WO2023165623A1 - Optical device manufacturing method - Google Patents

Optical device manufacturing method Download PDF

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Publication number
WO2023165623A1
WO2023165623A1 PCT/CN2023/079903 CN2023079903W WO2023165623A1 WO 2023165623 A1 WO2023165623 A1 WO 2023165623A1 CN 2023079903 W CN2023079903 W CN 2023079903W WO 2023165623 A1 WO2023165623 A1 WO 2023165623A1
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WO
WIPO (PCT)
Prior art keywords
optical device
optical
manufacturing
glue
liquid
Prior art date
Application number
PCT/CN2023/079903
Other languages
French (fr)
Chinese (zh)
Inventor
谈顺毅
Original Assignee
上海慧希电子科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from CN202210311237.6A external-priority patent/CN114624843B/en
Application filed by 上海慧希电子科技有限公司 filed Critical 上海慧希电子科技有限公司
Publication of WO2023165623A1 publication Critical patent/WO2023165623A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/025Mountings, adjusting means, or light-tight connections, for optical elements for lenses using glue

Definitions

  • the present invention relates to the field of optical devices, in particular to a manufacturing method of optical devices.
  • Patent document CN211838918U discloses a UV irradiation light box for optical lens gluing, through which the optical lens is irradiated and exposed after gluing, and then the optical lens solidifies the glue on the interface, so that the optical lens is successfully glued, but after the glue solidifies, there may be The phenomenon that the overflow adheres to the surface of the optical lens has a bad influence on the imaging of the optical lens.
  • the present invention proposes a method for accurately exposing the glued area combined with an optical mask, which can cure the glue or filling material in the area that needs to be exposed, while the overflowing glue or material outside the boundary line or surface is due to If it is not cured by exposure, it will be clearly removed by subsequent processes.
  • the at least one first optical device and the at least one second optical device are manufactured as a whole by gluing or filling.
  • the manufacturing method includes exposing the second optical device area or part of the second optical device area, and shielding the first optical device area or part of the first optical device area;
  • the second optical device fills a part of the first optical device with a liquid material filler, and solidifies the filling material to form a complete device including the second optical device;
  • the shaded area is realized through an optical mask
  • the manufacturing method also includes applying force on the optical device during the exposure process, so that the surface Smooth surface;
  • the method of applying force includes making a surface of the mask body to be consistent with a surface of the optical device after molding, and applying a certain force on the mask to adhere to the surface for exposure;
  • the mask body is made of a material that will not be pasted by glue or cured material
  • the method of applying force includes making one surface of the mask body to be consistent with the shape of a surface of the optical device after molding, and between the mask body and the first optical device and/or the second optical device There is also a layer of material that will not be pasted by glue or cured material, and the mask body will be attached to the material that will not be pasted by glue or cured material by applying a certain force.
  • the above materials are bonded on the surface of the device for exposure;
  • the manufacturing method further includes cleaning the first optical device and/or the second optical device or cleaning the unexposed area after exposure;
  • polishing or grinding the surface of the first optical device and/or the second optical device after exposure polishing or grinding the surface of the first optical device and/or the second optical device after exposure
  • an alignment mark is made on the surface of the first optical device and/or the second optical device, and after passing through the alignment mark alignment mask and/or the first optical device and/or the second optical device, the device is exposure and curing;
  • first optical device and/or the second optical device has a multilayer structure
  • first optical device and/or the second optical device is made with a flow guide groove, and the flow guide groove can be made inside the first and/or second optical device, and its outlet is at the edge of the device (no need for transparent on surfaces passing ambient or image light);
  • At least part of the interface of the first optical device and/or the second optical device is coated with a reflective or partially reflective film layer, for example, the surface or part of the surface at the interface between the first optical device and the second optical device is coated with The film layer that reflects S light and transmits P light, and the surface or part of the surface corresponding to the second optical device is coated with a film layer that absorbs S light and transmits P light, so that the S light in the ambient light will not pass through Stray light is generated by uncontrolled reflection into the optical path at the interface;
  • the temperature of the second optical device or part of the second optical device is different from that of the first optical device when they are assembled;
  • a method for manufacturing an optical device at least one first optical device and a tool or mold whose shape matches that of the second optical device, the first optical device is manufactured first, and then fixed on the tool or mold In , the liquid optical material is filled to form the second optical device.
  • liquid optical material is cured, and then the mold is removed to form the whole device.
  • the pouring port of the tool for pouring the liquid optical material is closed to make a complete device.
  • an optical device comprising a first optical device and at least one second optical device, including at least one light-transmitting and/or light-reflecting working surface, when assembling the first optical device and the second optical device, At the interface portion of the first and second optical devices on the working surface, the corresponding interface portion is bonded using a tool that is complementary to the surface shape of the corresponding portion of the two surfaces.
  • the tooling can be subsequently removed, or the tooling itself can also be a part of the device, and the whole device can be made after being glued.
  • the glue or optical liquid is cured by light and/or heat.
  • the glue or optical liquid cannot overflow from the working surface, the tool will not be adhered by the glue or the optical liquid, and can be removed from the cured device.
  • the first or second optical device includes an opening or a guide channel for injecting and/or exporting glue or optical liquid, and the opening or guide channel is located on other surfaces of the non-working surface.
  • Fig. 1 is a schematic diagram of the three-dimensional docking structure of the main body of one embodiment of the present invention
  • Fig. 2 is a schematic diagram of the planar main body structure of one of the embodiments of the present invention.
  • Fig. 3 is a side view sectional structure schematic diagram of the main body of one embodiment of the present invention.
  • Fig. 4 is a schematic diagram of the structure of the mask plate applying pressure to the mask body according to one embodiment of the present invention.
  • Fig. 5 is a schematic diagram of the structure of the diversion groove inside the main body of one embodiment of the present invention.
  • Fig. 6 is a schematic diagram of the device docking structure under the main body of one embodiment of the present invention.
  • Fig. 7 is a schematic diagram of a side view cross-sectional structure of a curved surface according to one embodiment of the present invention.
  • Fig. 8 is a schematic diagram of the planar structure of the docking surface of the first optical device and the second optical device according to one embodiment of the present invention.
  • Fig. 9 is a schematic structural diagram of the placing and assembling machine for the first optical device and the second optical device according to one embodiment of the present invention.
  • Fig. 10a is the side view of the section of embodiment four;
  • Figure 10b is a schematic structural diagram of Embodiment 4.
  • Figure 11 is a schematic diagram of clamping the upper and lower working surfaces using fixtures.
  • the figure shows: 1. the first optical device; 2. the second optical device; 3. the mask body; 4. the mask plate; 5. the diversion groove; 6. the diversion channel.
  • a part of the surface where the first optical device 1 and the second optical device 2 intersect is coated with a reflective film layer.
  • the curved surface at the interface between the first optical device 1 and the second optical device 2 on the right is coated with a polarized reflective film.
  • the polarized image light transmitted from the outside is coupled into the inside of the first optical device 1, and the curved surface at the junction of the first optical device 1 and the left second optical device 2 is also coated with a polarized reflective film, which can transmit the inside of the first optical device 1
  • the incoming image light is reflected and coupled out of the first optical device 1 from the lower surface of the first optical device 1;
  • the surface type of the second optical device 2 is complementary to that of the first optical device 1, and the refractive index of the material is the same as or similar to that of the first optical device 1, and the multiple interfaces of the first and second optical device 2 are coated with the refractive index and the device Embed the second optical device 2 into the first optical device 1 after the same or similar UV glue.
  • the mask plate 4 is placed on the surface of the device to be exposed (for example, the distance between the mask plate 4 and the device surface is 5 um).
  • the mask plate 4 body is a transparent material (at least transparent to the ultraviolet band used for exposure), and a mask body 3 that can block light is made on the surface opposite to the device, and a graphic structure with a precision of 2um is made on the mask body 3.
  • the graphic structure allows the light in the area to be exposed to pass through, while the light in other areas will be blocked. as shown in picture 2.
  • parallel light can be used to expose and cure (or pre-cure) the device from the other side of the mask plate 4, the glue in the area of the second optical device 2 will be cured, and the glue overflowing from the edge Because it is blocked by the mask body 3, it will not be exposed and cured.
  • the unexposed glue in the edge area of the interface can be removed (for example, wiped or removed by ultrasonic cleaning);
  • the glue can be cured again to make the glue more firm.
  • Re-curing can use re-exposure (you can continue to use the mask body 3, or you can expose the entire device without using the mask body 3), or you can also use the method of heating and drying in an incubator (thermal curing);
  • a grinding/polishing step such as using a grinding machine with a mesh size of 5000 or more Polish the surface containing the interface with an agent to remove possible residual glue and obtain a better surface quality
  • the temperature of the two devices can also be made different during the step of embedding the second optical device 2 into the first optical device 1, and it is easier to use the principle of thermal expansion and contraction.
  • the realization of the embedded process in this example, the second optical device 2 is fully or partially embedded in the first optical device 1.
  • the embedded second optical device The temperature of 2 is lower than the temperature of the first optical device 1 (for example, the first optical device is 50°, the second optical device is 20°), and an appropriate amount of optical glue is applied on the interface between the first optical device 1 and the second optical device 2, After the second optical device 2 is embedded in a suitable position, the two devices are brought to the same temperature (such as the temperature during actual use), and then subsequent steps such as exposure and curing are performed;
  • the mask plate 4/mask body 3 can be made of materials that cannot be bonded by optical glue, and the surface quality of the mask plate 4 can be made very high.
