WO2023113447A1 - Dispositif de détection de parallélisme entre un rouleau et un substrat, et procédé d'alignement de parallélisme l'utilisant - Google Patents

Dispositif de détection de parallélisme entre un rouleau et un substrat, et procédé d'alignement de parallélisme l'utilisant Download PDF

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Publication number
WO2023113447A1
WO2023113447A1 PCT/KR2022/020287 KR2022020287W WO2023113447A1 WO 2023113447 A1 WO2023113447 A1 WO 2023113447A1 KR 2022020287 W KR2022020287 W KR 2022020287W WO 2023113447 A1 WO2023113447 A1 WO 2023113447A1
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WIPO (PCT)
Prior art keywords
roll
light
substrate
stamp
parallelism
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PCT/KR2022/020287
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English (en)
Korean (ko)
Inventor
김재현
장봉균
임형준
김현돈
이승모
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한국기계연구원
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Publication of WO2023113447A1 publication Critical patent/WO2023113447A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/04—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light by periodically varying the intensity of light, e.g. using choppers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors

Definitions

  • the present invention relates to a device capable of detecting parallelism between a roll and a substrate and a parallelism alignment method using the device.
  • the roll transfer process is a process of transferring a thin film or element attached to a roll stamp onto a final substrate by attaching a thin film or element to a roll stamp, bringing the roll stamp into contact with the final substrate, and applying pressure while rolling the roll stamp.
  • a material capable of increasing adhesive strength is applied on the final substrate, or the adhesive strength of the substrate itself is used without a separate material.
  • the transfer process is used to form a thin film that is difficult to deposit or coat on a final substrate directly on a temporary substrate and transfer it to the final substrate, examples of which include graphene thin films, single crystal silicon thin films, organic thin films, and atomic layer thin films.
  • Devices advantageous to the transfer process are thin devices such as micro-LED devices with a thickness of 10 microns or less, mini-LED devices with a thickness of 100 microns or less, silicon and compound semiconductor devices with a thickness of 30 microns or less, and thin-film solar cell devices.
  • a transfer process using a roll stamp has the advantage of being able to transfer a thin film or element over a large area. If the contact pressure between the roll stamp and the substrate is not uniformly maintained, there is a disadvantage in that non-uniform transfer occurs in a transferred area and a non-transferred area, respectively.
  • Patent No. 10-1104923 published on January 12, 2012
  • the actuators at both ends of the stamp are controlled so that the contact pressure between the roll stamp and the substrate is uniformly generated in the axial direction of the roll.
  • This alignment method has the advantage of enabling very rapid load control transfer by directly reflecting the load measurement value to the actuator without any compensation, and is widely used for transferring various thin films and devices.
  • the contact pressure distribution in the axial direction of the roll may become non-uniform.
  • An object of the present invention is to provide a parallelism detection device between a roll and a substrate capable of correcting the parallelism between a roll stamp and a substrate without mechanical contact in a transfer process for a roll stamp, and a parallelism alignment method using the detection device.
  • an apparatus for detecting parallelism between a roll stamp and a substrate before the roll stamp contacts and presses a substrate placed on a stage comprising: a light source unit for radiating light vertically in a direction of the substrate; Located between the substrate and the light source unit but higher than the roll stamp, the light is separated into vertical light directed toward the substrate and horizontal light directed toward the roll stamp, and the roll reflected from the roll stamp and the substrate and returned.
  • an optical separation unit for sending reflected light and substrate reflected light to an optical position detection unit; a reflector located on one side of the optical splitter, changing a path of the horizontal light toward the roll stamp, and returning the roll-reflected light to the optical splitter; and the optical position detection unit located on the other side of the light separation unit and detecting a position by receiving the reflected light from the roll and the reflected light from the substrate.
  • a parallelism detection device between the roll and the substrate may be provided.
  • a method for detecting the parallelism between the roll stamp and the substrate and horizontally aligning the roll stamp and the substrate before the roll stamp contacts and presses the substrate placed on the stage (a ) radiating light perpendicularly from the light source unit toward the substrate; (b) arranging the vertical light separated by the light separation unit so that it is irradiated perpendicularly to the substrate; (c) arranging the horizontal light separated by the optical separation unit to be vertically irradiated to the roll stamp; and (d) aligning the parallelism of the roll stamp by collecting the reflected roll light reflected from the roll stamp by an optical position detector.
