WO2023243889A1

WO2023243889A1 - Water-cooled linear motor system

Info

Publication number: WO2023243889A1
Application number: PCT/KR2023/006859
Authority: WO
Inventors: 조성훈; 정용훈
Original assignee: 주식회사 져스텍
Priority date: 2022-06-15
Filing date: 2023-05-19
Publication date: 2023-12-21
Also published as: KR102510204B1; KR20230172689A

Abstract

The objective of the present invention is to provide a linear motor that has high speed, high precision, and stability, and has a structure that can improve cooling efficiency as well as simplify the manufacturing process, thereby improving overall output, stability, and productivity. In order to achieve the above objective, a linear motor according to one embodiment of the present invention is a linear motor system having a coil in at least one of a mover or a stator, wherein the mover or the stator comprises: a coil mold part formed by molding a composite resin material and having the coil thereinside; and a jacket part adhesively bonded to cover at least one side surface of the coil mold part, wherein the side surface of the coil mold part has a flow path groove to form a cooling passage that provides a flow path of a cooling fluid through the adhesive bonding between the coil mold part and the jacket part.

Description

Water-cooled linear motor system

The present invention relates to a linear motor system, and more specifically, in constructing a linear motor with high speed, high precision, and stability, it is formed with a structure that can simplify the manufacturing process as well as improve cooling efficiency, thereby increasing the overall output. It is about a linear motor system that can improve stability and productivity.

Linear motors are widely used in the electronics, automobile, and aerospace industries, and as their precision and accuracy improve, they are becoming more common in semiconductor equipment and precision processing equipment, and the demand for additional technological improvements is also increasing.

For example, in the semiconductor manufacturing process, semiconductor circuit chips produced through wafers go through the process of dividing the multiple semiconductor circuit chip structures formed through the front-end process into individual pieces through the dicing process in the back-end process. , it is produced into a finished semiconductor product through the remaining post-processes. At this time, the production rate of the final finished semiconductor circuit chip from one wafer can be expressed as the wafer defect rate.

This wafer defect rate affects the production cost of semiconductor manufacturing, so there is a need to reduce this wafer defect rate in the manufacturing process. In the dicing process, wafers may be discarded due to poor cutting quality, so they are used for dicing. The cutting-related driving part of the equipment requires accuracy, stability, and speed.

At this time, the driving unit is configured to use a linear motor configured to achieve linear movement using the polarity of the magnet in order to satisfy the accuracy, stability, and speed required as a device for linear movement, which is the linear movement of the linear motor itself. This is because, due to the nature of the movement, it is designed to be driven in a way that minimizes physical friction, so there is less risk of vibration occurring and there is an advantage in that linear movement speed can be achieved very quickly.

In this regard, as new technologies for semiconductor manufacturing emerge, the required thickness of wafers for manufacturing semiconductors becomes thinner, and the cutting method of the dicing process also changes the cutting gap into a microscopic area in blade dicing using a physical blade. There is a trend toward developing laser dicing and plasma dicing methods that can improve cutting precision.

With the development of dicing equipment, the standards for precision, straightness, stability, speed, etc. required for linear motors applied to the driving part of dicing equipment are also improving, and in relation to this, various linear motors have been developed. .

However, in the case of conventional linear motors, the core type has a problem in that the metallic core located in the center of the coil generates an attractive force between external permanent magnets, resulting in a cogging phenomenon that prevents the linear motor from operating smoothly. In order to solve this problem, the coreless type linear motor had the problem that the overall structural rigidity of the linear motor was weak compared to the core type motor.

In addition, the coreless type linear motor has a problem of lower output at the same power compared to the core type motor, so application of higher power is required compared to the same speed, and this causes heat generation in the coil part to increase, causing problems related to this. Some cooling performance has become important.

In other words, if the cooling performance of the coil part is improved, the coil can be cooled well and the amount of heat generated does not increase even when high power output is applied to the coil. As a result, the speed of the linear motor can be further increased, so manufacturers of coreless linear motors Methods to improve the cooling performance of coreless linear motors were researched and developed.

However, in conventional coreless linear motors, the flow path is designed to be expanded to improve cooling performance, which increases the volume of the linear motor, or the flow path structure itself is designed in a complicated manner, which increases the processing or forming time of the flow path area and complicates the structure. This resulted in low productivity and high overall production costs.

Therefore, in the coil cooling structure of a coreless type linear motor, cooling efficiency can be improved, the volume of the linear motor is not increased, the manufacturing time for forming the flow path can be simplified, and the overall manufacturing cost can also be reduced. There is a need for the development of a linear motor system that can

Accordingly, the present invention is intended to improve the above-described conventional problems, and provides a linear motor system that can improve the maximum speed of the linear motor by improving cooling efficiency in forming the cooling structure of the linear motor. There is a purpose.

Additionally, in forming the cooling structure of a linear motor, the purpose is to provide a linear motor system that can save time and cost by forming an internal coolant flow path in a simple manner.

In addition, in forming a cooling structure for a linear motor, the purpose is to provide a linear motor system that can be used in small devices by compactly configuring the size of the linear motor.

Additionally, in forming the cooling structure of the linear motor, the purpose is to provide a linear motor system configured to simply form a flow path through which the internal coolant can flow.

In addition, in forming the cooling structure of the linear motor, the manufacturing method of the linear motor can be simplified to reduce the time consumed in the entire manufacturing process and to provide a linear motor system that can also reduce the manufacturing cost. There is a purpose.

In order to achieve the above technical problem, a linear motor according to an embodiment of the present invention is a linear motor system having a coil in at least one of a mover or a stator, and the mover or stator has the coil inside. A coil mold portion provided and formed by molding a composite resin material; And, a jacket portion adhesively bonded to cover at least one side of the coil mold portion, wherein a flow path groove is provided on the side surface of the coil mold portion to cool the coil mold portion and the jacket portion by adhesive bonding. It has a structure that forms a cooling passage that provides a flow path for fluid.

