WO2023241408A1 - 微细内流道的表面光整方法、微细内流道工件及光整介质 - Google Patents

微细内流道的表面光整方法、微细内流道工件及光整介质 Download PDF

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Publication number
WO2023241408A1
WO2023241408A1 PCT/CN2023/098660 CN2023098660W WO2023241408A1 WO 2023241408 A1 WO2023241408 A1 WO 2023241408A1 CN 2023098660 W CN2023098660 W CN 2023098660W WO 2023241408 A1 WO2023241408 A1 WO 2023241408A1
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Prior art keywords
flow channel
fine
finishing
medium
internal flow
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PCT/CN2023/098660
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English (en)
French (fr)
Inventor
雷力明
米天健
王小康
樊林娜
周新民
王威
高军帅
Original Assignee
中国航发上海商用航空发动机制造有限责任公司
陕西金信天钛材料科技有限公司
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Publication of WO2023241408A1 publication Critical patent/WO2023241408A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/006—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor for grinding the interior surfaces of hollow workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
    • B24B31/14—Abrading-bodies specially designed for tumbling apparatus, e.g. abrading-balls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y40/00—Auxiliary operations or equipment, e.g. for material handling
    • B33Y40/20—Post-treatment, e.g. curing, coating or polishing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/14—Form or construction
    • F01D5/147—Construction, i.e. structural features, e.g. of weight-saving hollow blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02C—GAS-TURBINE PLANTS; AIR INTAKES FOR JET-PROPULSION PLANTS; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS
    • F02C7/00—Features, components parts, details or accessories, not provided for in, or of interest apart form groups F02C1/00 - F02C6/00; Air intakes for jet-propulsion plants
    • F02C7/22—Fuel supply systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/08—Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
    • F28F21/081—Heat exchange elements made from metals or metal alloys
    • F28F21/084—Heat exchange elements made from metals or metal alloys from aluminium or aluminium alloys
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the present invention relates to the field of precision machining of internal flow channels, and in particular to a surface finishing method for fine internal flow channels, fine internal flow channel workpieces and finishing media.
  • Process technologies that can process fine and complex internal flow channels include precision machining, femtosecond/water guide/long pulse laser processing, electric discharge machining, and additive manufacturing (3D printing).
  • the structures of fine and complex internal flow channels processed by other single processes are relatively simple and have a small length-to-diameter ratio. They need to be combined with other combined processes such as welding to process fine and complex internal flow channels.
  • the fine and complex inner flow channel processed by precision machining will produce problems such as burrs, sharp corners or tool joint steps; the surface of the inner flow channel processed by femtosecond laser will produce adhered residue particles and surface "step” effect; water conduction/long
  • the inner flow channel surface of pulse laser and EDM processing will produce a remelted layer;
  • additive manufacturing (3D printing) is a technology that discretes complex three-dimensional structural part models into two-dimensional structures for layer-by-layer superposition forming. It makes complex and micro Integrated molding of complex internal flow channel parts has become possible, and therefore its applications in industrial fields such as aerospace, automobiles, and molds are increasing. However, additive manufacturing technology has its own process characteristics such as temperature gradients and layer-by-layer molding during the molding process, resulting in the presence of semi-sintered or bonded powder particles and surface "step” effects on the surface of the inner flow channel of the part.
  • the purpose of this application is to provide a surface finishing method for fine internal flow channels, a fine internal flow channel workpiece, and a finishing medium.
  • the principle is that, first of all, due to the synergistic effect of the low-viscosity liquid phase, the flow rate of the smoothing medium, and the saturation flow rate, the smoothing medium can smoothly enter the fine inner flow channel and form a similar shape in the fine inner flow channel.
  • the fluid boundary layer is parallel to the inner flow channel surface, and the abrasive shear friction in the "knife-like" hard non-Newtonian fluid realizes targeted processing of bumps on the rough surface.
  • the synergistic effect of the above three It also causes friction and micro-cutting forces between the abrasive particles in the finishing medium and the surface of the fine inner flow channel. Therefore, it is not limited by the material of the fine inner flow channel and can obtain the optimal surface roughness consistent with the average tip contact length range of the abrasive particles. Super mirror quality.
  • Ra 0 is the initial average surface roughness of the fine inner flow channel
  • Ra is the target value of the optimal surface roughness of the fine inner flow channel after finishing
  • t is the initial time period.
  • L is the average cutting depth of the abrasive tip
  • b is the average contact length of the abrasive tip
  • ⁇ l is the water-based liquid phase density
  • ⁇ p is the abrasive solid phase density
  • ⁇ w is the yield limit of the workpiece material
  • ⁇ is the saturation Pressure ratio of flow
  • Re is the Reynolds number of the liquid phase
  • l is the length of the internal flow channel degree
  • D is the diameter of the inner flow channel
  • d is the abrasive grain size
  • k is the concave-convex grinding ratio coefficient.
  • the smoothing medium smoothes the fine inner flow channel in a standard time period, and the flow rate or flow rate of the smoothing medium in the fine inner flow channel is determined. If the flow rate or flow rate reaches a specified value, Then the optimal surface roughness reaches the target value.
  • the fine internal flow channel workpiece has a diameter less than or equal to 3 mm and an aspect ratio greater than or equal to 50:1, which is obtained through additive manufacturing, casting, laser processing, EDM, etc.
  • the fine inner flow channel workpiece has an inner surface with an optimal surface roughness Ra less than or equal to 1.6 ⁇ m after finishing.
  • the fine internal flow channel workpiece has a diameter less than or equal to 3 mm and a large aspect ratio.
  • the fine inner flow channel is obtained by precision machining with a ratio of 50:1 or equal to 50:1. After finishing, the fine inner flow channel has an inner surface with an optimal surface roughness Ra less than or equal to 0.4 ⁇ m.
  • the fine inner flow channel workpiece is an aerospace engine additively manufactured high-temperature alloy fuel nozzle
  • the fuel nozzle has the fine inner flow channel structure
  • the fine inner flow channel diameter is ⁇ 2.5mm
  • the structure has Straight line, L-shaped bend and O-shaped bend
  • the optimal surface roughness Ra of the fine internal flow channel is less than or equal to 1.6 ⁇ m
  • the fine internal flow channel workpiece is an additive manufacturing aluminum alloy heat exchanger
  • the heat exchanger is The exchanger has a fine internal flow channel structure with a diameter of ⁇ 3mm, and the fine internal flow channel structure has straight lines, L-shaped bends, S-shaped bends and U-shaped bends.
  • the optimal surface roughness Ra of the fine internal flow channels is less than or Equal to 1.6 ⁇ m; or the fine internal flow channel workpiece is an additively manufactured titanium alloy hydraulic component, the hydraulic component has a fine internal flow channel structure, the diameter is 3mm, and the fine internal flow channel structure has straight lines, S-shaped bends, L-shaped bend, the optimal surface roughness Ra of the fine inner flow channel is less than or equal to 1.6 ⁇ m; or the fine inner flow channel workpiece is an additively manufactured stainless steel throttle, and the flow restrictor has a fine inner flow channel
  • the structure has a diameter of less than 1 mm, and the fine inner flow channel structure has a spiral bend, and the optimal surface roughness Ra of the fine inner flow channel is less than or equal to 0.8 ⁇ m.
  • the fine internal flow channel workpiece is a cast high-temperature alloy hollow blade for an aerospace engine.
  • the hollow blade has an inner cavity structure in which the fine internal flow channel communicates with a small hole, and the inner surface of the small hole is smoothed.
  • the optimal roughness Ra is less than or equal to 0.8 ⁇ m, there is no remelting layer, and the chamfer radius of the hole is greater than 0.1mm.
  • this application provides a finishing medium for use in the finishing method described in the first aspect.
  • the finishing medium includes a liquid phase and a solid phase, the viscosity of the liquid phase is ⁇ 1000 cP, and the solid phase
  • the phase is abrasive grains.
  • a polymer tackifier is added to the liquid phase of the smoothing medium.
  • a defoaming agent is added to the liquid phase.
  • the volume ratio of the surface foam slurry of the finishing medium to the volume of the liquid phase does not exceed 0.3:1.
  • a lubricant is added to the liquid phase of the finishing medium, and the lubricant includes one or more combinations of inorganic compounds, simple substances, and polymer compounds.
  • Figure 1 is a schematic flowchart of a finishing method according to some embodiments of the present application.
  • Figure 2 is a schematic diagram of the principle of micro-cutting force of the finishing method according to some embodiments of the present application.
  • Figure 3 is a schematic flowchart of a finishing method according to other embodiments of the present application.
  • Figure 4 is a schematic flowchart of a finishing method according to further embodiments of the present application.
  • Figure 5 is a schematic flowchart of a finishing method according to further embodiments of the present application.
  • 6A to 6C are pictures of parts finished according to the finishing method of the first embodiment of the present application.
  • 7A to 7C are pictures of parts finished according to the finishing method of the second embodiment of the present application.
  • 8A to 8C are pictures of parts finished according to the finishing method of the third embodiment of the present application.
  • 9A and 9B are pictures of parts finished according to the finishing method of the fourth embodiment of the present application.
  • 10A and 10B are pictures of parts finished according to the finishing method of the fifth embodiment of the present application.
  • 11A and 11B are part pictures of parts that are finished according to the finishing method of the sixth embodiment of the present application.
  • Figure 13 is a schematic diagram of the turning structure of the fine internal flow channel.
  • the average roughness described below is to select multiple areas on the measured surface to measure and average the values to obtain the average roughness of the measured surface.
  • the optimal roughness described below is to select multiple areas on the measured surface to measure and take the minimum value to obtain the optimal roughness of the measured surface.
  • a certain area of roughness measurement can be a pipeline segment with a length of 8mm. Select multiple pipeline segments with a length of 8mm in the measured pipeline to measure and find the minimum value.
  • the inventor found after in-depth research that the above-mentioned processing methods, for the structure of the fine internal flow channel, will face the problem of being difficult to penetrate into the internal finishing of the fine internal flow channel and/or the finishing quality is not ideal. problem, so it is difficult to apply to finishing processing of fine internal flow channels.
  • the method of forming a saturated flow rate of liquid relative to a fine internal flow channel that is, through the synergistic effect of the low-viscosity liquid phase, the fluid flow rate of the finishing medium, and the saturated flow rate, solves the problem of finishing processing of fine internal flow channels.
  • the principle is that, first of all, due to the synergistic effect of the low-viscosity liquid phase, fluid flow rate and saturation flow, the smooth medium can smoothly enter the fine and complex internal flow channels and form a non-Newtonian flow path in the fine and complex internal flow channels.
  • the principle is that abrasive flow
  • the technical cutting mechanism is the volume force generated by the extrusion of abrasive particles onto the surface. Therefore, pits and pitting are prone to occur when processing metals with low hardness and polymer flexible materials (Ra>0.8 ⁇ m).
  • the cutting force is the erosion force caused by the impact of abrasive particles on the surface. Processing soft metals is prone to surface roughening (Ra>0.8 ⁇ m). It can be understood that the surface finishing method of the internal flow channel disclosed in the embodiment of the present application solves the problem of fine and complex internal flow problems with a small internal flow channel diameter (less than or equal to 3 mm) and a large aspect ratio (greater than or equal to 50:1).
  • the problem that the channel cannot be surface smoothed is solved, so as to obtain a fine internal flow channel workpiece with an optimal surface roughness Ra of the inner surface less than or equal to 1.6 ⁇ m.
  • the workpiece can have S-shaped bends, L-shaped bends, and U-shaped bends in a three-dimensional space.
  • the surface finishing method of the internal flow channel disclosed in the embodiment of the present application is not limited to being used only for workpieces with fine and complex internal flow channels, and can also be used for processing internal flow channel parts of other sizes.
  • a liquid-solid two-phase flow finishing medium is used, the liquid phase viscosity of the finishing medium is ⁇ 1000cP, and the solid phase is abrasive particles;
  • a predetermined pressure is applied to the smoothing medium, so that the smoothing medium flows in the fine inner flow channel at a flow rate of >5m/s, and the smoothing medium flows into the internal flow rate of the fine inner flow channel at one end. , reaching the saturation value that the diameter of the fine inner flow channel can accommodate the flow, and the hydraulic pressure inside the inner flow channel is in a suppressed state;
  • the inventor obtained through a large amount of test data that for the fine internal flow channels of common materials such as titanium alloys, high-temperature alloys, steel, ceramics, aluminum alloys, polymer materials, etc., the liquid phase
  • the viscosity needs to be at least 50cP, and the roughness target value can be reached only after smoothing.
  • the specific method of obtaining the optimal value of viscosity will be recorded in the following examples, and the critical value 1000cP here is generally not the optimal value, but the smoothing medium continues, smoothly and stably in the fine internal flow channel. flow limit.
  • the material of solid phase abrasive grains can be common abrasive grain materials, such as carbide ceramics: including silicon carbide, tungsten carbide, etc.; oxide ceramics: including alumina, zirconia, cerium oxide, etc.; nitride ceramics: including nitride Boron, chromium nitride, etc.; natural minerals: including diamond/sand, mica, quartz, olivine, etc. Preferably, it can be one or more combinations of diamond/sand and oxide ceramics.
  • carbide ceramics including silicon carbide, tungsten carbide, etc.
  • oxide ceramics including alumina, zirconia, cerium oxide, etc.
  • nitride ceramics including nitride Boron, chromium nitride, etc.
  • natural minerals including diamond/sand, mica, quartz, olivine, etc.
  • it can be one or more combinations of diamond/sand and oxide ceramics.
  • the particle size and mass concentration of abrasive particles When selecting the particle size and mass concentration of abrasive particles, it is generally based on a lower limit value and gradually increases the range to obtain the optimal value. If the particle size and mass concentration of the abrasive grains are lower than the lower limit, the expected finishing effect cannot be achieved, that is, the micro polishing effect will not be achieved. The fine inner flow channel cannot achieve the target value of surface roughness. The principle is that if the particle size is too small, the quality of the abrasive particles themselves is too low and cannot generate enough kinetic energy to achieve effective grinding and polishing. If the mass concentration is too small, the grinding surface The reduced probability of processing points makes it impossible to achieve effective grinding and polishing. The selection of the lower limit value is generally more conservative.
  • any lower limit value can be conservatively selected without exceeding the upper limit of the particle size.
  • the diameter of the inner flow channel The lower limit of the ratio to the particle size of the abrasive particles is usually 20, that is, the diameter of the inner flow channel must ensure that at least 20 abrasive grains pass through in parallel without clogging, that is, the upper limit of the particle size of the abrasive particles is usually 1/20 of the diameter of the inner flow channel.
  • the lower limit of abrasive particles is generally 1/5 of the upper limit.
  • the lower limit of the mass concentration of abrasive particles is generally 10g/L. The selection of the lower limit value is generally more conservative because the pressure of the system is relatively large.
  • a predetermined pressure is applied to the smoothing medium, so that the smoothing medium flows at a flow rate of >5m/s in the fine inner flow channel.
  • the predetermined pressure here refers to the use of this pressure in the initial state of the finishing process so that the finishing medium flows at a flow rate of >5m/s inside the fine inner flow channel.
