WO2024042712A1 - Measurement system - Google Patents

Abstract

Provided is a measurement system comprising: an irradiation optical system capable of outputting measurement light; a mirror that reflects the measurement light; a first support mechanism that supports the mirror so that the mirror is rotatable around a first rotation axis; and a second support mechanism that supports the first support mechanism so that the first support mechanism is rotatable around a second rotation axis. The second support mechanism has: a movable portion that supports the first support mechanism at opposite ends in a direction along the first rotation axis and allows the first support mechanism to rotate around the second rotation axis; and a fixed portion that supports the movable portion at one side and an opposite side of the first support mechanism in a direction along the second rotation axis so that the movable portion is rotatable around the second rotation axis. The optical path of the measurement light is disposed at one side of the mirror in the direction along the second rotation axis. Wiring connected to an electrical component of the first support mechanism is disposed at an opposite side of the mirror in the direction along the second rotation axis. The measurement system changes the attitude of the mirror using the first support mechanism and the second support mechanism, so that the mirror reflects the measurement light toward an object being measured.

Description

measurement system

The present invention relates to the technical field of measurement systems.

As this type of system, a system having a laser tracker has been proposed (see Patent Document 1).

International Publication No. 2003/62744

According to the first aspect, an irradiation optical system capable of outputting measurement light, a mirror that reflects the measurement light, a first support mechanism that supports the mirror rotatably about a first rotation axis, and the a second support mechanism that supports the first support mechanism rotatably around a second rotation axis that intersects the first rotation axis; a movable part supported at both ends in the direction along the first rotation axis and rotated around the second rotation axis; and one side with respect to the first support mechanism in the direction along the second rotation axis. and a fixed part that supports the movable part on the other side and rotatably supports the movable part around the second rotation axis, and a fixed part that supports the movable part in a direction along the second rotation axis. The optical path of the measurement light is arranged on one side with respect to the mirror, and the electrical equipment of the first support mechanism is arranged on the other side with respect to the mirror in the direction along the second rotation axis. A measurement system in which wiring connected to a component is arranged, the attitude of the mirror is changed using the first support mechanism and the second mechanism, and the measurement light is reflected toward the measurement target by the mirror. is provided.

According to the second aspect, there is provided an irradiation optical system capable of outputting measurement light, a mirror that reflects the measurement light toward a measurement target, and a first mirror that supports the mirror rotatably about a first rotation axis. a support mechanism; and a second support mechanism that supports the first support mechanism rotatably around a second rotation axis that intersects the first rotation axis, and the second support mechanism a rotational displacement sensor disposed on one side of the mirror in the direction of the rotation axis to detect rotational displacement of the mirror; and a rotational displacement sensor disposed on the other side of the mirror in the direction of the second rotation axis, the A measurement system is provided that includes a motor that rotates a mirror around the second rotation axis.

According to the third aspect, there is provided an irradiation optical system capable of outputting measurement light, a mirror that reflects the measurement light toward a measurement target, and a first mirror that supports the mirror rotatably about a first rotation axis. a support mechanism; and a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis, and the first support mechanism a motor disposed on one side of the mirror in the direction of the rotation axis to rotate the mirror around the first rotation axis; and a motor disposed on the other side of the mirror in the direction of the first rotation axis. and a rotational displacement sensor that detects rotational displacement of the mirror.

FIG. 1 is a perspective view showing the appearance of the measurement system. FIG. 2 is a perspective view showing the internal structure of the measurement system. FIG. 3 is a perspective view showing the main parts of the gimbal mechanism. FIG. 4 is a cross-sectional view taken along the line AA in FIG. 3. 4 is a sectional view taken along line BB in FIG. 3. FIG. 5 is a sectional view taken along line CC in FIG. 4. FIG. It is a figure showing the groove part formed in the mirror holding member. It is a figure which shows the press-down point of a mirror presser spring. It is a figure which shows an example of the optical element and wiring arrange|positioned at the 2nd support mechanism. It is a figure showing an example of the optical path of measurement light. FIG. 2 is a cross-sectional view showing an example of a cross section of a multilayer flexible wiring board. It is a perspective view which shows the through-hole formed in the movable part of a 2nd support mechanism, and the resin member inserted into this through-hole. It is a figure showing a specific example of a rotation regulation part. It is a figure showing an example of the irradiation range of measurement light. It is a figure showing one example of use of a measurement system. It is a figure showing an example of a reflector attached to a robot arm. It is a figure which shows another example of use of a measurement system.

An embodiment of the measurement system will be described with reference to the drawings.

1. Overview of Measurement System An overview of the measurement system 1 according to the embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a perspective view showing the external appearance of the measurement system 1. As shown in FIG. FIG. 2 is a perspective view showing the internal configuration of the measurement system 1.

In FIG. 1, the measurement system 1 includes a main body 2 and a mirror accommodating section 3 that accommodates a mirror M. The mirror accommodating portion 3 is rotatable around a φ axis (see FIG. 3) extending along the Z axis. As shown in FIG. 2, the main body 2 houses an optical engine unit 40 and a control unit 50. Note that details of the optical engine unit 40 and control unit 50 will be described later. The measurement system 1 also includes a gimbal mechanism 10 that includes a mirror accommodating section 3. Note that the Z-axis direction may be the direction of gravity.

Note that the φ axis does not have to extend along the Z axis (for example, the direction of gravity). The φ axis may extend along the X axis, for example. A state in which the measurement system 1 is placed so that the φ axis extends along the Z axis (for example, the direction of gravity) (see FIG. 1) is referred to as "vertical placement." The measurement system 1 may be placed “horizontally (for example, placed so that the φ axis extends along the X axis)”.

2. Gimbal Mechanism The gimbal mechanism 10 will be described with reference to FIGS. 3 to 6. FIG. 3 is a perspective view showing the main parts of the gimbal mechanism 10. FIG. 4 is a cross-sectional view taken along the line AA in FIG. 3. FIG. 5 is a sectional view taken along line BB in FIG. 3. FIG. 6 is a sectional view taken along line CC in FIG. 4.

The gimbal mechanism 10 moves the mirror M along a θ axis (which may also be referred to as a "first rotation axis" or "elevation axis") extending in a direction intersecting the Z axis (in FIG. 3, a direction along the X axis). ), and the first support mechanism 20 is supported rotatably around the φ axis (which may also be referred to as a "second rotation axis" or "azimuth axis"). A second support mechanism 30 is provided. The second support mechanism 30 includes a movable part 31 and a fixed part 32. The first support mechanism 20 and the movable part 31 constitute a part of the mirror accommodating part 3 mentioned above. Note that since the first support mechanism 20 is rotatable around the φ axis, the direction in which the θ axis extends (i.e., the direction intersecting the Z axis) changes according to the rotation of the first support mechanism 20 around the φ axis. do.

As shown in FIGS. 4 and 6, the first support mechanism 20 includes a mirror holding member 21 that holds the mirror M, and portions 22a, 22b, and 22c. Note that the portions 22a, 22b, and 22c are rotatable around the θ axis together with the mirror holding member 21 (in other words, integrally).

As shown in FIG. 4, the movable part 31 has parts 31a, 31b, 31c, and 31d. Note that a cylindrical hollow portion 37 that constitutes a part of the optical path of the measurement light L is formed in the portion 31a. As shown in FIG. 4, the fixing portion 32 has portions 32a, 32b, and 32c. In other words, the fixing part 32 includes a portion 32a (which may be referred to as a "first portion") disposed above the mirror M in FIG. and a portion 32c (which may be referred to as a “third portion”) that connects portions 32a and 32c.

The portions 32a, 32b, and 32c may be arranged such that the fixing portion 32 has a U-shape or a U-shape, for example. The portions 32a, 32b, and 32c may be arranged such that the fixing portion 32 is, for example, H-shaped. With this configuration, the strength of the fixing portion 32 can be improved.

As shown in FIG. 4, the portion 32a has a surface 321 facing the first support mechanism 20 and a surface 322 opposite to the surface 321. The portion 32a has a tapered surface 323 that widens from the surface 321 toward the surface 322. Similarly, the portion 32b has a surface 324 facing the first support mechanism 20 and a surface 325 opposite to the surface 324. Portion 32b has a tapered surface 326 that widens from surface 324 toward surface 325. As shown in FIG. 5, the portion 32c has a surface 327 facing the first support mechanism 20 and a surface 328 opposite to the surface 327. Portion 32c has a tapered surface 329 that widens from surface 327 toward surface 328. Note that one or two of the portions 32a, 32b, and 32c may have a tapered surface, and the remaining portions may not have a tapered surface.

Incidentally, when forming tapered surfaces on each of the portions 32a, 32b, and 32c, for example, the chamfering angle of each tapered surface may be made the same. In this case, there is an advantage that processing costs can be suppressed. Furthermore, since the tapered surfaces of the portions 32a, 32b, and 32c are smoothly connected (in other words, form one surface), there is an advantage that the design of the measurement system 1 can be improved.

For example, as shown in FIG. 3, the fixed part 32 supports both ends of the movable part 31 in the direction along the φ axis. In order for the fixed part 32 to rotatably support the movable part 31 around the φ axis, bearing members B1 and B2, such as ball bearings shown in FIG. 4, are arranged between the fixed part 32 and the movable part 31. ing.

