WO2023174323A1 - 一种密封结构及真空炉 - Google Patents

一种密封结构及真空炉 Download PDF

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Publication number
WO2023174323A1
WO2023174323A1 PCT/CN2023/081578 CN2023081578W WO2023174323A1 WO 2023174323 A1 WO2023174323 A1 WO 2023174323A1 CN 2023081578 W CN2023081578 W CN 2023081578W WO 2023174323 A1 WO2023174323 A1 WO 2023174323A1
Authority
WO
WIPO (PCT)
Prior art keywords
sealing
baffle
hole
structural member
seal
Prior art date
Application number
PCT/CN2023/081578
Other languages
English (en)
French (fr)
Inventor
王宇
官伟明
梁振兴
Original Assignee
眉山博雅新材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 眉山博雅新材料股份有限公司 filed Critical 眉山博雅新材料股份有限公司
Publication of WO2023174323A1 publication Critical patent/WO2023174323A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/14—Supporting insulators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • This specification relates to the field of sealing technology, specifically to a sealing structure, and to a vacuum furnace using the sealing structure.
  • the coil of a vacuum furnace is located in the furnace, and the coil head passes outward through the furnace wall and the furnace body and is connected to the power supply.
  • the coil needs to be insulated from the furnace body to avoid short circuit, and in order to maintain the vacuum effect inside the vacuum furnace, sealing measures are required where the coil passes through the furnace body.
  • a first aspect of this specification provides a sealing structure, which includes: a baffle, a first through hole is opened on the baffle, and the first through hole penetrates the first side and the second side of the baffle; Structural member, the first structural member is provided with an inner hole for the sealing member to pass through, the first structural member is connected to the baffle; at least part of the inner hole is located in the first through hole, And at least part of the inner hole is not parallel to the first side and the second side; a sealing component seals the gap between the baffle and the first structural member, and seals the to-be-sealed the gap between the component and the first structural component.
  • the first structural member penetrates the baffle through the first through hole;
  • the sealing assembly includes a first sealing member, the first sealing member is used to seal the to-be-sealed member and the In the gap between the first structural members, the first sealing member is provided between the inner wall of the inner hole and the member to be sealed.
  • the seal assembly includes a second seal located at one end of the first through hole and abutting against the first side or the second side of the baffle to seal. The gap between the baffle and the first structural member.
  • the sealing assembly further includes a third sealing member that seals the gap between the baffle and the first structural member; the second sealing member and the third sealing member seal the gap between the baffle and the first structural member; Three sealing members are respectively located at both ends of the first through hole, and the second sealing member and the third sealing member are respectively against the first side and the second side of the baffle.
  • the sealing assembly includes a fourth sealing member that seals a gap between the baffle and the first structural member; at least part of the fourth sealing member is disposed on the between the inner wall of the first through hole and the outer wall of the first structural member.
  • the sealing structure further includes a first limiting structure that limits the position of the first structural member in the first through hole.
  • the first limiting structure includes a first nut and a first external thread, and the first external thread is provided on the first structural member; the first nut is on the baffle plate. The side where the second side surface is located is threadedly connected to the first external thread of the first structural member.
  • the sealing structure further includes a second structural member, the second structural member is sleeved on the first structural member and is located between the first nut and the third sealing member;
  • the second structural member includes a first main ring part and a first baffle ring part.
  • the first main ring part is sleeved on the first structural member.
  • the first baffle ring part is located on the first main ring part.
  • One end of the ring portion in the axial direction; the third sealing member and the first baffle ring portion are both located between the baffle plate and the first main ring portion, and the third sealing member is located at the third In the inner ring of the first blocking ring part.
  • the first structural member includes a first main ring part and a first retaining ring part; the inner hole is formed on the first main ring part; the first main ring part passes through the The first through hole penetrates the baffle, the first baffle ring portion is located on the side of the first side of the baffle plate, and the first baffle ring portion surrounds the first main ring portion. ; The outer diameter of the first blocking ring portion is greater than the diameter of the first through hole.
  • the first structural member further includes a second baffle ring portion located on the side of the first side of the baffle plate, and the second baffle ring portion It is provided on the side of the first baffle ring portion facing the baffle plate, and the outer diameter of the second baffle ring portion is larger than the outer diameter of the first main ring portion.
  • the ratio of the outer diameter of the first main ring part to the inner diameter of the first main ring part is 1.1-2.
  • the ratio of the diameter of the first through hole to the inner diameter of the first main ring portion is 1.2-2.5.
  • the sealing structure further includes a second limiting structure, the second limiting structure limits the first sealing member to in the inner hole.
  • the second limiting structure includes a second nut and a first internal thread.
  • the first internal thread is located in the inner hole, and the second nut is located on the second side of the baffle. One side is connected to the first internal thread of the inner hole.
  • the second limiting structure includes a limiting boss provided in the inner hole, and the first seal is provided between the limiting boss and the second nut.
  • a first gasket is provided between the first seal and the second nut.
  • the number of the first sealing members is at least two; a second gasket is provided between at least two adjacent first sealing members.
  • the first structural member penetrates into the first through hole from the side where the second side of the baffle is located; the first through hole is provided at one end close to the first side. a limited platform; the member to be sealed passes through the first through hole and the inner hole; the sealing assembly includes a fifth sealing member, the fifth sealing member is located in the first through hole, and the third Five sealing members are sleeved on the member to be sealed and located between the limiting platform and the first structural member.
  • the outer wall of the first structural member is provided with a second external thread
  • the inner wall of the first through hole is provided with a second internal thread that matches the second external thread
  • the first structural member is made of conductive material, and an insulating layer is provided between the outer surface of the first structural member and the inner wall of the first through hole.
  • the first structural member is made of an insulating material; and/or the sealing component is made of an insulating material.
  • a second aspect of this specification provides a vacuum furnace, including a sealing structure and a furnace body.
  • An opening is provided on a side wall of the furnace body, and the sealing structure is provided at the opening through the baffle.
  • the first side of the baffle is located inside the furnace body, and the second side of the baffle is located outside the furnace body.
  • Figure 1 is a schematic structural diagram of a sealing structure according to some embodiments of this specification.
  • Figure 2 is a schematic structural diagram of a sealing structure according to some embodiments of this specification.
  • Figure 3 is a schematic diagram of the installation of a sealing assembly according to some embodiments of this specification.
  • Figure 4 is another installation schematic diagram of a sealing assembly according to some embodiments of this specification.
  • FIG. 5 is another installation schematic diagram of the sealing assembly shown according to some embodiments of this specification.
  • Figure 6 is yet another installation schematic diagram of the sealing assembly shown according to some embodiments of this specification.
  • Figure 7 is a schematic structural diagram of a fourth seal according to some embodiments of this specification.
  • Figure 8 is a schematic structural diagram of a fourth seal according to other embodiments of this specification.
  • Figure 9 is a schematic structural diagram of a first structural member according to some embodiments of this specification.
  • Figure 10A is a schematic structural diagram of a sealing structure according to other embodiments of this specification.
  • Figure 10B is a schematic structural diagram of a second structural member according to other embodiments of this specification.
  • Figure 11 is a structural schematic diagram of a sealing structure according to some embodiments of this specification.
  • Figure 12 is a schematic diagram of the installation of the second limiting structure according to some embodiments of this specification.
  • Figure 13 is a schematic structural diagram of a second nut according to some embodiments of this specification.
  • Figure 14 is a structural schematic diagram of the sealing structure shown in some embodiments according to this specification.
  • Figure 15 is a schematic structural diagram of a vacuum furnace shown in some embodiments of this specification.
  • system means of distinguishing between different components, elements, parts, portions or assemblies at different levels.
  • said words may be replaced by other expressions if they serve the same purpose.
  • a vacuum furnace is a device that can provide a vacuum environment and perform heating in a vacuum environment.
  • the vacuum furnace can have a sealed furnace, which can be sealed by a metal cover or a quartz glass cover.
  • the furnace can be connected to the vacuum device through pipes to achieve a vacuum environment in the furnace.
  • a heating device may be provided in the furnace, and the heating device may include a coil. After the coil is energized, heating in the furnace can be achieved.
  • Vacuum furnaces can be used in crystal growth, vacuum quenching, vacuum brazing, vacuum annealing, vacuum magnetization, vacuum tempering, vacuum sintering, vacuum diffusion welding, vacuum carburizing, etc.
  • the coil used to heat the furnace in the vacuum furnace needs to be energized to achieve heating.
  • the coil needs to penetrate from the furnace wall of the vacuum furnace to the outside of the furnace to be connected to the power supply located outside the furnace.
  • a through hole can be provided on the furnace wall, and the coil outer tube (such as a copper tube) can pass through the through hole to pass out from the furnace to the outside of the furnace.
  • the coil penetrates into the outer tube of the coil, and the outer tube of the coil can protect the coil.
  • the outer tube of the coil can be fixed to the furnace wall through connectors (such as nuts).
  • connectors such as nuts.
  • there may be gaps at the through holes (such as between the inner wall of the through holes and the outer tube of the coil and between the outer tube of the coil and the coil), which affects the vacuum degree of the vacuum furnace.
  • the embodiments of this specification provide a sealing structure, and the inner hole of the first structural member of the sealing structure can be passed through by the member to be sealed. Due to the arrangement of the sealing assembly, the gap between the baffle and the first structural component and the gap between the component to be sealed and the first structural component are sealed, which enhances the sealing performance at the through hole of the baffle.
  • This sealing structure can be applied to vacuum furnaces to ensure the vacuum degree of the vacuum furnace.
  • This sealing structure can be applied to high-temperature furnace bodies such as electric furnaces and converters to ensure the heat preservation performance of electric furnaces, converters and other equipment.
  • FIGS. 1 and 2 are both structural schematic diagrams of a sealing structure shown according to some embodiments of this specification.
  • the sealing structure will be described in detail below with reference to Figure 2.
  • the sealing structure 1000 may include a baffle 100 , a first structural member 200 and a sealing assembly 400 .
  • the baffle 100 is provided with a first through hole 110 , and the first through hole 110 penetrates the first side 101 and the second side 102 of the baffle 100 . That is to say, the first through hole 110 can connect the side where the first side 101 of the baffle 100 is located and the side where the second side 102 is located.
  • the first structural member 200 is provided with an inner hole 201 for the sealing member 300 to pass through.
  • the first structural member 200 is connected to the baffle 100 .
  • At least part of the inner hole 201 is located in the first through hole 110 . That is to say, at least part of the first structural member 200 is located in the first through hole 110 , and when the first structural member 200 is connected to the baffle 100 , at least part of the inner hole 201 is aligned with the first side 101 and the second side 102 . Not parallel.
  • the sealing assembly 400 seals the gap between the baffle 100 and the first structural component 200 , and seals the gap between the component to be sealed 300 and the first structural component 200 .
  • the baffle 100 can be used to provide an installation basis for the first structural member 200.
  • the baffle can separate the internal environment of the furnace body from the external environment.
  • the first through hole 110 on the baffle 100 can be used for other components of the sealing structure 1000 to pass therethrough.
  • the first side 101 and the second side 102 of the baffle 100 represent both side surfaces of the baffle 100 .
  • the side surface of the baffle 100 facing the inside of the furnace body of the vacuum furnace may be the first side 101 and the side surface of the baffle 100 facing the outside of the furnace body. It can be the second side 102 .
  • the baffle 100 may be a flat plate-like structure to facilitate sealing. In other embodiments, the baffle 100 may be other plate structures, such as arc plate structures, corrugated plate structures, etc.
  • the first side 101 and the second side 102 may be substantially parallel. In other embodiments, the angle between the first side 101 and the second side 102 may be greater than 0°. For example, the first side 101 and the second side 102 may have an included angle of 5°, 10°, etc. In some embodiments, the axis of the through hole 110 may be perpendicular to the first side 101 or the second side 102 .