  • the predetermined pressure is a concept of a range, rather than a specific value that can only be applied to the smooth medium.
  • the flow velocity of the smooth medium is greater than 5m/s, which is based on the theoretical critical conditions for forming a non-Newtonian fluid and the critical value obtained by the inventor's long-term practice.
  • Engineering fluid mechanics data shows (for example, books and materials: Yang Shuren, Wang Zhiming, He Guangyu, et al. Engineering Fluid Mechanics [M]. Petroleum Industry Press, 2006.) that pure water with a viscosity of 1cP reaches the critical motion velocity of non-Newtonian fluid >16.6m /s, and the lower limit of the viscosity of the liquid phase in this embodiment is 50cP, which is greater than 1cP, so the critical flow velocity of non-Newtonian fluid is less than 16.6m/s.
  • the ideal processing effect cannot be obtained when it is less than 5m/s, so the critical value is 5m/s.
  • the smooth medium flows into the internal flow rate at one end of the fine inner flow channel, reaching the saturation value that the diameter of the fine inner flow channel can accommodate.
  • the hydraulic pressure inside the inner flow channel is in a suppressed state, which is what is known in the art. The state of saturated flow.
  • the micro-cutting force generated by the friction between the abrasive grains of the finishing medium and the surface of the fine inner flow channel it can be achieved without being limited by the material of the fine inner flow channel.
  • Obtain the optimal surface roughness consistent with the average contact length range of the abrasive tip which breaks through the limitations of the principles of abrasive flow and water jet technology.
  • the principle is that the cutting mechanism of abrasive flow technology is the extrusion of abrasive particles on the surface. Because of the volume force, pits and pitting are prone to occur when processing metals with low hardness and flexible polymer materials (Ra>0.8 ⁇ m).
  • the optimal surface roughness is the target value. It does not limit the need to directly measure the optimal surface roughness, but it can also be characterized indirectly. For example, as mentioned above, it can characterize the smooth medium inside the fine internal flow channel. Flow rate, flow rate, etc. methods.
  • the above target value refers to the set optimal surface roughness value, which generally refers to the requirements for the final optimal surface roughness of the fine internal flow channel, but it does not rule out further finishing after the above finishing step. , what is set at this time is not the final optimal surface roughness requirement.
  • the above-mentioned average cutting depth of the cutting edge of the abrasive grain is the average cutting depth of the cutting edge of the equivalent abrasive grain group
  • the average contact length of the cutting edge of the abrasive grain is the average contact length of the cutting edge of the equivalent abrasive grain group.
  • the average cutting depth L of the grain tip and the average contact length b of the abrasive tip are not drawn to equal proportions in Figure 2.
  • the average cutting depth L of the abrasive grain tip is 1.4nm to 14nm
  • the average contact length b of the abrasive grain tip is 50nm to 1000nm. They are not obtained through direct observation with an electron microscope, but are obtained through statistical calculation based on the data obtained by the inventor's long-term practice. .
  • the smoothing medium smoothes the fine inner flow channel in a standard time period.
  • the specific value of the standard time period may be the standard time period obtained through preliminary experiments. , or it can be a standard time period obtained from field tests.
  • the steps to obtain the standard time period are as follows:
  • the above-mentioned initial time period is generally calculated based on the average initial surface roughness of the fine inner flow channel and the average cutting depth of the abrasive tip that contacts the surface of the fine inner flow channel every second.
  • the average height difference between the surface convex points and the concave points is approximately equal to 10 ⁇ m
  • the average cutting depth of the abrasive grain tip that contacts the surface of the fine internal flow channel per second is 1.4nm to 14nm. That is, the single-sided thinning rate is 5 ⁇ m/h ⁇ 50 ⁇ m/h.
  • the method of detecting the optimal surface roughness of the fine inner flow channel after the smoothing medium has finished smoothing the fine inner flow channel in the initial period can be based on the optimal surface roughness corresponding to the aperture expansion value.
  • the method of indirectly detecting the optimal surface roughness of the fine internal flow channel by numerical value satisfies the following formula:
  • the bumps and valley areas will be squeezed by the abrasive particles and then contact and grind, so k ⁇ 0.6 ⁇ 0.8.
  • Flexible methods such as chemical/electrochemical/magnetic/ultrasonic + abrasive grains process bumps and valleys isotropically, so k ⁇ 0.9 ⁇ 1, that is, the surface is rough even if the average surface thinning amount is large even if the processing takes a long time The quality cannot be significantly improved, it can only be brightened and leave an orange peel-like surface morphology.
  • the optimal surface roughness of the fine internal flow channel is indirectly detected through the optimal surface roughness corresponding to the diameter expansion value.
  • the detection process is convenient and can be directly detected on site.
  • the smoothing method further includes cleaning the smoothed fine inner flow channel after the optimal surface roughness of the fine inner flow channel reaches the target value.
  • the target value include:
  • the cleaning medium is injected into the fine inner flow channel from its port at the predetermined pressure.
  • the cleaning medium and the water-based liquid of the finishing medium dissolve with each other until the cleaning medium flowing out from the fine inner flow channel appears. Dahl effect.
  • the way to judge whether the cleaning is completed is to characterize the Tyndall phenomenon in the cleaning medium flowing out of the fine internal flow channel after cleaning without disassembling the workpiece.
  • the outflowing cleaning medium can be directed into a transparent drainage container and discharged from the transparent drainage container.
  • the deionized water in the transparent drainage container is always illuminated by a spotlight. Observe the light state in the cleaned deionized water. If the spotlight light in the cleaned deionized water appears turbid and there is no linear opalescence column, which is the Tyndall effect, it indicates that this is the case.
  • the viscosity of the liquid phase in the pure water liquid phase, use an Ubbelohde viscometer to test, and slowly increase the tackifier to adjust the water-based viscosity to the lower limit of 50cP. Then test and process the inner flow channel of the fine inner flow channel workpiece to be processed, read the initial flow rate or flow data corresponding to the smoothing medium and record it as the standard value, add 1g/L of tackifier and the corresponding viscosity increment of about 10cP. Continue to test the inner flow channel to be processed, and repeat the additional steps.
  • the tackifier concentration is optimal at this time, and the viscosity of the corresponding finishing medium is optimal.
  • the optimal range of viscosity values corresponding to different diameters of fine internal flow channels can be found in Table 1.
  • 1/5 of the upper limit is generally selected as the lower limit, that is, 30 ⁇ m
  • the inventor increased the abrasive grain size based on the lower limit value. The inventor found that if the abrasive grain size is smaller than the lower limit value, the quality of the abrasive grain itself will be too low and it will not be able to generate enough kinetic energy to achieve efficient grinding and polishing.
  • After selecting the lower limit of the abrasive particle size perform trial processing, read the initial flow rate or flow data corresponding to the smooth medium and record it as the standard value, then increase the particle size increment by 1 ⁇ m to 10 ⁇ m based on the lower limit of the abrasive particle size, and continue.
  • the particle size of the abrasive particles is the optimal value.
  • the range of abrasive grain sizes corresponding to different diameters of fine internal flow channels can be found in Table 2.
  • Table 2 The optimal value range of the abrasive particle size of the finishing medium corresponding to different diameters of the fine internal flow channel
  • the lower limit of the mass concentration is selected based on the mass concentration of the abrasive grains being 10g/L.
  • the inventor found that if it is lower than the lower limit of the mass concentration, the grinding point on the surface of the abrasive grains will The reduced probability leads to insufficient grinding effect.
  • conduct trial processing read the initial flow rate or flow data corresponding to the finishing medium and record it as the standard value, and then increase the abrasive particle mass concentration by 2g/ based on the lower limit of mass concentration.
  • Table 3 The optimal value range of the abrasive mass concentration of the finishing media corresponding to different diameters of the fine internal flow channels
  • the value of the predetermined pressure P can be calculated by the following formula:
  • Ra 0 is the initial average surface roughness of the inner flow channel
  • Ra is the target value of the optimal roughness of the inner flow channel surface after processing
  • L is the average cutting depth of the abrasive tip
  • b is the average contact length of the abrasive tip
  • ⁇ l is the liquid phase density
  • ⁇ p is the abrasive solid phase density
  • ⁇ w is the yield limit of the workpiece material
  • t is the aforementioned initial time period.
  • it can be calculated based on the initial average surface roughness of the inner flow channel and the contact with the fine inner surface per second. The average cutting depth of the abrasive tip on the surface of the flow channel is calculated.
  • ⁇ is the pressure increase ratio when the inner flow channel reaches saturated flow
  • Re is the Reynolds number of the liquid phase
  • l is the length of the inner flow channel
  • D is the length of the inner flow channel.
  • diameter is the particle size of the abrasive grains
  • k is the concave-convex grinding ratio coefficient.
  • the average roughness of each area of the inner flow channel is taken, usually Ra 0 data
  • the average roughness of each area of the inner flow channel is taken, usually Ra 0 data
  • the roughness of each area is not completely consistent due to the initial difference.
  • the optimal value of the roughness of each area of the inner flow channel is taken).
  • the Ra data is as follows, 3D printing and precision casting ⁇ 1.6 ⁇ m, machining ⁇ 0.4 ⁇ m, laser processing and wire cutting ⁇ 0.8 ⁇ m.
  • the length of the fine internal flow channel is l
  • the diameter of the pipe is D ⁇ 3mm
  • the Reynolds number Re is 20 to 200, which can be calculated from the viscosity and flow rate of the liquid phase
  • the concave-convex grinding ratio coefficient k is 0.2 ⁇ 0.4
  • the abrasive grain size d is 5 ⁇ m ⁇ 150 ⁇ m
  • the average cutting depth L of the abrasive tip is 1.4nm ⁇ 14nm
  • the average cutting depth L of the abrasive tip can be measured by the thinning amount per unit time, water-based two-phase flow finishing
  • the unilateral thinning rate of the inner flow channel is 5 ⁇ m/h ⁇ 50 ⁇ m/h.
  • the average contact length b of the abrasive tip is 50nm ⁇ 1000nm.
  • the average contact length b of the abrasive tip can be measured by the final limit scratch and the corresponding optimal roughness.
  • the optimal roughness after abrasive grinding and polishing in water-based two-phase flow finishing technology The degree Ra is 0.05 ⁇ m to 1 ⁇ m, so the contact length b of the abrasive grain tip is 50 nm to 1000 nm.
  • the liquid phase density ⁇ l is 1200Kg/m 3 ⁇ 1500Kg/m 3 . For water-based liquid phase, it is generally 1500Kg/m 3 .
  • the abrasive solid phase density ⁇ p is 2200Kg/m 3 ⁇ 3300Kg/m 3 .
  • the specific value varies with different solid abrasive grains.
  • the yield limit ⁇ w of the workpiece material can be obtained by looking up the table.
  • t is the initial time period, that is, calculated through the initial average roughness and the average cutting depth of the abrasive tip.
  • the pressure increase ratio ⁇ under saturated flow needs to be greater than 1, generally between 50 and 400.
  • the meaning of the pressure increase ratio of the saturated flow rate here refers to the ratio of the fluid input into the inner flow channel from the front end of the inner flow channel to the cross-sectional area of the inner cavity of the pipeline at the front end of the inner flow channel and the internal flow channel.
  • the cylinder is the front end and the inner flow channel is the rear end. Then the ratio of the cross-sectional area of the cylinder to the inner flow channel is 50 to 400. The specific value depends on the actual situation.
  • the above method solves the problem of presetting the processing parameters of fine internal flow channels, making the finishing method efficient, safe and reliable.
  • the value of the predetermined pressure P can also be obtained through trial methods. It only needs to satisfy the requirement that the smoothing medium flows at a flow rate of >5m/s inside the fine inner flow channel. For example, a smaller value can be estimated based on experience. The lower limit value, and then continue to try until the flow rate requirements are met, but this method is less efficient, or a data table can be calculated and made based on the formula or test data, and then the finishing process only requires table lookup. Can. After long-term experiments, the inventor obtained the engineering parameters of the finishing method corresponding to titanium alloy/high-temperature alloy/steel, as shown in Table 4 below.
  • the corresponding predetermined pressure is 50% to 70% lower than the predetermined pressure P corresponding to titanium alloy/high temperature alloy/steel materials in Table 4.
  • the above-described tackifier for providing the water-based liquid phase of the finishing medium with a certain viscosity may include a polymer tackifier, preferably a long-chain polymer flexible polyethylene oxide and polyethylene oxide.
  • a polymer tackifier preferably a long-chain polymer flexible polyethylene oxide and polyethylene oxide.
  • the adhesive is especially suitable for structures with fine internal flow channels including S-shaped bends, L-shaped bends, U-shaped bends, O-shaped bends, and spiral bends that are oriented in three-dimensional space.
  • the turbulent drag reduction effect of the polymer thickening agent can ensure During the smoothing process of structures including S-shaped bends, L-shaped bends, U-shaped bends, O-shaped bends, and spiral bends in three-dimensional space, the liquid will not be significantly reduced due to the increase in resistance along the inner flow channel. Its own flow rate ensures that the difference between the worst roughness and the best roughness in each area is within 30%, achieving a better uniform finishing effect. It can be understood that for a relatively simple structure, such as a linear internal flow channel, there is no need to use a polymer tackifier.
  • a lubricant can also be added to the finishing medium.
  • the mass concentration of the lubricant is 1g/L to 10g/L.
  • the lubricant can be MoS2, graphite powder, talc powder, tetraboron nitride, and calcium fluoride. , barium fluoride, lead oxide and other elemental or inorganic substances, and organic polymer compounds such as polytetrafluoroethylene and polyimine can also be used.
  • One or more combinations of MoS 2 and graphite powder are preferred.
  • the lubricant should ensure that the flow rate and pressure of the smoothing medium during smoothing will not suddenly decrease by more than 5% due to possible blockage of abrasive particles, ensuring smooth smoothing.
  • additives with the following mass concentrations can also be added to the liquid phase of the finishing medium, for example: rust inhibitor 1g/L ⁇ 5g/L, to prevent the water-based liquid phase from rusting the parts to be processed
  • rust inhibitor 1g/L ⁇ 5g/L to prevent the water-based liquid phase from rusting the parts to be processed
  • the role of the dispersant is 20g/L ⁇ 30g/L, which can well disperse the solid phase abrasive particles and various added substances in the finishing medium into the liquid phase, especially well disperse into the water-based
  • antifreeze is 1g/L ⁇ 2g/L to prevent the finishing medium from freezing due to low temperature and thus reducing the flow rate or affecting the finishing process.
  • the fine internal flow channel workpiece obtained by the finishing method introduced in the above embodiment is a high-temperature alloy fuel nozzle for additive manufacturing of an aerospace engine.
  • the oil path is a fine internal flow channel with a diameter less than 2.5mm and a long diameter.
  • the ratio is greater than 50:1, and the optimal surface roughness Ra is less than or equal to 1.6 ⁇ m.
  • the optimal surface roughness Ra is less than or equal to 1.6 ⁇ m.
  • the turning points of the first turning structure 11 are 111 and 112, the turning radius is R1, and the turning angle a1 is an acute angle.
  • the turning points of the second turning structure 12 are 121 and 122, the turning radius is R2, and the turning point is R2.