  • Membrane 4 is pressed on the device and a certain pressure is applied.
  • the area of action of the force can be set on the area to be exposed (it can make the glue overflow to the non-exposed area to prevent the glue from overflowing to the area to be exposed). Exposure by contact exposure method. The glue spilled after the exposure is not exposed and it is difficult to adhere to the mask plate 4, and can be easily removed after the mask body 3 is removed.
  • the advantage of doing this is that it is easy to obtain higher exposure precision, and the setting of the exposure machine is also relatively simple (without considering the problem of the inclination angle between the mask plate 4 and the device).
  • the lower surface of the first optical device 1 needs to be placed on a flat surface to ensure that the device will not be displaced or tilted due to the unevenness of the lower contact surface when the mask plate 4 is pressed together;
  • the bottom of the second optical device 2 is a plane (as shown in FIG. 8 ), then when the mask plate 4 is pressed together, partly because the bottom of the device 2 will pass through the device 1, thus The bottom of the device must also be fixed on a flat surface consistent with the bottom of the device, so as to ensure that the bottom of device 2 is on the same plane as the bottom of device 1;
  • a diversion groove 5 can also be reserved at the junction of the device 1 and the device 2 at the bottom of the assembly machine (as shown in Figure 9, it can also be set on the top in some embodiments) , the glue overflowing from the bottom will flow into the diversion groove 5 without remaining on the surface of the device.
  • a vacuum pump can also be installed outside the diversion groove 5 to further reduce or eliminate glue residue by vacuuming the diversion groove 5;
  • a layer of film (such as 5um thickness) that cannot be bonded by optical glue can also be added between the mask plate 4/mask body 3 and the device, and the mask plate 4 and the film
  • the surface quality can be made very high.
  • the mask plate 4 is pressed on the film, and the film is pressed on the device again, and a certain pressure is applied.
  • the action area of the force can be set on the area that needs to be exposed (it can make the glue overflow to the non-exposed area to prevent the glue from overflowing to the area to be exposed), and the contact exposure method is used for exposure.
  • the glue spilled after the exposure is not exposed and it is difficult to adhere to the film, and can be easily removed after the mask plate 4 and the film are removed.
  • the advantage of doing this is that it is easy to obtain higher exposure precision, and the setting of the exposure machine is also relatively simple (without considering the problem of the inclination angle between the mask plate 4 and the device).
  • the film can be reused or easily replaced after being damaged, without considering the loss of the mask plate 4 due to contact;
  • positioning marks can also be made on the surface of the device to be processed (such as the "ten" mark in Figure 1), and the positioning marks can be added to the above-mentioned marks in the mold (the device and the mark are integrally manufactured through the same set of molds) Higher), or the positioning mark can also be processed after the mold is formed.
  • a similar positioning mark can also be made on the mask plate 4.
  • the mask plate 4 and the device can be adjusted to a predetermined relative position by using a high-precision machine through the positioning mark through equipment such as an electronic magnifying glass microscope, It may be that the positioning mark on the device is aligned with the positioning mark of the mask body 3 , or the positioning mark on the device is aligned with the edge of the mask body 3 . So as to achieve high-precision exposure;
  • the surface of the first optical device 1 can also be curved, as shown in Figure 3 and Figure 4, the substrate of the mask plate 4 is also made to be consistent with the surface to be exposed
  • the curved surface is attached to the surface of the device and a certain pressure is applied (as shown in Figure 4), so that the device with a curved surface such as spectacle lenses can be processed and manufactured.
  • the first optical device 1 is the same as the previous embodiment, and the manufacturing method of the second optical device 2 is different from the previous embodiment.
  • the mask plate 4 mask body 3
  • the mask plate 4 may be a layer of thin film on the surface that does not adhere to the above-mentioned liquid material
  • the mask plate 4 is removed, and since the surface quality of the mask body 3 is very good, the surface formed after exposure will also have high quality.
  • Cleaning removes unexposed material in the overflow exposure area (second optics 2 area).
  • the second optical device 2 is fabricated (the first optical device 1 is equivalent to a mould);
  • the device can also be cured again (such as exposure, heating and baking, etc.).
  • the surface can also be polished to obtain higher optical quality;
  • the non-optical working surface on the side of the first optical device 1 is provided with a guide channel 6 leading to the area of the second optical device 2 (as shown in FIG. 5 ).
  • a force is applied to form a whole, and then the liquid material is injected into the area of the second optical device 2 through the flow guide channel.
  • the flow guide channel on the mask plate 4 The area where it is located is also an unshielded light-permeable area.
  • the area of the second optical device 2 and the guide channel are filled with material and solidified to form the whole device, and the uncured material overflowing from the optical working surface can be cleaned to obtain a complete device.
  • a multi-layer structure may also be included, and each layer is glued and manufactured separately.
  • the thin film of special function for example plays 1/4 glass plate effect, plays polarizer effect etc.
  • the second optical device 2 needs to be glued on the above surface.
  • the first optical device 1 and the second optical device 2 on the lower surface can be first bonded together, as shown in Figure 6, after being cured by pressing and exposing the aforementioned mask body 3, and then As shown in Figure 7, the first optical device 1 assembled for the first time and the second optical device 2 on the upper layer are bonded together, and are cured by pressing and exposing;
  • the boundary line of the rear surface made as a whole is already at the edge or outside of the optical working area, and the glue overflows
  • the residue has little influence on the operation of the device, and it can also be directly exposed and cured without using the exposure method of the mask body 3;
  • the first and second optical devices 2 can be made together first, and then the third device can be made on the completed first and second optical devices 2, or the second and third optical devices can be made first. The process of making the devices together and then making them together with the first optical device 1 .
  • the present invention provides a method for manufacturing an optical device, comprising the at least one first optical device (such as 1 in FIG. 10a and FIG. 10b ) and a tool or mold whose shape conforms to that of the second optical device.
  • the first optical device is manufactured first, fixed in the mold, and filled with liquid optical material to form the second optical device.
  • the advantage of doing this is that the second optical device and the whole device are directly molded by optical liquid or glue without a subsequent gluing process.
  • the first optical device may be integrally manufactured through a mold, or may be spliced by multiple optical devices.
  • the surface or part of the surface of the first optical device is coated with a special film (such as a polarized reflective film or a semi-transparent and semi-reflective film).
  • the first optical device may be pasted on the specific position of the tool by glue, or holes may be opened in the part corresponding to some surfaces of the tool and the first optical device, and there is a channel for air extraction outside the hole,
  • the first optical device is fixed on a specific position of the mold or tool by drawing vacuum through an air pump.
  • the potting holes (for potting glue or optical liquid) of the mold or fixture can be located on the non-opaque surface of the device.
  • the liquid optical material is solidified, and then the mold is removed to form a device as a whole.
  • the cured material may have the same or similar refractive index as the first optical device.
  • the curing may be photocuring, for example using UV light exposure. Or it can also be heat curing, heating or cooling the device, for example, heating the whole device to a temperature that can cure the optical glue or liquid but will not melt or irreversibly deform the first optical device, thereby curing the optical liquid.
  • the mold is removed to complete the fabrication of the device.
  • the advantage of this method is that there is no gluing process, so there are no problems such as overflow of glue, and the surface quality is better.
  • the pouring port of the tool for pouring the liquid optical material is closed to make a complete device.
  • the form itself is part of the device, and the form may be transparent in at least part of its area.
  • the part of the device that requires higher precision can be integrated into the first optical device through the mold, and the other parts that require lower precision can be made into the shape of the tool, as long as the first optical device is fixed on the tool with lower precision. (for example, glued by glue), then filled with optical liquid, and then closed the pouring port that is not located on the light-transmitting working surface to make the device as a whole.
  • the advantage of this is that there is no gluing process, the surface quality is high, and the demoulding process can be omitted, and the design is more flexible.
  • a method of manufacturing an optical device comprising a first optical device (1 in FIG. 11 ) and at least one second optical device (2 in FIG. 11 ), comprising at least one light-transmitting and/or light-reflecting working surface, assembling the first
  • the optical device and the second optical device are used, on the interface of the first and second optical devices on the working surface, use a tool that is complementary to the surface type of the corresponding part of the two surfaces to fit the corresponding interface (the first and the first in Figure 11
  • the complementary surfaces of the two optical devices are two independent single curved surfaces, or multiple continuous curved surfaces/planes/Fresnel surfaces in other embodiments), so that glue or optical liquid cannot overflow from the working surface.
  • Optical devices generally include a light-transmitting or reflective working surface and a non-light-transmitting or reflective working surface. As shown in Figure 11, a complete device includes two light-transmitting and light-reflecting working surfaces.
  • a tool that is complementary to the interface of the first and second optical devices on the entire working surface or the interface of the first and second optical devices on the working surface to clamp the junction of the first optical device and the second optical device on the working surface (or the entire working surface), make the entire junction area
  • the domain forms a closed area except for the filling port, and the poured liquid cannot overflow from any area on the working surface.
  • the glue or optical liquid is cured by light and/or heat.
  • the glue can be cured by UV exposure or heat.
  • the tool can also be made of a transparent material, which can allow UV light for exposure to pass through.
  • the fixture will not be adhered by glue or optical liquid and can be removed from the cured device.
  • the tool is made of a material that will not be adhered by the glue used, or a film that will not be adhered by the glue used is pasted on the surface of the tool, and the tool can be easily removed after curing.
