WO2023230802A1 - 显示面板及其制备方法和显示装置 - Google Patents

显示面板及其制备方法和显示装置 Download PDF

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Publication number
WO2023230802A1
WO2023230802A1 PCT/CN2022/096117 CN2022096117W WO2023230802A1 WO 2023230802 A1 WO2023230802 A1 WO 2023230802A1 CN 2022096117 W CN2022096117 W CN 2022096117W WO 2023230802 A1 WO2023230802 A1 WO 2023230802A1
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Prior art keywords
metasurface
microlens
light
layer
display panel
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PCT/CN2022/096117
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English (en)
French (fr)
Inventor
彭玮婷
吴谦
程芳
凌秋雨
王维
梁蓬霞
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京东方科技集团股份有限公司
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Priority to CN202280001534.9A priority Critical patent/CN117501448A/zh
Priority to PCT/CN2022/096117 priority patent/WO2023230802A1/zh
Publication of WO2023230802A1 publication Critical patent/WO2023230802A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission

Definitions

  • the present disclosure relates to the field of display, and in particular to a display panel, a preparation method thereof, and a display device.
  • OLED Organic Light-Emitting Diode
  • Silicon-based OLED micro-display combines CMOS technology and OLED technology, and has the characteristics of self-illumination and the use of silicon substrates.
  • Silicon-based OLED is small in size, light in weight, low in power consumption and high in resolution (PPI). It is the core device of near-eye display systems and the trend of next-generation micro-display technology.
  • the light-emitting mechanism of silicon-based OLED is that the luminescent material produces light under the action of an electric field. Usually, the same voltage is applied to all light-emitting pixels to achieve pixel light emission. However, in actual development or application, it is found that due to the Lambertian luminescence characteristics of OLED, there is a problem of low pixel brightness for high PPI display devices.
  • an embodiment of the present disclosure provides a display panel, which includes:
  • the light-emitting unit layer is located on one side of the driving backplane and includes at least one light-emitting pixel unit;
  • the metasurface composite structure layer is located on the light exit side of the light emitting pixel unit and includes: at least two metasurface microlens structure layers that are sequentially arranged in a direction away from the light emitting pixel unit and are independent of each other.
  • the metasurface microlens structure The layer is configured to phase modulate the incident light beam to converge the light beam.
  • a transparent spacer layer is formed between adjacent metasurface microlens structural layers.
  • the lens spacer layer is in contact with the metasurface microlens structure layer closest to both sides;
  • the refractive index of the lens spacer layer is smaller than the refractive index of any of the metasurface microlens structural layers in contact with it.
  • a packaging cover is formed on a side of the metasurface composite structure layer away from the driving backplane.
  • a packaging cover is formed on a side of the metasurface composite structure layer away from the driving backplane;
  • the at least two metasurface microlens structural layers include: a first metasurface microlens structural layer and a second metasurface microlens structural layer;
  • the support structure is formed between the packaging cover and the driving backplane, and the support structure is used to support the packaging cover and the driving backplane;
  • the first metasurface microlens structural layer is fixed to the driving backplane, and the second metasurface microlens structural layer is fixed to the packaging cover.
  • the support structure is located in an edge area of the driving backplane and/or in an area between the light-emitting pixel units.
  • the metasurface microlens structural layer includes: at least one metasurface microlens structure corresponding to the light-emitting pixel unit, and the metasurface microlens structure The microlens structure is arranged opposite to the corresponding light-emitting pixel unit.
  • the center of the orthographic projection of the metasurface microlens structure on the driving backplane and the corresponding light-emitting area of the light-emitting pixel unit are on the driving backplane.
  • the distance between the centers of the orthographic projection is less than or equal to 0.3um;
  • any two metasurface microlens structures located on different metasurface microlens structure layers and corresponding to the same light-emitting pixel unit, the orthographic projection of the two metasurface microlens structures on the driving backplane The distance between centers is less than or equal to 0.3um.
  • all the metasurface microlens structures located in different metasurface microlens structure layers and corresponding to the same light-emitting pixel unit constitute a metasurface composite corresponding to the light-emitting pixel unit.
  • the light-emitting pixel unit is located at the focus of the corresponding metasurface composite microlens structure.
  • all the metasurface microlens structures located in different metasurface microlens structure layers and corresponding to the same light-emitting pixel unit constitute a metasurface composite corresponding to the light-emitting pixel unit.
  • the numerical aperture of the metasurface composite microlens structure is greater than or equal to 0.7.
  • the metasurface microlens structure includes a plurality of micropillars with the same height
  • the ratio of the height of the micro-pillar to the equivalent diameter of the cross-section of the micro-pillar parallel to the driving backplate is less than or equal to 5:1.
  • the phase order of the micropillars of the metasurface microlens structure in the metasurface microlens structural layer is 4 to 8.
  • phase orders of the metasurface microlens structures in each metasurface microlens structure layer are equal;
  • the number of micro-pillars in the meta-surface micro-lens structure in each of the meta-surface micro-lens structures is equal;
  • micro-pillars in the meta-surface micro-lens structure are arranged in the same manner in each of the meta-surface micro-lens structures.
  • the cross-section of the micro-pillar parallel to the driving backplane is circular or square.
  • the distance between any two adjacent metasurface microlens structural layers in a direction perpendicular to the driving backplane is 0.8um ⁇ 1.2um.
  • the number of layers of the metasurface microlens structure layer in the metasurface composite structure layer is 2.
  • an encapsulation layer is formed between the light-emitting unit layer and the metasurface composite structure layer.
  • an embodiment of the present disclosure also provides a display device, which includes: the display panel provided in the first aspect.
  • embodiments of the present disclosure also provide a method for preparing a display panel, which can be used to prepare the display panel provided in the first aspect, wherein the preparation method includes:
  • the light-emitting function includes at least one light-emitting pixel unit
  • a metasurface composite structural layer is formed on the light exit side of the luminescent pixel unit.
  • the metasurface composite structural layer includes: at least two metasurface microlens structural layers that are sequentially arranged in a direction away from the luminescent pixel unit and independent of each other,
  • the metasurface microlens structure layer is configured to phase modulate the incident light beam to converge the light beam.
  • the step of forming a metasurface composite structure layer on the light exit side of the light-emitting pixel unit includes:
  • the metasurface microlens structure layer and the transparent spacer layer are alternately formed on the light exit side of the light emitting pixel unit.
  • the step of forming a metasurface composite structure layer on the light exit side of the light-emitting pixel unit includes:
  • a support structure is formed between the driving backplane and the packaging cover, and the driving backplane and the packaging cover are aligned and fixed.
  • Figure 1 is a schematic cross-sectional view of a display panel related to the related technology
  • Figure 2 is another schematic cross-sectional view of a display panel related to the related art
  • Figure 3 is a schematic diagram of the lens diameter, aperture angle, and focal length of the lens
  • Figure 4 is a schematic cross-sectional view of a display panel provided by an embodiment of the present disclosure.
  • Figure 5 is a schematic top view of a light-emitting pixel unit and a corresponding metasurface microlens structure in an embodiment of the present disclosure
  • Figure 6 is another schematic cross-sectional view of a display panel provided by an embodiment of the present disclosure.
  • Figure 7 is a schematic diagram of two different structures of micropillars in embodiments of the present disclosure.
  • FIG. 8A is a schematic top view of the metasurface microlens structure in the first metasurface microlens structure layer in an embodiment of the present disclosure
  • FIG. 8B is a schematic top view of the metasurface microlens structure in the first metasurface microlens structure layer in an embodiment of the present disclosure
  • Figure 9 is a schematic diagram comparing the angular brightness distribution curve of the light emitting surface of the luminescent pixel unit in the display panel provided by the embodiment of the present disclosure and the final light emitted by the corresponding metasurface composite microlens structure;
  • Figure 10 is a comparative schematic diagram of the angular brightness distribution curve of the final light emitted by the metasurface composite microlens structure when there is an alignment error and when there is no alignment error in the embodiment of the present disclosure;
  • FIG. 11 is a flow chart of a method for manufacturing a display panel according to an embodiment of the present disclosure.
  • the light-emitting pixel unit refers to the smallest unit used for emitting light on the display panel; the light-emitting pixel unit may be a current-driven light-emitting element.
  • the light-emitting pixel unit As an OLED as an example.
  • the limited range includes the two endpoint values of A and B.
  • Figure 1 is a schematic cross-sectional view of a display panel in the related art.
  • OLED since OLED has Lambertian luminescence characteristics, the light beam emitted by the luminescent pixel unit 201 in the display panel in the related art also has Lambertian luminescence characteristics. Characteristics of Bo-type luminescence. Through tests, it was found that the energy utilization rate of the light beam emitted by the light-emitting pixel unit 201 in the display panel in the related art is only about 40% in the front viewing direction (-15° to +15°).
  • FIG. 2 is another schematic cross-sectional view of a display panel related to the related art.
  • a metasurface microlens structure layer 19 is added to the light exit side of the light emitting pixel unit 201.
  • the metasurface microlens structure layer 19 includes
  • the metasurface microlens structure 20 corresponds to the one-to-one luminescent pixel unit 201 (only three luminescent pixel units 201 and three corresponding metasurface microlens structures 20 are illustrated in FIG. 2 ), the metasurface microlens structure 20 includes a set of micro-pillars 21 (also called nano-pillars) structures arranged according to certain rules and with specific phase modulation.
  • micro-pillars 21 also called nano-pillars
  • a large numerical aperture metasurface lens is constructed based on the lens phase expression and discrete results; among them, the height of the micro-pillars 21 is generally On the order of hundreds of nanometers (in the range of 100nm to 1000nm). Based on the above-mentioned metasurface microlens structure 20, the OLED light-emitting convergence effect under low placement height conditions ( ⁇ 1000 nm) can be achieved, thereby improving the front viewing angle brightness of the light-emitting pixel unit 201.
