WO2023236354A1 - Miroir intégrateur à large bande réfléchissant et système optique laser à fibre optique à large bande - Google Patents

Miroir intégrateur à large bande réfléchissant et système optique laser à fibre optique à large bande Download PDF

Info

Publication number
WO2023236354A1
WO2023236354A1 PCT/CN2022/114206 CN2022114206W WO2023236354A1 WO 2023236354 A1 WO2023236354 A1 WO 2023236354A1 CN 2022114206 W CN2022114206 W CN 2022114206W WO 2023236354 A1 WO2023236354 A1 WO 2023236354A1
Authority
WO
WIPO (PCT)
Prior art keywords
broadband
mirror
symmetry plane
curved surfaces
reflective
Prior art date
Application number
PCT/CN2022/114206
Other languages
English (en)
Chinese (zh)
Inventor
邵华江
王伟
李思佳
Original Assignee
上海嘉强自动化技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上海嘉强自动化技术有限公司 filed Critical 上海嘉强自动化技术有限公司
Publication of WO2023236354A1 publication Critical patent/WO2023236354A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0977—Reflective elements
    • G02B27/0983—Reflective elements being curved

Definitions

  • the invention relates to the technical field of laser beam shaping, and in particular to a reflective broadband integrator mirror and a broadband fiber laser optical system.
  • Laser processing technologies such as laser cutting, welding, quenching, drilling, and micro-machining are widely used for their advantages of non-contact, fast processing speed, and excellent quality.
  • broadband laser cladding, broadband laser quenching, and other broadband fiber laser processing process which is very common in the industrial laser processing industry.
  • Broadband fiber laser processing technology usually requires the energy distribution of the laser beam to be shaped to achieve a flat-top distribution to ensure better surface effects and depth consistency.
  • the first one is waveguide shaping, but due to its large light absorption, it is severely limited in high-power laser processing; the second one is transmissive lenses such as lens arrays, binary optical elements, and integral lenses. , because the material is hard and brittle fused quartz, the processing is difficult and the processing cost is high; the third option is a reflective broadband integrator mirror, which has the advantages of water cooling, good thermal conductivity, and the ability to withstand extremely high laser power.
  • Power laser processing has advantages, but the existing reflective broadband integrator mirrors are all based on parallel beam incidence.
  • the fiber-coupled output laser needs to collimate the divergent beam at the output point first, resulting in a more complex optical path structure and high power loss. The instability of the optical path is more prominent and the cost is higher.
  • the invention provides a reflective broadband integrator mirror based on the incident light of a point light source, including a base body.
  • the base body has a bottom surface, a mirror surface and a symmetry surface.
  • the base body is symmetrical about the symmetry plane, and the mirror surface It is inclined at a set acute angle with the bottom surface and includes at least three concave wide-band curved surfaces.
  • the wide-band curved surfaces pass through the symmetry plane and are symmetrical about the symmetry plane. Two adjacent wide-band curved surfaces intersect. And an arc-shaped strip line is formed, and the focal points of all the arc-shaped strip lines are coplanar to form a focus plane, and the focus plane is parallel to and spaced apart from the symmetry plane.
  • the point light source is set on the side of the mirror away from the bottom surface and shines onto the mirror in the direction toward the mirror.
  • the incident light is distributed in a cone shape and is focused at the arc-shaped strip line. After reflection by the mirror, The reflected light is focused toward the center into a spot.
  • the broadband curved surface is symmetrical about the symmetry plane, multiple reflected light rays reflected by the same arc-shaped strip line are symmetrical about the symmetry plane, thus making the spot symmetry better. All broadband curved surfaces are arranged in parallel and pass through the symmetry plane.
  • All the arc-shaped strip lines are parallel and the focus points are coplanar, forming a focus plane parallel to the symmetry plane, so that the light spot is flat-topped and homogenized in one direction, and the overall uniformity is good.
  • only one of the above-mentioned reflective broadband integrator mirrors can achieve unidirectional flat-top homogenization shaping of point-emitted light.
  • the optical path structure is simple, the power loss will be smaller, the optical path stability will be better, and the optical cost will be reduced. It will be relatively lower and has better prospects for large-scale application.
  • the beam deflection angle a of the mirror is 30°-150°.
  • the range of the beam deflection angle a of the mirror is limited to be suitable for application scenarios at different illumination positions.
  • the set acute angle is 90°-a/2.
  • the angle of inclination of the mirror surface relative to the bottom surface can be determined more conveniently and quickly, thereby making it easier to seat Body preparation.
  • all of the broad-band curved surfaces form elliptical cross-sections on a cross-section parallel to the symmetry plane.
  • the elliptical cross-section lines correspond to unequal intervals between the central broad bands of different broad band curved surfaces.
  • the unidirectional uniformity, overall uniformity and spot symmetry of the light spot are improved.
  • the number of broadband curved surfaces is less than or equal to 50.
  • the structure of the mirror surface is simplified and the preparation of the base body is facilitated while ensuring the one-way flat-top homogenization function.
  • the number of broadband curved surfaces is 6-15.
  • the structure of the mirror can be further simplified and the production cost of the reflective broadband integrator mirror can be reduced.
  • the distance between the focus plane and the symmetry plane is determined according to the following formula:
  • H is the distance between the focus plane and the symmetry plane
  • F1 is the incident focal length
  • F2 is the exit focal length
  • D is the maximum spot size perpendicular to the symmetry plane on the mirror surface
  • L2 is the homogenized spot width
  • b is The beam diverges half-angle.
  • a water-cooling channel is formed inside the base body, and the water inlet and outlet of the water-cooling channel are respectively opened on the bottom surface.
