JP2003043405A - Scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scanner which is not affected by torsional vibrations and can position a mirror at a high speed and with high accuracy. SOLUTION: A motor which drives the mirror 1 to rotate is composed of a rotation shaft 3, a moving coil 2 which is constituted by a mirror holder 4 fixed to the rotation shaft 3 and square ring shaped coil parts 5a, 5b fixed to both sides of the mirror holder 4, bearings 7, 8, bearing holders 12, 13 and magnets 9a-10b. Therein, the mirror 1 is fixed to the mirror holder 2 in such a manner that the center of gravity runs the center of a side of the coil part 5a which is almost parallel to shaft line of the rotation shaft 3 and approximately corresponds to the point where a straight line vertical to the shaft line of the rotation shaft 3 intersects the shaft line of the rotation shaft 3. In such a case, it is more effective if the mirror surface of the mirror 1 is permitted to coincide with a flat plane which contains the shaft line of the rotation shaft 3.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanner device for positioning a laser beam or the like at a predetermined position in a laser processing machine, a laser marker or the like.

[0002]

2. Description of the Related Art For example, in laser marking or laser drilling of a printed circuit board, a laser composed of a motor and a mirror is used to irradiate a predetermined position of a workpiece with a laser beam output from a fixed laser oscillator. The mirror of the device is arranged in the optical path, and the irradiation position of the laser light is controlled by changing the angle of the mirror. The mirror is usually fixed to the shaft end of the rotary shaft of the motor, and the angle of the mirror is controlled by positioning the angle of the rotary shaft.

When drilling a laser on a fine circuit pattern on a printed circuit board, a laser beam positioning error is about 1
It should be 0 μm or less. Further, it is required to machine about 1000 holes per second, and the time required to position the laser beam at the next machining position after the completion of machining is 1 ms on average.
Must be less than.

R. Aylward's paper "Advanc
es in Galvanometer-Based
Optical Scanners "(Lasers &
Optronics Vol. 18, No. 8, Gordon Pu
Publications, 1999) (hereinafter, referred to as “first conventional technology”) discloses the configurations of three types of scanner devices, a moving iron type, a moving coil type, and a moving magnet type.

Further, Japanese Laid-Open Patent Publication No. 11-195235 (hereinafter referred to as "second conventional technique") discloses a technique of a scanner device which selectively guides a light beam in an optical head of an optical disc device. There is. The scanner device in this technology is a moving magnet type in which a permanent magnet is attached to the back surface of the mirror frame that holds the mirror.

Further, Japanese Laid-Open Patent Publication No. 11-295636 (hereinafter referred to as "third prior art") discloses a technique of a scanner device which shakes a laser beam in a minute angle in an optical head of an optical disc device. . The scanner device in this technique is a moving coil type in which a coil for driving a mirror is opposed to a magnet.

[0007]

In the case of the scanner device in which the mirror is held at the shaft end of the rotary shaft of the motor, the mirror becomes an inertial load on the rotary shaft. For this reason, torsional vibration may occur in the rotating portion during the positioning operation, and it may not be possible to speed up the positioning operation. However, the first conventional technique does not disclose means for suppressing the torsional vibration.

Further, when a relatively large mirror is driven, it is expected that the magnet becomes large and the moment of inertia of the movable part increases to slow the response of the mirror. Does not disclose means for improving responsiveness, that is, means for speeding up positioning.

Further, when positioning a relatively large mirror in a relatively large angle range (generally ± 10 ° or more),
Although it is expected that the response of the mirror will be slow,
The prior art does not disclose means for improving responsiveness.

The object of the present invention is to solve the above-mentioned problems in the prior art, to avoid the influence of torsional vibration,
It is an object of the present invention to provide a scanner device capable of highly accurate positioning.

[0011]

In order to achieve the above object, the first means of the present invention is to provide an N pole and an S pole via a predetermined gap.
A magnet whose poles are fixed so as to face each other; a polygonal winding part supported by a rotating shaft, the sides of which are substantially parallel to the axis of the rotating shaft are arranged in the gap of the magnet; In the scanner device in which the winding unit includes a motor rotatable around the axis of the rotating shaft and a mirror, and the mirror is rotated by the motor, the mirror and the The winding part and the winding part are arranged side by side in the radial direction of the rotating shaft.