  • the construction principle of the metasurface microlens structure 20 is based on the micropillars 21 with discretized phase modulation effects, which are discretely and correspondingly arranged according to the phase expression of the lens, thereby achieving low device thickness (hundred nanometers). Beam modulation effect.
  • the structural period of the micropillar 21 is usually on the order of half a wavelength
  • the height of the micropillar 21 is on the order of hundreds of nanometers
  • the equivalent diameter of the micropillar 21 is on the order of tens of nanometers to hundreds of nanometers.
  • the lens phase distribution needs to be calculated by the phase expression formula according to the lens diameter D and the required focal length f.
  • phase plane is folded into the range of 0 to 2 ⁇ and then discretized according to the 21 period of the microcolumn, and we obtain It can correspond to the phase distribution arranged by the micro-pillars 21 .
  • the phase distribution of the micropillars 21 arranged in the metasurface microlens structure 20 satisfies the following formula:
  • r represents the meridional distance between the micro-pillar 21 at the position coordinate (x, y) and the center point (0, 0) of the metasurface microlens structure 20, 0 ⁇ r ⁇ D/2, and ⁇ represents the intensity of the incident light.
  • wavelength represents the phase at a radial distance r, and f represents the focal length. According to the above formula, the phase distribution within the metasurface microlens structure 20 with wavelength ⁇ and focal length f can be obtained.
  • the phase of the micro-pillars 21 in the meta-surface micro-lens structure 20 is usually divided into m steps for expression (i.e., the phase of the micro-pillars 21 in the meta-surface micro-lens structure 20 is expressed
  • the phase order of the micro-column 21 is m). That is, the metasurface microlens structure 20 contains m types of micro-pillars 21 corresponding to m different phase values in the range of 0 to 2 ⁇ (one type of micro-pillars 21 corresponds to one phase value).
  • the super-surface micro-lens structure 20 can be The phase expression of the surface microlens structure 20 is further discretized into an expression relationship with a certain phase order distribution.
  • the m phase fingers can be respectively 2 ⁇ .
  • other methods can also be used to select m phase values in the range of 0 to 2 ⁇ .
  • the m phase values are evenly distributed in the range of 0 to 2 ⁇ , so as to Ensure accurate expression of the lens.
  • the larger the value of m the more accurate the expression of the metasurface microlens structure 20, and the higher the focusing efficiency of the metasurface microlens structure 20, but the greater the number of micropillars 21 that need to be installed, and the micropillars 21 The smaller the cycle, the higher the difficulty of the preparation process.
  • the transmission-type transmissive metasurface microlens structure 20 used in the above scheme is based on the equivalent refractive index formed by the micro-pillars 21 of high-refractive index materials (refractive index generally >1.8) within the corresponding periodic conditions, and combined with the micro-pillars 21 height to achieve the required phase delay solution.
  • the phase value of the micro-column 21 satisfies:
  • n eff is the equivalent refractive index of the micro-pillar 21.
  • n eff is related to the refractive index of the micropillar 21 itself, the refractive index of the peripheral material of the micropillar 21 , and the duty cycle of the micropillar 21 .
  • the aspect ratio of the micro-pillar 21 refers to the ratio of the height H of the micro-pillar 21 to the equivalent diameter d of the micro-pillar 21 (the equivalent diameter of the cross-section perpendicular to the height direction); the duty cycle of the micro-pillar 21 refers to the ratio of the height H of the micro-pillar 21 to the equivalent diameter d of the micro-pillar 21.
  • the ratio of the equivalent diameter d of the pillars 21 to the installation period P of the micropillars 21 (the distance between the center points of two adjacent micropillars 21 in the row or column direction is a preset fixed value).
  • the equivalent refractive index n eff of the micro-column 21 can be solved; based on this equivalent refractive index, the micro-column 21 itself
  • the refractive index, the refractive index of the peripheral material of the micro-column 21, and the setting period P of the micro-column 21 are known, the corresponding phase value can be solved
  • the equivalent diameter d of the micro-column 21 is the size.
  • the micro-pillars 21 need a specific height H and a sufficiently small equivalent diameter d to form a group of micro-pillars 21 that can cover the 0-2 ⁇ phase modulation range.
  • Figure 3 is a schematic diagram of the lens diameter, aperture angle, and focal length of the lens.
  • the numerical aperture (NA) of the lens is the refractive index n 0 and aperture angle of the medium between the lens and the object being inspected.
  • Aperture angle also known as "lens angle" is the angle formed by the object point on the optical axis of the lens and the effective diameter of the front lens of the objective lens.
  • the numerical aperture NA of the metasurface microlens structure 20 in Figure 2 needs to be set larger (generally NA ⁇ 0.7) to ensure that the light emitted by the OLED can reach as much light as possible.
  • the corresponding metasurface microlens structure 20 In order to ensure the beam convergence effect, the numerical aperture NA of the metasurface microlens structure 20 in Figure 2 needs to be set larger (generally NA ⁇ 0.7) to ensure that the light emitted by the OLED can reach as much light as possible.
  • the corresponding metasurface microlens structure 20 needs to be set larger (generally NA ⁇ 0.7) to ensure that the light emitted by the OLED can reach as much light as possible.
  • the light emitted by the OLED is blue light (the wavelength is set to 450nm), the height of the micropillars 21 in the metasurface microlens structure 20 is set to 500nm, the period of the micropillars 21 is set to 500nm, and the micropillars 21
  • the refractive index is set to 2.03
  • the lens diameter D of the metasurface microlens structure 20 is set to 4.5um
  • the numerical aperture NA of the metasurface microlens structure 20 is set to 70%
  • the phase order of the metasurface microlens structure 20 is set to 8 .
  • the following micro-column structure library can be obtained through software simulation.
  • the height H of the micropillars 21 is designed to be 500nm and the numerical aperture NA of the metasurface microlens structure 20 is set to 0.7, the equivalents of 8 types of micropillars 21 corresponding to 8 different phase values are obtained.
  • the diameter is between 80nm and 190nm, and the aspect ratio of the micropillars 21 ranges from 500:190 to 500:80; that is to say, there are some micropillars 21 with an aspect ratio greater than 5:1.
  • the numerical aperture NA of the metasurface microlens structure 20 needs to be set larger (generally NA ⁇ 0.7). At this time, the focal length of the corresponding lens decreases, so The phase order that needs to be set is increased to ensure the continuity of phase expression.
  • the phase order m increases, the number of micro-pillars 21 that need to be installed increases, and the period P of the micro-pillars 21 becomes smaller.
  • the period P of the micro-pillars 21 is solved by equation (3).
  • the types of micropillars 21 included in the metasurface microlens structure 20 (different types of micropillars 21 correspond to different phase values and have different equivalent diameters d, and the same type of micropillars 21 correspond to The more the same phase value and the same equivalent diameter d), the higher the etching precision requirements for the etching process.
  • the present disclosure provides a corresponding solution.
  • the technical solution of the present disclosure can achieve a smaller value for the numerical aperture NA of the metasurface microlens structure in the metasurface microlens structure layer provided in the display panel while satisfying the convergence effect on the light beam emitted by the light-emitting pixel unit.
  • the phase order of the metasurface microlens structure can also take a smaller value, which can effectively reduce the aspect ratio of the nanopillars in the metasurface microlens structure, and effectively reduce the etching during the preparation process of the metasurface microlens structure. Accuracy requirements.
  • FIG. 4 is a schematic cross-sectional view of a display panel provided by an embodiment of the present disclosure.
  • FIG. 5 is a schematic top view of a light-emitting pixel unit and a corresponding metasurface microlens structure in an embodiment of the present disclosure.
  • the display panel includes: a driving backplane 1, a light emitting unit layer 2 and a metasurface composite structure layer 3.
  • the display panel provided by the embodiment of the present disclosure may be a silicon-based OLED display panel;
  • the driving backplane 1 includes a wafer substrate and a silicon-based OLED formed on the wafer substrate using a standard CMOS process. Pixel drive circuit.
  • the light-emitting unit layer 2 is located on one side of the driving backplane 1 and includes at least one light-emitting pixel unit 201.
  • the light-emitting pixel unit 201 is an OLED.
  • OLED includes an anode, a cathode and a light-emitting functional layer located between the OLED; the anode is generally used as the bottom electrode and is connected to the corresponding pixel drive circuit.
  • the anode can be made of a metal material with high reflective properties; the cathode is generally used as the top electrode.
  • the light-emitting functional layer at least includes an organic light-emitting layer; of course, the light-emitting functional layer can also include a hole injection layer and a hole transport layer, an organic light-emitting layer, and a hole injection layer located between the organic light-emitting layer and the anode. and at least one of an electron injection layer and an electron transport layer between the cathode and the cathode.
  • the light-emitting unit layer 2 may also include a pixel defining layer 202.
  • the pixel defining layer 202 is formed with at least one pixel accommodating hole corresponding to the light-emitting pixel unit 201.
  • the light-emitting pixel unit 201 is located in the corresponding pixel accommodating hole. Inside.
  • the metasurface composite structural layer 3 is located on the light-emitting side of the luminescent pixel unit 201.
  • the metasurface composite structural layer 3 includes: at least two metasurface microlens structural layers 4 and 5 arranged sequentially in the direction away from the luminescent pixel unit 201 and independent of each other,
  • the metasurface microlens structural layers 4 and 5 are configured to phase-modulate the incident light beam to converge the light beam.
  • the metasurface microlens structure layer 4, 5 includes: at least one metasurface microlens structure 401, 501 corresponding to the light-emitting pixel unit 201.
  • the metasurface microlens structures 401 and 501 are arranged opposite to the corresponding light-emitting pixel unit 201. All metasurface microlens structures 401 and 501 located in different metasurface microlens structure layers 4 and 5 and corresponding to the same luminescent pixel unit 201 form a metasurface composite microlens structure corresponding to the luminescent pixel unit 201.
