface corresponding to the current structural parameters, optimizing the equivalent refractive index difference so that the equivalent refractive index difference is less than a reasonable constant; when the equivalent refractive index difference is less than a reasonable constant, determining the current structural parameters as the optimized target structural parameters; wherein the reasonable constant is a constant that meets the process requirements, for example, it may be any constant between 0.2 and 2.
例如,可以针对当前结构参数计算该当前结构参数所对应的超表面的等效折射率的最大值Fmax以及最小值Fmin,得到该等效折射率差值Fx,若该等效折射率差值Fx小于合理常数C,则可以确定该当前结构参数为目标结构参数,即该目标结构参数所对应的超表面可以满足工艺要求,该目标结构参数所对应的超表面的相位分布示意图可以参见图3所示,由图3可知,该超表面上的纳米结构呈周期性变化,在极短半径距离内,纳米结构对应的相位变化不再频繁,满足工艺要求。 For example, the maximum value F max and the minimum value F min of the equivalent refractive index of the metasurface corresponding to the current structural parameter can be calculated for the current structural parameter to obtain the equivalent refractive index difference Fx. If the equivalent refractive index difference Fx is less than a reasonable constant C, the current structural parameter can be determined as the target structural parameter, that is, the metasurface corresponding to the target structural parameter can meet the process requirements. The phase distribution diagram of the metasurface corresponding to the target structural parameter can be shown in FIG3 . As can be seen from FIG3 , the nanostructure on the metasurface changes periodically. Within an extremely short radius distance, the phase change corresponding to the nanostructure is no longer frequent, which meets the process requirements.
本发明实施例通过优化当前结构参数的等效折射率差值,可以得到优化后满足工艺要求(小于合理常数)的目标结构参数,该目标结构参数能够使其对应的超表面上的纳米结构满足周期性排布;本发明实施例开创性地对光学系统中超表面的结构参数(如各阶的相位系数)进行优化,在设计之初即降低了光学系统的制造工艺难度,以实现批量化生产。The embodiment of the present invention can obtain the target structural parameters that meet the process requirements (less than a reasonable constant) after optimization by optimizing the equivalent refractive index difference of the current structural parameters. The target structural parameters can make the nanostructure on its corresponding metasurface satisfy the periodic arrangement. The embodiment of the present invention innovatively optimizes the structural parameters of the metasurface in the optical system (such as the phase coefficients of each order), thereby reducing the difficulty of the manufacturing process of the optical system at the beginning of the design to achieve mass production.
可选地,以优化当前结构参数对应的等效折射率差值的方式对当前结构参数进行优化,可以包括以下步骤A。Optionally, optimizing the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters may include the following step A.
步骤A:对当前结构参数循环执行参数优化操作,直至优化后的当前结构参数对应的等效折射率差值小于合理常数。Step A: cyclically perform parameter optimization operations on the current structural parameters until the equivalent refractive index difference corresponding to the optimized current structural parameters is less than a reasonable constant.
本发明实施例中,可以采用循环执行参数优化操作的方式,对当前结构参数进行优化,例如,在对当前结构参数执行参数优化操作后,若该当前结构参数对应的等效折射率差值不小于合理常数,可以循环执行该参数优化操作,直至得到等效折射率差值小于合理常数的当前结构参数,并将该当前结构参数作为目标结构参数。In an embodiment of the present invention, the current structural parameters can be optimized by cyclically executing parameter optimization operations. For example, after performing parameter optimization operations on the current structural parameters, if the equivalent refractive index difference corresponding to the current structural parameters is not less than a reasonable constant, the parameter optimization operation can be cyclically executed until a current structural parameter having an equivalent refractive index difference less than a reasonable constant is obtained, and the current structural parameter is used as the target structural parameter.
其中,该参数优化操作,包括以下步骤A1-A3。The parameter optimization operation includes the following steps A1-A3.
步骤A1:确定当前结构参数对应的等效折射率差值。Step A1: Determine the equivalent refractive index difference corresponding to the current structural parameters.
计算当前结构参数对应的超表面的等效折射率的最大值与最小值,该等效折射率最小值至最大值的区间为等效折射率范围,可以用最大值减去最小值之间的差值Fx具象地表示该等效折射率差值。The maximum and minimum values of the equivalent refractive index of the metasurface corresponding to the current structural parameters are calculated. The interval from the minimum value to the maximum value of the equivalent refractive index is the equivalent refractive index range, and the difference Fx between the maximum value and the minimum value can be used to concretely represent the equivalent refractive index difference.
步骤A2:判断当前结构参数对应的等效折射率差值是否小于合理常数。Step A2: Determine whether the equivalent refractive index difference corresponding to the current structural parameters is less than a reasonable constant.
令该当前结构参数对应的等效折射率差值与满足工艺要求的合理常数相比较,判断该等效折射率差值(如差值Fx)是否小于该合理常数。The equivalent refractive index difference corresponding to the current structural parameter is compared with a reasonable constant that meets the process requirements to determine whether the equivalent refractive index difference (such as the difference Fx) is smaller than the reasonable constant.
步骤A3:在当前结构参数满足要求的情况下,将当前结构参数作为目标结构参数;在当前结构参数不满足要求的情况下,更新当前结构参数;其中,当前结构参数满足要求包括当前结构参数对应的等效折射率差值小于合理常数。 Step A3: When the current structural parameters meet the requirements, the current structural parameters are used as target structural parameters; when the current structural parameters do not meet the requirements, the current structural parameters are updated; wherein the current structural parameters meet the requirements including that the equivalent refractive index difference corresponding to the current structural parameters is less than a reasonable constant.
本发明实施例中,当前结构参数对应的等效折射率差值小于合理常数是当前结构参数满足要求的必要条件,即只有在当前结构参数对应的等效折射率差值小于合理常数的情况下,才能进一步确定该当前结构参数满足要求。其中,若当前结构参数满足要求,可以确定该当前结构参数对应的等效折射率差值一定小于合理常数,该当前结构参数为满足工艺要求的目标结构参数;若当前结构参数不满足要求,对该不满足要求的当前结构参数进行更新,该更新的方式可以采用梯度下降法等,本实施例对此不做限定。其中,判断当前结构参数不满足要求的方式可以有多种,例如,在该当前结构参数对应的等效折射率差值不小于合理常数的情况下,即该等效折射率差值Fx大于或等于合理常数C,确定该当前结构参数为不满足工艺要求的结构参数,该当前结构参数不满足要求;或者,也可以通过其他判断方式确定该当前结构参数不满足要求,本发明实施例对于当前结构参数不满足要求的判断方式不做限制。In the embodiment of the present invention, the equivalent refractive index difference corresponding to the current structural parameter is less than a reasonable constant, which is a necessary condition for the current structural parameter to meet the requirements, that is, only when the equivalent refractive index difference corresponding to the current structural parameter is less than a reasonable constant, can the current structural parameter be further determined to meet the requirements. Wherein, if the current structural parameter meets the requirements, it can be determined that the equivalent refractive index difference corresponding to the current structural parameter must be less than a reasonable constant, and the current structural parameter is a target structural parameter that meets the process requirements; if the current structural parameter does not meet the requirements, the current structural parameter that does not meet the requirements is updated, and the updating method can adopt a gradient descent method, etc., which is not limited in this embodiment. Wherein, there can be multiple ways to judge that the current structural parameter does not meet the requirements, for example, when the equivalent refractive index difference corresponding to the current structural parameter is not less than a reasonable constant, that is, the equivalent refractive index difference Fx is greater than or equal to a reasonable constant C, it is determined that the current structural parameter is a structural parameter that does not meet the process requirements, and the current structural parameter does not meet the requirements; or, it can also be determined that the current structural parameter does not meet the requirements by other judgment methods, and the embodiment of the present invention does not limit the judgment method that the current structural parameter does not meet the requirements.
例如,在计算得到该当前结构参数对应的等效折射率差值Fx的情况下,判断该等效折射率差值Fx是否小于合理常数C,若Fx<C,则可认为该当前结构参数满足要求,可以确定该当前结构参数满足工艺要求,其为目标结构参数;若Fx≥C,可以确定该当前结构参数不满足工艺要求,该当前结构参数不满足要求,并对不满足要求的当前结构参数进行更新。For example, when the equivalent refractive index difference Fx corresponding to the current structural parameter is calculated, it is determined whether the equivalent refractive index difference Fx is less than a reasonable constant C. If Fx <C, it can be considered that the current structural parameter meets the requirements, and it can be determined that the current structural parameter meets the process requirements, and it is the target structural parameter; if Fx≥C , it can be determined that the current structural parameter does not meet the process requirements, and the current structural parameter does not meet the requirements, and the current structural parameter that does not meet the requirements is updated.
本发明实施例采用循环执行参数优化操作的方式,对当前结构参数的等效折射率进行迭代优化,可以在该当前结构参数不满足要求的情况下更新当前结构参数,循环迭代,直至得到满足要求的当前结构参数,确定符合工艺要求的目标结构参数。The embodiment of the present invention adopts a method of cyclically executing parameter optimization operations to iteratively optimize the equivalent refractive index of the current structural parameters. When the current structural parameters do not meet the requirements, the current structural parameters can be updated and iterated cyclically until the current structural parameters that meet the requirements are obtained, thereby determining the target structural parameters that meet the process requirements.
可选地,参数优化操作除了上述所包括的步骤A1-A3以外,还可以包括以下步骤A4-A5。Optionally, the parameter optimization operation may include the following steps A4-A5 in addition to the steps A1-A3 mentioned above.
步骤A4:确定当前结构参数所对应的超表面的当前性能参数,并确定当前像质评估因子;当前像质评估因子包括当前性能参数与期望性能参数之间的差异以及当前结构参数对应的等效折射率差值与合理 常数之间的差异。Step A4: Determine the current performance parameters of the metasurface corresponding to the current structural parameters, and determine the current image quality evaluation factor; the current image quality evaluation factor includes the difference between the current performance parameters and the expected performance parameters and the difference between the equivalent refractive index corresponding to the current structural parameters and the reasonable The difference between the constants.
本发明实施例中,当前结构参数对应相应的超表面,该超表面、或者具有该超表面的光学系统通常会具有多种性能参数,这些性能参数用于表征该超表面或该光学系统所能够带来的一些成像效果(如该光学系统对应的成像需求),可选地,性能参数包括:有效焦距、F数、像高、弥散斑大小、视场角、相对孔径和系统总长中的至少一种。本发明实施例可以根据实际需求选取上述性能参数的一种或多种,确定在所要构建的超表面或光学系统中,符合系统需求的期望性能参数,即所选取的性能参数所期望达到的目标值;并确定该当前结构参数所对应的超表面所对应的上述性能参数的实际值,即当前性能参数。基于该当前性能参数与期望性能参数,以及当前结构参数对应的等效折射率与合理常数可以确定该超表面对应的像质评估因子,即当前像质评估因子,用该当前像质评估因子作为判断当前结构参数是否满足要求的另一种条件(除等效折射率差值是否小于合理常数以外的另一种条件)。In an embodiment of the present invention, the current structural parameters correspond to the corresponding metasurface, and the metasurface or the optical system having the metasurface usually has a variety of performance parameters, which are used to characterize some imaging effects that the metasurface or the optical system can bring (such as the imaging requirements corresponding to the optical system). Optionally, the performance parameters include: effective focal length, F number, image height, diffuse spot size, field angle, relative aperture and at least one of the total length of the system. In an embodiment of the present invention, one or more of the above performance parameters can be selected according to actual needs to determine the expected performance parameters that meet the system requirements in the metasurface or optical system to be constructed, that is, the target value expected to be achieved by the selected performance parameters; and determine the actual value of the above performance parameters corresponding to the metasurface corresponding to the current structural parameters, that is, the current performance parameters. Based on the current performance parameters and the expected performance parameters, as well as the equivalent refractive index and reasonable constant corresponding to the current structural parameters, the image quality evaluation factor corresponding to the metasurface can be determined, that is, the current image quality evaluation factor, and the current image quality evaluation factor is used as another condition for judging whether the current structural parameters meet the requirements (another condition other than whether the equivalent refractive index difference is less than a reasonable constant).
具体地,该当前像质评估因子表示当前性能参数与期望性能参数之间所存在的差异,以及当前结构参数的等效折射率差值与合理常数之间的差异;例如,可以令当前性能参数与期望性能参数之间的差值的绝对值作为二者之间的差异,可以令当前结构参数的等效折射率差值与合理常数之间的差值的绝对值作为二者之间的差异。Specifically, the current image quality evaluation factor represents the difference between the current performance parameter and the expected performance parameter, and the difference between the equivalent refractive index difference of the current structural parameter and a reasonable constant; for example, the absolute value of the difference between the current performance parameter and the expected performance parameter can be used as the difference between the two, and the absolute value of the difference between the equivalent refractive index difference of the current structural parameter and a reasonable constant can be used as the difference between the two.