For example, as shown in FIG. 4, the movable portion 31 of the second support mechanism 30 supports both ends of the first support mechanism 20 in the direction along the θ axis (corresponding to line CC in FIG. 4). In order for the movable part 31 to rotatably support the first support mechanism 20 around the θ axis, a bearing member B3 such as a ball bearing shown in FIG. B4 is placed.

As the movable part 31 of the second support mechanism 30 rotates around the φ axis, the first support mechanism 20 supported by the movable part 31 also rotates around the φ axis. As a result, the mirror M supported by the first support mechanism 20 also rotates around the φ axis.

Although the drawings are labeled with "22a," "22b," and "22c" for convenience, the first support mechanism 20 in the actual product has a plurality of configurations corresponding to the portions 22a, 22b, and 22c, respectively. It does not have to have any parts. For example, the first support mechanism 20 may include a component in which the mirror holding member 21 and the portions 22a, 22b, and 22c are integrally formed, instead of the portions 22a, 22b, and 22c.

Similarly, for convenience, the parts 31a, 31b, 31c, and 31d are numbered "31a," "31b," "31c," and "31d," but the parts corresponding to the movable part 31 in the actual product are parts 31a, 31b, 31c, and 31d. It is not necessary to include a plurality of component parts corresponding to the respective components. In other words, the movable part 31 may be composed of one component, or may be composed of a plurality of components (not limited to four).

Similarly, for convenience, the parts corresponding to the fixing part 32 in the actual product are numbered "32a", "32b", and "32c", but there are a plurality of parts corresponding to the parts 32a, 32b, and 32c, respectively. It does not have to contain any component parts. In other words, the fixing part 32 may be composed of one component, or may be composed of a plurality of components (not limited to three).

For example, as shown in FIG. 4, the second support mechanism 30 includes a motor 33 that rotates the movable part 31 around the φ axis, and an encoder 34 that detects the rotation angle of the movable part 31. The encoder 34 includes a sensor section 34a and a wheel section 34b attached to a portion 31a of the movable section 31, for example. Note that various existing aspects can be applied to the encoder 34, so a detailed explanation thereof will be omitted. Encoder 34 may be referred to as a rotational displacement sensor.

As shown in FIG. 4, the encoder 34 is placed on one side of the mirror M, and the motor 33 is placed on the other side of the mirror M in the direction in which the φ axis extends (i.e., the Z-axis direction). . That is, only the encoder 34 may be placed on one side of the mirror M, and only the motor 33 may be placed on the other side of the mirror M. In other words, the motor 33 and the encoder 34 may be placed at positions sandwiching the mirror M therebetween. The second support mechanism 30 further includes resin members 35 and 36 for dustproof and dripproof purposes. Note that the resin members 35 and 36 may be referred to as cover members. Note that the cover members 35 and 36 may be made of a metal member in addition to resin.

2-1. Features of the first support mechanism The first support mechanism 20 will be described with reference to FIGS. 6 to 8.

For example, as shown in FIG. 6, the first support mechanism 20 includes a motor 23 that rotates the mirror holding member 21 around the θ axis, and an encoder 24 that detects the rotation angle of the mirror holding member 21. The encoder 24 includes a sensor section 24a and a wheel section 24b attached to, for example, the section 22a. Note that various existing aspects can be applied to the encoder 24, so a detailed explanation thereof will be omitted. Encoder 24 may also be referred to as a rotational displacement sensor.

As shown in FIG. 6, the motor 23 is arranged on the left side (also referred to as "one side") of the mirror M in the direction along the θ axis. On the other hand, the encoder 24 is arranged on the right side (also referred to as the "other side") of the mirror M in the direction along the θ axis.

Here, the mass of the mirror holding member 21 is relatively light. Therefore, a relatively small motor (in other words, a motor with a relatively small maximum generated torque) can be used as the motor 23 that rotates the mirror holding member 21 around the θ axis. As the motor 23, for example, a motor having substantially the same mass as the encoder 24 can be employed. In this case, by disposing the motor 23 on the left side of the mirror M and the encoder 24 on the right side of the mirror M in the direction along the θ axis, the left and right masses of the first support mechanism 20 are balanced. can be made easier to maintain.

As shown in FIG. 6, a space 4 that forms part of the optical path of the measurement light L is formed on the mirror holding member 21 on the reflective surface MS side of the mirror M. Therefore, in FIG. 6, the mass of the part of the first support member 20 above the reflection surface MS of the mirror M is greater than the mass of the other part of the first support member 20 below the reflection surface MS of the mirror M. becomes smaller. If no measures are taken, due to the shape of the mirror holding member 21, the center of gravity of the first support mechanism 20 will be located relatively away from the θ axis (i.e., the rotation axis of the first support mechanism 20). Put it away.

In order to deal with this problem, the first support mechanism 20 has balance masses 25a and 25b. As long as the center of gravity of the first support mechanism 20 approaches the θ axis, the masses and shapes of the balance masses 25a and 25b may be set as appropriate. In FIG. 6, the balance mass 25a is attached to the portion 22a, and the balance mass 25b is attached to the portion 22c, but the attachment positions of the balance masses 25a and 25b may be set as appropriate. However, it is desirable that the mounting positions of the balance masses 25a and 25b be set so that the center of gravity of the first support mechanism 20 approaches the intersection of the θ-axis and the φ-axis. Note that the number of balance masses is not limited to two, and may be one or three or more.

Since the first support mechanism 20 has the balance masses 25a and 25b, it is possible to suppress bias and variation in centrifugal force when the first support mechanism 20 operates, for example. As a result, for example, vibration of the measurement system 1 due to the operation of the first support mechanism 20 can be suppressed.

As shown in FIG. 7, an annular groove 21a is formed in a portion of the mirror holding member 21 surrounded by a dotted circle C1 in FIG. The movable portion 31 of the second support mechanism 30 is formed with an annular convex portion 311 corresponding to the annular groove portion 21a. When the first support mechanism 20 is attached to the movable portion 31, the annular groove portion 21a is rotatably fitted into the annular convex portion 311.

With this configuration, it is possible to prevent dust and liquid from entering at least one side of the motor 23 and the encoder 24 from the space 4 shown in FIG. 6, for example. In the measurement system 1, as shown in FIG. 2, the motor 23 and the encoder 24 are covered with a cover in order to be dustproof, dripproof, and prevent entanglement.

In FIG. 6, the mirror holding member 21 is in contact with the reflective surface MS of the mirror M at a portion surrounded by a dotted circle C2. Specifically, as shown in FIG. 8(a), the support points 211, 212, and 213 of the mirror holding member 21 are in contact with the reflective surface MS of the mirror M. In order to fix the mirror M, the mirror presser spring 26 (see also FIG. 6) presses down the surface of the mirror M opposite to the reflective surface MS. Note that the mirror presser spring 26 may also be referred to as an elastic member.

As shown in FIG. 8(b), the pressing point 26a at which the mirror presser spring 26 applies its elastic force to the mirror M is the center of gravity of a triangle whose vertices are the three support points 211, 212, and 213. At this time, the ratio of the distance between the support point 211 or 212 and the push-down point 26a and the distance between the support point 213 and the push-down point 26a in the left-right direction of FIG. 8(b) is approximately 1:2. becomes.

With this configuration, the forces applied to each of the three support points 211, 212, and 213 are approximately the same. As a result, in FIG. 6, it is possible to suppress the generation of a moment that would cause the mirror M to bend upwardly. That is, it is possible to suppress the mirror M from being bent (in other words, the reflective surface MS from being distorted) due to the mirror presser spring 26 pressing down on the mirror M. In other words, even if the force for fixing the mirror M is strengthened by the mirror presser spring 26, the distortion of the mirror M and, by extension, the reflective surface MS can be suppressed. speed) can be increased.

3. Optical Engine Unit The optical engine unit 40 will be described with reference to FIG. 2. In FIG. 2, the optical engine unit 40 includes a light source 41, an interferometer head 42, and a detection section 43. The light source 41 may include, for example, a light emitting element such as a laser diode. The interferometer head 42 may include an optical element such as a half mirror, for example, and may emit part of the measurement light from the light source 41 and cause the other part to interfere with the measurement light L returned from the measurement target. . The detection unit 43 may include, for example, a photoelectric conversion element (also referred to as a "light receiving element") such as a photodiode, and may detect interference light from the interferometer head 42. Here, the light source 41 of the optical engine unit 40 may include an optical comb light source that can generate light (optical frequency comb) containing frequency components arranged at regular intervals on the frequency axis as pulsed light.

Note that various existing aspects can be applied to the light source 41, the interferometer head 42, and the detection section 43. Therefore, a detailed explanation of the light source 41, interferometer head 42, and detection section 43 will be omitted. The optical engine unit 40 may be referred to as an illumination optical system.

A part of the measurement light L, which is a laser beam or the like from the light source 41 via the interferometer head 42, is transmitted through the interferometer head 42 and the movable part 31 (specifically, the part) of the second support mechanism 30 shown in FIG. The light enters the mirror M via the hollow portion 37 formed in the mirror M.