  • the first or second optical device includes an opening or a guide channel for injecting and/or exporting glue or optical liquid, and the opening or guide channel is located on other surfaces of the non-working surface.
  • the opening for injecting glue as a filling port may be on any non-working surface of the first optical device, or may also be on any non-working surface of the second optical device, or there may be multiple filling ports at the same time.
  • the pouring port guides the optical liquid or glue to each interface of the first and second optical devices through the guide channel.
  • the guide channel is generally arranged in the edge area of the device, and has little influence on the actual light propagation.
  • the guide channel will be filled with the glue after curing, which will not have a great impact on the propagation of light.
  • the outlet can guide excess glue to be discharged from the outlet, and the outlet interface can also be connected to equipment such as a vacuum pump, so that the glue or optical liquid can flow through the entire glued area from the injection port more easily and then discharge the excess from the outlet.
  • the opening for injection and outlet can also be the same opening, which is used for perfusing and discharging excess liquid at the same time.
  • the tool itself can also be a part of the complete device, and by gluing the tool, the first device and the second device together, the work of the interface between the first device and the second device can be made The surface is wrapped inside the complete device, and the interface line will not produce obvious marks due to the filling of glue or optical liquid.
  • glue or optical liquid also needs to be filled on the interface between the bonding tool and the first and second optical devices (it can be solidified or kept in a liquid state, and if it is kept in a liquid state, the boundary line of the non-working surface needs to be closed)
  • the tool may also include at least one complete working surface, and the boundary line between the first device and the second device is on the non-working surface of the device, which will not affect the optical imaging.
  • the present invention has the following beneficial effects:
  • the present invention installs above the first optical device through the mask plate and the mask body, so that the second optical device can Enough to meet the exposure requirements, and then the glue between the second optical device and the first optical device is solidified, and at the same time, the glue on the interface between the second optical device and the first optical device overflows to the surface of the first optical device, thereby utilizing the first optical device
  • the mask body on the first optical device blocks the overflowing glue, so as to avoid affecting the overall imaging clarity after the glue is exposed and solidified on the surface of the first optical device;
  • the present invention shields the overflowing glue through the combination of the mask body and the mask plate, and the overflowing glue will not solidify due to exposure, and the fluid glue can be made on the surface of the first optical device relative to the solid glue. To fast cleaning, improve the cleanliness of this equipment;
  • the present invention adopts the design of the diversion groove.
  • the glue will flow out from the diversion groove and will not be in the first optical device.
  • the surface stays solidified, which affects the imaging of the first optical device, so the design of the diversion groove enhances the applicability of the device;

Abstract

An optical device manufacturing method. A mask body (3) is used to cover glue overflowing from the periphery of a second device (2) caused by bonding the second device (2) to a first device (1), and the mask body (3) is configured in such a way that a portion facing a front surface of the second device (2) is a light-transmitting area, and other areas except for the light-transmitting area are light-tight areas, the light-tight areas being partially or completely covered with a front surface of the first device (1); the mask body (3) is arranged above the first device (1), such that the second device (2) can meet exposure requirements; moreover, the glue between the second device (2) and the first device (1) is solidified, and the glue on an interface between the second device (2) and the first device (1) overflows to the surface of the first device (1), such that the overflowed glue is shielded by the mask body (3) on the first device (1), preventing the glue from affecting the overall imaging definition after the glue is exposed and solidified on the surface of the first device (1).

Description

光学器件制作方法Optical device fabrication method 技术领域technical field
本发明涉及光学器件领域,具体地,涉及光学器件制作方法。The present invention relates to the field of optical devices, in particular to a manufacturing method of optical devices.
背景技术Background technique
在当今的社会中,随着科技的逐渐发展,光学透镜的出现,在VR、数码相机、光学机器等各个领域都有着广泛的应用;In today's society, with the gradual development of science and technology, the emergence of optical lenses has been widely used in VR, digital cameras, optical machines and other fields;
传统光学透镜在胶合时多余的胶水一般从镜片侧面的非工作面溢出,即使不处理也不会影响最终的成像质量。但器件工作面上存在所胶合的部件的交界线或面时,将会产生胶水溢出,造成表面不平整从而影响光线透过,对成像产生不良影响;When traditional optical lenses are glued, the excess glue usually overflows from the non-working surface of the lens side, even if it is not processed, it will not affect the final image quality. However, when there is a boundary line or surface of the glued parts on the working surface of the device, the glue will overflow, causing the surface to be uneven, which will affect the light transmission and have a negative impact on the imaging;
专利文献CN211838918U公开了一种用于光学透镜胶合的紫外线照射灯箱,通过紫外线对光学透镜在胶合后照射曝光,进而光学透镜对接口的胶水进行凝固,使光学透镜胶合成功,但胶水凝固后可能出现溢出在光学透镜表面附着的现象,对光学透镜的成像产生不良影响。Patent document CN211838918U discloses a UV irradiation light box for optical lens gluing, through which the optical lens is irradiated and exposed after gluing, and then the optical lens solidifies the glue on the interface, so that the optical lens is successfully glued, but after the glue solidifies, there may be The phenomenon that the overflow adheres to the surface of the optical lens has a bad influence on the imaging of the optical lens.
发明内容Contents of the invention
针对现有技术中的缺陷,本发明提出了一种结合光学掩膜精确曝光胶合区域的方法,可将需要曝光区域的胶水或填充材料固化,而交界线或面之外的溢出胶水或材料由于未被曝光固化,将可以被后续工序清晰去除。Aiming at the defects in the prior art, the present invention proposes a method for accurately exposing the glued area combined with an optical mask, which can cure the glue or filling material in the area that needs to be exposed, while the overflowing glue or material outside the boundary line or surface is due to If it is not cured by exposure, it will be clearly removed by subsequent processes.
根据本发明提供的一种光学器件制作方法,其特征在于:所述至少一个第一光学器件和至少一个第二光学器件,通过胶合或填充的方式制作成整体。所述制作方法包括曝光第二光学器件区域或部分第二光学器件区域,遮蔽第一光学器件区域或部分第一光学器件区域;According to a manufacturing method of an optical device provided by the present invention, it is characterized in that: the at least one first optical device and the at least one second optical device are manufactured as a whole by gluing or filling. The manufacturing method includes exposing the second optical device area or part of the second optical device area, and shielding the first optical device area or part of the first optical device area;
进一步地,所述制作方法,所述第二光学器件通过使用液态材料填充物填充第一光学器件部分区域,固化填充材料后制成包含第二光学器件的完整器件;Further, in the manufacturing method, the second optical device fills a part of the first optical device with a liquid material filler, and solidifies the filling material to form a complete device including the second optical device;
进一步地,所述制作方法,被遮蔽的所述区域通过光学掩膜实现;Further, in the manufacturing method, the shaded area is realized through an optical mask;
进一步地,所述制作方法还包括曝光过程中在光学器件上施加作用力,使得表 面平整;Further, the manufacturing method also includes applying force on the optical device during the exposure process, so that the surface Smooth surface;
进一步地,施加作用力的所述方法包括将掩膜体一个表面制作成与成型后光学器件一个表面面型一致,将所述掩膜施加一定的力贴合在所述表面上进行曝光;Further, the method of applying force includes making a surface of the mask body to be consistent with a surface of the optical device after molding, and applying a certain force on the mask to adhere to the surface for exposure;
进一步地,所述掩膜体采用不会被胶材或固化的材料粘贴的材料制成;Further, the mask body is made of a material that will not be pasted by glue or cured material;
进一步地,施加作用力的所述方法包括将掩膜体一个表面制作成与成型后光学器件一个表面面型一致,在所述掩膜体和所述第一光学器件和/或第二光学器件之间还有一层不会被胶材或固化后的材料粘贴的材料,将所述掩膜体施加一定的力贴合在所述不会被胶材或固化后的材料粘贴的材料上,所述材料贴合在器件表面上进行曝光;Further, the method of applying force includes making one surface of the mask body to be consistent with the shape of a surface of the optical device after molding, and between the mask body and the first optical device and/or the second optical device There is also a layer of material that will not be pasted by glue or cured material, and the mask body will be attached to the material that will not be pasted by glue or cured material by applying a certain force. The above materials are bonded on the surface of the device for exposure;
进一步地,所述制作方法还包括,曝光后清洗第一光学器件和/或第二光学器件或清洗未曝光区域;Further, the manufacturing method further includes cleaning the first optical device and/or the second optical device or cleaning the unexposed area after exposure;
进一步地,曝光之后再抛光或研磨第一光学器件和/或第二光学器件表面;Further, polishing or grinding the surface of the first optical device and/or the second optical device after exposure;
进一步地,对于所述第一光学器件和/或第二光学器件进行再次固化;Further, re-curing the first optical device and/or the second optical device;
进一步地,所述第一光学器件和/或第二光学器件表面制作有对位标志,通过对位标志对位掩膜和/或第一光学器件和/或第二光学器件后在对器件进行曝光和固化;Further, an alignment mark is made on the surface of the first optical device and/or the second optical device, and after passing through the alignment mark alignment mask and/or the first optical device and/or the second optical device, the device is exposure and curing;
进一步地,所述第一光学器件和/或第二光学器件具有多层结构;Further, the first optical device and/or the second optical device has a multilayer structure;
进一步地,所述第一光学器件和/或第二光学器件制作有导流槽,所述导流槽可以制作在第一和/或第二光学器件内部,其出口在器件边缘(不需要透过环境或图像光的表面上);Further, the first optical device and/or the second optical device is made with a flow guide groove, and the flow guide groove can be made inside the first and/or second optical device, and its outlet is at the edge of the device (no need for transparent on surfaces passing ambient or image light);
进一步地,分多次曝光第一光学器件和/或第二光学器件不同区域;Further, exposing different areas of the first optical device and/or the second optical device in multiple times;
进一步地,所述第一光学器件和/或第二光学器件至少部分交界面上镀有反射或部分反射性质的膜层,例如第一光学器件与第二光学器件交界的表面或部分表面镀上S光反射,P光透射的膜层,而第二光学器件与之对应的表面或部分表面上镀上S光吸收,P光透射的膜层,使得环境光中的S光不会在透过交界面时不受控的反射到光路内而产生杂光;Further, at least part of the interface of the first optical device and/or the second optical device is coated with a reflective or partially reflective film layer, for example, the surface or part of the surface at the interface between the first optical device and the second optical device is coated with The film layer that reflects S light and transmits P light, and the surface or part of the surface corresponding to the second optical device is coated with a film layer that absorbs S light and transmits P light, so that the S light in the ambient light will not pass through Stray light is generated by uncontrolled reflection into the optical path at the interface;
进一步地,所述第二光学器件或部分第二光学器件与第一光学器件装配时各自温度不同;Further, the temperature of the second optical device or part of the second optical device is different from that of the first optical device when they are assembled;
根据本发明提供一种光学器件制造方法,至少一个第一光学器件和形状与第二光学器件吻合的制具或模具,先制作出第一光学器件,将其固定在所述制具或模具之 中,填充液态光学材料形成第二光学器件。According to the present invention, there is provided a method for manufacturing an optical device, at least one first optical device and a tool or mold whose shape matches that of the second optical device, the first optical device is manufactured first, and then fixed on the tool or mold In , the liquid optical material is filled to form the second optical device.
