WO2024046506A1 - 电润湿显示器件用的下基板、电润湿显示器件及制备方法 - Google Patents

电润湿显示器件用的下基板、电润湿显示器件及制备方法 Download PDF

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WO2024046506A1
WO2024046506A1 PCT/CN2023/125944 CN2023125944W WO2024046506A1 WO 2024046506 A1 WO2024046506 A1 WO 2024046506A1 CN 2023125944 W CN2023125944 W CN 2023125944W WO 2024046506 A1 WO2024046506 A1 WO 2024046506A1
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pixel
display device
electrode
electrowetting display
insulating layer
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PCT/CN2023/125944
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English (en)
French (fr)
Inventor
周国富
钱镕真
蒋洪伟
陈雯雯
郭媛媛
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华南师范大学
深圳市国华光电科技有限公司
深圳市国华光电研究院
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Publication of WO2024046506A1 publication Critical patent/WO2024046506A1/zh

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting

Definitions

  • the invention relates to the technical field of electrowetting display devices, and in particular to a lower substrate for an electrowetting display device, an electrowetting display device and a preparation method.
  • Electrowetting refers to the phenomenon of changing the wettability of droplets on the substrate by changing the voltage between the droplets and the insulating substrate, that is, changing the contact angle, causing the droplets to deform and shift.
  • Wetting is the process in which one fluid is displaced from a solid surface to another fluid.
  • the contact angle of the liquid on the solid surface is less than 90°, it is in a wetting state, and when it is greater than 90°, it is in a non-wetting state.
  • the size of the contact angle determines Wetting properties.
  • the electrowetting display device changes the wetting properties of the liquid on the solid surface by applying a voltage between the droplet and the insulating substrate, thereby deforming the droplet and controlling its shrinkage or spreading, causing each pixel grid 410 to generate A certain display method ultimately achieves the overall effect of some specific patterns.
  • the basic structure of an electrowetting display device is an upper and lower substrate, a pixel wall 400, and a filling solution.
  • the filling solution includes a polar electrolyte solution and a non-polar liquid 600 that are immiscible with each other, and is filled in the sealed cavity formed by the upper and lower substrates and the pixel wall 400.
  • the upper substrate 800 is mainly composed of the lower support plate 100 and the second electrode
  • the lower substrate is mainly composed of the lower support plate 100, the first electrode 200, the hydrophobic insulating layer 300 and the pixel wall 400.
  • the sealed cavity between the upper and lower substrates is filled with non-polar liquid 600 and flowing polar liquid 700 above the pixel wall 400 .
  • the polar liquid 700 communicates with the second electrode.
  • the wettability of the polar liquid 700 changes on the surface of the hydrophobic insulating layer 300, from the original hydrophobic state to The hydrophilic state causes the polar liquid 700 to wet the surface of the hydrophobic insulating layer 300, and the non-polar liquid 600 in each pixel grid 410 of the pixel wall 400 is squeezed to a corner, so that the display device is in an open state.
  • the polar liquid 700 remains in a hydrophobic state
  • the non-polar liquid 600 is in a spreading state
  • the display device is in a closed state.
  • Each pixel grid 410 in the pixel wall 400 contains a polar liquid 700 and a non-polar liquid 600.
  • the non-polar liquid 600 is ink.
  • the rupture of the oil film in the pixel grid 410 is the beginning of the display of the electrowetting display device. After the oil film ruptures, the polar liquid 700, the non-polar liquid 600 (ie, the ink) and the hydrophobic insulating layer 300 will form a three-dimensional contact interface. contact line. Under the external conditions of applied voltage, due to the action of the electric field, the ink changes from the original spreading state to the contracted state in the pixel grid 410.
  • the difference enables the electrowetting display device to achieve pixel turn-on and grayscale effects in an optical sense.
  • the position of the oil film rupture of the display device and the direction of ink movement should be controlled.
  • the currently used method mainly uses creating a conductive layer cavity 210 (called ITO notch) in a corner of the driving electrode layer of each pixel grid 410.
  • ITO notch a conductive layer cavity 210
  • the local uneven distribution of the applied electric field will cause the ink movement to shrink to the corners of the pixel grid 410, where the ITO notch is located.
  • the oil film rupture occurs preferentially at the thinnest part of the ink, so the lowest voltage at which the oil film ruptures depends on the thinnest thickness of the ink.
  • the function of the ITO notch is to control the final position of the ink shrinkage, but it cannot effectively control the movement direction of the ink after the oil film ruptures.
  • the overall display effect will be messy as shown in Figure 3, and the expected effect cannot be achieved.
  • the accumulation of ink in adjacent corners will increase the risk of wall climbing.
  • the present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a lower substrate for an electrowetting display device, which can control the ink breakage and movement direction.
  • a second aspect of the present invention provides an electrowetting display device.
  • a third aspect of the present invention provides an electrowetting display device.
  • the first electrode is arranged on the supporting surface
  • a hydrophobic insulating layer, the hydrophobic insulating layer is provided on the surface of the first electrode;
  • Pixel wall the pixel wall is arranged on the hydrophobic insulating layer, the pixel wall is provided with a plurality of pixel grids, each of the pixel grids is provided with a pinning structure, the pinning structure is arranged on the pixel On the adjacent side wall of one corner of the grid, the pinning structures in all the pixel grids are arranged at the same position;
  • a step structure is provided in each pixel grid.
