WO2023210357A1

WO2023210357A1 - Actuator, and optical device comprising same

Info

Publication number: WO2023210357A1
Application number: PCT/JP2023/014769
Authority: WO
Inventors: 真弥井上; 博司山崎; 恭也大薮
Original assignee: 日東電工株式会社
Priority date: 2022-04-28
Filing date: 2023-04-11
Publication date: 2023-11-02
Also published as: TW202347929A

Abstract

This actuator comprises: a wiring circuit board; and a magnet. The wiring circuit board includes: a core layer, which has first and second main surfaces that face away from each other, which has first and second lateral surfaces connecting the first and second main surfaces, and which is formed by a magnetic body; an insulating layer that surrounds the first main surface, the second main surface, the first lateral surface, and the second lateral surface of the core layer; and a winding layer that is wound so as to surround the core layer via the insulating layer. The magnet is provided so as to be movable relative to the winding layer and the core layer.

Description

Actuator and optical device equipped with it

The present invention relates to an actuator and an optical device equipped with the same.

Patent Document 1 describes an optical path shifting device for shifting the optical path of image light in a projector. In the optical path shift device, a plurality of actuators are used to swing the optical member. Each actuator includes a magnet and a coil. In the optical path shift device disclosed in Patent Document 1, a glass plate serving as an optical member is swung by current flowing through the coils of a plurality of actuators.

JP2020-091343A

Here, in order to reduce the size of the actuator, it is necessary to reduce the number of turns of the coil within the actuator. On the other hand, in order to improve the driving force of the actuator, it is necessary to increase the number of turns of the coil. This increases the size of the actuator and prevents it from being made thinner. As described above, reducing the size and thickness of the actuator and improving the driving force of the actuator are contradictory to each other, and it is not easy to achieve both. Further, since the actuator described in Patent Document 1 is composed of a large number of parts, the manufacturing process is complicated.

An object of the present invention is to provide an actuator that can be made smaller and thinner, increase the driving force, and suppress the complexity of the manufacturing process, and an optical device equipped with the actuator.

(1) An actuator according to one aspect includes a printed circuit board and a magnet, and the printed circuit board has first and second main surfaces facing opposite to each other, and the first main surface and the a core layer formed of a magnetic material and having first and second side surfaces connecting the first and second main surfaces; an insulating layer surrounding one side surface and the second side surface, and the first main surface, the second main surface, the first side surface, and the second side surface of the core layer through the insulating layer. and a winding layer wound around the magnet, and the magnet is provided to be movable relative to the winding layer and the core layer.

In this actuator, the magnetic flux that is formed when a current flows through the winding layer of the printed circuit board acts on the magnet. The magnet is thereby driven relative to the winding layer. In this case, magnetic flux is formed in a direction parallel to the first and second main surfaces of the core layer. This eliminates the need to increase the area occupied by the windings on the printed circuit board. Furthermore, since the magnetic flux is concentrated in the core layer, the magnetic flux density in a plane parallel to the lamination direction increases. This increases the interaction between the magnetic flux formed by the winding layer and the core layer and the magnetic flux formed by the magnet. Further, the winding layer and the core layer can be formed during the manufacturing process of the printed circuit board. Thereby, the manufacturing process of the actuator is not complicated. As a result, the actuator can be made smaller and thinner, the driving force can be increased, and the complexity of the manufacturing process can be suppressed.

(2) A first support that supports the printed circuit board, a second support that supports the magnet, and a connecting portion that connects the first support and the second support. Furthermore, the connecting portion may be configured to be deformable so that the first support and the second support are movable relative to each other. In this case, multiple parts of the actuator are integrated in structure.

(3) The first support, the second support, and the connecting portion may be formed by a common support plate.

In this case, the positional relationship between the first support, the second support, and the connecting portion can be maintained with a simple structure. Furthermore, the manufacturing process of the actuator is simplified.

(4) The magnet may be arranged so that when a current flows through the winding layer, a magnetic flux passing through the core layer and a magnetic flux within the magnet are aligned in substantially the same direction.

In this case, it becomes possible to cause the magnetic flux generated by the current flowing through the winding layer to efficiently act on the magnetic field generated by the magnet.

(5) The magnet may be arranged so that when a current flows through the winding layer, the magnetic flux passing through the core layer and the magnetic flux within the magnet are substantially parallel.

In this case, the winding layer and the magnet can be arranged in parallel. The length of the area occupied by the winding layer and the magnet can be reduced.

(6) The insulating layer includes a first insulating layer disposed on the first main surface of the core layer and a second insulating layer disposed on the second main surface of the core layer. a third insulating layer disposed on the first side surface of the core layer; and a fourth insulating layer disposed on the second side surface of the core layer; The first, second, third, and fourth insulating layers surround the first main surface, the second main surface, the first side surface, and the second side surface of the core layer. may be placed on top.

In this case, magnetic flux in a direction parallel to the first and second main surfaces of the core layer is formed with a simple configuration. According to this configuration, since the magnetic flux is more concentrated in the core layer, the magnetic flux density in a plane parallel to the lamination direction increases. This further increases the interaction between the magnetic flux formed by the winding layer and the core layer and the magnetic flux formed by the magnet. Therefore, it becomes possible to further increase the driving force by the winding layer and the core layer.

