WO2023178595A1 - Magnetic storage unit and magnetic storage device - Google Patents

Magnetic storage unit and magnetic storage device Download PDF

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Publication number
WO2023178595A1
WO2023178595A1 PCT/CN2022/082725 CN2022082725W WO2023178595A1 WO 2023178595 A1 WO2023178595 A1 WO 2023178595A1 CN 2022082725 W CN2022082725 W CN 2022082725W WO 2023178595 A1 WO2023178595 A1 WO 2023178595A1
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WIPO (PCT)
Prior art keywords
layer
free layer
magnetic
coupling
voltage
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PCT/CN2022/082725
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French (fr)
Chinese (zh)
Inventor
石以诺
张文彪
迟克群
李州
孟皓
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中电海康集团有限公司
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Publication of WO2023178595A1 publication Critical patent/WO2023178595A1/en

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B61/00Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/80Constructional details

Definitions

  • the present invention relates to the field of storage technology, and in particular to a magnetic storage unit and a magnetic storage device.
  • DRAM dynamic random access memory
  • the storage mechanism of DRAM is to store data in the form of electric charge in a capacitor. Data stored in this way can be damaged due to leakage or discharge of the capacitor. Therefore, DRAM needs to be charged periodically to protect data, which greatly increases the power consumption of the memory.
  • the shrinkage of DRAM cells is also constrained by capacitors. It is necessary to ensure that the amount of charge stored in the capacitor remains unchanged after shrinkage. This makes it increasingly difficult to increase the storage density of DRAM through shrinkage.
  • Non-volatile memory refers to memory that stores data that does not disappear when the external power supply disappears. Non-volatile memory does not need to refresh data repeatedly, and static power consumption is very low.
  • common non-volatile memory cells are mainly two-terminal structure variable resistance devices. The resistance characteristics of the memory cell can be changed between a high resistance state and a low resistance state by applying pulse current. However, on the one hand, this current-driven working method will bring high dynamic power consumption. On the other hand, it requires a large area of external circuit for power supply, and the storage density is low.
  • the invention provides a magnetic storage unit and a magnetic storage device, which have the advantages of low power consumption and high storage density. They do not need to accurately control the pulse width of voltage pulses and reduce the difficulty of pulse width control.
  • the present invention provides a magnetic memory unit, which includes a first free layer, a first coupling layer, a second free layer, a barrier layer and a reference layer that are stacked in sequence.
  • the logical storage state of the magnetic storage unit is determined based on the resistance state at both ends of the magnetic storage unit; and by applying a voltage pulse width to both ends of the magnetic storage unit that exceeds the pulse width threshold, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching.
  • this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future.
  • the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
  • the reference layer has perpendicular magnetic anisotropy with a constant perpendicular magnetization direction
  • the first free layer and the second free layer both have perpendicular magnetic anisotropy with a perpendicular magnetization direction that can be flipped
  • the second free layer There is also a voltage-controlled magnetic anisotropy effect.
  • the second free layer when a voltage pulse is applied to both ends of the magnetic memory cell, switches from perpendicular magnetic anisotropy to in-plane magnetic anisotropy based on the voltage-controlled magnetic anisotropy effect, and The vertical magnetization direction of the first free layer is driven to oscillate through the first coupling layer.
  • the perpendicular magnetization direction of the first free layer stabilizes in the opposite direction of the perpendicular magnetization direction before oscillation, and the magnetization direction of the second free layer stabilizes in the in-plane magnetization direction.
  • the first free layer passes through the first coupling layer, and the magnetization direction of the second free layer is flipped from the in-plane magnetization direction to the perpendicular magnetization direction that is the same as the magnetization direction of the first free layer. It is convenient to drive the perpendicular magnetization direction of the first free layer and the second free layer to flip from the initial direction and unipolarity to the opposite direction.
  • the coupling strength of the first coupling layer is 0.02 ⁇ 0.1erg/cm 2 .
  • the free layer damping coefficient composed of the first free layer, the first coupling layer and the second free layer is 0.005 ⁇ 0.05, which facilitates the process of applying voltage pulses.
  • the first free layer is finally stabilized in the direction opposite to the initial perpendicular magnetization direction.
  • the two free layers are stabilized in the in-plane magnetization direction.
  • the pulse width threshold is 1 to 10 ns, which reduces the time for applying the voltage pulse.
  • the barrier layer is used to provide a voltage-controlled magnetic anisotropy effect to the second free layer, and is also used to provide a tunneling magnetoresistance effect to the second free layer and the reference layer, so as to facilitate the second free layer.
  • the free layer has a voltage-controlled magnetic anisotropy effect, which also facilitates the realization of the tunneling magnetoresistance effect between the second free layer, the barrier layer and the reference layer.
  • the material of the barrier layer is magnesium oxide to obtain a more significant tunneling magnetoresistance effect and voltage-controlled magnetic anisotropy effect.
  • a magnesium oxide layer is laminated on the first free layer, and the magnesium oxide layer and the first coupling layer are arranged on opposite sides of the first free layer.
  • the magnesium oxide layer is used to increase the perpendicular magnetic anisotropy of the first free layer, and the thickness of the magnesium oxide layer is smaller than the thickness of the barrier layer. While enhancing the perpendicular magnetic anisotropy of the first free layer, it is necessary to reduce the thickness of the magnesium oxide layer as much as possible to reduce the partial voltage when an external voltage pulse is applied, thereby reducing the impact on the magnetoresistance change rate. Moreover, it is also necessary to make the thickness of the barrier layer larger to increase the resistance of the barrier layer, so that when a voltage pulse is applied externally, there will be more voltage division.
  • a heavy metal layer is laminated on the first free layer, and the heavy metal layer and the first coupling layer are arranged on opposite sides of the first free layer.
  • the heavy metal layer is used to enhance the perpendicular magnetic anisotropy of the first free layer. While enhancing the perpendicular magnetic anisotropy of the first free layer, the low resistance characteristics of the heavy metal layer are utilized to reduce the impact on the magnetoresistance change rate. It also utilizes the magnetic anisotropy effect of the heavy metal layer that does not have voltage control, so that the heavy metal layer does not affect the unipolar switching of the magnetic memory unit and does not affect the operation of the device. And by arranging a heavy metal layer, the free layer damping coefficient between the first free layer, the first coupling layer and the second free layer can also be improved, which facilitates the control of the overall flip time and flip probability of the magnetic memory array.
  • the magnetic memory unit further includes: a second coupling layer and a pinning layer sequentially stacked on the reference layer.
  • the pinned layer passes through the second coupling layer to pin the reference layer to have perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, so as to facilitate pinning the perpendicular magnetization direction of the reference layer.
  • the first coupling layer is ferromagnetic coupling
  • the second coupling layer is antiferromagnetic coupling
  • the coupling strength of the second coupling layer is greater than the coupling strength of the first coupling layer, so that the perpendicular magnetization direction of the reference layer It is not affected by the magnetization directions of the two free layers, but maintains a constant perpendicular magnetization direction.
  • the materials of the first coupling layer and the second coupling layer are Ru, Ir, Ta, Mo or W, which facilitates the arrangement of the two coupling layers.
  • the material of the pinning layer is FeNi, FePd, CoNi, FePt or CoPt, which facilitates the placement of the pinning layer.
  • the material of the first free layer, the second free layer and the reference layer is any one of Co, Fe, Ni or an alloy containing several materials, which facilitates the arrangement of the free layer and the reference layer.
  • the present invention also provides a magnetic memory device, which includes: a magnetic memory array composed of a plurality of any of the above magnetic memory cells, and a pulse voltage generating circuit.
  • the pulse voltage generating circuit is used to apply a voltage pulse with a pulse width exceeding a pulse width threshold to both ends of the magnetic memory unit, so that the resistance state at both ends of the magnetic memory unit undergoes unipolar switching.
  • a voltage pulse width exceeding the pulse width threshold is applied to both ends of the magnetic memory cell.
  • this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed.
  • this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
  • Figure 1 is a structural cross-sectional view of a magnetic memory unit provided by an embodiment of the present invention
  • Figure 2 is a schematic diagram illustrating changes in the magnetization state and barrier structure after applying a voltage pulse according to an embodiment of the present invention
  • Figure 3 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention.
  • Figure 4 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention.
  • Figure 5 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention.
  • FIG. 6 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention.
  • the magnetic storage unit is used as a storage bit and is used in a magnetic storage device.
  • the magnetic memory unit will be described in detail below with reference to the accompanying drawings.
  • the magnetic memory unit provided by the embodiment of the present invention includes: a first free layer 11 , a first coupling layer 20 , a second free layer 12 , a barrier layer 30 and a reference layer 40 that are stacked in sequence.
  • the logical storage state of the magnetic storage unit is determined based on the resistance state at both ends of the magnetic storage unit; and by applying a voltage pulse width exceeding the pulse width threshold to both ends of the magnetic storage unit, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching.
  • the magnetic memory cell is When the voltage pulse width applied at both ends exceeds the pulse width threshold, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices.
  • this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed.
  • this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
  • the first free layer 11 , the first coupling layer 20 , the second free layer 12 , the barrier layer 30 and the reference layer 40 are stacked in sequence from top to bottom.
  • the stacking direction of the first free layer 11 , the first coupling layer 20 , the second free layer 12 , the barrier layer 30 and the reference layer 40 is not limited to the top-to-bottom stacking as shown in FIG. 1
  • other stacking methods can also be used.
  • the first free layer 11, the first coupling layer 20, the second free layer 12, the barrier layer 30 and the reference layer 40 can also be sequentially stacked from bottom to top. Do the layering.
  • the second free layer 12, the barrier layer 30 and the reference layer 40 form a magnetic tunnel junction structure, that is, the magnetization direction between the second free layer 12 and the reference layer 40 can be between a parallel state and an anti-parallel state. flip, thereby changing the resistance state across the magnetic memory cell.
  • the barrier layer 30 can provide the tunneling magnetoresistance effect to the second free layer 12 and the reference layer 40 to facilitate the realization of the tunneling magnetoresistance effect between the second free layer 12 , the barrier layer 30 and the reference layer 40 .
  • the magnetization directions between the second free layer 12 and the reference layer 40 are parallel, that is, the magnetization directions of the two are the same, the resistance state at both ends of the magnetic memory cell is in a low resistance state.
  • the magnetic storage unit also represents the two logical storage states of the magnetic storage unit through the high resistance state and the low resistance state respectively. That is, the logical storage state of the storage unit is determined according to the resistance state at both ends of the magnetic storage unit, thereby realizing the reading of data. Write.