Additionally, in the linear motor according to an embodiment of the present invention, the jacket portion may be formed of a non-metallic material.

Additionally, in the linear motor according to an embodiment of the present invention, the channel grooves formed at the top and bottom of the sides of the coil mold part may be configured to have a width of the channel grooves larger than the channel grooves formed in the middle.

Additionally, in the linear motor according to an embodiment of the present invention, the flow path groove provided on the side of the coil mold portion allows cooling fluid to flow through the coil mold portion along the winding shape of the coil provided inside the coil mold portion. It can be formed to reflect the winding shape of the coil so that the side can flow.

Additionally, in the linear motor according to an embodiment of the present invention, the jacket portion may be configured to further include a second cooling passage outside the cooling passage formed by adhesive bonding of the coil mold portion and the jacket portion.

Additionally, the linear motor according to an embodiment of the present invention may be configured by limiting the size, shape, and flow rate of the cooling passage so that the cooling fluid for cooling the linear motor flows laminarly inside the linear motor.

Additionally, in the linear motor according to an embodiment of the present invention, the jacket portion includes: a plate-shaped jacket member formed of a plate-shaped material and adhesively coupled to the side of the coil mold portion; And, a pocket-type jacket member formed in a 'U'-shaped or 'ㄷ'-shaped cross-sectional shape and adhesively coupled in a structure that directly or indirectly surrounds the outside of the coil mold part, including the side surface of the coil mold part. It can be configured.

In addition, in the linear motor according to an embodiment of the present invention, the flow grooves provided on the side of the coil mold portion are provided in plural numbers, and are formed to connect one side and the other side of the coil mold portion according to the direction of movement of the linear motor. It is formed with an inflow and outflow manifold block on one side and the other side of the coil mold part, one of the inflow and outflow manifold blocks is provided with a split supply port corresponding to the plurality of flow grooves, and the other one is provided with an inflow and outflow manifold block. It may be configured with a structure provided with a collection discharge port corresponding to a plurality of flow grooves.

As explained in the above configuration and operation, the linear motor system according to the present invention has the effect of providing a linear motor system that can improve the maximum speed of the linear motor by improving cooling efficiency in forming the cooling structure of the linear motor. have

In addition, when forming the cooling structure of a linear motor, the internal coolant flow path can be formed in a simple way, which has the effect of providing a linear motor system that can save time and cost.

In addition, in forming the cooling structure of the linear motor, the size of the linear motor is compactly configured, which has the effect of providing a linear motor system that can be used in small devices.

In addition, in forming the cooling structure of the linear motor, it has the effect of providing a linear motor system configured to easily form a flow path through which the internal coolant can flow.

In addition, in forming the cooling structure of the linear motor, the time consumed in the entire manufacturing process can be reduced by simply configuring the manufacturing method of the linear motor, and the effect of providing a linear motor system that can also reduce the manufacturing cost is. has

The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention.

1 is a perspective view showing the overall configuration of an exemplary mover in a linear motor system according to an embodiment of the present invention.

Figure 2 is a front view and a side view showing the composite material molding surface structure of the coil mold part of the overall structure of the mover in the linear motor system according to an embodiment of the present invention.

Figure 3 is a front view and a side view of the overall configuration of the mover in the linear motor system according to an embodiment of the present invention.

Figure 4 is a front view shown in perspective so that the correlation between the flow path and the coil among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention can be understood.

Figure 5 is a front view illustrating a modified embodiment of the channel groove structure of the coil mold portion among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention.

Figure 6 is a front view showing another modified embodiment of the flow groove structure of the coil mold part among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention.

Figure 7 is a side view illustrating another modified embodiment having a modified flow path structure using an inlet/outlet manifold block among the overall configuration of the mover in a linear motor system according to an embodiment of the present invention.

FIG. 8 is a side view illustrating another modified embodiment including a flow path structure added in the thickness direction of the jacket portion among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention.

Hereinafter, the present invention will be described with reference to the attached drawings. However, the present invention may be implemented in various different forms and, therefore, is not limited to the embodiments described herein.

Throughout the specification, when a part is said to be "connected (connected, contacted, combined)" with another part, this means not only "directly connected" but also "indirectly connected" with another member in between. "Includes cases where it is. In addition, when a part is said to “include” a certain component, this does not mean that other components are excluded, but that other components can be added, unless specifically stated to the contrary.

The terms used herein are only used to describe specific embodiments and are not intended to limit the invention. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as “comprise” or “have” are intended to indicate the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, but are not intended to indicate the presence of one or more other features. It should be understood that this does not exclude in advance the possibility of the existence or addition of elements, numbers, steps, operations, components, parts, or combinations thereof.

In addition, in this specification, when describing the structure of the mover of the linear motor system or the structure of the coil mold part, which is a detailed component thereof, 'top', 'bottom', 'horizontal side', 'front end', and 'rear end' are used. Terms such as these can be interpreted with reference to the posture shown in Figure 1, unless separate interpretation standards are provided in the corresponding sentence.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art can easily implement them.

First, looking at each drawing, Figure 1 is a perspective view showing the overall configuration of the mover in a linear motor system according to an embodiment of the present invention, and is shown as a perspective view to aid understanding in explaining the structure of a water-cooled linear motor. am. Figure 2 is a front view and a side view showing the surface structure of the composite resin molding among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention. It is shown in a side view, and is a drawing to explain the structure formed so that the adhesive can be uniformly applied to ensure the adhesive strength of the plate-shaped jacket member forming the flow path.