(7) The thickness of the first insulating layer and the thickness of the second insulating layer may be substantially equal.

In this case, in the printed circuit board, the core layer is arranged at the center of the winding layers in the stacking direction. Thereby, the distribution of magnetic flux density becomes symmetrical with respect to the core layer in the stacking direction. Therefore, it becomes possible to further concentrate the magnetic flux parallel to the first and second insulating layers within the core layer. As a result, it becomes possible to improve the operating performance of the actuator.

(8) The thickness of the third insulating layer and the thickness of the fourth insulating layer may be substantially equal.

In this case, in the printed circuit board, the core layer is arranged at the center of the winding layer. Thereby, the distribution of magnetic flux density becomes symmetrical with respect to the core layer in the stacking direction. Therefore, it becomes possible to further concentrate the magnetic flux parallel to the first and second insulating layers within the core layer. As a result, it becomes possible to further improve the operating performance of the actuator.

(9) The magnetic material may include any one of an electromagnetic steel sheet, a silicon steel sheet, iron, or permalloy.

In this case, since a material with high relative magnetic permeability is used as the magnetic material, it is possible to concentrate magnetic flux in the core layer when current flows through the winding layer. This makes it possible to increase the attractive or repulsive force generated by the printed circuit board and the magnetic field of the magnet.

(10) An optical device according to another aspect includes the actuator and an optical element movably provided with one of the printed circuit board and the magnet of the actuator.

According to this optical device, the optical element is driven by the above actuator. In this case, the actuator can be made smaller and thinner, the driving force can be increased, and the complexity of the manufacturing process can be suppressed. As a result, the optical device can be made smaller and thinner, the driving force can be increased, and the complexity of the manufacturing process can be suppressed.

(11) a first support that supports one of the printed circuit board and the magnet of the actuator; a second support that supports the other of the printed circuit board and the magnet of the actuator; the optical element is provided on one of the first and second supports; It's okay.

In this case, the first support and the second support move relative to each other while the connecting portion is deformed by driving the magnet by the winding layer and core layer of the actuator. This causes the optical element to move. According to the above configuration, a plurality of parts of the optical device are integrated with the first support, the second support, and the connecting portion with a simple configuration.

(12) The second support has an opening, and the first support is connected to the second support by the connecting portion so as to be located within the opening of the second support. The optical element may be coupled to the first support.

In this case, the optical element can be easily moved by moving the first support disposed within the opening of the second support relative to the second support using the actuator.

(13) The optical element may include an optical member that refracts or reflects light, and the optical member may be provided to change the direction of light by being driven by the actuator.

In this case, the direction of light tropism and the direction of reflection of light can be changed by relative movement of the optical members. Thereby, the optical device can be used as a light shifting device.

(14) The optical element may include an image sensor, and the image sensor may be provided so that the position and inclination of light reception are changed by being driven by the actuator.

In this case, the position of light reception and the inclination of light reception can be changed by relative movement of the image sensor. Thereby, changes in the light receiving state of the image sensor due to shaking of the optical device can be corrected.

According to the present invention, it is possible to provide an actuator that can be made smaller and thinner, increase the driving force, and suppress the complexity of the manufacturing process, and an optical device equipped with the actuator. .

FIG. 1 is a plan view of a printed circuit board in an actuator according to an embodiment. FIG. 2 is a cross-sectional view taken along lines AA and BB of the printed circuit board of FIG. FIG. 3 is a plan view showing an actuator according to one embodiment. FIG. 4 is a sectional view taken along line CC of the actuator shown in FIG. FIG. 5 is a plan view showing the configuration of an optical path shift device including an actuator. FIG. 6 is a sectional view taken along line DD of the optical path shift device of FIG. FIG. 7 is a diagram showing another example of the actuator. FIG. 8 is a diagram showing the configuration of an image sensor arrangement plate including an actuator. FIG. 9 is a diagram showing a modification of the image sensor arrangement plate. FIG. 10 is a diagram showing a modification of the image sensor arrangement plate. FIG. 11 is a sectional view taken along line EE of the image sensor arrangement plate of FIG.

Hereinafter, an actuator according to an embodiment and an optical device using the same will be described in detail with reference to the drawings.

(1) Wired Circuit Board Hereinafter, a printed circuit board used in an actuator according to an embodiment will be described in detail with reference to the drawings. FIG. 1 is a plan view of a printed circuit board in an actuator according to an embodiment. FIG. 2 is a cross-sectional view taken along lines AA and BB of the printed circuit board of FIG. In FIG. 2, the upper part shows a cross-sectional view taken along line AA of the printed circuit board, and the lower part shows a cross-sectional view taken along line BB of the printed circuit board. As shown in FIGS. 1 and 2, printed circuit board 100 includes a core layer 10, a base insulating layer 20, a conductor layer 30, and a cover insulating layer 40. In FIG. 1, the internal structure of the cover insulating layer 40 is mainly illustrated, and the illustration of the base insulating layer 20 is omitted.