  • the above-mentioned reflective broadband integrator mirror by setting up a water-cooling channel and limiting the position of the water inlet and outlet of the water-cooling channel, it is conducive to cooling the base body, preventing the above-mentioned reflective broadband integrator mirror from being in a high temperature state for a long time, and improving the reflective Service life of broadband integrator mirrors.
  • the present invention also provides a broadband fiber laser optical system, including a point light source and a reflective broadband integrator mirror as described in any of the above technical solutions.
  • the point light source is located at the incident focus of the reflective broadband integrator mirror. at.
  • the point light source is located at the incident focus of the reflective broadband integrator mirror.
  • the light emitted by the point light source shines on the mirror in the direction toward the mirror.
  • the incident light is distributed in a cone shape, and the arc-shaped strip line
  • the reflected light after specular reflection is focused towards the center into a light spot. Since the broadband curved surface is symmetrical about the symmetry plane, multiple reflected light rays reflected by the same arc-shaped strip line are symmetrical about the symmetry plane, thus making The light spot has good symmetry.
  • the above-mentioned broadband fiber laser optical system with a reflective broadband integrator mirror can realize unidirectional flat-top homogenization shaping of non-parallel beams.
  • the optical path structure is simple, the power loss will be smaller, and the optical path stability Better, the optical cost will be relatively lower, and the prospects for large-scale application are better.
  • Figure 1 is a schematic structural diagram of a reflective broadband integrator mirror in an embodiment of the present invention
  • Figure 2 is a cross-sectional view of the reflective broadband integrator mirror in Figure 1;
  • Figure 3 is a top view of the reflective broadband integrator mirror in Figure 1;
  • Figure 4 is a front view of the broadband fiber laser optical system along the light incident direction in one embodiment of the present invention.
  • Figure 5 is a cross-sectional view of the broadband fiber laser optical system in Figure 4 at the position of the symmetry plane;
  • Figure 6 is a schematic diagram of the light spot after one-way flat-top homogenization by a reflective broadband integrator mirror in an embodiment of the present invention
  • FIG. 7 is a cross-sectional view of a reflective broadband integrator mirror in another embodiment of the present invention.
  • Reflective broadband integrating mirror 110. Base; 111. Bottom surface; 112. Mirror surface; 1121. Broadband curved surface; 1122. Arc-shaped strip line; 1123. Elliptical cross-section; 113. Symmetry plane; 114. Water-cooling channel ; 1141. Water inlet; 1142. Water outlet; ⁇ , set acute angle;
  • first and second are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, features defined as “first” and “second” may explicitly or implicitly include at least one of these features.
  • “plurality” means at least two, such as two, three, etc., unless otherwise expressly and specifically limited.
  • connection In the present invention, unless otherwise clearly stated and limited, the terms “installation”, “connection”, “connection”, “fixing” and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated into one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interactive relationship between two elements, unless otherwise specified restrictions. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
  • a first feature being “on” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. touch.
  • the terms “above”, “above” and “above” the first feature is above the second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature.
  • "Below”, “below” and “beneath” the first feature to the second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature has a smaller horizontal height than the second feature.
  • the present invention provides a reflective broadband integrator mirror 100 based on the incident light of the point light source 20.
  • the light cross-section of the point light source 20 is a regular spot shape, such as a circle, an ellipse, etc., and the energy distribution is a non-flat-top distribution.
  • the point light source 20 can be a fiber-coupled laser.
  • Other structural forms that can meet the requirements are also possible.
  • the reflective broadband integrator mirror 100 includes a base body 110.
  • the base body 110 is made of metal material, such as pure copper, aviation aluminum, etc.
  • the shape of the base body 110 can be cylindrical, cubic, etc. Of course, the material and shape of the base body 110 It is not limited to this, and it can also be other structural forms that can meet the requirements.
  • the base body 110 has a bottom surface 111, a mirror surface 112 and a symmetry surface 113.
  • the mirror surface 112 and the bottom surface 111 are inclined at a set acute angle ⁇ .
  • the base body 110 is symmetrical about the symmetry surface 113.
  • the mirror surface 112 includes at least three broadband curved surfaces 1121.
  • the shape of the broadband curved surface 1121 is concave. When specifically set, the number of broadband curved surfaces 1121 can be 3, 4, 5, 10, 20, or more than 20. .
  • All broadband curved surfaces 1121 pass through the symmetry plane 113, and all broadband curved surfaces 1121 are symmetrical about the symmetry plane 113. Two adjacent broadband curved surfaces 1121 intersect, and an arc-shaped strip line 1122 is formed at the intersection position.
  • all the wide-band curved surfaces 1121 can be arranged parallel, and the arc-shaped strip lines 1122 can be parallel.
  • the foci of all arc-shaped strip lines 1122 are coplanar, and these foci form a focus plane.
  • the focus plane is parallel to the symmetry plane 113 , and is spaced apart from the symmetry plane 113 .
  • the central axis of the incident beam and the central axis of the reflected beam form the central axis of the beam transmission of the mirror 112 , and the central axis of the beam transmission is parallel to the symmetry plane 113 .
  • the point light source 20 is disposed on the side of the mirror 112 away from the bottom surface 111 and irradiates the mirror 112 in the direction toward the mirror 112, and the incident light Distributed in a cone shape, it is focused at the arc-shaped strip line 1122.
  • the reflected light reflected by the mirror 112 is focused toward the center into a light spot. Since the broadband curved surface 1121 is symmetrical about the symmetry plane 113, it passes through the same arc-shaped strip line.
  • the multiple reflected light rays reflected by 1122 are symmetrical about the symmetry plane 113, which makes the spot symmetry better.
