WO2024025033A1 - Unité de support de grossissement appliquée à un réseau de microlentilles et système de microscope l'utilisant appliqué à celle-ci - Google Patents

Unité de support de grossissement appliquée à un réseau de microlentilles et système de microscope l'utilisant appliqué à celle-ci Download PDF

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Publication number
WO2024025033A1
WO2024025033A1 PCT/KR2022/014050 KR2022014050W WO2024025033A1 WO 2024025033 A1 WO2024025033 A1 WO 2024025033A1 KR 2022014050 W KR2022014050 W KR 2022014050W WO 2024025033 A1 WO2024025033 A1 WO 2024025033A1
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WO
WIPO (PCT)
Prior art keywords
microlens
magnification
support unit
microscope
mask
Prior art date
Application number
PCT/KR2022/014050
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English (en)
Korean (ko)
Inventor
김기수
박종복
Original Assignee
한국광기술원
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Publication date
Application filed by 한국광기술원 filed Critical 한국광기술원
Publication of WO2024025033A1 publication Critical patent/WO2024025033A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/248—Base structure objective (or ocular) turrets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays

Definitions

  • the present invention relates to a magnification support unit using a micro lens array and a microscope system using the same. Specifically, the present invention relates to a magnification support unit using a micro lens array that can increase the magnification of an object and improve image clarity, and This is about a microscope system to which this is applied.
  • This research was conducted through support from the National Research Facility Equipment Advancement Support (R&D) - Intelligent Optical Module Research Center facility equipment advancement project (project identification number: 1711174168, detailed project number: PG2022004).
  • evanescent waves contain information about spatial changes that are finer than the wavelength, they do not create an image because they mostly disappear within a few tens of nanometers of the material surface after generation.
  • images are created by traveling waves. Due to the rapid attenuation of these evanescent waves, a diffraction limit occurs that limits the resolving power (resolving power) of the optical system.
  • the present invention was created to solve the above requirements, and is a magnification support unit using a micro lens array that can improve clarity by suppressing image overlap between micro lenses while applying micro lenses, and a microscope system using the same.
  • the purpose is to provide.
  • an enlargement support unit using a micro lens array includes a micro lens array in which a plurality of hemispherical micro lenses protruding convexly from the upper surface of a transparent substrate are arranged to be spaced apart from each other; A plurality of masks are formed on the bottom of the transparent substrate to be spaced apart from each other using a light blocking material to selectively allow light to pass through the microlens.
  • X is the size of the object to be measured
  • O is the distance between the microlens and the object
  • i is the imaging distance of the microlens.
  • the microscope system according to the present invention is provided with a stage equipped with a microscope and a lower light source that emits light upward from the bottom of the microscope toward the microscope, and the sample plate mounted on the upper surface of the stage is provided.
  • a microscope system capable of magnifying through a microscope further includes a magnification support unit mounted on an upper portion of the sample plate to increase the magnification of an object embedded in the sample plate.
  • magnification support unit using a micro lens array according to the present invention and the microscope system using the same provide the advantage of improving clarity by suppressing image overlap between micro lenses.
  • FIG. 1 is a side view showing a microscope system equipped with a magnification support unit using a micro lens array according to the present invention
  • Figure 2 is an enlarged view to explain the method of determining the pinhole spacing of the expansion support unit of Figure 1;
  • Figure 3 is a photograph showing an image acquired by a microscope without applying a microlens array to the magnification support unit of Figure 1;
  • Figure 4 is a graph showing the intensity profile of an image acquired by a microscope without applying a microlens array to the magnification support unit of Figure 1;
  • Figure 5 is a photograph showing images obtained before and after applying a mask to the magnification support unit of Figure 1;
  • Figure 6 is a graph showing the intensity profile of an image acquired by a microscope when the magnification support unit of Figure 1 is applied;
  • Figure 7 is a graph of image contrast change without a mask applied to the enlargement support unit of Figure 1;
  • FIG. 8 is a graph of image contrast change when a mask is applied to the enlargement support unit of FIG. 1.
  • Figure 1 is a side view showing a microscope system equipped with a magnification support unit using a micro lens array according to the present invention
  • Figure 2 is an enlarged view to explain the method of determining the pinhole spacing of the magnification support unit of Figure 1.
