WO2024027716A1 - Display panel, manufacturing method for display panel and display apparatus - Google Patents

Display panel, manufacturing method for display panel and display apparatus Download PDF

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Publication number
WO2024027716A1
WO2024027716A1 PCT/CN2023/110581 CN2023110581W WO2024027716A1 WO 2024027716 A1 WO2024027716 A1 WO 2024027716A1 CN 2023110581 W CN2023110581 W CN 2023110581W WO 2024027716 A1 WO2024027716 A1 WO 2024027716A1
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Prior art keywords
layer
electrode
functional layer
display panel
interlayer dielectric
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PCT/CN2023/110581
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French (fr)
Chinese (zh)
Inventor
龚又又
谭颖亮
王彦林
徐玉伟
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华为技术有限公司
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Publication of WO2024027716A1 publication Critical patent/WO2024027716A1/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • H10K50/824Cathodes combined with auxiliary electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/124Insulating layers formed between TFT elements and OLED elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

Definitions

  • the present application relates to the field of display technology, and in particular to a display panel, a preparation method of a display panel, and a display device.
  • OLED display panels are also developing towards large sizes.
  • OLED display panel when a large-size OLED display panel is working, there is a problem of voltage drop. That is, during the transmission process of the power supply voltage, due to the voltage division of the wire or electrode resistance, the voltage actually loaded on both ends of the component is reduced, causing the OLED display panel to display uneven brightness. . Therefore, additional auxiliary electrodes can usually be made on the OLED display panel to provide assistance to areas with large voltage drops in the OLED panel, so that the OLED display panel displays a uniform picture.
  • inverted trapezoidal isolation pillars In the existing technology, the method of inverted trapezoidal isolation pillars is usually used to isolate the OLED functional layer, and then the cathode is connected to the auxiliary electrode through methods such as magnetron sputtering.
  • this method requires the production of inverted trapezoidal isolation columns, which makes the entire process cost high and the process flow relatively complex.
  • the present application provides a display panel, a display panel preparation method and a display device, which are used to solve the problem of voltage drop caused by cathode resistor voltage division in display panels, especially large-size OLED display panels.
  • a display panel is provided.
  • the display panel is divided into a pixel area and a non-pixel area.
  • the pixel area is used to display an image.
  • the display panel includes a stacked interlayer dielectric layer and a planarization layer. and pixel bounding layers.
  • An inscribed structure and one or more electrode overlapping structures are provided in the non-pixel area.
  • the one or more electrode overlapping structures are located in the first functional layer.
  • the electrode overlapping structures include auxiliary electrodes and An application electrode above the auxiliary electrode, the application electrode is connected to the auxiliary electrode, and the first functional layer is any one of the interlayer dielectric layer and the planarization layer;
  • the inscribed structure penetrates from the pixel definition layer to the upper surface of the first functional layer, and the application electrode exposes the upper surface of the first functional layer through the inscribed structure to connect with the display panel.
  • the first cathode layer is connected, and the inscribed structure is used to isolate the first functional layer and the functional layer above the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer.
  • the interlayer dielectric layer of the display panel is cut off by arranging an inscribed structure on the display panel. , flattening layer, pixel definition layer.
  • the application electrode and the auxiliary electrode are overlapped, and a cathode layer is provided on the auxiliary electrode to realize the overlap between the cathode layer and the auxiliary electrode.
  • assistance can be provided to the area with a large voltage drop in the display panel. This reduces the voltage dividing effect of the resistor on the cathode layer and reduces the voltage drop.
  • the embodiment of the present application uses the applied electrode as a bridge, and the preparation of the cathode layer does not require bypassing the partition. Therefore, the solution of the present application avoids the costly inverted trapezoidal isolation column.
  • the inscribed structure includes a first contact hole opened on the upper surface of the first functional layer and penetrating the interlayer dielectric layer, the planarization layer and the pixel definition layer.
  • the size of two contact holes, the auxiliary electrode exposes the first functional layer through the first contact hole, the size of the first contact hole is less than or equal to the size of the auxiliary electrode, the size of the auxiliary electrode is greater than or equal to the size of the applied electrode.
  • the first functional layer is the interlayer dielectric layer, or the first functional layer is the planarization layer.
  • the OLED functional layer there is an OLED functional layer between the application electrode and the auxiliary electrode, the OLED functional layer is smaller in size than the application electrode, and the application electrode wraps the OLED functional layer .
  • the first functional layer is the interlayer dielectric layer
  • the upper surface of the interlayer dielectric layer is in contact with the planarization layer
  • the auxiliary electrode and the application layer The electrodes are located in the interlayer dielectric layer, and the interlayer A first contact hole for exposing the application electrode is opened on the upper surface of the dielectric layer.
  • the distribution state of a plurality of the electrode overlapping structures is a lattice pattern, a gradient distribution or an irregular distribution, and each of the electrode overlapping structures is located in one of the inscribed structures. middle.
  • the display panel further includes a baffle electrode, the baffle electrode is located on a second functional layer, and the second functional layer is the interlayer dielectric layer, the planarization layer, and the interlayer dielectric layer.
  • the baffle electrode is located on the side of the contact hole of the second functional layer.
  • the material of the baffle electrode is one or more of titanium, aluminum, titanium, molybdenum, tungsten, and molybdenum-tungsten alloy.
  • the auxiliary electrode is a patterned auxiliary electrode, and there is a hollow area inside the patterned auxiliary electrode.
  • the display panel further includes a substrate, which includes in order from bottom to top: a substrate, a buffer layer and a gate insulating layer located on the substrate, the interlayer dielectric layer disposed on the gate insulating layer.
  • the pixel area is provided with sub-pixels of the display panel and driving TFTs of the sub-pixels.
  • the driving TFT includes: a source-drain electrode, a semiconductor layer, a first gate layer, a second gate layer, and an anode, and the source-drain electrode is located in the planarization layer,
  • the source electrode of the source and drain electrode is connected to the semiconductor layer;
  • the semiconductor layer is provided in the pixel area and is located on the buffer layer of the substrate;
  • the first gate electrode layer and the second gate electrode layer are connected to the semiconductor layer.
  • the electrode layers are all located in the pixel area of the display panel, the first gate layer is located in the interlayer dielectric layer, and the second gate layer is located in the interlayer dielectric layer or the planarization layer;
  • the anode is provided in the pixel defining layer of the display panel and connected to the source electrode.
  • the display panel further includes an OLED functional layer, a second cathode layer and a film encapsulation layer, the second cathode layer is connected to the first cathode layer filled in the inscribed structure , the second cathode layer is located on the OLED functional layer, the first cathode layer is in contact with the application electrode; the thin film encapsulation layer is located on the first cathode layer and the second cathode layer , used to encapsulate the first cathode layer and the second cathode layer; the OLED functional layer is in contact with the upper surface of the pixel defining layer, and the inscribed structure penetrates from the OLED functional layer to the third On the upper surface of a functional layer, the OLED functional layer located in the pixel area is in contact with the anode provided in the pixel defining layer.
  • the material of the thin film encapsulation layer is selected from silicon nitride and/or resin, or the thin film encapsulation layer adopts a silicon nitride stack.
  • a method for preparing a display panel which is characterized in that it includes: forming an interlayer dielectric layer, a planarization layer, and a pixel defining layer on a substrate from bottom to top; and preparing an auxiliary layer in the first functional layer.
  • the first functional layer is any one of the interlayer dielectric layer and the planarization layer; formed between the interlayer dielectric layer, the planarization layer and the pixel definition layer from the pixel
  • the defining layer penetrates into the inscribed structure on the upper surface of the first functional layer, and the inscribed structure is used to isolate the interlayer dielectric layer, the planarization layer and the pixel defining layer located on the first functional layer.
  • a functional layer to expose the auxiliary electrode located in the first functional layer; and an application electrode located on the auxiliary electrode and in contact with the auxiliary electrode is prepared in the first functional layer through the endo-cut structure ; Filling the inscribed structure with cathode material to form the first cathode layer of the display panel, so that the first cathode layer is in contact with the application electrode to obtain the display panel.
  • an upper surface penetrating from the pixel defining layer to the first functional layer is formed between the interlayer dielectric layer, the planarization layer and the pixel defining layer.
  • the inscribed structure includes: etching a first contact hole in the first functional layer; and a functional layer located under the first functional layer in the interlayer dielectric layer, planarization layer and pixel definition layer. Etching a second contact hole, the position of the first contact hole being opposite to the position of the second contact hole, to obtain the inscribed structure, wherein the size of the second contact hole is larger than the first contact hole hole size.
  • etching a first contact hole on the first functional layer includes: etching a first contact hole on the first functional layer using an etching method; Etching the second contact hole in the functional layer located below the first functional layer in the interlayer dielectric layer, the planarization layer and the pixel definition layer includes: using an acidic etching liquid to etch the second contact hole in the interlayer dielectric layer.
  • the second contact hole is etched on the functional layer located on the first functional layer among the layer, the planarization layer and the pixel definition layer.
  • the method further includes: during the process of making the second gate layer located in the first functional layer in the pixel area of the display panel, The first functional layer located in the non-pixel area is prepared The auxiliary electrode in .
  • the auxiliary electrode is a patterned auxiliary electrode.
  • the method further includes: preparing a patterned auxiliary electrode, the The patterned auxiliary electrode includes a hollowed area and a non-hollowed area, and the hollowed area runs through the patterned auxiliary electrode.
  • a display device which includes the above-mentioned display panel.
  • an electronic device in a fourth aspect, includes a display device, and the display device has the above-mentioned display panel.
  • Figure 1 is a top view of a display panel provided by an embodiment of the present application.
  • Figure 2 is a cross-sectional view of a display panel provided by an embodiment of the present application.
  • Figure 3 is an internal structural diagram of a display panel provided by an embodiment of the present application.
  • Figure 4 is a structural diagram of a display panel with baffle electrodes provided by an embodiment of the present application.
  • Figure 5 is a schematic diagram of a display panel with patterned auxiliary electrodes provided by an embodiment of the present application.
  • Figure 6 is an internal structural diagram of a display panel provided by an embodiment of the present application.
  • Figure 7 is a method for manufacturing a display panel provided by an embodiment of the present application.
  • words such as “first” and “second” are used to distinguish the same or similar items with basically the same functions and effects.
  • the first component and the second component are only used to distinguish different components, and their sequence is not limited.
  • words such as “first” and “second” do not limit the number and execution order, and words such as “first” and “second” do not limit the number and execution order.
  • At least one refers to one or more, and “plurality” refers to two or more.
  • “And/or” describes the association of associated objects, indicating that there can be three relationships, for example, A and/or B, which can mean: A exists alone, A and B exist simultaneously, and B exists alone, where A, B can be singular or plural.
  • the character “/” generally indicates that the related objects are in an “or” relationship.
  • “At least one of the following” or similar expressions thereof refers to any combination of these items, including any combination of a single item (items) or a plurality of items (items).
  • At least one of a, b, or c can mean: a, b, c, a-b, a-c, b-c, or a-b-c, where a, b, c can be single or multiple .
  • This application can be applied to display panels, especially in medium and large-sized OLED display panels.
  • the problem of voltage drop becomes more and more apparent, which leads to uneven brightness of the OLED display panel. . Therefore, in the process of making an OLED display panel, additional auxiliary electrodes are made on the panel to provide assistance to areas with large voltage drops in the OLED display panel, so that the OLED display panel can display uniform images.
  • the method commonly used in the industry at present is to prepare patterned auxiliary electrodes on the substrate surface of the OLED display panel, prepare pixel defining layers above and on the sides of the auxiliary electrodes, and etch the pixel defining layers on the sides to obtain an inscribed structure, using this inscribed structure
  • the structure cuts off the light-emitting functional layer of the OLED display panel; after cutting off the light-emitting functional layer, the second electrode layer overlaps the auxiliary electrode along the inscribed structure, and finally applies an auxiliary voltage to the auxiliary electrode to solve the problem of medium and large-sized OLED display panels. Voltage drop problem.
  • this method is difficult to implement.
  • the inverted trapezoidal isolation column method is also one of the commonly used methods.
  • the inverted trapezoidal isolation column isolates the light-emitting functional layer of the OLED display panel, and connects the cathode and the auxiliary electrode through magnetron sputtering and other methods.
  • preparing inverted trapezoidal isolation pillars requires adding specific materials and processes to the existing OLED process, which also increases the cost.
  • a display panel, a display panel preparation method and an OLED display device provided by embodiments of the present application are explained in detail below.
  • a display panel 10 provided by an embodiment of the present application includes a display area 101, one or more electrode overlapping structures 102, and a non-display area 103.
  • the electrode overlapping structure 102 is provided in the display area 101 of the display panel 10, as shown in FIG. 1 .
  • the electrode overlapping structures 102 are specifically distributed between the display pixels of the display panel 10.
  • the distribution state of the multiple electrode overlapping structures 102 can be dot matrix type, density gradient type, irregular distribution, etc., as shown in Figure 1 It is a dot matrix distribution.
  • the display area 101 of the display panel 10 is divided into a pixel area and a non-pixel area.
  • OLED sub-pixels and their driving thin film transistors are prepared in the pixel area to realize the display function.
  • An electrode overlap structure is prepared in the non-pixel area to overlap the OLED cathode layer with the preset auxiliary electrode.
  • An auxiliary voltage is applied to the auxiliary electrode to solve the voltage drop problem of the OLED display panel and achieve uniform brightness of the OLED display panel. .
  • a display panel 20 is shown in Figure 2.
  • the display panel 20 is divided into a pixel area 201 and a non-pixel area 202.
  • the pixel area 201 is used to display images.
  • the display panel 20 includes a stacked interlayer dielectric layer 240, a planarization layer 250, and a pixel definition layer 260.
  • An inscribed structure and one or more electrode overlapping structures are provided in the non-pixel area 202, and the one or more electrode overlapping structures are located in the first functional layer.
  • the electrode overlap structure includes an auxiliary electrode 205 and an application electrode 206 located above the auxiliary electrode 205.
  • the application electrode 206 is connected to the auxiliary electrode 205.
  • the first functional layer is any one of the interlayer dielectric layer 240 and the planarization layer 250 .
  • the inscribed structure penetrates from the pixel definition layer 260 to the upper surface of the first functional layer.
  • the application electrode 206 exposes the upper surface of the first functional layer through the inscribed structure to connect with the cathode layer 281 of the display panel.