  • the superimposed use of at least two metasurface microlens structural layers 4 and 5 can be regarded as the superimposed use of at least two condenser lenses; through this technical means, each metasurface microlens structural layer can be When the numerical apertures of the metasurface microlens structures 401 and 501 in 4 and 5 are both set to be small, the metasurface composite microlens structure in the metasurface composite structure layer 3 can have a larger numerical aperture.
  • each metasurface microlens structure layer 4 can be When the numerical apertures of the metasurface microlens structures 401 and 501 in 5 are both set to be less than NA 0 , the numerical aperture of the metasurface composite microlens structure in the metasurface composite structure layer 3 is achieved to be NA 0 . It can be seen that the technical solution of the present disclosure can effectively reduce the numerical aperture of the metasurface microlens structures 401 and 501 in the provided metasurface microlens structure layers 4 and 5 .
  • the technical solution of the present disclosure can satisfy the convergence effect of the light beam emitted by the light-emitting pixel unit while improving the numerical aperture NA of the metasurface microlens structure in the metasurface microlens structure layer provided in the display panel.
  • FIG. 4 only illustrates the situation where the metasurface composite structural layer includes two layers of metasurface microlens structural layers. This situation only serves as an example and does not limit the technical solution of the present disclosure. Those skilled in the art should understand that in the embodiment of the present disclosure, the metasurface composite structural layer 3 may also include three or even more metasurface microlens structural layers. In these cases, the corresponding drawings are not shown.
  • a transparent spacer layer is formed between some adjacent metasurface microlens structural layers.
  • the transparent spacer layer can play the role of supporting the metasurface microlens structural layer.
  • the lens spacer layer 6 is in contact with the closest metasurface microlens structure layers 4 and 5 on both sides; the refractive index of the lens spacer layer 6 is smaller than that of the lens spacer layer 6. The refractive index of any metasurface microlens structural layer.
  • the difference in the refractive index of the lens spacer layer 6 and the refractive index of any of the metasurface microlens structural layers 4 and 5 it contacts is less than or equal to -0.5.
  • the metasurface microlens structural layers 4 and 5 are made of high refractive index materials.
  • the refractive index of the metasurface microlens structural layers 4 and 5 is generally greater than or equal to 1.8;
  • the lens spacer layer 6 is made of low refractive index material.
  • the refractive index of the lens spacer layer 6 is generally less than or equal to 1.3.
  • a packaging cover 8 is formed on the side of the metasurface composite structure layer 3 away from the driving backplane 1 .
  • the packaging cover 8 can protect the metasurface composite structure layer 3 .
  • the packaging cover 8 can be a glass cover.
  • an encapsulation layer 7 is formed between the light-emitting unit layer 2 and the metasurface composite structure layer 3 .
  • the encapsulation layer 7 is used to encapsulate and protect the light-emitting pixel unit 201; the encapsulation layer 7 is generally made of inorganic materials.
  • the encapsulation layer 7 can be used as the substrate of the metasurface microlens structure layer 4, and the metasurface can be directly constructed on the encapsulation layer 7.
  • Figure 6 is another schematic cross-sectional view of a display panel provided by an embodiment of the present disclosure. As shown in Figure 6, it is alternately arranged with the metasurface microlens structural layer and lens spacer layer 6 in the metasurface composite structural layer 3 in the previous embodiment. It is different from the driving backplane 1; in the embodiment shown in Figure 6, part of the metasurface microlens structural layer 4 is fixedly provided on the driving backplane 1, and the other part of the metasurface microlens structural layer 5 is fixedly provided on the packaging cover.
  • At least two metasurface microlens structural layers include: a first metasurface microlens structural layer 4 and a second metasurface microlens structural layer 5; a support structure is formed between the packaging cover 8 and the driving backplane 1 11.
  • the support structure 11 is used to support the packaging cover 8 and the driving backplane 1; the first metasurface microlens structural layer 4 is fixed to the driving backplane 1, and the second metasurface microlens structural layer 5 is fixed to the packaging cover. 8 phases fixed.
  • a lens spacer layer 6 material with a certain thickness needs to be prepared on a certain metasurface microlens structure layer through processes such as deposition and spin coating.
  • the lens spacer layer prepared above is During the process of the cushion layer 6, the material of the lens spacer layer 6 may penetrate into the metasurface microlens structural layer (the metasurface microlens structure in the metasurface microlens structural layer includes multiple micro-pillars 9 (i.e. nano-pillars), connected There is a space between the micro-pillars 9).
  • the material of the lens spacer layer 6 that penetrates into the metasurface microlens structural layer will on the one hand cause the overall transmittance of the device to decrease, and on the other hand it will also affect the metasurface microlens. Lens performance expression of the structural layer.
  • part of the metasurface microlens structural layer 4 is fixedly provided on the driving backplane 1, and another part of the metasurface microlens structural layer 5 is fixedly provided on the packaging cover 8. Therefore, there must be adjacent
  • the two metasurface microlens structural layers 4 and 5 do not need to be provided with a lens spacer layer 6 . Therefore, the number of lens spacer layers 6 can be effectively reduced, thereby effectively improving the above technical problems.
  • the metasurface composite structural layer 3 when the metasurface composite structural layer 3 includes only two metasurface microlens structural layers, that is, the metasurface composite structural layer 3 only includes the above-mentioned first metasurface microlens structural layer 4 and the second metasurface microlens structural layer.
  • the surface microlens structure layer 5 does not have the above-mentioned lens spacer layer 6 in the display panel at this time, so the above-mentioned technical problems caused by the provision of the lens spacer layer 6 can be effectively solved.
  • the alignment of the first metasurface microlens structural layer 4 and the second metasurface microlens structural layer 5 can be achieved by alignment marks built on the packaging layer 7 and the packaging cover 8 to reduce direct alignment. Difficulty of processing.
  • the support structure 11 is located in an edge area of the driving backplane 1 and/or in an area between the light-emitting pixel units 201 .
  • a dielectric layer 10 is provided between the second metasurface microlens structure layer 5 and the packaging cover 8 (generally a glass cover); that is to say, between the packaging cover Before preparing the second metasurface microlens structural layer 8, a dielectric layer 10 will be prepared first. By providing the dielectric layer 10, it is beneficial to improve the bonding between the second metasurface microlens structural layer 5 and the packaging cover 8 firmness.
  • the center of the orthographic projection of the metasurface microlens structures 401 and 501 on the driving backplane 1 and the corresponding light output area of the light-emitting pixel unit 201 are on the driving backplane.
  • the distance between the center of the orthographic projection on the plate 1 is less than or equal to 0.3um; preferably, the center of the orthographic projection of the metasurface microlens structures 401 and 501 on the driving back plate 1 and the light output area of the corresponding light-emitting pixel unit 201 are at The centers of the orthographic projections on the drive backplane 1 overlap.
  • the distance between the centers is less than or equal to 0.3um.
  • any two metasurface microlens structures located in different metasurface microlens structure layers 4 and 5 and corresponding to the same light-emitting pixel unit 201 are orthogonal projections of the two metasurface microlens structures 401 and 501 on the driving backplane 1 The centers overlap.
  • the alignment error between the metasurface microlens structures 401 and 501 and the corresponding light-emitting pixel unit 201 can be set within the range of 0.3um, corresponding to different metasurface microlens structures 401, 501 of the same light-emitting pixel unit 201.
  • the alignment error between 501 can be set within the range of 0.3um, which can match the working requirements of high-precision alignment equipment in existing production lines.
  • all metasurface microlens structures 401 and 501 located in different metasurface microlens structure layers 4 and 5 and corresponding to the same luminescent pixel unit 201 constitute a metasurface composite microlens corresponding to the luminescent pixel unit 201 Structure; the light-emitting pixel unit 201 is located at the focus of the corresponding metasurface composite microlens structure.
  • the numerical aperture of the metasurface composite microlens structure is greater than or equal to 0.7 to ensure the beam convergence effect. It should be noted that the numerical aperture of the metasurface microlens structure in the embodiment of the present disclosure may be less than 0.7.
  • the metasurface microlens structure 401, 501 includes a plurality of micro-pillars 9 with the same height; for any micro-pillar 9, the height of the micro-pillar 9 is equivalent to the cross-section of the micro-pillar 9 parallel to the driving back plate 1
  • the ratio of diameters is less than or equal to 5:1.
  • the etching process difficulty of the micro-pillar 9 can be effectively reduced, and at the same time, the standing height of the micro-pillar 9 can be effectively improved. stability to avoid lodging.
  • the height of the micropillars 9 in the metasurface microlens structures 401 and 501 ranges from 500nm to 1000nm, such as 500nm, 750nm, 850nm, 100nm, etc.
  • the phase order of the micropillars 9 in the metasurface microlens structural layer 4 or 5 is 4 to 8.
  • the numerical apertures of the metasurface microlens structures 401 and 501 in the metasurface microlens structure layers 4 and 5 can be designed to be relatively small, the numerical apertures of the micropillars 9 in the metasurface microlens structures 401 and 501
  • the phase order can also be set relatively small.
  • the phase orders of the metasurface microlens structures 401 and 501 in each metasurface microlens structural layer 4 and 5 are equal; the metasurface microlens structures 401 and 501 in each metasurface microlens structural layer 4 and 5
  • the number of micro-pillars 9 in 501 is the same; the arrangement of the micro-pillars 9 in the meta-surface micro-lens structures 401 and 501 in each meta-surface micro-lens structure layer 4 and 5 is the same.
  • phase order of the metasurface microlens structures 401 and 501 in each metasurface microlens structure layer 4 and 5 can also be set to be different.
  • the metasurface microlens structures 401 and 501 in each metasurface microlens structure layer 4 and 5 The number of micro-pillars 9 can also be set to be unequal, and the arrangement of the micro-pillars 9 in the meta-surface micro-lens structures 401 and 501 in each meta-surface micro-lens structure layer 4 and 5 can be set to be different.