The core layer 10 is formed of, for example, a magnetic material with high relative magnetic permeability, and is preferably formed of a soft magnetic material. Magnetic materials include electrical steel sheets, silicon steel sheets, iron, permalloy, and the like. The core layer 10 has a flat plate shape extending in one direction. In this example, the core layer 10 has a rectangular shape. The thickness t1 of the core layer 10 is, for example, 10 μm or more and 300 μm or less. Hereinafter, in the printed circuit board 100, a direction parallel to one side of the core layer 10 and parallel to the upper and lower surfaces of the core layer 10 will be referred to as a first direction. Further, a direction perpendicular to the first direction and parallel to the upper and lower surfaces of the core layer 10 is referred to as a second direction.

That is, in this example, a pair of opposing sides of the core layer 10 extend in the first direction, and another pair of opposing sides of the core layer 10 extend in the second direction. Note that the core layer 10 is not limited to a rectangular shape, and may have other shapes such as an ellipse or a polygon.

As shown in FIG. 2, the base insulating layer 20 is formed of resin such as polyimide. Base insulating layer 20 is formed to surround core layer 10 . In this example, the base insulating layer 20 is formed on the upper surface, the lower surface, both side surfaces parallel to the first direction, and both side surfaces parallel to the second direction (hereinafter referred to as end surfaces) of the core layer 10. be done.

In this example, the base insulating layer 20 is formed of a base insulating layer 20A that contacts the upper surface of the core layer 10 and a base insulating layer 20B that contacts the lower surface, both side surfaces, and both end surfaces of the core layer 10. The base insulating layer 20A contacts the lower surface and inner surface of a conductor layer 30A that constitutes a part of a winding portion 31a, which will be described later. Base insulating layer 20B contacts the upper surface and inner surface of conductor layer 30B that constitutes another part of winding portion 31a, which will be described later.

The thickness t2a of the base insulating layer 20A and the thickness t2b of the base insulating layer 20B are, for example, 5 μm or more and 10 μm or less. The difference between the thickness t2a of the base insulating layer 20A and the thickness t2b of the base insulating layer 20B is preferably 5 μm or less. Further, it is preferable that the absolute value of the difference between the thickness t2a of the base insulating layer 20A and the thickness t2b of the base insulating layer 20B is 50% or less of the thickness t2a of the base insulating layer 20A. As a result, the distribution of magnetic flux, which will be described later, in a plane perpendicular to the first direction becomes uniform. More preferably, the thickness t2a of the base insulating layer 20A and the thickness t2b of the base insulating layer 20B are substantially equal. As a result, the distribution of magnetic flux, which will be described later, in a plane perpendicular to the first direction becomes more uniform.

Similarly, the thicknesses t2c and t2d of the base insulating layer 20B on both side surfaces are, for example, 5 μm or more and 10 μm or less. The difference between the thicknesses t2c and t2d of the base insulating layer 20B on both sides is preferably 5 μm or less. Further, it is preferable that the absolute value of the difference between the thicknesses t2c and t2d of the base insulating layer 20B on both sides is 50% or less of the thickness t2c of the base insulating layer 20B. Thereby, the distribution of magnetic flux, which will be described later, in a plane parallel to the first direction becomes uniform. More preferably, the thicknesses t2c and t2d of the base insulating layer 20B on both sides are substantially equal. Thereby, the distribution of magnetic flux, which will be described later, in a plane parallel to the first direction becomes more uniform.

As shown in FIG. 1, the conductor layer 30 includes a linear winding portion 31a,

wires

31b, 31c, and

rectangular terminals

31d, 31e. The winding portion 31a is wound around the core layer 10 via the base insulating layer 20. One end of the winding portion 31a is connected to one end of the wiring 31b. The other end of the winding portion 31a is connected to one end of the wiring 31c. The width W1 of the winding portion 31a and the widths W2 and W3 of the

wirings

31b and 31c are preferably 10 μm or more and 500 μm or less. Further, it is more preferable that the width W1 of the winding portion 31a and the widths W2 and W3 of the

wirings

31b and 31c are 50 μm or more and 100 μm or less. In this embodiment, the winding portion 31a and the core layer 10 constitute a coil.

As shown in FIG. 2, the winding portion 31a in FIG. 1 includes a winding portion 31aa that contacts the upper surface and both side surfaces of the base insulating layer 20A and a winding portion 31ab that contacts the lower surface and both side surfaces of the base insulating layer 20B. configured. The thickness t3a of the winding portion 31aa and the thickness t3b of the winding portion 31ab are, for example, 6 μm or more and 50 μm or less. The difference between the thickness t3a of the winding portion 31aa and the thickness t3b of the winding portion 31ab is preferably 10 μm or less. Moreover, it is preferable that the absolute value of the difference between the thickness t3a of the winding part 31aa and the thickness t3b of the winding part 31ab is 50% or less of the thickness t3a of the winding part 31aa. As a result, the distribution of magnetic flux, which will be described later, in a plane perpendicular to the first direction becomes uniform. More preferably, the thickness t3a of the winding portion 31aa and the thickness t3b of the winding portion 31ab are substantially equal. Thereby, the distribution of magnetic flux, which will be described later, in a plane parallel to the first direction becomes more uniform.