  • Angle a2 is a right angle
  • the turning points of the third turning structure are 131 and 132
  • the turning radius is R3, and the turning angle a3 is an obtuse angle.
  • the turning angle of the L-shaped bend 102 is about 90° and the turning radius is about 6 mm.
  • the turning angle of the inflection point 104 of the O-shaped bend 103 and the straight line 101 is about 60° and the turning radius is about 8 mm.
  • the turning angle of the O-shaped bend 103 is 180°, and the turning radius is about 15mm.
  • the material is high temperature alloy.
  • Step 1 Preparation of finishing medium, first add antifreeze, defoaming agent, rust remover, dispersant and lubricant to deionized water in sequence; test with Ubbelohde viscometer, slowly increase Adjust the water-based viscosity of the tackifier to 50cP, then test and process the inner flow channel of the part to be processed, read the flow rate or flow data and record it as the standard value, continue to increase the tackifier by 1g/L and the corresponding viscosity increment of about 10cP, continue Test and process the internal flow channel of the parts to be processed until the initial flow rate or flow rate data is lower than the standard value by 1% to 5%.
  • the concentration of the thickening agent is optimal, the viscosity of the corresponding smoothing medium is optimal, and the fuel nozzle is optimal after testing.
  • the added amount of tackifier is 4g/L ⁇ 5g/L, that is, the viscosity of the liquid phase of the finishing medium is 90cP ⁇ 100cP.
  • any lower limit value should be conservatively selected without exceeding the upper limit value.
  • the abrasive particle size is optimal at this time.
  • the abrasive particle size d is 30 ⁇ m to 32 ⁇ m.
  • the mass concentration of abrasive particles first select the lower limit of the abrasive particle mass concentration to be 10g/L to test the inner flow channel of the part to be processed, and read the standard value of the flow rate or flow data.
  • the abrasive particle mass concentration is 10g/L Based on this, add 2g/L to 5g/L, and continue to test the internal flow channel of the parts to be processed until the flow rate or flow data is lower than the standard value by 1% to 5%.
  • the abrasive particle mass concentration is optimal.
  • the optimal abrasive particle mass concentration is 20 ⁇ 22g/L.
  • the port diameter of the inner flow channel of the test piece was tested with a plug gauge.
  • ⁇ is the port diameter expansion value.
  • the smoothed fuel nozzle is split along the axis of the flow channel using wire cutting, and further enlarged to obtain what is shown in Figure 6C.
  • the inner surface of the flow channel can be clearly seen to be flattened close to the machined surface and significant cracks. Finishing effect, smooth and bright surface.
  • the target product of this embodiment is an inner flow channel 200 of a certain type of heat exchanger.
  • the inner flow channel to be finished is processed using laser additive manufacturing technology.
  • the turning angle is about 60°, that is, the turning angle of the first turning structure 2031 and the second turning structure 2032 of the S-shaped bend 203 shown in Figure 7A is 60°, the turning radius is about 6mm, and the turning angle of the L-shaped bend 202 is 90°, the U-shaped bend 204 is a structure including two consecutive symmetrical L-shaped bends 202.
  • the material is aluminum alloy.
  • Step 1 It is similar to the first embodiment and will not be described again here.
  • the viscosity of the liquid phase of the smoothing medium that obtains two-phase flow is 100 ⁇ 120cP
  • the optimal abrasive particle mass concentration is 30g/L ⁇ 35g/L.
  • the predetermined pressure used for the inner flow channel structure of the second embodiment is 21.2MPa.
  • the first turn of the S-shaped bend attached to the U-shaped bend 204 Taking the area near structure 2031 as an example, there is an obvious “orange peel effect" on the surface after processing, and the roughness improvement is not significant. The reason is that the inventor later calculated and found that the flow rate of the finishing medium is 4.2m/s, which cannot reach the critical flow rate of non-Newtonian fluid > 5m/s.
  • the target product of this embodiment is an inner flow channel 300 of a certain type of hydraulic assembly.
  • the inner flow channel to be finished is processed using laser additive manufacturing technology.
  • the meaning of S-shaped bend 302 here is composed of multiple continuous L-shaped bends.
  • Ladder structure, the turning angle of L-shaped bend 303 is about 90° for the inner bend and about 60° for the outer bend.
  • Step 1 It is similar to the first embodiment and will not be described again here.
  • the viscosity of the liquid phase of the smoothing medium that obtains two-phase flow is 120cP ⁇ 150cP
  • the optimal abrasive particle mass concentration is 30 ⁇ 35g/L.
  • the unilateral thinning rate during processing is 50 ⁇ m/h
  • that is, the final limit scratch and the corresponding optimal roughness Ra are 1 ⁇ m
  • the water-based liquid phase density ⁇ l 1500Kg/ m 3
  • abrasive solid phase density ⁇ p 3300Kg/m 3
  • titanium alloy material yield limit ⁇ w 600MPa
  • initial time period t 0.5h
  • supercharging rate ⁇ 65.
  • P 40MPa
  • ⁇ is the port diameter expansion value.
  • ⁇ 0.2mm.
  • Step 6 Ultrasonically clean the parts for 10 minutes, blow dry with an air gun, and finally dry in a drying box to complete the final cleaning.
  • FIG 8B use wire cutting to split the inner surface of the flow channel of a certain type of hydraulic component after polishing along the axis of the flow channel. Further enlarge it to obtain what is shown in Figure 8C. You can clearly see the flattening close to the machined surface. And obvious finishing effect, the surface is smooth and bright. After metallographic examination, the additive manufacturing powder is free of residue, embedded and semi-sintered.
  • the target product of this embodiment is a certain type of restrictor inner flow channel 400.
  • the material is stainless steel.
  • Step 1 It is similar to the first embodiment and will not be described again here.
  • the viscosity of the liquid phase of the smoothing medium that obtains two-phase flow is 50cP ⁇ 60cP
  • the optimal abrasive particle mass concentration is 10g/L ⁇ 12g/L.
  • a plug gauge test was performed on the port diameter of the inner flow channel of the test piece.
  • ⁇ is the port diameter expansion value.
  • the target product of this embodiment is an aerospace engine high-temperature alloy hollow blade 500.
