WO2023218260A1 - Capteur de pression différentielle basé sur l'impédance électrochimique de l'ouverture - Google Patents

Capteur de pression différentielle basé sur l'impédance électrochimique de l'ouverture Download PDF

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Publication number
WO2023218260A1
WO2023218260A1 PCT/IB2023/053327 IB2023053327W WO2023218260A1 WO 2023218260 A1 WO2023218260 A1 WO 2023218260A1 IB 2023053327 W IB2023053327 W IB 2023053327W WO 2023218260 A1 WO2023218260 A1 WO 2023218260A1
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Prior art keywords
exemplary
elastic layer
electrically conductive
conductive fluid
electrochemical
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PCT/IB2023/053327
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English (en)
Inventor
Ali HOSSEIN ASLI ARDEBILI
Hesameddin AHMADI
Mojtaba TAGHIPOOR
Original Assignee
Hossein Asli Ardebili Ali
Ahmadi Hesameddin
Taghipoor Mojtaba
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Application filed by Hossein Asli Ardebili Ali, Ahmadi Hesameddin, Taghipoor Mojtaba filed Critical Hossein Asli Ardebili Ali
Publication of WO2023218260A1 publication Critical patent/WO2023218260A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms

Definitions

  • the present disclosure generally relates to pressure sensors, and particularly, to a flexible pressure sensor and a method for utilizing thereof for measuring pressure through sensing changes in electrochemical impedance/conductance due to an applied pressure to an exemplary sensor.
  • Pressure a ratio of a force to an area over which it applies, is all over in basic operations in nature. Even inside a living body, physiological actions generate different pressures, including intraocular pressure, blood pressure, etc.
  • Pressure sensing is one of the most interesting physiological parameters to assess whether organs or biological systems are healthy in a body. For this purpose, many efforts have been made to develop flexible biocompatible pressure sensors. There are various principles employed for pressure sensing; piezoelectric, piezoresistive, capacitive, resonant, optical, and electromagnetic techniques are examples of these methods.
  • piezoelectric pressure sensors can only measure dynamic pressures and have poor stretchability
  • piezoresistive pressure sensors have low resolution and poor sensitivity
  • fabrication complexity of capacitive pressure sensors has a massive impact on their production cost.
  • an exemplary system may include a flexible pressure sensor, an electrical device, and a processing unit.
  • an exemplary flexible pressure sensor may be configured to be exposed to a differential pressure.
  • an exemplary flexible pressure sensor may include an exemplary elastic layer and a pair of electrodes.
  • an exemplary elastic layer may have a pore extended from a first side of an exemplary elastic layer to a second side of an exemplary elastic layer.
  • a central axis of an exemplary pore may be perpendicular to a beam neutral axis of an exemplary elastic layer.
  • an exemplary pore may include a varying cross section area along an exemplary central axis with a minimum cross section area substantially not located at an exemplary beam neutral axis.
  • an exemplary pore may be fdled with an electrically conductive fluid.
  • an exemplary pore may be the only path of electrically conductive fluid flow between an exemplary first side of an exemplary elastic layer and an exemplary second side of an exemplary elastic layer.
  • an exemplary minimum cross section area may be changed due to bending an exemplary elastic layer responsive to an exemplary differential pressure applied between an exemplary first side of an exemplary elastic layer and an exemplary second side of an exemplary elastic layer.
  • an exemplary pair of electrodes may be in contact with an exemplary electrically conductive fluid.
  • an exemplary pair of electrodes may include a first electrode and a second electrode.
  • an exemplary first electrode may be in contact with an exemplary electrically conductive fluid at a first location in the vicinity of a first side of an exemplary minimum cross section area along an exemplary central axis.
  • an exemplary second electrode may be in contact with an exemplary electrically conductive fluid at a second location in the vicinity of a second side of an exemplary minimum cross section area along an exemplary central axis.
  • an exemplary electrical device may include at least one of an ohmmeter, an ampere meter (ammeter), a voltage generator coupled with an ammeter, and combinations thereof.
  • an exemplary electrical device may be connected to an exemplary pair of electrodes.
  • an exemplary electrical device may be configured to measure at least one of an electrochemical resistance of an exemplary electrically conductive fluid between an exemplary pair of electrodes and an electrical current inside an exemplary electrically conductive fluid between an exemplary pair of electrodes.
  • an exemplary processing unit may be electrically connected to an exemplary electrical device.
  • an exemplary processing unit may include a memory having processor-readable instructions stored therein and a processor.
  • an exemplary processor may be configured to access an exemplary memory and execute exemplary processor-readable instructions.
  • executing exemplary processor-readable instructions by an exemplary processor may configure an exemplary processor to perform a method.