  • the step structure is arranged at the other corner of the pixel grid relative to the pinning structure.
  • the step structure is in contact with the corresponding adjacent side wall. combine.
  • a conductive layer cavity is provided in an area surrounded by the pixel grid, the conductive layer cavity is provided corresponding to the pinning structure, and the conductive layer cavity is provided on the first electrode.
  • the pinning structure is in a zigzag shape.
  • the zigzag tooth shape is one of square protrusions, triangular protrusions, and arc-shaped protrusions at regular intervals and continuous, or the square protrusions, triangular protrusions, and arc-shaped protrusions are A mixture of shaped bumps.
  • An electrowetting display device includes the lower substrate for the electrowetting display device described in the above embodiment, and
  • Non-polar liquid the non-polar liquid is provided in each pixel grid
  • Polar liquid the polar liquid is provided in each pixel grid
  • the upper substrate includes an upper support plate and a second electrode.
  • the upper support plate is provided with a capping surface.
  • the capping surface is capped on the pixel wall to seal the non-polar liquid and polar liquid on the pixel wall.
  • the second electrode is arranged on the cover surface, and the second electrode is in communication with the polar liquid.
  • the S1 includes the following steps:
  • the S2 includes the following steps:
  • the S3 includes the following steps:
  • the second mask is provided with pixel holes that match the pixel grid, and the side walls of the pixel holes are provided with pins that are
  • the structurally adapted sawtooth structure enables the pinning structure to be generated at the corner of each pixel grid in the later stage;
  • a conductive layer cavity is provided on the first electrode, and each conductive layer cavity is correspondingly arranged at a corner of each pixel grid in the later stage, and the hydrophobic insulating layer covers the conductive layer. On the layer of holes.
  • the lower substrate for an electrowetting display device has at least the following beneficial effects: the present invention uses capillary phenomena to transform the pixel grid on the basis of the conventional pixel grid.
  • each pixel grid has a pinning structure.
  • the pinning structure can tightly lock polar liquids through capillary force.
  • the pinning structure cooperates with the step structure to control the breakage and movement direction of the ink. This allows the ink to move in a unified direction after rupture, thereby making the display effect of the electrowetting display device uniform. At the same time, it can avoid the ink in adjacent pixels from gathering together and prevent the risk of ink jumping over the wall.
  • Figure 1 is a cross-sectional view of a conventional electrowetting display
  • Figure 2 is a pixel wall structure diagram of a conventional electrowetting display
  • Figure 3 shows the effect of messy ink in a conventional electrowetting display
  • Figure 4 is a schematic cross-sectional view of an electrowetting display device according to an embodiment of the present invention.
  • Figure 5 is a schematic structural diagram of a pixel grid according to the first embodiment of the present invention.
  • Figure 6 is a schematic structural diagram of a pixel grid according to the second embodiment of the present invention.
  • Figure 7 is a schematic structural diagram of a pixel grid according to the third embodiment of the present invention.
  • Figure 8 is a schematic structural diagram of a pixel grid according to the fourth embodiment of the present invention.
  • Figure 9 is a diagram showing the effect of the pinning structure on ink in a pixel grid according to an embodiment of the present invention.
  • Figure 10 is a schematic top view and a cross-sectional view of the first electrode arranged on the lower support plate according to an embodiment of the present invention.
  • Figure 11 is a schematic structural diagram of a first mask according to an embodiment of the present invention.
  • Figure 12 is a schematic structural diagram of a second mask according to an embodiment of the present invention.
  • Figure 13 is a schematic diagram of the manufacturing process of the step structure according to an embodiment of the present invention.
  • Figure 14 is a schematic top view and a cross-sectional view of a platform-containing layer according to an embodiment of the present invention.
  • Figure 15 is a schematic top view and a cross-sectional view of a pixel-containing wall according to an embodiment of the present invention.
  • Figure 16 is a flow chart of lamination and filling of an electrowetting display device according to an embodiment of the present invention.
  • the present invention discloses a lower substrate for an electrowetting display device, including:
  • Lower support plate 100 the upper surface of the lower support plate 100 is provided with a support surface
  • the first electrode 200 is provided on the supporting surface
  • Hydrophobic insulating layer 300 the hydrophobic insulating layer 300 is provided on the surface of the first electrode 200;
  • Pixel wall 400 is provided on the hydrophobic insulating layer 300.
  • the pixel wall 400 is provided with a number of pixel grids 410, each of which is
  • Each pixel grid 410 is provided with a pinning structure 411.
  • the pinning structure 411 is arranged on an adjacent side wall of a corner of the pixel grid 410.
  • the pinning structures 411 in all pixel grids 410 are arranged at the same position;
  • the step structure 500 is provided in each pixel grid 410.
  • the step structure 500 is arranged at the other corner of the pixel grid 410 relative to the pinning structure 411.
  • the step structure 500 is attached to the corresponding adjacent side wall.
