WO2023149414A1 - Ultrapure water production apparatus, and operation management method of ultrapure water production apparatus - Google Patents

Ultrapure water production apparatus, and operation management method of ultrapure water production apparatus Download PDF

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Publication number
WO2023149414A1
WO2023149414A1 PCT/JP2023/003008 JP2023003008W WO2023149414A1 WO 2023149414 A1 WO2023149414 A1 WO 2023149414A1 JP 2023003008 W JP2023003008 W JP 2023003008W WO 2023149414 A1 WO2023149414 A1 WO 2023149414A1
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water
production apparatus
ultrapure
primary pure
water quality
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PCT/JP2023/003008
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French (fr)
Japanese (ja)
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優仁 栩内
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栗田工業株式会社
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    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage

Definitions

  • the present invention relates to an ultrapure water production apparatus equipped with water recovery equipment and an operation management method for an ultrapure water production equipment equipped with water recovery equipment.
  • Ultrapure water from which impurities have been highly removed has been used as a cleaning liquid for cleaning electronic components such as semiconductor wafers and glass substrates.
  • Ultrapure water is generally produced by sequentially treating raw water (river water, groundwater, industrial water, etc.) with a pretreatment system, a primary pure water system, and a secondary pure water system (subsystem).
  • Fig. 5 shows an example of an ultrapure water production system equipped with such water recovery equipment.
  • This ultrapure water production apparatus 1 is composed of a three-stage apparatus including a pretreatment device 2, a primary pure water system 3, and a subsystem 4. connected to the upstream side of
  • the pretreatment device 2 can supply the raw water W from the raw water tank 21, and the pretreatment device 2 performs filtration of the raw water W, coagulation sedimentation, microfiltration membrane, etc. Pretreatment with is applied to remove mainly suspended solids.
  • the primary pure water system 3 includes a pretreated water tank 31 that stores pretreated water W1, a reverse osmosis membrane device 32, a tank 33 that stores the treated water of the reverse osmosis membrane device 32, an ultraviolet oxidation device 34, and a mixed It has an ion exchange device 35 such as a bed type.
  • the primary pure water system 3 removes most of the electrolytes, fine particles, viable bacteria, etc. from the pretreated water W1 and decomposes organic matter to obtain primary pure water (pure water) W2.
  • a sub-tank 41 is attached to the sub-system 4 .
  • This subsystem 4 comprises, for example, a supply pump, an ultraviolet oxidation device, a non-regenerative mixed-bed ion exchange device, and an ultrafiltration membrane (UF membrane), and the primary pure water W2 produced in the primary pure water system 3 is It oxidatively decomposes trace amounts of organic substances (TOC components) contained in the product, removes carbonate ions, organic acids, anionic substances, metal ions and cationic substances, and finally removes fine particles with an ultrafiltration (UF) membrane. It is removed to obtain ultrapure water W3, which is supplied to the point of use 5.
  • TOC components organic substances
  • the water recovery equipment 6 recovers various types of waste water W4 and returns them to the pretreated water tank 31 via the supply pipe 61.
  • the water quality of the treated water of the water recovery equipment 6 is measured by a TOC meter 62 or the like provided in the supply pipe 61, and depending on the water quality, control such as not returning the treated water of the water recovery equipment 6 to the pretreated water tank 31 is performed. ing.
  • the present invention has been made in view of the above problems, and provides an ultrapure water production apparatus capable of promoting water recovery in the ultrapure water production apparatus, and an operation management method for the ultrapure water production apparatus. for the purpose.
  • the present invention firstly comprises a primary pure water system, a secondary pure water system, various types of waste water are recovered, the recovered water is treated, and the recovered water is returned to the upstream side of the primary pure water system.
  • water recovery equipment wherein the water recovery equipment includes a first flow path for supplying treated water of the water recovery equipment to an upstream side of a primary pure water system, and the ultrapure water
  • a second flow path for supplying outside the system of the manufacturing apparatus, a switching means for switching between the first flow path and the second flow path, and at least one type of water treatment apparatus for treating treated water in the water recovery equipment and a water quality measuring means for the treated water of the water quality predicting means (Invention 1).
  • the treated water of the water quality prediction means when the treated water of the water recovery equipment is treated by the water quality prediction means, the treated water of the water quality prediction means is equipped with at least one type of water treatment device, so that the treatment of the water recovery equipment is performed. Since the water quality is closer to that of the treated water from the primary pure water system than water, when the treated water from the water recovery equipment is merged based on the water quality information obtained by measuring the water quality of the treated water with this water quality prediction means.
  • the water quality prediction means includes one or more devices of the same type as the water treatment device that constitutes the primary pure water system (Invention 2).
  • the water quality prediction means preferably has one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device (invention 3). .
  • the water quality prediction means is one or two of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device that are commonly used in primary pure water devices.
  • the present invention has a primary pure water system, a secondary pure water system, and water recovery equipment for recovering various types of waste water, treating the recovered water, and returning it to the upstream side of the primary pure water system.
  • the water recovery equipment includes a first flow path for returning the treated water of the water recovery equipment to the upstream side of the primary pure water system and a second flow path for supplying to the outside of the ultrapure water production apparatus, Switching means for switching between the first flow path and the second flow path, water quality prediction means comprising at least one type of water treatment device for treating treated water from the water recovery equipment, and water quality prediction means for treating water treated by the water quality prediction means.
  • An operation management method for an ultrapure water production apparatus equipped with water quality measuring means, wherein the first flow path and the second flow path are switched based on the water quality measured by the water quality measuring means. provides an operation management method for an ultrapure water production apparatus (Invention 4).
  • the treated water of the water quality prediction means when the treated water of the water recovery equipment is treated by the water quality prediction means, the treated water of the water quality prediction means is equipped with at least one type of water treatment device, so that the treatment of the water recovery equipment is performed. Since the water quality is closer to that of the treated water from the primary pure water system than water, when the treated water from the water recovery equipment is merged based on the water quality information obtained by measuring the water quality of the treated water with this water quality prediction means.
  • the water quality prediction means include one or more devices of the same type as the water treatment device that constitutes the primary pure water system (invention 5).
  • the water quality prediction means preferably has one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device (Invention 6).
  • one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device which are commonly used in primary pure water devices.
  • the treated water of the water recovery equipment is determined by the water quality prediction means based on the measured value by the water quality measurement means when the raw water of the initial primary pure water system is passed through the water quality prediction means in advance.
  • switching between the first flow path and the second flow path is determined by comparing the measured values obtained by the water quality measuring means when the water is passed through (Invention 7).
  • the measured value by the water quality measuring means when the treated water of the water recovery equipment is passed through the water quality prediction means is obtained by preliminarily passing the raw water of the initial primary pure water system to the water quality prediction means. Prediction accuracy can be further improved by judging the effect of mixing the treated water from the water recovery facility with the raw water of the primary pure water system by comparing the measured value with the water quality measurement means when the water quality is measured. .
  • the treated water from the water recovery facility is treated by the water quality prediction means having at least one type of water treatment device, and based on the measured value of the water quality of the treated water by the water quality prediction means , Predict the impact on the ultrapure water produced by the secondary pure water system when the treated water from the water recovery equipment is combined, and either combine the primary pure water with the raw water or supply it outside the ultrapure water production equipment. Therefore, it is possible to utilize the recovered water while maintaining the required water quality of the ultrapure water.
  • FIG. 1 is a flow diagram showing an ultrapure water production apparatus according to a first embodiment of the present invention
  • FIG. It is a flow diagram showing the configuration of the water quality prediction means in the embodiment.
  • FIG. 4 is a flow diagram showing an ultrapure water production system according to a second embodiment of the present invention;
  • TOC measurement value by the water quality prediction means in Example 1 measurement value of water quality of primary pure water device outlet water (primary pure water), measurement value of water quality of subsystem outlet water (ultra-pure water), is a graph showing
  • FIG. 2 is a flow diagram showing an example of an ultrapure water production apparatus equipped with conventional water recovery equipment.
  • the ultrapure water production apparatus of the present invention will be described in detail below.