  • the reference layer 40 has perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, that is, the perpendicular magnetization direction within the reference layer 40 can maintain a constant upward direction as shown in FIG. 1 .
  • the second coupling layer 22 and the pinning layer 50 provided on the reference layer 40 can be sequentially stacked on the side of the reference layer 40 away from the barrier layer 30 , and the pinning layer 50 passes through the third layer.
  • the second coupling layer 22 pins the reference layer 40 to have perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, which facilitates pinning the perpendicular magnetization direction of the reference layer 40 .
  • the material of the reference layer 40 can be any one of Co, Fe, and Ni or an alloy containing several materials, which facilitates the setting of the reference layer 40 .
  • the material of the pinning layer 50 can be FeNi, FePd, CoNi, FePt or CoPt, which facilitates the arrangement of the pinning layer 50 .
  • the material of the second coupling layer 22 may be Ru, Ir, Ta, Mo or W, which facilitates the placement of the second coupling layer 22. It should be understood that the manner of pinning the perpendicular magnetization direction of the reference layer 40 is not limited to the manner shown above, and other pinning manners may also be adopted.
  • first coupling layer 20 and second free layer 12 are provided, as shown in FIG. 1, the second free layer 12 is separated from the reference layer 40 by the barrier layer 30, and the first free layer 11 is separated from the second free layer 12 by a first coupling layer 20 .
  • Both the first free layer 11 and the second free layer 12 have perpendicular magnetic anisotropy in which the perpendicular magnetization direction can be flipped, that is, the perpendicular magnetization directions in the first free layer 11 and the second free layer 12 can be as shown in Figure 1 to flip between up and down.
  • the second free layer 12 also has a voltage-controlled magnetic anisotropy effect, which can be provided specifically by the barrier layer 30 .
  • the barrier layer 30 can also provide a voltage-controlled magnetic anisotropy effect to the second free layer 12 to facilitate the use of the second free layer 12 and the reference layer 40 .
  • the two free layers 12 have a voltage-controlled magnetic anisotropy effect.
  • the material of the barrier layer 30 can be magnesium oxide to improve the tunneling magnetoresistance effect and voltage-controlled magnetic anisotropy provided by the barrier layer 30. The quality of the anisotropy effect is achieved, and the more significant tunneling magnetoresistance effect and voltage-controlled magnetic anisotropy effect are obtained.
  • the method of providing the voltage-controlled magnetic anisotropy effect to the second free layer 12 is not limited to the above-mentioned method through the barrier layer 30 , and other methods may also be adopted.
  • the material of the barrier layer 30 is not limited to the magnesium oxide shown above. In addition, other materials with barrier properties may also be used.
  • the magnetic memory unit when specifically implementing unipolar switching of the resistance state at both ends of the magnetic memory unit, can apply a voltage pulse width to both ends of the magnetic memory unit exceeding the pulse width threshold, based on the second free layer 12 has
  • the voltage-controlled magnetic anisotropy effect causes a unipolar magnetization flip in the perpendicular magnetization directions of the first free layer 11 and the second free layer 12, so that the magnetization direction between the reference layer 40 and the second free layer 12 is in Switching between the parallel state and the anti-parallel state facilitates unipolar switching of the resistance state of the magnetic memory cell.
  • the materials of the first free layer 11 and the second free layer 12 can be any one of Co, Fe, and Ni. Materials or alloys containing several materials to facilitate the placement of free layers.
  • the material of the first coupling layer 20 may be Ru, Ir, Ta, Mo or W to facilitate the placement of the first coupling layer 20 .
  • the second free layer 12 when a voltage pulse is just applied to both ends of the magnetic memory cell, the second free layer 12 can switch from perpendicular magnetic anisotropy to in-plane magnetic anisotropy based on its voltage-controlled magnetic anisotropy effect. Magnetic anisotropy (as shown in Figure 2, switching from the initial upward perpendicular magnetic anisotropy to in-plane magnetic anisotropy toward the right). At the same time, in the process of the second free layer 12 switching from perpendicular magnetic anisotropy to in-plane magnetic anisotropy, the second free layer 12 can also drive the perpendicular magnetization direction of the first free layer 11 to oscillate through the first coupling layer 20 .
  • the vertical magnetization direction of the first free layer 11 can finally stabilize in the opposite direction of the vertical magnetization direction before oscillation, that is, the first free layer 11
  • the perpendicular magnetization direction after stabilization is exactly opposite to the perpendicular magnetization direction before oscillation.
  • the initial perpendicular magnetization direction of the first free layer 11 in Figure 2 is upward, and after oscillation and stabilization, its perpendicular magnetization direction is downward. Just opposite to the perpendicular magnetization direction before oscillation.
  • the magnetization direction of the second free layer 12 can finally stabilize at the in-plane magnetization direction, for example, as shown in FIG. 2 , the magnetization direction finally stabilizes at the in-plane magnetization direction to the right.
  • the first free layer 11 can change the magnetization direction of the second free layer 12 from in-plane through the coupling effect of the first coupling layer 20
  • the magnetization direction is flipped to the same perpendicular magnetization direction as the magnetization direction of the first free layer 11 . That is, the second free layer 12 switches to perpendicular magnetic anisotropy again.
  • the first free layer 11 flips the magnetization direction of the second free layer 12 from the in-plane magnetization direction to the right to a downward perpendicular magnetization direction, which is exactly perpendicular to the stabilized direction of the first free layer 11 .
  • the magnetization directions are the same.
  • the vertical magnetization direction of the first free layer 11 and the second free layer 12 after flipping is exactly opposite to the vertical magnetization direction before flipping. That is, before and after the voltage pulse is applied, the magnetization directions of the first free layer 11 and the second free layer 12 change, achieving a deterministic unipolar magnetization flip. Since the resistance state of the magnetic memory cell depends on the relative magnetization direction between the second free layer 12 and the reference layer 40, the magnetization direction of the second free layer 12 changes, while the magnetization direction of the reference layer 40 remains unchanged, thus causing the The relative magnetization direction between the two free layers 12 and the reference layer 40 changes (from a parallel state to an anti-parallel state, or from an anti-parallel state to a parallel state).
  • the initial resistance at both ends of the magnetic memory unit When a voltage pulse is applied, the initial resistance at both ends of the magnetic memory unit is in a high-resistance state. After the voltage pulse is applied, the resistance at both ends of the magnetic memory unit changes to a low-resistance state. When a voltage pulse is applied, the initial resistance at both ends of the magnetic memory unit is in a low-resistance state. After the voltage pulse is applied, the resistance at both ends of the magnetic memory unit changes to a high-resistance state.
  • the coupling strength of the first coupling layer 20 may be 0.02 to 0.1erg/cm 2 .
  • the coupling strength of the first coupling layer 20 may be 0.02erg/cm 2 or 0.04 erg/cm 2 , 0.06erg/cm 2 , 0.08erg/cm 2 , 0.1erg/cm 2 and other values between 0.02 and 0.1erg/cm 2 .
  • the first coupling layer can also be ferromagnetic coupling
  • the second coupling layer can be antiferromagnetic coupling
  • the coupling strength of the second coupling layer 22 is greater than the coupling strength of the first coupling layer 20 , that is, the second coupling layer 22 It is a strong magnetic coupling, while the first coupling layer 20 is a weak magnetic coupling, so that the vertical magnetization direction of the reference layer 40 is not affected by the magnetization directions of the two free layers and maintains a constant vertical magnetization direction.
  • the free layer damping coefficient composed of the first free layer 11, the first coupling layer 20 and the second free layer 12 can be 0.005 to 0.05.
  • the first free layer 11, the first coupling layer 20 and the second free layer The free layer damping coefficient composed of 12 can be 0.005, 0.010, 0.015, 0.020, 0.025, 0.030, 0.035, 0.040, 0.045, 0.050 and other values between 0.005 and 0.05, which facilitates the process of applying voltage pulses.
  • the free layer 11 eventually stabilizes in the direction opposite to the initial perpendicular magnetization direction, and the second free layer 12 stabilizes in the in-plane magnetization direction.
  • the pulse width threshold can be 1 to 10ns.
  • the pulse width threshold can be 1ns, 2ns, 3ns, 4ns, 5ns, 6ns, 7ns, 8ns, 9ns, 10ns, etc., ranging from 1 to 10ns. any value between to reduce the time for applying the voltage pulse.
  • a magnesium oxide layer 61 may also be stacked on the first free layer 11 , and the magnesium oxide layer 61 and the first coupling layer 20 are arranged on opposite sides of the first free layer 11 .
  • the material of the magnesium oxide layer 61 is magnesium oxide.
  • the magnesium oxide layer 61 can increase the perpendicular magnetic anisotropy of the first free layer 11 so that the first free layer 11 can remain stable after flipping to a certain perpendicular magnetization direction.
  • the thickness of the magnesium oxide layer 61 While enhancing the perpendicular magnetic anisotropy of the first free layer 11 , it is also necessary to make the thickness of the magnesium oxide layer 61 smaller than the thickness of the barrier layer 30 to minimize the resistance of the magnesium oxide layer 61 when a voltage pulse is applied externally. There is less partial pressure, thereby reducing the impact on the rate of change of reluctance. Moreover, it is also necessary to make the thickness of the barrier layer 30 larger to increase the resistance of the barrier layer 30, so that when a voltage pulse is applied externally, more voltage division occurs.
  • the method of enhancing the perpendicular magnetic anisotropy of the first free layer 11 is not limited to the method of stacking the magnesium oxide layer 61 as shown in FIGS. 3 and 4 .
  • other methods may also be used.
  • a heavy metal layer 62 may also be stacked on the first free layer 11 , and the heavy metal layer 62 and the first coupling layer 20 are arranged on opposite sides of the first free layer 11 .
  • the material of the heavy metal layer 62 may be a heavy metal material such as but not limited to W.
  • the heavy metal layer 62 is used to enhance the perpendicular magnetic anisotropy of the first free layer 11 .
  • the low resistance characteristic of the heavy metal layer 62 is also utilized to reduce the impact on the magnetoresistance change rate. Moreover, it is possible to utilize the magnetic anisotropy effect of the heavy metal layer 62 which does not have voltage control, so that the heavy metal layer 62 does not affect the unipolar switching of the magnetic memory unit and does not affect the operation of the device. Furthermore, by arranging the heavy metal layer 62, the free layer damping coefficient between the first free layer 11, the first coupling layer 20 and the second free layer 12 can also be improved, which facilitates the control of the overall flip time and flip probability of the magnetic memory array.