  • At least part of the first structural member 200 may be located within the first through hole 110 of the baffle 100 and supported by the baffle 100 (such as supported by the side wall of the first through hole 110).
  • the first structural member 200 may penetrate the first through hole 110 , or may only enter without penetrating the first through hole 110 .
  • the inner hole 201 of the first structural member 200 is used for the member 300 to be sealed to pass through.
  • the fact that at least part of the inner hole 201 is not parallel to both the first side 101 and the second side 102 can be understood to mean that at least part of the inner hole 201 has an included angle greater than 0° with both the first side 101 and the second side 102 .
  • the axis of bore 201 is a straight line.
  • the inner hole 201 may extend along direction B in FIG. 2 , and the inner hole 201 may also have a certain included angle with the direction B in FIG. 2 , for example, an included angle of 5°, 10°, etc.
  • the axis of the inner hole 201 may be a polyline or a curve.
  • the axis of inner bore 201 (or At least part of the axis of the inner hole 201 and the axis of the first through hole 110 may be (substantially) parallel or (substantially) coincident.
  • “substantially” is used to describe that the deviation of a feature (eg, substantially coincident) from the feature (eg, completely coincident) is less than a threshold.
  • the threshold may be an absolute value (eg, the distance difference is 1 cm, 5 mm), or a relative value (eg, the threshold is 10%, 5% of the diameter of the first through hole 110 ).
  • the parts to be sealed 300 may include coils, cables, etc. of furnace bodies such as vacuum furnaces, electric furnaces, and converters.
  • the component to be sealed 300 may also include an outer tube. Coils, cables, etc. can be inserted into the outer tube, and the outer tube can protect the coils and cables.
  • the gap between the baffle 100 and the first structural member 200 is formed at the first through hole 110.
  • the sealing assembly 400 may be located in the first through hole 110. Either end of the first through hole 110 or both ends of the first through hole 110 .
  • the gap between the component to be sealed 300 and the first structural component 200 is formed at the inner hole 201.
  • the sealing assembly 400 can be located in the inner hole 201 and the inner hole 201. 201 or both ends of the inner hole 201.
  • the shape, structure, and location of the first structural member 200 and the sealing assembly 400 in FIG. 2 are only examples. In different embodiments, the shapes, structures, and locations of the first structural member 200 and the sealing assembly 400 may be different. Location can vary.
  • the first structural member 200 penetrates the baffle 100 through the first through hole 110 . At this time, the length of the portion of the first structural member 200 passing through the first through hole 110 is longer than the length of the first through hole 110 .
  • Seal assembly 400 may include first seal 401 .
  • the first sealing member 401 is used to seal the gap between the member to be sealed 300 and the first structural member 200 .
  • the first sealing member 401 is provided between the inner wall of the inner hole 201 and the member to be sealed 300 .
  • the first sealing component 401 may be a sealing ring sleeved outside the component to be sealed 300 .
  • the sealing ring after the sealing ring (first sealing member 401 ) is installed between the inner wall of the inner hole 201 and the member to be sealed 300 , the sealing ring (first sealing member 401 ) may be in a compressed state to lift the first sealing member 401 .
  • the first sealing member 401 may be a sealant (such as a sealant that becomes solid after solidification), and the sealant (the first sealing member 401) may connect the first sealing member 401 to the inner hole 201. The gap between the seals 300 is blocked.
  • the cross-sectional outer contour of the first sealing member 401 may be circular, elliptical, triangular, rectangular, polygonal or irregular in shape.
  • FIG. 3 is a schematic diagram of the installation of a sealing assembly according to some embodiments of this specification
  • FIG. 4 is another schematic diagram of the installation of a sealing assembly according to some embodiments of this specification.
  • the seal assembly 400 includes a second seal 402 that abuts against the baffle 100 .
  • the second sealing member 402 is located at one end of the first through hole 110 to seal the gap between the baffle 100 and the first structural member 200 .
  • the second seal 402 may abut against the first side 101 of the baffle 100 . In some embodiments, as shown in FIG. 4 , the second seal 402 may abut against the second side 102 of the baffle 100 . In some embodiments, the second sealing member 402 may include a sealing ring sleeved on the first structural member 200 . In other embodiments, the second sealing member 402 may include sealant (such as a sealant that becomes solid after solidification), and the sealant may seal the gap between the baffle 100 and the first structural member 200 at the first through hole 110 . Gap sealing.
  • the outer contour of the cross-section of the second sealing member 402 may be a circle, an ellipse, a triangle, a rectangle, a polygon, an irregular shape, etc.
  • the second seal 402 By disposing the second seal 402 against the baffle 100, the second seal 402 can effectively seal the gap between the baffle 100 and the first structural member 200, and because the second seal 402 is disposed on the first passage The end of the hole 110 abuts against the baffle 100 to achieve sealing.
  • the placement of the second seal 402 is basically not restricted by the size of the first through hole 110, and the shape and size of the second seal 402 are less restricted. , and installation is more convenient.
  • FIG. 5 is yet another installation diagram of a sealing assembly according to some embodiments of this specification.
  • the sealing assembly 400 further includes a third sealing member 403 , and the third sealing member 403 abuts against the baffle 100 .
  • the third sealing member 403 is used to seal the gap between the baffle 100 and the first structural member 200 .
  • the second sealing member 402 and the third sealing member 403 may be located at both ends of the first through hole 110 respectively.
  • the second sealing member 402 and the third sealing member 403 may abut against the first side 101 and the second side 102 of the baffle 100 respectively.
  • the structure and shape of the third sealing member 403 may be similar to the second sealing member 402. For details, please refer to the relevant description of the second sealing member 402.
  • the second seal 402 and the third seal 403 sealing is performed at both ends of the first through hole 110, so that the gap between the baffle 100 and the first structural member 200 can be better sealed, and the second seal
  • the placement of the component 402 and the third sealing component 403 is basically not limited by the size of the first through hole 110, and the shapes and sizes of the second sealing component 402 and the third sealing component 403 are less restricted.
  • seal assembly 400 may include a fourth seal 404 .
  • the fourth seal 404 may be used to seal the gap between the baffle 100 and the first structural member 200 .
  • At least part of the fourth seal 404 is disposed between the inner wall of the first through hole 110 of the baffle 100 and the outer wall of the first structural member 200 . That is to say, at least part of the fourth sealing member 404 is disposed in the first through hole 110 of the baffle 100 .
  • the fourth seal 404 may be a sealing ring.
  • the sealing ring (the fourth sealing member 404 ) may be located in the first through hole 110 of the baffle 100 and sleeved outside the first structural member 200 .
  • the fourth seal 404 may be filled in the barrier.
  • the sealant (such as a solid sealant after solidification) in the first through hole 110 of the plate 100 and between the inner wall of the first through hole 110 of the baffle 100 and the outer wall of the first structural member 200, the sealant ( The fourth sealing member 404) can seal the gap between the first structural member 200 and the baffle 100 in the first through hole 110.
  • the fourth seal 404 When the fourth seal 404 is a sealing ring, it can be in a variety of different shapes.
  • the shape of the fourth seal 404 may be similar to the shape of the first seal 401 .
  • the fourth sealing member 404 may be a regular annular structure, and the fourth sealing member 404 is completely located within the first through hole 110 of the baffle 100 .
  • Figure 7 is a schematic structural diagram of a fourth seal according to some embodiments of this specification.
  • the fourth sealing member 404 when the fourth sealing member 404 is a sealing ring, the inner ring of the fourth sealing member 404 is cylindrical, and the outer ring of the fourth sealing member 404 is conical.
  • the outer ring is designed to be conical, and the fourth sealing member 404 is placed into the first through hole 110 from the smaller diameter end of the outer ring.
  • the fourth sealing member 404 can be easily placed into the first through hole 110 .
  • the outer diameter of one end of the conical outer ring may be slightly smaller than the diameter of the first through hole 110 , and the outer diameter of the other end of the conical outer ring may be substantially equal to the diameter of the first through hole 110 .
  • the larger diameter end of the outer ring of the four sealing members 404 can be interference-fitted with the inner wall of the first through hole 110 of the baffle 100 , which can enhance the sealing effect of the fourth sealing member 404 .
  • the outer diameter of one end of the conical outer ring may be slightly smaller than the diameter of the first through hole 110
  • the outer diameter of the other end of the conical outer ring may be larger than the diameter of the first through hole 110 .
  • the fourth sealing member 404 may be partially located inside the first through hole 110 of the baffle 100 and the other part is located outside the first through hole 110 of the baffle 100 .
  • the fourth seal 404 can be prevented from moving in the direction A in FIG. 6 .
  • FIG. 8 is a schematic structural diagram of a fourth seal according to other embodiments of this specification.
  • one end of the fourth seal 404 is provided with a limiting ring 4041 extending radially outward, and the outer diameter of the limiting ring 4041 is larger than the first through hole of the baffle 100
  • the fourth sealing member 404 shown in FIG. 8 can prevent the fourth sealing member 404 from moving along the A direction in FIG. 6 while ensuring the sealing effect.
  • the length of the fourth seal 404 along the axial direction of the seal ring may be greater than, less than, or equal to the length of the first through hole 110 of the baffle 100 along the first through hole.
  • the length of the axis of hole 110 When the length of the fourth seal 404 along the axial direction of the seal ring is greater than the length of the first through hole 110 along the axial direction of the first through hole 110 , both ends of the fourth seal 404 can exceed both ends of the first through hole 110 . end, so that the fourth seal 404 can completely cover the gap between the baffle 100 and the first structural member 200, which is beneficial to improving the sealing strength of the fourth seal 404.
  • the sealing structure 1000 further includes a first limiting structure 800 .
  • the first limiting structure 800 can limit the position of the first structural member 200 in the first through hole 110 (such as defining the relative position of the first structural member 200 and the baffle 100, thereby limiting the position of the first structural member 200 in the first through hole 110). a position in the through hole 110). It can be understood that the first limiting structure 800 can only limit the first structural member 200 in one direction. That is to say, the first limiting structure 800 can only limit the position of the first structural member 200 relative to the baffle 100 . Movement in one direction. For example, the first limiting structure 800 in FIGS. 3-5 can prevent the first structural member 200 from moving toward direction A in FIGS.
  • the first limiting structure 800 can cooperate with other structures to fix the position of the first structural member 200 in the first through hole 110, so that the baffle 100 is connected with the first structural member 200, And the relative position between the first structural member 200 and the baffle 100 is fixed.
  • the first limiting structure 800 can cooperate with the second blocking ring portion 203 of the first structural member 200 below (the second blocking ring portion 203 can prevent the first structural member 200 from moving toward the B direction in Figures 3-5 ) to fix the position of the first structural member 200 in the first through hole 110, thereby achieving fixation of the relative position between the first structural member 200 and the baffle 100.
  • the first limiting structure 800 may include a stopper located on the side where the second side 102 of the baffle 100 is located. In some embodiments, as shown in FIG. 3 , the stopper may abut against the baffle 100 to prevent the first structural member 200 from moving toward direction A in FIGS. 3-5 .
  • the second seal 402 and the stopper are located on the side of the second side 102 of the baffle 100 , and the second seal 402 may be connected to the second side 102 of the baffle 100 .
  • the stopper may abut against the second seal 402 .
  • the second sealing member 402 and the third sealing member 403 are respectively located on both sides of the baffle 100 , and the second sealing member 402 and the third sealing member 403 are respectively connected to the third side of the baffle 100 .
  • One side 101 and the second side 102 are in contact.
  • the stopper may be located on the side where the second side 102 of the baffle 100 is located, and the stopper may abut against the third seal 403 .
  • the first limiting structure 800 can not only prevent the first structural member 200 from moving in the direction A, but also exert pressure on the third seal 403 to press the third seal 403 against the baffle 100, so that The third seal 403 has a better sealing effect.
  • the first limiting structure 800 (such as the above stopper) can be connected to the first structural member 200 in a variety of connectable ways to achieve limiting. Such as snap connection, threaded connection, etc.