  • a parallelism alignment method using a parallelism detection device between a roll and a substrate may be provided.
  • a parallelism detection device between a roll and a substrate and a parallelism alignment method using the detection device according to an embodiment of the present invention precisely measure the parallelism between a roll stamp and a substrate in a non-contact manner, and align the parallelism between the roll stamp and the substrate, thereby measuring the parallelism between the roll stamp and the substrate. There is an effect of securing high-precision horizontal alignment between boards.
  • FIG. 1 is a diagram schematically showing the configuration of a parallelism detection device between a roll and a substrate according to a first embodiment of the present invention.
  • FIG. 2 is a diagram schematically showing the configuration of a parallelism detection device between a roll and a substrate according to a second embodiment of the present invention.
  • FIG. 3 is a diagram schematically showing the configuration of a parallelism detection device between a roll and a substrate according to a third embodiment of the present invention.
  • FIG. 4 is a diagram schematically showing the configuration of a parallelism detection device between a roll and a substrate according to a fourth embodiment of the present invention.
  • FIG. 5 is a diagram showing a state in which light is imaged in an optical position detection unit of embodiments of the present invention.
  • the substrate 20 placed on the stage 10 is brought into contact with the roll stamp 30 to transfer elements such as the substrate 20 and the roll stamp 30. ) are aligned parallel to each other.
  • the angle that the roll stamp 30 may have with respect to the substrate 20 is a rotation angle in the X-axis direction (roll angle), a rotation angle in the Y-axis direction (pitch angle), and a rotation angle in the Z-axis direction (yaw angle).
  • roll angle a rotation angle in the X-axis direction
  • pitch angle a rotation angle in the Y-axis direction
  • yaw angle a rotation angle in the Z-axis direction
  • Z-axis axial direction see FIG. 1
  • actuators are attached to both ends of the roll stamp 30.
  • the roll stamp 30 adjusts its horizontality with the substrate 20 while moving in the Z-axis direction by the driver. This is to align parallel to the substrate 20 by adjusting the pitch angle of the roll stamp 30 .
  • an apparatus for detecting parallelism between a roll and a substrate according to a first embodiment of the present invention includes a light source unit 100, an optical separation unit 200, and an optical position detection unit 300. ), and a reflector 400.
  • the detection device of the present invention is used before the transfer process is performed on the substrate 20 with the roll stamp 30, the substrate 20 is placed on the stage 10, and the roll stamp 30 is are spaced apart at predetermined intervals without contact with the
  • the light source unit 100 is a device for radiating light L, and radiates parallel light L1 toward the substrate 20 . Any light source unit 100 may be used as long as it radiates parallel light L1 having linearity.
  • the light source unit 100 may include a light source 110 and a first lens 120 .
  • the light source 110 generally uses a point light source. Since the point light source cannot generate parallel light L1 by radiating light, the first lens 120 is disposed. At this time, the light source 110 is configured to be located at the focal length of the first lens 120 .
  • the light source unit 100 may use a solid laser or a gas laser that itself irradiates parallel light L1 as the light source 110 .
  • a separate first lens 120 will not be required.
  • the light source unit 100 is positioned on the substrate 20 .
  • the light source unit 100 is disposed on the substrate 20 to radiate parallel light L1 toward the substrate 20 .
  • the light source unit 100 radiates parallel light L1 vertically from above the substrate 20 toward the substrate 20 .
  • the light separation unit 200 is disposed on the path of the parallel light L1 irradiated by the light source unit 100 .
  • the optical separation unit 200 is capable of separating light paths and may use a beam splitter.
  • the optical separation unit 200 is positioned between the light source unit 100 and the substrate 20 but is positioned higher than the roll stamp 30 .
  • the optical separation unit 200 is located on the Z-axis line (see FIG. 1) in the height direction of the light source unit 100. However, the height of the optical separation unit 200 is higher than that of the roll stamp 30 .