  • Capillary force is caused by the inner meniscus at the three-phase interface, and its direction of action always points to the concave surface of the meniscus, and capillary action is the attraction of the liquid surface to the solid surface.
  • the liquid surface is similar to a stretched rubber membrane. When the liquid surface is curved, it will tend to be flat, so the concave surface exerts a pulling force on the liquid below, and the convex surface exerts pressure on the liquid below.
  • the size of the capillary force is proportional to the curvature of the meniscus, that is, the greater the curvature, the greater the capillary force, and the smaller the curvature, the smaller the capillary force.
  • the present invention uses the capillary phenomenon to transform the pixel grid 410 based on the conventional pixel grid 410.
  • each pixel grid 410 pattern has a pinning structure 411 as shown in Figure 15.
  • the pinning structure 411 can tightly lock the polar liquid 700 through the action of capillary force.
  • the polar liquid 700 is specifically ink.
  • the pinning structure 411 cooperates with the step structure 500 to make the ink breakage and movement direction controllable. Specifically, the lower layer of ink first breaks from the step structure 500. After the ink breaks, due to the capillary force of the pinning structure 411, the ink continuously flows to the pinning structure 411, thereby achieving the purpose of controlling the movement direction of the ink.
  • the ink After the ink is broken, it can move in a unified direction, so that the display effect of the electrowetting display device is uniform, and at the same time, the ink in the adjacent pixel grid 410 can be prevented from gathering together, thereby preventing the risk of the ink jumping over the wall.
  • the step structure 500 is a triangular plate structure or a square structure to ensure that the step structure 500 fits the corresponding adjacent side walls. If the step structure 500 does not fit the corresponding adjacent side walls, a gap will appear between the step structure 500 and the side walls of the pixel grid 410, and finally a closed space will appear, eventually causing part of the ink to remain in the closed space, affecting Display effect of electrowetting display devices.
  • the pinning structure 411 has a zigzag structure, and the specific form of the zigzag is not limited, and any one with a pinning effect can be used. It can be one of fixed-spaced and continuous square protrusions, triangular protrusions, and arc-shaped protrusions, or a mixture of square protrusions, triangular protrusions, arc-shaped protrusions, and other types.
  • the structure of FIG. 5 is preferably introduced as the pinning structure 411 in the present invention.
  • a conductive layer cavity 210 is provided in the area surrounded by the pixel grid 410 .
  • the conductive layer cavity 210 is provided corresponding to the pinning structure 411 .
  • the conductive layer cavity 210 is provided on the first electrode 200 .
  • the design of the conductive layer cavity 210 enables the ink in the pixel grid 410 to eventually move to the position where the conductive layer cavity 210 is located, but the conductive layer cavity 210 cannot control the path through which the ink moves to the conductive layer.
  • the location of the hole 210 Through the conductive layer cavity 210 and the pinning structure 411, all pixel grids 410 can be After the ink in the ink is broken, it can move in a uniform direction toward the location of the pinning structure 411.
  • the invention also discloses an electrowetting display device, including the lower substrate for the electrowetting display device of the above embodiment, and
  • Non-polar liquid 600 is provided in each pixel grid 410;
  • Polar liquid 700 is provided in each pixel grid 410;
  • the upper substrate 800 includes an upper support plate 810 and a second electrode 820.
  • the upper support plate 810 is provided with a capping surface.
  • the capping surface is capped on the pixel wall 400 to seal the non-polar liquid 600 and the polar liquid 700 in the pixel.
  • the second electrode 820 is disposed on the cover surface, and the second electrode is in communication with the polar liquid 700.
  • the electrowetting display device adopts all the technical solutions of the lower substrate of the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described again here.
  • the present invention also discloses a method for preparing an electrowetting display device, which is used to prepare the electrowetting display device of the above embodiment:
  • step protrusions 910 Use photoresist to generate several step protrusions 910 on the first electrode 200.
  • Each step protrusion 910 is correspondingly set at the corner of each pixel grid 410 in the later stage; by setting the step protrusions 910, the hydrophobic layer is laid in the later stage.
  • the insulating layer 300 is applied, the step protrusion 910 will be covered, thereby generating the step structure 500 on the step protrusion 910 .
  • S3 Production of the pixel wall 400. Use photoresist to make the pixel wall 400 on the hydrophobic insulating layer 300. There is a step structure 500 in each pixel grid 410 of the pixel wall 400, and pinning is generated in each pixel grid 410. Structure 411;
  • S1 includes the following steps:
  • the spin-coating speed is 1100rad/s, the time is 65s, and the thickness is about 1-2um;
  • S2 includes the following steps:
  • S3 includes the following steps:
  • the second mask 1100 shown in FIG. 12 After cooling, use the second mask 1100 shown in FIG. 12 for exposure processing, so that a pinned structure 411 is generated at the corner of each pixel grid 410 in the later stage; the second mask 1100 is provided with a structure suitable for the pixel grid 410
  • the pixel hole 1110 is equipped with a zigzag structure adapted to the pinning structure 411 on the side wall of the pixel hole 1110. After exposure processing, a pixel grid 410 will be formed in the photoresist, and pinning will be formed in the pixel grid 410. Structure 411;
  • a conductive layer cavity 210 is provided on the first electrode 200 .