  • FIG. 1 shows an ultrapure water production system according to a first embodiment of the present invention. Since this ultrapure water production system is basically the same as the ultrapure water production system shown in FIG. 5, the same components are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • a supply pipe 61 is connected to the water recovery equipment 6, and the supply pipe 61 includes a first pipe line 71 serving as a first flow path communicating with the pretreated water tank 31, It branches to a second pipe line 72 serving as a second flow path for supplying water to equipment other than the ultrapure water production apparatus 1, and by opening and closing opening/closing valves 71A and 72A as switching means, It is possible to switch to each pipeline.
  • a water quality prediction means 73 for collecting a small amount of the water W5 recovered from the water recovery equipment 6 is connected before the branch point of the first pipeline 71 and the second pipeline 72 .
  • the water quality prediction means 73 has the same small devices as the reverse osmosis membrane device 32, the ultraviolet oxidation device 34, and the ion exchange device 35, which constitute the primary pure water system 3, respectively. It has a liquid pump 81, a small reverse osmosis membrane device 82, a small ultraviolet oxidation device 83, and a small ion exchange device 84, respectively.
  • a water quality measuring means 85 having two or more measuring instruments is provided. This water quality measuring means 85 is connected to a control means (not shown) such as a personal computer, and this control means determines the opening/closing valves 71A and 72A based on the flow rate information of the pretreated water W1 and the measured values of the water quality measuring means 85. It is possible to control the opening and closing of the
  • the raw water W is stored in the raw water tank 21 , it is supplied to the pretreatment device 2 .
  • the raw water W is subjected to pretreatment such as filtration, coagulation sedimentation, and microfiltration membranes, mainly to remove suspended solids, to obtain pretreated water W1.
  • This pretreated water W1 is stored in the pretreated water tank 31 .
  • the primary pure water system 3 removes most of the electrolytes, fine particles, viable bacteria, etc. from the pretreated water W1 and decomposes organic matter to obtain primary pure water (pure water) W2.
  • This primary pure water (pure water) W2 is stored in the sub-tank 41 .
  • Subsystem 4 comprises, for example, a supply pump, an ultraviolet oxidation device, a non-regenerative mixed-bed ion exchange device, and an ultrafiltration membrane (UF membrane), and the primary pure water produced in primary pure water system 3 is It oxidatively decomposes trace amounts of organic substances (TOC components) contained in W2, removes carbonate ions, organic acids, anionic substances, metal ions and cationic substances, and finally fine particles with an ultrafiltration (UF) membrane. is removed to obtain ultrapure water W3, which is supplied to the point of use 5.
  • TOC components organic substances
  • UF ultrafiltration
  • recovered water W5 is collected from the supply pipe 61 and processed by the water quality prediction means 73 to obtain predicted water W6.
  • the water quality prediction means has a small reverse osmosis membrane device 82, a small ultraviolet oxidation device 83, and a small ion exchange device 84, similarly to the primary pure water system 3.
  • the water quality of W6 shows the same tendency as the primary pure water W2 and ultrapure water W3 processed by the primary pure water system 3. Therefore, the quality of the predicted water W6 is measured by the water quality measuring means 85.
  • the control means determines that the water quality of the primary pure water W2 and the ultrapure water W3 can be maintained if the predicted water W6 is better than a predetermined water quality, and opens the on-off valve 71A. At the same time, the open/close valve 72A is closed, and the recovered water W5 is supplied to the pretreated water tank 31 and reused as raw water for ultrapure water. On the other hand, if the predicted water quality W6 is worse than the predetermined water quality, it is determined that the quality of the primary pure water W2 and the ultrapure water W3 may deteriorate, and the opening/closing valve 71A is closed and the opening/closing valve 72A is opened. It may be supplied to the service water line of other facilities or used as a drain.
  • the pretreated water W1 is treated in advance by the water quality prediction means 73, the water quality of the treated water is measured by the water quality measurement means 85, and the measured value is recorded as a blank value.
  • the water quality of the primary pure water W2 and the ultrapure water W3 can be accurately predicted, and it can be determined whether or not to supply the recovered water W5 to the pretreated water tank 31.
  • the water quality of the primary pure water W2 and the ultrapure water W3 can be predicted with higher accuracy by also considering the flow rate ratio of the pretreated water W1 and the recovered water W5.
  • the quality of the primary pure water W2 and the ultrapure water W3 can be maintained by continuously or intermittently measuring the quality of the recovered water W5 by supplying the recovered water W5 to the water quality prediction means 73 and measuring the water quality by the water quality measuring means 85. It is preferable that the recovery water W5 can be effectively used by controlling the opening/closing of the opening/closing valve 71A and the opening/closing valve 72A based on the determination of whether or not the opening/closing valve 71A is open. If the fractional amount (water flow rate) of the recovered water W5 to the water quality prediction means 73 is too large, the loss of the recovered water W5 increases. is preferably 1000 mL/min or less, particularly 500 mL/min or less.
  • the small reverse osmosis membrane device 82, the small ultraviolet oxidation device 83, and the small ion exchange device 84 are selected to constitute the water quality prediction means 73 so as to achieve the above water flow rate.
  • the water quality prediction means 73 can be made compact, and evaluation can be performed with a small amount of water, which is preferable.
  • the ultrapure water production apparatus of the present embodiment as described above, it is possible to predict deterioration of the water quality of the ultrapure water W3 when the recovered water W5 is diverted to the ultrapure water production apparatus, and to prevent it. Therefore, even if the recovered water W5 is reused, the water quality of the ultrapure water W3 can be stably maintained and managed.
  • FIG. 3 shows an ultrapure water production system according to a second embodiment.
  • the ultrapure water production apparatus 1 of this embodiment is different from the ultrapure water production apparatus of the first embodiment described above, and the recovered water W5 is introduced before the branch point of the first pipeline 71 and the second pipeline 72. Since they are the same except that they are stored in the tank 74, the same components are denoted by the same reference numerals, and detailed description thereof will be omitted.
  • the operation management method of the ultrapure water production apparatus is the same as in the above-described first embodiment except that the recovered water W5 is stored in the tank 74 before the branch point of the first pipeline 71 and the second pipeline 72. is. It takes some time to measure the water quality of the recovered water W5 with the water quality prediction means 73 and judge whether the water quality of the primary pure water W2 and the ultrapure water W3 can be maintained.
  • the recovered water W5 corresponding to the measurement judgment time in the water quality prediction means 73
  • the probability of supplying the pretreated water tank 31 with the recovered water W5 having a water quality that cannot maintain the water quality of the primary pure water W2 and the ultrapure water W3 can be further reduced.
  • the present invention has been described above based on the above-described embodiments, the present invention is not limited to the above-described embodiments, and various modifications are possible.
  • the configurations of the primary pure water system 3 and the subsystem 4 are not limited, and can be applied to the ultrapure water production apparatus 1 having various configurations of the primary pure water system 3 and the subsystem 4 .
  • the water quality prediction means 73 does not need to have all the water treatment devices of the same type as the primary pure water system 3 as in the present embodiment, and only needs to be able to determine the effects of the primary pure water W2 and the ultrapure water W3 on the water quality. , any one or more.
  • the water quality prediction means 73 may be configured by further adding a water treatment equipment of the same type as the subsystem 4.
  • the pretreatment device 2 is not provided, and the primary pure water system 3 is composed of a pretreated water tank, a reverse osmosis membrane device, a decarbonation membrane, an electrodeionization device, an ultraviolet oxidation device and a mixed-bed ion exchange device.
  • the sub-system 4 was composed of a sub-tank, an ultraviolet oxidizer, a non-regenerative mixed-bed ion exchanger and an ultrafiltration membrane (UF membrane).
  • the water quality prediction means 73 is a small reverse osmosis membrane device (MRM125 manufactured by Dow), a decarbonation membrane (X50 manufactured by 3M), a small electrodeionization device (MX30 manufactured by Evoqua), a small ultraviolet oxidation device (Japan Co., Ltd.). KUS-1/2N-SP manufactured by Photoscience) and a small mixed-bed ion exchange device (manufactured by Kurita Water Industries Ltd.). 1 was constructed. A TOC meter was also installed at the outlet of the primary pure water system 3 and at the outlet of the subsystem 4, respectively.
  • the TOC values of predicted water W6, primary pure water W2, and ultrapure water W3 show similar trends with a time lag. Then, it can be determined that it is necessary to switch from the first pipeline 71 to the second pipeline 72 within the illustrated range from the water quality assurance value of the ultrapure water W3.
