WO2024021967A1 - Valve and interconnection device - Google Patents

Abstract

A valve and an interconnection device comprising the valve, relating to the technical field of valve control. Provided is a valve occupying a small space. The valve (2) is used for connecting a first cavity (1) and a second cavity (3). The valve (2) may comprise: a valve body (21), an execution structure provided in the valve body (21), and a sealing block (24) connected to the execution structure; the valve (2) has a first surface (A1) and a second surface (A2) opposite to each other; the first surface (A1) is provided with a plurality of first mounting holes (211), the first mounting holes (211) penetrate from the first surface (A1) to the second surface (A2), and the first mounting holes (211) are used for mounting a first connecting member (291) connected to the first cavity (1); the second surface (A2) is provided with a plurality of second mounting holes (212), and the second mounting holes (212) are used for mounting a second connecting member (292) connected to the second cavity (3). The two types of mounting holes formed on one flange plate on the valve body (21) achieve the connection of different cavities, so that the valve (2) meets the requirement for defining the valve mounting space in a semiconductor manufacturing device.

Description

Valves, interconnecting equipment

This application claims priority to the Chinese patent application filed with the State Intellectual Property Office on July 28, 2022, with the application number 202210901206.6 and the invention name "Valve, Interconnection Equipment", the entire content of which is incorporated into this application by reference.

Technical field

The present application relates to the field of valve technology, and in particular to a valve that can be used in vacuum equipment, and interconnected equipment connected to the valve.

Background technique

Vacuum valve is an indispensable sealing device for connecting chambers in semiconductor equipment in a vacuum environment. It is mainly used to connect chambers to chambers in vacuum equipment. For example, in vacuum equipment, vacuum valves can be used to change the direction of air flow, adjust the amount of air flow, cut off or connect pipelines, etc.

By controlling the opening and closing of the vacuum valve, the connection and isolation between the two vacuum chambers are achieved. When the vacuum valve is closed, the air pressures of the two chambers will not affect each other, ensuring that the chambers are isolated from each other and can operate independently. When the vacuum gate valve is open, the two chambers are connected to each other, and sample (for example, chip) detection or processing can be performed.

In some equipment, the installation space reserved for valves between chambers is limited by certain conditions. For example, in detection equipment that detects chip morphological features, the projection of charged particles generated by a particle source is to the chip to detect the chip's morphology.

In order to improve detection efficiency and detection quality, the distance from the particle source to the chip cannot be too far, that is, the transmission path of the charged particles generated by the particle source cannot be too far, otherwise the detection efficiency may be reduced or the detection performance may be affected, thus, The valves that connect different chambers are required to be small in size on the transmission path of charged particles and cannot occupy a large installation space.

Contents of the invention

The present application provides a valve and interconnected equipment having the valve. The main purpose is to change the structure of the valve so that when the valve is used in semiconductor manufacturing equipment, for example, when used in chip detection equipment, it will not occupy a large space on the transmission path of charged particles. Furthermore, the performance of the detection equipment can be improved.

In order to achieve the above objectives, the embodiments of the present application adopt the following technical solutions:

In one aspect, the present application provides a valve for connecting a first cavity and a second cavity. Wherein, the valve may include: a valve body, an actuating structure disposed in the valve body, and a sealing block connected to the actuating structure; the valve has an opposite first surface and a second surface, and the first surface has a plurality of first mounting holes. , the first mounting hole penetrates from the first surface to the second surface, and the first mounting hole is used to install the first connecting piece connected to the first cavity. The second surface has a plurality of second mounting holes, and the second mounting holes are used for In order to install the second connecting piece connected to the second cavity, a first through hole is also provided on the first surface, and the first through hole is used to communicate with the first cavity, and a second through hole is provided on the second surface. The second through hole is used to communicate with the second cavity; and, the actuating structure in the valve can drive the sealing block to move, so that the sealing block opens or closes the first through hole.

In the valve provided in this application, on the first surface of the valve body, not only a plurality of first mounting holes are opened, but also a plurality of second mounting holes are opened. The first mounting holes here can be used for the first connecting member. Insert, the second mounting hole can be used for the second connector to be inserted, then, when the valve is used in a chip detection device, the first connector inserted in the first mounting hole can be used to be fixedly connected to the first cavity, and , the second connecting piece inserted into the second mounting hole can be fixedly connected to the second cavity, thereby realizing the docking of the first cavity and the second cavity. Since the first mounting hole and the second mounting hole are both opened on the first surface, it can be understood that the connection of different cavities is achieved through the two mounting holes formed on a flange plate on the valve body, rather than through Two flanges (the arrangement direction of the two flanges is parallel to the axial direction of the mounting hole) realizes the docking of different cavities. In this case, in comparison, the valve provided in this application can reduce the space occupied in the direction parallel to the axial direction of the mounting hole, so that the valve can adapt to the limited valve installation space in semiconductor manufacturing equipment. needs.

In an implementable manner, a plurality of first mounting holes are arranged at intervals along the circumference of the second surface, and a plurality of second mounting holes are arranged at intervals along the circumferential direction of the second surface. arranged at intervals along the circumferential direction of the second surface; a plurality of first mounting holes arranged along the circumferential direction of the second surface are located in the outer ring, and a plurality of second mounting holes arranged along the circumferential direction of the second surface are located in the outer ring. inner ring.

That is, the first mounting hole of the outer ring is used for docking with the first cavity, and the second mounting hole of the inner ring is used for docking with the second cavity.

In an implementable manner, along the axial direction of the first mounting hole, the first mounting hole includes a first segment and a second segment that are connected, the first segment is closer to the second surface relative to the second segment; and the first segment The aperture is larger than the aperture of the second segment. It can be understood that the first mounting hole provided in the embodiment of the present application is a countersunk hole structure.

In an implementable manner, the second mounting hole is a threaded hole, and the first mounting hole is a through hole with a smooth inner wall surface.

In an implementable manner, a plurality of second mounting holes are arranged along the periphery of the first through hole, and the plurality of first mounting holes are arranged along the periphery of the plurality of second mounting holes.

In an implementable manner, the execution structure includes a driving structure and an extrusion structure, and the sealing block is arranged on the extrusion structure; the driving structure is connected to the extrusion structure, and the driving structure is used to drive the extrusion structure and the sealing block to move, so as to The sealing block opens or closes the first through hole; the extrusion structure includes a first extrusion piece and a second extrusion piece. The first extrusion piece and the second extrusion piece enclose an installation groove, and the sealing block is arranged in the installation groove. Inside; when the driving structure drives the extrusion structure and the sealing block to move to close the first through hole, the first extrusion piece can move in a direction closer to the second extrusion piece to cause the sealing block to move toward the first through hole. The extrusion force that moves in the direction causes the sealing block to close the first through hole.

In this implementation structure, the movement of the first extrusion part relative to the second extrusion part generates a thrust force on the sealing block, causing the sealing block to move toward the first through hole, thereby closing the first through hole.

In one possible way, the cross-sectional area of the installation groove gradually increases from the bottom surface of the installation groove to the direction of the opening of the installation groove.

This design allows the sealing block to move smoothly toward the first through hole under the action of thrust.

In an implementable manner, the first extrusion part has a first wall for enclosing the installation groove, the second extrusion part has a second wall for enclosing the installation groove, the first wall and the second wall The first wall surface and the second wall surface are opposite, and both are inclined planes; along the direction from the bottom surface of the installation groove to the notch of the installation groove, the first wall surface and the second wall surface are inclined from the center of the installation groove toward the edge of the installation groove.

That is to say, the inclined plane is used to make the sealing block slide along the inclined plane under the action of thrust, which can reduce friction and increase the moving speed of the sealing block.