  • Figure 7 is a schematic diagram of two different structures of micro-pillars in embodiments of the present disclosure. As shown in Figure 7, in some embodiments, the cross-section of the micro-pillars 9 parallel to the driving backplate 1 is circular (as shown in part (a) ) or square (shown in part (b)).
  • the distance L between any two adjacent metasurface microlens structural layers 4 and 5 in the direction perpendicular to the driving backplane 1 is 0.8um ⁇ 1.2um.
  • the distance between two adjacent metasurface microlens structural layers 4 and 5 is too small, the maximum alignment error that can be tolerated between the two metasurface microlens structural layers 4 and 5 is small, so The existing production line high-precision alignment equipment is difficult to meet the high requirements for alignment accuracy; and when the distance between two adjacent metasurface microlens structural layers 4 and 5 is too large, on the one hand, it will cause the entire display panel to On the other hand, if the thickness is too large, it will affect the beam convergence effect of the two adjacent metasurface microlens structural layers 4 and 5. Based on the above considerations, in the embodiment of the present disclosure, it is preferred that the distance L between any two adjacent metasurface microlens structural layers 4 and 5 in the direction perpendicular to the driving backplane 1 is 0.8um-1.2um.
  • a lens spacer layer 6 is provided between two adjacent metasurface microlens structural layers 4 and 5.
  • two adjacent metasurface microlenses can be The spacing between the structural layers 4 and 5 is controlled; in the solution shown in Figure 6, the support height design of the supporting structure 11 can control the distance between the first metasurface microlens structural layer 4 and the second metasurface microlens structural layer 5. control the spacing between them.
  • the number of metasurface microlens structural layers 4 and 5 in the metasurface composite structural layer 3 is two.
  • the number of layers of the metasurface microlens structural layers 4 and 5 in the metasurface composite structural layer 3 is 2, respectively the first metasurface microlens structural layer 4 and the first metasurface microlens structural layer 4 located far away from each other.
  • the second metasurface microlens structure layer 5 on one side of the back plate 1 is driven.
  • the lens diameter D1 of the metasurface microlens structure 401 in the first metasurface microlens structure layer 4 is designed to be 4.5um
  • the focal length f1 is designed to be 4.869um
  • the numerical aperture NA1 is designed to be 0.629
  • the phase order m1 is designed to be 8
  • the material of micro-pillar 9 in the metasurface microlens structure is silicon oxide
  • the refractive index n1 of micro-pillar 9 is designed to be 2.03
  • the height H1 of micro-pillar 9 is designed to be 850
  • the lens diameter D2 of the metasurface microlens structure 501 in the lens structure layer 5 is designed to be 4.5um
  • the focal length f2 is designed to be 8.566um
  • the numerical aperture NA2 is designed to be 0.381
  • the phase order m1 is designed to be 8.
  • the material of the pillar 9 is silicon oxide, the refractive index n2 of the micro pillar 9 is designed to be 2.03, and the height H2 of the micro pillar 9 is designed to be 850; it is located between the first metasurface microlens structure layer 4 and the second metasurface microlens structure layer 5
  • the refractive index of the lens spacer layer 6 is designed to be 1.3, and the thickness is set to 100nm; the numerical aperture NA' of the finally achieved metasurface composite microlens structure is 0.9, and the equivalent diameter of the micropillar 9 is between 140nm and 600nm, which satisfies
  • the aspect ratio of the micro-column 9 is less than the design requirement of 5:1.
  • simulation software for example, FDTD, Comsol, Zemax, Lighttools, etc.
  • FDTD frequency division multiple access
  • Comsol Comsol
  • Zemax Zemax
  • Lighttools etc.
  • FIG. 8A is a schematic top view of the metasurface microlens structure in the first metasurface microlens structural layer in the embodiment of the present disclosure.
  • FIG. 8B is a metasurface microlens structure in the first metasurface microlens structural layer in the embodiment of the present disclosure.
  • the phase order of the metasurface microlens structure in the first metasurface microlens structure layer and the second metasurface microlens structure layer is both 8; first The number of micro-pillars 9 in the metasurface microlens structure in both the metasurface microlens structure layer and the second metasurface microlens structure layer is 177; The micro-pillars 9 in the surface micro-lens structures are arranged in the same manner.
  • Figure 9 is a schematic diagram comparing the angular brightness distribution curve of the light exit surface of the luminescent pixel unit in the display panel according to the embodiment of the present disclosure and the final light exit of the corresponding metasurface composite microlens structure.
  • the brightness of the light emitted by the metasurface composite microlens structure in the front viewing direction is approximately the brightness of the light emitted from the light exit surface of the luminescent pixel unit 201 in the front viewing direction. 2 times.
  • Figure 10 is a comparative schematic diagram of the angular brightness distribution curve of the final light emitted by the metasurface composite microlens structure when there is an alignment error and when there is no alignment error in the embodiment of the present disclosure. As shown in Figure 10, compared to when there is no alignment error When the brightness of the light emitted from the metasurface composite microlens structure is in the front viewing direction, there is an alignment error of 0.3um between the metasurface microlens structures 401, 501 and the corresponding luminescent pixel unit 201 or the corresponding luminous pixel unit 201.
  • the brightness loss of the light emitted by the metasurface composite microlens structure in the front viewing direction is less than 5%; the brightness loss caused by the alignment error It is small and will not have a substantial impact on the display quality of the product.
  • FIG. 11 is a flow chart of a method for preparing a display panel provided by an embodiment of the present disclosure. As shown in Figure 11, this preparation method can be used to prepare the display panel provided by the previous embodiment.
  • the preparation method includes:
  • Step S1 Provide a driving backplane.
  • Step S2 Form a light-emitting unit layer on the driving backplane.
  • the light-emitting function includes at least one light-emitting pixel unit.
  • Step S3 Form a metasurface composite structural layer on the light exit side of the luminescent pixel unit.
  • the metasurface composite structural layer includes: at least two layers of metasurface microlens structural layers that are sequentially arranged in a direction away from the luminescent pixel unit and are independent of each other.
  • the metasurface microlens structure layer The lens structure layer is configured to phase-modulate the incident light beam to converge the light beam.
  • step S3 may include: alternately forming a metasurface microlens structural layer and a transparent spacer layer on the light exit side of the light-emitting pixel unit. .
  • the first metasurface microlens structural layer may be formed first, then the transparent spacer layer may be formed, and then the second metasurface microlens structural layer may be formed.
  • a packaging cover is formed on the side of the metasurface composite structure layer away from the driving backplane, and at least two metasurface microlens structural layers include: a first metasurface microlens structural layer and a second metasurface microlens structural layer.
  • the lens structure layer forms a support structure between the packaging cover and the driving backplane.
  • the support structure is used to support the packaging cover and the driving backplane; the first metasurface microlens structural layer is fixed to the driving backplane, and the second metasurface microlens structural layer is fixed to the driving backplane.
  • the metasurface microlens structural layer is fixed to the packaging cover.
  • step S3 may include: first, forming a first metasurface microlens structural layer on the side of the light-emitting unit layer away from the driving backplane, and forming a second metasurface microlens structural layer on one side of the packaging cover; and then , forming a support structure between the driving backplane and the packaging cover, and aligning and fixing the driving backplane and the packaging cover.
  • embodiments of the present disclosure also provide a display device, which includes a display panel, wherein the display panel adopts the display panel provided in the aforementioned embodiments.
  • the display device can be: a mobile phone, a tablet computer, a television, a monitor, a notebook computer, a digital photo frame, a navigator, or any other product or component with a display function.