Figure 3 is a front view and a side view of the overall configuration of the mover in the linear motor system according to an embodiment of the present invention. The front view shows the inside to explain the arrangement structure of the internal coil and the flow path structure for cooling it. The coil arrangement is shown, and the side view shows the internal cut surface, but is partially enlarged for understanding. Figure 4 is a front view showing a perspective view of the coil so that the correlation between the flow path groove and the coil among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention can be understood, and the flow of coolant and the direct flow of the coil are shown in Figure 4. This is a drawing to explain the cooling point.

Figure 5 is a front view illustrating a modified example of the flow path structure among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention, in which the width of the flow groove is changed to improve the cooling efficiency of the coil. This is a drawing to explain the modified flow path structure. Figure 6 is a front view illustrating another modified embodiment in which the path structure of the flow groove among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention is modified, in order to improve the cooling efficiency of the coil. This is a drawing to explain the channel structure in which the channel grooves have been modified to follow the winding shape of the coil.

Figure 7 is an explanatory diagram showing a side view of another modified embodiment having a modified flow path structure using an inflow and outflow manifold block among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention. This is a drawing to explain the flow path structure that can ensure even cooling performance for the entire movable body by configuring the flow paths to flow in alternating directions. Figure 8 is an explanatory diagram showing a side view of another modified embodiment with a flow path structure added in the thickness direction of the jacket part among the overall configuration of the mover in the linear motor system according to an embodiment of the present invention, which is used to cool the coil In order to improve efficiency, a structure having a plurality of channels in the thickness direction is shown, and the representation of the adhesive layer that performs adhesive bonding between components is omitted to simplify the drawing.

As shown in FIGS. 1 to 8, the linear motor system according to an embodiment of the present invention improves cooling efficiency by optimizing the flow path structure for water-cooled cooling and simplifies the manufacturing process, thereby increasing the output of the motor. It is a linear motor system that improves productivity and economic efficiency.

In general, a linear motor consists of a stator with permanent magnets arranged and a mover with electromagnets that travel using the stator as a running rail, and these permanent magnets are arranged in pairs so that the different polarities point toward the center. In addition, the polarities of permanent magnets arranged along the longitudinal direction may also be configured to cross each other. In addition, a linear motor may be configured in such a way that a permanent magnet is provided in a mover and an electromagnet is provided in a stator, or it may be configured by providing electromagnets in both the stator and the mover.

The present invention relates to a cooling structure of a mover or stator equipped with an electromagnet coil in a linear motor system. Hereinafter, the case in which the electromagnet coil is provided in the mover will be illustratively described. However, the electromagnet coil is provided in the mover. The case where it is provided on the stator can also be explained in the same way.

The linear motor system according to an embodiment of the present invention may be configured to include, for example, a mover disposed between a pair of stators and having a coil therein. The mover 100 of the linear motor system is equipped with a coil for an electromagnet inside, and depending on the energization state of the coil 11, it takes the form of magnetic levitation in a non-contact state by repulsion between the permanent magnets constituting the stator. In this state, it can be configured to move by the attraction of adjacent coils.

At this time, in order to move the actuator 100 of the linear motor system, a continuous current must be supplied to the coil 11, and the faster the polarity of this supplied current is changed, the faster the magnetic polarity conversion speed of the coil increases. The speed of the actuator 100 of the linear motor system may also be increased.

However, in order to increase the speed of the mover 100 of the linear motor system, the faster the energization speed of the coil is changed, the temperature due to the current resistance of the coil also increases, and the degree of heat generation becomes more severe, which is caused by energization of the coil. A problem may arise where the magnetic force becomes weaker.

Therefore, in order to prevent the temperature of the coil 11 from rising, a cooling passage F through which cooling fluid can flow is formed around the coil 11 inside the mover 100 to cool the coil 11. A cooling structure is needed to cool the area and its surroundings.

The mover 100 of the linear motor system according to an embodiment of the present invention includes a coil mold part 10 that surrounds the coil 11 by molding the area around the coil 11 with a composite resin material. A flow groove 12 for forming a cooling passage F is formed on the surface of the coil mold part 10, and a jacket part joined in a structure that covers the outer surface of the coil mold part 10 ( By providing 20), the inner surface of the jacket portion 20 and the portion of the flow groove 12 can form a cooling passage F together.

In this way, the coil mold portion 10 is formed integrally by molding the peripheral portion of the coil 11, and the cooling passage F is formed by attaching the jacket portion 20 to the outer surface of the coil mold portion 10. The method of construction is to form a flow path around the coil, which reduces the probability of a defective flow path being formed during manufacturing, makes maintenance easy, and allows the coils to be aligned on one side during molding work. This has the effect of reducing the defect rate of wiring for each coil.

In the linear motor system according to an embodiment of the present invention, the movable part 100 has a coil 11 embedded therein to form a flow path structure for cooling the coil 11, as shown in FIG. 2. It is configured to include a coil mold portion 10, and a flow path groove 12 is provided on the outer surface of at least one of both horizontal sides of the coil mold portion 10.

If the manufacturing process of the coil mold part 10 provided with the flow groove 12 is explained step by step as an example, with the coil 11 aligned so that the cable for receiving electrical energy is located at the top, The coil mold portion 10 can be formed by performing a molding operation in which the entire exterior of the coil 11 is sealed using a composite resin or the like.

At this time, a furrow-shaped channel groove 12 can be formed in the frame of the coil mold part 10 to form a cooling flow path F on the outer surface of the coil mold part 10 at the same time as the molding operation. An uneven structure is provided.

In addition, the coil mold unit 10 may be configured to perform an individual molding operation on each coil, but preferably has one or more coils 11 therein, forming a plurality of coils 11. By being formed in an integrated form, it can be prepared and used as a coil assembly of a certain size to constitute the mover 100 of the linear motor system.

The composite resin material for coil molding in the coil mold unit 10 may be, for example, a thermosetting plastic material such as epoxy resin, but is not limited thereto.