  • the blade body is formed by precision casting, and the air film hole 501 is opened by electric discharge machining.
  • the aperture of the air film hole 501 is 0.3 mm to 0.6 mm.
  • the thickness of the remelted layer is 5 ⁇ m.
  • the fine internal flow channels in the blade body are connected to the surface air film holes 501.
  • the hollow blade 500 has an inner cavity structure 502 in which the fine internal flow channels are connected to the air film holes 501.
  • the structural characteristics of the fine internal flow channels are that the diameter D is less than or equal to 3 mm.
  • the total length of the flow channel is 300 mm, and the aspect ratio is greater than or equal to 100. It can be understood that Figure 10A is only for illustration, and the actual number of air film holes 501 is generally much greater than three.
  • the specific finishing method of the air film hole 501 on the blade surface is as follows:
  • ⁇ is the port diameter expansion value.
  • ⁇ 0.01mm
  • the unilateral thinning amount has reached 5 ⁇ m, which meets the requirements for sufficient removal of the remelted layer.
  • the target product of this embodiment is a valve 600 with intersecting deep holes.
  • the internal flow channel to be smoothed adopts machining technology, and deburring of the intersection position of the deep holes is required.
  • the valve 600 includes The first intersecting deep hole group 601 and the second intersecting deep hole group 602.
  • the intersecting deep hole group 601 includes the first deep hole 6011 and the second deep hole 6012.
  • the L-shaped bend 604 formed by the second deep hole 6012 has a turning radius of 0.2 mm.
  • the material is aluminum alloy.
  • Step 6 Ultrasonically clean the parts for 10 minutes, blow dry with an air gun, and finally dry in a drying box to complete the final cleaning.

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Abstract

一种微细内流道的表面光整方法、微细内流道工件以及光整介质。其中，微细内流道的口径小于或等于3mm以及长径比大于或等于50∶1，光整方法包括：采用液体固体两相流光整介质，光整介质的液体相黏度＜1000cP，光整介质的固体相为磨粒（1）；对光整介质施加预定压力，使得光整介质在微细内流道内以＞5m/s的流速流动，并且光整介质在微细内流道的一端流入其内部的流量达到微细内流道的口径所能容纳流量的饱和值，使内流道内部的液压力处于憋压状态。微细内流道的表面光整方法能够实现粗糙表面凸点靶向加工，不受微细内流道的材料限制并且获得表面最优粗糙度与磨粒平均刃尖接触长度范围一致的超镜面质量。

Description

微细内流道的表面光整方法、微细内流道工件及光整介质 技术领域
本发明涉及内流道的精密加工领域，尤其涉及微细内流道的表面光整方法、微细内流道工件及光整介质。
背景技术
具有微细复杂内流道结构的零件在航空航天、船舶、核、汽车、模具等工业领域有着极其广泛的应用，特别是与流体动力系统相关的零部件常常具有微细流道、深小孔及微细流道与深小孔联通等复杂内腔结构，起到对流体的输运、交换或施加液压力等功能，如航空/航天/船舶/汽车各类发动机燃油喷嘴、热交换器、液压组件、油路控制节流器等。
可加工微细复杂内流道的工艺技术包括精密机加工、飞秒/水导/长脉冲激光加工、电火花加工及增材制造(3D打印)等。除增材制造技术外，其他单一工艺加工的微细复杂内流道结构相对简单，且长径比较小，需结合焊接等其他组合工艺才可加工微细复杂内流道。精密机加工的微细复杂内流道会产生毛刺、拐点尖角或接刀台阶等问题；飞秒激光加工的内流道表面会产生粘附的残渣颗粒和表面“台阶”效应；水导/长脉冲激光及电火花加工的内流道表面会产生重熔层；增材制造(3D打印)是一种将复杂三维结构零件模型离散为二维结构进行逐层叠加成形的技术，它使复杂微细复杂内流道零件一体化成型成为可能，因而在航空航天、汽车、模具等工业领域的应用日趋增多。然而，增材制造技术在成型零件过程中因存在温度梯度和逐层成型等自身工艺特点，导致零件内流道表面存在半烧结或粘结的粉末颗粒以及表面“台阶”效应。
机加工毛刺、飞秒激光加工内流道粘附烧结颗粒、增材制造内流道表面粘结粉末等都会影响零件的使用性能和安全性：当内流道中通入的流体与表层高速摩擦造成毛刺、粘附残渣颗粒或粘结粉末脱落时会成为多余物而随流体到处扩散，或堵塞油路或引起机械磨损故障，从而造成重大安全事故；粗糙度大的内表面在长期使用过程中易成为疲劳裂纹源，若是高温油路系统还易导致积碳现象发生；机加工流道表面的刀纹、拐点尖角或接刀台阶，飞秒激光及增材制造加工内流道表面的“台阶”现象等都会导致流体运动过程产生湍流、涡流和流体沿程阻力急剧增加，甚至 造成流体失控，产生振动而降低零件使用寿命。粗糙表面也会使流体中产生大量空化气泡影响燃烧和液力，甚至产生空化腐蚀；对于一些特定材质的零件(如空心叶片)内流道及联通小孔，因重熔层表面易出现微裂纹而导致零件过早失效，因而要求减少重熔层厚度或不允许出现重熔层。
因此，通过精密机加工、飞秒/水导/长脉冲激光加工、电火花加工、增材制造(3D打印)等技术加工流体动力零部件内流道表面时，会带来毛刺、粘结粉末和烧结颗粒等残留物、表面粗糙及重熔层等不利问题，需要采用合适的表面光整技术消除这些不利影响后才能满足产品的性能要求。
但目前可以有效地对微细复杂内流道表面光整的技术尚未出现，以至于目前对于增材制造的微细复杂内流道工件，其内表面的粗糙度一般都只具有增材制造后的原始平均粗糙度Ra≥6.3μm，没有出现内流道的表面最优粗糙度Ra小于或等于1.6μm的产品，对于激光加工、电火花加工的微细复杂内流道工件没有出现内流道的表面最优粗糙度Ra小于或等于0.8μm的产品；以及对于机加工的微细复杂内流道工件没有出现内流道的表面最优粗糙度Ra小于或等于0.4μm的产品，而目前微细复杂内流道若具有S型弯、L型弯、U型弯、O型弯等复杂异形流道，无法采用只能进行直线进给的机加工实现，而只能通过增材制造等方式实现，因此目前也没有出现对于增材制造的微细异形复杂内流道表面最优粗糙度Ra小于或等于1.6μm的产品。
发明内容
本申请的目的在于提供一种微细内流道的表面光整方法、微细内流道工件以及光整介质。
第一方面，本申请提供一种微细内流道的表面光整方法，所述微细内流道的口径小于或等于3mm以及长径比大于或等于50∶1，所述光整方法包括：采用液体固体两相流光整介质，所述光整介质的液体相黏度＜1000cP，所述光整介质的固体相为磨粒；对所述光整介质施加预定压力，使得所述光整介质在微细内流道内以＞5m/s的流速流动，并且所述光整介质在所述微细内流道的一端流入其内部的流量达到所述微细内流道的口径所能容纳流量的饱和值，使内流道内部的液压力处于憋压状态。
本申请实施例的技术方案中，通过采用光整介质的液体相的黏度为小于 1000cP的液体，两相流的光整介质在微细内流道内的流速＞5m/s，以及在微细内流道的一端流入其内部的流量，达到所述微细内流道的口径所能容纳流量的饱和值，内流道内部的液压力处于憋压状态，形成液体载动磨粒对微细内流道高效磨抛的手段，即通过低黏度的液体相、流体流速以及饱和流量这三者的协同作用，解决了微细内流道光整加工的难题。其原理在于，首先，由于低黏度的液体相、光整介质的流动流速以及饱和流量这三者的协同作用，使得光整介质可以流畅地进入微细内流道并且在微细内流道内形成类似于非牛顿流体的状态，流体边界层平行内流道表面，如“刀具般”坚硬的非牛顿流体中磨粒剪切摩擦实现粗糙表面凸点靶向加工，另外，由以上三者的协同作用，还使得光整介质中磨粒与微细内流道表面产生摩擦微切削力，因此可以不受微细内流道的材料限制而能够获得表面最优粗糙度与磨粒平均刃尖接触长度范围一致的超镜面质量。
在一些实施例中，所述光整介质的液体相为水基液体。
在一些实施例中，所述磨粒具有表面尖角结构，磨粒刃尖平均切削深度为1.4nm～14nm，磨粒刃尖平均接触长度为50nm～1000nm。
在一些实施例中，所述光整介质在标准时间段光整所述微细内流道，至所述微细内流道的表面最优粗糙度达到目标值，所述标准时间段通过以下步骤得到：所述光整介质在初始时间段光整所述微细内流道，检测微细内流道的表面最优粗糙度，若表面最优粗糙度符合所述目标值则该初始时间段为所述标准时间段；若表面最优粗糙度未达到所述目标值，则逐次增加步进时间段，直至表面最优粗糙度达到目标值，对应的总时间段即为所述标准时间段；其中，所述初始时间段以及步进时间段根据所述磨粒对应的单边减薄速率以及微细内流道的初始平均表面粗糙度得到。
在一些实施例中，所述预定压力P满足以下公式：
其中，Ra0为微细内流道的初始平均表面粗糙度，Ra为经过光整后微细内流道的表面最优粗糙度的目标值，t为初始时间段。L为磨粒刃尖平均切削深度，b为磨粒刃尖平均接触长度，ρl为水基液体相密度，ρp为磨粒固体相密度、σw为工件材料屈服极限、χ为达到饱和流量的增压比，Re为液体相的雷诺数，l为内流道的长 度，D为内流道的口径，d为磨粒粒径，k为凹凸磨削比系数。
在一些实施例中，所述光整方法还包括，内流道光整后，内流道口径扩大值对应的表面最优粗糙度满足以下公式：
其中，Ra*为内流道光整后端口口径扩大后的表面最优粗糙度，Ra0为微细内流道的初始平均表面粗糙度，δ为端口口径扩大值，k为凹凸磨削比系数。
在一些实施例中，所述光整方法还包括：所述微细内流道的表面最优粗糙度达到目标值后，以所述预定压力往所述微细内流道中注入清洗介质，所述清洗介质与所述光整介质的液体相互溶，直至从所述微细内流道流出的清洗介质出现丁达尔效应为止。
在一些实施例中，所述光整方法还包括：在液体相的黏度、固体相的磨粒粒径、磨粒质量浓度的下限值的基础上，逐渐增加光整介质的液体相的黏度、固体相的磨粒粒径、磨粒质量浓度进行光整，直至两相流的光整介质的流速或流量相比于下限值对应的流速或流量降低了1～5％，得到所述黏度、磨粒粒径、磨粒质量浓度的最佳值范围。
在一些实施例中，所述光整介质在标准时间段光整所述微细内流道，判断所述光整介质在所述微细内流道的流速或流量，若流速或流量达到规定值，则表面最优粗糙度达到所述目标值。
在一些实施例中，所述的微细内流道包括三维空间走向的含S型弯、L型弯、U型弯、O型弯、螺旋弯等转弯结构，所述光整介质的液体相包含有高分子增粘剂。
第二方面，本申请提供一种微细内流道工件，该微细内流道工件经过以上第一方面所述的光整方法得到。
在一些实施例中，所述微细内流道工件具有口径小于或等于3mm，长径比大于或等于50∶1的微细内流道，通过增材制造、铸造、激光加工、电火花加工等得到所述微细内流道工件，所述微细内流道光整后具有表面最优粗糙度Ra小于或等于1.6μm的内表面。
在一些实施例中，所述微细内流道工件具有口径小于或等于3mm，长径比大 与或等于50∶1的微细内流道，通过精密机加工得到所述微细内流道工件，所述微细内流道光整后具有表面最优粗糙度Ra小于或等于0.4μm的内表面。
在一些实施例中，所述微细内流道工件为航空发动机增材制造高温合金燃油喷嘴，所述燃油喷嘴具有所述微细内流道结构，且该微细内流道口径＜2.5mm，结构具有直线、L型弯以及O型弯，所述微细内流道的表面最优粗糙度Ra小于或等于1.6μm；或者所述微细内流道工件为增材制造铝合金热交换器，所述热交换器具有微细内流道结构，口径＜3mm，且该微细内流道结构具有直线、L型弯、S型弯及U型弯，所述微细内流道的表面最优粗糙度Ra小于或等于1.6μm；或者所述微细内流道工件为增材制造钛合金液压组件，所述液压组件具有微细内流道结构，口径为3mm，且该微细内流道结构具有直线、S型弯、L型弯，所述微细内流道的表面最优粗糙度Ra小于或等于1.6μm；或者所述微细内流道工件为增材制造不锈钢节流器，所述节流器具有微细内流道结构，口径＜1mm，且该微细内流道结构具有螺旋型弯，所述微细内流道的表面最优粗糙度Ra小于或等于0.8μm。
在一些实施例中，所述微细内流道工件为航空发动机铸造高温合金空心叶片，所述空心叶片具有所述微细内流道与小孔连通的内腔结构，且光整后小孔内表面最优粗糙度Ra小于或等于0.8μm，无重熔层，孔的倒角半径大于0.1mm。
第三方面，本申请提供一种光整介质，用于以上第一方面所述的光整方法，在所述光整介质包括液体相以及固体相，所述液体相黏度＜1000cP，所述固体相为磨粒。
在一些实施例中，所述光整介质的液体相加入有高分子增粘剂。
在一些实施例中，所述液体相还加入有消泡剂，所述光整方法加工微细内流道的过程中，所述光整介质的表面泡浆的体积与液体相的体积比不超过0.3∶1。
在一些实施例中，所述光整介质的液体相还加入有润滑剂，所述润滑剂包括无机化合物、单质、高分子化合物的一种或多种组合。
附图概述
本发明的上述的以及其他的特征、性质和优势将通过下面结合附图和实施例的描述而变得更加明显，需要注意的是，附图均仅作为示例，其并非是按照等比例的条件绘制的，并且不应该以此作为对本发明实际要求的保护范围构成限制，其中：
图1是根据本申请的一些实施例的光整方法的流程示意图。
图2是根据本申请的一些实施例的光整方法的微切削力的原理示意图。
图3是根据本申请的另一些实施例的光整方法的流程示意图。
图4是根据本申请的又一些实施例的光整方法的流程示意图。