  • Each conductive layer cavity 210 is correspondingly arranged at the corner of each pixel grid 410 in the later stage.
  • the hydrophobic insulating layer 300 covers the conductive layer cavity 210 .
  • a hydrophobic insulating layer 300 is formed. This hydrophobic insulating layer 730 will cover all the conductive layer cavities 210 and the step protrusions 910 .

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Abstract

一种电润湿显示器件用的下基板、电润湿显示器件及制备方法,涉及电润湿显示器件的生产技术领域。在常规像素格的基础上,运用毛细现象对像素格进行改造。通过对像素墙(400)进行设计,使得每一像素格(410)具有钉扎结构(411)。钉扎结构(411)可以通过毛细力的作用紧紧的锁住极性液体(700)。钉扎结构(411)跟台阶结构(500)配合,使得油墨的破裂和运动方向可控。使油墨在破裂以后,能够以统一的方向移动,从而使电润湿显示器件的显示效果整齐划一,同时可以避免相邻像素格(410)内的油墨聚集在一起,防止了油墨翻墙的风险。

Description

电润湿显示器件用的下基板、电润湿显示器件及制备方法 技术领域
本发明涉及电润湿显示器件技术领域,特别涉及一种电润湿显示器件用的下基板、电润湿显示器件及制备方法。
背景技术
电润湿(Electrowetting,EW)是指通过改变液滴与绝缘基板之间电压,来改变液滴在基板上的润湿性,即改变接触角,使液滴发生形变、位移的现象。
润湿作用是一种流体从固体表面置换为另一种流体的过程,液体在固体表面的接触角小于90°时处于润湿状态,大于90°处于不润湿状态,而接触角的大小决定了润湿性能。电润湿显示器件则是通过在液滴与绝缘基板之间施加电压来改变液体在固体表面的润湿性能,从而使得液滴发生形变,控制其收缩或铺展,则使得每一像素格410产生一定的显示方式,最终达到一些特定图案的整体效果。
如图1所示,电润湿显示器件的基本结构为上、下基板、像素墙400,填充溶液。而填充溶液包括互不相溶的极性电解质溶液和非极性液体600,填充于上下基板与像素墙400所构成的密封腔体中。上基板800主要由下支撑板100与第二电极构成,下基板主要由下支撑板100、第一电极200、疏水绝缘层300与像素墙400构成。上、下基板间的密封腔于像素墙400之上填充有非极性液体600与流动的极性液体700。极性液体700与第二电极相通,当在第一电极200与第二电极之间加压时,极性液体700的润湿性在疏水绝缘层300表面发生改变,由原来的疏水状态变为亲水状态,从而使得极性液体700润湿于疏水绝缘层300表面,而像素墙400的每一像素格410中的非极性液体600则被挤至一角,使显示器件处于打开状态。反之,在第一电极200与第二电极未加压状态时,极性液体700则保持疏水状态,非极性液体600处于铺展状态,则显示器件处于关闭状态。
现有电润湿显示器件结构无法100%控制油墨运动一致性。像素墙400中的每一格像素格410都包含着极性液体700和非极性液体600,一般非极性液体600为油墨。而像素格410中油膜的破裂是电润湿显示器件显示的开始,油膜在破裂之后则会使得极性液体700、非极性液体600(即油墨)和疏水绝缘层300三者接触界面形成三相接触线。在施加电压的外界条件下,由于电场作用,使得油墨在像素格410中由原先的铺展状态转向收缩状态,前后的 差异使得在电润湿显示器件在光学意义上实现像素的开启和灰度的效果。为了获得良好的显示效果,则应当对显示器件的油膜破裂的位置以及油墨运动的方向进行控制。如图2所示,目前所使用的方法则主要采用在每一像素格410驱动电极层上的一角打造一导电层空洞210(称之为ITO notch)。外加电场分布的局部不均会使得油墨运动收缩至像素格410的角落,即ITO notch所在部位。而根据实验研究以及模拟等结果表明,油膜破裂位置优先发生于油墨最薄处,因而油膜破裂的最低电压取决于油墨最薄的厚度。而ITO notch的作用则在于控制油墨收缩的最终位置,但其无法有效控制油膜破裂后油墨的运动方向,整体会出现如图3所示较为杂乱的显示效果,无法达到预期效果。同时,相邻角落油墨聚集又会增加翻墙的风险。
发明内容
本发明旨在至少解决现有技术中存在的技术问题之一。为此,本发明提出一种电润湿显示器件用的下基板,能够使得油墨破裂和运动方向可控。
本发明第二方面提出一种电润湿显示器件。
本发明第三方面提出一种电润湿显示器件。
根据本发明第一方面实施例的一种电润湿显示器件用的下基板,包括:
下支撑板,所述下支撑板的上表面设有支撑面;
