WO2023101386A1 - Dispositif d'observation et système d'observation de sphéroïde - Google Patents

Dispositif d'observation et système d'observation de sphéroïde Download PDF

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Publication number
WO2023101386A1
WO2023101386A1 PCT/KR2022/019156 KR2022019156W WO2023101386A1 WO 2023101386 A1 WO2023101386 A1 WO 2023101386A1 KR 2022019156 W KR2022019156 W KR 2022019156W WO 2023101386 A1 WO2023101386 A1 WO 2023101386A1
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WO
WIPO (PCT)
Prior art keywords
unit
module
spheroid
observation device
coupled
Prior art date
Application number
PCT/KR2022/019156
Other languages
English (en)
Korean (ko)
Inventor
김백길
조남훈
장연수
강숙희
Original Assignee
연세대학교 산학협력단
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Application filed by 연세대학교 산학협력단 filed Critical 연세대학교 산학협력단
Publication of WO2023101386A1 publication Critical patent/WO2023101386A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8483—Investigating reagent band
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M1/00—Apparatus for enzymology or microbiology
    • C12M1/34—Measuring or testing with condition measuring or sensing means, e.g. colony counters
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12M—APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; APPARATUS FOR CULTURING MICROORGANISMS FOR PRODUCING BIOMASS, FOR GROWING CELLS OR FOR OBTAINING FERMENTATION OR METABOLIC PRODUCTS, i.e. BIOREACTORS OR FERMENTERS
    • C12M41/00—Means for regulation, monitoring, measurement or control, e.g. flow regulation
    • C12M41/46—Means for regulation, monitoring, measurement or control, e.g. flow regulation of cellular or enzymatic activity or functionality, e.g. cell viability
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/4833—Physical analysis of biological material of solid biological material, e.g. tissue samples, cell cultures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1047—Mechano-optical scan, i.e. object and beam moving with rotating optics and moving stage