  • the microscope system 100 includes a microscope 110, a stage 140 equipped with a lower light source 130, and a magnification support unit 150.
  • Figure 2 shows that a virtual image is created when an object is placed closer than the focal length (f) of the microlens 153, and the object is indicated with a capital letter A so that it can be visually recognized.
  • the microscope 110 has a known structure capable of providing an enlarged image of an object to be captured through an objective lens 110 mounted within the housing 112.
  • the microscope 110 can be constructed with a structure that captures and provides images obtained through the objective lens 110 using an imaging device.
  • the microscope 110 may be supported by a support frame (not shown) extending upward from the main body (not shown) supporting the stage 140 and installed on the upper part of the stage 140.
  • the stage 140 is formed to seat a sample plate 10 containing an object to be imaged, and is a lower light source that emits light upward toward the microscope 110 through the sample plate 10 mounted on the upper surface. (130) is equipped.
  • the lower light source 130 may be formed in a structure capable of irradiating light to the entire sample plate 10.
  • the sample plate 10 is formed of a lower sample substrate 11 made of a transparent material and an upper sample substrate 12 made of a transparent material, so that the object to be measured is between the lower sample substrate 11 and the upper sample substrate 12.
  • an example built-in There is an example built-in.
  • the magnification support unit 150 is seated on the upper part of the sample plate 10 and increases the magnification of the object embedded in the sample plate 10.
  • the magnification support unit 150 includes a micro lens array 151 and a mask 155.
  • the microlens array 151 has a structure in which a plurality of hemispherical microlenses 153 protrude convexly from the upper surface of the transparent substrate 152 and are spaced apart from each other.
  • the transparent substrate 152 is made of a transparent material and is formed in a plate shape.
  • the microlenses 153 protrude in a hemispherical shape on the upper surface of the transparent substrate 151 and are arrayed to be spaced apart from each other.
  • the mask 155 is formed on the bottom of the transparent substrate 152 to be spaced apart from each other using a light blocking material to selectively allow light to pass through the microlens 153.
  • the mask 155 can be formed in various ways, such as by forming a light blocking paint on the bottom of the transparent substrate 153 using a screen printing method.
  • the light transmission area under the microlens 153 that is not occupied by the mask 155 is referred to as the pinhole 157, and the image is measured for optical factors including the imaging distance (i) of the applied microlens 153.
  • Pinhole 157 formation conditions that can increase clarity while suppressing overlap are applied.
  • the diameter of the pinhole 157 is determined to be smaller than the diameter of the microlens 153.
  • the gap (G) between the pinholes 157 open to the area shielded by the mask 155 is 1P or more and 2P or less (1P ⁇ ) with respect to the minimum pinhole gap (P) calculated from Equation 1 below. G ⁇ 2P) is determined and applied.
  • reference symbol t is the thickness of the transparent substrate 152
  • d is the diameter of the pinhole 157
  • S1 represents the position of the object
  • S2 represents the position of the virtual image, so that S1 can be visually recognized.
  • the object shape at position S2 was denoted as A
  • the enlarged object shape at position S2 was denoted as A with an expanded size.
  • Equation 2 is the lens equation.
  • Equation 3 f is the focal length of the microlens 153, and the magnification (M) is expressed by Equation 3 below.
  • FOV field of view
  • Equation 1 can be expressed as Equation 5 below.
  • the minimum spacing (P) between the pinholes 157 the minimum spacing for different object distances when the focal length (f) of the microlens is 2mm and the microlens viewing angle (FOV) is 40 degrees is given in Table 1 below. indicated.
  • a microlens was applied to the magnification support unit 150 using the USAF 1951 target (Air Force MIL-STD-150D standard specimen).
  • the image acquired by the microscope 110 when the array 150 is not applied and the intensity profile of the acquired image are shown in FIGS. 3 and 4.
  • images acquired by the microscope 110 before and after application of the mask 155 to the magnification support unit 150 are shown in FIG. 5, and the intensity profile of the image acquired by the magnification support unit to which the mask is applied is shown in FIG. It is shown in 6.
  • the image contrast is calculated as follows from the pixel distance and intensity graph of FIG. 7 when the mask 155 is not applied.
  • the image contrast is calculated as follows from the pixel distance and intensity graph of FIG. 8 when the mask 155 is applied.
  • applying the mask 155 can improve contrast by about 4.48 times compared to the case where the mask 155 is not applied.
  • magnification support unit using the micro lens array described above and the microscope system using the same provide the advantage of improving clarity by suppressing image overlap between micro lenses.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)