In an implementable manner, the sealing block is formed with a first contact surface parallel to the first wall surface and a second contact surface parallel to the second wall surface; the first contact surface is slidably disposed on the first wall surface. On the wall, the second contact surface is slidably disposed on the second wall.

In an implementable manner, the valve further includes a blocking member, which is fixed in the valve body; the driving structure drives the extruding structure and the sealing block to move, so that in the process of closing the first through hole, the second extruding member can resist Connected to the blocking member so that the first extrusion piece can move in a direction closer to the second extrusion piece.

When the driving structure drives the first extrusion piece and the second extrusion piece to move, the second extrusion piece will be blocked by the blocking piece, and the first extrusion piece will continue to move to push the sealing block toward the first passage. Move the hole direction to block the first through hole.

In an implementable manner, the first extrusion part includes a plurality of enclosures that enclose an accommodating cavity with an opening; the second extrusion part is located in the accommodating cavity and at the opening, and the second extrusion part is located in the accommodating cavity. The extrusion piece is slidingly connected to the hoarding; the driving structure drives the extrusion structure and the sealing block to move, so that in the process of closing the first through hole, the opening is opened for the blocking piece to pass through, so that the second extrusion piece abuts against the blocking piece. , the first extrusion part slides relative to the second extrusion part.

The installation groove here is surrounded by a plurality of enclosure plates of the first extrusion part and the second extrusion part, and has an opening. In this case, the first extrusion part and the second extrusion part are driven by the driving structure. When moving downward, the opening allows the blocking member to pass through, so that the second extruding member and the blocking member abut together.

In an implementable manner, the valve further includes a first elastic member, and the sealing block is connected to the extrusion structure through the first elastic member; the driving structure drives the extrusion structure and the sealing block to move to open the first through hole. , the first elastic member is used to give the sealing block elastic force in a direction away from the first through hole.

During the closing process of the valve, the function of the first elastic member is to quickly move the sealing block out of the first through hole to avoid friction between the sealing ring on the sealing block and the inner wall of the valve body, thereby reducing the sealing performance of the sealing ring.

In an implementation manner, the first elastic member may be a spring, one end of the spring is connected to the sealing block, and the other end is connected to the extrusion structure.

In an implementable manner, the valve further includes a second elastic member, and the first extrusion member is connected to the second extrusion member through the second elastic member; the driving structure drives the extrusion structure and the sealing block to move to open the first extrusion member. During the process of opening the hole, the second elastic member is used to give the first extrusion member an elastic force in a direction away from the second extrusion member.

The second elastic member in this embodiment is used to provide rebound force to the first extrusion member, so that the second extrusion member returns to its original position, and can also cause the sealing block to move in a direction away from the first through hole.

In an implementation manner, the first elastic member may be a spring, one end of the spring is connected to the first extrusion member, and the other end is connected to the second extrusion member.

In one possible implementation, the first elastic member is disposed on the support column, and the elastic direction of the first elastic member can be constrained by the support column, so that the first extrusion member moves in a straight line.

In an implementable manner, the valve further includes a first guide structure. When the driving structure drives the extrusion structure and the sealing block to move, the first guide structure is used to guide the sealing block to move in a first direction. The first direction is The direction perpendicular to the movement of the sealing block toward the first through hole.

Since in the valve structure, the sealing performance of the valve is a key indicator that reflects the superior performance of the valve, by setting the first guide structure, the sealing block can be guided to move in a straight line, so that the sealing block will not deviate from the first through hole, but will be more accurate. Align the first through hole.

In an implementable manner, the first guide structure includes a horizontal plate, which is arranged in the installation groove, the sealing block is supported on the horizontal plate, and the end of the horizontal plate is connected with a roller; the wall surface of the installation groove is provided with a groove along the first A guide groove extends in one direction, and the roller is rollingly arranged in the guide groove.

In this embodiment, the first guide structure includes a transverse plate carrying the sealing block, and the transverse plate is rolled in the guide groove by rollers to guide the sealing block to move in a straight line.

In addition, in this embodiment, the rolling connection between the roller and the guide groove is adopted. Compared with other forms of friction, such as sliding friction, the friction coefficient can be reduced and the probability of metal chips generated by friction can be reduced. When the valve is used in chip topography inspection equipment, there is almost no chance of damage to the chip due to metal shavings falling onto the chip.

In one possible implementation, a perforation is provided on the transverse plate, and a support column for passing the first elastic member passes through the perforation. One end of the first elastic member is connected to the sealing block, and the other end is in contact with the transverse plate. superior.

When the sealing block moves toward the first through hole, the first elastic member is stretched. When the sealing block moves toward the direction away from the first through hole, the first elastic member is squeezed.

In an implementable manner, the valve further includes a second guide structure. When the driving structure drives the extrusion structure and the sealing block to move, the second guide structure is used to guide the extrusion structure to move in the first direction. is a direction perpendicular to the movement of the sealing block toward the first through hole.

That is, the second guide structure is provided to guide the extrusion structure and the sealing block to move along a straight line, similar to the above-mentioned first guide structure, which can improve the sealing accuracy.

In an implementable manner, the second guide structure includes a guide wheel, which is arranged on the extrusion structure; the guide wheel is in contact with the inner wall surface of the valve body, and the guide wheel can move along the inner wall surface of the valve body. Scroll in the first direction.

In this second guide structure, through the rolling connection between the guide wheel and the wall surface of the valve body, the extrusion structure supporting the sealing block can also be guided to move linearly.

In one possible implementation, the inner wall of the valve body is provided with a guide groove for the guide wheel to roll, and the guide groove extends along the first direction.

In an implementable manner, a separated first installation cavity and a second installation cavity are formed in the valve body; the extrusion structure and the sealing block are arranged in the first installation cavity; the drive structure includes a driver, and the output shaft of the driver The connected push rod and the driver are arranged in the second installation cavity. The push rod extends from the second installation cavity to the first installation cavity and is connected to the extrusion structure. The extension direction of the push rod and the sealing block are toward the first through hole. The direction of movement is perpendicular.

In an implementable manner, the valve further includes a support seat, the push rod passes through the support seat, and the support seat is connected to the push rod through a guide sleeve so that the push rod moves in a straight line.

In an implementable manner, the valve body has a window on a wall used to form the second installation cavity, a cover plate is provided on the window, and the cover plate is provided on the window through a sealing structure.

The driver is sealed in the second installation cavity through the sealing structure, so that the space in the valve body is a sealed space. When the valve is used in vacuum equipment, the vacuum degree can be guaranteed.

In one possible way, an inlaid groove is provided on the surface of the sealing block facing the first through hole, and a sealing ring is provided in the inlaid groove, and from the bottom surface of the inlaid groove to the direction of the groove opening, the cross-section of the inlaid groove area gradually decreases.

In another aspect, the present application also provides an interconnection device, including a first cavity, a second cavity and a valve in any of the above implementations, wherein the valve passes through a first mounting hole. The connecting piece is connected to the first cavity, and the valve is connected to the second cavity through a second connecting piece passed through the second installation hole; the first through hole of the valve is connected to the first cavity, and the second through hole of the valve is connected to the first cavity. The hole is connected with the second cavity.

The interconnection device provided by the embodiment of the present application includes the valve in the above implementation. In this valve structure, since the first mounting hole and the second mounting hole are both opened on the first surface, it can be understood that a flange is provided through The two mounting holes on the plate realize the connection of different cavities, instead of realizing the docking of different cavities through two flanges (the arrangement direction of the two flanges is parallel to the axial direction of the mounting holes). In this case, in comparison, the valve provided in this application can reduce the space occupied in the direction parallel to the axial direction of the mounting hole, so that the valve can adapt to the limited valve installation space in semiconductor manufacturing equipment. needs.