In this embodiment, only the base insulating layer 20 exists between the core layer 10 and the winding portion 31a. That is, only an insulating layer exists between the core layer 10 and the winding portion 31a, and no other layer such as a magnetic material or a conductive material exists. Further, in this embodiment, only the base insulating layer 20 formed of the same insulating material exists between the core layer 10 and the winding portion 31a.

As shown in FIG. 1, the

terminals

31d and 31e are arranged on one end side of the printed circuit board 100 in the first direction. The terminal 31d is connected to the other end of the wiring 31b. Further, the terminal 31d is electrically connected to the external terminal OE1 of the printed circuit board 100 via the conductive wire CL1. Terminal 31e is connected to the other end of wiring 31c. Further, the terminal 31e is electrically connected to an external terminal OE2 of the printed circuit board 100 via a conductive wire CL2. The widths of the

terminals

31d and 31e are larger than the widths of the

wirings

31b and 31c. Note that the

terminals

31d and 31e are not limited to a rectangular shape, but may have other shapes such as a circular shape, an elliptical shape, or a polygonal shape.

Hereinafter, in the first direction of the printed circuit board 100, the direction from the winding portion 31a toward the

terminals

31d, 31e will be referred to as one direction, and the direction away from the winding portion 31a in the opposite direction from the

terminals

31d, 31e will be referred to as the other direction. .

As shown in FIG. 2, the cover insulating layer 40 is formed to entirely cover the conductor layer 30 and the base insulating layer 20. The cover insulating layer 40 is made of resin such as polyimide. In this example, the cover insulating layer 40 includes a cover insulating layer 40A that contacts the upper surface, both side surfaces, and both end surfaces of the winding portion 31aa, and a cover insulating layer 40B that contacts the lower surface, both side surfaces, and both end surfaces of the winding portion 31ab. It is formed. The thickness t4a of the cover insulating layer 40A and the thickness t4b of the cover insulating layer 40B are, for example, 8 μm or more and 50 μm or less. As shown in FIG. 1, the length of the cover insulating layer 40 in one direction (the other direction), that is, the length L1 of the printed circuit board 100 in one direction (the other direction) is, for example, 5000 μm.

In this embodiment, there is no other layer such as a magnetic material or a conductive material between the winding portion 31a and the cover insulating layer 40. That is, in this embodiment, only the cover insulating layer 40 formed of the same insulating material is present on the outer surface of the winding portion 31a.

In the above configuration, when an electrical signal (current) is input from the external terminal OE1 to the terminal 31d of the conductor layer 30, the electrical signal is transmitted to the winding portion 31a through the wiring 31b. The electrical signal transmitted to the winding portion 31a is led to the conducting wire CL2 through the wiring 31c and the terminal 31e, and then output to the external terminal OE2. In this case, due to the current flowing through the winding part 31a, a large number of magnetic fluxes B are generated in the other direction in the space surrounded by the winding part 31a (hereinafter referred to as the internal space), as shown by the dashed line. In this case, since the core layer 10 having high relative magnetic permeability is arranged in the internal space of the winding portion 31a, the magnetic flux density becomes high. Conversely, when an electric signal is input from the external terminal OE2 to the terminal 31e of the conductor layer 30, a magnetic flux B is generated in one direction in the internal space of the winding portion 31a (not shown). Also in this case, since the core layer 10 having high relative magnetic permeability is arranged in the internal space of the winding portion 31a, the magnetic flux density becomes high.

In the wired circuit board 100 described above, magnetic flux is formed in a direction parallel to the upper and lower surfaces of the core layer 10 with a simple configuration. According to this configuration, since the magnetic flux is more concentrated in the core layer 10, the magnetic flux density in a plane parallel to the lamination direction increases. This further increases the interaction between the magnetic flux formed by the winding portion 31a and the core layer 10 and the magnetic flux formed by the magnet. Therefore, it becomes possible to further increase the driving force by the winding portion 31a and the core layer 10.

Further, the core layer 10 is arranged approximately at the center of the winding portion 31a in the stacking direction. Thereby, the distribution of magnetic flux density becomes symmetrical with respect to the core layer 10 in the stacking direction. Therefore, it becomes possible to further concentrate the magnetic flux parallel to the axis formed by the winding portion 31a within the core layer 10.

Furthermore, since a material with high magnetic permeability is used as the magnetic body, it is possible to concentrate magnetic flux on the core layer 10 when a current flows through the winding portion 31a.

(2) Actuator FIG. 3 is a plan view showing an actuator 500 according to one embodiment. FIG. 4 is a sectional view taken along the line CC of the actuator 500 in FIG.

3 and 4, the actuator 500 includes the wired circuit board 100 of FIGS. 1 and 2, a metal support 510, a connecting member 520, a magnet 530, and an adhesive layer 540. The metal support 510 includes

supports

510a and 510b that are separated from each other. In this example, support 510a is fixed. The support body 510b is provided movably. The

supports

510a and 510b are integrally formed by being connected by a connecting member 520. The connecting member 520 has, for example, a spring structure and is configured to be expandable and contractible. Hereinafter, the structure including the support body 510a will be referred to as a driving section 550, and the structure including the support body 510b will be referred to as a driven section 560.

