WO2024061142A1

WO2024061142A1 - Inertial measurement device and apparatus

Info

Publication number: WO2024061142A1
Application number: PCT/CN2023/119288
Authority: WO
Inventors: 吴雾; 黄晓群; 李楠; 赖远庭
Original assignee: 广州导远电子科技有限公司
Priority date: 2022-09-22
Filing date: 2023-09-18
Publication date: 2024-03-28
Also published as: CN218411208U

Abstract

An inertial measurement device and apparatus, which relate to the field of inertial measurement. The inertial measurement device comprises a circuit board (10) and an inertial measurement unit (20). The circuit board (10) comprises an isolation area (100) and a main board area (110), which is arranged around the isolation area (100), and the circuit board (10) is provided with at least two isolation trenches (200) in a penetrating manner, wherein a connection area (120) for connecting the isolation area (100) and the main board area (110) is formed between two adjacent isolation trenches (200), and the isolation area (100) and the main board area (110) are separated by means of the isolation trenches (200); and the inertial measurement unit (20) is arranged in the isolation area (100), and is electrically connected to the main board area (110) by means of the connection area (120). The influence of the stress effect of the circuit board (10) itself on the inertial measurement unit (20) can be mitigated by means of the isolation trenches (200), thereby reducing deviations in measurement results of a gyroscope and an accelerometer of the inertial measurement unit (20) and thus improving the positioning precision.

Description

Inertial Measurement Units and Equipment

Cross-references to related applications

This patent claims priority from the Chinese patent application with application number 2022225229537 and titled "Inertial Measurement Devices and Equipment" submitted to the China Patent Office on September 22, 2022, the entire content of which is incorporated into this patent by reference.

Technical field

This patent relates to the field of inertial measurement, specifically an inertial measurement device and equipment.

Background technique

IMU (Inertial Measurement Unit) is a combination of a three-axis gyroscope and a three-axis accelerometer to measure the angular velocity and acceleration of an object in three-dimensional space, and use this to infer the object's posture. It has a very important application value in navigation. At present, IMU is often set on a circuit board for application, but due to the stress of the circuit board itself, the measurement results of the IMU's gyroscope and accelerometer will deviate more and more from the initial state over time, so there is a problem of poor positioning accuracy.

Utility model content

In order to overcome the above-mentioned shortcomings in the prior art, the purpose of this patent is to provide an inertial measurement device and equipment. The inertial measurement device and equipment described in this patent include:

A circuit board. The circuit board includes an isolation area and a mainboard area arranged around the isolation area. The circuit board is provided with at least two isolation grooves, and an isolation groove is formed between two adjacent isolation grooves to connect the isolation area. The connection area between the area and the mainboard area, the isolation area and the mainboard area are separated by the isolation groove; and,

An inertial measurement unit is provided in the isolation area and is electrically connected to the mainboard area through the connection area.

Further, in the above device, at least two escape grooves are provided through the circuit board, and the escape grooves are arranged in the isolation area and cover between two adjacent isolation grooves.

Further, in the above device, the first distance between the avoidance groove and two adjacent isolation grooves is 0.2 to 0.5 times the side length of the inertial measurement unit, and the minimum first distance is 1mm.

Further, in the above device, the length of the relief groove is 1.2 to 1.7 times the width of the connection area, and the width of the relief groove is greater than or equal to 0.5 mm.

Further, in the above device, the circuit board is provided with at least two spacing grooves, and the spacing grooves are disposed in the main board area and cover between two adjacent isolation grooves.

Further, in the above device, the second distance between the isolation groove and two adjacent isolation grooves is the 0.2 to 0.5 times the side length of the inertial measurement unit, and the second distance is at least 1 mm.

Further, in the above device, the length of the spacing groove is 1.2 to 1.7 times the width of the connection area, and the width of the spacing groove is greater than or equal to 0.5 mm.

Further, in the above device, the inertial measurement unit is a rectangle, including a first side, a second side, a third side and a fourth side that are consecutive in sequence, and the isolation grooves are distributed on the first side, all sides. on at least two of the second side, the third side and the fourth side.