进一步地,固化所述液态光学材料,然后去除所述模具,制成器件整体。Further, the liquid optical material is cured, and then the mold is removed to form the whole device.
进一步地,将所述制具的灌注所述液态光学材料的灌注口封闭,制成完整器件。Further, the pouring port of the tool for pouring the liquid optical material is closed to make a complete device.
根据本发明提供的一种光学器件制造方法,包含第一光学器件以及至少一个第二光学器件,包含至少一个透光和/或反光的工作表面,装配第一光学器件和第二光学器件时,在工作表面上第一和第二光学器件的交界部分,使用与两个表面对应部分面型互补的制具贴合相应交界部分。所述制具可以后续去除,或者所述制具本身也可以是器件的一部分,胶合后制成器件整体。According to a manufacturing method of an optical device provided by the present invention, comprising a first optical device and at least one second optical device, including at least one light-transmitting and/or light-reflecting working surface, when assembling the first optical device and the second optical device, At the interface portion of the first and second optical devices on the working surface, the corresponding interface portion is bonded using a tool that is complementary to the surface shape of the corresponding portion of the two surfaces. The tooling can be subsequently removed, or the tooling itself can also be a part of the device, and the whole device can be made after being glued.
进一步地,通过光固化和/或热固化所述胶水或光学液体。Further, the glue or optical liquid is cured by light and/or heat.
进一步地,胶水或光学液体无法从所述工作表面上溢出,所述制具不会被胶水或光学液体粘附,能够从固化后的器件上去除。Further, the glue or optical liquid cannot overflow from the working surface, the tool will not be adhered by the glue or the optical liquid, and can be removed from the cured device.
进一步地,第一或第二光学器件上包含注入和/或导出胶水或光学液体的开口或导流通道,所述开口或导流通道位于非工作面的其它表面上。Further, the first or second optical device includes an opening or a guide channel for injecting and/or exporting glue or optical liquid, and the opening or guide channel is located on other surfaces of the non-working surface.
附图说明Description of drawings
通过阅读参照以下附图对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显:Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:
图1为本发明其中一个实施例主体立体对接结构示意图;Fig. 1 is a schematic diagram of the three-dimensional docking structure of the main body of one embodiment of the present invention;
图2为本发明其中一个实施例平面主体结构示意图;Fig. 2 is a schematic diagram of the planar main body structure of one of the embodiments of the present invention;
图3为本发明其中一个实施例主体侧视剖面结构示意图;Fig. 3 is a side view sectional structure schematic diagram of the main body of one embodiment of the present invention;
图4为本发明其中一个实施例掩膜板对掩膜体压力施加结构示意图;Fig. 4 is a schematic diagram of the structure of the mask plate applying pressure to the mask body according to one embodiment of the present invention;
图5为本发明其中一个实施例主体内部导流槽结构示意图;Fig. 5 is a schematic diagram of the structure of the diversion groove inside the main body of one embodiment of the present invention;
图6为本发明其中一个实施例面主体下方器件对接结构示意图;Fig. 6 is a schematic diagram of the device docking structure under the main body of one embodiment of the present invention;
图7为本发明其中一个实施例曲面侧视剖面结构示意图;Fig. 7 is a schematic diagram of a side view cross-sectional structure of a curved surface according to one embodiment of the present invention;
图8为本发明其中一个实施例第一光学器件与第二光学器件对接面为平面结构示意图;Fig. 8 is a schematic diagram of the planar structure of the docking surface of the first optical device and the second optical device according to one embodiment of the present invention;
图9为本发明其中一个实施例第一光学器件与第二光学器件放置装配机台结构示意图;Fig. 9 is a schematic structural diagram of the placing and assembling machine for the first optical device and the second optical device according to one embodiment of the present invention;
图10a为实施例四的剖面的侧视图;Fig. 10a is the side view of the section of embodiment four;
图10b为实施例四的结构示意图; Figure 10b is a schematic structural diagram of Embodiment 4;
图11为上下工作面使用制具夹持的示意图。Figure 11 is a schematic diagram of clamping the upper and lower working surfaces using fixtures.
图中示出:1、第一光学器件;2、第二光学器件;3、掩膜体;4、掩模板;5、导流槽;6、导流通道。The figure shows: 1. the first optical device; 2. the second optical device; 3. the mask body; 4. the mask plate; 5. the diversion groove; 6. the diversion channel.
具体实施方式Detailed ways
下面结合具体实施例对本发明进行详细说明。以下实施例将有助于本领域的技术人员进一步理解本发明,但不以任何形式限制本发明。应当指出的是,对本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变化和改进。这些都属于本发明的保护范围。The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
实施例一:Embodiment one:
第一光学器件1与第二光学器件2交界的部分表面上镀有反射性膜层,图中第一光学器件1与右侧第二光学器件2交界的曲面上镀有偏振反射膜,可以将从外部传来的偏振图像光耦入第一光学器件1内部,第一光学器件1与左侧第二光学器件2交界的曲面上也镀有偏振反射膜,可以将第一光学器件1内部传来的图像光线反射后从第一光学器件1下表面耦合出第一光学器件1;A part of the surface where the first optical device 1 and the second optical device 2 intersect is coated with a reflective film layer. In the figure, the curved surface at the interface between the first optical device 1 and the second optical device 2 on the right is coated with a polarized reflective film. The polarized image light transmitted from the outside is coupled into the inside of the first optical device 1, and the curved surface at the junction of the first optical device 1 and the left second optical device 2 is also coated with a polarized reflective film, which can transmit the inside of the first optical device 1 The incoming image light is reflected and coupled out of the first optical device 1 from the lower surface of the first optical device 1;
第二光学器件2与第一光学器件1面型互补,材料的折射率与第一光学器件1相同或相近,在第一和第二光学器件2的多个交界面上涂覆折射率与器件相同或相近的UV胶后将第二光学器件2嵌入第一光学器件1。之后将掩膜板4设置在器件待曝光表面之上(例如掩膜板4与器件表面距离5um)。掩膜板4本体为透明材料(至少对曝光所用紫外波段透明),在与器件相对的表面上制作有可遮挡光线的掩膜体3,掩膜体3上制作有精度为2um的图形结构,图形结构使得需曝光区域的光线能够透过,而其它区域的光线将被遮挡。如图2所示。掩膜体3设置完毕后可使用平行光从掩膜板4的另一侧对器件进行曝光固化(或预固化),第二光学器件2区域内的胶水将被固化,而边缘溢出部分的胶水由于被掩膜体3遮挡,将不会被曝光固化。曝光完成后可将交界面边缘区域未被曝光的胶水去除(例如擦除或使用超声波清洗去除);The surface type of the second optical device 2 is complementary to that of the first optical device 1, and the refractive index of the material is the same as or similar to that of the first optical device 1, and the multiple interfaces of the first and second optical device 2 are coated with the refractive index and the device Embed the second optical device 2 into the first optical device 1 after the same or similar UV glue. Afterwards, the mask plate 4 is placed on the surface of the device to be exposed (for example, the distance between the mask plate 4 and the device surface is 5 um). The mask plate 4 body is a transparent material (at least transparent to the ultraviolet band used for exposure), and a mask body 3 that can block light is made on the surface opposite to the device, and a graphic structure with a precision of 2um is made on the mask body 3. The graphic structure allows the light in the area to be exposed to pass through, while the light in other areas will be blocked. as shown in picture 2. After the mask body 3 is set, parallel light can be used to expose and cure (or pre-cure) the device from the other side of the mask plate 4, the glue in the area of the second optical device 2 will be cured, and the glue overflowing from the edge Because it is blocked by the mask body 3, it will not be exposed and cured. After the exposure is completed, the unexposed glue in the edge area of the interface can be removed (for example, wiped or removed by ultrasonic cleaning);
完成上述残余胶水去除的步骤后,还可以再次固化胶水使得胶合更牢固。再次固化可以使用再次曝光(可以继续使用掩膜体3,或者也可以不使用掩膜体3整个器件一起曝光),或者也可以采用在温箱中加温烘干的方式(热固化);After completing the above steps of removing residual glue, the glue can be cured again to make the glue more firm. Re-curing can use re-exposure (you can continue to use the mask body 3, or you can expose the entire device without using the mask body 3), or you can also use the method of heating and drying in an incubator (thermal curing);