Optical elements 44 and 45 may be arranged in the hollow part 37, as shown in FIG. 9, for example. That is, optical elements 44 and 45 that transmit the measurement light L may be arranged above the mirror M in FIG. 9 . By arranging the optical elements 44 and 45 in the hollow portion 37, it is possible to prevent foreign matter such as dust or liquid from entering the interferometer head 42 from the mirror M side, for example.

Incidentally, at least a portion of the portion 42a that is a part of the interferometer head 42 may be inserted into the hollow portion 37 as shown in FIG. 4, for example. In other words, the interferometer head 42 may have a portion 42a inserted into the hollow portion 37. In this case, an optical member such as a lens, which transmits the measurement light L, may be arranged in the portion 42a. Note that the optical member disposed in the portion 42a may be a different optical member from the optical elements 44 and 45 described above.

A sealed space 46 may be formed by the optical elements 44 and 45. In this case, it can be said that a part of the optical path of the measurement light L is arranged in the closed space 46 between the optical engine unit 40 and the mirror M. Note that the optical elements 44 and 45 may be made of parallel plane glass, for example. That is, each of the optical elements 44 and 45 may be a light-transmissive substrate having a first surface and a second surface through which the measurement light L passes, and the first surface and the second surface are parallel. Note that in order to reduce multiple interference between the first surface and the second surface, the first surface and the second surface may be slightly deviated from parallel.

The sealed space 46 may be a closed space without gas communication with the outside space. The sealed space 46 may be a space in which gas flow with the external space is suppressed to such an extent that it can be considered to be substantially sealed. In this case, an opening may be provided on the outer periphery of the hollow portion 37 to suppress the pressure difference between the sealed space 46 and the external space.

As shown in FIG. 9, by arranging the optical element 44 at an angle with respect to the optical path of the measurement light L, for example, some of the measurement light L emitted from the light source 41 is reflected on the surface of the optical element 44. Light can be prevented from entering the light source 41 and the detection unit 43.

Here, in the case where the optical element 44 is arranged in the hollow part 37 but the optical element 45 is not arranged, and the optical element 44 is arranged at an angle with respect to the optical path of the measurement light L, the optical element A beam shift occurs in which the optical axis of the measurement light L that enters the optical element 44 and the optical axis of the measurement light L that has passed through the optical element 44 deviate from each other.

In the measurement system 1, an optical element 45 is arranged in the hollow part 37 in addition to the optical element 44. The optical element 45 is arranged to be tilted in a direction opposite to the direction in which the optical element 44 is tilted with respect to the optical path of the measurement light L. With this configuration, the optical axis of the measurement light L that enters the optical element 44 and the optical axis of the measurement light L that has passed through the optical elements 44 and 45 are misaligned, as shown in balloon F1 in FIG. can be suppressed. Similarly, it is possible to prevent the optical axis of the measurement light L that enters the optical element 45 and the optical axis of the measurement light L that has passed through the optical elements 44 and 45 from misaligning.

4. Control Unit The control unit 50 will be described with reference to FIG. 2. In FIG. 2, the control unit 50 includes a control section 51, a motor driver 52, a power supply section 53, and an exhaust fan 54. The control unit 51 may include, for example, an FPGA (Field Programmable Gate Array) board. The control unit 51 controls, for example, the optical engine unit 40 and the motor driver 52. Motor driver 52 controls motors 23 and 33. The power supply section 53 supplies power to, for example, the optical engine unit 40, the control section 51, the motor driver 52, and the exhaust fan 54.

Note that various existing aspects can be applied to the motor driver 52, the power supply section 53, and the exhaust fan 54. Therefore, detailed description of the motor driver 52, power supply section 53, and exhaust fan 54 will be omitted.

The control unit 51 rotates the movable parts 31 of the first support mechanism 20 and the second support mechanism 30 by controlling the motors 23 and 33 via the motor driver 52. By rotating the first support mechanism 20 and the movable part 31, the attitude of the mirror M is changed. In other words, it can be said that the control unit 51 changes the attitude of the mirror M by controlling the motors 23 and 33 via the motor driver 52.

The control unit 51 acquires signals output from each of the sensor unit 24a of the encoder 24 and the sensor unit 34a of the encoder 34. The control section 51 determines the rotation angle of the first support mechanism 30 and the rotation angle of the movable section 31 of the second support mechanism 30 based on the signals output from each of the sensor sections 24a and 34a. The control unit 51 may specify the attitude of the mirror M based on the rotation angle of the first support mechanism 30 and the rotation angle of the movable part 31.

A part of the measurement light L from the light source 41 via the interferometer head 42 is incident on the mirror M. As shown in FIG. 10, the measurement light L enters the mirror M through a first optical path OP1 extending along the φ axis. The measurement light L reflected by the mirror M heads toward the measurement target through a second optical path OP2 extending along a direction that intersects both the direction in which the θ-axis extends and the direction in which the φ-axis extends. In other words, the measurement light L reflected by the mirror M is irradiated onto the measurement target.

As described above, the attitude of the mirror M is changed using the first support mechanism 20 and the movable part 31 of the second support mechanism 30. That is, it can be said that in the measurement system 1, the posture of the mirror M is changed using the first support mechanism 20 and the second support mechanism 30, and the measurement light L is reflected by the mirror M toward the measurement target. In other words, it can be said that in the measurement system 1, the orientation of the mirror M is changed using the first support mechanism 20 and the second support mechanism 30, thereby changing the direction in which the second optical path OP2 is extended. Further, as shown in FIG. 10, it can be said that the mirror M is arranged at the intersection of the first optical path OP1 and the second optical path OP2. A part of the optical path of the measurement light L (for example, the first optical path OP1) may be arranged on the φ axis. Note that the first optical path OP1 may pass through the hollow section 37, or the first optical path OP1 may not pass through the hollow section 37.

The measurement light reflected by the measurement object (which may also be referred to as "return light") follows a path that is approximately the same as the path taken by a portion of the measurement light L emitted from the light source 41 from the interferometer head 42 to the measurement object. It passes through the path and enters the interferometer head 42. The other part of the measurement light L emitted from the light source 41 and the measurement light L reflected by the measurement target enter the detection unit 43 .

The detection unit 43 outputs a signal generated due to the other part of the measurement light L emitted from the light source 41 and the measurement light L reflected by the measurement target to the control unit 51. Based on the signal output from the detection unit 43, the control unit 51 determines, for example, the phase difference between the measurement light L emitted from the light source 41 and the measurement light L reflected by the measurement target. The control unit 51 may determine the distance from the measurement system 1 to the measurement target based on the determined phase difference.

The control unit 51 controls the distance from the measurement system 1 to the measurement target, the rotation angle of the first support mechanism 20 determined based on the signal output from the sensor unit 24a of the encoder 24, and the sensor unit 34a of the encoder 34. The spatial coordinates of the measurement target may be determined based on the rotation angle of the movable portion 31 determined based on the signal output from the . The spatial coordinates of the measurement target determined by the control unit 51 may be spatial coordinates in the coordinate system related to the measurement system 1.

Note that the control unit 50 may include a tilt sensor for detecting the tilt of the measurement system 1. In this case, the control unit 51 may correct the above-determined spatial coordinates of the measurement target based on the output of the tilt sensor. As described above, the measurement system 1 can irradiate the measurement target with the measurement light L. For this reason, the measurement system 1 may be referred to as a beam irradiation system.

Note that while the measurement target is moving, the control unit 51 uses the first support mechanism 20 and the second support mechanism 30 (specifically, the motor 22 that rotates the first support mechanism 20 around the θ axis). , by controlling the motor 33 that rotates the movable part 31 of the second support mechanism 30 around the φ axis) to change the attitude of the mirror M, irradiation of the measurement light L to the measurement target may be continued.

In addition, since the optical engine unit 40 can output the measurement light L and can receive light from the measurement target, it may be referred to as a light transmitting/receiving optical system or as a light receiving optical system. Good too.

5. Wiring Ideas As described with reference to FIG. 3, the mirror accommodating portion 3 is configured to be rotatable around the φ axis. For example, if no measures are taken for the wiring connected to electrical components arranged inside the mirror housing 3, such as the motor 23 and the encoder 24, the wiring will move casually as the mirror housing 3 rotates. There is a risk that this may occur. As a result, for example, due to the wiring rubbing against the constituent members of the measurement system 1, the rotation of the mirror accommodating section 3 (in other words, the attitude of the mirror M) may be affected, or the wiring may be damaged. There is a possibility that dirt may adhere to the components of the measurement system 1.

As shown in FIG. 4, a cylindrical hollow portion 38 is formed in the portion 31d of the movable portion 31 of the second support mechanism 30. A wiring 61 shown in FIG. 9 may be arranged in this hollow part 38. The wiring 61 may include, for example, a flexible printed wiring board.

