WO2023100224A1 - 光機械センサ、光機械センサシステムおよび光機械センサの製造方法 - Google Patents

光機械センサ、光機械センサシステムおよび光機械センサの製造方法 Download PDF

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WO2023100224A1
WO2023100224A1 PCT/JP2021/043799 JP2021043799W WO2023100224A1 WO 2023100224 A1 WO2023100224 A1 WO 2023100224A1 JP 2021043799 W JP2021043799 W JP 2021043799W WO 2023100224 A1 WO2023100224 A1 WO 2023100224A1
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mechanical
opto
mechanical sensor
vibrator
vibration
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PCT/JP2021/043799
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English (en)
French (fr)
Japanese (ja)
Inventor
元紀 浅野
洸児 酒井
陸 高橋
浩司 山口
創 岡本
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日本電信電話株式会社
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Priority to PCT/JP2021/043799 priority Critical patent/WO2023100224A1/ja
Priority to JP2023564283A priority patent/JPWO2023100224A1/ja
Publication of WO2023100224A1 publication Critical patent/WO2023100224A1/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings

Definitions

  • the present invention relates to an optomechanical sensor having a mechanical oscillator, an optomechanical sensor system, and a method for manufacturing an optomechanical sensor.
  • the opto-mechanical sensor uses light to read changes in the vibration characteristics of the mechanical oscillator caused by external stimuli or attachments.
  • an opto-mechanical sensor that reads changes in vibration characteristics using an optical resonator integrated with a mechanical vibrator exhibits high vibration detection sensitivity due to the optical confinement effect (Non-Patent Documents 1 and 2).
  • an opto-mechanical sensor comprises a plurality of connected mechanical oscillators, one mechanical oscillator among the plurality of mechanical oscillators forming an optical resonator structure. and the one mechanical vibrator resonates with the other mechanical vibrator.
  • a method for manufacturing an opto-mechanical sensor is a method for manufacturing an opto-mechanical sensor in which one mechanical vibrator and the other mechanical vibrator out of a plurality of connected mechanical vibrators resonate, A first step of heating a predetermined portion, and a second step of pulling two portions of the fiber in opposite directions in the axial direction of the fiber to form a constricted portion in the fiber, The first step and the second step are repeated to form a plurality of the constricted portions, and one of the fiber portions sandwiched between adjacent constricted portions is used as the one mechanical vibrator. , the other fiber portion is the other mechanical vibrator.
  • an optomechanical sensor it is possible to provide an optomechanical sensor, an optomechanical sensor system, and a method for manufacturing an optomechanical sensor with good detection sensitivity.
  • FIG. 1 is a schematic diagram showing the configuration of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 2 is a schematic diagram showing the configuration of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 3 is a diagram for explaining the action of the opto-mechanical sensor according to the second embodiment of the present invention.
  • FIG. 4 is a schematic diagram showing the configuration of the opto-mechanical sensor system according to the first embodiment of the present invention.
  • FIG. 5 is a diagram for explaining the configuration of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 6 is a diagram for explaining the manufacturing method of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 1 is a schematic diagram showing the configuration of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 2 is a schematic diagram showing the configuration of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 3 is a diagram for explaining the action of
  • FIG. 7 is a diagram for explaining the action of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 8 is a diagram for explaining the effects of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 9 is a diagram for explaining the effects of the opto-mechanical sensor according to the first embodiment of the present invention.
  • FIG. 10 is a schematic diagram showing the configuration of the opto-mechanical sensor system according to the second embodiment of the present invention.
  • FIG. 11 is a diagram for explaining the action of the opto-mechanical sensor according to the second embodiment of the present invention.
  • FIG. 12 is a schematic diagram showing the configuration of an opto-mechanical sensor system according to a third embodiment of the present invention.
  • FIG. 13 is a schematic diagram showing the configuration of an opto-mechanical sensor system according to a fourth embodiment of the present invention.
  • the opto-mechanical sensor 10 includes a receiver 13 composed of a mechanical oscillator 11 and a detector 14 composed of a plurality of mechanical oscillators 11 (mechanical oscillator group). .