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Abstract

本公开提供了一种显示面板，其中，包括：驱动背板；发光单元层，位于所述驱动背板的一侧，包括至少一个发光像素单元；超表面复合结构层，位于所述发光像素单元的出光侧，包括：沿远离所述发光像素单元的方向依次设置且彼此独立的至少两层超表面微透镜结构层，所述超表面微透镜结构层配置为对所入射的光束进行相位调制以对光束进行收束处理。本公开实施例还提供了一种显示面板的制备方法和显示装置。

Description

显示面板及其制备方法和显示装置 技术领域
本公开涉及显示领域，特别涉及一种显示面板及其制备方法和显示装置。
背景技术
有机发光二极体(Organic Light-Emitting Diode，OLED)是近年来逐渐发展起来的显示照明技术，尤其在显示行业，OLED显示由于具有高响应、高对比度、可柔性化等优点，被视为拥有广泛的应用前景。
硅基OLED微型显示是结合CMOS工艺和OLED技术，具有自发光和采用硅基板等特点。硅基OLED体积小、重量轻、功耗低、高分辨率(PPI)，是近眼显示系统的核心器件，更是下一代微显示技术的趋势。硅基OLED的发光机理是发光材料在电场的作用下产生光。通常，对所有的发光像素施加相同的电压实现像素发光。但是，在实际开发或应用中发现，由于OLED具有朗伯型发光的特点，对于高PPI的显示装置，存在像素亮度低的问题。
发明内容
第一方面，本公开实施例提供了一种显示面板，其中，包括：
驱动背板；
发光单元层，位于所述驱动背板的一侧，包括至少一个发光像素单元；
超表面复合结构层，位于所述发光像素单元的出光侧，包括：沿远离所述发光像素单元的方向依次设置且彼此独立的至少两层超表面微透镜结构层，所述超表面微透镜结构层配置为对所入射的光束进行相位调制以对光束进行收束处理。
在一些实施例中，相邻所述超表面微透镜结构层之间形成有透明隔垫层。
在一些实施例中，对于任一所述透镜隔垫层，所述透镜隔垫层与两侧最靠近的所述超表面微透镜结构层均相接触；
所述透镜隔垫层折射率小于与其所接触的任一所述超表面微透镜结构层的折射率。
在一些实施例中，所述超表面复合结构层远离所述驱动背板的一侧形成有封装盖板。
在一些实施例中，所述超表面复合结构层远离所述驱动背板的一侧形成有封装盖板；
所述至少两层超表面微透镜结构层包括：第一超表面微透镜结构层和第二超表面微透镜结构层；
在所述封装盖板与所述驱动背板之间形成所述支撑结构，所述支撑结构用于对所述封装盖板与所述驱动背板进行支撑；
所述第一超表面微透镜结构层与所述驱动背板相固定，所述第二超表面微透镜结构层与所述封装盖板相固定。
在一些实施例中，所述支撑结构位于所述驱动背板的边缘区域和/或位于所述发光像素单元之间的区域。
在一些实施例中，针对任一所述超表面微透镜结构层，所述超表面微透镜结构层包括：与所述发光像素单元一一对应的至少一个超表面微透镜结构，所述超表面微透镜结构与对应的所述发光像素单元相对设置，超表面微透镜结构在所述驱动背板上的正投影的中心与所对应的所述发光像素单元的出光区域在所述驱动背板上的正投影的中心的距离小于或等于0.3um；
位于不同所述所述超表面微透镜结构层且对应于同一所述发光像素单元任意两个超表面微透镜结构，所述两个超表面微透镜结构在所述驱 动背板上的正投影的中心的距离小于或等于0.3um。
在一些实施例中，位于不同所述所述超表面微透镜结构层且对应于同一所述发光像素单元的全部所述超表面微透镜结构，构成与所述发光像素单元相对应的超表面复合微透镜结构；
所述发光像素单元位于对应的所述超表面复合微透镜结构的焦点处。
在一些实施例中，位于不同所述所述超表面微透镜结构层且对应于同一所述发光像素单元的全部所述超表面微透镜结构，构成与所述发光像素单元相对应的超表面复合微透镜结构；
所述超表面复合微透镜结构的数值孔径大于或等于0.7。
在一些实施例中，所述超表面微透镜结构包括高度相同的多个微柱；
针对任一所述微柱，所述微柱的高度与所述微柱平行于所述驱动背板的截面的当量直径的比值小于或等于5：1。
在一些实施例中，针对任一所述超表面微透镜结构层，所述超表面微透镜结构层内超表面微透镜结构的微柱的相位阶数为4～8。
在一些实施例中，各所述超表面微透镜结构层内所述超表面微透镜结构的相位阶数均相等；
各所述超表面微透镜结构内所述超表面微透镜结构中所述微柱的数量均相等；
各所述超表面微透镜结构内所述超表面微透镜结构中所述微柱的排布方式均相同。
在一些实施例中，所述微柱平行于所述驱动背板的截面为圆形或正方形。
在一些实施例中，任意相邻两个所述超表面微透镜结构层在垂直于所述驱动背板的方向上的间距为0.8um～1.2um。
在一些实施例中，所述超表面复合结构层内所述超表面微透镜结构 层的层数为2。
在一些实施例中，在所述发光单元层与所述超表面复合结构层之间形成有封装层。
第二方面，本公开实施例还提供了一种显示装置，其中，包括：如第一方面中提供的所述显示面板。
第三方面，本公开实施例还提供了一种显示面板的制备方法，该制备方法可用于制备第一方面中提供的所述显示面板，其中，该制备方法包括：
提供一驱动背板；
在驱动背板上形成发光单元层，所述发光功能包括至少一个发光像素单元；
在所述发光像素单元的出光侧形成超表面复合结构层，所述超表面复合结构层包括：沿远离所述发光像素单元的方向依次设置且彼此独立的至少两层超表面微透镜结构层，所述超表面微透镜结构层配置为对所入射的光束进行相位调制以对光束进行收束处理。
在一些实施例中，在所述发光像素单元的出光侧形成超表面复合结构层的步骤包括：
在所述发光像素单元的出光侧交替形成所述超表面微透镜结构层和透明隔垫层。
在一些实施例中，在所述发光像素单元的出光侧形成超表面复合结构层的步骤包括：
在所述发光单元层远离所述驱动背板的一侧形成第一超表面微透镜结构层；
在封装盖板的一侧形成所述第二超表面微透镜结构层；
在驱动背板与封装盖板之间形成支撑结构，并将所述驱动背板与所 述封装盖板进行对位、固定。
附图说明
图1为相关技术所涉及显示面板的一种截面示意图；
图2为相关技术所涉及显示面板的另一种截面示意图；
图3为透镜中透镜口径、孔径角、焦距的一种示意图；
图4为本公开实施例提供的显示面板的一种截面示意图；
图5为本公开实施例中一个发光像素单元与其所对应的一个超表面微透镜结构的一种俯视示意图；
图6为本公开实施例提供的显示面板的另一种截面示意图；
图7为本公开实施例中微柱的两种不同结构示意图；
图8A为本公开实施例中第一超表面微透镜结构层内的超表面微透镜结构的一种俯视示意图；
图8B为本公开实施例中第一超表面微透镜结构层内的超表面微透镜结构的一种俯视示意图；
图9为本公开实施例所提供的显示面板中发光像素单元的出光面处与对应超表面复合微透镜结构最终出光的角亮度分布曲线的对比示意图；
图10为本公开实施例中存在对位误差以及不存在对位误差时超表面复合微透镜结构最终出光的角亮度分布曲线的对比示意图；
图11为本公开实施例提供的显示面板的制备方法的一种流程图。
具体实施方式
为使本公开的目的、技术方案和优点更加清楚，下面将结合本公开实施例中的附图，对本公开实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本公开一部分实施例，而不是全部的实施例。 基于本公开中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本公开保护的范围。
在本公开实施例中，发光像素单元是指显示面板上用于进行发光的最小单元；其中发光像素单元可以为电流驱动型的发光元件。为方便描述，以发光像素单元为OLED为例进行示例性描述。
另外，本公开中范围A～B的表述方式中，限定的范围包括A和B两个端点值。
图1为相关技术所涉及显示面板的一种截面示意图，如图1所示，由于OLED具有朗伯型发光的特点，相关技术所涉及显示面板内的发光像素单元201所出射的光束也具有朗伯型发光的特点。通过测试发现，相关技术所涉及显示面板内的发光像素单元201所出射的光束在正视角方向(-15°～+15°)上仅有约40％的能量利用率。
为了提升发光像素单元201的正视角亮度，相关技术又提出了在发光像素单元201的出光侧构建超表面微透镜结构，以对发光像素单元201的出射光束进行收束处理的技术方案。
图2为相关技术所涉及显示面板的另一种截面示意图，如图2所示，在发光像素单元201的出光侧增设一层超表面微透镜结构层19，该超表面微透镜结构层19包括与发光像素单元201的一一对应的超表面微透镜结构20(图2中仅示例性画出了3个发光像素单元201和3个对应的超表面微透镜结构20)，超表面微透镜结构20包括按照一定规则排列、具有特定相位调制解的一组微柱21(也称为纳米柱)结构，根据透镜相位表达及离散结果构建大数值孔径超表面透镜；其中，微柱21的高度一般在百纳米量级(100nm～1000nm范围内)。基于上述超表面微透镜结构20，能够实现低放置高度条件(≤1000nm)下的OLED发光收束效果，从而实现发光像素单元201的正视角亮度的提升。
超表面微透镜结构20的构建原理，是基于具有离散化相位调制效果 的微柱21，针对透镜的相位表达式进行离散、对应排列，而实现在低器件厚度(百纳米量级)条件下的光束调制效果。在超表面透镜的设计过程中，微柱21的结构周期通常为半波长量级，微柱21高度为百纳米量级，微柱21的当量直径为几十纳米至百纳米量级。对于超表面透镜所需表达的相位面，需根据透镜口径D、所需焦距f，由相位表达公式计算透镜相位分布，相位面折叠归于0～2π范围内后根据微柱21周期进行离散，获得可对应微柱21排布的相位分布。其中，超表面微透镜结构20内微柱21排布的相位分布满足如下公式：
Figure PCTCN2022096117-appb-000001
Figure PCTCN2022096117-appb-000002
其中，r表示位置坐标(x，y)处微柱21与超表面微透镜结构20的中心点(0，0)之间的经向距离，0≤r≤D/2，λ表示入射光的波长，
Figure PCTCN2022096117-appb-000003
