WO2024024240A1

WO2024024240A1 - Masking jig, mounting member, film formation method, and film formation device

Info

Publication number: WO2024024240A1
Application number: PCT/JP2023/019265
Authority: WO
Inventors: 正樹平野; 駿介田中
Original assignee: タツタ電線株式会社
Priority date: 2022-07-29
Filing date: 2023-05-24
Publication date: 2024-02-01
Also published as: JP7427139B1

Abstract

This masking jig (1) is used in a thermal spraying method. The masking jig (1) is provided with a body part (11). The body part (11) includes a first surface (11a) and a second surface (11b). The second surface (11b) is positioned on the reverse side from the first surface (11a). A body through hole (12) is formed in the body part (11) reaching from the first surface (11a) to the second surface (11b). The masking jig (1) is further provided with a mounting member (14) that can be mounted in/detached from the body through hole (12). A member through hole (15) penetrating in a first direction linking the first surface (11a) and the second surface (11b) when the mounting member (14) is inserted into the body through hole (12) is formed in the mounting member (14). The mounting member (14) is formed from an imide-based resin.

Description

Mask jig, mounting member, film deposition method, and film deposition equipment

The present disclosure relates to a mask jig, a mounting member, a film forming method, and a film forming apparatus.

A cold spray method, which is one of the thermal spray methods, is conventionally known. In the cold spray method, a film is formed on a base material by spraying a film forming material together with a carrier gas onto the base material (for example, see Japanese Patent Application Laid-Open No. 2017-170369).

Furthermore, in thermal spraying methods such as the above-mentioned cold spray method, a mask jig is used that is placed on the surface of the base material in order to define the film forming range (see, for example, Japanese Patent Laid-Open No. 2002-361135). By supplying the film-forming material to the surface of the base material through the through-hole formed in the mask jig, the planar shape of the film-forming region can be defined.

JP 2017-170369 Publication Japanese Patent Application Publication No. 2002-361135

In thermal spraying methods such as the cold spray method described above, when a mask jig is used, a film made of the film-forming material is also formed on the surface of the mask jig. From the viewpoint of preventing film formation on the surface of the mask jig, in Japanese Patent Application Laid-Open No. 2002-361135, a surface hardening film of TiN, AlN, etc. is formed on the surface of the mask jig. However, this method has little effect on preventing film formation on the surface of the mask jig. Furthermore, film formation of nitride materials such as TiN and AlN is expensive and lacks practicality.

From the viewpoint of solving the above problems, it is conceivable to use a mask jig made of polyamideimide that can suppress film formation on the surface. However, if the method of manufacturing the mask jig and the film-forming properties are considered, there is a limit to the range of dimensions of the mask jig that can be manufactured. In other words, it is difficult to manufacture a large-sized mask jig made of polyamideimide.

The present disclosure has been made in view of the above problems. The purpose is to provide a mask jig, a mounting member, a film forming method, and a film forming apparatus that can be formed in desired dimensions at a lower cost and that can prevent film formation on the surface.

A mask jig according to the present disclosure is a mask jig used in a thermal spraying method, and includes a main body. The main body includes a first surface and a second surface. The second surface is located on the opposite side to the first surface. A main body through hole reaching from the first surface to the second surface is formed in the main body. The device further includes a mounting member that can be attached to and detached from the main body through hole. The mounting member is formed with a member through-hole that penetrates in the first direction connecting the first surface and the second surface when inserted into the main body through-hole. The mounting member is made of imide resin.

The mounting member according to the present disclosure is included in a mask jig used in a thermal spraying method, and has a member through hole that penetrates from one end to the other end on the opposite side. The mounting member is made of imide resin.

The film forming method according to the present disclosure includes the step of arranging the mask jig so as to face the surface of the base material. In the arranging step, the mask jig is arranged so that the first surface of the mask jig faces the surface of the base material. The film forming method according to the present disclosure includes a step of spraying powder, which is a film forming raw material, onto the surface of a base material by a cold spray method through a through hole of a mask jig.

A film forming apparatus according to the present disclosure includes a spray gun including a nozzle, a powder supply section, a gas supply section, and the mask jig. The powder supply unit supplies powder, which is a film forming raw material, to the spray gun. The gas supply unit supplies operating gas to the spray gun. The mask jig is placed between the base material and the spray gun.

According to the present disclosure, it is possible to provide a mask jig, a mounting member, a film forming method, and a film forming apparatus that can be formed with desired dimensions at a lower cost and that can prevent film formation on the surface.

FIG. 1 is a schematic diagram showing the configuration of a film forming apparatus according to the present embodiment. It is a perspective view showing a mask jig concerning this embodiment. FIG. 3 is a schematic cross-sectional view showing a first example of a main body through-hole of the mask jig in FIG. 2 and a cap member inserted into the main body through-hole. FIG. 3 is a schematic cross-sectional view showing a mask jig according to a comparative example and a mode of supplying powder to a substrate side covered by the mask jig. FIG. 3 is a schematic cross-sectional view showing a second example of a main body through-hole of the mask jig in FIG. 2 and a cap member inserted into the main body through-hole. FIG. 3 is a schematic cross-sectional view showing a third example of a main body through-hole of the mask jig in FIG. 2 and a cap member inserted into the main body through-hole. FIG. 3 is a schematic cross-sectional view showing a fourth example of a main body through-hole of the mask jig in FIG. 2 and a cap member inserted into the main body through-hole. FIG. 3 is a schematic cross-sectional view showing a fifth example of a main body through-hole of the mask jig in FIG. 2 and a cap member inserted into the main body through-hole. FIG. 3 is a schematic cross-sectional view showing a sixth example of a main body through-hole of the mask jig in FIG. 2 and a cap member inserted into the main body through-hole. 3 is a flowchart showing a film forming method according to the present embodiment.