Further, in the above device, the at least two isolation grooves include a first isolation groove and a second isolation groove that are arranged opposite to each other, wherein the first isolation groove includes a first main groove and a first extension groove and a second extension groove that are arranged at both ends of the first main groove, the first main groove corresponds to the first side, the first extension groove corresponds to the second side, and the second extension groove corresponds to the fourth side, and the second isolation groove includes a second main groove and three extension grooves and a fourth extension groove that are arranged at both ends of the second main groove, the second main groove corresponds to the third side, the third extension groove corresponds to the second side, and the fourth extension groove corresponds to the fourth side;

Wherein, the connection area is formed between the first extension groove and the third extension groove and between the second extension groove and the fourth extension groove.

Further, in the above device, the at least two isolation grooves include a third isolation groove and a fourth isolation groove arranged oppositely, wherein the third isolation groove includes a first connection groove and a second connection groove, and the The first connection groove is provided with the first side, the second connection groove is provided with the fourth side, the fourth isolation groove includes a third connection groove and a fourth connection groove, and the third connection groove is provided with On the second side, the fourth connecting groove is provided on the third side;

Wherein, the connection area is formed between the first connection groove and the third connection groove and between the second connection groove and the fourth connection groove.

Further, in the above device, the at least two isolation grooves include fifth isolation grooves and sixth isolation grooves arranged oppositely, wherein the fifth isolation groove includes a third body groove and a third body groove provided on the third body. The fifth extension groove and the sixth extension groove at both ends of the groove, and the fifth extension groove and the sixth extension groove are respectively connected to the third body groove through the first chamfer groove and the second chamfer groove, so The third main body groove corresponds to the first side, the fifth extension groove corresponds to the second side, the sixth extension groove corresponds to the fourth side, and the sixth isolation groove includes a fourth The main body groove and the seventh extension groove and the eighth extension groove provided at both ends of the fourth body groove, and the seventh extension groove and the eighth extension groove pass through the third chamfer groove and the fourth chamfer groove respectively. Connected to the fourth main body groove, the fourth main body groove corresponds to the third side, the seventh extension groove corresponds to the second side, and the eighth extension groove corresponds to the fourth side ;

Wherein, the connection area is formed between the fifth extension groove and the seventh extension groove and between the sixth extension groove and the eighth extension groove.

Further, in the above device, the at least two isolation grooves include an adjacent seventh isolation groove, an eighth isolation groove, a ninth isolation groove and a tenth isolation groove, wherein the seventh isolation groove includes a seventh isolation groove. Five connecting grooves and a sixth connecting groove, the fifth connecting groove corresponds to the first side, the sixth connecting groove corresponds to the fourth side, and the eighth isolation groove includes a seventh connecting groove and a seventh connecting groove. Eight connection slots, the seventh connection slot corresponds to the first side, the eighth connection slot corresponds to the second side, the ninth isolation slot includes a ninth connection slot and a tenth connection slot, so The ninth connection slot corresponds to the second side, the tenth connection slot corresponds to the third side, the tenth isolation slot includes an eleventh connection slot and a twelfth connection slot, the tenth isolation slot A connecting groove corresponds to the third side, and the twelfth connecting groove corresponds to the fourth side;

Wherein, between the fifth connecting groove and the seventh connecting groove, between the sixth connecting groove and the twelfth connecting groove, between the eighth connecting groove and the ninth connecting groove The connection area is formed between the tenth connection groove and the eleventh connection groove.

Furthermore, in the above device, the circuit board is also provided with a plurality of fixing positions, and the fixing positions are arranged in the main board area, a separation groove is provided between each of the fixing positions and the inertial measurement unit, and the separation groove surrounds the fixing position to form a semi-enclosed structure.

Further, in the above device, the width of the separation groove is greater than or equal to 0.5 mm. Further, in the above device, the width of the isolation groove is greater than or equal to 0.5 mm, and the third distance between the inertial measurement unit and two adjacent isolation grooves is 0.2 to 0.2 mm of the side length of the inertial measurement unit. 0.5 times, and the third distance is at least 1 mm; the width of the connection area is 0.2 to 0.3 times the width of the isolation area.

Further, in the above device, the thickness of the circuit board is 105% to 125% of the thickness of the standard circuit board.

Further, in the above device, the thickness of the internal copper foil of the circuit board is 80% to 95% of the standard internal copper foil thickness.

Further, in the above device, the circuit board is a Rogers board or a ceramic substrate.

This patent also provides an inertial measurement device, which includes the inertial measurement device described in any one of the preceding embodiments.