  • a bottom electrode 80 and a top electrode 70 can be respectively provided at both ends of the magnetic memory unit to facilitate application of voltage pulses to both ends of the magnetic memory unit and to facilitate reading of the resistance state at both ends of the magnetic memory unit.
  • the bottom electrode 80 can be stacked on the pinning layer 50
  • the second coupling layer 22 and the bottom electrode 80 are arranged on both sides of the pinning layer 50 .
  • the top electrode 70 can be stacked on the magnesium oxide layer 61 or the heavy metal layer 62
  • the top electrode 70 and the first free layer 11 are arranged on both sides of the heavy metal layer 62 behind the magnesium oxide layer 61 . It should be understood that the arrangement manner of the top electrode 70 and the bottom electrode 80 is not limited to the manner shown above, and other arrangement manners may also be adopted.
  • the first coupling layer 20 and the first free layer 11 are added to the magnetic tunnel junction originally composed of the free layer, the barrier layer 30 and the reference layer 40.
  • the voltage pulse width applied at both ends of the magnetic storage unit exceeds the pulse width threshold, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices.
  • this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed.
  • this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
  • an embodiment of the present invention also provides a magnetic memory device.
  • the magnetic memory device includes: a magnetic memory array composed of a plurality of any of the above magnetic memory units, and a pulse voltage generating circuit.
  • the pulse voltage generating circuit is used to apply a voltage pulse with a pulse width exceeding a pulse width threshold to both ends of the magnetic memory unit, so that the resistance state at both ends of the magnetic memory unit undergoes unipolar switching.
  • a voltage pulse width is applied to both ends of the magnetic memory cell.
  • the resistance state at both ends of the magnetic storage unit undergoes unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices.
  • this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed.
  • this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.

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Abstract

Provided in the present invention are a magnetic storage unit and a magnetic storage device. The magnetic storage unit comprises: a first free layer, a first coupling layer, a second free layer, a barrier layer and a reference layer, which are sequentially arranged in a stacked manner. A logic storage state of the magnetic storage unit is determined according to resistance states at two ends of the magnetic storage unit; and by means of applying a voltage pulse, the pulse width of which exceeds a pulse width threshold value, to the two ends of the magnetic storage unit, the resistance states at the two ends of the magnetic storage unit are subjected to unipolarity switching. In the present application, a pulse voltage is used to drive the magnetic storage unit to turn over; the present application has the advantages of low power consumption and high storage density; and there is no need to accurately control the pulse width of the voltage pulse, such that the difficulty of control over the pulse width is reduced.

Description

一种磁存储单元及磁存储器件A kind of magnetic storage unit and magnetic storage device 技术领域Technical field
本发明涉及存储技术领域,尤其涉及一种磁存储单元及磁存储器件。The present invention relates to the field of storage technology, and in particular to a magnetic storage unit and a magnetic storage device.
背景技术Background technique
随着互联智能设备的兴起,对高性能数据储存和内存技术的需求日益增加。目前的内存技术以动态随机存取存储器(DRAM)为主流。DRAM的存储机制是将数据以电荷的形式存储在电容器中。这种方式存储的数据会因为电容器的泄漏或放电发生毁损。因此,DRAM需要周期性地充电以保护数据,这极大增加了存储器的功耗。此外DRAM单元的微缩也受到电容器的约束,需要确保微缩后电容存储的电荷量不变,这使DRAM通过微缩提升存储密度变得越来越困难。With the rise of connected smart devices, there is an increasing demand for high-performance data storage and memory technology. The current memory technology is dynamic random access memory (DRAM). The storage mechanism of DRAM is to store data in the form of electric charge in a capacitor. Data stored in this way can be damaged due to leakage or discharge of the capacitor. Therefore, DRAM needs to be charged periodically to protect data, which greatly increases the power consumption of the memory. In addition, the shrinkage of DRAM cells is also constrained by capacitors. It is necessary to ensure that the amount of charge stored in the capacitor remains unchanged after shrinkage. This makes it increasingly difficult to increase the storage density of DRAM through shrinkage.
近年来,新型非易失性存储器技术得到了快速发展。非易失性存储器是指当外部供电消失后,所存储的数据不会消失的存储器。非易失性存储器不需要反复刷新数据,静态功耗很低。目前常见非易失性存储单元以两端结构可变电阻器件为主,可以通过施加脉冲电流使存储单元的电阻特性在高阻态和低阻态之间发生变化。但是这种电流驱动的工作方式一方面会带来较高的动态功耗,另一方面需要较大面积的外部电路进行供电,存储密度较低。In recent years, new non-volatile memory technologies have developed rapidly. Non-volatile memory refers to memory that stores data that does not disappear when the external power supply disappears. Non-volatile memory does not need to refresh data repeatedly, and static power consumption is very low. At present, common non-volatile memory cells are mainly two-terminal structure variable resistance devices. The resistance characteristics of the memory cell can be changed between a high resistance state and a low resistance state by applying pulse current. However, on the one hand, this current-driven working method will bring high dynamic power consumption. On the other hand, it requires a large area of external circuit for power supply, and the storage density is low.
发明内容Contents of the invention
本发明提供了一种磁存储单元及磁存储器件,具有功耗低、存储密度高的优点,无需精确控制电压脉冲的脉冲宽度,降低脉冲宽度控制难度。The invention provides a magnetic storage unit and a magnetic storage device, which have the advantages of low power consumption and high storage density. They do not need to accurately control the pulse width of voltage pulses and reduce the difficulty of pulse width control.
第一方面,本发明提供了一种磁存储单元,该磁存储单元包括:依次层叠设置的第一自由层、第一耦合层、第二自由层、势垒层和参考层。其中,磁存储单元的逻辑存储状态根据磁存储单元两端的电阻状态确定;且通过向磁存储 单元两端施加电压脉冲宽度超过脉冲宽度阈值,使磁存储单元两端的电阻状态发生单极性切换。In a first aspect, the present invention provides a magnetic memory unit, which includes a first free layer, a first coupling layer, a second free layer, a barrier layer and a reference layer that are stacked in sequence. Among them, the logical storage state of the magnetic storage unit is determined based on the resistance state at both ends of the magnetic storage unit; and by applying a voltage pulse width to both ends of the magnetic storage unit that exceeds the pulse width threshold, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching.
在上述的方案中,通过在原来由自由层、势垒层和参考层组成的磁性隧道结的基础上,再增加第一耦合层和第一自由层,从而通过向磁存储单元两端施加电压脉冲宽度超过脉冲宽度阈值,使磁存储单元两端的电阻状态发生单极性切换,使磁存储单元完成两个逻辑存储装置的切换。与现有技术采用脉冲电流驱动磁存储单元翻转的方式相比,本申请采用脉冲电压驱动磁存储单元翻转,工作时几乎不需要电流脉冲驱动,只要电压发生变化从而在磁存储单元两端施加电压脉冲,至电压脉冲宽度大于脉冲宽度阈值,即可迅速完成磁存储单元的电阻状态切换。即本申请完全基于电压脉冲实现磁存储单元的逻辑存储状态调控,无需电流脉冲驱动,也相应无需较大面积的外部电路进行供电,减少供电电路面积,能够设置更多的磁存储单元,从而具有功耗低、存储密度高的优点,能够作为未来低功耗、高密度的非易失存储器的基本单元。同时在施加足够长时间的电压脉冲之后,磁存储单元的电阻状态能够发生单极性切换,无需精确控制电压脉冲的脉冲宽度,降低脉冲宽度控制难度。In the above scheme, by adding a first coupling layer and a first free layer to the original magnetic tunnel junction composed of a free layer, a barrier layer and a reference layer, a voltage is applied to both ends of the magnetic memory unit. When the pulse width exceeds the pulse width threshold, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices. Compared with the existing technology that uses pulse current to drive the magnetic storage unit to flip, this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed. That is to say, this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
在一个具体的实施方式中,参考层具有垂直磁化方向恒定的垂直磁各向异性,第一自由层和第二自由层均具有垂直磁化方向能够翻转的垂直磁各向异性,且第二自由层还具有电压控制的磁各向异性效应。基于电压控制的磁各向异性效应,通过向磁存储单元两端施加电压脉冲宽度超出脉冲宽度阈值,使第一自由层和第二自由层的垂直磁化方向发生单极性磁化翻转,使参考层与第二自由层之间的磁化方向在平行态和反平行态之间切换,便于磁存储单元的电阻状态发生单极性切换。In a specific embodiment, the reference layer has perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, the first free layer and the second free layer both have perpendicular magnetic anisotropy with a perpendicular magnetization direction that can be flipped, and the second free layer There is also a voltage-controlled magnetic anisotropy effect. Based on the voltage-controlled magnetic anisotropy effect, by applying a voltage pulse width exceeding the pulse width threshold to both ends of the magnetic memory cell, a unipolar magnetization flip occurs in the perpendicular magnetization directions of the first free layer and the second free layer, causing the reference layer to The magnetization direction between the second free layer and the second free layer is switched between a parallel state and an anti-parallel state, which facilitates unipolar switching of the resistance state of the magnetic memory cell.
在一个具体的实施方式中,在向磁存储单元两端施加电压脉冲时,第二自 由层基于电压控制的磁各向异性效应,从垂直磁各向异性切换为面内磁各向异性,并通过第一耦合层带动第一自由层的垂直磁化方向发生振荡。在电压脉冲宽度超过脉冲宽度阈值之后,第一自由层的垂直磁化方向稳定在振荡前垂直磁化方向的反方向,第二自由层的磁化方向稳定在面内磁化方向。在撤去电压脉冲后,第一自由层通过第一耦合层,将第二自由层的磁化方向由面内磁化方向,翻转为与第一自由层的磁化方向相同的垂直磁化方向。便于驱动第一自由层和第二自由层的垂直磁化方向由初始方向,单极性翻转为相反的方向。In a specific embodiment, when a voltage pulse is applied to both ends of the magnetic memory cell, the second free layer switches from perpendicular magnetic anisotropy to in-plane magnetic anisotropy based on the voltage-controlled magnetic anisotropy effect, and The vertical magnetization direction of the first free layer is driven to oscillate through the first coupling layer. After the voltage pulse width exceeds the pulse width threshold, the perpendicular magnetization direction of the first free layer stabilizes in the opposite direction of the perpendicular magnetization direction before oscillation, and the magnetization direction of the second free layer stabilizes in the in-plane magnetization direction. After the voltage pulse is removed, the first free layer passes through the first coupling layer, and the magnetization direction of the second free layer is flipped from the in-plane magnetization direction to the perpendicular magnetization direction that is the same as the magnetization direction of the first free layer. It is convenient to drive the perpendicular magnetization direction of the first free layer and the second free layer to flip from the initial direction and unipolarity to the opposite direction.