As shown in balloon F2 in FIG. 9, the wiring 61 may have a spiral portion 61a arranged in a spiral around the φ axis, and a straight portion 61b extending from the spiral portion 61a along the φ axis. "Extending along the φ axis" does not necessarily mean "extending on the φ axis", but also means "extending in parallel with the φ axis (in other words, on another axis parallel to the φ axis)" may be included. Note that the φ axis may be translated as the optical axis of the measurement light L. The straight portion 61b of the wiring 61 may be supported by the wiring support member 64. A portion of the wiring support member 64 may extend along the φ axis. The wiring support member 64 may be attached to the movable part 31, for example. In this case, the wiring support member 64 may extend from the movable part 31 or may be attached to a stay extending from the movable part 31. Note that the wiring support member 64 may be attached to the fixing part 32, for example. In this case, it can be said that the wiring support member 64 extends from the fixed part 32. Note that the wiring 61 may have another spiral portion between the straight portion 61b and the connector portion 63 instead of or in addition to the spiral portion 61a. That is, another spiral portion may be formed between the straight portion 61b and the connector portion 63.

The spiral portion 61a of the wiring 61 is wound or unwound as the movable portion 31 rotates around the φ axis. If the spiral portion 61a were not present, a portion of the wiring 61 necessary for rotating the movable portion 31 around the φ axis would have to be bent and placed (accommodated) in the hollow portion 38. On the other hand, since the wiring 61 has the spiral portion 61a, there is no need to bend a part of the wiring 61. In other words, it can be said that the spiral portion 61a absorbs the deflection.

Such characteristics of the spiral portion 61a of the wiring 61 prevent the wiring 61 from rubbing against the movable part 31 due to rotation of the movable part 31 around the φ axis (in other words, rotation of the mirror housing part 3). be able to. Therefore, it is possible to prevent the wiring 61 from being damaged due to the rotation of the mirror accommodating portion 3. Further, it is possible to prevent dirt from adhering to the movable part 31 due to the rotation of the mirror accommodating part 3. Furthermore, the rotation of the mirror accommodating portion 3 can be prevented from being influenced by the wiring 61.

A connector portion 62 is provided at one end of the wiring 61. A connector portion 63 is provided at the other end of the wiring 61. The connector section 62 is connected to a connector section (not shown) arranged inside the main body section 2 of the measurement system 1 shown in FIG. 2. The connector portion 63 is connected to a connector portion (not shown) disposed on at least one of the movable portion 31 of the second support mechanism 30 and the first support mechanism 20. A wiring E1 connected to the connector portion 63 is connected to the motor 23. A wiring E2 connected to the connector section 63 is connected to the sensor section 24a of the encoder 24. As shown in FIG. 9, a portion of the wiring 61 near the connector portion 62 may extend in the direction along the θ axis outside the movable portion 31 (that is, within the main body portion 2). Note that the connector portion 62 and the portion of the wiring 61 near the connector portion 62 may be attached to a stay extending from the fixed portion, for example. At this time, the stay may have a shape (for example, an L-shape) that follows the connector portion 62 and the portion of the wiring 61 near the connector portion 62 . By attaching the connector portion 62 and the portion of the wiring 61 near the connector portion 62 to the fixed portion, it is possible to prevent the spiral portion from unraveling due to the influence of rotation of the movable portion 31 around the φ axis.

As a result, electric power is supplied to the motor 23 and the sensor section 24a of the encoder 24 from the power supply section 53 shown in FIG. 2 via the wiring 61. A signal from the motor driver 52 shown in FIG. 2 is input to the motor 23 via the wiring 61. The sensor section 24a transmits a signal to the control section 51 shown in FIG. 2 via the wiring 61. Note that the wiring 61 may be connected to an electrical component (not shown) different from the motor 23 and the sensor section 24a.

The wiring 61 may be, for example, a multilayer flexible printed wiring board including insulating layers 611, 613, and 615 and conductive layers 612 and 614, as shown in FIG. The conductive layer 612 may constitute, for example, a part of an electric path connecting the motor 23 and the power supply section 53 and a signal path connecting the motor 23 and the motor driver 52. The conductive layer 614 may constitute, for example, a part of an electric path connecting the sensor section 24a and the power supply section 53 and a signal path connecting the sensor section 24a and the control section 51.

Note that in addition to the wiring 61, other wiring may be arranged in the hollow portion 38. That is, two or more wirings may be arranged in the hollow portion 38. For example, when the wiring 61 and other wiring are arranged in the hollow part 38, the other wiring may be connected to either the motor 23 or the sensor part 24a of the first support mechanism 20, or the 23 and the sensor section 24a (not shown), or may be connected to an electrical component of the second support mechanism 30.

As described above, the wiring 61 is arranged in the hollow part 38 on the opposite side to the hollow part 37 that forms part of the optical path of the measurement light L. If the wiring 61 is placed in the hollow portion 37, the wiring 61 must be placed so as to avoid the optical path of the measurement light L. On the other hand, if the wiring 61 is placed in the hollow part 38, even if the optical path of the measurement light L coincides with the φ axis (i.e., the rotation axis of the movable part 31), the wiring 61 The degree of freedom in design can be improved.

If the wiring 61 is placed in the hollow part 37, a space for the optical path of the measurement light L and a space for the wiring 61 must be secured in the hollow part 37, so the diameter of the hollow part 37 must be There is a risk that it will become relatively large. Then, for example, the movable portion 31 of the second support member 30 may become relatively large. On the other hand, if the wiring 61 is arranged in the hollow part 38, the diameter of the hollow part 37 can be made relatively small. In addition, the diameter of the hollow portion 38 can also be made relatively small.

Furthermore, by placing the wiring 61 in the hollow portion 38, the wiring 61 and the wiring support member 64 can be placed near the φ axis. Therefore, the force applied to the wiring 61 due to the rotation of the movable part 31 can be kept relatively small. As a result, it is possible to avoid, for example, increasing the thickness of the wiring 61 in order to increase the strength of the wiring 61 or increasing the strength of the fixing structure for fixing the wiring 61 to the wiring support member 64 too much.

If the wiring support member 64 is not provided, the wiring 61 may move due to rotation of the movable part 31, for example. Then, rotation of the movable part 31 may be hindered due to the tension of the wiring 61. On the other hand, since the straight portion of the wiring 61 extending along the φ axis is fixed to the wiring support member 64, smooth rotation of the movable portion 31 can be realized.

As shown in FIG. 12, a through hole 39 extending along the θ axis is formed in the movable portion 31 of the second support member 30. The through hole 39 communicates with the hollow portion 38 . A portion of the wiring 61 may be placed in the through hole 39 . An opening 313 may be formed in the movable portion 31 due to the through hole 39 . By forming the opening 313, for example, the wiring 61 can be arranged relatively easily.

During manufacturing of the measurement system 1, after the wiring 61 is arranged in the hollow portion 38 and the through hole 39, the resin member 36 is inserted into the through hole 39. The wiring 61 is not visible from the outside of the measurement system 1 due to the presence of the resin member 36. In addition, since the opening 313 is closed by the resin member 36, it is possible to prevent, for example, dust or liquid from entering the hollow portion 38. Further, the portion of the resin member 36 that closes the opening 313 has a surface shape that smoothly connects to the surface shape of the movable portion 31. Therefore, by inserting the resin member 36 into the through hole 39, it can be expected that the shape and the like of the movable part 31 will be visually aesthetically pleasing.

As shown in FIG. 4, the encoder 34 is disposed above (also referred to as "one side") with respect to the mirror M in the direction along the φ axis, and the encoder 34 is arranged on the optical path of the measurement light L. A hollow portion 37 that constitutes a part is formed. On the other hand, in the direction along the φ axis, a motor 33 is disposed below the mirror M (which may also be referred to as the "other side"), and a hollow portion 38 is formed.

Furthermore, as shown in FIG. 9, the optical path of the measurement light L is arranged above the mirror M in the direction along the φ axis. On the other hand, wiring (for example, wiring 61, etc.) connected to electrical components of the first support mechanism 20, such as the motor 23 and the encoder 24, is arranged below the mirror M in the direction along the φ axis. has been done.

With this configuration, the center of gravity of the gimbal mechanism 10 (and further, the center of gravity of the measurement system 1) can be made relatively low. Therefore, for example, the stability of the operation of the measurement system 1 can be improved.

6. Rotation Regulation The second support mechanism 30 may include two rotation regulation parts (not shown) that regulate rotation of the movable part 31 around the φ axis. Each of the two rotation regulating parts may include a rotor that rotates together with the movable part 31 and a stator whose position is fixed. One of the two rotation regulating sections may be arranged near the encoder 34, for example. The other rotation regulating section of the two rotation regulating sections may be arranged near the motor 33, for example. That is, one of the rotation regulating parts may be arranged above the mirror M in FIG. 4, for example. The other rotation regulating section may be arranged below the mirror M in FIG. 4, for example.

One of the rotation regulating parts may regulate the rotation of the movable part 31, for example, when the movable part 31 rotates clockwise around the φ axis when the movable part 31 is viewed from above in FIG. It can be said that the one rotation regulating section regulates the amount of rotation of the mirror M in the first rotation direction about the φ axis. The other rotation regulating section may regulate the rotation of the movable section 31 when the movable section 31 rotates to the left around the φ axis when the movable section 31 is viewed from above in FIG. 3, for example. It can be said that the other rotation regulating section regulates the amount of rotation of the mirror M around the φ axis in the second rotation direction opposite to the first rotation direction.