  • the inscribed structure is used to isolate the layer.
  • the application electrode 206 wraps the OLED functional layer 271, separates the OLED functional layer 271, and is connected to the auxiliary electrode 205 through both ends.
  • the interlayer dielectric layer of the display panel is cut off by arranging an inscribed structure on the display panel. , flattening layer, pixel definition layer.
  • the application electrode and the auxiliary electrode are overlapped, and a cathode layer is provided on the auxiliary electrode to realize the overlap between the cathode layer and the auxiliary electrode. Since there is a voltage drop on the surface cathode without the auxiliary electrode and before the electrode is applied, the actual effect is that the voltage at both ends of the display panel decreases, resulting in a decrease in display brightness.
  • the embodiment of the present application can provide assistance to the area of the display panel with a large voltage drop, thereby reducing the voltage dividing effect of the resistor on the cathode layer and reducing the voltage drop.
  • the embodiment of the present application uses the applied electrode as a bridge, and the preparation of the cathode layer does not require bypassing the partition. Therefore, the solution of the present application avoids the costly inverted trapezoidal isolation column.
  • each functional layer in the interlayer dielectric layer 240, the planarization layer 250, and the pixel definition layer 260 includes two surfaces, such as an upper surface and a lower surface.
  • the upper surface of the interlayer dielectric layer 240 is in contact with the lower surface of the planarization layer 250
  • the upper surface of the planarization layer 250 is in contact with the upper surface of the pixel definition layer 260 .
  • the lower surface is in contact with the substrate.
  • the interlayer dielectric layer 240 is located on the upper surface of the substrate.
  • the display panel in the embodiment of the present application may be an OLED display panel.
  • the material filled in the interlayer dielectric layer 240 is silicon nitride.
  • the planarization layer 250 is selected from one or more of resin (Resin), silicon nitride (SiN x ), silicon oxide (SiO x ), and silicon oxynitride (SiO x N y ).
  • the material of the planarization layer 250 is the same as the material of the pixel defining layer 260 .
  • the material filled in the interlayer dielectric layer 240 may also be one of silicon nitride (SiN x ), silicon oxide (SiO x ), and silicon oxynitride (SiO x N y ).
  • the inscribed structure includes a first contact hole opened on the upper surface of the first functional layer and penetrating the interlayer dielectric layer 240 , the planarization layer 250 and the pixel definition layer 260 except for the first functional layer.
  • second contact hole outside the functional layer. The position of the second contact hole is opposite to the position of the first contact hole, and the size of the first contact hole is larger than the size of the second contact hole.
  • the auxiliary electrode 205 exposes the first functional layer through the first contact hole.
  • the size of the first contact hole is smaller than or equal to the size of the auxiliary electrode 205 , and the size of the auxiliary electrode 205 is larger than or equal to the size of the application electrode 206 .
  • the structure can be divided into two areas, a first area 203 and a second area 204.
  • the first region 203 separates the planarization layer 250 , the pixel definition layer 260 and the OLED functional layer 270 .
  • the second region 204 is used to isolate the interlayer dielectric layer 240 .
  • the OLED functional layer 270 is located on the pixel definition layer 260.
  • the auxiliary electrode 205 is located on the interlayer dielectric layer 240
  • the application electrode 206 is located on the auxiliary electrode 205 , wherein the application electrode 206 fills the second region 204 .
  • the cathode layer 281 is provided on the auxiliary electrode 205 . As shown in FIG. 2 , the cathode layer 281 mainly includes a portion located on the OLED functional layer 270 and a portion filled in the first region 203 .
  • FIG. 2 is a cross-sectional view of the display panel.
  • the contact hole is a hole etched on the panel.
  • the cross-sectional shape of the contact hole is circular.
  • the first contact hole and the second contact hole may both be circular holes, and the size of the contact hole represents the diameter of the circular contact hole. It can be understood that the cross-sectional shape of the contact hole can also be other shapes, which is not limited in this application.
  • opening a first contact hole on the interlayer dielectric layer 240 can form as shown in Figure 2 Second area 204. Opening a second contact hole through the planarization layer 250 and the pixel definition layer 260 may form the first region 203 as shown in FIG. 2 .
  • the first contact hole is located above the auxiliary electrode 205 , and the size of the first contact hole is smaller than or equal to the size of the auxiliary electrode 205 , so that the auxiliary electrode 205 exposes the interlayer dielectric layer 240 .
  • the interlayer dielectric layer 240 when the first functional layer is an interlayer dielectric layer 240, as shown in FIG. 2, the interlayer dielectric layer 240 includes a first interlayer dielectric layer 242 and a A second interlayer dielectric layer 241 above 242.
  • the auxiliary electrode 205 and the application electrode 206 are both located on the second interlayer dielectric layer 241 , and the upper surface of the second interlayer dielectric layer 241 is in contact with the planarization layer 250 .
  • a first contact hole for exposing the application electrode 206 is formed on the upper surface of the second interlayer dielectric layer 241 .
  • the lower surface of the first interlayer dielectric layer 242 is in contact with the gate insulating layer 230 in the substrate, and the upper surface of the first interlayer dielectric layer 242 is in contact with the lower surface of the second interlayer dielectric layer 241 .
  • the interlayer dielectric layer 240 also has a first gate layer 62 and a second gate layer 63
  • the planarization layer 250 also has a source and drain electrode 60 .
  • the first gate layer 62 is located in the first interlayer dielectric layer 242
  • the second gate layer 63 is located in the second interlayer dielectric layer 241 .
  • the inscribed structure can be divided into two regions, the first region 203 and the second region 204 .
  • the first region 203 is used to isolate the pixel definition layer 260 and the OLED functional layer 270 .
  • the OLED functional layer 271 will inevitably be formed in the endostructure, that is, the OLED functional layer 271 will be formed on the auxiliary electrode 205, and the applied electrode 206 is used to isolate the OLED functional layer 271.
  • the second area 204 is used to isolate the planarization layer 250 .
  • the OLED functional layer 270 is located on the pixel definition layer 260.
  • the auxiliary electrode 205 is located on the planarization layer 250
  • the application electrode 206 is also located on the planarization layer 250
  • the application electrode 206 is located on the auxiliary electrode 205 and is in contact with the auxiliary electrode 205 to achieve connection, wherein the application electrode 206 fills the second region 204.
  • the cathode layer 281 is provided on the auxiliary electrode 205 . As shown in FIG. 2 , the cathode layer 281 mainly includes a portion located on the OLED functional layer 270 and a portion filled in the first region 203 .
  • taking the first functional layer as the planarization layer 250 as an example, as shown in FIG.
  • the second region 204 is used to isolate the planarization layer 250 .
  • the first region 203 is used to isolate the pixel definition layer 260 and the OLED functional layer 270
  • the auxiliary electrode 205 is located in the planarization layer 250
  • the cathode layer is located in the pixel definition layer 260, And connected to the application electrode 206 .
  • the inscribed structure of the display panel can be in different film layers. That is, depending on the position of the auxiliary electrode, the inscribed structure is also located in different film layers, which can block the OLED function.
  • the layer 270, the pixel definition layer 260, the planarization layer 250 and the interlayer dielectric layer 240 can also isolate the OLED functional layer 270, the pixel definition layer 260 and the planarization layer 250.
  • the display panel further includes a baffle electrode 401 .
  • the baffle electrode 401 is located on the second functional layer.
  • the second functional layer is the functional layer in contact with the first functional layer among the interlayer dielectric layer 240, the planarization layer 250 and the pixel definition layer 260.
  • the baffle electrode 401 is located on the second functional layer. side of the contact hole.
  • a through hole is opened on the baffle electrode, the position of the through hole is opposite to the position of the first contact hole, and the size of the through hole is equal to the size of the second contact hole.
  • the auxiliary electrode 205 is located on the interlayer dielectric layer 240
  • the application electrode 206 is provided in the interlayer dielectric layer 240
  • the second The functional layer is the planarization layer 250
  • the baffle electrodes 401 are located on both sides of the first contact hole.
  • the baffle electrodes 401 are provided to prevent or slow down the inscribed structure formed by the first contact hole and the second contact hole, and the etching process.
  • the mid-corners are overetched.
  • the baffle electrode 401 is made of titanium-aluminum-titanium material.
  • the auxiliary electrode 500 is a patterned auxiliary electrode with a hollow area in the middle, that is, the auxiliary electrode is hollowed out.
  • the patterned auxiliary electrode is used to increase the contact area between the auxiliary electrode 500 and the application electrode 206.
  • the contact area between the application electrode 206 and the auxiliary electrode 500 is the area of the contact surface between the two.
  • the auxiliary electrode 500 is a patterned auxiliary electrode, the hollow area of the auxiliary electrode 500 is filled with the application electrode 206, and The contact area of application electrode 206 increases the side area.
  • the shape of the hollow area can be any shape, and is not limited in this application.
  • FIG. 5 is a cross-sectional view of the auxiliary electrode 500
  • FIG. 5 is a top view of the auxiliary electrode 500
  • the dotted line 501 is the cross-section of the auxiliary electrode 500
  • the hollow area 502 is the cross-section of the auxiliary electrode 500.
  • the auxiliary electrode 500 and the first interlayer dielectric layer 242 makes the application electrode 206 equal to the thickness difference between the first interlayer dielectric layer 242 and the OLED functional layer 271, and the non-hollow area is the thickness difference between the first interlayer dielectric layer 242 and the OLED functional layer 271.
  • the difference between the thickness of the interlayer dielectric layer and the thickness of the auxiliary electrode 500 plus the OLED functional layer 271 uses the height difference to more effectively isolate the first interlayer dielectric layer 242, and the side or corner of the hollow area of the auxiliary electrode 500 Exposed, the contact area between the auxiliary electrode 500 and the application electrode 206 is increased.
  • the height difference between the patterned auxiliary electrode and the underlying substrate blocks the OLED functional layer for a second time, further improving the conduction effect of the electrode overlap structure.
  • the display panel 20 further includes: a substrate 210, a buffer layer 220 and a gate insulation layer 230.
  • the buffer layer 220 is located on the substrate 210, and the gate insulation layer 230 is located on the buffer layer 220.
  • the interlayer dielectric layer 240 is located on the gate insulating layer 230 .
  • the pixel area of the display panel is provided with sub-pixels and driving TFTs of the sub-pixels.
  • the auxiliary electrode 205 is located in the second interlayer dielectric layer 241
  • the driving TFT includes: source and drain electrodes 60 , semiconductor layer 61 , first gate layer 62 , and second gate layer 63 , and anode 64.
  • the source and drain electrodes 60 are located in the planarization layer 250 , wherein the source and drain electrodes 603 are connected to the semiconductor layer 61 .
  • the semiconductor layer 61 is provided in the pixel area and is located on the buffer layer 220 .
  • the first gate layer 62 and the second gate layer 63 are both located in the pixel area.
  • the first gate layer 62 is located in the interlayer dielectric layer 240
  • the second gate layer 63 is located in the second layer of the interlayer dielectric layer 240 Intermediate layer 241 or planarization layer 250.
  • the anode 64 is disposed in the pixel defining layer 260 and connected to the source and drain electrodes 604 .
  • the display panel further includes an OLED functional layer 270, a second cathode layer 280, and a thin film encapsulation layer 290, as shown in (c) of FIG. 6 .
  • the second cathode layer 280 is connected to the first cathode layer 281 in the endostructure, which is in contact with the application electrode 206 .
  • the thin film encapsulation layer 290 is located on the second cathode layer 280 and the first cathode layer 281 and is used to encapsulate the second cathode layer 280 and the first cathode layer 281 .
  • the OLED functional layer 270 is in contact with the upper surface of the pixel defining layer 260.
  • the inscribed structure penetrates from the OLED functional layer 270 to the upper surface of the first functional layer (such as the interlayer dielectric layer 240).
  • the OLED functional layer located in the pixel area In contact with the anode provided in the pixel defining layer.
  • the material of the thin film encapsulation layer 290 is selected from silicon nitride and/or resin, or a silicon nitride stack is used.
  • This embodiment provides a method for preparing a display panel, as shown in Figure 7.
  • the method includes:
  • Step 701 Form an interlayer dielectric layer, a planarization layer, and a pixel definition layer on the substrate in order from bottom to top.
  • the material of the planarization layer 250 may be selected from one or more of resin (Resin), silicon nitride (SiN x ), silicon oxide (SiO x ), and silicon oxynitride (SiO x N y ). In some embodiments, the material of planarization layer 250 is the same as the material of pixel defining layer 260 .
  • the interlayer dielectric layer 240 is silicon nitride. Among them, x ranges from 0 to 5, and y ranges from 0 to 5, which are not limited here.
  • a display panel structure as shown in (a) in Figure 6 is prepared according to a traditional display panel manufacturing process.
  • the structure includes an interlayer dielectric layer 240, a planarization layer 250 and a pixel definition layer 260, where the interlayer
  • the dielectric layer 240 includes a first interlayer dielectric layer 242 and a second interlayer dielectric layer 241 .
  • Step 702 Prepare an auxiliary electrode in the first functional layer, which is any one of an interlayer dielectric layer and a planarization layer.
  • the auxiliary electrode 205 is located in the second interlayer dielectric layer 241 , while the second gate electrode layer 63 is being prepared. , prepare the auxiliary electrode 205.
  • the material of the auxiliary electrode is molybdenum.
  • the source and drain electrodes 60 are located in the planarization layer 250 , the semiconductor layer 61 is located in the gate insulating layer 230 , the first gate layer 62 is located in the first interlayer dielectric layer 242 , and the anode 64 is located in the pixel defining layer 260 .
  • Step 703 An inscribed structure penetrating from the pixel defining layer to the upper surface of the first functional layer is formed between the interlayer dielectric layer 240, the planarization layer 250 and the pixel defining layer 260.
  • the inscribed structure isolates the interlayer dielectric layer 240, Planarization layer 250 and pixel definition
  • the functional layer in the layer 260 is located on the first functional layer to expose the auxiliary electrode 205 located in the first functional layer.
  • the inscribed structure includes etching a first contact hole in the first functional layer, on the functional layer above the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer. Etch the second contact hole. The position of the first contact hole is opposite to the position of the second contact hole. Wherein, the size of the second contact hole is larger than the size of the first contact hole.
  • the first functional layer is the second interlayer dielectric layer 241 in the interlayer dielectric layer 240 , and area 1 and area 2 are inscribed structures. Among them, area 1 is the first contact hole, and area 2 is the second contact hole.