第一电极,所述第一电极设置在所述支撑面上;
疏水绝缘层,所述疏水绝缘层设置在所述第一电极的表面;
像素墙,所述像素墙设置在所述疏水绝缘层上,所述像素墙设有若干像素格,每一所述像素格内均设有钉扎结构,所述钉扎结构设置在所述像素格的一个角落的相邻侧壁上,所有的所述像素格内的所述钉扎结构设置的位置相同;
台阶结构,每一所述像素格内均设有所述台阶结构,所述台阶结构相对所述钉扎结构设置在所述像素格的另一角落,所述台阶结构与对应相邻侧壁贴合。
根据本发明的一些实施例,所述像素格所围区域内设有导电层空洞,所述导电层空洞对应所述钉扎结构设置,所述导电层空洞设置在所述第一电极上。
根据本发明的一些实施例,所述钉扎结构为锯齿状。
根据本发明的一些实施例,所述锯齿状的齿形为固定间隔且连续的方形凸起、三角凸起、弧形凸起中的一种,或者所述方形凸起、三角凸起、弧形凸起的混合。
根据本发明第二方面实施例的电润湿显示器件,包括以上实施例所述的电润湿显示器件用的下基板,以及
非极性液体,每一所述像素格内均设有所述非极性液体;
极性液体,每一所述像素格内均设有所述极性液体;
上基板,包括上支撑板和第二电极,所述上支撑板设有封盖面,所述封盖面封盖在所述像素墙上,将所述非极性液体、极性液体密封在所述像素格内,所述第二电极设置在所述封盖面,所述第二电极与所述极性液体相通。
根据本发明第三方面实施例的电润湿显示器件的制备方法,用于制备权上述实施例的电润湿显示器件:
S1:台阶突起的制作,使用光刻胶在所述第一电极生成若干台阶突起,每个所述台阶突起对应设置在后期每一所述像素格的角落;
S2:制作疏水绝缘层,在所述第一电极的表面覆盖上所述疏水绝缘层,且所述疏水绝缘层覆盖在每个所述台阶突起上,形成所述台阶结构;
S3:像素墙制作,使用光刻胶在所述疏水绝缘层上制作所述像素墙,所述像素墙的每个所述像素格内均有一个所述台阶结构,并在每个所述像素格内生成所述钉扎结构;
S4:填充,将所述非极性液体和所述极性液体填充到所述像素格内;
S5:压合,将所述上基板和所述下基板贴合在一起。
根据本发明的一些实施例,所述S1包括如下步骤:
S1:在所述第一电极上旋涂一层光刻胶;
(2)旋涂完毕后在热板上进行预固化操作,等待冷却;
(3)冷却后使用第一掩模版进行曝光处理,使得后期每一所述像素格的角落皆保留一个台阶突起;
(4)光刻完毕后再放置于热板上进行后烘操作;
(5)显影,清除残留于所述下第一电极上多余的光刻胶,完成了在所述第一电极上显示为所述台阶突起。
根据本发明的一些实施例,所述S2包括如下步骤:
(1)将疏水绝缘材料倾倒在带有所述台阶突起的所述第一电极的中心区域,将所述疏水绝缘材料旋涂在所述第一电极的表面,形成所述疏水绝缘层;
(2)在热板上预固化;
(3)在烤箱中烘烤,并等待冷却;
(4)放置于反应离子刻蚀机中进行改性,使得所述疏水绝缘层由疏水状态改为亲水状态。
根据本发明的一些实施例,所述S3包括如下步骤:
(1)在所述疏水绝缘层上旋涂一层光刻胶;
(2)旋涂完毕后在热板上进行预固化操作,等待冷却;
(3)待冷却后使用第二掩模版进行曝光处理,所述第二掩模版上设有和所述像素格适配的像素孔,所述像素孔的侧壁上设有和所述钉扎结构适配的锯齿结构,使得后期每一所述像素格的角落皆生成所述钉扎结构;
(4)光刻完毕后再放置于热板上进行后烘操作,待冷却后进行一步操作;
(5)显影,清除残留于所述疏水绝缘层上多余的光刻胶,则完成了所述像素墙的制作。
根据本发明的一些实施例,所述第一电极上设有导电层空洞,每个所述导电层空洞对应设置在后期每一所述像素格的角落,所述疏水绝缘层覆盖在所述导电层空洞上。
根据本发明实施例的电润湿显示器件用的下基板,至少具有如下有益效果:本发明在常规像素格的基础上,运用毛细现象对像素格进行改造。通过对像素墙进行设计,使得每一像素格具有钉扎结构。钉扎结构可以通过毛细力的作用紧紧的锁住极性液体。钉扎结构跟台阶结构配合,使得油墨的破裂和运动方向可控。使油墨在破裂以后,能够以统一的方向移动,从而使电润湿显示器件的显示效果整齐划一,同时可以避免相邻像素格内的油墨聚集在一起,防止了油墨翻墙的风险。
本发明的附加方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明的实践了解到。
附图说明
下面结合附图和实施例对本发明做进一步的说明,其中:
图1为常规的电润湿显示器的截面图;
图2为常规的电润湿显示器的像素墙结构图;
图3为常规的电润湿显示器中,油墨出现杂乱的效果图;
图4为本发明一种实施例的电润湿显示器件截面示意图;
图5为本发明第一种实施例的像素格的结构示意图;
图6为本发明第二种实施例的像素格的结构示意图;
图7为本发明第三种实施例的像素格的结构示意图;
图8为本发明第四种实施例的像素格的结构示意图;
图9为本发明一种实施例的像素格中,钉扎结构对油墨的效果图;
图10为本发明一种实施例的第一电极设置在下支撑板上俯视示意图与截面示意图;
图11为本发明一种实施例的第一掩模版的结构示意图;
图12为本发明一种实施例的第二掩模版的结构示意图;
图13为本发明一种实施例的台阶结构的制作过程示意图;