<Configuration of film forming apparatus>
FIG. 1 is a schematic diagram showing the configuration of a film forming apparatus according to this embodiment. Referring to FIG. 1, a film forming apparatus 100 mainly includes a spray gun 2 including a nozzle 2b, a powder supply section 3, a gas supply section 4, and a mask jig 1.

The spray gun 2 mainly includes a spray gun main body 2a, a nozzle 2b, a heater 2c, and a temperature sensor 9. A nozzle 2b is connected to a first end, which is the distal end side, of the spray gun main body 2a. A pipe 6 is connected to a second end, which is the rear end side, of the spray gun main body 2a. The pipe 6 is connected to the gas supply section 4 via a valve 7. Gas supply section 4 supplies operating gas to spray gun 2 via piping 6. By opening and closing the valve 7, the supply state of the operating gas from the gas supply unit 4 to the spray gun 2 can be controlled. A pressure sensor 8 is installed in the pipe 6. The pressure sensor 8 measures the pressure of the working gas supplied from the gas supply section 4 to the pipe 6.

The operating gas supplied from the second end of the spray gun body 2a into the interior of the spray gun body 2a is heated by the heater 2c. The heater 2c is arranged on the second end side of the spray gun main body 2a. The operating gas flows along the arrow 31 inside the spray gun main body 2a. A temperature sensor 9 is connected to the connection between the nozzle 2b and the spray gun main body 2a. The temperature sensor 9 measures the temperature of the operating gas flowing inside the spray gun main body 2a.

A pipe 5 is connected to the nozzle 2b. Piping 5 is connected to powder supply section 3. The powder supply unit 3 supplies powder, which is a film forming raw material, to the nozzle 2b of the spray gun 2 via the pipe 5.

The mask jig 1 is placed between the base material 20 and the spray gun 2. A main body through hole 12 (see FIG. 2) is formed in the mask jig 1. The main body through hole 12 defines a film forming area on the surface of the base material 20. The specific configuration of the mask jig 1 will be described later.

<Operation of film forming equipment>
In the film forming apparatus 100 shown in FIG. 1, operating gas is supplied from the gas supply section 4 to the spray gun 2 via the pipe 6 as shown by an arrow 30. As working gas, for example nitrogen, helium, dry air or a mixture thereof can be used. The pressure of the working gas is, for example, about 1 MPa. The flow rate of the working gas is, for example, 300 L/min or more and 500 L/min or less. The operating gas supplied to the second end of the spray gun main body 2a is heated by the heater 2c. The heating temperature of the working gas is appropriately set depending on the composition of the film-forming raw material, and can be, for example, 100° C. or more and 500° C. or less. The operating gas flows from the spray gun body 2a to the nozzle 2b. Powder 10, which serves as a film-forming raw material, is supplied to the nozzle 2b from the powder supply section 3 via the pipe 5 as shown by an arrow 32. As the powder 10, for example, nickel powder, tin powder, or a mixed material of tin powder and zinc powder can be used. Alternatively, for example, aluminum powder may be used as the powder. The particle size of the powder 10 is, for example, 1 μm or more and 50 μm or less.

The powder 10 supplied to the nozzle 2b is injected toward the base material 20 from the tip of the nozzle 2b together with the operating gas. A mask jig 1 is arranged on the surface of the base material 20. The injected powder 10 reaches the surface of the base material 20 via the main body through hole 12 (see FIG. 2) of the mask jig 1. On the surface of the base material 20, a film is formed using the injected powder 10 as a raw material.

<Configuration of mask jig>
FIG. 2 is a perspective view showing a mask jig according to this embodiment. Note that for convenience of explanation, the X direction, Y direction, and Z direction are introduced. Referring to FIG. 2, a mask jig 1 is used in a cold spray method, which is an example of a thermal spray method. The mask jig 1 includes a main body portion 11 . The main body portion 11 includes a first surface 11a and a second surface 11b. The second surface 11b is located on the opposite side to the first surface 11a. In FIG. 2, the first surface 11a is located on the upper side in the Z direction, and the second surface 11b is located on the lower side in the Z direction. The first surface 11a is the side closer to the nozzle 2b in FIG.

The main body portion 11 is formed with a main body through hole 12 that reaches from the first surface 11a to the second surface 11b. The main body through hole 12 has a circular planar shape in FIG. 2 . However, the planar shape of the main body through hole 12 is not limited to this, and may be a regular polygon such as a square or a regular hexagon, or an ellipse.

Although the body through holes 12 are formed in four rows spaced apart in the X direction and two rows spaced apart in the Y direction in FIG. 2, the number of body through holes 12 formed is not limited to this. It may be changed as appropriate. It is preferable that the plurality of main body through-holes 12 are arranged evenly without uneven distribution so as to have, for example, a line-symmetrical or point-symmetrical positional relationship in a plan view as shown in FIG.

More specifically, a screw hole 13 is formed in the mask jig 1 so as to penetrate the main body 11 from the first surface 11a to the second surface 11b. A plurality of screw holes 13 are formed at intervals (as an example, in FIG. 2, three rows in the X direction and three rows in the Y direction). It is preferable that the plurality of screw holes 13 are arranged evenly without being unevenly distributed, for example, in a line-symmetrical or point-symmetrical positional relationship in a plan view as shown in FIG. A base jig, which will be described later, is fixed to the mask jig 1 using a fastening material such as a bolt that passes through the screw hole 13. At this time, if the screw holes 13 and the main body through holes 12 are evenly arranged without uneven distribution, substantially the same pressure is applied to all of the plurality of main body through holes 12.

A cap member 14 as an attachment member is removably attached to the main body through hole 12. The cap member 14 is attached to the mask jig 1 by being inserted into the main body through hole 12. The cap member 14 can be removed from the main body through hole 12 as appropriate. The cap member 14 may be inserted into all of the plurality of main body through holes 12 or may be inserted into only some of the plurality of main body through holes 12. When the cap member 14 is inserted into only some of the main body through holes 12, it is possible to select any of the main body through holes 12 and attach the cap member 14 thereto.