The second means of the present invention is supported by a magnet, which is fixed so that the N pole and the S pole face each other through a predetermined gap, and is supported by the rotary shaft, and is substantially parallel to the axis of the rotary shaft. A motor having a polygonal winding portion whose sides are arranged in the gap of the magnet and a support device for the rotating shaft, the winding portion being rotatable around the axis of the rotating shaft, and a mirror. And a scanner device in which the mirror is rotated by the motor, two sets of the motor are provided,
The mirror and the winding portion of the first motor are arranged side by side in the radial direction of the rotation shaft of the first motor, and the winding portion of the first motor and the winding portion of the second motor are rotated. The axis line of the shaft is arranged side by side in the radial direction of the rotation shaft of the second motor, which is perpendicular to the axis line of the rotation shaft of the first motor.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) The present invention will be described below based on the illustrated embodiment.

1 to 4 are views showing a first embodiment of the present invention. FIG. 1 is an exploded perspective view showing the structure of a scanner device, and FIG. 2 is a plan view of the scanner device. FIG. 3 is a diagram showing a configuration of a feedback control system, and FIG.
FIG. 4 is a sectional view taken along line BB in FIG.

In FIG. 1, the moving coil 2 is composed of a mirror holder 4 and rectangular annular winding portions 5a and 5b fixed to both sides of the mirror holder 4, and the mirror holder 4 is fixed to the rotary shaft 3. ing.

The center of gravity of the mirror 1 is the rotating shaft 3 of the winding portion 5a.
It is fixed to the mirror holder 4 so that a straight line passing through the center of the side substantially parallel to the axis of the rotary shaft 3 and perpendicular to the axis of the rotary shaft 3 substantially coincides with a point intersecting the axis of the rotary shaft 3.

The angle sensor 6 is attached to the rotary shaft 3 so as to be adjacent to the mirror holder 4. Hereinafter, the mirror 1, the moving coil 2, the rotating shaft 3, and the angle sensor 6 are collectively referred to as a "movable portion R". Moving part R
Are held in bearing holders 12, 13 via bearings 7, 8.

Magnets 9a to 10b and bearing holders 12 and 13 are fixed to the base 11. As shown in FIG. 2, the magnet 9a is provided on the winding portion 5a, and the magnet 10a is provided on the winding portion 5b.
Are arranged so as to be surrounded by a gap. Magnet 9
b and 10b are arranged at positions where the N pole and the S pole face the magnet 9a and the magnet 10a, respectively, and do not interfere with the winding portions 5a and 5b in the movable angle range required for the mirror 1. There is.

The rotary shaft 3, moving coil 2,
Bearings 7, 8, bearing holders 12, 13 and magnets 9
A motor is formed by a to 10b.

Next, the configuration and operation of the control system will be described with reference to FIG.

In FIG. 2, when a counterclockwise motor drive current 49 is applied to the winding portions 5a and 5b, due to Fleming's left hand rule, the winding portion 5b receives an electromagnetic force upward in the drawing and the winding portion 5a. Electromagnetic force acts downward on the paper. As a result, the electromagnetic force acting on the winding portions 5a and 5b becomes a driving torque, and the movable portion R rotates.

Then, the angle of the mirror 1 is controlled by the feedback control described below. That is, the rotating shaft 3
Of the angle sensor 6 and the detected angle detection signal 42 is detected by the angle sensor 6, and the proportional compensation circuit 45 and the differential compensation circuit 46 for maintaining the stability of the adder 50 and the feedback system.
To enter.

Then, the mirror 1 provided from the host device
The deviation between the angle target value signal 41 and the angle detection signal 42 is calculated by the adder 50, and the obtained deviation signal 43 is time-integrated by the integration compensation circuit 44. In addition, the angle detection signal 42
Are multiplied or differentiated by a proportional compensation circuit 45 and a differential compensation circuit 46, and respective output signals are added by an adder 52.

Then, the output signal of the integral compensation circuit 44 and the output signal of the adder 52 are added by the adder 51 and input to the motor drive circuit 48 as a control input signal 47.

The motor drive circuit 48 has a control input signal 47.
A motor drive current 49 corresponding to the above is supplied to the winding portions 5a and 5b.

Then, by controlling the value of the motor drive current 49, the mirror 1 is positioned at the target angle value without a steady deviation.

In this embodiment, since the electromagnetic force applied to the winding portions 5a and 5b acts on the mirror 1 via the mirror holder 4, no torsion torque acts on the rotating shaft 3. Therefore, torsional vibration does not occur in the movable part R,
The mirror 1 can be positioned quickly and stably.

Further, since the portions of the movable portion R that receive the electromagnetic force are the winding portions 5a and 5b, the moment of inertia can be made smaller than that of the moving magnet type in which the portions that receive the electromagnetic force are magnets. It can speed up.

Further, the magnets 9a, 9b and the magnet 10a,
In 10b, since the N pole and the S pole are opposed to each other, the magnetic flux density in the gap is uniform, the magnetic lines of force are orthogonal to the winding portions 5a and 5b, and the winding portions 5a and 5b are uniform in the movable range. Receive a strong electromagnetic force. As a result, a highly efficient motor can be provided, and thus positioning can be performed in a short time even with a relatively large mirror 1.