  • an exemplary method may include measuring at least one of an electrochemical resistance magnitude, an electrochemical conductance magnitude, and combinations thereof of an exemplary electrically conductive fluid between an exemplary pair of electrodes utilizing an exemplary electrical device, calculating at least one of an electrochemical resistance difference percentage, an electrochemical conductance difference percentage, and combinations thereof by calculating a percentage of a change in at least one of electrochemical resistance magnitude, electrochemical conductance magnitude, and combinations thereof of an exemplary electrically conductive fluid in the presence of an exemplary applied differential pressure to an exemplary flexible pressure sensor relative to an initial state of no differential pressure applied to an exemplary flexible pressure sensor, and calculating an exemplary differential pressure between an exemplary first side of an exemplary elastic layer and an exemplary second side of an exemplary elastic layer based on exemplary at least one of an electrochemical resistance difference percentage, an electrochemical conductance difference percentage, and combinations thereof using a calibration dataset.
  • an exemplary calibration dataset may include at least one of a calibration dataset of a set of pressure magnitudes versus a set of electrochemical resistance difference percentages, a calibration dataset of a set of pressure magnitudes versus a set of electrochemical conductance difference percentages, and combinations thereof.
  • calculating exemplary at least one of an exemplary electrochemical resistance difference percentage, an exemplary electrochemical conductance difference percentage, and combinations thereof may include calculating an exemplary electrochemical resistance difference percentage using a relation defined by the following equation: 100,
  • — % is an exemplary electrochemical resistance difference percentage
  • R is an Ro exemplary electrochemical resistance magnitude of an exemplary electrically conductive fluid in the presence of an exemplary applied differential pressure
  • R o is an exemplary electrochemical resistance magnitude of an exemplary electrically conductive fluid in an exemplary initial state of no differential pressure applied.
  • calculating an exemplary at least one of an exemplary electrochemical resistance difference percentage, an exemplary electrochemical conductance difference percentage, and combinations thereof may include calculating an exemplary electrochemical conductance difference percentage using a relation defined by the following equation:
  • an exemplary method may further include generating an exemplary calibration dataset.
  • generating an exemplary calibration dataset may include applying a set of differential pressures with an exemplary respective set of pressure magnitudes between an exemplary first side of an exemplary elastic layer and an exemplary second side of an exemplary elastic layer, measuring at least one of a set of electrochemical resistance magnitudes of an exemplary electrically conductive fluid, a set of electrochemical conductance magnitudes of an exemplary electrically conductive fluid, and combinations thereof between an exemplary pair of electrodes respective to an exemplary set of applied differential pressures utilizing an exemplary electrical device, calculating at least one of an exemplary set of electrochemical resistance difference percentages, an exemplary set of electrochemical conductance difference percentages, and combinations thereof using exemplary respective defined relations hereinabove, and forming at least one of an exemplary calibration dataset of an exemplary set of pressure magnitudes versus an exemplary set of electrochemical resistance difference percentages, an exemplary calibration dataset of the set of pressure magnitudes versus an exemplary set of electrochemical conductance difference percentages, and combination thereof in form of at least one of a table, a
  • an exemplary elastic layer may include a layer of a flexible biocompatible material.
  • an exemplary elastic layer may include a layer of an elastomer.
  • an exemplary elastic layer may have a thickness in a range of 10 nm to 10 mm.
  • an exemplary elastic layer may include a layer of polydimethylsiloxane (PDMS).
  • PDMS polydimethylsiloxane
  • an exemplary sensor may further include an elastic substrate having an opening extended from one side of an exemplary elastic substrate to the other side of an exemplary elastic substrate.
  • an exemplary elastic layer may be embedded in an exemplary opening on an exemplary elastic substrate.
  • an exemplary elastic substrate may include a layer of at least one of polycarbonate, polymethyl methacrylate (PMMA), and combinations thereof with a thickness in a range of 1 pm to 10 mm.
  • an exemplary sensor may further include a pair of reservoirs containing an exemplary electrically conductive fluid placed in the vicinity of two respective external sides of an exemplary elastic layer.
  • an exemplary electrically conductive fluid contents of an exemplary pair of reservoirs may be connected to each other substantially only via an exemplary pore.
  • two respective ends of an exemplary pair of electrodes may be placed in an exemplary respective pair of reservoirs in contact with an exemplary electrically conductive fluid.
  • an exemplary method may further include applying an exemplary differential pressure between an exemplary first side of an exemplary elastic layer and an exemplary second side of an exemplary elastic layer by at least one of applying a force to one of an exemplary first side of an exemplary elastic layer or an exemplary second side of an exemplary elastic layer, placing an exemplary flexible pressure sensor between two points of an environment with two respective different pressures, and combinations thereof.
  • applying an exemplary differential pressure between an exemplary first side of an exemplary elastic layer and an exemplary second side of an exemplary elastic layer may include changing an exemplary minimum cross section area by bending an exemplary flexible pressure sensor.
  • an exemplary first electrode may be attached to an exemplary first side of an exemplary elastic layer and an exemplary second electrode may be attached to an exemplary second side of an exemplary elastic layer.
  • each electrode of an exemplary pair of electrodes may include an electrode made of an electrically conductive material.
  • an exemplary electrically conductive material may be non-chemically reactive with an exemplary electrically conductive fluid.
  • FIG. 1A shows a schematic view of an exemplary pressure sensor for measuring pressure, consistent with one or more exemplary embodiments of the present disclosure.
  • FIGs. IB, 1C, and ID illustrate three exemplary schematic cross-sectional views of an exemplary elastic layer with three respective different structures of an exemplary pore therein, consistent with one or more exemplary embodiments of the present disclosure.