The method by which the rotation regulating section regulates the rotation of the movable section 31 will be explained. For example, as shown in FIG. 13A, the rotation regulating portion may include a rotor 71 on which a protrusion 711 is formed, and a stator 72 on which a protrusion 721 that can come into contact with the protrusion 711 is formed. In this case, the rotation of the movable part 31 may be restricted by the protrusion 711 of the rotor 71, which rotates as the movable part 31 rotates, coming into contact with the protrusion 721 of the stator 72. The rotation regulating section may regulate, for example, the protrusions 711 and 721 from rotating the movable section 31 about the φ axis by more than a predetermined rotation amount from the reference position.

In this case, for example, even though the control section 51 instructs the motor driver 52 to rotate the motor 33, there is no change in the rotation angle of the movable section 31 based on the signal from the sensor section 34a of the encoder 34. In addition, the motor driver 52 may be controlled to stop driving the motor 33.

Incidentally, as shown in FIG. 13(b), a member 722 such as a shock absorber or a cushioning material may be disposed on the protrusion 721 of the stator 72.

As shown in FIG. 13(c), the protrusion 721 of the stator 72 may be provided with a switch 723 that detects when the protrusion 711 of the rotor 71 contacts the protrusion 721 of the stator 72. In this case, the switch 723 may transmit, for example, a signal indicating that the protrusion 711 has contacted the protrusion 721 to the control unit 51. When the control unit 51 receives the signal, it may control the motor driver 52 to stop driving the motor 33.

As shown in FIG. 13(d), the position of the projection on the rotor 71a of one of the two rotation restriction parts and the projection of the rotor 71b of the other rotation restriction part of the two rotation restriction parts. The positions of are different from each other. In other words, it can be said that the protrusion of the rotor 71a of the one rotation regulating part and the protrusion of the rotor 71b of the other rotation regulating part are arranged at different positions in the circumferential direction around the φ axis. One of the rotation regulating portions regulates the rotation of the movable portion 31 within the range of angle Θ1 around the φ axis. The other rotation regulating portion regulates the rotation of the movable portion 31 within the range of angle Θ2 around the φ axis.

Note that in FIG. 13(d), there is an overlapping region between the range of angle Θ1 and the range of angle Θ2. This overlapping area may be, for example, an area used for the stroke of a member 722 (shock absorber, buffer material, etc.) shown in FIG. 13(b). Alternatively, the area may correspond to a range in which the movable part 31 rotates due to inertia when the rotation restriction part does not have a mechanical restriction member such as a protrusion. Here, if the rotation regulating section does not have a mechanical regulating member such as a protrusion, for example, when the rotation of the movable section 31 is optically or magnetically monitored and rotation of the movable section 31 exceeding a predetermined amount is detected. Then, the control unit 51 may control the motor driver 52 to stop driving the motor 33. In this case, for example, the encoder 34 may function as a rotation regulating section.

Such a rotation restricting portion can prevent, for example, the mirror housing portion 3 (in other words, the movable portion 31 of the second support mechanism 30) from rotating indefinitely to one side around the φ axis. As described above, wiring (for example, wiring 61, E1, E2, etc.) is arranged in and around the movable part 31. Therefore, if the movable part 31 is allowed to rotate without limit around the φ axis, there is a possibility that some kind of problem will occur in the above-mentioned wiring. By providing the second support mechanism 30 with the rotation regulating section, it is possible to prevent any problem from occurring in the wiring due to the rotation of the movable section 31.

Incidentally, since no wiring is arranged in or around the mirror holding member 21, the mirror holding member 21 may be freely rotatable around the θ axis.

As explained in "2. Gimbal mechanism", the fixing part 32 of the second support mechanism 30 may have a tapered surface (numerals "323" and "326" in FIG. 4 and symbol "329" in FIG. 5). reference). In this case, the measurement system 1 can irradiate the measurement light L onto the measurement target existing within the range of angle Θ3 around the θ axis, as shown in FIG. 14(a). Further, the measurement system 1 is capable of irradiating the measurement light L onto the measurement target existing within the range of angle Θ4 around the φ axis, as shown in FIG. 14(b).

Here, as shown in FIG. 14(b), the position of the mirror M in a state where the normal direction of the mirror M and the normal direction of the surface 327 of the portion 32c of the fixed part 32 is Use as reference position. At this time, the angle of the mirror M around the θ axis is 0 degrees, and the angle around the φ axis is 0 degrees. The range of the angle Θ3 may be, for example, from +45 degrees to -45 degrees. It may be possible to irradiate measurement light in a range of +45 degrees or more and -45 degrees or more by providing a. The range of the angle Θ4 may be, for example, from +120 degrees to -120 degrees. For example, the portion 32c may be narrowed, the angle of the tapered surface may be made steeper, or an opening may be provided at a predetermined position on the surface 327 of the portion 32c. By doing so, it may be possible to irradiate measurement light in a range of +120 degrees or more and -120 degrees or more.

Since the fixed part 32 is formed with a tapered surface that narrows toward the mirror M side, the movable part 31 of the second support mechanism 30 is supported by the fixed part 32 on both sides in the direction in which the φ axis extends. Also, the measurement range of the measurement system 1 can be made relatively wide. That is, according to the measurement system 1, it is possible to ensure the support strength of the movable part 31 by the fixed part 32 while making it possible to measure a relatively wide range.

7. Technical Effects For example, as shown in FIG. 4, the movable part 31 of the second support mechanism 30 constituting the mirror accommodating part 3 has a second support mechanism 31 on both one side and the other side in the direction in which the φ axis extends. It is supported by a fixed part 32 of a mechanism 30. Therefore, in the direction in which the φ axis extends, the rigidity of the second support mechanism 30 can be lowered compared to a case where only one of the movable parts 31 is supported by the fixed part 32.

Here, it has been found that the higher the rigidity, the more susceptible to thermal deformation. By supporting both one and the other of the movable parts 31 by the fixed part 32 in the direction in which the φ axis extends, the rigidity of the second support mechanism 30 can be made relatively low, and the rigidity of the second support mechanism 30 can be made relatively low. can be made less susceptible to thermal deformation.

In addition, since the rigidity of the second support mechanism 30 can be lowered, the components of the second support mechanism 30 (and the first support mechanism 20) can be made smaller. As a result, the measurement system 1 can be made smaller and lighter. Furthermore, the diameters of the bearing members B1, B2, B3, and B4 can be made relatively small. Then, the manufacturing accuracy of the bearing members B1, B2, B3, and B4 can be made relatively high. As a result, the accuracy of measurement results related to the measurement system 1 can be improved.

In the measurement system 1, the mirror accommodating part 3 including the movable part 31 is rotatable, while the optical engine unit 40 and the like are housed in the main body part 2 different from the mirror accommodating part 3, for example. For this reason, for example, when the attitude of the mirror is changed, the number of movable members can be minimized compared to a configuration in which the configuration corresponding to the optical engine unit 40 also moves due to the change in the attitude of the mirror. . In addition, a heat source and a vibration source, such as the optical engine unit 40, can be placed at a relatively distant position from the rotatable mirror housing 3.

<Usage example>
An example of use of the measurement system 1 configured as described above will be described with reference to FIGS. 15 to 17.

The measurement system 1 may be used, for example, to measure the positions of the workpiece W and the robot 81 shown in FIG. 15. Here, the robot 81 may process the workpiece W held by the jig 90. The workpiece W may be a relatively large structure such as the fuselage of an aircraft, for example.

The measurement system 1 determines the position of the measurement object (the "spatial coordinates" in "4. ) can be measured.

In FIG. 15, a reflector r11 is attached to a jig 90 as a measurement target. Reflectors r12 and r13 are attached to the work W as a measurement target. Note that while no reflector is attached to the workpiece W, at least three reflectors may be attached to the jig 90. A reflector module r2 including reflectors r21, r22, and r23, as shown in FIG. 16, is attached to the robot arm 810 of the robot 81. Note that the reflectors r11, r12, r13, r21, r22, and r23 may be referred to as measurement targets.

The measurement system 1 may measure the position of each of the reflectors r11, r12, and r13 in the measurement coordinate system based on the measurement light L irradiated to each of the reflectors r11, r12, and r13. The measurement system 1 may measure the position of each of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light L irradiated to each of the reflectors r21, r22, and r23.

"Measurement coordinate system" means a coordinate system related to the measurement system 1 (in other words, unique to the measurement system 1). The measurement coordinate system may be, for example, an orthogonal coordinate system composed of an X axis, a Y axis, and a Z axis that are orthogonal to each other.

Note that "measuring the position of the workpiece W" is not limited to directly measuring the position of a specific point on the workpiece W, but also includes, for example, measuring the positions of reflectors r12 and r13 attached to the workpiece W. , the concept may include measuring the position of the reflector r11 attached to the jig 90 that holds the workpiece W. Similarly, "measuring the position of the robot 41" is not limited to directly measuring the position of a specific location on the robot 41, but includes, for example, the reflector module r2 (in other words, the reflector r21, r22 and r23). Note that the reflector module r2 may include reflectors r21, r22, and r23, and a member r2a on which the reflectors r21, r22, and r23 are arranged.