  • the light separation unit 200 separates the parallel light L1 of the light source unit 100 into vertical light L2 directed toward the substrate 20 and horizontal light L3 directed toward the roll stamp.
  • the vertical light L2 is directly irradiated onto the substrate 20, reflected by the substrate 20, and returned to the optical separation unit 200 as substrate reflected light L7.
  • the optical separation unit 200 sends the substrate reflection light L7 reflected from the substrate 20 and returned to the optical position detection unit 300 .
  • the horizontal light L3 is directed to the roll stamp 30 positioned below the reflector 400 by the reflector 400 positioned on one side of the light separator 200 .
  • the reflector 400 is a reflector that changes the path of light from vertical to horizontal or from horizontal to vertical, and since the roll stamp 30 is not located directly below the optical separation unit 200, it is separated from the optical separation unit 200. This is to change the path of the horizontal light (L3) so that the horizontal light (L3) can reach the roll stamp (30).
  • the path of the horizontal light L3 separated by the light separator 200 is changed toward the roll stamp 30 by the reflector 400 .
  • the horizontal light L3 is reflected from the roll stamp 30 by the reflector 400, and the roll reflected light L4 reflected from the roll stamp 30 is returned to the light separator 200 by the reflector 400.
  • the optical separation unit 200 sends the roll reflected light L4 to the optical position detection unit 300 .
  • the light position detection unit 300 forms an image of the roll reflected light L4 and the substrate reflected light L7 that the light 101 irradiated from the light source unit 100 is reflected on the substrate 20 and the roll stamp 30 and returns, and determines the position thereof. is to use
  • the optical position detector 300 may use a Position Sensitive Photo Diode (PSPS), a general Charge Coupled Device (CCD), or a Complementary Metal Oxide Semiconductor (CMOS) as an image sensor.
  • PSPS Position Sensitive Photo Diode
  • CCD Charge Coupled Device
  • CMOS Complementary Metal Oxide Semiconductor
  • the detection device of the present invention has an optical configuration, but does not use interference caused by overlapping light. Interferometry is difficult for workers to easily use industrially because the procedure for analyzing interference patterns is cumbersome, and time and effort are required in the alignment process, which can reduce work efficiency at the site where roll transfer equipment is operated.
  • a method of measuring and comparing the position of each light reflected from the surface of the substrate 20 and the roll stamp 30 is used. That is, when the roll reflected light L4 and the substrate reflected light L7 are collected and formed in the optical position detection unit 300, the formed position is measured.
  • a second lens 220 may be disposed between the optical separation unit 200 and the optical position detection unit 300 .
  • the second lens 220 allows the roll reflected light L4 and the substrate reflected light L7 to be collected into the optical position detection unit 300 .
  • the distance between the second lens 220 and the optical separation unit 200 should be equal to the focal length of the second lens 220 .
  • an aperture (not shown) may be disposed between the reflector 400 and the roll stamp 30 or between the reflector 400 and the optical separation unit 200 .
  • the diaphragm may adjust the amount of the roll reflected light L4 so that only a portion of it enters the optical position detection unit 300 .
  • the light source unit 100 and the optical separation unit 200 are arranged in a straight line perpendicular to the stage 10 on which the substrate 20 is placed.
  • An optical separation unit 200 is positioned on the substrate 20 , and a light source unit 100 is located on the optical separation unit 200 .
  • the first lens 120 is formed in the light source unit 100
  • the first lens 120 is positioned on the optical splitter 200 and the light source 110 is positioned on the first lens 120 .
  • the reflector 400, the optical splitter 200, the second lens 220, and the optical position detector 300 are arranged horizontally on the stage 10 in a straight line.
  • the reflector 400 is positioned on one side of the optical splitter 300 with respect to the optical splitter 200
  • the optical position detector 300 is positioned on the other side of the light splitter 200 .
  • the roll stamp 30 is located below the reflector 400 .
  • the light source unit 100, the first lens 210, the light separation unit 200, the reflector 400, the second lens 220, and the optical position detection unit 300 described above are all placed on the roll stamp 30. Located.