  • FIGs. IE, IF, and 1G illustrate three exemplary schematic cross-sectional views of an exemplary elastic layer exposed to a force to one side of an exemplary elastic layer, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. 1H illustrates a schematic view of an exemplary pressure sensor with an exemplary pair of electrodes connected to an electrical device, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. II illustrates a schematic cross-sectional view of a first arrangement of an exemplary pair of electrodes, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. 1J illustrates a schematic cross-sectional view of a second arrangement of an exemplary pair of electrodes, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. IK illustrates a schematic cross-sectional view of an exemplary pressure sensor further including an exemplary pair of reservoirs containing an exemplary electrically conductive fluid, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. IL illustrates a schematic view of an exemplary pressure sensor further including an exemplary elastic substrate, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. IM shows an exemplary system for measuring pressure, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. 2 shows a flow diagram of an exemplary method for measuring pressure utilizing an exemplary pressure sensor, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. 3 shows an example computer system in which an embodiment of the present disclosure, or portions thereof, may be implemented as computer-readable code, consistent with one or more exemplary embodiments of the present disclosure.
  • FIG. 4 shows a sensitivity diagram illustrating calculated electrochemical resistance difference percentages versus the applied differential pressures, consistent with one or more exemplary embodiments of the present disclosure.
  • An exemplary sensor may be a flexible pressure sensor.
  • An exemplary sensor may be utilized for measuring a differential pressure between two outer sides of an exemplary sensor.
  • an exemplary sensor may include a flexible layer (e.g., an elastic layer) having a pore therein.
  • an exemplary pore may be extended from a first side of an exemplary flexible layer to a second side of an exemplary flexible layer, so that a length of an exemplary pore is equal to a thickness of an exemplary flexible layer.
  • an exemplary sensor may be put in contact with an electrically conductive fluid so that an exemplary pore may be filled with an exemplary electrically conductive fluid.
  • an exemplary sensor may further include
  • a method and system utilizing an exemplary sensor for measuring differential pressure may be disclosed.
  • a method and system utilizing an exemplary sensor for measuring differential pressure may be disclosed.
  • FIG. 1A shows a schematic view of a pressure sensor 100 for measuring pressure, consistent with one or more exemplary embodiments of the present disclosure.
  • pressure sensor 100 may include an elastic layer 102 having a pore 104 therein extended from a first side 106 of elastic layer 102 to a second side 108 of elastic layer 102 and a pair of electrodes 112 and 114.
  • pressure sensor 100 may be put in contact with an electrically conductive fluid 110.
  • pore 104 may be filled with electrically conductive fluid 110 and pair of electrodes 112 and 114 may be in contact with electrically conductive fluid 110 respectively in the vicinity of two sides 106 and 108.
  • pair of electrodes 112 and 114 may be in contact with electrically conductive fluid 110 respectively in the vicinity of two sides 106 and 108 of elastic layer 102.
  • pressure sensor 100 may be put in contact with electrically conductive fluid 110 in such a way that electrically conductive fluid 110 may be present at two sides of first side 106 of elastic layer 102 and second side 108 of elastic layer 102 and pore 104 may be the only path between contents of electrically conductive fluid 110 at exemplary two sides of elastic layer 102.
  • pressure sensor 100 may be a bendable or flexible sensor that may be bent without breaking in response to a force applied to at least one side of first side 106 of elastic layer 102 and second side 108 of elastic layer 102.
  • elastic layer 102 may include a layer of a flexible material.
  • elastic layer 102 may include a layer of a flexible biocompatible material.
  • elastic layer 102 may include a layer of an elastomer.
  • elastic layer 102 may include a layer of polydimethylsiloxane (PDMS).
  • PDMS polydimethylsiloxane
  • elastic layer 102 may have a thickness 116 in a range of about 10 nm to about 10 mm.
  • a length of pore 104 is equal to thickness 116 of elastic layer 102.
  • pore 104 may include at least one of a micropore or a nanopore.
  • pore 104 may have a maximum crosssection surface area of about 10 mm.
  • pressure sensor 100 may be utilized for measuring a differential pressure between first side 106 of elastic layer 102 and second side 108 of elastic layer 102.
  • pressure sensor 100 may be utilized for measuring a differential pressure generated between first side 106 and second side 108 due to a force 120 applied to one external surface side of pressure sensor 100, for example, second side 108 of elastic layer 102, as exemplary illustrated in FIG. 1A.
  • an exemplary differential pressure may lead to pressure sensor 100, leading to a change in size and/or shape of pore 104.
  • an exemplary change in size and/or shape of pore 104 may include a change in cross section area of pore 104.
  • an exemplary change in cross section area of pore 104 may lead to a change in an electrical resistance of electrically conductive fluid 110 and/or an ionic current inside electrically conductive fluid 110 between pair of electrodes 112 and 114. Therefore, in an exemplary embodiment, an exemplary change in an exemplary electrical resistance of electrically conductive fluid 110 and/or an exemplary ionic current inside electrically conductive fluid 110 between pair of electrodes 112 and 114 may be measured using electrical device 122, and accordingly, an exemplary differential pressure between first side 106 of elastic layer 102 and second side 108 of elastic layer 102 may be determined. In an exemplary embodiment, an exemplary differential pressure may be determined using a calibration dataset of a set of pressure magnitudes versus at least one of a set of electrical resistance magnitudes, a set of ionic current magnitudes, and combinations thereof.