  • etching the first contact hole in the first functional layer includes: using an etching method, such as wet photolithography technology, and using an alkaline etching solution to etch the first contact hole on the first functional layer.
  • the first contact hole is etched, and the alkaline etching solution may be sodium bicarbonate solution, potassium hydroxide solution, tetramethylammonium hydroxide solution, etc.
  • the first contact hole can also be etched by dry etching, such as using oxygen, hydrogen fluoride and other gases.
  • Etching the second contact hole in the functional layer below the first functional layer in the interlayer dielectric layer 240 , the planarization layer 250 and the pixel definition layer 260 includes using an acidic etching liquid to etch the second contact hole in the interlayer dielectric layer 240 , the planarization layer 250 and etching the second contact hole in the functional layer located below the first functional layer in the pixel defining layer 260 .
  • Step 704 Prepare an application electrode located on the auxiliary electrode and in contact with the auxiliary electrode in the first functional layer through an endocut structure.
  • inkjet printing is used to prepare the application electrode 206.
  • Silver paste of the application electrode 206 is filled in the first contact hole by inkjet printing.
  • the silver paste is connected to both sides of the auxiliary electrode 205 to achieve conduction.
  • the OLED functional layer 270 is prepared by evaporation. It is inevitable that an OLED functional layer 271 is also evaporated in the endostructure, that is, on the auxiliary electrode 205. The OLED function 271 is blocked by the application electrode 206 and connected to the auxiliary electrode 205 .
  • Step 705 Fill the cathode material in the endostructure to form the first cathode layer 281 of the display panel, so that the first cathode layer 281 is in contact with the application electrode 206 to obtain a display panel.
  • the application electrode 206 is filled in the first contact hole in the endostructure, and the application electrode 206 is in contact with the auxiliary electrode 205 .
  • a first cathode layer 281 is provided above the application electrode 206 .
  • the application electrode 206 is prepared by filling the first contact hole by inkjet or the like.
  • the method for preparing a display panel further includes preparing a patterned auxiliary electrode, as shown in (b) of Figure 5 .
  • the hollow area 502 of the auxiliary electrode 500 is the thickness of the first interlayer dielectric layer 242, and the other areas are the difference between the thickness of the first interlayer dielectric layer and the thickness of the auxiliary electrode 500.
  • the height difference is used to more effectively isolate the first interlayer dielectric layer. 242, and the sides or corners of the hollow area of the auxiliary electrode 500 are exposed, which increases the contact area between the auxiliary electrode 500 and the application electrode 206.
  • the preparation method of the display panel further includes evaporating the OLED functional layer 270 of the display panel, and the OLED functional layer 270 is located on the pixel defining layer 260 .
  • the first cathode layer 281 and the second cathode layer 280 of the display panel are evaporated on the application electrode 206 and the OLED functional layer 270, and the thin film encapsulation layer 290 of the display panel is evaporated on the first cathode layer 281 and the second cathode layer 280.
  • the first cathode layer 281 is prepared on the application electrode 206 by evaporation method
  • the second cathode layer 280 is prepared on the OLED functional layer 270.
  • the first cathode layer 281 and the second cathode layer 280 are connected to form a display.
  • the cathode material is magnesium silver
  • the thin film encapsulation layer material is a stack of alternating inorganic layers and organic layers.
  • the inorganic layer is usually one or more of silicon nitride, silicon oxide, and silicon oxynitride. Oxidation can also be used.
  • the organic layer is resin material, such as hexamethyldisilyl ether, polymethyl methacrylate, etc.
  • An embodiment of the present application provides a display device.
  • the display device includes the above-mentioned display panel, and an encapsulation layer used to encapsulate the display panel.
  • the application electrode can be introduced as a bridge to realize the connection between the auxiliary electrode and the cathode layer.
  • the application electrode may not be introduced, but a special process can be used to make the cathode layer span the inscribed
  • the structure is directly connected to the auxiliary electrode. For example, magnetron sputtering, tilted evaporation and other processes are used to prepare the cathode, while increasing the thickness of the cathode layer.
  • the inscribed structure of this solution can be prepared in the AA hole area to block the side penetration of water and oxygen. In this area, no application electrode is provided, and the inscribed structure is used to separate the OLED functional layer and the OLED cathode, completely blocking the side penetration path of water and oxygen.
  • the disclosed apparatus/computer equipment and methods can be implemented in other ways.
  • the apparatus/computer equipment embodiments described above are only illustrative.
  • the division of modules or units is only a logical function division.
  • there may be other division methods, such as multiple units or components. can be combined or can be integrated into another system, or some features can be ignored, or not implemented.
  • the coupling or direct coupling or communication connection between each other shown or discussed may be through some interfaces, indirect coupling or communication connection of devices or units, which may be in electrical, mechanical or other forms.

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Abstract

The present application relates to the technical field of displaying. Disclosed are a display panel (20), a manufacturing method for the display panel (20) and a display apparatus. The display panel (20) comprises: an interlayer dielectric layer (240), a planarization layer (250), and a pixel defining layer (260) which are arranged in a stacked manner. An inscribed structure and one or a plurality of electrode lap joint structures are arranged in a first functional layer in a non-pixel region (202) of the display panel (20), each electrode lap joint structure comprising an auxiliary electrode (205) and an application electrode (206), the application electrode (206) being connected to a first cathode layer (281) of the display panel (20) by means of the inscribed structure, and the inscribed structure being used for partitioning the first functional layer. Since the auxiliary electrode (205) and the application electrode (206) are arranged in the first functional layer; and by means of the inscribed structure, the interlayer dielectric layer (240), the planarization layer (250), and the pixel defining layer (260) of the display panel (20) are partitioned off, the application electrode (206) is lap-jointed with the auxiliary electrode (205), and the auxiliary electrode (205) is lap-jointed with a cathode layer. Therefore, by applying an auxiliary voltage to the auxiliary electrode (205), assistance can be provided for regions with a larger voltage drop in the display panel (20), so as to reduce voltage division effects of resistors on the cathode layer, thus reducing voltage drops.

Description

显示面板、显示面板的制备方法及显示装置Display panel, preparation method of display panel and display device
本申请要求于2022年08月03日提交国家知识产权局、申请号为202210926344.X、申请名称为“显示面板、显示面板的制备方法及显示装置”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application requests the priority of the Chinese patent application submitted to the State Intellectual Property Office on August 3, 2022, with the application number 202210926344.X and the application name "Display panel, display panel preparation method and display device", and its entire content incorporated herein by reference.
技术领域Technical field
本申请涉及显示技术领域,特别涉及一种显示面板、显示面板的制备方法及显示装置。The present application relates to the field of display technology, and in particular to a display panel, a preparation method of a display panel, and a display device.
背景技术Background technique
随着有机发光半导体(organic light-emitting diode,OLED)技术的进步,OLED显示面板也朝着大尺寸方向发展。但是大尺寸OLED显示面板在工作时,存在电压降的问题,即电源电压在传输过程中,由于导线或电极电阻分压造成实际加载在元器件两端电压降低,使得OLED显示面板亮度显示不均。因此,通常可以在OLED显示面板上制作额外的辅助电极,给OLED面板中压降较大的区域提供辅助,使OLED显示面板显示的画面均匀。With the advancement of organic light-emitting semiconductor (organic light-emitting diode, OLED) technology, OLED display panels are also developing towards large sizes. However, when a large-size OLED display panel is working, there is a problem of voltage drop. That is, during the transmission process of the power supply voltage, due to the voltage division of the wire or electrode resistance, the voltage actually loaded on both ends of the component is reduced, causing the OLED display panel to display uneven brightness. . Therefore, additional auxiliary electrodes can usually be made on the OLED display panel to provide assistance to areas with large voltage drops in the OLED panel, so that the OLED display panel displays a uniform picture.
现有技术中,通常采用倒梯形隔离柱的方法,隔离OLED功能层,再通过磁控溅射等方法,使得阴极与辅助电极连接。但是,采用该方法需要制作倒梯形隔离柱,使整个工艺成本较高,且工艺流程相对复杂。In the existing technology, the method of inverted trapezoidal isolation pillars is usually used to isolate the OLED functional layer, and then the cathode is connected to the auxiliary electrode through methods such as magnetron sputtering. However, this method requires the production of inverted trapezoidal isolation columns, which makes the entire process cost high and the process flow relatively complex.
发明内容Contents of the invention
本申请提供了一种显示面板、显示面板的制备方法及显示装置,用于解决显示面板,尤其是大尺寸OLED显示面板中由于阴极电阻分压导致的电压压降问题。The present application provides a display panel, a display panel preparation method and a display device, which are used to solve the problem of voltage drop caused by cathode resistor voltage division in display panels, especially large-size OLED display panels.
所述技术方案如下:The technical solutions are as follows:
第一方面,提供了一种显示面板,所述显示面板划分为像素区和非像素区,所述像素区用于显示图像,所述显示面板包括层叠设置的:层间介质层、平坦化层以及像素界定层。在所述非像素区内设置有内切结构以及一个或多个电极搭接结构,一个或多个所述电极搭接结构位于第一功能层中,所述电极搭接结构包括辅助电极以及位于所述辅助电极之上的施加电极,所述施加电极与所述辅助电极连接,所述第一功能层为所述层间介质层、平坦化层中的任一个;In a first aspect, a display panel is provided. The display panel is divided into a pixel area and a non-pixel area. The pixel area is used to display an image. The display panel includes a stacked interlayer dielectric layer and a planarization layer. and pixel bounding layers. An inscribed structure and one or more electrode overlapping structures are provided in the non-pixel area. The one or more electrode overlapping structures are located in the first functional layer. The electrode overlapping structures include auxiliary electrodes and An application electrode above the auxiliary electrode, the application electrode is connected to the auxiliary electrode, and the first functional layer is any one of the interlayer dielectric layer and the planarization layer;
所述内切结构从所述像素界定层贯穿到所述第一功能层的上表面,所述施加电极通过所述内切结构露出所述第一功能层的上表面以与所述显示面板的第一阴极层连接,所述内切结构用于隔断所述第一功能层以及所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层之上的功能层。The inscribed structure penetrates from the pixel definition layer to the upper surface of the first functional layer, and the application electrode exposes the upper surface of the first functional layer through the inscribed structure to connect with the display panel. The first cathode layer is connected, and the inscribed structure is used to isolate the first functional layer and the functional layer above the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer.
本申请实施例提供的一种显示面板,由于第一功能层中设置有辅助电极,且辅助电极上方还设置有施加电极,再通过在显示面板设置内切结构,隔断显示面板的层间介质层、平坦化层、像素界定层。将施加电极与辅助电极搭接,在辅助电极上设置阴极层,实现阴极层与辅助电极的搭接,通过对辅助电极施加辅助电压,可以为显示面板中压降较大的区域提供了辅助,使阴极层上电阻分压效果下降,减小了电压压降。本申请实施例采用施加电极作为桥梁,阴极层制备无需绕过隔断物,因此本申请方案避免了成本高昂的倒梯形隔离柱。In the display panel provided by the embodiment of the present application, since an auxiliary electrode is provided in the first functional layer, and an application electrode is provided above the auxiliary electrode, the interlayer dielectric layer of the display panel is cut off by arranging an inscribed structure on the display panel. , flattening layer, pixel definition layer. The application electrode and the auxiliary electrode are overlapped, and a cathode layer is provided on the auxiliary electrode to realize the overlap between the cathode layer and the auxiliary electrode. By applying an auxiliary voltage to the auxiliary electrode, assistance can be provided to the area with a large voltage drop in the display panel. This reduces the voltage dividing effect of the resistor on the cathode layer and reduces the voltage drop. The embodiment of the present application uses the applied electrode as a bridge, and the preparation of the cathode layer does not require bypassing the partition. Therefore, the solution of the present application avoids the costly inverted trapezoidal isolation column.
在本申请的一个可能的实现方式中,所述内切结构包括开设在所述第一功能层的上表面的第一接触孔以及贯穿所述层间介质层、平坦化层以及像素界定层中除所述第一功能层之外的功能层的第二接触孔,所述第二接触孔的位置和所述第一接触孔的位置相对,且所述第一接触孔的尺寸大于所述第二接触孔的尺寸,所述辅助电极通过所述第一接触孔露出所述第一功能层,所述第一接触孔的尺寸小于或等于所述辅助电极的尺寸,所述辅助电极的尺寸大于或等于所述施加电极的尺寸。在本申请的一个可能的实现方式中,所述第一功能层为所述层间介质层,或者,所述第一功能层为所述平坦化层。In a possible implementation of the present application, the inscribed structure includes a first contact hole opened on the upper surface of the first functional layer and penetrating the interlayer dielectric layer, the planarization layer and the pixel definition layer. A second contact hole of a functional layer other than the first functional layer, the position of the second contact hole is opposite to the position of the first contact hole, and the size of the first contact hole is larger than that of the first contact hole. The size of two contact holes, the auxiliary electrode exposes the first functional layer through the first contact hole, the size of the first contact hole is less than or equal to the size of the auxiliary electrode, the size of the auxiliary electrode is greater than or equal to the size of the applied electrode. In a possible implementation of the present application, the first functional layer is the interlayer dielectric layer, or the first functional layer is the planarization layer.
在本申请的一个可能的实现方式中,所述施加电极与所述辅助电极之间有OLED功能层,所述OLED功能层的尺寸小于所述施加电极,所述施加电极包裹所述OLED功能层。In a possible implementation of the present application, there is an OLED functional layer between the application electrode and the auxiliary electrode, the OLED functional layer is smaller in size than the application electrode, and the application electrode wraps the OLED functional layer .
在本申请的一个可能的实现方式中,所述第一功能层为所述层间介质层,所述层间介质层的上表面与所述平坦化层接触,所述辅助电极以及所述施加电极均位于所述层间介质层,所述层间 介质层的上表面开设有用于露出所述施加电极的第一接触孔。In a possible implementation of the present application, the first functional layer is the interlayer dielectric layer, the upper surface of the interlayer dielectric layer is in contact with the planarization layer, the auxiliary electrode and the application layer The electrodes are located in the interlayer dielectric layer, and the interlayer A first contact hole for exposing the application electrode is opened on the upper surface of the dielectric layer.