FIG. 3 is a schematic cross-sectional view showing a first example of a main body through-hole of the mask jig in FIG. 2 and a cap member inserted into the main body through-hole. FIG. 3 is a cross section along which a straight line (the center line of the main body through hole 12) extends along the Z axis. Referring to FIG. 3, a member through hole 15 is formed in the cap member 14. As shown in FIG. A member through hole 15 passes through the cap member 14 from the upper side to the lower side in the Z direction. In other words, the member through hole 15 penetrates the cap member 14 in the Z direction connecting the first surface 11a and the second surface 11b with the cap member 14 inserted into the main body through hole 12 of the mask jig 1. When the member through hole 15 passes through the cap in the first direction, it means that the entire member extends so as to connect the first surface 11a and the second surface 11b. Therefore, the entire region of the member through hole 15 does not need to be parallel or nearly parallel to the Z direction. A part of the member through hole 15 may extend in a direction significantly different from the Z direction. In other words, the member through hole 15 passes through the cap member 14 from one end (for example, the top surface 16) to the other end (for example, the bottom surface 17) in the first direction. Details of the member through hole 15 will be described later.

The main body through hole 12 of the main body portion 11 has a main body inclined hole 12a and a main body columnar hole 12b. The main body columnar hole 12b is a region of the main body through hole 12 that extends in the first direction (the Z direction or a direction along this direction). In FIG. 3, the main body columnar hole 12b is formed in the lower region in the Z direction so as to be continuous with the second surface 11b. On the other hand, the main body inclined hole 12a is a region of the main body through hole 12 that is continuous with the first surface 11a and extends in a direction inclined with respect to the Z direction. When the main body inclined hole 12a is formed so as to be continuous with the first surface 11a, the dimension (dimension in the X direction, etc.) of the cross section intersecting the direction in which the main body columnar hole 12b extends (the Z direction) is the same as that of the first surface 11a. It is formed so that it becomes larger towards the target.

Although the angle of inclination of the main body inclined hole 12a with respect to the Z direction is arbitrary, it is preferably 30° or more and 45° or less, for example. However, the inclination angle may be 35° or more, or 40° or less.

In addition, in the cross-sectional view of FIG. 3, the main body inclined hole 12a has a straight shape (that is, the main body inclined hole 12a has a planar shape). However, the present invention is not limited to this, and the main body inclined hole 12a may have a curved shape such as an arc shape in FIG. 3 (that is, the main body inclined hole 12a has a curved shape). The above characteristics of the main body inclined hole 12a also apply to the member inclined region 14a described below.

As shown in FIG. 3, the cap member 14 of the first example is inserted into the main body through hole 12, and in the Z direction, the cap member 14 is located above the first surface 11a (main body portion 11 relative to the first surface 11a). protrudes outward). More specifically, the main body of the cap member 14 has a member inclined region 14a, a member columnar region 14b, and a horizontal region 14c. The member inclined region 14a is a region formed at the uppermost side of the cap member 14 in the Z direction when the cap member 14 is inserted into the main body through hole 12, and extends in a direction inclined with respect to the Z direction. A part (uppermost part) of the member inclined region 14a does not fit within the main body portion 11, but protrudes above the first surface 11a. A boundary b1 indicated by a dotted line in FIG. 3 is a boundary between the member inclined region 14a and the member columnar region 14b in the cap member 14. That is, the upper side of the boundary b1 is the member inclined region 14a. The boundary b1 extends from the boundary between a portion of the outer wall surface (the outermost surface facing the main body through hole 12) of the cap member 14 that extends in the Z direction and a portion that extends at an angle from the Z direction, and extends from the boundary of the member inclined region 14a. This is a plane parallel to the top surface 16. At least a portion of the member inclined region 14a projects upward with respect to the first surface 11a. As shown in FIG. 3, the top surface 16 of the cap member 14 may be entirely disposed outside the first surface 11a while being inserted into the main body through hole 12.

The member columnar region 14b is a region that extends along the Z direction when the cap member 14 is inserted into the main body through hole 12. The member columnar region 14b is formed below the member inclined region 14a, and is particularly a region sandwiched between the boundary b1 and the boundary b2. The boundary b2 is a boundary between the member columnar region 14b and the horizontal region 14c in the cap member 14. The boundary b2 spreads from the lowest part of the member columnar hole 15b of the member through hole 15, which will be described later, and is arranged on the same plane as the member horizontal hole 15c. In the state inserted into the main body through hole 12, the boundary b2 may be a plane parallel to the XY plane.

The horizontal region 14c is a region formed at the lowermost side of the cap member 14 in the Z direction when the cap member 14 is inserted into the main body through hole 12, and extends along the XY plane. More specifically, the horizontal region 14c is a region below the boundary b2 with the member columnar region 14b. In the cross-sectional view of FIG. 3, the horizontal region 14c extends inward from the member columnar region 14b in the X direction and the Y direction. The lowermost surface 17 of the horizontal region 14c in FIG. 3 may be the same surface as the second surface 11b.

From the above, the main body inclined hole 12a is in contact with the member inclined region 14a, and the main body columnar hole 12b is in contact with the member columnar region 14b and the horizontal region 14c.

