WO2023203918A1 - ガス濃度測定装置 - Google Patents

ガス濃度測定装置 Download PDF

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Publication number
WO2023203918A1
WO2023203918A1 PCT/JP2023/009654 JP2023009654W WO2023203918A1 WO 2023203918 A1 WO2023203918 A1 WO 2023203918A1 JP 2023009654 W JP2023009654 W JP 2023009654W WO 2023203918 A1 WO2023203918 A1 WO 2023203918A1
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WO
WIPO (PCT)
Prior art keywords
measuring device
gas
gas concentration
permeable membrane
concentration measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2023/009654
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English (en)
French (fr)
Japanese (ja)
Inventor
陽平 山口
正子 天白
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to CN202380031403.XA priority Critical patent/CN118974534A/zh
Priority to JP2024516133A priority patent/JP7775995B2/ja
Publication of WO2023203918A1 publication Critical patent/WO2023203918A1/ja
Priority to US18/909,418 priority patent/US20250027921A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/004—CO or CO2

Definitions

  • the present invention relates to a technique for measuring gas concentration in liquid such as water.
  • Patent Document 1 describes a device for measuring the concentration of carbon dioxide dissolved in seawater.
  • the measurement device of Patent Document 1 includes a seawater tank, a pump, a measurement cell, and a pipe circuit.
  • the seawater tank, pump and measuring cell are connected by a pipe circuit.
  • the pump circulates seawater from the seawater tank into the pipe circuit. Thereby, seawater is supplied to the measurement cell, and the measurement cell measures the carbon dioxide concentration contained in this seawater.
  • an object of the present invention is to provide a small-sized gas concentration measuring device that can easily measure the concentration of a gas to be measured.
  • the gas concentration measuring device of the present invention includes a housing, a measuring device, a gas permeable membrane, and a driver.
  • the housing includes a waterproof wall, an internal space surrounded by the wall, and an opening provided in the wall that allows the internal space to communicate with the outside of the housing.
  • a measuring device is placed in the interior space and measures the concentration of the gas.
  • a gas permeable membrane closes the opening, allowing gas to pass through but not allowing moisture to pass through.
  • the driving body vibrates the gas permeable membrane.
  • dissolved gas in the moisture can move into the internal space of the casing through the gas permeable membrane, and a gas equilibrium state (vapor-liquid equilibrium state) can be achieved between the internal space of the casing and the moisture.
  • the gas-permeable membrane vibrates to accelerate the rate at which the gas-liquid equilibrium state is reached. Therefore, the gas concentration in water can be measured simply by placing it in the water to be measured, and there is no need for a tank or the like, thereby suppressing the increase in size.
  • the present invention it is possible to realize a small-sized gas concentration measuring device that can easily measure the gas concentration of a measurement target.
  • FIG. 1 is a sectional view showing the configuration of a gas concentration measuring device according to a first embodiment.
  • FIG. 2(A) is an external perspective view of the gas concentration measuring device according to the first embodiment
  • FIG. 2(B) is an exploded perspective view of the gas concentration measuring device according to the first embodiment.
  • FIG. 3 is a functional block diagram of the gas concentration measuring device according to the first embodiment.
  • 4(A) and 4(B) are enlarged side sectional views showing the vibration state of the gas permeable membrane.
  • FIG. 5 is a side sectional view showing an example of how the gas concentration measuring device is used.
  • FIG. 6 is a graph showing an example of changes in carbon dioxide concentration in the internal space of the housing between the configuration of the present application and the comparative configuration.
  • FIG. 1 is a sectional view showing the configuration of a gas concentration measuring device according to a first embodiment.
  • FIG. 2(A) is an external perspective view of the gas concentration measuring device according to the first embodiment
  • FIG. 2(B) is an
  • FIG. 7 is a functional block diagram of a gas concentration measuring device including a detection data transmission function.
  • FIG. 8 is a cross-sectional view showing the configuration of a gas concentration measuring device according to the second embodiment.
  • FIG. 9 is a sectional view showing the configuration of a gas concentration measuring device according to the third embodiment.
  • FIG. 10 is an exploded perspective view of a gas concentration measuring device according to a third embodiment.
  • 11(A), FIG. 11(B), FIG. 11(C), and FIG. 11(D) are plan views showing various aspects of the driving body.
  • 12(A), FIG. 12(B), and FIG. 12(C) are plan views showing various aspects of the casing and the gas permeable membrane.
  • FIG. 1 is a sectional view showing the configuration of a gas concentration measuring device according to a first embodiment.
  • FIG. 2(A) is an external perspective view of the gas concentration measuring device according to the first embodiment, and
  • FIG. 2(B) is an exploded perspective view of the gas concentration measuring device according to the first embodiment.
  • FIG. 3 is a functional block diagram of the gas concentration measuring device according to the first embodiment.