  • dotted lines indicate coupling between the mechanical vibrators 11 .
  • the receiving unit 13 and the detecting unit 14 are connected via the coupling unit 15 .
  • the mechanical vibrator 11 of the receiving section 13 and the mechanical vibrator 11 of the detecting section 14 are connected.
  • the detection unit 14 may be composed of a single mechanical vibrator 11 .
  • the mechanical oscillator 11 has a vibration mode and has an optical resonator structure.
  • a plurality of mechanical oscillators 11 have vibration modes, and the vibration modes change in response to the external stimulus 2 or attached matter.
  • the receiving unit 13 and the detecting unit 14 resonate via the coupling unit 15 and have a coupled vibration mode.
  • the vibration characteristics of the receiver 13 change via the coupled vibration mode due to the vibration characteristic changes (changes in vibration frequency and line width) obtained by the detector 14 .
  • the optical resonance mode due to the optical resonator structure of the receiver 13 changes.
  • this change in the optical resonance mode can be detected (read out) by coupling light incident on the receiver 13 from the outside to the optical resonance mode (arrow 3 in the figure).
  • the mechanical oscillator 11 of the receiver 13 has a configuration of an optical resonator, and the receiver 13 detects (reads out) the mechanical vibration by amplifying the signal with the resonance of light through opto-mechanical coupling with the optical resonator. can be done.
  • the opto-mechanical sensor 10 achieves measurement sensitivity that enables observation of thermal fluctuations in the vibration mode through opto-mechanical conversion in the receiving unit 13, and detects external stimuli 2 or attachments from changes in vibration characteristics excited by the thermal fluctuations. information can be obtained.
  • the conventional opto-mechanical sensor since the conventional opto-mechanical sensor has a structure in which the detection part and the receiving part are integrated, when the measurement target is a liquid, the entire opto-mechanical sensor is immersed, resulting in a decrease in sensing sensitivity.
  • the detection part and the reception part are separated, when the object to be measured is a liquid, the detection part can be immersed, and the reception part is not immersed. can be measured by
  • a connecting bottle structure made of a cylindrical base material is used as a connecting structure between the mechanical vibrator of the receiving unit 13 and the mechanical vibrator of the detecting unit 14.
  • a configuration in which a single bottle structure of the receiving section 13 and a plurality of bottle structures of the detecting section 14 are connected in series is shown.
  • the optical resonance mode 16 in the cylindrical bottle structure of the receiving part 13 is used to enable vibration measurement by cavity-enhanced opto-mechanical conversion.
  • the bottle structure of the receiving unit 13 and the plurality of bottle structures of the detecting unit 14 have a vibration mode in which they are coupled. Via the vibration mode, the vibration frequency and line width of the bottle structure of the receiver 13 change.
  • the change in the optical resonance mode 16 due to the optical resonator structure accompanying the change in the vibration characteristics of the bottle structure of the receiver 13 is detected by coupling the light incident on the bottle structure of the receiver 13 from the outside to the optical resonance mode 16. (read) (arrow 3 in the figure).
  • the optical characteristics of the receiving section 13 are completely separated from those of the detecting section 14, so that it is possible to prevent a decrease in detection sensitivity due to changes in the optical characteristics of the detecting section 14.
  • the receiver 13 by forming the receiver 13 into a composite structure of an optical resonator and a mechanical oscillator, it is possible to prevent deterioration of detection sensitivity due to degradation of the optical Q value of the optical resonator.
  • the bottle structure with the lower vibration frequency is used as the receiver 13 and the bottle structure with the higher vibration frequency is used as the detector 14 .
  • Other configurations are the same as those of the first embodiment.
  • Opto-mechanical sensors utilize exceptional points 17 to measure changes in vibration characteristics (W. Chen et al., "Exceptional points enhance sensing in an optical microcavity", Nature 548, 192 (2017)).