完成上述步骤后,还可以增加打磨/抛光的步骤,例如使用5000目以上的研磨 剂对包含交界面的表面进行抛光,从而去除可能的残留胶水,以及获得更好的表面质量;After completing the above steps, you can also add a grinding/polishing step, such as using a grinding machine with a mesh size of 5000 or more Polish the surface containing the interface with an agent to remove possible residual glue and obtain a better surface quality;
在此实施例中,考虑到器件本身的制造公差等因素,在将第二光学器件2嵌入第一光学器件1这一步骤时还可以使两器件温度不同,利用热胀冷缩原理来更容易的实现嵌合工艺(此例中第二光学器件2全部或部分嵌入第一光学器件1。若其它实施例采用非嵌入式设计,则一般无需采用此种工艺),嵌入式的第二光学器件2的温度低于第一光学器件1的温度(例如第一光学器件50°,第二光学器件20°),将第一光学器件1与第二光学器件2交界面上点上适量光学胶,待第二光学器件2嵌入到合适位置后,再使两器件达到同一温度(例如实际使用时的温度),之后再进行曝光固化等后续步骤;In this embodiment, considering factors such as the manufacturing tolerance of the device itself, the temperature of the two devices can also be made different during the step of embedding the second optical device 2 into the first optical device 1, and it is easier to use the principle of thermal expansion and contraction. The realization of the embedded process (in this example, the second optical device 2 is fully or partially embedded in the first optical device 1. If other embodiments adopt a non-embedded design, this process generally does not need to be used), the embedded second optical device The temperature of 2 is lower than the temperature of the first optical device 1 (for example, the first optical device is 50°, the second optical device is 20°), and an appropriate amount of optical glue is applied on the interface between the first optical device 1 and the second optical device 2, After the second optical device 2 is embedded in a suitable position, the two devices are brought to the same temperature (such as the temperature during actual use), and then subsequent steps such as exposure and curing are performed;
在此实施例的一个变形例中,掩膜板4/掩膜体3可以是使用无法被光学胶粘合的材料制作的,掩膜板4的表面质量可以做的很高,曝光前将掩膜板4压在器件上,并施加一定的压力,力的作用区域可以设置在需要被曝光的区域上(可以使胶水更偏向溢出到非曝光区域,防止胶水溢出到需曝光的区域),采用接触式曝光的方法曝光。曝光完毕后溢出的胶水即未被曝光也很难粘附住掩膜板4,将掩膜体3移走后可以被轻易去除。这么做的好处是容易获得更高的曝光精度,且曝光机台的设置也较为简单(不用考虑掩膜板4与器件之间存在倾斜角度的问题)。在这一实施例中,第一光学器件1的下表面需要放置在平整的表面上,保证掩膜板4压合时器件不会因为下部接触面不平整产生位移及倾斜等问题;In a modified example of this embodiment, the mask plate 4/mask body 3 can be made of materials that cannot be bonded by optical glue, and the surface quality of the mask plate 4 can be made very high. Membrane 4 is pressed on the device and a certain pressure is applied. The area of action of the force can be set on the area to be exposed (it can make the glue overflow to the non-exposed area to prevent the glue from overflowing to the area to be exposed). Exposure by contact exposure method. The glue spilled after the exposure is not exposed and it is difficult to adhere to the mask plate 4, and can be easily removed after the mask body 3 is removed. The advantage of doing this is that it is easy to obtain higher exposure precision, and the setting of the exposure machine is also relatively simple (without considering the problem of the inclination angle between the mask plate 4 and the device). In this embodiment, the lower surface of the first optical device 1 needs to be placed on a flat surface to ensure that the device will not be displaced or tilted due to the unevenness of the lower contact surface when the mask plate 4 is pressed together;
在此实施例的一个变形例中,第二光学器件2底部为一个平面(如图8),则在掩膜板4压合时,部分由于器件2底部将会从器件1中穿出,因而器件底部也必须固定在与器件底部面型一致的平整表面上,从而保证器件2底部与器件1底部位于同一平面上;In a modified example of this embodiment, the bottom of the second optical device 2 is a plane (as shown in FIG. 8 ), then when the mask plate 4 is pressed together, partly because the bottom of the device 2 will pass through the device 1, thus The bottom of the device must also be fixed on a flat surface consistent with the bottom of the device, so as to ensure that the bottom of device 2 is on the same plane as the bottom of device 1;
在此实施例的一个变形例中,还可以在装配机台底部器件1和器件2的交界线位置预留可导流槽5(如图9所示,一些实施例中也可设置在顶部),从底部溢出的胶水会流入导流槽5而不会残留在器件表面。此外,还可以在导流槽5外加装真空泵,通过对导流槽5吸真空的方式进一步减少或消除胶水残留;In a modified example of this embodiment, a diversion groove 5 can also be reserved at the junction of the device 1 and the device 2 at the bottom of the assembly machine (as shown in Figure 9, it can also be set on the top in some embodiments) , the glue overflowing from the bottom will flow into the diversion groove 5 without remaining on the surface of the device. In addition, a vacuum pump can also be installed outside the diversion groove 5 to further reduce or eliminate glue residue by vacuuming the diversion groove 5;
在此实施例的一个变形例中,掩膜板4/掩膜体3体3与器件之间还可以增加一层无法被光学胶粘合的薄膜(例如5um厚度),掩膜板4和薄膜的表面质量可以做的很高,曝光前将掩膜板4压在薄膜上,薄膜再压在器件上,并施加一定的压力, 力的作用区域可以设置在需要被曝光的区域上(可以使胶水更偏向溢出到非曝光区域,防止胶水溢出到需曝光的区域),采用接触式曝光的方法曝光。曝光完毕后溢出的胶水即未被曝光也很难粘附住薄膜,将掩膜板4和薄膜移走后可以被轻易去除。这么做的好处是容易获得更高的曝光精度,且曝光机台的设置也较为简单(不用考虑掩膜板4与器件之间存在倾斜角度的问题)。薄膜可以重复使用或者有损坏后也可以轻易更换,而不必考虑由于接触对掩膜板4的损耗;In a modified example of this embodiment, a layer of film (such as 5um thickness) that cannot be bonded by optical glue can also be added between the mask plate 4/mask body 3 and the device, and the mask plate 4 and the film The surface quality can be made very high. Before exposure, the mask plate 4 is pressed on the film, and the film is pressed on the device again, and a certain pressure is applied. The action area of the force can be set on the area that needs to be exposed (it can make the glue overflow to the non-exposed area to prevent the glue from overflowing to the area to be exposed), and the contact exposure method is used for exposure. The glue spilled after the exposure is not exposed and it is difficult to adhere to the film, and can be easily removed after the mask plate 4 and the film are removed. The advantage of doing this is that it is easy to obtain higher exposure precision, and the setting of the exposure machine is also relatively simple (without considering the problem of the inclination angle between the mask plate 4 and the device). The film can be reused or easily replaced after being damaged, without considering the loss of the mask plate 4 due to contact;
在此实施例中,还可以在待加工器件表面制作定位标志(如图1中的“十”字标志),定位标志可以是在模具中加入上述标志(器件与标志通过同一套模具一体制造精度较高),或者定位标志也可以是模具成型后再加工上去。掩膜板4上也可以制作相类似的定位标志,使用掩膜体3时可以通过电子放大镜显微镜等设备通过定位标志使用高精度的机台将掩膜板4与器件调节到预定的相对位置,可以是器件上的定位标志与掩膜体3的定位标志对齐,也可以是器件上的定位标志与掩膜体3的边缘对齐。从而实现高精度的曝光;In this embodiment, positioning marks can also be made on the surface of the device to be processed (such as the "ten" mark in Figure 1), and the positioning marks can be added to the above-mentioned marks in the mold (the device and the mark are integrally manufactured through the same set of molds) Higher), or the positioning mark can also be processed after the mold is formed. A similar positioning mark can also be made on the mask plate 4. When using the mask body 3, the mask plate 4 and the device can be adjusted to a predetermined relative position by using a high-precision machine through the positioning mark through equipment such as an electronic magnifying glass microscope, It may be that the positioning mark on the device is aligned with the positioning mark of the mask body 3 , or the positioning mark on the device is aligned with the edge of the mask body 3 . So as to achieve high-precision exposure;
在此实施例的一个变形例中,所述第一光学器件1表面还可以是曲面的,如图3和图4所示,所述掩膜板4的基板也制作成和所要曝光表面一致的曲面面型,贴合在器件表面上并施加一定的压力(如图4所示),这样可以对如眼镜镜片之类的表面面型为曲面的器件进行加工制造。In a modified example of this embodiment, the surface of the first optical device 1 can also be curved, as shown in Figure 3 and Figure 4, the substrate of the mask plate 4 is also made to be consistent with the surface to be exposed The curved surface is attached to the surface of the device and a certain pressure is applied (as shown in Figure 4), so that the device with a curved surface such as spectacle lenses can be processed and manufactured.