In the inertial measurement device and equipment provided by this patent, the circuit board in the inertial measurement device includes an isolation area and a mainboard area arranged around the isolation area. The circuit board is provided with at least two isolation slots throughout, and the two adjacent isolation slots are A connection area is formed between the isolation area and the mainboard area, and the isolation area and the mainboard area pass through the The isolation groove separates, and the inertial measurement unit is arranged in the isolation area and is electrically connected to the mainboard area through the connection area. The inertial measurement device configures at least two isolation grooves to form an isolation area and a mainboard area on the circuit board, and arranges the inertial measurement unit in the isolation area, thereby alleviating the stress of the circuit board itself on the inertial measurement unit through the isolation grooves. influence, reducing the deviation of the IMU's gyroscope and accelerometer measurement results, thereby improving positioning accuracy.

Description of drawings

In order to explain the technical solutions of the embodiments of this patent more clearly, the drawings required to be used in the embodiments will be briefly introduced below.

Figure 1 is a schematic structural diagram of an inertial measurement device provided by an embodiment of this patent;

Figure 2 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent;

Figure 3 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent;

Figure 4 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent;

Figure 5 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent;

Figure 6 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent;

Figure 7 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent;

Figure 8 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent;

Figure 9 is another structural schematic diagram of the inertial measurement device provided by the embodiment of this patent.

Icon: 10-circuit board; 100-isolation area; 110-mainboard area; 120-connection area; 130-fixed position; 20-inertial measurement unit; 21-first side; 22-second side; 23-third side ; 24-fourth side; 200-isolation groove; 211-first body groove; 212-first extension groove; 213-second extension groove; 221-second body groove; 222-third extension groove; 223-th Four extension slots; 231-the first connection slot; 232-the second connection slot; 241-the third connection slot; 242-the fourth connection slot; 251-the third main body slot; 252-the fifth extension slot; 253-the sixth Extension groove; 254-first chamfer groove; 255-second chamfer groove; 261-fourth main body groove; 262-seventh extension groove; 263-eighth extension groove; 264-third chamfer groove; 265- The fourth chamfering groove; 271-the fifth connection groove; 272-the sixth connection groove; 281-the seventh connection groove; 282-the eighth connection groove; 291-the ninth connection groove; 292-the tenth connection groove; 301- Eleventh connection slot; 302 - twelfth connection slot; 30 - data processing module; 40 - data transmission interface; 300 - avoidance slot; 400 - separation slot; 500 - separation slot.

Detailed ways

Next, the inertial measurement device provided by the embodiment of this patent is exemplarily introduced with reference to the accompanying drawings. Specifically, Figure 1 is a structural schematic diagram of the inertial measurement device provided by this embodiment of the patent. Please refer to Figure 1. The inertial measurement device includes Circuit board 10 and inertial measurement unit 20 .

Among them, the circuit board 10 includes an isolation area 100 and a main board area 110 arranged around the isolation area. The circuit board 10 is penetrated by at least two isolation grooves 200, and a connection area 120 connecting the isolation area 100 and the main board area 110 is formed between two adjacent isolation grooves. The isolation area 100 and the main board area 110 are separated by the isolation groove 200, and the inertial measurement unit 20 is arranged in the isolation area 100 and is electrically connected to the main board area 110 through the connection area 120.

Optionally, the inertial measurement device may further include a data processing module 30 and a data transmission interface 40 , and the data processing module 30 and the data transmission interface 40 are disposed in the mainboard area 110 .

The inertial measurement device provided by this patent includes an isolation area and a mainboard area arranged around the isolation area on its circuit board. The circuit board is provided with at least two isolation grooves, and a connection area connecting the isolation area and the mainboard area is formed between two adjacent isolation grooves. The isolation area and the mainboard area are separated by the isolation groove, and the inertial measurement unit is arranged in the isolation area and electrically connected to the mainboard area through the connection area. The inertial measurement device forms an isolation area and a mainboard area on the circuit board by setting at least two isolation grooves, and the inertial measurement unit is arranged in the isolation area, so that the stress of the circuit board itself is alleviated through the isolation groove. The influence on the inertial measurement unit is reduced, and the deviation of the measurement results of the gyroscope and accelerometer of the IMU is reduced, thereby improving the positioning accuracy.