  • the parallel light L1 irradiated from the light source unit 100 is separated into a vertical light L2 and a horizontal light L3 by the light separation unit 200 .
  • the vertical light L2 is reflected from the substrate 20, and the reflected substrate light L7 from the substrate 20 is rerouted in the optical separation unit 200 and collected in the optical position detection unit 300.
  • the path of the horizontal light L3 is changed in the reflector 400 and is changed in the vertical direction, which is the direction of the roll stamp 30 located below.
  • the horizontal light L3 is reflected by the roll stamp 30, and the roll reflected light L4 reflected by the roll stamp 30 changes its path again in the reflector 400 and is directed to the light separator 200. Then, they pass through the optical separation unit 200 and gather into the optical position detection unit 300 .
  • the parallel light L1 irradiated from the light source unit 100 is separated into vertical light L2 and horizontal light L3 in the light separation unit 200, and is reflected from the substrate 20 and the roll stamp 30, respectively.
  • the roll-reflected light L4 and the substrate-reflected light L7 reflected from the substrate 20 and the roll stamp 30 pass through the optical separation unit 200 and are finally gathered into the optical position detection unit 300 .
  • the substrate reflected light L7 reflected from the substrate 20 is imaged as a point in the optical position detector 300 as shown in FIG. 5(a).
  • the substrate reflection light L7 reflected from the roll stamp 30 is imaged in a straight line in the optical position detection unit 300 as shown in FIG. 5(b). Since the surface of the roll stamp 30 is not flat, the optical position detection unit 300 forms an image in a straight line shape.
  • positions of the roll reflected light L4 and the substrate reflected light L7 imaged by the optical position detector 300 are compared.
  • the detection device of the present invention is installed on the stage 10.
  • the substrate reflected light L7 is imaged as a point in the optical position detection unit 300 as shown in FIG. 5(a).
  • the point is imaged at the center, but if the point is not imaged at the center, the position of the detection device of the present invention is adjusted so that the substrate reflected light L7 is imaged at the center.
  • the vertical light L2 is vertically irradiated to the substrate 20 .
  • the roll stamp 30 Since the roll stamp 30 operates like a convex mirror, the roll reflected light L4 reflected from the roll stamp 30 is imaged on the optical position detector 300 in a straight line shape. (Fig. 5 (b), (c), (d), (e)).
  • the roll reflected light L4 is Adjust to be perpendicular to the axis as shown in d). Then, the horizontal inclination is aligned by rotating the roll stamp 30 in the Y-axis direction to adjust the position of the roll reflected light L4 to pass through the center as shown in FIG. 5(b).
  • FIG. 2 An apparatus for detecting parallelism between a roll and a substrate according to a second embodiment of the present invention is as shown in FIG. 2 .
  • the parallelism detecting device between the roll and the substrate according to the second embodiment of the present invention is the same as the parallelism detecting device between the roll and the substrate according to the first embodiment of the present invention except for the configuration of the reflector 400 .
  • the roll stamp 30 is positioned in a straight line with the optical separation unit 200 .
  • the roll stamp 30 is located on one side of the optical separation unit 200 and the optical position detection unit 300 is located on the other side.
  • the horizontal light L3 is directly directed to the roll stamp 30 without a change in path, and the roll reflected light L4 also passes through the optical separation unit 200 and is collected in the optical position detection unit 300 without a change in path.
  • the roll reflected light L4 is Adjust so that it passes through the center of the axis together. Then, the horizontal inclination is aligned by rotating the roll stamp 30 in the Y-axis direction and adjusting the position of the roll reflected light L4 to be vertical while passing through the center of the axis as shown in FIG. 5 (b).
  • a parallelism detecting device between a roll and a substrate according to a third embodiment of the present invention is the same as that shown in FIG. 3, and a parallelism detecting device between a roll and a substrate according to the fourth embodiment of the present invention is the same as shown in FIG. Components omitted below are the same as those described above.
  • an apparatus for detecting parallelism between a roll and a substrate according to a third embodiment of the present invention is for detecting the degree of alignment between two roll stamps 30 .
  • Two roll stamps 30 are provided, a first roll stamp 31 and a second roll stamp 32 .