  • the first limiting structure 800 realizes limiting through threaded connection.
  • Figure 9 shows some practical examples based on this manual. Structural diagram of the first structural member shown in the embodiment.
  • the first limiting structure 800 includes a first nut 801 and a first external thread 206 . That is to say, the stopper mentioned above may be the first nut 801 .
  • the first external thread 206 is provided on the first structural member 200 . After the first structural member 200 is placed into the first through hole 110, at least part of the first external thread may be located on the side where the second side 102 of the baffle 100 is located.
  • the first nut 801 is threadedly connected to the first external thread 206 of the first structural member 200 on the side where the second side 102 of the baffle 100 is located. By rotating the first nut 801 , the first nut 801 can be controlled to reciprocate on the first external thread 206 to approach or move away from the baffle 100 . By controlling the first nut 801 to move closer to the baffle 100, when the first nut 801 interacts with the baffle 100 (the embodiment shown in Figure 3) and the second seal 402 (the embodiment shown in Figure 4) Or the third seal 403 (the embodiment shown in FIG. 5 ) abuts, allowing the first nut 801 to exert pressure on the baffle 100 , the second seal 402 or the third seal 403 .
  • the first nut 801 When the first nut 801 abuts the second seal 402 (the embodiment shown in Figure 4) or the third seal 403 (the embodiment shown in Figure 5), the first nut 801 is controlled to move closer to the stopper.
  • the direction movement of the plate 100 can correspondingly press the second sealing member 402 or the third sealing member 403 to ensure the sealing effect.
  • FIG. 10A is a schematic structural diagram of a sealing structure according to other embodiments of this specification.
  • FIG. 10B is a schematic structural diagram of a second structural member according to other embodiments of this specification. The following is a schematic diagram of the second structural member according to FIG. 10A and FIG. 10B .
  • Structural member 600 is described in detail.
  • the second structural member 600 is sleeved on the first structural member 200 and is located between the first nut 801 and the third seal 403 .
  • the second structural member 600 can be sleeved on the first structural member 200 and located between the first nut 801 and the third sealing member 403 for contacting the third sealing member 403 and limiting the third sealing member 403 .
  • the second structural member 600 may be provided with a second through hole 603 .
  • the first structural member 200 can penetrate into the second through hole 603 of the second structural member 600 .
  • the second structural member 600 may include a first main ring portion 601 , and the first main ring portion 601 is sleeved on the first structural member 200 .
  • the inner ring of the first main ring portion 601 can form the second through hole 603 on the second structural member 600 for the first structural member 200 to pass through.
  • the side of the first main ring portion 601 away from the baffle 100 rests on the first nut 801. When the first nut 801 moves, it can drive the second structural member 600 to move synchronously.
  • the second structural member 600 may further include a first retaining ring portion 602 .
  • the first retaining ring portion 602 is provided at one end of the first main ring portion 601 in the axial direction.
  • the first blocking ring part 602 is located on the side of the first main ring part 601 close to the baffle.
  • the third seal 403 and the first baffle ring part 602 are both located between the baffle 100 and the first main ring part 601.
  • the third seal 403 is located in the inner ring of the first retaining ring portion 602 .
  • the first main ring portion 601 can be used to limit the third seal 403 in the axial direction of the first through hole 110 of the baffle 100 .
  • the first baffle ring portion 602 is used to limit the third seal 403 in the radial direction of the first through hole 110 of the baffle 100 .
  • the second structural member 600 can limit the position of the third seal 403 in the axial and radial directions of the first through hole 110 , so that the third seal 403 It can closely abut between the first main ring portion 601 and the baffle 100 , thereby well sealing the contact gap between the second structural member 600 and the baffle 100 .
  • the second structural member 600 can avoid direct contact between the first nut 801 and the third seal 403 , thereby effectively reducing the wear of the third seal 403 and extending the service life of the third seal 403 .
  • the second structural member 600 may be a partition plate having a second through hole 603, and the first structural member 200 penetrates into the second through hole 603 of the partition plate, so that the partition plate can be sleeved on the first through hole 603. Structural parts 200 outside.
  • the side of the partition facing the baffle 100 may be provided with a groove with an arc-shaped bottom.
  • the third seal 403 may be disposed in the groove of the partition, and the groove of the partition may realize the sealing. The third seal 403 is limited.
  • the second sealing member 402 when the second sealing member 402 is disposed on the side where the second side 102 of the baffle is located (ie, the embodiment shown in FIG. 4 ), the second structural member 600 can also be disposed similarly according to the above description. .
  • the first structural member 200 includes a second main ring portion 202 .
  • the second main ring portion 202 may penetrate the baffle 100 through the first through hole 110 of the baffle 100 . That is to say, the outer diameter of the second main ring portion 202 is smaller than the diameter of the first through hole 110 , and the second main ring portion 202 can pass from the side where the first side 101 of the baffle 100 is located to the side where the second side 102 is located. one side.
  • An inner hole 201 is formed in the second main ring portion 202 .
  • the first structural member 200 may further include a second retaining ring portion 203 .
  • the second baffle ring portion 203 is located on the side where the first side 101 of the baffle 100 is located, and the second baffle ring portion 203 can surround the first side 101 of the baffle 100.
  • the second blocking ring portion 203 can be disposed on the outer circumferential surface of the second main ring portion 202 , the outer diameter of the second blocking ring portion 203 is larger than the diameter of the first through hole 110 , and the second main ring portion 202 passes through When passing through the first through hole 110 of the baffle 100 , the second baffle ring portion 203 cannot pass through the first through hole 110 .
  • the second blocking ring portion 203 can play a role in limiting the position of the first structural member 200 .
  • the second blocking ring portion 203 can prevent the first structural member 200 from moving toward direction B shown in Figures 3-5.
  • the second seal 402 when the second seal 402 is located on the side where the first side 101 of the baffle 100 is located, the second seal 402 can be sleeved on the second main ring portion. 202, at the same time, the second seal 402 can abut against the second blocking ring portion 203, and the second blocking ring portion 203 can seal the second seal 402 in the axial direction of the second main ring portion 202 (also the first through hole). axial direction of 110) The position limiting function prevents the second sealing member 402 from being detached from the second main ring portion 202 .
  • the first structural member 200 may further include a third retaining ring portion 204 .
  • the third baffle ring portion 204 is located on the side of the first side surface 101 of the baffle plate 100 and is provided on the side of the second baffle ring portion 203 facing the baffle plate 100 .
  • the inner diameter of the third baffle ring portion 204 is larger than the second main ring.
  • the outer diameter of the portion 202 forms an annular groove between the third retaining ring portion 204 and the second main ring portion 202 .
  • the outer diameter of the third baffle ring portion 204 may be equal to the outer diameter of the second baffle ring portion 203 .
  • the second seal 402 is sleeved on the second main ring part 202 , and at the same time, the second seal 402 may be located in the inner ring of the third blocking ring part 204 . That is, the second seal 402 may be located in the annular groove formed between the third retaining ring portion 204 and the second main ring portion 202 .
  • the third retaining ring portion 204 is used to limit the second seal 402 along the radial direction of the second main ring portion 202 (also the radial direction of the first through hole 110).
  • the second baffle ring part 203 may be provided with a groove with an arc-shaped bottom on one side facing the baffle plate 100, and the second seal 402 may be disposed in the groove of the second baffle ring part 203,
  • the groove of the second retaining ring portion 203 can limit the position of the second seal 402 .
  • other limiting mechanisms may be provided on the second main ring part 202 to prevent the first structural member 200 from moving in the direction B shown in FIGS. 3-6 .
  • a limiting stopper may be provided on the second main ring part 202 so that the limiting stopper cannot enter the first through hole 110 and thus plays a role in limiting the position.
  • the outer diameter of the second main ring portion 202 may range from 15 mm to 750 mm. In some embodiments, the inner diameter of the second main ring portion 202 may be between 10 mm and 500 mm. The inner diameter of the second main ring portion 202 is also the diameter of the inner hole 201 . In some embodiments, the ratio of the outer diameter of the second main ring portion 202 to the inner diameter of the second main ring portion 202 may be 1.1-2. Through the size setting of the second main ring portion 202, the structure of the first structural member 200 can be made more reasonable and compact.
  • the diameter of the first through hole 110 may be 17mm-800mm. In some embodiments, the ratio of the diameter of the first through hole 110 to the inner diameter of the second main ring portion 202 is 1.2-2.5.
  • Figure 11 is a schematic structural diagram of a sealing structure according to some embodiments of this specification.
  • the sealing structure further includes a second limiting structure 500.
  • the second limiting structure 500 can be used to limit the first sealing member 401 in the inner hole 201, improve the stability of the first sealing member 401, and prevent the first sealing member 401 from falling off.
  • the second limiting structure 500 can also exert pressure on the first seal 401 to improve the sealing effect of the first seal 401 .
  • FIG. 12 is a schematic diagram of the installation of the second limiting structure according to some embodiments of this specification
  • FIG. 13 is a schematic structural diagram of the second nut according to some embodiments of this specification.
  • the second limiting structure will be described in detail below with reference to Figures 12-13.
  • the second limiting structure 500 includes a second nut 501 and a first internal thread 205 .
  • the second nut 501 is provided with a third external thread 504 that can be threadedly connected to the first internal thread 205 .
  • the first internal thread 205 is provided in the inner hole 201 of the first structural member 200 .
  • the second nut 501 is connected to the first internal thread 205 of the inner 201 hole on the side where the second side 102 of the baffle 100 is located.
  • at least part of the first internal thread 205 may be located on the side where the second side 102 of the baffle 100 is located.
  • the second nut 501 can be in contact with the first seal 401. After the second nut 501 is screwed in, the second nut 501 can limit the activity space of the first seal 401. Further, the second nut 501 can squeeze the first sealing member 401, thereby improving the sealing effect of the first sealing member 401.
  • the second nut 501 is provided with a limiting flange 502 , and the outer diameter of the limiting flange 502 can be larger than the diameter of the inner hole 201 to limit the length of the second nut 501 entering the inner hole 201 .
  • the outer diameter of the limiting convex ring 502 may be larger than the diameter of the first through hole 110 of the baffle 100 .
  • the second nut 501 may be provided with a third through hole 505 extending along its own axis, and the third through hole 505 may allow the member 300 to be sealed to pass through.
  • the third through hole 505 may allow the member 300 to be sealed to pass through.
  • the second limiting structure 500 further includes a limiting boss 207 .
  • the limiting boss 207 is provided at one end of the inner hole 201 close to the side where the first side 101 of the baffle 100 is located.
  • the first seal 401 is provided between the limiting boss 207 and the second nut 501 .
  • the first seal 401 may abut against the limiting boss 207 , and the limiting boss 207 may be used to limit the first seal 401 from moving axially along the inner hole 201 toward the first side 101 of the baffle.
  • the first seal 401 can be pressed against the limiting boss 207, which is beneficial to improving the stability and sealing effect of the first seal 401.
  • the second limiting structure 500 can prevent the first seal 401 from falling off through various structures.
  • the second limiting structure 500 may also include a first limiting plug, and the first limiting plug may be directly inserted into the inner hole 201 from the side where the second side 102 of the baffle 100 is located, so as to prevent The effect of preventing the first seal 401 from falling off.
  • the first limiting plug can be clamped in the inner hole 201, or can be relatively fixed to the inner wall of the inner hole 201 by friction.
  • the first limiting plug can prevent the first seal 401 from being detached from the side where the second side 102 of the baffle 100 is located.
  • the second limiting structure 501 may also include a second limiting plug or a third nut.
  • the second limiting plug and the third nut may be formed from the side where the first side 101 of the baffle 100 is located. Placed in the inner hole 201 , the second limiting plug or the third nut can prevent the first seal 401 from being detached from the side where the first side 101 of the baffle 100 is located.