In an implementable manner, the second surface faces the first cavity, and the first surface faces the second cavity; the second cavity is connected to the butt flange; the first connecting piece passes through the valve body and the third cavity from the first surface. One cavity is fixedly connected; the second connecting piece passes through the butt flange and is fixedly connected to the valve body.

In an implementable manner, the interconnection device includes a detection device for detecting the substrate; the detection device includes: a particle source, used to generate charged particles, and is arranged in the first cavity; a multi-beam charged particle system, In the first cavity and arranged in the beam path of the charged particles, the multi-beam charged particle system is used to divide the charged particles into multiple beams; the first cavity and the second cavity are both vacuum cavities; the charged particles can be divided into multiple beams. The beamed charged particle system, first cavity, valve and second cavity are projected onto the substrate.

In the detection equipment for detecting the substrate, the valve in the above implementation is used. Since the valve occupies a small space in the direction parallel to the axial direction of the mounting hole, that is, along the beam path of the charged particles, the valve occupies The space is smaller, which will shorten the transmission path of charged particles to improve the detection efficiency of chip topography features and improve the detection quality.

Description of drawings

Figure 1 is a schematic structural diagram of a detection device for detecting chip morphological characteristics provided by an embodiment of the present application;

Figure 2 is an external structural diagram of a valve provided by an embodiment of the present application;

Figure 3 is a view in the M1 direction of Figure 2;

Figure 4 is a view in the M2 direction of Figure 2;

Figure 5 is a schematic structural diagram including a valve, a first cavity and a second cavity provided by an embodiment of the present application;

Figure 6 is a schematic structural diagram of a valve installed in a detection device for detecting chip morphological characteristics provided by an embodiment of the present application;

Figure 7 is a schematic cross-sectional view of the valve provided by the embodiment of the present application;

Figure 8 is a simple structural diagram of a valve in an open state provided by the embodiment of the present application;

Figure 9 is a simple structural diagram of a valve in a closed state provided by an embodiment of the present application;

Figure 10a is a simple structural diagram when the sealing block in the valve provided by the embodiment of the present application is in an open state;

Figure 10b is a simple structural diagram when the sealing block in the valve provided by the embodiment of the present application is in a closed state;

Figure 11a is a schematic structural diagram of a mounting groove for setting a sealing block in a valve provided by an embodiment of the present application;

Figure 11b is a schematic structural diagram of a mounting groove for arranging a sealing block in a valve provided by an embodiment of the present application.

Figure 12 is a simple structural diagram when the sealing block in the valve provided by the embodiment of the present application is in an open state;

Figure 13 is a partial structural schematic diagram of a valve provided by an embodiment of the present application;

Figure 14 is a partial structural schematic diagram of a valve provided by an embodiment of the present application;

Figure 15 is a schematic structural diagram of an extrusion structure in a valve provided by an embodiment of the present application;

Figure 16 is a schematic structural diagram of a sealing block in a valve provided by an embodiment of the present application;

Figure 17 is a schematic structural diagram of an inlaid groove on a sealing block in a valve provided by an embodiment of the present application;

Figure 18 is a schematic structural diagram of an elastic member in a valve provided by an embodiment of the present application;

Figure 19 is a schematic structural diagram of an elastic member in a valve provided by an embodiment of the present application;

Figure 20a is a simple structural diagram when the sealing block in the valve provided by the embodiment of the present application is in a closed state;

Figure 20b is a simple structural diagram when the sealing block in the valve provided by the embodiment of the present application is in an open state;

Figure 21 is a partial structural schematic diagram of a valve provided by an embodiment of the present application;

Figure 22a is a simple structural diagram when the sealing block in the valve provided by the embodiment of the present application is in a closed state;

Figure 22b is a simple structural diagram when the sealing block in the valve provided by the embodiment of the present application is in an open state;

Figure 23 is a partial structural schematic diagram of a valve provided by an embodiment of the present application;

Figure 24 is a partial structural schematic diagram of a valve provided by an embodiment of the present application;

Figure 25 is a partial structural schematic diagram of a valve provided by an embodiment of the present application;

Figure 26 is an exploded schematic diagram of a partial structure of a valve provided by an embodiment of the present application.

Reference signs:
1-First cavity;
2-Valve;
3-Second cavity;
4-Support platform;
5-object;
6-Detector;
7-particle source;
8-Multi-beam charged particle system;
9-Butt flange;
21-valve body; 21A1-first communication pipe; 21A2-second communication pipe; 211-first installation hole; 212-second installation hole; 213-
First through hole; 214-second through hole; 21B1-first installation cavity; 21B2-second installation cavity; 21C1-first cover plate; 21C2-second cover plate;
22-Driving structure; 221-Push rod; 222-Driver; 223-Guide seat; 224-Guide sleeve;
23-extrusion structure; 231-first extrusion piece; 232-second extrusion piece; 233-opening; 2311-enclosure; 2312-first wall;
2321-second wall; 234-accommodation cavity;
24-Sealing block; 241-First contact surface; 242-Second contact surface; 243-Inlaid groove;
25-Sealing ring;
26-blocking piece;
27-Installation slot;
281, 282-elastic parts;
291-First connector;
292-Second connector;
30-Guide wheel;
40-Roller;
50-horizontal plate; 501-perforation;
60-Guide groove;
701, 702-Guide rod.

Detailed ways

The valve serves as a control component and is used to connect two cavities. That is, using the switch of the valve, the two cavities can be connected or disconnected.

For example, in the field of semiconductor manufacturing, many processing processes (such as chip topography detection processes) need to be performed under high cleanliness and high vacuum, so vacuum equipment is required for corresponding manufacturing. Vacuum equipment generally includes multiple chambers used to perform different processes. During the production process, the chambers of different processes need to maintain relative independence to ensure that the production environment of each process reaches standards. Therefore, a Valves that connect multiple chambers.

In the chip manufacturing process, it mainly includes the following process steps: Step 1, make the chip; Step 2, apply anti-corrosion agent on the surface of the chip; Step 3, use a multi-beam charged particle system to irradiate the charged particle beam onto the anti-corrosion agent to Form a pattern; Step 4, use an etching machine to etch N wells and P wells on the exposed silicon, and inject ions to form a PN junction (logic gate); Step 5, then do chemical and/or physical vapor deposition. Cut out the metal connection circuit to make the chip.

After completing the above-mentioned chip manufacturing, the following steps will also be included: Step 5, inspect the chip to check whether there are process defects in the chip; Step 6, package the inspected chip. In this way, the manufacturing, packaging and testing of the chip are completed.

Among them, vacuum equipment will be used during the manufacturing, packaging and testing processes of the above-mentioned chips. For example, on the chip When detecting process defects, the detection equipment shown in FIG. 1 can be used. The detection equipment includes a first cavity 1 and a second cavity 3 . The first cavity 1 and the second cavity 3 are connected through a valve 2 . For example, the first cavity 1 and the second cavity 3 can both be vacuum chambers, and such detection equipment is also a vacuum detection equipment.

In addition, the detection equipment also includes a support table 4 and a detector 6. The support table 4 can be used to install an object to be inspected 5, such as a chip to be inspected. In addition, the detection device may also include a particle source 7 and a multi-beam charged particle system 8 located on the path of the charged particle beam of the particle source 7 . When the valve 2 is open, the charged particles generated by the particle source 7 are divided into component beams of charged particles by the multi-beam charged particle system 8 and can be projected onto the object 5 through the first cavity 1, the valve 2, and the second cavity 3. , the detector 6 is used to detect secondary charged particles generated by multiple beams of charged particles from the object to be inspected 5 to generate signals corresponding to the secondary charged particles. It can be understood that the particle beam generated by the particle source 7 is focused On the chip (wafer), a particle beam spot is formed on the wafer, and the detector 6 collects secondary particles generated on the wafer surface to obtain topography information of the wafer surface.