Definitions

  • the present invention relates to a spheroid observation device and an observation system, and more particularly, observes the state of a plurality of spheroid samples, but observes a plurality of spheroid samples through a photographing module moving in a first direction and a second direction. It relates to a spheroid observation device and observation system that transmits and observes captured images to a display while doing so.
  • the present invention is an invention made to solve the above-described problems of the prior art, while observing the state of a plurality of spheroid samples, observing a plurality of spheroid samples through a photographing module that moves in the first direction and the second direction.
  • the task is to transfer the captured image to the display for observation while doing so.
  • a spheroid observation device and an observation system for achieving the above object are a spheroid observation device for observing a plurality of spheroid samples in which a plurality of spheroid samples are positioned, the sample is positioned, and the position of the sample is fixed.
  • a positioning module to do the positioning module is located at the top, and a support module for supporting the edge of the positioning module to form a moving space at the bottom of the positioning module, moving inside the moving space and photographing the sample,
  • the moving module provides power so that the photographing module moves inside the moving space, and moves the photographing module in a first direction along the width and length of the moving space and in a second direction perpendicular to the first direction. It is characterized by doing
  • the moving module includes a first driving unit for moving the photographing module in the first direction and a pair provided at both ends of the first driving unit to move the first driving unit in the second direction and the photographing module. It is characterized in that it comprises a second drive unit for moving the module in the second direction.
  • the first driving unit is formed long toward the positioning module, has an image part coupled to the photographing module, both ends are coupled to the second driving unit, and forms a rail in the first direction in which the image part moves. It is characterized in that it includes a rail part to be coupled to surround both ends of the rail part so that the image part moves on the rail part, and a first wire part in which the image part is located on the inside.
  • both ends of the first wire part are coupled to both ends of the rail part, and coupled to the image part to move the image part according to the rotation direction in a state where the image part is located therein.
  • the image unit is coupled to the first wire portion to form a groove corresponding to the first wire portion so that the image portion moves according to the rotation direction of the first wire portion, the first wire portion is coupled to the groove It is characterized in that it comprises a first roller member.
  • the rail part a bar member coupled to the image part to form an axis in the first direction, a protruding member provided at both ends of the bar member and protruding toward the positioning module, and the first wire part are coupled to rotate in the rotational direction. It characterized in that it comprises an operating member for rotating the first wire portion according to.
  • the second driving unit is characterized in that both ends of the rail unit are coupled to the pair of second driving units to move the rail unit in the second direction.
  • the second driving unit is coupled to the support unit and the second wire part in which both ends of the rail part are located, and rotates the second wire part to move the rail part in the second direction according to the rotation direction. It is characterized in that it includes a rotating part to do.
  • the rotation unit a second roller member in which a groove corresponding to the second wire portion is formed, one end of the second wire portion coupled to the groove, and the second wire in a direction opposite to the second roller member It is characterized in that it includes a third roller member coupled to the other end of the portion and rotated together to correspond to the second wire portion rotated in one direction by the second roller member.
  • the photographing module includes a lens unit for photographing the sample, a body unit having one end coupled to the rail part and a space for accommodating the lens unit therein, and the lens unit and the lens unit at the circumference of the body unit. and a switch unit that is coupled and moves the lens unit on the inside of the body unit according to the rotation direction.
  • the positioning module may include a panel unit on which the sample is located and a fixing unit that moves in the second direction with the panel unit interposed therebetween and fixes the sample.
  • the fixing unit is provided with a pair and disposed to sandwich the sample, characterized in that it moves in the second direction.
  • the fixing unit is provided on the upper and lower portions of the panel unit, is formed long in the first direction, moves in a direction closer to each other, and presses and fixes the sample and one end of the pair of presses. It is characterized in that it includes an adjusting part coupled to penetrate and adjusting the distance of the pair of pressing parts.
  • the support module is a pillar unit that is formed long toward the bottom to form the moving space at the bottom of the positioning module, is formed at one end of the pillar unit and the corner of the positioning module is located, and the positioning module It is characterized in that it includes a separation prevention unit that prevents separation.
  • the separation prevention unit is characterized in that it is formed stepwise so that the corner of the location module is fixed.
  • the transmitting device is characterized in that, when it is determined that the number of samples captured by the photographing module is multiple, the image is divided and transmitted so as to distinguish and display the plurality of samples captured on the display.
  • the photographing module is characterized in that a plurality is provided and individually operated by the controller.
  • the spheroid observation device and observation system of the present invention for solving the above problems observe the state of a plurality of spheroid samples, while observing a plurality of spheroid samples through a photographing module that moves in the first direction and the second direction. There is an effect of transmitting the captured image to the display for observation.
  • FIG. 1 is a view for explaining the overall configuration of the observation device of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 2 is a view for explaining the location module of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 3 is a view for explaining the support module of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 4 is a view for explaining the escape prevention unit of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 5 is a view for explaining the photographing module of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 6 is a view for explaining the moving module of the spheroid observation device and observation system according to an embodiment of the present invention.
  • Figure 7 is a view for explaining the first driving unit of the spheroid observation device and observation system according to an embodiment of the present invention.
  • Figure 8 is a view for explaining the rail portion of the spheroid observation device and observation system according to an embodiment of the present invention.
  • Figure 9 is a view for explaining the second drive unit of the spheroid observation device and observation system according to an embodiment of the present invention.
  • Figure 10 is a view for explaining a third roller member of the spheroid observation device and observation system according to an embodiment of the present invention.