  • the raw water W of the ultrapure water production apparatus is passed through the water quality prediction means 73 in advance to obtain a blank, and the inflow rate, residence time, and treated water of the water quality prediction means 73 of the target recovered water W5 (
  • the water quality of the primary pure water W2 and the ultrapure water W3 is predicted by obtaining the threshold value that affects the ultrapure water W3 from the measured value of the predicted water W6, etc., and the utilization of the recovered water W5 in the ultrapure water production apparatus is predicted. It is possible to promote

Abstract

An ultrapure water production apparatus of the present invention comprises a pretreatment device, a primary pure water system, and a subsystem. Water recovery equipment for recovering various kinds of waste water is connected to the upstream end of the primary pure water system 3. A supply pipe communicating with a pretreated-water tank is branched into a first pipeline communicating with the pretreated-water tank and a second pipeline communicating with a component other than the ultrapure water production apparatus, and is switchable. A water quality prediction means 73 that collects a small amount of recovered water W5 recovered by the water recovery equipment is connected before the branch point of the first pipeline and the second pipeline. The water quality prediction means 73 simulates the primary pure water system, and has a small reverse osmosis membrane device 82, a small ultraviolet oxidation device 83, and a small ion exchange device 84, respectively, and is provided with a water quality measurement means 85 at the end. As a result, it is possible to promote water recovery in the ultrapure water production apparatus.

Description

超純水製造装置、および超純水製造装置の運転管理方法ULTRA-PURE WATER MANUFACTURER AND OPERATION MANAGEMENT METHOD OF ULTRA-PURE WATER MANUFACTURER
　本発明は、水回収設備を備えた超純水製造装置、および水回収設備を備えた超純水製造装置の運転管理方法に関する。 The present invention relates to an ultrapure water production apparatus equipped with water recovery equipment and an operation management method for an ultrapure water production equipment equipped with water recovery equipment.
　従来から、半導体デバイスや液晶デバイスの製造プロセスでは、半導体ウエハやガラス基板等の電子部品を洗浄する洗浄液として、不純物が高度に除去された超純水が用いられている。超純水は、一般に、原水（河川水、地下水、工業用水など）を、前処理システム、一次純水システム、および二次純水システム（サブシステム）で順次処理することにより製造されている。 Conventionally, in the manufacturing process of semiconductor devices and liquid crystal devices, ultrapure water from which impurities have been highly removed has been used as a cleaning liquid for cleaning electronic components such as semiconductor wafers and glass substrates. Ultrapure water is generally produced by sequentially treating raw water (river water, groundwater, industrial water, etc.) with a pretreatment system, a primary pure water system, and a secondary pure water system (subsystem).
　こうした超純水製造装置の中には、水回収率の向上を目的として、各種排水や洗浄などに使用された超純水などを回収して水回収設備で処理した回収水を一次純水システムの前段に還流させる水回収設備を備えたものがある。 In order to improve the water recovery rate, some of these ultra-pure water production systems collect ultra-pure water used for various types of wastewater and washing, etc. There is one equipped with a water recovery facility for refluxing in the preceding stage.
　このような水回収設備を備えた超純水製造装置の一例を図５に示す。この超純水製造装置１は、前処理装置２と一次純水システム３とサブシステム４といった３段の装置で構成されていて、各種排水を回収する水回収設備６が、一次純水システム３の上流側に接続している。上述したような超純水製造装置１において、前処理装置２は原水タンク２１から原水Ｗを供給可能となっており、この前処理装置２では、原水Ｗの濾過、凝集沈殿、精密濾過膜などによる前処理が施され、主に懸濁物質が除去される。 Fig. 5 shows an example of an ultrapure water production system equipped with such water recovery equipment. This ultrapure water production apparatus 1 is composed of a three-stage apparatus including a pretreatment device 2, a primary pure water system 3, and a subsystem 4. connected to the upstream side of In the ultrapure water production apparatus 1 as described above, the pretreatment device 2 can supply the raw water W from the raw water tank 21, and the pretreatment device 2 performs filtration of the raw water W, coagulation sedimentation, microfiltration membrane, etc. Pretreatment with is applied to remove mainly suspended solids.
　一次純水システム３は、前処理水Ｗ１を貯留する前処理水タンク３１と逆浸透膜装置３２と、この逆浸透膜装置３２の処理水を貯留するタンク３３と、紫外線酸化装置３４と、混床式などのイオン交換装置３５とを有する。この一次純水システム３で前処理水Ｗ１中の大半の電解質、微粒子、生菌等の除去を行うとともに有機物を分解して、一次純水（純水）Ｗ２を得る。 The primary pure water system 3 includes a pretreated water tank 31 that stores pretreated water W1, a reverse osmosis membrane device 32, a tank 33 that stores the treated water of the reverse osmosis membrane device 32, an ultraviolet oxidation device 34, and a mixed It has an ion exchange device 35 such as a bed type. The primary pure water system 3 removes most of the electrolytes, fine particles, viable bacteria, etc. from the pretreated water W1 and decomposes organic matter to obtain primary pure water (pure water) W2.
　そして、サブシステム４は、サブタンク４１が付設されている。このサブシステム４は、例えば、供給ポンプと紫外線酸化装置と非再生型混床式イオン交換装置と限外ろ過膜（ＵＦ膜）とからなり、一次純水システム３で製造された一次純水Ｗ２中に含まれる微量の有機物（ＴＯＣ成分）を酸化分解し、炭酸イオン、有機酸類、アニオン性物質、さらには金属イオンやカチオン性物質を除去し、最後に限外濾過（ＵＦ）膜で微粒子を除去して超純水Ｗ３とし、これをユースポイント５に供給する。 A sub-tank 41 is attached to the sub-system 4 . This subsystem 4 comprises, for example, a supply pump, an ultraviolet oxidation device, a non-regenerative mixed-bed ion exchange device, and an ultrafiltration membrane (UF membrane), and the primary pure water W2 produced in the primary pure water system 3 is It oxidatively decomposes trace amounts of organic substances (TOC components) contained in the product, removes carbonate ions, organic acids, anionic substances, metal ions and cationic substances, and finally removes fine particles with an ultrafiltration (UF) membrane. It is removed to obtain ultrapure water W3, which is supplied to the point of use 5.
　さらに、水回収設備６では、各種排水Ｗ４を回収して、供給管６１を介して前処理水タンク３１に還流している。 Further, the water recovery equipment 6 recovers various types of waste water W4 and returns them to the pretreated water tank 31 via the supply pipe 61.
　しかしながら、上記従来の水回収設備を備えた超純水製造装置においては、水回収設備６の処理水の水質が悪化すると得られる超純水Ｗ３の水質の悪化、特にＴＯＣの上昇を招きやすい。そこで、水回収設備６の処理水の水質を供給管６１に設けたＴＯＣ計６２などで計測し、水質によっては前処理水タンク３１に水回収設備６の処理水を戻さないなどの制御を行っている。しかしながら、低分子有機物（メタノール、エタノール、ＩＰＡ、尿素など）の異常混入は末端の超純水Ｗ３の水質に影響しやすいが、これらの成分を正確に検出するのは困難であるばかりか、どの程度混入するとどの程度の影響が出るかの判断が困難である、という問題点があった。そこで水回収設備６の処理水の厳格に分析することが考えられるが、それでは分析に時間がかかり、水回収が困難になる、という問題点があった。これらにより超純水製造装置における水回収はいまだ普及が進んでいないのが現状であった。 However, in the ultrapure water production apparatus equipped with the conventional water recovery equipment, if the water quality of the water treated by the water recovery equipment 6 deteriorates, the quality of the ultrapure water W3 obtained is likely to deteriorate, especially the increase in TOC. Therefore, the water quality of the treated water of the water recovery equipment 6 is measured by a TOC meter 62 or the like provided in the supply pipe 61, and depending on the water quality, control such as not returning the treated water of the water recovery equipment 6 to the pretreated water tank 31 is performed. ing. However, abnormal contamination of low-molecular-weight organic substances (methanol, ethanol, IPA, urea, etc.) tends to affect the water quality of the terminal ultrapure water W3, but it is not only difficult to accurately detect these components, but also There is a problem that it is difficult to determine the degree of influence caused by the degree of contamination. Therefore, it is conceivable to strictly analyze the treated water of the water recovery equipment 6, but there is a problem that the analysis takes time and water recovery becomes difficult. Due to these reasons, the current situation is that water recovery in ultrapure water production equipment has not yet spread.