在一个具体的实施方式中,第一耦合层的耦合强度为0.02~0.1erg/cm 2。第一自由层、第一耦合层和第二自由层组成的自由层阻尼系数为0.005~0.05,便于施加电压脉冲的过程中,第一自由层最终稳定在与初始垂直磁化方向相反的方向,第二自由层稳定在面内磁化方向。 In a specific implementation, the coupling strength of the first coupling layer is 0.02˜0.1erg/cm 2 . The free layer damping coefficient composed of the first free layer, the first coupling layer and the second free layer is 0.005~0.05, which facilitates the process of applying voltage pulses. The first free layer is finally stabilized in the direction opposite to the initial perpendicular magnetization direction. The two free layers are stabilized in the in-plane magnetization direction.
在一个具体的实施方式中,脉冲宽度阈值为1~10ns,减小施加电压脉冲的时间。In a specific implementation, the pulse width threshold is 1 to 10 ns, which reduces the time for applying the voltage pulse.
在一个具体的实施方式中,势垒层用于给第二自由层提供电压控制的磁各向异性效应,还用于给第二自由层和参考层提供隧穿磁阻效应,便于使第二自由层具有电压控制的磁各向异性效应,也便于实现第二自由层、势垒层和参考层之间的隧穿磁阻效应。In a specific embodiment, the barrier layer is used to provide a voltage-controlled magnetic anisotropy effect to the second free layer, and is also used to provide a tunneling magnetoresistance effect to the second free layer and the reference layer, so as to facilitate the second free layer. The free layer has a voltage-controlled magnetic anisotropy effect, which also facilitates the realization of the tunneling magnetoresistance effect between the second free layer, the barrier layer and the reference layer.
在一个具体的实施方式中,势垒层的材料为氧化镁,以获得较为显著的隧穿磁阻效应和电压控制的磁各向异性效应。In a specific embodiment, the material of the barrier layer is magnesium oxide to obtain a more significant tunneling magnetoresistance effect and voltage-controlled magnetic anisotropy effect.
在一个具体的实施方式中,第一自由层上还层叠设置有氧化镁层,氧化镁层与第一耦合层分列在第一自由层相对的两侧。氧化镁层用于增加第一自由层的垂直磁各向异性,且氧化镁层的厚度小于势垒层的厚度。在增强第一自由层的垂直磁各向异性的同时,需要尽量减小氧化镁层的厚度,使外部施加电压脉 冲时分压较少,从而减小对磁阻变化率的影响。且还需要使势垒层的厚度较大,增加势垒层的电阻,使外部施加电压脉冲时分压较多。In a specific embodiment, a magnesium oxide layer is laminated on the first free layer, and the magnesium oxide layer and the first coupling layer are arranged on opposite sides of the first free layer. The magnesium oxide layer is used to increase the perpendicular magnetic anisotropy of the first free layer, and the thickness of the magnesium oxide layer is smaller than the thickness of the barrier layer. While enhancing the perpendicular magnetic anisotropy of the first free layer, it is necessary to reduce the thickness of the magnesium oxide layer as much as possible to reduce the partial voltage when an external voltage pulse is applied, thereby reducing the impact on the magnetoresistance change rate. Moreover, it is also necessary to make the thickness of the barrier layer larger to increase the resistance of the barrier layer, so that when a voltage pulse is applied externally, there will be more voltage division.
在一个具体的实施方式中,第一自由层上还层叠设置有重金属层,重金属层与第一耦合层分列在第一自由层相对的两侧。重金属层用于增强第一自由层的垂直磁各向异性。在增强第一自由层的垂直磁各向异性的同时,利用重金属层电阻小的特性,减少对磁阻变化率的影响。还利用重金属层不具备电压控制的磁各向异性效应,使重金属层不影响磁存储单元的单极性切换,不影响器件工作。且通过设置重金属层,还能够提高第一自由层、第一耦合层和第二自由层之间的自由层阻尼系数,便于调控磁存储阵列的整体翻转时间和翻转概率。In a specific embodiment, a heavy metal layer is laminated on the first free layer, and the heavy metal layer and the first coupling layer are arranged on opposite sides of the first free layer. The heavy metal layer is used to enhance the perpendicular magnetic anisotropy of the first free layer. While enhancing the perpendicular magnetic anisotropy of the first free layer, the low resistance characteristics of the heavy metal layer are utilized to reduce the impact on the magnetoresistance change rate. It also utilizes the magnetic anisotropy effect of the heavy metal layer that does not have voltage control, so that the heavy metal layer does not affect the unipolar switching of the magnetic memory unit and does not affect the operation of the device. And by arranging a heavy metal layer, the free layer damping coefficient between the first free layer, the first coupling layer and the second free layer can also be improved, which facilitates the control of the overall flip time and flip probability of the magnetic memory array.
在一个具体的实施方式中,该磁存储单元还包括:依次层叠设置在参考层上的第二耦合层和钉扎层。钉扎层通过第二耦合层,将参考层钉扎为具有垂直磁化方向恒定的垂直磁各向异性,便于钉扎参考层的垂直磁化方向。In a specific embodiment, the magnetic memory unit further includes: a second coupling layer and a pinning layer sequentially stacked on the reference layer. The pinned layer passes through the second coupling layer to pin the reference layer to have perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, so as to facilitate pinning the perpendicular magnetization direction of the reference layer.
在一个具体的实施方式中,第一耦合层为铁磁耦合,第二耦合层为反铁磁耦合,第二耦合层的耦合强度大于第一耦合层的耦合强度,使参考层的垂直磁化方向不受两个自由层的磁化方向影响,而保持恒定不变的垂直磁化方向。In a specific embodiment, the first coupling layer is ferromagnetic coupling, the second coupling layer is antiferromagnetic coupling, and the coupling strength of the second coupling layer is greater than the coupling strength of the first coupling layer, so that the perpendicular magnetization direction of the reference layer It is not affected by the magnetization directions of the two free layers, but maintains a constant perpendicular magnetization direction.
在一个具体的实施方式中,第一耦合层和第二耦合层的材料均为Ru、Ir、Ta、Mo或W,便于设置两个耦合层。In a specific embodiment, the materials of the first coupling layer and the second coupling layer are Ru, Ir, Ta, Mo or W, which facilitates the arrangement of the two coupling layers.
在一个具体的实施方式中,钉扎层的材料为FeNi、FePd、CoNi、FePt或CoPt,便于设置钉扎层。In a specific embodiment, the material of the pinning layer is FeNi, FePd, CoNi, FePt or CoPt, which facilitates the placement of the pinning layer.
在一个具体的实施方式中,第一自由层、第二自由层和参考层的材料为Co、Fe、Ni的任意一种材料或包含有几种材料的合金,便于设置自由层和参考层。In a specific embodiment, the material of the first free layer, the second free layer and the reference layer is any one of Co, Fe, Ni or an alloy containing several materials, which facilitates the arrangement of the free layer and the reference layer.
第二方面,本发明还提供了一种磁存储器件,该磁存储器件包括:由多个 上述任意一种磁存储单元组成的磁存储阵列、以及脉冲电压产生电路。其中,脉冲电压产生电路用于向磁存储单元两端施加脉冲宽度超过脉冲宽度阈值的电压脉冲,使磁存储单元两端的电阻状态发生单极性切换。通过在原来由自由层、势垒层和参考层组成的磁性隧道结的基础上,再增加第一耦合层和第一自由层,从而通过向磁存储单元两端施加电压脉冲宽度超过脉冲宽度阈值,使磁存储单元两端的电阻状态发生单极性切换,使磁存储单元完成两个逻辑存储装置的切换。与现有技术采用脉冲电流驱动磁存储单元翻转的方式相比,本申请采用脉冲电压驱动磁存储单元翻转,工作时几乎不需要电流脉冲驱动,只要电压发生变化从而在磁存储单元两端施加电压脉冲,至电压脉冲宽度大于脉冲宽度阈值,即可迅速完成磁存储单元的电阻状态切换。即本申请完全基于电压脉冲实现磁存储单元的逻辑存储状态调控,无需电流脉冲驱动,也相应无需较大面积的外部电路进行供电,减少供电电路面积,能够设置更多的磁存储单元,从而具有功耗低、存储密度高的优点,能够作为未来低功耗、高密度的非易失存储器的基本单元。同时在施加足够长时间的电压脉冲之后,磁存储单元的电阻状态能够发生单极性切换,无需精确控制电压脉冲的脉冲宽度,降低脉冲宽度控制难度。In a second aspect, the present invention also provides a magnetic memory device, which includes: a magnetic memory array composed of a plurality of any of the above magnetic memory cells, and a pulse voltage generating circuit. Wherein, the pulse voltage generating circuit is used to apply a voltage pulse with a pulse width exceeding a pulse width threshold to both ends of the magnetic memory unit, so that the resistance state at both ends of the magnetic memory unit undergoes unipolar switching. By adding a first coupling layer and a first free layer to the original magnetic tunnel junction composed of a free layer, a barrier layer and a reference layer, a voltage pulse width exceeding the pulse width threshold is applied to both ends of the magnetic memory cell. , causing the resistance state at both ends of the magnetic storage unit to undergo unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices. Compared with the existing technology that uses pulse current to drive the magnetic storage unit to flip, this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed. That is to say, this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
附图说明Description of the drawings
图1为本发明实施例提供的一种磁存储单元的结构剖视图;Figure 1 is a structural cross-sectional view of a magnetic memory unit provided by an embodiment of the present invention;
图2为本发明实施例提供的一种施加电压脉冲后磁化状态和势垒结构变化的示意图;Figure 2 is a schematic diagram illustrating changes in the magnetization state and barrier structure after applying a voltage pulse according to an embodiment of the present invention;
图3为本发明实施例提供的另一种磁存储单元的结构剖视图;Figure 3 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention;
图4为本发明实施例提供的另一种磁存储单元的结构剖视图;Figure 4 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention;
图5为本发明实施例提供的另一种磁存储单元的结构剖视图;Figure 5 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention;
图6为本发明实施例提供的另一种磁存储单元的结构剖视图。FIG. 6 is a structural cross-sectional view of another magnetic memory unit provided by an embodiment of the present invention.
附图标记:Reference signs:
11-第一自由层 12-第二自由层 21-第一耦合层11-First free layer 12-Second free layer 21-First coupling layer
22-第二耦合层 30-势垒层 40-参考层 50-钉扎层22-Second coupling layer 30-Barrier layer 40-Reference layer 50-Pinning layer
61-氧化镁层 62-重金属层 70-顶电极 80-底电极61-Magnesia layer 62-Heavy metal layer 70-Top electrode 80-Bottom electrode
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments These are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present invention.