图14为本发明一种实施例的含台阶层俯视示意图与截面示意图;
图15为本发明一种实施例的含像素墙俯视示意图与截面示意图;
图16为本发明一种实施例的电润湿显示器件的压合与填充流程图。
附图标号:
下支撑板100;第一电极200;导电层空洞210;疏水绝缘层300;像素墙400;像素格
410;钉扎结构411;台阶结构500;非极性液体600;极性液体700;上基板800;上支撑板810;第二电极820;光刻胶层900;台阶突起910;第一掩模版1000;台阶孔1010;第二掩模版1100;像素格孔1110。
具体实施方式
下面详细描述本发明的实施例,所述实施例的示例在附图中示出,其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的,仅用于解释本发明,而不能理解为对本发明的限制。
在本发明的描述中,需要理解的是,涉及到方位描述,例如上、下等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。
在本发明的描述中,多个指的是两个以上。如果有描述到第一、第二只是用于区分技术特征为目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量或者隐含指明所指示的技术特征的先后关系。
本发明的描述中,除非另有明确的限定,设置、安装、连接等词语应做广义理解,所属技术领域技术人员可以结合技术方案的具体内容合理确定上述词语在本发明中的具体含义。
参照图15所示,本发明公开了一种电润湿显示器件用的下基板,包括:
下支撑板100,下支撑板100的上表面设有支撑面;
第一电极200,第一电极200设置在支撑面上;
疏水绝缘层300,疏水绝缘层300设置在第一电极200的表面;
像素墙400,像素墙400设置在疏水绝缘层300上,像素墙400设有若干像素格410,每 一像素格410内均设有钉扎结构411,钉扎结构411设置在像素格410的一个角落的相邻侧壁上,所有的像素格410内的钉扎结构411设置的位置相同;
台阶结构500,每一像素格410内均设有台阶结构500,台阶结构500相对钉扎结构411设置在像素格410的另一角落,台阶结构500与对应相邻侧壁贴合。
毛细力,于三相界面上内弯液面引起的,其作用方向始终指向弯液面的凹面,而毛细作用是液体表面对固体表面的吸引力。液体表面与张紧的橡皮膜类似,当液面呈弯曲状时,则其将会趋向于平缓,因此凹液面对下面的液体施以拉力,凸液面对下面的液体施以压力。而毛细力作用的大小与弯液面的曲率成正比,即曲率越大毛细力越大,曲率越小,毛细力作用越小。
本发明则是在常规像素格410的基础上,运用毛细现象对像素格410进行改造。通过对像素墙400进行设计,使得每一像素格410图案如图15所示具有钉扎结构411。
结合图9所示,钉扎结构411可以通过毛细力的作用紧紧的锁住极性液体700,在本实施例中极性液体700具体为油墨。钉扎结构411跟台阶结构500配合,使得油墨破裂和运动方向可控。具体的,油墨下层最先从台阶结构500处进行破裂,油墨破裂后,由于钉扎结构411的毛细力作用,使油墨不断地向钉扎结构411流去,从而达到控制油墨运动方向的目的。使油墨在破裂以后,能够以统一的方向移动,从而使得电润湿显示器件的显示效果整齐划一,同时又可以避免相邻像素格410内的油墨聚集在一起,防止了油墨翻墙的风险。
在本实施例中,台阶结构500为三角板结构,或者方形结构,保证台阶结构500与对应相邻侧壁贴合。如果台阶结构500与对应相邻侧壁没有贴合的时候,会出现台阶结构500与像素格410的侧壁之间出现间隙,最后会出现封闭空间,最终造成部分油墨残留在封闭空间中,影响电润湿显示器件的显示效果。
如图5到图8所示,钉扎结构411呈锯齿状的结构,锯齿状的具体形式不限,具有钉扎效应的均可。可以为固定间隔且连续的方形凸起、三角凸起、弧形凸起中的一种,或者方形凸起、三角凸起、弧形凸起以及其它类型的混合。本发明优选图5的结构作为本发明中的钉扎结构411进行介绍。
参考图14和图15所示,像素格410所围区域内设有导电层空洞210,导电层空洞210对应钉扎结构411设置,导电层空洞210设置在第一电极200上。
在本实施例中,导电层空洞210的设计能够使得在像素格410中的油墨最终能够运动到导电层空洞210所在的位置,但是导电层空洞210无法控制油墨是通过何种路径运动到导电层空洞210所在的位置的。通过导电层空洞210配合钉扎结构411,能够使得所有像素格410 中的油墨在破裂以后,能够以统一的方向朝钉扎结构411所在的位置运动。
本发明还公开了一种电润湿显示器件,包括上述实施例的电润湿显示器件用的下基板,以及
非极性液体600,每一像素格410内均设有非极性液体600;
极性液体700,每一像素格410内均设有极性液体700;
上基板800,包括上支撑板810和第二电极820,上支撑板810设有封盖面,封盖面封盖在像素墙400上,将非极性液体600、极性液体700密封在像素格410内,第二电极820设置在封盖面,第二电极与极性液体700相通。