  • the beam deflection angle a of the mirror 112 may be 30°-150°.
  • the beam deflection angle a of the mirror 112 is 30°, 45°, 60°, 75°, 90°, 105°, 120°, 135°, 150°.
  • the beam deflection angle a of the mirror 112 does not Limited to the above values, it can also be other values in the range of 30°-150°.
  • the deflection angle of the reflected light relative to the incident light is the beam deflection angle a of the mirror 112.
  • the entire one-way flat-top homogenized and shaped The deflection angle of the spot position relative to the point light source 20 is the beam deflection angle a of the mirror 112, which is suitable for the illumination position forming an angle a with the point light source 20.
  • the acute angle ⁇ may be set to 90°-a/2.
  • the beam deflection angle a of the mirror 112 is determined based on the given application scenario, and then the acute angle ⁇ can be set to 90°-a/2 according to the beam deflection angle a of the mirror 112.
  • the angle of inclination of the mirror surface 112 relative to the bottom surface 111 can be determined more conveniently and quickly, thereby facilitating the installation of the base body 110 .
  • the number of broadband curved surfaces 1121 may be less than or equal to 50.
  • the number of broadband curved surfaces 1121 is limited to a range of 3-50.
  • the mirror 112 has 30, 35, 40, 45 or 50 broadband surfaces. Curved surfaces 1121, so that on the basis of ensuring the one-way flat-top homogenization function, the number of broadband curved surfaces 1121 will not be too many and avoid problems such as the complicated installation method of the broadband curved surfaces 1121 in the mirror 112 and the narrow installation space, etc. Simplified The structure of the mirror surface 112 facilitates the preparation of the base body 110 .
  • the number of broadband curved surfaces 1121 may be 6-15.
  • a broadband curved surface 1121 can further simplify the structure of the mirror 112, facilitate the preparation of the base 110, and reduce the production cost of the reflective broadband integrator mirror 100.
  • all broad-band curved surfaces 1121 form elliptical cross-sections 1123 on cross-sections parallel to the symmetry plane 113 .
  • all the broadband curved surfaces 1121 pass through the symmetry plane 113, all the broadband curved surfaces 1121 form elliptical cross-sections 1123 on the cross-sections parallel to the symmetry plane 113, so as to more conveniently and reliably ensure that all arcs
  • the focal points of the strip lines 1122 are coplanar and form a focus plane parallel to the symmetry plane 113 .
  • the elliptical section lines 1123 correspond to the central broadbands of different broadband curved surfaces 1121 with unequal spacing, so as to make multiple reflected light rays reflected by the same elliptical section line 1123 uniform everywhere, and thus Improve the unidirectional uniformity of the light spot, the overall uniformity is better, and the symmetry of the light spot can be improved.
  • the distance between the focus plane and the symmetry plane 113 is determined according to the following formula:
  • H is the distance between the focus plane and the symmetry plane 113
  • F1 is the incident focal length
  • F2 is the exit focal length
  • D is the maximum spot 21 size perpendicular to the symmetry plane 113 on the mirror 112
  • L2 is the homogenized spot width
  • b is The beam diverges half-angle.
  • the point light source 20 with the beam divergence half angle b is at the incident focus, and the point divergent beam is incident on the mirror 112 with the incident focal length F1 and the exit focal length F2.
  • the incident beam undergoes spectroscopic reflection through the broadband curved surface 1121 and then is combined and superimposed.
  • the combined and superimposed beam achieves spot energy homogenization in the direction of the focus plane parallel to the symmetry plane 113.
  • the spot energy is distributed flat-top, and the homogenized spot length is L1; the incident beam passes through the broadband surface
  • the arc-shaped strip line 1122 of the curved surface 1121 is focused, and the focusing plane will obtain a defocused light spot perpendicular to the symmetry plane 113.
  • the light spot energy has a Gaussian distribution and the light spot width is L2.
  • a water cooling channel 114 is formed inside the base 110, and the water inlet 1141 and the water outlet 1142 of the water cooling channel 114 are respectively opened in Bottom 111.
  • the water inlet 1141 is used to introduce cooling water into the interior of the base body 110 to cool the base body 110, and the cooling water flows out through the water outlet 1142.
  • the water-cooling channel 114 is connected to an external cooling water source. The cooling water flows into the water-cooling channel 114 through the water inlet 1141 and flows out through the water outlet 1142, which is beneficial to cooling the base 110 and avoids the long-term use of the reflective broadband integrator mirror 100. In a high temperature state, the service life of the reflective broadband integrator mirror 100 is improved.
  • the present invention also provides a broadband fiber laser optical system 10, which includes a point light source 20 and a reflective broadband integrator mirror 100 according to any of the above technical solutions.
  • the point light source 20 is located in the reflective broadband integrator.
  • the incident focus of the integrating mirror 100 is located in the reflective broadband integrator.
  • the point light source 20 is located at the incident focus of the reflective broadband integrator mirror 100.
  • the light emitted by the point light source 20 irradiates the mirror 112 in the direction toward the mirror 112, and the incident light is distributed in a conical shape.
  • Focused at the arc-shaped strip line 1122 the reflected light reflected by the mirror 112 is focused toward the center into a light spot. Since the broadband curved surface 1121 is symmetrical about the symmetry plane 113, multiple light beams reflected by the same arc-shaped strip line 1122 The reflected light is symmetrical about the symmetry plane 113, thus making the light spot more symmetrical.
  • the above-mentioned broadband fiber laser optical system 10 with the reflective broadband integrator mirror 100 can achieve one-way flat-top homogenization of non-parallel light beams. Shaping, the optical path structure is simple, the power loss will be smaller, the optical path stability will be better, the optical cost will be relatively lower, and the prospects for large-scale application are better.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

