WO2023160081A1

WO2023160081A1 - Storage bin selection method and apparatus, and computer device and storage medium

Info

Publication number: WO2023160081A1
Application number: PCT/CN2022/135182
Authority: WO
Inventors: 申国莉; 缪峰
Original assignee: 弥费科技(上海)股份有限公司
Priority date: 2022-02-28
Filing date: 2022-11-29
Publication date: 2023-08-31
Also published as: TW202336662A; CN114862295B; CN114862295A

Abstract

Some embodiments of the present application belong to the field of wafer management. Provided are a storage bin selection method and apparatus, and a computer device and a storage medium. The method in the embodiments of the present application comprises: acquiring a storage bin list, wherein the storage bin list stores stocker identifiers of a plurality of stockers, and historical working parameter information corresponding to the plurality of stockers; according to attributes and storage capacities, performing screening on the storage bin list, so as to determine all stockers which can store wafers to be conveyed; when it is determined that there is no free stocker in a target storage bin, acquiring temporary stockers from a temporary storage bin, which is adjacent to the target storage bin, and changing temporary state information of the temporary stockers; and on the basis of a target wafer storage request, acquiring historical working parameter information of all the temporary stockers, and a storage bin identifier corresponding to all the temporary stockers.

Description

Storage bin selection method, device, computer equipment and storage medium

This application is based on the Chinese patent application with the application number "202210185580.0" and the filing date is February 28, 2022, and claims the priority of the Chinese patent application. The entire content of the Chinese patent application is hereby incorporated by reference. Apply.

technical field

The present application belongs to the technical field of wafer management, more precisely relates to semiconductor manufacturing equipment, and in particular relates to a storage bin selection method, device, computer equipment and storage medium.

Background technique

During the wafer production process, a storage bin is often used to store the wafer cassette so that it can be taken in time according to the process. Due to the random access of process picks, or the replacement of process operations, the use data of the storage warehouse in the storage warehouse will be uneven, and it is easy to happen that when the crystal disk box specifies the storage warehouse, the storage warehouse cannot be stored because there is no storage space. . At this time, the administrator needs to monitor the use data nodes of each storage library in real time, and then move the disk box to realize the storage of the disk box. The whole method is cumbersome to operate and will render the repository node unusable.

Based on this, the present application provides a technical solution to solve the above technical problems.

Summary of the invention

An embodiment of the present application provides a method for selecting a storage bin, including: receiving a target wafer storage request, the target wafer storage request carrying at least the attributes and storage capacity of the wafer to be transported; obtaining according to the target wafer storage request The historical working parameter information of all idle storage banks in the target storage warehouse and the corresponding storage warehouse identification; according to the balance rule and the historical working parameter information, the storage bank weight corresponding to the free storage bank is generated; based on the historical working parameter information calculating a current metric value of each of the free memory banks with the weight of the memory bank; and screening the free memory bank as a target memory bank for storing target wafers according to the current measure value.

The embodiment of the present application also provides a storage bin selection device, the device includes: a storage request receiving module, configured to receive a target wafer storage request, the target wafer storage request carries at least the attributes of the wafer to be transported and the storage Capacity; the storage library acquisition module is used to obtain the historical work parameter information and the corresponding storage warehouse identification of all idle storage warehouses in the target storage warehouse according to the target wafer storage request; the weight generation module is used to obtain according to the balance rule and the described The historical working parameter information generates the storage bank weight corresponding to the free storage bank; the metric calculation module is used to calculate the current metric value of each of the free storage banks based on the historical working parameter information and the storage bank weight; A storage bin screening module, configured to screen an idle storage bin as a target storage bin for storing target wafers according to the current measurement value.

The embodiment of the present application also provides a computer device, including a storage library and a processor, the storage library stores a computer program, and the processor implements the steps of the above method when executing the computer program.

The embodiment of the present application also provides a computer-readable storage medium on which a computer program is stored, wherein the computer program implements the steps of the above method when executed by a processor.

Description of drawings

In the following, preferred embodiments will be described in a clear and understandable manner with reference to the accompanying drawings, and the above-mentioned characteristics, technical features, advantages and implementation methods will be further described.