Optionally, in order to further reduce the impact of the stress of the circuit board itself on the inertial measurement unit, at least two avoidance grooves or spacing grooves covering two adjacent isolation grooves can be provided on the circuit board.

Specifically, please refer to FIG. 2 . The circuit board 10 is also provided with at least two escape grooves 300 . The escape grooves 300 are disposed in the isolation area 100 and cover between two adjacent isolation trenches.

Optionally, the first distance between the avoidance groove 300 and the two adjacent isolation grooves 200 is D2, and the side length of the inertial measurement unit 20 is L1, then the first distance D2 is the side length of the inertial measurement unit 20. 0.2~0.5 times the length of L1, that is:
D2＝(0.2～0.5)L1

Optionally, in order to ensure the feasibility of the production process, the minimum distance of the first distance D2 is 1 mm, and the width of the air avoidance groove 300 is greater than or equal to 0.5 mm.

Optionally, the length of the escape groove 300 is H1 and the width of the connection area is D1. Then the length H1 of the escape groove is 1.2 to 1.7 times the width D1 of the connection area, that is:
H1＝(1.2～1.7)D1

In addition, please refer to FIG. 3 . The circuit board 10 may also be provided with at least two isolation grooves 400 . The isolation grooves 400 are disposed in the mainboard area 110 and cover between two adjacent isolation grooves.

Optionally, the second distance between the isolation groove 400 and the two adjacent isolation grooves 200 is D3, then the second distance The distance D2 is 0.2 to 0.5 times the side length L1 of the inertial measurement unit 20, that is:
D3＝(0.2～0.5)L1

Optionally, in order to ensure the feasibility of the production process, the minimum distance of the second distance D3 is 1 mm, and the width of the spacing groove 400 is greater than or equal to 0.5 mm.

Optionally, the length of the spacing groove 400 is H2, then the length H2 of the spacing groove 400 is 1.2 to 1.7 times the width D1 of the connection area, that is:
H2＝(1.2～1.7)D1

Understandably, the avoidance grooves and spacing grooves can further reduce the impact of the stress of the circuit board itself on the inertial measurement unit through the connection area, reduce the deviation of the IMU's gyroscope and accelerometer measurement results, and thereby improve the positioning accuracy.

Optionally, please refer to FIG. 4 . The inertial measurement unit 20 is rectangular and includes a continuous first side 21 , a second side 22 , a third side 23 and a fourth side 24 , and the isolation grooves are distributed on the first side. 21. On at least two of the second side 22, the third side 23 and the fourth side 24.

Optionally, the at least two isolation grooves may be two isolation grooves arranged oppositely. Specifically, in a possible implementation manner, please continue to refer to FIG. 4 , the at least two isolation trenches include a first isolation tank arranged oppositely. Isolation groove and second isolation groove, the first isolation groove includes a first body groove 211 and a first extension groove 212 and a second extension groove 213 provided at both ends of the first body groove 211, and the first body groove 211 corresponds to The first side 21 and the first extension groove 212 correspond to the second side 22; the second isolation groove includes a second main body groove 221 and a third extension groove 222 and a fourth extension provided at both ends of the second main body groove 221. The second main body groove 221 corresponds to the third side 23 , the third extension groove 222 corresponds to the second side 22 , and the fourth extension groove 223 corresponds to the fourth side 24 .

Obviously, a connection area can be formed between the first extension groove 212 and the third extension groove 222 , and a connection area can be formed between the second extension groove 213 and the fourth extension groove 223 . It can be understood that the width of the isolation area is the distance between the first body groove and the second body groove.

In another possible implementation manner, please refer to FIG. 5 , the at least two isolation grooves include a third isolation groove and a fourth isolation groove arranged oppositely, and the third isolation groove includes a first connection groove 231 and a second connection groove 231 . groove 232, and the first connection groove 231 corresponds to the first side 21, and the second connection groove 232 corresponds to the fourth side 24; the fourth isolation groove includes a third connection groove 241 and a fourth connection groove 242, and the The third connecting groove 241 corresponds to the second side 22 , and the fourth connecting groove 242 corresponds to the third side 23 .

Obviously, a connecting area can be formed between the first connecting groove 231 and the third connecting groove 241, and the second connecting groove 231 can form a connecting area. A connection area can be formed between the connecting groove 232 and the fourth connecting groove 242 .