  • the vibration frequency change and the increase in the damping rate accompanying the insertion of the detection section 14 the external stimulus 2_1, 2_2 or the detection sensitivity of the adhering matter can be controlled.
  • the detection sensitivity can be improved by adjusting the coupling state to the exception point 17 where both the difference in vibration frequency and the difference in damping rate between the two mechanical vibrators are completely zero.
  • Equation (1) The dynamics of the coupled oscillator is expressed by Equation (1) as a matrix equation in the frequency domain obtained by Fourier transforming the equation of motion.
  • ⁇ is a variable in the frequency domain
  • ⁇ i and ⁇ i are the vibration frequency and damping factor (resonance line width) of mode i, respectively, go is the coupling coefficient of the oscillator
  • F is the external force vector.
  • This matrix has two complex eigenvalues, the real part of which corresponds to the frequency of the coupled mode and the imaginary part to the linewidth of the coupled mode.
  • Exceptional point 17 is defined as the point where the value of ⁇ becomes zero, that is, the two coupling modes are degenerate in terms of frequency and linewidth.
  • the oscillation frequency adjusted to the exceptional point 17 is again frequency-split by a further external stimulus 2_2, for example, by a change in the state (viscosity, density, temperature, etc.) of the target medium or adsorption of chemical species. occur.
  • the frequency of the coupling oscillator changes nonlinearly and sharply with respect to changes in external parameters (arrow 18 in the figure).
  • the sensitivity of at least one of the receiver 13 and the detector 14 to the external stimulus 2_2 can be improved.
  • the SN ratio can be effectively improved by optical amplification in the mechanical vibration mode, and the detection sensitivity of the vibration characteristic change in the coupling mode can be improved.
  • the opto-mechanical sensor system 20 includes an opto-mechanical sensor 10, a laser 21, a tapered fiber 22, and a photodetector 23, as shown in FIG.
  • the opto-mechanical sensor 10, as shown in FIG. 5, has a structure in which two bottle structures are connected, and each bottle structure is made of silica optical fiber with a diameter of 125 ⁇ m.
  • One of the two bottle structures serves as the receiving section 13 and the other serves as the detecting section 14 .
  • a constricted portion (recess) of the coupling portion 15 is formed between the bottle structure of the receiving portion 13 and the bottle structure of the detecting portion 14 .
  • the diameter D1 of the bottle structure of the receiver 13 and the detector 14 is 125 ⁇ m
  • the diameter D2 of the constricted portion is 115 ⁇ m
  • the depth d of the constricted portion is 5 ⁇ m.
  • the opto-mechanical sensor 10 is produced by heating and pulling the silica glass fiber 24, as shown in FIG.
  • the silica glass fiber 24 is held at two predetermined positions.
  • a predetermined portion 24_1 of the silica glass fiber 24 is heated.
  • a portion 24_2 different from the portion 24_1 is heated and pulled (pulling operation) to form a constricted portion (recess) 25 in the heated portion (S3-S4).
  • a plurality of constrictions (recesses) 25 are formed in the silica glass fiber 24).
  • a structure in which a plurality of bottle structures are connected by constricted portions (concave portions) 25, that is, the optomechanical sensor 10 is produced (S5).
  • silica glass fiber as the material of the opto-mechanical sensor is shown, but other glass fibers may be used as long as they are made of a material that can be stretched by heating or pulling.
  • the tapered fiber 22 is a tapered fiber and is bridged and fixed to the bottle structure of the receiving section 13 .
  • FIG. 7 shows a schematic diagram 201 and a schematic cross-sectional diagram 202 of a portion where the tapered fiber 22 is bridged and fixed.
  • the tapered fiber 22 is tightly fixed to the surface of the bottle structure of the receiver 13 using a jig or the like (not shown).
  • the direction of the tapered fiber (propagation direction of the laser light) and the axial direction of the bottle structure are not limited, but the traveling direction of the laser light and the rotating direction of the whispering gallery mode are matched. Therefore, it is desirable that the direction of the tapered fiber and the axial direction of the bottle structure are orthogonal.