In this embodiment, the angle sensor 6
Although it is arranged between the bearing holder 12 and the bearing holder 13, it may be arranged outside the bearing holder 12 or the bearing holder 13. By doing so, the distance between the bearings 7 and 8 can be shortened, so that the bending rigidity of the rotating shaft 3 is increased, and the vibration of the mirror 1 due to the bending of the rotating shaft 3 can be reduced.

(Second Embodiment) FIGS. 5 and 6 are views showing a second embodiment of the present invention. FIG. 5 is an exploded perspective view showing the structure of a scanner device, and FIG. FIG. 4 is a cross-sectional view in the axial direction of the rotating shaft, and those having the same or same functions as those in FIGS.

The moving coil 15 is used for the mirror holder 1
4 and one winding portion 5c arranged along the outer wall 14a of the mirror holder 14.
Is fixed to the rotary shaft 3.

The center of gravity of the mirror 1 is the rotating shaft 3 of the winding portion 5c.
It is fixed to the mirror holder 14 so that a straight line passing through the center of a side substantially parallel to the axis line of and perpendicular to the axis line of the rotation shaft 3 substantially coincides with a point intersecting the axis line of the rotation shaft 3.

Also in this embodiment, when a current is passed through the winding portion 5c, the electromagnetic force acting on the two sides of the moving coil 15 parallel to the rotation axis 3 becomes a driving torque, and the movable portion R is moved.
Rotates.

Also in this embodiment, the electromagnetic force acts on the mirror 1 from the moving coil 15 via the mirror holder 14, and the torsion torque does not act on the rotating shaft 3. Therefore, torsional vibration does not occur in the movable portion R, and the mirror 1 can be positioned quickly and stably.

(Third Embodiment) FIGS. 7 and 8 are views showing a third embodiment of the present invention. FIG. 7 is an exploded perspective view showing the structure of a scanner, and FIG. FIG. 6 is a cross-sectional view of the rotary shaft in the axial direction, and those having the same or same functions as those in FIGS.

The rotation shaft 16 and the rotation shaft 17 are coaxial with each other, and the mirror surface of the mirror 1 is a plane including the axis 18 of the rotation shaft 16 and the outer wall 14a of the mirror holder 14. It is fixed to.

The center of gravity of the mirror 1 is the axis 18 of the winding portion 5c.
It is fixed to the mirror holder 14 so that a straight line passing through the center of the side substantially parallel to and perpendicular to the axis 18 substantially coincides with the point intersecting the axis 18.

When the mirror surface of the mirror 1 is aligned with the axis 18 as described above, that is, when the mirror surface of the mirror 1 is aligned with the surface including the axis 18, positioning of the mirror 1 is facilitated and laser light is desired with high accuracy. Can be positioned in the position.

(Fourth Embodiment) FIGS. 9 to 11 are views showing a fourth embodiment of the present invention. FIG. 9 is a plan view of a scanner device, and FIG. C sectional view, FIG.
9 is a cross-sectional view taken along the line D-D in FIG. 9, and those having the same functions or functions as those in FIGS.

In this embodiment, two motors, a first motor and a second motor, are used.

The first motor is the same as the third embodiment except that the bearings 7, 8 and the magnets 9a-10b are supported by the mirror holder 21 which constitutes the moving coil 22 of the second motor. It is the same. Mirror 1
The center of gravity is fixed to the mirror holder 14 such that a straight line passing through the center of the side substantially parallel to the axis 18 of the winding portion 5c and perpendicular to the axis 18 substantially intersects with the axis 18.
In the first motor, the center of gravity of the mirror 1 is on the axis 30 of the rotating shaft 19 and the axis 18 is the winding portion 5 in the horizontal direction.
1 so as to substantially match the straight line passing through the center of the side substantially parallel to the axis line 30 of d and perpendicular to the axis line 30 of the rotary shaft 19.
As shown in FIG. 1, in the height direction, the mirror surface of the mirror 1 is the axis 3
It is fixed to the mirror holder 21 so as to include 0.

The second motor is the moving coil 22.
, The rotation shafts 19 and 20, the bearings 24 and 25, the bearing holders 28 and 29, and the magnets 26a to 27b, and the bearing holders 28 and 29 and the magnets 26a to 27.
b is fixed to the base 11.

The moving coil 22 is used for the mirror holder 2
1 and one winding portion 5d arranged along the outer wall 21a of the gyro holder 21. Rotating shaft 2
0 is fixed to the outer wall 21a of the gyro holder 21 such that its axis is coaxial with the axis 30 of the rotary shaft 19.