In the linear motor system according to an embodiment of the present invention, the movable part 100 is located at the longitudinal front and rear ends of the coil mold part 10 formed to have an internal coil assembly, as shown in FIG. 2. The side inflow and outflow manifold block 30 and the rear end inflow and outflow manifold block 40 may be additionally combined, and the front end inflow and outflow manifold block 30 and the rear end inflow and outflow manifold block 40 are inside the inflow and outflow manifold block 40. A passage through which coolant can flow is provided, and the passage is connected in fluid communication with the base block 50 at the upper end of the inflow and outflow manifold block, and a coil mold portion ( It may be provided with a split supply port 31 and/or a collection discharge port 41 so as to be connected in fluid communication with the flow path groove 12 formed on the corresponding side of 10).

Here, a block groove 35 is formed on the side of the inflow and outflow manifold block in a structure connected to the flow groove 12 of the coil mold part 10, and a split supply port 31 and/or are formed within the block groove 35. Alternatively, it is preferable that a collection discharge port 41 is provided.

The inflow and outflow manifold blocks 30 and the inflow and outflow manifold blocks 40 prepared in this way can be combined to the front and rear sides of the coil mold part 10, respectively, to form an assembly, and the combination is performed using a fastening means. It can be applied by selecting from fastening bonding using adhesive bonding, fusion bonding, or bonding bonding using adhesives.

In the linear motor system according to an embodiment of the present invention, the movable part 100 is a jacket part bonded in a structure that covers at least one side of the coil mold part 10, as shown in FIG. 20); It consists of: The jacket portion 20 is selected from at least one member formed in a flat shape, a member formed in a pocket structure, etc., and covers at least one side of the coil mold portion 10 by bonding such as fusion or adhesive bonding. It can be composed of a structure.

The material of the jacket portion 20 may be selected from a non-metallic material or a non-magnetic metal material to prevent the influence of the magnetic field for the electromagnet formed by the coil, for example, fiber-reinforced plastic material, carbon fiber-reinforced material. It is preferable that it is selected from plastic materials, etc. In addition, in the case of a linear motor system for a vacuum environment, etc., it is desirable to select the material of the jacket portion 20 from among non-magnetic metal materials.

In the linear motor system according to an embodiment of the present invention, the jacket portion 20, which is coupled with the coil mold portion 10 to form the cooling passage F, has a flat plate shape, as shown in FIG. 3. It may be configured to include a plate-shaped jacket member 21 formed of. That is, the plate-shaped jacket member 21 is provided in a form that is adhered to the side wall of the coil mold part 10 through an adhesive layer (p), so that the plate-shaped jacket member 21 covers the flow groove 12 of the coil mold part 10. The cooling passage (F) is formed by the inner surface of the jacket member (21) and the passage groove (12) of the coil mold portion (10).

That is, the outer wall of the assembly may be configured in the form of furrows and ridges, and the plate-shaped jacket member 21 is configured to be attached to the adhesive surface portion 13, which is configured in the form of ridges on the outer wall of the assembly, and may be formed in the form of furrows. The configured flow path groove 12 may be configured to be formed as the cooling flow path (F).

In this way, in forming the cooling passage (F), a separate processing procedure is not required, and the cooling passage (F) can be formed through a single molding operation and an adhesion process of the plate-shaped jacket member (21). , the cost and time for constructing the cooling passage (F) can be reduced, and it can have the effect of preventing defective structures from occurring due to collapse during the formation process of the cooling passage (F).

In addition, the adhesive surface portion 13 of the coil mold portion 10 is spaced apart to ensure uniformity of the adhesive layer (p) for attaching the plate-shaped jacket member (21) for forming the cooling passage (F). A protrusion 14 structure may be additionally configured.

In more detail, the adhesive layer (p) applied in the process of attaching the plate-shaped jacket member 21 to the outer wall of the coil mold portion 10 is applied to the adhesive surface portion 13, and the adhesive layer p is applied on the adhesive surface portion 13. The plate-shaped jacket member 21 is bonded by the adhesive layer (p). At this time, if the distribution of the internal unsolidified adhesive layer (p) is not uniform during the pressurizing step for adhesion, the plate-shaped jacket member 21 is bonded by the adhesive layer (p). The adhesive strength of the member 21 may not be maintained consistently, and some adhesive may flow into the channel groove, making it difficult to properly form the internal channel.

Therefore, the spacing protrusions 14 have a height to ensure the minimum amount of adhesive layer (p) required for attaching the plate-shaped jacket member 21, and can be configured to be provided at dispersed positions on the adhesive surface portion 13, , More preferably, in the adhesive structure of the plate-shaped jacket member 21, it is bonded at positions such as the top, bottom, and center of the coil mold portion 10, which correspond to the edge portion and center, etc., which are highly related to adhesive strength. It is preferable that it is formed on the face portion 13 and distributed.

In addition, spaced protrusions may be provided around the block grooves 35 provided in the inlet/outlet manifold block 30 and the inlet/outlet manifold block 40 to have the same effect as the spaced protrusions 14, or, A block protrusion 36 may be formed as an alternative means having a similar effect to the spacing protrusion 14. The block protrusion 36 may be configured in the form of a protruding band around the block groove 35, which secures a predetermined thickness of the adhesive layer (p) during pressure bonding with the adhesive object after applying the adhesive. In addition to the effect, it can also have the effect of solving the problem of the adhesive flowing into the block groove 35, preventing the formation of a flow path or reducing the cross-section of the flow path.

In the linear motor system according to an embodiment of the present invention, the jacket part 20, which is combined with the coil mold part 10 to form the cooling passage (F), has 'U' as shown in FIG. 3. It may be configured to include a pocket-type jacket member 23 formed as a pocket structure having a 'ㄷ' or 'ㄷ' cross-sectional shape, and is provided with a structure that directly or indirectly covers the adhesive surface portions on both sides of the coil mold part 10. It can be.