The member through hole 15 of the cap member 14 is formed as an inner wall. The member through hole 15 includes, in order from the upper side in the Z direction, a member inclined hole 15a, a member columnar hole 15b, a member horizontal hole 15c, and a member small diameter hole 15d. In the cross section of FIG. 3, the member inclined hole 15a is inclined with respect to the Z direction. The member columnar hole 15b is formed below the member inclined hole 15a and extends along the Z direction. The member horizontal hole 15c is formed inside the plane of the boundary b2 so as to be flush with the plane (along the XY plane). The member small diameter hole 15d is formed below the member columnar hole 15b and the member horizontal hole 15c, and extends from the innermost part of the member horizontal hole 15c. The member small diameter hole 15d extends in a columnar manner along the Z direction like the member columnar hole 15b, but the width (diameter) in the X direction and the Y direction is smaller than that of the member columnar hole 15b. The size of the member small diameter hole 15d in the X direction (Y direction) depends on the size of the film forming portion formed by thermal spraying. However, as an example, the dimension of the member small diameter hole 15d in the X direction (Y direction) may be 25% or more and 50% or less of the dimension of the member columnar hole 15b in the X direction (Y direction). Alternatively, the small diameter hole 15d of the member may be 30% or more or 35% or more of the dimension of the member columnar hole 15b, or may be 45% or less or 40% or less.

In FIG. 3 having the above configuration, the dimensions (diameters) in the X direction and the Y direction of the main body through hole 12, the cap member 14, and the member through hole 15 decrease from the upper side to the lower side in the Z direction.

<Materials>
The material constituting the main body 11 of the mask jig 1 can be, for example, metals such as stainless steel, steel, and copper, and ceramics such as carbon and alumina. Further, the cap member 14 is formed of an imide-based resin such as polyamide-imide (PAI). As the imide resin, for example, polyimide may be used in addition to polyamide-imide.

Next, the effects of this embodiment will be explained while appropriately describing the current situation and issues.

<Current issues>
FIG. 4 is a schematic cross-sectional view showing a mask jig according to a comparative example and a mode of supplying powder to the base material side covered by the mask jig. Referring to FIG. 4, in the mask jig 1 of the comparative example, a main body through hole 12 is formed that penetrates the main body portion 11 from the first surface 11a to the second surface 11b, similarly to the present embodiment.

When the mask jig 1 for the cold spray method is used, deterioration occurs due to the accumulation of powder 10 on the surface, film formation, and further collision of the powder 10 for film formation. Therefore, the mask jig 1 is a consumable member that is frequently replaced. From the viewpoint of suppressing such deterioration and enabling highly efficient film formation on the desired base material 20 installed on the base jig 21, the mask jig 1 or A plate-shaped cover may be manufactured to cover this. However, polyamideimide is expensive. In order to reduce manufacturing costs, the mask jig 1 made of polyamideimide is manufactured by a molding method, but in this case, the size of the mask jig 1 that can be manufactured becomes small.

In order to form a film on a large base material, it is necessary to make the mask jig 1 larger according to the larger base material. However, as described above, it is difficult to apply an inexpensive molding method to the manufacture of a large-sized mask jig 1 made of polyamideimide. Furthermore, if the entire large mask jig 1 is made of expensive polyamide-imide, the price will rise.

<Effect>
From the viewpoint of solving the above problems, a mask jig according to the present disclosure is used in a thermal spraying method. The mask jig 1 includes a main body portion 11 . The main body portion 11 includes a first surface 11a and a second surface 11b. The second surface 11b is located on the opposite side to the first surface 11a. The main body portion 11 is formed with a main body through hole 12 that reaches from the first surface 11a to the second surface 11b. The device further includes a mounting member (cap member 14) that can be attached to and detached from the main body through hole 12. The cap member 14 is formed with a member through hole 15 that penetrates in the first direction (the Z direction or the direction along this direction) connecting the first surface 11a and the second surface 11b when inserted into the main body through hole 12. be done. The cap member 14 is made of imide resin.

The thermal spray method (cold spray method) is a film forming method that is good at forming films in a relatively small area. Therefore, the main body through hole 12 is formed only in a relatively small area of the main body 11 where the film is to be formed, and the cap member 14 in which the member through hole 15 is formed is inserted. The cap member 14 can protect the main body through hole 12, and can easily replace only the cap member 14 at any time without replacing the main body portion 11. The cap member 14 can be installed by simply inserting it into the main body through hole 12. Therefore, the cap member 14 can be easily installed and removed in a short time without requiring work such as screwing. Since the cap member 14 is smaller in size than the main body 11, the cost of polyamide-imide material can be reduced. Further, since the main body portion 11 is manufactured from metal or the like, there is no need to use a molding method in its manufacture. Therefore, it is possible to easily manufacture the main body portion 11 (mask jig 1) of any size (for example, larger than the conventional one) for the large base material 20. Furthermore, since the cap member 14 is made of imide resin, the effect of suppressing film formation on the surface of the cap member 14 can be ensured.

From the above, we can conclude that the cost reduction effect of using imide resin specialized for the necessary location (relatively small area where film formation is required immediately below), the effect of the cap member 14 preventing unintended film formation, and the effect of replacing All of the effects of shortening and facilitating the work and being able to select the dimensions of the mask jig 1 from a wider range can be obtained.

In the mask jig 1, a plurality of body through holes 12 may be arranged in the body portion 11 at intervals. The mask jig 1 can be used simply by attaching the cap members 14 to the respective main body through holes 12. Therefore, compared to a structure in which the entire main body portion 11 of the mask jig 1 is covered with an imide resin cover, the material cost of the imide resin can be reduced.

In the mask jig 1, the cap member 14 protrudes from at least one of the first surface 11a and the second surface 11b in the Z direction while being inserted into the main body through hole 12. That is, the cap member 14 protrudes to the outside of the main body portion 11 with respect to at least one of the first surface 11a and the second surface 11b. For example, when the cap member 14 protrudes upward with respect to the first surface 11a, it is possible to prevent the cap member 14 inserted into the main body through hole 12 from falling from the second surface 11b side (lower side). Furthermore, if the cap member 14 protrudes above the first surface 11a, the cap member 14 can be easily taken out from the protruding portion.