Fig. 1 is a schematic flow diagram of a storage bin selection method in an embodiment of the present application;

Fig. 2 is a storage bin list diagram in the embodiment of the present application;

Fig. 3 is the calculation schematic diagram of the current metric value in the embodiment of the present application;

Fig. 4 is a structural block diagram of a storage bin selection device in an embodiment of the present application;

FIG. 5 is an internal structure diagram of a computer device in an embodiment of the present application.

Embodiments of the present invention

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the specific implementation manners of the present application will be described below with reference to the accompanying drawings. Apparently, the accompanying drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other accompanying drawings based on these drawings and obtain other implementations.

Based on the present application one skilled in the art should appreciate that an aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, any number and aspect set forth herein may be used to implement an apparatus and/or practice a method. In addition, such an apparatus may be implemented and/or such a method practiced using other structure and/or functionality than one or more of the aspects set forth herein.

It should also be noted that the diagrams provided in the following embodiments are only schematically illustrating the basic idea of the application, and only the components related to the application are shown in the drawings rather than the number, shape and number of components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual implementation, and the component layout type may also be more complicated.

Additionally, in the following description, specific details are provided to facilitate a thorough understanding of examples. However, it will be understood by those skilled in the art that the described aspects may be practiced without these specific details. The terms "first", "second", etc. are used for descriptive purposes only, and should not be understood as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first", "second" and the like may explicitly or implicitly include one or more of that feature. In the description of the present application, unless otherwise specified, "plurality" means two or more.

During the wafer production process, a storage bin is often used to store the wafer cassette so that it can be taken in time according to the process. When the MES system sends storage instructions to the MCS, sometimes the destination is STOCKER LIST, that is, a group of storage bins is used as its destination. At this time, the MCS needs to specify specific storage bins for this group of storage bins. The designated principle is based on the storage bins. The average occupancy is distinguished so that it can achieve a load balancing purpose. Moreover, the storage warehouse is generally provided with multiple storage banks, and each storage bank can accommodate multiple wafer cassettes, which is very suitable for large-scale process applications. In the production process, multiple storage bins will be set up according to the process flow. Each storage bin is usually configured with multiple storage banks for storing disk cassettes or wafers.

Due to the random access of process picks, or the replacement of process operations, the use data of the storage warehouse in the storage warehouse will be uneven, and it is easy to happen that when the crystal disk box specifies the storage warehouse, the storage warehouse cannot be stored because there is no storage space. . At this time, the administrator needs to monitor the use data nodes of each storage library in real time, and then move the disk box to realize the storage of the disk box. The whole method is cumbersome to operate and will render the repository node unusable.

Compared with the existing technology, the embodiment of the present application has the advantage that it can balance the storage quantity of each storage bin to avoid congestion of the storage of the wafer cassette/wafer, and avoid the situation that the storage bin is unavailable, and reduce the congestion and transfer. time etc.

The technical solutions provided by the various embodiments of the present application are described below with reference to the accompanying drawings.

As shown in Figure 1, the embodiment of the present application provides a method for selecting a storage bin, which can be applied to a terminal or a server. The terminal can be, but not limited to, various personal computers, notebook computers, smart phones, tablet computers and portable smart devices. The server can be implemented by an independent server or a server cluster composed of multiple servers. In one embodiment, the storage bin selection method can be applied to a terminal or server in the MES system. The method includes the following steps:

Step 101, receiving a target wafer storage request, the target wafer storage request carries at least the attributes and storage capacity of the wafer to be transported.

MCS (Material Control System) is a material control system, which is mainly used in the transportation management of wafer transfer boxes (Foup) in semiconductor factories, that is, wafer boxes. The scope of transportation includes clean room (FAB) internal transportation, clean room ( The transportation between FAB) and clean room (FAB), cross-floor transportation, the location of transportation includes machines, storage warehouses, hanging temporary storage shelves (OHB), and conveyors (Convery), the goal is to reduce the distance between machines Time delivery time, improve delivery efficiency. MES is a production information management system oriented to the execution layer of the workshop of a manufacturing enterprise. MES can send a transmission order to MCS according to the storage warehouse list, and MES will notify MCS of the next stop of the wafer transportation location. After MCS receives the transportation request from MES, MCS Use the repositories in the repository as the basis for load balancing.