表示径向距离为r的位置处的相位，f表示焦距。根据上述公式可以得到针对波长为λ、焦距为f的超表面微透镜结构20内的相位分布。
同时，考虑到微柱21的尺寸，为了设计及表达的准确与便利，通常将超表面微透镜结构20内的微柱21的相位分为m阶进行表达(即，超表面微透镜结构20内微柱21的相位阶数为m)。即，超表面微透镜结构20内包含分别对应取值在0～2π范围内的m个不同相位值的m类微柱21(一类微柱21对应一个相位值)通过上述操作，可将超表面微透镜结构20的相位表达式进一步离散为具有一定相位阶数分布的表达关系。
作为一个具体示例，该m个相位指可分别为
Figure PCTCN2022096117-appb-000004
Figure PCTCN2022096117-appb-000005
2π。当然，也可以是采用其他方式在0～2π范围内的选取m个相位值，在选取m个相位值过程中，应尽可能的保证该m个相位值在 0～2π范围内均匀分布，以保证对透镜的精准表达。一般地，m取值越大，则对超表面微透镜结构20的表达越精准，该超表面微透镜结构20的聚焦效率越高，但是所需设置的微柱21数量越多，微柱21的周期越小，制备工艺难度越高。
作为一个示例，将
Figure PCTCN2022096117-appb-000006
代入至上述式(1)，在波长λ和焦距f均已知的情况下，可求解出r的大小；再通过式(2)可求得相位值为
Figure PCTCN2022096117-appb-000007
所对应微柱21的位置分布。
在运用超表面透镜实现调制时，对于微柱21的深宽比是有一定要求的。这是由于，上述方案运用的传输型透射式超表面微透镜结构20是基于高折射率材料(折射率一般＞1.8)微柱21在相应周期条件内形成的等效折射率，并结合微柱21高度而达成所需相位延迟解。其中，微柱21的相位值满足：
Figure PCTCN2022096117-appb-000008
其中，
Figure PCTCN2022096117-appb-000009
为微柱21所对应的相位值，H为微柱21的高度值，n eff为微柱21的等效折射率。n eff与微柱21本身的折射率、微柱21外围材料折射率、微柱21的占空比相关。
上述微柱21的深宽比是指：微柱21的高度H与微柱21的当量直径d(与高度方向相垂直的截面的当量直径)的比值；微柱21的占空比是指微柱21的当量直径d与微柱21的设置周期P(在行方向或列方向上相邻两个微柱21的中心点距离，为预先设置的一个定值)的比值。
作为一个示例，将
Figure PCTCN2022096117-appb-000010
代入至上述式(3)，在波长λ和微柱21的高度均已知的情况下，可求解出微柱21的等效折射率n eff；基于该等效折射率、微柱21本身的折射率、微柱21外围材料折射率、微柱21 的设置周期P已知的情况下，可求解出对应的相位值
Figure PCTCN2022096117-appb-000011
的微柱21的当量直径d的大小。
需要说明的是，在等效折射率n eff、微柱21本身的折射率、微柱21外围材料折射率均一定的情况下，微柱21的设置周期P越小，则所求解出的微柱21的当量直径d越小。
在实际应用中，微柱21需要特定的高度H及足够小的当量直径d，才可形成一组能覆盖0～2π相位调制范围的微柱21组。
图3为透镜中透镜口径、孔径角、焦距的一种示意图，如图3所示，透镜的数值孔径(Numerical Aperture，NA)是透镜与被检物体之间介质的折射率n 0和孔径角2α半数的正弦之乘积。即：
NA＝n 0*sinα...式(4)
孔径角又称“镜口角”，是透镜光轴上的物体点与物镜前透镜的有效直径所形成的角度。孔径角越大，进入透镜的光通量就越大，它与透镜的有效直径成正比，与焦点的距离成反比。
为保证对光束的收束效果，需要将图2中超表面微透镜结构20的数值孔径NA设置较大(一般是NA≥0.7)，以保证OLED所出射的光能够光能够尽可能多的到达所对应的超表面微透镜结构20。
此时，通过式(4)可见，在n 0一定的情况下，NA越大，则sinα越大；通过图3可见，在透镜口径D一定的情况下，sinα越大，则焦距f越小。
在相关技术中，以OLED所发出光束的光为蓝光(波长设定为450nm)，超表面微透镜结构20内微柱21的高度设置为500nm，微柱21的周期设置为500nm，微柱21的折射率设置为2.03，超表面微透镜结构20的透镜口径D设置为4.5um，超表面微透镜结构20的数值孔径NA设置为70％，超表面微透镜结构20的相位阶数设置为8。通过软件模拟可得到如下微 柱结构库。
Figure PCTCN2022096117-appb-000012
基于上述内容可见，在将微柱21的高度H设计为500nm且将超表面微透镜结构20的数值孔径NA设置为0.7时，所求得对应8个不同相位值的8类微柱21的当量直径在80nm～190nm，微柱21的深宽比范围500：190～500：80；也就是说，存在部分微柱21的深宽比大于5：1。
在实际生产制备上述超表面微透镜结构20的过程中发现，对于深宽比大于5：1的微柱21的刻蚀制备，具有极高的刻蚀工艺难度；同时，这类纳米量级的高深宽比结构的稳定性较差，容易在后续加工及使用过程中出现倒伏现象，不利于器件量产化应用。
另外，在相关技术中，为保证对光束的收束效果，需要将超表面微透镜结构20的数值孔径NA设置较大(一般是NA≥0.7)，此时所对应透镜的焦距减小，所需要设置的相位阶数增大，以保证对相位表达的连续性。
如前文所描述，随着相位阶数m的增大，所需设置的微柱21数量越多，微柱21的周期P越小，此时通过式(3)所求解出的微柱21的当量直径d越小，相应地，微柱21的深宽比越大，此时所需的刻蚀工艺难度越大，微柱21的稳定性越差。与此同时，由于相位阶数m的增大，则超表面微透镜结构20所包含的微柱21类型(不同类型微柱21对应不同相位值和具有不同当量直径d，同一类型微柱21对应相同相位值和具有相同当量直径d)越多，此时对于刻蚀工艺的刻蚀精度要求越高。
为有效克服相关技术所存在的至少之一的技术问题，本公开提供了相应的解决方案。本公开的技术方案可在满足对发光像素单元所发出光束的收束效果的同时，使得显示面板内所设置超表面微透镜结构层中的 超表面微透镜结构的数值孔径NA能够取较小值，此时超表面微透镜结构的相位阶数也能够取较小值，可以有效降低超表面微透镜结构内纳米柱的深宽比，以及有效降低超表面微透镜结构制备工艺过程中的刻蚀精度要求。
图4为本公开实施例提供的显示面板的一种截面示意图，图5为本公开实施例中一个发光像素单元与其所对应的一个超表面微透镜结构的一种俯视示意图，如图4和图5所示，该显示面板包括：驱动背板1、发光单元层2和超表面复合结构层3。
在一些实施例中，本公开实施例所提供的显示面板可以为硅基OLED显示面板；驱动背板1包括晶圆基底和应用标准的CMOS工艺在晶圆基底上所形成硅基OLED所需要的像素驱动电路。
发光单元层2位于驱动背板1的一侧，包括至少一个发光像素单元201。在一些实施例中，发光像素单元201为OLED。其中，OLED包括阳极、阴极和位于OLED之间的发光功能层；其中阳极一般作为底电极与对应的像素驱动电路相连，阳极可采用具有高反射性能的金属材料制备；阴极一般作为顶电极，阴极可以为透镜电极或半透半反电极；发光功能层至少包括有机发光层；当然，发光功能层还可以包括位于有机发光层与阳极之间的空穴注入层和空穴传输层、有机发光层与阴极之间的电子注入层和电子传输层中的至少之一。
在一些实施例中，发光单元层2还可以包括像素界定层202，像素界定层202上形成有与发光像素单元201一一对应的至少一个像素容纳孔，发光像素单元201位于对应的像素容纳孔内。
需要说明的是，图4中仅示例性画出了3个像素容纳孔和3个发光像素单元201，该情况仅起到示例性作用，其不会对本公开的技术方案产生限制。
超表面复合结构层3位于发光像素单元201的出光侧，超表面复合 结构层3包括：沿远离发光像素单元201的方向依次设置且彼此独立的至少两层超表面微透镜结构层4、5，超表面微透镜结构层4、5配置为对所入射的光束进行相位调制以对光束进行收束处理。
在本公开实施例中，针对任一超表面微透镜结构层4、5，超表面微透镜结构层4、5包括：与发光像素单元201一一对应的至少一个超表面微透镜结构401、501，超表面微透镜结构401、501与对应的发光像素单元201相对设置。位于不同超表面微透镜结构层4、5且对应于同一发光像素单元201的全部超表面微透镜结构401、501，构成与该发光像素单元201相对应的超表面复合微透镜结构。
在本公开实施例中，至少两层超表面微透镜结构层4、5的叠加使用可看作是至少两个聚光透镜的叠加使用；通过该技术手段，可在各超表面微透镜结构层4、5内超表面微透镜结构401、501的数值孔径均设置的较小的情况下，实现超表面复合结构层3内超表面复合微透镜结构的具有较大的数值孔径。
以图2所示相关技术中单层超表面微透镜结构层内的超表面微透镜结构的数值孔径为NA 0为例；在本公开实施例中，可在各层超表面微透镜结构层4、5内的超表面微透镜结构401、501的数值孔径均设置为小于NA 0的情况下，实现超表面复合结构层3内超表面复合微透镜结构的数值孔径为NA 0。由此可见，本公开的技术方案可有效减小所设置超表面微透镜结构层4、5内超表面微透镜结构401、501的数值孔径。
基于上述内容可见，本公开的技术方案可在满足对发光像素单元所发出光束的收束效果的同时，使得显示面板内所设置超表面微透镜结构层中的超表面微透镜结构的数值孔径NA能够取较小值，此时超表面微透镜结构的相位阶数也能够取较小值，可以有效降低超表面微透镜结构内纳米柱的深宽比，以及有效降低超表面微透镜结构制备工艺过程中的刻蚀精度要求。
图4中仅示例性画出了超表面复合结构层包括2层超表面微透镜结构层的情况，该情况仅起到示例性作用，其不会对本公开的技术方案产生限制。本领域技术人员应该理解的是，本公开实施例中超表面复合结构层3还可以包括3层、甚至更多层超表面微透镜结构层，这些情况未给出相应附图。
参见图4所示，在一些相邻超表面微透镜结构层之间形成有透明隔垫层。透明隔垫层可起到支撑超表面微透镜结构层的作用。