At this time, the structure that directly covers the adhesive surface portions on both sides of the coil mold portion 10 is used to connect the pocket-type jacket member 23 and the It may be somewhat inconvenient to form a good adhesive layer because the adhesive for bonding the coil mold portion 10 is pushed out.

Meanwhile, the structure that indirectly covers the adhesive surface portions on both sides of the coil mold portion 10 includes, for example, an inlet/outlet manifold block 30 and an inlet/outlet manifold block 30 at the front and rear ends of the coil mold portion 10, respectively. After (40) is combined, the plate-shaped jacket member 21 is attached to both walls of the coil mold part 10 and inserted into the pocket structure in the assembled state, and the pocket-shaped jacket member The horizontal side of (23) is not directly bonded to the horizontal side of the coil mold portion 10, but is indirectly bonded through bonding with the plate-shaped jacket member 21, and the pocket-type jacket member 23 includes a plurality of Since the surfaces of the structure are integrally connected, the sealing performance for cooling fluid, etc. can be improved.

In addition, in the case where it is desired to form a bottom flow path (B) by providing a flow path groove on the bottom of the coil mold part 10 so as to realize additional cooling performance through the bottom of the coil mold part 10, the coil mold part 10 The channel groove 21 formed on the bottom of the part 10 may have a problem in attaching the plate-shaped jacket member due to the small area of the coil mold part 10 itself, so first, the coil mold part 10 An assembly is prepared by first forming a cooling passage (F) on the side wall by attaching the plate-shaped jacket member 21 to the side wall, and then inserting the assembly into the inner space of the pocket-type jacket member 23. The lower end of the jacket member 23 and the bottom of the coil mold portion 10 may be configured to come into contact with each other to form a bottom flow path (B) together with the flow path groove provided on the bottom.

This is a method of forming a bottom flow path by simply inserting the assembly into the U-shaped pocket structure and bonding the corresponding surfaces of both components to each other, so that the bottom flow path (B) can be easily formed at the bottom of the mover without a complicated manufacturing process. There is a possible effect.

At this time, based on the excellent sealing structure of the pocket-type jacket member 23, the width of the bottom channel B formed at the bottom of the coil mold part 10 is configured to have a shape as wide as possible to maximize heat exchange efficiency. It can be configured to do so.

In addition, as shown in FIG. 3, etc., the pocket-type jacket member 23 may be formed to further include a flange portion extending from an upper end thereof in an outwardly bent shape, and the flange portion may be formed by forming the pocket-type jacket member 23. This is to form a coupling structure that can maintain a solid coupling state when coupled with the base block 50 while the assembly is inserted into the interior of (23). In this way, as the fastening structure is formed through the flange portion of the pocket-type jacket member 23, there is an effect of securing high sealing performance due to a strong bonding force and an effect of easy separation and assembly for maintenance, etc. You can have it.

In addition, in order to further block the possibility of cooling fluid leaking through the open structure at the front and rear ends of the pocket-type jacket member 23, a plate-type jacket is installed at the front and rear ends of the assembly assembled by combining the pocket-type jacket member 23. The sealing performance can be further improved by attaching additional members, or, as shown in Figures 1 and 3, the sealing performance can be improved by covering the front and rear ends of the assembly with a cap-shaped finishing cap member 60, respectively. You can do it. In addition, a method of implementing sealing performance can be used by forming the pocket-type jacket member 23 into a pocket structure with only the upper side open, inserting the assembly, and then sealing the assembly and the pocket-type jacket member 23 with a strong bonding force. It may be possible.

Meanwhile, a cover-type jacket member 26 may be additionally provided on the outside of the pocket-type jacket member 23, and the cover-type jacket member 26 has the effect of protecting the outer surface of the pocket-type jacket member 23. A pressure resistance effect that prevents adhesive damage or swelling of the inner plate-shaped jacket member 21 and/or pocket-type jacket member 23 from occurring due to the internal pressure of the cooling fluid, and a structure that surrounds the assembly from the outside. This can provide the effect of improving sealing performance.

In the linear motor system according to an embodiment of the present invention, the mover 100, as shown in FIG. 1, etc., has a coil mold part 10 equipped with a coil 11 and a jacket part 20 at the bottom. It may be provided with a base block 50 at the top, and the base block 50 has a cooling water inlet 51 at either the front end or the rear end based on the moving direction of the mover 100 of the linear motor system. ) may be provided and a cooling water outlet 52 may be provided on the other side.

The cooling fluid supplied through the cooling water inlet 51 may flow through the cooling passage F, cool the temperature of the coil 11, and be discharged through the cooling water outlet 52. Accordingly, the cooling fluid discharged through the cooling water outlet 52 may be configured in a circulation structure in which the cooling fluid is supplied again through the cooling water inlet 51 using a predetermined path, and in this case, the cooling fluid can be naturally cooled. It is preferable that the coolant is supplied again through the coolant inlet 51 in a reduced temperature state through a predetermined path or through a separate cooler such as a chiller.

Meanwhile, the positions of the coolant inlet 51 and the coolant outlet 52 are arranged in the longitudinal direction of the base block 50 as described above, so that the mover 100 of the linear motor system When assembled with a stator and mounted on a system, the piping for supplying cooling fluid protrudes from the external area of the stator, smoothly improving the phenomenon of the cooling water piping getting caught in or interfering with the stator when driving a linear motor. It has a possible effect.

In addition, a wiring hole 54 is provided at the front or rear end of the base block 50 for connecting a current cable for applying and controlling current to the coil 11, and is connected through the wiring hole 54. It can be configured so that wiring for external driving current supply and electrical communication can be arranged, and a sensor fastening hole 53 is added for inserting and installing sensors necessary for auxiliary operation of the system, such as temperature sensors and current sensors. It can be configured.