The server of the local management device (MCS) receives the target wafer storage request, and the target wafer storage request carries at least the attribute and storage capacity of the wafer to be transported. The attributes of the wafer to be transported are related to the current process flow of the wafer. According to the attributes, it can be determined which processes the wafer has undergone and which processes will be performed. The storage capacity is related to the capacity or volume that the cassette needs to occupy in the storage library. The wafer cassettes can be set to different specifications, and multiple shelves can be set in the storage library, and each shelf can be set to different sizes to accommodate wafer cassettes of different specifications.

Step 102 , according to the target wafer storage request, obtain historical working parameter information and corresponding storage bin identifiers of all idle storage bins in the target storage bin.

According to the target wafer storage request, the server obtains historical working parameter information and corresponding storage bin identifiers of all idle storage bins in the target storage bin. As shown in FIG. 2 , the server may acquire all repository storage bin identifiers in the target repository Photo, such as repository GP301 , repository GP302 , and repository GP303 . The server may also acquire the priority levels of each storage bank, for example, the priority level of the storage bank GP301 is 1; the priority level of the storage bank GP302 is 3; the priority level of the storage bank GP303 is 6. The priority of the storage library GF301 in the target storage library Furnace is 1; the priority of the storage library GF302 is 3; the priority of the storage library GF303 is 6; the priority of the storage library GF304 is 9. The priority of the repository GE301 in the target repository Etch is 1; the priority of the repository GE302 is 3. Taking the storage warehouse Photo as an example, the server obtains the historical working parameter information of all storage libraries. Among them, the total number of commands of GP301 is 10, the number of scheduled commands is 3, and the grid occupation rate is 50%; the total number of commands of GP302 is 5, and the number of scheduled commands is 50%. The number is 2, and the grid occupancy rate is 30%; the total command number of GP303 is 7, and the predetermined command number is 1, and the grid occupancy rate is 90%.

Step 103, generating storage bank weights corresponding to free storage banks according to balance rules and historical work parameter information.

The warehouse weight can be obtained by the server in combination with experience values, balance rules, and wafer properties, and the experience values are obtained from the historical working parameter information of the storage bins in the historical data of the material control system. The storage bank weight may include priority weight, command frequency weight (command balance weight), slot occupancy weight, and the like.

For example, taking the storage bin Photo acquired by the server as an example, since the storage bins GP301, GP302, and GP303 are all owned by the storage bin Photo, the stored wafers/cassettes are of the same type. Therefore, the priority weight of GP301: 1; the command balance weight: 2; the slot occupancy weight: 10.

GP302 priority weight: 1; command balance weight: 2; slot occupancy weight: 10.

GP303 priority weight: 1; command balance weight: 2; slot occupancy weight: 10.

But when the target storage library Etch and the storage warehouse Photo store different wafers/cassettes, the weights of the storage warehouse GE301 of the storage warehouse Etch can be the same or different, for example, priority weight: 1; command balance weight: 3 ;Grid occupancy weight: 5 etc.

The server generates storage bank weights corresponding to free storage banks according to balancing rules and historical work parameter information. The balance rule is that the MCS can make the occupancy rates of the warehouses in the same group of warehouses (that is, warehouses storing the same type of FOUP) consistent. The storage weight can be set according to the occupancy rate of the same group of warehouses, and MCS uses the storage warehouse group as the basis for load balancing. Repository weights can be adjusted according to the priority of each warehouse, the command balance count of each warehouse, and the occupancy rate of each warehouse. The command balance count refers to the number of commands executed by each Stocker (repository). In order to achieve load balance, when choosing to execute Stockers, for example, if one Stocker executes 10 times and another Stocker executes 100 times, then the next move command will be executed as soon as possible. It is possible to send it to the Stocker who executed 10 times. The server will adjust the repository weight according to the priority of each repository, the command balance count of each repository, and the occupancy rate of each repository.

In step 104, the current metric value of each free storage bank is calculated based on the historical working parameter information and the storage bank weight.

The server calculates a current metric for each free repository based on historical work parameter information and repository weights. The current metric value is priority number * priority weight + (command number + scheduled command number) * command balance weight + slot occupancy rate * slot occupancy rate weight. As shown in Figure 3, the total measurement value of GP301: 1*1+ (10+3)*2+(50/100)*10＝32; the total measurement value of GP302: 3*1+(5+2)*2+ (30/100)*10=20; GP303 total measurement value: 6*1+(7+1)*2+(90/100)*10=31.