  • the laser 21 emits laser light for detection.
  • the laser light propagates through the tapered fiber 22 , generates a near-field 26 in the region where the tapered fiber 22 and the bottle structure of the receiver 13 contact, couples near-field optically, and is received by the photodetector 23 .
  • the laser light is propagated to the area where the tapered fiber 22 and the bottle structure of the receiver 13 are in contact, near-field light (evanescent light) is emitted from the near-field (evanescent field) 26, and the optical resonance of the receiver 13 Due to the vessel structure, the light circulates through total reflection and resonates in the optical resonance mode 16 .
  • near-field light evanescent light
  • evanescent field evanescent field
  • the two bottle structures in the opto-mechanical sensor 10 are held in the atmosphere, and laser light is propagated through the tapered fiber 22 and received by the photodetector 23 .
  • the laser light is coupled to the optical resonance mode of the receiver 13, and the mechanical vibration spectrum is measured through opto-mechanical coupling.
  • the bottle structure exhibiting the high-frequency mechanical vibration spectrum is assumed to be the receiving section 13
  • the bottle structure exhibiting the low-frequency mechanical vibration spectrum is assumed to be the detecting section .
  • the measured mechanical vibration spectrum has a peak due to the mechanical vibration of the receiving section 13 and a peak due to the mechanical vibration of the detecting section 14.
  • the detection unit 14 is inserted into water by 0.1 mm, and changes in the vibration characteristics of the bottle structure of the detection unit 14 are detected (read) from the mechanical vibration spectrum observed by the photodetector 23 .
  • Figures 8 and 9 show changes in the vibration frequency and the resonance line width with respect to the insertion depth of the detection unit 14.
  • the black triangle solid line indicates the vibration frequency and the resonance line width at the peak due to the mechanical vibration of the receiving unit 13
  • the black circle solid line indicates the vibration frequency and the resonance line width at the peak due to the mechanical vibration of the detection unit 14.
  • the vibration frequency of the reception unit 13 remains constant, while the vibration frequency of the detection unit 14 shifts to the low frequency side.
  • the resonance line width of the reception unit 13 remains constant, while the resonance line width of the detection unit 14 increases.
  • the receiving part and the detecting part are separated, the receiving part is held in the atmosphere and the detecting part is immersed (inserted) in the target medium. By doing so, it is possible to detect the difference (change) in vibration characteristics due to thermal fluctuation (Brownian motion) or the like between the atmosphere and the target medium.
  • the bottle structure exhibiting a high-frequency mechanical vibration spectrum may be used as the detection section, and the bottle structure exhibiting a low-frequency mechanical vibration spectrum may be used as the reception section.
  • the density and viscosity of the target medium 1 are detected by keeping the receiving part in the atmosphere and inserting the detecting part into the target medium 1 (gas, liquid, solid).
  • a change in the vibrational frequency and linewidth of the detector as a function of can be sensed (read out) by the opto-mechanical conversion of the receiver.
  • An opto-mechanical sensor system 30 includes an opto-mechanical sensor 10, a laser 21, a tapered fiber 22, a photodetector 23, and a variable optical attenuator 31, as shown in FIG.
  • the opto-mechanical sensor system 30 has a variable optical attenuator 31 on the incident side of the tapered fiber 22 , and the laser light emitted from the laser 21 propagates through the tapered fiber 22 via the variable optical attenuator 31 .
  • the vibration frequency of the mechanical oscillator decreases in the target medium 1 (for example, water).
  • the bottle structure with the higher vibration frequency is defined as the detection unit 14 .
  • Other configurations are the same as those of the first embodiment.
  • the laser light When the laser light is incident on the tapered fiber 22 and propagated, by adjusting the laser frequency to be equal to or higher than the resonance frequency of the optical resonator, the laser light is used as pump light to obtain a vibration amplification effect through parametric opto-mechanical coupling. can be done.
  • variable optical attenuator 31 is placed in front of the tapered fiber 22 to adjust the intensity of the laser light.
  • oscillation may be performed.