步骤A5:判断当前像质评估因子是否大于第一限制值;其中,当前结构参数满足要求还包括:当前像质评估因子小于或等于第一限制值;当前结构参数不满足要求包括:当前结构参数对应的等效折射率差值不小于合理常数,和/或,当前像质评估因子大于第一限制值。Step A5: Determine whether the current image quality evaluation factor is greater than the first limit value; wherein, the current structural parameters meet the requirements and also include: the current image quality evaluation factor is less than or equal to the first limit value; the current structural parameters do not meet the requirements and include: the equivalent refractive index difference corresponding to the current structural parameters is not less than a reasonable constant, and/or the current image quality evaluation factor is greater than the first limit value.
其中,第一限制值表示具有该超表面的光学系统在最低成像需求下对应的像质评估因子,本发明实施例可以通过判断当前像质评估因子是否大于该第一限制值,进一步确定该当前结构参数是否满足要求。在该当前像质评估因子小于或等于该第一限制值、且该当前结构参数的等效折射率差值小于合理常数的情况下,确定该当前结构参数满足 要求;在该当前像质评估因子大于该第一限制值、和/或当前结构参数对应的等效折射率差值不小于合理常数的情况下,确定该当前结构参数不满足要求;例如,若该当前像质评估因子大于该第一限制值,则无论当前结构参数对应的等效折射率差值是否小于合理常数,都可以确定该当前结构参数不满足要求。本发明实施例通过引入当前像质评估因子,对该当前结构参数是否满足要求限定了额外的条件,令等效折射率差值小于合理常数且当前像质评估因子小于或等于第一限制值的超表面所对应的当前结构参数作为满足要求的结构参数,使得本发明实施例所设计的超表面不仅满足工艺要求,还满足所需的成像效果(如成像需求)。The first limit value represents the image quality evaluation factor corresponding to the optical system with the metasurface under the minimum imaging requirement. The embodiment of the present invention can further determine whether the current structural parameters meet the requirements by judging whether the current image quality evaluation factor is greater than the first limit value. When the current image quality evaluation factor is less than or equal to the first limit value and the equivalent refractive index difference of the current structural parameters is less than a reasonable constant, it is determined that the current structural parameters meet the requirements. Requirements; when the current image quality evaluation factor is greater than the first limit value, and/or the equivalent refractive index difference corresponding to the current structural parameter is not less than a reasonable constant, it is determined that the current structural parameter does not meet the requirements; for example, if the current image quality evaluation factor is greater than the first limit value, then regardless of whether the equivalent refractive index difference corresponding to the current structural parameter is less than a reasonable constant, it can be determined that the current structural parameter does not meet the requirements. The embodiment of the present invention introduces the current image quality evaluation factor to limit additional conditions on whether the current structural parameter meets the requirements, and makes the current structural parameter corresponding to the metasurface with an equivalent refractive index difference less than a reasonable constant and a current image quality evaluation factor less than or equal to the first limit value as the structural parameter that meets the requirements, so that the metasurface designed by the embodiment of the present invention not only meets the process requirements, but also meets the required imaging effect (such as imaging requirements).
可选地,确定当前像质评估因子可以包括以下步骤A41。Optionally, determining the current image quality assessment factor may include the following steps A41.
步骤A41:基于当前像质评估函数确定当前像质评估因子,当前像质评估函数包括对第一项和第二项进行加权处理,第一项用于表示当前性能参数与期望性能参数之间的差异,第二项用于表示当前结构参数对应的等效折射率差值与合理常数之间的差异。Step A41: Determine the current image quality evaluation factor based on the current image quality evaluation function, the current image quality evaluation function includes weighted processing of the first item and the second item, the first item is used to represent the difference between the current performance parameter and the expected performance parameter, and the second item is used to represent the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant.
其中,当前像质评估函数是用于确定当前像质评估因子的数学关系式,该当前像质评估函数包括:对当前性能参数与期望性能参数之间的差异、以及当前结构参数对应的等效折射率差值与合理常数之间的差异进行加权处理。其中,该当前性能参数与期望性能参数之间的差异可以作为该当前像质评估函数的第一项,而该当前结构参数对应的等效折射率差值与合理常数之间的差异可以作为该当前像质评估函数的第二项。本发明实施例利用该当前像质评估函数,可以方便计算当前像质评估因子。Among them, the current image quality evaluation function is a mathematical relationship for determining the current image quality evaluation factor, and the current image quality evaluation function includes: weighting the difference between the current performance parameter and the expected performance parameter, and the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant. Among them, the difference between the current performance parameter and the expected performance parameter can be used as the first item of the current image quality evaluation function, and the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant can be used as the second item of the current image quality evaluation function. The embodiment of the present invention utilizes the current image quality evaluation function to conveniently calculate the current image quality evaluation factor.
可选地,当前像质评估函数满足:
Optionally, the current image quality evaluation function satisfies:
其中,M表示当前像质评估因子;Vi表示第i种当前性能参数;Ti表示第i种期望性能参数;wi表示第i种当前性能参数与期望性能参数之间的差异对应的权重;Fx表示当前结构参数对应的等效折射率差 值;C表示合理常数;p表示当前结构参数对应的等效折射率差值与合理常数之间的差异对应的权重。Where M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter value; C represents a reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameters and the reasonable constant.
具体地,该当前像质评估函数可以表示为上述数学关系式,其中,第一项用于表示多种当前性能参数与期望性能参数之间的差异之和对该当前像质评估因子的影响比重,例如,该第一项对于当前像质评估因子的影响最大,可以令当前结构参数对应的超表面的性能能够更符合所期望的理想情况;例如,可以选取有效焦距、F数、像高和弥散斑大小这四个性能参数,此时,i=1,2,3,4;所要设计的光学系统的有效焦距、F数、像高和弥散斑大小对应上述第一项中的Ti,即期望性能参数;而当前结构参数对应的超表面所构成的光学系统所具有的上述性能参数,对应上述第一项中的Vi,即当前性能参数;基于该第一项的权重wi,可以确定该第一项对该当前像质评估因子的影响比重。相应地,第二项用于表示当前结构参数对应的等效折射率差值与合理常数之间的差异对该当前像质评估因子的影响比重,例如,该第二项对于当前像质评估因子的影响小于第一项对于当前像质评估因子的影响,该第二项可以令当前结构参数对应的等效折射率差值Fx能够更趋近于合理常数C;基于该第二项的权重p,可以确定该第二项对该当前像质评估因子的影响比重;在得到第一项与第二项之后,可以确定当前像质评估因子M。Specifically, the current image quality evaluation function can be expressed as the above mathematical relationship, where the first term It is used to represent the weight of the sum of the differences between multiple current performance parameters and the expected performance parameters on the current image quality evaluation factor. For example, the first item has the greatest impact on the current image quality evaluation factor, which can make the performance of the metasurface corresponding to the current structural parameters more in line with the desired ideal situation. For example, the four performance parameters of effective focal length, F number, image height and diffuse spot size can be selected. At this time, i=1, 2, 3, 4. The effective focal length, F number, image height and diffuse spot size of the optical system to be designed correspond to Ti in the first item, that is, the expected performance parameters. The above performance parameters of the optical system formed by the metasurface corresponding to the current structural parameters correspond to Vi in the first item, that is, the current performance parameters. Based on the weight w i of the first item, the weight of the first item on the current image quality evaluation factor can be determined. Correspondingly, the second item Used to represent the influence ratio of the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant on the current image quality assessment factor. For example, the influence of the second item on the current image quality assessment factor is less than that of the first item. The second item can make the equivalent refractive index difference Fx corresponding to the current structural parameter closer to the reasonable constant C. Based on the weight p of the second item, the influence ratio of the second item on the current image quality assessment factor can be determined. After obtaining the first item and the second item, the current image quality assessment factor M can be determined.
本发明实施例基于当前像质评估函数计算当前像质评估因子,通过对第一项与第二项分配不同的权重,能够使当前结构参数接下来所需进行的更新逐渐趋近于更优的方向。The embodiment of the present invention calculates the current image quality evaluation factor based on the current image quality evaluation function, and by assigning different weights to the first item and the second item, the subsequent update of the current structural parameters can gradually approach a more optimal direction.
可选地,当前像质评估函数还包括第三项,该第三项用于表示能够被调整的返回值;其中,该第三项为更新当前结构参数时可以增加的一项,其与当前像质评估函数的第一项和第二项相同,都是经过一 定加权处理所得到的数学式,也就是说,该当前像质评估函数包括对第一项、第二项以及第三项进行加权处理。Optionally, the current image quality evaluation function further includes a third item, which is used to represent a return value that can be adjusted; wherein the third item is an item that can be added when the current structural parameters are updated, and is the same as the first item and the second item of the current image quality evaluation function, and both are adjusted by a The mathematical formula obtained by the given weighted processing, that is, the current image quality evaluation function includes weighted processing of the first term, the second term and the third term.
本发明实施例中,参数优化操作还可以包括以下步骤A6。In the embodiment of the present invention, the parameter optimization operation may further include the following step A6.
步骤A6:在确定当前像质评估因子之后,以更新返回值的方式更新当前像质评估函数。Step A6: After determining the current image quality evaluation factor, update the current image quality evaluation function by updating the return value.
其中,更新返回值,包括步骤A61:Wherein, updating the return value includes step A61:
步骤A61:在等效折射率差值大于合理常数的情况下,将返回值更新为第一数值;在等效折射率差值等于合理常数的情况下,将返回值更新为第二数值;第一数值大于第二数值。Step A61: When the equivalent refractive index difference is greater than a reasonable constant, the return value is updated to a first value; when the equivalent refractive index difference is equal to a reasonable constant, the return value is updated to a second value; the first value is greater than the second value.
本发明实施例中,该第三项用于对当前像质评估函数中的第二项进行进一步地约束,例如,令当前结构参数对应的等效折射率差值不仅仅趋近于合理常数,而是更趋近于小于合理常数。在需要更新当前结构参数时,可以对返回值做一次调整,以实现改变该第三项,更新当前像质评估函数。具体地,在本发明实施例中,不同情况下所对应的返回值不同,根据所对应的返回值,可以使当前像质评估函数的第三项得到更新。例如,在当前结构参数对应的等效折射率差值Fx大于合理常数C的情况下,该第三项中的返回值被更新为第一数值,该第一数值是大于0的数值;在当前结构参数对应的等效折射率差值Fx等于合理常数C的情况下,该第三项中的返回值被更新为第二数值,且该第二数值是大于0且小于第一数值的数值,也就是说,在Fx>C的情况下,所更新的返回值为一大于0且较大的数值(第一数值),使得该当前像质评估因子较大,表示该当前结构参数不太满足要求,需要在下一轮更新该当前结构参数,使其更趋近于Fx<C的情况;而在Fx=C的情况下,所更新的返回值为一大于0且较小的数值(第二数值),使得该当前像质评估因子相比于Fx>C时要小,表示该当前结构参数虽然也不太满足要求,但该当前结构参数相比于使Fx>C的结构参数而言,其更趋近于Fx<C的情况,使得在下一轮更新该当前结构参数时,可以在令Fx=C的当前结构参数的基础上进一步优化更新,使其进一步趋近于Fx<C的情况。 In the embodiment of the present invention, the third term is used to further constrain the second term in the current image quality evaluation function, for example, to make the equivalent refractive index difference corresponding to the current structural parameters not only approach a reasonable constant, but also approach to be less than a reasonable constant. When the current structural parameters need to be updated, the return value can be adjusted once to change the third term and update the current image quality evaluation function. Specifically, in the embodiment of the present invention, the corresponding return values are different in different situations, and the third term of the current image quality evaluation function can be updated according to the corresponding return values. For example, when the equivalent refractive index difference Fx corresponding to the current structural parameter is greater than a reasonable constant C, the return value in the third item is updated to a first value, which is a value greater than 0; when the equivalent refractive index difference Fx corresponding to the current structural parameter is equal to a reasonable constant C, the return value in the third item is updated to a second value, which is a value greater than 0 and less than the first value, that is, when Fx >C, the updated return value is a value greater than 0 and larger (the first value), so that the current image quality evaluation factor is larger, indicating that the current structural parameter does not meet the requirements, and the current structural parameter needs to be updated in the next round to make it closer to the situation of Fx <C; and when Fx =C, the updated return value is a value greater than 0 and smaller (the second value), so that the current image quality evaluation factor is smaller than that when Fx >C, indicating that although the current structural parameter does not meet the requirements, the current structural parameter is closer to the situation of Fx <C than the structural parameter that makes Fx>C, so that when the current structural parameter is updated in the next round, it can be updated when Fx C. =C, and further optimize and update it based on the current structural parameters to make it closer to the situation of F x <C.