As shown in FIG. 4, the printed circuit board 100 is attached onto the support 510a with an adhesive layer 540a. A magnet 530 is attached to the support body 510b with an adhesive layer 540b. Magnet 530 is, for example, a permanent magnet. Magnet 530 may be an electromagnet. In this example, the magnet 530 is arranged so that the S pole faces one end surface of the core layer 10 of the printed circuit board 100. Note that, depending on the use of the actuator 500, the N pole of the magnet 530 may be arranged to face one end surface of the core layer 10 of the printed circuit board 100. It is preferable that the direction of the magnetic flux passing through the core layer 10 due to the current flowing through the winding portion 31a is the same as the direction in which the S and N poles of the magnet 530 are lined up. In this case, the magnetic field generated by the current flowing through the winding portion 31a effectively acts on the magnetic field generated by the magnet 530.

Here, as described above, when an electrical signal is input from the external terminal OE1 of the printed circuit board 100, magnetic flux B in the other direction is generated in the internal space of the winding portion 31a. In this case, since the connecting member 520 is configured to be expandable and retractable, the magnetic flux B generated within the printed circuit board 100 is guided to the S pole of the magnet 530. As a result, the driven portion 560 is attracted to the driving portion 550 as shown by the thick arrow F1. Similarly, when an electric signal is input from the external terminal OE2 of the printed circuit board 100, a unidirectional magnetic flux B is generated in the internal space of the winding portion 31a (not shown). In this case, the driven portion 560 is separated from the driving portion 550 as indicated by the thick arrow F2. In this way, by changing the magnitude and direction of the current of the electrical signal input to the winding part 31a in the printed circuit board 100, the driven part 560 is moved in the direction indicated by the arrow F1 with respect to the driving part 550 in the actuator 500. Alternatively, it becomes possible to drive in the direction of arrow F2. Note that the driving section 550 and the driven section 560 in the actuator 500 of this example may be formed on a common printed circuit board.

In the actuator 500 described above, the magnetic flux that is formed when a current flows through the winding portion 31a of the printed circuit board 100 acts on the magnet 530. Thereby, the magnet 530 is driven relative to the winding portion 31a. In this case, magnetic flux is formed in a direction parallel to the upper and lower surfaces of the core layer 10. This eliminates the need to increase the area occupied by the windings on the printed circuit board 100. Furthermore, since the magnetic flux is concentrated in the core layer 10, the magnetic flux density in a plane parallel to the lamination direction increases. This increases the interaction between the magnetic flux formed by the winding portion 31a and the core layer 10 and the magnetic flux formed by the magnet. Further, the winding portion 31a and the core layer 10 can be formed during the manufacturing process of the printed circuit board 100. Thereby, the manufacturing process of actuator 500 is not complicated. As a result, the actuator 500 can be made smaller and thinner, the driving force can be increased, and the complexity of the manufacturing process can be suppressed.

Further, the

supports

510a and 510b are integrally formed by being connected by a connecting member 520. In this case, the positional relationship between the

supports

510a, 510b and the connecting member 520 can be maintained with a simple structure. Furthermore, the manufacturing process of actuator 500 is simplified.

Furthermore, since the winding portion 31a and the magnet 530 are arranged in parallel, the length of the area occupied by the winding portion 31a and the magnet 530 can be reduced.

(3) Optical device using actuator 500 (3-1) Optical path shift device Here, an optical path shift device will be described as an example of an optical device using actuator 500 of FIGS. 1 to 4.

FIG. 5 is a plan view showing the configuration of an optical path shift device including an actuator. The optical path shifting device 600 is used, for example, in a projector to shift the optical path of projected light.

The optical path shift device 600 includes first to third supports 610 to 630 and an optical path conversion plate 640. The first to third supports 610 to 630 are formed into thin plate shapes of various materials such as metal or resin. In this example, the first to third supports 610 to 630 are integrally formed of a thin non-magnetic metal plate. Optical path shifting device 600 may be formed as part of a printed circuit board. Here, two axes AX1 and AX2 are defined that are perpendicular to each other on the plane of the first to third supports 610 to 630.

The first support body 610 has a rectangular shape. A pair of two sides of the first support body 610 are parallel to the axis AX1, and the other pair of two sides of the first support body 610 are parallel to the axis AX2. A rectangular optical path converting plate 640 for converting the optical path is provided on the first support 610. The optical path conversion plate 640 is formed of a member that refracts or reflects light, such as glass or a mirror. In this example, the optical path conversion plate 640 is made of glass. In this case, the first support 610 has an opening. The optical path conversion plate 640 is attached to the opening of the first support 610.

The second support 620 is provided to surround the first support 610. The second support 620 includes

partial supports

621, 622, 623. The partial support body 621 has a substantially rectangular frame shape surrounding three sides and a part of one side of the first support body 610. A portion of the partial support body 621 that is parallel to the first support body 610 has a spaced apart portion.