  • FIG. 11 is a diagram illustrating an observation system of a spheroid observation device and an observation system according to an embodiment of the present invention.
  • FIGS. 1 to 10 a spheroid observation device according to an embodiment of the present invention can be described through FIGS. 1 to 10.
  • Figure 1 is a view for explaining the overall configuration of the observation device of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 2 is a spheroid observation device according to an embodiment of the present invention And a view for explaining the location module of the observation system
  • Figure 3 is a view for explaining the support module of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 4 is one of the present invention
  • Figure 5 is a drawing for explaining the departure prevention unit of the spheroid observation device and observation system according to the embodiment
  • Figure 5 is shown to explain the shooting module of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 6 is a view for explaining the moving module of the spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 7 is a spheroid observation device and observation system according to an embodiment of the present invention
  • Figure 8 is a view for explaining the rail portion
  • the spheroid observation device can observe a plurality of the samples in which a number of spheroid samples are positioned, the samples are positioned, and the position of the samples is determined.
  • a photographing module 3000 moving in the moving space and photographing the sample, moving a space having a width corresponding to the location module 1000 and photographing a plurality of the samples, and the photographing module in the moving space (3000) may include a moving module 4000 that provides power to the photographing module 3000 so that it can move inside the moving space.
  • the positioning module 1000 may form a space in which the sample is positioned, and may be located above the support module 2000 and may form a moving space in which the photographing module 3000 is moved at the bottom. .
  • the position module 1000 forms a space in which the sample is located, as shown in FIG. 2, and is movable on the panel unit 1200 located above the support module 2000 and the panel unit 1200.
  • it may be composed of a fixing unit 1400 for fixing the sample to the panel unit 1200.
  • the sample is generally provided with an external support plate, disposed or fixed inside the external support plate, and the fixing unit 1400 includes a pressing unit 1420 for pressing and fixing the external support plate of the sample, the It may be composed of an adjusting unit 1440 that adjusts the distance between the pressing units 1420.
  • a pair of the pressing parts 1420 are provided with the panel unit 1200 interposed therebetween, and the adjusting part 1440 passes through the pair of pressing parts 1420 and is coupled. It may be provided at one end of the pressing part 1420.
  • the sample may be fixed to the panel unit 1200.
  • the pressure plate 1420 supports the sample by supporting the side rather than pressing the sample can make it
  • a path unit may be formed to form a path along which the press plate 1420 moves and fix the press plate 1420 to the panel unit 1200 in a state of being in close contact with the panel unit 1200.
  • the positioning module 1000 is supported to form a moving space in which the photographing module 3000 is moved through the moving module 4000, and the moving space is formed under the positioning module 1000.
  • a module 2000 may be disposed under the location module 1000 .
  • the support module 2000 extends downward with respect to the location module 1000 to support the edge of the location module 1000, as shown in FIG. 3, or the floor where the support unit 2000 is located. It may include a pillar unit 2200 extending upward based on , and a separation prevention unit 2400 preventing the position module 1000 from being separated from one end of the pillar unit 2200 .
  • the pillar unit 2200 may form a moving space between the floor and the location module 1000 .
  • the corner of the panel unit 1200 may be positioned in the separation prevention unit 2400, and the corner of the panel unit 1200 is formed in a form corresponding to the corner of the panel unit 1200 so as to be inserted into the inside. It can be.
  • the departure prevention unit 2400 may have a step so that the corner of the panel unit 1200 is located, and the lower end 2420 located below the corner of the panel unit 1200. ), and the upper end 2440 that comes into contact with the edge of the panel unit 1200.
  • the lower end portion 2420 may be formed at a position relatively lower than the upper end portion 2440, which means that the corner of the panel unit 1200 is located above the lower end portion 2420, This may be to fix the edge of the panel unit 1200 by the height of the upper part 2440.
  • the panel unit 1200 is not separated, and thus, shaking of the sample or falling of the panel unit 1200 may be prevented, thereby preventing safety accidents.
  • the photographing module 3000 is moved on the moving space and can photograph the sample from the lower part of the sample, and as shown in FIG. 5, the lens unit 3200 for photographing the sample, the lens unit ( It may be composed of a body unit 3400 having a space into which the lens unit 3200 is inserted, and a switch unit 3600 that adjusts the position of the lens unit 3200.
  • the lens unit 3200 may be a high-performance camera or lens for confirming an object that is difficult to visually confirm, such as an endoscope camera for photographing the sample or a microscope.
  • the body unit 3400 has a space into which the lens unit 3200 is inserted, and is formed long in the vertical direction so that the lens unit 3200 can be moved in the vertical direction inside, and the lens unit 3200 can be moved in the longitudinal direction around the circumference.
  • a pair of grooves may be formed along.
  • the switch unit 3600 which moves along the groove formed in the body unit 3400 and fixes the position of the lens unit 3200, is provided to fix the zoom-in and zoom-out states of the lens unit 3200. .
  • the switch unit 3600 and the lens unit 3200 are moved along the groove, the size, sharpness, etc. for photographing the sample are adjusted, and the switch member 3600 adjusts the sharpness while the sharpness is adjusted.
  • the switch member 3600 adjusts the sharpness while the sharpness is adjusted.
  • the switch unit 3600 may be manually adjusted, may be automatically adjusted through a separate motor operation, or the position of the lens unit 3200 may be fixed through a separate controller.
  • the lens unit 3200 may also be manually adjusted, but may be automatically moved up and down through an electrical device or a controller.
  • the movement module 4000 may move the photographing module 3000 in a movement space formed below the location module 1000, and the width direction of the movement space is set in a first direction D1,
  • the photographing module 3000 may be moved in a second direction D2 perpendicular to the first direction D1.
  • the moving module 4000 includes a first driving unit 4200 that moves the photographing module 3000 in the first direction D1 and the first driving unit 4200 in the second direction D2. It may be composed of a second driving unit 4400 that moves.
  • the first driving unit 4200 and the second driving unit 4400 are each connected to the photographing module 3000 in the first direction D1 or Although the photographing module needs to be moved in the second direction D2, in the observation device according to an embodiment of the present invention, the first driving unit 4200 moves the photographing module 3000 only in the first direction D1. As a result, the photographing module 3000 may move only in the first direction D1 as a direct movement.
  • the first driving unit 4200 may be directly coupled to the photographing module 3000 as described above, and the photographing module 3000 It may be moved in the first direction D1.