为了方便理解本发明实施例提供的磁存储单元,下面首先说明一下本发明实施例提供的磁存储单元的应用场景,该磁存储单元应用于作为存储位元,应用于磁存储器件中。下面结合附图对该磁存储单元进行详细的叙述。In order to facilitate understanding of the magnetic storage unit provided by the embodiment of the present invention, the application scenarios of the magnetic storage unit provided by the embodiment of the present invention are first described below. The magnetic storage unit is used as a storage bit and is used in a magnetic storage device. The magnetic memory unit will be described in detail below with reference to the accompanying drawings.
参考图1及图2,本发明实施例提供的磁存储单元包括:依次层叠设置的第一自由层11、第一耦合层20、第二自由层12、势垒层30和参考层40。其中,磁存储单元的逻辑存储状态根据磁存储单元两端的电阻状态确定;且通过向磁存储单元两端施加电压脉冲宽度超过脉冲宽度阈值,使磁存储单元两端的电阻状态发生单极性切换。Referring to FIG. 1 and FIG. 2 , the magnetic memory unit provided by the embodiment of the present invention includes: a first free layer 11 , a first coupling layer 20 , a second free layer 12 , a barrier layer 30 and a reference layer 40 that are stacked in sequence. Wherein, the logical storage state of the magnetic storage unit is determined based on the resistance state at both ends of the magnetic storage unit; and by applying a voltage pulse width exceeding the pulse width threshold to both ends of the magnetic storage unit, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching.
在上述的方案中,通过在原来由自由层、势垒层30和参考层40组成的磁性隧道结的基础上,再增加第一耦合层20和第一自由层11,从而通过向磁存储单元两端施加电压脉冲宽度超过脉冲宽度阈值,使磁存储单元两端的电阻状态发生单极性切换,使磁存储单元完成两个逻辑存储装置的切换。与现有技术采用 脉冲电流驱动磁存储单元翻转的方式相比,本申请采用脉冲电压驱动磁存储单元翻转,工作时几乎不需要电流脉冲驱动,只要电压发生变化从而在磁存储单元两端施加电压脉冲,至电压脉冲宽度大于脉冲宽度阈值,即可迅速完成磁存储单元的电阻状态切换。即本申请完全基于电压脉冲实现磁存储单元的逻辑存储状态调控,无需电流脉冲驱动,也相应无需较大面积的外部电路进行供电,减少供电电路面积,能够设置更多的磁存储单元,从而具有功耗低、存储密度高的优点,能够作为未来低功耗、高密度的非易失存储器的基本单元。同时在施加足够长时间的电压脉冲之后,磁存储单元的电阻状态能够发生单极性切换,无需精确控制电压脉冲的脉冲宽度,降低脉冲宽度控制难度。下面结合附图对上述各个结构进行详细的介绍。In the above scheme, by adding the first coupling layer 20 and the first free layer 11 to the original magnetic tunnel junction composed of the free layer, the barrier layer 30 and the reference layer 40, the magnetic memory cell is When the voltage pulse width applied at both ends exceeds the pulse width threshold, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices. Compared with the existing technology that uses pulse current to drive the magnetic storage unit to flip, this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed. That is to say, this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control. Each of the above structures will be introduced in detail below with reference to the accompanying drawings.
在设置时,参考图1,从上到下依次层叠设置有第一自由层11、第一耦合层20、第二自由层12、势垒层30和参考层40。应当理解的是,第一自由层11、第一耦合层20、第二自由层12、势垒层30及参考层40的层叠方向并不限于如图1所示出的从上到下的层叠方式,除此之外,还可以采用其他的层叠方式,例如,还可以使第一自由层11、第一耦合层20、第二自由层12、势垒层30和参考层40依次从下向上进行层叠。其中的第二自由层12、势垒层30和参考层40之间组成磁性隧道结结构,即第二自由层12和参考层40之间的磁化方向能够在平行态和反平行态之间进行翻转,从而改变磁存储单元两端的电阻状态。其中的势垒层30能够给第二自由层12和参考层40提供隧穿磁阻效应,便于实现第二自由层12、势垒层30和参考层40之间的隧穿磁阻效应。具体的,在第二自由层12与参考层40之间的磁化方向为平行态时,即两者的磁化方向相同,则磁存储单元两端的电阻状态处于低阻状态。而在第二自由层12和参考层40之间的磁化方向为反平行态时,即两者的磁化方向正好相反,则磁存储单元两端的电阻状态 处于高阻状态。而磁存储单元也正是通过高阻状态和低阻状态,分别表征磁存储单元的两个逻辑存储状态,即存储单元的逻辑存储状态根据磁存储单元两端的电阻状态确定,从而实现数据的读写。When setting, referring to FIG. 1 , the first free layer 11 , the first coupling layer 20 , the second free layer 12 , the barrier layer 30 and the reference layer 40 are stacked in sequence from top to bottom. It should be understood that the stacking direction of the first free layer 11 , the first coupling layer 20 , the second free layer 12 , the barrier layer 30 and the reference layer 40 is not limited to the top-to-bottom stacking as shown in FIG. 1 In addition, other stacking methods can also be used. For example, the first free layer 11, the first coupling layer 20, the second free layer 12, the barrier layer 30 and the reference layer 40 can also be sequentially stacked from bottom to top. Do the layering. The second free layer 12, the barrier layer 30 and the reference layer 40 form a magnetic tunnel junction structure, that is, the magnetization direction between the second free layer 12 and the reference layer 40 can be between a parallel state and an anti-parallel state. flip, thereby changing the resistance state across the magnetic memory cell. The barrier layer 30 can provide the tunneling magnetoresistance effect to the second free layer 12 and the reference layer 40 to facilitate the realization of the tunneling magnetoresistance effect between the second free layer 12 , the barrier layer 30 and the reference layer 40 . Specifically, when the magnetization directions between the second free layer 12 and the reference layer 40 are parallel, that is, the magnetization directions of the two are the same, the resistance state at both ends of the magnetic memory cell is in a low resistance state. When the magnetization directions between the second free layer 12 and the reference layer 40 are antiparallel, that is, the magnetization directions of the two are exactly opposite, the resistance state at both ends of the magnetic memory cell is in a high resistance state. The magnetic storage unit also represents the two logical storage states of the magnetic storage unit through the high resistance state and the low resistance state respectively. That is, the logical storage state of the storage unit is determined according to the resistance state at both ends of the magnetic storage unit, thereby realizing the reading of data. Write.
在设置参考层40时,参考层40具有垂直磁化方向恒定的垂直磁各向异性,即参考层40内的垂直磁化方向可以如图1所示出的保持恒定的向上方向。具体的,如图1所示,可以在参考层40上背离势垒层30的一侧,依次层叠设置在参考层40上的第二耦合层22和钉扎层50,钉扎层50通过第二耦合层22,将参考层40钉扎为具有垂直磁化方向恒定的垂直磁各向异性,便于钉扎参考层40的垂直磁化方向。在确定参考层40的材料时,参考图4及图6,参考层40的材料可以为Co、Fe、Ni的任意一种材料或包含有几种材料的合金,便于设置参考层40。在确定钉扎层50的材料时,参考图4及图6,钉扎层50的材料可以为FeNi、FePd、CoNi、FePt或CoPt,便于设置钉扎层50。在确定第二耦合层22的材料时,参考图4及图6,第二耦合层22的材料可以为Ru、Ir、Ta、Mo或W,便于设置第二耦合层22。应当理解的是,钉扎参考层40的垂直磁化方向的方式并不限于上述示出的方式,除此之外,还可以采用其他的钉扎方式。When the reference layer 40 is provided, the reference layer 40 has perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, that is, the perpendicular magnetization direction within the reference layer 40 can maintain a constant upward direction as shown in FIG. 1 . Specifically, as shown in FIG. 1 , the second coupling layer 22 and the pinning layer 50 provided on the reference layer 40 can be sequentially stacked on the side of the reference layer 40 away from the barrier layer 30 , and the pinning layer 50 passes through the third layer. The second coupling layer 22 pins the reference layer 40 to have perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, which facilitates pinning the perpendicular magnetization direction of the reference layer 40 . When determining the material of the reference layer 40 , refer to FIGS. 4 and 6 . The material of the reference layer 40 can be any one of Co, Fe, and Ni or an alloy containing several materials, which facilitates the setting of the reference layer 40 . When determining the material of the pinning layer 50 , refer to FIG. 4 and FIG. 6 . The material of the pinning layer 50 can be FeNi, FePd, CoNi, FePt or CoPt, which facilitates the arrangement of the pinning layer 50 . When determining the material of the second coupling layer 22, refer to FIG. 4 and FIG. 6. The material of the second coupling layer 22 may be Ru, Ir, Ta, Mo or W, which facilitates the placement of the second coupling layer 22. It should be understood that the manner of pinning the perpendicular magnetization direction of the reference layer 40 is not limited to the manner shown above, and other pinning manners may also be adopted.
在设置上述的第一自由层11、第一耦合层20和第二自由层12时,如图1所示,第二自由层12通过势垒层30与参考层40隔开,第一自由层11通过第一耦合层20与第二自由层12隔开。第一自由层11和第二自由层12均具有垂直磁化方向能够翻转的垂直磁各向异性,即第一自由层11和第二自由层12中的垂直磁化方向可以在如图1所示出的向上和向下之间进行翻转。且第二自由层12还具有电压控制的磁各向异性效应,具体可以通过势垒层30提供。即势垒层30除了上述示出的给第二自由层12和参考层40提供隧穿磁阻效应之外,还能够给第二自由层12提供电压控制的磁各向异性效应,便于使第二自由层12具有电压控制的磁 各向异性效应。在确定该势垒层30的材料时,参考图4及图6,势垒层30的材料可以为氧化镁,以提高势垒层30所提供的隧穿磁阻效应和电压控制的磁各向异性效应的质量,获得较为显著的隧穿磁阻效应和电压控制的磁各向异性效应。应当理解的是,给第二自由层12提供电压控制的磁各向异性效应的方式并不限于上述的通过势垒层30的方式,除此之外,还可以采用其他的方式。另外,势垒层30的材料也并不仅限于上述示出的氧化镁,除此之外,还可以采用其他具有势垒性能的材料。When the above-mentioned first free layer 11, first coupling layer 20 and second free layer 12 are provided, as shown in FIG. 1, the second free layer 12 is separated from the reference layer 40 by the barrier layer 30, and the first free layer 11 is separated from the second free layer 12 by a first coupling layer 20 . Both the first free layer 11 and the second free layer 12 have perpendicular magnetic anisotropy in which the perpendicular magnetization direction can be flipped, that is, the perpendicular magnetization directions in the first free layer 11 and the second free layer 12 can be as shown in Figure 1 to flip between up and down. And the second free layer 12 also has a voltage-controlled magnetic anisotropy effect, which can be provided specifically by the barrier layer 30 . That is, in addition to providing the tunneling magnetoresistance effect to the second free layer 12 and the reference layer 40 as shown above, the barrier layer 30 can also provide a voltage-controlled magnetic anisotropy effect to the second free layer 12 to facilitate the use of the second free layer 12 and the reference layer 40 . The two free layers 12 have a voltage-controlled magnetic anisotropy effect. When determining the material of the barrier layer 30, refer to Figures 4 and 6. The material of the barrier layer 30 can be magnesium oxide to improve the tunneling magnetoresistance effect and voltage-controlled magnetic anisotropy provided by the barrier layer 30. The quality of the anisotropy effect is achieved, and the more significant tunneling magnetoresistance effect and voltage-controlled magnetic anisotropy effect are obtained. It should be understood that the method of providing the voltage-controlled magnetic anisotropy effect to the second free layer 12 is not limited to the above-mentioned method through the barrier layer 30 , and other methods may also be adopted. In addition, the material of the barrier layer 30 is not limited to the magnesium oxide shown above. In addition, other materials with barrier properties may also be used.