  • the first roll stamp 31 is positioned under the optical separation unit 200 and the second roll stamp 32 is positioned under the reflector 400 .
  • the vertical light L2 separated by the optical separation unit 200 is reflected as the first roll reflected light L5 in the first roll stamp 31 and collected by the optical position detection unit 300 through the optical separation unit 200.
  • the horizontal light L3 separated by the optical separation unit 200 changes its path in the reflector 400 and is reflected from the second roll stamp 32 as the second roll reflected light L6 through the optical separation unit 200. It is collected by the optical position detection unit 300 .
  • the horizontal inclination may be adjusted by rotating the first roll stamp 31 and the second roll stamp 32 in the Y-axis direction.
  • the degree of alignment in the Z-axis direction may be detected and adjusted by arranging the reflector 400 on the lateral side of the first roll stamp 31 and the second roll stamp 32, instead of the top, respectively. .
  • the alignment order of the parallelism detection device between the roll and the substrate according to the third embodiment of the present invention is the same as the alignment order of the parallelism detection device between the roll and the substrate according to the first embodiment of the present invention described above.
  • the parallelism detecting device between the roll and the substrate according to the fourth embodiment of the present invention is also for detecting the degree of alignment between the two roll stamps 30 .
  • the apparatus for detecting parallelism between a roll and a substrate according to the fourth embodiment of the present invention includes a first roll stamp 31 and a second roll stamp 32, the same as the apparatus for detecting parallelism between a roll and a substrate according to the third embodiment of the present invention. ) to perform the measurement.
  • the parallelism detecting device between the roll and the substrate according to the fourth embodiment of the present invention has a difference in that the detecting device is disposed on the side of the roll stamp 30 instead of on the top. That is, the detection device is disposed in the X direction based on the axis of FIG. 4 .
  • the light source unit 100 irradiates light 101 in the axial direction of the roll stamp 30 and detects the reflected first roll reflected light L5 and second roll reflected light L6 to form a first roll stamp 31 and The degree of alignment between the two roll stamps 32 can be adjusted.
  • the substrate 20 placed on the stage 10 is contacted and pressed before the roll stamp 30 contacts and presses the substrate 20 between the roll stamp 30 and the substrate 20.
  • This is a method for detecting parallelism and aligning the roll stamp 30 and the substrate 20 horizontally.
  • the parallelism detection device between the roll and the substrate according to the present invention is installed on the stage 10 on which the substrate 20 is placed.
  • the detection device is installed in the transfer equipment including the roll stamp 30 and the stage 10.
  • the installation method may be installed by connecting each component with a support, or it may be installed after configuring each component as one piece of equipment. Since installation of such inspection equipment is a well-known configuration, a detailed description thereof will be omitted.
  • step (a) parallel light L1 is radiated from the light source unit 100 vertically toward the substrate 20 placed on the stage 10 .
  • the parallel light L1 of the light source unit 100 is vertically radiated toward the substrate 20 .
  • the first lens 120 is configured in the light source unit 100, the light L of the light source 110 is irradiated as parallel light L1 while passing through the first lens 120.
  • the parallel light L1 is separated into a vertical light L2 and a horizontal light L3 in the optical splitter 200 .
  • the vertical light L2 is perpendicularly incident on the surface of the substrate 20, and the horizontal light L3 is directed toward the roll stamp 30.
  • the horizontal light L3 is reflected by the reflector 400 and is perpendicularly incident on the surface of the roll stamp 30 positioned below the reflector 400 .
  • step (b) the light separation unit 200 separates and aligns the vertical light L2 to be irradiated perpendicularly to the substrate 20 .
  • the substrate reflected light L7 reflected from the substrate 20 and returned is changed in path in the optical separation unit 200 and collected in the optical position detection unit 300 .
  • the second lens 220 is disposed before the optical position detector 300 so that the substrate reflected light L7 is focused on the optical position detector 300 .
  • the substrate reflection light L7 converging to one point in the optical position detection unit 300 is aligned so as to come to the center of the optical position detection unit 300 .
  • the substrate reflected light L7 imaged as a point is aligned so that the light position detector 300 converges at the center.