  • FIG. 2(A), FIG. 2(B), and FIG. A battery 62 and a drive device 63 are provided.
  • the housing 20 has an internal space 200 surrounded by six walls.
  • the housing 20 includes a box body 21 and a flat plate 22.
  • the box body 21 has a recess surrounded by five walls.
  • the internal space 200 of the housing 20 is formed by covering the recessed portion of the box body 21 with a flat plate 22.
  • An opening 220 is formed in the flat plate 22.
  • the opening 220 has a circular shape when viewed in a direction perpendicular to the flat plate 22, and passes through the flat plate 22 in the thickness direction.
  • the internal space 200 of the housing 20 can communicate with the outside of the housing 20 through the opening 220.
  • the walls of the housing 20 are formed of a waterproof material (a material that does not allow moisture to pass through).
  • the wall of the casing 20 is preferably made of a material with excellent rust prevention properties.
  • the wall of the casing 20 is made of metal such as aluminum or stainless steel, or a polymer material.
  • the gas permeable membrane 40 is a membrane that allows gas (gas to be measured) to pass through, but does not substantially allow water to pass through.
  • the gas permeable membrane 40 is a membrane made of a porous polymer film (stretched PTFE, etc.) or an amorphous polymer film (amorphous fluoropolymer, etc.).
  • the thickness of the gas permeable membrane 40 is preferably 150 ⁇ m or less. Note that the term "substantially does not allow moisture to pass through” does not mean that it does not completely allow moisture to pass through 100%, but also includes those that allow a very small amount of moisture to pass through within a practical range.
  • the gas permeable membrane 40 is placed in the opening 220 of the housing 20. More specifically, the gas permeable membrane 40 is arranged to close the opening 220. Gas permeable membrane 40 is fixed to the outer surface of flat plate 22 .
  • the gas permeable membrane 40 closes the opening 220 of the casing 20 , thereby preventing moisture from entering the internal space 200 of the casing 20 . It is possible to realize the movement of gas between.
  • the driving body 50 realizes a plurality of shapes by applying electricity or heating. Furthermore, the driving body 50 may be one that generates vibrations.
  • the driving body 50 is a piezoelectric material, a bimetal, a shape memory alloy, or the like.
  • the driver 50 is placed on the gas permeable membrane 40.
  • the driver 50 is arranged so as to partially overlap the gas permeable membrane 40 .
  • the driving body 50 is a disk-shaped piezoelectric body.
  • the driver 50 is arranged at the center of the gas permeable membrane 40 such that its circular surface is parallel to the plane of the gas permeable membrane 40 .
  • the driving body 50 may be placed directly on the gas permeable membrane 40, and the stress from the driving body 50 can be transmitted to the gas permeable membrane 40 between the driving body 50 and the gas permeable membrane 40. It may be arranged with another member interposed therebetween.
  • the driving body 50 Since the planar shape (circular) of the driving body 50 is smaller than the planar shape of the gas permeable membrane 40, the driving body 50 closes only a part of the gas permeable membrane 40. Therefore, gas permeability can be maintained in other regions of the gas permeable membrane 40.
  • the shape of the drive body 50 changes according to a drive control signal (details will be described later) from the control circuit 631.
  • a drive control signal (details will be described later) from the control circuit 631.
  • the driver 50 expands and contracts in a direction substantially parallel to the plane of the gas permeable membrane 40 in response to a drive control signal.
  • FIGS. 4(A) and 4(B) are enlarged side sectional views showing the vibration state of the gas permeable membrane.
  • FIG. 4(A) when the driver 50 is extended, the gas permeable membrane 40 is curved so as to bulge toward the surface on which the driver 50 is disposed.
  • FIG. 4(B) when the driver 50 is contracted, the gas permeable membrane 40 is curved so as to expand toward the surface opposite to the surface on which the driver 50 is disposed.
  • the gas permeable membrane 40 vibrates so that the center of the gas permeable membrane 40 is displaced in a direction perpendicular to the plane of the gas permeable membrane 40. .
  • the ratio of the area where the driving body 50 overlaps the gas permeable membrane 40 is determined by the efficiency with which the driving body 50 vibrates the gas permeable membrane 40 (the amount of driving energy given to the gas permeable membrane 40 from the driving body 50 with respect to the driving energy supplied to the driving body 50). It is determined as appropriate based on the ratio of the magnitude of stress) and the efficiency with which the gas permeable membrane 40 transmits gas (gas permeation rate per hour).
  • measuring device 30, detection circuit 61, battery 62, drive device 63 The measuring device 30, the detection circuit 61, the battery 62, and the drive device 63 are arranged inside the housing 20, that is, in the internal space 200 of the housing 20. Further, in the internal space 200 of the housing 20, a wiring conductor 281, a wiring conductor 282, a circuit board 291, and a circuit board 292 are arranged.
  • the measuring device 30 includes a sensor case 31, a light source 32, an infrared sensor 33, and an optical filter 34.