可选地,以更新返回值的方式更新当前像质评估函数,包括:在当前像质评估因子小于或等于第一限制值的情况下,以更新返回值的方式更新当前像质评估函数。Optionally, updating the current image quality evaluation function in a manner of updating the return value includes: when the current image quality evaluation factor is less than or equal to the first limit value, updating the current image quality evaluation function in a manner of updating the return value.
本发明实施例中,在确定当前像质评估因子之后,可以只有在当前像质评估因子小于或等于第一限制值的情况下,才执行上述步骤中步骤A6“以更新返回值的方式更新当前像质评估函数”;即,若当前像质评估因子大于第一限制值,此时可以不更新返回值,即不更新当前像质评估函数,直接执行下一轮的“参数优化操作”。例如,若当前像质评估因子小于或等于第一限制值,再判断等效折射率差值Fx与合理常数C之间的大小关系,基于上述步骤A61更新返回值;相反地,若当前像质评估因子大于第一限制值,则可以不判断等效折射率差值Fx与合理常数C之间的大小关系,直接进行下一轮的参数优化操作。In the embodiment of the present invention, after determining the current image quality evaluation factor, the above step A6 "updating the current image quality evaluation function by updating the return value" can be performed only when the current image quality evaluation factor is less than or equal to the first limit value; that is, if the current image quality evaluation factor is greater than the first limit value, the return value may not be updated at this time, that is, the current image quality evaluation function is not updated, and the next round of "parameter optimization operation" is directly performed. For example, if the current image quality evaluation factor is less than or equal to the first limit value, the size relationship between the equivalent refractive index difference Fx and the reasonable constant C is determined, and the return value is updated based on the above step A61; on the contrary, if the current image quality evaluation factor is greater than the first limit value, the size relationship between the equivalent refractive index difference Fx and the reasonable constant C may not be determined, and the next round of parameter optimization operation is directly performed.
可选地,当前结构参数对应的等效折射率差值与合理常数之间的差异对应的权重小于返回值对应的权重。Optionally, the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant is smaller than the weight corresponding to the returned value.
本发明实施例中,当前像质评估函数对应的第三项(具有返回值的一项)的权重大于该当前像质评估函数对应的第二项(当前结构参数对应的等效折射率差值与合理常数之间的差异所对应的一项)的权重,这样做的目的是为了降低第二项(当前结构参数对应的等效折射率差值Fx更加趋近于合理常数C)在该当前像质评估函数中所占的比重,使得等效折射率差值Fx更加趋近于小于合理常数C。In the embodiment of the present invention, the weight of the third item (the item with a return value) corresponding to the current image quality evaluation function is greater than the weight of the second item (the item corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameters and a reasonable constant) corresponding to the current image quality evaluation function. The purpose of this is to reduce the proportion of the second item (the equivalent refractive index difference Fx corresponding to the current structural parameters is closer to a reasonable constant C) in the current image quality evaluation function, so that the equivalent refractive index difference Fx is closer to being less than a reasonable constant C.
可选地,当前像质评估函数满足:
Optionally, the current image quality evaluation function satisfies:
其中,M表示当前像质评估因子;Vi表示第i种当前性能参数;Ti表示第i种期望性能参数;wi表示第i种当前性能参数与期望性能参数之间的差异对应的权重;Fx表示当前结构参数对应的等效折射率差值;C表示合理常数;p表示当前结构参数对应的等效折射率差值与合理常数之间的差异对应的权重;K表示返回值;q表示返回值对应的权重。 Among them, M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter; C represents a reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and a reasonable constant; K represents the return value; q represents the weight corresponding to the return value.
具体地,该当前像质评估函数可以表示为上述具有三项的数学关系式,其中,第一项和第二项与上述当前像质评估函数包括两项时所表示的含义一致,此处不再赘述。第三项用于表示在当前结构参数对应的等效折射率差值不小于合理常数时的返回值对该当前像质评估因子的影响比重,该第三项对于当前像质评估因子的影响大于第二项对于当前像质评估因子的影响,该第三项可以令当前结构参数对应的等效折射率差值Fx能够更趋近于小于合理常数C;基于该第三项的返回值K的大小以及权重q,可以确定该第三项对该当前像质评估因子的影响比重;进而在确定第一项、第二项与第三项之后,得到当前像质评估因子M。Specifically, the current image quality evaluation function can be expressed as the above mathematical relationship with three terms, where the first term is and the second The meaning is consistent with that when the current image quality evaluation function includes two items, and will not be repeated here. It is used to represent the influence ratio of the return value on the current image quality evaluation factor when the equivalent refractive index difference corresponding to the current structural parameter is not less than a reasonable constant. The influence of the third item on the current image quality evaluation factor is greater than that of the second item. The third item can make the equivalent refractive index difference Fx corresponding to the current structural parameter closer to less than a reasonable constant C. Based on the size of the return value K of the third item and the weight q, the influence ratio of the third item on the current image quality evaluation factor can be determined. After determining the first item, the second item and the third item, the current image quality evaluation factor M is obtained.
本发明实施例基于包含三项的当前像质评估函数计算当前像质评估因子,通过对第一项、第二项与第三项分配不同的权重,能够使当前结构参数在更新过程(即,上述的参数优化操作)中逐渐趋近于更优的方向。The embodiment of the present invention calculates the current image quality evaluation factor based on the current image quality evaluation function including three items. By assigning different weights to the first item, the second item and the third item, the current structural parameters can gradually approach a better direction during the updating process (i.e., the above-mentioned parameter optimization operation).
可选地,确定当前结构参数对应的等效折射率差值,包括以下步骤A11-A12。Optionally, determining the equivalent refractive index difference corresponding to the current structural parameters includes the following steps A11-A12.
步骤A11:确定当前结构参数所对应的超表面在多个位置处的相位,并根据相位确定相应位置处的等效折射率,等效折射率与相位之间为正相关关系。Step A11: Determine the phase of the metasurface corresponding to the current structural parameters at multiple positions, and determine the equivalent refractive index at the corresponding position according to the phase, and there is a positive correlation between the equivalent refractive index and the phase.
本发明实施例中,等效折射率与相位之间呈正相关关系,即等效折射率等效折射率越大,对应的相位也越大,故可以通过计算相位确定等效折射率。具体地,可以从该当前结构参数对应的超表面上选取多个位置,计算所选取的每个位置对应的相位,并根据相位与等效折射率之间的正相关关系,计算每个位置处的等效折射率。In the embodiment of the present invention, there is a positive correlation between the equivalent refractive index and the phase, that is, the larger the equivalent refractive index is, the larger the corresponding phase is, so the equivalent refractive index can be determined by calculating the phase. Specifically, multiple positions can be selected from the metasurface corresponding to the current structural parameters, the phase corresponding to each selected position can be calculated, and the equivalent refractive index at each position can be calculated based on the positive correlation between the phase and the equivalent refractive index.
步骤A12:确定多个等效折射率中的最大值和最小值,将最大值与最小值之间的差值作为当前结构参数对应的等效折射率差值。 Step A12: Determine the maximum value and the minimum value among the multiple equivalent refractive indices, and use the difference between the maximum value and the minimum value as the equivalent refractive index difference corresponding to the current structural parameters.
根据从该当前结构参数对应的超表面上所选取的多个位置处分别计算得到的多个等效折射率,可以从多个等效折射率中选出最大值和最小值,令二者之间的差值作为当前结构参数对应的等效折射率差值。According to the multiple equivalent refractive indices respectively calculated from the multiple positions selected on the metasurface corresponding to the current structural parameters, the maximum and minimum values can be selected from the multiple equivalent refractive indices, and the difference between the two is used as the equivalent refractive index difference corresponding to the current structural parameters.
可选地,确定当前结构参数对应的等效折射率差值,还包括:确定当前结构参数所对应的超表面的最大半径,以a作为步长、从零至最大半径中选取多个半径值,不同的半径值表示不同位置。Optionally, determining the equivalent refractive index difference corresponding to the current structural parameters also includes: determining the maximum radius of the supersurface corresponding to the current structural parameters, taking a as the step size and selecting multiple radius values from zero to the maximum radius, different radius values representing different positions.
本发明实施例中,在确定当前结构参数所对应的超表面在多个位置处的相位之前,先根据该当前结构参数对应的超表面的最大半径,以步长a将该最大半径从零起划分为多个半径值,得到多个半径值对应的多个位置处。例如,当前结构参数对应的超表面的最大半径为rmax,从0至rmax起,以步长a将该最大半径rmax划分为多个半径值,每个半径值对应一个位置。In the embodiment of the present invention, before determining the phase of the hypersurface corresponding to the current structural parameter at multiple positions, first, according to the maximum radius of the hypersurface corresponding to the current structural parameter, the maximum radius is divided into multiple radius values from zero with a step length a to obtain multiple positions corresponding to the multiple radius values. For example, the maximum radius of the hypersurface corresponding to the current structural parameter is r max , and from 0 to r max , the maximum radius r max is divided into multiple radius values with a step length a, and each radius value corresponds to a position.
可选地,等效折射率与相位之间的关系满足:
Optionally, the relationship between the equivalent refractive index and the phase satisfies:
其中,F表示等效折射率;表示r位置处的相位;k表示波数,且λ表示波长;Hd表示r位置处的纳米结构的高度。Wherein, F represents the equivalent refractive index; represents the phase at position r; k represents the wave number, and λ represents the wavelength; Hd represents the height of the nanostructure at position r.
本发明实施例中,r表示半径值,例如根据当前结构参数对应的超表面的最大半径所划分出的任意半径值,该半径值r对应的位置可以直接用r表示。其中,r位置处的等效折射率F与r位置处的相位之间的正相关关系可以直接用上述公式表示,波数k为已知量;并且,纳米结构的高度Hd也是可以确定的物理量。因此,基于r位置处的相位以及已知量波数k和纳米结构的高度Hd,可以计算得到该当前结构参数对应的超表面中,半径值r位置处的等效折射率。可选地,需要优化的结构参数还可以包括:最大半径和纳米结构的高度;也就是说,结构参数除各阶的相位系数以外,还可以包括最大半 径和纳米结构的高度,确定当前结构参数时,还可以同时确定对应的超表面的最大半径和纳米结构的高度。In the embodiment of the present invention, r represents a radius value, for example, any radius value divided according to the maximum radius of the metasurface corresponding to the current structural parameters, and the position corresponding to the radius value r can be directly represented by r. Among them, the equivalent refractive index F at the position r and the phase at the position r are The positive correlation between Indicates that the wave number k is a known quantity; and the height Hd of the nanostructure is also a physical quantity that can be determined. Therefore, based on the phase at position r and the known wave number k and the height Hd of the nanostructure, the equivalent refractive index at the radius r position in the metasurface corresponding to the current structural parameters can be calculated. Optionally, the structural parameters that need to be optimized may also include: the maximum radius and the height of the nanostructure; that is, in addition to the phase coefficients of each order, the structural parameters may also include the maximum half When determining the current structural parameters, the maximum radius of the corresponding supersurface and the height of the nanostructure can also be determined at the same time.
可选地,确定初始的结构参数,包括以下步骤B1-B3。Optionally, determining initial structural parameters includes the following steps B1-B3.
步骤B1:确定原始结构参数。Step B1: Determine the original structural parameters.
其中,可以随机生成一组结构参数,作为原始结构参数,例如,通过光学设计软件(如Zemax)随机生成一组结构参数作为原始结构参数。A set of structural parameters may be randomly generated as original structural parameters, for example, a set of structural parameters may be randomly generated as original structural parameters by using optical design software (such as Zemax).
步骤B2:确定原始结构参数所对应的超表面的原始性能参数,并确定原始像质评估因子;原始像质评估因子包括原始性能参数与期望性能参数之间的差异。Step B2: Determine the original performance parameters of the metasurface corresponding to the original structural parameters, and determine the original image quality evaluation factor; the original image quality evaluation factor includes the difference between the original performance parameters and the expected performance parameters.
其中,对原始结构参数所对应的超表面确定其性能参数,该性能参数可以包括多种,例如可以是F数、有效焦距和弥散斑大小等;令确定得到的性能参数为原始性能参数,通过确定该原始性能参数与期望性能参数(该性能参数对应的目标值或期待值)之间的差异,可以得到原始像质评估因子。例如,可以分别确定每一种原始性能参数与相对应的期待性能参数之间的差异,以全部原始性能参数与相对应的期待性能参数之间的差异的和作为该原始像质评估因子。Among them, the performance parameters of the metasurface corresponding to the original structural parameters are determined, and the performance parameters may include multiple types, such as F number, effective focal length and diffuse spot size, etc.; the determined performance parameters are set as the original performance parameters, and the original image quality evaluation factor can be obtained by determining the difference between the original performance parameters and the expected performance parameters (the target value or expected value corresponding to the performance parameters). For example, the difference between each original performance parameter and the corresponding expected performance parameter can be determined respectively, and the sum of the differences between all the original performance parameters and the corresponding expected performance parameters is used as the original image quality evaluation factor.
