WO2023125072A1 - Light-emitting diode and preparation method therefor - Google Patents

Light-emitting diode and preparation method therefor Download PDF

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Publication number
WO2023125072A1
WO2023125072A1 PCT/CN2022/139562 CN2022139562W WO2023125072A1 WO 2023125072 A1 WO2023125072 A1 WO 2023125072A1 CN 2022139562 W CN2022139562 W CN 2022139562W WO 2023125072 A1 WO2023125072 A1 WO 2023125072A1
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Prior art keywords
layer
electron transport
metal
emitting diode
light
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PCT/CN2022/139562
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French (fr)
Chinese (zh)
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张天朔
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Tcl科技集团股份有限公司
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Publication of WO2023125072A1 publication Critical patent/WO2023125072A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/14Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • H10K50/115OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers comprising active inorganic nanostructures, e.g. luminescent quantum dots
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14Carrier transporting layers
    • H10K50/16Electron transporting layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14Carrier transporting layers
    • H10K50/16Electron transporting layers
    • H10K50/165Electron transporting layers comprising dopants
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K99/00Subject matter not provided for in other groups of this subclass

Definitions

  • the present application relates to the field of optoelectronic technology, in particular to a light emitting diode and a preparation method thereof.
  • light-emitting diode technology As a new type of display lighting technology, light-emitting diode technology has good energy saving, reliability, safety and environmental friendliness, so it has broad development prospects and is still one of the important research directions of display lighting.
  • the main structure of a light emitting diode includes a cathode, an anode, a hole transport layer, an electron transport layer and a light emitting layer.
  • the light-emitting diode with cathode, anode, hole transport layer, electron transport layer and light-emitting layer structure has not yet reached an ideal value in terms of brightness, efficiency and lifetime.
  • each film layer material such as the electron transport layer material
  • the light emitted by the light-emitting layer will cause non-dissipative loss due to the light absorption of the film in the direction of its exit, resulting in the brightness of the light-emitting diode and Efficiency drops.
  • the application provides a light emitting diode and a preparation method thereof.
  • the application provides a light emitting diode, including:
  • an anode an anode, a cathode, and a light-emitting layer arranged between the anode and the cathode;
  • a composite electron transport layer the composite electron transport layer is arranged between the cathode and the light-emitting layer, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
  • a metal layer the metal layer is arranged between the cathode and the composite electron transport layer, the material of the metal layer is doped or undoped metal element, and the metal elements in the metal element are selected from group VIII elements.
  • the ratio of the amount of the metal salt to the electron transport material is 0.04 ⁇ 0.1.
  • the ratio of the amount of the metal element to the amount of the electron transport material is 0.02-0.033.
  • the metal salt is selected from one or more of ferric chloride, cobalt chloride, ferric acetate, cobalt acetate, ferric stearate, ferric nitrate, and cobalt nitrate.
  • the metal element is selected from one or more of nickel, palladium, and platinum.
  • the doping element in the doped metal element is selected from group VIII elements, and the doping element is different from the metal element in the metal element.
  • the electron transport material is selected from one or more of doped or undoped semiconductor nanoparticles and organic electron transport materials.
  • the electron transport material is selected from doped or undoped TiO 2 , ZnO, ZrO, SnO 2 , WO 3 , Ta 2 O 3 , HfO 3 , Al 2 O 3.
  • the doping elements of the electron transport material are selected from one or more of Al, Mg, In, Li, Ga, Cd, Cs, and Cu.
  • the light emitting diode is one of a light emitting diode with an upright structure and a light emitting diode with an inverted structure.
  • the light emitting diode is one of quantum dot light emitting diodes, organic light emitting diodes, and micron light emitting diodes.
  • the quantum dot light-emitting diode includes a quantum dot light-emitting layer; the material of the quantum dot light-emitting layer is selected from CdSe, CdS, ZnSe, ZnS, CdTe, ZnTe, CdZnS, CdZnSe, CdZnTe, ZnSeS, ZnSeTe, ZnTeS, CdSeS, CdSeTe, CdTeS, CdZnSeS, CdZnSeTe, CdZnSTe, CdSeSTe, ZnSeSTe, CdZnSeSTe, CdSe/ZnS, CdZnSe/ZnS, CdS/CdZnS, InP, InAs, InAsP, InP/InAsP, PbS, Pb Se, One or more of PbTe, Pb
  • a method for preparing a light-emitting diode comprising:
  • the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
  • the material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
  • the above steps of depositing and forming a laminated composite electron transport layer and metal layer include:
  • a metal layer is formed by depositing a metal element on the composite electron transport layer.
  • the above curing to form the composite electron transport layer is achieved by exposing the film layer of the electron transport material deposited with the metal salt to the air, and the way of exposure to the air includes exposing the film layer of the electron transport material deposited with the metal salt to the air.
  • the electron transport material film layer is placed in the air environment for 0.25 ⁇ 1min.
  • the above-mentioned curing to form a composite electron transport layer is realized by ultraviolet light irradiation, and the ultraviolet light irradiation method includes utilizing ultraviolet light to irradiate an electron transport material film layer deposited with a metal salt for 0.25 ⁇ 30min.
  • a method for preparing a light-emitting diode comprising:
  • the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
  • the material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
  • the above steps of depositing and forming the stacked metal layer and the composite electron transport layer include:
  • Metal salt is deposited on the metal layer, and before the film layer of the metal salt is solidified, an electron transport material is deposited on the film layer of the metal salt to obtain a film layer of the metal salt deposited with the electron transport material, which is cured to form a composite electron transport layer.
  • the above-mentioned curing to form a composite electron transport layer is achieved by exposing the metal salt film layer deposited with the electron transport material to the air.
  • the metal salt film layer of the material is placed in the air environment for 0.25 ⁇ 1min.
  • the above-mentioned curing to form the composite electron transport layer is realized by ultraviolet light irradiation, and the ultraviolet light irradiation method includes 0.25 ⁇ 30min.
  • the light-emitting diode provided by this application includes a composite electron transport layer formed by metal salts of Group VIII metals and electron transport materials.
  • the composite electron transport layer has a higher film transmittance, and the defects in the film layer Less, can effectively reduce the probability of the outgoing light being absorbed by defects, thereby enhancing the device transmittance of the light emitting diode.
  • a metal layer including Group VIII elements laminated with the above-mentioned composite electron transport layer is provided in the light-emitting diode of the present application.
  • the metal layer has high electrical conductivity, and can effectively balance the increase caused by the introduction of the metal salt of the above-mentioned Group VIII metal.
  • High sheet resistance is conducive to the transport of carriers and improves device efficiency.
  • the composite electron transport layer and the metal layer in the light-emitting diode of the present application complement each other and cooperate with each other, so that the light-emitting diode of the present application has higher brightness and efficiency.
  • FIG. 1 is a schematic structural view of a quantum dot light-emitting diode provided in Example 1 of the present application;
  • Example 2 is a schematic flow diagram of a method for manufacturing a quantum dot light-emitting diode with an upright structure provided in Example 1 of the present application;
  • FIG. 3 is a schematic structural diagram of a quantum dot light-emitting diode provided in Embodiment 7 of the present application;
  • FIG. 4 is a schematic flow diagram of a method for manufacturing a quantum dot light-emitting diode with an upright structure provided in Embodiment 7 of the present application;
  • Fig. 5 is a schematic structural diagram of a quantum dot light-emitting diode provided in Embodiment 8 of the present application;
  • FIG. 6 is a schematic flowchart of a method for manufacturing an inverted quantum dot light-emitting diode provided in Embodiment 8 of the present application.
  • Embodiments of the present application provide a light emitting diode and a manufacturing method thereof. Each will be described in detail below. It should be noted that the description sequence of the following embodiments is not intended to limit the preferred sequence of the embodiments. In addition, in the description of the present application, the term “including” means “including but not limited to”. The terms first, second, third, etc. are used for designation only and do not impose numerical requirements or establish an order.
  • expressions such as “one or more” refer to one or more of the listed items, and “multiple” refers to any combination of two or more of these items, including single items (species) ) or any combination of plural items (species), for example, “at least one (species) of a, b, or c” or “at least one (species) of a, b, and c” can mean: a ,b,c,a-b (that is, a and b),a-c,b-c, or a-b-c, where a,b,c can be single or multiple.
  • the application provides a light emitting diode, including:
  • an anode an anode, a cathode, and a light-emitting layer arranged between the anode and the cathode;
  • a composite electron transport layer the composite electron transport layer is arranged between the cathode and the light-emitting layer, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
  • a metal layer the metal layer is arranged between the cathode and the composite electron transport layer, the material of the metal layer is doped or undoped metal element, and the metal elements in the metal element are selected from group VIII elements.
  • the composite electron transport layer containing the metal salt has higher transmittance, thereby making the light-emitting diode have higher brightness.
  • the metal layer stacked with the composite electron transport layer can effectively balance the sheet resistance and improve the efficiency of the light emitting diode.
  • the above-mentioned stacking arrangement of the composite electron transport layer and the light-emitting layer is a stacking arrangement in a broad sense, that is, the composite electron transport layer can be directly in contact with the light-emitting layer and stacked, or there can be other film layers between the composite electron transport layer and the light-emitting layer. Case cascading settings.
  • the metal elements in the metal layer and the metal elements in the metal salt are elements of the same group (Group VIII), so the metal atoms in the metal layer and the metal atoms in the metal salt can have similar electron orbits.
  • the ratio of the amount of the metal salt to the electron transport material is 0.04 ⁇ 0.1.
  • the ratio range of the amount of the metal salt to the electron transport material may also be a sub-range of the above range, for example, in some embodiments, the ratio of the amount of the metal salt to the electron transport material may be 0.05-0.1, or Can be 0.04 ⁇ 0.067.
  • the ratio of the amount of the simple metal to the electron transport material is 0.02-0.033.
  • the ratio of the amount of the simple metal to the electron transport material is within the above range, the sheet resistance of the composite electron transport layer can be effectively reduced while ensuring that the transmittance of the composite electron transport layer is not significantly reduced.
  • the ratio of the thickness of the film can be used to approximate the ratio of the amount of the substance.
  • the metal salt is selected from one or more of ferric chloride, cobalt chloride, ferric acetate, cobalt acetate, ferric stearate, ferric nitrate and cobalt nitrate.
  • the above-mentioned iron acetate may be iron acetate monohydrate
  • the above-mentioned cobalt acetate may be cobalt acetate tetrahydrate.
  • the metal element may be selected from one or more of nickel, palladium, and platinum.
  • the doping element of the doped metal element is selected from group VIII elements, and the doping element is different from the metal element in the metal element.
  • the electron transport material is selected from one or more of doped or undoped semiconductor nanoparticles and organic electron transport materials.
  • the doped or undoped semiconductor nanoparticles are doped or undoped metal oxides.
  • the electron transport material can be selected from doped or undoped TiO 2 , ZnO, ZrO, SnO 2 , WO 3 , Ta 2 O 3 , HfO 3 , Al 2 O 3 , ZrSiO 4 , BaTiO 3 , BaZrO 3.
  • CdS, ZnSe, and ZnS One or more of CdS, ZnSe, and ZnS.
  • the doping elements of the electron transport material may be selected from one or more of Al, Mg, In, Li, Ga, Cd, Cs, and Cu.
  • the light emitting diode is one of a light emitting diode with an upright structure and a light emitting diode with an inverted structure.
  • the light emitting diode is one of quantum dot light emitting diode (QLED), organic light emitting diode (OLED), and micron light emitting diode (Micro LED).
  • the light-emitting diodes in this application can be quantum dot light-emitting diodes with upright or inverted structures, organic light-emitting diodes with upright or inverted structures, or micron light-emitting diodes with upright or inverted structures.
  • the light emitting diode is a light emitting diode with a vertical structure.
  • the device structure of the light emitting diode in the present application may be one of a three-layer device, a multi-layer device, a top emitter device, a bottom emitter device, and a double-sided emitter device.
  • the quantum dot light-emitting diode includes a quantum dot light-emitting layer; the material of the quantum dot light-emitting layer is selected from CdSe, CdS, ZnSe, ZnS, CdTe, ZnTe, CdZnS, CdZnSe, CdZnTe, ZnSeS, ZnSeTe, ZnTeS, CdSeS , CdSeTe, CdTeS, CdZnSeS, CdZnSeTe, CdZnSTe, CdSeSTe, ZnSeSTe, CdZnSeSTe, CdSe/ZnS, CdZnSe/ZnS, CdS/CdZnS, InP, InAs, InAsP, InP/InAsP, PbS, PbSe, PbTe, PbSeS, PbSeTe, Pb
  • the material of the quantum dot light-emitting layer is selected from one of II-VI group semiconductor nanocrystals CdSe, CdS, ZnSe, CdS, PbS, PbS and a core-shell structure material composed of the above-mentioned II-VI group semiconductor nanocrystals or more.
  • the embodiment of the present application also provides a method for preparing a light-emitting diode.
  • the above-mentioned preparation method includes:
  • a cathode is formed on the metal layer.
  • the material of the composite electron transport layer includes an electron transport material and a metal salt; the metal elements in the metal salt are selected from Group VIII elements.
  • the material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
  • the above-mentioned preparation method includes:
  • An anode is formed on the light emitting layer.
  • the material of the composite electron transport layer includes an electron transport material and a metal salt; the metal elements in the metal salt are selected from group VIII elements.
  • the material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
  • the above expression of depositing another film layer on the film layer is a broad sense, meaning above or above, which can be on the film layer Another film layer can be directly deposited on the film layer, and another film layer can be formed on the film layer, and another film layer can be formed on the other film layer.
  • the composite electron transport layer is deposited and formed by using the above preparation method of light-emitting diodes, the electron transport material and the metal salt can be mixed and deposited directly to form a composite electron transport layer, or the electron transport material and the metal salt can be deposited separately to form a composite electron transport layer. layer.
  • the composite electron transport layer is formed by separately depositing the electron transport material and the metal salt.
  • the deposition method is slightly different according to the structure of the light emitting diode device.
  • the steps of depositing and forming the stacked composite electron transport layer and the metal layer include:
  • a metal layer is formed by depositing a metal element on the composite electron transport layer.
  • the steps of depositing and forming the stacked metal layer and the composite electron transport layer include:
  • Metal salt is deposited on the metal layer, and before the film layer of the metal salt is solidified, an electron transport material is deposited on the film layer of the metal salt to obtain a film layer of the metal salt deposited with the electron transport material, which is cured to form a composite electron transport layer.
  • the materials deposited later should be deposited before the materials deposited earlier are not completely cured and formed into a separate film. On top of the deposited material, in this way, the later deposited material can penetrate into the thin film of the first deposited material, so that Group VIII metal elements can be introduced into the electron transport material crystallization stage to form a composite electron transport layer, reducing the probability of the outgoing light being absorbed by defects , to increase the transmittance.
  • the film layer of the deposited electron transport material and the film layer of the metal salt are not two completely independent film layers, and the film interface between the two There is material in the lower film layer that penetrates into the upper film layer.
  • the metal salt of group VIII metal deposited between the electron transport material film layer and the metal elemental film layer can separate the metal layer from the independent electron transport material film layer, and play a role of interval protection, so that the material at the film layer interface The lattice gap between them is closer, and there are fewer defects at the film interface, so that most of the light can pass through the film interface without being absorbed, and the final brightness of the device is improved.
  • a non-high-temperature cross-linking operation may be used to cure and cross-link the first-deposited material.
  • the above-mentioned curing to form a composite electron transport layer can be achieved by exposing the film layer of the electron transport material deposited with the metal salt to air and/or by irradiating ultraviolet light.
  • the manner of exposing the film layer of the electron transport material deposited with the metal salt to the air includes placing the film layer of the electron transport material deposited with the metal salt in an air environment for 0.25-1 min.
  • the method of irradiating with ultraviolet light includes irradiating the film layer of the electron transport material deposited with the metal salt by ultraviolet light for 0.25-30 minutes.
  • the above-mentioned curing to form a composite electron transport layer can be achieved by exposing the metal salt film layer deposited with the electron transport material to air and/or by irradiating ultraviolet light.
  • the method of exposing the metal salt to the air includes placing the metal salt film layer deposited with the electron transport material in the air environment for 0.25 ⁇ 1min; the method of ultraviolet light irradiation includes using ultraviolet light to irradiate the metal salt film deposited with the electron transport material Layer 0.25 ⁇ 30min.
  • the above-mentioned ultraviolet light irradiation method can be carried out under a protective gas (such as nitrogen, inert gas) atmosphere; the ultraviolet light source can vertically irradiate the device film; the wavelength of the above-mentioned ultraviolet light can be 240 ⁇ 260nm, preferably, the above-mentioned ultraviolet light The wavelength is 254nm.