  • the sensor case 31 is a box and has an internal space 300. Sensor case 31 is smaller than housing 20. Furthermore, an opening 320 is formed in one wall of the sensor case 31. The opening 320 has a circular shape when viewed in a direction perpendicular to the wall in which the opening 320 is formed, and passes through the wall in the thickness direction.
  • the interior space 300 of the sensor case 31 communicates with the outside of the sensor case 31, that is, the interior space 200 of the housing 20, through the opening 320.
  • the light source 32, infrared sensor 33, and optical filter 34 are arranged inside the sensor case 31 (inner space 300).
  • the light source 32 is arranged on one wall perpendicular to the wall in which the opening 320 of the sensor case 31 is formed.
  • the infrared sensor 33 is arranged on a wall of the sensor case 31 that faces the wall on which the light source 32 is arranged. A light receiving surface of the infrared sensor 33 faces the light source 32.
  • the optical filter 34 covers the light receiving surface of the infrared sensor 33.
  • the optical filter 34 is a filter that passes infrared rays and blocks other frequencies.
  • the measuring device 30 realizes a carbon dioxide measuring sensor using non-dispersive infrared absorption method (NDIR). That is, the measuring device 30 outputs a measurement signal according to the concentration of carbon dioxide in the internal space 300.
  • NDIR non-dispersive infrared absorption
  • the measuring device 30 is mounted on the circuit board 292 and fixed to the housing 20. At this time, the measuring device 30 is arranged so that the opening 320 of the sensor case 31 is on the opening 220 side of the housing 20.
  • the detection circuit 61 is composed of a plurality of electronic circuit components 611. Detection circuit 61 is connected to measuring instrument 30 by wiring conductor 281. The detection circuit 61 detects the carbon dioxide concentration from the measurement signal output by the measuring device 30 and generates detection data of the carbon dioxide concentration.
  • the detection data of carbon dioxide concentration is stored, for example, in a storage medium provided in the detection circuit 61. Thereby, after collecting the gas concentration measuring device 10, the detection data of the carbon dioxide concentration can be confirmed.
  • the battery 62 supplies power to the measuring device 30 and the detection circuit 61.
  • the drive device 63 includes a control circuit 631 and a battery 632, as shown in FIG. Battery 632 supplies power to control circuit 631 .
  • the control circuit 631 is composed of electronic components such as ICs.
  • the control circuit 631 receives power from the battery 632 and generates a drive control signal for the drive body 50.
  • the control circuit 631 outputs a drive control signal to the drive body 50.
  • the drive control signal is an alternating current signal such as a sine wave or a rectangular wave.
  • the control circuit 631 of the drive device 63 is connected to the drive body 50 by a wiring conductor 282. Thereby, the control circuit 631 supplies a drive control signal to the driver 50 through the wiring conductor 282.
  • the detection circuit 61, battery 62, and drive device 63 are mounted on a circuit board 291 and fixed to the housing 20.
  • the circuit board 291 and the circuit board 292 are connected by a wiring conductor 281.
  • This wiring conductor 281 realizes power supply to the measuring instrument 30 and transmission of measurement signals from the measuring instrument 30 to the detection circuit 61.
  • FIG. 5 is a side sectional view showing an example of how the gas concentration measuring device is used.
  • the gas concentration measuring device 10 is installed in water in which the gas to be measured is melted.
  • the opening 220 of the housing 20 is closed by the gas permeable membrane 40, the internal space 200 of the housing 20 becomes a sealed space against moisture. Therefore, the gas concentration measuring device 10 can prevent moisture from entering the internal space 200.
  • the interior space 200 of the housing 20 and the water are separated by a gas permeable membrane 40. Therefore, gas can move between the water and the internal space 200 of the housing 20. Then, over a predetermined period of time depending on the gas permeability of the gas permeable membrane 40, a gas-liquid equilibrium state is reached between the water and the internal space 200 of the casing 20.
  • Henry's law states that when a dilute solution containing a volatile solute is in equilibrium with the gas phase, the partial pressure of the solute in the gas phase is proportional to its concentration in the solution. Therefore, if the internal space 200 of the housing 20 and the water are in a vapor-liquid equilibrium state, the gas concentration in the internal space 200 theoretically matches the gas concentration in the water.
  • the gas concentration measuring device 10 places the measuring device 30 in the internal space 200 of the housing 20 and measures the carbon dioxide concentration in the internal space 200 with the measuring device 30. Thereby, the gas concentration measuring device 10 can measure the carbon dioxide concentration in water.
  • the gas concentration measuring device 10 by vibrating the gas permeable membrane 40 by the driver 50, the efficiency of gas (carbon dioxide) movement through the gas permeable membrane 40 can be improved. As a result, the gas concentration measuring device 10 quickly reaches a gas-liquid equilibrium state.
  • FIG. 6 is a graph showing an example of changes in carbon dioxide concentration in the internal space of the housing between the present configuration and the comparative configuration.
  • the solid line is the characteristic of the present configuration