In some structures, the multi-beam charged particle system 8 shown in FIG. 1 includes a collimator and aperture array, and the collimator and beam splitter generate a beam of charged particles along the particle source 7 The paths are laid out in sequence. Among them, the collimator has beam expansion and collimation functions, and the beam splitter can divide the charged particle beam expanded and collimated by the collimator into multiple charged particle beams. In addition, the multi-beam charged particle system 8 may further include a focusing lens, and the focusing lens may be disposed on the beam path of the charged particle beam after passing through the beam splitter.

In some structures that can be implemented, as shown in Figure 6, the particle source 7 is arranged in the first cavity 1, and the multi-beam charged particle system 8 can be arranged in the first cavity 1 or the second cavity 3, supporting The stage 4 may be arranged in the second cavity 3 or not in the first cavity 1 or the second cavity 3 . Or, in some other structures, the particle source 7 is arranged in the first cavity 1 , part of the structure of the multi-beam charged particle system 8 is arranged in the first cavity 1 , and the other part of the structure is arranged in the second cavity 3 , for example, the collimator and the beam splitter are arranged in the first cavity 1, and the focusing lens is arranged in the second cavity 3. Specifically, the installation position of the structural parts can be adjusted according to the vacuum degree requirements of different structural parts or the requirements of the production line. This application does not specifically limit the installation position of the structural parts in the detection equipment.

In other structures that can be implemented, when the first cavity 1 , the valve 2 and the second cavity 3 are used in other semiconductor equipment, such as etching machines, some structural components can be disposed in the first cavity 1 , other structural components may be disposed in the second cavity 3 . The embodiments of the present application do not specifically limit the placement positions of the structural components in the semiconductor equipment in the first cavity 1 and the second cavity 3. The specific positions can be adjusted according to the vacuum degree requirements of different structural components or the requirements of the production line. Setup of structural members.

In Figure 1, it is schematically pointed out that the secondary charged particles generated by the object 5 to be inspected will be reflected in the detector 6, but this does not limit the transmission path of the secondary charged particles.

FIG. 2 is an external structural diagram of a valve 2 according to an embodiment of the present application. FIG. 3 is a view in the M1 direction of FIG. 2 , and FIG. 4 is a view in the M2 direction of FIG. 2 . 2, 3 and 4 together, the valve 2 provided in the embodiment of the present application includes a valve body (which may also be called a valve housing) 21. The valve body 21 has an opposite first surface A1 and a second surface A2. , on the first surface A1, a first communication tube 21A1 for communicating with the first cavity 1 shown in Figure 1 is provided, and on the second surface A2, a first communication pipe 21A1 for communicating with the second cavity shown in Figure 1 is provided. The second communication pipe 21A2 communicates with the body 3. Furthermore, the first communication pipe 21A1 and the second communication pipe 21A2 are each connected to the space in the valve body 21 .

In addition, a sealing block can also be provided in the space within the valve body 21, and an actuating structure that drives the sealing block to move to open or close the first communication pipe 21A1, thereby realizing the first cavity 1 and the second cavity. 3 connected or turned off.

Continuing to refer to Figures 3 and 4, a first mounting hole 211 is opened on the first surface A1, and the first mounting hole 211 penetrates from the first surface A1 to the second surface A2. The first mounting hole 211 is used to install a connecting piece connected to the first cavity 1 . A second mounting hole 212 is opened on the second surface A2, and the second mounting hole 212 is used to install a connector connected to the second cavity 3.

For example, as shown in FIG. 5 , FIG. 5 shows a structural diagram when the valve 2 provided in the embodiment of the present application is connected to the first cavity 1 and the second cavity 3 . The first connecting piece 291 can be used to pass through the first surface A1 from the first mounting hole 211 on the second surface A2 to fixedly connect the valve 2 to the first cavity 1 . In addition, the second connecting piece 292 is used to pass through the butt flange 9 on the second cavity 3 and pass through the second installation hole 212 to firmly connect the valve 2 and the second cavity 3 .

In some structures that can be implemented, as shown in FIGS. 3 and 4 , there are multiple first mounting holes 211 , and these multiple first mounting holes 211 can be arranged at intervals along the circumference of the second surface A2 .

In other structures that can be implemented, there may be a plurality of second mounting holes 212 , and the plurality of second mounting holes 212 may also be arranged at intervals along the circumferential direction of the second surface A2 .

Referring again to FIGS. 3 and 4 , the second communication tube 21A2 is disposed close to the center of the second surface A2 , and the second mounting hole 212 is closer to the second communication tube 21A2 than the first mounting hole 211 . That is, the ring surrounded by the plurality of first mounting holes 211 is the outer ring, and the ring surrounded by the plurality of second mounting holes 212 is the inner ring.

In some structures, the first mounting hole 211 may be a hole with a smooth inner wall surface, and the first connecting member 291 in FIG. 5 may be a threaded connecting member, then the first cavity 1 is used for inserting the first connecting member 291 The holes are threaded holes. For example, the first connecting member 291 may be a bolt with a thread at the end.

In some structures, the second mounting hole 212 may be a hole with threads on the inner wall, and the second connecting member 292 in FIG. 5 may also be a threaded connecting member. For example, the second connecting member 292 may be a bolt with threads on the entire outer wall surface.

In some semiconductor manufacturing equipment, what is shown in Figure 6 is a detection equipment including a valve 2, a first cavity 1 and a second cavity 3, and Figure 6 shows the use of the valve 2 given in the embodiment of the present application for The chip is waiting for detection of the shape of the object 5 in the device. In the detection equipment shown in Figure 6, the particles generated by the particle source 7 are split by the multi-beam charged particle system 8 and then projected onto the object 5 through the first cavity 1, the valve 2 and the second cavity 3.

In the detection setup shown in Figure 6, in order to make the obtained chip topography information clearer and more efficient, the transmission path of the charged particles generated by the particle source 7 needs to be shorter, and then, as shown in Figure 6 The size of the detection arrangement on the transmission path of the charged particles is smaller, that is, the size along the Q direction as shown in Figure 6 needs to be smaller.

When using the valve 2 shown in FIGS. 3 and 4 in the above embodiments of the present application, since it can be fixedly connected to the first cavity 1 through the first connector 291 located in the first installation hole 211, there is no need to The first cavity 1 is provided with a docking flange 9 as shown in Figure 5. In this way, the size of the detection device along the Q direction can be reduced, thereby reducing the transmission path of charged particles, so that within unit time, there is More charged particles are projected onto the chip to quickly obtain the morphological information of the chip, and the morphological information of the chip can also be obtained more clearly.

It can be understood that in this application, the first mounting hole that is connected to the first cavity and the second mounting hole that is connected to the second cavity are assembled on a flange formed by the valve body 21. Compared with combining the two The mounting holes are arranged on different flanges (for example, two flanges are arranged along the Q direction as shown in Figure 6), which can reduce the size of the valve in the Q direction to shorten the distance of the charged particles in the Q direction. transmission path to improve detection efficiency and detection quality.

In some structures that can be implemented, as shown in Figure 7, Figure 7 shows a cross-sectional view of the valve 2. In Figure 7, along the axial direction of the first mounting hole 211, that is, along the direction of the first mounting hole 211 In the extension direction, the first mounting hole 211 includes a first section 211a and a second section 211b that are connected. The first section 211a is closer to the second surface A2 relative to the second section 211b; and the aperture of the first section 211a is larger than that of the second section 211b. aperture. That is, it can be understood that the first mounting hole 211 shown in FIG. 7 is a countersunk hole.

The structure that can be implemented in the valve body 21 will be introduced below with reference to the accompanying drawings, and the details are as follows.