  • FIG. 11 shows a typical vibration frequency change (dotted line 32_1) in the receiving section 13 and a typical vibration frequency change (dotted line 32_2) in the detecting section 14 when the detecting section 14 is inserted into water.
  • the vibration frequency change of the receiving unit 13 and the detection unit 14 is shifted, and the vibration frequency change including the exceptional point 17 is obtained (in the figure , solid line 33).
  • the frequency and damping coefficient of each mechanical oscillator can be adjusted.
  • the sensitivity for detecting external stimuli or attachments can be improved.
  • the opto-mechanical sensor and its system according to the present embodiment by using parametric opto-mechanical coupling by intensity modulation or frequency control of light incident on the receiving part, it is possible to amplify and oscillate vibration by light, Sensitivity to vibration changes can be improved.
  • An opto-mechanical sensor system 40 includes an opto-mechanical sensor 10, a laser 21, a tapered fiber 22, a photodetector 23, and a movable stage 41, as shown in FIG.
  • a movable stage (three-dimensional positioner) 41 is mounted on the receiving section 13 of the opto-mechanical sensor 10 .
  • the opto-mechanical sensor 10 is swept three-dimensionally.
  • a macro heater 42 may be provided.
  • Other configurations are the same as those of the first embodiment.
  • a measurement using the opto-mechanical sensor system 30 according to the present embodiment will be described with a case where the target medium 1 is a gelled solution as an example.
  • the gelling solution is, for example, a chemically crosslinked gel solution obtained by chemically crosslinking various monomers/polymers, or a physically crosslinked gel solution obtained by physical interaction between various polymers.
  • the detection unit 14 is immersed in the gelling solution while detecting the coupling vibration characteristics of the mechanical oscillator of the opto-mechanical sensor 10 with laser light.
  • the vibration mode changes due to the change in mass and viscoelasticity around the detection unit 14 .
  • the gelation can be promoted by applying an appropriate initiator 43, heat from the macro heater 42, light stimulation from another light source, or the like to the gelling solution.
  • the detector 14 detects this change in vibration mode, the light output signal from the tapered fiber 22 bridged to the receiver 13 vibrates according to gelation. Changes in characteristics can be detected.
  • the mechanical vibrator of the opto-mechanical sensor 10 has different resonant frequencies depending on the shape of the bottle, such as the diameter of the bottle. Therefore, by providing a plurality of mechanical vibrators having different shapes and different resonance frequencies in the detection unit 14, the resonance frequency can be changed and the frequency dependence can be measured. Dynamic viscoelasticity of the gelled solution can be obtained from this frequency dependence.
  • the spatial distribution of gelation can be measured by driving the movable stage 41 and sweeping the opto-mechanical sensor 10 in three dimensions.
  • the opto-mechanical sensor and its system it is possible to measure the spatial distribution of gelation and the like in a mixed solution in which the viscosity is distributed, such as a gelling solution.
  • the dynamic viscoelasticity of a medium such as a gelled solution can be obtained using the opto-mechanical sensor system according to the first or second embodiment.
  • the surface of the mechanical vibrator of the detection unit 14 is chemically modified with protein antibodies 51 .
  • Other configurations are the same as in the first example.
  • Protein 4_1 is, for example, immune system cytokines and growth factors produced by cells, and scaffolding proteins expressed on the cell surface. Specifically, they are interleukin, nerve growth factor, laminin, and the like, respectively.
  • the protein can be discriminated because the vibration change differs depending on the adsorption of different proteins. For example, if the relationship between the type of protein and the vibrational change is acquired in advance, the type of protein can be determined from the vibrational change.
  • a fluorescence microscope 52 can be used to measure the relationship between the protein adsorption amount and the vibration change.
  • the surface of the mechanical oscillator of the detection unit 14 is chemically modified with a predetermined type of protein 4_1 that has been previously labeled with a fluorescent label 4_2.
  • the relationship between the protein adsorption amount and the vibration change can be measured. If the relationship between the protein adsorption amount and the vibrational change is obtained in advance, the protein adsorption amount can be measured from the vibrational change.