  • the dotted line is the characteristic of the comparative configuration.
  • the comparative configuration is a configuration in which a gas permeable membrane having the same area and the same gas permeability as the present configuration is used, and the gas permeable membrane is not vibrated.
  • the carbon dioxide concentration in the internal space 200 of the housing 20 reaches the carbon dioxide concentration in water earlier than in the comparative configuration.
  • the gas concentration measuring device 10 can quickly and easily measure the carbon dioxide concentration in water.
  • the casing 20 can be accommodated in a volume of about 10 cm 3 to 100 cm 3 , for example. That is, the gas concentration measuring device 10 can be made much smaller than the conventional configuration using a tank or the like.
  • the casing 20 becomes smaller, the area of the gas permeable membrane 40 becomes smaller, but a decrease in the gas permeation efficiency of the gas permeable membrane 40 due to vibration can be suppressed.
  • the gas concentration measuring device 10 can quickly and easily measure the carbon dioxide concentration in water while realizing miniaturization.
  • the driving body 50 is placed directly on the gas permeable membrane 40.
  • the driver 50 may not be placed directly on the gas permeable membrane 40, but may vibrate the gas permeable membrane 40 indirectly, such as through another member.
  • the driver 50 functions as a support for the gas permeable membrane 40. Thereby, damage such as tearing of the gas permeable membrane 40 can be suppressed when the gas permeable membrane 40 vibrates.
  • the driver 50 may be directly connected to the gas permeable membrane 40.
  • the driver 50 may not be directly connected to the gas permeable membrane 40, but may vibrate the gas permeable membrane 40 indirectly, such as through another member.
  • the drive control signal may be supplied to the driving body 50 before the gas concentration measuring device 10 is placed in the water, or after the gas concentration measuring device 10 is placed in the water.
  • the timing and time of supplying the drive control signal to the driving body 50 are, for example, the drive start time (the elapsed time after the gas concentration measuring device 10 is started or put into the water). ), driving time, etc. can be set in advance. Thereby, even when the gas concentration measuring device 10 is underwater, it is possible to vibrate the gas permeable membrane 40 for an appropriate amount of time underwater.
  • FIG. 7 is a functional block diagram of a gas concentration measuring device including a detection data transmission function.
  • a gas concentration measuring device 10T having a detection data transmission function further includes an antenna 68 and a communication cable 69 in addition to the above-described gas concentration measuring device 10.
  • the antenna 68 is placed on a buoy or the like floating on the water surface.
  • the communication cable 69 is waterproof.
  • a communication cable 69 connects the antenna 68 and the detection circuit 61.
  • the detection circuit 61 outputs detection data (detection data based on the gas concentration measurement signal) to the antenna 68 through the communication cable 69.
  • the antenna 68 wirelessly transmits the detected data to an external analysis device or the like. Note that the detection data transmission method is not limited to this.
  • FIG. 8 is a cross-sectional view showing the configuration of a gas concentration measuring device according to the second embodiment.
  • the gas concentration measuring device 10A according to the second embodiment differs from the gas concentration measuring device 10 according to the first embodiment in the manner in which the gas permeable membrane 40 is arranged in the housing 20. different.
  • the other configuration of the gas concentration measuring device 10A is the same as that of the gas concentration measuring device 10, and the explanation of the similar parts will be omitted.
  • the gas permeable membrane 40 is arranged on the surface of the flat plate 22 of the housing 20 on the inner space 200 side.
  • the gas concentration measuring device 10A like the gas concentration measuring device 10, can quickly and easily measure the carbon dioxide concentration in water while realizing miniaturization.
  • the joint between the gas permeable membrane 40 and the casing 20 is inside the casing 20. Therefore, when the gas concentration measuring device 10A is placed in water, the joint between the gas permeable membrane 40 and the housing 20 can be prevented from coming into contact with external foreign matter and peeling off.
  • FIG. 9 is a sectional view showing the configuration of a gas concentration measuring device according to the third embodiment.
  • FIG. 10 is an exploded perspective view of a gas concentration measuring device according to a third embodiment.
  • a gas concentration measuring device 10B according to the third embodiment differs from the gas concentration measuring device 10 according to the first embodiment in that a mesh material 60 is added.
  • the other configuration of the gas concentration measuring device 10B is the same as that of the gas concentration measuring device 10, and a description of the similar parts will be omitted.
  • the mesh material 60 is made of stainless steel or aluminum, for example. Note that the mesh material 60 may be made of a flat plate with a plurality of holes, such as punched metal.
  • the mesh material 60 is arranged to cover the gas permeable membrane 40 from the outer surface side.