图5是根据本申请的再一些实施例的光整方法的流程示意图。
图6A至图6C是根据本申请的第一实施例的光整方法进行光整的零件图片。
图7A至图7C是根据本申请的第二实施例的光整方法进行光整的零件图片。
图8A至图8C是根据本申请的第三实施例的光整方法进行光整的零件图片。
图9A及图9B是根据本申请的第四实施例的光整方法进行光整的零件图片。
图10A及图10B是根据本申请的第五实施例的光整方法进行光整的零件图片。
图11A以及图11B是根据本申请的第六实施例的光整方法进行光整的零件的零件图片。
图12A以及图12B是根据与本申请第二实施例的光整方法对应的一对比方案的光整方法进行光整的零件图片。
图13是微细内流道的转弯结构的示意图。
本发明的较佳实施方式
下述公开了多种不同的实施所述的主题技术方案的实施方式或者实施例。为简化公开内容，下面描述了各元件和排列的具体实例，当然，这些仅仅为例子而已，并非是对本发明的保护范围进行限制。“一个实施例”、“一实施例”、和/或“一些实施例”意指与本申请至少一个实施例相关的某一特征、结构或特点。因此，应强调并注意的是，本说明书中在不同位置两次或多次提及的“一实施例”或“一个实施例”或“一替代性实施例”并不一定是指同一实施例。此外，本申请的一些实施例、又一些实施例、再一些实施例等表述中的某些特征、结构或特点可以进行适当的组合。
本申请中使用了流程图用来说明根据本申请的实施例的系统所执行的操作。应当理解的是，前面或下面操作不一定按照顺序来精确地执行。也可以将其他操作添加到这些过程中，或从这些过程移除某一步或数步操作。
另外，以下所述的平均粗糙度，即在测量的表面选取多个区域进行测量取平均值，得到该测量表面的平均粗糙度。以下所述的最优粗糙度，即在测量的表面选取多个区域进行测量并取最小值，得到该测量表面的最优粗糙度。例如进行粗糙度测量时， 例如粗糙度测量某个区域可以为长度为8mm的管路段，在测量的管路选取多个长度为8mm的管路段测量并去最小值。
具有微细复杂内流道结构的零件在航空航天、船舶、核、汽车、模具等工业领域有着极其广泛的应用，然而，目前的加工工艺，例如通过精密机加工、飞秒/水导/长脉冲激光加工、电火花加工、增材制造(3D打印)等技术加工流体动力零部件内流道表面时，会带来毛刺、粘结粉末和烧结颗粒等残留物、粗糙表面及重熔层等不利问题，需要采用合适的表面光整技术消除这些不利影响后才能满足产品的性能要求。
目前对于增材制造的微细内流道工件没有出现内流道的表面最优粗糙度Ra小于或等于1.6μm的产品，对于激光加工、电火花加工的微细内流道工件没有出现内流道的表面最优粗糙度Ra小于或等于0.8μm的产品；以及对于机加工的微细内流道工件没有出现内流道的表面最优粗糙度Ra小于或等于0.4μm的产品，而微细内流道若具有S型弯、L型弯、U型弯、O型弯等异形流道结构，无法采用直线进给的机加工实现，而只能通过增材制造等方式实现，因此目前也没有出现对于增材制造的微细内流道表面最优粗糙度Ra小于或等于1.6μm的产品。
发明人经过深入研究，对多种的内流道表面光整方法进行了尝试以及对比，发现对于零件内流道口径较大(＞3mm)、长径比较小(＜50∶1)，且呈近似直线走向时，可采用手工抛磨、化学、电化学、电浆、磁力、磁流变、磨粒流、水射流及超声波等常见方法进行光整，然而，对于内流道口径较小(小于或等于3mm)、长径比较大(大于或等于50∶1)的微细内流道而言：
(1)采用磨粒流技术，利用刚性较大的半固态软性膏体光整介质对内腔通过挤压衍磨机理光整，发明人发现，这种雷诺数极小状态的蠕变流体很难通过复杂长程微细流道实现均匀加工，易于在拐弯及死角堵塞，强行通过会造成流道变形甚至憋裂流道。即使勉强通过长径比≥50∶1内流道时，也会出现随流体行程增加而压力及流速急剧衰减，导致内流道端口“过磨抛”而内部由于压力和流速损失过大而“未磨抛”。此外，不溶于水的胶体磨粒流介质易在内流道拐弯、死角处残留，在完成加工后很难甚至根本无法被彻底清除。
(2)采用磨料水射流技术，也被称为微磨料浆体射流、高速流及高速水粒子光整，通过对水射流喷嘴施加液压力，利用喷嘴喷出带有磨粒的水射流冲击动能冲蚀去除工件表层材料，水射流喷嘴与零件表面保持较短的距离，因此磨料水射流技术很难作用于内流道口径较小(小于或等于3mm)、长径比较大(大于或等于50∶1)的微细内流道；
(3)采用磁力光整技术，其只能对口径＞3mm且呈近直线走向的内流道表面做轻微光亮化加工，而无法对口径小于或等于3mm且呈三维空间走向的含S型弯、L型弯、U型弯、O型弯、螺旋弯微细复杂内流道进行有效的表面光整，其原因在于，磁力光整是利用较大尺寸磁针磨粒的一种柔性加工，其原理是表面凸点和凹点在外加磁场的作用下会被同时加工，因而这些柔性加工手段只能对表面做轻微光亮化改善，即使材料去除量很大也不能显著改善表面的“台阶”效应、降低表面粗糙度及大尺度剥离表面粘附的粉末、颗粒和毛刺改善；另外，这种方法由于受制磁场运动也无法应对零件上呈三维空间走向的复杂内流道光整；
(4)采用化学光整的方法，当内流道口径很小，可容纳的腐蚀溶液较少，化学光整方法的效率会极低甚至局部出现反应气泡塞积而无法光整；
(5)采用电化学、电浆光整及超声波方法，因很难在狭小呈三维空间走向的含S型弯、L型弯、U型弯、O型弯、螺旋弯等流道内放置仿形电极，从而无法光整微细复杂内流道；
另外，对于(4)、(5)，化学、电化学、电浆光整等方法还会对流道基体材料显微组织产生多种腐蚀及变质层缺陷，腐蚀液和反应气体也会对环境和设备有不利影响；同时，(4)、(5)也是一种柔性加工手段，同样会面临(3)类似的缺点，只能对表面做轻微光亮化改善，即使材料去除量很大也不能显著改善表面的“台阶”效应、降低表面粗糙度及大尺度剥离表面粘附的粉末、颗粒和毛刺。
综上所述，发明人经过深入研究发现，上述的加工方法，其对于微细内流道的结构而言，都会面临很难深入微细内流道的内部光整和/或光整质量不理想的问题，因此很难适用于微细内流道的光整加工。
基于以上，发明人进一步深入研究，发明了一种微细内流道的表面光整方法，通过采用黏度为小于1000cP液体相的两相流光整介质，两相流的光整介质在微细内流 道内的流速＞5m/s，以及在微细内流道的一端流入其内部的流量，达到所述微细内流道的口径所能容纳流量的饱和值，内流道内部的液压力处于憋压状态，形成液体相对微细内流道的饱和流量的手段，即通过低黏度的液体相、光整介质的流体流速以及饱和流量这三者的协同作用，解决了微细内流道光整加工的难题。其原理在于，首先，由于低黏度的液体相、流体流速以及饱和流量这三者的协同作用，使得光整介质可以流畅地进入微细复杂内流道并且在微细复杂内流道内形成类似于非牛顿流体的状态，流体边界层平行内流道表面，如“刀具般”坚硬的非牛顿流体中的磨粒剪切摩擦实现表面凸点靶向加工。另外，以上三者的协同作用，使得光整介质中磨粒与微细复杂内流道表面产生的摩擦微切削力，因此可以不受微细复杂内流道的材料限制而能够获得表面最优粗糙度与磨粒刃尖平均接触长度范围一致，甚至可以实现表面最优粗糙度Ra为0.05μm的超镜面质量，这突破了磨粒流、水射流技术的原理的限制，其原理在于，磨粒流技术切削机制为磨粒挤压表面产生的体积力，因此加工硬度低的金属及高分子柔性材料易出现坑和麻点(Ra＞0.8μm)。磨料水射流技术中切削力为磨粒冲击表面产生的冲蚀力，加工软质金属易表面粗化(Ra＞0.8μm)。可以理解到，本申请实施例公开的内流道的表面光整方法，解决了内流道口径较小(小于或等于3mm)、长径比较大(大于或等于50∶1)的微细复杂内流道无法被表面光整的问题，从而得到内表面的表面最优粗糙度Ra小于或等于1.6μm的微细内流道工件，工件可具有呈三维空间走向的含S型弯、L型弯、U型弯、O型弯、螺旋弯的微细复杂内流道工件，例如可以是航空/航天/船舶/汽车各类发动机燃油喷嘴、热交换器、液压组件、油路控制节流器。另外，可以理解到，本申请实施例公开的内流道的表面光整方法，并不限于只能用于微细复杂内流道的工件，也可以用于其他尺寸的内流道件的加工。
需要解释的是，上下文中的术语“口径”、“长度”意味等效口径以及等效长度，长径比即为等效长度与等效口径的比值。等效口径，内流道截面形状可以为圆形、椭圆形等，截面轮廓由闭合曲线(非折线)构成。内流道截面形状也可以为矩形、三角形等，截面轮廓由闭合折线构成。截面轮廓由任意闭合曲线(非折线)或闭合折线构成，由于截面轮廓为不规则的形状，因此引入等效口径，等效口径定义为对于任意截面形状，取一个和任意截面形状的实际截面积相等的理想圆，此理想圆的直径为等效 口径。等效长度指的是内流道中的流体在内流道两个端口之间实际流动所走过的全路程。
根据本申请的一些实施例，参照图1，本申请提供了一种内流道的表面光整方法，包括：
采用液体固体两相流光整介质，所述光整介质的液体相黏度＜1000cP，固体相为磨粒；
对所述光整介质施加预定压力，使得所述光整介质在所述微细内流道内以＞5m/s的流速流动，并且所述光整介质在微细内流道的一端流入其内部的流量，达到所述微细内流道的口径所能容纳流量的饱和值，内流道内部的液压力处于憋压状态；
此处的液体，其具有黏度＜1000cP的性质，本申请中关于黏度的数值的描述，均是指常温下(25摄氏度左右)的乌氏黏度。不同材料、尺寸以及初始平均粗糙度的微细内流道对应的光整方法对应的液体相的黏度的最佳值可以通过在一个下限值的基础上不断增加黏度得到。目前实施例的黏度下限值为50cP左右，发明人经过大量试验数据得到，对于常见的材料例如钛合金、高温合金、钢铁、陶瓷、铝合金、高分子材料等的微细内流道，液体相的黏度至少需要在50cP，光整后才达到粗糙度的目标值。具体得到黏度的最佳值的方法将在后文的实施例中记载，而此处的临界值1000cP也一般并非为最佳值，而是光整介质持续、流畅、稳定地在微细内流道中流动的极限值。
实施例中描述的液体相，以水基液体相为例，在去离子水的基础上加入一定增粘剂使得水基液体具备一定的黏度。采用水基液体的有益效果在于，其成本低易于获得，并且较为环保，且在光整结束后光整介质也容易被清洗。但可以理解到，此处的液体相也不限于水基液体，只要是满足黏度μ＜1000cP的液体即可。
固体相磨粒的材料，可以是常见的磨粒材料，例如碳化物陶瓷：包括碳化硅、碳化钨等；氧化物陶瓷：包括氧化铝、氧化锆、氧化铈等；氮化物陶瓷：包括氮化硼、氮化铬等；天然矿物：包括金刚石/砂、云母、石英、橄榄石等。优选的，可以是金刚石/砂、氧化物陶瓷的一种或者多种组合。
在选择磨粒的粒径和质量浓度时，一般在一个下限值的基础上逐步增加得到最佳值的范围。若磨粒的粒径、质量浓度低于下限值，则无法达到预期的光整效果，即微 细内流道无法达到表面粗糙度的目标值，其原理在于，若粒径过小导致磨粒自身质量过低，无法产生足够的动能实现有效磨抛，若质量浓度过小，则磨削表面加工点位的概率降低导致无法实现有效磨抛，下限值的选取一般较为保守，例如可以是，在不超过粒径上限值的前提下保守的选择任意一个下限值，内流道口径与磨粒的粒径的比值下限通常为20，即内流道口径要保证至少20个磨粒并行通过时不堵塞，即磨粒的粒径的上限通常为内流道口径的1/20，而磨粒的下限值一般为上限值的1/5。磨粒的质量浓度的下限值一般为10g/L，下限值的选择，一般是较为保守的，因为系统的压力较大，若发生磨粒堵塞，会导致工件和系统的报废、甚至出现憋裂和爆炸。因此在规定的下限的基础上，逐步增加磨粒的粒径、磨粒的质量浓度直至发生因磨粒粒径过大或者质量浓度过高产生显著的流阻而引发流速流量的下降、以及磨粒颗粒间的相互碰撞影响流速继而降低流速流量和磨削效果，即最佳值可以在下限值的基础上通过试验得到，具体方法将在后文的实施例中记载。
对所述光整介质施加预定压力，使得所述光整介质在微细内流道内以＞5m/s的流速流动。此处的预定压力，指的是在光整过程的初始状态下使用该压力下使得光整介质在微细内流道的内部就以＞5m/s的流速流动，随着光整的进行，内流道表面粗糙度的降低，同样的压力条件下，光整介质在在微细内流道内的流速会越来越快。可以理解到，由于达到的流速是一个范围，此处的预定压力是一个范围的概念，而不是对光整介质只能施加一个特定值。测量光整介质在微细内流道的内部的流动流速，无法采用浸入式测量，否则磨粒会损坏任何传感器探头。可以采用超声测速的方法，也可以利用黏性流体的哈根-泊阿苏依定律：进行间接的测量；在公式中，其中D是内流道口径，l为微细内流道的长度，p为作用在微细内流道两端的压强差，即液压压力p，Re为雷诺数，um为水基两相流中液体相流速，ρl为液体相的密度，液体相的流速大致等同于光整介质的流速。
光整介质的流速大于5m/s，根据理论上形成非牛顿流体的临界条件以及发明人长期实践得到的临界值。工程流体力学资料表明(例如图书资料：杨树人，汪志明，何光渝，等.工程流体力学[M].石油工业出版社，2006.)，纯水黏度1cP达到非牛顿流体的临界运动流速＞16.6m/s，而本实施例的液体相的黏度的下限值为50cP，大于 1cP，因此非牛顿流体的临界流速是小于16.6m/s的。同时结合实践结果，发明人发现小于5m/s时无法得到理想的加工效果，因此临界值为5m/s。
所述光整介质在微细内流道的一端流入其内部流量，达到所述微细内流道的口径所能容纳流量的饱和值，内流道内部的液压力处于憋压状态，即本领域所称的饱和流量的状态。
此处的容纳流量的饱和值以及饱和流量的状态的含义，为流体流入管道时充满管道截面，管道截面并行容纳流体分子的最大数量。
可以理解到，采用以上实施例的光整方法的有益效果在于：
通过采用光整介质的液体相的黏度为小于1000cP的液体，两相流的光整介质在微细内流道内的流速＞5m/s，以及在微细内流道的一端流入其内部的流量，达到所述微细内流道的口径所能容纳流量的饱和值，内流道内部的液压力处于憋压状态，形成液体相对微细内流道的饱和流量的手段，即通过低黏度的液体相、流体流速以及饱和流量这三者的协同作用，解决了微细内流道光整加工的难题。其原理在于，首先，由于低黏度的液体相、流体流速以及饱和流量这三者的协同作用，使得光整介质为低黏度高流速的状态从而可以流畅地进入微细内流道并且在微细内流道内形成非牛顿流体的状态，流体边界层平行内流道表面，如“刀具般”坚硬的液体相中磨粒剪切摩擦实现表面凸点靶向加工，从原理上克服了柔性加工中表面凸点和凹点被同时加工只能轻微光亮化的问题，同时因为光整介质的磨粒与微细内流道表面摩擦产生的微切削力，因此可以不受微细内流道的材料限制，而能够获得与磨粒刃尖平均接触长度范围一致的表面最优粗糙度，这突破了磨粒流、水射流技术的原理的限制，其原理在于，磨粒流技术切削机制为磨粒挤压表面产生的体积力，因此加工硬度低的金属及高分子柔性材料易出现坑和麻点(Ra＞0.8μm)。磨料水射流技术中切削力为磨粒冲击表面产生的冲蚀力，加工软质金属易表面粗化(Ra＞0.8μm)。另外，低黏度高流速的流体动力学随形加工方式使内流道表面台阶、尖角、几何轮廓曲率等不符合流体工程学的位置被磨抛的更重，拐点、尖边、内流道轮廓曲率及孔型将实现几何学流线型整形，进一步提高内流道的流体运动性能。另外，以上实施例提出了利用光整介质的流速实现类似如刀具般的坚硬的非牛顿流体及磨粒剪切摩擦实现表面凸点靶向加工的临界流速为5m/s。
至于光整介质在微细内流道的加工时间，可以是光整介质在标准时间段光整所述微细内流道，至所述微细内流道的表面最优粗糙度为目标值。此处的标准时间段，可以是预定的连续的一段时间，也可以是间断的多段时间，也可以是开始后非预定的连续的一段时间后，检测到光整介质的流速流量达到微细内流道的表面最优粗糙度为目标值对应的流速流量后，光整过程自动停止，例如承上所述的，在一些实施例中，开始加工后，通过测量光整介质在微细内流道内的流动流速或流量，间接地表征得到表面最优粗糙度，当流速或流量值达到规定值，则对应的表面最优粗糙度对应即达到目标值，此时手动或者自动地停止光整加工。此处的表面最优粗糙度为目标值的含义，并非限定需要直接测量表面最优粗糙度，而也可以间接地表征，例如以上介绍的，可以表征光整介质在微细内流道的内部的流速、流量等等方法。以上目标值指的是设定的表面最优粗糙度值，一般指的就是对微细内流道最终的表面最优粗糙度的要求，但也不排除在以上光整步骤之后继续进一步的光整，此时设定的便不是最终的表面最优粗糙度的要求。