步骤B3:在原始像质评估因子小于或等于第二限制值的情况下,将原始结构参数作为初始的结构参数。Step B3: When the original image quality evaluation factor is less than or equal to the second limit value, the original structural parameters are used as initial structural parameters.
其中,第二限制值可以表示具有该原始结构参数所对应的超表面的光学系统,在最低成像需求下对应的像质评估因子,例如,第二限制值可以与上述的第一限制值相同。若原始像质评估因子小于或等于第二限制值,可以将与该原始像质评估因子对应的超表面所对应的原始结构参数作为初始的结构参数。The second limit value may represent the image quality evaluation factor corresponding to the optical system having the metasurface corresponding to the original structural parameter under the minimum imaging requirement. For example, the second limit value may be the same as the first limit value mentioned above. If the original image quality evaluation factor is less than or equal to the second limit value, the original structural parameter corresponding to the metasurface corresponding to the original image quality evaluation factor may be used as the initial structural parameter.
本发明实施例在确定初始的结构参数之前,可以对原始结构参数所对应的超表面具有的原始性能参数进行确定,并基于原始性能参数确定原始像质评估因子;通过判断该原始像质评估因子是否小于或等于最低成像需求下对应的像质评估因子(如第二限制值),可以得到符 合最低成像需求的原始结构参数,令该符合最低成像需求的原始结构参数作为初始的结构参数。该方法可以使所确定的初始的结构参数不会出现高于第二限制值的情况,即所确定的初始的结构参数是符合最低成像需求的。In the embodiment of the present invention, before determining the initial structural parameters, the original performance parameters of the metasurface corresponding to the original structural parameters can be determined, and the original image quality evaluation factor can be determined based on the original performance parameters; by judging whether the original image quality evaluation factor is less than or equal to the image quality evaluation factor corresponding to the minimum imaging requirement (such as the second limit value), the image quality evaluation factor that meets the minimum imaging requirement can be obtained. The original structural parameters that meet the minimum imaging requirements are used as the initial structural parameters. This method can ensure that the determined initial structural parameters will not exceed the second limit value, that is, the determined initial structural parameters meet the minimum imaging requirements.
可选地,原始像质评估因子满足:
Optionally, the original image quality evaluation factor satisfies:
其中,N表示原始像质评估因子;Vm表示第m种原始性能参数;Tm表示第m种期望性能参数;wm表示第m种原始性能参数与期望性能参数之间的差异对应的权重。Wherein, N represents the original image quality evaluation factor; Vm represents the mth original performance parameter; Tm represents the mth expected performance parameter; and wm represents the weight corresponding to the difference between the mth original performance parameter and the expected performance parameter.
本发明实施例中,原始像质评估因子可以具象地表示为上述具有一项的数学关系式,其中,该项用于表示多种原始性能参数与期望性能参数之间的差异之和;例如,可以选取有效焦距、F数、像高和弥散斑大小这四个性能参数;所要设计的光学系统的有效焦距、F数、像高和弥散斑大小对应上述项中的Tm,即期望性能参数;而原始结构参数对应的超表面所构成的光学系统所具有的上述性能参数,对应上述项中的Vm,即原始性能参数。In the embodiment of the present invention, the original image quality evaluation factor can be specifically expressed as the above mathematical relationship with one term, wherein the term It is used to represent the sum of the differences between multiple original performance parameters and the expected performance parameters; for example, the four performance parameters of effective focal length, F number, image height and diffuse spot size can be selected; the effective focal length, F number, image height and diffuse spot size of the optical system to be designed correspond to T m in the above items, that is, the expected performance parameters; and the above performance parameters of the optical system constructed by the metasurface corresponding to the original structural parameters correspond to V m in the above items, that is, the original performance parameters.
可选地,当前结构参数所对应的超表面在多个位置处的相位满足以下公式之一:





Optionally, the phase of the metasurface corresponding to the current structural parameters at multiple positions satisfies one of the following formulas:





其中,r表示位置到中心的距离;(x,y)表示位置的坐标;f表示焦距;ai、bi、aij和bij均表示各阶的相位系数。Among them, r represents the distance from the position to the center; (x, y) represents the coordinates of the position; f represents the focal length; a i , b i , a ij and b ij all represent phase coefficients of each order.
本发明实施例中,对于当前结构参数所对应的超表面在多个位置处的相位可以针对性地选取上述6个公式中的任意一个进行计算,上述6个公式均可以用于计算当前结构参数对应的超表面在多个位置处(半径值r处)的相位。通常情况下,若采用光学设计软件(如Zemax)进行仿真,该系统中会选择公式对当前结构参数对应的超表面在多个位置处(半径值r处)的相位进行计算,本发明实施例对选取哪一个计算公式不做任何限定。In the embodiment of the present invention, any one of the above six formulas can be selected to calculate the phase of the metasurface at multiple positions corresponding to the current structural parameters. The above six formulas can be used to calculate the phase of the metasurface at multiple positions (at the radius value r) corresponding to the current structural parameters. Usually, if optical design software (such as Zemax) is used for simulation, the system will select formula The phases of the hypersurface corresponding to the current structural parameters at multiple positions (at the radius value r) are calculated, and the embodiment of the present invention does not impose any limitation on which calculation formula is selected.
下面通过一个实施例详细介绍该超表面相位系数优化方法流程。其中,该具有该超表面的光学系统的工作波段为近红外波段,中心波长为940nm,最大半视场角为39°,有效焦距为2.46mm,Fno(相对孔径的倒数)为1.3,TTL(系统总长)为3.8mm。以第二面作为需要优化的超表面为例,其相位分布满足公式: The following is a detailed introduction to the process of the metasurface phase coefficient optimization method through an embodiment. Among them, the working band of the optical system with the metasurface is the near-infrared band, the central wavelength is 940nm, the maximum half field of view angle is 39°, the effective focal length is 2.46mm, the Fno (the inverse of the relative aperture) is 1.3, and the TTL (total length of the system) is 3.8mm. Taking the second surface as the metasurface to be optimized as an example, its phase distribution satisfies the formula:
其中,r表示纳米结构到超表面中心的距离;表示工作波长为λ的光具有的常数相位;ai表示各阶的相位系数,i=1、2、3…n。Where r represents the distance from the nanostructure to the center of the metasurface; It represents the constant phase of light with working wavelength λ; a i represents the phase coefficient of each order, i = 1, 2, 3…n.
具体地,该方法包括以下步骤401-412,该方法的流程图可以参见图4所示。Specifically, the method includes the following steps 401-412, and the flowchart of the method can be seen in FIG4 .
步骤401:随机生成原始结构参数。Step 401: Randomly generate original structural parameters.
步骤402:确定该原始结构参数所对应的超表面的原始性能参数。Step 402: Determine the original performance parameters of the metasurface corresponding to the original structural parameters.
步骤403:确定原始像质评估因子。Step 403: Determine the original image quality assessment factor.
其中,可以基于上述步骤B2确定该原始像质评估因子,此处不再赘述。The original image quality evaluation factor may be determined based on the above step B2, which will not be described in detail here.
步骤404:判断原始像质评估因子是否小于或等于第二限制值,若是,执行步骤405;若否,执行步骤406; Step 404: determine whether the original image quality evaluation factor is less than or equal to the second limit value, if so, execute step 405; if not, execute step 406;
其中,该第二限制值与第一限制值相同。The second limit value is the same as the first limit value.
步骤405:将该原始结构参数作为初始的结构参数,将初始的结构参数作为当前结构参数的初始值,继续执行步骤407。Step 405: Use the original structural parameters as the initial structural parameters, use the initial structural parameters as the initial values of the current structural parameters, and continue to execute step 407.
步骤406:基于梯度下降法更新原始结构参数,重复执行步骤402。Step 406: Update the original structural parameters based on the gradient descent method and repeat step 402.
步骤407:确定当前结构参数对应的等效折射率差值。Step 407: Determine the equivalent refractive index difference corresponding to the current structural parameters.
步骤408:判断当前结构参数对应的等效折射率差值是否小于合理常数,若是,执行步骤409;若否,执行步骤410。Step 408: Determine whether the equivalent refractive index difference corresponding to the current structural parameters is less than a reasonable constant. If so, execute step 409; if not, execute step 410.
步骤409:确定该当前结构参数为目标结构参数。Step 409: Determine the current structural parameter as the target structural parameter.
其中,该目标结构参数满足工艺要求且符合成像需求。Among them, the target structure parameters meet the process requirements and conform to the imaging needs.
步骤410:判断当前结构参数对应的等效折射率差值是否大于合理常数,若是,执行步骤411;若否,执行步骤412。Step 410: Determine whether the equivalent refractive index difference corresponding to the current structural parameters is greater than a reasonable constant. If so, execute step 411; if not, execute step 412.
步骤411:更新返回值K=k1,更新当前像质评估函数,基于梯度下降法更新当前结构参数,执行步骤413。Step 411 : update the return value K=k 1 , update the current image quality evaluation function, update the current structural parameters based on the gradient descent method, and execute step 413 .
步骤412:更新返回值K=k0,更新当前像质评估函数,基于梯度下降法更新当前结构参数,执行步骤413。Step 412 : Update the return value K=k 0 , update the current image quality evaluation function, update the current structural parameters based on the gradient descent method, and execute step 413 .
其中,k1大于k0Among them, k 1 is greater than k 0 .
步骤413:基于当前像质评估函数,确定当前像质评估因子,判断当前像质评估因子是否小于或等于第一限制值,若是,执行上述步骤407;若否,执行步骤414。Step 413: Based on the current image quality evaluation function, determine the current image quality evaluation factor, and judge whether the current image quality evaluation factor is less than or equal to the first limit value. If so, execute the above step 407; if not, execute step 414.
步骤414:基于梯度下降法更新当前结构参数,并执行上述步骤413。Step 414: Update the current structural parameters based on the gradient descent method and execute the above step 413.
其中,参见图2、图3、图5、图6和图7所示,图5示出了基于本方法得到的仿真结果示意图;图2和图6分别示出了不受约束的相位系数对应的超表面的相位分布示意图,以及不受约束的相位系数对应的超表面的所生成的光学调制传递函数图;图3和图7分别示出了受约束的相位系数对应的超表面的相位分布示意图,以及受约束的相位系数对应的超表面的所生成的光学调制传递函数图;基于上述附图可知,采用本发明实施例所提供的超表面相位系数优化方法,可以使图4所示的光学系统的仿真结果得到优化,使得优化后的目标结构参 数满足工艺要求且达到成像需求。Wherein, referring to Figures 2, 3, 5, 6 and 7, Figure 5 shows a schematic diagram of the simulation results obtained based on the present method; Figures 2 and 6 respectively show a schematic diagram of the phase distribution of the metasurface corresponding to the unconstrained phase coefficient, and a diagram of the optical modulation transfer function generated by the metasurface corresponding to the unconstrained phase coefficient; Figures 3 and 7 respectively show a schematic diagram of the phase distribution of the metasurface corresponding to the constrained phase coefficient, and a diagram of the optical modulation transfer function generated by the metasurface corresponding to the constrained phase coefficient; Based on the above figures, it can be seen that by adopting the metasurface phase coefficient optimization method provided in the embodiment of the present invention, the simulation results of the optical system shown in Figure 4 can be optimized, so that the optimized target structure parameters are The number meets the process requirements and meets the imaging needs.
上文详细描述了本发明实施例提供的超表面相位系数优化方法,该方法也可以通过相应的装置实现,下面详细描述本发明实施例提供的超表面相位系数优化装置。The above describes in detail the metasurface phase coefficient optimization method provided by an embodiment of the present invention. The method can also be implemented by a corresponding device. The following describes in detail the metasurface phase coefficient optimization device provided by an embodiment of the present invention.
图8示出了本发明实施例所提供的一种超表面相位系数优化装置的结构示意图。如图8所示,该超表面相位系数优化装置包括:确定模块81和优化模块82。Fig. 8 shows a schematic diagram of the structure of a metasurface phase coefficient optimization device provided by an embodiment of the present invention. As shown in Fig. 8 , the metasurface phase coefficient optimization device includes: a determination module 81 and an optimization module 82 .
确定模块81用于确定初始的结构参数,所述结构参数用于限定超表面的结构特征,且所述结构参数至少包括:各阶的相位系数。The determination module 81 is used to determine initial structural parameters, where the structural parameters are used to define the structural features of the metasurface, and the structural parameters at least include: phase coefficients of each order.
优化模块82用于将所述初始的结构参数作为当前结构参数的初始值,以优化所述当前结构参数对应的等效折射率差值的方式对所述当前结构参数进行优化,确定优化后的目标结构参数;所述等效折射率差值为与相应结构参数所对应的超表面中等效折射率的最大值与最小值之间的差值,且所述目标结构参数对应的所述等效折射率差值小于满足工艺要求的合理常数。The optimization module 82 is used to use the initial structural parameters as the initial values of the current structural parameters, optimize the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, and determine the optimized target structural parameters; the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
可选地,优化模块82包括:循环单元。Optionally, the optimization module 82 includes: a circulation unit.