Figures 8 and 9 are simple structural diagrams of a valve 2 according to the embodiment of the present application. Figure 8 shows the structural diagram of the valve 2 when it is in an open state, and Figure 9 shows the valve 2 when it is closed. State structure diagram.

As shown in Figures 8 and 9, the valve 2 includes a valve body 21. The first surface A1 of the valve body 21 has a first through hole 213. The first through hole 213 can be connected with the first cavity shown in Figure 1. 1 is connected, for example, the first communication pipe 21A1 shown in FIG. 2 is installed on the first through hole 213. In addition, the second surface A2 of the valve body 21 has a second through hole 214. The second through hole 214 can be connected with the second cavity 3 shown in Figure 1. For example, a second through hole 214 can be installed on the second surface A2 of the valve body 21. The second communication pipe 21A2 shown in FIG. 2 .

The valve 2 also includes some actuating structures provided in the valve body 21 for opening or closing the first through hole 213. The actuating structures are used to close or open the valve, as shown in Figure 8. The actuating structures include a driving structure 22 and an extrusion structure. 23 and a sealing block 24 provided on the extruded structure 23 .

The driving structure 22 is connected to the extrusion structure 23 , and the driving structure 22 is used to drive the extrusion structure 23 and the sealing block 24 to move, so that the sealing block 24 opens or closes the first through hole 213 .

For example, in Figure 8, the driving structure 22 drives the extrusion structure 23 and the sealing block 24 to move in the P1 direction, so that the extrusion structure 23 and the sealing block 24 can move to the position opposite to the first through hole 213 shown in Figure 9. position, so that the sealing block 24 blocks the first through hole 213, thereby closing the valve 2. On the contrary, the driving structure 22 drives the extrusion structure 23 and the sealing block 24 to move in the direction opposite to the P1 direction, so that the extrusion structure 23 and the sealing block 24 can move to the position at the edge of the first through hole 213 as shown in Figure 8 , so that the sealing block 24 opens the first through hole 213 to open the valve 2 .

Continuing to refer to FIGS. 8 and 9 , the extrusion structure 23 includes a first extrusion piece 231 and a second extrusion piece 232 . The first extrusion piece 231 and the second extrusion piece 232 define a mounting groove 27 , and a sealing block 24 Set in the installation groove 27. Driven by the drive structure 22, The first extrusion part 231, the second extrusion part 232 and the sealing block 24 can be driven to move together.

Referring to Figures 10a and 10b, Figure 10a shows the positional relationship between the first extrusion piece 231, the second extrusion piece 232, and the sealing block 24 when the valve 2 is in the open state shown in Figure 8. Figure 10b shows What is shown is the positional relationship between the first extrusion part 231, the second extrusion part 232, and the sealing block 24 when the valve 2 is in the closed state shown in Figure 9.

As shown in Figure 10a and Figure 10b, when the valve 2 switches from the open state to the closed state, the distance between the first extrusion part 231 and the second extrusion part 232 becomes smaller, and the sealing block 24 faces toward the outside of the installation groove 27. move in the direction, that is, move in the direction close to the first through hole 213 .

That is, from FIGS. 8 to 9 , the driving structure 22 drives the extrusion structure 23 and the sealing block 24 to move, so that in the process of closing the first through hole 213 , the first extrusion piece 231 can move closer to the second extrusion piece 232 direction to generate a pressing force on the sealing block 24 moving in the direction of the first through hole 213 , so that the sealing block 24 closes the first through hole 213 .

It can also be understood that, as shown in Figure 10a and Figure 10b, during the closing process of the valve, through the relative movement between the first extrusion part 231 and the second extrusion part 232, the first extrusion part 231 and the second extrusion part 232 are aligned. The sealing block 24 between the two extrusion parts 232 generates a thrust force F, and the thrust force F is used to push the sealing block 24 towards the first through hole 213 .

In an achievable structure, as shown in FIGS. 8 and 9 , the blocking member 26 may be provided in the valve body 21 , may be provided on the path along which the extrusion structure 23 moves, and may be provided in the first through hole 213 At the outer edge of The extrusion piece 232 continues to move, so that the first extrusion piece 231 can move in a direction closer to the second extrusion piece 232 , thereby generating a thrust force on the sealing block 24 , causing the sealing block 24 to move toward the first through hole 213 .

Among the implementable structures given in this application, there are various structures of the installation groove 27 for accommodating the sealing block 24 . For example, as shown in Figures 11a and 11b, the cross-sectional area of the installation groove 27 gradually increases from the bottom surface to the groove opening (along the L direction shown in Figure 11a). The cross section of the mounting slot here refers to the area of the plane perpendicular to the L direction. For example, if the L direction is the Z direction in the three-dimensional coordinates, then the cross section refers to the area of the XY plane perpendicular to the Z direction.

The difference between the installation groove 27 shown in Figure 11a and Figure 11b is that in Figure 11a, the side wall surface M1 of the installation groove 27 is an arc surface, while in Figure 11b, the side wall surface M1 of the installation groove 27 includes a plurality of sequentially connected end-to-end connections. The plane M2 is an inclined plane, that is, along the direction from the bottom surface of the installation groove 27 to the groove opening, the plane M2 is inclined from the center of the installation groove 27 toward the edge of the installation groove 27 .

FIG. 12 is a schematic diagram of how the first extrusion member 231 moves toward the second extrusion member 232 to generate a thrust force on the sealing block 24 according to the embodiment of the present application. Specifically, the inclination angle of the side wall surface M of the mounting groove 27 for accommodating the sealing block 24 is α, which can also be understood as the angle between the side wall surface M and the moving direction P1 of the first extrusion piece 231 is α. When the first extrusion part 231 moves closer to the second extrusion part 232, a thrust force F1 is generated on the sealing block 24 along the P1 direction, and further, a thrust force F2 is given to the sealing block 24 along the P2 direction, and F2=F1tanα . Since the included angle α is, for example, greater than 45°, and F2 is greater than F1, that is, the thrust force F2 of the sealing block 24 in the P2 direction plays an amplifying effect, which enables the sealing block 24 to move toward the through hole. On the other hand, the moving speed of the sealing block 24 can also be increased, so that the sealing block 24 can quickly close or open the through hole. In addition, amplifying the thrust force of the sealing block 24 can also reduce the thrust requirement of the driving structure.

In some examples, the angle α between the side wall surface M shown in FIG. 12 and the moving direction P1 of the first extrusion piece 231 may be 10° to 80°, for example, it may be 45°, 60°, or 70°. wait.

Figure 13 is a physical structural diagram of the valve 2 with the valve body removed according to the embodiment of the present application. In FIG. 13 , the first extrusion part 231 and the second extrusion part 232 in the extrusion structure 23 are shown, and the first extrusion part 231 and the second extrusion part 232 are shown. Sealing block 24. FIG. 14 is a structural diagram based on the structure shown in FIG. 13 with the sealing block 24 removed.

13 and 14 together, the first extrusion part 231 includes a plurality of enclosures 2311, which surround an accommodation cavity 234 with an opening 233. The second extrusion part 232 is located in the accommodation cavity 234. Inside and located at the opening 233, the second extrusion piece 232 is slidingly connected to the enclosure 2311.

In this case, when the driving structure 22 drives the extrusion structure 23 and the sealing block 24 to move to close the first through hole 213, the opening 233 can allow the blocking member 26 to pass through, so that the second extruding member 232 abuts against the blocking member 213. on the member 26, thereby causing the second extrusion member 232 to slide relative to the first extrusion member 231, reducing the distance between the first extrusion member 231 and the second extrusion member 232 to generate a thrust force F on the sealing block 24. .