In the mask jig 1, the main body through hole 12 may have a main body inclined hole 12a that is inclined with respect to the Z direction in a portion that is continuous with at least one of the first surface 11a and the second surface 11b. For example, in the case where the main body inclined hole 12a is provided in a portion connected to the first surface 11a, the cap member 14 inserted into the main body through hole 12 is also provided with a member inclined region parallel to the main body inclined hole 12a. This can prevent the cap member 14 inserted into the main body through hole 12 from falling from the second surface 11b side (lower side). Furthermore, if the cap member 14 is configured to have a sloped portion, it is possible to take out the cap member 14 from the first surface 11a side (upper side) more easily than a configuration that does not have a sloped portion.

In the mask jig 1, the cap member 14 includes a member columnar region 14b extending along the Z direction and a member inclined region 14a inclined with respect to the member columnar region 14b when inserted into the main body through hole 12. . At least a portion of the member inclined region 14a projects with respect to the first surface 11a. If the inclined portion protrudes from the main body portion 11 in this manner, it is possible to prevent the cap member 14 inserted into the main body through hole 12 from falling from the second surface 11b side (lower side). Moreover, with such a configuration, the cap member 14 can be easily taken out from the first surface 11a side (upper side) using the member inclined region 14a. Note that by having the member inclined region 14a, the cap member 14 can be taken out from the first surface 11a side (upper side) more easily than, for example, when having a flange region described below.

The mounting member according to the present disclosure is a cap member 14 provided in a mask jig 1 used in a thermal spraying method, and has a member through hole that penetrates from one end (top surface 16) to the other end (bottom surface 17). 15 is formed. The cap member 14 is made of imide resin.

A cap member 14 is provided on a mask jig 1 used in thermal spraying. Therefore, as mentioned above, the use of imide-based resin specialized for the necessary locations (main body through hole 12) has a cost reduction effect, the cap member 14 prevents unintended film formation, and the time required for replacement work is shortened. It is possible to obtain all of the advantages of simplification and the ability to select the dimensions of the mask jig 1 over a wider range.

The cap member 14 includes a member columnar region 14b and a member inclined region 14a. The member columnar hole 15b, which is a through hole of the member columnar region 14b, extends in a columnar shape. Therefore, the member columnar region 14b has the same arbitrary cross section orthogonal to the extending direction (Z direction) (the cross sections at different positions in the extending direction are the same, and the cross section does not change). In the cross section of FIG. 3, the member inclined region 14a extends from one end (for example, the boundary b1 in FIG. 3) in the extending direction (Z direction) of the member columnar region 14b in a direction inclined with respect to the member columnar region 14b. Extends.

A film forming apparatus 100 according to the present disclosure includes a spray gun 2 including a nozzle 2b, a powder supply section 3, a gas supply section 4, and the mask jig 1. The powder supply unit 3 supplies the spray gun 2 with powder that becomes a film forming raw material. Gas supply unit 4 supplies operating gas to spray gun 2 . The mask jig 1 is placed between the base material 20 and the spray gun 2.

In this case, by using the mask jig 1 described above, it is possible to suppress the deposition of the film-forming raw material on the mask jig 1, so that the film-forming process using the mask jig 1 can be performed continuously. It can be made longer.

<Modified example of mask jig>
FIG. 5 is a schematic cross-sectional view showing a second example of a main body through hole of the mask jig in FIG. 2 and a cap member inserted into the main body through hole. Referring to FIG. 5, regarding the second example of the mask jig 1 and the cap member 14, the same parts as in the first example are given the same reference numerals in principle, and the description thereof will not be repeated as long as the functions etc. are the same. . However, in FIG. 5, there is no part inclined with respect to the Z direction as in FIG. 3. That is, the main body through hole 12 in FIG. 5 consists only of a main body columnar hole 12b extending along the Z direction, and the main body columnar hole 12b extends from the first surface 11a to the second surface 11b.

As shown in FIG. 5, the main body of the cap member 14 of the second example has a columnar region 14b, a horizontal region 14c, and a flange region 14f. The flange region 14f is formed at the uppermost part of the cap member 14 in the Z direction when the cap member 14 is inserted into the main body through hole 12. If the dotted line in FIG. 5 is the boundary b1, the upper side thereof is the flange area 14f. The boundary b1 is a boundary between the flange region 14f and the member columnar region 14b in the cap member 14. The boundary b1 is on the same plane as the lower surface of the flange region 14f. The boundary b1 may be arranged on the same plane as the first surface 11a, which is the boundary between the inside of the main body part 11 and the outside of the main body part 11 of the cap member 14 in FIG. 5, and may be along the XY plane. The flange region 14f is arranged on the outer side of the main body portion 11 than this boundary b1. The flange region 14f has a shape along the XY plane. Therefore, in FIG. 5, the flange region 14f is arranged outside the first surface 11a, and its lower surface faces the first surface 11a. The lower surface of the flange region 14f may be in contact with the first surface 11a.

The member through hole 15 includes, in order from the top in the Z direction, a member columnar hole 15b, a member horizontal hole 15c, and a member small diameter hole 15d. The member columnar hole 15b extends along the Z direction from the uppermost surface of the flange region 14f to the boundary b2 between the member columnar hole 15b and the member horizontal hole 15c. The boundary b2 is a boundary between the member columnar region 14b and the horizontal region 14c in the cap member 14. The boundary b2 spreads from the lowest part of the member columnar hole 15b of the member through hole 15, and is arranged on the same plane as the member horizontal hole 15c. In the state inserted into the main body through hole 12, the boundary b2 may be a plane parallel to the XY plane.

The dimension of the flange region 14f along the X direction (Y direction) is preferably 15% or more and 30% or less of the width of the main body through hole 12 in the X direction, and within that, it should be 20% or more and 25% or less. is more preferable.