  • a protective gas such as nitrogen, inert gas
  • the film layer of the electron transport material deposited with the metal salt can be cured only by exposure to the air, or the film layer of the electron transport material deposited with the metal salt can be cured only by ultraviolet light irradiation, or exposed
  • the film layer of the electron transport material deposited with the metal salt is solidified by irradiating ultraviolet light in the air.
  • the film layer of the electron transport material deposited with the metal salt is cured by exposing to air while irradiating with ultraviolet light, the time for exposing to air and irradiating with ultraviolet light should be appropriately shortened.
  • the time for exposing to air and irradiating ultraviolet light can be 0.25 ⁇ 0.5min;
  • the exposure time to the air can be 0.5 ⁇ 1min.
  • the time of ultraviolet light irradiation can be 20 ⁇ 30min.
  • a quantum dot light emitting diode having a structure of anode/hole injection layer/hole transport layer/quantum dot light emitting layer/electron transport layer/cathode can be prepared by the above method for preparing light emitting diodes.
  • the preparation method of the light-emitting diode may include:
  • the material of the anode can be selected from doped or undoped metal oxides, such as ITO, IZO, ITZO, ICO, SnO 2 , In 2 O 3 , Cd:ZnO, F:SnO 2 , In:SnO 2 , Ga: SnO 2 , AZO, etc.; can also be selected from metal materials, such as Ni, Pt, Au, Ag, Cu, Al, Ir; can also be metal materials containing CNT, etc.
  • the ":" in the above expressions such as Cd:ZnO means doping.
  • the above-mentioned anode is an anode with an ITO/metal/ITO structure
  • the above-mentioned ITO is preferably indium-doped ITO
  • the above-mentioned metal can be selected from one or more of Au, Ag, Al, and Cu.
  • the material of the hole injection layer can be selected from poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) (PEDOT:PSS) and its derivatives doped with s-MoO3 (PEDOT:PSS :s-MoO3), poly[9,9-dioctyl-fluorene-co-N-(4-butylphenyl)-diphenylamine] (TFB), poly(N-vinylcarbazole)( PVK), N,N,N',N'-tetrakis(4-methoxyphenyl)-benzidine (TPD), 4-bis[N-(1-naphthyl)-N-phenyl-amino] Biphenyl ( ⁇ -NPD), 4,4',4''-tris[phenyl(m-tolyl)amino]triphenylamine (m-MTDATA), 4,4',4''-tris( N-car
  • the material of the hole transport layer can be selected from 4,4'-N,N'-dicarbazolyl-biphenyl (CBP), N,N'-diphenyl-N,N'-bis(1-naphthalene base)-1,1'-biphenyl-4,4''-diamine ( ⁇ -NPD), poly N,N'-diphenyl-N,N'-bis(3-methylphenyl)- (1,1'-biphenyl)-4,4'-diamine (Poly-TPD), N,N'-bis(3-methylphenyl)-N,N'-bis(phenyl)- Spiro(spiro-TPD), N,N'-bis(4-(N,N'-diphenyl-amino)phenyl)-N,N'-diphenylbenzidine (DNTPD), 4,4' ,4'-tris(N-carbazolyl)-triphenylamine (TCTA), 4,4',
  • the cathode material may be selected from Ca, Ba, Ca:Al, LiF:Ca, LiF:Al, BaF 2 :Al, CsF:Al, CaCO 3 :Al, BaF 2 :Ca:Al, Al, Mg, Au:Mg , one or more of Ag:Mg.
  • the material of the cathode can be selected from Al and/or Ag.
  • the present embodiment provides a quantum dot light emitting diode
  • the device structure of the quantum dot light emitting diode is an upright structure, including: a substrate 110, an anode 120, a hole injection layer 130, a hole transport layer stacked in sequence layer 140 , quantum dot light emitting layer 150 , composite electron transport layer 160 , metal layer 170 and cathode 180 .
  • the material of the composite electron transport layer 160 includes an electron transport material 161 and a metal salt 162 , and the metal salt 162 is infiltrated into the electron transport material 161 (shown in the form of a curve in FIG. 1 ).
  • the present embodiment also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
  • S111 providing a substrate 110, and preparing an anode 120 having an ITO/Ag/ITO structure on the substrate 110;
  • S112 Spin-coat PEDOT:PSS:s-MoO 3 on the anode 120 to prepare a hole injection layer 130 with a thickness of 20 nm, and anneal the hole injection layer 130 in air at 180° C. for 15 minutes;
  • this embodiment provides an optical transmittance testing device and a preparation method thereof.
  • the preparation method of the optical transmittance test device includes:
  • the embodiment of the present application provides a quantum dot light-emitting diode and a preparation method thereof.
  • the quantum dot light-emitting diode is only made of the material FeCl 3 was replaced by CoCl2 .
  • this embodiment provides an optical transmittance testing device and a preparation method thereof.
  • the metal salt film in the optical transmittance testing device provided in Example 1 is used for the optical transmittance testing device.
  • the layer material FeCl 3 is replaced by CoCl 2 .
  • the embodiment of the present application provides a quantum dot light emitting diode and a preparation method thereof.
  • the quantum dot light emitting diode is based on embodiment 1, only the material of the metal layer in the quantum dot light emitting diode provided in embodiment 1 is replaced with Pd.
  • this embodiment provides an optical transmittance testing device and a preparation method thereof.
  • the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in Example 1 Ni is replaced by Pd.
  • the embodiment of the present application provides a quantum dot light-emitting diode and a preparation method thereof.
  • the quantum dot light-emitting diode is replaced by FeCl3 , which is the material of the film layer of the metal salt in the quantum dot light-emitting diode provided in embodiment 1. is CoCl 2 , and the material Ni of the metal layer is replaced with Pd.
  • this embodiment provides an optical transmittance testing device and a preparation method thereof.
  • the optical transmittance testing device is based on Example 1, and the film layer of the metal salt in the optical transmittance testing device provided in Example 1 is The material FeCl 3 is replaced by CoCl 2 , and the material Ni of the metal layer is replaced by Pd.
  • the embodiment of the present application provides a quantum dot light emitting diode and a preparation method thereof.
  • the quantum dot light emitting diode is based on embodiment 1, only the material of the metal layer in the quantum dot light emitting diode provided in embodiment 1 is replaced with Pt.
  • this embodiment provides an optical transmittance testing device and a preparation method thereof.
  • the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in Example 1 Ni is replaced by Pt.
  • the embodiment of the present application provides a quantum dot light-emitting diode and a preparation method thereof.
  • the quantum dot light-emitting diode is replaced by FeCl3 , which is the material of the film layer of the metal salt in the quantum dot light-emitting diode provided in embodiment 1. is CoCl 2 , and the material of the metal layer is replaced by Pt from Ni.
  • this embodiment provides an optical transmittance testing device and a preparation method thereof.
  • the optical transmittance testing device is based on Example 1, and the film layer of the metal salt in the optical transmittance testing device provided in Example 1 is The material FeCl 3 is replaced by CoCl 2 , and the material Ni of the metal layer is replaced by Pt.
  • the present embodiment provides a quantum dot light-emitting diode.
  • the device structure of the quantum dot light-emitting diode includes a substrate 110, an anode 120, a hole injection layer 130, a hole transport layer 140, and a quantum dot light-emitting layer that are sequentially stacked.
  • layer 150 composite electron transport layer 160 , metal layer 170 and cathode 180 .
  • this embodiment also provides a method for preparing the above-mentioned quantum dot light-emitting diode, including:
  • S121 providing a substrate 110, and preparing an IZO/Ag/IZO anode 120 on the substrate 110;
  • S122 Spin-coat m-MTDATA on the anode 120 to prepare a hole injection layer 130 with a thickness of 18 nm, and anneal the hole injection layer 130 in air at 185° C. for 17 minutes;
  • S125 Spin-coat a mixture of LZO and FeCl 3 on the quantum dot light-emitting layer 150 (the ratio of the amount of FeCl 3 metal salt to LZO species in the mixture is 0.04) to form a composite electron transport layer 160 with a thickness of 63 nm, and °C annealing for 15 minutes;
  • this embodiment provides a quantum dot light emitting diode.
  • the device structure of the quantum dot light emitting diode is an inverted structure, including: a substrate 110, a cathode 180, a metal layer 170, a composite electron transport layer 160, Quantum dot light emitting layer 150 , hole transport layer 140 , hole injection layer 130 and anode 120 .
  • the material of the composite electron transport layer 160 includes the electron transport material 161 and the metal salt 162 , and the electron transport material 161 penetrates into the metal salt 162 (shown in the form of a curve in FIG. 5 ).
  • this embodiment also provides a method for preparing the above-mentioned quantum dot light-emitting diode, including:
  • S138 Prepare an anode 120 having an ITZO/Ag/ITZO structure on the hole injection layer 130;
  • This comparative example provides a quantum dot light-emitting diode.
  • the device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, An electron transport layer, and a cathode.
  • This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
  • S211 providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
  • S215 Spin-coat LZO on the quantum dot light-emitting layer to prepare an electron transport layer with a thickness of 60 nm, and anneal at 80° C. for 15 minutes;
  • this comparative example provides an optical transmittance testing device and a preparation method thereof.
  • the preparation method of the optical transmittance test device includes:
  • LZO was spin-coated on ITO to prepare an electron transport layer with a thickness of 60 nm and annealed at 80 °C for 15 min.
  • This comparative example provides a quantum dot light-emitting diode.
  • the device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, Composite electron transport layer, and cathode.
  • This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
  • S221 providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
  • this comparative example provides an optical transmittance testing device and a preparation method thereof.
  • the preparation method of the optical transmittance test device includes:
  • This comparative example provides a quantum dot light-emitting diode and a preparation method thereof.
  • the quantum dot light-emitting diode only uses the material FeCl in the film layer of the metal salt in the quantum dot light-emitting diode provided in comparative example 2. Replaced by CoCl 2 .
  • this comparative example provides an optical transmittance testing device and a preparation method thereof.
  • the optical transmittance testing device only uses the film of the metal salt in the optical transmittance testing device provided in comparative example 2
  • the material FeCl 3 in the layer was replaced by CoCl 2 .
  • This comparative example provides a quantum dot light-emitting diode.
  • the device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, An electron transport layer, and a cathode.
  • This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
  • S231 providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
  • this comparative example provides an optical transmittance testing device and a preparation method thereof.
  • the preparation method of the optical transmittance test device includes:
  • This comparative example provides a quantum dot light-emitting diode and a preparation method thereof.
  • the quantum dot light-emitting diode is based on comparative example 4, only the material of the metal layer in the quantum dot light-emitting diode provided in comparative example 4 is replaced with Pd.
  • this comparative example provides an optical transmittance testing device and a preparation method thereof.
  • the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in comparative example 4 Ni is replaced by Pd.
  • This comparative example provides a quantum dot light-emitting diode and its preparation method.
  • the quantum dot light-emitting diode only replaces Ni with Pt as the material of the metal layer in the quantum dot light-emitting diode provided in comparative example 4.
  • this comparative example provides an optical transmittance testing device and a preparation method thereof.
  • the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in comparative example 4 Ni is replaced by Pt.
  • This comparative example provides a quantum dot light-emitting diode.
  • the device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, Composite electron transport layer, metal layer and cathode.
  • the materials of the composite electron transport layer include electron transport materials and metal salts.
  • This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
  • S241 providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
  • the optical transmittance test comprising the composite electron transport layer and the metal layer provided by embodiments 1 to 6
  • the average transmittance and maximum transmittance of the device increased.
  • the sheet resistance of the quantum dot light-emitting diodes in Example 2, Example 4, Example 6, Comparative Example 1, and Comparative Example 3 was tested, and the results showed that the sheet resistance of the quantum dot light-emitting diodes prepared in Comparative Example 1 was within 100 ⁇ Left and right, the sheet resistance of the quantum dot light-emitting diode that includes the composite electron transport layer in Comparative Example 3 is 200 ⁇ 250 ⁇ , while the sheet resistance of the quantum dot light-emitting diode that includes the composite electron transport layer and the metal layer in Examples 2, 4, and 6 is 50 ⁇ 60 ⁇ . Therefore, the quantum dot light-emitting diode including the composite electron transport layer and the metal layer has lower sheet resistance and is more conducive to the transport of carriers.
  • the quantum dot light emitting diodes provided in Examples 1 to 6 have increased external quantum efficiency and brightness.
  • the brightness of the quantum dot light-emitting diodes provided in Comparative Examples 2 and 3, which include a composite electron transport layer and no metal layer, is improved, but the external quantum efficiency does not change much.
  • the quantum dot light-emitting diodes that only include the composite electron transport layer but not the metal layer have a poor effect on the improvement of the external quantum efficiency of the device.
  • the external quantum efficiency of the quantum dot light-emitting diodes provided in Comparative Examples 4-6 that included a metal layer and did not have a composite electron transport layer that replaces the electron transport layer was significantly increased, but The decrease in brightness shows that the quantum dot light-emitting diode including only the metal layer but not the composite electron transport layer replacing the electron transport layer has a poor effect on improving the brightness of the device.
  • the quantum dot light-emitting diodes provided by Examples 1-6 of the present application have better performance in terms of external quantum efficiency and brightness.
  • the composite electron transport layer and the metal layer in the light-emitting diode provided by the application complement each other and cooperate with each other, so that the light-emitting diode of the present application has higher transmittance, carrier transport, brightness, and efficiency than the prior art. Excellent performance, good overall effect.

Abstract

The present application relates to the field of optoelectronic technology and discloses a light-emitting diode and a preparation method therefor. The light-emitting diode comprises: a composite electron transport layer, materials thereof comprising an electron transport material and a metal salt, and a metal element in the metal salt being selected from the Group VIII elements; and a metal layer; a material of the metal layer being a doped or undoped metal elementary substance, and a metal element in the metal elementary substance being selected from the Group VIII elements. The light-emitting diode has a higher brightness and efficiency.

Description

一种发光二极管及其制备方法A kind of light-emitting diode and its preparation method
本申请要求于2021年12月29日在中国专利局提交的、申请号为202111640141.6、申请名称为“一种发光二极管及其制备方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application with the application number 202111640141.6 and the application title "A Light-Emitting Diode and Its Preparation Method" filed at the China Patent Office on December 29, 2021, the entire contents of which are hereby incorporated by reference In this application.
技术领域technical field
本申请涉及光电技术领域,具体涉及一种发光二极管及其制备方法。The present application relates to the field of optoelectronic technology, in particular to a light emitting diode and a preparation method thereof.
背景技术Background technique
发光二极管技术作为一种新型的显示照明技术,具备良好的节能性、可靠性、安全性以及环境友好性,因此其拥有广阔的发展前景,目前仍然是显示照明的重要研究方向之一。As a new type of display lighting technology, light-emitting diode technology has good energy saving, reliability, safety and environmental friendliness, so it has broad development prospects and is still one of the important research directions of display lighting.
当前技术下,发光二极管的主要结构包括阴极、阳极、空穴传输层、电子传输层以及发光层。阴极、阳极、空穴传输层、电子传输层以及发光层结构的发光二极管在亮度、效率以及寿命方面还未能达到一个理想的数值。Under the current technology, the main structure of a light emitting diode includes a cathode, an anode, a hole transport layer, an electron transport layer and a light emitting layer. The light-emitting diode with cathode, anode, hole transport layer, electron transport layer and light-emitting layer structure has not yet reached an ideal value in terms of brightness, efficiency and lifetime.
由于发光二极管各膜层材料(例如电子传输层材料)自身透射率较低,因此发光层发出的光在其出射方向上会由于薄膜吸光而导致非逸散性损失,从而导致发光二极管的亮度及效率下降。Due to the low transmittance of each film layer material (such as the electron transport layer material) of the light-emitting diode, the light emitted by the light-emitting layer will cause non-dissipative loss due to the light absorption of the film in the direction of its exit, resulting in the brightness of the light-emitting diode and Efficiency drops.
技术解决方案technical solution
本申请提供一种发光二极管及其制备方法。The application provides a light emitting diode and a preparation method thereof.
本申请提供一种发光二极管,包括:The application provides a light emitting diode, including:
阳极、阴极、设置在阳极与阴极之间的发光层;an anode, a cathode, and a light-emitting layer arranged between the anode and the cathode;
复合电子传输层,复合电子传输层设置在阴极与发光层之间,复合电子传输层的材料包括电子传输材料和金属盐,金属盐中的金属元素选自VIII族元素;以及A composite electron transport layer, the composite electron transport layer is arranged between the cathode and the light-emitting layer, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements; and
金属层,金属层设置在阴极与复合电子传输层之间,金属层的材料为掺杂或未掺杂的金属单质,金属单质中的金属元素选自VIII族元素。A metal layer, the metal layer is arranged between the cathode and the composite electron transport layer, the material of the metal layer is doped or undoped metal element, and the metal elements in the metal element are selected from group VIII elements.