In this way, when connecting the mover 100 of the linear motor system with other components of the system or external devices by wire, the structure formed to be connected through the base block 50 is such that the related piping and wiring are connected to the base. It can be configured to be located on the block 50 side, which has the effect of resolving problems of collision or interference with the stator during the operation of the linear motor.

In addition, the upper and both ends of the base block 50 are provided with one or more structure fastening parts 55 so that the payload can be fixed to the mover when implementing a transfer stage or other structure using a linear motor system. This structure fastening part 55 may be provided in the form of a general bolt fastening hole, and in addition, for example, it may be formed in the form of a hole with a counterbore structure with one side open to conceal the bolt head and provide a tool. It can also provide effects such as convenience of work.

Meanwhile, the top of the assembly may be configured to be coupled to the base block 50, and the wiring of the coil portion protruding from the top of the coil mold portion 10 constituting the assembly may be connected to the base block 50. It can be inserted into the inside through the bottom of the base block 50 and electrically connected to other components of the system, external devices, power sources, etc. through the wiring hole 54 provided on the front or rear side of the base block 50.

In addition, the coolant inlet 51 and the coolant outlet 52 formed in the base block 50 are connected to pipes for supplying and discharging cooling fluid for cooling the coil 11, and the base block ( The inflow and outflow manifold blocks 30 and the upper ends of the inflow and outflow manifold blocks 40 may be connected in fluid communication through the internal flow path of 50).

At this time, it is preferable that the coupling between the jacket portion 20 and the base block 50 is configured to be sturdy and easily detachable, and the connection between the jacket portion 20 and the base block 50 is rigid and easily detachable. The fixing structure is preferably constructed using the flange portion of the pocket-type jacket member 23 described above.

Meanwhile, the coolant flowing in through the coolant inlet 51 of the base block 50 flows from the front end of the base block 50 to the top of the inflow and outflow manifold block 30, and the inflow and outflow manifold block 30 ) flows downward along the internal flow path of the inflow and outflow manifold block 30, and split supply port 31 provided on at least one of the two horizontal sides of the inlet and outflow manifold block 30. It can be configured to be supplied to each cooling passage (F) through.

In addition, the cooling fluid flowing through each cooling passage (F) flows into the collection discharge port 41 of the inflow and outflow manifold block 40 from the rear end and passes through the upper end of the inflow and outflow manifold block 40 into the base block. It may be configured to flow into (50) and exit through the cooling water outlet (52) located at the rear end of the base block (50). Using this flow path, the cooling fluid approaches the surroundings of the coil (11) and cools it. The function can be performed, and the cooling fluid with an increased temperature is cooled from the outside and re-introduced through the cooling water inlet 51, or the cooling fluid with an increased temperature is discharged to the outside and discarded and replaced with new cooling fluid. It may be configured in the form of an inflow.

Meanwhile, looking at the structure of the cooling passage (F) disposed on the side of the coil mold part 10 through which coolant flows for cooling the coil 11, as shown in FIG. 4, the coil 11 A flow path groove 12 having a uniform flow path width is formed on the side of the disposed coil mold portion 10, and based on this, the cooling flow path F can be configured to have a uniform flow path width.

In this way, as the flow path groove 21 is configured to have a uniform flow path width, the split supply ports 31 of the inflow and outflow manifold blocks 30 can also be configured to have the same size and be arranged at equal intervals, and the supplied Cooling water may also be supplied at a uniform flow rate to cool the side wall of the coil mold part 10.

However, in relation to the heat generation of the coil 11, the cooling fluid flowing along the inside of the cooling passage (F) for cooling mainly performs a conduction cooling function through contact with the inner surface of the cooling passage (F). Therefore, the cooling passage (F) through which the cooling fluid flows can be provided adjacent to the coil 11 or configured to increase the contact surface, thereby providing the effect of improving cooling efficiency.

The linear motor system according to an embodiment of the present invention is a modified embodiment of the cooling passage, and as shown in FIG. 5, the upper passage groove 12a and the lower passage groove 12c are located in the middle. The channel groove may be configured to have a wider width than the channel groove 12b of .

That is, for example, in order to increase the contact area with the cooling passage (F) for the coil arrangement structure inside the coil mold part 10 in which the O-shaped coils 11 are continuously arranged, the coil mold part ( 10) The arrangement path of the flow groove 12 located on the side wall continuously matches or is as close as possible to the winding-shaped arrangement structure of the coil 11 on the side wall, but the upper flow groove (12) is provided so that the heat transfer surface can also be expanded. For 12a) and the lower channel groove 12c, cooling efficiency can be improved by providing a wider channel groove width.

In this way, when the passage widths of the upper passage groove (12a) and the lower passage groove (12c) are widened, the flow rate of the coolant flowing inside the upper passageway (23a) and the lower passageway (23c) also increases. This can have the effect of improving cooling efficiency.

In addition, in order to form a flow structure that conforms to this flow groove structure, the split supply port 31 of the inflow and outflow manifold block 30 and the collection outlet 41 of the inflow and outflow manifold block 40 are connected to the upper part. It is preferable to increase the diameter and/or number of the split supply ports 31 and the collection discharge ports 41 at positions corresponding to the flow path grooves 12a and the lower flow path grooves 12c.

The linear motor system according to an embodiment of the present invention is another modified embodiment for improving cooling efficiency by reducing the separation distance between the heating part of the coil 11 and the cooling passage (F) for cooling, Figure 6 As shown, a cooling passage can be formed according to the winding shape of the coil 11.

In more detail, when manufacturing the coil mold part 10, the coil 11 is configured as a coreless type while ensuring the structural strength of the coil mold part 10. Epoxy resin, etc. may be injected into the coil to support the center of the coil. In this structure, the heat transfer path passing from the coil through the center of the coil or the heat transfer path passing through the periphery of the coil improves cooling performance. Since this inevitably has a limited effect on improvement, the cooling passage for cooling the coil 11 is configured to appropriately follow the winding shape of the coil 11 to cool it efficiently.