　本発明は、上記課題に鑑みてなされたものであり、超純水製造装置における水回収の促進を図ることの可能な超純水製造装置、および超純水製造装置の運転管理方法を提供することを目的とする。 The present invention has been made in view of the above problems, and provides an ultrapure water production apparatus capable of promoting water recovery in the ultrapure water production apparatus, and an operation management method for the ultrapure water production apparatus. for the purpose.
　上記目的を達成するために、本発明は第一に、一次純水システムと、二次純水システムと、各種排水を回収し該回収水を処理して一次純水システムの上流側に還流させる水回収設備とを有する超純水製造装置であって、前記水回収設備には、前記水回収設備の処理水を一次純水システムの上流側に供給する第一の流路及び前記超純水製造装置の系外に供給する第二の流路と、前記第一の流路と第二の流路とを切り替える切替手段と、前記水回収設備の処理水を処理する少なくとも一種の水処理装置を備えた水質予測手段と、該水質予測手段の処理水の水質計測手段と、が付設されている、超純水製造装置を提供する（発明１）。 In order to achieve the above object, the present invention firstly comprises a primary pure water system, a secondary pure water system, various types of waste water are recovered, the recovered water is treated, and the recovered water is returned to the upstream side of the primary pure water system. water recovery equipment, wherein the water recovery equipment includes a first flow path for supplying treated water of the water recovery equipment to an upstream side of a primary pure water system, and the ultrapure water A second flow path for supplying outside the system of the manufacturing apparatus, a switching means for switching between the first flow path and the second flow path, and at least one type of water treatment apparatus for treating treated water in the water recovery equipment and a water quality measuring means for the treated water of the water quality predicting means (Invention 1).
　かかる発明（発明１）によれば、水回収設備の処理水を水質予測手段で処理すると、この水質予測手段の処理水は、少なくとも一種の水処理装置を備えているので、水回収設備の処理水よりも一次純水システムの処理水の水質に近くなるため、この水質予測手段の処理水の水質を計測して得られた水質情報に基づいて、水回収設備の処理水を合流させた場合の二次純水システムにより製造される超純水への影響を予測し、超純水の水質が超純水の要求水質よりも低下すると予測される場合には、第一の流路から第二の流路に切り替えることにより、超純水の要求水質を維持しつつ、回収水の利用を図ることができる。 According to this invention (invention 1), when the treated water of the water recovery equipment is treated by the water quality prediction means, the treated water of the water quality prediction means is equipped with at least one type of water treatment device, so that the treatment of the water recovery equipment is performed. Since the water quality is closer to that of the treated water from the primary pure water system than water, when the treated water from the water recovery equipment is merged based on the water quality information obtained by measuring the water quality of the treated water with this water quality prediction means. Predict the impact on the ultrapure water produced by the secondary pure water system, and if it is predicted that the quality of the ultrapure water will be lower than the required quality of the ultrapure water, change from the first flow path to the second By switching to the second flow path, it is possible to utilize the recovered water while maintaining the required water quality of the ultrapure water.
　上記発明（発明１）においては、前記水質予測手段が、前記一次純水システムを構成する水処理装置と同種の装置を一以上備えることが好ましい（発明２）。特に上記発明（発明１，２）においては、前記水質予測手段が、逆浸透膜装置、紫外線酸化装置、膜式脱気装置、イオン交換装置の一又は二以上を有することが好ましい（発明３）。 In the above invention (Invention 1), it is preferable that the water quality prediction means includes one or more devices of the same type as the water treatment device that constitutes the primary pure water system (Invention 2). In particular, in the above inventions (inventions 1 and 2), the water quality prediction means preferably has one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device (invention 3). .
　かかる発明（発明２，３）によれば、水質予測手段を一次純水装置に汎用的に用いられている逆浸透膜装置、紫外線酸化装置、膜式脱気装置、イオン交換装置の一又は二以上で構成することにより、水回収設備の処理水を一次純水システムの原水に混合した際の影響の予測精度を向上させることができる。 According to such inventions (inventions 2 and 3), the water quality prediction means is one or two of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device that are commonly used in primary pure water devices. By configuring as described above, it is possible to improve the prediction accuracy of the influence when the treated water of the water recovery facility is mixed with the raw water of the primary pure water system.
　また、本発明は第二に、一次純水システムと、二次純水システムと、各種排水を回収し該回収水を処理して一次純水システムの上流側に還流させる水回収設備とを有し、前記水回収設備には、前記水回収設備の処理水を一次純水システムの上流側に還流させる第一の流路及び超純水製造装置外に供給する第二の流路と、前記第一の流路と第二の流路とを切り替える切替手段と、前記水回収設備の処理水を処理する少なくとも一種の水処理装置を備えた水質予測手段と、該水質予測手段の処理水の水質計測手段が付設されている超純水製造装置の運転管理方法であって、前記水質計測手段での水質の計測値に基づいて、前記第一の流路と第二の流路とを切り替える、超純水製造装置の運転管理方法を提供する（発明４）。 Secondly, the present invention has a primary pure water system, a secondary pure water system, and water recovery equipment for recovering various types of waste water, treating the recovered water, and returning it to the upstream side of the primary pure water system. The water recovery equipment includes a first flow path for returning the treated water of the water recovery equipment to the upstream side of the primary pure water system and a second flow path for supplying to the outside of the ultrapure water production apparatus, Switching means for switching between the first flow path and the second flow path, water quality prediction means comprising at least one type of water treatment device for treating treated water from the water recovery equipment, and water quality prediction means for treating water treated by the water quality prediction means. An operation management method for an ultrapure water production apparatus equipped with water quality measuring means, wherein the first flow path and the second flow path are switched based on the water quality measured by the water quality measuring means. , provides an operation management method for an ultrapure water production apparatus (Invention 4).
　かかる発明（発明４）によれば、水回収設備の処理水を水質予測手段で処理すると、この水質予測手段の処理水は、少なくとも一種の水処理装置を備えているので、水回収設備の処理水よりも一次純水システムの処理水の水質に近くなるため、この水質予測手段の処理水の水質を計測して得られた水質情報に基づいて、水回収設備の処理水を合流させた場合の二次純水システムにより製造される超純水への影響を予測し、超純水の水質が超純水の要求水質よりも低下すると予測される場合には、第一の流路から第二の流路に切り替えることにより、超純水の要求水質を維持しつつ、回収水の利用を図ることができる。 According to this invention (Invention 4), when the treated water of the water recovery equipment is treated by the water quality prediction means, the treated water of the water quality prediction means is equipped with at least one type of water treatment device, so that the treatment of the water recovery equipment is performed. Since the water quality is closer to that of the treated water from the primary pure water system than water, when the treated water from the water recovery equipment is merged based on the water quality information obtained by measuring the water quality of the treated water with this water quality prediction means. Predict the impact on the ultrapure water produced by the secondary pure water system, and if it is predicted that the quality of the ultrapure water will be lower than the required quality of the ultrapure water, change from the first flow path to the second By switching to the second flow path, it is possible to utilize the recovered water while maintaining the required water quality of the ultrapure water.
　上記発明（発明４）においては、前記水質予測手段が、前記一次純水システムを構成する水処理装置と同種の装置を一以上備えることが好ましい（発明５）。特に前記水質予測手段が、逆浸透膜装置、紫外線酸化装置、膜式脱気装置、イオン交換装置の一又は二以上を有することが好ましい（発明６）。 In the above invention (invention 4), it is preferable that the water quality prediction means include one or more devices of the same type as the water treatment device that constitutes the primary pure water system (invention 5). In particular, the water quality prediction means preferably has one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device (Invention 6).
　かかる発明（発明５，６）によれば、一次純水装置に汎用的に用いられている逆浸透膜装置、紫外線酸化装置、膜式脱気装置、イオン交換装置の一又は二以上で構成した水質予測手段で処理した水回収設備の処理水の水質に基づき、この水回収設備の処理水を一次純水システムの原水に混合した際の影響を判断することで、その予測精度を向上させることができる。 According to such inventions (inventions 5 and 6), one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device, which are commonly used in primary pure water devices. To improve the prediction accuracy by judging the influence when the treated water of the water recovery equipment is mixed with the raw water of the primary pure water system based on the water quality of the treated water of the water recovery equipment treated by the water quality prediction means. can be done.