循环单元用于对所述当前结构参数循环执行参数优化操作,直至优化后的当前结构参数对应的所述等效折射率差值小于所述合理常数;The circulation unit is used to cyclically perform parameter optimization operations on the current structural parameters until the equivalent refractive index difference corresponding to the optimized current structural parameters is less than the reasonable constant;
循环单元包括:等效折射率差值确定单元和等效折射率差值判断单元。The circulation unit includes: an equivalent refractive index difference determination unit and an equivalent refractive index difference judgment unit.
等效折射率差值确定单元用于确定所述当前结构参数对应的等效折射率差值。The equivalent refractive index difference determination unit is used to determine the equivalent refractive index difference corresponding to the current structural parameters.
等效折射率差值判断单元用于判断所述当前结构参数对应的等效折射率差值是否小于所述合理常数;在所述当前结构参数满足要求的情况下,将所述当前结构参数作为所述目标结构参数;在所述当前结构参数不满足要求的情况下,更新所述当前结构参数;其中,所述当前结构参数满足要求包括所述当前结构参数对应的等效折射率差值小于所述合理常数。The equivalent refractive index difference judgment unit is used to judge whether the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant; if the current structural parameters meet the requirements, the current structural parameters are used as the target structural parameters; if the current structural parameters do not meet the requirements, the current structural parameters are updated; wherein, the current structural parameters meet the requirements including that the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant.
可选地,循环单元还包括:当前像质评估因子确定单元和当前像 质评估因子判断单元。Optionally, the circulation unit further comprises: a current image quality evaluation factor determination unit and a current image Quality assessment factor judgment unit.
当前像质评估因子确定单元用于确定所述当前结构参数所对应的超表面的当前性能参数,并确定当前像质评估因子;所述当前像质评估因子包括所述当前性能参数与期望性能参数之间的差异以及所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异。The current image quality evaluation factor determination unit is used to determine the current performance parameters of the metasurface corresponding to the current structural parameters, and to determine the current image quality evaluation factor; the current image quality evaluation factor includes the difference between the current performance parameters and the expected performance parameters and the difference between the equivalent refractive index difference corresponding to the current structural parameters and the reasonable constant.
当前像质评估因子判断单元用于判断所述当前像质评估因子是否大于第一限制值;其中,所述当前结构参数满足要求还包括:所述当前像质评估因子小于或等于第一限制值;所述当前结构参数不满足要求包括:所述当前结构参数对应的等效折射率差值不小于所述合理常数,和/或,所述当前像质评估因子大于第一限制值。The current image quality assessment factor judgment unit is used to judge whether the current image quality assessment factor is greater than a first limit value; wherein, the current structural parameters satisfying the requirements also include: the current image quality assessment factor is less than or equal to the first limit value; the current structural parameters not satisfying the requirements include: the equivalent refractive index difference corresponding to the current structural parameters is not less than the reasonable constant, and/or the current image quality assessment factor is greater than the first limit value.
可选地,当前像质评估因子确定单元包括:加权处理单元。Optionally, the current image quality assessment factor determination unit includes: a weighted processing unit.
加权处理单元用于基于当前像质评估函数确定所述当前像质评估因子,所述当前像质评估函数包括对第一项和第二项进行加权处理,所述第一项用于表示所述当前性能参数与所述期望性能参数之间的差异,所述第二项用于表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异。The weighted processing unit is used to determine the current image quality evaluation factor based on the current image quality evaluation function, and the current image quality evaluation function includes weighted processing of a first item and a second item, the first item is used to represent the difference between the current performance parameter and the expected performance parameter, and the second item is used to represent the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
可选地,在加权处理单元中,当前像质评估函数满足:
Optionally, in the weighted processing unit, the current image quality evaluation function satisfies:
其中,M表示所述当前像质评估因子;Vi表示第i种所述当前性能参数;Ti表示第i种所述期望性能参数;wi表示第i种所述当前性能参数与所述期望性能参数之间的差异对应的权重;Fx表示所述当前结构参数对应的等效折射率差值;C表示所述合理常数;p表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重。Among them, M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter; C represents the reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
可选地,在加权处理单元中,当前像质评估函数还包括第三项,所述第三项用于表示能够被调整的返回值。Optionally, in the weighted processing unit, the current image quality evaluation function further includes a third item, and the third item is used to represent a return value that can be adjusted.
循环单元还包括:更新单元。The cycle unit also includes: an update unit.
更新单元用于在所述确定当前像质评估因子之后,以更新所述返回值的方式更新所述当前像质评估函数。 The updating unit is used to update the current image quality evaluation function by updating the return value after the current image quality evaluation factor is determined.
其中,更新单元包括:确定返回值子单元。Wherein, the updating unit includes: a subunit for determining a return value.
确定返回值子单元用于在所述等效折射率差值大于所述合理常数的情况下,将所述返回值更新为第一数值;在所述等效折射率差值等于所述合理常数的情况下,将所述返回值更新为第二数值;所述第一数值大于所述第二数值。The return value determination subunit is used to update the return value to a first value when the equivalent refractive index difference is greater than the reasonable constant; and to update the return value to a second value when the equivalent refractive index difference is equal to the reasonable constant; the first value is greater than the second value.
可选地,更新单元,包括:更新子单元。Optionally, the update unit includes: an update subunit.
更新子单元用于在所述当前像质评估因子小于或等于第一限制值的情况下,以更新所述返回值的方式更新所述当前像质评估函数。The updating subunit is used for updating the current image quality evaluation function by updating the return value when the current image quality evaluation factor is less than or equal to the first limit value.
可选地,当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重小于所述返回值对应的权重。Optionally, the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant is smaller than the weight corresponding to the return value.
可选地,当前像质评估函数满足:
Optionally, the current image quality evaluation function satisfies:
其中,M表示所述当前像质评估因子;Vi表示第i种所述当前性能参数;Ti表示第i种所述期望性能参数;wi表示第i种所述当前性能参数与所述期望性能参数之间的差异对应的权重;Fx表示所述当前结构参数对应的等效折射率差值;C表示所述合理常数;p表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重;K表示所述返回值;q表示所述返回值对应的权重。Among them, M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter; C represents the reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant; K represents the return value; q represents the weight corresponding to the return value.
可选地,性能参数包括:有效焦距、F数、像高、弥散斑大小、视场角、相对孔径和系统总长中的至少一种。Optionally, the performance parameters include: at least one of effective focal length, F number, image height, diffuse spot size, field of view angle, relative aperture and total system length.
可选地,等效折射率差值确定单元,包括:相位确定子单元和等效折射率差值确定子单元。Optionally, the equivalent refractive index difference determining unit includes: a phase determining subunit and an equivalent refractive index difference determining subunit.
相位确定子单元用于确定所述当前结构参数所对应的超表面在多个位置处的相位,并根据所述相位确定相应位置处的等效折射率,所述等效折射率与所述相位之间为正相关关系。The phase determination subunit is used to determine the phase of the metasurface corresponding to the current structural parameters at multiple positions, and determine the equivalent refractive index at the corresponding position according to the phase, and there is a positive correlation between the equivalent refractive index and the phase.
等效折射率差值确定子单元用于确定多个所述等效折射率中的最大值和最小值,将所述最大值与所述最小值之间的差值作为所述当前结构参数对应的等效折射率差值。 The equivalent refractive index difference determination subunit is used to determine the maximum value and the minimum value among the multiple equivalent refractive indices, and take the difference between the maximum value and the minimum value as the equivalent refractive index difference corresponding to the current structural parameter.
可选地,等效折射率差值确定单元,还包括:确定半径值子单元。Optionally, the equivalent refractive index difference determining unit further includes: a radius value determining subunit.
确定半径值子单元用于确定所述当前结构参数所对应的超表面的最大半径,以a作为步长、从零至所述最大半径中选取多个半径值,不同的半径值表示不同位置。The radius value determination subunit is used to determine the maximum radius of the hypersurface corresponding to the current structural parameters, with a as the step size and multiple radius values selected from zero to the maximum radius, and different radius values represent different positions.
可选地,等效折射率与所述相位之间的关系满足:
Optionally, the relationship between the equivalent refractive index and the phase satisfies:
其中,F表示所述等效折射率;表示r位置处的相位;k表示波数,且λ表示波长;Hd表示r位置处的纳米结构的高度。Wherein, F represents the equivalent refractive index; represents the phase at position r; k represents the wave number, and λ represents the wavelength; Hd represents the height of the nanostructure at position r.
可选地,确定模块81,包括:原始结构参数确定单元、原始像质评估因子确定单元和原始像质评估因子判断单元。Optionally, the determination module 81 includes: an original structural parameter determination unit, an original image quality assessment factor determination unit and an original image quality assessment factor judgment unit.
原始结构参数确定单元用于确定原始结构参数。The original structure parameter determination unit is used to determine the original structure parameters.
原始像质评估因子确定单元用于确定所述原始结构参数所对应的超表面的原始性能参数,并确定原始像质评估因子;所述原始像质评估因子包括所述原始性能参数与期望性能参数之间的差异。The original image quality evaluation factor determination unit is used to determine the original performance parameters of the metasurface corresponding to the original structural parameters, and determine the original image quality evaluation factor; the original image quality evaluation factor includes the difference between the original performance parameters and the expected performance parameters.
原始像质评估因子判断单元用于在所述原始像质评估因子小于或等于第二限制值的情况下,将所述原始结构参数作为所述初始的结构参数。The original image quality evaluation factor judgment unit is used to use the original structure parameter as the initial structure parameter when the original image quality evaluation factor is less than or equal to a second limit value.
可选地,原始像质评估因子满足:
Optionally, the original image quality evaluation factor satisfies:
其中,N表示所述原始像质评估因子;Vm表示第m种所述原始性能参数;Tm表示第m种所述期望性能参数;wm表示第m种所述原始性能参数与所述期望性能参数之间的差异对应的权重。Among them, N represents the original image quality evaluation factor; Vm represents the mth original performance parameter; Tm represents the mth expected performance parameter; wm represents the weight corresponding to the difference between the mth original performance parameter and the expected performance parameter.
可选地,当前结构参数所对应的超表面在多个位置处的相位满足以下公式之一:





Optionally, the phase of the metasurface corresponding to the current structural parameters at multiple positions satisfies one of the following formulas:





其中,r表示所述位置到中心的距离;(x,y)表示所述位置的坐标;f表示焦距;ai、bi、aij和bij均表示所述各阶的相位系数。Wherein, r represents the distance from the position to the center; (x, y) represents the coordinates of the position; f represents the focal length; a i , b i , a ij and b ij all represent the phase coefficients of the respective orders.
可选地,结构参数还包括:所述最大半径和所述纳米结构的高度。Optionally, the structural parameters further include: the maximum radius and the height of the nanostructure.
本发明实施例所提供的装置,通过优化当前结构参数的等效折射率差值,可以得到优化后满足工艺要求(小于合理常数)的目标结构参数,该目标结构参数能够使其对应的超表面上的纳米结构满足周期性排布;本发明实施例开创性地对光学系统中超表面的结构参数(如各阶的相位系数)进行优化,在设计之初即降低了光学系统的制造工艺难度,以实现批量化生产。The device provided by the embodiment of the present invention can obtain the target structural parameters that meet the process requirements (less than a reasonable constant) after optimization by optimizing the equivalent refractive index difference of the current structural parameters. The target structural parameters can make the nanostructure on its corresponding metasurface meet the periodic arrangement. The embodiment of the present invention innovatively optimizes the structural parameters of the metasurface in the optical system (such as the phase coefficients of each order), thereby reducing the difficulty of the manufacturing process of the optical system at the beginning of the design to achieve mass production.
此外,本发明实施例还提供了一种电子设备,包括总线、收发器、存储器、处理器及存储在存储器上并可在处理器上运行的计算机程序,该收发器、该存储器和处理器分别通过总线相连,计算机程序被处理器执行时实现上述超表面相位系数优化方法实施例的各个过程,且能达到相同的技术效果,为避免重复,这里不再赘述。In addition, an embodiment of the present invention further provides an electronic device, including a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor. The transceiver, the memory, and the processor are respectively connected via a bus. When the computer program is executed by the processor, each process of the above-mentioned metasurface phase coefficient optimization method embodiment is implemented, and the same technical effect can be achieved. To avoid repetition, it will not be described here.
具体的,参见图9所示,本发明实施例还提供了一种电子设备,该电子设备包括总线1110、处理器1120、收发器1130、总线接口1140、存储器1150和用户接口1160。Specifically, as shown in FIG. 9 , an embodiment of the present invention further provides an electronic device, which includes a bus 1110 , a processor 1120 , a transceiver 1130 , a bus interface 1140 , a memory 1150 , and a user interface 1160 .