Step 105 , according to the current metric value, an idle storage bank is screened as a target storage base for storing the target wafer.

The server screens free banks as target banks for storing target wafers based on the current metrics. In step 104, the server calculates that the current metric value of GP301 is 32, the current metric value of GP302 is 20, and the current metric value of GP303 is 31. Therefore, according to the current measurement value calculated above, the storage bank with the minimum value is selected to store the target wafer. Therefore, the server selects GP302 as the target storage bank. When there are multiple storage bins that can store the target wafer, the server may filter out the target storage bin and the target storage bin that store the target wafer according to the current measurement value.

The above method can balance the storage quantity of each storage bin to avoid the congestion of the storage of the disk cassette/wafer, avoid the unavailable situation of the storage bin, and reduce the time of congestion dumping, etc.

In one of the embodiments, obtaining historical working parameter information and corresponding storage bin identifiers of all free storage bins according to the target wafer storage request includes: obtaining a storage bin list, storage bins with multiple storage bins are stored in the storage bin list Identification and corresponding historical working parameter information; according to the transportation time, attributes and storage capacity carried in the target wafer storage request, filter all free storage bins that can store wafers to be transported from the storage bin list, and obtain the information of all free storage bins Historical working parameter information and corresponding storage bin identification.

The server obtains a storage bin list, which is a data list constructed in advance according to the corresponding relationship between storage bins and storage libraries. The storage period of each wafer/wafer cassette stored in the storage warehouse is also included in the historical working parameter information of the storage warehouse list.

The server can filter all free storage bins that can store wafers to be transported from the storage bin list according to the transportation time, attributes and storage capacity carried in the target wafer storage request, and obtain the historical working parameter information and corresponding Storage bin ID. Therefore, in this embodiment, the server can store the wafers to be transported according to the time period, so as to ensure that the attribute of each wafer to be transported corresponds to the attribute of the storage bin, so that the storage bin with the same attribute can be fully utilized, shortening the time from The time when the storage bin picks up and puts out wafers.

In one of the embodiments, obtaining the historical working parameter information and the corresponding storage bin identifiers of all idle storage bins according to the target wafer storage request includes the following steps: obtaining a storage bin list, where multiple storage bins are stored. Storage warehouse identification and corresponding historical working parameter information; according to attributes and storage capacity, screen and judge all storage warehouses in the storage warehouse list that can store wafers to be transported; when it is determined that there is no idle storage warehouse in the target storage warehouse, obtain and Temporary storage warehouses in temporary storage warehouses adjacent to the target storage warehouse, and change the temporary status information of the temporary storage warehouses; obtain historical working parameter information and corresponding storage warehouse identifications of all temporary storage warehouses based on the target wafer storage request.

In this embodiment, the target wafer storage request carries the specified target storage bin. The server obtains the storage bin list according to the target storage bin. When the server determines that there is no storage warehouse that can store wafers to be transported in the storage warehouse list according to the attributes and storage capacity, the server obtains the temporary storage warehouse in the temporary storage warehouse adjacent to the target storage warehouse, and changes the temporary storage warehouse of the temporary storage warehouse. status information. The temporary status information refers to the status information of whether the temporary storage bin can be used. When a target wafer storage request carries a target storage bin, the temporary status information of the temporary storage bin is initially not available. However, when the target storage bin is in a non-idle state (the non-idle state can be a fully loaded state or an error reporting state, etc.), the server changes the status information of the temporary storage bin to be usable according to the non-idle state.

Based on the target wafer storage request, the server obtains historical working parameter information and corresponding storage bin identifiers of all temporary storage warehouses. Then, according to steps 103-105, the server selects an idle storage warehouse from the temporary storage warehouse as a target storage warehouse for storing the target wafer.

In the above method, when the target storage bin is not available for transmission, the MCS uses the backup storage bin to find another storage bin as its destination. When the target storage bin is not free, the backup storage bin can be quickly activated to reduce the transfer time, thereby Ensure the processing efficiency of the whole process.