  • pore 104 may doesn’t have a unique structure.
  • FIGs. IB, 1C, and ID illustrate three exemplary schematic cross-sectional views of elastic layer 102 with three respective different structures of pore 104 therein, consistent with one or more exemplary embodiments of the present disclosure.
  • a central axis 118 of pore 104 may be perpendicular to a beam neutral axis 117 of elastic layer 102.
  • pore 104 doesn’t have a constant cross section area along central axis 118.
  • pore 104 may have a varying cross section area along central axis 118 with a minimum cross section area 119.
  • minimum cross section area 119 may substantially not located at beam neutral axis 117. In another word, minimum cross section area 119 may substantially not crossed beam neutral axis 117. In an exemplary embodiment, minimum cross section area 119 may be located below or above beam neutral axis 117. In an exemplary embodiment, such aforementioned structure of pore having a varying cross section area along central axis 118 with minimum cross section area 119 may lead to changing cross section area along central axis 118 by bending elastic layer 102 in response to applying a differential pressure between two sides 106 and 108 of elastic layer 102.
  • FIGs. IE, IF, and 1G illustrate three exemplary schematic cross-sectional views of elastic layer 102 exposed to force 120 to second side 108 of elastic layer 102, consistent with one or more exemplary embodiments of the present disclosure.
  • a pressure axis 121 may be along a direction of applied force 120 parallel with central axis 118 of pore 104.
  • elastic layer 102 may bend due to applied force 120 or a differential pressure applied to elastic layer 102 due to applied force 120; thereby, cross section area of pore 104 may be changed along central axis 118 due to bending elastic layer 102 in response to an exemplary applied differential pressure.
  • an exemplary change in cross section area of pore 104 along central axis 118 may lead to a change in ionic current inside electrically conductive fluid 110 in pore 104; thereby, resulting in changing electrical resistance between pair of electrodes 112 and 114.
  • pair of electrodes 112 and 114 may be connected to an electrical device 122 via electrical lines 124 and 126, respectively, as illustrated in FIG. 1H.
  • electrical device 122 may include at least one of an ohmmeter, an ampere meter (ammeter), a voltage generator coupled with an ammeter, and combinations thereof.
  • electrical lines 124 and 126 may include two respective electrically conductive wires.
  • electrical device 122 may be utilized for measuring an electrical resistance of electrically conductive fluid 110.
  • a differential pressure applied between first side 106 of elastic layer 102 and second side 108 of elastic layer 102 may lead to bending pressure sensor 100; thereby, resulting in a change in cross section area of pore 104, and consequently, changing a magnitude of an exemplary electrical resistance of electrically conductive fluid 110.
  • a magnitude of an exemplary applied differential pressure may be determined based on an exemplary measured change in an exemplary electrical resistance of electrically conductive fluid 110.
  • pair of electrodes 112 and 114 may include a first electrode 112 being in contact with electrically conductive fluid 110 in the vicinity of first side 106 of elastic layer 102 and a second electrode 114 being in contact with electrically conductive fluid 110 in the vicinity of second side 108 of elastic layer 102.
  • FIG. II illustrates a schematic cross-sectional view of a first arrangement of electrodes 112 and 114, consistent with one or more exemplary embodiments of the present disclosure.
  • first electrode 112 may be put in contact with electrically conductive fluid 110 at a location in the vicinity of first side 119a of minimum cross section area 119 and second electrode 114 may be put in contact with electrically conductive fluid 110 at a location in the vicinity of second side 119b of minimum cross section area 119.
  • pair of electrodes 112 and 114 may be attached respectively to first side 106 and second side 108 of elastic layer 102 at their respective locations in the vicinity of first side 119a and second side 119b of minimum cross section area 119 as illustrated in FIG. II.
  • pair of electrodes 112 and 114 may be partially placed inside electrically conductive fluid 110 at two respective locations in the vicinity of first side 119a and second side 119b of minimum cross section area 119 without an attachment between pair of electrodes 112 and 114 to elastic layer 102.
  • FIG. 1J illustrates a schematic cross- sectional view of a second arrangement of pair of electrodes 112 and 114, consistent with one or more exemplary embodiments of the present disclosure.
  • arrangement of pair of electrodes 112 and 114 may be such that electrode 112 may be in contact with electrically conductive fluid 110 at a location in electrically conductive fluid 110 at/in the vicinity of one side 119a of minimum cross section area 119 along central axis 118 and electrode 114 may be in contact with electrically conductive fluid 110 at a location in electrically conductive fluid 110 at/in the vicinity of the other side 119b of minimum cross section area 119 along central axis 118.
  • pair of electrodes 112 and 114 may be made of an electrically conductive material that may not chemically react with electrically conductive fluid 110.
  • pair of electrodes 112 and 114 may be made of at least one of a metal, carbon, doped silicon, silver chloride (AgCl), and combinations thereof.