综上，以上实施例介绍的光整方法，通过构建在待加工内流道两端的液压力系统，利用低黏性、高速的固液两相流体、达到待加工内流道饱和流量、两相流中磨粒高速摩擦内流道表面产生的微切削机理等手段的结合，解决了行业中长期存在的口径在小于或等于3mm、长径比大于或等于50∶1的微细内流道光整的难题。
在一些实施例中，参考图2所示的，两相流光整介质的磨粒1的结构可以是具有表面尖角结构2，以起到微切削的作用，磨粒的结构参数可以是，磨粒刃尖平均切削深度L为1.4nm～14nm，磨粒刃尖平均接触长度b为50nm～1000nm。可以理解到，由于单个磨粒的粒径一般较小，因此实际情况下磨粒一般会发生局部团聚，图2所示的磨粒结构模型，并非物理意义上的单个磨粒的原子或者分子，而是发生局部团聚的等效磨粒群。即上述的磨粒刃尖平均切削深度为等效磨粒群的刃尖平均切削深度，磨粒刃尖平均接触长度为等效磨粒群的刃尖平均接触长度，另外，为了清楚的示意磨粒刃尖平均切削深度L以及磨粒刃尖平均接触长度b，图2并非是等比例绘制的。另外，磨粒刃尖平均切削深度L为1.4nm～14nm，磨粒刃尖平均接触长度b为50nm～1000nm并非通过电镜直接观测得到，而是根据发明人长期实践得到的数据经过统计计算得到的。发明人发现，对于采用以上实施例的光整方法，对内流 道的口径的单边减薄速率为5μm/h～50μm/h，对应的每秒单边减薄速率即为1.4nm/s～14nm/s，即等效磨粒群每秒钟接触微细内流道表面的磨粒刃尖平均切削深度为1.4nm/s～14nm/s，即对应磨粒刃尖平均切削深度L为1.4nm～14nm。如此既保证了光整效果，也不至于微切削速度过快而发生过磨抛，满足光整加工的尺寸精度要求，避免超差。发明人还发现，采用以上实施例的光整方法，可以实现的表面最优粗糙度Ra为0.05μm～1μm，磨粒刃尖平均接触长度决定了最终的最优粗糙度，故对应磨粒刃尖平均接触长度为50nm～1000nm。通过大量实践得到等效磨粒群的结构参数，可以对计算预定压力等参数起到重要作用。每秒钟接触微细内流道表面的磨粒刃尖平均切削深度在1.4nm～14nm之间的具体值、磨粒刃尖平均接触长度在50nm～1000nm的具体值，可以根据磨粒的具体粒径近似对应得到，若磨粒的粒径大，那么每秒钟接触微细内流道表面的磨粒刃尖平均切削深度和刃尖接触平均长度对应更大，具体的对应值可以通过长期的实验数据：磨粒粒径对应的单边减薄速率即每秒钟接触微细内流道表面的磨粒刃尖平均切削深度以及磨粒刃尖平均接触长度即光整后的最优粗糙度得到。
在另一些实施例中，参考图3所示的，所述光整介质在标准时间段光整所述微细内流道，该标准时间段的具体值，可以是通过前期试验得到的标准时间段，也可以是现场试验得到的标准时间段。得到该标准时间段的步骤如下：
所述光整介质在初始时间段光整所述微细内流道，检测微细内流道的表面最优粗糙度；若表面最优粗糙度符合所述目标值则该初始时间段为所述标准时间段；若不符合所述目标值，则逐次增加步进时间段，直至表面最优粗糙度达到目标值，对应的总时间段即为所述标准时间段；其中，所述初始时间段以及步进时间段根据所述磨粒磨削的单边减薄速率以及微细内流道的初始表面平均粗糙度得到。
上述的初始时间段，一般是根据微细内流道的初始表面平均粗糙度以及每秒钟接触微细内流道表面的磨粒刃尖平均切削深度计算的。例如零件内流道初始表面平均粗糙度Ra＝10μm，表面凸点和凹点平均高度差约等于10μm，每秒钟接触微细内流道表面的磨粒刃尖平均切削深度为1.4nm～14nm，即单边减薄速率为5μm/h～50μm/h，按照下限5μm/h进行估算，则标准时间段至少为2h，因此将初始时间段设置为2h。而步进时间段的选择，一般是根据零件尺寸公差要求以及单边减薄速率计算，例如 若公差为正负5μm，那么根据单边减薄速率为5μm/h～50μm/h，按照下限5μm/h进行估算，步进时间对应为1h，以避免时间步进过大而导致尺寸超差。
可以理解到，以上过程可以是在光整过程中现场试验得到，即若需要确定某种微细内流道对应的初始时间段，则根据以上方法，通过进行初始时间段以及步进时间段的光整得到标准时间段，并且得到该标准时间段的同时，也完成了该种结构的微细内流道加工。在之后光整该种微细内流道时，标准时间段即可直接对应得到加工总时间。无需再进行初始时间段以及步进时间段的试验。
在一些实施例中，所述光整介质在初始时间段光整所述微细内流道后检测微细内流道的表面最优粗糙度的方法，可以采用通过口径扩大值对应的表面最优粗糙度数值间接检测微细内流道的表面最优粗糙度的方法，满足以下公式：
其中，Ra*是口径扩大后的表面最优粗糙度，Ra0为初始的表面平均粗糙度，δ为端口口径扩大值，一般为0.01mm～0.5mm，k为凹凸磨削比系数，一般为0.2～0.4。此处的凹凸磨削比系数k，表示磨粒在谷的位置相比峰的位置分布概率的比例，可通过谷和峰位置磨削减薄量的比例进行量度。对于机加工的刀具，由于刀具为刚体定位只对凸点指向性加工因此k≈0。对于磨粒流，凸点和谷区都会被磨粒挤压后接触磨削，因此k≈0.6～0.8。化学/电化学/磁力/超声波+磨粒等柔性方式对凸点和谷区均为各向同性加工，因此k≈0.9～1，即加工较长时间即使表面平均减薄量很大但表面粗糙度无法得到显著改善，只能光亮化并留下橘皮状表面形貌。对于以上实施例介绍的两相流光整方法，由于非牛顿流体具有刚体刀具对表面高速剪切运动，因此对凸点具有更高的指向性磨削，k≈0.2～0.4。一般先计算得到表面最优粗糙度目标值对应的目标口径扩大值，对比该初始时间段测量得到实际口径扩大值，若实际口径扩大值为目标口径扩大值的90％以上，则表明该口径扩大值对应的口径扩大后的表面最优粗糙度Ra*符合所述目标值，则该初始时间段为所述标准时间段；若不符合所述目标值，则逐次增加步进时间段，直至表面最优粗糙度达到预定值。
通过口径扩大值对应的表面最优粗糙度间接检测微细内流道的表面最优粗糙度，其检测过程方便，可直接现场检测。
在又一些实施例中，参考图4所示的，光整方法还包括，在微细内流道的表面最优粗糙度为目标值之后，对光整后的微细内流道进行清洗，具体可以包括：
对所述微细内流道从其端口以所述预定压力注入清洗介质，所述清洗介质与所述光整介质的水基液体相互溶，直至从所述微细内流道流出的清洗介质出现丁达尔效应。
清洗介质与水基液体相互溶，例如光整介质为水基两相流，那么清洗介质即对应为去离子水，可以使得光整介质的水基液体相被充分地清理，避免如磨粒流技术导致的在内流道拐弯、死角处残留，在完成加工后很难甚至根本无法被彻底清除的缺陷。而清洗介质的压力与预定压力相同，可以使得清洗介质将光整介质的固体相清除，其原理在于，发明人发现，固体相的残留位置，一般与施加的压力相关，因此施加相同的压力，可以使得清洗介质“找到”残留的固体相以进行清除。
判断清洗是否完成的方法，可以无需对工件拆开观察表征，而是通过表征清洗后微细内流道流出的清洗介质出现丁达尔现象即可。例如可以将流出的清洗介质进入透明排水容器并从透明排水容器排出。此过程透明排水容器中的去离子水始终被聚光灯照射，观察清洗去离子水中的光线状态，若清洗后的去离子水中的聚光灯光线呈现混浊，没有直线乳光柱即丁达尔效应产生，则表明此时清洗尚未完成，继续在添加去离子水，直到透明排水容器中的去离子水中聚光灯光线呈现直线乳光柱即出现丁达尔效应为止。可以理解到，以上清洗过程之后，还可以进行依次进入超声波清洗和烘干箱烘干。
在一些实施例中，参考图5，得到光整介质的水基液体相的黏度，以及固体相的磨粒粒径、磨粒质量浓度的最佳值的步骤可以是：在液体相的黏度、固体相的磨粒粒径、磨粒质量浓度的下限值的基础上逐渐增加光整介质的液体相的黏度、固体相的磨粒粒径、磨粒质量浓度进行光整，直至两相流的光整介质的流速或流量相比于下限值对应的流速或流量降低了1％～5％。
例如对于液体相的黏度而言，在纯水液体相中，采用乌式黏度计测试，缓慢增加增粘剂将水基黏度调节至下限值50cP。然后对待加工的微细内流道工件的内流道进行测试加工，读取光整介质对应的初始的流速或流量数据记为标准值，增加增粘剂1g/L及对应黏度增量约10cP，继续进行待加工的内流道测试加工，重复增加步骤， 直到初始流速或流量数据低于流量或流速标准值1～5％，此时增粘剂浓度为最佳，相应光整介质的黏度最佳。对应微细内流道的不同口径的黏度的最佳值范围可以参见表1。
表1：微细内流道的不同口径对应的光整介质的液体相的黏度的最佳值范围
又例如对于固体相的磨粒粒径而言，在不超过上限值的前提下保守的选择任意一个下限值，按照内流道口径与磨粒的粒径的比值的下限值通常为20，即内流道口径要保证至少20个磨粒并行通过时不堵塞，如此得到对应不同的内流道口径的磨粒粒径的下限值，例如对应内流道口径为3mm，则对应磨粒粒径的上限值为3/20mm，即150μm，在此上限值的基础上，为了保证试验的安全性，一般选取上限值的1/5为下限值，即以30μm的下限值为基础增加磨粒粒径，发明人发现，若磨粒的粒径小于下限值，将导致磨粒自身质量过低，无法产生足够的动能实现高效磨抛。选定磨粒粒径下限后进行试加工，读取光整介质对应的初始的流速或流量数据记为标准值，然后在磨粒粒径下限基础上增加粒径增量1μm～10μm，继续进行待加工的内流道测试加工，重复增加步骤，直到初始流速或流量数据低于流量或流速标准值1～5％，此时磨粒的粒径为最佳值。对应微细内流道的不同口径的磨粒粒径范围可以参见表2。
表2：微细内流道的不同口径对应的光整介质的磨粒粒径的最佳值范围
又例如对于固体相的磨粒质量浓度而言，按照磨粒的质量浓度为10g/L选定质量浓度下限，发明人发现，若低于此质量浓度下限，则由于磨粒表面磨削点位概率降低导致磨削效果不足，选定质量浓度下限后进行试加工，读取光整介质对应的初始的流速或流量数据记为标准值，然后在质量浓度下限基础上增加磨粒质量浓度2g/L～5g/L，继续进行待加工的内流道测试加工，重复增加步骤，直到初始流速或流量数据低于流量或流速标准值1～5％，此时磨粒的质量浓度为最佳值。对应微细 内流道的不同口径的质量浓度范围的最佳值可以参见表3。如表3所示的，发明人发现，对于口径为0.5mm～1mm的较细的微细内流道，磨粒质量浓度最佳值也相应较低，为10g/L～15g/L，而对口径大于1mm的微细内流道，磨粒质量浓度与口径尺寸相关度较低，为10g/L～35g/L。
表3：微细内流道的不同口径对应的光整介质的磨粒质量浓度最佳值范围
可以理解到，以上的最佳值，可以是现场通过加工试验得到，即若需要确定某种微细内流道对应的光整介质的黏度、磨粒粒径、磨粒质量浓度的最佳值，则根据以上方法，通过测试加工得到。在之后光整该种微细内流道时，即可直接应用该最佳值，无需再进行测试加工。
在一些实施例中，预定压力P的数值可以通过以下公式计算得到：
其中，Ra0为内流道初始表面平均粗糙度，Ra为加工后内流道表面最优粗糙度的目标值，L为磨粒刃尖平均切削深度，b为磨粒刃尖平均接触长度，ρl为液体相密度，ρp为磨粒固体相密度、σw为工件材料屈服极限、t为前述的初始时间段，一般可以根据内流道初始表面平均粗糙度以及每秒钟接触微细内流道表面的磨粒刃尖平均切削深度计算得到，χ为内流道达到饱和流量时的增压比，Re为液体相的雷诺数，l为内流道的长度，D为内流道的口径，d为磨粒的粒径，k为凹凸磨削比系数。采用以上参数的含义以及具体值一般为，初始表面平均粗糙度Ra0由于内流道制造后初始各区域表面粗糙度不完全一致，取内流道各区域粗糙度的平均值，通常Ra0数据如下，3D打印6.3μm～30μm，精密铸造3.2μm～6.4μm，机加工0.8μm～1.6μm，激光加工和线切割1.6μm～3.2μm、光整后表面最优粗糙度的目标值Ra(抛光后各区域粗糙度由于初始差异性也不完全一致，取内流道各区域粗糙度的最优值)，通常Ra数据如下，3D打印和精密铸造≤1.6μm，机加工≤0.4μm，激光加工和线切割 ≤0.8μm。微细内流道管长l、管路口径D≤3mm、长径比l/D≥50，雷诺数Re为20～200，可以通过液体相的黏度和流速计算得到、凹凸磨削比系数k为0.2～0.4、磨粒粒径d为5μm～150μm、磨粒刃尖平均切削深度L：1.4nm～14nm，磨粒刃尖平均切削深度L可用单位时间减薄量量度，水基两相流光整技术中内流道单边减薄速率为5μm/h～50μm/h。磨粒刃尖平均接触长度b为50nm～1000nm，磨粒刃尖平均接触长度b可用最终极限划痕及对应最优粗糙度量度，水基两相流光整技术中磨粒磨抛后最优粗糙度Ra为0.05μm～1μm，因此磨粒刃尖接触长度b为50nm～1000nm。液体相密度ρl为1200Kg/m3～1500Kg/m3，对于水基液体相而言，一般为1500Kg/m3，，磨粒固体相密度ρp为2200Kg/m3～3300Kg/m3，具体的值不同的固体磨粒而不同。工件材料屈服极限σw查表可得，t为初始时间段，即通过初始平均粗糙度以及磨粒刃尖平均切削深度计算，饱和流量下的增压比χ需要大于1，一般在50～400之间，此处的饱和流量的增压比的含义，指的是流体从内流道前端管路输入内流道，内流道前端的管路内腔与内流道的截面积的比，例如对于推动抛光介质的缸体与待加工工件的内流道截面积而言，缸体为前端，内流道为后端，则缸体与内流道的截面积的比例为50～400。具体的值根据实际情况而定。
采用以上的方法，解决了微细内流道加工参数预先设定的难题，使得光整方法高效以及安全可靠。可以理解到，预定压力P的数值也可以通过尝试的方法得到，只需要满足使得光整介质在微细内流道的内部以＞5m/s的流速流动即可，例如根据经验估计一个较小的下限值，之后不断尝试直到满足流速要求，但这种方法效率较低，或者可以根据该公式或者试验数据的基础上计算制作一个数据表格，之后进行光整加工只需要进行查表的动作即可。发明人经过长期试验得到了钛合金/高温合金/钢铁对应的光整方法的工程参数，如下表4所示的。
表4：钛合金/高温合金/钢铁对应的光整方法的工程参数
而对于陶瓷/铝合金/高分子材料，对应的预定压力比表4中钛合金/高温合金/钢铁材料对应的预定压力P低50％～70％。
在一些实施例中，上述介绍的用于提供光整介质的水基液体相具有一定黏度的增粘剂可以包括高分子增粘剂，优选的可以是高分子长链柔性的聚氧化乙烯和聚丙烯酞胺等的一种或多种组合，发明人发现，采用高分子增粘剂，随着黏度在一定范围的增加，反而使得内流道各个区域基本等流速及均一的磨抛效果。其原理可能在于，高分子的长链提供了湍流减阻效应，降低液体在内流道中沿程阻力，从而实现内流道各个区域基本等流速及均一的磨抛效果，避免端口与内部存在磨抛效果差异。另外发明人还发现，若采用非高分子的增粘剂，虽然可以增加液体相的黏度，但流道端口与内部磨抛效果差异开始增加，流道端口比内部磨抛效果更重。采用高分子增 粘剂尤其适用于微细内流道包括三维空间走向的含S型弯、L型弯、U型弯、O型弯、螺旋弯的结构，采用高分子增粘剂的湍流减阻效果，可以保证三维空间走向的含S型弯、L型弯、U型弯、O型弯、螺旋弯的结构的光整过程中，使液体不会因在内流道中随着沿程阻力的增加而显著降低自身流速，保证各个区域最劣粗糙度与最优粗糙度差异在30％以内，实现较好的均一光整效果。可以理解到，对于较为简单的结构，例如直线形的内流道，则也可以无需采用高分子增粘剂。