在本申请的一个可能的实现方式中,多个所述电极搭接结构的分布状态为点阵式、渐变分布式或不规则分布,每个所述电极搭接结构位于一个所述内切结构中。In a possible implementation of the present application, the distribution state of a plurality of the electrode overlapping structures is a lattice pattern, a gradient distribution or an irregular distribution, and each of the electrode overlapping structures is located in one of the inscribed structures. middle.
在本申请的一个可能的实现方式中,所述显示面板还包括挡板电极,所述挡板电极位于第二功能层,所述第二功能层为所述层间介质层、所述平坦化层以及所述像素界定层中与所述第一功能层接触的功能层,所述挡板电极位于所述第二功能层具有的接触孔的侧边。In a possible implementation of the present application, the display panel further includes a baffle electrode, the baffle electrode is located on a second functional layer, and the second functional layer is the interlayer dielectric layer, the planarization layer, and the interlayer dielectric layer. The baffle electrode is located on the side of the contact hole of the second functional layer.
在本申请的一个可能的实现方式中,所述挡板电极的材料为钛铝钛、钼、钨、钼钨合金中的一种或多种。In a possible implementation of the present application, the material of the baffle electrode is one or more of titanium, aluminum, titanium, molybdenum, tungsten, and molybdenum-tungsten alloy.
在本申请的一个可能的实现方式中,所述辅助电极为图形化辅助电极,所述图形化辅助电极内部存在镂空区域。In a possible implementation of the present application, the auxiliary electrode is a patterned auxiliary electrode, and there is a hollow area inside the patterned auxiliary electrode.
在本申请的一个可能的实现方式中,所述显示面板还包括基板,所述基板由下至上依次包括:基底、位于所述基底上的缓冲层以及栅极绝缘层,所述层间介质层设于所述栅极绝缘层之上。In a possible implementation of the present application, the display panel further includes a substrate, which includes in order from bottom to top: a substrate, a buffer layer and a gate insulating layer located on the substrate, the interlayer dielectric layer disposed on the gate insulating layer.
在本申请的一个可能的实现方式中,所述像素区设置有所述显示面板的子像素及所述子像素的驱动TFT。In a possible implementation of the present application, the pixel area is provided with sub-pixels of the display panel and driving TFTs of the sub-pixels.
在本申请的一个可能的实现方式中,所述驱动TFT包括:源漏电极、半导体层、第一栅极层、第二栅极层以及阳极,所述源漏电极位于所述平坦化层,所述源漏电极中的源极与所述半导体层连接;所述半导体层设于所述像素区,位于所述基板的缓冲层之上;所述第一栅极层和所述第二栅极层均设于所述显示面板的像素区,所述第一栅极层位于所述层间介质层中,所述第二栅极层位于所述层间介质层或者所述平坦化层;所述阳极设于所述显示面板的所述像素界定层中,与所述源极连接。In a possible implementation of the present application, the driving TFT includes: a source-drain electrode, a semiconductor layer, a first gate layer, a second gate layer, and an anode, and the source-drain electrode is located in the planarization layer, The source electrode of the source and drain electrode is connected to the semiconductor layer; the semiconductor layer is provided in the pixel area and is located on the buffer layer of the substrate; the first gate electrode layer and the second gate electrode layer are connected to the semiconductor layer. The electrode layers are all located in the pixel area of the display panel, the first gate layer is located in the interlayer dielectric layer, and the second gate layer is located in the interlayer dielectric layer or the planarization layer; The anode is provided in the pixel defining layer of the display panel and connected to the source electrode.
在本申请的一个可能的实现方式中,所述显示面板还包括OLED功能层、第二阴极层以及薄膜封装层,所述第二阴极层连接填充在所述内切结构中的第一阴极层,所述第二阴极层位于所述OLED功能层之上,所述第一阴极层与所述施加电极接触;所述薄膜封装层位于所述第一阴极层和所述第二阴极层之上,用于封装所述第一阴极层和所述第二阴极层;所述OLED功能层与所述像素界定层的上表面接触,所述内切结构从所述OLED功能层贯穿到所述第一功能层的上表面,位于所述像素区的OLED功能层与设于所述像素界定层中的阳极接触。In a possible implementation of the present application, the display panel further includes an OLED functional layer, a second cathode layer and a film encapsulation layer, the second cathode layer is connected to the first cathode layer filled in the inscribed structure , the second cathode layer is located on the OLED functional layer, the first cathode layer is in contact with the application electrode; the thin film encapsulation layer is located on the first cathode layer and the second cathode layer , used to encapsulate the first cathode layer and the second cathode layer; the OLED functional layer is in contact with the upper surface of the pixel defining layer, and the inscribed structure penetrates from the OLED functional layer to the third On the upper surface of a functional layer, the OLED functional layer located in the pixel area is in contact with the anode provided in the pixel defining layer.
在本申请的一个可能的实现方式中,所述薄膜封装层的材料选自氮化硅和/或树脂,或者所述薄膜封装层采用氮化硅叠层。In a possible implementation of the present application, the material of the thin film encapsulation layer is selected from silicon nitride and/or resin, or the thin film encapsulation layer adopts a silicon nitride stack.
第二方面,提供了一种显示面板的制备方法,其特征在于,包括:在基板上由下至上依次形成层间介质层、平坦化层、以及像素界定层;在第一功能层中制备辅助电极,所述第一功能层为所述层间介质层、平坦化层中的任一个;在所述层间介质层、所述平坦化层以及所述像素界定层之间形成从所述像素界定层贯穿到所述第一功能层的上表面的内切结构,所述内切结构用于隔断所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层上的功能层,以露出位于所述第一功能层中的所述辅助电极;通过所述内切结构在所述第一功能层中制备位于所述辅助电极上且与所述辅助电极接触的施加电极;在所述内切结构中填充阴极材料形成所述显示面板的第一阴极层,以使得所述第一阴极层与所述施加电极接触,得到所述显示面板。In a second aspect, a method for preparing a display panel is provided, which is characterized in that it includes: forming an interlayer dielectric layer, a planarization layer, and a pixel defining layer on a substrate from bottom to top; and preparing an auxiliary layer in the first functional layer. electrode, the first functional layer is any one of the interlayer dielectric layer and the planarization layer; formed between the interlayer dielectric layer, the planarization layer and the pixel definition layer from the pixel The defining layer penetrates into the inscribed structure on the upper surface of the first functional layer, and the inscribed structure is used to isolate the interlayer dielectric layer, the planarization layer and the pixel defining layer located on the first functional layer. a functional layer to expose the auxiliary electrode located in the first functional layer; and an application electrode located on the auxiliary electrode and in contact with the auxiliary electrode is prepared in the first functional layer through the endo-cut structure ; Filling the inscribed structure with cathode material to form the first cathode layer of the display panel, so that the first cathode layer is in contact with the application electrode to obtain the display panel.
在本申请的一个可能的实现方式中,在所述层间介质层、所述平坦化层以及所述像素界定层之间形成从所述像素界定层贯穿到所述第一功能层的上表面的内切结构,包括:在所述第一功能层刻蚀出第一接触孔;在所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层之下的功能层刻蚀第二接触孔,所述第一接触孔的位置和所述第二接触孔的位置相对,以得到所述内切结构,其中,所述第二接触孔的尺寸大于所述第一接触孔的尺寸。In a possible implementation of the present application, an upper surface penetrating from the pixel defining layer to the first functional layer is formed between the interlayer dielectric layer, the planarization layer and the pixel defining layer. The inscribed structure includes: etching a first contact hole in the first functional layer; and a functional layer located under the first functional layer in the interlayer dielectric layer, planarization layer and pixel definition layer. Etching a second contact hole, the position of the first contact hole being opposite to the position of the second contact hole, to obtain the inscribed structure, wherein the size of the second contact hole is larger than the first contact hole hole size.
在本申请的一个可能的实现方式中,所述在所述第一功能层刻蚀出第一接触孔,包括:采用刻蚀法在所述第一功能层上刻蚀出第一接触孔;所述在所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层之下的功能层刻蚀第二接触孔,包括:采用酸性刻蚀液体在所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层上的功能层上刻蚀所述第二接触孔。In a possible implementation of the present application, etching a first contact hole on the first functional layer includes: etching a first contact hole on the first functional layer using an etching method; Etching the second contact hole in the functional layer located below the first functional layer in the interlayer dielectric layer, the planarization layer and the pixel definition layer includes: using an acidic etching liquid to etch the second contact hole in the interlayer dielectric layer. The second contact hole is etched on the functional layer located on the first functional layer among the layer, the planarization layer and the pixel definition layer.
在本申请的一个可能的实现方式中,所述方法还包括:在所述显示面板的像素区制作位于所述第一功能层中的第二栅极层的过程中,在所述显示面板的非像素区中制备位于所述第一功能层 中的所述辅助电极。In a possible implementation of the present application, the method further includes: during the process of making the second gate layer located in the first functional layer in the pixel area of the display panel, The first functional layer located in the non-pixel area is prepared The auxiliary electrode in .
在本申请的一个可能的实现方式中,所述辅助电极为图形化辅助电极,在所述第一功能层中制备所述辅助电极之前,所述方法还包括:制备图形化辅助电极,所述图形化辅助电极包括镂空区域和非镂空区域,所述镂空区域贯穿所述图形化辅助电极。In a possible implementation of the present application, the auxiliary electrode is a patterned auxiliary electrode. Before preparing the auxiliary electrode in the first functional layer, the method further includes: preparing a patterned auxiliary electrode, the The patterned auxiliary electrode includes a hollowed area and a non-hollowed area, and the hollowed area runs through the patterned auxiliary electrode.
第三方面,提供了一种显示装置,所述显示装置包括上述的显示面板。In a third aspect, a display device is provided, which includes the above-mentioned display panel.
第四方面,提供了一种电子设备,所述设备包括显示装置,所述显示装置具有上述的显示面板。In a fourth aspect, an electronic device is provided. The device includes a display device, and the display device has the above-mentioned display panel.
可以理解的是,上述第二方面、第三方面以及第四方面的有益效果可以参见上述第一方面中的相关描述,在此不再赘述。It can be understood that the beneficial effects of the above-mentioned second aspect, third aspect and fourth aspect can be referred to the relevant descriptions in the above-mentioned first aspect, and will not be described again here.
附图说明Description of the drawings
图1是本申请实施例提供的一种显示面板的俯视图;Figure 1 is a top view of a display panel provided by an embodiment of the present application;
图2是本申请实施例提供的一种显示面板的剖视图;Figure 2 is a cross-sectional view of a display panel provided by an embodiment of the present application;
图3是本申请实施例提供的一种显示面板的内切结构图;Figure 3 is an internal structural diagram of a display panel provided by an embodiment of the present application;
图4是本申请实施例提供的一种具有挡板电极的显示面板结构图;Figure 4 is a structural diagram of a display panel with baffle electrodes provided by an embodiment of the present application;
图5是本申请实施例提供的一种具有图形化辅助电极的显示面板示意图;Figure 5 is a schematic diagram of a display panel with patterned auxiliary electrodes provided by an embodiment of the present application;
图6是本申请实施例提供的一种显示面板内部结构图;Figure 6 is an internal structural diagram of a display panel provided by an embodiment of the present application;
图7是本申请实施例提供的一种显示面板的制备方法。Figure 7 is a method for manufacturing a display panel provided by an embodiment of the present application.
具体实施方式Detailed ways
为了便于清楚描述本申请实施例的技术方案,在本申请的实施例中,采用了“第一”、“第二”等字样对功能和作用基本相同的相同项或相似项进行区分。例如,第一部件和第二部件仅仅是为了区分不同的部件,并不对其先后顺序进行限定。本领域技术人员可以理解“第一”、“第二”等字样并不对数量和执行次序进行限定,并且“第一”、“第二”等字样也并不限定一定不同。In order to facilitate a clear description of the technical solutions of the embodiments of the present application, in the embodiments of the present application, words such as “first” and “second” are used to distinguish the same or similar items with basically the same functions and effects. For example, the first component and the second component are only used to distinguish different components, and their sequence is not limited. Those skilled in the art can understand that words such as "first" and "second" do not limit the number and execution order, and words such as "first" and "second" do not limit the number and execution order.
需要说明的是,本申请中,“示例性的”或者“例如”等词用于表示作例子、例证或说明。本申请中被描述为“示例性的”或者“例如”的任何实施例或设计方案不应被解释为比其他实施例或设计方案更优选或更具优势。确切而言,使用“示例性的”或者“例如”等词旨在以具体方式呈现相关概念。It should be noted that in this application, words such as “exemplary” or “for example” are used to represent examples, illustrations or explanations. Any embodiment or design described herein as "exemplary" or "such as" is not intended to be construed as preferred or advantageous over other embodiments or designs. Rather, use of the words "exemplary" or "such as" is intended to present the concept in a concrete manner.
本申请中,“至少一个”是指一个或者多个,“多个”是指两个或两个以上。“和/或”,描述关联对象的关联关系,表示可以存在三种关系,例如,A和/或B,可以表示:单独存在A,同时存在A和B,单独存在B的情况,其中A,B可以是单数或者复数。字符“/”一般表示前后关联对象是一种“或”的关系。“以下至少一项(个)”或其类似表达,是指的这些项中的任意组合,包括单项(个)或复数项(个)的任意组合。例如,a,b,或c中的至少一项(个),可以表示:a,b,c,a-b,a-c,b-c,或a-b-c,其中a,b,c可以是单个,也可以是多个。In this application, "at least one" refers to one or more, and "plurality" refers to two or more. "And/or" describes the association of associated objects, indicating that there can be three relationships, for example, A and/or B, which can mean: A exists alone, A and B exist simultaneously, and B exists alone, where A, B can be singular or plural. The character "/" generally indicates that the related objects are in an "or" relationship. "At least one of the following" or similar expressions thereof refers to any combination of these items, including any combination of a single item (items) or a plurality of items (items). For example, at least one of a, b, or c can mean: a, b, c, a-b, a-c, b-c, or a-b-c, where a, b, c can be single or multiple .
在对本申请实施例进行详细地解释说明之前,先对本申请实施例的应用场景予以说明。Before explaining the embodiments of the present application in detail, the application scenarios of the embodiments of the present application will be described first.