参考图2,在具体实现磁存储单元两端的电阻状态的单极性切换时,该磁存储单元可以通过向磁存储单元两端施加电压脉冲宽度超出脉冲宽度阈值,基于第二自由层12所具有的电压控制的磁各向异性效应,使第一自由层11和第二自由层12的垂直磁化方向发生单极性磁化翻转,从而使参考层40与第二自由层12之间的磁化方向在平行态和反平行态之间切换,便于磁存储单元的电阻状态发生单极性切换。在确定第一自由层11和第二自由层12的材料时,如图4及图6所示,第一自由层11、第二自由层12的材料可以为Co、Fe、Ni的任意一种材料或包含有几种材料的合金,便于设置自由层。在确定第一耦合层20的材料时,第一耦合层20的材料可以为Ru、Ir、Ta、Mo或W,便于设置第一耦合层20。Referring to Figure 2, when specifically implementing unipolar switching of the resistance state at both ends of the magnetic memory unit, the magnetic memory unit can apply a voltage pulse width to both ends of the magnetic memory unit exceeding the pulse width threshold, based on the second free layer 12 has The voltage-controlled magnetic anisotropy effect causes a unipolar magnetization flip in the perpendicular magnetization directions of the first free layer 11 and the second free layer 12, so that the magnetization direction between the reference layer 40 and the second free layer 12 is in Switching between the parallel state and the anti-parallel state facilitates unipolar switching of the resistance state of the magnetic memory cell. When determining the materials of the first free layer 11 and the second free layer 12, as shown in Figures 4 and 6, the materials of the first free layer 11 and the second free layer 12 can be any one of Co, Fe, and Ni. Materials or alloys containing several materials to facilitate the placement of free layers. When determining the material of the first coupling layer 20 , the material of the first coupling layer 20 may be Ru, Ir, Ta, Mo or W to facilitate the placement of the first coupling layer 20 .
具体的,参考图2,在向磁存储单元两端刚刚施加电压脉冲时,第二自由层12基于其所具有的电压控制的磁各向异性效应,能够从垂直磁各向异性切换为面内磁各向异性(如图2所示出的从初始向上的垂直磁各向异性,切换为面内向右的面内磁各向异性)。同时第二自由层12在从垂直磁各向异性切换为面内磁各向异性的过程中,第二自由层12还能够通过第一耦合层20带动第一自由层11的垂直磁化方向发生振荡。在电压脉冲宽度超过脉冲宽度阈值之后,即电压脉冲的持续时间大于脉冲宽度阈值时,第一自由层11的垂直磁化方向能够最 终稳定在振荡前垂直磁化方向的反方向,即第一自由层11稳定后的垂直磁化方向正好与振荡前的垂直磁化方向相反,例如图2中的第一自由层11的初始垂直磁化方向为向上,而在发生振荡并稳定之后,其垂直磁化方向为向下,正好与振荡前的垂直磁化方向相反。而在电压脉冲宽度超出脉冲宽度阈值之后,第二自由层12的磁化方向能够最终稳定在面内磁化方向,例如图2所示出的最终稳定在面内向右的面内磁化方向。Specifically, referring to Figure 2, when a voltage pulse is just applied to both ends of the magnetic memory cell, the second free layer 12 can switch from perpendicular magnetic anisotropy to in-plane magnetic anisotropy based on its voltage-controlled magnetic anisotropy effect. Magnetic anisotropy (as shown in Figure 2, switching from the initial upward perpendicular magnetic anisotropy to in-plane magnetic anisotropy toward the right). At the same time, in the process of the second free layer 12 switching from perpendicular magnetic anisotropy to in-plane magnetic anisotropy, the second free layer 12 can also drive the perpendicular magnetization direction of the first free layer 11 to oscillate through the first coupling layer 20 . After the voltage pulse width exceeds the pulse width threshold, that is, when the duration of the voltage pulse is greater than the pulse width threshold, the vertical magnetization direction of the first free layer 11 can finally stabilize in the opposite direction of the vertical magnetization direction before oscillation, that is, the first free layer 11 The perpendicular magnetization direction after stabilization is exactly opposite to the perpendicular magnetization direction before oscillation. For example, the initial perpendicular magnetization direction of the first free layer 11 in Figure 2 is upward, and after oscillation and stabilization, its perpendicular magnetization direction is downward. Just opposite to the perpendicular magnetization direction before oscillation. After the voltage pulse width exceeds the pulse width threshold, the magnetization direction of the second free layer 12 can finally stabilize at the in-plane magnetization direction, for example, as shown in FIG. 2 , the magnetization direction finally stabilizes at the in-plane magnetization direction to the right.
继续参考图2,而在电压脉冲宽度超过脉冲宽度阈值之后,在撤去电压脉冲后,第一自由层11能够通过第一耦合层20的耦合作用,将第二自由层12的磁化方向由面内磁化方向,翻转为与第一自由层11的磁化方向相同的垂直磁化方向。即第二自由层12重新切换到垂直磁各向异性。如图2所示,第一自由层11将第二自由层12的磁化方向由面内向右的面内磁化方向,翻转为向下的垂直磁化方向,正好与第一自由层11稳定后的垂直磁化方向相同。且第一自由层11和第二自由层12翻转后的垂直磁化方向,正好与翻转前的垂直磁化方向相反。即施加电压脉冲前后,第一自由层11和第二自由层12的磁化方向发生了改变,实现了确定性的单极性磁化翻转。而由于磁存储单元的电阻状态取决于第二自由层12和参考层40之间的相对磁化方向,第二自由层12的磁化方向改变,而参考层40的磁化方向不变,从而会使第二自由层12和参考层40之间的相对磁化方向改变(由平行态改变为反平行态,或由反平行态改变为平行态)。当施加电压脉冲前,磁存储单元两端的初始阻值为高阻态时,施加电压脉冲之后,会使磁存储单元两端的阻值改变为低阻状态。而当施加电压脉冲前,磁存储单元两端的初始阻值为低阻态时,施加电压脉冲之后,会使磁存储单元两端的阻值改变为高阻状态。通过上述方式,便于驱动第一自由层11和第二自由层12的垂直磁化方向由初始方向,单极性翻转为相反的方向。Continuing to refer to FIG. 2 , after the voltage pulse width exceeds the pulse width threshold and the voltage pulse is removed, the first free layer 11 can change the magnetization direction of the second free layer 12 from in-plane through the coupling effect of the first coupling layer 20 The magnetization direction is flipped to the same perpendicular magnetization direction as the magnetization direction of the first free layer 11 . That is, the second free layer 12 switches to perpendicular magnetic anisotropy again. As shown in FIG. 2 , the first free layer 11 flips the magnetization direction of the second free layer 12 from the in-plane magnetization direction to the right to a downward perpendicular magnetization direction, which is exactly perpendicular to the stabilized direction of the first free layer 11 . The magnetization directions are the same. Moreover, the vertical magnetization direction of the first free layer 11 and the second free layer 12 after flipping is exactly opposite to the vertical magnetization direction before flipping. That is, before and after the voltage pulse is applied, the magnetization directions of the first free layer 11 and the second free layer 12 change, achieving a deterministic unipolar magnetization flip. Since the resistance state of the magnetic memory cell depends on the relative magnetization direction between the second free layer 12 and the reference layer 40, the magnetization direction of the second free layer 12 changes, while the magnetization direction of the reference layer 40 remains unchanged, thus causing the The relative magnetization direction between the two free layers 12 and the reference layer 40 changes (from a parallel state to an anti-parallel state, or from an anti-parallel state to a parallel state). When a voltage pulse is applied, the initial resistance at both ends of the magnetic memory unit is in a high-resistance state. After the voltage pulse is applied, the resistance at both ends of the magnetic memory unit changes to a low-resistance state. When a voltage pulse is applied, the initial resistance at both ends of the magnetic memory unit is in a low-resistance state. After the voltage pulse is applied, the resistance at both ends of the magnetic memory unit changes to a high-resistance state. Through the above method, it is convenient to drive the perpendicular magnetization directions of the first free layer 11 and the second free layer 12 from the initial direction and unipolarity to the opposite direction.