  • Alignment may be performed by changing the installation angle of the detection device itself or by changing the irradiation position of the light source unit 100 .
  • a criterion for detecting whether the roll stamp 30 is positioned parallel to the substrate 20 is set.
  • step (c) the horizontal light L3 separated by the optical separation unit 200 is aligned so that the roll stamp 30 is vertically irradiated. This is also for the optical position detection unit 300 to accurately detect the position of the roll reflected light L4.
  • Alignment is performed with the roll stamp 30 removed. Since the roll stamp 30 is removed, the horizontal light L3 is incident on the substrate 20 through the reflector 40 . The substrate reflection light L7 reflected from the substrate 20 is again directed from the reflector 400 disposed on the roll stamp 30 toward the optical separation unit 200 and from the optical separation unit 200 to the optical position detection unit 300. get together Then, the roll reflected light L7 is aligned so as to come to the center of the optical position detection unit 300 .
  • the roll reflected light L7 is imaged to the optical position detector 300 in a straight line form as shown in (b) to (d) of FIG. 5 .
  • the position of the reflector 400 is adjusted so that the roll reflected light L7 passes through the center point of the light position detector 300 .
  • step (d) the roll stamp 30 is disposed again, and the roll reflected light L4 reflected from the roll stamp 30 is collected by the optical position detector 300 to align the parallelism of the roll stamp 30 .
  • the light 101 of the light source unit 100 is aligned so as to be perpendicularly incident on the substrate 20 and the roll stamp 30 .
  • the optical position detection unit 300 detects the roll reflected light L4 and the substrate reflected light L7 to align the position of the roll stamp 30 parallel to the substrate 20 .
  • the roll stamp 30 is horizontally positioned so that the roll reflected light L4 is located at the center of the optical position detection unit 300. Align the parallelism of the roll stamp 30 by adjusting the inclination.
  • the roll stamp 30 When the roll stamp 30 has a rotation angle in the Y-axis direction, it passes through the center of the optical position detection unit 300 as shown in FIG. 5 (c), but is imaged in an inclined form. In order to align them horizontally, the horizontal inclination of the roll stamp 30 is adjusted so as to pass through the center of the optical position detection unit 300 as shown in FIG. 5(b) but not tilted vertically.
  • the roll reflected light L4 forms a vertical straight line passing through the center of the optical position detector 300. If imaged, roll stamp 30 is aligned horizontally over substrate 20 .
  • the parallelism detection device between the roll and the substrate and the parallelism alignment method using the detection device according to an embodiment of the present invention can precisely align the parallelism between the roll stamp and the substrate in a non-contact manner, thereby increasing productivity.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
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Abstract

La présente invention concerne un dispositif pouvant détecter un parallélisme entre un rouleau et un substrat et un procédé pour aligner un parallélisme l'utilisant, un parallélisme entre un tampon et un substrat étant mesuré avec précision sans contact, et un parallélisme entre un tampon de rouleau et le substrat étant assigné, assurant ainsi un alignement horizontal très précis entre le tampon de rouleau et le substrat.
PCT/KR2022/020287 2021-12-13 2022-12-13 Dispositif de détection de parallélisme entre un rouleau et un substrat, et procédé d'alignement de parallélisme l'utilisant WO2023113447A1 (fr)

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JP2004101406A (ja) * 2002-09-11 2004-04-02 Tokyo Seimitsu Co Ltd 外観検査装置
KR100690882B1 (ko) * 2005-03-21 2007-03-09 삼성전자주식회사 반도체 소자 제조용 노광 장비, 진동 감지 및 위치 측정방법, 반도체 소자 제조 방법
KR100833116B1 (ko) * 2006-11-03 2008-05-28 주식회사 에스에프에이 인쇄장치 및 인쇄방법
KR101846514B1 (ko) * 2017-12-12 2018-04-13 주식회사 피씨엠테크 롤 간 정렬 상태 측정장치 및 이를 이용한 측정방법
JP2020169952A (ja) * 2019-04-05 2020-10-15 キヤノンマシナリー株式会社 測定装置および測定方法

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