FIG. 6 is a schematic cross-sectional view showing a third example of the main body through-hole of the mask jig in FIG. 2 and the cap member inserted into the main body through-hole. Referring to FIG. 6, regarding the third example of the mask jig 1 and the cap member 14, the same parts as in the second example are given the same reference numerals in principle, and the description thereof will not be repeated as long as the functions etc. are the same. . However, in FIG. 6, not only the flange region 14f but also the horizontal region 14c protrudes from the main body portion 11. A boundary b2 indicated by a dotted line in FIG. 6 is a boundary between the columnar region 14b and the horizontal region 14c in the cap member 14, as in FIG. 5, but is located below the boundary b2 in FIG. As shown in FIG. 6, the boundary b2 may be arranged on the same plane as the second surface 11b, and may be along the XY plane. The horizontal region 14c is located below this boundary b2 in the Z direction and is disposed outside the main body portion 11. The horizontal region 14c has a shape along the XY plane. The lowermost surface 17 of the cap member 14 is arranged below the second surface 11b (outside the main body 11).

In FIG. 6, the boundary b1 is arranged on the same plane as the first surface 11a, and the boundary b2 is arranged on the same plane as the second surface 11b. Therefore, the member columnar region 14b between the boundary b1 and the boundary b2 is entirely accommodated within the main body through hole 12 (main body columnar hole 12b) of the main body portion 11. The main body columnar hole 12b contacts only the member columnar region 14b.

When the cap member 14 inserted into the main body through hole 12 protrudes downward from the second surface 11b as shown in FIG. 6, the cap member 14 can be easily removed by pushing up from the second surface 11b side. Therefore, in FIG. 6, the cap member 14 can be easily removed from either the first surface 11a side or the second surface 11b side.

FIG. 7 is a schematic cross-sectional view showing a fourth example of the main body through-hole of the mask jig in FIG. 2 and the cap member inserted into the main body through-hole. Referring to FIG. 7, regarding the fourth example of the mask jig 1 and the cap member 14, the same parts as in the first example are given the same reference numerals in principle, and the description thereof will not be repeated as long as the functions etc. are the same. . However, in FIG. 7, the main body through hole 12 includes, in order from the top in the Z direction, a main body inclined hole 12a, a main body columnar hole 12b, a main body horizontal hole 12c, and a main body small diameter hole 12d. The main body of the cap member 14 in FIG. 7 includes, in order from the top in the Z direction, a member inclined region 14a, a member columnar region 14b, a horizontal region 14c, and a member small diameter region 14d. The member through hole 15 in FIG. 7 includes, in order from the upper side in the Z direction, a member inclined hole 15a, a member columnar hole 15b, a member horizontal hole 15c, and a member small diameter hole 15d.

In the cross-sectional view of FIG. 7, the main body horizontal hole 12c extends from the bottom of the main body columnar hole 12b toward the inside in the X direction (Y direction) along the XY plane. The lowermost surface 17 of the horizontal region 14c of the cap member 14, which is the same surface as the second surface 11b in FIG. 3, is arranged closer to the first surface 11a than the second surface 11b in FIG. However, also in FIG. 7, the lowest surface of the horizontal region 14c may be the same surface as the second surface 11b, and the member small diameter region 14d may protrude outside the second surface 11b. Alternatively, at least a portion of the horizontal region 14c may protrude outside the second surface 11b. This makes it easy to remove the cap member 14 from the main body 11 by pushing up from the second surface 11b side. The main body small diameter hole 12d is formed below the main body columnar hole 12b and the main body horizontal hole 12c. The main body small diameter hole 12d extends from the innermost part of the main body horizontal hole 12c. The main body small diameter hole 12d extends in a columnar manner along the Z direction like the main body columnar hole 12b, but its width (diameter) in the X direction and the Y direction is smaller than that of the main body columnar hole 12b. In FIG. 7, the main body small diameter hole 12d is formed in the lowermost region in the Z direction so as to be continuous with the second surface 11b.

On the second surface 11b, a notch portion 11c extending in the Z direction is formed so as to be adjacent to the outside of the main body small diameter hole 12d. The notch portion 11c has a depth direction in the Z direction, and extends in the Z direction. The cutout portion 11c is formed around the main body small diameter hole 12d once. However, the notch portion 11c may be formed only in a part of the periphery (circumferential direction) of the main body small diameter hole 12d.

In the cap member 14 of FIG. 7, the horizontal area 14c is an area sandwiched between the boundary b2 and the boundary b3. The boundary b1 and the boundary b2 are the same as in FIG. 3. The boundary b3 is a boundary between the horizontal region 14c and the member small diameter region 14d in the cap member 14. That is, the upper side of the boundary b3 is the horizontal area 14c. In the inserted state as shown in FIG. 7, the boundary b3 may be on the same plane as the main body horizontal hole 12c. The member small diameter region 14d is a region below the boundary b3 in FIG. 7, and continues to the second surface 11b.

In FIG. 7, the member horizontal hole 15c and the member small diameter hole 15d are formed in the same manner as in FIG. However, since FIG. 7 differs from FIG. 3 in that it has a member small diameter region 14d extending in the Z direction, the member small diameter hole 15d in FIG. 7 is longer in the Z direction than the member small diameter hole 15d in FIG. As shown in FIG. 7, the member small diameter hole 15d may be longer in the Z direction than the member columnar hole 15b in the figure, and the main body small diameter hole 12d may be shorter in the Z direction than the main body columnar hole 12b in the figure.

In the cap member 14 of FIG. 7 as well, a flange region 14f extending along the horizontal direction similar to that of FIG. 5 may be formed from the uppermost surface 16 of the member inclined region 14a.