可选的,在本申请的一些实施例中,复合电子传输层中,金属盐与电子传输材料的物质的量的比值为0.04~0.1。Optionally, in some embodiments of the present application, in the composite electron transport layer, the ratio of the amount of the metal salt to the electron transport material is 0.04˜0.1.
可选的,在本申请的一些实施例中,金属单质与电子传输材料的物质的量的比值为0.02~0.033。Optionally, in some embodiments of the present application, the ratio of the amount of the metal element to the amount of the electron transport material is 0.02-0.033.
可选的,在本申请的一些实施例中,金属盐选自于氯化铁、氯化钴、醋酸铁、醋酸钴、硬脂酸铁、硝酸铁、硝酸钴中的一种或多种。Optionally, in some embodiments of the present application, the metal salt is selected from one or more of ferric chloride, cobalt chloride, ferric acetate, cobalt acetate, ferric stearate, ferric nitrate, and cobalt nitrate.
可选的,在本申请的一些实施例中,金属单质选自于镍、钯、铂中的一种或多种。Optionally, in some embodiments of the present application, the metal element is selected from one or more of nickel, palladium, and platinum.
可选的,在本申请的一些实施例中,掺杂的金属单质中的掺杂元素选自VIII族元素,且掺杂元素与金属单质中的金属元素不同。Optionally, in some embodiments of the present application, the doping element in the doped metal element is selected from group VIII elements, and the doping element is different from the metal element in the metal element.
可选的,在本申请的一些实施例中,电子传输材料选自于掺杂或未掺杂的半导体纳米颗粒、有机电子传输材料中的一种或多种。Optionally, in some embodiments of the present application, the electron transport material is selected from one or more of doped or undoped semiconductor nanoparticles and organic electron transport materials.
可选的,在本申请的一些实施例中,电子传输材料选自于掺杂或未掺杂的TiO 2、ZnO、ZrO、SnO 2、WO 3、Ta 2O 3、HfO 3、Al 2O 3、ZrSiO 4、BaTiO 3、BaZrO 3、CdS、ZnSe、ZnS中的一种或多种。 Optionally, in some embodiments of the present application, the electron transport material is selected from doped or undoped TiO 2 , ZnO, ZrO, SnO 2 , WO 3 , Ta 2 O 3 , HfO 3 , Al 2 O 3. One or more of ZrSiO 4 , BaTiO 3 , BaZrO 3 , CdS, ZnSe, and ZnS.
可选的,在本申请的一些实施例中,电子传输材料的掺杂元素选自于Al、Mg、In、Li、Ga、Cd、Cs、Cu中的一种或多种。Optionally, in some embodiments of the present application, the doping elements of the electron transport material are selected from one or more of Al, Mg, In, Li, Ga, Cd, Cs, and Cu.
可选的,在本申请的一些实施例中,发光二极管为正置结构的发光二极管、倒置结构的发光二极管中的一种。Optionally, in some embodiments of the present application, the light emitting diode is one of a light emitting diode with an upright structure and a light emitting diode with an inverted structure.
可选的,在本申请的一些实施例中,发光二极管为量子点发光二极管、有机发光二极管、微米发光二极管中的一种。Optionally, in some embodiments of the present application, the light emitting diode is one of quantum dot light emitting diodes, organic light emitting diodes, and micron light emitting diodes.
可选的,在本申请的一些实施例中,量子点发光二极管包括量子点发光层;量子点发光层的材料选自于CdSe、CdS、ZnSe、ZnS、CdTe、ZnTe、CdZnS、CdZnSe、CdZnTe、ZnSeS、ZnSeTe、ZnTeS、CdSeS、CdSeTe、CdTeS、CdZnSeS、CdZnSeTe、CdZnSTe、CdSeSTe、ZnSeSTe、CdZnSeSTe、CdSe/ZnS、CdZnSe/ZnS、CdS/CdZnS、InP、InAs、InAsP、InP/InAsP、PbS、PbSe、PbTe、PbSeS、PbSeTe、PbSTe、PbSe/PbS中的一种或多种。Optionally, in some embodiments of the present application, the quantum dot light-emitting diode includes a quantum dot light-emitting layer; the material of the quantum dot light-emitting layer is selected from CdSe, CdS, ZnSe, ZnS, CdTe, ZnTe, CdZnS, CdZnSe, CdZnTe, ZnSeS, ZnSeTe, ZnTeS, CdSeS, CdSeTe, CdTeS, CdZnSeS, CdZnSeTe, CdZnSTe, CdSeSTe, ZnSeSTe, CdZnSeSTe, CdSe/ZnS, CdZnSe/ZnS, CdS/CdZnS, InP, InAs, InAsP, InP/InAsP, PbS, Pb Se, One or more of PbTe, PbSeS, PbSeTe, PbSTe, PbSe/PbS.
另外,一种发光二极管的制备方法,包括:In addition, a method for preparing a light-emitting diode, comprising:
提供阳极;provide the anode;
在阳极上形成发光层;forming a light-emitting layer on the anode;
在发光层上沉积形成层叠的复合电子传输层以及金属层;Depositing and forming a laminated composite electron transport layer and metal layer on the light emitting layer;
在金属层上形成阴极;forming a cathode on the metal layer;
其中,复合电子传输层的材料包括电子传输材料和金属盐,金属盐中的金属元素选自VIII族元素;Wherein, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
金属层的材料为掺杂或未掺杂的金属单质,金属单质中的金属元素选自VIII族元素。The material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
可选的,在本申请的一些实施例中,上述沉积形成层叠的复合电子传输层以及金属层的步骤包括:Optionally, in some embodiments of the present application, the above steps of depositing and forming a laminated composite electron transport layer and metal layer include:
在发光层上沉积电子传输材料,并在电子传输材料的膜层固化之前,在电子传输材料的膜层上沉积金属盐,得到沉积有金属盐的电子传输材料膜层,固化形成复合电子传输层;Deposit the electron transport material on the light-emitting layer, and before the film layer of the electron transport material is solidified, deposit the metal salt on the film layer of the electron transport material, obtain the film layer of the electron transport material deposited with the metal salt, and solidify to form a composite electron transport layer ;
在复合电子传输层上沉积金属单质形成金属层。A metal layer is formed by depositing a metal element on the composite electron transport layer.
可选的,在本申请的一些实施例中,上述固化形成复合电子传输层通过将沉积有金属盐的电子传输材料膜层暴露于空气的方式实现,暴露于空气的方式包括将沉积有金属盐的电子传输材料膜层置于空气环境中0.25~1min。Optionally, in some embodiments of the present application, the above curing to form the composite electron transport layer is achieved by exposing the film layer of the electron transport material deposited with the metal salt to the air, and the way of exposure to the air includes exposing the film layer of the electron transport material deposited with the metal salt to the air. The electron transport material film layer is placed in the air environment for 0.25~1min.
可选的,在本申请的一些实施例中,上述固化形成复合电子传输层通过紫外光照射的方式实现,紫外光照射的方式包括利用紫外光照射沉积有金属盐的电子传输材料膜层0.25~30min。Optionally, in some embodiments of the present application, the above-mentioned curing to form a composite electron transport layer is realized by ultraviolet light irradiation, and the ultraviolet light irradiation method includes utilizing ultraviolet light to irradiate an electron transport material film layer deposited with a metal salt for 0.25~ 30min.
另外,一种发光二极管的制备方法,包括:In addition, a method for preparing a light-emitting diode, comprising:
提供阴极;provide the cathode;
在阴极上沉积形成层叠的金属层以及复合电子传输层;Depositing a laminated metal layer and composite electron transport layer on the cathode;
在复合电子传输层上形成发光层;forming a light emitting layer on the composite electron transport layer;
在发光层上形成阳极;forming an anode on the light-emitting layer;
其中,复合电子传输层的材料包括电子传输材料和金属盐,金属盐中的金属元素选自VIII族元素;Wherein, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
金属层的材料为掺杂或未掺杂的金属单质,金属单质中的金属元素选自VIII族元素。The material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
可选的,在本申请的一些实施例中,上述沉积形成层叠的金属层以及复合电子传输层的步骤包括:Optionally, in some embodiments of the present application, the above steps of depositing and forming the stacked metal layer and the composite electron transport layer include:
在阴极上沉积金属单质形成金属层;Depositing a metal element on the cathode to form a metal layer;
在金属层上沉积金属盐,并在金属盐的膜层固化之前,在金属盐的膜层上沉积电子传输材料,得到沉积有电子传输材料的金属盐膜层,固化形成复合电子传输层。Metal salt is deposited on the metal layer, and before the film layer of the metal salt is solidified, an electron transport material is deposited on the film layer of the metal salt to obtain a film layer of the metal salt deposited with the electron transport material, which is cured to form a composite electron transport layer.
可选的,在本申请的一些实施例中,上述固化形成复合电子传输层通过将沉积有电子传输材料的金属盐膜层暴露于空气的方式实现,暴露于空气的方式包括将沉积有电子传输材料的金属盐膜层置于空气环境中0.25~1min。Optionally, in some embodiments of the present application, the above-mentioned curing to form a composite electron transport layer is achieved by exposing the metal salt film layer deposited with the electron transport material to the air. The metal salt film layer of the material is placed in the air environment for 0.25~1min.
可选的,在本申请的一些实施例中,上述固化形成复合电子传输层通过紫外光照射的方式实现,紫外光照射的方式包括利用紫外光照射沉积有电子传输材料的金属盐膜层0.25~30min。Optionally, in some embodiments of the present application, the above-mentioned curing to form the composite electron transport layer is realized by ultraviolet light irradiation, and the ultraviolet light irradiation method includes 0.25~ 30min.
相对现有技术,本申请提供的发光二极管包括了VIII族金属的金属盐和电子传输材料形成的复合电子传输层,该复合电子传输层具有较高的膜层透射率,并且膜层中的缺陷较少,能够有效降低出射光被缺陷所吸收的概率,从而增强发光二极管的器件透射率。并且,本申请的发光二极管中设置了与上述复合电子传输层层叠的包括VIII族元素的金属层,金属层具有较高的导电性,能够有效平衡因上述VIII族金属的金属盐的引入而升高的薄膜电阻,有利于载流子的传输,提升器件效率。本申请发光二极管中的复合电子传输层与金属层相辅相成,相互配合,使得本申请发光二极管具有较高的亮度与效率。Compared with the prior art, the light-emitting diode provided by this application includes a composite electron transport layer formed by metal salts of Group VIII metals and electron transport materials. The composite electron transport layer has a higher film transmittance, and the defects in the film layer Less, can effectively reduce the probability of the outgoing light being absorbed by defects, thereby enhancing the device transmittance of the light emitting diode. In addition, in the light-emitting diode of the present application, a metal layer including Group VIII elements laminated with the above-mentioned composite electron transport layer is provided. The metal layer has high electrical conductivity, and can effectively balance the increase caused by the introduction of the metal salt of the above-mentioned Group VIII metal. High sheet resistance is conducive to the transport of carriers and improves device efficiency. The composite electron transport layer and the metal layer in the light-emitting diode of the present application complement each other and cooperate with each other, so that the light-emitting diode of the present application has higher brightness and efficiency.
附图说明Description of drawings
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请的一些实施例,对于本领域技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings that need to be used in the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, other drawings can also be obtained based on these drawings without any creative effort.
图1是本申请实施例1提供的量子点发光二极管的结构示意图;FIG. 1 is a schematic structural view of a quantum dot light-emitting diode provided in Example 1 of the present application;
图2是本申请实施例1提供的正置结构的量子点发光二极管的制作方法的流程示意图;2 is a schematic flow diagram of a method for manufacturing a quantum dot light-emitting diode with an upright structure provided in Example 1 of the present application;
图3是本申请实施例7提供的量子点发光二极管的结构示意图;FIG. 3 is a schematic structural diagram of a quantum dot light-emitting diode provided in Embodiment 7 of the present application;
图4是本申请实施例7提供的正置结构的量子点发光二极管的制作方法的流程示意图;4 is a schematic flow diagram of a method for manufacturing a quantum dot light-emitting diode with an upright structure provided in Embodiment 7 of the present application;
图5是本申请实施例8提供的量子点发光二极管的结构示意图;Fig. 5 is a schematic structural diagram of a quantum dot light-emitting diode provided in Embodiment 8 of the present application;
图6是本申请实施例8提供的倒置结构的量子点发光二极管的制作方法的流程示意图。FIG. 6 is a schematic flowchart of a method for manufacturing an inverted quantum dot light-emitting diode provided in Embodiment 8 of the present application.
其中,附图标记说明:Wherein, the reference numerals explain:
衬底110;阳极120;空穴注入层130;空穴传输层140;量子点发光层150;复合电子传输层160;电子传输材料161;金属盐162;金属层170;阴极180。Substrate 110; anode 120; hole injection layer 130; hole transport layer 140; quantum dot light emitting layer 150; composite electron transport layer 160; electron transport material 161; metal salt 162; metal layer 170;
本申请的实施方式Embodiment of this application
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域技术人员在没有做出创造性劳动前提下所获得的所有其它实施例,都属于本申请保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the application with reference to the drawings in the embodiments of the application. Apparently, the described embodiments are only some of the embodiments of the application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.
本申请实施例提供一种发光二极管及其制备方法。以下分别进行详细说明。需说明的是,以下实施例的描述顺序不作为对实施例优选顺序的限定。另外,在本申请的描述中,术语“包括”是指“包括但不限于”。用语第一、第二、第三等仅仅作为标示使用,并没有强加数字要求或建立顺序。Embodiments of the present application provide a light emitting diode and a manufacturing method thereof. Each will be described in detail below. It should be noted that the description sequence of the following embodiments is not intended to limit the preferred sequence of the embodiments. In addition, in the description of the present application, the term "including" means "including but not limited to". The terms first, second, third, etc. are used for designation only and do not impose numerical requirements or establish an order.
本申请中“一种或多种”等表述,是指所列举多项中的一种或者多种,“多种”是指这些项中两种或两种以上的任意组合,包括单项(种)或复数项(种)的任意组合,例如,“a、b或c中的至少一项(种)”或“a、b和c中的至少一项(种)”,均可以表示:a,b,c,a-b(即a和b),a-c,b-c,或a-b-c,其中a,b,c分别可以是单个,也可以是多个。In this application, expressions such as "one or more" refer to one or more of the listed items, and "multiple" refers to any combination of two or more of these items, including single items (species) ) or any combination of plural items (species), for example, “at least one (species) of a, b, or c” or “at least one (species) of a, b, and c” can mean: a ,b,c,a-b (that is, a and b),a-c,b-c, or a-b-c, where a,b,c can be single or multiple.
本申请的各种实施例可以以一个范围的型式存在;应当理解,以一范围型式的描述仅仅是因为方便及简洁,不应理解为对本申请范围的硬性限制;因此,应当认为所述的范围描述已经具体公开所有可能的子范围以及该范围内的单一数值。例如,应当认为从0.04到0.1的范围描述已经具体公开子范围,例如从0.04到0.05,从0.05到0.06,从0.06到0.07,从0.07到0.09等,以及所数范围内的单一数字,例如0.04、0.05及0.06,此不管范围为何皆适用。另外,每当在本文中指出数值范围,是指包括所指范围内的任何引用的数字(分数或整数)。Various embodiments of the present application may exist in the form of a range; it should be understood that the description in the form of a range is only for convenience and brevity, and should not be construed as a rigid limitation on the scope of the application; therefore, the described range should be regarded as The description has specifically disclosed all possible subranges as well as individual values within that range. For example, a description of a range from 0.04 to 0.1 should be considered to have specifically disclosed sub-ranges, such as from 0.04 to 0.05, from 0.05 to 0.06, from 0.06 to 0.07, from 0.07 to 0.09, etc., as well as a single number within the enumerated range, such as 0.04 , 0.05 and 0.06, this applies regardless of the range. Additionally, whenever a numerical range is indicated herein, it is meant to include any cited numeral (fractional or integral) within the indicated range.
本申请提供一种发光二极管,包括:The application provides a light emitting diode, including:
阳极、阴极、设置在阳极与阴极之间的发光层;an anode, a cathode, and a light-emitting layer arranged between the anode and the cathode;
复合电子传输层,复合电子传输层设置在阴极与发光层之间,复合电子传输层的材料包括电子传输材料和金属盐,金属盐中的金属元素选自VIII族元素;以及A composite electron transport layer, the composite electron transport layer is arranged between the cathode and the light-emitting layer, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements; and
金属层,金属层设置在阴极与复合电子传输层之间,金属层的材料为掺杂或未掺杂的金属单质,金属单质中的金属元素选自VIII族元素。A metal layer, the metal layer is arranged between the cathode and the composite electron transport layer, the material of the metal layer is doped or undoped metal element, and the metal elements in the metal element are selected from group VIII elements.