在一些实施例中，光整介质的水基液体相中，除了添加有增粘剂之外，还可以添加消泡剂，使得光整加工的过程中两相流抛光介质表面泡浆的体积与液体相的体积比不超过0.3∶1，如此可以防止泡沫对光整介质的微切削过程和流速流量及压力检测系统产生干扰。消泡剂可选用非硅型，包括醇类、脂肪酸、脂肪酸酯、磷酸酯类、矿物油类、酰胺类等有机物。聚醚型，包括环氧乙烷、环氧丙烷的共聚物。有机硅型，包括聚二甲基硅氧烷和二甲基硅油。优选月桂酸、聚合环氧丙烷等的一种或多种组合，消泡剂质量浓度为1g/L～5g/L。
在一些实施例中，光整介质中还可以加入润滑剂，润滑剂质量浓度为1g/L～10g/L，润滑剂可选用MoS2、石墨粉、滑石粉、一氮化四硼、氟化钙、氟化钡、氧化铅等单质或无机物，也可选用聚四氟乙烯、聚亚胺等有机高分子化合物。优选MoS2、石墨粉的一种或多种组合，润滑剂应保证光整介质在进行光整时的流速流量和压力不会出现因磨粒可能的堵塞而突然降低5％以上，保证了光整加工过程的可靠性。另外，在一些实施例中，光整介质的液体相中还可以加入以下质量浓度的添加剂，例如：防锈剂1g/L～5g/L，以起到防止水基液体相对待加工零件的锈蚀的作用，分散剂20g/L～30g/L，以起到将光整介质中的固体相磨粒、以及各种添加的物质良好地分散于液体相中，尤其是良好地分散于水基的体系中，防冻剂1g/L～2g/L，以防止由于低温导致光整介质的结冰进而降低流速或者流量影响光整加工。
承上所述的，通过以上实施例介绍的光整方法可以得到一种微细内流道工件，其具有的微细内流道口径小于或等于3mm、长径比大等于50∶1，表面最优粗糙度Ra甚至可达0.05μm，由于其很低的表面粗糙度，避免了内流道中通入的流体与表层高速摩擦造成毛刺、粘附残渣颗粒或粘结粉末脱落成为多余物而随流体到处扩散，或者堵塞流道的问题，也避免了粗糙度大的内表面在长期使用过程中易成为疲劳裂纹 源，若是高温油路系统还易导致积碳现象发生。也避免了内流道表面的“台阶”现象等导致流体运动过程产生湍流、涡流和流体沿程阻力急剧增加，甚至造成流体失控，产生振动而降低零件使用寿命；也避免了微细内流道的流体中产生大量空化气泡影响燃烧和液力，甚至产生空化腐蚀。例如在一些实施例中，通过以上实施例介绍的光整方法得到微细内流道工件为航空发动机增材制造高温合金燃油喷嘴，其油路为微细内流道，口径小于2.5mm，且长径比大于50∶1，表面最优粗糙度Ra小于或等于1.6μm，另外，由于光整后达到如此低的表面最优粗糙度，表明光整过程中已经将零件内流道表面存在半烧结或粘结的粉末颗粒去除。与未经光整的增材制造的燃油喷嘴相比，可以避免当内流道中通入的燃油与表层高速摩擦造成毛刺、粘附残渣颗粒或粘结粉末脱落时成为多余物而随流体到处扩散，或堵塞油路或引起机械磨损故障，从而造成重大安全事故；也避免了粗糙度大的内表面在长期使用过程中易成为疲劳裂纹源，若是高温油路系统还易导致积碳现象发生；也避免了内流道表面的“台阶”现象导致流体运动过程产生湍流、涡流和流体沿程阻力急剧增加，甚至造成流体失控，产生振动而降低零件使用寿命。也避免了粗糙表面也会使流体中产生大量空化气泡影响燃烧和液力，甚至产生空化腐蚀。
例如在一些实施例中，通过以上实施例介绍的光整方法得到的微细内流道工件为航空发动机铸造空心叶片，其与叶片表面小孔联通的冷却孔道为微细内流道，长径比大于50∶1，叶片表面小孔孔径0.3mm～0.6mm，且小孔的内壁粗糙度Ra小于或等于0.8μm，无重熔层，孔的倒角大于0.1mm，如此可以避免因重熔层表面易出现微裂纹而导致零件过早失效，延长了空心叶片的寿命并提高了气动性能。
为了更加清楚地说明本申请的效果，以下列出六个具体的微细内流道工件采用以上实施例介绍的光整方法的例子。需要注意的是，图6A、图7A、图8A、图9A、图10A、图11A所示的零件的结构示意图，并非等比例绘制。
第一实施例
如图6A所示的，本实施例的目标产品为某型航空发动机燃油喷嘴100，待进行光整加工的内流道采用激光增材制造技术，微细内流道的口径D＝1.3mm～1.4mm，流道总长度为130mm～140mm，长径比为100，包含直线101、L型弯102及以及O型弯103的结构。对于转弯结构，如图13所示的，其参数主要包括转弯半径以及 转弯角，转弯点为沿轴线(直线)初始发生偏转的点，转弯角为相邻两个转弯点之间弧长所对应的圆心角，转弯半径定义为相邻两个转弯点之间弧长所对应的曲率半径。如图13所示的，第一转弯结构11的转弯点为111、112，转弯半径为R1，转弯角a1为锐角，第二转弯结构12的转弯点为121、122，转弯半径为R2，转弯角a2为直角，第三转弯结构的转弯点为131、132，转弯半径为R3，转弯角a3为钝角。如图6A所示的，L型弯102的转弯角约为90°，转弯半径约为6mm，O型弯103和直线101的拐点104的转弯角为约为60°，转弯半径约为8mm，O型弯103的转弯角为180°，转弯半径半径约为15mm。材料为高温合金。具体光整方法如下：第一步：光整介质的制备，先依次将防冻剂、消泡剂、除锈剂、分散剂和润滑剂添加到去离子水中；通过乌式黏度计测试，缓慢增加增粘剂将水基黏度调节为50cP，然后对待加工零件内流道进行测试加工，读取流速或流量数据记为标准值，继续增加增粘剂1g/L及对应黏度增量约10cP，继续进行待加工零件内流道测试加工，直到初始流速或流量数据低于标准值1％～5％，此时增粘剂浓度为最佳，相应光整介质黏度最佳，经试验燃油喷嘴最佳增粘剂添加量4g/L～5g/L，即光整介质的液体相的黏度为90cP～100cP。类似地，对于磨粒粒径，在不超过上限值的前提下保守的选择任意一个下限值，按照内流道口径与磨粒的粒径的比值的下限值通常为20，即内流道口径要保证至少20个磨粒可以并行通过时不堵塞，即粒径的上限值为70μm，粒径的下限值为13μm。然后用粒径下限值对待加工零件内流道进行测试加工，读取流速或流量数据记为标准值，在初始粒径基础上增加1μm～10μm，继续进行待加工零件内流道测试加工，直到初始流速或流量数据低于标准值1％～5％，此时磨粒粒径为最佳，经试验得到磨粒粒径d为30μm～32μm。类似地，对于磨粒的质量浓度，首先选择磨粒质量浓度下限值为10g/L对待加工零件内流道进行测试加工，读取流速或流量数据标准值，在磨粒质量浓度10g/L基础上增加2g/L～5g/L，继续进行待加工零件内流道测试加工，直到流速或流量数据低于标准值1％～5％，此时磨粒质量浓度为最佳。经试验最佳磨粒质量浓度为20～22g/L。在去离子水中将以上所有物质添加后，两相流光整介质制备完毕，在设备料缸中添加光整介质。第二步：将与该燃油喷嘴有关的具体的特征参数，管长l＝130mm～140mm，管路口径D＝1.3mm～1.4mm，长径比l/D＝100，初始平均粗糙度Ra0＝10μm，光整后最优 粗糙度的目标值Ra＝1.6μm，雷诺数Re＝120，凹凸磨削比系数k＝0.3、磨粒平均粒径d＝30μm，该粒径对应的磨粒刃尖平均切削深度L＝3.3nm，即加工过程中单边减薄速率约为12μm/h，磨粒刃尖接触长度b＝500nm，即最终极限划痕及对应最优粗糙度Ra为0.5μm、水基液体相密度ρl＝1500Kg/m3、磨粒固体相密度ρp＝3300Kg/m3、高温合金材料屈服极限σw＝300MPa、初始时间段加工时间t＝1h，增压倍率χ＝145。将以上参量带入如下公式：
计算并获得预定压力P＝46.7MPa。
第三步：将第二步中预定压力P＝46.7MPa和加工时间1h输入设备中进行试制加工。试制加工结束后对试验件内流道端口口径进行塞规检测，δ为端口口径扩大值，检测后发现δ＝0.04mm，未能达到如下公式按Ra＝1.6μm计算后的口径扩大理论值δ＝0.096mm。说明内流道粗糙度未达到所述光整后期望最优粗糙度Ra＝1.6μm。
第四步：继续增加步进时间1h，最终累计总加工时间8小时达到口径扩大理论值δ＝0.096mm。
第五步：在设备中输入时间段8小时和预定压力P＝46.7MPa进行正式加工，当加工达到8小时设备自动停机加工结束。
第六步：加工结束后，吸出料缸中的光整介质并将料缸清洁，重新将0.1μs/cm～10μs/cm净洁度的去离子水作为清洁介质添加到料缸中。将压力设定为P＝46.7MPa，开启设备施加该压力至去离子水进行去离子水加工清洁，经过内流道排出的去离子水直到聚光灯光线照射出现直线乳光柱即丁达尔效应时，清洗结束。第七步：将零件超声波清洗10分钟，气枪吹干，最后烘干箱烘干，完成最终清洗。如图6B所示的，将光整后的燃油喷嘴使用线切割沿流道轴线劈开，进一步放大得到图6C所示的，流道内表面可清楚看到接近机加面的平坦化及显著的光整效果，表面光滑亮丽。经金相检测无残留、镶嵌及半烧结的增材制造粉末，经粗糙度检测最优粗糙度Ra＝1.3μm，达到Ra＜1.6μm目标要求。
第二实施例
如图7A所示的，本实施例的目标产品为某型热交换器内流道200，待进行光整加工的内流道采用激光增材制造技术，结构特征为微细内流道的口径D＝2.3mm～2.4mm，流道总长度l＝500mm，长径比l/D＝208，包含直线201、L型弯202、S型弯203及U型弯204的结构，S型弯203的转弯角约为60°，即图7A所示的S型弯203的第一转弯结构2031、第二转弯结构2032的转弯角为60°，转弯半径约为6mm，L型弯202的转弯角为90°，U型弯204即为包括两连对称L型弯202的结构。材料为铝合金。具体加工方法如下：
第一步：如第一实施例类似，此处不再赘述。得到两相流的光整介质的液体相的黏度为100～120cP，磨粒粒径为d＝50μm～52μm，最佳磨粒质量浓度为30g/L～35g/L。第二步：将与该热交换器内流道有关的具体的特征参数，管长l＝500mm，管路口径D＝2.3mm～2.4mm，长径比l/D＝208，初始平均粗糙度Ra0＝25μm，光整后最优粗糙度的目标值Ra＝1.6μm，雷诺数Re＝60，凹凸磨削比系数k＝0.2，磨粒粒径d＝50μm，对应磨粒刃尖平均切削深度L＝10nm，即加工过程中单边减薄速率为35μm/h，磨粒刃尖平均接触长度b＝800nm，即最终极限划痕及对应最优粗糙度Ra为0.8μm、水基液体相密度ρl＝1500Kg/m3、磨粒固体相密度ρp＝3300Kg/m3、铝合金材料屈服极限σw＝100MPa、初始时间段的加工时间t＝1h，增压倍率χ＝87，类似地，将以上参量代入以下公式：
计算并获得预定压力P＝51.5MPa。
第三步：将第二步中预定压力P＝51.5MPa和初始时间段1h输入设备中进行试制加工。试制加工结束后对试验件内流道端口口径进行塞规检测，δ为端口口径扩大值，检测后发现δ＝0.22mm，达到如下公式按Ra＝3.2μm计算后的口径扩大理论值δ＝0.234mm的90％以上，说明内流道光整加工总时间1小时达到所述光整后期望最优粗糙度的目标值Ra＝1.6μm。
第四步：在设备中输入标准时间段1小时和预定压力P＝51.5MPa进行正式加工，当加工达到标准加工时间时设备自动停机加工结束。
第五步：加工结束后，吸出料缸中的光整介质并将料缸清洁，重新将0.1μs/cm～10μs/cm净洁度的去离子水作为清洁介质添加到料缸中。将压力设定为P＝51.5MPa，开启设备施加该压力至去离子水，进行去离子水加工清洁，经过内流道排出的去离子水直到聚光灯光线照射出现直线乳光柱即丁达尔效应时，清洗结束。
第六步：将零件超声波清洗10分钟，气枪吹干，最后烘干箱烘干，完成最终清洗。如图7B所示的，将光整后的某型热交换器使用线切割沿流道轴线劈开，进一步放大得到图7C所示的，流道内表面可清楚看到接近机加面的平坦化及显著的光整效果，表面光滑亮丽。经金相检测无残留、镶嵌及半烧结的增材制造粉末，经粗糙度检测最优粗糙度Ra＝1.08μm，达到Ra小于或等于1.6μm目标要求。
另外，在一个对比方案中，如第二实施例的内流道结构用的预定压力为21.2MPa，参考图12A、图12B所示的，以U型弯204附件的S型弯的第一转弯结构2031附近的区域为例，加工后表面出现明显的“橘皮效应”，粗糙度改善不显著。其原因在于，发明人之后经过计算，发现光整介质的流速为4.2m/s，达不到非牛顿流体的临界流速＞5m/s，无法实现只对凸点的靶向磨削，只能对表面高点低点一起磨，表面留下显著的“橘皮效应”，无法实现流速＞5m/s时的只对凸点靶向磨削的加工效果。
第三实施例
如图8A所示的，本实施例的目标产品为某型液压组件内流道300，待进行光整加工的内流道采用激光增材制造技术，结构为微细内流道的口径D＝3mm，流道总长度l＝150mm，长径比l/D＝50，包含直线301、S型弯302及L型弯303，此处的S型弯302的含义为多个连续L型弯组成的阶梯结构，L型弯303的转弯角为内弯为90°左右，外弯为60°左右，此处的内、外的含义为流体运动转弯时距离转弯区域圆心的距离远近，靠近圆心的为内弯，远离圆心的为外弯。例如图8A所示的，L型弯303的第一转弯结构3031的内弯30311为90°左右，外弯30312为60°左右，L型弯303的第二转弯结构3032的内弯30321为90°左右，外弯30322为60°左右，转弯半径约为10mm左右，材料为钛合金。具体光整方法如下：
第一步：如第一实施例类似，此处不再赘述。得到两相流的光整介质的液体相的黏度为120cP～150cP，磨粒粒径为d＝100μm～120μm，最佳磨粒质量浓度为30～35g/L。第二步：将与该液压组件内流道有关的具体的特征参数，管长l＝150mm，管路口径D＝3mm，长径比l/D＝50，初始平均粗糙度Ra0＝25μm，光整后期望最优粗糙度的目标值Ra＝3.2μm，雷诺数Re＝50，凹凸磨削比k＝0.1、磨粒粒径d＝100μm、对应磨粒刃尖平均切削深度L＝14nm，即加工过程中单边减薄速率为50μm/h，磨粒刃尖平均接触长度b＝1000nm，即最终极限划痕及对应最优粗糙度Ra为1μm、水基液体相密度ρl＝1500Kg/m3、磨粒固体相密度ρp＝3300Kg/m3、钛合金材料屈服极限σw＝600MPa、初始时间段t＝0.5h，增压倍率χ＝65。将以上参量带入如下公式：
计算并获得预定压力P＝40MPa。
第三步：将第二步中预定压力P＝40MPa和初始时间段0.5h输入设备中进行试制加工。试制加工结束后对试验件内流道端口口径进行塞规检测，δ为端口口径扩大值，检测后发现δ＝0.2mm，达到如下公式按Ra＝3.2μm计算后的口径扩大理论值δ＝0.194mm。说明内流道粗糙度加工总时间0.5小时基本达到所述光整后期望最优粗糙度的目标值Ra＝3.2μm。
第四步：在设备中输入标准时间段0.5小时和预定压力P＝40MPa进行正式加工，当加工达到标准加工时间0.5小时设备自动停机加工结束。
第五步：加工结束后，吸出料缸中的光整介质并将料缸清洁，重新将0.1μs/cm～10μs/cm净洁度的去离子水添加到料缸中。将压力设定为P＝40MPa，开启设备施加该压力至去离子水，进行去离子水加工清洁，经过内流道排出的去离子水直到聚光灯光线照射出现直线乳光柱即丁达尔效应时，清洗结束。
第六步：将零件超声波清洗10分钟，气枪吹干，最后烘干箱烘干，完成最终清洗。参考图8B所示的，使用线切割沿流道轴线劈开光整后的某型液压组件内流道的内表面，进一步放大得到图8C所示的，可清楚看到接近机加面的平坦化及显著的光整效果，表面光滑亮丽。经金相检测无残留、镶嵌及半烧结的增材制造粉末，经粗 糙度检测最优粗糙度Ra＝2.6μm，达到Ra小于或等于3.2μm目标要求。
第四实施例
如图9A所示的，本实施例的目标产品为某型节流器内流道400，其待进行光整的内流道采用激光增材制造技术，结构为微细内流道的口径D＝0.5mm，流道总长度l＝200mm，长径比l/D＝400，包含螺旋型弯401的结构，转弯角为180°，转弯半径为5.5mm。材料为不锈钢。具体加工方法如下：