L'invention concerne un miroir intégrateur à large bande réfléchissant (100) et un système optique laser à fibre optique à large bande (10). Le miroir intégrateur à large bande réfléchissant (100) est basé sur une lumière incidente provenant d'une source de lumière ponctuelle (20) et comprend un corps de base (110), le corps de base (110) ayant une face inférieure (111), une face de miroir (112) et un plan de symétrie (113) ; et le corps de base (110) est symétrique autour du plan de symétrie (113). La face de miroir (112) est inclinée selon un angle aigu défini (α) par rapport à la face inférieure (111), et comprend au moins trois surfaces incurvées à large bande (1121), qui sont concaves, les surfaces incurvées à large bande (1121) passant à travers le plan de symétrie (113) et étant symétriques autour du plan de symétrie (113) ; et toutes les deux surfaces incurvées à large bande adjacentes (1121) se croisent et forment une ligne de bande en forme d'arc (1122), des foyers de toutes les lignes de bande en forme d'arc (1122) sont coplanaires et forment un plan de focalisation, et le plan de focalisation et le plan de symétrie (113) sont définis en parallèle et à un intervalle. Des rayons lumineux réfléchis qui sont réfléchis par la face de miroir (112) sont focalisés vers un centre pour former un point lumineux. Étant donné qu'une pluralité de rayons lumineux réfléchis réfléchis par la même ligne de bande en forme d'arc (1122) sont symétriques autour du plan de symétrie (113), le point lumineux a une symétrie relativement bonne ; en outre, au moyen d'une homogénéisation à sommet plat unidirectionnelle, le point lumineux a une homogénéité globale relativement bonne. La présente invention présente une structure de trajet optique simple, moins de perte de puissance, une stabilité de trajet optique supérieure, des coûts inférieurs et des perspectives d'application à grande échelle relativement bonnes.
PCT/CN2022/114206 2022-06-10 2022-08-23 Miroir intégrateur à large bande réfléchissant et système optique laser à fibre optique à large bande WO2023236354A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202210651533.0A CN114966925A (zh) 2022-06-10 2022-06-10 反射式宽带积分镜及宽带光纤激光光学系统
CN202210651533.0 2022-06-10