在本发明实施例中,该电子设备还包括:存储在存储器1150上并可在处理器1120上运行的计算机程序,计算机程序被处理器1120执行时实现上述超表面相位系数优化方法实施例的各个过程。In an embodiment of the present invention, the electronic device also includes: a computer program stored in the memory 1150 and executable on the processor 1120, and when the computer program is executed by the processor 1120, each process of the above-mentioned metasurface phase coefficient optimization method embodiment is implemented.
收发器1130,用于在处理器1120的控制下接收和发送数据。The transceiver 1130 is configured to receive and send data under the control of the processor 1120 .
本发明实施例中,总线架构(用总线1110来代表),总线1110可 以包括任意数量互联的总线和桥,总线1110将包括由处理器1120代表的一个或多个处理器与存储器1150代表的存储器的各种电路连接在一起。In the embodiment of the present invention, the bus architecture (represented by bus 1110) may be Bus 1110 connects various circuits including one or more processors represented by processor 1120 and memory represented by memory 1150 , including any number of interconnecting buses and bridges.
总线1110表示若干类型的总线结构中的任何一种总线结构中的一个或多个,包括存储器总线以及存储器控制器、外围总线、加速图形端口(Accelerate Graphical Port,AGP)、处理器或使用各种总线体系结构中的任意总线结构的局域总线。作为示例而非限制,这样的体系结构包括:工业标准体系结构(Industry Standard Architecture,ISA)总线、微通道体系结构(Micro Channel Architecture,MCA)总线、扩展ISA(Enhanced ISA,EISA)总线、视频电子标准协会(Video Electronics Standards Association,VESA)、外围部件互连(Peripheral Component Interconnect,PCI)总线。Bus 1110 represents one or more of any of several types of bus structures, including a memory bus and memory controller, a peripheral bus, an Accelerate Graphical Port (AGP), a processor, or a local bus using any of a variety of bus architectures. By way of example and not limitation, such architectures include: Industry Standard Architecture (ISA) bus, Micro Channel Architecture (MCA) bus, Enhanced ISA (EISA) bus, Video Electronics Standards Association (VESA), Peripheral Component Interconnect (PCI) bus.
处理器1120可以是一种集成电路芯片,具有信号处理能力。在实现过程中,上述方法实施例的各步骤可以通过处理器中硬件的集成逻辑电路或软件形式的指令完成。上述的处理器包括:通用处理器、中央处理器(Central Processing Unit,CPU)、网络处理器(Network Processor,NP)、数字信号处理器(Digital Signal Processor,DSP)、专用集成电路(Application Specific Integrated Circuit,ASIC)、现场可编程门阵列(Field Programmable Gate Array,FPGA)、复杂可编程逻辑器件(Complex Programmable Logic Device,CPLD)、可编程逻辑阵列(Programmable Logic Array,PLA)、微控制单元(Microcontroller Unit,MCU)或其他可编程逻辑器件、分立门、晶体管逻辑器件、分立硬件组件。可以实现或执行本发明实施例中公开的各方法、步骤及逻辑框图。例如,处理器可以是单核处理器或多核处理器,处理器可以集成于单颗芯片或位于多颗不同的芯片。The processor 1120 may be an integrated circuit chip having signal processing capabilities. In the implementation process, each step of the above method embodiment may be completed by an integrated logic circuit of hardware in the processor or an instruction in the form of software. The above processors include: a general processor, a central processing unit (CPU), a network processor (NP), a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), a complex programmable logic device (CPLD), a programmable logic array (PLA), a microcontroller unit (MCU) or other programmable logic devices, discrete gates, transistor logic devices, discrete hardware components. The methods, steps and logic block diagrams disclosed in the embodiments of the present invention may be implemented or executed. For example, the processor may be a single-core processor or a multi-core processor, and the processor may be integrated into a single chip or located on multiple different chips.
处理器1120可以是微处理器或任何常规的处理器。结合本发明实施例所公开的方法步骤可以直接由硬件译码处理器执行完成,或者由译码处理器中的硬件及软件模块组合执行完成。软件模块可以位于随机存取存储器(Random Access Memory,RAM)、闪存(Flash Memory)、 只读存储器(Read-Only Memory,ROM)、可编程只读存储器(Programmable ROM,PROM)、可擦除可编程只读存储器(Erasable PROM,EPROM)、寄存器等本领域公知的可读存储介质中。所述可读存储介质位于存储器中,处理器读取存储器中的信息,结合其硬件完成上述方法的步骤。The processor 1120 may be a microprocessor or any conventional processor. The method steps disclosed in the embodiments of the present invention may be directly executed by a hardware decoding processor, or by a combination of hardware and software modules in the decoding processor. The software module may be located in a random access memory (RAM), a flash memory, Read-Only Memory (ROM), Programmable ROM (PROM), Erasable Programmable ROM (EPROM), registers and other readable storage media known in the art. The readable storage medium is located in the memory, and the processor reads the information in the memory and completes the steps of the above method in combination with its hardware.
总线1110还可以将,例如外围设备、稳压器或功率管理电路等各种其他电路连接在一起,总线接口1140在总线1110和收发器1130之间提供接口,这些都是本领域所公知的。因此,本发明实施例不再对其进行进一步描述。The bus 1110 may also connect various other circuits such as peripheral devices, voltage regulators or power management circuits, and the bus interface 1140 provides an interface between the bus 1110 and the transceiver 1130, which are well known in the art. Therefore, the embodiment of the present invention will not be further described.
收发器1130可以是一个元件,也可以是多个元件,例如多个接收器和发送器,提供用于在传输介质上与各种其他装置通信的单元。例如:收发器1130从其他设备接收外部数据,收发器1130用于将处理器1120处理后的数据发送给其他设备。取决于计算机系统的性质,还可以提供用户接口1160,例如:触摸屏、物理键盘、显示器、鼠标、扬声器、麦克风、轨迹球、操纵杆、触控笔。The transceiver 1130 may be one element or multiple elements, such as multiple receivers and transmitters, providing a unit for communicating with various other devices on a transmission medium. For example, the transceiver 1130 receives external data from other devices, and the transceiver 1130 is used to send data processed by the processor 1120 to other devices. Depending on the nature of the computer system, a user interface 1160 may also be provided, such as a touch screen, a physical keyboard, a display, a mouse, a speaker, a microphone, a trackball, a joystick, and a stylus.
应理解,在本发明实施例中,存储器1150可进一步包括相对于处理器1120远程设置的存储器,这些远程设置的存储器可以通过网络连接至服务器。上述网络的一个或多个部分可以是自组织网络(ad hoc network)、内联网(intranet)、外联网(extranet)、虚拟专用网(VPN)、局域网(LAN)、无线局域网(WLAN)、广域网(WAN)、无线广域网(WWAN)、城域网(MAN)、互联网(Internet)、公共交换电话网(PSTN)、普通老式电话业务网(POTS)、蜂窝电话网、无线网络、无线保真(Wi-Fi)网络以及两个或更多个上述网络的组合。例如,蜂窝电话网和无线网络可以是全球移动通信(GSM)系统、码分多址(CDMA)系统、全球微波互联接入(WiMAX)系统、通用分组无线业务(GPRS)系统、宽带码分多址(WCDMA)系统、长期演进(LTE)系统、LTE频分双工(FDD)系统、LTE时分双工(TDD)系统、先进长期演进(LTE-A)系统、通用移动通信(UMTS)系统、增强移动宽带(Enhance Mobile Broadband,eMBB)系统、海量机器类通信(massive Machine Type of  Communication,mMTC)系统、超可靠低时延通信(Ultra Reliable Low Latency Communications,uRLLC)系统等。It should be understood that in an embodiment of the present invention, the memory 1150 may further include a memory remotely arranged relative to the processor 1120, and these remotely arranged memories may be connected to the server through a network. One or more parts of the above-mentioned network may be an ad hoc network, an intranet, an extranet, a virtual private network (VPN), a local area network (LAN), a wireless local area network (WLAN), a wide area network (WAN), a wireless wide area network (WWAN), a metropolitan area network (MAN), the Internet, a public switched telephone network (PSTN), a plain old telephone service network (POTS), a cellular telephone network, a wireless network, a wireless fidelity (Wi-Fi) network, and a combination of two or more of the above-mentioned networks. For example, the cellular telephone network and the wireless network may be a Global System for Mobile Communications (GSM) system, a Code Division Multiple Access (CDMA) system, a Worldwide Interoperability for Microwave Access (WiMAX) system, a General Packet Radio Service (GPRS) system, a Wideband Code Division Multiple Access (WCDMA) system, a Long Term Evolution (LTE) system, a LTE Frequency Division Duplex (FDD) system, a LTE Time Division Duplex (TDD) system, an Advanced Long Term Evolution (LTE-A) system, a Universal Mobile Telecommunications (UMTS) system, an Enhanced Mobile Broadband (eMBB) system, a Massive Machine Type of Communications (MTC) system, and a LTE-A system. Communication, mMTC) system, Ultra Reliable Low Latency Communications, uRLLC system, etc.
应理解,本发明实施例中的存储器1150可以是易失性存储器或非易失性存储器,或可包括易失性存储器和非易失性存储器两者。其中,非易失性存储器包括:只读存储器(Read-Only Memory,ROM)、可编程只读存储器(Programmable ROM,PROM)、可擦除可编程只读存储器(Erasable PROM,EPROM)、电可擦除可编程只读存储器(Electrically EPROM,EEPROM)或闪存(Flash Memory)。It should be understood that the memory 1150 in the embodiment of the present invention may be a volatile memory or a non-volatile memory, or may include both a volatile memory and a non-volatile memory. Among them, the non-volatile memory includes: a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory.
易失性存储器包括:随机存取存储器(Random Access Memory,RAM),其用作外部高速缓存。通过示例性但不是限制性说明,许多形式的RAM可用,例如:静态随机存取存储器(Static RAM,SRAM)、动态随机存取存储器(Dynamic RAM,DRAM)、同步动态随机存取存储器(Synchronous DRAM,SDRAM)、双倍数据速率同步动态随机存取存储器(Double Data Rate SDRAM,DDRSDRAM)、增强型同步动态随机存取存储器(Enhanced SDRAM,ESDRAM)、同步连接动态随机存取存储器(Synchlink DRAM,SLDRAM)和直接内存总线随机存取存储器(Direct Rambus RAM,DRRAM)。本发明实施例描述的电子设备的存储器1150包括但不限于上述和任意其他适合类型的存储器。Volatile memory includes: Random Access Memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available, such as: Static RAM (SRAM), Dynamic RAM (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDRSDRAM), Enhanced SDRAM (ESDRAM), Synchronous DRAM (SLDRAM), and Direct Rambus RAM (DRRAM). The memory 1150 of the electronic device described in the embodiment of the present invention includes but is not limited to the above and any other suitable types of memory.
在本发明实施例中,存储器1150存储了操作系统1151和应用程序1152的如下元素:可执行模块、数据结构,或者其子集,或者其扩展集。In the embodiment of the present invention, the memory 1150 stores the following elements of the operating system 1151 and the application program 1152: executable modules, data structures, or subsets thereof, or extended sets thereof.
具体而言,操作系统1151包含各种系统程序,例如:框架层、核心库层、驱动层等,用于实现各种基础业务以及处理基于硬件的任务。应用程序1152包含各种应用程序,例如:媒体播放器(Media Player)、浏览器(Browser),用于实现各种应用业务。实现本发明实施例方法的程序可以包含在应用程序1152中。应用程序1152包括:小程序、对象、组件、逻辑、数据结构以及其他执行特定任务或实现特定抽象数据类型的计算机系统可执行指令。Specifically, the operating system 1151 includes various system programs, such as a framework layer, a core library layer, a driver layer, etc., which are used to implement various basic services and process hardware-based tasks. The application 1152 includes various application programs, such as a media player (Media Player) and a browser (Browser), which are used to implement various application services. The program that implements the method of the embodiment of the present invention may be included in the application 1152. The application 1152 includes applets, objects, components, logic, data structures, and other computer system executable instructions that perform specific tasks or implement specific abstract data types.
此外,本发明实施例还提供了一种计算机可读存储介质,其上存 储有计算机程序,所述计算机程序被处理器执行时实现上述超表面相位系数优化方法实施例的各个过程,且能达到相同的技术效果,为避免重复,这里不再赘述。In addition, an embodiment of the present invention further provides a computer-readable storage medium on which is stored A computer program is stored, and when the computer program is executed by a processor, each process of the above-mentioned metasurface phase coefficient optimization method embodiment is implemented, and the same technical effect can be achieved. To avoid repetition, it will not be repeated here.