  • the second limiting plug may be arranged in a manner similar to that of the first limiting plug
  • the third nut may be arranged in a manner similar to that of the second nut 501 . Please refer to the relevant description above for details.
  • the number of first seals 401 may be at least two. Through the arrangement of at least two first sealing members 401, the gap between the first structural member 200 and the member to be sealed 300 can be better sealed.
  • a first gasket 4011 may be provided between the first seal 401 and the second nut 501 .
  • the first gasket 4011 may be annular.
  • the material of the first gasket 4011 includes but is not limited to copper, stainless steel, etc. After the first gasket 4011 is worn, it can be replaced. When the second nut 501 is screwed, the second nut 501 can abut against the first gasket 4011 and push the first gasket 4011 and the first seal 401 to move toward the limiting boss 207 , thereby compressing the first seal 401 Between the limiting boss 207 and the second nut 501 .
  • the first seal 401 can be effectively protected from wear by the second nut 501, thereby extending the service life of the first seal 401.
  • a second gasket 4012 may be disposed between at least two first sealing members 401 .
  • the material of the second gasket 4012 includes, but is not limited to, copper, stainless steel, etc.
  • a second gasket 4012 may be provided between two adjacent first sealing members 401 in a part, and a second gasket 4012 may not be provided between two adjacent first sealing members 401 in another part. .
  • the first sealing member 401 By disposing a second gasket 4012 between two adjacent first sealing members 401 to avoid direct contact between the first sealing members 401, when there are multiple first sealing members 401, the first sealing member 401 can be effectively reduced in size. wear between them, thereby extending the service life of the first seal 401.
  • Figure 14 is a schematic structural diagram of a sealing structure according to some further embodiments of this specification.
  • the first structural member 200 will be described in detail below with reference to FIG. 14 .
  • the first structural member 200 penetrates into the first through hole 110 from the side where the second side 102 of the baffle 100 is located.
  • the first structural member 200 does not penetrate the first through hole 110 .
  • the member 300 to be sealed passes through the through hole and the inner hole 201 .
  • the seal assembly includes a fifth seal 405 .
  • a limiting platform 103 is provided at one end of the first through hole 110 close to the side where the first side surface 101 is located.
  • the fifth sealing member 405 is sleeved on the member to be sealed 300 and is located between the limiting platform 103 and the first structural member 200 .
  • the limiting platform 103 can prevent the fifth seal 405 from disengaging from the first through hole 110 from the side where the first side 101 is located.
  • the fifth sealing member 405 can be limited by the joint action of the limiting platform 103 and the first structural member 200 .
  • the first structural member 200 can be used to apply pressure to the fifth seal 405 to ensure the sealing effect of the fifth seal 405 .
  • the fifth seal 405 can be used to seal the gap between the first structural component 200 and the component to be sealed 300 and the gap between the baffle 100 and the first structural component 200 , thus simplifying the structure of the sealing structure 1000 .
  • the first structural member 200 is connected in the first through hole 110 of the baffle 100 .
  • the first structural member 200 can be connected to the first through hole 110 through detachable connection methods such as snap connection and threaded connection.
  • the outer wall of the first structural member 200 is provided with a second external thread 209
  • the inner wall of the first through hole 110 is provided with a second internal thread 111 that is threadedly connected to the second external thread 209 .
  • the first structural member 200 and the first through hole 110 can be connected through threads. When the first structural member 200 precesses, it can exert pressure on the fifth seal 405, and the amount of pressure can be conveniently controlled by controlling the precession distance.
  • the number of fifth seals 405 may be at least two. Through the arrangement of at least two fifth sealing members 405 , the gap between the first structural member 200 and the member to be sealed 300 and the gap between the first structural member 200 and the member to be sealed 300 can be well sealed.
  • a third gasket 4051 may be disposed between the fifth seal 405 and the first structural member 200 .
  • the third gasket 4051 can prevent the first structural member 200 from wearing the fifth seal 405, thereby extending the service life of the fifth seal 405.
  • the material of the third gasket 4051 includes but is not limited to copper, stainless steel, etc.
  • the number of fifth seals 405 may be multiple.
  • a fourth gasket 4052 may be provided between at least two adjacent fifth seals 405 .
  • the material of the fourth gasket 4052 includes but is not limited to copper, stainless steel, etc.
  • the first structural member 200 may be made of conductive material.
  • an insulating layer 700 is disposed between the first structural member 200 and the inner wall surface of the first through hole 110 .
  • the insulating layer 700 connects the baffle 100 and the first structural member 200 Insulation between them improves the safety performance of the sealed structure.
  • the material of the first structural member may be a metallic conductive material with low magnetic permeability (eg, relative magnetic permeability less than 2). For example, copper, stainless steel, aluminum, etc.
  • the insulating layer 700 is made of insulating material.
  • the insulating material can be rubber elastic materials with electrical insulation properties, such as polytetrafluoroethylene, fluororubber, nitrile rubber, polyurethane rubber, etc.
  • the material of the first structural member 200 may be an insulating material.
  • the specific material of the first structural member 200 may be similar to the material of the insulating layer 700 .
  • the material of the sealing component 400 may be an insulating material.
  • the specific material of the sealing component 400 may be similar to the material of the insulating layer 700 .
  • the material of the second sealing member 402 may be an insulating material.
  • the insulating layer 700 and the second seal 402 may be an integral structure.
  • both the second sealing member 402 and the third sealing member 403 may be made of insulating material.
  • the insulating layer 700, the second seal 402 and the third seal 403 may be an integral structure.
  • the material of the first seal 401 is an insulating material.
  • the technical effects that can be achieved by the foregoing embodiments include but are not limited to: by using the insulating layer 700 made of insulating material, the first sealing member 401, the second sealing member 402, and the third sealing member 403, the baffle 100 and the first sealing member can be realized. Insulation between the structural member 200, the second structural member 600 and the member to be sealed 300.
  • tool holes may be provided on the first structural member 200, the first nut 801 and/or the second nut 501.
  • the tool hole is used to facilitate the insertion of auxiliary tools (such as pins) and then the installation of the component with the tool hole (such as screwing, pushing forward, pulling back, etc.).
  • a first tool hole 208 may be opened in the first structural member 200 . In some embodiments, the first tool hole 208 may be opened in the third retaining ring portion 204, as shown in FIG. 9 .
  • a second tool hole 503 may be opened in the second nut 501, as shown in FIGS. 12 and 13 .
  • a third tool hole may be opened on the first nut 801 .
  • the third tool hole is not shown in the figure. Reference may be made to the first tool hole 208 and the second tool hole 503 .
  • the first nut 801 may have a hexagonal or other shape.
  • the possible beneficial effects of the sealing structure of the embodiments of this specification include but are not limited to: (1) The sealing assembly of this specification can seal the gap between the baffle and the first structural component, and seal the component to be sealed and the first structural component. The gap between them has a better sealing effect; (2) the sealing structure can be sealed from both sides of the baffle at the same time to enhance the sealing effect; (3) the connection between each structure in the sealing structure is simple and convenient, and can Quick installation, replacement and flexible adjustment of sealing components can reduce the difficulty and cost of maintenance and repair; (4) The use of insulating materials in sealing components and structural parts can improve safety performance. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the possible beneficial effects may be any one or a combination of the above, or any other possible beneficial effects.
  • FIG 15 is a schematic structural diagram of a vacuum furnace shown in some embodiments of this specification.
  • the vacuum furnace will be described in detail below with reference to Figure 15.
  • the vacuum furnace 2000 includes a sealing structure 1000, and the vacuum furnace includes a furnace body 2100.
  • the furnace body 2100 is a furnace body that can be used to provide a vacuum environment.
  • the baffle 100 may be a part of the side wall of the furnace body 2100 , that is, the baffle 100 may be an integral structure with the side wall of the furnace body 2100 .
  • an opening can be provided on the side wall of the furnace body 2100 first, and then the baffle 100 can be installed at the opening. That is to say, the baffle 100 and the side wall of the furnace body have separate structures.
  • the first side 101 of the baffle 100 is located inside the furnace body 2100, and the second side 102 of the baffle 100 is located outside the furnace body 2100.
  • installation, disassembly, maintenance, replacement and other operations can be conveniently performed from outside the vacuum furnace.
  • the first nut 801 and/or the second nut 501 since the first nut 801 and the second nut 501 are both disposed on the side where the second side 102 of the baffle 100 is located, it can be conveniently installed from The first nut 801 and/or the second nut 501 are installed on the outside of the furnace body.
  • the furnace body 2100 may have multiple openings. For example, there may be two openings on the furnace body 2100, and the two openings are used for the insertion and egress of coils and cables respectively. Each opening may be provided with the above-mentioned sealing structure 1000 .