For example, the control unit 51 of the measurement system 1 shown in FIG. , may be transmitted to the measurement control device 200. The measurement control device 200 is configured to be able to communicate with a processing control device 300 that controls the robot 81 via a network (not shown).

The processing control device 300 controls the robot 81 under a robot coordinate system that is a coordinate system related to the robot 81, for example. Specifically, the processing control device 300 sets a path along which a point on the robot arm 810 of the robot 81 moves under the robot coordinate system. Processing control device 300 controls robot 81 so that one point on robot arm 810 moves along a set path.

Here, one point on the robot arm 810 is called a "tool center point" (hereinafter appropriately referred to as "TCP"). As shown in FIG. 16, the TCP roughly specifies the position of the portion of the end effector EE attached to the tip of the robot arm 810 that acts on the workpiece. Note that the robot coordinate system may be, for example, an orthogonal coordinate system composed of an X axis, a Y axis, and a Z axis that are orthogonal to each other.

In this way, the measurement system 1 and the processing control device 300 each use their own coordinate systems (i.e., measurement coordinate system, robot coordinate system). Therefore, in order to use the measurement results by the measurement system 1 (for example, the position of the reflector r11, etc.) in the processing control device 300, it is necessary to convert the measurement coordinate system and the robot coordinate system.

In addition, as shown in FIG. 16, the positions of each of the reflectors r21, r22, and r23 measured by the measurement system 1 are different from the position of the TCP. Therefore, it is necessary to determine the position of the TCP based on the position of each of the reflectors r21, r22, and r23.

For example, the measurement control device 200, based on the positions of each of the reflectors r11, r12, and r13 in the measurement coordinate system measured by the measurement system 1, and the positions of each of the reflectors r11, r12, and r13 in the robot coordinate system, Coordinate transformation information for transforming the position in the measurement coordinate system and the position in the robot coordinate system may be obtained. It is assumed that the positions of the reflectors r11, r12, and r13 in the robot coordinate system are known.

The position of the TCP may be measured, for example, as follows. In FIG. 16, a jig 91 has a hole H into which a rod-shaped end effector EE is inserted. A sensor S for measuring the end effector EE is arranged at the bottom of the hole H. It is assumed that the jig 91 is fixed so that its position does not change. For example, it is assumed that the position of the sensor S in the robot coordinate system, in other words, the position of the bottom surface of the hole H of the jig 91 is known.

In this case, when the tip of the end effector EE contacts the sensor S (in other words, when the sensor S detects the tip of the end effector EE), the position of the TCP of the end effector EE is identified as the position of the sensor S. be done. In this way, the position of the TCP in the robot coordinate system may be measured.

In the first state where the sensor S is in contact with the tip of the end effector EE, the positional relationship between the position of each of the reflectors r21, r22, and r23 and the position of the TCP is uniquely determined.

The measurement control device 200 may acquire the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement system 1 in the first state. For example, the measurement control device 200 may use the coordinate conversion information described above to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system. .

The measurement control device 200 determines the position of the TCP based on the position of each of the reflectors r21, r22, and r23 in the robot coordinate system and the position of the TCP in the robot coordinate system. You may obtain location conversion information for

The measurement control device 200 may acquire the positions of each of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement system 1 in a second state different from the first state. For example, the measurement control device 200 may use the coordinate conversion information described above to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system. . For example, the measurement control device 200 may determine the position of the TCP in the robot coordinate system based on the above-mentioned position conversion information and the positions of the reflectors r21, r22, and r23 in the robot coordinate system.

The measurement control device 200 may transmit a position signal indicating the position of the TCP in the robot coordinate system to the processing control device 300. The processing control device 300 may control the robot 81 based on the position of the TCP in the robot coordinate system.

Note that at least one of the coordinate transformation information and position transformation information described above may be obtained by the processing control device 300 instead of the measurement control device 200. For example, the measurement control device 200 may transmit position signals indicating the positions of the reflectors r21, r22, and r23 in the measurement coordinate system measured by the measurement system 1 to the processing control device 300 in the second state. In this case, the processing control device 300 converts the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system based on the coordinate conversion information described above. good. The processing control device 300 may determine the position of the TCP in the robot coordinate system based on the above-mentioned position conversion information and the positions of the reflectors r21, r22, and r23 in the robot coordinate system.

The measurement system 1 changes the attitude of the mirror M using the first support mechanism 20 and the second support mechanism 30, for example, while the robot arm 810 of the robot 81 is moving, thereby measuring the reflectors r21, r22 and The irradiation of the measurement light L to at least one of r23 may be continued. In other words, the measurement system 1 uses the first support mechanism 20 and the second support mechanism 30 to support the mirror M so that the measurement light L follows at least one of the reflectors r21, r22, and r23 as the measurement target. You may change your posture. In other words, the first support mechanism 20 and the second support mechanism 30 are used so that at least one of the reflectors r21, r22, and r23 as a moving measurement target is located in the second optical path OP2. The attitude of mirror M may be changed.

As shown in FIG. 17, the workpiece W may be processed by a plurality of robots 81, 82, and 83. The processing control device 300 may control a plurality of robots 81, 82, and 83, respectively. In this case, the robot coordinate system described above may be a common coordinate system for the plurality of robots 81, 82, and 83, or a robot coordinate system may be set for each robot (i.e., a robot coordinate system may be set for each robot. (One robot coordinate system may be set, and another robot coordinate system may be set for another robot.) Note that, instead of the processing control device 300, there may be a plurality of processing control devices corresponding to the plurality of robots 81, 82, and 83, respectively. That is, one robot may be controlled by one processing control device, and another robot may be controlled by another processing control device.

A reflector module r2 including reflectors r21, r22, and r23 shown in FIG. 16 is attached to the robot arm 810 of the robot 81. However, in FIG. 17, illustration of the reflector module r2 is omitted. Similarly, a reflector module including three reflectors is attached to the robot arm 820 of the robot 82. A reflector module including three reflectors is attached to the robot arm 830 of the robot 83.

The measurement system 1 determines the positions of the reflectors r21, r22, and r23 in the measurement coordinate system based on the measurement light L irradiated to each of the reflectors r21, r22, and r23 included in the reflector module r2 attached to the robot arm 810. measure.

For example, the measurement control device 200 may use the coordinate conversion information described above to convert the positions of the reflectors r21, r22, and r23 in the measurement coordinate system to the positions of the reflectors r21, r22, and r23 in the robot coordinate system. . For example, the measurement control device 200 determines the position of the TCP (see FIG. 16) related to the robot arm 810 in the robot coordinate system based on the above-mentioned position conversion information and the positions of the reflectors r21, r22, and r23 in the robot coordinate system. You can ask for.

In this case, the measurement control device 200 may transmit a position signal indicating the position of the TCP related to the robot arm 810 in the robot coordinate system to the processing control device 300. The processing control device 300 may control the robot 81 based on the position of the TCP related to the robot arm 810 in the robot coordinate system.

The measurement system 1 measures the position of each of the three reflectors in the measurement coordinate system based on the measurement light L irradiated to each of the three reflectors included in the reflector module attached to the robot arm 820.

For example, the measurement control device 200 uses the coordinate conversion information described above to convert the positions of the three reflectors attached to the robot arm 820 in the measurement coordinate system to the positions of each of the three reflectors in the robot coordinate system. It's fine. For example, the measurement control device 200 determines the position of the robot based on the second position conversion information obtained in the same manner as the position conversion information described above and the positions of the three reflectors attached to the robot arm 820 in the robot coordinate system. The position of a TCP (not shown) associated with robot arm 820 in the coordinate system may be determined.

In this case, the measurement control device 200 may transmit a position signal indicating the position of the TCP related to the robot arm 820 in the robot coordinate system to the processing control device 300. The processing control device 300 may control the robot 82 based on the position of the TCP related to the robot arm 820 in the robot coordinate system.

The measurement system 1 measures the position of each of the three reflectors in the measurement coordinate system based on the measurement light L irradiated to each of the three reflectors included in the reflector module attached to the robot arm 830.

For example, the measurement control device 200 uses the coordinate conversion information described above to convert the positions of the three reflectors attached to the robot arm 830 in the measurement coordinate system to the positions of each of the three reflectors in the robot coordinate system. It's fine. For example, the measurement control device 200 determines the position of the robot based on the third position conversion information obtained in the same manner as the position conversion information described above and the positions of each of the three reflectors attached to the robot arm 830 in the robot coordinate system. The position of a TCP (not shown) associated with robot arm 830 in the coordinate system may be determined.

In this case, the measurement control device 200 may transmit a position signal indicating the position of the TCP related to the robot arm 830 in the robot coordinate system to the processing control device 300. The processing control device 300 may control the robot 83 based on the position of the TCP related to the robot arm 830 in the robot coordinate system.

Note that the second position conversion information is information for determining the position of the TCP related to the robot arm 820 based on the positions of each of the three reflectors attached to the robot arm 820. Similarly, the third position conversion information is information for determining the position of the TCP related to the robot arm 830 based on the positions of each of the three reflectors attached to the robot arm 830.

In the above explanation, the optical engine unit 40 measures the rejection to the measurement target using an optical interference method, but there is also a method for measuring the TOF (Time of Flight) of the optical pulse, and the intensity, wavelength, etc. are modulated. Various methods can be used, such as a method of measuring the arrival time of laser light.