实施例二:Embodiment two:
此实施例中第一光学器件1与上一实施例相同,第二光学器件2的制造方法与上一实施例不同,在第一光学器件1预留的插入第二光学器件2的凹槽内填入固化后折射率与第一光学器件1相同或相近的液态材料,控制填入材料的量,使其刚刚充满第二光学器件2的空间,填满后将掩膜板4(掩膜体3表面上可附有一层不与上述液态材料黏连的薄膜)对位第一光学器件1并施加一定的压力覆盖在第一光学器件1上,然后曝光固化(预固化)。之后将掩膜板4移除,由于掩膜体3表面质量很好,所以曝光后形成的表面也将有很高的质量。清洗去除溢出曝光区(第二光学器件2区域)未被曝光的材料。从而将第二光学器件2制作出来(第一光学器件1相当于模具);In this embodiment, the first optical device 1 is the same as the previous embodiment, and the manufacturing method of the second optical device 2 is different from the previous embodiment. Fill in the liquid material whose cured refractive index is the same or close to that of the first optical device 1, control the amount of the filling material so that it just fills the space of the second optical device 2, and place the mask plate 4 (mask body 3 There may be a layer of thin film on the surface that does not adhere to the above-mentioned liquid material) align the first optical device 1 and apply a certain pressure to cover the first optical device 1, and then expose and cure (pre-cure). Afterwards, the mask plate 4 is removed, and since the surface quality of the mask body 3 is very good, the surface formed after exposure will also have high quality. Cleaning removes unexposed material in the overflow exposure area (second optics 2 area). Thereby the second optical device 2 is fabricated (the first optical device 1 is equivalent to a mould);
在上述步骤之后还可以再次固化(如曝光,加温烘烤等)器件。还可以将表面抛光获得更高的光学质量; After the above steps, the device can also be cured again (such as exposure, heating and baking, etc.). The surface can also be polished to obtain higher optical quality;
在上述实施例的一个变形例中,第一光学器件1侧边的非光学工作面上开有通向第二光学器件2区域的导流通道6(如图5所示),先将第一光学器件1与掩膜板4对位后施加作用力压合成一个整体,再将液态材料哦通过导流通道注入第二光学器件2区域,与先前不同的是,掩膜板4上导流通道所在区域也是未遮蔽的可通光区域。曝光后第二光学器件2区域与导流通道都被材料填充并固化形成器件整体,清洗光学工作表面溢出的未固化材料即可获得完整器件。In a modified example of the above-mentioned embodiment, the non-optical working surface on the side of the first optical device 1 is provided with a guide channel 6 leading to the area of the second optical device 2 (as shown in FIG. 5 ). After the optical device 1 and the mask plate 4 are aligned, a force is applied to form a whole, and then the liquid material is injected into the area of the second optical device 2 through the flow guide channel. Unlike before, the flow guide channel on the mask plate 4 The area where it is located is also an unshielded light-permeable area. After exposure, the area of the second optical device 2 and the guide channel are filled with material and solidified to form the whole device, and the uncured material overflowing from the optical working surface can be cleaned to obtain a complete device.
实施例三:Embodiment three:
在本发明的变形例中,也可以包含多层结构,一层层分别胶合制作。如图6和图7所示的实施例,第一光学器件1下表面与部分第二光学器件2交界面上镀有特殊功能的薄膜(例如起1/4玻片作用,起偏振片作用等),镀膜完成后需要将第二光学器件2胶合在上述表面上。制造相关器件时,可以先将其中的第一光学器件1与下表面的第二光学器件2贴合在一起,如图6所示,使用前述掩膜体3压合曝光的方式固化后,再如图7所示将经过第一次装配的第一光学器件1与上层的第二光学器件2贴合在一起,采用压合曝光的方式固化;In the modified example of the present invention, a multi-layer structure may also be included, and each layer is glued and manufactured separately. The embodiment shown in Figure 6 and Figure 7, the thin film of special function (for example plays 1/4 glass plate effect, plays polarizer effect etc. ), after the coating is completed, the second optical device 2 needs to be glued on the above surface. When manufacturing related devices, the first optical device 1 and the second optical device 2 on the lower surface can be first bonded together, as shown in Figure 6, after being cured by pressing and exposing the aforementioned mask body 3, and then As shown in Figure 7, the first optical device 1 assembled for the first time and the second optical device 2 on the upper layer are bonded together, and are cured by pressing and exposing;
此实施例的一个变形例中,由于与第一光学器件1下表面交界的第二光学器件2面积很大,制作成整体后表面的交界线已处于光学工作区域的边缘或外侧,胶水的溢出残留对器件工作影响较小,此处也可不采用掩膜体3曝光的方式而直接曝光固化即可;In a modified example of this embodiment, since the second optical device 2 bordering the lower surface of the first optical device 1 has a large area, the boundary line of the rear surface made as a whole is already at the edge or outside of the optical working area, and the glue overflows The residue has little influence on the operation of the device, and it can also be directly exposed and cured without using the exposure method of the mask body 3;
此实施例的一个变形例中,还可以存在第三器件,定义是不与第一光学器件1交界,与第二光学器件2交界(还可以存在第四,第五或更多器件,定义类推)。加工制造时可以采取先将第一和第二光学器件2制作在一起,再将第三器件制作在完成的第一第二光学器件2上的工序,或者也可以采取先将第二和第三器件制作在一起,然后再与第一光学器件1制备在一起的工序。In a modified example of this embodiment, there may also be a third device, which is defined as not interfacing with the first optical device 1 and interfacing with the second optical device 2 (there may also be fourth, fifth or more devices, and the definition is analogous ). During manufacturing, the first and second optical devices 2 can be made together first, and then the third device can be made on the completed first and second optical devices 2, or the second and third optical devices can be made first. The process of making the devices together and then making them together with the first optical device 1 .
实施例四:Embodiment four:
本发明提供一种光学器件制造方法,包含所述至少一个第一光学器件(例如图10a、图10b中的1)以及形状与第二光学器件吻合的制具或模具。先制作出第一光学器件,将其固定在所述模具之中,填充液态光学材料形成第二光学器件。这么做的好处是无需后续的胶合工序,通过光学液体或胶水直接成型第二光学器件及器件整体。 第一光学器件可以是通过模具一体制造的,也可以是多个光学器件拼接而成的。第一光学器件表面或部分表面镀有特殊薄膜(例如偏振反射膜或半透半反膜)。第一光学器件可以是通过胶水粘贴在所述制具特定位置上的,或者也可以是所述制具与第一光学器件某些表面对应部分开有孔洞,孔洞外部有抽气用的通道,通过抽气泵抽真空将第一光学器件固定在所述模具或制具的特定位置上。所述模具或制具的灌注孔(用于灌注胶水或光学液体)可以位于器件的非透光表面上。The present invention provides a method for manufacturing an optical device, comprising the at least one first optical device (such as 1 in FIG. 10a and FIG. 10b ) and a tool or mold whose shape conforms to that of the second optical device. The first optical device is manufactured first, fixed in the mold, and filled with liquid optical material to form the second optical device. The advantage of doing this is that the second optical device and the whole device are directly molded by optical liquid or glue without a subsequent gluing process. The first optical device may be integrally manufactured through a mold, or may be spliced by multiple optical devices. The surface or part of the surface of the first optical device is coated with a special film (such as a polarized reflective film or a semi-transparent and semi-reflective film). The first optical device may be pasted on the specific position of the tool by glue, or holes may be opened in the part corresponding to some surfaces of the tool and the first optical device, and there is a channel for air extraction outside the hole, The first optical device is fixed on a specific position of the mold or tool by drawing vacuum through an air pump. The potting holes (for potting glue or optical liquid) of the mold or fixture can be located on the non-opaque surface of the device.
固化所述液态光学材料,然后去除所述模具,制成器件整体。固化后的材料折射率可以与第一光学器件相同或相近。所述固化可以是光固化,例如使用UV光曝光。或者也可以是热固化,加热或降温器件,例如将器件整体加热到能够是光学胶或液体固化但不会使第一光学器件融化或不可逆变形的温度,从而使光学液体固化。之后在脱去所述模具,完成器件的制作。这种方法的好处在于不存在胶合工序,也就不存在溢胶等问题,表面质量更好。The liquid optical material is solidified, and then the mold is removed to form a device as a whole. The cured material may have the same or similar refractive index as the first optical device. The curing may be photocuring, for example using UV light exposure. Or it can also be heat curing, heating or cooling the device, for example, heating the whole device to a temperature that can cure the optical glue or liquid but will not melt or irreversibly deform the first optical device, thereby curing the optical liquid. Afterwards, the mold is removed to complete the fabrication of the device. The advantage of this method is that there is no gluing process, so there are no problems such as overflow of glue, and the surface quality is better.