Publications (1)

Publication Number Publication Date
WO2023236354A1 true WO2023236354A1 (fr) 2023-12-14

Family

ID=82962417

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2022/114206 WO2023236354A1 (fr) 2022-06-10 2022-08-23 Miroir intégrateur à large bande réfléchissant et système optique laser à fibre optique à large bande

Country Status (2)

Country Link
CN (1) CN114966925A (fr)
WO (1) WO2023236354A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07249561A (ja) * 1994-03-09 1995-09-26 Nikon Corp 照明光学装置
JP2000305168A (ja) * 1999-04-20 2000-11-02 Fujitsu General Ltd 集光装置
CN108427205A (zh) * 2018-04-03 2018-08-21 上海嘉强自动化技术有限公司 一种透反式宽度可调消光晕匀化光学系统
WO2018174322A1 (fr) * 2017-03-22 2018-09-27 명지대학교 산학협력단 Unité optique de mise en forme de faisceau dans un espace spécifié et modulateur de distribution de lumière la comprenant
CN112114393A (zh) * 2020-08-07 2020-12-22 苏州科技大学 一种抛物型旋转面阵列积分镜及其设计方法
CN113485018A (zh) * 2021-07-19 2021-10-08 华中科技大学 一种生成类平顶矩形光斑反射式匀化镜及匀化系统
CN215449768U (zh) * 2021-07-19 2022-01-07 华中科技大学 一种生成类平顶矩形光斑反射式匀化镜