Partial supports

622, 623 are formed to extend outwardly from the two ends of the spaced apart part of partial support 621. The first support body 610 is connected to the second support body 620 by

connection parts

611 and 612 centered on the axis AX1. The connecting

portions

611 and 612 have a relatively small width that allows twisting. Thereby, the first support body 610 (optical path conversion plate 640) becomes twistably swingable about the axis AX1 at the connecting

portions

611 and 612, as shown by the arrow A1.

The third support 630 is provided to surround the second support 620. Specifically, the third support 630 includes a partial support 631 and a partial convex portion 632. The partial support body 631 is formed to surround the partial support body 621 of the second support body 620. The partial convex portion 632 is formed to be located between the

partial supports

622 and 623 of the second support 620. The second support body 620 is supported by the third support body 630 by a connecting portion 613 centered on the axis AX2. The connecting portion 613 has a relatively small width that allows twisting. Thereby, the second support body 620 becomes twistably swingable about the axis AX2 at the connecting portion 613 as shown by the arrow A2.

The optical path shift device 600 further includes actuators 500a to 500c. In this example, the actuator 500a is formed on a partial convex portion 632 of the third support body 630 and a portion of the first support body 610 that faces the partial convex portion 632. The actuator 500b is formed on a partial support 622 of the second support 620 and a part of a partial support 631 opposite to the partial support 622. The actuator 500c is formed on a partial support 623 of the second support 620 and a part of a partial support 631 opposite to the partial support 623.

Each of the actuators 500a to 500c includes the driving section 550 and driven section 560 of FIGS. 3 and 4. Note that in the actuator 500a, the connecting

portions

611 and 612 function as the connecting member 520 in FIGS. 3 and 4. Furthermore, in the

actuators

500b and 500c, the connecting portion 613 functions as the connecting member 520 in FIGS. 3 and 4.

FIG. 6 is a cross-sectional view taken along line DD of the optical path shift device 600 of FIG. 5. Note that although FIG. 6 shows an example of the configuration of the actuator 500a, the

actuators

500b and 500c also have a similar configuration. As shown in FIG. 6, in the actuator 500a, the connecting member 520 (see FIGS. 3 and 4) is not provided between the winding portion 31a of the printed circuit board 100 and the magnet 530, and the connecting portion 611 in FIG. , 612 function as connecting members. Furthermore, in the

actuators

500b and 500c, the connecting portion 613 in FIG. 5 functions as the connecting member 520 in FIGS. 3 and 4.

In this case, in the actuator 500a, when an electric signal (current) is supplied to the

terminals

31d and 31e, a magnetic flux B is generated. Thereby, the first support body 610 (optical path conversion plate 640) can be twisted and rocked about the axis AX1, as shown by the arrow A1. According to this configuration, the torsional direction of the first support body 610 (optical path conversion plate 640) and the It becomes possible to adjust the twist angle of the second support body 620.

Further, in the actuator 500b, when an electric signal (current) is supplied to the

terminals

31d and 31e, the second support body 620 is twistedly swung about the axis AX2, as shown by an arrow A2. . Similarly, in the actuator 500c, when an electric signal (current) is supplied to the

terminals

31d and 31e, the second support body 620 is twisted and swung about the axis AX2, as shown by the arrow A2. Ru. According to this configuration, by controlling the supply direction and the magnitude of the electric signal to the

terminals

31d and 31e of the

actuators

500b and 500c, the torsional direction of the second support body 620 and the It becomes possible to adjust the twisting angle of the support body 630 of 3.

As a result, the

actuators

500a, 500b, and 500c can tilt the optical path conversion plate 640 in any direction about the axes AX1 and AX2.

FIG. 7 is a diagram showing another example of the actuator 500a. As shown in FIG. 7, actuator 500a is provided with

bent portions

610a and 630a by bending portions of first support 610 and third support 630 downward at right angles. The

bent portions

610a and 630a are provided so as to face each other. A driven portion 560 is provided at the bent portion 610a, and a driving portion 550 is provided at the bent portion 630a. The

other actuators

500b and 500c may also be configured similarly to the actuator 500a in FIG. 7. Also in the example of FIG. 7, the

actuators

(3-2) Camera Image Sensor Arrangement Board Next, an image sensor arrangement board for a camera will be described as another example of an optical device using the actuator 500 shown in FIGS. 1 to 4.

FIG. 8 is a diagram showing the configuration of an image sensor arrangement plate including an actuator. In FIG. 8, an image sensor arrangement plate 700 is used, for example, in a camera to implement an image stabilization function. The image sensor arrangement plate 700 includes a first support 720, a second support 730, and connecting portions 740d to 740g. The first support body 720, the second support body 730, and the connecting portions 740d to 740g are formed into thin plate shapes of various materials such as metal or resin. In this example, the first support body 720, the second support body 730, and the connecting portions 740d to 740g are integrally formed of a thin plate of non-magnetic metal. Image sensor arrangement board 700 may be formed as part of a printed circuit board. Also in this example, two axes AX1 and AX2 are defined that are perpendicular to each other on the planes of the first and

second supports

720 and 730.