<Additional notes>
Regarding the embodiment described above, the following additional notes are further disclosed.

(Additional note 1)
An irradiation optical system capable of outputting measurement light,
a mirror that reflects the measurement light;
a first support mechanism that rotatably supports the mirror around a first rotation axis;
a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
The second support mechanism includes:
a movable part that supports the first support mechanism on both sides in a direction along the first rotation axis and rotates it around the second rotation axis;
The movable part is supported on one side and the other side with respect to the first support mechanism in a direction along the second rotation axis, and the movable part is rotatable around the second rotation axis. a fixed part that supports the
has
The optical path of the measurement light is arranged on one side with respect to the mirror in the direction of the second rotation axis,
Wiring connected to electrical components of the first support mechanism is arranged on the other side with respect to the mirror in the direction of the second rotation axis,
A measurement system, wherein the first support mechanism and the second support mechanism are used to change the attitude of the mirror, and the mirror reflects the measurement light toward a measurement target.

(Additional note 2)
A first hollow part is formed on the one side of the second support mechanism,
A second hollow portion is formed on the other side of the second support mechanism,
The measurement system according to supplementary note 1, wherein the wiring is arranged in the second hollow part.

(Additional note 3)
The measurement system according to supplementary note 2, further including a cover member disposed between the second hollow part and the mirror and covering the second hollow part.

(Additional note 4)
further comprising a casing that houses at least a portion of the first support mechanism,
The housing has an opening provided in the direction of the first rotation axis,
The measurement system according to appendix 3, wherein the cover member closes the second hollow portion by being inserted through the opening.

(Appendix 5)
The angle of the mirror around the second rotation axis in a state where the mirror is at a reference position around the second axis is 0 degrees, and the angle of the mirror in the rotation direction around the second rotation axis is 0 degrees. The measurement system according to any one of appendices 1 to 4, wherein the measurement light can be irradiated onto the measurement target in a range of -120 degrees≦Θ≦+120 degrees, where Θ is an angle around the rotation axis of .

(Appendix 6)
An irradiation optical system capable of outputting measurement light,
a mirror that reflects the measurement light;
a first support mechanism that rotatably supports the mirror around a first rotation axis;
a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
The second support mechanism includes:
a movable part that supports the first support mechanism on both sides in a direction along the first rotation axis and rotates it around the second rotation axis;
The movable part is supported on one side and the other side with respect to the first support mechanism in a direction along the second rotation axis, and the movable part is rotatable around the second rotation axis. a fixed part that supports the
measurement system.

(Appendix 7)
An irradiation optical system capable of outputting measurement light,
a mirror that reflects the measurement light toward a measurement target;
a first support mechanism that rotatably supports the mirror around a first rotation axis;
a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
The second support mechanism includes:
a motor disposed on one side of the mirror in the direction of the second rotation axis, the motor rotating the mirror around the second rotation axis;
Wiring connected to electrical components of the first support mechanism is arranged on the one side in the direction of the second rotation axis;
measurement system.

(Appendix 8)
An irradiation optical system capable of outputting a beam,
a mirror that reflects the beam;
a first support mechanism that rotatably supports the mirror around a first rotation axis;
a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
The second support mechanism includes:
a movable part that supports the first support mechanism on both sides in a direction along the first rotation axis and rotates it around the second rotation axis;
The movable part is supported on one side and the other side with respect to the first support mechanism in a direction along the second rotation axis, and the movable part is rotatable around the second rotation axis. a fixed part that supports the
has
The optical path of the measurement light is arranged on one side with respect to the mirror in the direction of the second rotation axis,
Wiring connected to electrical components of the first support mechanism is arranged on the other side with respect to the mirror in the direction of the second rotation axis,
A beam irradiation system, wherein the first support mechanism and the second support mechanism are used to change the attitude of the mirror, and the mirror reflects the measurement light toward a measurement target.

(Appendix 9)
An irradiation optical system capable of outputting a beam,
a mirror that reflects the beam toward a measurement target;
a first support mechanism that rotatably supports the mirror around a first rotation axis;
a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
The second support mechanism includes:
a rotational displacement sensor that is disposed on one side of the mirror in the direction of the second rotation axis and detects rotational displacement of the mirror;
a motor that is disposed on the other side of the mirror in the direction of the second rotation axis and rotates the mirror around the second rotation axis;
Beam irradiation system.
(Appendix 10)
An irradiation optical system capable of outputting a beam,
a mirror that reflects the beam toward a measurement target;
a first support mechanism that rotatably supports the mirror around a first rotation axis;
a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
The first support mechanism includes:
a motor that is disposed on one side of the mirror in the direction of the first rotation axis and rotates the mirror around the first rotation axis;
a rotational displacement sensor that is disposed on the other side of the mirror in the direction of the first rotation axis and detects rotational displacement of the mirror;
Beam irradiation system.

(Appendix 11)
Outputting measurement light from the irradiation optical system;
a first support mechanism that rotatably supports the mirror around a first rotation axis; and a second support that supports the first support mechanism rotatably around a second rotation axis that intersects the first rotation axis. changing the attitude of the mirror using a mechanism, and reflecting the measurement light toward the measurement target on the mirror;
including;
The second support mechanism includes:
a movable part that supports the first support mechanism at both ends in a direction along the second rotation axis and rotates the first support mechanism around the second rotation axis;
The movable part is supported on one side and the other side with respect to the first support mechanism in a direction along the second rotation axis, and the movable part is rotated around the second rotation axis. a fixed part capable of supporting;
has
The optical path of the measurement light is arranged on one side with respect to the mirror in the direction along the second rotation axis,
A measuring method, wherein wiring connected to electrical components of the first support mechanism is arranged on the other side of the mirror in the direction along the second rotation axis.

(Appendix 12)
a first support mechanism that rotatably supports the mirror around a first rotation axis; and a second support that supports the first support mechanism rotatably around a second rotation axis that intersects the first rotation axis. A measurement method in a measurement system comprising a mechanism,
Outputting measurement light from the irradiation optical system;
a rotational displacement sensor disposed on one side of the mirror in the direction of the second rotation axis, detecting rotational displacement of the mirror;
A motor disposed on the other side of the mirror in the direction of the second rotation axis rotates the mirror around the second rotation axis;
Measurement methods including.

(Appendix 13)
a first support mechanism that rotatably supports the mirror around a first rotation axis; and a second support that supports the first support mechanism rotatably around a second rotation axis that intersects the first rotation axis. A measurement method in a measurement system comprising a mechanism,
Outputting measurement light from the irradiation optical system;
A motor disposed on one side of the mirror in the direction of the first rotation axis rotates the mirror around the first rotation axis;
a rotational displacement sensor disposed on the other side of the mirror in the direction of the first rotation axis, detecting rotational displacement of the mirror;
Measurement methods including.

The present invention is not limited to the embodiments described above, and can be modified as appropriate within the scope or idea of the invention that can be read from the claims and the entire specification. It is also included within the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 1... Measurement system, 2... Main body part, 3... Mirror housing part, 10... Gimbal mechanism, 20... First support mechanism, 21... Mirror holding member, 23, 33... Motor, 24, 34... Encoder, 30... Second Support mechanism, 31... Movable part, 32... Fixed part, 35, 36... Resin member, 37, 38... Hollow part, 40... Optical engine unit, 41... Light source, 42... Interferometer head, 43... Detecting part, 50... Control unit, 51...Control unit, 52...Motor driver, 53...Power supply unit, M...Mirror

Claims (50)