In one of the embodiments, after obtaining the historical working parameter information and the corresponding storage bin identifiers of all temporary storage bins based on the target wafer storage request, it also includes: obtaining an idle storage bin corresponding to the attributes and storage capacity in the storage bin list The waiting time; when the waiting time is less than the preset threshold, obtain the historical working parameter information and corresponding storage bin identifiers of all idle storage bins in the target storage bin.

The server obtains the waiting time of idle storage bins corresponding to attributes and storage capacity in the storage bin list; when the waiting time is less than the preset threshold, obtains the historical working parameter information and corresponding storage bin identification of all idle storage bins in the target storage bin . When the target repository is not available for transfer, the MCS can use an alternate repository to find another repository as its destination. However, when one of the target storage banks becomes available within the preset waiting time, MCS will give up the option of transporting the wafers to be shipped to the backup storage warehouse, but will remain in the current storage until the waiting time is over, and the wafer Or the wafer box (FOUP) is transported to the target storage warehouse in the target storage warehouse. Wafers or cassettes of wafers (FOUPs) are not transported to alternate storage bins at this time.

But when the waiting time is greater than a preset threshold, the MCS uses an alternate storage bin to find another storage bin as its destination. At this time, the wafer or wafer box (FOUP) will be transported to the backup storage warehouse according to the selected free storage warehouse, and then the wafer storage request is completed, and MCS will perform historical work according to the backup storage warehouse and wafer or wafer box (FOUP) The parameter information is updated.

In one embodiment, as shown in FIG. 4 , a storage bin selection device is provided, the device includes a storage request receiving module 401, a storage library acquisition module 402, a weight generation module 403, a metric calculation module 404 and a storage bin screening module 405 .

The storage request receiving module 401 is configured to receive a target wafer storage request, and the target wafer storage request at least carries the attributes and storage capacity of the wafer to be transported.

The storage library obtaining module 402 is configured to obtain historical working parameter information and corresponding storage bin identifications of all idle storage bins in the target storage bin according to the target wafer storage request.

A weight generating module 403, configured to generate storage bank weights corresponding to free storage banks according to balance rules and historical work parameter information.

The metric calculation module 404 is configured to calculate the current metric value of each free storage bank based on the historical working parameter information and the storage bank weight.

The storage bin screening module 405 is configured to screen an idle storage bin as a target storage bin for storing target wafers according to the current measurement value.

In one of the embodiments, the repository acquisition module includes:

The list obtaining unit is used to obtain a list of storage bins, and the storage bin list stores storage bank identifiers of multiple storage banks and corresponding historical working parameter information.

The free storage warehouse screening unit is used to filter all free storage warehouses that can store wafers to be transported from the storage warehouse list according to the transportation time, attributes and storage capacity carried in the target wafer storage request, and obtain the history of all free storage warehouses Working parameter information and corresponding storage bin identification.

In one of the embodiments, the repository acquisition module includes:

The judging unit is configured to screen and judge all storage bins in the storage bin list that can store wafers to be transported according to attributes and storage capacity.

The temporary storage warehouse acquisition unit is used to acquire temporary storage warehouses in temporary storage warehouses adjacent to the target storage warehouse and change the temporary state information of the temporary storage warehouses when it is determined that there is no free storage warehouse in the target storage warehouse.

The temporary storage library screening unit is configured to obtain historical working parameter information and corresponding storage bin identifiers of all temporary storage libraries based on the target wafer storage request.

In one of the embodiments, the repository acquisition module includes:

The time acquiring unit is configured to acquire the waiting time when there is an idle storage bank corresponding to the attribute and the storage capacity in the storage bin list.

The idle storage bank screening unit is configured to acquire historical working parameter information and corresponding storage bin identifiers of all idle storage bins in the target storage bin when the waiting time is less than a preset threshold.

For the specific limitations of the storage bin selection device, refer to the above-mentioned definition of the storage bin selection method, which will not be repeated here. Each module in the above-mentioned storage bin selection device can be fully or partially realized by software, hardware and a combination thereof. The above-mentioned modules can be embedded in or independent of the processor in the computer device in the form of hardware, and can also be stored in the memory of the computer device in the form of software, so that the processor can invoke and execute the corresponding operations of the above-mentioned modules.