本申请中含有金属盐的复合电子传输层具有较高透射率,进而使发光二极管具有较高的亮度。同时,与上述复合电子传输层层叠的金属层能够有效平衡薄膜电阻,提高发光二极管的效率。上述复合电子传输层与发光层的层叠设置为广义上的层叠设置,即复合电子传输层可以与发光层直接接触并层叠设置,也可以在复合电子传输层和发光层之间有其他膜层的情况下层叠设置。In the present application, the composite electron transport layer containing the metal salt has higher transmittance, thereby making the light-emitting diode have higher brightness. At the same time, the metal layer stacked with the composite electron transport layer can effectively balance the sheet resistance and improve the efficiency of the light emitting diode. The above-mentioned stacking arrangement of the composite electron transport layer and the light-emitting layer is a stacking arrangement in a broad sense, that is, the composite electron transport layer can be directly in contact with the light-emitting layer and stacked, or there can be other film layers between the composite electron transport layer and the light-emitting layer. Case cascading settings.
进一步地,本申请中金属层中的金属元素与金属盐中的金属元素为同族(VIII族)元素,如此金属层中的金属原子与金属盐中的金属原子能够具有相似的电子轨道。Further, in the present application, the metal elements in the metal layer and the metal elements in the metal salt are elements of the same group (Group VIII), so the metal atoms in the metal layer and the metal atoms in the metal salt can have similar electron orbits.
在一些实施例中,复合电子传输层中,金属盐与电子传输材料的物质的量的比值为0.04~0.1。In some embodiments, in the composite electron transport layer, the ratio of the amount of the metal salt to the electron transport material is 0.04˜0.1.
金属盐与电子传输材料的物质的量的比值在上述范围内时,能够保证在不过度提高复合电子传输层薄膜电阻的同时有效提高复合电子传输层的透射率。进一步地,金属盐与电子传输材料物质的量的比值范围也可以为上述范围的子范围,例如在一些实施例中,金属盐与电子传输材料的物质的量的比值可以为0.05~0.1,也可以为0.04~0.067。When the ratio of the amount of the metal salt to the electron transport material is within the above range, the transmittance of the composite electron transport layer can be effectively improved without excessively increasing the sheet resistance of the composite electron transport layer. Further, the ratio range of the amount of the metal salt to the electron transport material may also be a sub-range of the above range, for example, in some embodiments, the ratio of the amount of the metal salt to the electron transport material may be 0.05-0.1, or Can be 0.04~0.067.
在一些实施例中,金属单质与电子传输材料的物质的量的比值为0.02~0.033。In some embodiments, the ratio of the amount of the simple metal to the electron transport material is 0.02-0.033.
金属单质与电子传输材料的物质的量的比值在上述范围内时,也能够在保证在不显著降低复合电子传输层透射率的同时有效降低复合电子传输层的薄膜电阻。在一些实施例中,可以用膜层厚度比来近似表征物质的量之比。When the ratio of the amount of the simple metal to the electron transport material is within the above range, the sheet resistance of the composite electron transport layer can be effectively reduced while ensuring that the transmittance of the composite electron transport layer is not significantly reduced. In some embodiments, the ratio of the thickness of the film can be used to approximate the ratio of the amount of the substance.
优选地,金属盐选自于氯化铁、氯化钴、醋酸铁、醋酸钴、硬脂酸铁、硝酸铁、硝酸钴中的一种或多种。进一步的,上述醋酸铁可以为一水合醋酸铁,上述醋酸钴可以为四水合醋酸钴。Preferably, the metal salt is selected from one or more of ferric chloride, cobalt chloride, ferric acetate, cobalt acetate, ferric stearate, ferric nitrate and cobalt nitrate. Further, the above-mentioned iron acetate may be iron acetate monohydrate, and the above-mentioned cobalt acetate may be cobalt acetate tetrahydrate.
在一些实施例中,金属单质可以选自于镍、钯、铂中的一种或多种。In some embodiments, the metal element may be selected from one or more of nickel, palladium, and platinum.
在一些实施例中,掺杂的金属单质的掺杂元素选自VIII族元素,且掺杂元素与金属单质中的金属元素不同。In some embodiments, the doping element of the doped metal element is selected from group VIII elements, and the doping element is different from the metal element in the metal element.
在一些实施例中,电子传输材料选自于掺杂或未掺杂的半导体纳米颗粒、有机电子传输材料中的一种或多种。在至少一些实施例中,所述掺杂或未掺杂的半导体纳米颗粒为掺杂或未掺杂的金属氧化物。In some embodiments, the electron transport material is selected from one or more of doped or undoped semiconductor nanoparticles and organic electron transport materials. In at least some embodiments, the doped or undoped semiconductor nanoparticles are doped or undoped metal oxides.
进一步地,电子传输材料可以选自于掺杂或未掺杂的TiO 2、ZnO、ZrO、SnO 2、WO 3、Ta 2O 3、HfO 3、Al 2O 3、ZrSiO 4、BaTiO 3、BaZrO 3、CdS、ZnSe、ZnS中的一种或多种。 Further, the electron transport material can be selected from doped or undoped TiO 2 , ZnO, ZrO, SnO 2 , WO 3 , Ta 2 O 3 , HfO 3 , Al 2 O 3 , ZrSiO 4 , BaTiO 3 , BaZrO 3. One or more of CdS, ZnSe, and ZnS.
在一些实施例中,电子传输材料的掺杂元素可以选自于Al、Mg、In、Li、Ga、Cd、Cs、Cu中的一种或多种。In some embodiments, the doping elements of the electron transport material may be selected from one or more of Al, Mg, In, Li, Ga, Cd, Cs, and Cu.
在一些实施例中,发光二极管为正置结构的发光二极管、倒置结构的发光二极管中的一种。In some embodiments, the light emitting diode is one of a light emitting diode with an upright structure and a light emitting diode with an inverted structure.
在一些实施例中,发光二极管为量子点发光二极管(QLED)、有机发光二极管(OLED)、微米发光二极管(Micro LED)中的一种。进一步地,本申请中的发光二极管可以为正置结构或倒置结构的量子点发光二极管,也可以为正置结构或倒置结构的有机发光二极管,还可以为正置结构或倒置结构的微米发光二极管。优选地,发光二极管为正置结构的发光二极管。进一步地,本申请中的发光二极管的器件结构可以为三层器件、多层器件、顶发射极器件、底发射极器件、双面发射器件中的一种。In some embodiments, the light emitting diode is one of quantum dot light emitting diode (QLED), organic light emitting diode (OLED), and micron light emitting diode (Micro LED). Further, the light-emitting diodes in this application can be quantum dot light-emitting diodes with upright or inverted structures, organic light-emitting diodes with upright or inverted structures, or micron light-emitting diodes with upright or inverted structures. . Preferably, the light emitting diode is a light emitting diode with a vertical structure. Further, the device structure of the light emitting diode in the present application may be one of a three-layer device, a multi-layer device, a top emitter device, a bottom emitter device, and a double-sided emitter device.
在一些实施例中,量子点发光二极管包括量子点发光层;量子点发光层的材料选自于CdSe、CdS、ZnSe、ZnS、CdTe、ZnTe、CdZnS、CdZnSe、CdZnTe、ZnSeS、ZnSeTe、ZnTeS、CdSeS、CdSeTe、CdTeS、CdZnSeS、CdZnSeTe、CdZnSTe、CdSeSTe、ZnSeSTe、CdZnSeSTe、CdSe/ZnS、CdZnSe/ZnS、CdS/CdZnS、InP、InAs、InAsP、InP/InAsP、PbS、PbSe、PbTe、PbSeS、PbSeTe、PbSTe、PbSe/PbS中的一种或多种。上述CdSe/ZnS等表述中的“/”表示“/”后的物质(作为壳层)包覆“/”前的物质(作为核层)。优选地,量子点发光层的材料选自于II-VI族半导体纳米晶CdSe、CdS、ZnSe、CdS、PbS、PbS以及由上述II-VI族半导体纳米晶组成的核壳结构材料中的一种或多种。In some embodiments, the quantum dot light-emitting diode includes a quantum dot light-emitting layer; the material of the quantum dot light-emitting layer is selected from CdSe, CdS, ZnSe, ZnS, CdTe, ZnTe, CdZnS, CdZnSe, CdZnTe, ZnSeS, ZnSeTe, ZnTeS, CdSeS , CdSeTe, CdTeS, CdZnSeS, CdZnSeTe, CdZnSTe, CdSeSTe, ZnSeSTe, CdZnSeSTe, CdSe/ZnS, CdZnSe/ZnS, CdS/CdZnS, InP, InAs, InAsP, InP/InAsP, PbS, PbSe, PbTe, PbSeS, PbSeTe, Pb STe , one or more of PbSe/PbS. The "/" in the above expressions such as CdSe/ZnS means that the substance after the "/" (as the shell layer) covers the substance before the "/" (as the core layer). Preferably, the material of the quantum dot light-emitting layer is selected from one of II-VI group semiconductor nanocrystals CdSe, CdS, ZnSe, CdS, PbS, PbS and a core-shell structure material composed of the above-mentioned II-VI group semiconductor nanocrystals or more.
本申请实施例还提供一种发光二极管的制备方法,当制备正置结构的发光二极管时,上述制备方法包括:The embodiment of the present application also provides a method for preparing a light-emitting diode. When preparing a light-emitting diode with a vertical structure, the above-mentioned preparation method includes:
提供阳极;provide the anode;
在阳极上形成发光层;forming a light-emitting layer on the anode;
在发光层上沉积形成层叠的复合电子传输层以及金属层;Depositing and forming a laminated composite electron transport layer and metal layer on the light emitting layer;
在金属层上形成阴极。A cathode is formed on the metal layer.
其中,复合电子传输层的材料包括电子传输材料和金属盐;金属盐中的金属元素选自VIII族元素。Wherein, the material of the composite electron transport layer includes an electron transport material and a metal salt; the metal elements in the metal salt are selected from Group VIII elements.
金属层的材料为掺杂或未掺杂的金属单质,金属单质中的金属元素选自VIII族元素。The material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
当制备倒置结构的发光二极管时,上述制备方法包括:When preparing a light-emitting diode with an inverted structure, the above-mentioned preparation method includes:
提供阴极;provide the cathode;
在阴极上沉积形成层叠的金属层以及复合电子传输层;Depositing a laminated metal layer and composite electron transport layer on the cathode;
在复合电子传输层上形成发光层;forming a light emitting layer on the composite electron transport layer;
在发光层上形成阳极。An anode is formed on the light emitting layer.
其中,复合电子传输层的材料包括电子传输材料和金属盐;金属盐中的金属元素选自VIII族元素。Wherein, the material of the composite electron transport layer includes an electron transport material and a metal salt; the metal elements in the metal salt are selected from group VIII elements.
金属层的材料为掺杂或未掺杂的金属单质,金属单质中的金属元素选自VIII族元素。The material of the metal layer is doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
上述在膜层上沉积形成另一膜层(例如“在发光层上形成层叠的复合电子传输层以及金属层”)的表述中的上为广义的上,表示上面或上方,既可以在膜层上直接沉积形成另一膜层,也可以在膜层上形成其他膜层,再在其他膜层上形成另一膜层。进一步地,利用上述发光二极管的制备方法沉积形成复合电子传输层时,可以将电子传输材料和金属盐混合后直接沉积形成复合电子传输层,也可以分别沉积电子传输材料和金属盐形成复合电子传输层。优选地,采用分别沉积电子传输材料和金属盐的方式形成复合电子传输层。The above expression of depositing another film layer on the film layer (such as "forming a laminated composite electron transport layer and metal layer on the light-emitting layer") is a broad sense, meaning above or above, which can be on the film layer Another film layer can be directly deposited on the film layer, and another film layer can be formed on the film layer, and another film layer can be formed on the other film layer. Further, when the composite electron transport layer is deposited and formed by using the above preparation method of light-emitting diodes, the electron transport material and the metal salt can be mixed and deposited directly to form a composite electron transport layer, or the electron transport material and the metal salt can be deposited separately to form a composite electron transport layer. layer. Preferably, the composite electron transport layer is formed by separately depositing the electron transport material and the metal salt.
当采用分别沉积电子传输材料和金属盐的方式形成复合电子传输层时,根据发光二极管器件的结构不同,沉积的方式也稍有差异。When the composite electron transport layer is formed by separately depositing the electron transport material and the metal salt, the deposition method is slightly different according to the structure of the light emitting diode device.
例如,当发光二极管的器件结构为正置结构时,上述沉积形成层叠的复合电子传输层以及金属层的步骤包括:For example, when the device structure of the light emitting diode is an upright structure, the steps of depositing and forming the stacked composite electron transport layer and the metal layer include:
在发光层上沉积电子传输材料,并在电子传输材料的膜层固化之前,在电子传输材料的膜层上沉积金属盐,得到沉积有金属盐的电子传输材料膜层,固化形成复合电子传输层;Deposit the electron transport material on the light-emitting layer, and before the film layer of the electron transport material is solidified, deposit the metal salt on the film layer of the electron transport material, obtain the film layer of the electron transport material deposited with the metal salt, and solidify to form a composite electron transport layer ;
在复合电子传输层上沉积金属单质形成金属层。A metal layer is formed by depositing a metal element on the composite electron transport layer.
而当发光二极管的器件结构为倒置结构时,上述沉积形成层叠的金属层以及复合电子传输层的步骤包括:And when the device structure of the light-emitting diode is an inverted structure, the steps of depositing and forming the stacked metal layer and the composite electron transport layer include:
在阴极上沉积金属单质形成金属层;Depositing a metal element on the cathode to form a metal layer;
在金属层上沉积金属盐,并在金属盐的膜层固化之前,在金属盐的膜层上沉积电子传输材料,得到沉积有电子传输材料的金属盐膜层,固化形成复合电子传输层。Metal salt is deposited on the metal layer, and before the film layer of the metal salt is solidified, an electron transport material is deposited on the film layer of the metal salt to obtain a film layer of the metal salt deposited with the electron transport material, which is cured to form a composite electron transport layer.
但无论是制备正置结构的发光二极管还是制备倒置结构的发光二极管,关于电子传输材料和金属盐的沉积,后沉积的材料都应当在先沉积的材料未完全固化而单独成膜前沉积在先沉积的材料之上,如此,后沉积的材料能够渗入先沉积的材料的薄膜中,从而能够在电子传输材料结晶阶段引入VIII族金属元素形成复合电子传输层,减少出射光被缺陷所吸收的概率,实现透射率的提升。However, whether it is to prepare a light-emitting diode with an upright structure or an light-emitting diode with an inverted structure, regarding the deposition of electron transport materials and metal salts, the materials deposited later should be deposited before the materials deposited earlier are not completely cured and formed into a separate film. On top of the deposited material, in this way, the later deposited material can penetrate into the thin film of the first deposited material, so that Group VIII metal elements can be introduced into the electron transport material crystallization stage to form a composite electron transport layer, reducing the probability of the outgoing light being absorbed by defects , to increase the transmittance.
当采用分别沉积电子传输材料和金属盐的方式形成复合电子传输层时,沉积形成的电子传输材料的膜层和金属盐的膜层并非完全独立的两个膜层,两者的膜层界面处的下方膜层中存在渗入的上方膜层的材料。沉积于电子传输材料膜层与金属单质膜层之间的VIII族金属的金属盐能够区隔开金属层与独立的电子传输材料膜层,起到间隔保护作用,使膜层界面处的材料之间的晶格间隙更为接近,膜层界面处的缺陷更少,从而使得大部分光能够顺利通过膜层界面而不被吸收,提高器件的最终亮度。When the composite electron transport layer is formed by separately depositing the electron transport material and the metal salt, the film layer of the deposited electron transport material and the film layer of the metal salt are not two completely independent film layers, and the film interface between the two There is material in the lower film layer that penetrates into the upper film layer. The metal salt of group VIII metal deposited between the electron transport material film layer and the metal elemental film layer can separate the metal layer from the independent electron transport material film layer, and play a role of interval protection, so that the material at the film layer interface The lattice gap between them is closer, and there are fewer defects at the film interface, so that most of the light can pass through the film interface without being absorbed, and the final brightness of the device is improved.