FIG. 8 is a schematic cross-sectional view showing a fifth example of the main body through-hole of the mask jig in FIG. 2 and the cap member inserted into the main body through-hole. Referring to FIG. 8, a structure of the cap member 14 having no inclined portion as in the second example of FIG. 5, and a structure having a main body small diameter hole 12d and a member small diameter region 14d as in the fourth example of FIG. may be combined. A boundary b1 in FIG. 8 is a boundary between the member columnar region 14b and the horizontal region 14c in the cap member 14. The boundary b1 spreads from the bottom of the member columnar hole 15b and is arranged on the same plane as the member horizontal hole 15c. The boundary b2 is a boundary between the horizontal region 14c and the member small diameter region 14d in the cap member 14. In the inserted state as shown in FIG. 8, the boundary b2 may be on the same plane as the main body horizontal hole 12c. The main body portion 11 in FIG. 8 may be formed with a cutout portion 11c as in FIG. 7. Although the flange region 14f of FIG. 5 is not formed in FIG. 8, a flange region 14f similar to that in FIG. 5 may be formed above the member columnar region 14b in FIG.

In the example shown in FIGS. 7 and 8 having the notch portion 11c, the main body small diameter hole 12d and the member small diameter region 14d are formed, but the invention is not limited to such an example. FIG. 9 is a schematic cross-sectional view showing a sixth example of the main body through hole of the mask jig in FIG. 2 and the cap member inserted into the main body through hole. Referring to FIG. 9, the sixth example has the same configuration as FIG. 3 (first example), but has a notch 11c formed therein. For example, even in the example shown in FIG. 3 which does not have the main body small diameter hole 12d and the member small diameter region 14d, the notch 11c is provided at a position adjacent to the main body through hole 12 (main body columnar hole 12b) on the second surface 11b. may be formed. Although not shown, the notch portion 11c may be formed at the same position as in FIG. 9 in each of the examples shown in FIGS. 5 and 6 as well.

Note that the cap member 14 in each of the above examples (FIGS. 3 and 5 to 9) is formed by a generally known molding method for a resin molded body, such as injection molding. However, instead of injection molding, the cap member 14 may be formed by cutting a resin material. Moreover, when the main body part 11 of the mask jig 1 is made of metal, for example, it is formed by cutting or pressing. Further, the method of attaching the cap member 14 to the main body part 11 in each of the above examples is the same, and it is preferable to insert the cap member 14 from above the first surface 11a downward.

<Effects of modified examples>
In the mask jig 1, as in the second example in FIG. 5 and the third example in FIG. and a flange region 14f extending in a direction intersecting the Z direction (direction along the XY plane) from the end (for example, the uppermost boundary b1) of the member columnar region 14b. The flange region 14f is arranged on the outside of the first surface 11a and faces the first surface 11a. If the flange region 14f is configured to protrude from the main body portion 11, it is possible to prevent the cap member 14 inserted into the main body through hole 12 from falling from the second surface 11b side (lower side). Moreover, with such a configuration, the cap member 14 can be easily taken out from the first surface 11a side (upper side).

In the mask jig 1, as in the fourth example in FIG. 7 and the fifth example in FIG. A notch 11c may be formed as a recess extending in the Z direction toward the first surface 11a. At the cutout portion 11c, the outer wall surface of the cap member 14 adjacent to the cutout portion 11c is exposed. Therefore, the cap member 14 can be easily taken out from the main body through hole 12 by pushing the outer wall surface or the like from the notch 11c of the second surface 11b.

The cap member 14 includes a columnar region 14b and a flange region 14f. The member columnar hole 15b, which is a through hole of the member columnar region 14b, extends in a columnar shape. Therefore, the member columnar region 14b has the same arbitrary cross section orthogonal to the extending direction (Z direction) (the cross sections at different positions in the extending direction are the same, and the cross section does not change). In the cross section of FIG. 5 (same as the cross section of FIG. 3), the flange region 14f extends from one end (for example, boundary b1 in FIG. 5) of the member columnar region 14b in the extending direction (Z direction) to the member columnar region 14b. It spreads so that it has a plane (XY plane) that intersects with the plane. The flange region 14f is partially continuous with the member columnar region 14b.

<Film formation method>
FIG. 10 is a flowchart showing the film forming method according to this embodiment. Referring to FIG. 10, the film forming method is a film forming method carried out using the mask jig 1 having the main body through hole 12 and the film forming apparatus 100 shown in FIGS. 3 and 5 to 9. The process mainly includes a preparation process (S10), a film forming process (S20), and a post-processing process (S30).

The preparation step (S10) includes a step of arranging the mask jig 1 so as to face the surface of the base material 20 as shown in FIG. In the placing step, the mask jig 1 is placed so that the first surface 11a (see FIG. 3) of the mask jig 1 faces the surface of the base material 20.

In the film forming step (S20), powder serving as a film forming raw material is sprayed onto the surface of the base material 20 through the main body through hole 12 of the mask jig 1 by a cold spray method using the film forming apparatus 100. As a result, a film made of the film-forming raw material is formed on the surface of the base material 20.

In the post-processing step (S30), the mask jig 1 is removed from the surface of the base material 20. Thereafter, necessary treatments such as processing on the base material 20 are performed. In this way, a film can be formed on the surface of the base material 20.

In the film forming method described above, since the mask jig 1 according to the present embodiment is used, the amount of the film forming raw material attached to the mask jig 1 can be reduced, so that the film forming process (S20) can be performed continuously. can be made longer. Alternatively, by using the mask jig 1, the number of times the mask jig 1 can be used repeatedly can be increased.

The embodiments disclosed this time should be considered to be illustrative in all respects and not restrictive. Unless there is a contradiction, at least two of the embodiments disclosed herein may be combined. For example, a configuration including both the main body inclined hole 12a and member inclined region 14a shown in FIG. 3 and the flange region 14f shown in FIG. 5 may be applied. The basic scope of the present disclosure is indicated by the claims rather than the above description, and it is intended that all changes within the meaning and range equivalent to the claims are included.