　上記発明（発明４～６）においては、初期の一次純水システムの原水をあらかじめ水質予測手段に通水した際の水質計測手段による計測値に基づいて、水回収設備の処理水を水質予測手段に通水した際の水質計測手段による計測値を比較することにより、前記第一の流路と第二の流路とを切り替えを判断することが好ましい（発明７）。 In the above inventions (Inventions 4 to 6), the treated water of the water recovery equipment is determined by the water quality prediction means based on the measured value by the water quality measurement means when the raw water of the initial primary pure water system is passed through the water quality prediction means in advance. Preferably, switching between the first flow path and the second flow path is determined by comparing the measured values obtained by the water quality measuring means when the water is passed through (Invention 7).
　かかる発明（発明７）によれば、水回収設備の処理水を水質予測手段に通水した際の水質計測手段による計測値を、初期の一次純水システムの原水をあらかじめ水質予測手段に通水した際の水質計測手段による計測値と比較して、この水回収設備の処理水を一次純水システムの原水に混合した際の影響を判断することで、その予測精度をさらに向上させることができる。 According to this invention (Invention 7), the measured value by the water quality measuring means when the treated water of the water recovery equipment is passed through the water quality prediction means is obtained by preliminarily passing the raw water of the initial primary pure water system to the water quality prediction means. Prediction accuracy can be further improved by judging the effect of mixing the treated water from the water recovery facility with the raw water of the primary pure water system by comparing the measured value with the water quality measurement means when the water quality is measured. .
　本発明の超純水製造装置によれば、水回収設備の処理水を少なくとも一種の水処理装置を備えた水質予測手段で処理し、この水質予測手段の処理水の水質の計測値に基づいて、水回収設備の処理水を合流させた場合の二次純水システムにより製造される超純水への影響を予測し、一次純水の原水に合流させるか、超純水製造設備外に供給するか判断することができるので、超純水の要求水質を維持しつつ、回収水の利用を図ることができる。 According to the ultrapure water production apparatus of the present invention, the treated water from the water recovery facility is treated by the water quality prediction means having at least one type of water treatment device, and based on the measured value of the water quality of the treated water by the water quality prediction means , Predict the impact on the ultrapure water produced by the secondary pure water system when the treated water from the water recovery equipment is combined, and either combine the primary pure water with the raw water or supply it outside the ultrapure water production equipment. Therefore, it is possible to utilize the recovered water while maintaining the required water quality of the ultrapure water.
本発明の第一の実施形態による超純水製造装置を示すフロー図である。1 is a flow diagram showing an ultrapure water production apparatus according to a first embodiment of the present invention; FIG. 前記実施形態における水質予測手段の構成を示すフロー図である。It is a flow diagram showing the configuration of the water quality prediction means in the embodiment. 本発明の第二の実施形態による超純水製造装置を示すフロー図である。FIG. 4 is a flow diagram showing an ultrapure water production system according to a second embodiment of the present invention; 実施例１における水質予測手段によるＴＯＣの測定値と、一次純水装置の出口水（一次純水）の水質の測定値と、サブシステムの出口水（超純水）の水質の測定値と、を示すグラフである。TOC measurement value by the water quality prediction means in Example 1, measurement value of water quality of primary pure water device outlet water (primary pure water), measurement value of water quality of subsystem outlet water (ultra-pure water), is a graph showing 従来の水回収設備を備えた超純水製造装置の一例を示すフロー図である。FIG. 2 is a flow diagram showing an example of an ultrapure water production apparatus equipped with conventional water recovery equipment.
　以下、本発明の超純水製造装置について詳細に説明する。 The ultrapure water production apparatus of the present invention will be described in detail below.
［第一の実施形態］
＜超純水製造装置＞
　図１は、本発明の第一の実施形態による超純水製造装置を示している。この超純水製造装置は、基本的には前述した図５に示した超純水製造装置と同じであるので、同一の構成には同一の符号を付し、その詳細な説明を省略する。 [First embodiment]
<Ultrapure water production equipment>
FIG. 1 shows an ultrapure water production system according to a first embodiment of the present invention. Since this ultrapure water production system is basically the same as the ultrapure water production system shown in FIG. 5, the same components are denoted by the same reference numerals, and detailed description thereof will be omitted.
　本実施形態においては、水回収設備６には、供給管６１が接続しており、この供給管６１は、前処理水タンク３１に連通する第一の流路たる第一の管路７１と、超純水製造装置１以外の他の設備等に水を供給する第二の流路たる第二の管路７２とに分岐していて、切替手段としての開閉バルブ７１Ａ，７２Ａを開閉することでぞれぞれの管路に切替可能となっている。そして、第一の管路７１と第二の管路７２との分岐箇所より手前には、水回収設備６の回収水Ｗ５を少量分取する水質予測手段７３が接続されている。 In the present embodiment, a supply pipe 61 is connected to the water recovery equipment 6, and the supply pipe 61 includes a first pipe line 71 serving as a first flow path communicating with the pretreated water tank 31, It branches to a second pipe line 72 serving as a second flow path for supplying water to equipment other than the ultrapure water production apparatus 1, and by opening and closing opening/ closing valves 71A and 72A as switching means, It is possible to switch to each pipeline. A water quality prediction means 73 for collecting a small amount of the water W5 recovered from the water recovery equipment 6 is connected before the branch point of the first pipeline 71 and the second pipeline 72 .
　水質予測手段７３は、一次純水システム３を構成する逆浸透膜装置３２、紫外線酸化装置３４及びイオン交換装置３５とそれぞれ同種の小型の装置を有したものであり、図２に示すように送液ポンプ８１と小型の逆浸透膜装置８２、小型紫外線酸化装置８３及び小型イオン交換装置８４をそれぞれ有しており、末端にはＴＯＣ計、ホウ素計、シリカ計、微粒子計などから選択される１又は２以上の計測機器を備えた水質計測手段８５が設けられている。そして、この水質計測手段８５は、パーソナルコンピュータなどの図示しない制御手段に接続されていて、この制御手段は、前処理水Ｗ１の流量情報と水質計測手段８５の計測値とから開閉バルブ７１Ａ，７２Ａの開閉を制御可能となっている。 The water quality prediction means 73 has the same small devices as the reverse osmosis membrane device 32, the ultraviolet oxidation device 34, and the ion exchange device 35, which constitute the primary pure water system 3, respectively. It has a liquid pump 81, a small reverse osmosis membrane device 82, a small ultraviolet oxidation device 83, and a small ion exchange device 84, respectively. Alternatively, a water quality measuring means 85 having two or more measuring instruments is provided. This water quality measuring means 85 is connected to a control means (not shown) such as a personal computer, and this control means determines the opening/ closing valves 71A and 72A based on the flow rate information of the pretreated water W1 and the measured values of the water quality measuring means 85. It is possible to control the opening and closing of the
＜超純水製造装置の運転管理方法＞
　次に上述したような超純水製造装置の運転管理方法について説明する。 <Operation management method of ultrapure water production equipment>
Next, an operation management method for the ultrapure water production apparatus as described above will be described.
（超純水の製造工程）
　まず、原水Ｗを原水タンク２１に貯留したら、前処理装置２に供給する。この前処理装置２では、原水Ｗの濾過、凝集沈殿、精密濾過膜などによる前処理が施され、主に懸濁物質が除去され、前処理水Ｗ１とする。この前処理水Ｗ１は前処理水タンク３１に貯留される。 (Manufacturing process of ultrapure water)
First, after the raw water W is stored in the raw water tank 21 , it is supplied to the pretreatment device 2 . In this pretreatment device 2, the raw water W is subjected to pretreatment such as filtration, coagulation sedimentation, and microfiltration membranes, mainly to remove suspended solids, to obtain pretreated water W1. This pretreated water W1 is stored in the pretreated water tank 31 .