  • the first driving unit 4200 may include an imaging unit 4220 coupled to the photographing module 3000, and as shown in FIG. 8 , the imaging unit 4200 moves the photographing module 3000.
  • the image unit 4220 is formed to be coupled with the photographing module 3000, and a corresponding groove is formed to engage with the first wire unit 4260.
  • a first roller member 4222 for moving the photographing module 3000 according to the rotation direction of the first wire part 4260 may be included.
  • the first roller member 4222 is composed of an electrical device and can be automatically driven by receiving electrical energy, or can be controlled through a separate controller.
  • the rail part 4240 may form a movement path in the first direction D1 in which the image part 4220 moves, and is combined with the image part 4220 to form a movement path in the first direction D1.
  • a bar member 4242 forming an axis
  • a protruding member 4244 provided at both ends of the bar member 4242 and protruding toward the positioning module 1000, coupled with the first wire part 4260
  • the first operating member 4246 for rotating the first wire unit 4260 is coupled with the second wire unit 4420 to be described in more detail later, and the first operating member 4246 rotates according to the direction of rotation of the second wire unit 4420. It may be composed of a second operating member 4248 that moves the driving unit 4200 in the second direction D2.
  • the bar member 4242 may form a path along which the imaging unit 4220 moves, and the imaging unit 4220 moves along the bar member 4242 in the first direction D1. It may be moved, which may mean that the bar member 4242 may be disposed in the first direction D1.
  • the protruding member 4244 may have a predetermined height so that the first wire part 4260 and the second wire part 4420 do not interfere with the movement of the image part 4220, and the support module (2000) and can be moved along the circumference of the support module (2000).
  • first operating member 4246 and the second operating member 4248 may be coupled to the first wire portion 4260 and the second wire portion 4420, respectively, and the first roller member ( 4222), the imaging unit 4220 can be moved in the first direction D1 according to the direction in which the first wire unit 4260 is rotated, and the second operating member 4248 will be described later. It will be explained in more detail through the drawings to be done.
  • the first wire unit 4260 may have the image unit 4220 and the photographing module 3000 located therein, and both ends of a pair of the first operating members. (4246).
  • the photographing module 3000 can be moved in the first direction D1.
  • the second driving unit 4400 is connected to the second wire part 4420 and the support unit 2000 where both ends of the rail part 4240 are located. It may include a rotation unit that is coupled and rotates the second wire unit 4420 to move the rail unit 4240 in the second direction D2 according to the rotation direction.
  • the rotation unit includes a second roller member 4440 in which a groove corresponding to the second wire portion 4420 is formed and one end of the second wire portion 4420 is coupled to the groove, and the second roller member 4440 ) The other end of the second wire part 4420 is coupled in the opposite direction, and the second roller member 4440 rotates together in correspondence with the second wire part 4420 rotated in one direction.
  • 3 roller members 4460 may be included.
  • the second roller member 4440 may be coupled to the support module 2000 as shown in FIG. 9 and may be disposed adjacent to the pillar unit 2200.
  • the first driving unit 4200 is rotated in one direction and through both ends of the rail part 4240 located inside, more specifically, the second operating member 4248 coupled with the second wire part 4420. ) may be moved in the second direction D2.
  • one end and the other end must be coupled to a rotatable medium, so similar to the first wire part 4260, one end of the second roller member 4440 and the other end may be coupled to the third roller member 4460.
  • the second roller member 4440 provides power for the second wire part 4420 to rotate in one direction so that the first driving unit 4200 operates according to the rotation of the second wire part 4420. Although this moves in the second direction D2, the third roller member 4460 does not provide a separate power, and is coupled to the other end of the second wire part 4420 to allow the second wire part 4420 to move. ) can be rotated together with the rotation of
  • the sample is located in the location module 1000, the sample is fixed by the fixing unit 1400, and the photographing module 3000 is the location module 1000. ), it is moved in the moving space and a plurality of the samples can be photographed.
  • the moving module 4000 moves the first driving unit 4200 and the second driving unit 4400 that move the photographing module 3000 in the first direction D1 in the second direction D2.
  • a plurality of the samples can be captured while freely moving in the moving space through the second driving unit 4400 that provides power so that the photographing module 3000 can be moved in the second direction D2. .
  • FIG. 11 to describe an observation system according to an embodiment of the present invention.
  • FIG. 11 is a diagram illustrating an observation system of a spheroid observation device and an observation system according to an embodiment of the present invention.
  • controller 20 for remotely controlling the moving module 4000 may be coupled to the support module 2000 of the observation device 10 according to the embodiment of the present invention described above.
  • the controller 20 may individually control the first driving unit 4200 and the second driving unit 4400 as described above, and the height of the photographing unit 3000 according to the intention of the designer. You can also control zoom-in and zoom-out by adjusting .
  • the controller 20 is used based on the user's both hands in the process of observing the spheroid, but it is difficult to use the hands due to the process of injecting drugs or removing the medium using a pipette
  • a control pedal 22 extending from the controller 20 to the bottom surface of the table 40 may be further included.
  • a transmission device may be provided to display an image captured by the photographing module 3000 of the observation device 10 on the display 20, and the transmission device may be provided with the photographing module 3000 and the display. They may be electrically connected or connected by short-range wireless communication.
  • a table 40 on which the observation device 10, the display 20, and the transmission device 30 are located may be included.
  • the table 40 includes the observation device An insertion space 42 is formed so that the observation device 10 can be inserted into the insertion space 42 .
  • the photographing module 3000 when the photographing module 3000 is controlled through the controller 20, a situation in which a plurality of the samples is photographed may occur, and the transmission device divides the samples that are distinguished from each other as necessary. It can be displayed on the display 20, and a process of comparing and analyzing the captured image can be performed instead of simple transmission.
  • the photographing module 3000 is provided singly, when a plurality of samples need to be photographed or compared, a plurality of the photographing modules 3000 can be utilized, and accordingly, the controller 20 can be used in multiple
  • the photographing modules 3000 may be individually controlled, and the transmitting device compares and analyzes images captured by the plurality of photographing modules 3000 to determine or transmits the images to the display 2000 while different photographing modules.
  • the image of the sample captured in step 3000 may be divided and transmitted to the display 20 .