计算机可读存储介质包括:永久性和非永久性、可移动和非可移动媒体,是可以保留和存储供指令执行设备所使用指令的有形设备。计算机可读存储介质包括:电子存储设备、磁存储设备、光存储设备、电磁存储设备、半导体存储设备以及上述任意合适的组合。计算机可读存储介质包括:相变内存(PRAM)、静态随机存取存储器(SRAM)、动态随机存取存储器(DRAM)、其他类型的随机存取存储器(RAM)、只读存储器(ROM)、非易失性随机存取存储器(NVRAM)、电可擦除可编程只读存储器(EEPROM)、快闪记忆体或其他内存技术、光盘只读存储器(CD-ROM)、数字多功能光盘(DVD)或其他光学存储、磁盒式磁带存储、磁带磁盘存储或其他磁性存储设备、记忆棒、机械编码装置(例如在其上记录有指令的凹槽中的穿孔卡或凸起结构)或任何其他非传输介质、可用于存储可以被计算设备访问的信息。按照本发明实施例中的界定,计算机可读存储介质不包括暂时信号本身,例如无线电波或其他自由传播的电磁波、通过波导或其他传输介质传播的电磁波(例如穿过光纤电缆的光脉冲)或通过导线传输的电信号。Computer readable storage media include: permanent and non-permanent, removable and non-removable media, which are tangible devices that can retain and store instructions for use by instruction execution devices. Computer readable storage media include: electronic storage devices, magnetic storage devices, optical storage devices, electromagnetic storage devices, semiconductor storage devices, and any suitable combination of the above. Computer readable storage media include: phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), non-volatile random access memory (NVRAM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, compact disk read-only memory (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassette storage, magnetic tape disk storage or other magnetic storage devices, memory sticks, mechanical encoding devices (such as punched cards or raised structures in grooves with instructions recorded thereon) or any other non-transmission medium that can be used to store information that can be accessed by a computing device. As defined in the embodiments of the present invention, computer-readable storage media do not include temporary signals themselves, such as radio waves or other freely propagating electromagnetic waves, electromagnetic waves propagating through waveguides or other transmission media (such as light pulses passing through fiber optic cables), or electrical signals transmitted through wires.
在本申请所提供的几个实施例中,应该理解到,所披露的装置、电子设备和方法,可以通过其他的方式实现。例如,以上描述的装置实施例仅仅是示意性的,例如,所述模块或单元的划分,仅仅为一种逻辑功能划分,实际实现时可以有另外的划分方式,例如多个单元或组件可以结合或可以集成到另一个系统,或一些特征可以忽略,或不执行。另外,所显示或讨论的相互之间的耦合或直接耦合或通信连接可以是通过一些接口、装置或单元的间接耦合或通信连接,也可以是电的、机械的或其他的形式连接。In the several embodiments provided in the present application, it should be understood that the disclosed devices, electronic devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the modules or units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, or it can be an electrical, mechanical or other form of connection.
所述作为分离部件说明的单元可以是或也可以不是物理上分开的,作为单元显示的部件可以是或也可以不是物理单元,既可以位于一个位置,或者也可以分布到多个网络单元上。可以根据实际的需要 选择其中的部分或全部单元来解决本发明实施例方案要解决的问题。The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, and may be located in one location or distributed across multiple network units. Some or all of the units are selected to solve the problem to be solved by the embodiment of the present invention.
另外,在本发明各个实施例中的各功能单元可以集成在一个处理单元中,也可以是各个单元单独物理存在,也可以是两个或两个以上单元集成在一个单元中。上述集成的单元既可以采用硬件的形式实现,也可以采用软件功能单元的形式实现。In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.
所述集成的单元如果以软件功能单元的形式实现并作为独立的产品销售或使用时,可以存储在一个计算机可读存储介质中。基于这样的理解,本发明实施例的技术方案本质上或者说对现有技术作出贡献的部分,或者该技术方案的全部或部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个存储介质中,包括若干指令用以使得一台计算机设备(包括:个人计算机、服务器、数据中心或其他网络设备)执行本发明各个实施例所述方法的全部或部分步骤。而上述存储介质包括如前述所列举的各种可以存储程序代码的介质。If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the embodiment of the present invention is essentially or part of the contribution to the prior art, or all or part of the technical solution can be embodied in the form of a software product, which is stored in a storage medium and includes several instructions for a computer device (including: a personal computer, a server, a data center or other network device) to perform all or part of the steps of the method described in each embodiment of the present invention. The above-mentioned storage medium includes various media that can store program codes as listed above.
在本发明实施例的描述中,所属技术领域的技术人员应当知道,本发明实施例可以实现为方法、装置、电子设备及计算机可读存储介质。因此,本发明实施例可以具体实现为以下形式:完全的硬件、完全的软件(包括固件、驻留软件、微代码等)、硬件和软件结合的形式。此外,在一些实施例中,本发明实施例还可以实现为在一个或多个计算机可读存储介质中的计算机程序产品的形式,该计算机可读存储介质中包含计算机程序代码。In the description of the embodiments of the present invention, those skilled in the art should know that the embodiments of the present invention can be implemented as methods, devices, electronic devices and computer-readable storage media. Therefore, the embodiments of the present invention can be specifically implemented in the following forms: complete hardware, complete software (including firmware, resident software, microcode, etc.), a combination of hardware and software. In addition, in some embodiments, the embodiments of the present invention can also be implemented in the form of a computer program product in one or more computer-readable storage media, and the computer-readable storage medium contains computer program code.
上述计算机可读存储介质可以采用一个或多个计算机可读存储介质的任意组合。计算机可读存储介质包括:电、磁、光、电磁、红外或半导体的系统、装置或器件,或者以上任意的组合。计算机可读存储介质更具体的例子包括:便携式计算机磁盘、硬盘、随机存取存储器(RAM)、只读存储器(ROM)、可擦除可编程只读存储器(EPROM)、闪存(Flash Memory)、光纤、光盘只读存储器(CD-ROM)、光存储器件、磁存储器件或以上任意组合。在本发明实施例中,计算机可读存储介质可以是任意包含或存储程序的有形介质,该程序可以被指令执行系统、装置、器件使用或与其结合使用。 The above-mentioned computer-readable storage medium may adopt any combination of one or more computer-readable storage media. Computer-readable storage media include: electrical, magnetic, optical, electromagnetic, infrared or semiconductor systems, devices or devices, or any combination of the above. More specific examples of computer-readable storage media include: portable computer disks, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROM), flash memories (Flash Memory), optical fibers, compact disk read-only memories (CD-ROM), optical storage devices, magnetic storage devices or any combination of the above. In an embodiment of the present invention, a computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, device, or device.
上述计算机可读存储介质包含的计算机程序代码可以用任意适当的介质传输,包括:无线、电线、光缆、射频(Radio Frequency,RF)或者以上任意合适的组合。The computer program code contained in the above-mentioned computer-readable storage medium can be transmitted using any appropriate medium, including: wireless, wire, optical cable, radio frequency (Radio Frequency, RF) or any suitable combination of the above.
可以以汇编指令、指令集架构(ISA)指令、机器指令、机器相关指令、微代码、固件指令、状态设置数据、集成电路配置数据或以一种或多种程序设计语言或其组合来编写用于执行本发明实施例操作的计算机程序代码,所述程序设计语言包括面向对象的程序设计语言,例如:Java、Smalltalk、C++,还包括常规的过程式程序设计语言,例如:C语言或类似的程序设计语言。计算机程序代码可以完全的在用户计算机上执行、部分的在用户计算机上执行、作为一个独立的软件包执行、部分在用户计算机上部分在远程计算机上执行以及完全在远程计算机或服务器上执行。在涉及远程计算机的情形中,远程计算机可以通过任意种类的网络,包括:局域网(LAN)或广域网(WAN),可以连接到用户计算机,也可以连接到外部计算机。The computer program code for performing the operation of the embodiments of the present invention can be written in assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-related instructions, microcode, firmware instructions, state setting data, integrated circuit configuration data, or in one or more programming languages or a combination thereof, wherein the programming language includes an object-oriented programming language, such as Java, Smalltalk, C++, and also includes a conventional procedural programming language, such as C language or a similar programming language. The computer program code can be executed completely on the user's computer, partially on the user's computer, as an independent software package, partially on the user's computer, partially on a remote computer, and completely on a remote computer or server. In the case of a remote computer, the remote computer can be connected to the user's computer or to an external computer through any type of network, including a local area network (LAN) or a wide area network (WAN).
本发明实施例通过流程图和/或方框图描述所提供的方法、装置、电子设备。The embodiments of the present invention describe the provided methods, devices, and electronic devices through flowcharts and/or block diagrams.
应当理解,流程图和/或方框图的每个方框以及流程图和/或方框图中各方框的组合,都可以由计算机可读程序指令实现。这些计算机可读程序指令可以提供给通用计算机、专用计算机或其他可编程数据处理装置的处理器,从而生产出一种机器,这些计算机可读程序指令通过计算机或其他可编程数据处理装置执行,产生了实现流程图和/或方框图中的方框规定的功能/操作的装置。It should be understood that each box in the flowchart and/or block diagram and the combination of boxes in the flowchart and/or block diagram can be implemented by computer-readable program instructions. These computer-readable program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer or other programmable data processing device to produce a machine, and these computer-readable program instructions are executed by a computer or other programmable data processing device to produce a device that implements the functions/operations specified by the boxes in the flowchart and/or block diagram.
也可以将这些计算机可读程序指令存储在能使得计算机或其他可编程数据处理装置以特定方式工作的计算机可读存储介质中。这样,存储在计算机可读存储介质中的指令就产生出一个包括实现流程图和/或方框图中的方框规定的功能/操作的指令装置产品。These computer-readable program instructions may also be stored in a computer-readable storage medium that enables a computer or other programmable data processing device to work in a specific manner. In this way, the instructions stored in the computer-readable storage medium produce an instruction device product including functions/operations specified in the blocks in the flowchart and/or block diagram.
也可以将计算机可读程序指令加载到计算机、其他可编程数据处理装置或其他设备上,使得在计算机、其他可编程数据处理装置或其他设备上执行一系列操作步骤,以产生计算机实现的过程,从而使得 在计算机或其他可编程数据处理装置上执行的指令能够提供实现流程图和/或方框图中的方框规定的功能/操作的过程。The computer readable program instructions may also be loaded onto a computer, other programmable data processing apparatus or other device, so that a series of operation steps are executed on the computer, other programmable data processing apparatus or other device to produce a computer-implemented process, thereby causing The instructions executed on a computer or other programmable data processing apparatus can provide a process for implementing the functions/operations specified in the blocks in the flowcharts and/or block diagrams.
以上所述,仅为本发明实施例的具体实施方式,但本发明实施例的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明实施例披露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明实施例的保护范围之内。因此,本发明实施例的保护范围应以权利要求的保护范围为准。 The above is only a specific implementation of the embodiment of the present invention, but the protection scope of the embodiment of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the embodiment of the present invention, which should be included in the protection scope of the embodiment of the present invention. Therefore, the protection scope of the embodiment of the present invention shall be based on the protection scope of the claims.

Claims (20)

  1. 一种超表面相位系数优化方法,其特征在于,包括:A metasurface phase coefficient optimization method, characterized by comprising:
    确定初始的结构参数,所述初始的结构参数用于限定超表面的结构特征,且所述初始的结构参数至少包括:各阶的相位系数;Determining initial structural parameters, wherein the initial structural parameters are used to define structural features of the metasurface, and the initial structural parameters at least include: phase coefficients of each order;
    将所述初始的结构参数作为当前结构参数的初始值,以优化所述当前结构参数对应的等效折射率差值的方式对所述当前结构参数进行优化,确定优化后的目标结构参数;所述等效折射率差值为与相应结构参数所对应的超表面中等效折射率的最大值与最小值之间的差值,且所述目标结构参数对应的所述等效折射率差值小于满足工艺要求的合理常数。The initial structural parameters are used as the initial values of the current structural parameters, and the current structural parameters are optimized in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, so as to determine the optimized target structural parameters; the equivalent refractive index difference is the difference between the maximum value and the minimum value of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
  2. 根据权利要求1所述的方法,其特征在于,所述以优化所述当前结构参数对应的等效折射率差值的方式对所述当前结构参数进行优化,包括:The method according to claim 1, characterized in that the optimizing the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters comprises:
    对所述当前结构参数循环执行参数优化操作,直至优化后的当前结构参数对应的所述等效折射率差值小于所述合理常数;cyclically performing a parameter optimization operation on the current structural parameters until the equivalent refractive index difference corresponding to the optimized current structural parameters is less than the reasonable constant;
    所述参数优化操作,包括:The parameter optimization operation includes:
    确定所述当前结构参数对应的等效折射率差值;Determine the equivalent refractive index difference corresponding to the current structural parameters;
    判断所述当前结构参数对应的等效折射率差值是否小于所述合理常数;Determine whether the equivalent refractive index difference corresponding to the current structural parameter is less than the reasonable constant;
    在所述当前结构参数满足要求的情况下,将所述当前结构参数作为所述目标结构参数;在所述当前结构参数不满足要求的情况下,更新所述当前结构参数;其中,所述当前结构参数满足要求包括所述当前结构参数对应的等效折射率差值小于所述合理常数。When the current structural parameters meet the requirements, the current structural parameters are used as the target structural parameters; when the current structural parameters do not meet the requirements, the current structural parameters are updated; wherein, the current structural parameters meet the requirements including that the equivalent refractive index difference corresponding to the current structural parameters is less than the reasonable constant.