在一些实施例中，对于任一透镜隔垫层6，透镜隔垫层6与两侧最靠近的超表面微透镜结构层4、5均相接触；透镜隔垫层6折射率小于与其所接触的任一超表面微透镜结构层的折射率。
进一步可选地，透镜隔垫层6折射率与其所接触的任一超表面微透镜结构层4、5的折射率的差均小于或等于-0.5。
在本公开实施例中，超表面微透镜结构层4、5采用高折射率材料进行制备，超表面微透镜结构层4、5的折射率一般大于或等于1.8；透镜隔垫层6采用低折射率材料进行制备，透镜隔垫层6的折射率一般小于或等于1.3。
在一些实施例中，超表面复合结构层3远离驱动背板1的一侧形成有封装盖板8。封装盖板8可起到对超表面复合结构层3进行保护的作用。其中，封装盖板8可以为玻璃盖板。
在一些实施例中，在发光单元层2与超表面复合结构层3之间形成有封装层7。封装层7用于发光像素单元201进行封装、保护；封装层7一般采用无机材料进行制备，封装层7可作为超表面微透镜结构层4的衬底，在封装层7上可直接构建超表面微透镜结构层4。
图6为本公开实施例提供的显示面板的另一种截面示意图，如图6所示，与前面实施例中超表面复合结构层3内的超表面微透镜结构层与透镜隔垫层6交替设置于驱动背板1上所不同；在图6所示实施例中， 部分超表面微透镜结构层4固定设置于驱动背板1上，另一部分超表面微透镜结构层5固定设定于封装盖板8上。
作为一个示例，至少两层超表面微透镜结构层包括：第一超表面微透镜结构层4和第二超表面微透镜结构层5；在封装盖板8与驱动背板1之间形成支撑结构11，支撑结构11用于对封装盖板8与驱动背板1进行支撑；第一超表面微透镜结构层4与驱动背板1相固定，第二超表面微透镜结构层5与封装盖板8相固定。
在设置有透镜隔垫层6的方案中，需要在某一层超表面微透镜结构层上通过沉积、旋涂等工艺来制备出具有一定厚度的透镜隔垫层6材料，该上述制备透镜隔垫层6工艺过程中，可能造成透镜隔垫层6材料渗透进超表面微透镜结构层(超表面微透镜结构层中的超表面微透镜结构包括多个微柱9(即纳米柱)，相连微柱9之间存在间隔空间)中，此时渗透进超表面微透镜结构层的透镜隔垫层6材料一方面会造成器件整体透过率的下降，另一方面还会影响超表面微透镜结构层的透镜性能表达。
在本公开实施例中，通过将部分超表面微透镜结构层4固定设置于驱动背板1上，将另一部分超表面微透镜结构层5固定设置于封装盖板8上，因此必然存在相邻两个超表面微透镜结构层4、5无需设置透镜隔垫层6。故，可以有效减少透镜隔垫层6的设置数量，从而能有效改善上述技术问题。
在一个实施例中，当超表面复合结构层3内仅包括两层超表面微透镜结构层时，即超表面复合结构层3内仅包括上述第一超表面微透镜结构层4和第二超表面微透镜结构层5，此时显示面板内不存在上述透镜隔垫层6，因而可有效解决因设置透镜隔垫层6而导致的上述技术问题。
需要说明的是，第一超表面微透镜结构层4和第二超表面微透镜结构层5的对位可由构建在封装层7与封装盖板8上的对位标记来实现，降低直接对位加工的难度。
在一些实施例中，支撑结构11位于驱动背板1的边缘区域和/或位于发光像素单元201之间的区域。
参见图6所示，在一些实施例中，在第二超表面微透镜结构层5与封装盖板8(一般为玻璃盖板)之间设置有介质层10；也就是说，在封装盖板8上制备第二超表面微透镜结构层之前，会先制备一层介质层10，通过设置该介质层10，有利于提升第二超表面微透镜结构层5与封装盖板8之间的结合牢固度。
继续参见上述图4和图6所示，在一些实施例中，超表面微透镜结构401、501在驱动背板1上的正投影的中心与所对应的发光像素单元201的出光区域在驱动背板1上的正投影的中心的距离小于或等于0.3um；优选地，超表面微透镜结构401、501在驱动背板1上的正投影的中心与所对应的发光像素单元201的出光区域在驱动背板1上的正投影的中心重叠。
位于不同超表面微透镜结构层4、5且对应于同一发光像素单元201任意两个超表面微透镜结构401、501，两个超表面微透镜结构401、501在驱动背板1上的正投影的中心的距离小于或等于0.3um。优选地，位于不同超表面微透镜结构层4、5且对应于同一发光像素单元201任意两个超表面微透镜结构，两个超表面微透镜结构401、501在驱动背板1上的正投影的中心重叠。
在本公开实施例中，超表面微透镜结构401、501与对应发光像素单元201之间的对位误差可设置在0.3um范围内，对应同一发光像素单元201的不同超表面微透镜结构401、501之间的对位误差可设置在0.3um范围内，可以匹配现有产线高精度对位设备工作需求。
在一些实施例中，位于不同超表面微透镜结构层4、5且对应于同一发光像素单元201的全部超表面微透镜结构401、501，构成与发光像素单元201相对应的超表面复合微透镜结构；发光像素单元201位于对应 的超表面复合微透镜结构的焦点处。通过该设置，可使得发光像素单元201所发出的光能够尽可能多的到达至对应的复合微透镜结构中，有利于提升发光像素单元201的最终出光亮度。
在一些实施例中，超表面复合微透镜结构的数值孔径大于或等于0.7，以保证对光束的收束效果。需要说明的是，本公开实施例中超表面微透镜结构的数值孔径可以小于0.7。
在一些实施例中，超表面微透镜结构401、501包括高度相同的多个微柱9；针对任一微柱9，微柱9的高度与微柱9平行于驱动背板1的截面的当量直径的比值小于或等于5：1。在本公开实施例中，通过将各微柱9的深宽比限制在小于或等于5：1，可以有效降低微柱9的刻蚀工艺难度，与此同时还能有效提升微柱9的站立稳定性，避免出现倒伏现象。
在一些实施例中，超表面微透镜结构401、501内微柱9的高度范围在500nm～1000nm，例如500nm、750nm、850nm、100nm等。
在一些实施例中，针对任一超表面微透镜结构层4、5，超表面微透镜结构层4、5内微柱9的相位阶数为4～8。在本公开实施例中，由于超表面微透镜结构层4、5内超表面微透镜结构401、501的数值孔径可以设计的相对较小，因此超表面微透镜结构401、501内微柱9的相位阶数也可以设置的相对较小。
在一些实施例中，各超表面微透镜结构层4、5内超表面微透镜结构401、501的相位阶数均相等；各超表面微透镜结构层4、5内超表面微透镜结构401、501中微柱9的数量均相等；各超表面微透镜结构层4、5内超表面微透镜结构401、501中微柱9的排布方式均相同。
当然，各超表面微透镜结构层4、5内超表面微透镜结构401、501的相位阶数也可以设置为不同，各超表面微透镜结构层4、5内超表面微透镜结构401、501中微柱9的数量也可以设置为不相等，各超表面微透镜结构层4、5内超表面微透镜结构401、501中微柱9的排布方式设置 为不同。
图7为本公开实施例中微柱的两种不同结构示意图，如图7所示，在一些实施例中，微柱9平行于驱动背板1的截面为圆形((a)部分所示)或正方形((b)部分所示)。
参见图4和图6所示，在一些实施例中，任意相邻两个超表面微透镜结构层4、5在垂直于驱动背板1的方向上的间距L为0.8um～1.2um。
在实际应用中，发现当相邻两个超表面微透镜结构层4、5之间间距过小时，两个超表面微透镜结构层4、5之间能够容忍的最大对位误差较小，因此对于对位精准度要求较高，现有产线高精度对位设备难以满足；而当相邻两个超表面微透镜结构层4、5之间间距过大时，一方面会导致显示面板整体厚度过大，另一方面会影响相邻两个超表面微透镜结构层4、5对光束的收束效果。基于上述考虑，本公开实施例中优选将任意相邻两个超表面微透镜结构层4、5在垂直于驱动背板1的方向上的间距L为0.8um～1.2um。
在图4所示方案中，相邻两个超表面微透镜结构层4、5之间设置有透镜隔垫层6，通过透镜隔垫层6的厚度设计可对相邻两个超表面微透镜结构层4、5之间的间距进行控制；在图6所示方案中，通过支撑结构11的支撑高度设计可对第一超表面微透镜结构层4与第二超表面微透镜结构层5之间的间距进行控制。
在一些实施例中，超表面复合结构层3内超表面微透镜结构层4、5的层数为2。
作为一个具体示例，超表面复合结构层3内超表面微透镜结构层4、5的层数为2，分别为第一超表面微透镜结构层4和位于第一超表面微透镜结构层4远离驱动背板1一侧的第二超表面微透镜结构层5。
以采用图4中显示面板的结构为例，第一超表面微透镜结构层4内的超表面微透镜结构401的透镜口径D1设计为4.5um，焦距f1设计为 4.869um，数值孔径NA1设计为0.629，相位阶数m1设计为8，超表面微透镜结构内微柱9材料采用氧化硅，微柱9的折射率n1设计为2.03，微柱9的高度H1设计为850；第二超表面微透镜结构层5内的超表面微透镜结构501的透镜口径D2设计为4.5um，焦距f2设计为8.566um，数值孔径NA2设计为0.381，相位阶数m1设计为8，超表面微透镜结构内微柱9材料采用氧化硅，微柱9的折射率n2设计为2.03，微柱9的高度H2设计为850；位于第一超表面微透镜结构层4与第二超表面微透镜结构层5之间的透镜隔垫层6的折射率设计为1.3，厚度设置为100nm；最终达成的超表面复合微透镜结构的数值孔径NA’为0.9，且微柱9的当量直径在140nm～600nm之间，满足微柱9的深宽比小于5：1的设计要求。
在实际应用中，可通过仿真软件(例如，FDTD、Comsol、Zemax、Lighttools等)来对各超表面微透镜结构层内的超表面微透镜结构中的微柱9的数量、分布、各类型微柱9的当量直径进行优化、求解。
图8A为本公开实施例中第一超表面微透镜结构层内的超表面微透镜结构的一种俯视示意图，图8B为本公开实施例中第一超表面微透镜结构层内的超表面微透镜结构的一种俯视示意图，如图8A和图8B所示，第一超表面微透镜结构层和第二超表面微透镜结构层内超表面微透镜结构的相位阶数均为8；第一超表面微透镜结构层和第二超表面微透镜结构层内超表面微透镜结构中微柱9的数量均为177；第一超表面微透镜结构层和第二超表面微透镜结构层内超表面微透镜结构中微柱9的排布方式均相同。
图9为本公开实施例所提供的显示面板中发光像素单元的出光面处与对应超表面复合微透镜结构最终出光的角亮度分布曲线的对比示意图，如图9所示，在设置超表面复合结构层3后，超表面复合微透镜结构所出射的光线在正视角方向(-15°～+15°)的亮度，约为发光像素 单元201的出光面处所出射的光线在正视角方向的亮度的2倍。