在一些实施例中,为了保证在沉积后沉积的材料时先沉积的材料还未完全固化,可以采用非高温的交联操作对先沉积的材料进行固化交联。例如在制备正置结构的发光二极管时,上述固化形成复合电子传输层可以通过将沉积有金属盐的电子传输材料膜层暴露于空气的方式和/或通过紫外光照射的方式实现。其中,将沉积有金属盐的电子传输材料膜层暴露于空气的方式包括将沉积有金属盐的电子传输材料膜层置于空气环境中0.25~1min。通过紫外光照射的方式包括利用紫外光照射沉积有金属盐的电子传输材料膜层0.25~30min。In some embodiments, in order to ensure that the first-deposited material is not fully cured when the later-deposited material is deposited, a non-high-temperature cross-linking operation may be used to cure and cross-link the first-deposited material. For example, when preparing a light-emitting diode with an upright structure, the above-mentioned curing to form a composite electron transport layer can be achieved by exposing the film layer of the electron transport material deposited with the metal salt to air and/or by irradiating ultraviolet light. Wherein, the manner of exposing the film layer of the electron transport material deposited with the metal salt to the air includes placing the film layer of the electron transport material deposited with the metal salt in an air environment for 0.25-1 min. The method of irradiating with ultraviolet light includes irradiating the film layer of the electron transport material deposited with the metal salt by ultraviolet light for 0.25-30 minutes.
而当在制备倒置结构的发光二极管时,上述固化形成复合电子传输层则可以通过将沉积有电子传输材料的金属盐膜层暴露于空气的方式和/或通过紫外光照射的方式实现。其中,将金属盐暴露于空气的方式包括将沉积有电子传输材料的金属盐膜层置于空气环境中0.25~1min;紫外光照射的方式包括利用紫外光照射沉积有电子传输材料的金属盐膜层0.25~30min。When preparing a light-emitting diode with an inverted structure, the above-mentioned curing to form a composite electron transport layer can be achieved by exposing the metal salt film layer deposited with the electron transport material to air and/or by irradiating ultraviolet light. Among them, the method of exposing the metal salt to the air includes placing the metal salt film layer deposited with the electron transport material in the air environment for 0.25~1min; the method of ultraviolet light irradiation includes using ultraviolet light to irradiate the metal salt film deposited with the electron transport material Layer 0.25~30min.
上述紫外光照射的方式可以在保护气体(例如氮气、惰性气体)气氛下进行;紫外光光源可以对器件薄膜进行垂直照射;上述紫外光的波长可以为240~260nm,优选地,上述紫外光的波长为254nm。The above-mentioned ultraviolet light irradiation method can be carried out under a protective gas (such as nitrogen, inert gas) atmosphere; the ultraviolet light source can vertically irradiate the device film; the wavelength of the above-mentioned ultraviolet light can be 240~260nm, preferably, the above-mentioned ultraviolet light The wavelength is 254nm.
进一步地,可以仅采取暴露于空气的方式固化沉积有金属盐的电子传输材料的膜层,也可以仅采取紫外光照射的方式固化沉积有金属盐的电子传输材料的膜层,还可以采取暴露于空气的同时进行紫外光照射的方式固化沉积有金属盐的电子传输材料的膜层。但当采取暴露于空气的同时进行紫外光照射的方式固化沉积有金属盐的电子传输材料的膜层时,暴露于空气并进行紫外光照射的时间应当适当缩短。例如,当采取暴露于空气的同时进行紫外光照射的方式固化沉积有金属盐的电子传输材料的膜层时,暴露于空气并进行紫外光照射的时间可以为0.25~0.5min;而仅采取暴露于空气的方式固化沉积有金属盐的电子传输材料的膜层时,暴露于空气的时间可以为0.5~1min,仅采取紫外光照射的方式固化沉积有金属盐的电子传输材料的膜层时,紫外光照射的时间可以为20~30min。进一步地,可以通过上述发光二极管的制备方法制备具有阳极/空穴注入层/空穴传输层/量子点发光层/电子传输层/阴极的结构的量子点发光二极管。Further, the film layer of the electron transport material deposited with the metal salt can be cured only by exposure to the air, or the film layer of the electron transport material deposited with the metal salt can be cured only by ultraviolet light irradiation, or exposed The film layer of the electron transport material deposited with the metal salt is solidified by irradiating ultraviolet light in the air. However, when the film layer of the electron transport material deposited with the metal salt is cured by exposing to air while irradiating with ultraviolet light, the time for exposing to air and irradiating with ultraviolet light should be appropriately shortened. For example, when the film layer of the electron transport material deposited with metal salt is cured by exposing to the air and irradiating ultraviolet light at the same time, the time for exposing to air and irradiating ultraviolet light can be 0.25~0.5min; When the film layer of the electron transport material deposited with the metal salt is cured in the air, the exposure time to the air can be 0.5~1min. When the film layer of the electron transport material deposited with the metal salt is cured only by ultraviolet light irradiation, The time of ultraviolet light irradiation can be 20~30min. Further, a quantum dot light emitting diode having a structure of anode/hole injection layer/hole transport layer/quantum dot light emitting layer/electron transport layer/cathode can be prepared by the above method for preparing light emitting diodes.
当制备具有阳极/空穴注入层/空穴传输层/量子点发光层/电子传输层/阴极的结构的量子点发光二极管时,发光二极管的制备方法可以包括:When preparing a quantum dot light-emitting diode with a structure of anode/hole injection layer/hole transport layer/quantum dot light-emitting layer/electron transport layer/cathode, the preparation method of the light-emitting diode may include:
在形成有阳极的衬底上沉积空穴注入层;depositing a hole injection layer on the substrate formed with the anode;
在空穴注入层上沉积空穴传输层;depositing a hole transport layer on the hole injection layer;
在空穴传输层上沉积量子点发光层;Depositing a quantum dot luminescent layer on the hole transport layer;
在量子点发光层上沉积电子传输材料;Depositing electron transport materials on the quantum dot light-emitting layer;
在电子传输材料的膜层固化之前沉积金属盐,形成复合电子传输层;Depositing a metal salt before the film layer of the electron transport material is solidified to form a composite electron transport layer;
待沉积的金属盐的膜层固化后,在上述金属盐的膜层上沉积金属层;After the film layer of the metal salt to be deposited is solidified, a metal layer is deposited on the film layer of the metal salt;
在上述金属层上制作阴极;以及forming a cathode on said metal layer; and
封装。encapsulation.
其中,阳极的材料可以选自于掺杂或未掺杂的金属氧化物,例如ITO、IZO、ITZO、ICO、SnO 2、In 2O 3、Cd:ZnO、F:SnO 2、In:SnO 2、Ga:SnO 2、AZO等;也可以选自于金属材料,例如Ni、Pt、Au、Ag、Cu、Al、Ir;还可以为含有CNT的金属材料等。上述Cd:ZnO等表述中的“:”表示掺杂。优选地,上述阳极为具有ITO/金属/ITO结构的阳极,上述ITO优选为铟掺杂的ITO,上述金属可以选自Au、Ag、Al、Cu中的一种或多种。 Among them, the material of the anode can be selected from doped or undoped metal oxides, such as ITO, IZO, ITZO, ICO, SnO 2 , In 2 O 3 , Cd:ZnO, F:SnO 2 , In:SnO 2 , Ga: SnO 2 , AZO, etc.; can also be selected from metal materials, such as Ni, Pt, Au, Ag, Cu, Al, Ir; can also be metal materials containing CNT, etc. The ":" in the above expressions such as Cd:ZnO means doping. Preferably, the above-mentioned anode is an anode with an ITO/metal/ITO structure, the above-mentioned ITO is preferably indium-doped ITO, and the above-mentioned metal can be selected from one or more of Au, Ag, Al, and Cu.
空穴注入层的材料可以选自于聚(3,4-亚乙二氧基噻吩)-聚(苯乙烯磺酸)(PEDOT:PSS)及其掺有s-MoO3的衍生物(PEDOT:PSS:s-MoO3)、聚[9,9-二辛基-芴-共-N-(4-丁基苯基)-二苯基胺](TFB)、聚(N-乙烯基咔唑)(PVK)、N,N,N',N'-四(4-甲氧基苯基)-联苯胺(TPD)、4-双[N-(1-萘基)-N-苯基-氨基]联苯(α-NPD)、4,4',4''-三[苯基(间-甲苯基)氨基]三苯基胺(m-MTDATA)、4,4',4''-三(N-咔唑基)-三苯基胺(TCTA)、1,1-双[(二-4-甲苯基氨基)苯基环己烷(TAPC)、掺杂有四氟-四氰基-醌二甲烷(F4-TCNQ)的4,4',4''-三 (二苯基氨基)三苯胺(TDATA)、p-掺杂酞菁(例如,F4-TCNQ-掺杂的锌酞菁(ZnPc))、F4-TCNQ掺杂的N,N′-二苯基-N,N′-二(1-萘基)-1,1′-联苯-4,4″-二胺(α-NPD)、六氮杂苯并菲-己腈(HAT-CN)中的一种或多种。优选地,上述空穴层的材料可以选自于PEDOT:PSS或PEDOT:PSS:s-MoO 3中的一种。 The material of the hole injection layer can be selected from poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonic acid) (PEDOT:PSS) and its derivatives doped with s-MoO3 (PEDOT:PSS :s-MoO3), poly[9,9-dioctyl-fluorene-co-N-(4-butylphenyl)-diphenylamine] (TFB), poly(N-vinylcarbazole)( PVK), N,N,N',N'-tetrakis(4-methoxyphenyl)-benzidine (TPD), 4-bis[N-(1-naphthyl)-N-phenyl-amino] Biphenyl (α-NPD), 4,4',4''-tris[phenyl(m-tolyl)amino]triphenylamine (m-MTDATA), 4,4',4''-tris( N-carbazolyl)-triphenylamine (TCTA), 1,1-bis[(di-4-tolylamino)phenylcyclohexane (TAPC), doped with tetrafluoro-tetracyano-quinone 4,4',4''-tris(diphenylamino)triphenylamine (TDATA), p-doped phthalocyanine (e.g., F4-TCNQ-doped zinc phthalocyanine ( ZnPc)), F4-TCNQ doped N,N′-diphenyl-N,N′-di(1-naphthyl)-1,1′-biphenyl-4,4″-diamine (α- One or more of NPD), hexaazatriphenylene-hexanonitrile (HAT-CN). Preferably, the material of the hole layer can be selected from PEDOT:PSS or PEDOT:PSS:s-MoO 3 One of.
空穴传输层的材料可以选自于4,4'-N,N'-二咔唑基-联苯(CBP)、N,N'-二苯基-N,N'-双(1-萘基)-1,1'-联苯-4,4''-二胺(α-NPD)、聚N,N'-二苯基-N,N'-双(3-甲基苯基)-(1,1'-联苯基)-4,4'-二胺(Poly-TPD)、N,N'-双(3-甲基苯基)-N,N'-双(苯基)-螺(螺-TPD)、N,N'-二(4-(N,N'-二苯基-氨基)苯基)-N,N'-二苯基联苯胺(DNTPD)、4,4',4'-三(N-咔唑基)-三苯胺(TCTA)、4,4',4''-三[苯基(间-甲苯基)氨基]三苯基胺(m-MTDATA)、聚[(9,9'-二辛基芴-2,7-二基)-co-(4,4'-(N-(4-仲丁基苯基)二苯胺))](TFB)、聚(4-丁基苯基-二苯基胺)(聚-TPD)、聚(对)亚苯基亚乙烯基及其衍生物例如聚(亚苯基亚乙烯基)(PPV)、聚[2-甲氧基-5-(2-乙基己氧基)-1,4-亚苯基亚乙烯基](MEH-PPV)、聚[2-甲氧基-5-(3',7'-二甲基辛氧基)-1,4-亚苯基亚乙烯基](MOMO-PPV)、铜酞菁(CuPc)、芳香族叔胺或多核芳香叔胺、4,4'-双(对咔唑基)-1,1'-联苯化合物、N,N,N',N'-四芳基联苯胺(TPB)、PEDOT:PSS及其衍生物、聚(N-乙烯基咔唑)(PVK)及其衍生物、聚甲基丙烯酸酯(PMMA)及其衍生物、聚(9,9-辛基芴)(PFO)及其衍生物、聚(螺芴)及其衍生物、N,N'-二(萘-1-基)-N,N'-二苯基联苯胺(NPB)。优选地,上述空穴传输层可以选自于TFB、PVK、Poly-TPD、NPB中的一种或多种。The material of the hole transport layer can be selected from 4,4'-N,N'-dicarbazolyl-biphenyl (CBP), N,N'-diphenyl-N,N'-bis(1-naphthalene base)-1,1'-biphenyl-4,4''-diamine (α-NPD), poly N,N'-diphenyl-N,N'-bis(3-methylphenyl)- (1,1'-biphenyl)-4,4'-diamine (Poly-TPD), N,N'-bis(3-methylphenyl)-N,N'-bis(phenyl)- Spiro(spiro-TPD), N,N'-bis(4-(N,N'-diphenyl-amino)phenyl)-N,N'-diphenylbenzidine (DNTPD), 4,4' ,4'-tris(N-carbazolyl)-triphenylamine (TCTA), 4,4',4''-tris[phenyl(m-tolyl)amino]triphenylamine (m-MTDATA), Poly[(9,9'-dioctylfluorene-2,7-diyl)-co-(4,4'-(N-(4-sec-butylphenyl)diphenylamine))](TFB), Poly(4-butylphenyl-diphenylamine) (poly-TPD), poly(p-)phenylene vinylene and derivatives thereof such as poly(phenylene vinylene) (PPV), poly[ 2-methoxy-5-(2-ethylhexyloxy)-1,4-phenylenevinylene](MEH-PPV), poly[2-methoxy-5-(3',7 '-Dimethyloctyloxy)-1,4-phenylene vinylene] (MOMO-PPV), copper phthalocyanine (CuPc), aromatic tertiary amine or polynuclear aromatic tertiary amine, 4,4'-bis (p-carbazolyl)-1,1'-biphenyl compound, N,N,N',N'-tetraarylbenzidine (TPB), PEDOT:PSS and its derivatives, poly(N-vinylcarba azole) (PVK) and its derivatives, polymethacrylate (PMMA) and its derivatives, poly(9,9-octylfluorene) (PFO) and its derivatives, poly(spirofluorene) and its derivatives , N,N'-bis(naphthalen-1-yl)-N,N'-diphenylbenzidine (NPB). Preferably, the above-mentioned hole transport layer can be selected from one or more of TFB, PVK, Poly-TPD, and NPB.
阴极材料可以选自于Ca、Ba、Ca:Al、LiF:Ca、LiF:Al、BaF 2:Al、CsF:Al、CaCO 3:Al、BaF 2:Ca:Al、Al、Mg、Au:Mg、Ag:Mg中的一种或多种。优选地,上述阴极的材料可以选自于Al和/或Ag。 The cathode material may be selected from Ca, Ba, Ca:Al, LiF:Ca, LiF:Al, BaF 2 :Al, CsF:Al, CaCO 3 :Al, BaF 2 :Ca:Al, Al, Mg, Au:Mg , one or more of Ag:Mg. Preferably, the material of the cathode can be selected from Al and/or Ag.
下面通过具体实施例来对本申请进行具体说明,以下实施例仅是本申请的部分实施例,不是对本申请的限定。The present application will be described in detail through specific examples below, and the following examples are only part of the examples of the present application, and are not intended to limit the present application.
实施例1Example 1
参见图1,本实施例提供一种量子点发光二极管,该量子点发光二极管的器件结构为正置结构,包括:依次层叠设置的衬底110、阳极120、空穴注入层130、空穴传输层140、量子点发光层150、复合电子传输层160、金属层170以及阴极180。其中,复合电子传输层160的材料包括电子传输材料161以及金属盐162,电子传输材料161中渗入(在图1中以曲线形式体现)有金属盐162。Referring to Fig. 1, the present embodiment provides a quantum dot light emitting diode, the device structure of the quantum dot light emitting diode is an upright structure, including: a substrate 110, an anode 120, a hole injection layer 130, a hole transport layer stacked in sequence layer 140 , quantum dot light emitting layer 150 , composite electron transport layer 160 , metal layer 170 and cathode 180 . Wherein, the material of the composite electron transport layer 160 includes an electron transport material 161 and a metal salt 162 , and the metal salt 162 is infiltrated into the electron transport material 161 (shown in the form of a curve in FIG. 1 ).