  3. 根据权利要求2所述的方法,其特征在于,所述参数优化操作,还包括:The method according to claim 2, characterized in that the parameter optimization operation further comprises:
    确定所述当前结构参数所对应的超表面的当前性能参数,并确定当前像质评估因子;所述当前像质评估因子包括所述当前性能参数与期望性能参数之间的差异以及所述当前结构参数对应的等效折射率差 值与所述合理常数之间的差异;Determine the current performance parameters of the metasurface corresponding to the current structural parameters, and determine the current image quality evaluation factor; the current image quality evaluation factor includes the difference between the current performance parameters and the expected performance parameters and the equivalent refractive index difference corresponding to the current structural parameters The difference between the value and the stated reasonable constant;
    判断所述当前像质评估因子是否大于第一限制值;Determining whether the current image quality assessment factor is greater than a first limit value;
    其中,所述当前结构参数满足要求还包括:所述当前像质评估因子小于或等于第一限制值;所述当前结构参数不满足要求包括:所述当前结构参数对应的等效折射率差值不小于所述合理常数,和/或,所述当前像质评估因子大于第一限制值。Among them, the current structural parameters satisfying the requirements also include: the current image quality evaluation factor is less than or equal to the first limit value; the current structural parameters not satisfying the requirements include: the equivalent refractive index difference corresponding to the current structural parameters is not less than the reasonable constant, and/or the current image quality evaluation factor is greater than the first limit value.
  4. 根据权利要求3所述的方法,其特征在于,所述确定当前像质评估因子,包括:The method according to claim 3, characterized in that determining the current image quality assessment factor comprises:
    基于当前像质评估函数确定所述当前像质评估因子,所述当前像质评估函数包括对第一项和第二项进行加权处理,所述第一项用于表示所述当前性能参数与所述期望性能参数之间的差异,所述第二项用于表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异。The current image quality evaluation factor is determined based on a current image quality evaluation function, wherein the current image quality evaluation function includes weighted processing of a first item and a second item, wherein the first item is used to represent the difference between the current performance parameter and the expected performance parameter, and the second item is used to represent the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
  5. 根据权利要求4所述的方法,其特征在于,所述当前像质评估函数满足:
    The method according to claim 4, characterized in that the current image quality evaluation function satisfies:
    其中,M表示所述当前像质评估因子;Vi表示第i种所述当前性能参数;Ti表示第i种所述期望性能参数;wi表示第i种所述当前性能参数与所述期望性能参数之间的差异对应的权重;Fx表示所述当前结构参数对应的等效折射率差值;C表示所述合理常数;p表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重。Among them, M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter; C represents the reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant.
  6. 根据权利要求4所述的方法,其特征在于,所述当前像质评估函数还包括第三项,所述第三项用于表示能够被调整的返回值;The method according to claim 4, characterized in that the current image quality evaluation function further includes a third term, and the third term is used to represent a return value that can be adjusted;
    所述参数优化操作,还包括:The parameter optimization operation further includes:
    在所述确定当前像质评估因子之后,以更新所述返回值的方式更新所述当前像质评估函数;After the current image quality assessment factor is determined, updating the current image quality assessment function in a manner of updating the return value;
    其中,所述更新所述返回值,包括:Wherein, updating the return value includes:
    在所述等效折射率差值大于所述合理常数的情况下,将所述返回 值更新为第一数值;在所述等效折射率差值等于所述合理常数的情况下,将所述返回值更新为第二数值;所述第一数值大于所述第二数值。In the case where the equivalent refractive index difference is greater than the reasonable constant, the returned The value is updated to a first value; when the equivalent refractive index difference is equal to the reasonable constant, the return value is updated to a second value; the first value is greater than the second value.
  7. 根据权利要求6所述的方法,其特征在于,所述以更新所述返回值的方式更新所述当前像质评估函数,包括:The method according to claim 6, characterized in that the updating of the current image quality evaluation function by updating the return value comprises:
    在所述当前像质评估因子小于或等于第一限制值的情况下,以更新所述返回值的方式更新所述当前像质评估函数。When the current image quality evaluation factor is less than or equal to the first limit value, the current image quality evaluation function is updated in a manner of updating the return value.
  8. 根据权利要求6所述的方法,其特征在于,所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重小于所述返回值对应的权重。The method according to claim 6 is characterized in that the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant is less than the weight corresponding to the return value.
  9. 根据权利要求8所述的方法,其特征在于,所述当前像质评估函数满足:
    The method according to claim 8, characterized in that the current image quality evaluation function satisfies:
    其中,M表示所述当前像质评估因子;Vi表示第i种所述当前性能参数;Ti表示第i种所述期望性能参数;wi表示第i种所述当前性能参数与所述期望性能参数之间的差异对应的权重;Fx表示所述当前结构参数对应的等效折射率差值;C表示所述合理常数;p表示所述当前结构参数对应的等效折射率差值与所述合理常数之间的差异对应的权重;K表示所述返回值;q表示所述返回值对应的权重。Among them, M represents the current image quality evaluation factor; Vi represents the i-th current performance parameter; Ti represents the i-th expected performance parameter; w i represents the weight corresponding to the difference between the i-th current performance parameter and the expected performance parameter; F x represents the equivalent refractive index difference corresponding to the current structural parameter; C represents the reasonable constant; p represents the weight corresponding to the difference between the equivalent refractive index difference corresponding to the current structural parameter and the reasonable constant; K represents the return value; q represents the weight corresponding to the return value.
  10. 根据权利要求3所述的方法,其特征在于,性能参数包括:有效焦距、F数、像高、弥散斑大小、视场角、相对孔径和系统总长中的至少一种。The method according to claim 3 is characterized in that the performance parameters include at least one of: effective focal length, F number, image height, diffuse spot size, field of view angle, relative aperture and total system length.
  11. 根据权利要求2所述的方法,其特征在于,所述确定所述当前结构参数对应的等效折射率差值,包括:The method according to claim 2, characterized in that determining the equivalent refractive index difference corresponding to the current structural parameter comprises:
    确定所述当前结构参数所对应的超表面在多个位置处的相位,并根据所述相位确定相应位置处的等效折射率,所述等效折射率与所述相位之间为正相关关系;Determine the phase of the metasurface corresponding to the current structural parameters at multiple positions, and determine the equivalent refractive index at the corresponding position according to the phase, wherein the equivalent refractive index is positively correlated with the phase;
    确定多个所述等效折射率中的最大值和最小值,将所述最大值与 所述最小值之间的差值作为所述当前结构参数对应的等效折射率差值。Determine the maximum and minimum values of the multiple equivalent refractive indices, and compare the maximum value with The difference between the minimum values is used as the equivalent refractive index difference corresponding to the current structural parameters.
  12. 根据权利要求11所述的方法,其特征在于,所述确定所述当前结构参数对应的等效折射率差值,还包括:The method according to claim 11, characterized in that the determining the equivalent refractive index difference corresponding to the current structural parameter further comprises:
    确定所述当前结构参数所对应的超表面的最大半径,以a作为步长、从零至所述最大半径中选取多个半径值,不同的半径值表示不同位置。The maximum radius of the hypersurface corresponding to the current structural parameters is determined, and a plurality of radius values are selected from zero to the maximum radius with a as the step size, and different radius values represent different positions.
  13. 根据权利要求11所述的方法,其特征在于,所述等效折射率与所述相位之间的关系满足:
    The method according to claim 11, characterized in that the relationship between the equivalent refractive index and the phase satisfies:
    其中,F表示所述等效折射率;表示r位置处的相位;k表示波数,且λ表示波长;Hd表示r位置处的纳米结构的高度。Wherein, F represents the equivalent refractive index; represents the phase at position r; k represents the wave number, and λ represents the wavelength; Hd represents the height of the nanostructure at position r.
  14. 根据权利要求1所述的方法,其特征在于,所述确定初始的结构参数,包括:The method according to claim 1, characterized in that the determining of initial structural parameters comprises:
    确定原始结构参数;Determine the original structural parameters;
    确定所述原始结构参数所对应的超表面的原始性能参数,并确定原始像质评估因子;所述原始像质评估因子包括所述原始性能参数与期望性能参数之间的差异;Determining original performance parameters of the metasurface corresponding to the original structural parameters, and determining an original image quality evaluation factor; the original image quality evaluation factor includes the difference between the original performance parameters and the expected performance parameters;
    在所述原始像质评估因子小于或等于第二限制值的情况下,将所述原始结构参数作为所述初始的结构参数。When the original image quality evaluation factor is less than or equal to the second limit value, the original structural parameter is used as the initial structural parameter.
  15. 根据权利要求14所述的方法,其特征在于,所述原始像质评估因子满足:
    The method according to claim 14, characterized in that the original image quality assessment factor satisfies:
    其中,N表示所述原始像质评估因子;Vm表示第m种所述原始性能参数;Tm表示第m种所述期望性能参数;wm表示第m种所述原始性能参数与所述期望性能参数之间的差异对应的权重。Among them, N represents the original image quality evaluation factor; Vm represents the mth original performance parameter; Tm represents the mth expected performance parameter; wm represents the weight corresponding to the difference between the mth original performance parameter and the expected performance parameter.
  16. 根据权利要求13所述的方法,其特征在于,所述当前结构参数所对应的超表面在多个位置处的相位满足以下公式之一:





    The method according to claim 13, characterized in that the phase of the metasurface corresponding to the current structural parameters at multiple positions satisfies one of the following formulas:





    其中,r表示所述位置到中心的距离;(x,y)表示所述位置的坐标;f表示焦距;ai、bi、aij和bij均表示所述各阶的相位系数。Wherein, r represents the distance from the position to the center; (x, y) represents the coordinates of the position; f represents the focal length; a i , b i , a ij and b ij all represent the phase coefficients of the respective orders.
  17. 根据权利要求13所述的方法,其特征在于,所述结构参数还包括:所述最大半径和所述纳米结构的高度。The method according to claim 13, characterized in that the structural parameters also include: the maximum radius and the height of the nanostructure.
  18. 一种超表面相位系数优化装置,其特征在于,包括:确定模块和优化模块;A metasurface phase coefficient optimization device, characterized by comprising: a determination module and an optimization module;
    所述确定模块用于确定初始的结构参数,所述结构参数用于限定超表面的结构特征,且所述结构参数至少包括:各阶的相位系数;The determination module is used to determine initial structural parameters, and the structural parameters are used to define the structural characteristics of the metasurface, and the structural parameters at least include: phase coefficients of each order;
    所述优化模块用于将所述初始的结构参数作为当前结构参数的初始值,以优化所述当前结构参数对应的等效折射率差值的方式对所述当前结构参数进行优化,确定优化后的目标结构参数;所述等效折射率差值为与相应结构参数所对应的超表面中等效折射率的最大值与最小值之间的差值,且所述目标结构参数对应的所述等效折射率差值小于满足工艺要求的合理常数。The optimization module is used to use the initial structural parameters as the initial values of the current structural parameters, optimize the current structural parameters in a manner of optimizing the equivalent refractive index difference corresponding to the current structural parameters, and determine the optimized target structural parameters; the equivalent refractive index difference is the difference between the maximum and minimum values of the equivalent refractive index in the metasurface corresponding to the corresponding structural parameters, and the equivalent refractive index difference corresponding to the target structural parameters is less than a reasonable constant that meets the process requirements.
  19. 一种电子设备,包括总线、收发器、存储器、处理器及存储在所述存储器上并可在所述处理器上运行的计算机程序,所述收发器、所述存储器和所述处理器通过所述总线相连,其特征在于,所述计算 机程序被所述处理器执行时实现如权利要求1至17中任一项所述的超表面相位系数优化方法中的步骤。An electronic device, comprising a bus, a transceiver, a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the transceiver, the memory, and the processor are connected via the bus, and wherein the computer program When the machine program is executed by the processor, the steps in the metasurface phase coefficient optimization method as described in any one of claims 1 to 17 are implemented.
  20. 一种计算机可读存储介质,其上存储有计算机程序,其特征在于,所述计算机程序被处理器执行时实现如权利要求1至17中任一项所述的超表面相位系数优化方法中的步骤。 A computer-readable storage medium having a computer program stored thereon, characterized in that when the computer program is executed by a processor, the steps in the metasurface phase coefficient optimization method as described in any one of claims 1 to 17 are implemented.
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