图10为本公开实施例中存在对位误差以及不存在对位误差时超表面复合微透镜结构最终出光的角亮度分布曲线的对比示意图，如图10所示，相较于不存在对位误差时超表面复合微透镜结构所出射的光线在正视角方向的亮度，在超表面微透镜结构401、501与对应发光像素单元201之间的存在0.3um对位误差或者对应同一发光像素单元201的不同超表面微透镜结构401、501之间存在0.3um对位误差时，超表面复合微透镜结构所出射的光线在正视角方向的亮度损失小于5％；该因对位误差所引起的亮度损失较小，不会对产品的显示质量造成实质影响。
基于同一发明构思，本公开实施例还提供了一种显示面板的制备方法。图11为本公开实施例提供的显示面板的制备方法的一种流程图，如图11所示，该制备方法可用于制备前面实施例所提供的显示面板，该制备方法包括：
步骤S1、提供一驱动背板。
步骤S2、在驱动背板上形成发光单元层，发光功能包括至少一个发光像素单元。
步骤S3、在发光像素单元的出光侧形成超表面复合结构层，超表面复合结构层包括：沿远离发光像素单元的方向依次设置且彼此独立的至少两层超表面微透镜结构层，超表面微透镜结构层配置为对所入射的光束进行相位调制以对光束进行收束处理。
在一些实施例中，在相邻超表面微透镜结构层之间形成有透明隔垫层时，步骤S3可包括：在发光像素单元的出光侧交替形成超表面微透镜结构层和透明隔垫层。作为一个具体示例性，参见图4中所示，可以先形成第一超表面微透镜结构层，然后再形成透明隔垫层，接着再形成第二超表面微透镜结构层。
在一些实施例中，在超表面复合结构层远离驱动背板的一侧形成有 封装盖板，至少两层超表面微透镜结构层包括：第一超表面微透镜结构层和第二超表面微透镜结构层，在封装盖板与驱动背板之间形成支撑结构，支撑结构用于对封装盖板与驱动背板进行支撑；第一超表面微透镜结构层与驱动背板相固定，第二超表面微透镜结构层与封装盖板相固定。此时，步骤S3可包括：首先，在发光单元层远离驱动背板的一侧形成第一超表面微透镜结构层，以及在封装盖板的一侧形成第二超表面微透镜结构层；然后，在驱动背板与封装盖板之间形成支撑结构，并将驱动背板与封装盖板进行对位、固定。
对应各步骤的具体描述，可参见前面实施例中的相应内容，此处不再赘述。
基于同一发明构思，本公开实施例还提供了一种显示装置，该显示装置包括显示面板，其中该显示面板采用前述实施例所提供的显示面板。其中，显示装置可以为：手机、平板电脑、电视机、显示器、笔记本电脑、数码相框、导航仪等任何具有显示功能的产品或部件。
可以理解的是，以上实施方式仅仅是为了说明本公开的原理而采用的示例性实施方式，然而本公开并不局限于此。对于本领域内的普通技术人员而言，在不脱离本公开的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本公开的保护范围。

Claims (20)

  1. 一种显示面板，其中，包括：
    驱动背板；
    发光单元层，位于所述驱动背板的一侧，包括至少一个发光像素单元；
    超表面复合结构层，位于所述发光像素单元的出光侧，包括：沿远离所述发光像素单元的方向依次设置且彼此独立的至少两层超表面微透镜结构层，所述超表面微透镜结构层配置为对所入射的光束进行相位调制以对光束进行收束处理。
  2. 根据权利要求1所述的显示面板，其中，相邻所述超表面微透镜结构层之间形成有透明隔垫层。
  3. 根据权利要求1所述的显示面板，其中，对于任一所述透镜隔垫层，所述透镜隔垫层与两侧最靠近的所述超表面微透镜结构层均相接触；
    所述透镜隔垫层折射率小于与其所接触的任一所述超表面微透镜结构层的折射率。
  4. 根据权利要求2所述的显示面板，其中，所述超表面复合结构层远离所述驱动背板的一侧形成有封装盖板。
  5. 根据权利要求1所述的显示面板，其中，所述超表面复合结构层远离所述驱动背板的一侧形成有封装盖板；
    所述至少两层超表面微透镜结构层包括：第一超表面微透镜结构层和第二超表面微透镜结构层；
    在所述封装盖板与所述驱动背板之间形成所述支撑结构，所述支撑结构用于对所述封装盖板与所述驱动背板进行支撑；
    所述第一超表面微透镜结构层与所述驱动背板相固定，所述第二超表面微透镜结构层与所述封装盖板相固定。
  6. 根据权利要求5所述的显示面板，其中，所述支撑结构位于所述驱动背板的边缘区域和/或位于所述发光像素单元之间的区域。
  7. 根据权利要求1至6中任一所述的显示面板，其中，针对任一所述超表面微透镜结构层，所述超表面微透镜结构层包括：与所述发光像素单元一一对应的至少一个超表面微透镜结构，所述超表面微透镜结构与对应的所述发光像素单元相对设置，超表面微透镜结构在所述驱动背板上的正投影的中心与所对应的所述发光像素单元的出光区域在所述驱动背板上的正投影的中心的距离小于或等于0.3um；
    位于不同所述所述超表面微透镜结构层且对应于同一所述发光像素单元任意两个超表面微透镜结构，所述两个超表面微透镜结构在所述驱动背板上的正投影的中心的距离小于或等于0.3um。
  8. 根据权利要求7所述的显示面板，其中，位于不同所述所述超表面微透镜结构层且对应于同一所述发光像素单元的全部所述超表面微透镜结构，构成与所述发光像素单元相对应的超表面复合微透镜结构；
    所述发光像素单元位于对应的所述超表面复合微透镜结构的焦点处。
  9. 根据权利要求7所述的显示面板，其中，位于不同所述所述超表面微透镜结构层且对应于同一所述发光像素单元的全部所述超表面微透 镜结构，构成与所述发光像素单元相对应的超表面复合微透镜结构；
    所述超表面复合微透镜结构的数值孔径大于或等于0.7。
  10. 根据权利要求1至9中任一所述的显示面板，其中，所述超表面微透镜结构包括高度相同的多个微柱；
    针对任一所述微柱，所述微柱的高度与所述微柱平行于所述驱动背板的截面的当量直径的比值小于或等于5：1。
  11. 根据权利要求10所述的显示面板，其中，针对任一所述超表面微透镜结构层，所述超表面微透镜结构层内超表面微透镜结构的微柱的相位阶数为4～8。
  12. 根据权利要求10所述的显示面板，其中，各所述超表面微透镜结构层内所述超表面微透镜结构的相位阶数均相等；
    各所述超表面微透镜结构层内所述超表面微透镜结构中所述微柱的数量均相等；
    各所述超表面微透镜结构层内所述超表面微透镜结构中所述微柱的排布方式均相同。
  13. 根据权利要求10所述的显示面板，其中，所述微柱平行于所述驱动背板的截面为圆形或正方形。
  14. 根据权利要求1至13中任一所述的显示面板，其中，任意相邻两个所述超表面微透镜结构层在垂直于所述驱动背板的方向上的间距为0.8um～1.2um。
  15. 根据权利要求1至14中任一所述的显示面板，其中，所述超表面复合结构层内所述超表面微透镜结构层的层数为2。
  16. 根据权利要求1至15中任一所述的显示面板，其中，在所述发光单元层与所述超表面复合结构层之间形成有封装层。
  17. 一种显示装置，其中，包括：如权利要求1至16中任一所述显示面板。
  18. 一种如权利要求1至16中任一所述显示面板的制备方法，其中，包括：
    提供一驱动背板；
    在驱动背板上形成发光单元层，所述发光功能包括至少一个发光像素单元；
    在所述发光像素单元的出光侧形成超表面复合结构层，所述超表面复合结构层包括：沿远离所述发光像素单元的方向依次设置且彼此独立的至少两层超表面微透镜结构层，所述超表面微透镜结构层配置为对所入射的光束进行相位调制以对光束进行收束处理。
  19. 根据权利要求18所述的制备方法，其中，所述显示面板为权利要求2中所述显示面板；
    在所述发光像素单元的出光侧形成超表面复合结构层的步骤包括：
    在所述发光像素单元的出光侧交替形成所述超表面微透镜结构层和透明隔垫层。
  20. 根据权利要求18所述的制备方法，其中，所述显示面板为权利 要求5中所述显示面板；
    在所述发光像素单元的出光侧形成超表面复合结构层的步骤包括：
    在所述发光单元层远离所述驱动背板的一侧形成第一超表面微透镜结构层；
    在封装盖板的一侧形成所述第二超表面微透镜结构层；
    在驱动背板与封装盖板之间形成支撑结构，并将所述驱动背板与所述封装盖板进行对位、固定。
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110133773A (zh) * 2019-06-27 2019-08-16 华南师范大学 一种对光场振幅与相位均可调的超表面结构
CN111061070A (zh) * 2019-12-24 2020-04-24 华中科技大学鄂州工业技术研究院 基于超表面结构的多功能阵列元件及多功能实现方法
CN113471390A (zh) * 2021-07-05 2021-10-01 京东方科技集团股份有限公司 显示面板及制备方法、超表面结构的构建方法、显示装置
CN114388603A (zh) * 2021-04-01 2022-04-22 友达光电股份有限公司 显示装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110133773A (zh) * 2019-06-27 2019-08-16 华南师范大学 一种对光场振幅与相位均可调的超表面结构
CN111061070A (zh) * 2019-12-24 2020-04-24 华中科技大学鄂州工业技术研究院 基于超表面结构的多功能阵列元件及多功能实现方法
CN114388603A (zh) * 2021-04-01 2022-04-22 友达光电股份有限公司 显示装置
CN113471390A (zh) * 2021-07-05 2021-10-01 京东方科技集团股份有限公司 显示面板及制备方法、超表面结构的构建方法、显示装置

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