  • the gas concentration measuring device 10 like the gas concentration measuring device 10, can quickly and easily measure the carbon dioxide concentration in water while realizing miniaturization.
  • the mesh material 60 can prevent damage to the gas permeable membrane 40 caused by external foreign matter hitting the gas permeable membrane 40.
  • FIG. 11(A), FIG. 11(B), FIG. 11(C), and FIG. 11(D) are plan views showing various aspects of the driving body.
  • the driving body 50X1 is a flat membrane strip (having a shape with a longitudinal direction).
  • the driver 50X1 is arranged along the diameter direction of the gas permeable membrane 40.
  • the driving body 50X1 expands and contracts along the longitudinal direction.
  • the driving body 50X1 is preferably made of piezoelectric ceramics, polylactic acid, bimetal, or the like.
  • the driving body 50X2 is constituted by two flat membrane strips (shaped in the longitudinal direction). The two strips are orthogonal to each other and are arranged along the diameter direction of the gas permeable membrane 40, respectively.
  • the two belt-shaped bodies that constitute the driving body 50X2 expand and contract along the longitudinal direction.
  • the driving body 50X2 is preferably made of piezoelectric ceramics, polylactic acid, bimetal, or the like.
  • the driving body 50X3 is composed of a plurality of individual driving bodies.
  • the plurality of individual driving bodies are rectangular in plan view.
  • the plurality of individual driving bodies are arranged at predetermined intervals along the circumferential direction of the gas permeable membrane 40. Note that the arrangement intervals of the individual driving bodies are preferably constant, but may not be constant. Further, the number of individual driving bodies is not limited to four.
  • the plurality of individual driving bodies expand and contract in a direction parallel to the direction from the outer peripheral end of the gas permeable membrane 40 toward the center thereof.
  • the driving body 50X1 expands and contracts along the longitudinal direction.
  • the driving body 50X1 is preferably made of polylactic acid or bimetal.
  • the driver 50X4 is an annular flat membrane.
  • the driving body 50X4 is arranged along the outer periphery of the gas permeable membrane 40.
  • the driver 50X4 expands and contracts along the circumferential direction.
  • the above-mentioned driving bodies 50X1, 50X2, 50X3, and 50X4 are each an example, and they may be combined. That is, the driving body is not limited to the above-mentioned configuration as long as it is disposed on the gas permeable membrane 40 and can vibrate the gas permeable membrane 40.
  • the driving body is arranged on the internal space 200 side of the gas permeable membrane 40.
  • the driver may be arranged on the outer surface of the gas permeable membrane 40 (the surface opposite to the inner space 200 side).
  • driving bodies may be arranged on both sides of the gas permeable membrane 40.
  • FIG. 12(A), FIG. 12(B), and FIG. 12(C) are plan views showing various aspects of the casing and the gas permeable membrane.
  • the gas concentration measuring device 10X1 includes a cylindrical housing 20X1.
  • the gas permeable membrane 40 is arranged on an end surface perpendicular to the circumferential surface of the housing 20X2.
  • the gas concentration measuring device 10X2 includes a cylindrical housing 20X2.
  • a plurality of gas permeable membranes 40X2 are arranged on the circumferential surface of the housing 20X2.
  • the gas concentration measuring device 10X3 includes a gas permeable membrane 40X3 that is rectangular in plan view.
  • the shape of the casing, the planar shape of the gas permeable membrane, the position of the gas permeable membrane in the casing, and the number of gas permeable membranes can be set as appropriate.
  • a casing including an internal space surrounded by a waterproof wall, and an opening provided in the wall that allows the internal space to communicate with the outside of the casing; a measuring device disposed in the internal space and measuring the concentration of gas; a gas permeable membrane that closes the opening, allows the gas to pass through, and substantially prevents moisture from passing through;
  • a gas concentration measuring device comprising: a driver that vibrates the gas permeable membrane.
  • ⁇ 2> The gas concentration measuring device according to ⁇ 1>, wherein the driving body realizes a plurality of shapes by being energized or heated.
  • ⁇ 5> The gas concentration measuring device according to any one of ⁇ 1> to ⁇ 4>, wherein the driving body is disposed on a surface of the gas permeable membrane facing the internal space.
  • ⁇ 6> The gas concentration measuring device according to any one of ⁇ 1> to ⁇ 5>, wherein the driving body has a film shape.
  • a control circuit for controlling vibration of the driving body includes: The gas permeable membrane does not protrude further to the outside of the housing than the non-vibrating position. or with respect to the non-vibrating position of the gas permeable membrane, vibrating more toward the inner space than toward the outside of the casing; The gas concentration measuring device according to any one of ⁇ 1> to ⁇ 9>, which drives the driving body.
  • ⁇ 12> The gas concentration measuring device according to any one of ⁇ 1> to ⁇ 10>, wherein the internal space is provided with a first power source that supplies power to the measuring device.
  • the gas concentration measuring device according to any one of ⁇ 1> to ⁇ 12>, including an antenna that transmits detection data based on the gas concentration measurement signal to the outside of the gas concentration measuring device.