In yet another possible implementation manner, see FIG. 6 , the at least two isolation grooves include a fifth isolation groove and a sixth isolation groove arranged oppositely. The fifth isolation groove includes a third body groove 251 and a third body groove 251 . The fifth extension groove 252 and the sixth extension groove 253 are at both ends of the three-body groove 251, and the fifth extension groove 252 and the sixth extension groove 253 are connected to the third body through the first chamfer groove 254 and the second chamfer groove 255 respectively. The third main body groove 251 corresponds to the first side 21, the fifth extension groove 252 corresponds to the second side 22, and the sixth extension groove 253 corresponds to the fourth side 24; the sixth isolation groove includes a The four main body grooves 261 and the seventh and eighth extension grooves 262 and 263 are provided at both ends of the fourth main body groove 261, and the seventh and eighth extension grooves 262 and 263 respectively pass through the third chamfer groove 264 and the fourth The chamfer groove 265 is connected to the fourth main body groove 261, the fourth main body groove 261 corresponds to the third side 23, the seventh extension groove pair 262 corresponds to the second side 22, and the eighth extension groove 263 corresponds to the fourth side. twenty four.

It can be understood that a connection area may be formed between the fifth extension groove 252 and the seventh extension groove 262 , and a connection area may be formed between the sixth extension groove 253 and the eighth extension groove 263 .

Optionally, the at least two isolation grooves can be four adjacent isolation grooves. Specifically, please refer to Figure 7. The at least two isolation grooves include a seventh isolation groove, an eighth isolation groove, a ninth isolation groove and a tenth isolation groove that are adjacently arranged. The seventh isolation groove includes a fifth connecting groove 271 and a sixth connecting groove 272, and the fifth connecting groove 271 corresponds to the first edge 21, and the sixth connecting groove 272 corresponds to the fourth edge 24; the eighth isolation groove includes a seventh connecting groove 281 and an eighth connecting groove 282, and the seventh connecting groove 281 corresponds to the first edge 21, and the eighth connecting groove 282 corresponds to the second edge 22; the ninth isolation groove includes a ninth connecting groove 291 and a tenth connecting groove 292, and the ninth connecting groove 291 corresponds to the second edge 22, and the tenth connecting groove 292 corresponds to the third edge 23; the tenth isolation groove includes an eleventh connecting groove 301 and a twelfth connecting groove 302, and the eleventh connecting groove 301 corresponds to the third edge 23, and the twelfth connecting groove 302 corresponds to the fourth edge 24.

It can be understood that a communication area may be formed between the fifth connection groove 271 and the seventh connection groove 281, a communication area may be formed between the sixth connection groove 272 and the twelfth connection groove 302, and the eighth connection groove 271 may form a communication area with the twelfth connection groove 302. A communication area may be formed between the groove 282 and the ninth connection groove 291 , and a communication area may also be formed between the tenth connection groove 292 and the eleventh connection groove 301 .

Optionally, since a fixing bit is also provided in the main body area of the circuit board for fixing the circuit board, in order to reduce the impact of the stress on the inertial measurement unit caused by the deformation of the circuit board caused by the fixing bit, Installation slots can be provided at fixed locations. Specifically, please refer to Figure 8. The circuit board is also provided with a plurality of fixed bits 130, and the fixed bits are arranged in the main board area. A separation groove 500 is also provided between each fixed bit 130 and the inertial measurement unit. And the dividing groove 500 forms a semi-encircling structure around the fixing position.

Optionally, the fixing position may be a screw hole, and the separation groove may be a semi-enclosed structure in a semicircular shape surrounding the screw hole.

Optionally, in order to ensure the feasibility of the production process, the width of the separation groove 500 is greater than or equal to 0.5 mm.

Optionally, in order to ensure the stiffness of the isolation area, the third distance between the inertial measurement unit and the two adjacent isolation grooves and the width of the connection area also need to be properly set.

Taking at least two isolation grooves including a first isolation groove and a second isolation groove arranged oppositely as an example, please refer to FIG. 9 , the third distance between the inertial measurement unit 20 and the two adjacent isolation grooves 200 is D4, In order to ensure the stiffness of the isolation area, the third distance D4 is 0.2 to 0.5 times the side length L1 of the inertial measurement unit, that is:

D4＝(0.2～0.5)L1

Optionally, in order to ensure the feasibility of the production process, the third distance D4 is at least 1 mm, and the width of the isolation groove 200 is greater than or equal to 0.5 mm.