In the structure shown in Figure 14, when the first extruded part 231 includes a plurality of enclosures, as shown in Figure 15, the first extruded part 231 It has a first wall surface 2312 for surrounding the installation groove 27, the second extrusion piece 232 has a second wall surface 2321 for surrounding the installation groove 27, the first wall surface 2312 and the second wall surface 2321 are opposite, and the first wall surface 2312 and the second wall surface 2321 are both inclined planes. Moreover, along the direction from the bottom surface of the mounting groove 27 to the opening of the mounting groove 27 (the L direction in FIG. 15 ), the first wall surface 2312 and the second wall surface 2321 are inclined from the center of the mounting groove 27 toward the edge of the mounting groove 27 ( As shown in the T direction in Figure 15).

In order to enable the sealing block 24 to move along the mounting groove 27 having the first wall 2312 and the second wall 2321 shown in FIG. 15 , as shown in FIG. 16 , the sealing block 24 is formed with a first abutment parallel to the first wall 2312 The first contact surface 241 is slidably provided on the first wall surface 2312, and the second contact surface 242 is slidably provided on the second wall surface 2321.

In this case, when the first extrusion part 231 is close to the second extrusion part 232 relative to the second extrusion part 232, the second wall surface 2321 can push against the second abutment surface 241 through the pushing force of the first wall surface 2312. The thrust of the contact surface 242 causes the first contact surface 241 of the sealing block 24 to slide along the first wall surface 2312, and the second contact surface 242 slides along the second wall surface 2321, thereby causing the sealing block 24 to approach the first passage. hole 213 to block the first through hole 213 to close the valve.

In order to make the sealing block 24 seal the first through hole 213, as shown in Figure 16, an inlaid groove 243 is opened on the side of the sealing block 24 facing the first through hole 213, and a sealing ring 25 is provided in the inlaid groove 243. The sealing ring 25 is made to fit on the outer edge of the first through hole 213, thereby improving the sealing performance of the valve.

In some structures that can be implemented, as shown in FIG. 17 , along the direction from the bottom surface of the inlaid groove 243 to the opening of the inlaid groove 243 , the cross-sectional area of the inlaid groove 243 gradually decreases. For example, the mosaic groove 243 has a frustum structure with a bottom radius larger than the groove radius.

When the inlaid groove 243 shown in Figure 17 is used to accommodate the sealing ring 25, the sealing block 24 moves toward the first through hole 213 through a slot with a smaller diameter, or the driving structure drives the sealing block 24 and the extrusion structure 23 to move. During the process, the sealing ring 25 will not be removed from the inlaid groove 243, so that the sealing ring 25 and the through hole 213 are more accurately aligned.

Among the structures that can be realized by the sealing ring 25 given in this application, a rubber sealing ring can be selected, or a metal sealing ring can be selected.

In some structures that can be implemented, the depth of the inlaid groove 243 may be 65% to 80% of the thickness of the sealing ring 25 . For example, it could be 70%.

Among the structures that can be implemented by the driving structure 22 given in this application, as shown in Figure 13, the driving structure 22 can include a driver 222 and a push rod 221 connected to the output shaft of the driver 222. One end of the push rod 221 is connected to the extrusion structure 23. For example, one end of the push rod 221 is fixedly connected to the first extrusion piece 231 shown in FIG. 7 , and the extension direction of the push rod 221 is perpendicular to the direction in which the sealing block 24 moves toward the first through hole 213 . That is, after the driver 222 is started, the push rod 221 is first driven to move along its extending direction, and then the sealing block 24 is moved toward the first through hole 213 to close the first through hole 213 .

In some possible structures, the driver 222 may be a piezoelectric driver, or other type of electric driver.

In a structure provided in the embodiment of the present application, for example, when the second extrusion member 232 abuts against the blocking member 26, the first extrusion member 231 is used to approach the second extrusion member 232 to push the sealing block 24 to When the first through hole 213 is closed, in order to allow the sealing block 24 to open the first through hole 213, the first extrusion member 231 returns to its original position, as shown in Figure 18. The valve also includes an elastic member 282. The member 231 is connected to the second extruding member 232 through an elastic member 282. For example, the elastic member 282 can be a spring, one end of the spring is connected to the first extrusion member 231, and the other end of the spring is connected to the second extrusion member 232. For another example, the elastic member 282 can also be made of elastic material. structural parts.

In order to make the first extrusion member 231 move directly along the direction under the action of the elastic member 282, as shown in Figure 19, which is a partial structural view of Figure 18, a guide rod 702 can be provided, and the extension direction of the guide rod 702 is in line with the first The moving directions of the extrusion parts 231 are consistent, and one end of the guide rod 702 is connected to the first extrusion part 231 and the other end is connected to the second extrusion part 232 , and the elastic member 282 is sleeved on the guide rod 702 . That is, the guide rod 702 constrains the expansion and contraction direction of the elastic member 282 so that the first extruding member 231 can move along a straight line.

Figures 20a and 20b are simple structural diagrams of the process from closing to opening of the valve according to the embodiment of the present application. Figure 20a is a structural diagram when the sealing block 24 closes the first through hole 213. In this case, the sealing ring 25 provided on the sealing block 24 is attached to the outer edge of the first through hole 213. Figure 20b is a structural diagram when the valve 24 opens the first through hole 213. During this process, due to the action of the elastic member 282, the distance between the first extrusion member 231 and the second extrusion member 232 gradually becomes larger. , thus, the sealing block 24 provided with the sealing ring 25 will move along the installation groove in the direction away from the first through hole 213, so that the sealing ring 25 is attached to the outer edge of the first through hole 213 as shown in Figure 20a, Move until there is a gap between the sealing ring 25 and the inner wall S of the valve body 21 as shown in Figure 20b, instead of moving closely against the inner wall S of the valve body 21. In this case, the sealing ring 25 can be protected and the sealing ring 25 can be improved. Use performance.

It can be seen from Figure 20a and Figure 20b that when the valve 2 switches from the closed state to the open state, as the first extrusion part 231 moves in the direction away from the second extrusion part 232, the sealing block 24 moves in the direction away from the second extrusion part 232. The direction of a through hole 213 moves. In other structures, in order to increase the moving speed of the sealing block 24, as shown in Figure 21, the valve also includes an elastic member 281 (the elastic member 281 here may be called the first elastic member, and the above-mentioned elastic member 282 may be called the first elastic member). Second elastic member), the sealing block 24 is connected to the extrusion structure through the elastic member 281. For example, the elastic member 281 can be a spring, one end of the spring is connected to one end of the sealing block 24, and the other end of the spring is connected to the extrusion structure; for another example, the elastic member 281 can also be a structural member made of elastic material.

Figures 22a and 22b are simple structural diagrams of the process from closing to opening of the valve according to the embodiment of the present application. By arranging the elastic member 281 and the elastic member 282, the sealing block 24 close to the inner wall S of the valve body 21 can be quickly separated from the inner wall S, so as to prevent the sealing block from being damaged when the extrusion structure 23 drives the sealing block 24 from closing to opening. The ring 25 rubs against the inner wall S, reducing the sealing performance of the sealing ring 25 .

In the structure of the valve 2, the sealing block 24 can be relatively accurately aligned with the first through hole 213 to seal the first through hole 213, which is the key to measuring the performance of the valve 2.

In order to enable the sealing block 24 to accurately align with the first through hole 231 after moving, some guide structures are also added in the embodiment of the present application. For example, as shown in Figure 23, in order to make the extrusion structure 23 including the first extrusion piece 231 and the second extrusion piece 232 driven by the driving structure 22, move linearly along the P direction without basically deviating. For movement in the P direction, in the embodiment of the present application, a guide wheel 30 can be provided on the extrusion structure 23. Then, when the driving structure 22 drives the extrusion structure 23 to move, the guide wheel 30 abuts against the inner wall of the valve body 21. , that is, by rolling the guide wheel 30 along the inner wall surface of the valve body 21 , the extrusion structure 23 can move linearly along the P direction.