由于电润湿显示器件采用了上述实施例的下基板的全部技术方案,因此至少具有上述实施例的技术方案所带来的所有有益效果,在此不再赘述。
参照图13和图16所示,本发明还公开了一种电润湿显示器件的制备方法,用于制备上述实施例的电润湿显示器件:
S1:台阶突起910的制作,使用光刻胶在第一电极200生成若干台阶突起910,每个台阶突起910对应设置在后期每一像素格410的角落;通过设置台阶突起910,后期在敷设疏水绝缘层300的时候,会将台阶突起910覆盖住,从而在台阶突起910生成台阶结构500。
S2:制作疏水绝缘层300,在第一电极200的表面覆盖疏水绝缘层300,且疏水绝缘层300覆盖在每个台阶突起910上,形成台阶结构500;
S3:像素墙400制作,使用光刻胶在疏水绝缘层300上制作像素墙400,像素墙400的每个像素格410内均有一个台阶结构500,并在每个像素格410内生成钉扎结构411;
S4:填充,将非极性液体600和极性液体700填充到像素格410内;
S5:压合,将上基板和下基板贴合在一起。
参照图10和图11所示,S1包括如下步骤:
(1)在第一电极200上旋涂一层光刻胶,旋涂的转速为1100rad/s,用时65s,厚度约为1-2um;
(2)旋涂完毕后在热板上进行预固化操作(110℃,2分30秒),等待冷却;
(3)冷却后使用图11所示的第一掩模版1000进行曝光处理(110℃,2分30秒),第一掩模版1000上存在有和台阶结构500匹配的台阶孔1010,通过曝光处理以后,使得后期每一像素格410的角落皆保留一个台阶突起910;
(4)光刻完毕后再放置于热板上进行后烘操作;
(5)显影,清除残留于下第一电极200上多余的光刻胶,完成了在第一电极200上显示 为台阶突起910;
参照图10和图11所示,S2包括如下步骤:
(1)将疏水绝缘材料倾倒在带有台阶突起910的第一电极200的中心区域,设置转速为1100rad/s,时间65s,将疏水绝缘材料旋涂在第一电极200的表面,形成疏水绝缘层300;
(2)在热板上预固化2分30秒;
(3)在烤箱中175℃烘烤1h,并等待冷却;
(4)放置于反应离子刻蚀机中进行改性,使得疏水绝缘层300由疏水状态改为亲水状态,从而能够更方便后续的光刻胶材料在片子上能够均匀成膜。
参照图12、图13和图15所示,S3包括如下步骤:
(1)在疏水绝缘层300上旋涂一层光刻胶,转速为1100rad/s,用时65s,厚度约为3-5um;
(2)旋涂完毕后在热板上进行预固化操作(110℃,2分30秒),等待冷却;
(3)待冷却后使用图12所示的第二掩模版1100进行曝光处理,使得后期每一像素格410的角落皆生成钉扎结构411;第二掩模版1100上设有和像素格410适配的像素孔1110,像素孔1110的侧壁上设有和钉扎结构411适配的锯齿结构,通过曝光处理以后,会在光刻胶形成像素格410,并在像素格410内形成钉扎结构411;
(4)光刻完毕后再放置于热板上进行后烘操作,待冷却后进行一步操作;
(5)显影,清除残留于疏水绝缘层300上多余的光刻胶,则完成了像素墙400的制作。
参考图10所示,第一电极200上设有导电层空洞210,每个导电层空洞210对应设置在后期每一像素格410的角落,疏水绝缘层300覆盖在导电层空洞210上。在台阶突起910完成的基础进行疏水绝缘层300的制作,该层疏水绝缘层730将会覆盖全部的导电层空洞210和台阶突起910。
上面结合附图对本发明实施例作了详细说明,但是本发明不限于上述实施例,在所属技术领域普通技术人员所具备的知识范围内,还可以在不脱离本发明宗旨的前提下作出各种变化。

Claims (10)

  1. 一种电润湿显示器件用的下基板,其特征在于,包括:
    下支撑板,所述下支撑板的上表面设有支撑面;
    第一电极,所述第一电极设置在所述支撑面上;
    疏水绝缘层,所述疏水绝缘层设置在所述第一电极的表面;
    像素墙,所述像素墙设置在所述疏水绝缘层上,所述像素墙设有若干像素格,每一所述像素格内均设有钉扎结构,所述钉扎结构设置在所述像素格的一个角落的相邻侧壁上,所有的所述像素格内的所述钉扎结构设置的位置相同;
    台阶结构,每一所述像素格内均设有所述台阶结构,所述台阶结构相对所述钉扎结构设置在所述像素格的另一角落,所述台阶结构与对应相邻侧壁贴合。
  2. 根据权利要求1所述的电润湿显示器件用的下基板,其特征在于:所述像素格所围区域内设有导电层空洞,所述导电层空洞对应所述钉扎结构设置,所述导电层空洞设置在所述第一电极上。
  3. 根据权利要求1所述的电润湿显示器件用的下基板,其特征在于:所述钉扎结构为锯齿状。
  4. 根据权利要求3所述的电润湿显示器件用的下基板,其特征在于:所述锯齿状的齿形为固定间隔且连续的方形凸起、三角凸起、弧形凸起中的一种,或者所述方形凸起、三角凸起、弧形凸起的混合。
  5. 一种电润湿显示器件,其特征在于:包括权利要求1至4任一项所述的电润湿显示器件用的下基板,以及
    非极性液体,每一所述像素格内均设有所述非极性液体;