At this time, in order to induce a smooth flow of cooling fluid, cooling is achieved by providing a partition wall in a structure in which the coils 11 are continuously disposed and molded to connect the central parts of the coils 11 filled with epoxy resin, etc. It is desirable to form a smoothly distributed flow structure of fluid.

That is, in a structure in which the coil 11 is continuously arranged inside the coil mold part 10, the entire coil 11 is continuously provided with a semicircular flow path groove that follows half of the winding shape of the coil. It is possible to form a cooling passage (F) that secures a short heat transfer path from the coil 11 by dividing the winding shape into two, upper and lower.

In addition, when forming such a cooling passage (F), it is desirable to form the structure of the passage groove to have a curved shape with respect to the bend of the internal passage in order to smoothly flow the internal cooling fluid.

Corresponding to the flow groove structure of the modified embodiment, the split supply port 31 of the inflow and outflow manifold block 30 and the collection discharge port 41 of the inflow and outflow manifold block 40 provide cooling fluid to the cooling passage F. It can be configured with a two-part supply and discharge structure on the side to efficiently supply.

In addition, the linear motor system according to an embodiment of the present invention is another modified embodiment for improving the cooling efficiency for heat generation of the coil 11, and as shown in FIG. 7, the coil mold part ( 10), the inflow and outflow manifold block (30) provided at the front end, and the inflow and outflow manifold block (40) provided at the rear end are provided with an internal flow path for supplying cooling fluid and an internal flow path for discharging the cooling fluid. Thus, the flow direction of the cooling fluid can be formed differently for each channel groove 12 of the coil mold part 10.

That is, the inflow and outflow manifold block 30 provided at the front end of the coil mold part 10 is provided with a split supply port 31 and a collection discharge port 32, and the inflow and outflow manifold block 40 provided at the rear end. It is provided with a split supply port (42) along with a collection discharge port (41), so that the cooling fluid supplied through the split supply port (31) of the inflow and outflow manifold block (30) passes through the corresponding flow path groove (12) to the inflow and outflow manifold block. The cooling fluid is discharged through the collection outlet (41) of (40) and supplied through the split supply port (42) of the inflow and outflow manifold block (40) through the corresponding flow path groove (12) to the inflow and outflow manifold block (30). By configuring it to be discharged through the collection discharge port 32, the flow direction of the cooling fluid can be formed differently for each flow path groove 12.

When comparing the cooling effect in the case where the flow direction is different for each flow path groove (12) and the case where the flow direction of the cooling fluid for the flow path grooves (12) is configured to be uniform, the coil mold portion (10) In the case where the cooling fluid flowing through the flow path groove 12 is commonly supplied from either the front end or the rear end of the coil mold part 10 and discharged to the other side, the cooling effect on the supply side of the cooling fluid is excessively high. The cooling effect on the discharge side is excessively low, resulting in an imbalance in cooling performance, which may lead to a decrease in the electromagnetic field control performance of the operator. The cooling fluid flow direction for each channel groove 12 of the coil mold part 10 may occur. By setting and configuring differently, cooling performance can be secured evenly, and this can provide the effect of ensuring good electromagnetic field control performance of the operator.

Meanwhile, the front and rear inflow and outflow manifold blocks (30, 40) are provided with an internal flow path for supplying the cooling fluid and an internal flow path for discharging the cooling fluid, so that the flow direction of the cooling fluid can be varied for each flow groove (12). In the case of forming the base block 50, fluid communication with the front and rear inflow and outflow manifold blocks 30 and 40 must also be provided in a modified structure.

That is, for example, part of the cooling fluid flowing into the internal flow path of the base block 50 through the coolant inlet 51 provided at the front of the base block 50 is connected to the inflow and outflow manifold block 30 at the front position. The internal flow path for supplying cooling fluid connected to the cooling water inlet 51 is branched so that the remaining cooling fluid flows across the base block 50 and is supplied to the inflow and outflow manifold block 40 at the rear end. It has an additional structure that extends across the base block 50 to the rear end position and is connected to the inflow and outflow manifold block 40 at the rear end position. Likewise, the cooling fluid discharged from the inflow and outflow manifold block 30 at the front position and flowing into the internal flow path of the base block 50 extends across the base block 50 to the rear end position to form an inflow and outflow manifold at the rear end position. The internal flow path for discharging the cooling fluid connected to the coolant outlet 52 is connected to the base block 50 so that it is discharged from the block 40 and flows into the internal flow path of the base block 50 and is discharged through the coolant outlet 52. ) and an additional structure extending across the shear position.

Alternatively, instead of forming an additional internal flow path across the base block 50, a structure having both a coolant inlet 51 and a coolant outlet 52 at the front and rear ends of the base block 50 may be used. . In this case, the cooling fluid flowing into the coolant inlet 51 at the front passes through the cooling passage (F) by the coil mold part 10 and the jacket part 20, and then is discharged to the coolant outlet 52 at the rear end, The cooling fluid flowing into the cooling water inlet 51 at the rear end passes through the cooling passage (F) formed by the coil mold part 10 and the jacket part 20, and then is discharged through the cooling water outlet 52 at the front end.

Meanwhile, the linear motor system according to an embodiment of the present invention is another modified embodiment for improving the cooling efficiency for heat generation of the coil 11, and as shown in FIG. 8, the coil mold part ( 10) It may be configured to include a second cooling passage (S) forming a flow path for the cooling fluid on the outer side of the cooling passage (F) in the thickness direction.

The cooling passage (F) formed on the surface of the coil mold part 10 to cool the coil 11 is a conductive cooling structure, which improves cooling efficiency at adjacent points, but reduces cooling efficiency at other points. Therefore, a problem may occur where the temperature increases at a point where the cooling passage (F) is not provided.