  • pair of electrodes 112 and 114 may be made of at least one of copper (Cu), silver (Ag), gold (Au), Platinum (Pt), and combinations thereof.
  • pressure sensor 100 may be utilized for measuring pressure in situations where electrically conductive fluid 110 may be originally, inherently, or naturally is present there .
  • pressure sensor 100 may be placed in a manner that electrically conductive fluid 110 may be filled inside pore 104 and a contact between electrically conductive fluid 110 and pair of electrodes 112 and 114 may be provided.
  • body fluid is an electrolyte as an example of electrically conductive fluid 110.
  • pressure sensor 100 may be utilized for measuring pressure in situations where a fluid or liquid similar to electrically conductive fluid 110 may not be present. In such situations, an external source for providing electrically conductive fluid 110 may be utilized.
  • FIG. IK illustrates a schematic cross-sectional view of pressure sensor 100 further including a pair of reservoirs 128 and 130 containing electrically conductive fluid 110, consistent with one or more exemplary embodiments of the present disclosure.
  • pressure sensor 100 may further include a pair of reservoirs 128 and 130 containing electrically conductive fluid 110.
  • pair of reservoirs 128 and 130 may be placed in the vicinity of two respective external sides 106 and 108 of elastic layer 102.
  • pair of reservoirs 128 and 130 may be attached at both sides 106 and 108 of elastic layer 102.
  • electrically conductive fluid contents of pair of reservoirs 128 and 130 may be connected to each other via pore 104.
  • an attachment between pair of reservoirs 128 and 130 with two respective external sides 106 and 108 may be sealed; therefore, pore 104 may be the only path that connects pair of reservoirs 128 and 130.
  • an attachment between pair of reservoirs 128 and 130 with two respective external sides 106 and 108 may be sealed using a plurality of fasteners, for example, a plurality of O-rings.
  • two respective ends 132 and 134 of pair of electrodes 112 and 114 may be placed inside respective pair of reservoirs 128 and 130 in contact with electrically conductive fluid 110.
  • an electrical current may be generated in electrically conductive fluid 110 through pore 104 by generating an ion current within electrically conductive fluid 110 via applying an electrical voltage between pair of electrodes 112 and 114.
  • electrically conductive fluid 110 may include an electrolyte solution.
  • electrically conductive fluid 110 may include a 0.25 M potassium chloride (KC1) aqueous solution.
  • pair of reservoirs 128 and 130 may include two respective inlets 136 and 138.
  • one or both of inlets 136 and 138 may be connected to one or more pressure sources; allowing for sensing pressure of an exemplary pressure source or a differential pressure between two pressure sources.
  • pressure sensor 100 may further include an elastic substrate; allowing for simplicity of using pressure sensor 100.
  • FIG. IL illustrates a schematic view of pressure sensor 100 further including an elastic substrate 140, consistent with one or more exemplary embodiments of the present disclosure.
  • pressure sensor 100 may further include elastic substrate 140, where pressure sensor 100 may be embedded therein.
  • elastic layer 102 may be fixed on elastic substrate 140.
  • elastic substrate 140 may include an opening 142 where pressure sensor 100 may be embedded there inside.
  • elastic substrate 140 may include a layer of a mechanically strong and flexible material.
  • elastic substrate 140 may be made of a flexible material.
  • elastic substrate 140 may include a layer of at least one of polycarbonate, polymethyl methacrylate (PMMA), and combinations thereof.
  • elastic substrate 140 may have a thickness in a range of 1 pm to about 10 mm.
  • FIG. 2 shows a flow diagram of an exemplary method 200 for measuring pressure utilizing pressure sensor 100, consistent with one or more exemplary embodiments of the present disclosure.
  • exemplary method 200 may include exposing pressure sensor 100 to a pressure source where a differential pressure being applied between two sides 106 and 108 (step 202), measuring an electrochemical resistance/conductance magnitude of electrically conductive fluid 110 between pair of electrodes 112 and 114 (step 204), calculating an electrochemical resistance/conductance difference percentage relative to an initial state of no differential pressure applied to pressure sensor 100 (step 206), and calculating an exemplary differential pressure between first side 106 of elastic layer 102 and second side 108 of elastic layer 102 using a calibration dataset of a set of pressure magnitudes versus a set of electrochemical resistance/conductance difference percentages (step 208).
  • method 200 may be conducted using system 160 utilizing pressure sensor 100.
  • FIG. IM shows a system 160 for measuring pressure, consistent with one or more exemplary embodiments of the present disclosure.
  • system 160 may include pressure sensor 100, electrical device 122, and processing unit 150.
  • pressure sensor 100 may be electrically connected to electrical device 122 via electrical lines 124 and 126.
  • electrical device 122 may be electrically connected to processing unit 150 utilizing at least one of an electrically conductive line 152, a wireless connection, and combinations thereof.
  • an exemplary wireless connection may include Bluetooth devices or Bluetooth modules, which may be embedded in electrical device 122 and processing unit 150.
  • processing unit 150 may include a memory having processor-readable instructions stored therein and a processor.