In some structures that can be implemented, a track consistent with the P direction can be provided on the inner wall surface of the valve body 21 , and the guide wheel 30 is rollingly disposed in the track to further improve the sealing accuracy of the sealing block 24 .

In the structure shown in Figure 23, four guide wheels 30 are shown, and the four guide wheels 30 are divided into two groups. One group of guide wheels 30 is rollingly connected with the first inner wall surface of the valve body 21, and the other group The guide wheel 30 is rollingly connected to the second inner wall surface of the valve body 21 , where the first inner wall surface and the second inner wall surface are arranged oppositely.

Of course, in other structures, only one of the two sets of guide wheels 30 in Figure 23 may be provided.

In order to further make the extrusion structure 23 and the sealing block 24 move linearly along the P direction shown in Figure 23, in the structure given in the embodiment of the present application, another guide structure can also be provided. For example, in Figure 23, a guide structure can be provided. The push rod 221 is slidably disposed in the guide base 223 , and a guide sleeve 224 can be provided between the push rod 221 and the guide base 223 so that the push rod 221 moves linearly along the P direction relative to the guide base 223 .

In some examples, as shown in Figure 23, a guide rail can also be provided on the push rod 221, and a guide groove matching the guide rail can be provided in the guide seat 223, and the extension direction of the guide rail and the guide groove is such as the P direction, so as to further Improve the alignment accuracy of the sealing ring. Or, the wire rail is set in the guide seat, and the guide groove is set on the push rod.

When the valve 2 switches from the closed state to the open state, whether the driving structure 22 drives the first extrusion part 231, the second extrusion part 232 and the sealing block 24 to move together along the P direction shown in Figure 23, or When the second extrusion part 232 abuts against the blocking member 26 and the first extrusion part 231 approaches the second extrusion part 232 along the P direction, the sealing block 24 may move relative to the first extrusion part 231 and the second extrusion part 232 . The member 232 is offset in the P direction as shown in FIG. 23 . In this case, the sealing block 24 may not be aligned with the first through hole 213 , thereby reducing the sealing performance of the valve.

In order to overcome the deflection of the sealing block 24 in the P direction shown in FIG. 23 , another guide structure needs to be provided to guide the sealing block 24 to move linearly along the P direction. As shown in Figure 24, a guide structure that can be implemented is given. Specifically, the guide structure includes a transverse plate 50 arranged in the installation groove 27 formed by the first extrusion piece 231 and the second extrusion piece 232, and a sealing block. 24 is supported on the horizontal plate 50, and rollers 40 are installed at the ends of the horizontal plate 50. For example, in Figure 24, rollers 40 are installed at the opposite ends of the horizontal plate 50.

In addition, continuing to refer to Figure 24, the extrusion structure 23 is provided with a guide groove 60 for disposing the roller 40, and the extension direction of the guide groove 60 is arranged along the P direction shown in Figure 23, and the roller 40 is rollingly disposed in the guide groove. Within 60. For example, the guide groove 60 may be opened on the enclosure plate forming the first extrusion part 231 .

According to the structure shown in Figure 24, the roller 40 at the end of the horizontal plate 50 can roll along the guide groove 60, where the sealing block 24 can also move along the guide groove 60. In this case, whether it contains the sealing block 24. Does the overall structure of the extrusion structure 23 move under the drive of the driving structure, or does the second extrusion part 232 remain stationary, and the first extrusion part 231 is relative to the second extrusion part 232 The sealing block 24 will not move in a direction deviating from the P direction, so that the sealing block 24 can be more accurately aligned with the first through hole 213 .

Also, as shown in Figures 23 and 24, in the embodiment given in this application, the rolling fit between the guide wheel 30 and the inner wall of the valve body 21 is used, and the rolling fit between the roller 40 and the extrusion structure is used. Implementation orientation. The use of rolling fit can reduce the probability of metal chips falling due to friction. That is to say, for example, when the guide wheel 30 and the valve body 21 are both made of metal materials, or the roller 40 and the extrusion structure are both made of metal materials. When appropriate, through rolling friction, the probability of metal shavings can be reduced. Especially in the field of semiconductor manufacturing as shown in Figure 1, the falling metal shavings are likely to affect the quality of the chip and even make the chip a defective product.

Among some structures that can be realized, as shown in Figure 25, Figure 25 is a structural diagram after further explosion based on Figure 24. In order to make the structure of the entire valve compact, as shown in Figure 25, a perforation 501 can be opened on the horizontal plate 50, and the guide rod 702 used to guide the elastic member 282 passes through the perforation 501. In this case, the first extrusion piece 231 and the The second extrusion 232 encloses the space within the mounting groove 27 .

In addition, with reference to FIG. 25 , one end of the elastic member 281 passing through the guide rod 702 can be connected to the sealing block, and the other end can be abutted against the horizontal plate 50 . Then, when the sealing block moves toward the first through hole, the elastic member 281 may be stretched, and when the sealing block moves toward the direction away from the first through hole, the elastic member 281 may be compressed.

Figure 26 is a structural diagram of the partial structure of the valve 2 after explosion according to the embodiment of the present application. As shown in Figure 26, a first installation cavity 21B1 and a second installation cavity 21B2 are formed in the valve body 21. The first installation cavity is A first cover plate 21C1 is provided on 21B1, and a second cover plate 21C is provided on the second installation cavity 21B2. Among them, the first communication tube 21A1 and the second communication tube 21A2 shown in Figure 2 are both connected with the first installation cavity 21B1, and the extrusion structure 23, the sealing block 24, and the blocking member 26 can be arranged in the first installation cavity 21B1. , the driving structure 22 is disposed in the second installation cavity 21B2.

In addition, the push rod of the driving structure 22 can extend from the second installation cavity 21B2 to the first installation cavity 21B1 and be connected with the extrusion structure 23 .

For example, in an etching machine that etches a chip, or in a setting that detects the topography of a chip, a vacuum setting is required. As shown in Figure 6, the first chamber 1, the second chamber 3, and the valve 2 are all Need to be in a vacuum environment. The first cavity 1, the second cavity 3 and the valve 2 here all need to be in a vacuum environment. It can be understood that the cavities in the first cavity 1 and the second cavity 3 are vacuum. state, and the channel of the valve 2 connecting the first cavity 1 and the second cavity 3 is also in a vacuum state. For example, in the setting of detecting the topography of the chip, the vacuum degree in the first cavity 1 of the particle source can be set to be higher than the vacuum degree in the second cavity 3 .

Therefore, the first installation cavity 21B1 connected with the first cavity 1 and the second cavity 3 in Figure 26 needs to be in a vacuum environment. In order to prevent the second installation cavity 21B2 from affecting the vacuum degree of the first installation cavity 21B1, it is necessary to set A sealed structure. In the implementation structure given in this application, as shown in Figure 26, a sealing structure can be used to seal the second cover plate 21C at the opening of the second installation cavity 21B2 to prevent air from entering the first installation cavity 21B1 from the second installation cavity 21B2. , affecting the vacuum degree of the first installation cavity 21B1.

Compared with some sealing structures that surround a bellows outside the push rod to prevent the second installation cavity 21B2 from affecting the vacuum degree of the first installation cavity 21B1, in the embodiment of the present application, the thrust provided by the driving structure 22 can be reduced because of the related In the technology, when the driving structure drives the push rod to move, it also needs to overcome the resistance of the bellows. Therefore, this application can also reduce the power consumption of the driving structure.

In an implementable embodiment, the sealing structure used to sealingly connect the second cover plate 21C to the opening of the second installation cavity 21B2 may be a metal sealing ring or a rubber sealing ring, for example, an O-ring sealing ring may be used.

In the description of this specification, specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples.