  • the opto-mechanical sensor and its system it is possible to detect specific chemical species (such as proteins), and to measure the type and adsorption amount of the chemical species.
  • the detection sensitivity can be improved by applying the configuration of the opto-mechanical sensor system according to the present embodiment to the configuration of the opto-mechanical sensor system according to the second embodiment.
  • the opto-mechanical sensor system according to this embodiment is equipped with a movable stage as in the third embodiment, the spatial distribution of chemical species can be measured.
  • the surface of the mechanical oscillator of the detection unit is chemically modified with a magnetostrictive material.
  • Other configurations are the same as those of the first embodiment.
  • Magnetostrictive materials are magnetized by the application of a magnetic field, causing distortion (change in shape). Therefore, in the mechanical vibrator of the detection unit chemically modified with a magnetostrictive material, the vibration characteristics change depending on the external magnetic field. As a result, this vibration characteristic change is photodetected in the same manner as in the first embodiment, and the external magnetic field is measured.
  • a magnetic field can be measured.
  • the detection sensitivity can be improved.
  • the opto-mechanical sensor system according to this embodiment is equipped with a movable stage as in the third embodiment, the spatial distribution of the magnetic field can be measured.
  • the surface of the mechanical oscillator of the detection unit is chemically modified with a thermostrictive material.
  • Other configurations are the same as those of the first embodiment.
  • the temperature can be measured.
  • the detection sensitivity can be improved.
  • the opto-mechanical sensor system according to this embodiment is equipped with a movable stage as in the third embodiment, the spatial distribution of temperature can be measured.
  • the opto-mechanical sensor system uses the 1.5 ⁇ m wavelength band for laser light.
  • the wavelength of the laser light is not limited to this, and may be appropriately selected depending on the material of the optical fiber (tapered fiber, etc.).
  • the present invention is not limited to this, and an optical element such as a prism may be used. Any optical element that generates a near field (evanescent field) may be used.
  • the laser beam may be incident on an optical element such as a prism in an optical system using optical fibers, lenses, mirrors, or the like.
  • the present invention relates to a sensor, and can be applied to the measurement of media such as water and solutions, chemical species, magnetic fields, temperature and other external environments.

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  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PCT/JP2021/043799 2021-11-30 2021-11-30 光機械センサ、光機械センサシステムおよび光機械センサの製造方法 WO2023100224A1 (ja)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008500579A (ja) * 2004-05-27 2008-01-10 スリーエム イノベイティブ プロパティズ カンパニー 誘電体マイクロキャビティセンサ
JP2008065186A (ja) * 2006-09-08 2008-03-21 Oki Electric Ind Co Ltd 光共振器及び光共振器アレイ
JP2009053031A (ja) * 2007-08-27 2009-03-12 Canon Inc 音波センサ、音波センサアレイ及び超音波撮像装置
JP2010511871A (ja) * 2006-12-01 2010-04-15 スリーエム イノベイティブ プロパティズ カンパニー 光検出装置及び方法
JP2016143739A (ja) * 2015-01-30 2016-08-08 株式会社フジクラ 光パワーモニタ装置、光パワーモニタ方法、およびファイバレーザ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008500579A (ja) * 2004-05-27 2008-01-10 スリーエム イノベイティブ プロパティズ カンパニー 誘電体マイクロキャビティセンサ
JP2008065186A (ja) * 2006-09-08 2008-03-21 Oki Electric Ind Co Ltd 光共振器及び光共振器アレイ
JP2010511871A (ja) * 2006-12-01 2010-04-15 スリーエム イノベイティブ プロパティズ カンパニー 光検出装置及び方法
JP2009053031A (ja) * 2007-08-27 2009-03-12 Canon Inc 音波センサ、音波センサアレイ及び超音波撮像装置
JP2016143739A (ja) * 2015-01-30 2016-08-08 株式会社フジクラ 光パワーモニタ装置、光パワーモニタ方法、およびファイバレーザ装置

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