In one embodiment, a computer device is provided, and the computer device may be a server, and its internal structure may be as shown in FIG. 5 . The computer device includes a processor, memory, network interface and database connected by a system bus. Wherein, the processor of the computer device is used to provide calculation and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, computer programs and databases. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage medium. The database of the computer device is used to store data such as a list of storage bins. The network interface of the computer device is used to communicate with an external terminal via a network connection. When the computer program is executed by the processor, a storage bin selection method is realized.

Those skilled in the art can understand that the structure shown in Figure 5 is a block diagram of a partial structure related to the solution of this application, and does not constitute a limitation to the computer equipment on which the solution of this application is applied. The specific computer equipment may include There may be more or fewer components than shown in the figures, or certain components may be combined, or have different component arrangements.

In one embodiment, a computer device is provided, including a memory and a processor, the memory stores a computer program, and the processor implements the following steps when executing the computer program: receiving a target wafer storage request, the target wafer storage request at least Carry the attributes and storage capacity of the wafers to be transported; obtain the historical working parameter information and corresponding storage bin identification of all idle storage bins in the target storage bin according to the target wafer storage request; The weight of the memory bank corresponding to the library; the current measurement value of each idle memory bank is calculated based on the historical working parameter information and the weight of the memory bank; and the idle memory bank is selected as the target memory bank for storing the target wafer according to the current measurement value.

In one embodiment, when the processor executes the computer program, the acquisition of historical working parameter information and corresponding storage bin identifiers of all idle storage bins according to the target wafer storage request includes: obtaining a storage bin list, in which there are stored Storage library identifiers of multiple storage libraries and corresponding historical working parameter information; according to the transportation time, attributes and storage capacity carried in the target wafer storage request, all free storage libraries that can store wafers to be transported are screened from the storage warehouse list, And obtain the historical working parameter information and corresponding storage bin identifiers of all idle storage repositories.

In one embodiment, when the processor executes the computer program, the acquisition of historical working parameter information and corresponding storage bin identifiers of all idle storage bins according to the target wafer storage request includes: obtaining a storage bin list, in which there are stored Storage library identifiers of multiple storage libraries and corresponding historical working parameter information; filter and judge all storage libraries in the storage bin list that can store wafers to be transported according to attributes and storage capacity; when it is determined that there is no idle storage in the target storage bin When the warehouse is in the warehouse, obtain the temporary storage warehouse in the temporary storage warehouse adjacent to the target storage warehouse, and change the temporary status information of the temporary storage warehouse; obtain the historical working parameter information and corresponding storage information of all temporary storage warehouses based on the target wafer storage request Bin ID.

In one embodiment, after the processor executes the computer program and obtains the historical working parameter information and corresponding storage bin identifiers of all temporary storage bins based on the target wafer storage request, it further includes: obtaining the existence and attributes in the storage bin list and The waiting time of the idle storage bank corresponding to the storage capacity; when the waiting time is less than the preset threshold, obtain the historical working parameter information and the corresponding storage bin identification of all idle storage bins in the target storage bin.

In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the following steps are implemented: receiving a target wafer storage request, and the target wafer storage request carries at least The attributes and storage capacity of the wafer; according to the target wafer storage request, obtain the historical working parameter information and the corresponding storage warehouse identification of all idle storage warehouses in the target storage warehouse; generate the corresponding storage warehouse according to the balance rule and historical working parameter information Bank weight; calculating a current metric value for each free bank based on the historical work parameter information and bank weight; screening the free bank as a target bank for storing target wafers according to the current measure value.

In one embodiment, when the computer program is executed by the processor, the acquisition of the historical working parameter information and the corresponding storage bin identifiers of all idle storage bins according to the target wafer storage request includes: obtaining the storage bin list, storing in the storage bin list There are multiple storage warehouse identifications and corresponding historical working parameter information; according to the transportation time, attributes and storage capacity carried in the target wafer storage request, all free storage warehouses that can store wafers to be transported are screened from the storage warehouse list , and obtain the historical working parameter information and corresponding storage bin IDs of all idle storage banks.