　次に、一次純水システム３で前処理水Ｗ１中の大半の電解質、微粒子、生菌等の除去を行うとともに有機物を分解して、一次純水（純水）Ｗ２を得る。この一次純水（純水）Ｗ２はサブタンク４１に貯留される。 Next, the primary pure water system 3 removes most of the electrolytes, fine particles, viable bacteria, etc. from the pretreated water W1 and decomposes organic matter to obtain primary pure water (pure water) W2. This primary pure water (pure water) W2 is stored in the sub-tank 41 .
　そして、サブシステム４は、例えば、供給ポンプと紫外線酸化装置と非再生型混床式イオン交換装置と限外ろ過膜（ＵＦ膜）とからなり、一次純水システム３で製造された一次純水Ｗ２中に含まれる微量の有機物（ＴＯＣ成分）を酸化分解し、炭酸イオン、有機酸類、アニオン性物質、さらには金属イオンやカチオン性物質を除去し、最後に限外濾過（ＵＦ）膜で微粒子を除去して超純水Ｗ３とし、これをユースポイント５に供給する。 Subsystem 4 comprises, for example, a supply pump, an ultraviolet oxidation device, a non-regenerative mixed-bed ion exchange device, and an ultrafiltration membrane (UF membrane), and the primary pure water produced in primary pure water system 3 is It oxidatively decomposes trace amounts of organic substances (TOC components) contained in W2, removes carbonate ions, organic acids, anionic substances, metal ions and cationic substances, and finally fine particles with an ultrafiltration (UF) membrane. is removed to obtain ultrapure water W3, which is supplied to the point of use 5.
（回収工程）
　上述したような超純水製造工程と並行して、水回収設備６では、各種排水や場合によってはユースポイント５で使用されなかった超純水Ｗ３を回収した排水Ｗ４を回収処理して回収水Ｗ５として、前処理水タンク３１に供給することで前処理水Ｗ１と合流させる。 (Recovery process)
In parallel with the ultrapure water production process as described above, in the water recovery equipment 6, various kinds of wastewater and, in some cases, the wastewater W4 obtained by recovering the ultrapure water W3 that was not used at the point of use 5 is recovered and treated to recover the recovered water. W5 is supplied to the pretreated water tank 31 to join with the pretreated water W1.
　このとき、供給管６１から回収水Ｗ５を分取し、水質予測手段７３で処理して予測水Ｗ６とする。この水質予測手段は、本実施形態においては、一次純水システム３と同様に小型の逆浸透膜装置８２、小型紫外線酸化装置８３及び小型イオン交換装置８４をそれぞれ有しているので、その予測水Ｗ６の水質は、一次純水システム３で処理された一次純水Ｗ２及び超純水Ｗ３と同じ傾向を示す。そこで、この予測水Ｗ６の水質を水質計測手段８５で計測する。そして、制御手段はこの計測値に基づいて、予測水Ｗ６が所定の水質より良好であれば、一次純水Ｗ２及び超純水Ｗ３の水質を維持できると判断して、開閉バルブ７１Ａを開成するとともに開閉バルブ７２Ａを閉鎖して、回収水Ｗ５を前処理水タンク３１に供給して超純水の原水として再利用する。一方、予測水Ｗ６が所定の水質より悪ければ、一次純水Ｗ２及び超純水Ｗ３の水質が悪化するおそれがあると判断して、開閉バルブ７１Ａを閉鎖するとともに開閉バルブ７２Ａを開成して、他の設備の用水ラインに供給したり、排水としたりすればよい。 At this time, recovered water W5 is collected from the supply pipe 61 and processed by the water quality prediction means 73 to obtain predicted water W6. In this embodiment, the water quality prediction means has a small reverse osmosis membrane device 82, a small ultraviolet oxidation device 83, and a small ion exchange device 84, similarly to the primary pure water system 3. The water quality of W6 shows the same tendency as the primary pure water W2 and ultrapure water W3 processed by the primary pure water system 3. Therefore, the quality of the predicted water W6 is measured by the water quality measuring means 85. FIG. Then, based on this measured value, the control means determines that the water quality of the primary pure water W2 and the ultrapure water W3 can be maintained if the predicted water W6 is better than a predetermined water quality, and opens the on-off valve 71A. At the same time, the open/close valve 72A is closed, and the recovered water W5 is supplied to the pretreated water tank 31 and reused as raw water for ultrapure water. On the other hand, if the predicted water quality W6 is worse than the predetermined water quality, it is determined that the quality of the primary pure water W2 and the ultrapure water W3 may deteriorate, and the opening/closing valve 71A is closed and the opening/closing valve 72A is opened. It may be supplied to the service water line of other facilities or used as a drain.
　例えば、前処理水Ｗ１を事前に水質予測手段７３で処理して、その処理水の水質を水質計測手段８５で計測した計測値をブランク値として記録しておき、このブランク値と予測水Ｗ６の水質の計測値とを比較することで、一次純水Ｗ２及び超純水Ｗ３の水質を精度よく予測して、回収水Ｗ５を前処理水タンク３１に供給するか否かを判断することができる。特に前処理水Ｗ１と回収水Ｗ５の流量比率も考慮することで、一次純水Ｗ２及び超純水Ｗ３の水質をさらに精度よく予測することができる。 For example, the pretreated water W1 is treated in advance by the water quality prediction means 73, the water quality of the treated water is measured by the water quality measurement means 85, and the measured value is recorded as a blank value. By comparing the measured values of the water quality, the water quality of the primary pure water W2 and the ultrapure water W3 can be accurately predicted, and it can be determined whether or not to supply the recovered water W5 to the pretreated water tank 31. . In particular, the water quality of the primary pure water W2 and the ultrapure water W3 can be predicted with higher accuracy by also considering the flow rate ratio of the pretreated water W1 and the recovered water W5.
　このような回収水Ｗ５を水質予測手段７３へ送給しての水質計測手段８５で水質の計測は、連続的もしくは断続的に行い、一次純水Ｗ２及び超純水Ｗ３の水質を維持できるか否かの判断に基づいて、開閉バルブ７１Ａと開閉バルブ７２Ａの開閉制御を行うことで回収水Ｗ５の有効利用が図れて好ましい。なお、水質予測手段７３への回収水Ｗ５の分取量（通水量）は、あまり多すぎると回収水Ｗ５のロスが多くなるので、回収水Ｗ５の全量に対して５％以下程度、具体的には１０００ｍＬ／分以下、特に５００ｍＬ／分以下とすることが好ましい。したがって、上記の通水量となるように、小型の逆浸透膜装置８２、小型紫外線酸化装置８３及び小型イオン交換装置８４を選定して水質予測手段７３を構成する。これにより、水質予測手段７３をコンパクト化することができるとともに、少量の水で評価することができて好ましい。 Whether the quality of the primary pure water W2 and the ultrapure water W3 can be maintained by continuously or intermittently measuring the quality of the recovered water W5 by supplying the recovered water W5 to the water quality prediction means 73 and measuring the water quality by the water quality measuring means 85. It is preferable that the recovery water W5 can be effectively used by controlling the opening/closing of the opening/closing valve 71A and the opening/closing valve 72A based on the determination of whether or not the opening/closing valve 71A is open. If the fractional amount (water flow rate) of the recovered water W5 to the water quality prediction means 73 is too large, the loss of the recovered water W5 increases. is preferably 1000 mL/min or less, particularly 500 mL/min or less. Therefore, the small reverse osmosis membrane device 82, the small ultraviolet oxidation device 83, and the small ion exchange device 84 are selected to constitute the water quality prediction means 73 so as to achieve the above water flow rate. As a result, the water quality prediction means 73 can be made compact, and evaluation can be performed with a small amount of water, which is preferable.
　上述したような本実施形態の超純水製造装置によれば、超純水製造装置に回収水Ｗ５を流用した際の超純水Ｗ３の水質の悪化を予測し、これを未然に防ぐことができるので、該回収水Ｗ５を再利用しても超純水Ｗ３の水質を安定的に維持管理することができる。 According to the ultrapure water production apparatus of the present embodiment as described above, it is possible to predict deterioration of the water quality of the ultrapure water W3 when the recovered water W5 is diverted to the ultrapure water production apparatus, and to prevent it. Therefore, even if the recovered water W5 is reused, the water quality of the ultrapure water W3 can be stably maintained and managed.
［第二の実施形態］
　次に本発明の第二の実施形態による超純水製造装置について説明する。 [Second embodiment]
Next, an ultrapure water production apparatus according to a second embodiment of the present invention will be described.