1. An irradiation optical system capable of outputting measurement light,
   a mirror that reflects the measurement light;
   a first support mechanism that rotatably supports the mirror around a first rotation axis;
   a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
   The second support mechanism includes:
   a movable part that supports the first support mechanism at both ends in a direction along the first rotation axis and rotates it around the second rotation axis;
   The movable part is supported on one side and the other side with respect to the first support mechanism in a direction along the second rotation axis, and the movable part is rotated around the second rotation axis. a fixed part capable of supporting;
   has
   The optical path of the measurement light is arranged on one side with respect to the mirror in the direction along the second rotation axis,
   Wiring connected to electrical components of the first support mechanism is arranged on the other side of the mirror in the direction along the second rotation axis,
   A measurement system, wherein the first support mechanism and the second support mechanism are used to change the attitude of the mirror, and the mirror reflects the measurement light toward a measurement target.
2. A cylindrical hollow part is formed on the one side of the second support mechanism,
   The measurement system according to claim 1, wherein at least a portion of the optical path is arranged in the hollow part.
3. The measurement system according to claim 2, wherein the hollow part is formed within the movable part.
4. The hollow part is formed as a first hollow part on the one side of the second support mechanism,
   A second hollow portion is formed on the other side of the second support mechanism,
   The measurement system according to claim 2 or 3, wherein the wiring is arranged in the second hollow part.
5. The measurement system according to claim 4, wherein the second hollow part is formed within the movable part.
6. The measurement system according to any one of claims 1 to 5, wherein the optical path is arranged on the second rotation axis.
7. The measurement system according to any one of claims 1 to 6, wherein at least a portion of the wiring is fixed to a wiring support member extending from the movable part.
8. The measurement system according to claim 7, wherein at least a portion of the wiring support member extends along the second rotation axis.
9. The wiring has a spiral portion arranged in a spiral around the second rotation axis, and a straight portion extending from the spiral portion along the second rotation axis,
   The measurement system according to claim 7 or 8, wherein the straight portion is supported by the wiring support member.
10. The measurement system according to any one of claims 1 to 9, wherein the wiring includes a flexible printed wiring board.
11. The measurement system according to claim 10, wherein the flexible printed wiring board is a multilayer flexible printed wiring board.
12. The measurement according to any one of claims 1 to 11, further comprising at least one rotation restriction part that restricts the movable part from rotating by more than a predetermined rotation amount from a reference position about the second rotation axis. system.
13. The rotation regulating section regulates the rotation of the mirror when it is detected that the movable section rotates by more than the predetermined rotation amount from the reference position about the second rotation axis. measurement system.
14. The at least one rotation restriction portion includes a first rotation restriction portion and a second rotation restriction portion,
    The first rotation regulating section is disposed on the one side, and regulates the amount of rotation of the mirror in a first rotation direction about the second rotation axis,
    The second rotation regulating part is disposed on the other side and regulates the amount of rotation of the mirror about the second rotation axis in a second rotation direction opposite to the first rotation direction,
    The measurement system according to claim 12 or 13, wherein the first rotation restriction section and the second rotation restriction section are arranged at mutually different positions in a circumferential direction around the second rotation axis.
15. The measurement system according to any one of claims 1 to 14, wherein at least one optical element that transmits the measurement light is arranged on the one side along the optical path.
16. The at least one optical element includes a first optical element and a second optical element,
    The first optical element is arranged at an angle with respect to the optical path,
    The measurement system according to claim 15, wherein the second optical element is arranged to be inclined with respect to the optical path in a direction opposite to a direction in which the first optical element is inclined.
17. Each of the first optical element and the second optical element has a first surface and a second surface through which the measurement light passes,
    The measurement system according to claim 16, wherein each of the first optical element and the second optical element is a plate in which the first surface and the second surface are parallel.
18. A part of the optical path between the irradiation optical system and the mirror is arranged in a closed space,
    The at least one optical element includes an optical element disposed at one end of the closed space,
    The measurement system according to claim 16 or 17, wherein the measurement light is emitted from the closed space toward the mirror via the optical element disposed at the one end.
19. The fixing portion includes a first portion disposed on the one side of the second support mechanism, a second portion disposed on the other side of the second support mechanism, and the first portion and the first portion. and a third part connecting the two parts,
    The measurement system according to any one of claims 1 to 18, wherein the irradiation optical system is fixed to the first portion.
20. The first to third portions have a first surface facing the first support mechanism and a second surface opposite to the first surface,
    The measurement system according to claim 19, wherein at least one of the first to third portions has a tapered surface that widens from the first surface toward the second surface.
21. The second angle of the mirror in the rotational direction around the second rotational axis, assuming that the angle of the mirror around the second rotational axis when the mirror is at the reference position around the second axis is 0 degrees. According to claim 19 or 20, the third portion is provided so that the measurement light can be irradiated onto the measurement object in a range of −120 degrees≦Θ≦+120 degrees, where Θ is an angle around the rotation axis of the third portion. Measurement system as described.
22. The measurement light extends along a first optical path extending along the second rotation axis and a direction that intersects both the direction in which the first rotation axis extends and the direction in which the second rotation axis extends. passing through the second optical path and heading toward the measurement target,
    The measurement system according to any one of claims 1 to 21, wherein the mirror is arranged at an intersection of the first optical path and the second optical path.
23. The measurement system according to claim 22, wherein the first support mechanism has a space therein that forms a part of the first optical path and a part of the second optical path.
24. The measurement system according to any one of claims 1 to 23, wherein the second support mechanism includes a motor that rotates the movable part around the second rotation axis on the other side.
25. 25. The second support mechanism is provided with a rotational displacement sensor that detects rotational displacement of the movable part on the one side in the direction of the second rotation axis. Measurement system as described.
26. The first support mechanism includes:
    a second motor that rotates the mirror around the first rotation axis on one side with respect to the mirror in the direction of the first rotation axis;
    a second rotational displacement sensor for detecting rotational displacement of the mirror on the other side with respect to the mirror in the direction of the first rotation axis;
    The measurement system according to any one of claims 1 to 25.
27. An irradiation optical system capable of outputting measurement light,
    a mirror that reflects the measurement light toward a measurement target;
    a first support mechanism that rotatably supports the mirror around a first rotation axis;
    a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
    The second support mechanism includes:
    a rotational displacement sensor that is disposed on one side of the mirror in the direction of the second rotation axis and detects rotational displacement of the mirror;
    a motor that is disposed on the other side of the mirror in the direction of the second rotation axis and rotates the mirror around the second rotation axis;
    A measurement system equipped with.
28. The measurement system according to claim 27, wherein the optical path of the measurement light is arranged on the one side of the second support mechanism.
29. The measurement system according to claim 27 or 28, wherein wiring connected to an electrical component is arranged on the other side of the second support mechanism.
30. A cylindrical hollow part is formed on the other side of the second support mechanism,
    The motor is arranged at least in part around the hollow part,
    The measurement system according to claim 29, wherein the wiring is arranged in the hollow part.
31. The measurement system according to claim 29 or 30, wherein the wiring is connected to an electrical component different from the motor and the rotational displacement sensor.
32. The measurement system according to claim 31, wherein the electrical component is provided in the first support mechanism.
33. The electrical components are
    a second motor that is disposed on one side of the mirror in the direction of the first rotation axis and rotates the first support mechanism around the first rotation axis;
    32. The second rotational displacement sensor includes at least one of a second rotational displacement sensor that is arranged on the other side of the mirror in the direction of the first rotational axis and detects rotational displacement of the first support mechanism. The measurement system described in .
34. The measurement system according to any one of claims 29 to 33, wherein at least a portion of the wiring is fixed to a wiring support member extending from the second support mechanism.
35. An irradiation optical system capable of outputting measurement light,
    a mirror that reflects the measurement light toward a measurement target;
    a first support mechanism that rotatably supports the mirror around a first rotation axis;
    a second support mechanism that rotatably supports the first support mechanism around a second rotation axis that intersects the first rotation axis;
    The first support mechanism includes:
    a motor that is disposed on one side of the mirror in the direction of the first rotation axis and rotates the mirror around the first rotation axis;
    a rotational displacement sensor that is disposed on the other side of the mirror in the direction of the first rotation axis and detects rotational displacement of the mirror;
    Equipped with
    measurement system.
36. 36. The measurement system according to claim 35, wherein the first support mechanism includes a balance mass for adjusting weight balance arranged on the other side of the mirror in the direction of the first rotation axis.
37. The measurement system according to claim 36, wherein the rotational displacement sensor is arranged inside the balance mass.
38. The first support mechanism includes:
    a movable part that supports the mirror on both sides in the direction of the first rotation axis and rotates it around the first rotation axis;
    a fixed part that rotatably supports the movable part from both sides in the direction of the first rotation axis;
    The measurement system according to any one of claims 35 to 37.
39. The measurement system according to claim 38, wherein the movable part supports the mirror at three support points.
40. The movable part includes an elastic member,
    The measurement system according to claim 39, wherein the position where the elastic member applies elastic force to the mirror is the center of gravity of a triangle having the three support points as vertices.
41. An annular groove is formed around the movable part,
    An annular convex portion corresponding to the annular groove is formed in a portion where the second support mechanism rotatably supports the first support mechanism;
    The measurement system according to any one of claims 35 to 40, wherein the annular groove portion rotatably fits into the annular convex portion.
42. Wiring is arranged on one side of the mirror in the direction of the second rotation axis,
    The measurement system according to any one of claims 35 to 41, wherein the wiring is connected to at least one of the motor and the rotational displacement sensor.
43. The measurement system according to any one of claims 35 to 42, wherein at least a portion of the wiring is fixed to a wiring support member extending from the movable part.
44. The measurement system according to claim 43, wherein at least a portion of the wiring support member extends along the second rotation axis.
45. The wiring has a spiral portion arranged in a spiral around the second rotation axis, and a straight portion extending from the spiral portion along the second rotation axis,
    The measurement system according to claim 44, wherein the straight portion is supported by the wiring support member.
46. The measurement system according to any one of claims 35 to 45, wherein the wiring includes a flexible printed wiring board.
47. The measurement system according to claim 46, wherein the flexible printed wiring board is a multilayer flexible printed wiring board.
48. The measurement system according to any one of claims 1 to 47, wherein the second rotation axis direction is a direction of gravity.
49. further comprising a light receiving section that receives reflected light generated from the measurement target by irradiation with the measurement light,
    The measurement system according to any one of claims 1 to 48, wherein at least one of a position and an orientation of the measurement target is acquired based on an output from the light receiving unit.
50. While the measurement target is moving, the first support mechanism and the second support mechanism are used to change the attitude of the mirror to continue irradiating the measurement light onto the measurement target. The measurement system according to any one of the items.

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