本申请可以应用显示面板中,尤其是在中大尺寸OLED显示面板中,由于显示面板的面积越来越大,电压降的问题也越来越显现,这导致了OLED显示面板显示的亮度不均匀。因此,在制作OLED显示面板的过程中,在面板上制作额外的辅助电极,给OLED显示面板中压降较大的区域提供辅助,使OLED显示面板的画面显示均匀。This application can be applied to display panels, especially in medium and large-sized OLED display panels. As the area of the display panel becomes larger and larger, the problem of voltage drop becomes more and more apparent, which leads to uneven brightness of the OLED display panel. . Therefore, in the process of making an OLED display panel, additional auxiliary electrodes are made on the panel to provide assistance to areas with large voltage drops in the OLED display panel, so that the OLED display panel can display uniform images.
目前业界常采用的方法为在OLED显示面板的基底表面制备图形化的辅助电极,在辅助电极上方及侧边制备像素界定层,并通过侧面刻蚀像素界定层得到内切结构,利用该内切结构隔断OLED显示面板的发光功能层;在隔断发光功能层后,第二电极层沿着内切结构搭接辅助电极,最后通过在辅助电极上施加辅助电压,来解决中大尺寸OLED显示面板的电压降问题。但是该方法实现的难度较高,在定点侧面刻蚀像素界定层制备内切结构后,如何有效隔断发光功能层而使其不沿着侧面搭接的难度较高,若发光功能层被隔断,此时第二电极层实际生产中也容易被隔断,其次,对于OLED制成也需要新的工艺要求,增大了成本。The method commonly used in the industry at present is to prepare patterned auxiliary electrodes on the substrate surface of the OLED display panel, prepare pixel defining layers above and on the sides of the auxiliary electrodes, and etch the pixel defining layers on the sides to obtain an inscribed structure, using this inscribed structure The structure cuts off the light-emitting functional layer of the OLED display panel; after cutting off the light-emitting functional layer, the second electrode layer overlaps the auxiliary electrode along the inscribed structure, and finally applies an auxiliary voltage to the auxiliary electrode to solve the problem of medium and large-sized OLED display panels. Voltage drop problem. However, this method is difficult to implement. After etching the pixel definition layer on the side at a fixed point to prepare the incision structure, it is more difficult to effectively isolate the light-emitting functional layer so that it does not overlap along the side. If the light-emitting functional layer is blocked, At this time, the second electrode layer is also easily blocked during actual production. Secondly, new process requirements are also required for OLED manufacturing, which increases the cost.
倒梯形隔离柱的方法也是常用的方法之一,倒梯形隔离柱隔离OLED显示面板的发光功能层,通过磁控溅射等方法,使得阴极与辅助电极连接。但是,制备倒梯形隔离柱需要在现有OLED工艺制程上,额外增加特定的材料、工艺,也增大了成本。 The inverted trapezoidal isolation column method is also one of the commonly used methods. The inverted trapezoidal isolation column isolates the light-emitting functional layer of the OLED display panel, and connects the cathode and the auxiliary electrode through magnetron sputtering and other methods. However, preparing inverted trapezoidal isolation pillars requires adding specific materials and processes to the existing OLED process, which also increases the cost.
下面对本申请实施例提供的一种显示面板、显示面板的制备方法及OLED显示装置进行详细地解释说明。A display panel, a display panel preparation method and an OLED display device provided by embodiments of the present application are explained in detail below.
本申请实施例提供的一种显示面板10,包括显示区101、一个或多个电极搭接结构102以及非显示区103。电极搭接结构102设置在显示面板10的显示区101,如图1所示。具体的,电极搭接结构102的具体分布在显示面板10的显示像素之间,多个电极搭接结构102的分布状态可以为点阵式、密度渐变式、不规则分布等,图1所示为点阵式分布。A display panel 10 provided by an embodiment of the present application includes a display area 101, one or more electrode overlapping structures 102, and a non-display area 103. The electrode overlapping structure 102 is provided in the display area 101 of the display panel 10, as shown in FIG. 1 . Specifically, the electrode overlapping structures 102 are specifically distributed between the display pixels of the display panel 10. The distribution state of the multiple electrode overlapping structures 102 can be dot matrix type, density gradient type, irregular distribution, etc., as shown in Figure 1 It is a dot matrix distribution.
其中,显示面板10的显示区101分为像素区与非像素区,在像素区制备OLED子像素及其驱动薄膜晶体管,用于实现显示功能。在非像素区制备电极搭接结构,用于将OLED阴极层与提前预设的辅助电极搭接,在辅助电极上施加辅助电压以解决OLED显示面板的电压降问题,实现OLED显示面板的亮度均匀。Among them, the display area 101 of the display panel 10 is divided into a pixel area and a non-pixel area. OLED sub-pixels and their driving thin film transistors are prepared in the pixel area to realize the display function. An electrode overlap structure is prepared in the non-pixel area to overlap the OLED cathode layer with the preset auxiliary electrode. An auxiliary voltage is applied to the auxiliary electrode to solve the voltage drop problem of the OLED display panel and achieve uniform brightness of the OLED display panel. .
在本申请一个实施例中,如图2所示为一种显示面板20,显示面板20划分为像素区201和非像素区202,像素区201用于显示图像。显示面板20包括层叠设置的:层间介质层240、平坦化层250、像素界定层260。在非像素区202内设置有内切结构以及一个或多个电极搭接结构,一个或多个电极搭接结构位于第一功能层中。电极搭接结构包括辅助电极205以及位于辅助电极205之上的施加电极206,施加电极206与辅助电极205连接。第一功能层为层间介质层240、平坦化层250中的任意一个。内切结构从像素界定层260贯穿到第一功能层的上表面,施加电极206通过内切结构露出第一功能层的上表面以与显示面板的阴极层281连接,内切结构用于隔断层间介质层240以及层间介质层240、平坦化层250以及像素界定层260中位于层间介质层240以上的功能层。In one embodiment of the present application, a display panel 20 is shown in Figure 2. The display panel 20 is divided into a pixel area 201 and a non-pixel area 202. The pixel area 201 is used to display images. The display panel 20 includes a stacked interlayer dielectric layer 240, a planarization layer 250, and a pixel definition layer 260. An inscribed structure and one or more electrode overlapping structures are provided in the non-pixel area 202, and the one or more electrode overlapping structures are located in the first functional layer. The electrode overlap structure includes an auxiliary electrode 205 and an application electrode 206 located above the auxiliary electrode 205. The application electrode 206 is connected to the auxiliary electrode 205. The first functional layer is any one of the interlayer dielectric layer 240 and the planarization layer 250 . The inscribed structure penetrates from the pixel definition layer 260 to the upper surface of the first functional layer. The application electrode 206 exposes the upper surface of the first functional layer through the inscribed structure to connect with the cathode layer 281 of the display panel. The inscribed structure is used to isolate the layer. The interlayer dielectric layer 240 and the functional layer located above the interlayer dielectric layer 240 among the interlayer dielectric layer 240 , the planarization layer 250 and the pixel definition layer 260 .
其中,施加电极206与辅助电极205之间有OLED功能层271。施加电极206的尺寸大于OLED功能层271的尺寸,如图2所示,施加电极206包裹OLED功能层271,施加电极206隔断OLED功能层271,通过两端与辅助电极205连接。Among them, there is an OLED functional layer 271 between the application electrode 206 and the auxiliary electrode 205. The size of the application electrode 206 is larger than the size of the OLED functional layer 271. As shown in FIG. 2, the application electrode 206 wraps the OLED functional layer 271, separates the OLED functional layer 271, and is connected to the auxiliary electrode 205 through both ends.
本申请实施例提供的一种显示面板,由于第一功能层中设置有辅助电极,且辅助电极上方还设置有施加电极,再通过在显示面板设置内切结构,隔断显示面板的层间介质层、平坦化层、像素界定层。将施加电极与辅助电极搭接,在辅助电极上设置阴极层,实现阴极层与辅助电极的搭接。由于在没有辅助电极和施加电极之前,面阴极存在压降,实际效果是显示面板两端电压降低,从而造成显示亮度下降。通过添加辅助电极和施加电极,OLED阴极的电压不通过面阴极,而是通过辅助电极和施加电极,这样消除了面阴极压降。因此,本申请实施例通过对辅助电极施加辅助电压,可以为显示面板中压降较大的区域提供辅助,使阴极层上电阻分压效果下降,减小了电压压降。本申请实施例采用施加电极作为桥梁,阴极层制备无需绕过隔断物,因此本申请方案避免了成本高昂的倒梯形隔离柱。In the display panel provided by the embodiment of the present application, since an auxiliary electrode is provided in the first functional layer, and an application electrode is provided above the auxiliary electrode, the interlayer dielectric layer of the display panel is cut off by arranging an inscribed structure on the display panel. , flattening layer, pixel definition layer. The application electrode and the auxiliary electrode are overlapped, and a cathode layer is provided on the auxiliary electrode to realize the overlap between the cathode layer and the auxiliary electrode. Since there is a voltage drop on the surface cathode without the auxiliary electrode and before the electrode is applied, the actual effect is that the voltage at both ends of the display panel decreases, resulting in a decrease in display brightness. By adding the auxiliary electrode and the applied electrode, the voltage of the OLED cathode does not pass through the surface cathode, but passes through the auxiliary electrode and the applied electrode, thus eliminating the surface cathode voltage drop. Therefore, by applying an auxiliary voltage to the auxiliary electrode, the embodiment of the present application can provide assistance to the area of the display panel with a large voltage drop, thereby reducing the voltage dividing effect of the resistor on the cathode layer and reducing the voltage drop. The embodiment of the present application uses the applied electrode as a bridge, and the preparation of the cathode layer does not require bypassing the partition. Therefore, the solution of the present application avoids the costly inverted trapezoidal isolation column.
可以理解的是,层间介质层240、平坦化层250、像素界定层260中每个功能层均包括两个表面,比如,上表面和下表面。在本申请的一个实施例中,层间介质层240的上表面与平坦化层250的下表面接触,平坦化层250的上表面与像素界定层260的上表面接触,层间介质层240的下表面与基板接触。换言之,层间介质层240位于基板的上表面。It can be understood that each functional layer in the interlayer dielectric layer 240, the planarization layer 250, and the pixel definition layer 260 includes two surfaces, such as an upper surface and a lower surface. In one embodiment of the present application, the upper surface of the interlayer dielectric layer 240 is in contact with the lower surface of the planarization layer 250 , and the upper surface of the planarization layer 250 is in contact with the upper surface of the pixel definition layer 260 . The lower surface is in contact with the substrate. In other words, the interlayer dielectric layer 240 is located on the upper surface of the substrate.
可选的,本申请实施例中的显示面板可以为OLED显示面板。Optionally, the display panel in the embodiment of the present application may be an OLED display panel.
在本申请的一个可能的实施例中,层间介质层240中填充的材料为氮化硅。平坦化层250选自树脂(Resin)、氮化硅(SiNx)、氧化硅(SiOx)、氮氧化硅(SiOxNy)中的一种或多种。平坦化层250的材料与像素界定层260的材料相同。In a possible embodiment of the present application, the material filled in the interlayer dielectric layer 240 is silicon nitride. The planarization layer 250 is selected from one or more of resin (Resin), silicon nitride (SiN x ), silicon oxide (SiO x ), and silicon oxynitride (SiO x N y ). The material of the planarization layer 250 is the same as the material of the pixel defining layer 260 .
其中,层间介质层240中填充的材料还可以是氮化硅(SiNx)、氧化硅(SiOx)、氮氧化硅(SiOxNy)中的一种。The material filled in the interlayer dielectric layer 240 may also be one of silicon nitride (SiN x ), silicon oxide (SiO x ), and silicon oxynitride (SiO x N y ).
在本申请的一个实施例中,内切结构包括开设在第一功能层的上表面的第一接触孔以及贯穿层间介质层240、平坦化层250以及像素界定层260中除第一功能层之外的功能层的第二接触孔。第二接触孔的位置和第一接触孔的位置相对,且第一接触孔的尺寸大于第二接触孔的尺寸。辅助电极205通过第一接触孔露出第一功能层。第一接触孔的尺寸小于或等于辅助电极205的尺寸,辅助电极205的尺寸大于或等于施加电极206的尺寸。In one embodiment of the present application, the inscribed structure includes a first contact hole opened on the upper surface of the first functional layer and penetrating the interlayer dielectric layer 240 , the planarization layer 250 and the pixel definition layer 260 except for the first functional layer. second contact hole outside the functional layer. The position of the second contact hole is opposite to the position of the first contact hole, and the size of the first contact hole is larger than the size of the second contact hole. The auxiliary electrode 205 exposes the first functional layer through the first contact hole. The size of the first contact hole is smaller than or equal to the size of the auxiliary electrode 205 , and the size of the auxiliary electrode 205 is larger than or equal to the size of the application electrode 206 .
在本申请一种可能的实现方式中,以第一功能层为层间介质层240为例,如图2所示,内切 结构可以分为两个区域,第一区域203和第二区域204。第一区域203隔断平坦化层250、像素界定层260以及OLED功能层270。第二区域204用于隔断层间介质层240。其中,OLED功能层270位于像素界定层260上。辅助电极205位于层间介质层240,施加电极206位于辅助电极205上,其中,施加电极206充满第二区域204。阴极层281设置在辅助电极205之上。如图2所示,阴极层281主要包括位于OLED功能层270上的部分以及填充在第一区域203中的部分。In a possible implementation manner of the present application, taking the first functional layer as the interlayer dielectric layer 240 as an example, as shown in Figure 2, inscribed The structure can be divided into two areas, a first area 203 and a second area 204. The first region 203 separates the planarization layer 250 , the pixel definition layer 260 and the OLED functional layer 270 . The second region 204 is used to isolate the interlayer dielectric layer 240 . Among them, the OLED functional layer 270 is located on the pixel definition layer 260. The auxiliary electrode 205 is located on the interlayer dielectric layer 240 , and the application electrode 206 is located on the auxiliary electrode 205 , wherein the application electrode 206 fills the second region 204 . The cathode layer 281 is provided on the auxiliary electrode 205 . As shown in FIG. 2 , the cathode layer 281 mainly includes a portion located on the OLED functional layer 270 and a portion filled in the first region 203 .
其中,图2为显示面板为剖面图,接触孔即在面板上刻蚀孔洞,通常接触孔的截面形状为圆形。第一接触孔与第二接触孔可以都为圆孔,接触孔的尺寸代表圆形接触孔的直径。可以理解的是,接触孔的截面形状也可以是其它的形状,本申请不做限制。Among them, FIG. 2 is a cross-sectional view of the display panel. The contact hole is a hole etched on the panel. Usually, the cross-sectional shape of the contact hole is circular. The first contact hole and the second contact hole may both be circular holes, and the size of the contact hole represents the diameter of the circular contact hole. It can be understood that the cross-sectional shape of the contact hole can also be other shapes, which is not limited in this application.