The first support body 720 has a rectangular shape. A pair of two sides Sa1 and Sa2 of the first support body 720 are parallel to the axis AX1, and the other pair of two sides Sa3 and Sa4 of the first support body 720 are parallel to the axis AX2. An image sensor 710 is provided on the first support 720. The image sensor 710 is, for example, a CCD (charge-coupled device) type image sensor, a CMOS (complementary metal oxide semiconductor) type image sensor, or the like.

The second support 730 is provided to surround the first support 720. The second support body 730 has a substantially rectangular frame shape. An opening is formed in the second support 730. The second support body 730 has a pair of inner sides Sb1 and Sb2 parallel to the axis AX1, and protrusions P1 and P2 that protrude inward from the inner sides Sb1 and Sb2, respectively. The second support body 730 also has another pair of inner sides Sb3 and Sb4 parallel to the axis AX2, and protrusions P3 and P4 that project inward from the inner sides Sb3 and Sb4, respectively.

The first support body 720 is supported within the opening of the second support body 730 by connecting

portions

740d, 740e, 740f, and 740g. The connecting portion 740d extends from the inner side Sb1 of the second support body 730 in the direction of the axis AX2, is bent in the direction of the axis AX1, and is connected to the side Sa3 of the first support body 720. The connecting portion 740e extends from the inner side Sb3 of the second support body 730 in the direction of the axis AX1, is bent in the direction of the axis AX2, and is connected to the side Sa2 of the first support body 720. The connecting portion 740f extends from the inner side Sb2 of the second support body 730 in the direction of the axis AX2, is bent in the direction of the axis AX1, and is connected to the side Sa4 of the first support body 720. The connecting portion 740g extends from the inner side Sb4 of the second support body 730 in the direction of the axis AX1, bends in the direction of the axis AX2, and is connected to the side Sa1 of the first support body 720. The connecting portions 740d to 740g are formed in a curved line shape, so that they can be bent and twisted.

In this example, it is assumed that the second support body 730 is fixed. Image sensor arrangement plate 700 further includes actuators 500d to 500g. In this example, the actuator 500d is formed on the protrusion P1 of the second support 730 and the corner of the first support 720 that faces the protrusion P1. The actuator 500e is formed at a protrusion P3 of the second support 730 and a corner of the first support 720 that faces the protrusion P3. The actuator 500f is formed on the protrusion P2 of the second support 730 and the corner of the first support 720 that faces the protrusion P2. The actuator 500g is formed on the protrusion P4 of the second support 730 and the corner of the first support 720 that faces the protrusion P4.

Each of the actuators 500d to 500g includes the driving section 550 and driven section 560 of FIGS. 3 and 4. Note that in the actuators 500d to 500g, the connecting portions 740d to 740g function as the connecting members 520 in FIGS. 3 and 4, respectively. In this example, the driving parts 550 of the actuators 500e to 500g are mounted on the first support 720, and the driven parts 560 of the actuators 500e to 500g are mounted on the second support 730.

Wires

31b and 31c that connect the winding portion 31a of the driving portion 550 of the actuators 500e to 500g on the first support body 720 and the

terminals

31e and 31d in FIG. 1 extend above the connecting portions 740e to 740g, respectively. .

According to this configuration, the first support body 720 can be tilted about the axes AX1 and AX2 by supplying an electric signal (current) to the

terminals

31d and 31e of one or more of the actuators 500d to 500g. At the same time, it becomes possible to move in the rotational direction around the normal line of the upper surface of the first support body 72. Thereby, by controlling the supply direction and magnitude of electrical signals to the

terminals

31d and 31e of the actuators 500d to 500g, it becomes possible to move the image sensor 710 as shown by thick arrows A1 and A2, and It becomes possible to rotate the image sensor 710 as shown by the thick arrow A3. As a result, image sensor 710 can be adjusted to any orientation and position.

Note that in, for example, a camera (not shown) on which the image sensor arrangement plate 700 is mounted, a sensor such as a gyro sensor outputs a signal indicating the amount of movement of the camera. In the camera, the direction and magnitude of electrical signals supplied to the

terminals

31d and 31e of the actuators 500d to 500g are controlled based on the output signals, thereby achieving an image stabilization function.

FIG. 9 is a diagram showing a modification of the image sensor arrangement plate 700. In the image sensor arrangement plate 700 of FIG. 8, as shown in FIG. A drive unit 550 of ~500 g may be attached. Also in this configuration, the image sensor 710 can be adjusted to any direction and position as described above.

(3-3) Modification of camera image sensor arrangement plate FIG. 10 is a diagram showing a modification of the image sensor arrangement board 700. FIG. 11 is a cross-sectional view taken along the line EE of the image sensor arrangement plate 700 of FIG. In the example of FIGS. 10 and 11, the actuators 500d to 500g of the image sensor arrangement plate 700 are arranged on the first support 720. As shown in FIG. 10, the driving parts 550 of the actuators 500d to 500g are attached to the first support 720, and the driven parts 560 are arranged above the driving parts 550 and spaced apart from each other. In this example, the driven part 560 is fixed, and the driving part 550 is configured to be movable relative to the driven part 560. Even in such a configuration, the image sensor 710 can be adjusted to any direction and position.