参见图2,本实施例还提供上述量子点发光二极管的制备方法,包括:Referring to Fig. 2, the present embodiment also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
S111:提供衬底110,并在衬底110上制备具有ITO/Ag/ITO结构的阳极120;S111: providing a substrate 110, and preparing an anode 120 having an ITO/Ag/ITO structure on the substrate 110;
S112:在阳极120上旋涂PEDOT:PSS:s-MoO 3,以制备厚度为20nm的空穴注入层130,在空气中对空穴注入层130进行180℃退火15分钟; S112: Spin-coat PEDOT:PSS:s-MoO 3 on the anode 120 to prepare a hole injection layer 130 with a thickness of 20 nm, and anneal the hole injection layer 130 in air at 180° C. for 15 minutes;
S113:于氮气气氛中,在空穴注入层130上旋涂poly-TPD,以制备厚度为15nm的空穴传输层140并在150℃下退火15分钟;S113: In a nitrogen atmosphere, spin-coat poly-TPD on the hole injection layer 130 to prepare a hole transport layer 140 with a thickness of 15 nm, and anneal at 150° C. for 15 minutes;
S114:在空穴传输层140上旋涂CdSe/ZnS,以制备厚度为50nm的量子点发光层150并在85℃下退火15分钟;S114: Spin-coat CdSe/ZnS on the hole transport layer 140 to prepare a quantum dot light-emitting layer 150 with a thickness of 50 nm, and anneal at 85° C. for 15 minutes;
S115:在量子点发光层150上旋涂LZO,以制备厚度为60nm的电子传输材料161的膜层,将得到的器件于氮气环境中以254nmUV垂直照射20分钟;S115: Spin-coat LZO on the quantum dot light-emitting layer 150 to prepare a film layer of the electron transport material 161 with a thickness of 60 nm, and irradiate the obtained device vertically with 254 nm UV for 20 minutes in a nitrogen environment;
S116:在上述电子传输材料161的膜层完全固化前,在电子传输材料161的膜层上旋涂FeCl 3,以制备厚度为3nm的金属盐162的膜层,并在80℃退火15分钟; S116: before the film layer of the electron transport material 161 is completely cured, spin-coat FeCl 3 on the film layer of the electron transport material 161 to prepare a film layer of the metal salt 162 with a thickness of 3 nm, and anneal at 80° C. for 15 minutes;
S117:在上述金属盐162的膜层完全固化后,在沉积形成的金属盐162的膜层上蒸镀Ni,以制备厚度为2nm的金属层170;S117: After the film layer of the metal salt 162 is completely cured, evaporate Ni on the deposited film layer of the metal salt 162 to prepare a metal layer 170 with a thickness of 2 nm;
S118:在金属层170上蒸镀Ag以形成厚度为80nm的阴极180;S118: evaporating Ag on the metal layer 170 to form a cathode 180 with a thickness of 80 nm;
S119:封装。S119: Encapsulation.
另外,本实施例提供光学透过率测试器件及其制备方法。其中,光学透过率测试器件的制备方法包括:In addition, this embodiment provides an optical transmittance testing device and a preparation method thereof. Wherein, the preparation method of the optical transmittance test device includes:
在ITO上旋涂LZO以制备厚度为60nm的电子传输材料161的膜层并将器件于氮气环境中以254nmUV垂直照射20分钟,在上述电子传输材料161的膜层完全固化前,在电子传输材料161的膜层上旋涂FeCl 3,以制备厚度为3nm的金属盐162的膜层并在80℃退火15分钟,再在金属盐162的膜层完全固化、与电子传输材料161的膜层共同形成复合电子传输层160后,在金属盐162的膜层上蒸镀Ni,以制备厚度为2nm的金属层。 Spin-coat LZO on ITO to prepare a film layer of electron transport material 161 with a thickness of 60nm and irradiate the device vertically with 254nm UV for 20 minutes in a nitrogen environment. Spin-coat FeCl 3 on the film layer of 161 to prepare a film layer of metal salt 162 with a thickness of 3nm and anneal at 80°C for 15 minutes, then completely solidify the film layer of metal salt 162, and combine with the film layer of electron transport material 161 After the composite electron transport layer 160 is formed, Ni is vapor-deposited on the film layer of the metal salt 162 to prepare a metal layer with a thickness of 2 nm.
实施例2Example 2
本申请实施例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在实施例1的基础上,仅将实施例1提供的量子点发光二极管中的金属盐的膜层的材料FeCl 3替换为CoCl 2The embodiment of the present application provides a quantum dot light-emitting diode and a preparation method thereof. On the basis of embodiment 1, the quantum dot light-emitting diode is only made of the material FeCl 3 was replaced by CoCl2 .
另外,本实施例提供光学透过率测试器件及其制备方法,该光透过率测试器件在实施例1的基础上,仅将实施例1提供的光学透过率测试器件中金属盐的膜层的材料FeCl 3替换为CoCl 2In addition, this embodiment provides an optical transmittance testing device and a preparation method thereof. On the basis of Example 1, only the metal salt film in the optical transmittance testing device provided in Example 1 is used for the optical transmittance testing device. The layer material FeCl 3 is replaced by CoCl 2 .
实施例3Example 3
本申请实施例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在实施例1的基础上,仅将实施例1提供的量子点发光二极管中金属层的材料Ni替换为Pd。The embodiment of the present application provides a quantum dot light emitting diode and a preparation method thereof. The quantum dot light emitting diode is based on embodiment 1, only the material of the metal layer in the quantum dot light emitting diode provided in embodiment 1 is replaced with Pd.
另外,本实施例提供光学透过率测试器件及其制备方法,该光透过率测试器件在实施例1的基础上,仅将实施例1提供的光学透过率测试器件中金属层的材料Ni替换为Pd。In addition, this embodiment provides an optical transmittance testing device and a preparation method thereof. On the basis of Example 1, the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in Example 1 Ni is replaced by Pd.
实施例4Example 4
本申请实施例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在实施例1的基础上,将实施例1提供的量子点发光二极管中金属盐的膜层的材料FeCl 3替换为CoCl 2,并将金属层的材料Ni替换为Pd。 The embodiment of the present application provides a quantum dot light-emitting diode and a preparation method thereof. On the basis of embodiment 1, the quantum dot light-emitting diode is replaced by FeCl3 , which is the material of the film layer of the metal salt in the quantum dot light-emitting diode provided in embodiment 1. is CoCl 2 , and the material Ni of the metal layer is replaced with Pd.
另外,本实施例提供光学透过率测试器件及其制备方法,该光透过率测试器件在实施例1的基础上,将实施例1提供的光学透过率测试器件中金属盐的膜层的材料FeCl 3替换为CoCl 2,并将金属层的材料Ni替换为Pd。 In addition, this embodiment provides an optical transmittance testing device and a preparation method thereof. The optical transmittance testing device is based on Example 1, and the film layer of the metal salt in the optical transmittance testing device provided in Example 1 is The material FeCl 3 is replaced by CoCl 2 , and the material Ni of the metal layer is replaced by Pd.
实施例5Example 5
本申请实施例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在实施例1的基础上,仅将实施例1提供的量子点发光二极管中金属层的材料Ni替换为Pt。The embodiment of the present application provides a quantum dot light emitting diode and a preparation method thereof. The quantum dot light emitting diode is based on embodiment 1, only the material of the metal layer in the quantum dot light emitting diode provided in embodiment 1 is replaced with Pt.
另外,本实施例提供光学透过率测试器件及其制备方法,该光透过率测试器件在实施例1的基础上,仅将实施例1提供的光学透过率测试器件中金属层的材料Ni替换为Pt。In addition, this embodiment provides an optical transmittance testing device and a preparation method thereof. On the basis of Example 1, the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in Example 1 Ni is replaced by Pt.
实施例6Example 6
本申请实施例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在实施例1的基础上,将实施例1提供的量子点发光二极管中金属盐的膜层的材料FeCl 3替换为CoCl 2,并将金属层的材料Ni替换为Pt。 The embodiment of the present application provides a quantum dot light-emitting diode and a preparation method thereof. On the basis of embodiment 1, the quantum dot light-emitting diode is replaced by FeCl3 , which is the material of the film layer of the metal salt in the quantum dot light-emitting diode provided in embodiment 1. is CoCl 2 , and the material of the metal layer is replaced by Pt from Ni.
另外,本实施例提供光学透过率测试器件及其制备方法,该光透过率测试器件在实施例1的基础上,将实施例1提供的光学透过率测试器件中金属盐的膜层的材料FeCl 3替换为CoCl 2,并将金属层的材料Ni替换为Pt。 In addition, this embodiment provides an optical transmittance testing device and a preparation method thereof. The optical transmittance testing device is based on Example 1, and the film layer of the metal salt in the optical transmittance testing device provided in Example 1 is The material FeCl 3 is replaced by CoCl 2 , and the material Ni of the metal layer is replaced by Pt.
实施例7Example 7
参见图3,本实施例提供一种量子点发光二极管,该量子点发光二极管的器件结构包括依次层叠设置的衬底110、阳极120、空穴注入层130、空穴传输层140、量子点发光层150、复合电子传输层160、金属层170以及阴极180。Referring to FIG. 3 , the present embodiment provides a quantum dot light-emitting diode. The device structure of the quantum dot light-emitting diode includes a substrate 110, an anode 120, a hole injection layer 130, a hole transport layer 140, and a quantum dot light-emitting layer that are sequentially stacked. layer 150 , composite electron transport layer 160 , metal layer 170 and cathode 180 .
参见图4,本实施例还提供上述量子点发光二极管的制备方法,包括:Referring to FIG. 4, this embodiment also provides a method for preparing the above-mentioned quantum dot light-emitting diode, including:
S121:提供衬底110,并在衬底110上制备IZO/Ag/IZO阳极120;S121: providing a substrate 110, and preparing an IZO/Ag/IZO anode 120 on the substrate 110;
S122:在阳极120上旋涂m-MTDATA,以制备厚度为18nm的空穴注入层130,在空气中对空穴注入层130进行185℃退火17分钟;S122: Spin-coat m-MTDATA on the anode 120 to prepare a hole injection layer 130 with a thickness of 18 nm, and anneal the hole injection layer 130 in air at 185° C. for 17 minutes;
S123:于氩气气氛中,在空穴注入层130上旋涂PVK,以制备厚度为17nm的空穴传输层140并在155℃下退火15分钟;S123: In an argon atmosphere, spin-coat PVK on the hole injection layer 130 to prepare a hole transport layer 140 with a thickness of 17 nm, and anneal at 155° C. for 15 minutes;
S124:在空穴传输层140上旋涂CdSe/ZnS,以制备厚度为50nm的量子点发光层150并在85℃下退火15分钟;S124: Spin-coat CdSe/ZnS on the hole transport layer 140 to prepare a quantum dot light-emitting layer 150 with a thickness of 50 nm, and anneal at 85° C. for 15 minutes;
S125:在量子点发光层150上旋涂LZO与FeCl 3的混合物(混合物中FeCl 3金属盐与LZO物质的量的比值为0.04),以形成厚度为63nm的复合电子传输层160,并在80℃退火15分钟; S125: Spin-coat a mixture of LZO and FeCl 3 on the quantum dot light-emitting layer 150 (the ratio of the amount of FeCl 3 metal salt to LZO species in the mixture is 0.04) to form a composite electron transport layer 160 with a thickness of 63 nm, and ℃ annealing for 15 minutes;
S126:在上述复合电子传输层160完全固化后,在上述复合电子传输层160上蒸镀Ni,以制备厚度为2nm的金属层170;S126: After the composite electron transport layer 160 is completely cured, evaporate Ni on the composite electron transport layer 160 to prepare a metal layer 170 with a thickness of 2 nm;
S127:在金属层170上蒸镀Ag以形成厚度为75nm的阴极180;S127: evaporating Ag on the metal layer 170 to form a cathode 180 with a thickness of 75 nm;
S128:封装。S128: Encapsulation.
实施例8Example 8
参见图5,本实施例提供一种量子点发光二极管,该量子点发光二极管的器件结构为倒置结构,包括:依次层叠设置的衬底110、阴极180、金属层170、复合电子传输层160、量子点发光层150、空穴传输层140、空穴注入层130以及阳极120。其中,复合电子传输层160的材料包括电子传输材料161以及金属盐162,金属盐162中渗入(在图5中以曲线形式体现)有电子传输材料161。Referring to FIG. 5 , this embodiment provides a quantum dot light emitting diode. The device structure of the quantum dot light emitting diode is an inverted structure, including: a substrate 110, a cathode 180, a metal layer 170, a composite electron transport layer 160, Quantum dot light emitting layer 150 , hole transport layer 140 , hole injection layer 130 and anode 120 . Wherein, the material of the composite electron transport layer 160 includes the electron transport material 161 and the metal salt 162 , and the electron transport material 161 penetrates into the metal salt 162 (shown in the form of a curve in FIG. 5 ).
参见图6,本实施例还提供上述量子点发光二极管的制备方法,包括:Referring to FIG. 6, this embodiment also provides a method for preparing the above-mentioned quantum dot light-emitting diode, including:
S131:提供衬底110,并在衬底上上蒸镀Al以形成厚度为75nm的阴极180;S131: providing a substrate 110, and evaporating Al on the substrate to form a cathode 180 with a thickness of 75 nm;
S132:在阴极180上蒸镀Pt,以制备厚度为3nm的金属层170;S132: evaporating Pt on the cathode 180 to prepare a metal layer 170 with a thickness of 3 nm;
S133:在上述金属层170完全固化后,在金属层170上旋涂FeCl 3,以制备厚度为4nm的金属盐162的膜层并将器件于氮气环境中以254nmUV垂直照射20分钟; S133: After the metal layer 170 is completely cured, spin-coat FeCl 3 on the metal layer 170 to prepare a film layer of the metal salt 162 with a thickness of 4 nm, and irradiate the device vertically with 254 nm UV for 20 minutes in a nitrogen environment;
S134:在上述金属盐162的膜层完全固化前,在金属盐162的膜层上旋涂AZO,以制备厚度为60nm的电子传输材料161的膜层并在80℃退火15分钟;S134: before the film layer of the metal salt 162 is completely cured, spin-coat AZO on the film layer of the metal salt 162 to prepare a film layer of the electron transport material 161 with a thickness of 60 nm, and anneal at 80° C. for 15 minutes;
S135:在上述电子传输材料161的膜层完全固化后,在电子传输材料161的膜层上旋涂CdZnSe/ZnS,以制备厚度为50nm的量子点发光层150并在85℃下退火15分钟;S135: After the film layer of the electron transport material 161 is completely cured, spin-coat CdZnSe/ZnS on the film layer of the electron transport material 161 to prepare a quantum dot light-emitting layer 150 with a thickness of 50 nm, and anneal at 85° C. for 15 minutes;
S136:于氮气气氛中,在量子点发光层150上旋涂TFB,以制备厚度为17nm的空穴传输层140并在150℃下退火15分钟;S136: In a nitrogen atmosphere, spin-coat TFB on the quantum dot light-emitting layer 150 to prepare a hole transport layer 140 with a thickness of 17 nm, and anneal at 150° C. for 15 minutes;
S137:在空穴传输层140上旋涂PEDOT:PSS,以制备厚度为22nm的空穴注入层130,在空气中对空穴注入层130进行180℃退火15分钟;S137: Spin-coat PEDOT:PSS on the hole transport layer 140 to prepare a hole injection layer 130 with a thickness of 22 nm, and anneal the hole injection layer 130 at 180° C. for 15 minutes in air;
S138:在空穴注入层130上制备具有ITZO/Ag/ITZO结构的阳极120;S138: Prepare an anode 120 having an ITZO/Ag/ITZO structure on the hole injection layer 130;
S139:封装。S139: Encapsulation.
对比例1(标准器件)Comparative example 1 (standard device)
本对比例提供一种量子点发光二极管,该量子点发光二极管的器件结构为正置结构,包括:依次层叠设置的衬底、阳极、空穴注入层、空穴传输层、量子点发光层、电子传输层、以及阴极。This comparative example provides a quantum dot light-emitting diode. The device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, An electron transport layer, and a cathode.
本对比例还提供上述量子点发光二极管的制备方法,包括:This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
S211:提供衬底,并在衬底上制备具有ITO/Ag/ITO结构的阳极;S211: providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
S212:在阳极上旋涂PEDOT:PSS:s-MoO3,以制备厚度为20nm的空穴注入层,在空气中对空穴注入层进行180℃退火15分钟;S212: Spin-coat PEDOT:PSS:s-MoO3 on the anode to prepare a hole injection layer with a thickness of 20 nm, and anneal the hole injection layer at 180° C. for 15 minutes in air;
S213:于氮气气氛中,在空穴注入层上旋涂poly-TPD,以制备厚度为15nm的空穴传输层并在150℃下退火15分钟;S213: In a nitrogen atmosphere, spin-coat poly-TPD on the hole injection layer to prepare a hole transport layer with a thickness of 15 nm, and anneal at 150° C. for 15 minutes;
S214:在空穴传输层上旋涂CdSe/ZnS,以制备厚度为50nm的量子点发光层并在85℃下退火15分钟;S214: Spin-coat CdSe/ZnS on the hole transport layer to prepare a quantum dot light-emitting layer with a thickness of 50 nm, and anneal at 85° C. for 15 minutes;
S215:在量子点发光层上旋涂LZO,以制备厚度为60nm的电子传输层,并在80℃退火15分钟;S215: Spin-coat LZO on the quantum dot light-emitting layer to prepare an electron transport layer with a thickness of 60 nm, and anneal at 80° C. for 15 minutes;
S216:在电子传输层上蒸镀Ag以形成厚度为80nm的阴极;S216: evaporating Ag on the electron transport layer to form a cathode with a thickness of 80 nm;
S217:封装。S217: encapsulation.