  • the processor may be configured to access the memory and execute the processor-readable instructions.
  • executing the processor-readable instructions by the processor may configure the processor to perform a method.
  • the method may include one or more steps of exemplary method 200 for measuring pressure.
  • method 200 may be described herein below in connection with FIG. IM and FIGs. 1A-1L illustrating exemplary structures of exemplary sensor 100.
  • step 202 of exposing pressure sensor 100 to a pressure source where a differential pressure being applied between two sides 106 and 108 may include placing applying an exemplary differential pressure between first side 106 of elastic layer 102 and second side 108 of elastic layer 102 by at least one of applying a force to one of first side 106 of elastic layer 102 or second side 108 of elastic layer 102, placing pressure sensor 100 between two points of an environment with two respective different pressures, and combinations thereof.
  • applying an exemplary differential pressure two sides 106 and 108 may include changing minimum cross section area 119 by bending pressure sensor 100 due to an exemplary applied differential pressure.
  • step 202 of exposing pressure sensor 100 to an exemplary pressure source may include placing pressure sensor 100 in a biological environment where a pressure of the biological environment should be measured.
  • exposing pressure sensor 100 to an exemplary may include putting pressure sensor 100 in contact with a body fluid of a living body, for example, a human or an animal so that an exemplary body fluid may be an example of electrically conductive fluid 110 filled inside pore 104 and a differential pressure may be applied between two sides 106 and 108.
  • first side 106 may be put in contact with a constant-pressure environment (e.g., surrounding air) and second side 108 may be put in contact with body fluid; thereby, resulting in applying an exemplary differential pressure between two sides 106 and 108 leading to measuring a pressure of body fluid relative to air pressure.
  • a body fluid may include at least one of blood stream, eye fluid, and combinations thereof.
  • step 202 of exposing pressure sensor 100 to an exemplary pressure source may include placing pressure sensor 100 in bladder environment where a pressure of the bladder environment may be measured using pressure sensor 100.
  • step 202 of exposing pressure sensor 100 to an exemplary pressure source may include applying a pressure to one side of two sides 106 and 108.
  • step 202 of exposing pressure sensor 100 to an exemplary pressure source may include applying two different pressures to respective two sides 106 and 108.
  • step 202 of exposing pressure sensor 100 to an exemplary pressure source may include connecting a first pressure source to reservoir 128 via inlet 136 so that a pressure of an exemplary first pressure source may be transferred and applied to first side 106; thereby resulting in applying a differential pressure between two sides 106 and 108.
  • step 202 of exposing pressure sensor 100 to an exemplary pressure source may include connecting an exemplary first pressure source to reservoir 128 via inlet 136 and connecting a second pressure source to reservoir 130 via inlet 138 so that a differential pressure between an exemplary first pressure source and an exemplary second pressure source may be applied between two sides 106 and 108.
  • each of exemplary first pressure source and exemplary second pressure source may include a gas tank.
  • step 204 of measuring an electrochemical resistance/conductance magnitude of electrically conductive fluid 110 between pair of electrodes 112 and 114 may include measuring at least one of an electrochemical resistance magnitude, an electrochemical conductance magnitude, and combinations thereof of electrically conductive fluid 110 utilizing electrical device 122 while applying an exemplary differential pressure between two sides 106 and 108.
  • electrical device 122 may be utilized to measure at least one of an electrochemical resistance of electrically conductive fluid 110 between pair of electrodes 112 and 114, an electrical current inside electrically conductive fluid 110 between pair of electrodes 112 and 114, and combinations thereof.
  • measuring at least one of an exemplary electrochemical resistance of electrically conductive fluid 110 between pair of electrodes 112 and 114, an exemplary electrical current inside electrically conductive fluid 110 between pair of electrodes 112 and 114, and combinations thereof may include applying an electrical voltage between pair of electrodes 112 and 114 and measuring at least one of an exemplary electrochemical resistance of electrically conductive fluid 110, an exemplary electrical current inside electrically conductive fluid 110, an exemplary electrochemical conductance of electrically conductive fluid 110, and combinations thereof between pair of electrodes 112 and 114 utilizing electrical device 122.
  • step 206 of calculating an electrochemical resistance/conductance difference percentage relative to an initial state of no differential pressure applied to pressure sensor 100 may include calculating a percentage of a change in electrochemical resistance/conductance magnitude of electrically conductive fluid 110 in the presence of an exemplary applied differential pressure to pressure sensor 100 relative to an initial state of no differential pressure applied to pressure sensor 100.
  • calculating an exemplary electrochemical resistance difference percentage relative to an exemplary initial state of no differential pressure applied to pressure sensor 100 may be done using a relation defined by Equation 1 as follows: ioo Equation 1
  • — % is an exemplary electrochemical resistance difference percentage
  • R is an Ro exemplary electrochemical resistance magnitude of electrically conductive fluid 110 in the presence of an exemplary applied differential pressure
  • R o is an exemplary electrochemical resistance magnitude of electrically conductive fluid 110 in an exemplary initial state of no differential pressure applied.