第一步：如第一实施例类似，此处不再赘述。得到两相流的光整介质的液体相的黏度为50cP～60cP，磨粒粒径为d＝5μm～6μm，最佳磨粒质量浓度为10g/L～12g/L。第二步：将与该液压组件内流道有关的具体的特征参数，管长l＝200mm，管路口径D＝0.5mm，长径比l/D＝400，初始平均粗糙度Ra0＝6.4μm，光整后最优粗糙度的目标值Ra＝0.8μm，雷诺数Re＝180，凹凸磨削比k＝0.4、磨粒粒径d＝5μm，对应磨粒刃尖平均切削深度L＝2nm，即加工过程中单边减薄速率为7μm/h，磨粒刃尖平均接触长度b＝100nm，即最终极限划痕及对应最优粗糙度Ra为0.1μm、水基液体相密度ρl＝1500Kg/m3、磨粒固体相密度ρp＝3300Kg/m3、不锈钢材料屈服极限σw＝170MPa、初始时间段t＝1h，增压倍率χ＝500。将以上参量带入如下公式：
计算并获得预定压力P＝55MPa。
第三步：将第二步中预定压力P＝55MPa和初始时间段1h输入设备中进行试制加工。试制加工结束后对试验件内流道端口口径进行塞规检测，δ为端口口径扩大值，检测后发现δ＝0.024mm，未达到如下公式按Ra＝0.8μm计算后的口径扩大理论值δ＝0.075mm。说明内流道粗糙度初始时间段1小时未达到所述光整后最优粗糙度目标值Ra＝0.8μm。
第四步：继续增加加工步进1h，最终累计总加工时间8小时达到口径扩大理论值δ＝0.075mm。
第五步：在设备中输入标准时间段8小时和预定压力P＝55MPa进行正式加工，当 加工达到标准加工时间时设备自动停机加工结束。
第六步：加工结束后，吸出料缸中的光整介质并将料缸清洁，重新将0.1μs/cm～10μs/cm净洁度的去离子水作为清洁介质添加到料缸中。将压力设定为P＝55MPa，开启设备施加该压力至去离子水，进行去离子水加工清洁，经过内流道排出的去离子水直到聚光灯光线照射出现直线乳光柱即丁达尔效应时，清洗结束。
第七步：将零件超声波清洗10分钟，气枪吹干，最后烘干箱烘干，完成最终清洗。将光整后的工件使用线切割沿零件如图9A中的轴线X1劈开，进一步放大得到如图9B所示的螺旋型弯的流道端口截面为圆形孔群倾斜排列，透过孔内观测流道内表面，可清楚看到接近机加面的平坦化及显著的光整效果，表面光滑亮丽。经金相检测无残留、镶嵌及半烧结的增材制造粉末，经粗糙度检测最优粗糙度Ra＝0.7μm，达到Ra小于或等于0.8μm目标要求。
第五实施例
如图10A所示的，本实施例的目标产品为航空发动机高温合金空心叶片500，叶身由精密铸造成型，气膜孔501采用电火花加工开孔，气膜孔501孔径0.3mm～0.6mm，重融层厚度5μm。叶身中的微细内流道和表面气膜孔501连通，空心叶片500具有微细内流道与气膜孔501连通的内腔结构502，微细内流道结构特征为口径D小于或等于3mm，流道总长度为300mm，长径比大于或等于100，可以理解到，图10A仅为示意，气膜孔501的实际数量一般远大于3个。叶片表面气膜孔501具体光整方法如下：
第一步：如第一实施例类似，此处不再赘述。得到两相流的光整介质的液体相的黏度为50cP～60cP，磨粒粒径为d＝5μm～6μm，最佳磨粒质量浓度为10g/L～12g/L。第二步：将与该液压组件内流道有关的具体的特征参数，叶身的内流道的口径D为3mm，管长l＝300mm，管路长径比l/D＝100，气膜孔口径D＝0.5mm，初始平均粗糙度Ra0＝1.6μm，光整后最优粗糙度的目标值Ra＝0.8μm，雷诺数Re＝180，凹凸磨削比k＝0.4、磨粒粒径d＝5μm，对应磨粒刃尖平均切削深度L＝2nm，即加工过程中单边减薄速率为7μm/h，磨粒刃尖平均接触长度b＝50nm，即最终极限划痕 及对应最优粗糙度Ra为0.05μm、水基液体相密度ρl＝1500Kg/m3、磨粒固体相密度ρp＝3300Kg/m3、不锈钢材料屈服极限σw＝170MPa、初始时间段t＝30min，增压倍率χ＝400。将以上参量带入如下公式：
计算并获得预定压力P＝40MPa。
第三步：将第二步中预定压力P＝40MPa和初始时间段30min输入设备中进行试制加工。试制加工结束后对试验件小孔端口口径进行塞规检测，δ为端口口径扩大值，检测后发现δ＝0.01mm，单边减薄量已经达到5μm，达到重融层充分去除的要求，粗糙度达到如下公式按Ra＝0.8μm计算后的口径扩大理论值δ＝0.011mm的90％以上。说明小孔内壁粗糙度达到所述光整后最优粗糙度目标值Ra＝0.8μm。
第四步：在设备中输入预定时间30min和预定压力P＝40MPa进行正式加工，当加工达到标准加工时间时设备自动停机加工结束。
第五步：加工结束后，吸出料缸中的抛光介质并将料缸清洁，重新将0.1μs/cm～10μs/cm净洁度的去离子水添加到料缸中。将压力设定为P＝40MPa，开启设备进行去离子水加工清洁，经过内流道排出的去离子水直到聚光灯光线照射出现直线乳光柱即丁达尔效应时，清洗结束。
第六步：将零件超声波清洗10分钟，气枪吹干，最后烘干箱烘干，完成最终清洗。如图10B所示的，抛光后的小孔局部照片，使用显微镜对表面进行观测，小孔内表面可清楚看到接近机加面的平坦化及显著的抛光效果，表面光滑亮丽，孔口具有较大的光晕，即孔的倒角半径大于0.1mm，防止气体通过时在孔的尖边产生疲劳腐蚀微裂纹。经粗糙度检测最优粗糙度Ra＝0.8μm，达到Ra为0.8μm目标要求。第五实施例与第一至第四实施例不同的是，其目的是加工表面的气膜孔501，而非加工叶身的微细内流道，发明人发现，采用光整微细内流道的光整方法对航空发动机的气膜孔501进行光整，其可以达到完全去除重熔层的效果，并且由于采用流体的加工，光整介质可以顺利从叶身内流道中通过实现最终气膜孔的光整。
第六实施例
如图11A所示的，本实施例的目标产品为具有相交的深孔的阀600，待进行光整加工的内流道采用机加工技术，需要进行深孔相交位置的去毛刺，阀600包括第一相交深孔组601、第二相交深孔组602，相交的深孔组601包括第一深孔6011、第二深孔6012结构特征为微细内流道的口径D＝1.6mm，流道总长度l＝100mm，长径比l/D＝50，包含直线603和L型弯604的结构，L型弯604的转弯角为90°，例如第一相交深孔组601的第一深孔6011、第二深孔6012形成的L型弯604，L型弯的转弯半径为0.2mm。材料为铝合金。具体加工方法如下：
第一步：如第一实施例类似，此处不再赘述。得到两相流的光整介质的液体相的黏度为90cP～100cP，磨粒粒径为d＝40μm～42μm，最佳磨粒质量浓度为20～22g/L。
第二步：将与该相交深孔内流道有关的具体的特征参数，管长l＝100mm，管路口径D＝1.5mm～2mm，长径比l/D＝50，初始平均粗糙度Ra0＝0.8μm，光整后粗糙度目标值Ra＝0.4μm，在40倍显微镜下相交孔位置毛刺充分去除，雷诺数Re＝100，凹凸磨削比系数k＝0.3，磨粒粒径d＝40μm，对应每秒钟接触微细内流道表面的磨粒刃尖平均切削深度L＝3nm，即加工过程中单边减薄速率为11μm/h，磨粒刃尖接触长度b＝200nm，即最终极限划痕及对应最优粗糙度目标值Ra为0.2μm、水基液体相密度ρl＝1500Kg/m3、磨粒固体相密度ρp＝3300Kg/m3、铝合金材料屈服极限σw＝100MPa、初始时间段t＝30min，增压倍率χ＝125，类似地，将以上参量代入以下公式：
计算并获得预定压力P＝42MPa。
第三步：将第二步中预定压力P＝42MPa和初始时间段30min输入设备中进行试制加工。试制加工结束后对试验件内流道端口口径进行塞规检测，δ为端口口径扩大值，检测后发现δ＝0.05mm，达到如下公式按Ra＝0.4μm计算后的口径扩大理论值δ＝0.047mm。说明相交深孔内流道粗糙度实际加工时间30min达到所述光整后期望最优粗糙度的目标值Ra＝0.4μm。
第四步：在设备中输入标准时间段30min和预定压力P＝42MPa进行正式加工，当加工达到标准加工时间时设备自动停机加工结束。
第五步：加工结束后，吸出料缸中的光整介质并将料缸清洁，重新将0.1μs/cm～10μs/cm净洁度的去离子水作为清洁介质添加到料缸中。将压力设定为P＝42MPa，开启设备施加该压力至去离子水，进行去离子水加工清洁，经过内流道排出的去离子水直到聚光灯光线照射出现直线乳光柱即丁达尔效应时，清洗结束。
第六步：将零件超声波清洗10分钟，气枪吹干，最后烘干箱烘干，完成最终清洗。将光整后的具有相交的深孔的阀600的相交深孔位置使用线切割沿流道轴线劈开，进一步放大得到如图11B所示的，流道内表面可清楚看到显著的光整效果，表面光滑亮丽，在40倍显微镜下深孔相交位置毛刺充分去除。经粗糙度检测最优粗糙度Ra＝0.4μm，达到Ra为小于或等于0.4μm目标要求。
本发明虽然以上述实施例公开如上，但其并不是用来限定本发明，任何本领域技术人员在不脱离本发明的精神和范围内，都可以做出可能的变动和修改。因此，凡是未脱离本发明技术方案的内容，依据本发明的技术实质对以上实施例所作的任何修改、等同变化及修饰，均落入本发明权利要求所界定的保护范围之内。

Claims (18)

  1. 一种微细内流道的表面光整方法，其特征在于，所述微细内流道的口径小于或等于3mm以及长径比大于或等于50∶1，所述光整方法包括：
    采用液体固体两相流光整介质，所述光整介质的液体相黏度＜1000cP，所述光整介质的固体相为磨粒；
    对所述光整介质施加预定压力，使得所述光整介质在微细内流道内以＞5m/s的流速流动，并且所述光整介质在所述微细内流道的一端流入其内部的流量达到所述微细内流道的口径所能容纳流量的饱和值，使内流道内部的液压力处于憋压状态。
  2. 如权利要求1所述的光整方法，其特征在于，所述光整介质的液体相为水基液体。
  3. 如权利要求1所述的光整方法，其特征在于，所述磨粒具有表面尖角结构，磨粒刃尖平均切削深度为1.4nm～14nm，磨粒刃尖平均接触长度为50nm～1000nm。
  4. 如权利要求3所述的光整方法，其特征在于，所述光整介质在标准时间段光整所述微细内流道，至所述微细内流道的表面最优粗糙度达到目标值，所述标准时间段通过以下步骤得到：
    所述光整介质在初始时间段光整所述微细内流道，检测微细内流道的表面最优粗糙度，若表面最优粗糙度符合所述目标值则该初始时间段为所述标准时间段；若表面最优粗糙度未达到所述目标值，则逐次增加步进时间段，直至表面最优粗糙度达到目标值，对应的总时间段即为所述标准时间段；其中，所述初始时间段以及步进时间段根据所述磨粒对应的单边减薄速率以及微细内流道的初始平均表面粗糙度得到。
  5. 如权利要求3所述的光整方法，其特征在于，所述预定压力P满足以下公式：
    其中，Ra0为微细内流道的初始平均表面粗糙度，Ra为经过光整后微细内流道的表面最优粗糙度的目标值，t为初始时间段，L为磨粒刃尖平均切削深度，b为磨粒刃尖平均接触长度，ρl为水基液体相密度，ρp为磨粒固体相密度、σw为工件材料屈服极限、χ为达到饱和流量的增压比，Re为液体相的雷诺数，l为内流道的长度，D为内流道的口径，d为磨粒粒径，k为凹凸磨削比系数。
  6. 如权利要求1所述的光整方法，其特征在于，还包括，内流道光整后，内流道口径扩大值对应的表面最优粗糙度满足以下公式：
    其中，Ra*为内流道光整后端口口径扩大后的表面最优粗糙度，Ra0为微细内流道的初始平均表面粗糙度，δ为端口口径扩大值，k为凹凸磨削比系数。
  7. 如权利要求1所述的光整方法，其特征在于，还包括：
    所述微细内流道的表面最优粗糙度达到目标值后，以所述预定压力往所述微细内流道中注入清洗介质，所述清洗介质与所述光整介质的液体相互溶，直至从所述微细内流道流出的清洗介质出现丁达尔效应为止。
  8. 如权利要求1所述的光整方法，其特征在于，还包括：
    在液体相的黏度、固体相的磨粒粒径、磨粒质量浓度的下限值的基础上，逐渐增加光整介质的液体相的黏度、固体相的磨粒粒径、磨粒质量浓度进行光整，直至两相流的光整介质的流速或流量相比于下限值对应的流速或流量降低了1％～5％，得到所述黏度、磨粒粒径、磨粒质量浓度的最佳值范围。
  9. 如权利要求1所述的光整方法，其特征在于，所述光整介质在标准时间段光整所述微细内流道，判断所述光整介质在所述微细内流道的流速或流量，若流速或流量达到规定值，则表面最优粗糙度达到目标值。
  10. 如权利要求1所述的光整方法，其特征在于，所述微细内流道包括三维空间走向的含S型弯、L型弯、U型弯、O型弯、螺旋弯转弯结构，所述光整介质的液体相包含有高分子增粘剂。
  11. 一种微细内流道工件，其特征在于，该微细内流道工件经过如权利要求1-10任意一项所述的光整方法得到。
  12. 如权利要求11所述的微细内流道工件，其特征在于，具有口径小于或等于3mm，长径比大于或等于50∶1的微细内流道，通过增材制造、铸造、激光加工、电火花加工得到所述微细内流道工件，所述微细内流道光整后具有表面最优粗糙度Ra小于或等于1.6μm的内表面。
  13. 如权利要求11所述的微细内流道工件，其特征在于，具有口径小于或等于3mm， 长径比大与或等于50∶1的微细内流道，通过精密机加工得到所述微细内流道工件，所述微细内流道光整后具有表面最优粗糙度Ra小于或等于0.4μm的内表面。
  14. 如权利要求11所述的微细内流道工件，其特征在于，所述微细内流道工件为增材制造的航空发动机高温合金燃油喷嘴，所述燃油喷嘴具有所述微细内流道结构，且该微细内流道口径＜2.5mm，结构具有直线、L型弯以及O型弯，所述微细内流道的表面最优粗糙度Ra小于或等于1.6μm；或者
    所述微细内流道工件为增材制造铝合金热交换器，所述热交换器具有微细内流道结构，口径＜3mm，且该微细内流道结构具有直线、L型弯、S型弯及U型弯，所述微细内流道的表面最优粗糙度Ra小于或等于1.6μm；或者
    所述微细内流道工件为增材制造钛合金液压组件，所述液压组件具有微细内流道结构，口径为3mm，且该微细内流道结构具有直线、S型弯、L型弯，所述微细内流道的表面最优粗糙度Ra小于或等于3.2μm；或者
    所述微细内流道工件为增材制造不锈钢节流器，所述节流器具有微细内流道结构，口径＜1mm，且该微细内流道结构具有螺旋型弯，所述微细内流道的表面最优粗糙度Ra小于或等于0.8μm。
  15. 如权利要求11所述的微细内流道工件，其特征在于，所述微细内流道工件为航空发动机铸造高温合金空心叶片，所述空心叶片具有所述微细内流道与小孔连通的内腔结构，且光整后小孔内表面最优粗糙度Ra小于或等于0.8μm，无重熔层，孔的倒角半径大于0.1mm。
  16. 一种光整介质，其特征在于，用于如权利要求1-10任意一项所述的光整方法，在所述光整介质包括液体相以及固体相，所述液体相黏度＜1000cP，所述固体相为磨粒；所述光整介质的液体相加入有高分子增粘剂；得到所述光整介质的步骤包括：在液体相的黏度、固体相的磨粒粒径、磨粒质量浓度的下限值的基础上，逐渐增加光整介质的液体相的黏度、固体相的磨粒粒径、磨粒质量浓度进行光整，直至两相流的光整介质的流速或流量相比于下限值对应的流速或流量降低了1％～5％，得到所述黏度、磨粒粒径、磨粒质量浓度的最佳值范围。
  17. 如权利要求16所述的光整介质，其特征在于，所述液体相还加入有消泡剂，所述光整方法加工微细内流道的过程中，所述光整介质的表面泡浆的体积与液体相 的体积比不超过0.3∶1。
  18. 如权利要求16所述的光整介质，其特征在于，所述光整介质的液体相还加入有润滑剂，所述润滑剂包括无机化合物、单质、高分子化合物的一种或多种组合。
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