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Abstract

一种密封结构以及真空炉，该密封结构包括：挡板（100），挡板（100）上开设第一通孔（110），第一通孔（110）贯穿挡板（100）的第一侧面（101）和第二侧面（102）；第一结构件（200），第一结构件（200）上开设有供待密封件（300）穿过的内孔（201），第一结构件（200）与挡板（100）连接；至少部分内孔（201）位于第一通孔（110）中，且内孔（201）的至少部分与第一侧面（101）和第二侧面（102）均不平行；密封组件（400），密封挡板（100）与第一结构件（200）之间的间隙，以及密封待密封件（300）与第一结构件（200）之间的间隙。

Description

一种密封结构及真空炉
交叉引用
本申请要求2022年3月15日提交的中国申请号为202220578211.3的中国专利申请的优先权，优先权的全部内容通过引用并入本文。
技术领域
本说明书涉及密封工艺领域，具体涉及一种密封结构，以及涉及一种应用该密封结构的真空炉。
背景技术
在工业生产中，有很多需要通过密封结构对部件进行密封的场景。例如，真空炉的线圈位于炉膛内，线圈头向外依次穿过炉膛壁、炉体后与电源连接。线圈需要与炉体绝缘以免短路，且为了保持真空炉内部的真空效果，线圈穿过炉体处需要采取密封措施。
因此，如何提升密封结构的密封效果，是本领域亟待解决的技术问题。
发明内容
本说明书第一方面提供一种密封结构，其包括：挡板，所述挡板上开设第一通孔，所述第一通孔贯穿所述挡板的第一侧面和第二侧面；第一结构件，所述第一结构件上开设有供待密封件穿过的内孔，所述第一结构件与所述挡板连接；至少部分所述内孔位于所述第一通孔中，且所述内孔的至少部分与所述第一侧面和所述第二侧面均不平行；密封组件，密封所述挡板与所述第一结构件之间的间隙，以及密封所述待密封件与所述第一结构件之间的间隙。
在一些实施例中，所述第一结构件经由所述第一通孔贯穿所述挡板；所述密封组件包括第一密封件，所述第一密封件用于密封所述待密封件与所述第一结构件之间的间隙，所述第一密封件设于所述内孔的内壁与所述待密封件之间。
在一些实施例中，所述密封组件包括第二密封件，所述第二密封件位于所述第一通孔的一端且与所述挡板的第一侧面或第二侧面抵靠，以密封所述挡板与所述第一结构件之间的间隙。
在一些实施例中，所述密封组件还包括第三密封件，所述第三密封件密封所述挡板与所述第一结构件之间的间隙；所述第二密封件和所述第三密封件分别位于所述第一通孔的两端，且所述第二密封件和所述第三密封件分别与所述挡板的第一侧面和第二侧面相抵靠。
在一些实施例中，所述密封组件包括第四密封件，所述第四密封件密封所述挡板与所述第一结构件之间的间隙；至少部分所述第四密封件设于所述第一通孔的内壁与所述第一结构件的外壁之间。
在一些实施例中，所述密封结构还包括第一限位结构，所述第一限位结构对所述第一结构件在所述第一通孔中的位置进行限位。
在一些实施例中，所述第一限位结构包括第一螺母以及第一外螺纹，所述第一外螺纹设于所述第一结构件上；所述第一螺母在所述挡板的第二侧面所在的一侧与所述第一结构件的所述第一外螺纹螺纹连接。
在一些实施例中，所述密封结构还包括第二结构件，所述第二结构件套设在所述第一结构件上并位于所述第一螺母与所述第三密封件之间；所述第二结构件包括第一主环部和第一挡环部，所述第一主环部套设在所述第一结构件上，所述第一挡环部位于所述第一主环部的轴线方向的一端；所述第三密封件和所述第一挡环部均位于所述挡板与所述第一主环部之间，且所述第三密封件位于所述第一挡环部的内环中。
在一些实施例中，所述第一结构件包括第一主环部和第一挡环部；所述内孔形成在所述第一主环部上；所述第一主环部经由所述第一通孔贯穿所述挡板，所述第一挡环部位于所述挡板的所述第一侧面所在的一侧，所述第一挡环部环绕在所述第一主环部外；所述第一挡环部的外径大于所述第一通孔的直径。
在一些实施例中，所述第一结构件还包括第二挡环部，所述第二挡环部位于所述挡板的所述第一侧面所在的一侧，所述第二挡环部设置在所述第一挡环部的朝向所述挡板的一侧，且所述第二挡环部的外径大于所述第一主环部的外径。
在一些实施例中，所述第一主环部的外径与所述第一主环部的内径的比值为1.1-2。
在一些实施例中，所述第一通孔的直径与第一主环部的内径的比值为1.2-2.5。
在一些实施例中，所述密封结构还包括第二限位结构，所述第二限位结构将第一密封件限位在 所述内孔中。
在一些实施例中，所述第二限位结构包括第二螺母和第一内螺纹，第一内螺纹位于所述内孔中，所述第二螺母在所述挡板的第二侧面所在的一侧与所述内孔的所述第一内螺纹连接。
在一些实施例中，所述第二限位结构包括设于所述内孔中的限位凸台，所述第一密封件设置在所述限位凸台与所述第二螺母之间。
在一些实施例中，所述第一密封件与所述第二螺母之间设有第一垫圈。
在一些实施例中，所述第一密封件的数量为至少两个；至少两个相邻的所述第一密封件之间设有第二垫圈。
在一些实施例中，所述第一结构件从所述挡板的第二侧面所在的一侧穿入所述第一通孔中；所述第一通孔靠近所述第一侧面的一端设有限位台；待密封件穿过所述第一通孔和所述内孔；所述密封组件包括第五密封件，所述第五密封件设于所述第一通孔内，所述第五密封件套设在待密封件上，且位于所述限位台与所述第一结构件之间。
在一些实施例中，所述第一结构件的外壁设有第二外螺纹，所述第一通孔的内壁设有与所述第二外螺纹匹配的第二内螺纹。
在一些实施例中，所述第一结构件的材质是导电材料，且所述第一结构件的外表面与所述第一通孔的内壁面之间设有绝缘层。
在一些实施例中，所述第一结构件的材质为绝缘材料；和/或，所述密封组件的材质为绝缘材料。
本说明书的第二方面提供了一种真空炉，包括密封结构和炉体，所述炉体的侧壁上设有开口，所述密封结构通过所述挡板设置于所述开口处。
在一些实施例中，所述挡板的第一侧面位于所述炉体内，所述挡板的第二侧面位于所述炉体外。
附图说明
本说明书将以示例性实施例的方式进一步说明，这些示例性实施例将通过附图进行详细描述。这些实施例并非限制性的，在这些实施例中，相同的编号表示相同的结构，其中：
图1是根据本说明书一些实施例所述的密封结构的结构示意图；
图2是根据本说明书一些实施例所述的密封结构的结构示意图；
图3是根据本说明书一些实施例所示的密封组件的安装示意图；
图4是根据本说明书一些实施例所示的密封组件的另一种安装示意图；
图5是根据本说明书一些实施例所示的密封组件的又一种安装示意图；
图6是根据本说明书一些实施例所示的密封组件的再一种安装示意图；
图7是根据本说明书一些实施例所示的第四密封件的结构示意图；
图8是根据本说明书另一些实施例所示的第四密封件的结构示意图；
图9是根据本说明书一些实施例所示的第一结构件的结构示意图；
图10A是根据本说明书另一些实施例所示的密封结构的结构示意图；
图10B是根据本说明书另一些实施例所示的第二结构件的结构示意图；
图11是根据本说明书又一些实施例所示的密封结构的结构示意图；
图12是根据本说明书一些实施例所示的第二限位结构的安装示意图；
图13是本根据本说明书一些实施例所示的第二螺母的结构示意图；
图14是本根据本说明书再一些实施例所示的密封结构的结构示意图；
图15是本说明书一些实施例所示的真空炉的结构示意图。
附图标记说明：1000、密封结构；100、挡板；101、第一侧面；102、第二侧面；103、限位台；110、第一通孔；111、第二内螺纹；200、第一结构件；201、内孔；202、第二主环部；203、第二挡环部；204、第三挡环部；205、第一内螺纹；206、第一外螺纹；207、限位凸台；208、第一工具孔；209、第二外螺纹；300、待密封件；400、密封组件；401、第一密封件；4011、第一垫圈；4012、第二垫圈；402、第二密封件；403、第三密封件；404、第四密封件；4041、限位环；405、第五密封件；4051、第三垫圈；4052、第四垫圈；500、第二限位结构；501、第二螺母；502、限位凸环；503、第二工具孔；504、第三外螺纹；505、第三通孔；600、第二结构件；601、第一主环部；602、第一挡环部；603、第二通孔；700、绝缘层；800、第一限位结构；801、第一螺母；2000、真空炉；2100、炉体。
具体实施方式
为了更清楚地说明本说明书实施例的技术方案，下面将对实施例描述中所需要使用的附图作 简单的介绍。显而易见地，下面描述中的附图仅仅是本说明书的一些示例或实施例，对于本领域的普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图将本说明书应用于其它类似情景。除非从语言环境中显而易见或另做说明，图中相同标号代表相同结构或操作。
应当理解，本文使用的“系统”、“装置”、“单元”和/或“模块”是用于区分不同级别的不同组件、元件、部件、部分或装配的一种方法。然而，如果其他词语可实现相同的目的，则可通过其他表达来替换所述词语。
如本说明书和权利要求书中所示，除非上下文明确提示例外情形，“一”、“一个”、“一种”和/或“该”等词并非特指单数，也可包括复数。一般说来，术语“包括”与“包含”仅提示包括已明确标识的步骤和元素，而这些步骤和元素不构成一个排它性的罗列，方法或者设备也可能包含其它的步骤或元素。
真空炉是一种能够提供真空环境并在真空环境中进行加热的设备。真空炉可以具有密封的炉膛，炉膛可以通过金属罩或石英玻璃罩等实现密封。炉膛可以通过管道与真空装置连接，以实现炉膛内的真空环境。炉膛内可以设有加热装置，加热装置可以包括线圈。在线圈通电后，可以实现炉膛内的加热。真空炉可以应用于晶体生长、真空淬火、真空钎焊、真空退火、真空加磁、真空回火、真空烧结、真空扩散焊、真空渗碳等。
真空炉中有一些部件需要从炉膛内穿到炉膛外。例如，用于信号传输的线缆或用于加热的线圈等。下面以线圈从炉膛内穿到炉膛外的情况为例进行说明。真空炉中用于加热炉膛的线圈需要通电才能实现加热，线圈需要从真空炉的炉壁穿出到炉外，从而与位于炉外的电源连接。在炉壁上可以开设有通孔，线圈外管(如铜管)可以穿过该通孔，以从炉膛内穿出到炉膛外。线圈穿入线圈外管，线圈外管可以对线圈起到保护的作用。线圈外管可以通过连接件(如螺母)与炉壁相固定。上述结构在通孔处(如通孔内壁与线圈外管之间以及线圈外管与线圈之间)可能存在缝隙影响真空炉的真空度。
本说明书实施例提供一种密封结构，该密封结构的第一结构件的内孔可以供待密封件穿过。由于密封组件的设置，挡板与第一结构件之间的间隙以及待密封件与第一结构件之间的间隙均被密封，这使得挡板的通孔处的密封性得到增强。该密封结构可以应用于真空炉，以保证真空炉的真空度。该密封结构可以应用于电炉、转炉等高温炉体，以保证电炉、转炉等设备的保温性能。
图1和图2均是根据本说明书一些实施例所示的密封结构的结构示意图，以下结合图2对密封结构进行详细说明。如图1和图2所示，密封结构1000可以包括挡板100、第一结构件200和密封组件400。挡板100上开设有第一通孔110，第一通孔110贯穿挡板100的第一侧面101和第二侧面102。也就是说，第一通孔110可以连通挡板100的第一侧面101所在的一侧和第二侧面102所在的一侧。第一结构件200开设有供待密封件300穿过的内孔201。第一结构件200与挡板100连接。至少部分内孔201位于第一通孔110中。也就是说，至少部分第一结构件200位于第一通孔110内，并当第一结构件200与挡板100连接时，内孔201的至少部分与第一侧面101和第二侧面102均不平行。密封组件400密封挡板100与第一结构件200之间的间隙，以及密封待密封件300与第一结构件200之间的间隙。
挡板100可以用于为第一结构件200提供安装基础，当密封结构1000用于真空炉、电炉、转炉等的炉体时，挡板可以将炉体的内部环境和外部环境分隔开。挡板100上的第一通孔110可以用于密封结构1000的其他部件从其中通过。挡板100的第一侧面101和第二侧面102代表挡板100的两侧表面。在一些实施例中，当密封组件400用于真空炉时，挡板100的朝向真空炉的炉体的内部的侧表面可以为第一侧面101，挡板100的朝向炉体的外部的侧表面可以为第二侧面102。在一些实施例中，挡板100可以为平面板状结构，以便于密封。在另一些实施例中，挡板100可以为其他的板状结构，如弧形板状结构、波纹形板状结构等。在一些实施例中，第一侧面101和第二侧面102可以基本平行。在另一些实施例，第一侧面101和第二侧面102之间可以具有大于0°的夹角。例如，第一侧面101和第二侧面102之间可以具有5°、10°等的夹角。在一些实施例中，通孔110的轴线可以与第一侧面101或第二侧面102垂直。