在本申请一种可能的实现方式中,如图2所示,以第一功能层为层间介质层240为例,在层间介质层240上开设第一接触孔可以形成如图2中的第二区域204。在平坦化层250、像素界定层260上开设贯穿的第二接触孔可以形成如图2中的第一区域203。第一接触孔位于辅助电极205的上方,且第一接触孔的尺寸小于或等于辅助电极205的尺寸,以便于辅助电极205露出层间介质层240。In a possible implementation manner of the present application, as shown in Figure 2, taking the first functional layer as the interlayer dielectric layer 240 as an example, opening a first contact hole on the interlayer dielectric layer 240 can form as shown in Figure 2 Second area 204. Opening a second contact hole through the planarization layer 250 and the pixel definition layer 260 may form the first region 203 as shown in FIG. 2 . The first contact hole is located above the auxiliary electrode 205 , and the size of the first contact hole is smaller than or equal to the size of the auxiliary electrode 205 , so that the auxiliary electrode 205 exposes the interlayer dielectric layer 240 .
在本申请的一个实施例中,第一功能层为层间介质层240的情况下,如图2所示,层间介质层240包括第一层间介质层242以及位于第一层间介质层242之上的第二层间介质层241。辅助电极205以及施加电极206均位于第二层间介质层241,第二层间介质层241的上表面与平坦化层250接触。第二层间介质层241的上表面开设有用于露出施加电极206的第一接触孔。In one embodiment of the present application, when the first functional layer is an interlayer dielectric layer 240, as shown in FIG. 2, the interlayer dielectric layer 240 includes a first interlayer dielectric layer 242 and a A second interlayer dielectric layer 241 above 242. The auxiliary electrode 205 and the application electrode 206 are both located on the second interlayer dielectric layer 241 , and the upper surface of the second interlayer dielectric layer 241 is in contact with the planarization layer 250 . A first contact hole for exposing the application electrode 206 is formed on the upper surface of the second interlayer dielectric layer 241 .
具体的,第一层间介质层242的下表面与基板中的栅极绝缘层230接触,第一层间介质层242的上表面与第二层间介质层241的下表面接触。Specifically, the lower surface of the first interlayer dielectric layer 242 is in contact with the gate insulating layer 230 in the substrate, and the upper surface of the first interlayer dielectric layer 242 is in contact with the lower surface of the second interlayer dielectric layer 241 .
在本申请的一个可能的实施例中,如图2所示,层间介质层240中还有第一栅极层62,第二栅极层63,平坦化层250中还有源漏电极60,像素界定层260中还有阳极64。具体的,第一栅极层62位于第一层间介质层242中,第二栅极层63位于第二层间介质层241中。In a possible embodiment of the present application, as shown in FIG. 2 , the interlayer dielectric layer 240 also has a first gate layer 62 and a second gate layer 63 , and the planarization layer 250 also has a source and drain electrode 60 . , there is also an anode 64 in the pixel definition layer 260. Specifically, the first gate layer 62 is located in the first interlayer dielectric layer 242 , and the second gate layer 63 is located in the second interlayer dielectric layer 241 .
在本申请一种可能的实现方式中,以第一功能层为平坦化层250为例,如图3所示,内切结构可以分为两个区域,第一区域203和第二区域204。第一区域203用于隔断像素界定层260以及OLED功能层270。其中,在制备OLED功能层270时,不可避免的在内切结构中会形成OLED功能层271,即在辅助电极205上会形成OLED功能层271,施加电极206用于隔断OLED功能层271。第二区域204用于隔断平坦化层250。其中,OLED功能层270位于像素界定层260上。辅助电极205位于平坦化层250,施加电极206也位于平坦化层250,且施加电极206位于辅助电极205上,与辅助电极205接触实现连接,其中,施加电极206充满第二区域204。阴极层281设置在辅助电极205之上。如图2所示,阴极层281主要包括位于OLED功能层270上的部分以及填充在第一区域203中的部分。在本申请的一个实施例中,以第一功能层为平坦化层250为例,如图3所示,第二区域204用于隔断平坦化层250。在第二区域204用于隔断平坦化层250的情况下,第一区域203用于隔断像素界定层260和OLED功能层270,辅助电极205位于平坦化层250,阴极层位于像素界定层260,且与施加电极206连接。In a possible implementation of the present application, taking the first functional layer as the planarization layer 250 as an example, as shown in FIG. 3 , the inscribed structure can be divided into two regions, the first region 203 and the second region 204 . The first region 203 is used to isolate the pixel definition layer 260 and the OLED functional layer 270 . Among them, when preparing the OLED functional layer 270, the OLED functional layer 271 will inevitably be formed in the endostructure, that is, the OLED functional layer 271 will be formed on the auxiliary electrode 205, and the applied electrode 206 is used to isolate the OLED functional layer 271. The second area 204 is used to isolate the planarization layer 250 . Among them, the OLED functional layer 270 is located on the pixel definition layer 260. The auxiliary electrode 205 is located on the planarization layer 250, the application electrode 206 is also located on the planarization layer 250, and the application electrode 206 is located on the auxiliary electrode 205 and is in contact with the auxiliary electrode 205 to achieve connection, wherein the application electrode 206 fills the second region 204. The cathode layer 281 is provided on the auxiliary electrode 205 . As shown in FIG. 2 , the cathode layer 281 mainly includes a portion located on the OLED functional layer 270 and a portion filled in the first region 203 . In one embodiment of the present application, taking the first functional layer as the planarization layer 250 as an example, as shown in FIG. 3 , the second region 204 is used to isolate the planarization layer 250 . When the second region 204 is used to isolate the planarization layer 250, the first region 203 is used to isolate the pixel definition layer 260 and the OLED functional layer 270, the auxiliary electrode 205 is located in the planarization layer 250, and the cathode layer is located in the pixel definition layer 260, And connected to the application electrode 206 .
可以理解的是,显示面板的内切结构,即第一接触孔和第二接触孔可以在不同的膜层,即根据辅助电极位置的不同,内切结构也位于不同膜层,可以隔断OLED功能层270、像素界定层260、平坦化层250以及层间介质层240,也可以隔断OLED功能层270、像素界定层260以及平坦化层250。It can be understood that the inscribed structure of the display panel, that is, the first contact hole and the second contact hole, can be in different film layers. That is, depending on the position of the auxiliary electrode, the inscribed structure is also located in different film layers, which can block the OLED function. The layer 270, the pixel definition layer 260, the planarization layer 250 and the interlayer dielectric layer 240 can also isolate the OLED functional layer 270, the pixel definition layer 260 and the planarization layer 250.
在本申请的一个实施例中,如图4所示,显示面板还包括挡板电极401。挡板电极401位于第二功能层,第二功能层为层间介质层240、平坦化层250以及像素界定层260中与第一功能层接触的功能层,挡板电极位于第二功能层具有的接触孔的侧边。作为一种示例,挡板电极上开设有通孔,该通孔的位置与第一接触孔的位置相对,且该通孔的尺寸与第二接触孔的尺寸相等。In one embodiment of the present application, as shown in FIG. 4 , the display panel further includes a baffle electrode 401 . The baffle electrode 401 is located on the second functional layer. The second functional layer is the functional layer in contact with the first functional layer among the interlayer dielectric layer 240, the planarization layer 250 and the pixel definition layer 260. The baffle electrode 401 is located on the second functional layer. side of the contact hole. As an example, a through hole is opened on the baffle electrode, the position of the through hole is opposite to the position of the first contact hole, and the size of the through hole is equal to the size of the second contact hole.
在本申请一种可能的实现方式中,以第一功能层为层间介质层240为例,辅助电极205位于层间介质层240上,施加电极206设于层间介质层240中,第二功能层为平坦化层250,挡板电极401位于第一接触孔的两侧,挡板电极401的设置是为了防止或减缓第一接触孔和第二接触孔构成的内切结构,刻蚀过程中拐角处被过度刻蚀。In a possible implementation of the present application, taking the first functional layer as the interlayer dielectric layer 240 as an example, the auxiliary electrode 205 is located on the interlayer dielectric layer 240, the application electrode 206 is provided in the interlayer dielectric layer 240, and the second The functional layer is the planarization layer 250, and the baffle electrodes 401 are located on both sides of the first contact hole. The baffle electrodes 401 are provided to prevent or slow down the inscribed structure formed by the first contact hole and the second contact hole, and the etching process. The mid-corners are overetched.
作为一种示例,挡板电极401的材料为钛铝钛材料。 As an example, the baffle electrode 401 is made of titanium-aluminum-titanium material.
在本申请的一个实施例中,如图5中的(a)所示,辅助电极500为图形化辅助电极,中间为镂空区域,即对辅助电极进行镂空处理。图形化辅助电极用于增大辅助电极500和施加电极206的接触面积。辅助电极500不是图形化辅助电极时,施加电极206与辅助电极500的接触面积为两者接触面的面积,当辅助电极500为图形化辅助电极时,辅助电极500镂空区域充满施加电极206,与施加电极206的接触面积增加了侧面积。可以理解的是,镂空区域的形状可以是任何形状,本申请不做限制。In one embodiment of the present application, as shown in (a) of FIG. 5 , the auxiliary electrode 500 is a patterned auxiliary electrode with a hollow area in the middle, that is, the auxiliary electrode is hollowed out. The patterned auxiliary electrode is used to increase the contact area between the auxiliary electrode 500 and the application electrode 206. When the auxiliary electrode 500 is not a patterned auxiliary electrode, the contact area between the application electrode 206 and the auxiliary electrode 500 is the area of the contact surface between the two. When the auxiliary electrode 500 is a patterned auxiliary electrode, the hollow area of the auxiliary electrode 500 is filled with the application electrode 206, and The contact area of application electrode 206 increases the side area. It can be understood that the shape of the hollow area can be any shape, and is not limited in this application.
具体的,图5中的(a)为辅助电极500的剖视图,图5中的(b)为辅助电极500的俯视图,虚线501为辅助电极500的截面,镂空区域502为在辅助电极500上通过如刻蚀的方法制作的图形,即将辅助电极500贯穿。可以理解为,辅助电极500与第一层间介质层242存在高度差,即镂空区域502使施加电极206为第一层间介质层242与OLED功能层271的厚度之差,非镂空区域为第一层间介质层的厚度与辅助电极500加上OLED功能层271的厚度之差,利用高度差更有效地隔断第一层间介质层242,且辅助电极500的镂空区域的侧面或边角处裸露,增加了辅助电极500与施加电极206的接触面积。图形化辅助电极与下方基底的高度差二次隔断OLED功能层,进一步提升所述电极搭接结构的导通效果。Specifically, (a) in Figure 5 is a cross-sectional view of the auxiliary electrode 500, (b) in Figure 5 is a top view of the auxiliary electrode 500, the dotted line 501 is the cross-section of the auxiliary electrode 500, and the hollow area 502 is the cross-section of the auxiliary electrode 500. For example, if the pattern is made by etching, the auxiliary electrode 500 will penetrate through it. It can be understood that there is a height difference between the auxiliary electrode 500 and the first interlayer dielectric layer 242, that is, the hollow area 502 makes the application electrode 206 equal to the thickness difference between the first interlayer dielectric layer 242 and the OLED functional layer 271, and the non-hollow area is the thickness difference between the first interlayer dielectric layer 242 and the OLED functional layer 271. The difference between the thickness of the interlayer dielectric layer and the thickness of the auxiliary electrode 500 plus the OLED functional layer 271 uses the height difference to more effectively isolate the first interlayer dielectric layer 242, and the side or corner of the hollow area of the auxiliary electrode 500 Exposed, the contact area between the auxiliary electrode 500 and the application electrode 206 is increased. The height difference between the patterned auxiliary electrode and the underlying substrate blocks the OLED functional layer for a second time, further improving the conduction effect of the electrode overlap structure.
在本申请的一个实施例中,如图2所示,显示面板20还包括:基底210、缓冲(Buffer)层220以及栅极绝缘层230。Buffer层220位于基底210上,栅极绝缘层230位于Buffer层220上。层间介质层240位于栅极绝缘层230上。In one embodiment of the present application, as shown in FIG. 2 , the display panel 20 further includes: a substrate 210, a buffer layer 220 and a gate insulation layer 230. The buffer layer 220 is located on the substrate 210, and the gate insulation layer 230 is located on the buffer layer 220. The interlayer dielectric layer 240 is located on the gate insulating layer 230 .
在本申请的一个实施例中,显示面板的像素区设置有子像素及子像素的驱动TFT。如图6中的(a)所示,辅助电极205位于第二层间介质层241中,驱动TFT包括:源漏电极60、半导体层61、第一栅极层62、第二栅极层63、以及阳极64。源漏电极60位于平坦化层250中,其中,源漏电极603与半导体层61连接。半导体层61设于像素区,位于缓冲层220之上。第一栅极层62和第二栅极层63均设于像素区,第一栅极层62位于层间介质层240中,第二栅极层63位于层间介质层240中的第二层间介质层241或者平坦化层250。阳极64设于像素界定层260中,与源漏电极604连接。In one embodiment of the present application, the pixel area of the display panel is provided with sub-pixels and driving TFTs of the sub-pixels. As shown in (a) of FIG. 6 , the auxiliary electrode 205 is located in the second interlayer dielectric layer 241 , and the driving TFT includes: source and drain electrodes 60 , semiconductor layer 61 , first gate layer 62 , and second gate layer 63 , and anode 64. The source and drain electrodes 60 are located in the planarization layer 250 , wherein the source and drain electrodes 603 are connected to the semiconductor layer 61 . The semiconductor layer 61 is provided in the pixel area and is located on the buffer layer 220 . The first gate layer 62 and the second gate layer 63 are both located in the pixel area. The first gate layer 62 is located in the interlayer dielectric layer 240 , and the second gate layer 63 is located in the second layer of the interlayer dielectric layer 240 Intermediate layer 241 or planarization layer 250. The anode 64 is disposed in the pixel defining layer 260 and connected to the source and drain electrodes 604 .