＜超純水製造装置＞
　図３は、第二の実施形態による超純水製造装置を示している。本実施形態の超純水製造装置１は、前述した第一の実施形態の超純水製造装置において、回収水Ｗ５を第一の管路７１と第二の管路７２の分岐箇所より手前でタンク７４に貯留する以外同じであるので、同一の構成には同一の符号を付し、その詳細な説明を省略する。 <Ultrapure water production equipment>
FIG. 3 shows an ultrapure water production system according to a second embodiment. The ultrapure water production apparatus 1 of this embodiment is different from the ultrapure water production apparatus of the first embodiment described above, and the recovered water W5 is introduced before the branch point of the first pipeline 71 and the second pipeline 72. Since they are the same except that they are stored in the tank 74, the same components are denoted by the same reference numerals, and detailed description thereof will be omitted.
＜超純水製造装置の運転管理方法＞
　超純水製造装置の運転管理方法は、前述した第一の実施形態において、回収水Ｗ５を第一の管路７１と第二の管路７２の分岐箇所より手前でタンク７４に貯留する以外同じである。水質予測手段７３で回収水Ｗ５の水質を計測して、一次純水Ｗ２及び超純水Ｗ３の水質を維持できるか否かを判断するまでには、多少の時間がかかる。そこで第一の管路７１から前処理水タンク３１に回収水Ｗ５を供給する前に回収水Ｗ５を一旦タンク７４に貯留することにより、水質予測手段７３での測定判断時間に応じた回収水Ｗ５の滞留時間を確保することで、一次純水Ｗ２及び超純水Ｗ３の水質を維持できない水質の回収水Ｗ５が前処理水タンク３１に供給される蓋然性をより低下させることができる。 <Operation management method of ultrapure water production equipment>
The operation management method of the ultrapure water production apparatus is the same as in the above-described first embodiment except that the recovered water W5 is stored in the tank 74 before the branch point of the first pipeline 71 and the second pipeline 72. is. It takes some time to measure the water quality of the recovered water W5 with the water quality prediction means 73 and judge whether the water quality of the primary pure water W2 and the ultrapure water W3 can be maintained. Therefore, by temporarily storing the recovered water W5 in the tank 74 before supplying the recovered water W5 from the first pipe line 71 to the pretreated water tank 31, the recovered water W5 corresponding to the measurement judgment time in the water quality prediction means 73 By securing the retention time of , the probability of supplying the pretreated water tank 31 with the recovered water W5 having a water quality that cannot maintain the water quality of the primary pure water W2 and the ultrapure water W3 can be further reduced.
　以上、本発明について前記各実施形態に基づいて説明してきたが、本発明は前記実施形態に限定されず、種々の変形実施が可能である。例えば、一次純水システム３及びサブシステム４の構成としては、限定されず種々の構成の一次純水システム３及びサブシステム４の超純水製造装置１に適用可能である。また、水質予測手段７３は、本実施形態のように一次純水システム３と同種の水処理装置を全て有する必要はなく、一次純水Ｗ２及び超純水Ｗ３の水質への影響を判断できればよく、いずれか一種以上を有していればよい。さらに、一次純水システム３と同種の水処理装置に加えてサブシステム４と同種の水処理装置をさらに付加して水質予測手段７３を構成してもよい。 Although the present invention has been described above based on the above-described embodiments, the present invention is not limited to the above-described embodiments, and various modifications are possible. For example, the configurations of the primary pure water system 3 and the subsystem 4 are not limited, and can be applied to the ultrapure water production apparatus 1 having various configurations of the primary pure water system 3 and the subsystem 4 . Moreover, the water quality prediction means 73 does not need to have all the water treatment devices of the same type as the primary pure water system 3 as in the present embodiment, and only needs to be able to determine the effects of the primary pure water W2 and the ultrapure water W3 on the water quality. , any one or more. Furthermore, in addition to the water treatment equipment of the same type as the primary pure water system 3, the water quality prediction means 73 may be configured by further adding a water treatment equipment of the same type as the subsystem 4.
　本発明を以下の具体的実施例に基づきさらに詳細に説明する。 The present invention will be described in more detail based on the following specific examples.
［実施例１］
　図１において、前処理装置２は設けず、一次純水システム３を前処理水タンク、逆浸透膜装置、脱炭酸膜、電気脱イオン装置、紫外線酸化装置及び混床式イオン交換装置により構成し、サブシステム４をサブタンク、紫外線酸化装置、非再生型混床式イオン交換装置及び限外ろ過膜（ＵＦ膜）により構成した。また、水質予測手段７３を小型逆浸透膜装置（ダウ社製　ＭＲＭ１２５）、脱炭酸膜（３Ｍ社製　Ｘ５０）、小型電気脱イオン装置（Ｅｖｏｑｕａ社製　ＭＸ３０）、小型紫外線酸化装置（（株）日本フォトサイエンス製　ＫＵＳ－１／２Ｎ－ＳＰ）及び小型混床式イオン交換装置（栗田工業社製）により構成し、水質計測手段８５としてＴＯＣ計（Ｓｉｅｖｅｒｓ社製　５００ＲＬｅ）を用いて超純水製造装置１を構成した。なお、一次純水システム３の出口、及びサブシステム４の出口にもＴＯＣ計をそれぞれ設置した。 [Example 1]
In FIG. 1, the pretreatment device 2 is not provided, and the primary pure water system 3 is composed of a pretreated water tank, a reverse osmosis membrane device, a decarbonation membrane, an electrodeionization device, an ultraviolet oxidation device and a mixed-bed ion exchange device. , the sub-system 4 was composed of a sub-tank, an ultraviolet oxidizer, a non-regenerative mixed-bed ion exchanger and an ultrafiltration membrane (UF membrane). In addition, the water quality prediction means 73 is a small reverse osmosis membrane device (MRM125 manufactured by Dow), a decarbonation membrane (X50 manufactured by 3M), a small electrodeionization device (MX30 manufactured by Evoqua), a small ultraviolet oxidation device (Japan Co., Ltd.). KUS-1/2N-SP manufactured by Photoscience) and a small mixed-bed ion exchange device (manufactured by Kurita Water Industries Ltd.). 1 was constructed. A TOC meter was also installed at the outlet of the primary pure water system 3 and at the outlet of the subsystem 4, respectively.
　この超純水製造装置１に市水を原水Ｗとするとともに模擬排水Ｗ４も市水として合流させて供給し、超純水Ｗ３を製造した。このとき、超純水Ｗ３の製造開始から１時間４５分～２時間１５分の３０分間、模擬排水Ｗ４に尿素を添加した。この間の水質予測手段７３の処理水（予測水）Ｗ６、一次純水Ｗ２及び超純水Ｗ３のＴＯＣを測定した。結果を相対値として図４に示す。 City water was used as raw water W and simulated waste water W4 was combined as city water and supplied to this ultrapure water production apparatus 1 to produce ultrapure water W3. At this time, urea was added to the simulated waste water W4 for 1 hour and 45 minutes to 2 hours and 15 minutes and 30 minutes from the start of production of the ultrapure water W3. The TOC of the treated water (predicted water) W6, the primary pure water W2 and the ultrapure water W3 of the water quality prediction means 73 during this period was measured. The results are shown in FIG. 4 as relative values.