将所述制具的灌注所述液态光学材料的灌注口封闭,制成完整器件。采用这种方法,所述制具本身就是器件的一部分,制具至少部分区域可以是透明的。可以将器件中对于精度要求较高的部分通过模具一体制作成第一光学器件,而精度要求较低的其它部分通过制具制作外形,只要将第一光学器件以较低的精度固定在制具中(例如通过胶水胶合),然后填入光学液体,再封闭不位于透光的工作面上的灌注口即可制作成器件整体。这么做的好处是没有胶合工序,表面质量高,同时可以省去脱模的工序,设计也更为灵活。The pouring port of the tool for pouring the liquid optical material is closed to make a complete device. In this way, the form itself is part of the device, and the form may be transparent in at least part of its area. The part of the device that requires higher precision can be integrated into the first optical device through the mold, and the other parts that require lower precision can be made into the shape of the tool, as long as the first optical device is fixed on the tool with lower precision. (for example, glued by glue), then filled with optical liquid, and then closed the pouring port that is not located on the light-transmitting working surface to make the device as a whole. The advantage of this is that there is no gluing process, the surface quality is high, and the demoulding process can be omitted, and the design is more flexible.
实施例五:Embodiment five:
一种光学器件制造方法,包含第一光学器件(图11中的1)和至少一个第二光学器件(图11中的2),包含至少一个透光和/或反光的工作表面,装配第一光学器件和第二光学器件时,在工作表面上第一和第二光学器件的交界部分,使用与两个表面对应部分面型互补的制具贴合相应交界部分(图11中第一和第二光学器件互补的面型为两个独立的单一曲面,其它实施例中也可以是多个连续曲面/平面/菲涅尔面等),使胶水或光学液体无法从所述工作表面上溢出。光学器件一般包含透光或反光的工作表面以及非透光或反光的工作表面,如图11所示,完整器件包含两个透光及反光的工作表面。装配时,使用与整个工作面或工作面上第一第二光学器件交界部分面型互补的制具夹持第一光学器件和第二光学器件在工作表面的交界位置(或整个工作面),使得整个交界区 域除了灌注口外形成一个封闭区域,灌入的液体无法从工作面上任何区域溢出。A method of manufacturing an optical device comprising a first optical device (1 in FIG. 11 ) and at least one second optical device (2 in FIG. 11 ), comprising at least one light-transmitting and/or light-reflecting working surface, assembling the first When the optical device and the second optical device are used, on the interface of the first and second optical devices on the working surface, use a tool that is complementary to the surface type of the corresponding part of the two surfaces to fit the corresponding interface (the first and the first in Figure 11 The complementary surfaces of the two optical devices are two independent single curved surfaces, or multiple continuous curved surfaces/planes/Fresnel surfaces in other embodiments), so that glue or optical liquid cannot overflow from the working surface. Optical devices generally include a light-transmitting or reflective working surface and a non-light-transmitting or reflective working surface. As shown in Figure 11, a complete device includes two light-transmitting and light-reflecting working surfaces. When assembling, use a tool that is complementary to the interface of the first and second optical devices on the entire working surface or the interface of the first and second optical devices on the working surface to clamp the junction of the first optical device and the second optical device on the working surface (or the entire working surface), make the entire junction area The domain forms a closed area except for the filling port, and the poured liquid cannot overflow from any area on the working surface.
通过光固化和/或热固化所述胶水或光学液体。可以通过UV曝光或加热固化胶水。使用光固化时,所述制具也可以采用透明材料制作,能够使得曝光用的UV光透过。The glue or optical liquid is cured by light and/or heat. The glue can be cured by UV exposure or heat. When photocuring is used, the tool can also be made of a transparent material, which can allow UV light for exposure to pass through.
所述制具不会被胶水或光学液体粘附,能够从固化后的器件上去除。所述制具采用不会被所使用胶水粘附的材料制成,或者在制具表面贴合有一层不会被所使用胶水粘附的薄膜,固化后可以轻易的将制具移除。The fixture will not be adhered by glue or optical liquid and can be removed from the cured device. The tool is made of a material that will not be adhered by the glue used, or a film that will not be adhered by the glue used is pasted on the surface of the tool, and the tool can be easily removed after curing.
第一或第二光学器件上包含注入和/或导出胶水或光学液体的开口或导流通道,所述开口或导流通道位于非工作面的其它表面上。注入胶水的开口作为灌注口可以在第一光学器件任一个非工作表面上,或者也可以在第二光学器件的任一个非工作表面上,或者也可以同时存在多个灌注口。灌注口通过导流通道将光学液体或胶水引导至第一第二光学器件的各个交界面上。导流通道一般设置在器件边缘区域,对实际光的传播影响较小。此外,固化后由于胶水或光学液体的折射率与器件本身相同或相近,导流通道固化后被胶水充满,也不会对光的传播构成大的影响。导出口可以引导多余的胶水从导出口排出,所述导出接口还可以连接真空泵之类的设备,使得胶水或光学液体能够更容易的从注入口流遍整个胶合区域后从导出口排出多余部分。或者所述注入和导出的开口还可以是同一开口,同时起到灌注和排出多余液体的。The first or second optical device includes an opening or a guide channel for injecting and/or exporting glue or optical liquid, and the opening or guide channel is located on other surfaces of the non-working surface. The opening for injecting glue as a filling port may be on any non-working surface of the first optical device, or may also be on any non-working surface of the second optical device, or there may be multiple filling ports at the same time. The pouring port guides the optical liquid or glue to each interface of the first and second optical devices through the guide channel. The guide channel is generally arranged in the edge area of the device, and has little influence on the actual light propagation. In addition, since the refractive index of the glue or optical liquid is the same or similar to that of the device itself after curing, the guide channel will be filled with the glue after curing, which will not have a great impact on the propagation of light. The outlet can guide excess glue to be discharged from the outlet, and the outlet interface can also be connected to equipment such as a vacuum pump, so that the glue or optical liquid can flow through the entire glued area from the injection port more easily and then discharge the excess from the outlet. Alternatively, the opening for injection and outlet can also be the same opening, which is used for perfusing and discharging excess liquid at the same time.
在此实施例的一个变化例中,上述制具本身也可以是完整器件的一部分,通过将制具,第一器件及第二器件胶合在一起,可以使得第一器件和第二器件交界的工作面被包裹在完整器件内部,由于胶水或光学液体的填充,交界线将不会产生明显的痕迹。此变形例中,贴合制具及第一第二光学器件的交界面上也需要填充胶水或光学液体(可以固化或保持液态亦可,保持液态的话则需将非工作面的交界线封闭),此外制具上也可以包含至少一个完整的工作面,而其与第一器件第二器件的交界面的交界线则在器件的非工作面上,不会影响光学成像。In a variation of this embodiment, the tool itself can also be a part of the complete device, and by gluing the tool, the first device and the second device together, the work of the interface between the first device and the second device can be made The surface is wrapped inside the complete device, and the interface line will not produce obvious marks due to the filling of glue or optical liquid. In this modified example, glue or optical liquid also needs to be filled on the interface between the bonding tool and the first and second optical devices (it can be solidified or kept in a liquid state, and if it is kept in a liquid state, the boundary line of the non-working surface needs to be closed) , In addition, the tool may also include at least one complete working surface, and the boundary line between the first device and the second device is on the non-working surface of the device, which will not affect the optical imaging.
在本申请的描述中,需要理解的是,术语“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。In the description of this application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device Or elements must have a certain orientation, be constructed and operate in a certain orientation, and thus should not be construed as limiting the application.
与现有技术相比,本发明具有如下的有益效果:Compared with the prior art, the present invention has the following beneficial effects:
1、本发明通过掩膜板和掩膜体在第一光学器件的上方安装,使第二光学器件能 够满足曝光要求,进而第二光学器件与第一光学器件之间的胶水凝固,同时第二光学器件与第一光学器件交界面上的胶水溢出流至第一光学器件的表面,由此利用第一光学器件上的掩膜体将溢出的胶水遮挡,避免出现胶水在第一光学器件的表面曝光凝固后影响整体的成像清晰度;1. The present invention installs above the first optical device through the mask plate and the mask body, so that the second optical device can Enough to meet the exposure requirements, and then the glue between the second optical device and the first optical device is solidified, and at the same time, the glue on the interface between the second optical device and the first optical device overflows to the surface of the first optical device, thereby utilizing the first optical device The mask body on the first optical device blocks the overflowing glue, so as to avoid affecting the overall imaging clarity after the glue is exposed and solidified on the surface of the first optical device;
2、本发明通过掩膜体与掩膜板的组合将溢出的胶水遮挡,而溢出的胶水不会应为曝光导致凝固,而流体在胶水相对于固体的胶水在第一光学器件的表面能够做到快速清洁,提高了此设备的清洁性;2. The present invention shields the overflowing glue through the combination of the mask body and the mask plate, and the overflowing glue will not solidify due to exposure, and the fluid glue can be made on the surface of the first optical device relative to the solid glue. To fast cleaning, improve the cleanliness of this equipment;
3、本发明通过导流槽的设计,当第二光学器件的底部是平面时,将第二光学器件与第一光学器件对接后,对于的胶水从导流槽流出,并不会在第一表面停留凝固,导致影响第一光学器件人的成像,由此导流槽的设计,使此设备的适用性增强;3. The present invention adopts the design of the diversion groove. When the bottom of the second optical device is flat, after the second optical device is docked with the first optical device, the glue will flow out from the diversion groove and will not be in the first optical device. The surface stays solidified, which affects the imaging of the first optical device, so the design of the diversion groove enhances the applicability of the device;
以上对本发明的具体实施例进行了描述。需要理解的是,本发明并不局限于上述特定实施方式,本领域技术人员可以在权利要求的范围内做出各种变化或修改,这并不影响本发明的实质内容。在不冲突的情况下,本申请的实施例和实施例中的特征可以任意相互组合。 Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. In the case of no conflict, the embodiments of the present application and the features in the embodiments can be combined with each other arbitrarily.