第一结构件200的至少部分可以位于挡板100的第一通孔110内，并被挡板100支撑(如被第一通孔110的侧壁支撑)。第一结构件200可以贯穿第一通孔110，也可以仅是进入而不贯穿第一通孔110。第一结构件200的内孔201用于供待密封件300穿过。内孔201的至少部分与第一侧面101和第二侧面102均不平行可以理解为，内孔201的至少部分与第一侧面101和第二侧面102之间均具有大于0°的夹角。这样可以保证待密封件300可以经由内孔201从挡板100的第一侧面101所在的一侧穿到挡板100的第二侧面102所在的一侧。在一些实施例中，内孔201的轴线是直线。内孔201可以沿图2中的B方向延伸，内孔201也可以与图2中的B方向具有一定的夹角，例如，5°、10°等的夹角。在另一些实施例中，内孔201的轴线可以是折线或曲线。在一些实施例中，内孔201的轴线(或者 内孔201的轴线的至少部分)与第一通孔110的轴线可以(基本)平行或(基本)重合。在本说明书中，“基本”用于描述一个特征(例如，基本重合)与该特征(例如，完全重合)的偏差小于一个阈值。该阈值可以是一个绝对数值(例如，距离差值为1厘米，5毫米)，或一个相对值(例如，该阈值为第一通孔110的孔径的10％，5％)。
待密封件300可以包括真空炉、电炉、转炉等炉体的线圈、线缆等。待密封件300也可以包括外管，线圈、线缆等可以穿入外管中，外管可以对线圈、线缆起到保护的作用。
挡板100与第一结构件200之间的间隙形成在第一通孔110处，为了密封挡板100与第一结构件200之间的间隙，密封组件400可以位于第一通孔110内、第一通孔110的任意一端或第一通孔110的两端。待密封件300与第一结构件200之间的间隙形成在内孔201处，为了密封待密封件300与第一结构件200之间的间隙，密封组件400可以位于内孔201内、内孔201的任意一端或内孔201的两端。关于密封组件400的具体结构及所包括的部件等，具体请见下文的相关说明。需要说明的是，图2中对于第一结构件200、密封组件400的形状、结构、设置位置仅为示例，在不同的实施例中第一结构件200、密封组件400的形状、结构、设置位置可以变化。
在一些实施例中，第一结构件200经由第一通孔110贯穿挡板100。此时，第一结构件200的穿过第一通孔110的部分的长度长于第一通孔110的长度。密封组件400可以包括第一密封件401。第一密封件401用于密封待密封件300与第一结构件200之间的间隙。第一密封件401设于内孔201的内壁与待密封件300之间。在一些实施例中，第一密封件401可以为套设在待密封件300外的密封圈。在一些实施例中，密封圈(第一密封件401)安装在内孔201的内壁与待密封件300之间后，密封圈(第一密封件401)可以处于被压缩的状态，以提升第一密封件401的密封效果。在另一些实施例中，第一密封件401可以是密封胶(如凝固后呈固态的密封胶)，密封胶(第一密封件401)可以在内孔201处将第一密封件401与待密封件300之间的间隙封堵。
在一些实施例中，当第一密封件401是密封圈时，第一密封件401的横截面的外轮廓可以是圆形、椭圆形、三角形、矩形、多边形或不规则形状等。
图3是根据本说明书一些实施例所示的密封组件的安装示意图，图4是根据本说明书一些实施例所示的密封组件的另一种安装示意图。在一些实施例中，如图3和图4所示，密封组件400包括第二密封件402，第二密封件402与挡板100的抵靠。第二密封件402位于第一通孔110的一端，以密封挡板100与第一结构件200之间的间隙。
在一些实施例中，如图3所示，第二密封件402可以与挡板100的第一侧面101相抵靠。在一些实施例中，如图4所示，第二密封件402可以与挡板100的第二侧面102相抵靠。在一些实施例中，第二密封件402可以包括套设在第一结构件200上的密封圈。在另一些实施例中，第二密封件402可以包括密封胶(如凝固后呈固态的密封胶)，密封胶可以在第一通孔110处将挡板100与第一结构件200之间的间隙封堵。
在一些实施例中，当第二密封件402是密封圈时，第二密封件402的横截面的外轮廓可以是圆形、椭圆形、三角形、矩形、多边形或不规则形状等。
通过设置抵靠挡板100的第二密封件402，第二密封件402可以有效密封挡板100与第一结构件200之间的间隙，且由于第二密封件402是通过设置在第一通孔110的端部且与挡板100抵靠来实现密封的，第二密封件402的放置基本不受到第一通孔110的尺寸限制，第二密封件402的形状、尺寸受到的限制较小，且安装较为方便。
图5是根据本说明书一些实施例所示的密封组件的又一种安装示意图。如图5所示，密封组件400还包括第三密封件403，第三密封件403与挡板100抵靠。第三密封件403用于密封挡板100与第一结构件200之间的间隙。第二密封件402与第三密封件403可以分别位于第一通孔110的两端。第二密封件402与第三密封件403可以分别与挡板100的第一侧面101和第二侧面102相抵靠。第三密封件403的结构、形状与第二密封件402可以类似，具体可参见第二密封件402的相关说明。
通过第二密封件402和第三密封件403的设置，在第一通孔110的两端进行密封，可以更好地密封挡板100与第一结构件200之间的间隙，且第二密封件402以及第三密封件403的放置基本不受到第一通孔110的尺寸限制，第二密封件402以及第三密封件403的形状、尺寸受到的限制较小。
图6是根据本说明书一些实施例所示的密封组件的再一种安装示意图。如图6所示，密封组件400可以包括第四密封件404。第四密封件404可以用于密封挡板100与第一结构件200之间的间隙。至少部分第四密封件404设置在挡板100的第一通孔110的内壁与第一结构件200的外壁之间。也就是说，至少部分第四密封件404设于挡板100的第一通孔110内。
在一些实施例中，第四密封件404可以为密封圈。密封圈(第四密封件404)可以位于挡板100的第一通孔110内，且套设在第一结构件200外。在另一些实施例中，第四密封件404可以为填充在挡 板100的第一通孔110内的且位于挡板100的第一通孔110的内壁与第一结构件200的外壁之间的密封胶(如凝固后呈固态的密封胶)，密封胶(第四密封件404)可以在第一通孔110内将第一结构件200与挡板100之间的间隙封堵。
当第四密封件404为密封圈时，其可以为多种不同形状。第四密封件404的形状可以与第一密封件401的形状类似。在如图6所示的实施例中，第四密封件404可以为规则的圆环结构，第四密封件404完全处于挡板100的第一通孔110内。
图7是根据本说明书一些实施例所示的第四密封件的结构示意图。在一些实施例中，如图7所示，当第四密封件404为密封圈时，第四密封件404内环为圆柱形，第四密封件404外环为圆锥形。将外环设计为圆锥形，从外环的直径较小的一端将第四密封件404放入第一通孔110中，可以方便地将第四密封件404放入第一通孔110中。在一些实施例中，圆锥形的外环的一端的外径可以略小于第一通孔110的直径，圆锥形的外环的另一端的外径可以基本等于第一通孔110的直径，第四密封件404的外环的直径较大的一端可以与挡板100的第一通孔110的内壁过盈配合，这样可以增强第四密封件404的密封效果。在一些实施例中，圆锥形的外环的一端的外径可以略小于第一通孔110的直径，圆锥形的外环的另一端的外径可以大于第一通孔110的直径。通过这样的设置，第四密封件404可以部分位于挡板100的第一通孔110内而另一部分位于挡板100的第一通孔110外。通过这样的设置，在保证密封效果的同时，可以防止第四密封件404沿图6中的A方向移动。
图8是根据本说明书另一些实施例所示的第四密封件的结构示意图。在一些实施例中，如图8所示，第四密封件404的一端设置有沿着径向向外延伸的限位环4041，限位环4041的外径大于挡板100的第一通孔110的内径，安装第四密封件404时，限位环4041无法通过挡板100的第一通孔110从而能够起到限位的作用。也就是说，图8所示的第四密封件404在保证密封效果的同时，可以防止第四密封件404沿图6中的A方向移动。
在一些实施例中，当第四密封件404为密封圈时，第四密封件404的沿密封圈的轴向的长度可以大于、小于或等于挡板100的第一通孔110沿第一通孔110的轴线的长度。当第四密封件404沿密封圈的轴向的长度大于第一通孔110沿第一通孔110的轴向的长度时，第四密封件404的两端能够超出第一通孔110的两端，从而能够使第四密封件404完全覆盖挡板100与第一结构件200之间的间隙，有利于提高第四密封件404的密封强度。
在一些实施例中，继续参见图3-图5所示，密封结构1000还包括第一限位结构800。第一限位结构800可以对第一结构件200在第一通孔110中的位置进行限位(如限定第一结构件200与挡板100的相对位置，从而限定第一结构件200在第一通孔110中的位置)。可以理解地，第一限位结构800可以是仅在一个方向上对第一结构件200进行限位，也就是说，第一限位结构800可以仅限制第一结构件200相对挡板100在一个方向上的运动。例如，图3-图5中的第一限位结构800可以防止第一结构件200朝向图3-图5中的A方向运动。在一些实施例中，第一限位结构800可以与其他结构配合，以固定第一结构件200在第一通孔110中的位置，从而以使得挡板100与第一结构件200连接起来，并实现第一结构件200与挡板100之间相对位置的固定。例如，第一限位结构800可以与下文中第一结构件200的第二挡环部203配合(第二挡环部203可以防止第一结构件200朝向图3-图5中的B方向运动)，以固定第一结构件200在第一通孔110中的位置，从而实现第一结构件200与挡板100之间相对位置的固定。
在一些实施例中，第一限位结构800可以包括挡块，挡块位于挡板100的第二侧面102所在的一侧。在一些实施例中，如图3所示，挡块可以与挡板100抵靠，从而防止第一结构件200朝向图3-图5中的A方向运动。
在一些实施例中，如图4所示，第二密封件402和挡块均位于挡板100的第二侧面102所在的一侧，第二密封件402可以与挡板100的第二侧面102抵靠，挡块可以与第二密封件402抵靠。通过这样的设置，第一限位结构800不但能够防止第一结构件200朝向A方向运动，还能够对第二密封件402施加压力，将第二密封件402压紧在挡板100上，使得第二密封件402起到更好的密封效果。
在一些实施例中，如图5所示，第二密封件402和第三密封件403分别位于挡板100的两侧，第二密封件402与第三密封件403分别与挡板100的第一侧面101和第二侧面102抵靠。挡块可以位于挡板100的第二侧面102所在的一侧，且挡块可以与第三密封件403抵靠。通过这样的设置，第一限位结构800不但能够防止第一结构件200朝向A方向运动，还可以对第三密封件403施加压力，将第三密封件403压紧在挡板100上，使得第三密封件403起到更好的密封效果。
在一些实施例中，第一限位结构800(如上文的挡块)可以与第一结构件200通过多种可连接方式实现限位。如卡接、螺纹连接等。
在一些实施例中，第一限位结构800通过螺纹连接方式实现限位。图9是根据本说明书一些实 施例所示的第一结构件的结构示意图。如图3-图5以及图9所示，在一些实施例中，第一限位结构800包括第一螺母801和第一外螺纹206。也就是说，上文所述的挡块可以为第一螺母801。第一外螺纹206设置在第一结构件200上。当第一结构件200放入第一通孔110中后，至少部分第一外螺纹可以位于挡板100第二侧面102所在的一侧。第一螺母801在挡板100的第二侧面102所在的一侧与第一结构件200的第一外螺纹206螺纹连接。通过转动第一螺母801能够控制第一螺母801在第一外螺纹206上往复移动，从而靠近或远离挡板100。通过控制第一螺母801向靠近挡板100的方向移动，当第一螺母801与挡板100(如图3所示的实施例)、第二密封件402(如图4所示的实施例)或第三密封件403(如图5所示的实施例)抵靠，能够使第一螺母801对挡板100、第二密封件402或第三密封件403施加压力。当第一螺母801与第二密封件402(如图4所示的实施例)或第三密封件403(如图5所示的实施例)抵靠时，通过控制第一螺母801向靠近挡板100的方向移动，能够对应压紧第二密封件402或第三密封件403，保证密封效果。