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697047A (ja) * 1992-09-11 1994-04-08 Nikon Corp 照明光学系
CN2510880Y (zh) * 2001-12-29 2002-09-11 北京工业大学 激光光束聚焦成型积分镜
CN2847319Y (zh) * 2005-11-04 2006-12-13 北京工业大学 一种用于获得大面积均匀方形光斑的激光均束装置
JP4734652B2 (ja) * 2006-12-21 2011-07-27 独立行政法人情報通信研究機構 光学システム
CN105904087A (zh) * 2016-06-26 2016-08-31 上海嘉强自动化技术有限公司 一种反射式高功率双金属振镜扫描系统
CN208185913U (zh) * 2018-05-02 2018-12-04 杨毅 灯具
CN213476103U (zh) * 2019-01-18 2021-06-18 南京科莱汀激光科技有限公司 一种基于反射式带状积分镜的内孔熔覆激光系统
CN113031288A (zh) * 2019-12-24 2021-06-25 深圳光峰科技股份有限公司 一种用于改善光斑形状的封装结构
CN114460740B (zh) * 2022-01-21 2023-03-28 华中科技大学 一种单镜环形光斑光学系统

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07249561A (ja) * 1994-03-09 1995-09-26 Nikon Corp 照明光学装置
JP2000305168A (ja) * 1999-04-20 2000-11-02 Fujitsu General Ltd 集光装置
WO2018174322A1 (fr) * 2017-03-22 2018-09-27 명지대학교 산학협력단 Unité optique de mise en forme de faisceau dans un espace spécifié et modulateur de distribution de lumière la comprenant
CN108427205A (zh) * 2018-04-03 2018-08-21 上海嘉强自动化技术有限公司 一种透反式宽度可调消光晕匀化光学系统
CN112114393A (zh) * 2020-08-07 2020-12-22 苏州科技大学 一种抛物型旋转面阵列积分镜及其设计方法
CN113485018A (zh) * 2021-07-19 2021-10-08 华中科技大学 一种生成类平顶矩形光斑反射式匀化镜及匀化系统
CN215449768U (zh) * 2021-07-19 2022-01-07 华中科技大学 一种生成类平顶矩形光斑反射式匀化镜

Also Published As

Publication number Publication date
CN114966925A (zh) 2022-08-30

Similar Documents

Publication Publication Date Title
CN106526872B (zh) 一种透射式激光光束整形系统
CN114460740B (zh) 一种单镜环形光斑光学系统
WO2023236354A1 (fr) Miroir intégrateur à large bande réfléchissant et système optique laser à fibre optique à large bande
CN106785830B (zh) 一种共谐振腔的级联泵浦模块及激光器
WO2023123044A1 (fr) Système de mise en forme de point lumineux uniforme
CN207884063U (zh) 一种双柱透镜聚焦的光纤耦合激光系统
CN1996683A (zh) 直角内外圆锥面组合全反镜激光谐振腔
CN101013187A (zh) 多束激光凹面反射镜光纤耦合装置
JP3587969B2 (ja) 固体レーザロッド励起モジュール
CN202616596U (zh) 一种输出实心光束的激光非稳腔
CN112952549B (zh) 一种半导体激光耦合系统
CN114122899A (zh) 一种波长锁定系统
CN212377786U (zh) 一种激光光源装置
CN100486063C (zh) 高功率脉冲激光器抗失调谐振腔
CN102684052A (zh) 一种输出实心光束的激光非稳腔及其应用
JP3391235B2 (ja) 半導体レーザ励起固体レーザ増幅装置
JPH1168197A (ja) 半導体レーザ励起固体レーザ装置
CN109494551B (zh) 一种碟片激光器
CN112952540A (zh) 一种碱金属蒸汽激光器
CN212043123U (zh) 一种基于自适应镜调焦反射式光学系统
CN218240569U (zh) 一种光学模组和医疗装置
CN106940481B (zh) 一种反射式激光光束整形装置
CN110614430A (zh) 一种基于自适应镜调焦反射式光学系统及其工作方法
CN219643292U (zh) 多泵浦源盘式激光器泵浦腔结构
JP3055312B2 (ja) レーザビーム均一照射光学系

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22945488

Country of ref document: EP

Kind code of ref document: A1