  • Equation 2 a relation defined by Equation 2 as follows:
  • — G % is an exemplary electrochemical conductance difference percentage
  • G is o an exemplary electrochemical conductance magnitude of electrically conductive fluid 110 in the presence of an exemplary applied differential pressure
  • G o is an exemplary electrochemical conductance magnitude of electrically conductive fluid 110 in an exemplary initial state of no differential pressure applied.
  • step 208 may include calculating an exemplary differential pressure between first side 106 of elastic layer 102 and second side 108 of elastic layer 102 using a calibration dataset of a set of pressure magnitudes versus a set of electrochemical resistance/conductance difference percentages.
  • an exemplary differential pressure corresponding to an exemplary electrochemical resistance/conductance difference percentage calculated in step 206 may be calculated using an exemplary calibration dataset of a set of pressure magnitudes versus a set of electrochemical resistance/conductance difference percentages.
  • calculating an exemplary differential pressure between first side 106 of elastic layer 102 and second side 108 of elastic layer 102 may include calculating an exemplary differential pressure between first side 106 of elastic layer 102 and second side 108 of elastic layer 102 based on at least one of an exemplary electrochemical resistance difference percentage, an exemplary electrochemical conductance difference percentage, and combinations thereof using an exemplary calibration dataset.
  • an exemplary calibration dataset may include at least one of a calibration dataset of a set of pressure magnitudes versus a set of electrochemical resistance difference percentages, a calibration dataset of a set of pressure magnitudes versus a set of electrochemical conductance difference percentages, and combinations thereof.
  • method 200 may further include generating an exemplary calibration dataset.
  • generating an exemplary calibration dataset may include applying a set of differential pressures with an exemplary respective set of pressure magnitudes between first side 106 of elastic layer 102 and second side 108 of elastic layer 102, measuring a set of electrochemical resistance and/or conductance magnitudes of electrically conductive fluid 110 between pair of electrodes 112 and 114 respective to an exemplary set of applied differential pressures utilizing electrical device 122, calculating an exemplary set of electrochemical resistance and/or conductance difference percentages using an exemplary defined relation by Equation 1 and/or Equation 2, and forming at least one of an exemplary calibration dataset of an exemplary set of pressure magnitudes versus an exemplary set of electrochemical resistance difference percentages, an exemplary calibration dataset of an exemplary set of pressure magnitudes versus an exemplary set of electrochemical conductance difference percentages, and combinations thereof in form of at least one of a table, a curve, and combination thereof.
  • FIG. 3 shows an example computer system 300 in which an embodiment of the present disclosure, or portions thereof, may be implemented as computer-readable code, consistent with one or more exemplary embodiments of the present disclosure.
  • computer system 300 may include an example of processing unit 150 illustrated in FIG. IM, and steps 204-208 of exemplary method 200 presented in FIG. 2 may be implemented in computer system 300 using hardware, software, firmware, tangible computer readable media having instructions stored thereon, or a combination thereof and may be implemented in one or more computer systems or other processing systems.
  • Hardware, software, or any combination of such may embody any of the modules and components in FIG. IM and FIG. 2.
  • programmable logic may execute on a commercially available processing platform or a special purpose device.
  • programmable logic may execute on a commercially available processing platform or a special purpose device.
  • One ordinary skill in the art may appreciate that an embodiment of the disclosed subject matter can be practiced with various computer system configurations, including multi-core multiprocessor systems, minicomputers, mainframe computers, computers linked or clustered with distributed functions, as well as pervasive or miniature computers that may be embedded into virtually any device.
  • a computing device having at least one processor device and a memory may be used to implement the above-described embodiments.
  • a processor device may be a single processor, a plurality of processors, or combinations thereof.
  • Processor devices may have one or more processor “cores.”
  • Processor device 304 may be a special purpose or a general -purpose processor device. As will be appreciated by persons skilled in the relevant art, processor device 304 may also be a single processor in a multi-core/multiprocessor system, such system operating alone, or in a cluster of computing devices operating in a cluster or server farm. Processor device 304304 may be connected to a communication infrastructure 306, for example, a bus, message queue, network, or multi-core message-passing scheme.
  • computer system 300 may include a display interface 302, for example a video connector, to transfer data to a display unit 330, for example, a monitor.
  • Computer system 300 may also include a main memory 308, for example, random access memory (RAM), and may also include a secondary memory 310.
  • Secondary memory 310 may include, for example, a hard disk drive 312, and a removable storage drive 314.
  • Removable storage drive 314 may include a floppy disk drive, a magnetic tape drive, an optical disk drive, a flash memory, or the like. Removable storage drive 314 may read from and/or write to a removable storage unit 318 in a well-known manner.
  • Removable storage unit 318 may include a floppy disk, a magnetic tape, an optical disk, etc., which may be read by and written to by removable storage drive 314.
  • removable storage unit 318 may include a computer usable storage medium having stored therein computer software and/or data.
  • secondary memory 310 may include other similar means for allowing computer programs or other instructions to be loaded into computer system 300. Such means may include, for example, a removable storage unit 322 and an interface 320.
  • Computer system 300 may also include a communications interface 324.
  • Communications interface 324 allows software and data to be transferred between computer system 300 and external devices.