　図４から明らかなとおり、予測水Ｗ６、一次純水Ｗ２及び超純水Ｗ３のＴＯＣ値はタイムラグをもって同様の傾向を示すことがわかる。そして、超純水Ｗ３の水質保証値から図示する範囲では、第一の管路７１から第二の管路７２へと切替える必要があると判断できる。これらのことから、事前に超純水製造装置の原水Ｗを水質予測手段７３に通水してブランクを求め、対象となる回収水Ｗ５の流入割合・滞留時間・水質予測手段７３の処理水（予測水）Ｗ６の測定値などから超純水Ｗ３に影響する閾値を求めることにより、一次純水Ｗ２及び超純水Ｗ３の水質を予測して、超純水製造装置における回収水Ｗ５の利用を促進することが可能となる。 As is clear from FIG. 4, the TOC values of predicted water W6, primary pure water W2, and ultrapure water W3 show similar trends with a time lag. Then, it can be determined that it is necessary to switch from the first pipeline 71 to the second pipeline 72 within the illustrated range from the water quality assurance value of the ultrapure water W3. For these reasons, the raw water W of the ultrapure water production apparatus is passed through the water quality prediction means 73 in advance to obtain a blank, and the inflow rate, residence time, and treated water of the water quality prediction means 73 of the target recovered water W5 ( The water quality of the primary pure water W2 and the ultrapure water W3 is predicted by obtaining the threshold value that affects the ultrapure water W3 from the measured value of the predicted water W6, etc., and the utilization of the recovered water W5 in the ultrapure water production apparatus is predicted. It is possible to promote
１　超純水製造装置
２　前処理装置
　２１　原水タンク
３　一次純水システム
　３１　前処理水タンク
　３２　逆浸透膜装置
　３３　タンク
　３４　紫外線酸化装置
　３５　イオン交換装置
４　サブシステム
　４１　サブタンク
５　ユースポイント（ＵＰ）
６　水回収設備
　６１　供給管
　７１　第一の管路
　７１Ａ　開閉バルブ
　７２　第二の管路
　７２Ａ　開閉バルブ
　７３　水質予測手段
　７４　タンク
　８１　送液ポンプ
　８２　小型の逆浸透膜装置
　８３　小型紫外線酸化装置
　８４　小型イオン交換装置
　８５　水質計測手段
Ｗ　原水
Ｗ１　前処理水
Ｗ２　一次純水（純水）
Ｗ３　超純水
Ｗ４　排水
Ｗ５　回収水
Ｗ６　予測水 1 Ultrapure Water Production Device 2 Pretreatment Device 21 Raw Water Tank 3 Primary Pure Water System 31 Pretreated Water Tank 32 Reverse Osmosis Membrane Device 33 Tank 34 Ultraviolet Oxidation Device 35 Ion Exchange Device 4 Subsystem 41 Subtank 5 Point of Use (UP)
6 water recovery equipment 61 supply pipe 71 first pipe 71A opening/closing valve 72 second pipe 72A opening/closing valve 73 water quality prediction means 74 tank 81 liquid transfer pump 82 small reverse osmosis membrane device 83 small ultraviolet oxidation device 84 small ion Exchange device 85 Water quality measuring means W Raw water W1 Pretreated water W2 Primary pure water (pure water)
W3 Ultrapure water W4 Waste water W5 Recovered water W6 Predicted water

Claims (7)

  1. 　一次純水システムと、二次純水システムと、各種排水を回収し該回収水を処理して一次純水システムの上流側に還流させる水回収設備とを有する超純水製造装置であって、
    　前記水回収設備には、前記水回収設備の処理水を一次純水システムの上流側に供給する第一の流路及び前記超純水製造装置の系外に供給する第二の流路と、前記第一の流路と第二の流路とを切り替える切替手段と、前記水回収設備の処理水を処理する少なくとも一種の水処理装置を備えた水質予測手段と、該水質予測手段の処理水の水質計測手段と、が付設されている、超純水製造装置。     An ultrapure water production apparatus having a primary pure water system, a secondary pure water system, and a water recovery facility for recovering various types of waste water, treating the recovered water, and returning it to the upstream side of the primary pure water system,
    The water recovery equipment includes a first flow path for supplying the treated water of the water recovery equipment to the upstream side of the primary pure water system and a second flow path for supplying the treated water to the outside of the system of the ultrapure water production apparatus; Switching means for switching between the first flow path and the second flow path, water quality prediction means including at least one type of water treatment device for treating treated water from the water recovery facility, and treated water from the water quality prediction means water quality measuring means, and an ultrapure water production apparatus.
  2. 　前記水質予測手段が、前記一次純水システムを構成する水処理装置と同種の装置を一以上備える、請求項１に記載の超純水製造装置。 The ultrapure water production apparatus according to claim 1, wherein the water quality prediction means comprises one or more devices of the same type as the water treatment devices that constitute the primary pure water system.
  3. 　前記水質予測手段が、逆浸透膜装置、紫外線酸化装置、膜式脱気装置、イオン交換装置の一又は二以上を有する、請求項１又は２に記載の超純水製造装置。 The ultrapure water production apparatus according to claim 1 or 2, wherein the water quality prediction means has one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device.
  4. 　一次純水システムと、二次純水システムと、各種排水を回収し該回収水を処理して一次純水システムの上流側に還流させる水回収設備とを有し、前記水回収設備には、前記水回収設備の処理水を一次純水システムの上流側に還流させる第一の流路及び超純水製造装置の系外に供給する第二の流路と、前記第一の流路と第二の流路とを切り替える切替手段と、前記水回収設備の処理水を処理する少なくとも一種の水処理装置を備えた水質予測手段と、該水質予測手段の処理水の水質計測手段とが付設されている超純水製造装置の運転管理方法であって、
    　前記水質計測手段での水質の計測値に基づいて、前記第一の流路と第二の流路とを切り替える、超純水製造装置の運転管理方法。     It has a primary pure water system, a secondary pure water system, and a water recovery facility for recovering various types of waste water, treating the recovered water, and returning it to the upstream side of the primary pure water system, wherein the water recovery facility includes: a first flow path for recirculating the treated water of the water recovery equipment to the upstream side of the primary pure water system and a second flow path for supplying to the outside of the system of the ultrapure water production apparatus; Switching means for switching between the two flow paths, water quality prediction means having at least one type of water treatment device for treating the treated water of the water recovery equipment, and water quality measurement means for the treated water of the water quality prediction means are attached. An operation management method for an ultrapure water production apparatus comprising:
    An operation management method for an ultrapure water production apparatus, wherein the first flow path and the second flow path are switched based on the water quality measured by the water quality measuring means.
  5. 　前記水質予測手段が、前記一次純水システムを構成する水処理装置と同種の装置を一以上備える、請求項４に記載の超純水製造装置の運転管理方法。 The operation management method for an ultrapure water production apparatus according to claim 4, wherein the water quality prediction means comprises one or more devices of the same type as the water treatment devices that constitute the primary pure water system.
  6. 　前記水質予測手段が、逆浸透膜装置、紫外線酸化装置、膜式脱気装置、イオン交換装置の一又は二以上を有する、請求項４又は５に記載の超純水製造装置の運転管理方法。 The operation management method for an ultrapure water production apparatus according to claim 4 or 5, wherein the water quality prediction means has one or more of a reverse osmosis membrane device, an ultraviolet oxidation device, a membrane degassing device, and an ion exchange device.
  7. 　初期の一次純水システムの原水をあらかじめ水質予測手段に通水した際の水質計測手段による計測値に基づいて、水回収設備の処理水を水質予測手段に通水した際の水質計測手段による計測値を比較することにより、前記第一の流路と第二の流路とを切り替えを判断する、請求項４～６のいずれか１項に記載の超純水製造装置の運転管理方法。 Measurement by the water quality measuring means when the treated water of the water recovery equipment is passed through the water quality predicting means based on the measured value by the water quality measuring means when the raw water of the initial primary pure water system is passed through the water quality predicting means in advance. 7. The operation management method for an ultrapure water production apparatus according to any one of claims 4 to 6, wherein switching between the first channel and the second channel is determined by comparing values.
PCT/JP2023/003008 2022-02-07 2023-01-31 Ultrapure water production apparatus, and operation management method of ultrapure water production apparatus WO2023149414A1 (en)

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JP2013202587A (en) * 2012-03-29 2013-10-07 Kurita Water Ind Ltd Ultra-pure water producing apparatus
JP2016107249A (en) * 2014-12-10 2016-06-20 野村マイクロ・サイエンス株式会社 Ultrapure water production system and method
JP2019098270A (en) * 2017-12-05 2019-06-24 栗田工業株式会社 Method and apparatus for distributing rinse wastewater of substrate cleaning machine
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JP2013202587A (en) * 2012-03-29 2013-10-07 Kurita Water Ind Ltd Ultra-pure water producing apparatus
JP2016107249A (en) * 2014-12-10 2016-06-20 野村マイクロ・サイエンス株式会社 Ultrapure water production system and method
JP2019098270A (en) * 2017-12-05 2019-06-24 栗田工業株式会社 Method and apparatus for distributing rinse wastewater of substrate cleaning machine
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