需要解释的是,第一耦合层20的耦合强度、以及两个自由层之间的自由层阻尼系数的大小,与脉冲宽度阈值的大小之间存在关联性。具体确定第一耦合层20的耦合强度时,第一耦合层20的耦合强度可以为0.02~0.1erg/cm 2,具体的,第一耦合层20的耦合强度可以为0.02erg/cm 2、0.04erg/cm 2、0.06erg/cm 2、0.08erg/cm 2、0.1erg/cm 2等介于0.02~0.1erg/cm 2之间的任意值。另外,还可以使第一耦合层为铁磁耦合,第二耦合层为反铁磁耦合,且第二耦合层22的耦合强度,大于第一耦合层20的耦合强度,即第二耦合层22为强磁耦合,而第一耦合层20为弱磁耦合,使参考层40的垂直磁化方向不受两个自由层的磁化方向影响,而保持恒定不变的垂直磁化方向。其中,第一自由层11、第一耦合层20和第二自由层12组成的自由层阻尼系数可以为0.005~0.05,具体的,第一自由层11、第一耦合层20和第二自由层12组成的自由层阻尼系数可以为0.005、0.010、0.015、0.020、0.025、0.030、0.035、0.040、0.045、0.050等介于0.005~0.05之间的任意值,便于施加电压脉冲的过程中,第一自由层11最终稳定在与初始垂直磁化方向相反的方向,第二自由层12稳定在面内磁化方向。在确定脉冲宽度阈值时,脉冲宽度阈值可以为1~10ns,具体的,脉冲宽度阈值可以为1ns、2ns、3ns、4ns、5ns、6ns、7ns、8ns、9ns、10ns等介于1~10ns之间的任意值,减小施加电压脉冲的时间。 It should be explained that there is a correlation between the coupling strength of the first coupling layer 20 and the magnitude of the free layer damping coefficient between the two free layers, and the magnitude of the pulse width threshold. When specifically determining the coupling strength of the first coupling layer 20 , the coupling strength of the first coupling layer 20 may be 0.02 to 0.1erg/cm 2 . Specifically, the coupling strength of the first coupling layer 20 may be 0.02erg/cm 2 or 0.04 erg/cm 2 , 0.06erg/cm 2 , 0.08erg/cm 2 , 0.1erg/cm 2 and other values between 0.02 and 0.1erg/cm 2 . In addition, the first coupling layer can also be ferromagnetic coupling, the second coupling layer can be antiferromagnetic coupling, and the coupling strength of the second coupling layer 22 is greater than the coupling strength of the first coupling layer 20 , that is, the second coupling layer 22 It is a strong magnetic coupling, while the first coupling layer 20 is a weak magnetic coupling, so that the vertical magnetization direction of the reference layer 40 is not affected by the magnetization directions of the two free layers and maintains a constant vertical magnetization direction. Among them, the free layer damping coefficient composed of the first free layer 11, the first coupling layer 20 and the second free layer 12 can be 0.005 to 0.05. Specifically, the first free layer 11, the first coupling layer 20 and the second free layer The free layer damping coefficient composed of 12 can be 0.005, 0.010, 0.015, 0.020, 0.025, 0.030, 0.035, 0.040, 0.045, 0.050 and other values between 0.005 and 0.05, which facilitates the process of applying voltage pulses. The free layer 11 eventually stabilizes in the direction opposite to the initial perpendicular magnetization direction, and the second free layer 12 stabilizes in the in-plane magnetization direction. When determining the pulse width threshold, the pulse width threshold can be 1 to 10ns. Specifically, the pulse width threshold can be 1ns, 2ns, 3ns, 4ns, 5ns, 6ns, 7ns, 8ns, 9ns, 10ns, etc., ranging from 1 to 10ns. any value between to reduce the time for applying the voltage pulse.
另外,参考图3,还可以在第一自由层11上层叠设置有氧化镁层61,氧化镁层61与第一耦合层20分列在第一自由层11相对的两侧。参考图4,氧化镁层61的材料为氧化镁。氧化镁层61能够增加第一自由层11的垂直磁各向异性,便于第一自由层11在翻转到某个垂直磁化方向之后,能够保持稳定。在增强第一自由层11的垂直磁各向异性的同时,还需要使氧化镁层61的厚度小于势垒层30的厚度,以尽量减小氧化镁层61的电阻,使外部施加电压脉冲时分压较少,从 而减小对磁阻变化率的影响。且还需要使势垒层30的厚度较大,增加势垒层30的电阻,使外部施加电压脉冲时分压较多。In addition, referring to FIG. 3 , a magnesium oxide layer 61 may also be stacked on the first free layer 11 , and the magnesium oxide layer 61 and the first coupling layer 20 are arranged on opposite sides of the first free layer 11 . Referring to FIG. 4 , the material of the magnesium oxide layer 61 is magnesium oxide. The magnesium oxide layer 61 can increase the perpendicular magnetic anisotropy of the first free layer 11 so that the first free layer 11 can remain stable after flipping to a certain perpendicular magnetization direction. While enhancing the perpendicular magnetic anisotropy of the first free layer 11 , it is also necessary to make the thickness of the magnesium oxide layer 61 smaller than the thickness of the barrier layer 30 to minimize the resistance of the magnesium oxide layer 61 when a voltage pulse is applied externally. There is less partial pressure, thereby reducing the impact on the rate of change of reluctance. Moreover, it is also necessary to make the thickness of the barrier layer 30 larger to increase the resistance of the barrier layer 30, so that when a voltage pulse is applied externally, more voltage division occurs.
应当理解的是,增强第一自由层11的垂直磁各向异性的方式并不限于图3及图4所示出的通过层叠氧化镁层61的方式,除此之外,还可以采用其他的方式。例如,参考图5及图6,还可以在第一自由层11上层叠设置有重金属层62,重金属层62与第一耦合层20分列在第一自由层11相对的两侧。重金属层62的材料可以为诸如但不限于W等的重金属材料。重金属层62用于增强第一自由层11的垂直磁各向异性。在增强第一自由层11的垂直磁各向异性的同时,还利用重金属层62电阻小的特性,减少对此磁阻变化率的影响。且还能够利用重金属层62不具备电压控制的磁各向异性效应,使重金属层62不影响磁存储单元的单极性切换,不影响器件工作。再者,通过设置重金属层62,还能够提高第一自由层11、第一耦合层20和第二自由层12之间的自由层阻尼系数,便于调控磁存储阵列的整体翻转时间和翻转概率。It should be understood that the method of enhancing the perpendicular magnetic anisotropy of the first free layer 11 is not limited to the method of stacking the magnesium oxide layer 61 as shown in FIGS. 3 and 4 . In addition, other methods may also be used. Way. For example, referring to FIGS. 5 and 6 , a heavy metal layer 62 may also be stacked on the first free layer 11 , and the heavy metal layer 62 and the first coupling layer 20 are arranged on opposite sides of the first free layer 11 . The material of the heavy metal layer 62 may be a heavy metal material such as but not limited to W. The heavy metal layer 62 is used to enhance the perpendicular magnetic anisotropy of the first free layer 11 . While enhancing the perpendicular magnetic anisotropy of the first free layer 11, the low resistance characteristic of the heavy metal layer 62 is also utilized to reduce the impact on the magnetoresistance change rate. Moreover, it is possible to utilize the magnetic anisotropy effect of the heavy metal layer 62 which does not have voltage control, so that the heavy metal layer 62 does not affect the unipolar switching of the magnetic memory unit and does not affect the operation of the device. Furthermore, by arranging the heavy metal layer 62, the free layer damping coefficient between the first free layer 11, the first coupling layer 20 and the second free layer 12 can also be improved, which facilitates the control of the overall flip time and flip probability of the magnetic memory array.
另外,参考图3~图6,可以在磁存储单元的两端分别设置底电极80和顶电极70,便于向磁存储单元两端施加电压脉冲,也便于读取磁存储单元两端的电阻状态。具体设置时,可以将底电极80层叠在钉扎层50上,且第二耦合层22和底电极80分列在钉扎层50的两侧。可以将顶电极70层叠在氧化镁层61或重金属层62上,且顶电极70与第一自由层11分列于氧化镁层61后重金属层62的两侧。应当理解的是,顶电极70和底电极80的设置方式并不限于上述示出的方式,除此之外,还可以采用其他的设置方式。In addition, referring to FIGS. 3 to 6 , a bottom electrode 80 and a top electrode 70 can be respectively provided at both ends of the magnetic memory unit to facilitate application of voltage pulses to both ends of the magnetic memory unit and to facilitate reading of the resistance state at both ends of the magnetic memory unit. In a specific arrangement, the bottom electrode 80 can be stacked on the pinning layer 50 , and the second coupling layer 22 and the bottom electrode 80 are arranged on both sides of the pinning layer 50 . The top electrode 70 can be stacked on the magnesium oxide layer 61 or the heavy metal layer 62 , and the top electrode 70 and the first free layer 11 are arranged on both sides of the heavy metal layer 62 behind the magnesium oxide layer 61 . It should be understood that the arrangement manner of the top electrode 70 and the bottom electrode 80 is not limited to the manner shown above, and other arrangement manners may also be adopted.