In contrast, the cooling passage (F) is primarily formed by attaching a plate-shaped jacket member 21 to the outer surface of the coil mold part 10, and another plate-shaped jacket member 21 is additionally attached thereon. By forming the second cooling passage (S), cooling efficiency can be further improved.

Here, the second cooling passage (S) only needs to provide a cooling function for the amount of heat generated that is not cooled in the cooling passage (F), so the flow rate does not have to be fast, and the hydraulic pressure of the cooling fluid flowing inside is not high, so the second cooling passage (S) only needs to provide a cooling function for the heat generation that is not cooled in the cooling passage (F). 2 The width of the cooling passage (S) may be configured to be wider than the width of the first cooling passage (F), and the contact structure for forming the second cooling passage (S) in the thickness direction of the jacket portion through this is also shown. It has an effect that can be configured in a simple form.

Meanwhile, in forming the second cooling passage (S), another plate-shaped jacket member 21 is additionally coupled to the plate-shaped jacket member 21 attached to the outer surface of the coil mold part 10. In addition to forming the second cooling passage (S), the plate-shaped jacket members 21 are first combined with each other to form the second cooling passage (S), and then the combination of the plate-shaped jacket members 21 is formed into the coil mold part. A method of forming a cooling passage (F) by attaching to the outer surface of (10) may be adopted.

Meanwhile, the linear motor of the present invention can be used as a moving part in ultra-precision equipment such as semiconductor manufacturing equipment, so there is a need to ensure stability.

Accordingly, the flow of the cooling fluid for cooling of the present invention is composed of a high-speed flow to improve cooling efficiency, but the internal cooling fluid flows only in a laminar flow state by suppressing turbulent fluidization and limiting the Reynolds number for the flow. It can be formed to have this configuration.

In other words, in fluid mechanics, Reynolds number can be used to predict whether a flow is laminar or turbulent, and Reynolds number can be calculated using fluid properties such as density and viscosity, and flow environment parameters such as flow speed and flow path diameter. If the number (Re) is expressed as a formula, it can be written as Re=ρuL/μ (where ρ is the density, u is the flow velocity, L is the diameter of the flow path, and μ is the viscosity coefficient), and the Reynolds number If (Re) is less than 2000, it can be considered a laminar flow state.

In this way, when the flow of cooling fluid for internal cooling occurs at high speed and forms a turbulent flow, vibration due to turbulence may occur in the internal cooling passage, and as a result, the precision of the driving part of the device requiring precision driving is reduced. Since deterioration problems may occur, the cross-sectional dimensions and flow speed of the internal flow path are organically selected and configured in the operator of the linear motor system so that the Reynolds number remains below 2000 while ensuring cooling performance.

In addition, the description of the present invention described above is for illustrative purposes, and those skilled in the art will understand that the present invention can be easily modified into other specific forms without changing the technical idea or essential features of the present invention. You will be able to. Therefore, the embodiments described above should be understood in all respects as illustrative and not restrictive. For example, each component described as single may be implemented in a distributed or divided form, and similarly, components described as distributed or divided may also be implemented in a combined form within the range understood by a person skilled in the art. there is. Additionally, the method steps may be performed multiple times alone or in combination with at least one other step.

The scope of the present invention is indicated by the patent claims described below, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present invention.

Claims

In a linear motor system having a coil in at least one of a mover or a stator,

The mover or stator is,

A coil mold portion (10) formed by molding a composite resin material and having the coil therein; and,

It is configured to include a jacket portion 20 provided in a structure that covers at least one side of the coil mold portion 10,

A flow path groove is provided on the side of the coil mold part 10, and a cooling flow path (F) provides a flow path for the cooling fluid through the inner surface of the jacket part 20 and the flow groove of the coil mold part 10. ), a linear motor system characterized in that it forms.
According to claim 1,

A linear motor system, wherein the jacket portion 20 is made of a non-metallic material or a non-magnetic metal material.
According to claim 1,

A linear motor system, characterized in that the passage grooves formed on the upper and lower sides of the coil mold portion 10 are configured to have a larger width than the passage grooves formed in the middle.
According to claim 1,

The flow path groove provided on the side of the coil mold part 10 is,

The cooling fluid reflects the winding shape of the coil 11 so that it flows along the side of the coil mold part 10 along the winding shape of the coil 11 provided inside the coil mold part 10. A linear motor system formed by:
According to claim 1,

The jacket portion 20,

A linear motor system further comprising a second cooling passage (S) outside the cooling passage (F) formed by the passage groove of the coil mold portion (10) and the inner surface of the jacket portion (20). .
According to any one of claims 1 to 5,

A linear motor system, characterized in that the size, shape, and flow rate of the cooling passage are limited so that the cooling fluid for cooling the linear motor flows at high speed but laminar flow inside the linear motor.
According to paragraph 1,

The jacket portion 20,

A plate-shaped jacket member (21) formed of a plate-shaped material and adhesively bonded to the side of the coil mold portion (10); and,

A pocket-type jacket member (22) formed in a 'U'-shaped or 'ㄷ'-shaped cross-sectional shape and adhesively coupled in a structure that directly or indirectly surrounds the outside of the coil mold part, including the side surface of the coil mold part 10. ); A linear motor system, characterized in that it includes at least one of the following.
According to paragraph 1,

The flow grooves provided on the side of the coil mold portion 10 are provided in plural numbers and are formed to connect one side and the other side of the coil mold portion 10 according to the direction of movement of the linear motor,

Inflow and outflow manifold blocks 30 and 40 are provided on one side and the other side of the coil mold part 10, respectively, and one of the inflow and outflow manifold blocks 30 and 40 has a division corresponding to the plurality of flow grooves. A linear motor system, characterized in that a supply port (31) is provided, and the other one is provided with a collection discharge port (41) corresponding to the plurality of flow grooves.