在本申请的一个实施例中,显示面板还包括OLED功能层270、第二阴极层280以及薄膜封装层290,如图6中的(c)所示。第二阴极层280与在内切结构中的第一阴极层281连接,第一阴极层281与施加电极206接触。薄膜封装层290位于第二阴极层280以及第一阴极层281之上,用于封装第二阴极层280和第一阴极层281。OLED功能层270与像素界定层260的上表面接触,相应的,内切结构从OLED功能层270贯穿到第一功能层(如层间介质层240)的上表面,位于像素区的OLED功能层与设于像素界定层中的阳极接触。In one embodiment of the present application, the display panel further includes an OLED functional layer 270, a second cathode layer 280, and a thin film encapsulation layer 290, as shown in (c) of FIG. 6 . The second cathode layer 280 is connected to the first cathode layer 281 in the endostructure, which is in contact with the application electrode 206 . The thin film encapsulation layer 290 is located on the second cathode layer 280 and the first cathode layer 281 and is used to encapsulate the second cathode layer 280 and the first cathode layer 281 . The OLED functional layer 270 is in contact with the upper surface of the pixel defining layer 260. Correspondingly, the inscribed structure penetrates from the OLED functional layer 270 to the upper surface of the first functional layer (such as the interlayer dielectric layer 240). The OLED functional layer located in the pixel area In contact with the anode provided in the pixel defining layer.
作为一种示例,薄膜封装层290的材料选自氮化硅和/或树脂,或者采用氮化硅叠层。As an example, the material of the thin film encapsulation layer 290 is selected from silicon nitride and/or resin, or a silicon nitride stack is used.
本实施例提供了一种显示面板的制备方法,如图7所示,方法包括:This embodiment provides a method for preparing a display panel, as shown in Figure 7. The method includes:
步骤701、在基板上由下至上依次形成层间介质层、平坦化层、以及像素界定层。Step 701: Form an interlayer dielectric layer, a planarization layer, and a pixel definition layer on the substrate in order from bottom to top.
其中平坦化层250的材料可以选自树脂(Resin)、氮化硅(SiNx)、氧化硅(SiOx)、氮氧化硅(SiOxNy)中的一种或多种。在一些实施例中,平坦化层250的材料与像素界定层260的材料相同。层间介质层240为氮化硅。其中,x的范围为0~5,y的范围为0~5,在此处不做限定。The material of the planarization layer 250 may be selected from one or more of resin (Resin), silicon nitride (SiN x ), silicon oxide (SiO x ), and silicon oxynitride (SiO x N y ). In some embodiments, the material of planarization layer 250 is the same as the material of pixel defining layer 260 . The interlayer dielectric layer 240 is silicon nitride. Among them, x ranges from 0 to 5, and y ranges from 0 to 5, which are not limited here.
作为一种示例,按照传统显示面板制程工艺制备如图6中的(a)所示的显示面板结构,该结构包括层间介质层240,平坦化层250以及像素界定层260,其中,层间介质层240包括第一层间介质层242和第二层间介质层241。As an example, a display panel structure as shown in (a) in Figure 6 is prepared according to a traditional display panel manufacturing process. The structure includes an interlayer dielectric layer 240, a planarization layer 250 and a pixel definition layer 260, where the interlayer The dielectric layer 240 includes a first interlayer dielectric layer 242 and a second interlayer dielectric layer 241 .
步骤702、在第一功能层中制备辅助电极,第一功能层为层间介质层、平坦化层中的任意一个。Step 702: Prepare an auxiliary electrode in the first functional layer, which is any one of an interlayer dielectric layer and a planarization layer.
作为一种示例,以第一功能层为层间介质层240为例,如图6中的(a),辅助电极205位于第二层间介质层241,在制备第二栅极层63的同时,制备辅助电极205。辅助电极的材料为钼。源漏电极60位于平坦化层250,半导体层61位于栅极绝缘层230,第一栅极层62位于第一层间介质层242,阳极64位于像素界定层260。As an example, taking the first functional layer as the interlayer dielectric layer 240 as shown in (a) of FIG. 6 , the auxiliary electrode 205 is located in the second interlayer dielectric layer 241 , while the second gate electrode layer 63 is being prepared. , prepare the auxiliary electrode 205. The material of the auxiliary electrode is molybdenum. The source and drain electrodes 60 are located in the planarization layer 250 , the semiconductor layer 61 is located in the gate insulating layer 230 , the first gate layer 62 is located in the first interlayer dielectric layer 242 , and the anode 64 is located in the pixel defining layer 260 .
步骤703、在层间介质层240、平坦化层250以及像素界定层260之间形成从像素界定层贯穿到第一功能层的上表面的内切结构,内切结构隔断层间介质层240、平坦化层250以及像素界定 层260中位于第一功能层上的功能层,以露出位于第一功能层中的辅助电极205。Step 703: An inscribed structure penetrating from the pixel defining layer to the upper surface of the first functional layer is formed between the interlayer dielectric layer 240, the planarization layer 250 and the pixel defining layer 260. The inscribed structure isolates the interlayer dielectric layer 240, Planarization layer 250 and pixel definition The functional layer in the layer 260 is located on the first functional layer to expose the auxiliary electrode 205 located in the first functional layer.
在本申请的一个实施例中,内切结构包括在第一功能层刻蚀出第一接触孔,在层间介质层、平坦化层以及像素界定层中位于第一功能层上方的功能层上刻蚀第二接触孔。第一接触孔的位置和第二接触孔的位置相对。其中,第二接触孔的尺寸大于第一接触孔的尺寸。In one embodiment of the present application, the inscribed structure includes etching a first contact hole in the first functional layer, on the functional layer above the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer. Etch the second contact hole. The position of the first contact hole is opposite to the position of the second contact hole. Wherein, the size of the second contact hole is larger than the size of the first contact hole.
作为一种示例,如图6中的(b),第一功能层为层间介质层240中的第二层间介质层241,区域1和区域2为内切结构。其中,区域1为第一接触孔,区域2为第二接触孔。As an example, as shown in (b) of FIG. 6 , the first functional layer is the second interlayer dielectric layer 241 in the interlayer dielectric layer 240 , and area 1 and area 2 are inscribed structures. Among them, area 1 is the first contact hole, and area 2 is the second contact hole.
在本申请的一个可能的实现方式中,在第一功能层刻蚀出第一接触孔,包括:采用刻蚀法,如湿法光刻技术,利用碱性刻蚀液在第一功能层上刻蚀出第一接触孔,其中碱性刻蚀液可以是碳酸氢钠溶液、氢氧化钾溶液、四甲基氢氧化铵溶液等。在另一种可能的实现方式中,第一接触孔还可以用干法刻蚀,如利用氧气、氟化氢等气体进行刻蚀。在层间介质层240、平坦化层250以及像素界定层260中位于第一功能层下的功能层刻蚀第二接触孔,包括采用酸性刻蚀液体在层间介质层240、平坦化层250以及像素界定层260中位于第一功能层之下的功能层刻蚀第二接触孔。In a possible implementation of the present application, etching the first contact hole in the first functional layer includes: using an etching method, such as wet photolithography technology, and using an alkaline etching solution to etch the first contact hole on the first functional layer. The first contact hole is etched, and the alkaline etching solution may be sodium bicarbonate solution, potassium hydroxide solution, tetramethylammonium hydroxide solution, etc. In another possible implementation manner, the first contact hole can also be etched by dry etching, such as using oxygen, hydrogen fluoride and other gases. Etching the second contact hole in the functional layer below the first functional layer in the interlayer dielectric layer 240 , the planarization layer 250 and the pixel definition layer 260 includes using an acidic etching liquid to etch the second contact hole in the interlayer dielectric layer 240 , the planarization layer 250 and etching the second contact hole in the functional layer located below the first functional layer in the pixel defining layer 260 .
步骤704、通过内切结构在第一功能层中制备位于辅助电极上且与辅助电极接触的施加电极。Step 704: Prepare an application electrode located on the auxiliary electrode and in contact with the auxiliary electrode in the first functional layer through an endocut structure.
在本申请的一个实施例中,制备施加电极206采用喷墨打印的方式,将施加电极206银浆喷墨于第一接触孔中填充,银浆与辅助电极205两边连接实现导通。In one embodiment of the present application, inkjet printing is used to prepare the application electrode 206. Silver paste of the application electrode 206 is filled in the first contact hole by inkjet printing. The silver paste is connected to both sides of the auxiliary electrode 205 to achieve conduction.
在步骤704之前,制备OLED功能层270,采用蒸镀的方式,不可避免的在内切结构中,即辅助电极205之上也蒸镀了一层OLED功能层271。通过施加电极206,隔断OLED功能271,并与辅助电极205连接。Before step 704, the OLED functional layer 270 is prepared by evaporation. It is inevitable that an OLED functional layer 271 is also evaporated in the endostructure, that is, on the auxiliary electrode 205. The OLED function 271 is blocked by the application electrode 206 and connected to the auxiliary electrode 205 .
步骤705、在内切结构中填充阴极材料形成显示面板的第一阴极层281,以使得第一阴极层281与施加电极206接触,得到显示面板。Step 705: Fill the cathode material in the endostructure to form the first cathode layer 281 of the display panel, so that the first cathode layer 281 is in contact with the application electrode 206 to obtain a display panel.
作为一种示例,如图6中的(c),在内切结构中的第一接触孔中,填充施加电极206,施加电极206与辅助电极205接触。施加电极206上方设置第一阴极层281。施加电极206的制备通过喷墨等方式填充第一接触孔。As an example, as shown in (c) of FIG. 6 , the application electrode 206 is filled in the first contact hole in the endostructure, and the application electrode 206 is in contact with the auxiliary electrode 205 . A first cathode layer 281 is provided above the application electrode 206 . The application electrode 206 is prepared by filling the first contact hole by inkjet or the like.
在本申请的一个实施例中,显示面板的制备方法还包括,制备图形化辅助电极,如图5中的(b)。辅助电极500的镂空区域502为第一层间介质层242的厚度,其他区域为第一层间介质层的厚度与辅助电极500厚度之差,利用高度差更有效地隔断第一层间介质层242,且辅助电极500的镂空区域的侧面或边角处裸露,增加了辅助电极500与施加电极206的接触面积。In one embodiment of the present application, the method for preparing a display panel further includes preparing a patterned auxiliary electrode, as shown in (b) of Figure 5 . The hollow area 502 of the auxiliary electrode 500 is the thickness of the first interlayer dielectric layer 242, and the other areas are the difference between the thickness of the first interlayer dielectric layer and the thickness of the auxiliary electrode 500. The height difference is used to more effectively isolate the first interlayer dielectric layer. 242, and the sides or corners of the hollow area of the auxiliary electrode 500 are exposed, which increases the contact area between the auxiliary electrode 500 and the application electrode 206.
在本申请的一个实施例中,显示面板的制备方法还包括,蒸镀显示面板的OLED功能层270,OLED功能层270位于像素界定层260之上。在施加电极206上和OLED功能层270上蒸镀显示面板的第一阴极层281和第二阴极层280,在第一阴极层281和第二阴极层280上蒸镀显示面板的薄膜封装层290,如图6中的(c)。In one embodiment of the present application, the preparation method of the display panel further includes evaporating the OLED functional layer 270 of the display panel, and the OLED functional layer 270 is located on the pixel defining layer 260 . The first cathode layer 281 and the second cathode layer 280 of the display panel are evaporated on the application electrode 206 and the OLED functional layer 270, and the thin film encapsulation layer 290 of the display panel is evaporated on the first cathode layer 281 and the second cathode layer 280. , (c) in Figure 6.
其中,通过蒸镀的方法,将第一阴极层281制备在施加电极206之上,将第二阴极层280制备在OLED功能层270上,第一阴极层281和第二阴极层280连接形成显示面板的阴极层。其中,阴极材料为镁银,薄膜封装层材料为无机层与有机层交替的叠层,其中无机层通常为氮化硅、氧化硅、氮氧化硅中的一种或多种,还可以使用氧化铝或氧化镁,有机层为树脂类材料,比如,六甲基二硅醚、聚甲基丙烯酸甲酯等。Among them, the first cathode layer 281 is prepared on the application electrode 206 by evaporation method, and the second cathode layer 280 is prepared on the OLED functional layer 270. The first cathode layer 281 and the second cathode layer 280 are connected to form a display. The cathode layer of the panel. Among them, the cathode material is magnesium silver, and the thin film encapsulation layer material is a stack of alternating inorganic layers and organic layers. The inorganic layer is usually one or more of silicon nitride, silicon oxide, and silicon oxynitride. Oxidation can also be used. Aluminum or magnesium oxide, the organic layer is resin material, such as hexamethyldisilyl ether, polymethyl methacrylate, etc.
本申请实施例提供了一种显示装置,显示装置包括上述的显示面板,以及用于封装显示面板的封装层。An embodiment of the present application provides a display device. The display device includes the above-mentioned display panel, and an encapsulation layer used to encapsulate the display panel.
上述实施例中可以通过引入施加电极作为桥梁,实现辅助电极与阴极层的连接,在本申请的另一个可能的实施例中,可以不引入施加电极,而是采用特殊工艺使阴极层跨越内切结构与辅助电极直接相连。比如采用磁控溅射、倾斜蒸镀等工艺制备阴极,同时增加阴极层厚度。In the above embodiment, the application electrode can be introduced as a bridge to realize the connection between the auxiliary electrode and the cathode layer. In another possible embodiment of the present application, the application electrode may not be introduced, but a special process can be used to make the cathode layer span the inscribed The structure is directly connected to the auxiliary electrode. For example, magnetron sputtering, tilted evaporation and other processes are used to prepare the cathode, while increasing the thickness of the cathode layer.
在本申请的另一个可能的实施例中,本方案内切结构可一并制备于AA孔区,用于隔绝水氧侧面穿透。在该区域,不设置施加电极,利用内切结构隔断OLED功能层与OLED阴极,完全隔断水氧的侧面穿透路径。In another possible embodiment of the present application, the inscribed structure of this solution can be prepared in the AA hole area to block the side penetration of water and oxygen. In this area, no application electrode is provided, and the inscribed structure is used to separate the OLED functional layer and the OLED cathode, completely blocking the side penetration path of water and oxygen.
在上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述或记载的部分,可以参见其它实施例的相关描述。In the above embodiments, each embodiment is described with its own emphasis. For parts that are not detailed or documented in a certain embodiment, please refer to the relevant descriptions of other embodiments.