The angle sensor 23 is arranged between the moving coil 22 of the rotary shaft 20 and the bearing holder 29.

With the above configuration, the angle sensors 6 and 2
By supplying the motor drive current to the winding portions 5c and 5d while referring to the angle detection signal output from the mirror 3, the mirror 1 can be positioned in the two-dimensional direction.

In this embodiment, the axis 18 and the axis 30 are arranged on the mirror surface of the mirror 1.
The positioning can be performed with higher accuracy than in the third embodiment.

Also in this embodiment, since the electromagnetic force acts on the mirror holder 14 from the moving coil 15, no torsion torque acts on the rotary shaft 16.
Similarly, since the electromagnetic force acts on the gyro holder 21 from the moving coil 22, no torsion torque acts on the rotary shaft 19. Therefore, torsional vibration does not occur in the rotating portion, and the mirror 1 can be positioned quickly and stably.

[0049]

As described above, according to the scanner device of the present invention in which the mirror and the winding portion of the motor for rotating the mirror are arranged side by side in the radial direction of the rotary shaft, a torsion torque acts on the rotary shaft. Therefore, torsional vibration does not occur in the movable part, and the mirror can be rotated at high speed and stably. Therefore, the machining efficiency is improved and the quality of the workpiece is improved because the laser light can be positioned with high accuracy.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a structure of a scanner device according to the present invention.

FIG. 2 is a plan view of a scanner device according to the present invention and a diagram showing a configuration of a control system.

3 is a cross-sectional view taken along the line AA of FIG.

FIG. 4 is a sectional view taken along line BB of FIG.

FIG. 5 is an exploded perspective view showing a structure of a scanner device according to the present invention.

6 is a cross-sectional view in the axial direction of the rotary shaft in FIG.

FIG. 7 is an exploded perspective view showing the structure of a scanner device according to the present invention.

8 is a cross-sectional view of the rotary shaft in FIG. 7 in the axial direction.

FIG. 9 is an exploded perspective view showing the structure of a scanner device according to the present invention.

10 is a cross-sectional view taken along line CC of FIG.

11 is a cross-sectional view taken along the line DD of FIG.

[Explanation of symbols]

1 mirror 3 rotation axes 4 mirror holder 5a, 5b Winding part 2 moving coils 7, 8 bearings 12, 13 Bearing holder 9a, 9b, 10a, 10b Magnet

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Haruaki Otsuki             502 Kintatemachi, Tsuchiura City, Ibaraki Japan             Tate Seisakusho Mechanical Research Center (72) Inventor Miyaichi Okubo             Hitachi Bi, 2100 Kamiimazumi, Ebina City, Kanagawa Prefecture             Inside Amechanics Co., Ltd. (72) Inventor Masahiro Oishi             Hitachi Bi, 2100 Kamiimazumi, Ebina City, Kanagawa Prefecture             Inside Amechanics Co., Ltd. F term (reference) 2H045 AB03 AB13 AB54 BA12 DA31                 5H633 BB02 GG03 GG08 GG16 HH02                       HH05 JA09 JB09

Claims (4)

[Claims] 1. A magnet fixed so that an N pole and an S pole face each other through a predetermined gap, and a magnet supported by a rotating shaft, and a side substantially parallel to the axis of the rotating shaft is in the gap of the magnet. The winding part has a polygonal winding part to be arranged and a support device for the rotating shaft, and the winding part includes a motor and a mirror rotatable around an axis of the rotating shaft, and the mirror is rotated by the motor. A scanner device that is rotated, wherein the mirror and the winding portion are arranged side by side in a radial direction of the rotation shaft. 2. A magnet fixed so that an N pole and an S pole face each other with a predetermined gap therebetween, and a magnet supported by a rotary shaft, and a side substantially parallel to the axis of the rotary shaft is in the gap of the magnet. The winding part has a polygonal winding part to be arranged and a support device for the rotating shaft, and the winding part includes a motor and a mirror rotatable around an axis of the rotating shaft, and the mirror is rotated by the motor. In the scanner device configured to rotate, two sets of the motor are provided, and the mirror and the winding portion of the first motor are arranged side by side in a radial direction of the rotation shaft of the first motor, The motor and the winding portion of the second motor are arranged side by side in the radial direction of the rotation shaft of the second motor whose axis is perpendicular to the axis of the rotation shaft of the first motor. Characteristic scanner device. 3. The center of gravity of the mirror is substantially aligned with a point where a straight line passing through the center of a side of the winding portion substantially parallel to the axis and perpendicular to the axis intersects the axis. Item 3. The scanner device according to item 1 or 2. 4. The scanner device according to claim 1, wherein a mirror surface of the mirror is matched with a plane including the axis.