Hereinafter, various aspects of the present disclosure will be collectively described as supplementary notes.
(Additional note 1)
A mask jig used in a thermal spraying method,
A main body portion including a first surface and a second surface located on the opposite side of the first surface,
A main body through hole reaching from the first surface to the second surface is formed in the main body,
Further comprising a mounting member that can be attached to and detached from the main body through hole,
The mounting member is formed with a member through hole that penetrates in a first direction connecting the first surface and the second surface when inserted into the main body through hole,
The mounting member is a mask jig made of imide resin.

(Additional note 2)
The mask jig according to appendix 1, wherein a plurality of the main body through holes are arranged at intervals in the main body.

(Additional note 3)
The mask according to

supplementary note

1 or 2, wherein the attachment member protrudes from at least one of the first surface and the second surface in the first direction when inserted into the main body through hole. jig.

(Additional note 4)
The device according to any one of Supplementary Notes 1 to 3, wherein the main body through hole has a main body inclined hole that is inclined with respect to the first direction in a portion continuous with at least one of the first surface and the second surface. Mask jig.

(Appendix 5)
The mounting member includes a member columnar region extending along the first direction when inserted into the main body through hole, and a member inclined region inclined with respect to the member columnar region,
The mask jig according to any one of Supplementary Notes 1 to 4, wherein at least a portion of the member inclined region protrudes with respect to the first surface.

(Appendix 6)
The mounting member includes a member columnar region extending along the first direction when inserted into the main body through hole, and a flange region extending from an end of the member columnar region in a direction intersecting the first direction. including;
The mask jig according to any one of Supplementary Notes 1 to 3, wherein the flange region is disposed outside the first surface and faces the first surface.

(Appendix 7)
Any one of Supplementary Notes 1 to 6, wherein a recess extending in the first direction from the second surface toward the first surface is formed in the second surface of the main body at a position adjacent to the main body through hole. or the mask jig according to item 1.

(Appendix 8)
A mounting member used for a mask jig used in thermal spraying,
A mounting member formed of an imide resin and having a member through-hole penetrating from one end to the other end opposite to the one end.

(Appendix 9)
comprising the step of arranging the mask jig described in Appendix 1 so as to face the surface of the base material,
In the arranging step, the mask jig is arranged such that the first surface of the mask jig faces the surface of the base material, and further,
A film forming method comprising the step of spraying a powder serving as a film forming raw material onto the surface of the base material by a cold spray method through the main body through hole of the mask jig.

(Appendix 10)
a spray gun including a nozzle;
a powder supply unit that supplies powder as a film forming raw material to the spray gun;
a gas supply unit that supplies operating gas to the spray gun;
A film forming apparatus comprising a mask jig according to Supplementary Note 1, which is disposed between a base material and the spray gun.

1 Mask jig, 2 Spray gun, 2a Spray gun main body, 2b Nozzle, 2c Heater, 3 Powder supply section, 4 Gas supply section, 5, 6 Piping, 7 Valve, 8 Pressure sensor, 9 Temperature sensor, 10 Powder, 11 main body, 11a first surface, 11b second surface, 11c notch, 12 main body through hole, 12a main body slanted hole, 12b main body columnar hole, 12c main body horizontal hole, 12d main body small diameter hole, 13 screw fixing hole, 14 Cap member, 14a member inclined area, 14b member columnar area, 14c horizontal area, 14d member small diameter area, 14f flange area, 15 member through hole, 15a member slanted hole, 15b member columnar hole, 15c member horizontal hole, 15d member small diameter hole , 16 Top surface, 17 Bottom surface, 20 Base material, 21 Base jig, 30, 31, 32 Arrow, 100 Film forming apparatus, b1, b2, b3 boundary.

Claims

A mask jig used in a thermal spraying method,
A main body portion including a first surface and a second surface located on the opposite side of the first surface,
A main body through hole reaching from the first surface to the second surface is formed in the main body,
Further comprising a mounting member that can be attached to and detached from the main body through hole,
The mounting member is formed with a member through hole that penetrates in a first direction connecting the first surface and the second surface when inserted into the main body through hole,
The mounting member is a mask jig made of imide resin.
The mask jig according to claim 1, wherein a plurality of the main body through holes are arranged at intervals in the main body.
The mounting member according to claim 1 or 2, wherein the mounting member projects in the first direction with respect to at least one of the first surface and the second surface when inserted into the main body through hole. Mask jig.
The mask jig according to claim 1 or 2, wherein the main body through hole has a main body inclined hole that is inclined with respect to the first direction in a portion continuous with at least one of the first surface and the second surface.
The mounting member includes a member columnar region extending along the first direction when inserted into the main body through hole, and a member inclined region inclined with respect to the member columnar region,
The mask jig according to claim 1 or 2, wherein at least a portion of the member inclined region projects with respect to the first surface.
The mounting member includes a member columnar region extending along the first direction when inserted into the main body through hole, and a flange region extending from an end of the member columnar region in a direction intersecting the first direction. including;
The mask jig according to claim 1 or 2, wherein the flange region is arranged outside the first surface and faces the first surface.
According to claim 1 or 2, a recess extending in the first direction from the second surface toward the first surface is formed in the main body at a position adjacent to the main body through hole on the second surface. Mask jig as described.
A mounting member included in a mask jig used in thermal spraying,
A member through hole is formed that penetrates from one end to the other end opposite to the one end,
Mounting member made of imide resin.
arranging the mask jig according to claim 1 so as to face the surface of the base material,
In the arranging step, the mask jig is arranged such that the first surface of the mask jig faces the surface of the base material, and further,
A film forming method comprising the step of spraying a powder serving as a film forming raw material onto the surface of the base material by a cold spray method through the main body through hole of the mask jig.
a spray gun including a nozzle;
a powder supply unit that supplies powder as a film forming raw material to the spray gun;
a gas supply unit that supplies operating gas to the spray gun;
A film forming apparatus comprising the mask jig according to claim 1, which is disposed between a base material and the spray gun.