(3-4) Effect According to the above optical device (optical path shift device 600 and image sensor arrangement plate 700), the optical element (optical path conversion plate 640 (FIG. 5) and image sensor 710 (FIG. 8)) is moved by the actuator 500. Driven. In this case, the actuator 500 can be made smaller and thinner, the driving force can be increased, and the manufacturing process can be prevented from becoming complicated. As a result, the optical device can be made smaller and thinner, the driving force can be increased, and the complexity of the manufacturing process can be suppressed.

Further, by driving the driving section 550 or the driven section 560 of the actuator 500, the plurality of connecting members (611 to 613 (FIG. 5), 740d to 740g (FIG. 8)) are deformed and the driving section 550 or the driven section 560 is deformed. moves relatively. This makes it possible to move the optical element in any direction.

(4) Other Embodiments In the embodiments described above, examples are shown in which the optical device is the optical path shift device 600 or the image sensor arrangement plate 700, but the present invention is not limited thereto. It is also possible to construct other optical devices by using other optical elements. For example, a projector can be configured as an optical device by using a light emitting element such as a light emitting diode or a laser diode instead of the optical path conversion plate 640 of the optical path shift device 600.

(5) Correspondence between each component of the claims and each part of the embodiment Below, an example of the correspondence between each component of the claim and each element of the embodiment will be described. In the above embodiment, the base insulating layer 20A is an example of the first insulating layer, the portion of the base insulating layer 20B formed on the lower surface of the core layer 10 is an example of the second insulating layer, and the base insulating layer 20B is an example of the second insulating layer. The portions of the insulating layer 20B formed on one side surface and the other side surface of the core layer 10 are examples of the third and fourth insulating layers, and the winding portion 31a is an example of the winding layer. . Further, the upper surface of the core layer 10 is an example of the first main surface, and the lower surface of the core layer 10 is an example of the second main surface. Further, the optical path conversion plate 640 and the image sensor 710 are examples of optical elements, and the optical path conversion plate 640 is an example of an optical member.

Claims

a wired circuit board;
Equipped with a magnet,
The printed circuit board includes:
It has first and second main surfaces facing opposite to each other, first and second side surfaces connecting the first main surface and the second main surface, and is made of a magnetic material. a core layer;
an insulating layer surrounding the first main surface, the second main surface, the first side surface, and the second side surface of the core layer;
a wire-wound layer wound to surround the first main surface, the second main surface, the first side surface, and the second side surface of the core layer with the insulating layer interposed therebetween;
The actuator is configured such that the magnet is movable relative to the winding layer and the core layer.
a first support that supports the printed circuit board;
a second support that supports the magnet;
Further comprising a connecting portion connecting the first support and the second support,
The actuator according to claim 1, wherein the connecting portion is configured to be deformable so that the first support and the second support are movable relative to each other.
The actuator according to claim 2, wherein the first support, the second support, and the connecting portion are formed by a common support plate.
The magnet is arranged so that when a current flows through the winding layer, the magnetic flux passing through the core layer and the magnetic flux within the magnet are aligned in substantially the same direction. The actuator according to item 1.
The magnet is arranged such that when a current flows through the winding layer, the magnetic flux passing through the core layer and the magnetic flux within the magnet are substantially parallel to each other. The actuator according to item 1.
The insulating layer is
a first insulating layer disposed on the first main surface of the core layer;
a second insulating layer disposed on the second main surface of the core layer;
a third insulating layer disposed on the first side surface of the core layer;
a fourth insulating layer disposed on the second side surface of the core layer,
The winding layer surrounds the first main surface, the second main surface, the first side surface, and the second side surface of the core layer. 6. The actuator according to claim 1, wherein the actuator is arranged on an insulating layer of 4.
7. The actuator according to claim 6, wherein the thickness of the first insulating layer and the thickness of the second insulating layer are substantially equal.
The actuator according to claim 7, wherein the thickness of the third insulating layer and the thickness of the fourth insulating layer are substantially equal.
The actuator according to any one of claims 1 to 8, wherein the magnetic material includes any one of an electromagnetic steel plate, a silicon steel plate, iron, and permalloy.
The actuator according to any one of claims 1 to 9,
An optical device comprising: an optical element movably provided with one of the printed circuit board and the magnet of the actuator.
a first support that supports one of the printed circuit board and the magnet of the actuator;
a second support that supports the other of the printed circuit board and the magnet of the actuator;
further comprising a connecting portion that connects the first support body and the second support body relatively to each other and is deformable;
The optical device according to claim 10, wherein the optical element is provided on one of the first and second supports.
the second support has an opening;
The first support is connected to the second support by the connection part so as to be located within the opening of the second support,
The optical device according to claim 11, wherein the optical element is provided on the first support.
The optical element includes an optical member that refracts or reflects light,
The optical device according to any one of claims 10 to 12, wherein the optical member is provided to change the direction of light by being driven by the actuator.
the optical element includes an image sensor;
The optical device according to any one of claims 10 to 12, wherein the image sensor is provided so that the position and inclination of light reception can be changed by being driven by the actuator.