In one embodiment, when the computer program is executed by the processor, the acquisition of the historical working parameter information and the corresponding storage bin identifiers of all idle storage bins according to the target wafer storage request includes: obtaining the storage bin list, storing in the storage bin list There are multiple storage warehouse identifiers and corresponding historical working parameter information; according to the attributes and storage capacity, all storage warehouses in the storage warehouse list that can store wafers to be transported are screened and judged; when it is determined that there is no free space in the target storage warehouse When storing the warehouse, obtain the temporary storage warehouse in the temporary storage warehouse adjacent to the target storage warehouse, and change the temporary state information of the temporary storage warehouse; obtain the historical working parameter information and corresponding information of all temporary storage warehouses based on the target wafer storage request Storage bin ID.

In one embodiment, after the computer program is executed by the processor, after obtaining the historical working parameter information and corresponding storage bin identifiers of all temporary storage bins based on the target wafer storage request, it further includes: obtaining the existence and attributes in the storage bin list And the waiting time of the idle storage bank corresponding to the storage capacity; when the waiting time is less than the preset threshold, obtain the historical working parameter information and the corresponding storage bin identification of all idle storage bins in the target storage bin.

The above is only a specific embodiment of the application, but the scope of protection of the application is not limited thereto. Any person familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the application. All should be covered within the scope of protection of this application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

A storage bin selection method, comprising:

receiving a target wafer storage request, the target wafer storage request carrying at least the attributes and storage capacity of the wafer to be transported;

According to the target wafer storage request, obtain historical working parameter information and corresponding storage bin identifiers of all idle storage bins in the target storage bin;

generating a storage bank weight corresponding to the free storage bank according to a balance rule and the historical work parameter information;

calculating a current metric value for each of the free storage banks based on the historical work parameter information and the storage bank weights;

Screening an idle storage bank as a target storage base for storing target wafers according to the current metric value.
The method according to claim 1, wherein said acquiring historical working parameter information and corresponding storage bin identifiers of all idle storage bins according to the target wafer storage request comprises:

Obtaining a list of storage bins, the storage bin list stores storage IDs of a plurality of storage bins and corresponding historical working parameter information;

Screen all free storage bins that can store the wafer to be transported from the storage bin list according to the shipping time carried in the target wafer storage request, the attribute, and the storage capacity, and acquire all the free storage bins The historical working parameter information and the corresponding storage bin identification.
The method according to claim 1, wherein said acquiring historical working parameter information and corresponding storage bin identifiers of all idle storage bins according to the target wafer storage request comprises:

Obtaining a list of storage bins, the storage bin list stores storage IDs of a plurality of storage bins and corresponding historical working parameter information;

Screening and judging all storage bins in the storage bin list that can store the wafer to be transported according to the attribute and the storage capacity;

When it is determined that there is no free storage warehouse in the target storage warehouse, obtaining a temporary storage warehouse in a temporary storage warehouse adjacent to the target storage warehouse, and changing the temporary state information of the temporary storage warehouse;

Based on the target wafer storage request, historical working parameter information and corresponding storage bin identifiers of all temporary storage bins are obtained.
The method according to claim 3, wherein, after obtaining the historical operating parameter information and corresponding storage bin identifications of all temporary storage repositories based on the target wafer storage request, further comprising:

Acquiring the waiting time of an idle storage warehouse corresponding to the attribute and the storage capacity in the storage warehouse list;

When the waiting time is less than the preset threshold, historical working parameter information and corresponding storage bin identifiers of all idle storage bins in the target storage bin are obtained.
A storage bin selection device, wherein the device comprises:

A storage request receiving module, configured to receive a target wafer storage request, the target wafer storage request at least carrying the attributes and storage capacity of the wafer to be transported;

The storage library acquisition module is used to obtain historical working parameter information and corresponding storage bin identifications of all idle storage bins in the target storage bin according to the target wafer storage request;

a weight generation module, configured to generate a storage bank weight corresponding to the free storage bank according to the balance rule and the historical work parameter information;

a metric calculation module, configured to calculate the current metric value of each of the free storage banks based on the historical working parameter information and the storage bank weight;

A storage bin screening module, configured to screen an idle storage bin as a target storage bin for storing target wafers according to the current measurement value.
A computer device, comprising a storage library and a processor, the storage library stores a computer program, wherein the processor implements the steps of the method according to any one of claims 1 to 4 when executing the computer program.
A computer-readable storage medium, on which a computer program is stored, wherein, when the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 4 are implemented.