图10A是根据本说明书另一些实施例所示的密封结构的结构示意图，图10B是根据本说明书另一些实施例所示的第二结构件的结构示意图，以下结合图10A和图10B对第二结构件600进行详细说明。如图10A所示，第二结构件600套设在第一结构件200上，并位于第一螺母801与第三密封件403之间。第二结构件600可以套设在第一结构件200上并位于第一螺母801与第三密封件403之间，用于与第三密封件403接触并对第三密封件403进行限位。在一些实施例中，如图10B所示，第二结构件600上可以设有第二通孔603。如图10A所示，第一结构件200可以穿入第二结构件600的第二通孔603内。
在一些实施例中，第二结构件600可以包括第一主环部601，第一主环部601套设在第一结构件200上。第一主环部601的内环即可形成第二结构件600上供第一结构件200穿过的第二通孔603。第一主环部601远离挡板100的一侧抵靠在第一螺母801上，第一螺母801移动时可以带动第二结构件600同步移动。
在一些实施例中，第二结构件600还可以包括第一挡环部602。第一挡环部602设于第一主环部601的轴线方向的一端。当第一主环部601套设在第一结构件200上时，第一挡环部602位于第一主环部601的靠近挡板的一侧。第一主环部601套设在第一结构件200上时，第三密封件403和第一挡环部602均位于挡板100与第一主环部601之间。第三密封件403位于第一挡环部602的内环中。
通过第二结构件600的上述结构设计，第一主环部601可以用于对第三密封件403在挡板100的第一通孔110的轴向方向上进行限位。第一挡环部602用于对第三密封件403在挡板100的第一通孔110的径向方向上进行限位。第二结构件600通过设置第一主环部601和第一挡环部602，可以对第三密封件403在第一通孔110的轴向和径向上进行限位，使第三密封件403可以紧密地抵靠在第一主环部601与挡板100之间，从而对第二结构件600与挡板100之间的接触间隙进行良好的密封。此外，第二结构件600可以避免第一螺母801与第三密封件403直接接触，从而可以有效减小第三密封件403的磨损，从而延长第三密封件403的使用寿命。
在一些实施例中，第二结构件600可以是具有第二通孔603的隔板，第一结构件200穿入隔板的第二通孔603内，以使得隔板可以套设在第一结构件200外。在一些实施例中，隔板的朝向挡板100的一侧可以设有底部呈弧形的凹槽，第三密封件403可以设置在隔板的凹槽内，隔板的凹槽可以实现对第三密封件403的限位。
可以理解地，当第二密封件402设置在挡板的第二侧面102所在的一侧时(即图4所示的实施例)，第二结构件600也可以按照上文的说明类似地设置。
以下结合图3-5以及图9对第一结构件200的结构进行详细说明。如图9所示，第一结构件200包括第二主环部202。第二主环部202可以经由挡板100的第一通孔110贯穿挡板。也就是说，第二主环部202的外径小于第一通孔110的直径，第二主环部202可以从挡板100的第一侧面101所在的一侧穿到第二侧面102所在的一侧。内孔201形成在第二主环部202内。
在一些实施例中，第一结构件200还可以包括第二挡环部203。当第一结构件200安装在挡板100的第一通孔110内时，第二挡环部203位于挡板100的第一侧面101所在的一侧，第二挡环部203可以环绕在第二主环部202上。也就是说，第二挡环部203可以设置在第二主环部202的外圆面上，第二挡环部203的外径大于第一通孔110的直径，第二主环部202穿过挡板100的第一通孔110时，第二挡环部203无法穿过第一通孔110。第二挡环部203可以对第一结构件200起到限位的作用。第二挡环部203可以防止第一结构件200朝向图3-5所示的B方向运动。
在一些实施例中，如图3、图5所示，当第二密封件402位于挡板100的第一侧面101所在的一侧时，第二密封件402可以套设在第二主环部202上，同时，第二密封件402可以与第二挡环部203抵接，第二挡环部203能够对第二密封件402在第二主环部202的轴向(也是第一通孔110的轴向)起 到限位的作用，防止第二密封件402从第二主环部202上脱离。
在一些实施例中，如图3-5以及图9所示，第一结构件200还可以包括第三挡环部204。第三挡环部204位于挡板100的第一侧面101所在的一侧并设置于第二挡环部203的朝向挡板100的一侧，第三挡环部204的内径大于第二主环部202的外径，在第三挡环部204与第二主环部202之间形成环形槽。在一些实施例中，第三挡环部204的外径可以等于第二挡环部203的外径。
在一些实施例中，如图3、图5所示，第二密封件402套设在第二主环部202上，同时，第二密封件402可以位于第三挡环部204的内环中。也就是说，第二密封件402可以位于第三挡环部204与第二主环部202之间形成的环形槽内。第三挡环部204用于对第二密封件402沿第二主环部202的径向(也是第一通孔110的径向)进行限位。
在另一些实施例中，第二挡环部203朝向挡板100的一侧可以设有底部呈弧形的凹槽，第二密封件402可以设置在第二挡环部203的凹槽内，第二挡环部203的凹槽可以实现对第二密封件402的限位。在又一些实施例中，第二主环部202上可以设置有其他限位机构，以达导防止第一结构件200朝向图3-图6所示的B方向运动的目的。例如，第二主环部202上可以设置限位挡块，限位挡块无法进入第一通孔110中，从而起到限位的作用。
在一些实施例中，第二主环部202的外径可以为15mm-750mm。在一些实施例中，第二主环部202的内径可以为10mm-500mm。第二主环部202的内径也就是内孔201的直径。在一些实施例中，第二主环部202的外径与第二主环部202的内径的比值可以为1.1-2。通过上述第二主环部202的尺寸设置，可以使得第一结构件200的结构更加合理、紧凑。
在一些实施例中，第一通孔110的直径可以为17mm-800mm。在一些实施例中，第一通孔110的直径与第二主环部202的内径的比值为1.2-2.5。通过上述以及第一通孔110与第二主环部202的尺寸设计，可以使得密封结构的各个部件之间能够更好地配合，从而使得密封结构能够达到更好的密封效果。
图11是根据本说明书又一些实施例所示的密封结构的结构示意图。在一些实施例中，如图11所示，密封结构还包括第二限位结构500。第二限位结构500可以用于将第一密封件401限位在内孔201中，提高第一密封件401的稳定性，防止第一密封件401脱落。在一些实施例中，第二限位结构500还可以对第一密封件401施加压力，以提升第一密封件401的密封效果。
图12是根据本说明书一些实施例所示的第二限位结构的安装示意图，图13是本根据本说明书一些实施例所示的第二螺母的结构示意图。以下结合图12-图13对第二限位结构进行详细说明。如图12-图13所示，第二限位结构500包括第二螺母501和第一内螺纹205。第二螺母501上设置有能够与第一内螺纹205螺纹连接的第三外螺纹504。第一内螺纹205设置在第一结构件200的内孔201中。第二螺母501在挡板100的第二侧面102所在的一侧与内201孔的第一内螺纹205连接。在一些实施例中，当第一结构件200安装在第一通孔110内以后，至少部分第一内螺纹205可以位于挡板100的第二侧面102所在的一侧。
第二螺母501可以与第一密封件401抵接，旋入第二螺母501后，第二螺母501可以限制第一密封件401的活动空间。进一步地，第二螺母501可以挤压第一密封件401，从而使提升第一密封件401的密封效果。
在一些实施例中，第二螺母501上设置有限位凸环502，限位凸环502的外径可以大于内孔201的直径，以限制第二螺母501进入内孔201的长度。在一些实施例中，限位凸环502的外径可以大于挡板100的第一通孔110的直径。
在一些实施例中，第二螺母501可以上可以设有沿其自身的轴线延伸的第三通孔505，该第三通孔505可以供待密封件300穿过。通过第三通孔505的设置，待密封件300可以顺利地穿到挡板100的第二侧面102所在的一侧而不会受到第二螺母501的限制。
在一些实施例中，如图9和图11所示，第二限位结构500还包括限位凸台207。限位凸台207设于内孔201中靠近挡板100的第一侧面101所在的一侧的一端。第一密封件401设置在限位凸台207与第二螺母501之间。第一密封件401可以与限位凸台207抵接，限位凸台207可以用于限制第一密封件401沿着内孔201轴向的向挡板的第一侧面101移动。第二螺母501与第一密封件401抵接之后，可以将第一密封件401压紧在限位凸台207上，有利于提高第一密封件401的稳定性与密封效果。
第二限位结构500可以通过多种结构起到防止第一密封件401脱落的效果。在一些实施例中，第二限位结构500还可以包括第一限位塞，第一限位塞可以从挡板100的第二侧面102所在的一侧直接塞入内孔201中，以起到防止第一密封件401脱落的效果。第一限位塞可以卡接在内孔201中，也可以与内孔201的内壁依靠摩擦力相对固定。第一限位塞可以防止第一密封件401从挡板100的第二侧面102所在的一侧脱离。
在另一些实施例中，第二限位结构501还可以包括第二限位塞或第三螺母，第二限位塞和第三螺母可以从从挡板100的第一侧面101所在的一侧放内孔201中，第二限位塞或第三螺母可以防止第一密封件401从挡板100的第一侧面101所在的一侧脱离。第二限位塞的设置方式可以与第一限位塞的设置方式类似，第三螺母的设置方式可以与第二螺母501的设置方式类似，具体请见上文的相关说明。
在一些实施例中，第一密封件401的数量可以为至少两个。通过至少两个第一密封件401的设置，可以对第一结构件200与待密封件300之间的间隙进行更良好的密封。
在一些实施例中，第一密封件401与第二螺母501之间可以设有第一垫圈4011。在一些实施例中，第一垫圈4011可以为环状。第一垫圈4011的材料包括而不限于铜、不锈钢等。第一垫圈4011被磨损后，可以进行更换。旋拧第二螺母501时，第二螺母501可以与第一垫圈4011抵靠并推动第一垫圈4011和第一密封件401向限位凸台207移动，从而可以将第一密封件401压紧在限位凸台207与第二螺母501之间。
通过在第二螺母501与第一密封件401之间设置第一垫圈4011，可以有效保护第一密封件401不受第二螺母501的磨损，从而延长第一密封件401的使用寿命。
在一些实施例中，当第一密封件401的数量是多个时，至少两个第一密封件401之间可以设有第二垫圈4012。第二垫圈4012的材料包括而不限于铜、不锈钢等。在一些实施例中，一部分的相邻的两个第一密封件401之间可以设有第二垫圈4012，另一部分的相邻的两个第一密封件401之间可以不设第二垫圈4012。
通过在相邻两个第一密封件401之间设第二垫圈4012，避免第一密封件401之间直接接触，在具有多个第一密封件401时，可以有效减小第一密封件401之间的磨损，从而延长第一密封件401的使用寿命。
图14是本根据本说明书再一些实施例所示的密封结构的结构示意图。以下结合图14对第一结构件200进行详细说明。如图14所示，第一结构件200从挡板100的第二侧面102所在的一侧穿入第一通孔110。第一结构件200未贯穿第一通孔110。待密封件300穿过通孔和内孔201。密封组件包括第五密封件405。
第一通孔110靠近第一侧面101所在的一侧的一端设有限位台103。第五密封件405套设在待密封件300上，且位于限位台103与第一结构件200之间。在一些实施例中，限位台103可以防止第五密封件405从第一侧面101所在的一侧脱离第一通孔110。限位台103和第一结构件200的共同作用下可以对第五密封件405进行限位。在一些实施例中，第一结构件200可以用于对第五密封件405施加压力，以保证第五密封件405的密封效果。第五密封件405既可以用于密封第一结构件200与待密封件300之间的间隙，又可以密封挡板100与第一结构件200之间的间隙，密封结构1000的结构得到简化。
第一结构件200连接在挡板100的第一通孔110内。第一结构件200可以通过卡接、螺纹连接等可拆卸连接方式实现与第一通孔110的连接。