  • Communications interface 324 may include a modem, a network interface (such as an Ethernet card), a communications port, a PCMCIA slot and card, or the like.
  • Software and data transferred via communications interface 324 may be in the form of signals, which may be electronic, electromagnetic, optical, or other signals capable of being received by communications interface 324. These signals may be provided to communications interface 324 via a communications path 326.
  • Communications path 326 carries signals and may be implemented using wire or cable, fiber optics, a phone line, a cellular phone link, an RF link or other communications channels.
  • computer program medium and “computer usable medium” are used to generally refer to media such as removable storage unit 318, removable storage unit 322, and a hard disk installed in hard disk drive 312.
  • Computer program medium and computer usable medium may also refer to memories, such as main memory 308 and secondary memory 310, which may be memory semiconductors (e.g. DRAMs, etc.).
  • Computer programs are stored in main memory 308 and/or secondary memory 310. Computer programs may also be received via communications interface 324. Such computer programs, when executed, enable computer system 300 to implement different embodiments of the present disclosure as discussed herein. In particular, the computer programs, when executed, enable processor device 304 to implement the processes of the present disclosure, such as the operations in method 200 and illustrated by FIG. 2, discussed above. Accordingly, such computer programs represent controllers of computer system 300. Where an exemplary embodiment of method 200 is implemented using software, the software may be stored in a computer program product and loaded into computer system 300 using removable storage drive 314, interface 320, and hard disk drive 312, or communications interface 324.
  • Embodiments of the present disclosure also may be directed to computer program products including software stored on any computer useable medium. Such software, when executed in one or more data processing device, causes a data processing device to operate as described herein.
  • An embodiment of the present disclosure may employ any computer useable or readable medium. Examples of computer useable mediums include, but are not limited to, primary storage devices (e.g., any type of random access memory), secondary storage devices (e.g., hard drives, floppy disks, CD ROMS, ZIP disks, tapes, magnetic storage devices, and optical storage devices, MEMS, nanotechnological storage device, etc.).
  • Example 1 Measurement of differential pressure using flexible pressure sensor
  • a pressure sensor similar to pressure sensor 100 and a system similar to system 160 described hereinabove in connection with FIGs. 1A-1M were used to measure differential pressure.
  • An elastic layer of PDMS was used as an example of elastic layer 102 and a pore with a diameter of about 1 pm was formed inside the elastic layer of PDMS.
  • An initial electrochemical resistance of the pore filled by an aqueous solution of potassium chloride (KC1) 0.25 M was measured as 1 mega ohm.
  • the sensor included an elastic substrate made of PMMA where the elastic layer of PDMS was fixed thereon. Two reservoirs made of PMMA containing the KC1 solution were placed at two sides of the pressure sensor.
  • Electrodes 112 and 114 Two AgCl electrodes were used as examples of electrodes 112 and 114 that were connected to an electrical device (e.g., an ohmmeter) and were placed at two sides of the pore in connection with the KC1 solution in the two reservoirs.
  • An electrical voltage of about 0.2 V was applied between the two electrodes using the electrical device.
  • Air was introduced from an inlet of one of the reservoirs, the reservoir that is closer to a part of the pore with minimum cross-section area, into that reservoir; thereby, pressure at one side of the pore was increased while a pressure of the other side of the pore in the other reservoir is constant atmospheric pressure.
  • FIG. 4 shows a sensitivity diagram 400 illustrating calculated electrochemical resistance difference percentages versus the applied differential pressures, consistent with one or more exemplary embodiments of the present disclosure.
  • the pore electrochemical resistance becomes about 90 times its initial resistance.

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  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un système de mesure de pression différentielle. Le système comprend un capteur souple, un dispositif électrique et une unité de traitement. Le capteur souple comprend une couche élastique avec un pore s'étendant d'un premier côté à un second côté de la couche élastique et deux électrodes. Le pore comprend une zone de section transversale variable avec une zone de section transversale minimale qui se situe pratiquement en dehors de l'axe neutre du faisceau électromagnétique de la couche élastique. La surface minimale de la section transversale est modifiée par la déformation de la couche élastique sous l'effet d'une pression différentielle appliquée entre le premier et le second côté de la couche élastique. Les deux électrodes sont en contact avec un fluide conducteur contenu dans le pore en deux endroits respectifs à proximité d'un premier côté de la section transversale minimale et d'un second côté de la section transversale minimale.
PCT/IB2023/053327 2022-05-10 2023-04-03 Capteur de pression différentielle basé sur l'impédance électrochimique de l'ouverture WO2023218260A1 (fr)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004029084A1 (de) * 2004-06-16 2006-01-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikro-Kraftsensor und Verfahren zum Herstellen eines Mikro-Kraftsensors
DE102007062713A1 (de) * 2007-12-27 2009-07-16 Robert Bosch Gmbh Drucksensor und Verfahren zu dessen Kalibrierung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004029084A1 (de) * 2004-06-16 2006-01-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikro-Kraftsensor und Verfahren zum Herstellen eines Mikro-Kraftsensors
DE102007062713A1 (de) * 2007-12-27 2009-07-16 Robert Bosch Gmbh Drucksensor und Verfahren zu dessen Kalibrierung

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