另外,本对比例提供光学透过率测试器件及其制备方法。其中,光学透过率测试器件的制备方法包括:In addition, this comparative example provides an optical transmittance testing device and a preparation method thereof. Wherein, the preparation method of the optical transmittance test device includes:
在ITO上旋涂LZO以制备厚度为60nm的电子传输层并在80℃退火15分钟。LZO was spin-coated on ITO to prepare an electron transport layer with a thickness of 60 nm and annealed at 80 °C for 15 min.
对比例2(不含金属层的器件)Comparative example 2 (device without metal layer)
本对比例提供一种量子点发光二极管,该量子点发光二极管的器件结构为正置结构,包括:依次层叠设置的衬底、阳极、空穴注入层、空穴传输层、量子点发光层、复合电子传输层、以及阴极。This comparative example provides a quantum dot light-emitting diode. The device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, Composite electron transport layer, and cathode.
本对比例还提供上述量子点发光二极管的制备方法,包括:This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
S221:提供衬底,并在衬底上制备具有ITO/Ag/ITO结构的阳极;S221: providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
S222:在阳极上旋涂PEDOT:PSS:s-MoO 3,以制备厚度为20nm的空穴注入层,在空气中对空穴注入层进行180℃退火15分钟; S222: Spin-coat PEDOT:PSS:s-MoO 3 on the anode to prepare a hole injection layer with a thickness of 20 nm, and anneal the hole injection layer at 180° C. for 15 minutes in air;
S223:于氮气气氛中,在空穴注入层上旋涂poly-TPD,以制备厚度为15nm的空穴传输层并在150℃下退火15分钟;S223: In a nitrogen atmosphere, spin-coat poly-TPD on the hole injection layer to prepare a hole transport layer with a thickness of 15 nm, and anneal at 150° C. for 15 minutes;
S224:在空穴传输层上旋涂CdSe/ZnS,以制备厚度为50nm的量子点发光层并在85℃下退火15分钟;S224: Spin-coat CdSe/ZnS on the hole transport layer to prepare a quantum dot light-emitting layer with a thickness of 50 nm, and anneal at 85° C. for 15 minutes;
S225:在量子点发光层上旋涂LZO,以制备厚度为60nm的电子传输材料的膜层,将得到的器件于氮气环境中以254nmUV垂直照射20分钟;S225: Spin-coat LZO on the quantum dot light-emitting layer to prepare a film layer of an electron transport material with a thickness of 60 nm, and irradiate the obtained device vertically with 254 nm UV for 20 minutes in a nitrogen environment;
S226:在上述电子传输材料的膜层完全固化前,在电子传输材料的膜层上旋涂FeCl3,以制备厚度为3nm的金属盐的膜层,并在80℃退火15分钟,形成复合电子传输层;S226: Before the film layer of the above-mentioned electron transport material is completely cured, spin-coat FeCl3 on the film layer of the electron transport material to prepare a film layer of metal salt with a thickness of 3nm, and anneal at 80°C for 15 minutes to form a composite electron transport layer;
S227:在复合电子传输层上蒸镀Ag以形成厚度为80nm的阴极;S227: Evaporating Ag on the composite electron transport layer to form a cathode with a thickness of 80 nm;
S228:封装。S228: encapsulation.
另外,本对比例提供光学透过率测试器件及其制备方法。其中,光学透过率测试器件的制备方法包括:In addition, this comparative example provides an optical transmittance testing device and a preparation method thereof. Wherein, the preparation method of the optical transmittance test device includes:
在ITO上旋涂LZO以制备厚度为60nm的电子传输材料的膜层并将器件于氮气环境中以254nmUV垂直照射20分钟,在上述电子传输材料的膜层完全固化前,在电子传输材料的膜层上旋涂FeCl 3,以制备厚度为3nm的金属盐的膜层并在80℃退火15分钟,形成复合电子传输层。 Spin-coat LZO on ITO to prepare a film layer of electron transport material with a thickness of 60nm and irradiate the device vertically with 254nm UV for 20 minutes in a nitrogen environment. FeCl 3 was spin-coated on the layer to prepare a metal salt film layer with a thickness of 3 nm and annealed at 80° C. for 15 minutes to form a composite electron transport layer.
对比例3Comparative example 3
本对比例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在对比例2的基础上,仅将对比例2提供的量子点发光二极管中金属盐的膜层中的材料FeCl 3替换为CoCl 2This comparative example provides a quantum dot light-emitting diode and a preparation method thereof. On the basis of comparative example 2, the quantum dot light-emitting diode only uses the material FeCl in the film layer of the metal salt in the quantum dot light-emitting diode provided in comparative example 2. Replaced by CoCl 2 .
另外,本对比例提供光学透过率测试器件及其制备方法,该光透过率测试器件在对比例2的基础上,仅将对比例2提供的光学透过率测试器件中金属盐的膜层中的材料FeCl 3替换为CoCl 2In addition, this comparative example provides an optical transmittance testing device and a preparation method thereof. On the basis of comparative example 2, the optical transmittance testing device only uses the film of the metal salt in the optical transmittance testing device provided in comparative example 2 The material FeCl 3 in the layer was replaced by CoCl 2 .
对比例4(不包含金属盐)Comparative example 4 (does not contain metal salt)
本对比例提供一种量子点发光二极管,该量子点发光二极管的器件结构为正置结构,包括:依次层叠设置的衬底、阳极、空穴注入层、空穴传输层、量子点发光层、电子传输层、以及阴极。This comparative example provides a quantum dot light-emitting diode. The device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, An electron transport layer, and a cathode.
本对比例还提供上述量子点发光二极管的制备方法,包括:This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
S231:提供衬底,并在衬底上制备具有ITO/Ag/ITO结构的阳极;S231: providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
S232:在阳极上旋涂PEDOT:PSS:s-MoO 3,以制备厚度为20nm的空穴注入层,在空气中对空穴注入层进行180℃退火15分钟; S232: Spin-coat PEDOT:PSS:s-MoO 3 on the anode to prepare a hole injection layer with a thickness of 20 nm, and anneal the hole injection layer at 180° C. for 15 minutes in air;
S233:于氮气气氛中,在空穴注入层上旋涂poly-TPD,以制备厚度为15nm的空穴传输层并在150℃下退火15分钟;S233: In a nitrogen atmosphere, spin-coat poly-TPD on the hole injection layer to prepare a hole transport layer with a thickness of 15 nm, and anneal at 150° C. for 15 minutes;
S234:在空穴传输层上旋涂CdSe/ZnS,以制备厚度为50nm的量子点发光层并在85℃下退火15分钟;S234: Spin-coat CdSe/ZnS on the hole transport layer to prepare a quantum dot light-emitting layer with a thickness of 50 nm, and anneal at 85° C. for 15 minutes;
S235:在量子点发光层上旋涂LZO,以制备厚度为60nm的电子传输层,并在80℃退火15分钟;S235: Spin-coat LZO on the quantum dot light-emitting layer to prepare an electron transport layer with a thickness of 60 nm, and anneal at 80° C. for 15 minutes;
S236:在电子传输层上蒸镀Ni,以制备厚度为2nm的金属层;S236: Evaporating Ni on the electron transport layer to prepare a metal layer with a thickness of 2 nm;
S237:在电子传输层上蒸镀Ag以形成厚度为80nm的阴极;S237: Evaporating Ag on the electron transport layer to form a cathode with a thickness of 80 nm;
S238:封装。S238: Encapsulation.
另外,本对比例提供光学透过率测试器件及其制备方法。其中,光学透过率测试器件的制备方法包括:In addition, this comparative example provides an optical transmittance testing device and a preparation method thereof. Wherein, the preparation method of the optical transmittance test device includes:
在ITO上旋涂LZO以制备厚度为60nm的电子传输层并在80℃退火15分钟,在上述电子传输层上蒸镀Ni,以制备厚度为2nm的金属层。Spin-coat LZO on ITO to prepare an electron transport layer with a thickness of 60 nm and anneal at 80° C. for 15 minutes, and evaporate Ni on the above electron transport layer to prepare a metal layer with a thickness of 2 nm.
对比例5Comparative example 5
本对比例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在对比例4的基础上,仅将对比例4提供的量子点发光二极管中金属层的材料Ni替换为Pd。This comparative example provides a quantum dot light-emitting diode and a preparation method thereof. The quantum dot light-emitting diode is based on comparative example 4, only the material of the metal layer in the quantum dot light-emitting diode provided in comparative example 4 is replaced with Pd.
另外,本对比例提供光学透过率测试器件及其制备方法,该光透过率测试器件在对比例4的基础上,仅将对比例4提供的光学透过率测试器件中金属层的材料Ni替换为Pd。In addition, this comparative example provides an optical transmittance testing device and a preparation method thereof. On the basis of comparative example 4, the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in comparative example 4 Ni is replaced by Pd.
对比例6Comparative example 6
本对比例提供一种量子点发光二极管及其制备方法,该量子点发光二极管在对比例4的基础上,仅将对比例4提供的量子点发光二极管中金属层的材料Ni替换为Pt。This comparative example provides a quantum dot light-emitting diode and its preparation method. On the basis of comparative example 4, the quantum dot light-emitting diode only replaces Ni with Pt as the material of the metal layer in the quantum dot light-emitting diode provided in comparative example 4.
另外,本对比例提供光学透过率测试器件及其制备方法,该光透过率测试器件在对比例4的基础上,仅将对比例4提供的光学透过率测试器件中金属层的材料Ni替换为Pt。In addition, this comparative example provides an optical transmittance testing device and a preparation method thereof. On the basis of comparative example 4, the optical transmittance testing device only uses the material of the metal layer in the optical transmittance testing device provided in comparative example 4 Ni is replaced by Pt.
对比例7(不包括对电子传输材料的膜层进行非高温的交联操作)Comparative Example 7 (excluding the non-high-temperature cross-linking operation on the film layer of the electron transport material)
本对比例提供一种量子点发光二极管,该量子点发光二极管的器件结构为正置结构,包括:依次层叠设置的衬底、阳极、空穴注入层、空穴传输层、量子点发光层、复合电子传输层、金属层以及阴极。其中,复合电子传输层的材料包括电子传输材料以及金属盐。This comparative example provides a quantum dot light-emitting diode. The device structure of the quantum dot light-emitting diode is an upright structure, including: a substrate, an anode, a hole injection layer, a hole transport layer, a quantum dot light-emitting layer, Composite electron transport layer, metal layer and cathode. Wherein, the materials of the composite electron transport layer include electron transport materials and metal salts.
本对比例还提供上述量子点发光二极管的制备方法,包括:This comparative example also provides the preparation method of the above-mentioned quantum dot light-emitting diode, including:
S241:提供衬底,并在衬底上制备具有ITO/Ag/ITO结构的阳极;S241: providing a substrate, and preparing an anode with an ITO/Ag/ITO structure on the substrate;
S242:在阳极上旋涂PEDOT:PSS:s-MoO 3,以制备厚度为20nm的空穴注入层,在空气中对空穴注入层进行180℃退火15分钟; S242: Spin-coat PEDOT:PSS:s-MoO 3 on the anode to prepare a hole injection layer with a thickness of 20 nm, and anneal the hole injection layer at 180° C. for 15 minutes in air;
S243:于氮气气氛中,在空穴注入层上旋涂poly-TPD,以制备厚度为15nm的空穴传输层并在150℃下退火15分钟;S243: In a nitrogen atmosphere, spin-coat poly-TPD on the hole injection layer to prepare a hole transport layer with a thickness of 15 nm, and anneal at 150° C. for 15 minutes;
S244:在空穴传输层上旋涂CdSe/ZnS,以制备厚度为50nm的量子点发光层并在85℃下退火15分钟;S244: Spin-coat CdSe/ZnS on the hole transport layer to prepare a quantum dot light-emitting layer with a thickness of 50 nm, and anneal at 85° C. for 15 minutes;
S245:在量子点发光层上旋涂60nm的LZO,以制备电子传输材料的膜层;S245: Spin-coat 60nm LZO on the quantum dot light-emitting layer to prepare a film layer of electron transport material;
S246:不对上述电子传输材料的膜层进行固化,在电子传输材料上直接旋涂FeCl 3,以制备厚度为3nm的金属盐的膜层,并在80℃退火15分钟; S246: without curing the film layer of the above-mentioned electron transport material, directly spin-coat FeCl 3 on the electron transport material to prepare a film layer of metal salt with a thickness of 3 nm, and anneal at 80° C. for 15 minutes;
S247:在上述金属盐的膜层完全固化后,在沉积形成的金属盐的膜层上蒸镀Ni,以制备厚度为2nm的金属层;S247: After the film layer of the metal salt is completely cured, evaporate Ni on the film layer of the deposited metal salt to prepare a metal layer with a thickness of 2 nm;
S248:在金属层上蒸镀Ag以形成厚度为80nm的阴极;S248: evaporating Ag on the metal layer to form a cathode with a thickness of 80 nm;
S249:封装。S249: Encapsulation.
对所列实施例1~6、对比例1~6中的光学透过率测试器件进行UV-VIS测试,以测算光学透过率测试器件对于波长为380~720nm的光的薄膜透射率,结果参见表1。Carry out UV-VIS test to the optical transmittance test device in listed embodiment 1~6, comparative example 1~6, to measure the film transmittance of optical transmittance test device for the light of wavelength 380~720nm, the result See Table 1.
表1 UV-VIS薄膜透射率测试数据(测试范围380~720nm)Table 1 UV-VIS film transmittance test data (test range 380~720nm)
光学透过率测试器件 Optical transmittance test device 平均透射率 (Avg) Average transmittance (Avg) 最高透射率 (Max) Highest transmittance (Max)
实施例1 Example 1 89.20% 89.20% 93.3% @ 457nm 93.3% @ 457nm
实施例2 Example 2 84.80% 84.80% 86.5% @ 466nm 86.5% @ 466nm
实施例3 Example 3 86.70% 86.70% 90.1% @ 493nm 90.1% @ 493nm
实施例4 Example 4 81.10% 81.10% 83.8% @ 519nm 83.8% @ 519nm
实施例5 Example 5 83.90% 83.90% 86.2% @ 558nm 86.2% @ 558nm
实施例6 Example 6 80.20% 80.20% 81.9% @ 544nm 81.9% @ 544nm
对比例1 Comparative example 1 76.90% 76.90% 79.7% @ 434nm 79.7% @ 434nm
对比例2 Comparative example 2 91.50% 91.50% 95.1% @ 440nm 95.1% @ 440nm
对比例3 Comparative example 3 87.60% 87.60% 90.4% @ 447nm 90.4% @ 447nm
对比例4 Comparative example 4 71.40% 71.40% 73.5% @ 720nm 73.5% @ 720nm
对比例5 Comparative example 5 65.80% 65.80% 69.2% @ 720nm 69.2% @ 720nm
对比例6 Comparative example 6 60.90% 60.90% 62.3% @ 720nm 62.3% @ 720nm
从表中数据可以看到,相较于多数的例如对比例1提供的现有的光学透过率测试器件,实施例1~6提供的包括复合电子传输层和金属层的光学透过率测试器件的平均透射率与最高透射率有所上升。As can be seen from the data in the table, compared with the existing optical transmittance test device provided by most such as comparative example 1, the optical transmittance test comprising the composite electron transport layer and the metal layer provided by embodiments 1 to 6 The average transmittance and maximum transmittance of the device increased.
另外,对实施例2、实施例4、实施例6、对比例1、对比例3中量子点发光二极管的薄膜电阻进行测试,结果表明,对比例1制备的量子点发光二极管的薄膜电阻在100Ω左右,对比例3中包括复合电子传输层的量子点发光二极管的薄膜电阻为200~250Ω,而实施例2、4、6中同时包括复合电子传输层和金属层的量子点发光二极管的薄膜电阻为50~60Ω。因此同时包括复合电子传输层和金属层的量子点发光二极管具有更低的薄膜电阻,更有利于载流子的传输。In addition, the sheet resistance of the quantum dot light-emitting diodes in Example 2, Example 4, Example 6, Comparative Example 1, and Comparative Example 3 was tested, and the results showed that the sheet resistance of the quantum dot light-emitting diodes prepared in Comparative Example 1 was within 100Ω Left and right, the sheet resistance of the quantum dot light-emitting diode that includes the composite electron transport layer in Comparative Example 3 is 200~250Ω, while the sheet resistance of the quantum dot light-emitting diode that includes the composite electron transport layer and the metal layer in Examples 2, 4, and 6 is 50~60Ω. Therefore, the quantum dot light-emitting diode including the composite electron transport layer and the metal layer has lower sheet resistance and is more conducive to the transport of carriers.