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PCT/JP2023/009654 2022-04-21 2023-03-13 ガス濃度測定装置 Ceased WO2023203918A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN202380031403.XA CN118974534A (zh) 2022-04-21 2023-03-13 气体浓度测定装置
JP2024516133A JP7775995B2 (ja) 2022-04-21 2023-03-13 ガス濃度測定装置
US18/909,418 US20250027921A1 (en) 2022-04-21 2024-10-08 Gas concentration measurement device

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JP2022070044 2022-04-21
JP2022-070044 2022-04-21

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US18/909,418 Continuation US20250027921A1 (en) 2022-04-21 2024-10-08 Gas concentration measurement device

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Citations (4)

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JPH08261984A (ja) * 1995-02-21 1996-10-11 Orbisphere Lab Neuchatel Sa 膜付センサ、流れ制御部材及び分析方法
JP2006090785A (ja) * 2004-09-22 2006-04-06 Central Res Inst Of Electric Power Ind 自立型の海洋二酸化炭素分圧センサ
JP2008180524A (ja) * 2007-01-23 2008-08-07 Hitachi Ltd 油入り機器の油中ガス分析装置
US20210210321A1 (en) * 2018-05-24 2021-07-08 Geomar Helmholtz-Zentrum Fuer Ozeanforschung Kiel Underwater gas measurement apparatus for gases dissolved in water

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08261984A (ja) * 1995-02-21 1996-10-11 Orbisphere Lab Neuchatel Sa 膜付センサ、流れ制御部材及び分析方法
JP2006090785A (ja) * 2004-09-22 2006-04-06 Central Res Inst Of Electric Power Ind 自立型の海洋二酸化炭素分圧センサ
JP2008180524A (ja) * 2007-01-23 2008-08-07 Hitachi Ltd 油入り機器の油中ガス分析装置
US20210210321A1 (en) * 2018-05-24 2021-07-08 Geomar Helmholtz-Zentrum Fuer Ozeanforschung Kiel Underwater gas measurement apparatus for gases dissolved in water

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