Abstract

La présente invention concerne une unité de support de grossissement appliquée à un réseau de microlentilles et un système de microscope l'utilisant appliqué à celle-ci. L'unité de support de grossissement comprend : un réseau de microlentilles dans lequel une pluralité de microlentilles hémisphériques saillantes convexes sont disposées sur la surface supérieure d'un substrat transparent pour être espacées les unes des autres ; et une pluralité de masques qui sont formés d'un matériau de blocage de lumière sur la surface inférieure du substrat transparent pour être espacés les uns des autres pour permettre une transmission sélective de lumière à travers les microlentilles.
PCT/KR2022/014050 2022-07-29 2022-09-20 Unité de support de grossissement appliquée à un réseau de microlentilles et système de microscope l'utilisant appliqué à celle-ci WO2024025033A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2022-0094802 2022-07-29
KR1020220094802A KR20240016712A (ko) 2022-07-29 2022-07-29 마이크로 렌즈 어레이를 적용한 확대 지원 유니트 및 이를 적용한 현미경 시스템

Publications (1)

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WO2024025033A1 true WO2024025033A1 (fr) 2024-02-01

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PCT/KR2022/014050 WO2024025033A1 (fr) 2022-07-29 2022-09-20 Unité de support de grossissement appliquée à un réseau de microlentilles et système de microscope l'utilisant appliqué à celle-ci

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KR (1) KR20240016712A (fr)
WO (1) WO2024025033A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100723405B1 (ko) * 2005-06-07 2007-05-30 삼성전자주식회사 마이크로 렌즈 어레이 및 그 제조 방법
US20070122718A1 (en) * 2005-11-30 2007-05-31 Seiko Epson Corporation Method of manufacturing gray scale mask and microlens, microlens, spatial light modulating apparatus and projector
JP4806197B2 (ja) * 2005-01-17 2011-11-02 パナソニック株式会社 固体撮像装置
KR20210042929A (ko) * 2018-08-15 2021-04-20 쓰리엠 이노베이티브 프로퍼티즈 컴파니 마이크로렌즈 어레이를 포함하는 광학 요소
KR20220051786A (ko) * 2020-10-19 2022-04-26 한국과학기술원 마이크로렌즈 어레이 기반 초박형 현미경

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4806197B2 (ja) * 2005-01-17 2011-11-02 パナソニック株式会社 固体撮像装置
KR100723405B1 (ko) * 2005-06-07 2007-05-30 삼성전자주식회사 마이크로 렌즈 어레이 및 그 제조 방법
US20070122718A1 (en) * 2005-11-30 2007-05-31 Seiko Epson Corporation Method of manufacturing gray scale mask and microlens, microlens, spatial light modulating apparatus and projector
KR20210042929A (ko) * 2018-08-15 2021-04-20 쓰리엠 이노베이티브 프로퍼티즈 컴파니 마이크로렌즈 어레이를 포함하는 광학 요소
KR20220051786A (ko) * 2020-10-19 2022-04-26 한국과학기술원 마이크로렌즈 어레이 기반 초박형 현미경

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KIM KISOO, HWANG YEON, PARK JONGBOK: "Multi-Mode Compact Microscopy for High-Contrast and High-Resolution Imaging", APPLIED SCIENCES, MDPI SWITZERLAND, vol. 12, no. 15, pages 7399, XP093136275, ISSN: 2076-3417, DOI: 10.3390/app12157399 *

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