Abstract

Dans un dispositif d'observation et un système d'observation de sphéroïde selon la présente invention, de multiples échantillons sphéroïdes sont positionnés afin de permettre l'observation des multiples échantillons. La présente invention concerne un dispositif d'observation et un système d'observation de sphéroïde, le dispositif d'observation de sphéroïde comprenant : un module de positionnement dans lequel les échantillons sont positionnés et qui fixe les positions des échantillons ; un module de support, sur la partie supérieure duquel est positionné le module de positionnement et qui supporte les coins du module de positionnement de telle sorte qu'un espace de déplacement soit formé sous le module de positionnement ; un module de photographie qui se déplace dans l'espace de déplacement et photographie les échantillons, le module de photographie photographiant les multiples échantillons tout en se déplaçant dans un espace présentant une largeur correspondant au module de positionnement ; et un module de déplacement permettant de fournir de l'énergie au module de photographie de telle sorte que le module de photographie soit mobile à l'intérieur de l'espace de déplacement, dans l'espace de déplacement.
PCT/KR2022/019156 2021-11-30 2022-11-30 Dispositif d'observation et système d'observation de sphéroïde WO2023101386A1 (fr)

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KR10-2021-0168522 2021-11-30
KR1020210168522A KR102623341B1 (ko) 2021-11-30 2021-11-30 스페로이드 관찰장치 및 관찰 시스템

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10300676A (ja) * 1997-04-23 1998-11-13 Sumitomo Chem Co Ltd 微細欠陥検査装置
JP2008079503A (ja) * 2006-09-25 2008-04-10 Bio Frontier Screening:Kk 被験物質の評価装置
KR20120035790A (ko) * 2010-10-06 2012-04-16 엘아이지에이디피 주식회사 기판검사장치
JP6181871B2 (ja) * 2014-06-17 2017-08-16 ヤマハ発動機株式会社 対象物の移動装置
US20200326525A1 (en) * 2017-03-10 2020-10-15 Yamaha Hatsudoki Kabushiki Kaisha Imaging system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10300676A (ja) * 1997-04-23 1998-11-13 Sumitomo Chem Co Ltd 微細欠陥検査装置
JP2008079503A (ja) * 2006-09-25 2008-04-10 Bio Frontier Screening:Kk 被験物質の評価装置
KR20120035790A (ko) * 2010-10-06 2012-04-16 엘아이지에이디피 주식회사 기판검사장치
JP6181871B2 (ja) * 2014-06-17 2017-08-16 ヤマハ発動機株式会社 対象物の移動装置
US20200326525A1 (en) * 2017-03-10 2020-10-15 Yamaha Hatsudoki Kabushiki Kaisha Imaging system

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KR102623341B1 (ko) 2024-01-11

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