Claims (23)

  1. 一种光学器件制作方法,其特征在于:包括至少一个第一光学器件(1)和至少一个第二光学器件(2),通过胶合或填充的方式制作成整体,所述制作方法包括曝光第二光学器件(2)区域或部分第二器件(2)区域,遮蔽第一光学器件(1)区域或部分第一器件(1)区域。A method for manufacturing an optical device, characterized in that it includes at least one first optical device (1) and at least one second optical device (2), which are fabricated as a whole by gluing or filling, and the manufacturing method includes exposing the second The area of the optical device (2) or part of the area of the second device (2) shields the area of the first optical device (1) or part of the area of the first device (1).
  2. 根据权利要求1所述的光学器件制作方法,其特征在于,所述制作方法,所述第二器件(2)通过使用液态材料填充物填充第一器件(1)部分区域,固化填充材料后制成包含第二器件(2)的完整器件。The manufacturing method of an optical device according to claim 1, characterized in that, in the manufacturing method, the second device (2) is manufactured by filling part of the first device (1) with a liquid material filler, and curing the filling material. into a complete device including the second device (2).
  3. 根据权利要求1所述的光学器件制作方法,其特征在于,所述制作方法,通过光学掩膜遮蔽所述区域。The manufacturing method of the optical device according to claim 1, characterized in that, in the manufacturing method, the region is shielded by an optical mask.
  4. 根据权利要求1所述的光学器件制作方法,其特征在于,所述制作方法还包括曝光过程中在光学器件上施加作用力。The manufacturing method of the optical device according to claim 1, further comprising applying force on the optical device during the exposure process.
  5. 根据权利要求4所述的光学器件制作方法,其特征在于,施加作用力的所述方法包括将掩膜体(3)一个表面制作成与成型后光学器件一个表面面型一致,将所述掩膜施加一定的力贴合在所述表面上进行曝光。The manufacturing method of an optical device according to claim 4, characterized in that, the method of applying force comprises making one surface of the mask body (3) consistent with the shape of one surface of the formed optical device, and making the mask body (3) The film is exposed with a certain force against the surface.
  6. 根据权利要求3所述的光学器件制作方法,其特征在于,所述掩膜体(3)采用不会被胶材或固化的材料粘贴的材料制成。The manufacturing method of an optical device according to claim 3, characterized in that, the mask body (3) is made of a material that will not be pasted by glue or cured material.
  7. 根据权利要求4所述的光学器件制作方法,其特征在于,施加作用力的所述方法包括将掩膜体(3)一个表面制作成与成型后光学器件一个表面面型一致,在所述掩膜体(3)和所述第一器件(1)和/或第二器件(2)之间还有一层不会被胶材或固化后的材料粘贴的材料,将所述掩膜体(3)施加一定的力贴合在所述不会被胶材或固化后的材料粘贴的材料上,所述材料贴合在器件表面上进行曝光。The optical device manufacturing method according to claim 4, characterized in that, the method of applying force comprises making one surface of the mask body (3) to be consistent with the shape of one surface of the formed optical device, and There is also a layer of material between the film body (3) and the first device (1) and/or the second device (2) that will not be pasted by glue or cured material, and the mask body (3 ) applying a certain force to stick to the material that will not be pasted by the adhesive material or the cured material, and the material is pasted on the surface of the device for exposure.
  8. 根据权利要求1所述的光学器件制作方法,其特征在于,所述制作方法还包括,曝光后清洗第一器件(1)和/或第二器件(2)和/或清洗未曝光区域。The manufacturing method of an optical device according to claim 1, further comprising cleaning the first device (1) and/or the second device (2) and/or cleaning the unexposed area after exposure.
  9. 根据权利要求1所述的光学器件制作方法,其特征在于,曝光之后再抛光或研磨第一器件(1)和/或第二器件(2)表面。The manufacturing method of the optical device according to claim 1, characterized in that the surface of the first device (1) and/or the second device (2) is polished or ground after exposure.
  10. 根据权利要求1所述的光学器件制作方法,其特征在于,对于所述第一器件(1)和/或第二器件(2)进行再次固化。The method for manufacturing an optical device according to claim 1, characterized in that recuring is performed on the first device (1) and/or the second device (2).
  11. 根据权利要求1所述的光学器件制作方法,其特征在于,所述第一器件(1) 和/或第二器件(2)表面制作有对位标志,通过对位标志对位后再对器件进行曝光。The optical device manufacturing method according to claim 1, characterized in that the first device (1) And/or an alignment mark is made on the surface of the second device (2), and the device is exposed after being aligned by the alignment mark.
  12. 根据权利要求1所述的光学器件制作方法,其特征在于,所述第一器件(1)和/或第二器件(2)具有多层结构。The manufacturing method of an optical device according to claim 1, characterized in that, the first device (1) and/or the second device (2) has a multilayer structure.
  13. 根据权利要求1所述的光学器件制作方法,其特征在于,所述第一器件(1)和/或第二器件(2)制作有导流槽。The manufacturing method of an optical device according to claim 1, characterized in that, the first device (1) and/or the second device (2) is made with flow guide grooves.
  14. 根据权利要求1所述的光学器件制作方法,其特征在于,分多次曝光第一器件(1)和/或第二器件(2)不同区域。The manufacturing method of the optical device according to claim 1, characterized in that different areas of the first device (1) and/or the second device (2) are exposed in multiple times.
  15. 根据权利要求1所述的光学器件制作方法,其特征在于,所述第一器件(1)和/或第二器件(2)至少部分交界面上镀有反射或部分反射,和/或吸收或部分吸收性质的膜层。The optical device manufacturing method according to claim 1, characterized in that, at least part of the interface of the first device (1) and/or the second device (2) is coated with reflective or partial reflective, and/or absorbing or Partially absorbent film layer.
  16. 根据权利要求1所述的光学器件制作方法,其特征在于,所述第二器件(2)或部分第二器件(2)与第一器件(1)装配时各自温度不同。The manufacturing method of an optical device according to claim 1, characterized in that the temperature of the second device (2) or part of the second device (2) is different from that of the first device (1) when they are assembled.
  17. 一种光学器件制作方法,其特征在于:至少一个第一光学器件和形状与第二光学器件吻合的制具或模具,先制作出第一光学器件,将其固定在所述制具或模具之中,填充液态光学材料形成第二光学器件。A manufacturing method of an optical device, characterized in that: at least one first optical device and a tool or mold whose shape matches the second optical device, the first optical device is manufactured first, and then fixed in the tool or mold , filling the liquid optical material to form the second optical device.
  18. 根据权利要求17所述的光学器件制作方法,其特征在于:固化所述液态光学材料,然后去除所述模具,制成器件整体。The manufacturing method of an optical device according to claim 17, characterized in that: curing the liquid optical material, and then removing the mold to make the whole device.
  19. 根据权利要求17所述的光学器件制作方法,其特征在于:将所述制具的灌注所述液态光学材料的灌注口封闭,制成器件整体。The manufacturing method of the optical device according to claim 17, characterized in that: the pouring port of the tool for pouring the liquid optical material is closed to make the device as a whole.
  20. 一种光学器件制作方法,其特征在于:包含第一光学器件以及至少一个第二光学器件,包含至少一个透光和/或反光的工作表面,装配第一光学器件和第二光学器件时,在工作表面上第一和第二光学器件的交界部分,使用与表面对应部分面型互补的制具贴合相应交界部分。A method for manufacturing an optical device, characterized in that: it includes a first optical device and at least one second optical device, and includes at least one light-transmitting and/or light-reflecting working surface, and when assembling the first optical device and the second optical device, the The interface portion of the first and second optical devices on the working surface is bonded to the corresponding interface portion using a tool that is complementary to the surface shape of the corresponding portion of the surface.
  21. 根据权利要求20所述的光学器件制作方法,其特征在于:通过光固化和/或热固化所述胶水或光学液体。The manufacturing method of an optical device according to claim 20, characterized in that: the glue or the optical liquid is cured by light and/or heat.
  22. 根据权利要求21所述的光学器件制作方法,其特征在于:胶水或光学液体无法从所述工作表面上溢出,所述制具不会被胶水或光学液体粘附,能够从固化后的器件上去除。The manufacturing method of an optical device according to claim 21, wherein the glue or optical liquid cannot overflow from the working surface, the tool will not be adhered by the glue or the optical liquid, and can be removed from the cured device remove.
  23. 根据权利要求20所述的光学器件制作方法,其特征在于:所述制具和/或第一和/或第二光学器件上包含注入和/或导出胶水或光学液体的开口或导流通道,所述开口 或导流通道位于非工作面的其它表面上。 The manufacturing method of an optical device according to claim 20, characterized in that: the tool and/or the first and/or second optical device includes an opening or a guide channel for injecting and/or exporting glue or optical liquid, the opening Or the diversion channel is located on other surfaces other than the working surface.
PCT/CN2023/079903 2022-03-04 2023-03-06 Optical device manufacturing method WO2023165623A1 (en)

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KR20080032552A (en) * 2006-10-10 2008-04-15 삼성전기주식회사 Method fabricating the aspheric lens
CN102749804A (en) * 2012-07-24 2012-10-24 长沙韶光铬版有限公司 Optical cemented component manufacturing method
CN113031128A (en) * 2019-12-09 2021-06-25 觉芯电子(无锡)有限公司 Wafer-level optical window, manufacturing method thereof and micro-mirror device with optical window
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