对利用JVL(电流电压亮度)测试设备对上述实施例1~6和对比例1~6中的量子点发光二极管的亮度L及外量子效率EQE性能数值进行测试计算,结果参见表2。The luminance L and external quantum efficiency EQE performance values of the quantum dot light-emitting diodes in the above-mentioned Examples 1-6 and Comparative Examples 1-6 were tested and calculated by using JVL (current-voltage-luminance) testing equipment, and the results are shown in Table 2.
表2 实施例1~6和对比例1~6制备的器件性能测试数据Table 2 Device performance test data prepared in Examples 1-6 and Comparative Examples 1-6
量子点发光二极管 quantum dot light emitting diode EQE (%) EQE (%) L (nit) L (nit)
实施例1 Example 1 12.1 12.1 7109 7109
实施例2 Example 2 12.6 12.6 6957 6957
实施例3 Example 3 12.9 12.9 6522 6522
实施例4 Example 4 13.1 13.1 6475 6475
实施例5 Example 5 14.1 14.1 6631 6631
实施例6 Example 6 14.9 14.9 6398 6398
对比例1 Comparative example 1 6.9 6.9 4882 4882
对比例2 Comparative example 2 6.4 6.4 5315 5315
对比例3 Comparative example 3 6.7 6.7 5209 5209
对比例4 Comparative example 4 11.4 11.4 3153 3153
对比例5 Comparative example 5 11.8 11.8 2892 2892
对比例6 Comparative example 6 14.3 14.3 2017 2017
从表2中的数据可以看到,相较于多数的例如对比例1提供的现有的量子点发光二极管,实施例1~6提供的量子点发光二极管(包括替代电子传输层的复合电子传输层和金属层)的外量子效率和亮度均有所上升。另外,相较于对比例1提供的量子点发光二极管,对比例2、3提供的包括了复合电子传输层而未设置金属层的量子点发光二极管的亮度提高,但外量子效率变化不大,说明仅包括复合电子传输层而不包括金属层的量子点发光二极管对于器件外量子效率的提升的作用不佳。而相较于对比例1提供的量子点发光二极管,对比例4~6提供的包括了金属层而未设置替代电子传输层的复合电子传输层的量子点发光二极管的外量子效率显著增加,但亮度出现下降,说明仅包括金属层而不包括替代电子传输层的复合电子传输层的量子点发光二极管对于器件亮度的提升的作用不佳。而本申请的实施例1~6提供的量子点发光二极管在外量子效率和亮度方面均具有较优的性能。As can be seen from the data in Table 2, compared to most of the existing quantum dot light emitting diodes such as those provided in Comparative Example 1, the quantum dot light emitting diodes provided in Examples 1 to 6 (including composite electron transport materials that replace the electron transport layer) layers and metal layers) have increased external quantum efficiency and brightness. In addition, compared with the quantum dot light-emitting diodes provided in Comparative Example 1, the brightness of the quantum dot light-emitting diodes provided in Comparative Examples 2 and 3, which include a composite electron transport layer and no metal layer, is improved, but the external quantum efficiency does not change much. It shows that the quantum dot light-emitting diodes that only include the composite electron transport layer but not the metal layer have a poor effect on the improvement of the external quantum efficiency of the device. Compared with the quantum dot light-emitting diodes provided in Comparative Example 1, the external quantum efficiency of the quantum dot light-emitting diodes provided in Comparative Examples 4-6 that included a metal layer and did not have a composite electron transport layer that replaces the electron transport layer was significantly increased, but The decrease in brightness shows that the quantum dot light-emitting diode including only the metal layer but not the composite electron transport layer replacing the electron transport layer has a poor effect on improving the brightness of the device. However, the quantum dot light-emitting diodes provided by Examples 1-6 of the present application have better performance in terms of external quantum efficiency and brightness.
综上所述,本申请提供的发光二极管中的复合电子传输层与金属层相辅相成,相互配合,使得本申请发光二极管相对现有技术在透射率、载流子传输、亮度、效率方面均具有较佳的性能,综合效果好。In summary, the composite electron transport layer and the metal layer in the light-emitting diode provided by the application complement each other and cooperate with each other, so that the light-emitting diode of the present application has higher transmittance, carrier transport, brightness, and efficiency than the prior art. Excellent performance, good overall effect.
以上对本申请实施例所提供的一种发光二极管及其制备方法进行了详细介绍,本文中应用了具体个例对本申请的原理及实施方式进行了阐述,以上实施例的说明只是用于帮助理解本申请的方法及其核心思想;同时,对于本领域的技术人员,依据本申请的思想,在具体实施方式及应用范围上均会有改变之处,综上所述,本说明书内容不应理解为对本申请的限制。A light-emitting diode provided by the embodiment of the present application and its preparation method have been introduced in detail above. In this paper, the principle and implementation of the present application have been explained by using specific examples. The description of the above embodiment is only used to help understand the present application. The method of application and its core idea; at the same time, for those skilled in the art, according to the idea of this application, there will be changes in the specific implementation and scope of application. In summary, the content of this specification should not be understood as Limitations on this Application.

Claims (20)

  1. 一种发光二极管,其中,包括:A light emitting diode, comprising:
    阳极、阴极、设置在所述阳极与所述阴极之间的发光层;an anode, a cathode, and a light-emitting layer disposed between the anode and the cathode;
    复合电子传输层,所述复合电子传输层设置在所述阴极与所述发光层之间,所述复合电子传输层的材料包括电子传输材料和金属盐,所述金属盐中的金属元素选自VIII族元素;以及A composite electron transport layer, the composite electron transport layer is arranged between the cathode and the light-emitting layer, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal element in the metal salt is selected from Group VIII elements; and
    金属层,所述金属层设置在所述阴极与所述复合电子传输层之间,所述金属层的材料为掺杂或未掺杂的金属单质,所述金属单质中的金属元素选自VIII族元素。A metal layer, the metal layer is arranged between the cathode and the composite electron transport layer, the material of the metal layer is a doped or undoped metal element, and the metal element in the metal element is selected from VIII family elements.
  2. 根据权利要求1所述的发光二极管,其中,所述复合电子传输层中,所述金属盐与所述电子传输材料的物质的量的比值为0.04~0.1。The light emitting diode according to claim 1, wherein, in the composite electron transport layer, the ratio of the amount of the metal salt to the electron transport material is 0.04˜0.1.
  3. 根据权利要求1所述的发光二极管,其中,所述金属单质与所述电子传输材料的物质的量的比值为0.02~0.033。The light emitting diode according to claim 1, wherein the ratio of the amount of the simple metal to the electron transport material is 0.02-0.033.
  4. 根据权利要求1所述的发光二极管,其中,所述金属盐选自于氯化铁、氯化钴、醋酸铁、醋酸钴、硬脂酸铁、硝酸铁、硝酸钴中的一种或多种。The light-emitting diode according to claim 1, wherein the metal salt is selected from one or more of iron chloride, cobalt chloride, iron acetate, cobalt acetate, iron stearate, iron nitrate, and cobalt nitrate .
  5. 根据权利要求1所述的发光二极管,其中,所述金属单质选自于镍、钯、铂中的一种或多种。The light emitting diode according to claim 1, wherein the metal element is selected from one or more of nickel, palladium and platinum.
  6. 根据权利要求1所述的发光二极管,其中,所述掺杂的金属单质中的掺杂元素选自VIII族元素,且所述掺杂元素与所述金属单质中的金属元素不同。The light emitting diode according to claim 1, wherein the doping element in the doped metal element is selected from Group VIII elements, and the doping element is different from the metal element in the metal element.
  7. 根据权利要求1所述的发光二极管,其中,所述电子传输材料选自于掺杂或未掺杂的半导体纳米颗粒、有机电子传输材料中的一种或多种。The light emitting diode according to claim 1, wherein the electron transport material is selected from one or more of doped or undoped semiconductor nanoparticles and organic electron transport materials.
  8. 根据权利要求7所述的发光二极管,其中,所述电子传输材料选自于掺杂或未掺杂的TiO 2、ZnO、ZrO、SnO 2、WO 3、Ta 2O 3、HfO 3、Al 2O 3、ZrSiO 4、BaTiO 3、BaZrO 3、CdS、ZnSe、ZnS中的一种或多种。 The light emitting diode according to claim 7, wherein the electron transport material is selected from doped or undoped TiO 2 , ZnO, ZrO, SnO 2 , WO 3 , Ta 2 O 3 , HfO 3 , Al 2 One or more of O 3 , ZrSiO 4 , BaTiO 3 , BaZrO 3 , CdS, ZnSe, and ZnS.
  9. 根据权利要求7所述的发光二极管,其中,所述电子传输材料的掺杂元素选自于Al、Mg、In、Li、Ga、Cd、Cs、Cu中的一种或多种。The light emitting diode according to claim 7, wherein the doping element of the electron transport material is selected from one or more of Al, Mg, In, Li, Ga, Cd, Cs, Cu.
  10. 根据权利要求1所述的发光二极管,其中,所述发光二极管为正置结构的发光二极管、倒置结构的发光二极管中的一种。The light emitting diode according to claim 1, wherein the light emitting diode is one of a light emitting diode with an upright structure and a light emitting diode with an inverted structure.
  11. 根据权利要求1所述的发光二极管,其中,所述发光二极管为量子点发光二极管、有机发光二极管、微米发光二极管中的一种。The light emitting diode according to claim 1, wherein the light emitting diode is one of quantum dot light emitting diodes, organic light emitting diodes, and micron light emitting diodes.
  12. 根据权利要求11所述的发光二极管,其中,所述量子点发光二极管包括量子点发光层,所述量子点发光层的材料选自于CdSe、CdS、ZnSe、ZnS、CdTe、ZnTe、CdZnS、CdZnSe、CdZnTe、ZnSeS、ZnSeTe、ZnTeS、CdSeS、CdSeTe、CdTeS、CdZnSeS、CdZnSeTe、CdZnSTe、CdSeSTe、ZnSeSTe、CdZnSeSTe、CdSe/ZnS、CdZnSe/ZnS、CdS/CdZnS、InP、InAs、InAsP、InP/InAsP、PbS、PbSe、PbTe、PbSeS、PbSeTe、PbSTe、PbSe/PbS中的一种或多种。The light emitting diode according to claim 11, wherein the quantum dot light emitting diode comprises a quantum dot light emitting layer, and the material of the quantum dot light emitting layer is selected from CdSe, CdS, ZnSe, ZnS, CdTe, ZnTe, CdZnS, CdZnSe , CdZnTe, ZnSeS, ZnSeTe, ZnTeS, CdSeS, CdSeTe, CdTeS, CdZnSeS, CdZnSeTe, CdZnSTe, CdSeSTe, ZnSeSTe, CdZnSeSTe, CdSe/ZnS, CdZnSe/ZnS, CdS/CdZnS, InP, InAs, InAsP, InP/InAs P, PbS One or more of , PbSe, PbTe, PbSeS, PbSeTe, PbSTe, PbSe/PbS.
  13. 一种发光二极管的制备方法,其中,包括:A method of manufacturing a light emitting diode, comprising:
    提供阳极;provide the anode;
    在阳极上形成发光层;forming a light-emitting layer on the anode;
    在所述发光层上沉积形成层叠的复合电子传输层以及金属层;Depositing and forming a laminated composite electron transport layer and metal layer on the light-emitting layer;
    在金属层上形成阴极;forming a cathode on the metal layer;
    其中,所述复合电子传输层的材料包括电子传输材料和金属盐,所述金属盐中的金属元素选自VIII族元素;Wherein, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
    所述金属层的材料为掺杂或未掺杂的金属单质,所述金属单质中的金属元素选自VIII族元素。The material of the metal layer is a doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
  14. 根据权利要求13所述的发光二极管的制备方法,其中,所述沉积形成层叠的复合电子传输层以及金属层的步骤包括:The method for preparing a light-emitting diode according to claim 13, wherein the step of depositing and forming a stacked composite electron transport layer and a metal layer comprises:
    在所述发光层上沉积所述电子传输材料,并在所述电子传输材料的膜层固化之前,在所述电子传输材料的膜层上沉积所述金属盐,得到沉积有金属盐的电子传输材料膜层,固化形成复合电子传输层;The electron transport material is deposited on the light-emitting layer, and before the film layer of the electron transport material is cured, the metal salt is deposited on the film layer of the electron transport material, so that the electron transport deposited with the metal salt is obtained. The material film layer is cured to form a composite electron transport layer;
    在所述复合电子传输层上沉积所述金属单质形成金属层。Depositing the simple metal substance on the composite electron transport layer forms a metal layer.
  15. 根据权利要求14所述的发光二极管的制备方法,其中,所述固化形成复合电子传输层通过将所述沉积有金属盐的电子传输材料膜层暴露于空气的方式实现,所述暴露于空气的方式包括将所述沉积有金属盐的电子传输材料膜层置于空气环境中0.25~1min。The method for preparing a light-emitting diode according to claim 14, wherein said curing to form a composite electron transport layer is realized by exposing the electron transport material film layer deposited with the metal salt to the air, and said exposed to the air The method includes placing the film layer of the electron transport material deposited with the metal salt in the air environment for 0.25-1 min.
  16. 根据权利要求14所述的发光二极管的制备方法,其中,所述固化形成复合电子传输层通过紫外光照射的方式实现,所述紫外光照射的方式包括利用紫外光照射所述沉积有金属盐的电子传输材料膜层0.25~30min。The method for preparing a light-emitting diode according to claim 14, wherein the formation of the composite electron transport layer by curing is realized by ultraviolet light irradiation, and the ultraviolet light irradiation method includes irradiating the metal salt-deposited layer with ultraviolet light. Electron transport material film layer 0.25~30min.
  17. 一种发光二极管的制备方法,其中,包括:A method of manufacturing a light emitting diode, comprising:
    提供阴极;provide the cathode;
    在阴极上沉积形成层叠的金属层以及复合电子传输层;Depositing a laminated metal layer and composite electron transport layer on the cathode;
    在复合电子传输层上形成发光层;forming a light emitting layer on the composite electron transport layer;
    在发光层上形成阳极;forming an anode on the light-emitting layer;
    其中,所述复合电子传输层的材料包括电子传输材料和金属盐,所述金属盐中的金属元素选自VIII族元素;Wherein, the material of the composite electron transport layer includes an electron transport material and a metal salt, and the metal elements in the metal salt are selected from group VIII elements;
    所述金属层的材料为掺杂或未掺杂的金属单质,所述金属单质中的金属元素选自VIII族元素。The material of the metal layer is a doped or undoped metal element, and the metal element in the metal element is selected from group VIII elements.
  18. 根据权利要求17所述的发光二极管的制备方法,其中,所述沉积形成层叠的金属层以及复合电子传输层的步骤包括:The method for preparing a light emitting diode according to claim 17, wherein the step of depositing and forming a laminated metal layer and a composite electron transport layer comprises:
    在阴极上沉积所述金属单质形成金属层;Depositing the metal element on the cathode to form a metal layer;
    在所述金属层上沉积所述金属盐,并在所述金属盐的膜层固化之前,在所述金属盐的膜层上沉积所述电子传输材料,得到沉积有电子传输材料的金属盐膜层,固化形成复合电子传输层。Depositing the metal salt on the metal layer, and depositing the electron transport material on the film layer of the metal salt before the film layer of the metal salt is solidified, to obtain a metal salt film deposited with the electron transport material layer, cured to form a composite electron transport layer.
  19. 根据权利要求18所述的发光二极管的制备方法,其中,所述固化形成复合电子传输层通过将所述沉积有电子传输材料的金属盐膜层暴露于空气的方式实现,所述暴露于空气的方式包括将所述沉积有电子传输材料的金属盐膜层置于空气环境中0.25~1min。The method for preparing a light-emitting diode according to claim 18, wherein said curing to form a composite electron transport layer is realized by exposing the metal salt film layer deposited with electron transport materials to the air, and said exposed to the air The method includes placing the metal salt film layer deposited with the electron transport material in an air environment for 0.25-1 min.
  20. 根据权利要求18所述的发光二极管的制备方法,其中,所述固化形成复合电子传输层通过紫外光照射的方式实现,所述紫外光照射的方式包括利用紫外光照射所述沉积有电子传输材料的金属盐膜层0.25~30min。The method for preparing a light-emitting diode according to claim 18, wherein said curing to form a composite electron transport layer is realized by means of ultraviolet light irradiation, and said means of ultraviolet light irradiation includes using ultraviolet light to irradiate said deposited electron transport material The metal salt film layer is 0.25~30min.
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