上述示出的各种实施方式,通过在原来由自由层、势垒层30和参考层40组成的磁性隧道结的基础上,再增加第一耦合层20和第一自由层11,从而通过向磁存储单元两端施加电压脉冲宽度超过脉冲宽度阈值,使磁存储单元两端的 电阻状态发生单极性切换,使磁存储单元完成两个逻辑存储装置的切换。与现有技术采用脉冲电流驱动磁存储单元翻转的方式相比,本申请采用脉冲电压驱动磁存储单元翻转,工作时几乎不需要电流脉冲驱动,只要电压发生变化从而在磁存储单元两端施加电压脉冲,至电压脉冲宽度大于脉冲宽度阈值,即可迅速完成磁存储单元的电阻状态切换。即本申请完全基于电压脉冲实现磁存储单元的逻辑存储状态调控,无需电流脉冲驱动,也相应无需较大面积的外部电路进行供电,减少供电电路面积,能够设置更多的磁存储单元,从而具有功耗低、存储密度高的优点,能够作为未来低功耗、高密度的非易失存储器的基本单元。同时在施加足够长时间的电压脉冲之后,磁存储单元的电阻状态能够发生单极性切换,无需精确控制电压脉冲的脉冲宽度,降低脉冲宽度控制难度。In the various embodiments shown above, the first coupling layer 20 and the first free layer 11 are added to the magnetic tunnel junction originally composed of the free layer, the barrier layer 30 and the reference layer 40. When the voltage pulse width applied at both ends of the magnetic storage unit exceeds the pulse width threshold, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices. Compared with the existing technology that uses pulse current to drive the magnetic storage unit to flip, this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed. That is to say, this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
另外,本发明实施例还提供了一种磁存储器件,参考图1,该磁存储器件包括:由多个上述任意一种磁存储单元组成的磁存储阵列、以及脉冲电压产生电路。其中,脉冲电压产生电路用于向磁存储单元两端施加脉冲宽度超过脉冲宽度阈值的电压脉冲,使磁存储单元两端的电阻状态发生单极性切换。通过在原来由自由层、势垒层30和参考层40组成的磁性隧道结的基础上,再增加第一耦合层20和第一自由层11,从而通过向磁存储单元两端施加电压脉冲宽度超过脉冲宽度阈值,使磁存储单元两端的电阻状态发生单极性切换,使磁存储单元完成两个逻辑存储装置的切换。与现有技术采用脉冲电流驱动磁存储单元翻转的方式相比,本申请采用脉冲电压驱动磁存储单元翻转,工作时几乎不需要电流脉冲驱动,只要电压发生变化从而在磁存储单元两端施加电压脉冲,至电压脉冲宽度大于脉冲宽度阈值,即可迅速完成磁存储单元的电阻状态切换。即本申请完全基于电压脉冲实现磁存储单元的逻辑存储状态调控,无需电流脉冲驱动,也相应无需较大面积的外部电路进行供电,减少供电电路面积,能够设置 更多的磁存储单元,从而具有功耗低、存储密度高的优点,能够作为未来低功耗、高密度的非易失存储器的基本单元。同时在施加足够长时间的电压脉冲之后,磁存储单元的电阻状态能够发生单极性切换,无需精确控制电压脉冲的脉冲宽度,降低脉冲宽度控制难度。In addition, an embodiment of the present invention also provides a magnetic memory device. Referring to FIG. 1 , the magnetic memory device includes: a magnetic memory array composed of a plurality of any of the above magnetic memory units, and a pulse voltage generating circuit. Wherein, the pulse voltage generating circuit is used to apply a voltage pulse with a pulse width exceeding a pulse width threshold to both ends of the magnetic memory unit, so that the resistance state at both ends of the magnetic memory unit undergoes unipolar switching. By adding a first coupling layer 20 and a first free layer 11 to the original magnetic tunnel junction composed of a free layer, a barrier layer 30 and a reference layer 40, a voltage pulse width is applied to both ends of the magnetic memory cell. When the pulse width threshold is exceeded, the resistance state at both ends of the magnetic storage unit undergoes unipolar switching, allowing the magnetic storage unit to complete switching between two logical storage devices. Compared with the existing technology that uses pulse current to drive the magnetic storage unit to flip, this application uses pulse voltage to drive the magnetic storage unit to flip. There is almost no need for current pulse driving during operation. As long as the voltage changes, voltage is applied to both ends of the magnetic storage unit. pulse until the voltage pulse width is greater than the pulse width threshold, the resistance state switching of the magnetic memory unit can be quickly completed. That is to say, this application realizes the control of the logical storage state of the magnetic storage unit based entirely on voltage pulses, without the need for current pulse driving, and correspondingly does not require a large-area external circuit for power supply, reducing the area of the power supply circuit, and enabling more magnetic storage units to be installed, thereby having With the advantages of low power consumption and high storage density, it can be used as the basic unit of low-power, high-density non-volatile memory in the future. At the same time, after a voltage pulse is applied for a long enough time, the resistance state of the magnetic memory unit can be switched to unipolarity, eliminating the need to precisely control the pulse width of the voltage pulse and reducing the difficulty of pulse width control.
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到的变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应该以权利要求的保护范围为准。The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present invention. All are covered by the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (12)

  1. 一种磁存储单元,其特征在于,包括:A magnetic storage unit, characterized by including:
    依次层叠设置的第一自由层、第一耦合层、第二自由层、势垒层和参考层;The first free layer, the first coupling layer, the second free layer, the barrier layer and the reference layer are stacked in sequence;
    其中,所述磁存储单元的逻辑存储状态根据所述磁存储单元两端的电阻状态确定;Wherein, the logical storage state of the magnetic storage unit is determined according to the resistance state at both ends of the magnetic storage unit;
    且通过向所述磁存储单元两端施加电压脉冲宽度超过脉冲宽度阈值,使所述磁存储单元两端的电阻状态发生单极性切换。And by applying a voltage pulse width exceeding the pulse width threshold to both ends of the magnetic memory unit, the resistance state at both ends of the magnetic memory unit is switched to unipolarity.
  2. 如权利要求1所述的磁存储单元,其特征在于,所述参考层具有垂直磁化方向恒定的垂直磁各向异性,所述第一自由层和第二自由层均具有垂直磁化方向能够翻转的垂直磁各向异性,且所述第二自由层还具有电压控制的磁各向异性效应;The magnetic memory unit of claim 1, wherein the reference layer has perpendicular magnetic anisotropy with a constant perpendicular magnetization direction, and both the first free layer and the second free layer have perpendicular magnetization directions that can be flipped. Perpendicular magnetic anisotropy, and the second free layer also has a voltage-controlled magnetic anisotropy effect;
    基于所述电压控制的磁各向异性效应,通过向所述磁存储单元两端施加电压脉冲宽度超出所述脉冲宽度阈值,使所述第一自由层和第二自由层的垂直磁化方向发生单极性磁化翻转。Based on the voltage-controlled magnetic anisotropy effect, by applying a voltage pulse width exceeding the pulse width threshold to both ends of the magnetic memory cell, the perpendicular magnetization directions of the first free layer and the second free layer are caused to change in a single direction. Polarity magnetization flips.
  3. 如权利要求2所述的磁存储单元,其特征在于,在向所述磁存储单元两端施加电压脉冲时,所述第二自由层基于所述电压控制的磁各向异性效应,从垂直磁各向异性切换为面内磁各向异性,并通过所述第一耦合层带动所述第一自由层的垂直磁化方向发生振荡;The magnetic memory unit of claim 2, wherein when a voltage pulse is applied to both ends of the magnetic memory unit, the second free layer changes from a perpendicular magnetic field based on the voltage-controlled magnetic anisotropy effect. The anisotropy is switched to in-plane magnetic anisotropy, and the perpendicular magnetization direction of the first free layer is driven to oscillate through the first coupling layer;
    在所述电压脉冲宽度超过所述脉冲宽度阈值之后,所述第一自由层的垂直磁化方向稳定在振荡前垂直磁化方向的反方向,所述第二自由层的磁化方向稳定在面内磁化方向;After the voltage pulse width exceeds the pulse width threshold, the perpendicular magnetization direction of the first free layer stabilizes in the opposite direction of the perpendicular magnetization direction before oscillation, and the magnetization direction of the second free layer stabilizes in the in-plane magnetization direction. ;
    在撤去所述电压脉冲后,所述第一自由层通过所述第一耦合层,将所述第 二自由层的磁化方向由所述面内磁化方向,翻转为与所述第一自由层的磁化方向相同的垂直磁化方向。After the voltage pulse is removed, the first free layer passes through the first coupling layer, flipping the magnetization direction of the second free layer from the in-plane magnetization direction to that of the first free layer. Perpendicular magnetization directions with the same magnetization direction.
  4. 如权利要求3所述的磁存储单元,其特征在于,所述第一耦合层的耦合强度为0.02~0.1erg/cm 2The magnetic memory unit according to claim 3, wherein the coupling strength of the first coupling layer is 0.02-0.1erg/cm 2 ;
    所述第一自由层、第一耦合层和第二自由层组成的自由层阻尼系数为0.005~0.05。The free layer damping coefficient composed of the first free layer, the first coupling layer and the second free layer is 0.005-0.05.
  5. 如权利要求4所述的磁存储单元,其特征在于,所述脉冲宽度阈值为1~10ns。The magnetic memory unit of claim 4, wherein the pulse width threshold is 1 to 10 ns.
  6. 如权利要求1所述的磁存储单元,其特征在于,所述势垒层用于给所述第二自由层提供所述电压控制的磁各向异性效应,还用于给所述第二自由层和所述参考层提供隧穿磁阻效应。The magnetic memory unit of claim 1, wherein the barrier layer is used to provide the voltage-controlled magnetic anisotropy effect to the second free layer, and is also used to provide the second free layer with the voltage-controlled magnetic anisotropy effect. layer and the reference layer provide the tunneling magnetoresistance effect.
  7. 如权利要求6所述的磁存储单元,其特征在于,所述势垒层的材料为氧化镁。The magnetic memory unit of claim 6, wherein the barrier layer is made of magnesium oxide.
  8. 如权利要求6所述的磁存储单元,其特征在于,所述第一自由层上还层叠设置有氧化镁层,所述氧化镁层与所述第一耦合层分列在所述第一自由层相对的两侧;The magnetic memory unit of claim 6, wherein a magnesium oxide layer is laminated on the first free layer, and the magnesium oxide layer and the first coupling layer are arranged on the first free layer. Opposite sides of the layer;
    所述氧化镁层用于增加所述第一自由层的垂直磁各向异性,且所述氧化镁层的厚度小于所述势垒层的厚度。The magnesium oxide layer is used to increase the perpendicular magnetic anisotropy of the first free layer, and the thickness of the magnesium oxide layer is smaller than the thickness of the barrier layer.
  9. 如权利要求6所述的磁存储单元,其特征在于,所述第一自由层上还层叠设置有重金属层,所述重金属层与所述第一耦合层分列在所述第一自由层相对的两侧;The magnetic memory unit of claim 6, wherein a heavy metal layer is laminated on the first free layer, and the heavy metal layer and the first coupling layer are arranged opposite to the first free layer. both sides of;
    所述重金属层用于增强所述第一自由层的垂直磁各向异性。The heavy metal layer is used to enhance the perpendicular magnetic anisotropy of the first free layer.
  10. 如权利要求2所述的磁存储单元,其特征在于,还包括:The magnetic storage unit of claim 2, further comprising:
    依次层叠设置在所述参考层上的第二耦合层和钉扎层,所述钉扎层通过所述第二耦合层,将所述参考层钉扎为具有垂直磁化方向恒定的垂直磁各向异性。A second coupling layer and a pinning layer disposed on the reference layer are stacked in sequence. The pinning layer passes through the second coupling layer to pin the reference layer to have a perpendicular magnetic direction with a constant perpendicular magnetization direction. opposite sex.
  11. 如权利要求10所述的磁存储单元,其特征在于,所述第一耦合层为铁磁耦合,第二耦合层为反铁磁耦合,第二耦合层的耦合强度大于所述第一耦合层的耦合强度。The magnetic memory unit of claim 10, wherein the first coupling layer is ferromagnetic coupling, the second coupling layer is antiferromagnetic coupling, and the coupling strength of the second coupling layer is greater than that of the first coupling layer. the coupling strength.
  12. 一种磁存储器件,其特征在于,包括:A magnetic storage device, characterized by including:
    由多个如权利要求1~11任一项所述磁存储单元组成的磁存储阵列;A magnetic storage array composed of a plurality of magnetic storage units according to any one of claims 1 to 11;
    脉冲电压产生电路,用于向所述磁存储单元两端施加脉冲宽度超过脉冲宽度阈值的电压脉冲,使所述磁存储单元两端的电阻状态发生单极性切换。A pulse voltage generating circuit is used to apply a voltage pulse with a pulse width exceeding a pulse width threshold to both ends of the magnetic storage unit, so that the resistance state at both ends of the magnetic storage unit undergoes unipolar switching.
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