本领域普通技术人员可以意识到,结合本文中所公开的实施例描述的各示例的单元及算法步 骤,能够以电子硬件、或者计算机软件和电子硬件的结合来实现。这些功能究竟以硬件还是软件方式来执行,取决于技术方案的特定应用和设计约束条件。专业技术人员可以对每个特定的应用来使用不同方法来实现所描述的功能,但是这种实现不应认为超出本申请的范围。Those of ordinary skill in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein The steps can be implemented by electronic hardware or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Skilled artisans may implement the described functionality using different methods for each specific application, but such implementations should not be considered beyond the scope of this application.
在本申请所提供的实施例中,应该理解到,所揭露的装置/计算机设备和方法,可以通过其它的方式实现。例如,以上所描述的装置/计算机设备实施例仅仅是示意性的,例如,模块或单元的划分,仅仅为一种逻辑功能划分,实际实现时可以有另外的划分方式,例如多个单元或组件可以结合或者可以集成到另一个系统,或一些特征可以忽略,或不执行。另一点,所显示或讨论的相互之间的耦合或直接耦合或通讯连接可以是通过一些接口,装置或单元的间接耦合或通讯连接,可以是电性,机械或其它的形式。In the embodiments provided in this application, it should be understood that the disclosed apparatus/computer equipment and methods can be implemented in other ways. For example, the apparatus/computer equipment embodiments described above are only illustrative. For example, the division of modules or units is only a logical function division. In actual implementation, there may be other division methods, such as multiple units or components. can be combined or can be integrated into another system, or some features can be ignored, or not implemented. On the other hand, the coupling or direct coupling or communication connection between each other shown or discussed may be through some interfaces, indirect coupling or communication connection of devices or units, which may be in electrical, mechanical or other forms.
以上所述实施例仅用以说明本申请的技术方案,而非对其限制;尽管参照前述实施例对本申请进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本申请各实施例技术方案的精神和范围,均应包含在本申请的保护范围之内。 The above-described embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still implement the above-mentioned implementations. The technical solutions described in the examples are modified, or some of the technical features are equivalently replaced; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions in the embodiments of this application, and should be included in within the protection scope of this application.

Claims (17)

  1. 一种显示面板,其特征在于,所述显示面板划分为像素区和非像素区,所述像素区用于显示图像,所述显示面板包括层叠设置的:层间介质层、平坦化层以及像素界定层,A display panel, characterized in that the display panel is divided into a pixel area and a non-pixel area, the pixel area is used to display images, and the display panel includes a stacked interlayer dielectric layer, a planarization layer and a pixel defining layer,
    在所述非像素区内设置有内切结构以及一个或多个电极搭接结构,一个或多个所述电极搭接结构位于第一功能层中,所述电极搭接结构包括辅助电极以及位于所述辅助电极之上的施加电极,所述施加电极与所述辅助电极连接,所述第一功能层为所述层间介质层、平坦化层中的任一个;An inscribed structure and one or more electrode overlapping structures are provided in the non-pixel area. The one or more electrode overlapping structures are located in the first functional layer. The electrode overlapping structures include auxiliary electrodes and An application electrode above the auxiliary electrode, the application electrode is connected to the auxiliary electrode, and the first functional layer is any one of the interlayer dielectric layer and the planarization layer;
    所述内切结构从所述像素界定层贯穿到所述第一功能层的上表面,所述施加电极通过所述内切结构露出所述第一功能层的上表面以与所述显示面板的第一阴极层连接,所述内切结构隔断所述第一功能层以及所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层之上的功能层。The inscribed structure penetrates from the pixel definition layer to the upper surface of the first functional layer, and the application electrode exposes the upper surface of the first functional layer through the inscribed structure to connect with the display panel. The first cathode layer is connected, and the inscribed structure isolates the first functional layer and the functional layer above the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer.
  2. 根据权利要求1所述的显示面板,其特征在于,所述内切结构包括开设在所述第一功能层的上表面的第一接触孔以及贯穿所述层间介质层、平坦化层以及像素界定层中除所述第一功能层之外的功能层的第二接触孔,所述第二接触孔的位置和所述第一接触孔的位置相对,且所述第一接触孔的尺寸大于所述第二接触孔的尺寸,所述辅助电极通过所述第一接触孔露出所述第一功能层,所述第一接触孔的尺寸小于或等于所述辅助电极的尺寸,所述辅助电极的尺寸大于或等于所述施加电极的尺寸。The display panel according to claim 1, wherein the inscribed structure includes a first contact hole opened on the upper surface of the first functional layer and a first contact hole penetrating the interlayer dielectric layer, the planarization layer and the pixel. A second contact hole defining a functional layer other than the first functional layer in the layer, the position of the second contact hole being opposite to the position of the first contact hole, and the size of the first contact hole being larger than The size of the second contact hole, the auxiliary electrode exposing the first functional layer through the first contact hole, the size of the first contact hole being less than or equal to the size of the auxiliary electrode, the auxiliary electrode The size is greater than or equal to the size of the application electrode.
  3. 根据权利要求1或2所述的显示面板,其特征在于,所述施加电极与所述辅助电极之间有OLED功能层,所述施加电极的尺寸大于所述OLED功能层的尺寸,所述施加电极包裹所述OLED功能层。The display panel according to claim 1 or 2, characterized in that there is an OLED functional layer between the applying electrode and the auxiliary electrode, the size of the applying electrode is larger than the size of the OLED functional layer, and the applying electrode Electrodes wrap the OLED functional layer.
  4. 根据权利要求1~3任一项所述的显示面板,其特征在于,所述第一功能层为所述层间介质层,所述层间介质层的上表面与所述平坦化层接触,所述辅助电极以及所述施加电极均位于所述层间介质层,所述层间介质层的上表面开设有用于露出所述施加电极的第一接触孔。The display panel according to any one of claims 1 to 3, wherein the first functional layer is the interlayer dielectric layer, and the upper surface of the interlayer dielectric layer is in contact with the planarization layer, The auxiliary electrode and the application electrode are both located in the interlayer dielectric layer, and a first contact hole for exposing the application electrode is opened on the upper surface of the interlayer dielectric layer.
  5. 根据权利要求1~4任一项所述的显示面板,其特征在于,多个所述电极搭接结构的分布状态为点阵式、渐变分布式或不规则分布;The display panel according to any one of claims 1 to 4, characterized in that the distribution state of the plurality of electrode overlapping structures is dot matrix, gradient distribution or irregular distribution;
    每个所述电极搭接结构位于一个所述内切结构中。Each of the electrode overlapping structures is located within one of the inscribed structures.
  6. 根据权利要求1~5任一项所述的显示面板,其特征在于,所述显示面板还包括挡板电极,The display panel according to any one of claims 1 to 5, wherein the display panel further includes a baffle electrode,
    所述挡板电极位于第二功能层,所述第二功能层为所述层间介质层、所述平坦化层以及所述像素界定层中与所述第一功能层接触的功能层,所述挡板电极位于所述第二功能层具有的接触孔的侧边。The baffle electrode is located on a second functional layer, and the second functional layer is a functional layer in contact with the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer, so The baffle electrode is located on the side of the contact hole of the second functional layer.
  7. 根据权利要求6所述的显示面板,其特征在于,所述挡板电极的材料为钛铝钛、钼、钨、钼钨合金中的一种或多种。The display panel according to claim 6, wherein the baffle electrode is made of one or more materials selected from the group consisting of titanium, aluminum, titanium, molybdenum, tungsten, and molybdenum-tungsten alloy.
  8. 根据权利要求1~7任一项所述的显示面板,其特征在于,所述辅助电极为图形化辅助电极,所述图形化辅助电极存在镂空区域。The display panel according to any one of claims 1 to 7, wherein the auxiliary electrode is a patterned auxiliary electrode, and the patterned auxiliary electrode has a hollow area.
  9. 根据权利要求1~8任一项所述的显示面板,其特征在于,所述显示面板还包括基板,所述基板由下至上依次包括:基底、位于所述基底上的缓冲层以及栅极绝缘层,所述层间介质层设于所述栅极绝缘层之上。The display panel according to any one of claims 1 to 8, characterized in that the display panel further includes a substrate, and the substrate includes in order from bottom to top: a base, a buffer layer located on the base, and a gate insulation. layer, the interlayer dielectric layer is provided on the gate insulating layer.
  10. 根据权利要求1~9任一项所述的显示面板,其特征在于,所述显示面板还包括OLED功能层、第二阴极层以及薄膜封装层,所述第二阴极层连接填充在所述内切结构中的第一阴极层,所述第二阴极层位于所述OLED功能层之上,所述第一阴极层与所述施加电极接触;The display panel according to any one of claims 1 to 9, characterized in that the display panel further includes an OLED functional layer, a second cathode layer and a film encapsulation layer, the second cathode layer is connected and filled in the inner The first cathode layer in the cut structure, the second cathode layer is located on the OLED functional layer, and the first cathode layer is in contact with the application electrode;
    所述薄膜封装层位于所述第一阴极层和所述第二阴极层之上,用于封装所述第一阴极层和所述第二阴极层;The thin film encapsulation layer is located on the first cathode layer and the second cathode layer, and is used to encapsulate the first cathode layer and the second cathode layer;
    所述OLED功能层与所述像素界定层的上表面接触,所述内切结构从所述OLED功能层贯穿到所述第一功能层的上表面。The OLED functional layer is in contact with the upper surface of the pixel definition layer, and the inscribed structure penetrates from the OLED functional layer to the upper surface of the first functional layer.
  11. 一种显示面板的制备方法,其特征在于,包括:A method for preparing a display panel, characterized by including:
    在基板上由下至上依次形成层间介质层、平坦化层、以及像素界定层;Form an interlayer dielectric layer, a planarization layer, and a pixel definition layer on the substrate in order from bottom to top;
    在第一功能层中制备辅助电极,所述第一功能层为所述层间介质层、平坦化层中的任意一个;Prepare an auxiliary electrode in a first functional layer, which is any one of the interlayer dielectric layer and the planarization layer;
    在所述层间介质层、所述平坦化层以及所述像素界定层之间形成从所述像素界定层贯穿到所 述第一功能层的上表面的内切结构,所述内切结构隔断所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层上的功能层,以露出位于所述第一功能层中的所述辅助电极;Between the interlayer dielectric layer, the planarization layer and the pixel defining layer, a penetrating layer is formed from the pixel defining layer to the The inscribed structure on the upper surface of the first functional layer blocks the functional layer located on the first functional layer among the interlayer dielectric layer, planarization layer and pixel defining layer to expose the functional layer located on the upper surface of the first functional layer. the auxiliary electrode in the first functional layer;
    通过所述内切结构在所述第一功能层中制备位于所述辅助电极上且与所述辅助电极接触的施加电极;An application electrode located on the auxiliary electrode and in contact with the auxiliary electrode is prepared in the first functional layer through the endostructure;
    在所述内切结构中填充阴极材料形成所述显示面板的第一阴极层,以使得所述第一阴极层与所述施加电极接触,得到所述显示面板。The cathode material is filled in the inscribed structure to form the first cathode layer of the display panel, so that the first cathode layer is in contact with the application electrode, thereby obtaining the display panel.
  12. 根据权利要求11所述的方法,其特征在于,在所述层间介质层、所述平坦化层以及所述像素界定层之间形成从所述像素界定层贯穿到所述第一功能层的上表面的内切结构,包括:The method according to claim 11, characterized in that: forming from the pixel defining layer to the first functional layer between the interlayer dielectric layer, the planarization layer and the pixel defining layer. Inscribed structures on the upper surface include:
    在所述第一功能层刻蚀出第一接触孔;Etching a first contact hole in the first functional layer;
    在所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层之下的功能层刻蚀第二接触孔,所述第一接触孔的位置和所述第二接触孔的位置相对,以得到所述内切结构,其中,所述第二接触孔的尺寸大于所述第一接触孔的尺寸。A second contact hole is etched into the functional layer below the first functional layer in the interlayer dielectric layer, the planarization layer and the pixel definition layer, the position of the first contact hole and the second contact hole The positions are opposite to obtain the inscribed structure, wherein the size of the second contact hole is larger than the size of the first contact hole.
  13. 根据权利要求12所述的方法,其特征在于,所述在所述第一功能层刻蚀出第一接触孔,包括:The method of claim 12, wherein etching a first contact hole in the first functional layer includes:
    采用刻蚀法在所述第一功能层上刻蚀出第一接触孔;Using an etching method to etch a first contact hole on the first functional layer;
    所述在所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层上的功能层上刻蚀第二接触孔,包括:Etching a second contact hole on the functional layer located on the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer includes:
    采用酸性刻蚀液体在所述层间介质层、平坦化层以及像素界定层中位于所述第一功能层之下的功能层刻蚀所述第二接触孔。An acidic etching liquid is used to etch the second contact hole in the functional layer located below the first functional layer among the interlayer dielectric layer, the planarization layer and the pixel definition layer.
  14. 根据权利要求11~13任一项所述的方法,其特征在于,所述方法还包括:The method according to any one of claims 11 to 13, characterized in that the method further includes:
    在所述显示面板的像素区制作位于所述第一功能层中的第二栅极层的过程中,在所述显示面板的非像素区中制备位于所述第一功能层中的所述辅助电极。In the process of preparing the second gate layer located in the first functional layer in the pixel area of the display panel, the auxiliary gate layer located in the first functional layer is prepared in the non-pixel area of the display panel. electrode.
  15. 根据权利要求11~13任一项所述的方法,其特征在于,所述辅助电极为图形化辅助电极,在所述第一功能层中制备所述辅助电极之前,所述方法还包括:The method according to any one of claims 11 to 13, wherein the auxiliary electrode is a patterned auxiliary electrode. Before preparing the auxiliary electrode in the first functional layer, the method further includes:
    制备图形化辅助电极,所述图形化辅助电极包括镂空区域和非镂空区域。A patterned auxiliary electrode is prepared, and the patterned auxiliary electrode includes a hollowed-out area and a non-hollowed-out area.
  16. 一种显示装置,其特征在于,所述显示装置包括如权利要求1~10任一项所述的显示面板。A display device, characterized in that the display device includes the display panel according to any one of claims 1 to 10.
  17. 一种电子设备,其特征在于,所述设备包括显示装置,所述显示装置具有权利要求1~10任一项所述的显示面板。 An electronic device, characterized in that the device includes a display device, and the display device has the display panel according to any one of claims 1 to 10.
PCT/CN2023/110581 2022-08-03 2023-08-01 Display panel, manufacturing method for display panel and display apparatus WO2024027716A1 (en)

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