在一些实施例中，第一结构件200的外壁设置有第二外螺纹209，第一通孔110的内壁设有与第二外螺纹209螺纹连接的第二内螺纹111。第一结构件200与第一通孔110能够通过螺纹连接，第一结构件200旋进时可以对第五密封件405施加压力，并可以方便地通过控制旋进的距离来控制压力的大小。
在一些实施例中，第五密封件405的数量可以为至少两个。通过至少两个第五密封件405的设置，可以对第一结构件200与待密封件300之间的间隙以及第一结构件200与待密封件300之间进行良好的密封。
在一些实施例中，第五密封件405与第一结构件200之间可以设有第三垫圈4051。第三垫圈4051可以起到防止第一结构件200磨损第五密封件405的作用，从而延长第五密封件405的使用寿命。第三垫圈4051的材料包括而不限于铜、不锈钢等。
在一些实施例中，第五密封件405的数量可以是多个。至少两个相邻的第五密封件405之间可以设有第四垫圈4052。第四垫圈4052的材料包括而不限于铜、不锈钢等。
通过在相邻两个第五密封件405之间设第四垫圈4052，避免第五密封件405之间直接接触，在具有多个第五密封件405时，可以有效减小第五密封件405之间的磨损，从而延长第五密封件405的使用寿命。
在一些实施例中，第一结构件200的材质可以为导电材料。在一些实施例中，如图3-图5所示，第一结构件200与第一通孔110的内壁面之间设置有绝缘层700，绝缘层700使挡板100与第一结构件200之间绝缘，提高密封结构的安全性能。在一些实施例中，第一结构件的材质可以为磁导率较低(如相对磁导率小于2)的金属导电材料。例如，铜、不锈钢、铝等。绝缘层700采用绝缘材料制成。 绝缘材料可以选用具有电绝缘性能的橡胶类弹性材料，例如聚四氟乙烯、氟橡胶、丁腈橡胶、聚氨酯橡胶等。
在一些实施例中，第一结构件200的材质可以是绝缘材料。第一结构件200具体的材料可以与绝缘层700的材料类似。通过将第一结构件200的材质设置为绝缘材料，第一结构件200与挡板100之间可以无需设置绝缘部件(如绝缘层700)，这样可以简化密封结构的部件数量，有利于密封效果的提升。
在一些实施例中，密封组件400的材质可以是绝缘材料。密封组件400的具体的材料可以与绝缘层700的材料类似。在一些实施例中，第二密封件402的材质可以是绝缘材料。在一些实施例中，绝缘层700与第二密封件402可以是一体式结构。在一些实施例中，第二密封件402和第三密封件403的材质可以均是绝缘材料。在一些实施例中，绝缘层700、第二密封件402和第三密封件403可以是一体式结构。在一些实施例中，第一密封件401的材质是绝缘材料。前述实施例可以实现的技术效果包括而不限于：通过采用绝缘材料制成的绝缘层700、第一密封件401、第二密封件402、第三密封件403，可以实现挡板100与第一结构件200、第二结构件600以及待密封件300之间的绝缘。
在一些实施例中，第一结构件200、第一螺母801和/或第二螺母501上可以开设工具孔。工具孔用于方便将辅助工具(例如插销)插入其中然后对开设该工具孔的零部件进行安装动作(例如旋拧、前推、后拉等动作)。
在一些实施例中，第一结构件200上可以开设第一工具孔208。在一些实施例中，第一工具孔208可以开设在第三挡环部204上，如图9所示。
在一些实施例中，第二螺母501上可以上开设第二工具孔503，如图12和图13所示。
在一些实施例中，第一螺母801上可以开设第三工具孔，第三工具孔未在图中示出，可以参考第一工具孔208和第二工具孔503。在一些实施例中，第一螺母801的外形可以为六边形或其他形状。
前述实施例可以实现的技术效果包括而不限于：通过在各零部件上开设工具孔，可以非常方便、快捷地实现安装和/或拆卸。
本说明书实施例的密封结构可能带来的有益效果包括但不限于：(1)本说明书的密封组件可密封挡板与第一结构件之间的间隙，以及密封待密封件与第一结构件之间的间隙，起到较好的密封效果；(2)密封结构可以从挡板的两侧同时密封以增强密封效果；(3)密封结构中的各个结构之间的连接简单、方便，可以对密封组件进行快速安装更换以及灵活地调整，能够降低维护、维修的难度和成本；(4)密封组件和结构件采用绝缘材料可以提高安全性能。需要说明的是，不同实施例可能产生的有益效果不同，在不同的实施例里，可能产生的有益效果可以是以上任意一种或几种的组合，也可以是其他任何可能获得的有益效果。
图15是本说明书一些实施例所示的真空炉的结构示意图。以下结合图15对真空炉进行详细说明。如图15所示，真空炉2000包括密封结构1000，真空炉包括炉体2100。炉体2100是可以用于提供真空环境的炉体。在一些实施例中，挡板100可以是炉体2100的一部分侧壁，也就是说，挡板100可以与炉体2100的侧壁是一体式结构。在另一些实施例中，可以先在炉体2100的侧壁上设置一个开口，再在开口处安装挡板100。也就是说，挡板100与炉体的侧壁是分体的结构。
在一些实施例中，挡板100的第一侧面101位于炉体2100内，挡板100的第二侧面102位于炉体2100外。通过这样的设置，可以方便从真空炉外部进行安装、拆卸、检修、更换等操作。例如，在安装第一螺母801和/或第二螺母501的过程中，由于第一螺母801和第二螺母501均设于挡板100的第二侧面102所在的一侧，则可以方便地从炉体的外侧安装第一螺母801和/或第二螺母501。
在一些实施例中，炉体2100上的开口可以是多个。例如，炉体2100上的开口可以是两个，两个开口处分别用于线圈、线缆的穿入和穿出。每个开口处可以均设有上述密封结构1000。
上文已对基本概念做了描述，显然，对于本领域技术人员来说，上述详细披露仅仅作为示例，而并不构成对本说明书的限定。虽然此处并没有明确说明，本领域技术人员可能会对本说明书进行各种修改、改进和修正。该类修改、改进和修正在本说明书中被建议，所以该类修改、改进、修正仍属于本说明书示范实施例的精神和范围。
同时，本说明书使用了特定词语来描述本说明书的实施例。如“一个实施例”、“一实施例”、和/或“一些实施例”意指与本说明书至少一个实施例相关的某一特征、结构或特点。因此，应强调并注意的是，本说明书中在不同位置两次或多次提及的“一实施例”或“一个实施例”或“一个替代性实施例”并不一定是指同一实施例。此外，本说明书的一个或多个实施例中的某些特征、结构或特点可以进行适当的组合。
同理，应当注意的是，为了简化本说明书披露的表述，从而帮助对一个或多个发明实施例的理解，前文对本说明书实施例的描述中，有时会将多种特征归并至一个实施例、附图或对其的描述中。但 是，这种披露方法并不意味着本说明书对象所需要的特征比权利要求中提及的特征多。实际上，实施例的特征要少于上述披露的单个实施例的全部特征。
最后，应当理解的是，本说明书中所述实施例仅用以说明本说明书实施例的原则。其他的变形也可能属于本说明书的范围。因此，作为示例而非限制，本说明书实施例的替代配置可视为与本说明书的教导一致。相应地，本说明书的实施例不仅限于本说明书明确介绍和描述的实施例。

Claims (22)

  1. 一种密封结构，其中，包括：
    挡板，所述挡板上开设第一通孔，所述第一通孔贯穿所述挡板的第一侧面和第二侧面；
    第一结构件，所述第一结构件上开设有供待密封件穿过的内孔，所述第一结构件与所述挡板连接；至少部分所述内孔位于所述第一通孔中，且所述内孔的至少部分与所述第一侧面和所述第二侧面均不平行；
    密封组件，密封所述挡板与所述第一结构件之间的间隙，以及密封所述待密封件与所述第一结构件之间的间隙。
  2. 如权利要求1所述的密封结构，其中，所述第一结构件经由所述第一通孔贯穿所述挡板；
    所述密封组件包括第一密封件，所述第一密封件用于密封所述待密封件与所述第一结构件之间的间隙，所述第一密封件设于所述内孔的内壁与所述待密封件之间。
  3. 如权利要求2所述的密封结构，其中，所述密封组件包括第二密封件，所述第二密封件位于所述第一通孔的一端且与所述挡板的第一侧面或第二侧面抵靠，以密封所述挡板与所述第一结构件之间的间隙。
  4. 如权利要求3所述的密封结构，其中，所述密封组件还包括第三密封件，所述第三密封件密封所述挡板与所述第一结构件之间的间隙；
    所述第二密封件和所述第三密封件分别位于所述第一通孔的两端，且所述第二密封件和所述第三密封件分别与所述挡板的第一侧面和第二侧面相抵靠。
  5. 如权利要求2所述的密封结构，其中，所述密封组件包括第四密封件，所述第四密封件密封所述挡板与所述第一结构件之间的间隙；至少部分所述第四密封件设于所述第一通孔的内壁与所述第一结构件的外壁之间。
  6. 如权利要求4所述的密封结构，其中，所述密封结构还包括第一限位结构，所述第一限位结构对所述第一结构件在所述第一通孔中的位置进行限位。
  7. 如权利要求6所述的密封结构，其中，所述第一限位结构包括第一螺母以及第一外螺纹，所述第一外螺纹设于所述第一结构件上；所述第一螺母在所述挡板的第二侧面所在的一侧与所述第一结构件的所述第一外螺纹螺纹连接。
  8. 如权利要求7所述的密封结构，其中，所述密封结构还包括第二结构件，所述第二结构件套设在所述第一结构件上并位于所述第一螺母与所述第三密封件之间；
    所述第二结构件包括第一主环部和第一挡环部，所述第一主环部套设在所述第一结构件上，所述第一挡环部位于所述第一主环部的轴线方向的一端；
    所述第三密封件和所述第一挡环部均位于所述挡板与所述第一主环部之间，且所述第三密封件位于所述第一挡环部的内环中。
  9. 如权利要求2所述的密封结构，其中，所述第一结构件包括第一主环部和第一挡环部；所述内孔形成在所述第一主环部上；所述第一主环部经由所述第一通孔贯穿所述挡板，所述第一挡环部位于所述挡板的所述第一侧面所在的一侧，所述第一挡环部环绕在所述第一主环部外；所述第一挡环部的外径大于所述第一通孔的直径。
  10. 如权利要求9所述的密封结构，其中，所述第一结构件还包括第二挡环部，所述第二挡环部位于所述挡板的所述第一侧面所在的一侧，所述第二挡环部设置在所述第一挡环部的朝向所述挡板的一侧，且所述第二挡环部的外径大于所述第一主环部的外径。
  11. 如权利要求9所述的密封结构，其中，所述第一主环部的外径与所述第一主环部的内径的比值为1.1-2。
  12. 如权利要求9所述的密封结构，其中，所述第一通孔的直径与第一主环部的内径的比值为1.2-2.5。
  13. 如权利要求2所述的密封结构，其中，还包括第二限位结构，所述第二限位结构将第一密封件限位在所述内孔中。
  14. 如权利要求13所述的密封结构，其中，所述第二限位结构包括第二螺母和第一内螺纹，第一内螺纹位于所述内孔中，所述第二螺母在所述挡板的第二侧面所在的一侧与所述内孔的所述第一内螺纹连接。
  15. 如权利要求14所述的密封结构，其中，所述第二限位结构包括设于所述内孔中的限位凸台，所述第一密封件设置在所述限位凸台与所述第二螺母之间。
  16. 如权利要求14所述的密封结构，其中，所述第一密封件与所述第二螺母之间设有第一垫圈。
  17. 如权利要求2所述的密封结构，其中，所述第一密封件的数量为至少两个；至少两个相邻的所述第一密封件之间设有第二垫圈。
  18. 如权利要求1所述的密封结构，其中，所述第一结构件从所述挡板的第二侧面所在的一侧穿入所述第一通孔中；所述第一通孔靠近所述第一侧面的一端设有限位台；待密封件穿过所述第一通孔和所述内孔；
    所述密封组件包括第五密封件，所述第五密封件设于所述第一通孔内，所述第五密封件套设在待密封件上，且位于所述限位台与所述第一结构件之间。
  19. 如权利要求18所述的密封结构，其中，所述第一结构件的外壁设有第二外螺纹，所述第一通孔的内壁设有与所述第二外螺纹匹配的第二内螺纹。
  20. 如权利要求1所述的密封结构，其中，所述第一结构件的材质是导电材料，且所述第一结构件的外表面与所述第一通孔的内壁面之间设有绝缘层。
  21. 如权利要求1所述的密封结构，其中，所述第一结构件的材质为绝缘材料；和/或，所述密封组件的材质为绝缘材料。
  22. 一种真空炉，其包括权利要求1-21任一项的密封结构，所述真空炉包括炉体，所述炉体的侧壁上设有开口，所述密封结构通过所述挡板设置于所述开口处。
PCT/CN2023/081578 2022-03-15 2023-03-15 一种密封结构及真空炉 WO2023174323A1 (zh)

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