The above are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any person familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application. should be covered by the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims (20)

1. A valve for connecting a first cavity and a second cavity, characterized in that the valve includes:

   The valve body has a first surface and a second surface opposite to each other. The first surface has a plurality of first mounting holes, and the first mounting holes penetrate from the first surface to the second surface. The first mounting hole is used to install a first connecting piece connecting to the first cavity. The second surface has a plurality of second mounting holes. The second mounting holes are used to install and connect the second cavity. A second connecting piece, a first through hole is also provided on the first surface, the first through hole is used to communicate with the first cavity, and a second through hole is provided on the second surface , the second through hole is used to communicate with the second cavity;

   There is an actuating structure provided in the valve body, and a sealing block connected to the actuating structure. The actuating structure can drive the sealing block to move, so that the sealing block opens or closes the first through hole.
2. The valve according to claim 1, wherein the plurality of first mounting holes are arranged at intervals along the circumference of the second surface, and the plurality of second mounting holes are arranged along the circumferential direction of the second surface. Circumferentially spaced layout;

   The plurality of first mounting holes are located in the outer ring, and the plurality of second mounting holes are located in the inner ring.
3. The valve according to claim 1 or 2, characterized in that, along the axial direction of the first mounting hole, the first mounting hole includes a first section and a second section that are connected, and the first section is close to the second surface;

   And the aperture of the first section is larger than the aperture of the second section.
4. The valve according to any one of claims 1-3, wherein the execution structure includes a driving structure and an extrusion structure, and the sealing block is provided on the extrusion structure;

   The driving structure is connected to the extrusion structure, and the driving structure is used to drive the extrusion structure and the sealing block to move, so that the sealing block opens or closes the first through hole;

   The extrusion structure includes a first extrusion part and a second extrusion part, the first extrusion part and the second extrusion part enclose an installation groove, and the sealing block is arranged in the installation groove. ;

   The driving structure drives the extrusion structure and the sealing block to move, so that in the process of closing the first through hole, the first extrusion piece can move in a direction closer to the second extrusion piece, To generate a pressing force on the sealing block to move in the direction of the first through hole, so that the sealing block closes the first through hole.
5. The valve according to claim 4, characterized in that the cross-sectional area of the installation groove gradually increases from the bottom surface of the installation groove to the groove opening direction of the installation groove.
6. The valve according to claim 4 or 5, characterized in that the first extrusion part has a first wall for enclosing the installation groove, and the second extrusion part has a first wall for enclosing the installation groove. The second wall surface of the installation groove, the first wall surface and the second wall surface are opposite, and the first wall surface and the second wall surface are both inclined planes;

   Along the direction from the bottom surface of the installation groove to the notch of the installation groove, the first wall surface and the second wall surface are inclined from the center of the installation groove toward the edge of the installation groove.
7. The valve according to claim 6, wherein the sealing block is formed with a first contact surface parallel to the first wall surface and a second contact surface parallel to the second wall surface;

   The first contact surface is slidably disposed on the first wall surface, and the second abutment surface is slidably disposed on the second wall surface.
8. The valve according to any one of claims 4-7, characterized in that the valve further includes:

   a blocking member fixed in the valve body;

   When the driving structure drives the extrusion structure and the sealing block to move to close the first through hole, the second extrusion piece can abut against the blocking member so that the The first extrusion piece can move toward the second extrusion piece.
9. The valve according to claim 8, wherein the first extrusion part includes a plurality of enclosures, and the plurality of enclosures enclose an accommodation cavity with an opening;

   The second extrusion piece is located in the accommodation cavity and at the opening, and the second extrusion piece is slidingly connected to the enclosure plate;

   When the driving structure drives the extrusion structure and the sealing block to move to close the first through hole, the opening allows the blocking member to pass through, so that the second extrusion member resists Connected to the blocking member, the first extruding piece slides relative to the second extruding piece.
10. The valve according to any one of claims 4-9, characterized in that the valve further includes:

    A first elastic member, the sealing block is connected to the extrusion structure through the first elastic member;

    When the driving structure drives the extrusion structure and the sealing block to move to open the first through hole, the first elastic member is used to move the sealing block away from the first through hole. Directional elasticity.
11. The valve according to any one of claims 4-10, characterized in that the valve further includes:

    a second elastic member, the first extrusion member is connected to the second extrusion member through the second elastic member;

    When the driving structure drives the extrusion structure and the sealing block to move to open the first through hole, the second elastic member is used to move the first extrusion member away from the first through hole. 2. Elasticity in the direction of the extruded part.
12. The valve according to any one of claims 4-11, characterized in that the valve further includes:

    A first guide structure. When the driving structure drives the extrusion structure and the sealing block to move, the first guide structure is used to guide the sealing block to move in a first direction. The first direction is A direction perpendicular to the movement of the sealing block toward the first through hole.
13. The valve according to claim 12, wherein the first guide structure includes:

    A horizontal plate is arranged in the installation groove, the sealing block is supported on the horizontal plate, and the end of the horizontal plate is connected with a roller;

    A guide groove extending along the first direction is provided on the wall of the installation groove, and the roller is rollingly disposed in the guide groove.
14. The valve according to any one of claims 4-13, characterized in that the valve further includes:

    A second guide structure. When the driving structure drives the extrusion structure and the sealing block to move, the second guide structure is used to guide the extrusion structure to move in the first direction. The first direction is a direction perpendicular to the movement of the sealing block toward the first through hole.
15. The valve according to claim 14, characterized in that the second guide structure includes:

    Guide wheels, arranged on the extrusion structure;

    The guide wheel is in contact with the inner wall surface of the valve body, and the guide wheel can roll along the first direction on the inner wall surface of the valve body.
16. The valve according to any one of claims 4-15, characterized in that,

    A first installation cavity and a second installation cavity that are separated from each other are formed in the valve body;

    The extrusion structure and the sealing block are arranged in the first installation cavity;

    The driving structure includes a driver and a push rod connected to the output shaft of the driver. The driver is arranged in the second installation cavity, and the push rod extends from the second installation cavity to the first In the installation cavity, and connected to the extrusion structure, and the extension direction of the push rod is perpendicular to the direction in which the sealing block moves toward the first through hole;

    Both the first through hole and the second through hole are connected with the first installation cavity.
17. The valve according to claim 16, characterized in that the valve body has a window on the wall used to form the second installation cavity, a cover plate is provided on the window, and the cover plate passes through A sealing structure is provided on the window.
18. An interconnection device, characterized by including:

    first cavity;

    second cavity;

    The valve according to any one of claims 1-17;

    Wherein, the valve is connected to the first cavity through a first connecting piece that is inserted into the first mounting hole, and the valve is connected to the first cavity through a second connecting piece that is inserted into the second mounting hole. The second cavity is connected;

    The first through hole of the valve is connected to the first cavity, and the second through hole of the valve is connected to the second cavity.
19. The interconnection device according to claim 18, wherein the second surface faces the first cavity and the first surface faces the second cavity;

    The interconnection device further includes a docking flange connected to the second cavity;

    The first connecting piece passes through the valve body from the first surface and is fixedly connected to the first cavity;

    The second connecting piece passes through the butt flange and is fixedly connected to the valve body.
20. The interconnection device according to claim 18 or 19, characterized in that the interconnection device includes a device for performing Testing equipment for testing;

    The detection equipment includes:

    A particle source, used to generate charged particles, the particle source is arranged in the first cavity;

    A multi-beam charged particle system is disposed in the first cavity and in the beam path of the charged particles. The multi-beam charged particle system is used to divide the charged particles into multiple beams; the first cavity Both the body and the second cavity are vacuum cavities; the charged particles can be projected to the substrate through the multi-beam charged particle system, the first cavity, the valve and the second cavity. superior.