    极性液体,每一所述像素格内均设有所述极性液体;
    上基板,包括上支撑板和第二电极,所述上支撑板设有封盖面,所述封盖面封盖在所述像素墙上,将所述非极性液体、极性液体密封在所述像素格内,所述第二电极设置在所述封盖面,所述第二电极与所述极性液体相通。
  6. 一种电润湿显示器件的制备方法,用于制备权利要求5所述的电润湿显示器件,其特征在于:
    S1:台阶突起的制作,使用光刻胶在所述第一电极上生成若干台阶突起,每个所述台阶突起对应设置在后期每一所述像素格的角落;
    S2:制作疏水绝缘层,在所述第一电极的表面覆盖上所述疏水绝缘层,且所述疏水绝缘 层覆盖在每个所述台阶突起上,形成所述台阶结构;
    S3:像素墙制作,使用光刻胶在所述疏水绝缘层上制作所述像素墙,所述像素墙的每个所述像素格内均有一个所述台阶结构,并在每个所述像素格内生成所述钉扎结构;
    S4:填充,将所述非极性液体和所述极性液体填充到所述像素格内;
    S5:压合,将所述上基板和所述下基板贴合在一起。
  7. 根据权利要求6所述的电润湿显示器件的制备方法,其特征在于,所述S1包括如下步骤:
    (1)在所述第一电极上旋涂一层光刻胶;
    (2)冷却后使用第一掩模版进行曝光处理,所述第一掩模版上存在有和台阶结构匹配的台阶孔,使得后期每一所述像素格的角落皆保留一个台阶突起;
    (3)显影,清除残留于所述下第一电极上多余的光刻胶,完成了在所述第一电极上显示为所述台阶突起。
  8. 根据权利要求6所述的电润湿显示器件的制备方法,其特征在于,所述S2包括如下步骤:
    (1)将疏水绝缘材料倾倒在带有所述台阶突起的所述第一电极的中心区域,将所述疏水绝缘材料旋涂在所述第一电极的表面,形成所述疏水绝缘层;
    (2)放置于反应离子刻蚀机中进行改性,使得所述疏水绝缘层由疏水状态改为亲水状态。
  9. 根据权利要求6所述的电润湿显示器件的制备方法,其特征在于,所述S3包括如下步骤:
    (1)在所述疏水绝缘层上旋涂一层光刻胶;
    (2)待冷却后使用第二掩模版进行曝光处理,所述第二掩模版上设有和所述像素格适配的像素孔,所述像素孔的侧壁上设有和所述钉扎结构适配的锯齿结构,使得后期每一所述像素格的角落皆生成所述钉扎结构;
    (3)显影,清除残留于所述疏水绝缘层上多余的光刻胶,完成了所述像素墙的制作。
  10. 根据权利要求6所述的电润湿显示器件的制备方法,其特征在于:所述第一电极上设有导电层空洞,每个所述导电层空洞对应设置在后期每一所述像素格的角落,所述疏水绝缘层覆盖在所述导电层空洞上。
PCT/CN2023/125944 2022-08-29 2023-10-23 电润湿显示器件用的下基板、电润湿显示器件及制备方法 WO2024046506A1 (zh)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103890634A (zh) * 2011-08-24 2014-06-25 利奎阿维斯塔股份有限公司 电润湿显示装置
CN105793759A (zh) * 2013-09-25 2016-07-20 亚马逊科技公司 电润湿元件
CN106932894A (zh) * 2017-04-20 2017-07-07 华南师范大学 一种控制油墨移动的电润湿显示器及其制备方法
US9804382B1 (en) * 2014-12-19 2017-10-31 Amazon Technologies, Inc. Electrowetting display pixels with pixel walls having non-planar side surfaces
CN115421291A (zh) * 2022-08-29 2022-12-02 华南师范大学 电润湿显示器件用的下基板、电润湿显示器件及制备方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103890634A (zh) * 2011-08-24 2014-06-25 利奎阿维斯塔股份有限公司 电润湿显示装置
CN105793759A (zh) * 2013-09-25 2016-07-20 亚马逊科技公司 电润湿元件
US9804382B1 (en) * 2014-12-19 2017-10-31 Amazon Technologies, Inc. Electrowetting display pixels with pixel walls having non-planar side surfaces
CN106932894A (zh) * 2017-04-20 2017-07-07 华南师范大学 一种控制油墨移动的电润湿显示器及其制备方法
CN115421291A (zh) * 2022-08-29 2022-12-02 华南师范大学 电润湿显示器件用的下基板、电润湿显示器件及制备方法

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