Optionally, the width of the isolation area is L2, then the width D1 of the connection area is 0.2 to 0.3 times the width L2 of the isolation area, that is:
D1＝(0.2～0.3)L1

Optionally, considering the influence of factors such as the material and thickness of the circuit board itself on stress transmission, the material and thickness of the circuit board can also be set accordingly to reduce the impact of the stress of the circuit board itself on the inertial measurement unit.

On this basis, the thickness of the circuit board can also be increased by 5% to 25% on the basis of the standard circuit board thickness, that is, the thickness of the circuit board can be 105% to 125% of the standard circuit board thickness; or the circuit board The thickness of the internal copper foil can be reduced by 5% to 20% based on the standard internal copper foil thickness, that is, the thickness of the internal copper foil of the circuit board is 80% to 95% of the standard internal copper foil thickness.

In addition, since the stress of the Rogers board is reduced by 10% to 20% compared to the FR4 material, and the stress of the ceramic substrate is reduced by 15% to 25% compared to the FR4 material, the circuit board can be a Rogers board and a ceramic substrate.

Optionally, this patent embodiment also provides an inertial measurement device, which includes the above-mentioned inertial measurement device.

The above are only preferred embodiments of this patent and are not intended to limit this patent. For those skilled in the art, this patent may have various modifications and changes. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of this patent shall be included in the protection scope of this patent.

Industrial applicability:

This patent provides an inertial measurement device and equipment that uses isolation grooves to alleviate the stress of the circuit board itself on the inertia. The influence of the linear measurement unit can reduce the deviation of the IMU's gyroscope and accelerometer measurement results, thereby improving positioning accuracy.

Claims

An inertial measurement device, characterized in that the inertial measurement device comprises:

A circuit board. The circuit board includes an isolation area and a mainboard area arranged around the isolation area. The circuit board is provided with at least two isolation grooves, and an isolation groove is formed between two adjacent isolation grooves to connect the isolation area. The connection area between the area and the mainboard area, the isolation area and the mainboard area are separated by the isolation groove; and,

An inertial measurement unit is provided in the isolation area and is electrically connected to the mainboard area through the connection area.
The inertial measurement device according to claim 1, wherein the circuit board is provided with at least two escape grooves, the escape grooves are disposed in the isolation area and cover two adjacent ones. between isolation tanks.
The inertial measurement device according to claim 2 is characterized in that a first distance between the air avoidance groove and two adjacent isolation grooves is 0.2 to 0.5 times the side length of the inertial measurement unit, and the first distance is at least 1 mm.
The inertial measurement device according to claim 2, wherein the length of the relief groove is 1.2 to 1.7 times the width of the connection area, and the width of the relief groove is greater than or equal to 0.5 mm.
The inertial measurement device according to claim 1, wherein the circuit board is provided with at least two spacing grooves, and the spacing grooves are disposed in the main board area and cover two adjacent spacing grooves. between.
The inertial measurement device according to claim 5, wherein the second distance between the isolation groove and two adjacent isolation grooves is 0.2 to 0.5 times the side length of the inertial measurement unit, and the The minimum distance mentioned above is 1mm.
The inertial measurement device according to claim 5, wherein the length of the spacing groove is 1.2 to 1.7 times the width of the connection area, and the width of the spacing groove is greater than or equal to 0.5 mm.
The inertial measurement device according to claim 1, wherein the inertial measurement unit is a rectangle, including a first side, a second side, a third side and a fourth side that are sequentially continuous, and the isolation grooves are distributed in on at least two of the first side, the second side, the third side and the fourth side.
The inertial measurement device according to claim 8, wherein the at least two isolation grooves include a first isolation groove and a second isolation groove arranged oppositely, wherein the first isolation groove includes a first body groove and a second isolation groove. A first extension slot and a second extension slot are provided at both ends of the first main body slot, the first main body slot corresponds to the first side, the first extension slot corresponds to the second side, and the The second extension groove corresponds to the fourth side, and the second isolation groove includes a second main body groove and a third extension groove and a fourth extension groove provided at both ends of the second main body groove. The two main body grooves correspond to the third side, the third extension groove corresponds to the second side, and the fourth extension groove corresponds to the fourth side;

Wherein, the connection area is formed between the first extension groove and the third extension groove and between the second extension groove and the fourth extension groove.
The inertial measurement device according to claim 8, wherein the at least two isolation grooves include a third isolation groove and a fourth isolation groove arranged oppositely, wherein the third isolation groove includes a first connection groove and a fourth isolation groove. a second connection groove, the first connection groove corresponds to the first side, the second connection groove corresponds to the fourth side, and the fourth isolation groove includes a third connection groove and a fourth connection groove, The third connecting groove corresponds to the second side, and the fourth connecting groove corresponds to the third side;

Wherein, the connection area is formed between the first connection groove and the third connection groove and between the second connection groove and the fourth connection groove.
The inertial measurement device according to claim 8, wherein the at least two isolation grooves include fifth isolation grooves and sixth isolation grooves arranged oppositely, wherein the fifth isolation groove includes a third body groove and a sixth isolation groove. Fifth extension grooves and sixth extension grooves are provided at both ends of the third main body groove, and the fifth extension groove and the sixth extension groove are respectively connected with the first chamfer groove and the second chamfer groove. A third main body slot is connected, the third main body slot corresponds to the first side, the fifth extension slot corresponds to the second side, the sixth extension slot corresponds to the fourth side, and the The sixth isolation groove includes a fourth main body groove and seventh extension grooves and eighth extension grooves provided at both ends of the fourth main body groove, and the seventh extension groove and the eighth extension groove are respectively passed through a third chamfer. The groove and the fourth chamfer groove are connected to the fourth body groove, the fourth body groove corresponds to the third side, the seventh extension groove corresponds to the second side, and the eighth extension groove Corresponding to said fourth side;

Wherein, the connection area is formed between the fifth extension groove and the seventh extension groove and between the sixth extension groove and the eighth extension groove.
The inertial measurement device according to claim 8, wherein the at least two isolation grooves include adjacently arranged seventh isolation grooves, eighth isolation grooves, ninth isolation grooves and tenth isolation grooves, wherein the The seventh isolation groove includes a fifth connection groove and a sixth connection groove. The fifth connection groove corresponds to the first side, the sixth connection groove corresponds to the fourth side, and the eighth isolation groove It includes a seventh connection groove and an eighth connection groove, the seventh connection groove corresponds to the first side, the eighth connection groove corresponds to the second side, and the ninth isolation groove includes a ninth connection groove. and a tenth connection slot, the ninth connection slot corresponds to the second side, the tenth connection slot corresponds to the third side, the tenth isolation slot includes an eleventh connection slot and a twelfth connection slot connection slot, the eleventh connection slot corresponds to On the third side, the twelfth connecting groove corresponds to the fourth side;

Wherein, between the fifth connecting groove and the seventh connecting groove, between the sixth connecting groove and the twelfth connecting groove, between the eighth connecting groove and the ninth connecting groove The connection area is formed between the tenth connection groove and the eleventh connection groove.
The inertial measurement device according to claim 1, wherein the circuit board is further provided with a plurality of fixed positions, and the fixed positions are provided in the main board area, and each fixed position is connected to the inertial measurement device. Separation grooves are provided between the units, and the separation grooves form a semi-encircling structure around the fixed position.
The inertial measurement device according to claim 13, wherein the width of the separation groove is greater than or equal to 0.5 mm.
The inertial measurement device according to claim 1, wherein the width of the isolation groove is greater than or equal to 0.5 mm, and the third distance between the inertial measurement unit and two adjacent isolation grooves is the inertial measurement unit. 0.2 to 0.5 times the side length of the unit, and the third distance is at least 1 mm; the width of the connection area is 0.2 to 0.3 times the width of the isolation area.
The inertial measurement device according to claim 1, wherein the thickness of the circuit board is 105% to 125% of the thickness of the standard circuit board.
The inertial measurement device according to claim 1, wherein the thickness of the internal copper foil of the circuit board is 80% to 95% of the standard internal copper foil thickness.
The inertial measurement device according to claim 1, wherein the circuit board is a Rogers board or a ceramic substrate.
An inertial measurement device, characterized in that the inertial measurement device includes the inertial measurement device according to any one of claims 1-18.